WO2006042791A1 - Actionneur piezoelectrique - Google Patents

Actionneur piezoelectrique Download PDF

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Publication number
WO2006042791A1
WO2006042791A1 PCT/EP2005/055072 EP2005055072W WO2006042791A1 WO 2006042791 A1 WO2006042791 A1 WO 2006042791A1 EP 2005055072 W EP2005055072 W EP 2005055072W WO 2006042791 A1 WO2006042791 A1 WO 2006042791A1
Authority
WO
WIPO (PCT)
Prior art keywords
layers
piezoelectric actuator
relief
piezoelectric
relief layers
Prior art date
Application number
PCT/EP2005/055072
Other languages
German (de)
English (en)
Inventor
Bertram Sugg
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2006042791A1 publication Critical patent/WO2006042791A1/fr

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers

Definitions

  • the invention relates to a piezoelectric actuator, for example for actuating a mechanical component such as a valve or the like, according to the generic features of the main claim.
  • piezoelectric effect it is generally known that a piezoelement made of a material having a suitable crystal structure can be constructed in such a way that the piezoelectric or electrostrictive ceramics expand or contract when electric fields are applied. Because of the extremely fast and precisely controllable effect, such arrangements can be used to construct actuators, which are referred to as piezo actuators.
  • Layer thickness is in the range of about 100 microns.
  • a typical Nice method for producing such layers is in the film casting technique.
  • the individual layers are metallized and stacked on top of each other so that the piezoelectric effect finally acts between two layers with the inner electrodes of different polarity formed by the metallization.
  • an external electrical voltage is applied to the internal electrodes, a mechanical reaction of the piezoelectric element takes place which, depending on the crystal structure and the contact regions of the electrical voltage, represents a pressure or tension in a predeterminable direction.
  • a sol ⁇ cher piezoelectric actuator in which in the layer structure of the piezoelectric actuator neutral phases are present without inner electrode layer having a special shape for Verhin ⁇ tion of this error. Cracks in the area of the electrical contacting are prevented by the fact that with the special shaping of the neutral phase, an increased mechanical stress can be applied during clamping of the piezoelectric actuator perpendicular to the layer structure in the region of these neutral phases.
  • the piezoactuator described at the outset which can be used, for example, to actuate a mechanical component, is advantageously constructed with a multilayer structure of piezoelectric layers of piezoelectric or electrostrictive ceramic layers and electrodes arranged therebetween, as well as mutual lateral contacting of the electrodes.
  • ceramic layers are advantageously arranged at predetermined intervals as stress relief layers, which have an increased tendency to form cracks due to a construction and / or composition deviating from the other ceramic layers.
  • the relief layers may have a greater porosity than the other ceramic layers, which may then more easily lead to controlled cracking.
  • the relief layers can be inserted at equidistant intervals in the course of the layer construction of the piezoelectric actuator in a simple manner, wherein the relief layers can be uniformly distributed in the course of the layer construction of the piezoelectric actuator.
  • the relief layers may also have a larger distance than the intermediate region between the relief layers in the middle in the course of the layer structure of the piezoelectric actuator towards the head and / or foot end. This is advantageous because cracks first occur in the middle during operation.
  • the relief layers have a rising distance in the course of the layer construction of the piezoelectric actuator from the middle to the top and / or bottom end.
  • FIG. 1 shows a section through a piezoactuator with a multilayer structure of layers of piezoceramics and internal electrodes as well as relief layers arranged at equidistant intervals
  • FIG. 2 shows a section through an embodiment modified with respect to FIG. ßeren distances to the top and bottom of the piezo actuator and
  • FIG. 3 shows a section through a further embodiment, which is modified with respect to FIG. 1, with the distance between the relief layers, which in each case continuously increases with respect to the head and foot regions of the piezoactuator.
  • FIG. 1 shows a piezoactuator 1 which is constructed in a manner known per se from piezo foils 2 of a piezoelectric material having a suitable crystal structure, so that by utilizing the so-called piezoelectric effect when an electrical voltage is applied via external electrodes attached to external surfaces of the piezoelectric actuator 1 Electrodes 3 and 4, a mechanical reaction of the Piezo ⁇ actuator 1 in the direction of the layer structure takes place.
  • the piezo foils 2 and the internal electrodes 3 and 4 are distinguished in the upper part of the piezoactuator 1, but they extend over the entire layer structure, in this case, vertically.
  • ceramic layers are arranged as relief layers 5 at predetermined intervals, the structure differing from the other ceramic layers or piezo foils 2 and / or another material composition, eg with have a greater porosity, an increased tendency to cracking.
  • These relief layers 5 need not necessarily be piezoelectrically active, since the total number n ent of these relief layers 5 is small in comparison to the total number n ges of the layers.
  • the sequence of the release layers 5 can, for example, be regular, wherein in particular an equidistant division is advantageous.
  • N (n ges -n ent ) / (n ent -l) inactive layers.
  • the relief layers 5 can also have a greater distance than the intermediate region between the relief layers in the middle in the course of the layer structure of the piezoactuator 1 towards the head and / or foot end.
  • N (n ges -n ent ) / (n ent + 1) inactive relief layers 5.
  • the relief layers 5 may have a variable spacing according to FIG. 3 in the course of the layer construction of the piezoactuator 1 from the middle to the top and / or bottom end. According to FIG. 3, increasing layer sequences of the relief layers 5 are realized from the center to the top and bottom of the piezoelectric actuator 1. In individual cases, this may also be a reverse order or a one-sided consequence only to the head or foot towards beneficial.
  • the invention is independent of the geometry of the internal electrodes 3 and 4, eg interdigital, plate-through-type, corner design etc., or of the material of the internal electrodes 3 and 4, eg AgPd, Cu etc.

Landscapes

  • Fuel-Injection Apparatus (AREA)
  • Micromachines (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'invention concerne un actionneur piézoélectrique servant, par exemple, à actionner un composant mécanique et présentant une structure multicouche de strates piézoélectriques (2) constituée de couches céramiques piézoélectriques ou électrostrictives et d'électrodes internes intercalées (3, 4), la mise en contact des électrodes internes (3, 4) se faisant alternativement sur les côtés. La structure en couches comprend également des couches céramiques servant de couches de décharge (5), placées à des distances prédéfinies et présentant une tendance accrue au fendillement en raison d'une structure et/ou d'une composition de matière différentes des autres couches céramiques (2).
PCT/EP2005/055072 2004-10-19 2005-10-06 Actionneur piezoelectrique WO2006042791A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004050803.8 2004-10-19
DE102004050803A DE102004050803A1 (de) 2004-10-19 2004-10-19 Piezoaktor

Publications (1)

Publication Number Publication Date
WO2006042791A1 true WO2006042791A1 (fr) 2006-04-27

Family

ID=35445946

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/055072 WO2006042791A1 (fr) 2004-10-19 2005-10-06 Actionneur piezoelectrique

Country Status (2)

Country Link
DE (1) DE102004050803A1 (fr)
WO (1) WO2006042791A1 (fr)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1811584A2 (fr) * 2006-01-23 2007-07-25 Ngk Insulators, Ltd. Elément piézo-électrique/électrostrictive laminé
EP1978567A1 (fr) * 2007-02-19 2008-10-08 Siemens Aktiengesellschaft Actionneur multicouche en piézocéramique et son procédé de fabrication
EP1978568A1 (fr) * 2007-02-19 2008-10-08 Siemens Aktiengesellschaft Actionneur multicouche piézocéramique et procédé de fabrication de celui-ci
EP1978569A1 (fr) * 2007-02-19 2008-10-08 Siemens Aktiengesellschaft Actionneur multicouche en piézocéramique et son procédé de fabrication
EP2099081A1 (fr) * 2006-12-15 2009-09-09 Kyocera Corporation Élément piézo-électrique laminé, dispositif d'injection doté de l'élément piézo-électrique laminé et système d'injection de carburant
US7598660B2 (en) * 2005-02-15 2009-10-06 Murata Manufacturing Co., Ltd. Monolithic piezoelectric element
EP2256837A3 (fr) * 2005-06-09 2011-02-09 Epcos Ag Composant piézoélectrique à plusieurs couches
US7982373B2 (en) * 2007-05-11 2011-07-19 Epcos Ag Piezoelectric multilayer component
US8358051B2 (en) 2005-09-16 2013-01-22 Delphi Technologies Holding S.Arl Piezoelectric actuator
EP2800158A1 (fr) * 2007-08-29 2014-11-05 Kyocera Corporation Multi-couche élément piézoélectrique, et un appareil d'éjection et l'éjection de carburant système qui emploient le même
WO2022037250A1 (fr) * 2020-08-18 2022-02-24 上海隐冠半导体技术有限公司 Actionneur céramique piézoélectrique à longue course et son procédé d'usinage

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8288921B2 (en) * 2005-09-29 2012-10-16 Kyocera Corporation Multilayer piezoelectric element and injector using the same
JP5431155B2 (ja) * 2006-08-09 2014-03-05 コンチネンタル オートモーティヴ ゲゼルシャフト ミット ベシュレンクテル ハフツング 信頼性の高いセラミック多層構造のピエゾアクチュエータ
JP4933554B2 (ja) * 2006-09-28 2012-05-16 京セラ株式会社 積層型圧電素子、これを用いた噴射装置及び燃料噴射システム、並びに積層型圧電素子の製造方法
CN101563795B (zh) * 2006-10-20 2011-03-23 京瓷株式会社 压电致动器装置及其制造方法
DE102006049892A1 (de) 2006-10-23 2008-05-08 Siemens Ag Monolithischer Piezoaktor mit Übergangsbereich und Sicherheitsschicht sowie Verwendung des Piezoaktors
DE102007005341A1 (de) 2007-02-02 2008-08-07 Epcos Ag Vielschichtbauelement sowie Verfahren zur Herstellung eines Vielschichtbauelements
DE102007015446A1 (de) 2007-03-30 2008-10-02 Siemens Ag Piezoelektrisches Bauteil mit Sicherheitsschicht und Infiltrationsbarriere und Verfahren zu dessen Herstellung
DE102007015457B4 (de) * 2007-03-30 2009-07-09 Siemens Ag Piezoelektrisches Bauteil mit Sicherheitsschicht, Verfahren zu dessen Herstellung und Verwendung
JP5076733B2 (ja) 2007-08-24 2012-11-21 株式会社デンソー 積層型圧電素子
DE102010005906A1 (de) 2010-01-27 2011-07-28 Epcos Ag, 81669 Piezoelektrisches Bauelement

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0479328A2 (fr) * 1990-10-05 1992-04-08 Nec Corporation Organe d'actionnement piezoélectrique
DE10202574A1 (de) * 2001-02-15 2002-09-12 Ceramtec Ag Piezokeramischer Vielschichtaktor mit einem Übergangsbereich zwischen dem aktiven Bereich und den inaktiven Kopf- und Fußbereichen
DE10201943A1 (de) * 2001-02-15 2002-10-24 Ceramtec Ag Vielschichtaktor mit versetzt angeordneten Kontaktflächen gleich gepolter Innenelektroden für ihre Außenelektrode
DE10234787C1 (de) * 2002-06-07 2003-10-30 Pi Ceramic Gmbh Keramische Tec Verfahren zur Herstellung eines monolithischen Vielschichtaktors, monolithischer Vielschichtaktor aus einem piezokeramischen oder elektrostriktiven Material
WO2004077583A1 (fr) * 2003-02-24 2004-09-10 Epcos Ag Composant electrique multicouche et empilement de couches

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0479328A2 (fr) * 1990-10-05 1992-04-08 Nec Corporation Organe d'actionnement piezoélectrique
DE10202574A1 (de) * 2001-02-15 2002-09-12 Ceramtec Ag Piezokeramischer Vielschichtaktor mit einem Übergangsbereich zwischen dem aktiven Bereich und den inaktiven Kopf- und Fußbereichen
DE10201943A1 (de) * 2001-02-15 2002-10-24 Ceramtec Ag Vielschichtaktor mit versetzt angeordneten Kontaktflächen gleich gepolter Innenelektroden für ihre Außenelektrode
DE10234787C1 (de) * 2002-06-07 2003-10-30 Pi Ceramic Gmbh Keramische Tec Verfahren zur Herstellung eines monolithischen Vielschichtaktors, monolithischer Vielschichtaktor aus einem piezokeramischen oder elektrostriktiven Material
WO2004077583A1 (fr) * 2003-02-24 2004-09-10 Epcos Ag Composant electrique multicouche et empilement de couches

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7598660B2 (en) * 2005-02-15 2009-10-06 Murata Manufacturing Co., Ltd. Monolithic piezoelectric element
EP2256837A3 (fr) * 2005-06-09 2011-02-09 Epcos Ag Composant piézoélectrique à plusieurs couches
US9153765B2 (en) 2005-06-09 2015-10-06 Epcos Ag Piezoelectric multilayer component
EP1764844B2 (fr) † 2005-09-16 2016-06-22 Delphi Technologies, Inc. Actionneur piézo-électrique
US8358051B2 (en) 2005-09-16 2013-01-22 Delphi Technologies Holding S.Arl Piezoelectric actuator
EP1811584A2 (fr) * 2006-01-23 2007-07-25 Ngk Insulators, Ltd. Elément piézo-électrique/électrostrictive laminé
EP1811584A3 (fr) * 2006-01-23 2010-03-24 Ngk Insulators, Ltd. Elément piézo-électrique/électrostrictive laminé
EP2099081A4 (fr) * 2006-12-15 2012-12-26 Kyocera Corp Élément piézo-électrique laminé, dispositif d'injection doté de l'élément piézo-électrique laminé et système d'injection de carburant
EP2099081A1 (fr) * 2006-12-15 2009-09-09 Kyocera Corporation Élément piézo-électrique laminé, dispositif d'injection doté de l'élément piézo-électrique laminé et système d'injection de carburant
US7851974B2 (en) 2007-02-19 2010-12-14 Siemens Aktiengesellschaft Piezoceramic multilayer actuator manufactured according to particular sintering parameters and corresponding method of manufacturing
US7843114B2 (en) 2007-02-19 2010-11-30 Siemens Aktiengesellschaft Piezoceramic multilayer actuator and method of manufacturing a piezoceramic multilayer actuator
US7948150B2 (en) 2007-02-19 2011-05-24 Siemens Aktiengesellschaft Piezoceramic multilayer actuator and method of manufacturing a piezoceramic multilayer actuator
EP1978569A1 (fr) * 2007-02-19 2008-10-08 Siemens Aktiengesellschaft Actionneur multicouche en piézocéramique et son procédé de fabrication
EP1978568A1 (fr) * 2007-02-19 2008-10-08 Siemens Aktiengesellschaft Actionneur multicouche piézocéramique et procédé de fabrication de celui-ci
EP1978567A1 (fr) * 2007-02-19 2008-10-08 Siemens Aktiengesellschaft Actionneur multicouche en piézocéramique et son procédé de fabrication
US7982373B2 (en) * 2007-05-11 2011-07-19 Epcos Ag Piezoelectric multilayer component
EP2800158A1 (fr) * 2007-08-29 2014-11-05 Kyocera Corporation Multi-couche élément piézoélectrique, et un appareil d'éjection et l'éjection de carburant système qui emploient le même
WO2022037250A1 (fr) * 2020-08-18 2022-02-24 上海隐冠半导体技术有限公司 Actionneur céramique piézoélectrique à longue course et son procédé d'usinage

Also Published As

Publication number Publication date
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