WO2006025200A1 - Dispositif de détection de vibrations - Google Patents

Dispositif de détection de vibrations Download PDF

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Publication number
WO2006025200A1
WO2006025200A1 PCT/JP2005/014629 JP2005014629W WO2006025200A1 WO 2006025200 A1 WO2006025200 A1 WO 2006025200A1 JP 2005014629 W JP2005014629 W JP 2005014629W WO 2006025200 A1 WO2006025200 A1 WO 2006025200A1
Authority
WO
WIPO (PCT)
Prior art keywords
armature
vibration
induction coil
circuit unit
magnetic circuit
Prior art date
Application number
PCT/JP2005/014629
Other languages
English (en)
Japanese (ja)
Inventor
Masayoshi Sugiyama
Yoshio Imahori
Fuminobu Izawa
Isao Fushimi
Eiji Matsuyama
Original Assignee
Star Micronics Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Star Micronics Co., Ltd. filed Critical Star Micronics Co., Ltd.
Publication of WO2006025200A1 publication Critical patent/WO2006025200A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/02—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by magnetic means, e.g. reluctance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector

Definitions

  • the present invention relates to an apparatus for detecting vibration, and more particularly to a configuration capable of obtaining excellent linearity even when downsized.
  • vibration detection device vibration detection sensor
  • a piezoelectric type or electrostatic type is known.
  • Examples of the piezoelectric type include those described in Patent Document 1, and examples of the force electrostatic type include those described in Patent Document 2.
  • Patent Document 1 Japanese Patent Laid-Open No. 9 304171
  • Patent Document 2 Japanese Patent Laid-Open No. 10-9934
  • the piezoelectric vibration detection device uses a piezoelectric element, and therefore, when the device is downsized, the size of the piezoelectric element must be reduced.
  • the piezoelectric element outputs external stress as electric charges generated by the piezoelectric effect, and when this is miniaturized, the area of the piezoelectric element is reduced and the resonance frequency is increased.
  • the sensitivity will inevitably decrease.
  • an external electronic circuit charge amplifier, integrator, etc.
  • the electrostatic vibration detector has a complicated diaphragm and weight structure, and there are limits to miniaturization. Therefore, an object of the present invention is to provide a vibration detection device that can be downsized, can select a frequency band with good linearity, and high sensitivity.
  • the vibration detection device of the present invention includes a magnetic circuit unit that forms a dc magnetic field between a pair of magnetic poles that are arranged to face each other at a predetermined interval, and an induction coil that is disposed adjacent to the magnetic circuit unit. And a armature disposed between the magnetic poles and through the induction coil, and a change in signal current flowing in the induction coil due to the stagnation vibration of the armature It detects as.
  • the armature has elasticity and shape that can vibrate, and is made of a magnetic material.
  • the shape of the armature can be a thin plate structure in which stagnation vibration is likely to occur.
  • the material constituting the armature include iron, permalloy, and the like, a mixture of these materials, and a composite material.
  • the armature may be composed of a composite of these magnetic materials and a non-magnetic material.
  • the armature In a state where no vibration is applied from the outside, the armature is in a mechanical equilibrium state in a DC magnetic field (static magnetic field) between the magnetic poles constituted by the N pole and the S pole.
  • a DC magnetic field static magnetic field
  • the vibration is transmitted to the armature, and the armature stagnates and vibrates. Since the armature is in a magnetized state due to a DC magnetic field, this vibration causes an induced current to flow through the induction coil.
  • the armature vibrates using external vibration as a driving force, it is detected as an induced current flowing in the induction coil. In this way, external vibration can be extracted as an electrical signal.
  • the armature is arranged between the magnetic poles and through the induction coil, the length of the armature can be ensured even if the lateral width and height of the device are shortened. . Therefore, even if the device is downsized, it is possible to realize a structure in which the armature is easily vibrated by external vibration. In other words, it is possible to realize a vibration system that reacts even with weak vibrations with good linearity.
  • the resonance frequency of the vibration system including the armature includes the shape, thickness, material (elasticity, hardness), mass, fixing structure of the armature vibration detection device, the mass of the weight serving as the armature load, Alternatively, it can be adjusted relatively freely by combining these two or more elements. For this reason, it is possible to easily realize performance that matches the frequency of the vibration to be detected.
  • a second configuration of the vibration detection device of the present invention is a magnetic circuit unit that forms a DC magnetic field between a pair of magnetic poles arranged to face each other at a predetermined interval, and is disposed adjacent to the magnetic circuit unit.
  • An induction coil arranged between the magnetic poles and through the induction coil, one end fixed to the magnetic circuit unit, a weight attached to the other end of the armature, and the magnetic circuit
  • the unit and the induction coil are fixed inside.
  • one end of the armature is fixed directly or indirectly to the magnetic circuit unit of the vibration detection device and further to the housing (housing), and a weight is fixed to the other end of the armature. Is done.
  • the weight vibrates relative to the magnetic circuit unit and the nosing, and at that time, vibrations are generated in the armature.
  • This stagnation vibration of the armature induces an induced current in the induction coil, and this induced current force can also detect the vibration applied to the housing.
  • the second configuration is a structure for detecting relative vibration of the weight with respect to the housing
  • a sealed structure in which a vibration detection mechanism such as a armature or weight is housed in the housing can be provided. That is, a structure in which the movable part is not exposed to the outside of the apparatus can be obtained. For this reason, it is possible to increase the reliability in an inferior environment such as an environment where the temperature changes drastically, a high humidity environment, or an environment where dust or oil exists.
  • the armature can be protected by selecting the shape and material of the weight.
  • a third configuration of the vibration detecting device of the present invention is a magnetic circuit unit that forms a DC magnetic field between a pair of magnetic poles arranged to face each other at a predetermined interval, and is arranged adjacent to the magnetic circuit unit.
  • An induction coil arranged between the magnetic poles and through the induction coil, one end of which is fixed to the magnetic circuit unit, a drive pin attached to the other end of the armature, and the magnetic circuit
  • the vibration transmitted to the movable contact portion vibrates the armature via the drive pin, thereby detecting the vibration.
  • a fourth configuration of the vibration detection device of the present invention includes a magnetic circuit unit that forms a DC magnetic field between a pair of magnetic poles arranged to face each other at a predetermined interval, and the magnetic circuit unit housed inside the magnetic circuit unit.
  • the magnetic circuit unit and the induction coil are supported and fixed to the housing via the armature.
  • the magnetic circuit unit and the induction coil function as a weight of the armature.
  • the armature performs stagnation vibration with the fixed part to the housing as a fulcrum.
  • the magnetic circuit unit and the induction coil oscillate as a weight, causing the armature to stagnate and generate vibration.
  • the vibrating portion (vibration system) can be housed in the housing, the reliability of the device can be increased as in the case of the second configuration.
  • the magnetic circuit unit and the induction coil are used as weights, it is not necessary to place an independent dedicated weight. Therefore, the vibration detection sensor is lighter than the second structure described above. ⁇ ⁇ ⁇ ⁇ and further downsizing can be pursued.
  • an AC bias voltage is applied to the induction coil.
  • vibration detection sensitivity can be increased.
  • the armature vibrates, and the compliance of the armature (a physical quantity representing the softness of the elastic body) increases. As a result, the resonance frequency of the armature is lowered, and the detection sensitivity to external vibration can be increased in a band below this resonance frequency.
  • the use of the AC bias voltage is an effect of lowering the resonance frequency of the armature (resonance frequency of the vibration system), and therefore is particularly effective when the frequency of the measurement signal is lower than the resonance frequency of the vibration system. Become. Even when an AC bias voltage having a frequency other than the frequency satisfying the above condition is applied, the effect of increasing the sensitivity can be obtained.
  • the method of covering the induction coil with the AC bias voltage is to change the frequency of the AC bias voltage. By selecting, it can also be understood as a technique to bring the frequency band where high sensitivity is obtained on the sensor side closer to the vibration frequency band of the detection target.
  • the method of applying the AC bias voltage described above is advantageous in that the frequency band in which the vibration detection sensor can exhibit high sensitivity can be easily adjusted after the sensor is manufactured.
  • the vibration detection device of the present invention preferably includes a plurality of armatures, and the plurality of armatures preferably have different resonance frequencies.
  • a plurality of vibration system resonance frequencies can be set, and vibration detection sensitivity in a wide frequency range can be ensured.
  • vibration is detected by the stagnation vibration of the armature penetrating between the magnetic poles and the adjacent induction coil, so that it is possible to provide a vibration detection device with good linearity even if it is downsized. .
  • FIG. 1 is a diagram showing an outline of a vibration detection apparatus according to a first embodiment.
  • Fig. 1 (a) is a cross-sectional view seen from the side, showing the cross-sectional state taken along BB 'in Fig. 1 (b).
  • Fig. 1 (b) shows the inside of the device viewed from above with the top cover removed.
  • Figure 1 (c) is a perspective view showing the inside of the device as seen from the front (in the direction of the weight).
  • FIG. 2 is a perspective view showing an exploded state of the vibration detection apparatus shown in FIG.
  • This vibration detection device includes a housing 101 constituted by a lid 101a and a housing case 101b, an armature 102, permanent magnets 103 and 104, a magnet support member 105, an induction coil 106, a weight 107, magnet fixing members 108 and 109, Signal output terminals 110 and 111, frame 112, A terminal holding part 113 is provided.
  • the housing 101 has a structure in which a cover 101a is covered with a housing case 101b whose upper surface is open.
  • the armature 102 has a plate-like structure made of a magnetic metal, a weight 107 made of a metal material or the like is fixed to one end thereof, and the other end is integrally formed with the frame 112.
  • the weight 107 is supported by a plate-like armature 102 whose one end is integrally formed with the frame 112! Therefore, the armature 10 02 is clamped with the bending point from the frame 112 as a fulcrum, so that FIG. It can vibrate up and down in a).
  • the armature 102 and the weight 107 fixed to one end thereof function as a vibration system.
  • the material constituting the weight 107 is not limited to metal, and may be a composite material or the like.
  • the shape, material, and mass of the weight 107 are selected by (1) preventing a large impact from being applied to the armature at the time of overamplitude, and (2) considering sensitivity adjustment.
  • the permanent magnets 103 and 104 are fixed to the magnet support member 105 by the magnet fixing members 108 and 109 in a state where the different magnetic poles are opposed to each other, and constitute a magnetic circuit unit.
  • a frame 112 is fixed to the magnet support member 105, and the magnet support member 105 is fixed to the inside of the housing 101.
  • the induction coil 106 has a structure in which a conducting wire is wound around the magnet fixing members 108 and 109 in a coil shape.
  • the permanent magnets 103 and 104 and the induction coil 106 are fixed to the housing 101 using the magnet support member 105.
  • the weight 107 is indirectly fixed to the magnetic circuit unit, the induction coil 106 and the housing 101 via the armature 102 which can be held. Therefore, the stagnation vibration of the armature 102 following the vibration of the weight 107 is a relative vibration motion with respect to the magnetic circuit cut and the induction coil 106 having the permanent magnets 103 and 104 as constituent elements.
  • the housing 101 is brought into contact with a part of the outer surface of an appropriate vibration detection object, and the signal voltage generated at the signal output terminals 110 and 111 is detected.
  • the weight 107 extends in a plate shape and is supported with respect to the housing 101 by the armature 102 that can be squeezed. Therefore, when the external force is transmitted to the housing 101, the weight 107 is three-dimensional. Cannot follow the typical vibration, and the housing 101 is shown in Fig. 1 (a). Vibrates relatively downward. Since the movement of the weight 107 is restricted in the vertical direction in FIG. 1 (a), the vibration component transmitted to the housing 101 contributes to the vibration of the weight 107 in the moving direction of the weight 107. It is a component that matches
  • the vibration of the weight 107 is accompanied by the stagnation vibration of the armature 102. Since the armature 102 is magnetized by a DC magnetic field between the permanent magnets 103 and 104, when the armature 102 vibrates, the state of the magnetic field in the induction coil 106 changes accordingly, and the induction coil according to the change. An induced current flows through 106.
  • this induced current corresponds to the vibration of armature 102, and the vibration of armature is caused by the vibration applied to housing 101, the vibration transmitted from outside to this housing 101 is affected by this induced current. Can be evaluated.
  • the structure shown in FIGS. 1 and 2 can secure the length from the bending point (vibration fulcrum) of the armature 102 to the weight 107, so that the amplitude of the weight 107 can be secured. Therefore, high linearity can be obtained even when the entire apparatus is downsized.
  • the movable part can be structured not to be exposed on the surface, it can be mechanically strong.
  • deformation of armature can be prevented by selecting the shape and material of the weight.
  • the vibration detection device of the present embodiment connects one end of the armature to a movable contact portion provided on the surface of the housing, instead of the weight in the configuration of the first embodiment.
  • the vibration received by the movable contact portion is transmitted to the armature.
  • FIG. 3 is a cross-sectional view showing an outline of a vibration detection apparatus according to the second embodiment.
  • Fig. 3 (a) is a cross-sectional view seen from the side, showing the cross-sectional state taken along CC 'in Fig. 3 (b).
  • Figure 3 (b) is a top view.
  • Figure 3 (c) shows the inside of the device from the front (in the direction of the movable contact). It is a perspective view which shows a mode that the part was seen.
  • FIG. 4 is a perspective view showing an exploded state of the vibration detecting device shown in FIG.
  • This vibration detection device includes a housing 301 constituted by a lid 301a and a housing case 301b, an armature 302, permanent magnets 303 and 304, a magnet support member 305, an induction coil 306, magnet fixing members 308 and 309, signal output Terminals 310 and 311, a frame 312, a terminal holding part 313, a drive pin 322, a movable contact part 321 and an overamplitude prevention part 323 are provided.
  • the permanent magnets 303 and 304 are fixed to the magnet support member 305 by the magnet fixing members 308 and 309 in a state where the different magnetic poles are arranged to face each other.
  • a frame 312 is fixed to the magnet support member 305, and the magnet support member 305 is fixed in the housing 301 by this structure.
  • the induction coil 306 has a structure in which a conducting wire is wound around the magnet fixing members 308 and 309 in a coil shape.
  • One end of the armature 302 is integrated with the frame 312, and the other end is connected to the movable contact portion 321 via a drive pin 322.
  • an over-amplitude preventing portion 323 protruding in an edge shape is formed at the opening of the housing 301 where the movable contact portion 321 is disposed. The presence of the excessive amplitude prevention unit 323 limits the movable range of the movable contact unit 321 and prevents the armature 302 from having an amplitude exceeding a set limit.
  • the vibration detection device of the present embodiment fixes a permanent magnet and an induction coil to a housing via an armature, and causes the permanent magnet and the induction coil to function as a weight (load mass).
  • the present invention relates to a configuration for rubbing and vibrating an armature.
  • FIG. 5 is a cross-sectional view showing an outline of the vibration detection device of the present embodiment.
  • Figure 5 (a) is a side view It is a cross-sectional view seen from the direction, showing the state of the cross section cut along DD ′ in FIG. 5 (b).
  • FIG. 5 (b) is a top view showing a state in which the inside of the housing is visible with the lid of the housing removed.
  • This vibration detection device includes a housing 501, a armature 502, permanent magnets 503 and 504, a magnet support member 505, an induction coil 506, a signal output terminal 510, a frame 512, a terminal including a lid 501a and a housing case 501b. Has holding part 513 and connection wiring 514
  • the permanent magnets 503 and 504 and the induction coin 506 are fixed to the frame 512, and the frame 512 is integrated with the armature 502.
  • the other end of the armature 502 is fixed to the housing 501. That is, the frame 512 is fixed to the housing 501 via the armature 502. That is, in this structure, a frame 512 that functions as a weight is integrated with one end of the armature 502, and the other end of the armature 502 is fixed to the housing 501.
  • the shape of the fixing portion of the armature 502 to the housing 501 is preferably determined in consideration of supporting the masses of the permanent magnets 504 and 504 and the induction coil 506 and the like.
  • the other end integrated with the frame 512 vibrates using the end portion of the armature 502 fixed to the housing 501 as a fulcrum. During this vibration, the armature 502 causes a stagnation vibration.
  • the stagnation vibration of the armature 502 induces an induction current in the induction coil 506, and the induction current is taken out from the signal output terminal 510 via the connection wiring 514. By evaluating this induced current, vibration transmitted to the housing 501 can be detected as an electrical signal.
  • this structure also includes another signal output terminal paired with the signal output terminal 510, and a connection wiring from the induction coil 506 to this signal output terminal.
  • the structure shown in Fig. 5 can realize a structure in which the vibration detection part including the armature is sealed in the housing, so that the reliability in use in an environment with a high humidity and a lot of dust is high. Can do.
  • the surface of the device can be covered with a housing, a vibration detection device that is less likely to fail during use or handling can be obtained.
  • FIG. 6 is a block diagram illustrating an example of a vibration detection system.
  • the vibration detection system shown in FIG. 6 includes a vibration detection sensor 601, an oscillation circuit 602, a noise resistor 603, a low-pass filter (LPF) 604, and an output terminal 605.
  • LPF low-pass filter
  • the vibration detection sensor 601 is a vibration detection device using the present invention, and has the configuration described in the first to third embodiments, for example.
  • the oscillation circuit 602 has a function of applying an AC bias voltage to the induction coil of the vibration detection sensor 601.
  • the oscillation circuit 602 outputs a frequency that is higher than the frequency of the vibration detected by the vibration detection sensor 601.
  • the bias resistor 603 is a resistor for impedance matching between the vibration detection sensor 601 and the oscillation circuit 602.
  • the low-pass filter 604 has a function of blocking the AC noise signal output from the oscillation circuit 602 so as not to appear in the output.
  • an induction current flows through the induction coil in the vibration detection sensor 601 and appears at the output terminal 605 via the low-pass filter 604.
  • the output signal appearing at the output terminal 605 is amplified as appropriate by an amplification amplifier (not shown) and used as a vibration detection signal.
  • a frequency force higher than the frequency band of vibration to be detected and the resonance frequency of the vibration system of the vibration detection sensor 601 is preferably selected.
  • the frequency of the AC bias voltage is a frequency range exceeding 2 kHz. Selected.
  • the armature may be divided into a plurality of pieces, and a weight may be arranged on each of the divided plurality of armatures.
  • a weight may be arranged on each of the divided plurality of armatures.
  • Examples of an arrangement in which a plurality of armatures are arranged include a variation in which a plurality of independent armatures are arranged, a structure in which the armatures are branched structures, and a weight is fixed to each branch portion.
  • the present invention can be used in applications where it is necessary to detect vibration as an electrical signal.
  • FIG. 1 is a side sectional view, a top view, and a front view showing an outline of a vibration detecting apparatus of an embodiment.
  • FIG. 2 is an exploded perspective view showing an outline of the vibration detection device of the embodiment.
  • FIG. 3 is a side sectional view, a top view, and a front view showing an outline of the vibration detecting apparatus of the embodiment.
  • FIG. 4 is an exploded perspective view showing an outline of the vibration detection device of the embodiment.
  • FIG. 5 is a side sectional view and a top view showing an outline of the vibration detecting apparatus of the embodiment.
  • FIG. 6 is a block diagram showing an example of a vibration detection system.
  • Magnet fixing member 310 ... Signal output terminal, 311 ... Signal output terminal, 312 ... Frame, 313 ... Terminal holding part, 321 ... Moving contact part, 322 ... Drive pin, 323 ... Over-amplitude prevention part, 501a ... Lid, 501b ... Accommodating case, 501 ... Nosing, 502 ... armature, 503 "Permanent magnet, 504" Permanent magnet 505 ... Magnet support member, 506 ... Inductive coil, 510 ... Signal output terminal, 512 ... Frame, 5 13 ... Terminal holding part, 514 ... Connection wiring, 601 ... Vibration detection sensor, 602 ... ⁇ Oscillator circuit, 60 3 "'Nias ⁇ :, 604 ⁇ One frequency, 605 ⁇ ⁇ ⁇ Output H.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

[PROBLÈMES] Fournir un dispositif de détection de vibrations de petite taille et ayant une excellente linéarité. [MOYENS POUR RÉSOUDRE LES PROBLÈMES] Le dispositif de détection de vibrations comprend, dans un boîtier (101), des aimants (103, 104) qui forment une unité de circuit magnétique qui génère un champ magnétique CC entre une paire de pôles magnétiques placés l'un en face de l'autre à un intervalle prédéterminé, une bobine d'induction (106) placée à côté de l'unité de circuit magnétique et une armature (102) placée de manière à se trouver entre les pôles magnétiques et à l'intérieur de la bobine d'induction. Un poids (107) est fixé à une extrémité de l'armature (102) et l'autre extrémité de l'armature (102) est fixée relativement au boîtier (101). Lorsqu'une vibration est transmise depuis l'extérieur jusqu'au boîtier (101), le poids (107) se déplace de manière alternative et l'armature (102) vibre par flexion. La vibration par flexion de l'armature (107) entraîne l'induction d'un courant d'induction dans la bobine d'induction (106), et le courant est délivré à des terminaux de sortie de signal (110, 111) sous la forme d'un signal de détection de la vibration.
PCT/JP2005/014629 2004-08-31 2005-08-10 Dispositif de détection de vibrations WO2006025200A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004-252006 2004-08-31
JP2004252006A JP2006071319A (ja) 2004-08-31 2004-08-31 振動検出装置

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WO2006025200A1 true WO2006025200A1 (fr) 2006-03-09

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110068390A (zh) * 2018-05-15 2019-07-30 西安工业大学 压电与电磁耦合振动传感器
CN112113657A (zh) * 2019-06-21 2020-12-22 信利光电股份有限公司 一种用于获取待测物体共振频率的***和方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102538940A (zh) * 2012-01-10 2012-07-04 广东欧珀移动通信有限公司 一种手持设备的自动感应振动方法

Citations (4)

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Publication number Priority date Publication date Assignee Title
JPS5952430U (ja) * 1983-04-08 1984-04-06 善工舎時計株式会社 電磁誘導感震装置
JPS638628U (fr) * 1986-07-04 1988-01-20
JPH1038672A (ja) * 1996-07-25 1998-02-13 Matsushita Electric Works Ltd 感震装置
JPH1038675A (ja) * 1996-07-29 1998-02-13 Tokyo Gas Co Ltd 感震器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952430U (ja) * 1983-04-08 1984-04-06 善工舎時計株式会社 電磁誘導感震装置
JPS638628U (fr) * 1986-07-04 1988-01-20
JPH1038672A (ja) * 1996-07-25 1998-02-13 Matsushita Electric Works Ltd 感震装置
JPH1038675A (ja) * 1996-07-29 1998-02-13 Tokyo Gas Co Ltd 感震器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110068390A (zh) * 2018-05-15 2019-07-30 西安工业大学 压电与电磁耦合振动传感器
CN110068390B (zh) * 2018-05-15 2024-03-01 西安工业大学 压电与电磁耦合振动传感器
CN112113657A (zh) * 2019-06-21 2020-12-22 信利光电股份有限公司 一种用于获取待测物体共振频率的***和方法

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