WO2005121700A1 - Vorrichtung und verfahren zum prüfen von oberflächen im inneren von löchern - Google Patents
Vorrichtung und verfahren zum prüfen von oberflächen im inneren von löchern Download PDFInfo
- Publication number
- WO2005121700A1 WO2005121700A1 PCT/DE2005/000914 DE2005000914W WO2005121700A1 WO 2005121700 A1 WO2005121700 A1 WO 2005121700A1 DE 2005000914 W DE2005000914 W DE 2005000914W WO 2005121700 A1 WO2005121700 A1 WO 2005121700A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- light beam
- imaging optics
- focused
- lens
- light source
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
Definitions
- the invention relates to a device for inspecting surfaces inside holes, depressions or the like, the device having a light source for generating a light beam, the light beam being focusable by imaging optics, the focused light beam being steerable onto the surface, and wherein a sensor device is provided for detecting the reflected light beam.
- brake cylinders in a motor vehicle must have a particularly high-quality surface, since small chips or burrs in the cylinders can destroy the parts after only a short time.
- a glass cone forms an optic with which almost 360 ° of the surrounding surface can be imaged on an optical fiber bundle.
- the bundle of optical fibers often consists of a few thousand individual fibers, which together pass on an image to a camera. Suitable image processing enables structures on the surface to be identified. know. However, their actual size, in particular their three-dimensional extent, cannot be determined.
- a monochromatic light beam is directed onto the surface to be examined, this light beam always being kept focused on the surface. If the distance between the optics and the illuminated image point changes as a result of unevenness in the surface and the light beam is no longer focused, an automatic focusing circuit adjusts the optics in such a way that the light beam is focused on the surface again. The change in distance can be detected via this readjustment of the optics. In this way, the surface can be measured three-dimensionally, but the necessary adjustment of the focusing means that only relatively slow measuring speeds can be achieved. It is therefore not possible to carry out an inspection in an ongoing production process.
- the present invention is therefore based on the object of designing and developing a device of the type mentioned at the outset in such a way that the fastest possible, simple and reproducible inspection of surfaces inside holes, depressions or the like with dimensions down to the millimeter range is possible with the simplest construction , A corresponding procedure is also to be specified.
- the above object is achieved by the features of patent claim 1.
- the device in question is designed in such a way that the light source can be used to generate a multicolor light beam which, by chromatic aberration of the imaging optics, is focused on several points spaced at different distances from the imaging optics, and that the distance from the surface is derived from the spectrum of the detected light beam can be determined.
- the above object is achieved by the features of claim 17.
- the method in question is characterized in that the light source is used to generate a multicolor light beam, which is chromatically aberrated to a plurality of different points spaced at different distances from the imaging optics and that the distance to the surface is determined from the spectrum of the detected light beam.
- the refocusing of the optics can be dispensed with.
- multicolor light is used in a targeted manner and the resulting, often undesirable chromatic aberration in multicolor light is used in optics.
- the chromatic aberration focuses light beams of different wavelengths on different focal points. Depending on the extent of the chromatic aberration, these focal points lie in a more or less extensive area and more or less far from the imaging optics on the optical axis of the imaging optics.
- the spectral analysis of the reflected light beam can be used to determine the distance between the optics and the illuminated image point. If an entire area on the surface is scanned by directing the focused light beam, a profile can be created in this way about the nature of the surface.
- the device according to the invention and the method according to the invention can advantageously be used wherever surfaces have to be measured in spatially very limited environments. For example, boreholes, but also hollows, crevices or other depressions can be measured.
- a multicolor light beam is generated for this purpose, which is preferably fed via one or more optical waveguides to an imaging optical system.
- This is preferably white light, since this results in particularly simple circumstances when evaluating the spectral components.
- the imaging optics advantageously consist of a lens or a lens system.
- this preferably has a GRIN (gradient index) - Lens on.
- GRIN lenses usually consist of cylindrical blocks, which are provided with a continuous radial change in refractive index through special production processes. The same effects are achieved on a light beam crossing the lens as with conventional lenses.
- GRIN lenses can be miniaturized to a much greater extent at lower production costs, which is of great advantage particularly in spatially restricted environments.
- the GRIN lens can be assigned an adjusting device, a so-called spacer, with which the aberration of the lens can be adjusted.
- a lens of this type can thus be adapted particularly easily to changed system configurations.
- the GRIN-LENS can be fitted with additional optics.
- an imaging optic named for aspherical telescopes could be used here.
- An optical waveguide can advantageously be coupled into the beam path, for example between the lenses of the telescope optics, for directing light, as a result of which even greater ranges are possible.
- a deflection device could be provided, which is preferably designed to be movable. Prisms, mirrors or plane-parallel plates can be used.
- the deflection device is advantageously influenced by electrical, piezoelectric, magnetic or comparable actuators, which are preferably controlled by an electronic circuit, for example a microcontroller.
- the entire surface or at least a part of the surface to be tested inside a hole can be illuminated and measured by suitable control of the deflection device.
- the light beam can be guided over the surface in a linear, circular, spiral, meandering manner or in another suitable manner.
- the reflected light beam could be the same path as that through the light take the light beam generated, only in the opposite direction.
- the reflected light beam could be separated out by an optical switch and fed to a sensor device.
- the sensor device advantageously consists of an electronic component which is capable of converting multicolor light into suitable electrical signals depending on the spectrum of the incident light beam.
- a CCD chip or other photodetector arrays are preferably used here.
- the device according to the invention can be operated in a relatively simple manner as a multi-channel system, as a result of which several measurements can be carried out simultaneously.
- the light emerging from the imaging optics can be divided into several measuring points and the respective reflection of the measuring points can be fed to the sensor device via preferably several optical fibers.
- the measuring points are arranged in a particularly advantageous manner depending on the measuring situation.
- a line-shaped or circular arrangement would be conceivable.
- the signals obtained by the sensor device could be fed to an electronic device which, for example, consists of a digital computer in the form of a microcontroller or a digital signal processor.
- a digital computer in the form of a microcontroller or a digital signal processor.
- This allows signal processing to be carried out and the data obtained to be processed in a suitable manner for later use, for example a visualization.
- the measurement results could possibly also be evaluated here and the surface classified according to certain criteria.
- Fig. 2 is a schematic view of the use of a GRIN lens in connection with a lens system
- Fig. 3 is a schematic view of a deflection device with a plane-parallel plate.
- the device 1 shows a schematic illustration of a basic structure of a device 1 according to the invention for checking the surface 9 inside a hole 2.
- the device 1 consists of a light source 3 with the aid of which a multicolor light beam 4 can be generated.
- This light beam 4 passes unaffected by an optical switch 5 and is coupled into an optical waveguide 6 for guiding the light beam 4.
- a lens system 7 With a lens system 7, the light beam 4 is focused on a number of focal points using the chromatic aberration and directed onto the surface 9 of the hole 2 with a deflection wedge 8.
- the lens system 7 and the deflection wedge 8 are matched to one another in such a way that at least one of the focal points lies on the surface 9. Under certain circumstances, a corresponding adaptation device, not shown here, must be provided so that this requirement can be met.
- the lens system 7 and deflecting wedge 8 is rotatably mounted and can be moved along the hole 2. These movements are preferably carried out using an electrical actuating device (not shown here), so that the surface 9 of the hole 2 can be scanned as completely and reproducibly as possible.
- the light beam is reflected on the surface 9 and fed to the optical waveguide 6 via the deflection wedge 8 and the lens system 7.
- the optical switch separates the light steel 4 generated by the light source 3 from the reflected light beam 10, which is fed to the sensor device 11.
- This sensor device is coupled to evaluation electronics, also not shown, which calculates the distance between the device 1 according to the invention and the surface 9 from the spectrum of the reflected light beam 10 and makes the data available for later evaluation and / or visualization.
- 2 shows the use of a GRIN lens 12 with conventional optics 13 in a schematic view. An approximately 1.0 pitch GRIN lens 12 is shown in the drawing, ie the lens is dimensioned such that an incident light beam describes a period of a sine oscillation in the interior of the GRIN lens 12.
- an adjusting device 14 a so-called spacer, is connected upstream of the GRIN lens 12.
- the light beam emerging from the GRIN lens 12 is fed through an optic 13, which is preferably formed by a 1: 1 imaging optic with two aspherical lenses known in aspherical telescopes.
- An optical waveguide (not shown here) can be arranged between the two lenses 15 and 16 to bridge even greater distances.
- the light beam emerging from this optic is possibly supplied to the surface 9 using a deflection device 8.
- FIG. 3 shows an embodiment of the deflection device 8 by means of a plane-parallel plate 17.
- the incident light beam 4 is refracted at the two interfaces 18 and 19, whereby a light beam 20 displaced in parallel is created.
- the displacement v results from the thickness d of the plate 17, the angle e between the incident light beam 4 and the perpendicular to the plate 17 and the refractive index n. If the plane-parallel plate 17 is rotated about the axis 21, the light beam displaced in parallel describes 20 a circular path on the surface to be examined. If the inclination of the plane-parallel plate 17 is additionally influenced, surfaces can be scanned in a ring shape.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2005800210390A CN1997871B (zh) | 2004-06-08 | 2005-05-17 | 孔内侧表面的检测装置和方法 |
EP05753788.8A EP1754018B1 (de) | 2004-06-08 | 2005-05-17 | Vorrichtung und verfahren zum prüfen von oberflächen im inneren von löchern |
US11/608,489 US7369225B2 (en) | 2004-06-08 | 2006-12-08 | Device and method for inspecting surfaces in the interior of holes |
HK07113736.5A HK1105447A1 (en) | 2004-06-08 | 2007-12-18 | Device and method for inspecting the internal surfaces of holes |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004027758 | 2004-06-08 | ||
DE102004027758.3 | 2004-06-08 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/608,489 Continuation US7369225B2 (en) | 2004-06-08 | 2006-12-08 | Device and method for inspecting surfaces in the interior of holes |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005121700A1 true WO2005121700A1 (de) | 2005-12-22 |
Family
ID=34970367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2005/000914 WO2005121700A1 (de) | 2004-06-08 | 2005-05-17 | Vorrichtung und verfahren zum prüfen von oberflächen im inneren von löchern |
Country Status (5)
Country | Link |
---|---|
US (1) | US7369225B2 (de) |
EP (1) | EP1754018B1 (de) |
CN (1) | CN1997871B (de) |
HK (1) | HK1105447A1 (de) |
WO (1) | WO2005121700A1 (de) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006122519A1 (de) * | 2005-05-17 | 2006-11-23 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Vorrichtung und verfahren zum vermessen von oberflächen |
WO2008141640A1 (de) | 2007-05-21 | 2008-11-27 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Verfahren zur kompensation von temperaturbedingten messfehlern in einem konfokal chromatisch messenden abstandssensor |
WO2017202399A1 (de) * | 2016-05-24 | 2017-11-30 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Vorrichtung zum vermessen der geometrie der innenwand von bohrungen und verfahren |
EP4336140A1 (de) | 2022-09-12 | 2024-03-13 | 3D.aero GmbH | Verfahren zur beurteilung des ergebnisses einer an einem werkstück durchgeführten bohrung |
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EP1762864B1 (de) * | 2005-09-12 | 2013-07-17 | Services Petroliers Schlumberger | Bohrlochabbildung |
DE602006021294D1 (de) * | 2006-07-24 | 2011-05-26 | Prad Res & Dev Nv | Verfahren und Vorrichtung für Mikrobildgebung |
US7812971B2 (en) * | 2007-06-28 | 2010-10-12 | Quality Vision International, Inc. | Multi color autofocus apparatus and method |
CA2597891A1 (en) * | 2007-08-20 | 2009-02-20 | Marc Miousset | Multi-beam optical probe and system for dimensional measurement |
US20100079753A1 (en) * | 2008-09-30 | 2010-04-01 | The Regents Of The University Of California | Raman spectrometer having wavelength-selective optical amplification |
DE102010005032B4 (de) * | 2010-01-15 | 2012-03-29 | Peter Wolters Gmbh | Vorrichtung und Verfahren zur Bestimmung der Position einer Arbeitsfläche einer Arbeitsscheibe |
ES2364916B1 (es) * | 2010-03-05 | 2012-09-04 | Consejo Superior De Investigaciones Científicas (Csic) | Instrumento para la realizacion de imagenes de campo ancho a distintas profundidades de un especimen |
US8456637B2 (en) | 2010-08-26 | 2013-06-04 | Mitutoyo Corporation | Multiple measuring point configuration for a chromatic point sensor |
US8194251B2 (en) | 2010-08-26 | 2012-06-05 | Mitutoyo Corporation | Method for operating a dual beam chromatic point sensor system for simultaneously measuring two surface regions |
JP5601984B2 (ja) * | 2010-11-16 | 2014-10-08 | 東洋鋼鈑株式会社 | 多孔板表面検査方法及び多孔板表面検査装置 |
DE102011056002A1 (de) * | 2011-12-02 | 2013-06-06 | Grintech Gmbh | Optisch korrigierende Mikrosonde zur Weißlicht-Interferometrie |
US8587772B2 (en) | 2011-12-21 | 2013-11-19 | Mitutoyo Corporation | Chromatic point sensor configuration including real time spectrum compensation |
US8587789B2 (en) | 2011-12-21 | 2013-11-19 | Mitutoyo Corporation | Chromatic point sensor compensation including workpiece material effects |
US8736817B2 (en) | 2012-05-25 | 2014-05-27 | Mitutoyo Corporation | Interchangeable chromatic range sensor probe for a coordinate measuring machine |
US8817240B2 (en) | 2012-05-25 | 2014-08-26 | Mitutoyo Corporation | Interchangeable optics configuration for a chromatic range sensor optical pen |
US9068822B2 (en) | 2013-07-03 | 2015-06-30 | Mitutoyo Corporation | Chromatic range sensor probe detachment sensor |
US9329026B2 (en) | 2013-12-06 | 2016-05-03 | Mitutoyo Corporation | Hole-measurement systems and methods using a non-rotating chromatic point sensor (CPS) pen |
US9651764B2 (en) | 2014-01-30 | 2017-05-16 | Mitutoyo Corporation | Interchangeable reflective assembly for a chromatic range sensor optical pen |
CN104181171A (zh) * | 2014-08-08 | 2014-12-03 | 明泰信科精密仪器科技(苏州)有限公司 | 对圆孔工件的内外壁进行图像拍摄的方法和装置 |
US10295475B2 (en) | 2014-09-05 | 2019-05-21 | Rolls-Royce Corporation | Inspection of machined holes |
US10228669B2 (en) | 2015-05-27 | 2019-03-12 | Rolls-Royce Corporation | Machine tool monitoring |
FI127908B (en) * | 2015-09-22 | 2019-05-15 | Teknologian Tutkimuskeskus Vtt Oy | Method and apparatus for measuring surface height |
PL3156760T3 (pl) * | 2015-10-14 | 2020-03-31 | Sturm Maschinen- & Anlagenbau Gmbh | Urządzenie sensorowe i sposób badania wierzchnich powierzchni cylindrycznej komory |
FR3080445B1 (fr) * | 2018-04-19 | 2020-03-27 | Renault S.A.S. | Dispositif de mesure pour determiner l'epaisseur d'une couche d'un materiau |
CN110017796B (zh) * | 2019-05-16 | 2021-09-03 | 西安工业大学 | 一种高精度齿轮齿面光学测量方法 |
DE102020104386A1 (de) | 2020-02-19 | 2021-08-19 | Precitec Optronik Gmbh | Vorrichtung und Verfahren zum Messen der Topografie einer Seitenfläche einer Vertiefung |
CN114086790B (zh) * | 2021-11-19 | 2022-05-17 | 六安金銮建筑设备有限公司 | 一种基于物联网的智能建筑墙面裂纹修复设备 |
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US5785651A (en) * | 1995-06-07 | 1998-07-28 | Keravision, Inc. | Distance measuring confocal microscope |
US6462815B1 (en) * | 1997-04-07 | 2002-10-08 | Robert Bosch Gmbh | Device for optically testing surfaces |
DE10242374A1 (de) * | 2002-09-12 | 2004-04-01 | Siemens Ag | Konfokaler Abstandssensor |
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2005
- 2005-05-17 EP EP05753788.8A patent/EP1754018B1/de not_active Expired - Fee Related
- 2005-05-17 CN CN2005800210390A patent/CN1997871B/zh not_active Expired - Fee Related
- 2005-05-17 WO PCT/DE2005/000914 patent/WO2005121700A1/de active Application Filing
-
2006
- 2006-12-08 US US11/608,489 patent/US7369225B2/en active Active
-
2007
- 2007-12-18 HK HK07113736.5A patent/HK1105447A1/xx not_active IP Right Cessation
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DE10242374A1 (de) * | 2002-09-12 | 2004-04-01 | Siemens Ag | Konfokaler Abstandssensor |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006122519A1 (de) * | 2005-05-17 | 2006-11-23 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Vorrichtung und verfahren zum vermessen von oberflächen |
US7561273B2 (en) | 2005-05-17 | 2009-07-14 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Device and method for measurement of surfaces |
WO2008141640A1 (de) | 2007-05-21 | 2008-11-27 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Verfahren zur kompensation von temperaturbedingten messfehlern in einem konfokal chromatisch messenden abstandssensor |
WO2017202399A1 (de) * | 2016-05-24 | 2017-11-30 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Vorrichtung zum vermessen der geometrie der innenwand von bohrungen und verfahren |
DE102016208949A1 (de) | 2016-05-24 | 2017-11-30 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Vorrichtung zum Vermessen der Geometrie der Innenwand von Bohrungen und Verfahren |
DE102016208949B4 (de) | 2016-05-24 | 2018-08-16 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Vorrichtung und Verfahren zum Vermessen der Geometrie der Innenwand von Bohrungen |
US10890435B2 (en) | 2016-05-24 | 2021-01-12 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Device for measuring the geometry of the inner wall of bores and corresponding method |
EP4336140A1 (de) | 2022-09-12 | 2024-03-13 | 3D.aero GmbH | Verfahren zur beurteilung des ergebnisses einer an einem werkstück durchgeführten bohrung |
Also Published As
Publication number | Publication date |
---|---|
CN1997871A (zh) | 2007-07-11 |
US7369225B2 (en) | 2008-05-06 |
HK1105447A1 (en) | 2008-02-15 |
CN1997871B (zh) | 2011-06-08 |
EP1754018A1 (de) | 2007-02-21 |
EP1754018B1 (de) | 2018-07-11 |
US20070086000A1 (en) | 2007-04-19 |
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