WO2005083783A1 - Heat dissipating sheet - Google Patents

Heat dissipating sheet Download PDF

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Publication number
WO2005083783A1
WO2005083783A1 PCT/JP2005/003160 JP2005003160W WO2005083783A1 WO 2005083783 A1 WO2005083783 A1 WO 2005083783A1 JP 2005003160 W JP2005003160 W JP 2005003160W WO 2005083783 A1 WO2005083783 A1 WO 2005083783A1
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WO
WIPO (PCT)
Prior art keywords
heat
metal wire
heat dissipation
sheet according
adhesive layer
Prior art date
Application number
PCT/JP2005/003160
Other languages
French (fr)
Japanese (ja)
Inventor
Mitsuo Honma
Original Assignee
Jisouken Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jisouken Co., Ltd. filed Critical Jisouken Co., Ltd.
Priority to JP2006510475A priority Critical patent/JP4823891B2/en
Publication of WO2005083783A1 publication Critical patent/WO2005083783A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present invention relates to a heat dissipation sheet. More specifically, it is used mainly for cooling semiconductors by absorbing heat generated inside semiconductor elements, which are installed on semiconductor elements, into flowing gas and liquid, and for various other uses as heat exchange elements. It belongs to the technical field of the heat dissipation sheet used.
  • a metal plate such as an aluminum-plate plate or a copper plate is used as the heat radiation sheet.
  • flexibility is required.
  • a heat radiating sheet using a thermally conductive resin such as a silicone rubber sheet having thermal conductivity is used.
  • the heat conductive resin had low heat conductivity compared to metals and the like, and was inferior in heat radiation performance. Therefore, various attempts have conventionally been made to improve the heat conductivity and heat dissipation performance of a heat dissipation sheet using a heat conductive resin.
  • Patent Document 1 discloses a heat conductive sheet in which graphite powder is dispersed in a base material such as rubber, thermoplastic resin, or thermoplastic elastomer.
  • Patent Document 2 discloses a heat dissipation structure in which a cured product of a silicone resin composition containing a thermally conductive substance is laminated on a metal foil such as aluminum.
  • a metal foil such as aluminum.
  • Patent Document 1 JP-A-6-291226
  • Patent Document 2 JP 2001-284504 A
  • an object of the present invention is to provide a novel heat radiating sheet that is excellent in thermal conductivity and heat radiating property and is highly flexible in view of the above conventional situation.
  • the heat dissipation sheet of the present invention has a fin that is formed into a sheet that is substantially continuous or discontinuous in plan view having a void portion and a contact portion where metal wires intersect.
  • the surface of the fin is provided so as to be exposed from the pressure-sensitive adhesive layer with respect to the pressure-sensitive adhesive layer having thermal conductivity.
  • a heat radiation sheet having a large surface area can be easily obtained by using a metal wire. Further, since the metal wires are provided crossing each other, heat is quickly conducted to the entire fin through the contact portion between the metal wires. In addition, since a void is formed, the surface area of the metal wire that comes into contact with the outside air increases, and heat is rapidly released to the surface force of the metal wire outside. Since the pressure-sensitive adhesive layer has fins, the heat-radiating sheet can be easily installed on the surface requiring heat radiation via the pressure-sensitive adhesive layer.
  • the term “continuous” means that sheet-like fins, which are also metal wires, are provided continuously without being cut by one heat dissipation sheet. In addition, discontinuity means that a sheet-like fin is partially cut in one heat dissipation sheet.For example, a case in which a plurality of planar fins are provided side by side in an adhesive layer may be provided. No.
  • the metal wire is wound in a coil shape to form a winding unit, and the entire winding unit is formed flat.
  • a fin having a portion and a contact portion is provided on a pressure-sensitive adhesive layer having thermal conductivity such that a flat surface of the fin is parallel to the pressure-sensitive adhesive layer.
  • a heat dissipation sheet having a large surface area can be easily obtained by using a coil-shaped metal wire. Further, heat is transmitted to the entire fin through the closely contacted portion of the winding unit, and the heat radiation performance is improved. And since it also has a constitutional force with fins in the adhesive layer, The heat radiation sheet can be easily installed on the surface where heat radiation is required via the adhesive layer.
  • the coil shape is not limited to a circular shape but includes various shapes such as a polygon such as a triangle or a quadrangle, an ellipse, or a star.
  • the coil-shaped metal wire in the heat dissipation sheet of the present invention, may be a right-handed coiled metal wire, or a left-handed coiled metal wire.
  • the metal wires are combined, and each metal wire crosses and has a contact portion.
  • the metal wires are densely formed and densely formed, so that the thermal conductivity is improved and the heat dissipation performance is also improved.
  • the metal wires wound right-handed and left-handed are well entangled, morphological stability is imparted.
  • the base material and another pressure-sensitive adhesive layer are sequentially provided on the surface opposite to the surface on which the fins are provided with respect to the pressure-sensitive adhesive layer. It is characterized by being laminated.
  • the pressure-sensitive adhesive referred to here also includes a so-called adhesive.
  • the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, the cross section of the metal wire is formed in an irregular shape.
  • the surface area of the metal wire is increased, and the contact area with the pressure-sensitive adhesive layer may be increased.
  • the irregular surface means that the cross section of the metal wire is formed in an irregular surface such as a polygonal shape or a star shape, and includes flaws formed on the surface.
  • the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, the cross section of the metal wire at a portion in contact with the pressure-sensitive adhesive layer is formed as a flat surface.
  • the contact area between the metal wire and the pressure-sensitive adhesive layer is increased, and the thermal conductivity between the metal wire and the adhesive layer is improved.
  • the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, the cross section of each metal wire at the contact portion is formed to be a flat surface.
  • the contact area of the contact portion between the metal wires is improved, and the heat of the entire fin is improved.
  • Conductivity is improved.
  • the present invention is characterized in that in the above-described heat sink, the contact portion is thermally coupled.
  • thermal coupling refers to fixing without impairing the heat conduction at the contact portion, and means for bonding such as soldering, solder plating, adhesives, adhesives, and vibration welding and flash welding. Thermal bonding is performed by the bonding means.
  • the heat dissipation sheet of the present invention is characterized in that, in any one of the heat dissipation sheets described above, a coating film containing ferrite is formed on the surface of the metal wire.
  • the heat dissipation is improved by increasing the surface area, and the ferrite absorbs the electromagnetic wave.
  • the ferrite referred to here includes so-called soft ferrite, hard ferrite, and a mixture thereof.
  • the heat dissipation sheet of the present invention is characterized in that, in any of the heat dissipation sheets described above, the metal wire is aluminum or an alloy thereof.
  • a material having high thermal conductivity and low cost is selected as the metal wire.
  • the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, the surface of the metal wire is subjected to an anodic oxide film treatment.
  • the heat dissipation sheet of the present invention is characterized in that, in any of the heat dissipation sheets described above, the metal wire is a corrosion-resistant metal.
  • the corrosion-resistant metal refers to a metal that is not easily attacked by acids, alkalis, and the like, and specifically includes titanium and its alloys, stainless steel, and the like.
  • the heat dissipation sheet of the present invention is characterized in that, in any one of the heat dissipation sheets described above, a heat radiation coating film is formed on the surface of the metal wire.
  • a heat-radiating coating film is a coating containing a pigment having a heat-radiating effect, such as carbon black. Refers to a coating film.
  • the heat dissipation sheet of the present invention is characterized in that, in any one of the heat dissipation sheets described above, a heat conductive filler is mixed in the pressure-sensitive adhesive layer.
  • thermally conductive filler examples include silicon nitride, boron nitride, aluminum nitride, aluminum oxide, silicon carbide, and graphite carbon.
  • the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, the content of the thermally conductive filler is 50 to 70 wt% with respect to the entire pressure-sensitive adhesive.
  • the content of the thermally conductive filler is optimized in terms of the thermal conductivity and flexibility of the pressure-sensitive adhesive layer.
  • the heat dissipation sheet of the present invention is characterized in that, in any one of the heat dissipation sheets described above, ferrite is mixed in the adhesive layer.
  • the electromagnetic waves are absorbed by the ferrite powder.
  • the ferrite here includes so-called soft ferrite, hard ferrite, and a mixture thereof.
  • the heat dissipation sheet of the present invention includes a fin in which a gap is formed in a two-dimensional or three-dimensional direction in a sheet-like metal material, and an adhesive layer provided in the fin.
  • the fin is provided so that the surface of the fin is exposed.
  • a heat dissipation sheet having a large surface area can be easily obtained using the sheet-like metal material.
  • the fins 11 have voids formed in two-dimensional or three-dimensional directions, the surface area of the metal material that comes into contact with the outside air increases, and heat is quickly released from the surface of the metal material to the outside air. It becomes.
  • the two-dimensional direction refers to a case where, for example, when a through-hole is provided in a sheet-shaped metal material, each through-hole is formed in a single direction and does not three-dimensionally intersect.
  • the three-dimensional direction means, for example, that a plurality of through holes are provided, and the through holes are three-dimensionally crossed to form a void.
  • the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, a metal foil is provided between the fin and the pressure-sensitive adhesive layer. According to the above configuration, since heat is transmitted to the fins through the metal foil having high thermal conductivity, the heat dissipation performance of the entire heat dissipation sheet is improved. In addition, heat is directly radiated from the metal foil, and the heat radiation performance is improved. Further, the electromagnetic wave can be absorbed by the metal foil.
  • the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, the metal foil is aluminum or an alloy thereof.
  • a material having high thermal conductivity and low cost is selected as the metal foil.
  • the heat dissipation sheet of the present invention is characterized in that, in the above heat dissipation sheet, the sheet metal is aluminum or an alloy thereof.
  • a material having high thermal conductivity and low cost is selected as the sheet-like metal material.
  • a heat radiating sheet having a large surface area and thus high heat radiating performance can be obtained at low cost by effectively utilizing a metal wire. Since the fins are formed so as to form a gap portion and a contact portion when the metal wire intersects, heat conduction is quickly performed to the entire fin via the contact portion. Then, the heat is promptly released to the outside air from the metal wire exposed to the gap. In addition, since the metal wires intersect, a heat-radiating sheet with high flexibility can be obtained.
  • the metal wire wound in a coil shape is formed flat and the adjacent winding units cross each other, heat is quickly conducted from the contact portion to the entire fin. In addition, heat can be quickly released through voids generated in fins having a large surface area of the metal wire. Furthermore, since the metal wire wound in a coil shape is used, it is very excellent in flexibility.
  • FIG. 1 is a perspective view of a heat dissipation sheet according to Embodiment (1).
  • FIG. 2 is a partially enlarged view of FIG. 1.
  • FIG. 3 is a view showing fins used for a heat dissipation sheet.
  • FIG. 4 A diagram showing a method for manufacturing a fin.
  • FIG. 5 A diagram showing a method for manufacturing a fin.
  • FIG. 6 is an enlarged cross-sectional view taken along line AA of FIG. 2.
  • FIG. 7 is a sectional view taken along line BB of FIG. 2.
  • ⁇ 8 ⁇ is a cross-sectional view of the heat dissipation sheet according to Embodiment (2).
  • FIG. 9 is a top view of the heat dissipation sheet according to Embodiment (3).
  • FIG. 10 is an enlarged cross-sectional view taken along the line BB of FIG. 9.
  • FIG. 11 is a diagram showing another form of the heat dissipation sheet according to Embodiment (3).
  • FIG. 12 is a cross-sectional view of a metal wire constituting a fin.
  • FIG. 13 is a top view of the heat dissipation sheet according to Embodiment (4).
  • FIG. 14 is an enlarged cross-sectional view taken along the line CC of FIG. 13.
  • FIG. 15 is a diagram showing an example of a use of the heat dissipation sheet of the present invention.
  • FIG. 16 is a diagram showing an example of a use of a heat dissipation sheet of the present invention.
  • FIG. 17 is a top view of FIG. 16.
  • the heat-dissipating sheet 1 shown in FIG. 1 has a fin 11 formed on a metal wire rod wound in a coil shape on one surface of an adhesive layer 14, and a release sheet on the other surface of the adhesive layer 14. It is roughly configured by providing 15 units.
  • the fin 11 includes a coil-shaped metal wire 12 wound right-handed and a coil-shaped metal wire 13 wound left-handed.
  • the metal wires 12 and 13 are combined by being displaced in the direction, and the entirety of the metal wires 12 and 13 is formed to be flat. Since the metal wires 12 and 13 cross each other in the fin 11 while being displaced from each other in the width direction and the longitudinal direction, as shown in FIG. 3, a large number of voids 112 (112a, 112b, ⁇ ⁇ ⁇ ) And the contact portion 113 (113a, 113b, ⁇ ⁇ ⁇ ⁇ ) are formed. In the fin 11, the coil-shaped metal wires 12 and 13 wound in different directions are displaced and combined with each other, so that the metal wires are densely formed.
  • the fin 11 is a force at which adjacent winding units l la and l ib are displaced from each other and intersect with each other, particularly at a contact portion 113 where the metal wires 12 and 13 contact each other. Since the cross section of each of the metal wires 12 and 13 is formed flat, the contact area of the contact portion 113 where the winding units contact each other is increased. As a result, heat is quickly conducted to the entire fin 11 via the contact portion 113.
  • the surface area of the fin 11 is increased, and High heat dissipation performance can be obtained. Since the fins 11 have a large number of voids 112 formed therein, heat is rapidly released, particularly since the metal wire has a large contact area with the outside air.
  • a method for obtaining the fins 11 will be specifically described.
  • a coiled metal wire 12 wound leftward and a coiled metal wire 13 wound rightward are combined.
  • the fins 11 are obtained by forming the metal wires 12 and 13 flat by means such as rolling.
  • the central portion of the band shape of the metal wires 12 and 13 is bent inward (inside of the overlap), and the front portion of the overlap of the metal wires 12 and 13 is bent. Crushed to form a flat surface 111 at the center.
  • the central portions of the metal wires 12, 13 projecting outward are bent inward to reduce the thickness, and an uneven structure in which the metal wires are complicatedly complex at the ends l lc and l id is formed. .
  • the winding unit 11a of the metal wire 12 and the winding unit lib of the metal wire 13 are adjacent to each other and are in close contact with each other.
  • adjacent winding units 1 la and 1 lb are displaced from each other to form a gap portion 112 and a contact portion 113.
  • adjacent winding units l la and l ib are displaced by a length m in the width direction and a length n in the longitudinal direction.
  • the length m of the displacement in the width direction is preferably 0.5 to 2 times the diameter d of the metal wires 12 and 13.
  • the length m of the displacement in the width direction is more than twice the diameter d of the metal wires 12 and 13, the density of the metal wires at the ends l lc and l id of the fins 11 becomes low. There is.
  • the length n of the longitudinal displacement is preferably 0.3-0.7 times the longitudinal diameter k of the winding units l la and l ib 0.4-0.6 times. Is particularly preferred.
  • the fin 11 is formed by combining the coil-shaped metal wires 12 and 13 wound in different directions, the metal wires 12 and 13 are densely formed, and the contact portions 113 are formed densely. Thermal conductivity is improved, and heat dissipation performance is also improved.
  • the left-handed and right-handed metal wires 12 and 13 are entangled with each other, the shape of the fins 11 is stable, and the fins 11 are strong when the coil is continuously rolled. The coil does not expand due to the degree and the like.
  • the contact portions 113 where the winding units l la and l ib come into contact with each other are formed by bonding means such as soldering, solder plating, an adhesive or an adhesive, or joining such as vibration welding or flash welding.
  • bonding means such as soldering, solder plating, an adhesive or an adhesive, or joining such as vibration welding or flash welding.
  • the fin 11 has a flat surface in which the metal wires 12 and 13 come into contact with the pressure-sensitive adhesive layer 14. It is possible to make contact with the surface, and the large contact area enables efficient heat transfer and heat dissipation. Further, since the metal wire wound in a coil shape is used, it is very excellent in flexibility, and can be used in various directions such as a parallel direction that is not only perpendicular to the flat surface of the fin 11 but also in a parallel direction. Can be freely bent.
  • the flattening of the coiled metal wire can be performed by crushing by a known means such as rolling.
  • a long fin 11 can be obtained by continuously rolling a coil sent in one direction. At this time, it is preferable to appropriately set the rolling pressure, the rolling angle, and the like so that the adjacent winding units l la and l ib are in close contact with each other appropriately.
  • the fin 11 has a flat surface 111 formed only on the outside, but the fin 11 is formed such that the entire metal wire is formed flat by changing the pressure, angle, and the like when the metal wire is flattened. Can also be used.
  • the fins 11 can be made of various material strengths. Specific examples include metal materials such as aluminum, copper, silver, and gold, and alloys of these with nickel, magnesium, zinc, silicon, and the like. In particular, an aluminum-based material is preferably used because of its excellent thermal conductivity and flexibility and low cost.
  • a corrosion-resistant metal can be used as a material of the metal wire of the fin 11. Depending on the application of the heat release sheet, it may be used in a corrosive environment, so it is suitable for such cases.
  • corrosion resistant metals include titanium, its alloys, stainless steel, and the like.
  • the metal wire constituting the fins 11 can be subjected to a surface treatment, if necessary, in order to enhance thermal conductivity and corrosion resistance. Specific examples include copper plating and silver plating. When aluminum or an alloy thereof is used as a material, it is preferable that the surface is subjected to anodizing treatment (almite treatment).
  • the corrosion resistance is improved, and the thermal resistance of the contact portion 113 in which the winding units l la and l ib are in close contact with each other is reduced, so that the overall heat dissipation can be further increased.
  • the treatment method a known process can be adopted. Specifically, an oxide film is formed by performing electrolysis in a solution of oxalic acid, sulfuric acid, phosphoric acid, or the like using the treated material as an anode. Can be. In the anodizing treatment, any of so-called white alumite and black alumite can be applied.
  • a coating film containing ferrite can be formed on the surface of the metal wire, if necessary.
  • the ferrite since the ferrite has the ability to absorb electromagnetic waves, a heat dissipation sheet that effectively absorbs electromagnetic waves as a whole can be obtained.
  • the surface of the fin 11 is made of a metal wire and thus has an uneven shape, the electromagnetic wave is irregularly reflected, and the effect of electromagnetic wave absorption increases synergistically.
  • soft magnetic ferrite (soft ferrite) and hard magnetic ferrite (hard ferrite) are known, but either one may be used or a mixture of two or more kinds may be used.
  • a binder for dispersing the fly a general substance such as acrylic resin or silicone resin which is not particularly limited can be used.
  • a heat-radiating coating film can be formed on the surface of the metal wire, if necessary, in order to quickly radiate the heat conducted in the fins 11 to the outside.
  • Such a coating film can be formed from a paint containing various pigments having a heat radiation effect.
  • pigments include carbon black, alumina, zirconia, titania, silica, dinolecon, magnesia, yttria (YO), cordierite (2MgO'2AlO-5Si
  • the amount of the pigment in the paint can be appropriately set according to the desired heat radiation. Generally, the amount is suitably about 10 to 90% by weight based on the dry weight of the coating film.
  • the binder a substance that is not easily deteriorated by heat is preferred, for example, acrylic resin, silicone resin, urethane resin, and polyester resin. Terpene resin, fluorine resin and the like.
  • the thickness of the heat-radiating coating film is preferably 1 to 50 m. If it is less than 1 ⁇ m, the thermal radiation effect is undesirably reduced.
  • the diameter of the fins 11 (the width of the flat surface 111) can be appropriately set according to the required heat radiation performance without being particularly limited. Generally, as the diameter increases, the surface area increases, and the heat dissipation improves. Specifically, a force of several mm to several cm, which differs depending on the use of the manufactured heat dissipation sheet, is appropriate.
  • the pressure-sensitive adhesive layer 14 is for bonding and fixing the fins 11, and a heat-conductive pressure-sensitive adhesive, an adhesive, or the like can be used.
  • a heat-conductive pressure-sensitive adhesive, an adhesive, or the like can be used.
  • the pressure-sensitive adhesive and adhesive having thermal conductivity include those in which a heat-conductive filler having high thermal conductivity is blended in a binder.
  • the thickness of the pressure-sensitive adhesive layer 14 is preferably 5 to 500 m.
  • the noinder acrylic resin, urethane resin, epoxy resin, silicone resin, polyimide resin, natural rubber, polyisoprene, polyisobutylene, polychloroprene, and the like can be used.
  • the solder can be appropriately selected according to the type of metal forming the fins 11 and the operating temperature range of the heat radiation sheet 1.
  • the heat conductive filler when the heat radiating sheet 1 needs to have electric insulating properties, silicon nitride, boron nitride, aluminum nitride, aluminum oxide, magnesium oxide, titanium oxide, It is preferable to use a filler having excellent electric insulation such as silicon carbide.
  • a filler having excellent electric insulation such as silicon carbide.
  • the heat dissipation sheet 1 when the heat dissipation sheet 1 does not require electrical insulation or needs electrical conductivity, it is filled with a metal having excellent conductivity such as aluminum, copper, gold, silver, iron, and nickel. It is preferable to use a filler, graphite carbon, or the like. Further, by adding ferrite powder, it is possible to impart not only thermal conductivity but also high electromagnetic wave absorption to the adhesive layer 14.
  • the form of the heat conductive filler may be various shapes such as powder, sphere, fiber, scale, etc.
  • a powdery or spherical powder is preferably used.
  • the average particle diameter of the thermally conductive filler is preferably from 0.1 m to 100 ⁇ m, more preferably from 11 ⁇ m to 10 ⁇ m. If the particle size is large, high-density filling cannot be performed, and further, irregularities may be formed on the surface of the pressure-sensitive adhesive layer 14. Also, when the particle size is small, the dispersion becomes high, In some cases, the contact area between the particles becomes small, and the thermal conductivity of the pressure-sensitive adhesive layer 14 as a whole decreases.
  • one kind of the heat conductive filler may be used alone, it is preferable to use two or more kinds having different particle diameters in combination. Since the small-sized particles are filled so as to fill the gaps between the particles having a large particle size, the filling rate is increased, and the heat conductivity of the entire pressure-sensitive adhesive layer is improved.
  • the content of the thermally conductive filler is preferably 30 to 80 wt%, more preferably 50 to 70 wt%, based on the entire pressure-sensitive adhesive layer 14.
  • the content of the heat conductive filler is small, sufficient heat conductivity by the heat conductive filler cannot be obtained.
  • the content of the heat conductive filler is large, the flexibility of the pressure-sensitive adhesive layer 14 may be reduced, and the adhesion to the fins 11 and the heating surface of the heating element may be reduced.
  • the adhesive layer 14 may include a terpene resin, a terpene phenol resin, a xylene resin, a rosin resin, a petroleum resin, a cumarone indene resin, a phenol resin, or the like, as necessary. Can be added together. Further, as a plasticizer, phthalic acid ester, castor oil and the like may be added, and in addition, additives such as a softener, a flame retardant, a coloring pigment, an antioxidant and the like can be added.
  • the release sheet 15 a release paper, a release film, or the like can be used. By peeling the release sheet 15, the heat radiation sheet 1 can be easily installed on the surface where heat radiation is required.
  • the pressure-sensitive adhesive layer 14 of the heat radiation sheet 1 is adhered to the heat generating surface of the heat generating element.
  • a heat conductive filler is mixed in the pressure-sensitive adhesive layer 14, so that heat from the heat generating surface can be efficiently transmitted to the fins 11.
  • the substrate since the pressure-sensitive adhesive layer 14 is not provided with a substrate, the substrate has high thermal conductivity, which reduces thermal resistance.
  • the fins 11 are formed flat, the contact surface with the pressure-sensitive adhesive layer 14 is formed large, and the heat conducted to the pressure-sensitive adhesive layer 14 can be quickly transmitted to the fins 11. .
  • the winding units l la and l ib are formed to intersect each other, it is possible to transmit the heat conducted to the fins 11 through the contact portions 113 to the entire fins 11.
  • fins 1 In since the coil-shaped metal wire is formed, the heat conducted to the fin 11 having a large surface area is quickly radiated.
  • the fins 11 are provided with the voids 112, the heat radiation performance is further improved because the contact area with the outside air is large.
  • the heat dissipation sheet 1 is excellent in flexibility, the heat dissipation sheet 1 can favorably follow various surfaces such as a curved surface, a cylindrical surface, a prism surface, and an uneven surface.
  • the fin 11 a combination of metal wires 12 and 13 wound in opposite directions is used.
  • One metal wire wound in a coil shape is used.
  • the fins 11 can be formed using only the fins, and three or more fins can be combined.
  • the heat radiation sheet 1 in FIG. 8 has adhesive layers 14a and 14b on both surfaces of a base material 16, and fins 11 formed in the same manner as in the embodiment (1) are provided on one adhesive layer 14a. It is schematically configured. Further, a release sheet 15 is provided on the other pressure-sensitive adhesive layer 14b.
  • the base material 16 imparts structural stability to the pressure-sensitive adhesive layer 14, and various materials such as cloth, paper, cellophane, polyethylene, PVC, and polyester can be used. You. In addition, a heat conductive filler can be added to the base material 16 as in the case of the pressure-sensitive adhesive layer 14.
  • the thickness of the substrate 16 is preferably 2 to 5 m, more preferably 1 to 50 m. When the thickness of the base material 16 is large, the thermal resistance increases and the thermal conductivity decreases. Further, when the thickness of the base material 16 is small, the structural stability of the pressure-sensitive adhesive layer 14 becomes small, and the pressure-sensitive adhesive layer 14 does not adhere to the fins 11, so that thermal conductivity may be reduced. Other configurations of the fin 11, the pressure-sensitive adhesive layer 14, and the release sheet 15 can be performed in the same manner as in the embodiment (1).
  • the pressure-sensitive adhesive layer 14 is laminated on the base material 16, the pressure-sensitive adhesive layer 14 is provided with structural stability. This makes it possible to install the heat radiating sheet 1 in close contact with the heat generating surface without forming a gap. Other effects are provided in the same manner as in the embodiment (1).
  • a metal wire wound in a circular coil shape is used, but the present invention is not limited to this.
  • a coil-shaped metal wire wound in various shapes such as a polygon such as a square, an ellipse, and a star can be used.
  • the adjacent winding units overlap with each other by the wire, and the area of close contact increases, so that the thermal conductivity increases.
  • the heat dissipation performance is improved because the surface area is increased.
  • the force of flattening the metal wire rod wound in a coil shape by crushing or the like is not limited to this.
  • a coil-shaped metal wire is pressed so that its longitudinal end face is curved (crescent-shaped, etc.). It can be formed into a deformed surface by crushing or shaping the end surface into a polygon or the like.
  • a pressing method is performed using a rolling mill having a concave central shape with a curved central portion directed in the rolling direction. Crushing method.
  • the heat dissipation sheet according to the embodiment (3) includes a flat fin 11 in which metal wires intersect to form a mesh, and an adhesive layer 14 on which the fins 11 are laminated. Are provided, and are schematically configured. Further, a release sheet 15 is provided on the side of the adhesive layer 14 opposite to the side where the fins 11 are provided.
  • the fin 11 is provided on the pressure-sensitive adhesive layer 14 so that the metal wire is exposed.
  • the fins 11 are provided so that the metal wires cross each other, and have a contact portion 113 and a gap portion 112.
  • the material and surface treatment of the metal wire used for the fin 11 can be performed in the same manner as in the embodiment (1). Further, the pressure-sensitive adhesive layer 14 and the release sheet 15 can be formed in the same manner as in the embodiment (1).
  • the pressure-sensitive adhesive layer 14 may have a configuration in which pressure-sensitive adhesive layers are provided on both surfaces of the substrate in the same manner as in Embodiment (2).
  • the heat radiation sheet 1 having a large surface area can be easily obtained by using a metal wire.
  • the heat radiation sheet 1 since the heat radiation sheet 1 is provided with the fins 11 on the pressure-sensitive adhesive layer 14, the heat radiation sheet 1 can be easily installed on the surface where heat radiation is required via the pressure-sensitive adhesive layer 14. It becomes possible.
  • the heat conducted from the heat generating surface to the pressure-sensitive adhesive layer 14 is quickly transmitted to the fin 11 due to the contact surface force between the fin 11 and the pressure-sensitive adhesive layer 14.
  • the metal wires are provided so as to intersect with each other, the heat can be quickly transmitted to the entire fins 11 through the contact portions 113 between the metal wires.
  • the heat radiation sheet 1 since the voids 112 are formed, the surface area of the metal wire that comes into contact with the outside air increases, and heat is quickly released to the outside force of the metal wire. Since the heat radiation sheet 1 is excellent in flexibility, the heat radiation sheet 1 can favorably follow various surfaces such as a curved surface, a cylindrical surface, a prismatic surface, and a concave-convex surface.
  • any form may be used as long as the metal wires intersect with each other at a right angle.
  • a form in which metal wires formed in a ring shape are adjacent to each other so as to intersect with each other, a form in which a metal wire wound in a spiral shape and a linear metal wire intersect with each other, and the like are given.
  • the contact area between the fin 11 and the adhesive layer 14 can be increased, and the heat conductivity can be improved. You can do it.
  • the metal wire can be partially cut in one heat dissipation sheet without being cut continuously. It is.
  • a plurality of flat fins can be provided discontinuously in the pressure-sensitive adhesive layer.
  • a metal wire having a circular cross section is used.
  • a metal wire formed on an irregular surface is used. Is also good.
  • Various shapes such as a tape-shaped one can be adopted.
  • a star-shaped or wire-shaped material has a particularly complicated shape and has a large surface area, thereby improving heat radiation performance.
  • the fins 11 provided with the voids 112 are schematically formed by being laminated on the metal foil 16 provided on the upper surface of the pressure-sensitive adhesive layer 14. And the release sheet 15 The pressure-sensitive adhesive layer 14 is provided on a surface opposite to the surface on which the metal foil 16 is provided.
  • the fin 11 is formed by punching a circular through hole in the vertical direction in a sheet-like metal material formed in an uneven structure. Therefore, the fins 11 and the voids 112 are formed between the fins 11 and the metal foil 17.
  • the structure of the fins 11 is formed in a substantially planar shape, and may be in a wave shape so as to increase the surface area.
  • the sheet metal material constituting the fins 11 can be made of various material strengths. Specific examples include metal materials such as aluminum, copper, silver, and gold, and alloys of these with nickel, magnesium, zinc, silicon, and the like. In particular, an aluminum-based material is preferably used because of its excellent thermal conductivity and flexibility and low cost. Further, a corrosion-resistant metal can be used for the sheet-like metal material as in the embodiment (1).
  • the surface of the sheet-shaped metal material can be subjected to a surface treatment, if necessary, as in the embodiment (1), and a coating containing ferrite, a heat-radiating coating, etc. Can be formed. It is also possible to increase the surface area by making the surface of the sheet-shaped metal material uneven or the like.
  • the metal foil 16 is for transmitting heat from the pressure-sensitive adhesive layer 14 to the fins 11, and may have various material strengths similar to the material of the sheet-like metal material. it can. In particular, an aluminum-based material is preferably used because of its excellent thermal conductivity and flexibility and low cost.
  • the thickness of the metal foil 16 is preferably about 100 m from the viewpoint of strength and thermal conductivity.
  • the metal foil 16 also functions as a member for absorbing electromagnetic waves emitted from the electronic component.
  • the pressure-sensitive adhesive layer 14 and the release sheet 15 can be formed in the same manner as in Embodiment (1).
  • the fins 11 are provided with the voids 112, the surface area of the metal material that comes into contact with the outside air increases, and heat is quickly released to the outside force of the metal material. Further, since the heat dissipation sheet 1 is excellent in flexibility, it can favorably follow various surfaces such as a curved surface, a cylindrical surface, a prismatic surface, and an uneven surface.
  • the metal foil 17 is provided between the fin 11 and the pressure-sensitive adhesive layer 14, it is possible to absorb electromagnetic waves that also generate power such as electronic components.
  • a circular through hole is formed in the vertical direction.
  • the present invention is not limited to this. It is also possible to set up. It is also possible to provide through holes not only in the vertical direction but also in various directions. Furthermore, by providing through holes in a plurality of directions, it is possible to three-dimensionally intersect each through hole and provide a gap from a three-dimensional direction.
  • the heat dissipation sheet as described above is mainly used to dissipate heat generated in a semiconductor device such as a CPU along with a cooling fan, etc., and is also required to dissipate heat. Any application can be used as appropriate.
  • the heat dissipation sheet according to the present invention can be manufactured very inexpensively and efficiently, so that it is convenient to install the heat dissipation sheet in a relatively large area.
  • the semiconductor device 2 includes a substrate 22 in a box-shaped housing 21, and a semiconductor element 23 on the substrate 22.
  • One end of the heat radiation sheet 1 is bonded to the upper surface 231 of the semiconductor element 23, and the other end is bonded to the inner wall surface 211 of the housing 21.
  • the connection between the housing 21 and the semiconductor element 23 can be made in a curved shape.
  • the heat generated in the semiconductor element 23 can be quickly transmitted from the upper surface 231 to the housing 21 through the heat radiating sheet 1, and the heat of the semiconductor element 23 is radiated to the outside.
  • the surface area of the fins 11 is large, the heat of the air inside the housing 21 is simultaneously transmitted and can be transmitted to the housing 21.

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Abstract

A heat dissipating sheet (1) excellent in heat conductivity and heat releasing property and high in flexibility, wherein a metal wire material wound in a coil shape is formed flat and adjacent wound units (11a) and (11b) are intersected with each other, and fins (11) having space parts (112) and contact parts (113) are on an adhesive agent layer (14) so that the flat surfaces of the fins (11) are parallel with the adhesive agent layer (14). Since the metal wire wound in the coil shape is formed flat and the adjacent wound units are intersected with each other, heat is rapidly conducted from the contact parts thereof to the entire parts of the fins. Also, since the surface area of the metal wire is large, the heat can be rapidly released through the space parts formed in the fins. In addition, since the metal wire wound in the coil shape is used, the sheet can provide extremely excellent flexibility.

Description

明 細 書  Specification
放熱シート  Heat dissipation sheet
技術分野  Technical field
[0001] 本発明は放熱シートに関する。さらに詳しくは、主に半導体素子上に設置され半導 体素子の内部で発生する熱を流動する気体'液体に吸収させることによって半導体 を冷却したり、その他、熱交換素子としての種々の用途に用いられる放熱シートの技 術分野に属する。  The present invention relates to a heat dissipation sheet. More specifically, it is used mainly for cooling semiconductors by absorbing heat generated inside semiconductor elements, which are installed on semiconductor elements, into flowing gas and liquid, and for various other uses as heat exchange elements. It belongs to the technical field of the heat dissipation sheet used.
背景技術  Background art
[0002] 半導体素子は、性能の向上に伴い発熱量を増大させてきた。半導体の温度が上昇 すると半導体自体の性能が低下し、特に接合部が高温になると寿命が短くなり、ひど い場合には破損する恐れさえある。そこで、 PCの CPU等には、半導体内部の熱を 周囲の冷たい空気に拡散して冷却するための放熱シートが用いられてきた。  [0002] Semiconductor devices have increased the amount of heat generated with the improvement in performance. As the temperature of the semiconductor rises, the performance of the semiconductor itself degrades, especially at higher junctions, where its life is shortened, and in severe cases it can even be damaged. Therefore, heat dissipating sheets have been used in CPUs of PCs to spread the heat inside the semiconductor into the surrounding cool air and cool it.
[0003] 放熱シートとしては、発熱体の形状に応じて、柔軟性が必要ない場合には、アルミ -ゥム板や銅板等の金属板が用いられており、一方、柔軟性が必要とされる場合に は、熱伝導性を有するシリコンゴムシート等の熱伝導性榭脂を用いた放熱シートが使 用されている。しかしながら、熱伝導性榭脂は金属などと比較して熱伝導性が低ぐ 放熱性能に劣るものであった。そのため、従来、熱伝導性榭脂を用いた放熱シートの 熱伝導度及び放熱性能を向上させるため、種々の試みが図られている。  [0003] In the case where flexibility is not required according to the shape of the heating element, a metal plate such as an aluminum-plate plate or a copper plate is used as the heat radiation sheet. On the other hand, flexibility is required. In this case, a heat radiating sheet using a thermally conductive resin such as a silicone rubber sheet having thermal conductivity is used. However, the heat conductive resin had low heat conductivity compared to metals and the like, and was inferior in heat radiation performance. Therefore, various attempts have conventionally been made to improve the heat conductivity and heat dissipation performance of a heat dissipation sheet using a heat conductive resin.
[0004] 例えば、（特許文献 1)には、グラフアイト粉末をゴム、熱可塑性榭脂、熱可塑性エラ ストマー等の母材に分散させた熱伝導性シートが開示されている。  [0004] For example, Patent Document 1 discloses a heat conductive sheet in which graphite powder is dispersed in a base material such as rubber, thermoplastic resin, or thermoplastic elastomer.
この技術は、熱伝導性を有するグラフアイト粉末が母材中に分散されているためシ ート内部の熱伝導性が向上するものの、シートから外部へ熱を放熱する放熱性能が それほど向上しないという欠点があった。  According to this technology, although the graphite powder having thermal conductivity is dispersed in the base material, the thermal conductivity inside the sheet is improved, but the heat radiation performance of radiating heat from the sheet to the outside is not so improved. There were drawbacks.
[0005] また、（特許文献 2)には、熱伝導性物質を含むシリコーン榭脂組成物の硬化物が アルミニウム等の金属箔に積層された放熱構造体が開示されている。しかしながら、 金属箔は平板状に形成されているため空気との接触面積が小さぐ放熱性能が向上 しな！/ヽと 、う問題点があった。 [0006] 特許文献 1 :特開平 6— 291226号公報 [0005] Patent Document 2 discloses a heat dissipation structure in which a cured product of a silicone resin composition containing a thermally conductive substance is laminated on a metal foil such as aluminum. However, since the metal foil is formed in a flat plate shape, the contact area with air is small and the heat radiation performance is not improved! / ヽ, there was a problem. Patent Document 1: JP-A-6-291226
特許文献 2：特開 2001—284504号公報  Patent Document 2: JP 2001-284504 A
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0007] そこで本発明は、上記従来の状況を鑑み、熱伝導性及び放熱性に優れ、かつ柔軟 性に富んだ新規な放熱シートを提供することを目的とする。 [0007] Therefore, an object of the present invention is to provide a novel heat radiating sheet that is excellent in thermal conductivity and heat radiating property and is highly flexible in view of the above conventional situation.
課題を解決するための手段  Means for solving the problem
[0008] 上記課題を解決するため、本発明の放熱シートは、金属線材が交差して空隙部と 接触部とを有して平面的に略々連続又は不連続なシート状に形成されるフィンを、熱 伝導性を有する粘着剤層に対して、前記フィンの表面が前記粘着剤層から表出する ように設けられてなることを特徴とする。  [0008] In order to solve the above problems, the heat dissipation sheet of the present invention has a fin that is formed into a sheet that is substantially continuous or discontinuous in plan view having a void portion and a contact portion where metal wires intersect. The surface of the fin is provided so as to be exposed from the pressure-sensitive adhesive layer with respect to the pressure-sensitive adhesive layer having thermal conductivity.
[0009] 上記構成によれば、金属線材を利用して表面積の大き!、放熱シートが容易に得ら れる。また、金属線材が交差して設けられているので、金属線材同士の接触部を介し てフィンの全体に熱が速やかに伝導する。また、空隙部が生じるため、外気と接触す る金属線材の表面積が大きくなり、熱が金属線材の表面力 外気へと速やかに放出 されることとなる。そして、粘着剤層にフィンを備えた構成カゝらなるため放熱の要求さ れる面に対して、粘着剤層を介して放熱シートを簡単に設置することが可能となる。 なお、ここで、連続とは金属線材カもなるシート状のフィンが一つの放熱シートにお いて切断されることなぐ連続的に設けられていることをいう。また、不連続とは、一つ の放熱シートにおいてシート状のフィンが一部切断されていることをいい、例えば、複 数の平面状のフィンが粘着剤層に並べて設けられて ヽる場合が挙げられる。  [0009] According to the above configuration, a heat radiation sheet having a large surface area can be easily obtained by using a metal wire. Further, since the metal wires are provided crossing each other, heat is quickly conducted to the entire fin through the contact portion between the metal wires. In addition, since a void is formed, the surface area of the metal wire that comes into contact with the outside air increases, and heat is rapidly released to the surface force of the metal wire outside. Since the pressure-sensitive adhesive layer has fins, the heat-radiating sheet can be easily installed on the surface requiring heat radiation via the pressure-sensitive adhesive layer. Here, the term “continuous” means that sheet-like fins, which are also metal wires, are provided continuously without being cut by one heat dissipation sheet. In addition, discontinuity means that a sheet-like fin is partially cut in one heat dissipation sheet.For example, a case in which a plurality of planar fins are provided side by side in an adhesive layer may be provided. No.
[0010] また、本発明の放熱シートは、金属線材がコイル状に卷回されて卷回単位が形成さ れるとともに全体が扁平に形成され、隣接する卷回単位が相互に位置ずれして空隙 部と接触部を有するフィンを、熱伝導性を有する粘着剤層に対して、前記フィンの扁 平な面が前記粘着剤層と平行となるように設けてなることを特徴とする。  [0010] Further, in the heat dissipation sheet of the present invention, the metal wire is wound in a coil shape to form a winding unit, and the entire winding unit is formed flat. A fin having a portion and a contact portion is provided on a pressure-sensitive adhesive layer having thermal conductivity such that a flat surface of the fin is parallel to the pressure-sensitive adhesive layer.
[0011] 上記構成によれば、コイル状の金属線材を利用して表面積の大きい放熱シートが 容易に得られる。また、卷回単位の密着している部位を介してフィンの全体に熱が伝 導し、放熱性能が向上する。そして、粘着剤層にフィンを備えた構成力もなるため、 放熱の要求される面に対して、粘着剤層を介して放熱シートを簡単に設置することが 可能となる。 [0011] According to the above configuration, a heat dissipation sheet having a large surface area can be easily obtained by using a coil-shaped metal wire. Further, heat is transmitted to the entire fin through the closely contacted portion of the winding unit, and the heat radiation performance is improved. And since it also has a constitutional force with fins in the adhesive layer, The heat radiation sheet can be easily installed on the surface where heat radiation is required via the adhesive layer.
なお、ここでコイル状とは、円形に限定されるものではなぐ三角形や四角形等の多 角形、楕円形あるいは星形等の種々の形状を含んだものをいう。  Here, the coil shape is not limited to a circular shape but includes various shapes such as a polygon such as a triangle or a quadrangle, an ellipse, or a star.
[0012] また、本発明の放熱シートは、上記の放熱シートにおいて、コイル状の金属線材が 、右巻きに卷回されるコイル状の金属線材と、左巻きに卷回されるコイル状の金属線 材とが組み合わさったもので、各金属線材は交差して接触部を有することを特徴とす る。  [0012] Further, in the heat dissipation sheet of the present invention, in the heat dissipation sheet described above, the coil-shaped metal wire may be a right-handed coiled metal wire, or a left-handed coiled metal wire. The metal wires are combined, and each metal wire crosses and has a contact portion.
[0013] 上記構成によれば、金属線材が密集して密に形成され、熱伝導性が向上し、放熱 性能も向上する。また、右巻きと左巻きにそれぞれ卷回される金属線材同士が良好 に絡み合うため、形態の安定性が付与される。  [0013] According to the above configuration, the metal wires are densely formed and densely formed, so that the thermal conductivity is improved and the heat dissipation performance is also improved. In addition, since the metal wires wound right-handed and left-handed are well entangled, morphological stability is imparted.
[0014] また、本発明の放熱シートは、上記のいずれか記載の放熱シートにおいて、粘着剤 層に対して、フィンが設けられた面の反対面に、基材及び別の粘着剤層が順次積層 されていることを特徴とする。 [0014] Further, in the heat dissipation sheet of the present invention, in any one of the heat dissipation sheets described above, the base material and another pressure-sensitive adhesive layer are sequentially provided on the surface opposite to the surface on which the fins are provided with respect to the pressure-sensitive adhesive layer. It is characterized by being laminated.
[0015] 上記構成によれば、基材の両面に粘着剤層が設けられているため、粘着剤層の構 造安定性が向上する。なお、ここでいう粘着剤は、いわゆる接着剤も含まれる。 According to the above configuration, since the pressure-sensitive adhesive layers are provided on both surfaces of the base material, the structural stability of the pressure-sensitive adhesive layer is improved. The pressure-sensitive adhesive referred to here also includes a so-called adhesive.
[0016] また、本発明の放熱シートは、上記の放熱シートにおいて、金属線材の断面が異形 面に形成されたことを特徴とする。 [0016] Further, the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, the cross section of the metal wire is formed in an irregular shape.
[0017] 上記構成によれば、金属線材の表面積が大きくなり、また、粘着剤層との接触面積 が大きくなる場合もある。なお、ここで異形面とは、金属線材の断面が多角形状、星 形状等の異形面に形成されたことをいい、表面に形成されたきず等も含まれる。 According to the above configuration, the surface area of the metal wire is increased, and the contact area with the pressure-sensitive adhesive layer may be increased. Here, the irregular surface means that the cross section of the metal wire is formed in an irregular surface such as a polygonal shape or a star shape, and includes flaws formed on the surface.
[0018] また、本発明の放熱シートは、上記の放熱シートにおいて、粘着剤層と接触する部 位における金属線材の断面が扁平な面に形成されたことを特徴とする。 [0018] Further, the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, the cross section of the metal wire at a portion in contact with the pressure-sensitive adhesive layer is formed as a flat surface.
[0019] 上記構成によれば、金属線材と粘着剤層との接触面積が大きくなり、金属線材と粘 着剤層との間の熱伝導性が向上する。 According to the above configuration, the contact area between the metal wire and the pressure-sensitive adhesive layer is increased, and the thermal conductivity between the metal wire and the adhesive layer is improved.
[0020] また、本発明の放熱シートは、上記のの記載の放熱シートにおいて、接触部におけ る各々の金属線材の断面が扁平な面に形成したことを特徴とする。 Further, the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, the cross section of each metal wire at the contact portion is formed to be a flat surface.
[0021] 上記構成によれば、金属線材同士の接触部の接触面積が向上し、フィン全体の熱 伝導性が向上する。 According to the above configuration, the contact area of the contact portion between the metal wires is improved, and the heat of the entire fin is improved. Conductivity is improved.
[0022] また、本発明は、上記のヒートシンクにおいて、接触部が熱的結合されていることを 特徴とする。  [0022] Further, the present invention is characterized in that in the above-described heat sink, the contact portion is thermally coupled.
[0023] 上記構成によれば、接触部が熱的に結合しているため熱伝導が速や力となり、フィ ンの全体に熱が伝導しやすくなる。なお、ここで熱的結合とは、接触部での熱伝導を 損なうことなく固定することをいい、半田付け、半田メツキ、接着剤、粘着剤等の接着 手段や、振動溶接、フラッシュ溶接等の接合手段により熱的結合が行なわれる。  According to the above configuration, since the contact portions are thermally coupled, heat conduction becomes fast and strong, and heat is easily conducted to the entire fin. Here, the term "thermal coupling" refers to fixing without impairing the heat conduction at the contact portion, and means for bonding such as soldering, solder plating, adhesives, adhesives, and vibration welding and flash welding. Thermal bonding is performed by the bonding means.
[0024] また、本発明の放熱シートは、上記のいずれか放熱シートにおいて、金属線材の表 面にフェライトを含む塗膜を形成したことを特徴とする。  [0024] Further, the heat dissipation sheet of the present invention is characterized in that, in any one of the heat dissipation sheets described above, a coating film containing ferrite is formed on the surface of the metal wire.
[0025] 上記構成によれば、表面積が大きくなつて放熱性が向上するとともに、フェライトに よって電磁波が吸収される。なお、ここでいうフェライトには、いわゆるソフトフェライト、 ハードフェライト、及びその混合物が含まれる。  According to the above configuration, the heat dissipation is improved by increasing the surface area, and the ferrite absorbs the electromagnetic wave. The ferrite referred to here includes so-called soft ferrite, hard ferrite, and a mixture thereof.
[0026] さらに、本発明の放熱シートは、上記のいずれか記載の放熱シートにおいて、金属 線材力 アルミニウムもしくはその合金であることを特徴とする。  [0026] Further, the heat dissipation sheet of the present invention is characterized in that, in any of the heat dissipation sheets described above, the metal wire is aluminum or an alloy thereof.
[0027] 上記構成によれば、金属線材として、熱伝導性が高くかつ低コストな材質が選択さ れる。  According to the above configuration, a material having high thermal conductivity and low cost is selected as the metal wire.
[0028] また、本発明の放熱シートは、上記の放熱シートにおいて、金属線材の表面に陽極 酸化皮膜処理が施されて ヽることを特徴とする。  [0028] Further, the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, the surface of the metal wire is subjected to an anodic oxide film treatment.
[0029] 上記構成によれば、表面処理により耐蝕性が付与される。 According to the above configuration, corrosion resistance is imparted by the surface treatment.
[0030] また、本発明の放熱シートは、上記のいずれか記載の放熱シートにおいて、金属線 材が、耐蝕性の金属であることを特徴とする。  [0030] Further, the heat dissipation sheet of the present invention is characterized in that, in any of the heat dissipation sheets described above, the metal wire is a corrosion-resistant metal.
[0031] 上記構成によれば、腐蝕性ガスが存在するような環境などに好適に使用される放 熱シートが得られる。なお、耐蝕性の金属とは、酸、アルカリ等によって容易に侵され ない金属をいい、具体的には、チタン及びその合金、ステンレス等が含まれる。 [0031] According to the above configuration, a heat release sheet suitably used in an environment where corrosive gas is present can be obtained. Note that the corrosion-resistant metal refers to a metal that is not easily attacked by acids, alkalis, and the like, and specifically includes titanium and its alloys, stainless steel, and the like.
[0032] また、本発明の放熱シートは、上記のいずれか記載の放熱シートにおいて、金属線 材の表面に、熱放射性の塗膜を形成したことを特徴とする。 [0032] The heat dissipation sheet of the present invention is characterized in that, in any one of the heat dissipation sheets described above, a heat radiation coating film is formed on the surface of the metal wire.
[0033] 上記構成によれば、フィンによる放熱がさらに促進される。なお、熱放射性の塗膜と は、カーボンブラック等の熱放射効果を有する顔料を含んだ塗料につて形成された 塗膜をいう。 According to the above configuration, heat radiation by the fins is further promoted. Note that a heat-radiating coating film is a coating containing a pigment having a heat-radiating effect, such as carbon black. Refers to a coating film.
[0034] また、本発明の放熱シートは、上記のいずれか記載の放熱シートにおいて、粘着剤 層に熱伝導性充填剤が混合されたことを特徴とする。  [0034] The heat dissipation sheet of the present invention is characterized in that, in any one of the heat dissipation sheets described above, a heat conductive filler is mixed in the pressure-sensitive adhesive layer.
[0035] 上記構成によれば、粘着剤層に対して高!ヽ熱伝導性が付与される。熱伝導性充填 剤としては、窒化ケィ素、窒化ホウ素、窒化アルミニウム、酸ィ匕アルミニウム、炭化ケィ 素、グラフアイトカーボン等が挙げられる。 [0035] According to the above configuration, high heat conductivity is imparted to the pressure-sensitive adhesive layer. Examples of the thermally conductive filler include silicon nitride, boron nitride, aluminum nitride, aluminum oxide, silicon carbide, and graphite carbon.
[0036] さらに、本発明の放熱シートは、上記の放熱シートにおいて、熱伝導性充填剤の含 有量が粘着剤全体に対して 50— 70wt%であることを特徴とする。 [0036] Further, the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, the content of the thermally conductive filler is 50 to 70 wt% with respect to the entire pressure-sensitive adhesive.
[0037] 上記構成によれば、熱伝導性充填剤の含有量が、粘着剤層の熱伝導性と柔軟性 の観点力 最適化される。 According to the above configuration, the content of the thermally conductive filler is optimized in terms of the thermal conductivity and flexibility of the pressure-sensitive adhesive layer.
[0038] さらに、本発明の放熱シートは、上記のいずれか記載の放熱シートにおいて、粘着 剤層にフェライトが混合されたことを特徴とする。 [0038] Further, the heat dissipation sheet of the present invention is characterized in that, in any one of the heat dissipation sheets described above, ferrite is mixed in the adhesive layer.
[0039] 上記構成によれば、フェライトの粉末によって電磁波が吸収される。なお、上記と同 様に、ここでいうフェライトには、いわゆるソフトフェライト、ハードフェライト、及びその 混合物が含まれる。 According to the above configuration, the electromagnetic waves are absorbed by the ferrite powder. As described above, the ferrite here includes so-called soft ferrite, hard ferrite, and a mixture thereof.
[0040] また、本発明の放熱シートは、シート状金属材に二次元ないし三次元方向から空隙 部が形成されてなるフィンと、前記フィンに設けられる粘着剤層とから構成されるととも に、前記フィンの表面が露出するように設けられてなることを特徴とする。  [0040] Further, the heat dissipation sheet of the present invention includes a fin in which a gap is formed in a two-dimensional or three-dimensional direction in a sheet-like metal material, and an adhesive layer provided in the fin. The fin is provided so that the surface of the fin is exposed.
[0041] 上記構成によれば、シート状金属材を利用して、表面積の大きい放熱シートが容易 に得られる。また、フィン 11には二次元ないし三次元方向に空隙部が形成されてい るため、外気と接触する金属材の表面積が大きくなり、熱が金属材の表面から外気へ と速やかに放出されることとなる。  According to the above configuration, a heat dissipation sheet having a large surface area can be easily obtained using the sheet-like metal material. In addition, since the fins 11 have voids formed in two-dimensional or three-dimensional directions, the surface area of the metal material that comes into contact with the outside air increases, and heat is quickly released from the surface of the metal material to the outside air. It becomes.
なお、ここで二次元方向とは、例えばシート状金属材に貫通孔を設けた際に、各貫 通孔が単一方向に形成され、立体的に交差していない場合をいう。また、三次元方 向とは、例えば、複数の貫通孔が設けられ、各貫通孔が立体的に交差されて空隙が 形成されていること等をいう。  Here, the two-dimensional direction refers to a case where, for example, when a through-hole is provided in a sheet-shaped metal material, each through-hole is formed in a single direction and does not three-dimensionally intersect. The three-dimensional direction means, for example, that a plurality of through holes are provided, and the through holes are three-dimensionally crossed to form a void.
[0042] さらに、本発明の放熱シートは、上記の放熱シートにおいて、フィンと粘着剤層との 間に金属箔が設けられたことを特徴とする。 [0043] 上記構成によれば、熱伝導性の高い金属箔を介してフィンに熱が伝わるため、放 熱シート全体として放熱性能が向上される。また、併せて金属箔から直接熱が放射さ れ、放熱性能が向上する。そして、さらには金属箔により電磁波吸収を行うことが可 能となる。 Further, the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, a metal foil is provided between the fin and the pressure-sensitive adhesive layer. According to the above configuration, since heat is transmitted to the fins through the metal foil having high thermal conductivity, the heat dissipation performance of the entire heat dissipation sheet is improved. In addition, heat is directly radiated from the metal foil, and the heat radiation performance is improved. Further, the electromagnetic wave can be absorbed by the metal foil.
[0044] さらに、本発明の放熱シートは、上記の放熱シートにおいて、金属箔がアルミニウム もしくはその合金であることを特徴とする。  Further, the heat dissipation sheet of the present invention is characterized in that, in the heat dissipation sheet described above, the metal foil is aluminum or an alloy thereof.
[0045] 上記構成によれば、金属箔として、熱伝導性が高くかつ低コストな材質が選択され る。 According to the above configuration, a material having high thermal conductivity and low cost is selected as the metal foil.
[0046] さらに、本発明の放熱シートは、上記の放熱シートにおいて、シート状の金属が、ァ ルミ-ゥムもしくはその合金であることを特徴とする。  Further, the heat dissipation sheet of the present invention is characterized in that, in the above heat dissipation sheet, the sheet metal is aluminum or an alloy thereof.
[0047] 上記構成によれば、シート状金属材として、熱伝導性が高くかつ低コストな材質が 選択される。 According to the above configuration, a material having high thermal conductivity and low cost is selected as the sheet-like metal material.
発明の効果  The invention's effect
[0048] 本発明によれば、金属線材を有効利用することにより、大きい表面積を有し、したが つて放熱性能が高い放熱シートを低コストに得ることができる。フィンが金属線材が交 差することで空隙部と接触部とを生じるように形成されて ヽるため、接触部を介してフ イン全体に熱伝導が速やかに行われる。そして、空隙部に対して露出した金属線材 から、熱が速やかに外気へと放出される。また、金属線材が交差する構成であるため 、柔軟性に富んだ放熱シートを得ることができる。  According to the present invention, a heat radiating sheet having a large surface area and thus high heat radiating performance can be obtained at low cost by effectively utilizing a metal wire. Since the fins are formed so as to form a gap portion and a contact portion when the metal wire intersects, heat conduction is quickly performed to the entire fin via the contact portion. Then, the heat is promptly released to the outside air from the metal wire exposed to the gap. In addition, since the metal wires intersect, a heat-radiating sheet with high flexibility can be obtained.
[0049] また、特にコイル状に卷回された金属線材を扁平に形成し、隣接する卷回単位を 相互に交差させたため、その接触部からフィンの全体に速やかに熱が伝導する。ま た、金属線材の表面積が大きぐフィンに生じる空隙部を介して熱を速やかに放出す ることが可能となる。さらに、コイル状に卷回された金属線材を用いているため、柔軟 性に非常に優れている。  [0049] Further, in particular, since the metal wire wound in a coil shape is formed flat and the adjacent winding units cross each other, heat is quickly conducted from the contact portion to the entire fin. In addition, heat can be quickly released through voids generated in fins having a large surface area of the metal wire. Furthermore, since the metal wire wound in a coil shape is used, it is very excellent in flexibility.
図面の簡単な説明  Brief Description of Drawings
[0050] [図 1]実施の形態（1)に係る放熱シートの斜視図である。 FIG. 1 is a perspective view of a heat dissipation sheet according to Embodiment (1).
[図 2]図 1の部分拡大図である。  FIG. 2 is a partially enlarged view of FIG. 1.
[図 3]放熱シートに用いるフィンを示す図である。 圆 4]フィンの製造方法を示す図である。 FIG. 3 is a view showing fins used for a heat dissipation sheet. [FIG. 4] A diagram showing a method for manufacturing a fin.
圆 5]フィンの製造方法を示す図である。 [FIG. 5] A diagram showing a method for manufacturing a fin.
[図 6]図 2の A— A断面拡大図である。 FIG. 6 is an enlarged cross-sectional view taken along line AA of FIG. 2.
[図 7]図 2の B— B断面図である。 FIG. 7 is a sectional view taken along line BB of FIG. 2.
圆 8]実施の形態（2)に係る放熱シートの断面図である。 {8} is a cross-sectional view of the heat dissipation sheet according to Embodiment (2).
圆 9]実施の形態（3)に係る放熱シートの上面図である。 [9] FIG. 9 is a top view of the heat dissipation sheet according to Embodiment (3).
[図 10]図 9の B-B断面拡大図である。 FIG. 10 is an enlarged cross-sectional view taken along the line BB of FIG. 9.
圆 11]実施の形態（3)に係る放熱シートの別の形態を示す図である。 [11] FIG. 11 is a diagram showing another form of the heat dissipation sheet according to Embodiment (3).
[図 12]フィンを構成する金属線材の断面図である。  FIG. 12 is a cross-sectional view of a metal wire constituting a fin.
圆 13]実施の形態 (4)に係る放熱シートの上面図である。 [13] FIG. 13 is a top view of the heat dissipation sheet according to Embodiment (4).
[図 14]図 13の C-C断面拡大図である。  FIG. 14 is an enlarged cross-sectional view taken along the line CC of FIG. 13.
[図 15]本発明の放熱シートの用途の一例を示す図である。  FIG. 15 is a diagram showing an example of a use of the heat dissipation sheet of the present invention.
[図 16]本発明の放熱シートの用途の一例を示す図である。  FIG. 16 is a diagram showing an example of a use of a heat dissipation sheet of the present invention.
[図 17]図 16の上面図である。  FIG. 17 is a top view of FIG. 16.
符号の説明 Explanation of symbols
1 放熱シート  1 Heat dissipation sheet
11 フィン  11 Fins
111 扁平な面  111 flat surface
112 空隙部  112 void
113 接触部  113 Contact
11a, l ib 卷回単位  11a, l ib winding unit
l lc、 l id 端部 l lc, l id end
l ie 中央部 l ie central part
l lf 上面部位 l lf Upper surface part
12、 13 金属線材  12, 13 metal wire
14、 14a、 14b 粘着剤層  14, 14a, 14b Adhesive layer
15 剥離シート  15 Release sheet
16 基材 17 金属箔 16 Substrate 17 Metal foil
2 半導体装置  2 Semiconductor devices
21 筐体  21 housing
211 内壁面  211 inner wall
22 基板  22 substrate
23 半導体素子  23 Semiconductor element
231 上面  231 Top
31 パイプ  31 pipe
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0052] 以下、本発明を詳細に説明する。  Hereinafter, the present invention will be described in detail.
まず、本発明の実施の形態（1)について図 1一 7に基づき説明する。図 1の放熱シ ート 1は、コイル状に卷回された金属線材カゝら作製するフィン 11が粘着剤層 14の片 面に備えられ、粘着剤層 14の他方の面には剥離シート 15が設けられることで概略構 成されている。  First, an embodiment (1) of the present invention will be described with reference to FIGS. The heat-dissipating sheet 1 shown in FIG. 1 has a fin 11 formed on a metal wire rod wound in a coil shape on one surface of an adhesive layer 14, and a release sheet on the other surface of the adhesive layer 14. It is roughly configured by providing 15 units.
[0053] フィン 11は、図 2に示すように、右巻きに卷回されたコイル状の金属線材 12と、左 巻きに卷回されたコイル状の金属線材 13とが相互に幅方向と長手方向に位置ずれ して組み合わさり、かつ各金属線材 12、 13の全体を扁平に形成することによって作 製されている。そして、フィン 11には、各金属線材 12、 13が相互に幅方向と長手方 向に位置ずれして交差しているので、図 3に示すように多数の空隙部 112 (112a、 1 12b、 · · ·）及び接触部 113 (113a、 113b, · · · )が形成される。フィン 11は、それぞ れ異なる向きに卷回されたコイル状の金属線材 12と 13とが相互に位置ずれして組 み合わさっているため、金属線材が密集して密に形成される。  As shown in FIG. 2, the fin 11 includes a coil-shaped metal wire 12 wound right-handed and a coil-shaped metal wire 13 wound left-handed. The metal wires 12 and 13 are combined by being displaced in the direction, and the entirety of the metal wires 12 and 13 is formed to be flat. Since the metal wires 12 and 13 cross each other in the fin 11 while being displaced from each other in the width direction and the longitudinal direction, as shown in FIG. 3, a large number of voids 112 (112a, 112b, · · ·) And the contact portion 113 (113a, 113b, · · · ·) are formed. In the fin 11, the coil-shaped metal wires 12 and 13 wound in different directions are displaced and combined with each other, so that the metal wires are densely formed.
[0054] また、フィン 11は、隣接する一巻き一巻きの卷回単位 l la、 l ibが相互に位置ずれ して交差している力 特に金属線材 12、 13が互いに接触する接触部 113における 各金属線材 12、 13の断面が扁平に形成されているため、各卷回単位が相互に接触 した接触部 113の接触面積が大きくなる。これにより、接触部 113を介して熱がフィン 11全体に速やかに伝導する。  Further, the fin 11 is a force at which adjacent winding units l la and l ib are displaced from each other and intersect with each other, particularly at a contact portion 113 where the metal wires 12 and 13 contact each other. Since the cross section of each of the metal wires 12 and 13 is formed flat, the contact area of the contact portion 113 where the winding units contact each other is increased. As a result, heat is quickly conducted to the entire fin 11 via the contact portion 113.
[0055] また、コイル状の金属線材であるために、フィン 11の表面積が大きくなり，したがつ て高い放熱性能を得ることができる。そして、フィン 11には多数の空隙部 112が形成 されているため、特に金属線材の外気との接触面積が大きいため速やかに熱が放出 される。 [0055] In addition, since the coil-shaped metal wire is used, the surface area of the fin 11 is increased, and High heat dissipation performance can be obtained. Since the fins 11 have a large number of voids 112 formed therein, heat is rapidly released, particularly since the metal wire has a large contact area with the outside air.
[0056] 続いて、フィン 11を得る方法について具体的に述べる。まず、図 4に示すように左 巻きに卷回されたコイル状の金属線材 12と、右巻きに卷回されたコイル状の金属線 材 13とが組み合わされる。そして、図 5に示すように、圧延等の手段により各金属線 材 12、 13を扁平に形成することによって、フィン 11が得られる。この加圧の際には、 金属線材 12, 13の帯形の中心部分が内側（重合わせの内部側）に折曲げられるとと もに、金属線材 12, 13の重合わせの表側の部分が圧潰されて中心部分に扁平な面 111が形成される。また、外側に突出している金属線材 12, 13の中心部分が内側に 折曲げられて厚さが削減され、端部 l lc、 l idに金属線材が複雑に錯綜した凹凸構 造が形成される。  Next, a method for obtaining the fins 11 will be specifically described. First, as shown in FIG. 4, a coiled metal wire 12 wound leftward and a coiled metal wire 13 wound rightward are combined. Then, as shown in FIG. 5, the fins 11 are obtained by forming the metal wires 12 and 13 flat by means such as rolling. At the time of this pressurization, the central portion of the band shape of the metal wires 12 and 13 is bent inward (inside of the overlap), and the front portion of the overlap of the metal wires 12 and 13 is bent. Crushed to form a flat surface 111 at the center. In addition, the central portions of the metal wires 12, 13 projecting outward are bent inward to reduce the thickness, and an uneven structure in which the metal wires are complicatedly complex at the ends l lc and l id is formed. .
[0057] このように製造されたフィン 11では、金属線材 12の卷回単位 11a及び金属線材 13 の卷回単位 l ibが隣接し、相互に密着している。そして、フィン 11には、隣接した卷 回単位 1 la、 1 lbが相互に位置ずれして空隙部 112及び接触部 113が形成されて いる。具体的には、隣接する卷回単位 l la、 l ibが幅方向に長さ m、長手方向に長さ nの距離だけ位置ずれしている。幅方向の位置ずれの長さ mは、金属線材 12、 13の 直径 dに対して 0.5— 2倍が好ましい。幅方向の位置ずれの長さ mが金属線材 12、 1 3の直径 dに対して 2倍以上の場合には、フィン 11の端部 l lc、 l idにおける金属線 材の密度が低くなることがある。また、幅方向の位置ずれの長さ mが金属線材 12、 1 3の直径 dの 0.5倍未満の場合には、金属線材の重なりが大きく圧延等の手段により 扁平に形成する際の成形性が低くなることがことがある。また、長手方向の位置ずれ の長さ nは、卷回単位 l la、 l ibの長手方向の直径 kに対して 0. 3-0. 7倍が好まし ぐ 0. 4-0. 6倍が特に好ましい。  In the fin 11 manufactured as described above, the winding unit 11a of the metal wire 12 and the winding unit lib of the metal wire 13 are adjacent to each other and are in close contact with each other. In the fin 11, adjacent winding units 1 la and 1 lb are displaced from each other to form a gap portion 112 and a contact portion 113. Specifically, adjacent winding units l la and l ib are displaced by a length m in the width direction and a length n in the longitudinal direction. The length m of the displacement in the width direction is preferably 0.5 to 2 times the diameter d of the metal wires 12 and 13. If the length m of the displacement in the width direction is more than twice the diameter d of the metal wires 12 and 13, the density of the metal wires at the ends l lc and l id of the fins 11 becomes low. There is. In addition, when the length m of the displacement in the width direction is less than 0.5 times the diameter d of the metal wires 12 and 13, the overlap of the metal wires is large and the formability when forming flat by means of rolling or the like is reduced. May be lower. Also, the length n of the longitudinal displacement is preferably 0.3-0.7 times the longitudinal diameter k of the winding units l la and l ib 0.4-0.6 times. Is particularly preferred.
[0058] さらに、フィン 11は、それぞれ異なる向きに卷回されたコイル状の金属線材 12、 13 が組み合わさっているため、金属線材 12、 13が密集して接触部 113が密に形成され 、熱伝導性が向上し、放熱性能も向上する。また、左巻きおよび右巻きの金属線材 1 2、 13が絡み合うため、フィン 11の形態が安定し、コイルを連続的に圧延する際に強 度等の関係でコイルが伸びてしまうことがない。 Further, since the fin 11 is formed by combining the coil-shaped metal wires 12 and 13 wound in different directions, the metal wires 12 and 13 are densely formed, and the contact portions 113 are formed densely. Thermal conductivity is improved, and heat dissipation performance is also improved. In addition, since the left-handed and right-handed metal wires 12 and 13 are entangled with each other, the shape of the fins 11 is stable, and the fins 11 are strong when the coil is continuously rolled. The coil does not expand due to the degree and the like.
[0059] なお、各卷回単位 l la、 l ibが相互に接触した接触部 113は、半田付け、半田メッ キ、接着剤、粘着剤等の接着手段や、振動溶接、フラッシュ溶接等の接合手段を用 V、て接触した線材同士が離れな 、ように固定することで、伝熱抵抗を減少させるため の熱的結合を行なうことができる。接触部 113が固定されることで、各卷回単位 l la、 l ibの相互の密着が確実に行われ、フィン 11全体の機械的安定性が向上し、また接 触部 113を介した熱伝導性も向上する。  [0059] The contact portions 113 where the winding units l la and l ib come into contact with each other are formed by bonding means such as soldering, solder plating, an adhesive or an adhesive, or joining such as vibration welding or flash welding. By fixing the wires so that they do not separate from each other, thermal coupling can be performed to reduce the heat transfer resistance. By fixing the contact portion 113, the winding units l la and l ib are surely in close contact with each other, the mechanical stability of the entire fin 11 is improved, and the heat through the contact portion 113 is also improved. The conductivity is also improved.
[0060] さらに、図 6及び図 7に示すように、フィン 11は、金属線材 12、 13が粘着剤層 14と 接触する面を扁平に形成してなるので、粘着剤層 14に対して、面で接触することが 可能となり、その広い接触面積により効率良く熱を伝え、放熱することが可能となる。 そして、コイル状に卷回された金属線材を用いているため、柔軟性に非常に優れて おり、フィン 11の扁平な面に対して垂直方向だけでなぐ平行方向等の様々な方向 に対しても自在に折り曲げることが可能となる。  Further, as shown in FIGS. 6 and 7, the fin 11 has a flat surface in which the metal wires 12 and 13 come into contact with the pressure-sensitive adhesive layer 14. It is possible to make contact with the surface, and the large contact area enables efficient heat transfer and heat dissipation. Further, since the metal wire wound in a coil shape is used, it is very excellent in flexibility, and can be used in various directions such as a parallel direction that is not only perpendicular to the flat surface of the fin 11 but also in a parallel direction. Can be freely bent.
[0061] コイル状に卷回された金属線材を扁平に形成するには、圧延等の公知の手段によ り押し潰すなどして行うことができる。また、一方向に送られるコイルを連続的に圧延 して、長尺上のフィン 11を得ることもできる。このとき、隣接する卷回単位 l la、 l ibが 相互に適切に密着するように，圧延の圧力，圧延する角度等を適宜設定することが 好ましい。なお、図 6において、フィン 11は、扁平な面 111が外側のみに形成されて いるが、金属線材を扁平とする際の圧力や角度等を変えて、金属線材全体を扁平に 形成されたものを用いることも可能である。  [0061] The flattening of the coiled metal wire can be performed by crushing by a known means such as rolling. In addition, a long fin 11 can be obtained by continuously rolling a coil sent in one direction. At this time, it is preferable to appropriately set the rolling pressure, the rolling angle, and the like so that the adjacent winding units l la and l ib are in close contact with each other appropriately. In FIG. 6, the fin 11 has a flat surface 111 formed only on the outside, but the fin 11 is formed such that the entire metal wire is formed flat by changing the pressure, angle, and the like when the metal wire is flattened. Can also be used.
[0062] フィン 11については、種々の材質力 構成することができる。具体的には、アルミ- ゥム、銅、銀、金等の金属材料、またはこれらとニッケル，マグネシウム，亜鉛，ケィ素 等との合金等を挙げることができる。特に、アルミニウム系の材料は、熱伝導性と柔軟 性に優れ、かつ低コストであるため好適に用いられる。  [0062] The fins 11 can be made of various material strengths. Specific examples include metal materials such as aluminum, copper, silver, and gold, and alloys of these with nickel, magnesium, zinc, silicon, and the like. In particular, an aluminum-based material is preferably used because of its excellent thermal conductivity and flexibility and low cost.
[0063] また、フィン 11の金属線材の材質としては、耐蝕性の金属を用いることもできる。放 熱シートの用途によっては、腐食しやすい環境で使用される場合があるため、そのよ うな場合に適している。耐蝕性の金属の例としては、チタン、及びその合金、ステンレ スなどが挙げられる。 [0064] フィン 11を構成する金属線材には、必要に応じて、熱伝導性、耐蝕性を高めるため に表面処理を施すことができる。具体的には、銅めつき、銀めつき等が挙げられる。ま た、アルミニウム又はその合金を素材とする場合には、表面に陽極酸ィ匕皮膜処理 (ァ ルマイト処理)を施すことが好ましい。これにより、耐蝕性が向上するとともに、卷回単 位 l la、 l ibの相互に密着する接触部 113の熱抵抗が低下し、全体の放熱性をさら に高めることができる。処理の方法は，既知の工程を採用することができ，具体的に は，処理物を陽極として、シユウ酸や硫酸、リン酸等の液中で電解を行うことにより酸 化皮膜を形成することができる。なお、陽極酸ィ匕皮膜処理には、いわゆる白色アルマ イトと黒色アルマイトとがある力 いずれも適用可能である。 [0063] Further, as a material of the metal wire of the fin 11, a corrosion-resistant metal can be used. Depending on the application of the heat release sheet, it may be used in a corrosive environment, so it is suitable for such cases. Examples of corrosion resistant metals include titanium, its alloys, stainless steel, and the like. [0064] The metal wire constituting the fins 11 can be subjected to a surface treatment, if necessary, in order to enhance thermal conductivity and corrosion resistance. Specific examples include copper plating and silver plating. When aluminum or an alloy thereof is used as a material, it is preferable that the surface is subjected to anodizing treatment (almite treatment). As a result, the corrosion resistance is improved, and the thermal resistance of the contact portion 113 in which the winding units l la and l ib are in close contact with each other is reduced, so that the overall heat dissipation can be further increased. As the treatment method, a known process can be adopted. Specifically, an oxide film is formed by performing electrolysis in a solution of oxalic acid, sulfuric acid, phosphoric acid, or the like using the treated material as an anode. Can be. In the anodizing treatment, any of so-called white alumite and black alumite can be applied.
[0065] また、金属線材の表面には、必要に応じて、フェライトを含む塗膜を形成することも できる。これにより、フェライトが電磁波吸収能を有するため、全体として電磁波を効 果的に吸収する放熱シートを得ることができる。特に、フィン 11の表面は金属線材か ら構成するがゆえに凹凸形状であるため、電磁波が乱反射されて、電磁波吸収の効 果が相乗的に大きくなる。なお、フェライトとしては、軟磁性フェライト (ソフトフェライト） と、硬磁性フェライト (ハードフェライト）とが知られているが、いずれか一方を用いても 良いし、複数種を混合して用いても良い。また、フ ライトを分散させるバインダーとし ては、特に限定されることなぐアクリル榭脂、シリコーン榭脂等の一般的な物質を用 いることがでさる。  [0065] Further, a coating film containing ferrite can be formed on the surface of the metal wire, if necessary. Thus, since the ferrite has the ability to absorb electromagnetic waves, a heat dissipation sheet that effectively absorbs electromagnetic waves as a whole can be obtained. In particular, since the surface of the fin 11 is made of a metal wire and thus has an uneven shape, the electromagnetic wave is irregularly reflected, and the effect of electromagnetic wave absorption increases synergistically. As ferrite, soft magnetic ferrite (soft ferrite) and hard magnetic ferrite (hard ferrite) are known, but either one may be used or a mixture of two or more kinds may be used. . Further, as a binder for dispersing the fly, a general substance such as acrylic resin or silicone resin which is not particularly limited can be used.
[0066] さらに、金属線材の表面には、必要に応じて、フィン 11中を伝導する熱を速やかに 外部へ放熱するために、熱放射性の塗膜を形成することができる。  Further, a heat-radiating coating film can be formed on the surface of the metal wire, if necessary, in order to quickly radiate the heat conducted in the fins 11 to the outside.
このような塗膜は、熱放射効果を有する種々の顔料を含有させた塗料から形成する ことができる。顔料の例としては、カーボンブラック、アルミナ、ジルコユア、チタ二了、 シリカ、ジノレコン、マグネシア、イットリア（Y O )、コージライト（2MgO' 2Al O - 5Si  Such a coating film can be formed from a paint containing various pigments having a heat radiation effect. Examples of pigments include carbon black, alumina, zirconia, titania, silica, dinolecon, magnesia, yttria (YO), cordierite (2MgO'2AlO-5Si
2 3 2 3  2 3 2 3
O )、チタン酸アルミニウム (Al O -TiO )等を挙げることができる。これらは、いずれ O 2) and aluminum titanate (Al 2 O 3 -TiO 2). These are some
2 2 3 2 2 2 3 2
かを単独で用いても良いし、複数を複合して用いても良い。また、塗料中の顔料の量 は、所望の熱放射性に応じて適宜設定することができ、一般には塗膜の乾燥質量に 対して 10— 90wt%程度が適当である。また、バインダーとしては、熱によって劣化し 難い物質が好ましぐ例として、アクリル榭脂、シリコーン榭脂、ウレタン榭脂、ポリエス テル榭脂、フッ素榭脂などが挙げられる。なお、熱放射性の塗膜の厚さは、 1一 50 mが適当である。 1 μ m未満であると、熱放射効果力 、さくなり好ましくない。 May be used alone, or a plurality of them may be used in combination. The amount of the pigment in the paint can be appropriately set according to the desired heat radiation. Generally, the amount is suitably about 10 to 90% by weight based on the dry weight of the coating film. In addition, as the binder, a substance that is not easily deteriorated by heat is preferred, for example, acrylic resin, silicone resin, urethane resin, and polyester resin. Terpene resin, fluorine resin and the like. The thickness of the heat-radiating coating film is preferably 1 to 50 m. If it is less than 1 μm, the thermal radiation effect is undesirably reduced.
[0067] そして、フィン 11の径 (扁平な面 111の幅）は、特に限定されることなぐ要求される 放熱性能に応じて適宜設定することができる。一般には、径が大きくなると表面積が 増加し、放熱性が向上する。具体的には、製造した放熱シートの用途によっても異な る力 数 mm—数 cm程度が適当である。  [0067] The diameter of the fins 11 (the width of the flat surface 111) can be appropriately set according to the required heat radiation performance without being particularly limited. Generally, as the diameter increases, the surface area increases, and the heat dissipation improves. Specifically, a force of several mm to several cm, which differs depending on the use of the manufactured heat dissipation sheet, is appropriate.
[0068] 次に、粘着剤層 14は、フィン 11を接着固定するためのものであり、熱伝導性を有す る粘着剤、接着剤等を用いることができる。熱伝導性を有する粘着剤及び接着剤とし ては、高 ヽ熱伝導性を有する熱伝導性充填剤をバインダーに配合したものが挙げら れる。粘着剤層 14の厚みとしては、 5— 500 mであることが好ましい。  Next, the pressure-sensitive adhesive layer 14 is for bonding and fixing the fins 11, and a heat-conductive pressure-sensitive adhesive, an adhesive, or the like can be used. Examples of the pressure-sensitive adhesive and adhesive having thermal conductivity include those in which a heat-conductive filler having high thermal conductivity is blended in a binder. The thickness of the pressure-sensitive adhesive layer 14 is preferably 5 to 500 m.
[0069] ノインダーとしては、アクリル榭脂、ウレタン榭脂、エポキシ榭脂、シリコン榭脂、ポリ イミド榭脂、天然ゴム、ポリイソプレン、ポリイソブチレン、ポリクロ口プレン等を用いるこ とができる。ノ インダ一は、フィン 11を形成する金属の種類、及び放熱シート 1の使用 温度領域に応じて適宜選択可能である。  [0069] As the noinder, acrylic resin, urethane resin, epoxy resin, silicone resin, polyimide resin, natural rubber, polyisoprene, polyisobutylene, polychloroprene, and the like can be used. The solder can be appropriately selected according to the type of metal forming the fins 11 and the operating temperature range of the heat radiation sheet 1.
[0070] 熱伝導性充填剤としては、放熱シート 1が電気絶縁性を有する必要がある場合には 、窒化ケィ素、窒化ホウ素、窒化アルミニウム、酸ィ匕アルミニウム、酸ィ匕マグネシウム、 酸化チタン、炭化珪素等の電気絶縁性に優れた充填剤を用いることが好ましい。一 方、放熱シート 1が電気絶縁性を必要としない場合、あるいは電気伝導性を必要とす る場合には、アルミニウム、銅、金、銀、鉄、ニッケル等の導電性に優れた金属の充 填剤や、グラフアイトカーボン等を用いることが好ましい。また、フェライトの粉末を添 加することで、粘着剤層 14に対して熱伝導性だけでなく高 ヽ電磁波吸収能を付与す ることが可能である。  [0070] As the heat conductive filler, when the heat radiating sheet 1 needs to have electric insulating properties, silicon nitride, boron nitride, aluminum nitride, aluminum oxide, magnesium oxide, titanium oxide, It is preferable to use a filler having excellent electric insulation such as silicon carbide. On the other hand, when the heat dissipation sheet 1 does not require electrical insulation or needs electrical conductivity, it is filled with a metal having excellent conductivity such as aluminum, copper, gold, silver, iron, and nickel. It is preferable to use a filler, graphite carbon, or the like. Further, by adding ferrite powder, it is possible to impart not only thermal conductivity but also high electromagnetic wave absorption to the adhesive layer 14.
[0071] また、熱伝導性充填剤の形態としては、粉体状、球状、繊維状、麟片状等の種々の 形状のものを用いることができるが、熱伝導性充填剤の各粒子間の接触面積等を大 きくするために、粉体状、球状のものが好適に用いられる。この場合、熱伝導性充填 剤の平均粒径としては、 0. 1 m— 100 μ mであることが好ましぐ 1一 10 μ mがより 好ましい。粒径が大きい場合には、高密度に充填できず、さらには粘着剤層 14表面 に凹凸を生じさせる場合がある。また、粒径が小さい場合には、高分散となるため、 各粒子間の接触面積が小さくなり、粘着剤層 14全体として熱伝導性が低下する場合 がある。 [0071] The form of the heat conductive filler may be various shapes such as powder, sphere, fiber, scale, etc. In order to increase the contact area and the like of the powder, a powdery or spherical powder is preferably used. In this case, the average particle diameter of the thermally conductive filler is preferably from 0.1 m to 100 μm, more preferably from 11 μm to 10 μm. If the particle size is large, high-density filling cannot be performed, and further, irregularities may be formed on the surface of the pressure-sensitive adhesive layer 14. Also, when the particle size is small, the dispersion becomes high, In some cases, the contact area between the particles becomes small, and the thermal conductivity of the pressure-sensitive adhesive layer 14 as a whole decreases.
[0072] そして、上記熱伝導性充填剤は、一種類を単独で用いることも可能であるが、粒径 が異なる二種類以上を組み合わせて用いることが好まし 、。粒径の大き 、粒子間に 生じた隙間を埋めるように、粒形の小さい粒子が充填されるので、充填率が増大し、 粘着剤層全体の熱伝導性が向上する。  [0072] Although one kind of the heat conductive filler may be used alone, it is preferable to use two or more kinds having different particle diameters in combination. Since the small-sized particles are filled so as to fill the gaps between the particles having a large particle size, the filling rate is increased, and the heat conductivity of the entire pressure-sensitive adhesive layer is improved.
[0073] 熱伝導性充填剤の含有量としては、粘着剤層 14全体に対して、 30— 80wt%であ ることが好ましぐ 50— 70wt%がより好ましい。熱伝導性充填剤の含有量が少ない 場合には、熱伝導性充填剤による熱伝導性が十分に得られない。また、熱伝導性充 填剤の含有量が多い場合には、粘着剤層 14の柔軟性が低下し、フィン 11や発熱体 の発熱面との密着性が低下する場合がある。  [0073] The content of the thermally conductive filler is preferably 30 to 80 wt%, more preferably 50 to 70 wt%, based on the entire pressure-sensitive adhesive layer 14. When the content of the heat conductive filler is small, sufficient heat conductivity by the heat conductive filler cannot be obtained. In addition, when the content of the heat conductive filler is large, the flexibility of the pressure-sensitive adhesive layer 14 may be reduced, and the adhesion to the fins 11 and the heating surface of the heating element may be reduced.
[0074] 粘着剤層 14には、必要に応じて、テルペン系榭脂、テルペンフエノール榭脂、キシ レン榭脂、ロジン系榭脂、石油系榭脂、クマロン インデン榭脂、フエノール系榭脂等 の粘着付与榭脂を併添加することも可能である。また、可塑剤として、フタル酸エステ ル、ヒマシ油等を添加してもよぐ他にも軟化剤、難燃剤、着色顔料、酸化防止剤等 の添加剤をカ卩えることができる。  [0074] The adhesive layer 14 may include a terpene resin, a terpene phenol resin, a xylene resin, a rosin resin, a petroleum resin, a cumarone indene resin, a phenol resin, or the like, as necessary. Can be added together. Further, as a plasticizer, phthalic acid ester, castor oil and the like may be added, and in addition, additives such as a softener, a flame retardant, a coloring pigment, an antioxidant and the like can be added.
[0075] 剥離シート 15としては、剥離紙、剥離フィルム等を使用することができる。剥離シー ト 15を剥がすことにより、放熱シート 1を、放熱が要求される面に対して簡単に設置す ることが可能となる。  As the release sheet 15, a release paper, a release film, or the like can be used. By peeling the release sheet 15, the heat radiation sheet 1 can be easily installed on the surface where heat radiation is required.
[0076] 上記実施の形態（1)によると、剥離シート 15を剥がすことにより、発熱体の発熱面 に対して放熱シート 1の粘着剤層 14が接着される。粘着剤層 14には熱伝導性充填 剤が混合されており、発熱面からの熱をフィン 11に効率良く伝えることが可能となる。 この際、粘着剤層 14には基材が設けられていないため、基材による熱抵抗がなぐ 熱伝導性が高い。  According to the embodiment (1), by peeling off the release sheet 15, the pressure-sensitive adhesive layer 14 of the heat radiation sheet 1 is adhered to the heat generating surface of the heat generating element. A heat conductive filler is mixed in the pressure-sensitive adhesive layer 14, so that heat from the heat generating surface can be efficiently transmitted to the fins 11. At this time, since the pressure-sensitive adhesive layer 14 is not provided with a substrate, the substrate has high thermal conductivity, which reduces thermal resistance.
[0077] そして、フィン 11は、扁平に形成されているため、粘着剤層 14との接触面が大きく 形成され、粘着剤層 14に伝導した熱を速やかにフィン 11に伝えることが可能となる。 また、卷回単位 l la、 l ibが相互に交差して形成されているため、接触部 113を介し てフィン 11に伝導した熱をフィン 11の全体に伝えることが可能となる。さらに、フィン 1 1は、コイル状の金属線材力 形成されているため、表面積が大きぐフィン 11に伝 導した熱が速やかに放熱されることとなる。特に、フィン 11には、空隙部 112が設けら れているために、外気との接触面積が大きぐ放熱性能がさらに向上する。さらに、放 熱シート 1は柔軟性に優れるため、湾曲した面、円筒面、角柱面、凹凸面等の種々の 面に対しても良好に追従させることができる。 Since the fins 11 are formed flat, the contact surface with the pressure-sensitive adhesive layer 14 is formed large, and the heat conducted to the pressure-sensitive adhesive layer 14 can be quickly transmitted to the fins 11. . In addition, since the winding units l la and l ib are formed to intersect each other, it is possible to transmit the heat conducted to the fins 11 through the contact portions 113 to the entire fins 11. In addition, fins 1 In 1, since the coil-shaped metal wire is formed, the heat conducted to the fin 11 having a large surface area is quickly radiated. In particular, since the fins 11 are provided with the voids 112, the heat radiation performance is further improved because the contact area with the outside air is large. Further, since the heat dissipation sheet 1 is excellent in flexibility, the heat dissipation sheet 1 can favorably follow various surfaces such as a curved surface, a cylindrical surface, a prism surface, and an uneven surface.
[0078] なお、実施の形態（1)では、フィン 11として、互いに逆巻きに卷回された金属線材 1 2、 13を組み合わせたものを使用した力 コイル状に卷回された金属線材を一本の みを用いてフィン 11とすることも可能であり、 3本以上の複数本を組み合わせることも 可能である。 In the embodiment (1), as the fin 11, a combination of metal wires 12 and 13 wound in opposite directions is used. One metal wire wound in a coil shape is used. The fins 11 can be formed using only the fins, and three or more fins can be combined.
[0079] 次に、本発明の実施の形態（2)を図 8に基づき説明する。図 8の放熱シート 1は、基 材 16の両面に粘着剤層 14a、 14bが備えられており、実施の形態（1)と同様に作成 されたフィン 11が、片側の粘着剤層 14aに設けられて概略構成されている。そして、 他方の粘着剤層 14bには剥離シート 15が設けられている。  Next, an embodiment (2) of the present invention will be described with reference to FIG. The heat radiation sheet 1 in FIG. 8 has adhesive layers 14a and 14b on both surfaces of a base material 16, and fins 11 formed in the same manner as in the embodiment (1) are provided on one adhesive layer 14a. It is schematically configured. Further, a release sheet 15 is provided on the other pressure-sensitive adhesive layer 14b.
[0080] 基材 16は、粘着剤層 14に構造安定性を付与するもので、材質としては布、紙、セ ロハン、ポリエチレン、 PVC,ポリエステル等の種々の材質を使用することが可能であ る。また、基材 16には、粘着剤層 14と同様に熱伝導性充填材を添加することもできる 。基材 16の厚みとしては、 1一 50 mが好ましぐ 2— 5 mであることが特に好まし い。基材 16の厚みが大きい場合には、熱抵抗が大きくなり熱伝導性が低下する。ま た、基材 16の厚みが小さい場合には、粘着剤層 14の構造安定性が小さくなり、粘着 剤層 14がフィン 11に対して密着しないため、熱伝導性が低下する場合がある。それ 以外のフィン 11、粘着剤層 14、剥離シート 15の構成については、実施の形態（1)と 同様に行うことができる。  [0080] The base material 16 imparts structural stability to the pressure-sensitive adhesive layer 14, and various materials such as cloth, paper, cellophane, polyethylene, PVC, and polyester can be used. You. In addition, a heat conductive filler can be added to the base material 16 as in the case of the pressure-sensitive adhesive layer 14. The thickness of the substrate 16 is preferably 2 to 5 m, more preferably 1 to 50 m. When the thickness of the base material 16 is large, the thermal resistance increases and the thermal conductivity decreases. Further, when the thickness of the base material 16 is small, the structural stability of the pressure-sensitive adhesive layer 14 becomes small, and the pressure-sensitive adhesive layer 14 does not adhere to the fins 11, so that thermal conductivity may be reduced. Other configurations of the fin 11, the pressure-sensitive adhesive layer 14, and the release sheet 15 can be performed in the same manner as in the embodiment (1).
[0081] 実施の形態（2)によると、粘着剤層 14が基材 16上に積層されてなるため、粘着剤 層 14に構造安定性が付与される。これにより、発熱面に対して空隙を生じることなぐ 密着した状態で放熱シート 1を設置することが可能となる。それ以外の効果について は、実施の形態（1)と同様に奏される。  According to the embodiment (2), since the pressure-sensitive adhesive layer 14 is laminated on the base material 16, the pressure-sensitive adhesive layer 14 is provided with structural stability. This makes it possible to install the heat radiating sheet 1 in close contact with the heat generating surface without forming a gap. Other effects are provided in the same manner as in the embodiment (1).
[0082] なお、上記実施の形態（1)及び（2)では、円形のコイル状に卷回される金属線材を 用いているが、これに限定されるものではない。すなわち、円形以外にも三角形や四 角形等の多角形、楕円形、星形等の種々の形状に卷回されたコイル状の金属線材 を用いることができる。四角形に卷回されたコイル状の金属線材を用いた場合には隣 接する卷回単位が線と線で重なり合 、、密着する面積が大きくなるため熱伝導性が 高まる。また、星型等の複雑な形状に卷回されたコイル状の金属線材を用いた場合 には、表面積が大きくなるため放熱性能が向上する。 [0082] In the above embodiments (1) and (2), a metal wire wound in a circular coil shape is used, but the present invention is not limited to this. In other words, besides circles, triangles and four A coil-shaped metal wire wound in various shapes such as a polygon such as a square, an ellipse, and a star can be used. In the case of using a coil-shaped metal wire wound in a rectangular shape, the adjacent winding units overlap with each other by the wire, and the area of close contact increases, so that the thermal conductivity increases. Further, when a coil-shaped metal wire wound in a complicated shape such as a star shape is used, the heat dissipation performance is improved because the surface area is increased.
[0083] また、上記実施の形態（1)、 (2)では、コイル状に卷回される金属線材を、押し潰す 等して扁平に形成している力 これに限定されるものではない。すなわち、隣接する 卷回単位 l la、 l ibが相互に密着することを条件として、例えば、コイル状の金属線 材を、その長さ方向の端面が湾曲（三日月形など）になるように押し潰したり、端面が 多角形等になるように成形するなどして異形面に形成することができる。例えば、コィ ル状の金属線材を長さ方向の端面が湾曲となるように成形する方法としては、圧延 方向に向力つて中央部が湾曲して凹形状となっている圧延機を用いて押し潰す方法 が挙げられる。  [0083] In the above-described embodiments (1) and (2), the force of flattening the metal wire rod wound in a coil shape by crushing or the like is not limited to this. In other words, on condition that adjacent winding units l la and l ib are in close contact with each other, for example, a coil-shaped metal wire is pressed so that its longitudinal end face is curved (crescent-shaped, etc.). It can be formed into a deformed surface by crushing or shaping the end surface into a polygon or the like. For example, as a method of forming a coil-shaped metal wire so that the end face in the longitudinal direction is curved, a pressing method is performed using a rolling mill having a concave central shape with a curved central portion directed in the rolling direction. Crushing method.
[0084] 続いて、本発明の実施の形態（3)を図 9及び図 10に基づき説明する。図 9及び 10 に示すように、実施の形態（3)に係る放熱シートは、金属線材が交差して網目状に 形成された平面状のフィン 11と、フィン 11が積層される粘着剤層 14とが設けられて 概略構成されている。また、粘着剤層 14のフィン 11の設けられた反対側には剥離シ ート 15が備えられている。  Next, an embodiment (3) of the present invention will be described with reference to FIGS. 9 and 10. As shown in FIGS. 9 and 10, the heat dissipation sheet according to the embodiment (3) includes a flat fin 11 in which metal wires intersect to form a mesh, and an adhesive layer 14 on which the fins 11 are laminated. Are provided, and are schematically configured. Further, a release sheet 15 is provided on the side of the adhesive layer 14 opposite to the side where the fins 11 are provided.
[0085] フィン 11は、金属線材が露出するように粘着剤層 14に設けられている。そして、フィ ン 11は、金属線材が交差するように設けられており、接触部 113及び空隙部 112と が形成されている。  The fin 11 is provided on the pressure-sensitive adhesive layer 14 so that the metal wire is exposed. The fins 11 are provided so that the metal wires cross each other, and have a contact portion 113 and a gap portion 112.
[0086] フィン 11に用いられる金属線材の材質や表面処理等は実施の形態（1)と同様に行 うことができる。また、粘着剤層 14や剥離シート 15についても、実施の形態（1)と同 様に行うことが可能である。そして、粘着剤層 14については、実施の形態（2)と同様 に基材の両面に粘着剤層を設ける構成としてもよい。  [0086] The material and surface treatment of the metal wire used for the fin 11 can be performed in the same manner as in the embodiment (1). Further, the pressure-sensitive adhesive layer 14 and the release sheet 15 can be formed in the same manner as in the embodiment (1). The pressure-sensitive adhesive layer 14 may have a configuration in which pressure-sensitive adhesive layers are provided on both surfaces of the substrate in the same manner as in Embodiment (2).
[0087] 本発明の実施の形態（3)によれば、金属線材を利用して表面積の大きい放熱シー ト 1が容易に得られる。また、粘着剤層 14にフィン 11を備えた構成カゝらなるため放熱 の要求される面に対して、粘着剤層 14を介して放熱シート 1を簡単に設置することが 可能となる。発熱面から粘着剤層 14に伝導した熱は、フィン 11と粘着剤層 14との接 触面力 速やかにフィン 11に伝わる。そして、特に、金属線材が交差して設けられて V、るので、金属線材同士の接触部 113を介してフィン 11の全体に熱が速やかに伝 導することが可能となる。また、空隙部 112が生じるため、外気と接触する金属線材 の表面積が大きくなり、熱が金属線材の表面力 外気へと速やかに放出されることと なる。そして、放熱シート 1は柔軟性に優れるため、湾曲した面、円筒面、角柱面、凹 凸面等の種々の面に対しても良好に追従させることができる。 [0087] According to the embodiment (3) of the present invention, the heat radiation sheet 1 having a large surface area can be easily obtained by using a metal wire. In addition, since the heat radiation sheet 1 is provided with the fins 11 on the pressure-sensitive adhesive layer 14, the heat radiation sheet 1 can be easily installed on the surface where heat radiation is required via the pressure-sensitive adhesive layer 14. It becomes possible. The heat conducted from the heat generating surface to the pressure-sensitive adhesive layer 14 is quickly transmitted to the fin 11 due to the contact surface force between the fin 11 and the pressure-sensitive adhesive layer 14. In particular, since the metal wires are provided so as to intersect with each other, the heat can be quickly transmitted to the entire fins 11 through the contact portions 113 between the metal wires. In addition, since the voids 112 are formed, the surface area of the metal wire that comes into contact with the outside air increases, and heat is quickly released to the outside force of the metal wire. Since the heat radiation sheet 1 is excellent in flexibility, the heat radiation sheet 1 can favorably follow various surfaces such as a curved surface, a cylindrical surface, a prismatic surface, and a concave-convex surface.
[0088] なお、上記実施の形態（3)では、金属線材が直交して設けられている力 これに限 定されるものでなぐ交差していればどのような形態をとつてもよい。例えば、リング状 に形成された金属線材が相互に交差するように隣接される形態、渦巻状に卷回され た金属線材と直線状の金属線材とが相互に交差してなる形態等が挙げられる。また 、上記実施の形態（3)において、金属線材を扁平に押し潰したものを用いることで、 フィン 11と粘着剤層 14との接触面積を大きくすることができ、熱の伝導性が向上させ ることがでさる。 [0088] In the above-described embodiment (3), any form may be used as long as the metal wires intersect with each other at a right angle. For example, a form in which metal wires formed in a ring shape are adjacent to each other so as to intersect with each other, a form in which a metal wire wound in a spiral shape and a linear metal wire intersect with each other, and the like are given. . Further, in the above embodiment (3), by using a flat metal wire rod, the contact area between the fin 11 and the adhesive layer 14 can be increased, and the heat conductivity can be improved. You can do it.
[0089] さらに、上記実施の形態（3)においては、図 9に示すように金属線材は一つの放熱 シートにおいて、切断されることなく連続的に設けられている力 一部切断することも 可能である。例えば、図 11に示すように、複数の平面状のフィンが粘着剤層に並べ て設けられるようにして不連続に構成することも可能である。  Further, in the above embodiment (3), as shown in FIG. 9, the metal wire can be partially cut in one heat dissipation sheet without being cut continuously. It is. For example, as shown in FIG. 11, a plurality of flat fins can be provided discontinuously in the pressure-sensitive adhesive layer.
[0090] また、上記実施の形態（1)一（3)では、金属線材として断面が円形状のものを用い ているが、図 12に示すように、異形面に形成されたものを用いても良い。異形面とし ては、図 12に示すように (a)多角形状のもの、（b)星形状のもの、（c)複数の金属線 を撚つてワイヤ状としたもの、（d)長方形状 (テープ状)のもの等のように、種々の形状 を採用することが可能である。特に、星型状、ワイヤ状のもの等は特に複雑な形状か らなり、表面積が大きくなるため放熱性能が向上する。また、ワイヤきず等のように線 材にきずを形成して異形面に形成することも可能である。  Further, in the above embodiments (1) and (3), a metal wire having a circular cross section is used. However, as shown in FIG. 12, a metal wire formed on an irregular surface is used. Is also good. As shown in Fig. 12, (a) polygonal shape, (b) star shape, (c) wire shape by twisting multiple metal wires, (d) rectangular shape Various shapes such as a tape-shaped one can be adopted. In particular, a star-shaped or wire-shaped material has a particularly complicated shape and has a large surface area, thereby improving heat radiation performance. In addition, it is also possible to form a flaw in a wire material such as a wire flaw to form a deformed surface.
[0091] 続いて、本発明の実施の形態 (4)を図 13及び図 14に基づき説明する。図 14及び 図 14に示すように、空隙部 112が設けられたフィン 11が、粘着剤層 14の上面に設け られた金属箔 16の上に積層されて概略構成されている。そして、剥離シート 15が、 粘着剤層 14に対して、金属箔 16が設けられた面とは反対の面に設けられている。 Next, an embodiment (4) of the present invention will be described with reference to FIG. 13 and FIG. As shown in FIG. 14 and FIG. 14, the fins 11 provided with the voids 112 are schematically formed by being laminated on the metal foil 16 provided on the upper surface of the pressure-sensitive adhesive layer 14. And the release sheet 15 The pressure-sensitive adhesive layer 14 is provided on a surface opposite to the surface on which the metal foil 16 is provided.
[0092] フィン 11は、凹凸構造に形成されたシート状金属材に対して、鉛直方向に円形の 貫通孔が打ち抜かれている形成されている。このため、フィン 11、及びフィン 11と金 属箔 17との間に空隙部 112が形成される。フィン 11の構造としては、略々平面状に 形成されて 、ればよぐ表面積が大きくなるように波形状としてもょ 、。 [0092] The fin 11 is formed by punching a circular through hole in the vertical direction in a sheet-like metal material formed in an uneven structure. Therefore, the fins 11 and the voids 112 are formed between the fins 11 and the metal foil 17. The structure of the fins 11 is formed in a substantially planar shape, and may be in a wave shape so as to increase the surface area.
[0093] フィン 11を構成するシート状金属材につ 、ては、種々の材質力 構成することがで きる。具体的には、アルミニウム、銅、銀、金等の金属材料、またはこれらとニッケル， マグネシウム，亜鉛，ケィ素等との合金等を挙げることができる。特に、アルミニウム系 の材料は、熱伝導性と柔軟性に優れ、かつ低コストであるため好適に用いられる。ま た、シート状金属材には、実施の形態（1)と同様に、耐蝕性の金属を用いることもで きる。 [0093] The sheet metal material constituting the fins 11 can be made of various material strengths. Specific examples include metal materials such as aluminum, copper, silver, and gold, and alloys of these with nickel, magnesium, zinc, silicon, and the like. In particular, an aluminum-based material is preferably used because of its excellent thermal conductivity and flexibility and low cost. Further, a corrosion-resistant metal can be used for the sheet-like metal material as in the embodiment (1).
[0094] さらに、シート状金属材の表面には、実施の形態（1)と同様に、必要に応じて、表 面処理を施すことができ、フェライトを含む塗膜、熱放射性の塗膜等を形成することが できる。また、シート状金属材の表面を凹凸状等として表面積を大きくすることも可能 である。  [0094] Further, the surface of the sheet-shaped metal material can be subjected to a surface treatment, if necessary, as in the embodiment (1), and a coating containing ferrite, a heat-radiating coating, etc. Can be formed. It is also possible to increase the surface area by making the surface of the sheet-shaped metal material uneven or the like.
[0095] また、金属箔 16は、粘着剤層 14からフィン 11へと熱を伝えるためのもので、材質と しては、シート状金属材の材質と同様に種々の材質力 構成することができる。そし て、特に、アルミニウム系の材料は、熱伝導性と柔軟性に優れ、かつ低コストであるた め好適に用いられる。また、金属箔 16の厚みとしては、強度、及び熱伝導性の観点 力ら 1一 100 mであることが好ましい。  [0095] The metal foil 16 is for transmitting heat from the pressure-sensitive adhesive layer 14 to the fins 11, and may have various material strengths similar to the material of the sheet-like metal material. it can. In particular, an aluminum-based material is preferably used because of its excellent thermal conductivity and flexibility and low cost. The thickness of the metal foil 16 is preferably about 100 m from the viewpoint of strength and thermal conductivity.
また、金属箔 16は、電子部品から発せられる電磁波を吸収するものとしても機能す る。  Further, the metal foil 16 also functions as a member for absorbing electromagnetic waves emitted from the electronic component.
[0096] 粘着剤層 14、剥離シート 15については、実施の形態（1)と同様に行うことが可能で ある。  [0096] The pressure-sensitive adhesive layer 14 and the release sheet 15 can be formed in the same manner as in Embodiment (1).
[0097] 上記実施の形態 (4)によれば、シート状金属材に凹凸構造に形成することで、表面 積の大きい放熱シート 1が容易に得られる。また、粘着剤層 14にフィン 11を備えた構 成カゝらなるため放熱の要求される面に対して、粘着剤層 14を介して放熱シート 1を簡 単に設置することが可能となる。発熱面から粘着剤層 14に伝導した熱は、フィン 11と 粘着剤層 14との間に設けられた金属箔 17を介して速やかにフィン 11に伝わる。そし て、フィン 11は金属材力 構成されるため、熱は速やかにフィン 11の全体へと伝わる 。そして、フィン 11には空隙部 112が設けられているため、外気と接触する金属材の 表面積が大きくなり、熱が金属材の表面力 外気へと速やかに放出されることとなる。 そして、放熱シート 1は柔軟性に優れるため、湾曲した面、円筒面、角柱面、凹凸面 等の種々の面に対しても良好に追従させることができる。 [0097] According to the above embodiment (4), by forming a concavo-convex structure on a sheet-like metal material, heat-dissipating sheet 1 having a large surface area can be easily obtained. In addition, since the pressure-sensitive adhesive layer 14 is provided with the fins 11, the heat-radiating sheet 1 can be easily provided via the pressure-sensitive adhesive layer 14 on a surface requiring heat radiation. The heat conducted from the heating surface to the adhesive layer 14 is transferred to the fins 11 It is quickly transmitted to the fins 11 via a metal foil 17 provided between the pressure-sensitive adhesive layer 14. Since the fins 11 are made of a metal material, heat is quickly transmitted to the entire fins 11. Since the fins 11 are provided with the voids 112, the surface area of the metal material that comes into contact with the outside air increases, and heat is quickly released to the outside force of the metal material. Further, since the heat dissipation sheet 1 is excellent in flexibility, it can favorably follow various surfaces such as a curved surface, a cylindrical surface, a prismatic surface, and an uneven surface.
[0098] また、フィン 11と粘着剤層 14との間には、金属箔 17が設けられているため、電子部 品等力も発せられる電磁波を吸収することが可能となる。  [0098] Further, since the metal foil 17 is provided between the fin 11 and the pressure-sensitive adhesive layer 14, it is possible to absorb electromagnetic waves that also generate power such as electronic components.
[0099] なお、上記実施の形態 (4)では、鉛直方向に円形状の貫通孔が形成されているが 、これに限定されるものではなぐ多角形状、星形状等の異形面力 なる貫通孔を設 けることも可能である。また、鉛直方向だけでなく様々な方向に対して貫通孔を設け ることも可能である。さらに、複数の方向に対して貫通孔を設けることで、各貫通孔を 立体的に交差させて、三次元方向から空隙を設けることも可能である。  [0099] In the above-described embodiment (4), a circular through hole is formed in the vertical direction. However, the present invention is not limited to this. It is also possible to set up. It is also possible to provide through holes not only in the vertical direction but also in various directions. Furthermore, by providing through holes in a plurality of directions, it is possible to three-dimensionally intersect each through hole and provide a gap from a three-dimensional direction.
[0100] 以上のような放熱シートは、主に、冷却ファン等とともに CPU等の半導体素子上位 設置されて素子に発生する熱を放散させるために使用されるが、その他にも放熱性 が求められる用途であれば適宜用いることができる。特に、本発明に係る放熱シート は、非常に安価でかつ効率的に製造することができるため、比較的大面積の場所に 設置するのに便利である。  [0100] The heat dissipation sheet as described above is mainly used to dissipate heat generated in a semiconductor device such as a CPU along with a cooling fan, etc., and is also required to dissipate heat. Any application can be used as appropriate. In particular, the heat dissipation sheet according to the present invention can be manufactured very inexpensively and efficiently, so that it is convenient to install the heat dissipation sheet in a relatively large area.
[0101] 次に、本発明の放熱シート 1を半導体装置に設置する例について図 15に基づき説 明する。図 15に示すように、半導体装置 2には箱型の筐体 21内に、基板 22が備えら れ、基板 22上には半導体素子 23が備えられている。そして、半導体素子 23の上面 231には放熱シート 1の一方の端が接着され、他端は筐体 21の内壁面 211に接着さ れている。この際、放熱シート 1は柔軟性に富んでいるため、筐体 21と半導体素子 2 3との接続を湾曲した形状で行うことができる。  Next, an example in which the heat dissipation sheet 1 of the present invention is installed in a semiconductor device will be described with reference to FIG. As shown in FIG. 15, the semiconductor device 2 includes a substrate 22 in a box-shaped housing 21, and a semiconductor element 23 on the substrate 22. One end of the heat radiation sheet 1 is bonded to the upper surface 231 of the semiconductor element 23, and the other end is bonded to the inner wall surface 211 of the housing 21. At this time, since the heat dissipation sheet 1 is rich in flexibility, the connection between the housing 21 and the semiconductor element 23 can be made in a curved shape.
[0102] そして、半導体素子 23において発生した熱は、上面 231から放熱シート 1を通して 速やかに筐体 21へと伝えることが可能となり、半導体素子 23の熱は外部に放熱され ることとなる。また、フィン 11の表面積が大きいため、筐体 21の内部空気の熱も同時 に伝熱し、筐体 21へと伝えることが可能となる。 [0103] 次に、本発明の放熱シート 1を工場等に用いられる配管に設置する例について、図 16及び図 17に基づき説明する。図 16に示すように、放熱シート 1が、円筒状のパイ プ 31に卷きつけられて設置されている。放熱シート 1は柔軟性に富んでいるため、パ イブ 31のような円筒状のもの対しても自在に巻きつけることが可能である。 Then, the heat generated in the semiconductor element 23 can be quickly transmitted from the upper surface 231 to the housing 21 through the heat radiating sheet 1, and the heat of the semiconductor element 23 is radiated to the outside. In addition, since the surface area of the fins 11 is large, the heat of the air inside the housing 21 is simultaneously transmitted and can be transmitted to the housing 21. Next, an example in which the heat radiation sheet 1 of the present invention is installed in a pipe used in a factory or the like will be described with reference to FIGS. 16 and 17. As shown in FIG. 16, the heat radiating sheet 1 is installed by being wound around a cylindrical pipe 31. Since the heat radiating sheet 1 is rich in flexibility, it can be freely wound around a cylindrical member such as the pipe 31.
[0104] そして、パイプ 31の熱は、放熱シート 1を通して大気中へ放熱される。この際、図 17 に示すように、重なり合ったフィン 11のなかでも上面側に位置する上面部位 1 Ifが、 パイプ 31の曲面に応じて反り上がった形状を呈する。このため、フィン 11の上面部 位 l lfは、隣接する卷回単位の間に隙間 112が形成され、大気と接触する面積が大 きくなり、放熱性能がさらに向上されることとなる。さらに、フィン 11はコイル状に卷回 されているため、反り上がったフィン 11の上面部位 l lfには、フィン 11の長さ方向に 対しても通気可能な隙間が形成され、通気孔として機能する。これにより、冷却ファン 等を用いて放熱シート 1上に空気等を十分に送り込むことができ、配管の熱を速やか に除去することが可能となる。  [0104] The heat of the pipe 31 is radiated to the atmosphere through the heat radiation sheet 1. At this time, as shown in FIG. 17, among the overlapping fins 11, the upper surface portion 1 If located on the upper surface side has a shape that is warped up according to the curved surface of the pipe 31. Therefore, a gap 112 is formed between the adjacent winding units in the upper surface portion llf of the fin 11, so that the area in contact with the atmosphere is increased, and the heat radiation performance is further improved. Further, since the fin 11 is wound in a coil shape, a gap is formed in the upper surface portion llf of the warped fin 11 so that the fin 11 can be ventilated even in the length direction of the fin 11, and functions as a vent. I do. Thereby, air or the like can be sufficiently fed onto the heat radiating sheet 1 by using a cooling fan or the like, and the heat of the pipe can be quickly removed.

Claims

請求の範囲 The scope of the claims
[I] 金属線材が交差して空隙部と接触部とを有して平面的に略々連続又は不連続なシ ート状に形成されるフィンを、熱伝導性を有する粘着剤層に対して、前記フィンの表 面が前記粘着剤層から表出するように設けられてなる放熱シート。  [I] A fin that is formed in a substantially continuous or discontinuous sheet shape having a gap portion and a contact portion with a metal wire intersecting with each other with respect to a thermally conductive pressure-sensitive adhesive layer, A heat dissipation sheet provided so that the surface of the fin is exposed from the pressure-sensitive adhesive layer.
[2] 金属線材カ Sコイル状に卷回されて卷回単位が形成されるとともに全体が扁平に形 成され、隣接する卷回単位が相互に位置ずれして空隙部と接触部を有するフィンを 、熱伝導性を有する粘着剤層に対して、前記フィンの扁平な面が前記粘着剤層と平 行となるように設けてなる放熱シート。  [2] A metal wire rod is wound in an S-coil shape to form a winding unit and the whole is formed flat, and adjacent winding units are displaced from each other and have a fin having a gap portion and a contact portion. A heat-dissipating sheet provided with a heat-conductive pressure-sensitive adhesive layer such that the flat surface of the fin is parallel to the pressure-sensitive adhesive layer.
[3] 請求項 2記載の放熱シートにおいて、コイル状の金属線材が、右巻きに卷回される コイル状の金属線材と、左巻きに卷回されるコイル状の金属線材とが組み合わさった もので、各金属線材は交差して接触部を有することを特徴とする放熱シート。  [3] The heat dissipation sheet according to claim 2, wherein the coil-shaped metal wire is a combination of a coiled metal wire wound right-handed and a coiled metal wire wound left-handed. A heat dissipation sheet, wherein each metal wire crosses and has a contact portion.
[4] 請求項 1一 3のいずれか記載の放熱シートにおいて、粘着剤層に対して、フィンが 設けられた面の反対面に、基材及び別の粘着剤層が順次積層されていることを特徴 とする放熱シート。  [4] The heat radiation sheet according to any one of [13] to [13], wherein a base material and another pressure-sensitive adhesive layer are sequentially laminated on a surface of the pressure-sensitive adhesive layer opposite to a surface on which the fins are provided. A heat dissipation sheet characterized by the following.
[5] 請求項 1一 3のいずれか記載の放熱シートにおいて、金属線材の断面が異形面に 形成されたことを特徴とする放熱シート。  [5] The heat radiation sheet according to any one of claims 13 to 13, wherein a cross section of the metal wire is formed in an irregular shape.
[6] 請求項 4記載の放熱シートにおいて、金属線材の断面が異形面に形成されたこと を特徴とする放熱シート。 6. The heat radiating sheet according to claim 4, wherein a cross section of the metal wire is formed in an irregular shape.
[7] 請求項 1一 3のいずれか記載の放熱シートにおいて、粘着剤層と接触する部位に おける金属線材の断面が扁平な面に形成されたことを特徴とする放熱シート。 7. The heat radiation sheet according to claim 13, wherein a cross section of the metal wire at a portion in contact with the pressure-sensitive adhesive layer is formed as a flat surface.
[8] 請求項 4記載の放熱シートにおいて、粘着剤層と接触する部位における金属線材 の断面が扁平な面に形成されたことを特徴とする放熱シート。 [8] The heat dissipation sheet according to claim 4, wherein a cross section of the metal wire at a portion in contact with the pressure-sensitive adhesive layer is formed as a flat surface.
[9] 請求項 1一 3のいずれか記載の放熱シートにおいて、接触部における各々の金属 線材の断面が扁平な面に形成されたことを特徴とする放熱シート。 [9] The heat dissipation sheet according to any one of claims 13 to 13, wherein a cross section of each metal wire at a contact portion is formed as a flat surface.
[10] 請求項 4記載の放熱シートにおいて、接触部における各々の金属線材の断面が扁 平な面に形成されたことを特徴とする放熱シート。 10. The heat radiating sheet according to claim 4, wherein a cross section of each metal wire at the contact portion is formed as a flat surface.
[II] 請求項 1一 3のいずれか記載の放熱シートにおいて、接触部が熱的結合されてい ることを特徴とする放熱シート。 [II] The heat dissipation sheet according to any one of claims 13 to 13, wherein the contact portions are thermally coupled.
[12] 請求項 4記載の放熱シートにおいて、接触部が熱的結合されていることを特徴とす る放熱シート。 [12] The heat dissipation sheet according to claim 4, wherein the contact portions are thermally coupled.
[13] 請求項 1一 3のいずれか記載の放熱シートにおいて、金属線材の表面にフェライト を含む塗膜を形成したことを特徴とする放熱シート。  13. The heat radiation sheet according to claim 13, wherein a coating film containing ferrite is formed on a surface of the metal wire.
[14] 請求項 4記載の放熱シートにおいて、金属線材の表面にフェライトを含む塗膜を形 成したことを特徴とする放熱シート。 14. The heat dissipation sheet according to claim 4, wherein a coating containing ferrite is formed on the surface of the metal wire.
[15] 請求項 1一 3のいずれか記載の放熱シートにおいて、金属線材がアルミニウムもしく はその合金であることを特徴とする放熱シート。 15. The heat dissipation sheet according to claim 13, wherein the metal wire is aluminum or an alloy thereof.
[16] 請求項 4記載の放熱シートにおいて、金属線材がアルミニウムもしくはその合金で あることを特徴とする放熱シート。 16. The heat radiation sheet according to claim 4, wherein the metal wire is aluminum or an alloy thereof.
[17] 請求項 15記載の放熱シートにおいて、金属線材の表面に陽極酸化皮膜処理が施 されて 、ることを特徴とする放熱シート。 [17] The heat dissipation sheet according to claim 15, wherein the surface of the metal wire is subjected to an anodic oxide film treatment.
[18] 請求項 16記載の放熱シートにおいて、金属線材の表面に陽極酸化皮膜処理が施 されて 、ることを特徴とする放熱シート。 [18] The heat dissipation sheet according to claim 16, wherein the surface of the metal wire is subjected to an anodic oxide film treatment.
[19] 請求項 1一 3のいずれか記載の放熱シートにおいて、金属線材が、耐蝕性の金属 であることを特徴とする放熱シート。 [19] The heat radiation sheet according to any one of claims 13 to 13, wherein the metal wire is a corrosion-resistant metal.
[20] 請求項 4記載の放熱シートにぉ 、て、金属線材が、耐蝕性の金属であることを特徴 とする放熱シート。 [20] The heat dissipation sheet according to claim 4, wherein the metal wire is a corrosion-resistant metal.
[21] 請求項 1一 3のいずれか記載の放熱シートにおいて、金属線材の表面に、熱放射 性の塗膜を形成したことを特徴とする放熱シート。  [21] The heat radiation sheet according to any one of claims 13 to 13, wherein a heat radiation coating film is formed on a surface of the metal wire.
[22] 請求項 4記載の放熱シートにぉ ヽて、金属線材の表面に、熱放射性の塗膜を形成 したことを特徴とする放熱シート。 [22] A heat radiation sheet, characterized in that a heat radiation coating film is formed on a surface of a metal wire, in addition to the heat radiation sheet according to claim 4.
[23] シート状金属材に二次元ないし三次元方向から空隙部が形成されてなるフィンと、 前記フィンに設けられる熱伝導性を有する粘着剤層とから構成されるとともに、前記 フィンの表面が表出するように設けられてなる放熱シート。 [23] A fin in which a void is formed in a two-dimensional or three-dimensional direction in a sheet-like metal material, and a heat-conductive adhesive layer provided in the fin, and the surface of the fin is Heat dissipating sheet provided to be exposed.
[24] 請求項 23記載の放熱シートにおいて、フィンと粘着剤層との間に金属箔が設けら れたことを特徴とする放熱シート。 24. The heat dissipation sheet according to claim 23, wherein a metal foil is provided between the fin and the pressure-sensitive adhesive layer.
[25] 請求項 24記載の放熱シートにおいて、金属箔がアルミニウムもしくはその合金であ ることを特徴とする放熱シート。 [25] The heat dissipation sheet according to claim 24, wherein the metal foil is aluminum or an alloy thereof. A heat dissipating sheet, characterized in that:
[26] 請求項 23— 25のいずれか記載の放熱シートにおいて、シート状金属材が、アルミ ニゥムもしくはその合金であることを特徴とする放熱シート。  26. The heat radiation sheet according to claim 23, wherein the sheet-shaped metal material is aluminum or an alloy thereof.
PCT/JP2005/003160 2004-02-27 2005-02-25 Heat dissipating sheet WO2005083783A1 (en)

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WO2012029560A1 (en) * 2010-08-31 2012-03-08 ポリマテック株式会社 Thermally conductive sheet
JPWO2012067044A1 (en) * 2010-11-15 2014-05-12 株式会社事業創造研究所 heatsink
JP2019125665A (en) * 2018-01-16 2019-07-25 信越ポリマー株式会社 Heat dissipation structure and battery provided with the same

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JP2010162776A (en) * 2009-01-16 2010-07-29 Nissan Motor Co Ltd Heat transfer device
WO2012029560A1 (en) * 2010-08-31 2012-03-08 ポリマテック株式会社 Thermally conductive sheet
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JP2019125665A (en) * 2018-01-16 2019-07-25 信越ポリマー株式会社 Heat dissipation structure and battery provided with the same

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