WO2004077005A1 - Testgaslecksuchgerät - Google Patents
Testgaslecksuchgerät Download PDFInfo
- Publication number
- WO2004077005A1 WO2004077005A1 PCT/EP2003/014589 EP0314589W WO2004077005A1 WO 2004077005 A1 WO2004077005 A1 WO 2004077005A1 EP 0314589 W EP0314589 W EP 0314589W WO 2004077005 A1 WO2004077005 A1 WO 2004077005A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- leak detector
- housing
- vacuum pump
- detector according
- high vacuum
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
Definitions
- the invention relates to a test gas leak detector with the features of the preamble of claim 1.
- a leak detector with these features is known from DE 31 24 205 AI. It comprises a high-vacuum pump, which is designed as a turbomolecular pump and to the inlet of which a test gas detector is connected, and a forevacuum pump.
- the high vacuum pump is also equipped with an intermediate inlet and an outlet.
- a line system is connected to these connections which, in addition to the lines, has valves and connections for a test specimen and for the backing pump.
- the components mentioned are arranged in such a way that the test object is connected to the intermediate inlet of the high vacuum pump via a first valve.
- the device under test is also connected to the inlet of the backing pump via a second valve.
- the outlet of the high vacuum pump is connected to the inlet of the fore vacuum pump via a third valve.
- test gas leak detector is complex because it consists of a large number of individual components.
- Another disadvantage is the adaptation of the properties of the test gas leak detector to different leak detection methods or test objects.
- the high vacuum pump is to be replaced by another one that is adapted to the changed circumstances. This assumes that the line valve system and the test gas detector have to be disconnected from the connections of the high vacuum pump and then connected to the connections of the new high vacuum pump in a vacuum-tight manner. The more intermediate connections the high vacuum pump has, the greater the effort. From DE 195 23 430 AI it is known to equip the high vacuum pump with several intermediate connections. Designs of this type have been used more and more recently.
- the present invention has for its object to simplify the structure of a test gas leak detector of the type mentioned and to reduce the assembly effort that is necessary when adapting the leak detector to different leak detection methods or test objects.
- the international publication WO 99/61799 shows how the insert must be constructed.
- the envelope structure essentially only has the function of ensuring the mutual assignment of the individual components of the high vacuum pump (stator, motor, shaft, rotor).
- the housing of the leak detector takes on the function of the otherwise usual housing of the high-vacuum pump, namely sealing the pump-active components to the outside and contributing to the connection of the pump to the test gas detector (support of a connecting flange, connection to intermediate inlets).
- the insert consists of two or three sections; However, it expediently consists of a uniform, stable structure which can be assembled and disassembled as a whole.
- the suction capacity of the test gas leak detector can be adapted to changed circumstances. It is advantageous here that the removal or the change of the insert has no influence whatsoever on the position of the valves, that is, it is not associated with an undesired opening of connecting channels.
- the simple separation of the housing of the leak detector from the insertion of the high vacuum pump has the advantage that a cast, high vacuum block with integrated channels and components and with the receptacle provided therein can be used as the housing of the leak detection device.
- Figure 1 is a vacuum scheme for a leak detector of the type according to the invention.
- FIG. 2 shows a section through an exemplary embodiment for a leak detector according to the invention.
- Essential components of the leak detector 1 shown in FIGS. 1 and 2 are a high-vacuum pump 2 with several stages, a test gas detector 5 connected to the inlet 3 of the high-vacuum pump - expediently via a valve 4 (only in FIG. 1) (when using helium as the test gas) usually a mass spectrometer) and a backing pump 6 (only in FIG. 1).
- the high vacuum pump is designed as a compound friction pump. It has a turbomolecular pump stage 7 on the suction side and a molecular pump stage 8 on the pressure side, e.g. B. a thread step.
- the housing of the leak detector is designated 9.
- the rotor 11 with its rotor blades 12 and the stator 13 with its stator blades 14 are components of the turbomolecular pump stage.
- the stator blades 14 are held between spacer rings 15.
- Components of the molecular pump stage 8 are a rotating cylinder 21, on the outside of which a stator 25 equipped with a thread 22 is assigned.
- the inlet of the leak detector 1 is designated 27. In a known manner, it serves to exclude a test specimen to be examined for leaks, a leak detection chamber or a sniffer.
- Line 28 connects to inlet 27, via which gases are sucked in which contain test gas in the event of a defective test specimen.
- the test gas line 28 is connected via the line sections 31, 32, each equipped with a valve 33 or 34, to the stages 7, 8 of the high vacuum pump 2. Furthermore, the line 28 is connected via the line section 35 with the valve 36 to the inlet of the fore-vacuum pump 6.
- the line extending between the outlet of the high vacuum pump 2 and the inlet of the fore vacuum pump 6 is denoted by 37. It is equipped with the valve 38.
- a leak detection process takes place as follows: First, the test object or the leak detection chamber with the valve 36 open - all other valves are closed - is evacuated with the help of the fore-vacuum pump 6. The gross leak detection then begins by opening valve 38. Then after closing the valve 36 and Opening the valve 34, the fine leak detection and finally, after opening the valve 33, the highly sensitive leak detection can be carried out.
- the schematic solution according to FIG. 1 also shows a flushing gas connection which leads via line 41 with valve 42 into line 37 and via which the leak detector can be flooded for the purpose of quickly removing troublesome test gas residues.
- the leak detector 1 is equipped with a second inlet 43. It is located on the side - not on the face like inlet 27 - and can be used optionally.
- the dashed line 45 in FIG. 1 indicates the housing 9 of the leak detector 1, as is shown in FIG. 2. It can be seen that the high-vacuum pump 2, the lines 28, 31, 32, 35, 37 and the valves 33, 34, 36, 38 are integrated in the housing 9.
- the dash-dotted lines 46, 47 in FIG. 1 are intended to indicate that the backing pump 6 and / or the purge gas valve 42 can also be integrated in the housing 9.
- the design of the high-vacuum pump 2 is essential. It comprises the insert 51, which is in the ready-to-use state in the associated opening 52 in the housing 9.
- the insert itself comprises essential components of the high-vacuum pump (stator, motor, shaft, rotor) designed as a turbomolecular pump, which are held together by a casing structure 53.
- the outer shape of the envelope structure 53 is adapted to the shape of the receiving opening 52 in the housing 9. In the embodiment shown in Figure 2, it is in essentially cylindrical.
- Outer steps 54, 55 ensure • a defined position in the operational state.
- Sealing rings 56 are provided for sealing the gap between the casing structure 53 and the housing 9 or opening 52.
- the casing structure 53 and also the stators 13, 25 of the high vacuum pump stages 7, 8 are equipped with openings 58, 59 and 61, 62, respectively.
- the cross-section of these openings which can extend for example over almost the entire circumference of the pump, and the design of the pump-active surfaces at the level of these openings determine the pump properties of the high-vacuum pump. If these are changed, it is only necessary at the leak detector according to the invention, the insert 51 trainees change '.
- valves 33, 34, 36, 38 Components of the leak detector according to the invention are the valves 33, 34, 36, 38, the closure components of which are integrated in the housing 9. It is expedient if the drives 63, 64, 66, 68 of these valves are also integrated in the housing 9. To accommodate these drives, the housing 9 has cavities 71 to 74. The housing 9 is expediently divisible in a plane that intersects these cavities, so that the valves — be it the closure components alone or these together with their drive — can be assembled in a simple manner. In addition, there must be holes for control lines if the valves are not operated wirelessly.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004568669A JP4457018B2 (ja) | 2003-02-27 | 2003-12-19 | サーチガス漏れ検出器 |
US10/546,666 US7240536B2 (en) | 2003-02-27 | 2003-12-19 | Test-gas leak detector |
EP03789352A EP1597556A1 (de) | 2003-02-27 | 2003-12-19 | Testgaslecksuchgerät |
AU2003293948A AU2003293948A1 (en) | 2003-02-27 | 2003-12-19 | Test-gas leak detector |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2003108420 DE10308420A1 (de) | 2003-02-27 | 2003-02-27 | Testgaslecksuchgerät |
DE10308420.7 | 2003-02-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2004077005A1 true WO2004077005A1 (de) | 2004-09-10 |
Family
ID=32841948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2003/014589 WO2004077005A1 (de) | 2003-02-27 | 2003-12-19 | Testgaslecksuchgerät |
Country Status (6)
Country | Link |
---|---|
US (1) | US7240536B2 (de) |
EP (1) | EP1597556A1 (de) |
JP (1) | JP4457018B2 (de) |
AU (1) | AU2003293948A1 (de) |
DE (1) | DE10308420A1 (de) |
WO (1) | WO2004077005A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9841342B2 (en) | 2011-07-14 | 2017-12-12 | Leybold Gmbh | Leak detection device and method for checking objects for fluid tightness by means of a leak detection device |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0329839D0 (en) * | 2003-12-23 | 2004-01-28 | Boc Group Plc | Vacuum pump |
FR2883934B1 (fr) * | 2005-04-05 | 2010-08-20 | Cit Alcatel | Pompage rapide d'enceinte avec limitation d'energie |
DE602005007593D1 (de) * | 2005-06-30 | 2008-07-31 | Varian Spa | Vakuumpumpe |
DE102005043494A1 (de) * | 2005-09-13 | 2007-03-15 | Inficon Gmbh | Lecksuchgerät mit Schnüffelsonde |
DE102005054638B4 (de) * | 2005-11-16 | 2013-09-26 | Oerlikon Leybold Vacuum Gmbh | Mobiles Lecksuchegerät |
DE102006047856A1 (de) * | 2006-10-10 | 2008-04-17 | Inficon Gmbh | Schnüffellecksucher |
DE102007043382A1 (de) * | 2007-09-12 | 2009-03-19 | Inficon Gmbh | Schnüffellecksucher |
GB2462804B (en) * | 2008-08-04 | 2013-01-23 | Edwards Ltd | Vacuum pump |
US8230722B1 (en) | 2010-03-16 | 2012-07-31 | Sandia Corporation | Residual gas analysis device |
FR2974412B1 (fr) | 2011-04-21 | 2013-06-07 | Adixen Vacuum Products | Procede de controle d'un detecteur de fuites et detecteur de fuites |
DE202013003855U1 (de) * | 2013-04-25 | 2014-07-28 | Oerlikon Leybold Vacuum Gmbh | Untersuchungseinrichtung sowie Multi-Inlet-Vakuumpumpe |
DE102013218506A1 (de) * | 2013-09-16 | 2015-03-19 | Inficon Gmbh | Schnüffellecksucher mit mehrstufiger Membranpumpe |
DE102014101257A1 (de) * | 2014-02-03 | 2015-08-06 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102016210701A1 (de) * | 2016-06-15 | 2017-12-21 | Inficon Gmbh | Massenspektrometrischer Lecksucher mit Turbomolekularpumpe und Boosterpumpe auf gemeinsamer Welle |
CN109313100B (zh) * | 2016-06-30 | 2021-12-21 | 株式会社开滋 | 阀用耐压检查装置和其检查方法、以及氢气检测单元 |
FR3070489B1 (fr) * | 2017-08-29 | 2020-10-23 | Pfeiffer Vacuum | Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester |
FR3072774B1 (fr) * | 2017-10-19 | 2019-11-15 | Pfeiffer Vacuum | Detecteur de fuites pour le controle de l'etancheite d'un objet a tester |
DE102020132896A1 (de) | 2020-12-10 | 2022-06-15 | Inficon Gmbh | Vorrichtung zur massenspektrometrischen Leckdetektion mit dreistufiger Turbomolekularpumpe und Boosterpumpe |
CN115219112A (zh) * | 2022-06-16 | 2022-10-21 | 北京中科科仪股份有限公司 | 分子泵与质谱检漏仪 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5165872A (en) * | 1989-07-20 | 1992-11-24 | Leybold Aktiengesellschaft | Gas friction pump having a bell-shaped rotor |
EP0603694A1 (de) * | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vakuumpumpsystem |
US20020100313A1 (en) * | 2000-07-11 | 2002-08-01 | Karl Abbel | Leak detector pump |
US6457954B1 (en) * | 1998-05-26 | 2002-10-01 | Leybold Vakuum Gmbh | Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3124205A1 (de) | 1981-06-19 | 1982-12-30 | Balzers Hochvakuum Gmbh, 6200 Wiesbaden | Lecksuchanordnung |
US5733104A (en) | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
JP2655315B2 (ja) * | 1994-06-29 | 1997-09-17 | 日本真空技術株式会社 | 複合分子ポンプを使用した漏洩探知装置 |
US5634778A (en) * | 1994-11-30 | 1997-06-03 | Hein-Werner Corporation | Remote control pump |
FR2784184B1 (fr) * | 1998-10-01 | 2000-12-15 | Cit Alcatel | Detecteur de fuite compact |
DE29916531U1 (de) * | 1999-09-20 | 2001-02-08 | Volkmann Thilo | Ejektorpumpe |
-
2003
- 2003-02-27 DE DE2003108420 patent/DE10308420A1/de not_active Ceased
- 2003-12-19 WO PCT/EP2003/014589 patent/WO2004077005A1/de active Application Filing
- 2003-12-19 EP EP03789352A patent/EP1597556A1/de not_active Ceased
- 2003-12-19 AU AU2003293948A patent/AU2003293948A1/en not_active Abandoned
- 2003-12-19 US US10/546,666 patent/US7240536B2/en not_active Expired - Lifetime
- 2003-12-19 JP JP2004568669A patent/JP4457018B2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5165872A (en) * | 1989-07-20 | 1992-11-24 | Leybold Aktiengesellschaft | Gas friction pump having a bell-shaped rotor |
EP0603694A1 (de) * | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vakuumpumpsystem |
US6457954B1 (en) * | 1998-05-26 | 2002-10-01 | Leybold Vakuum Gmbh | Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump |
US20020100313A1 (en) * | 2000-07-11 | 2002-08-01 | Karl Abbel | Leak detector pump |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9841342B2 (en) | 2011-07-14 | 2017-12-12 | Leybold Gmbh | Leak detection device and method for checking objects for fluid tightness by means of a leak detection device |
Also Published As
Publication number | Publication date |
---|---|
EP1597556A1 (de) | 2005-11-23 |
US7240536B2 (en) | 2007-07-10 |
US20060169028A1 (en) | 2006-08-03 |
AU2003293948A1 (en) | 2004-09-17 |
DE10308420A1 (de) | 2004-09-09 |
JP4457018B2 (ja) | 2010-04-28 |
JP2006514288A (ja) | 2006-04-27 |
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