WO2002084243A2 - Procede et appareil de mesure de la pression - Google Patents

Procede et appareil de mesure de la pression Download PDF

Info

Publication number
WO2002084243A2
WO2002084243A2 PCT/US2002/011536 US0211536W WO02084243A2 WO 2002084243 A2 WO2002084243 A2 WO 2002084243A2 US 0211536 W US0211536 W US 0211536W WO 02084243 A2 WO02084243 A2 WO 02084243A2
Authority
WO
WIPO (PCT)
Prior art keywords
sensing
pressure
light
diaphragm
volume hologram
Prior art date
Application number
PCT/US2002/011536
Other languages
English (en)
Other versions
WO2002084243A3 (fr
Inventor
Igor Kuskovsky
Mark L. Kuskovsky
Original Assignee
Modern Optical Technologies Llc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Modern Optical Technologies Llc. filed Critical Modern Optical Technologies Llc.
Priority to AU2002256193A priority Critical patent/AU2002256193A1/en
Publication of WO2002084243A2 publication Critical patent/WO2002084243A2/fr
Publication of WO2002084243A3 publication Critical patent/WO2002084243A3/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/02—Details of features involved during the holographic process; Replication of holograms without interference recording
    • G03H1/024—Hologram nature or properties
    • G03H1/0248—Volume holograms
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G03H2001/0033—Adaptation of holography to specific applications in hologrammetry for measuring or analysing

Definitions

  • the invention relates to an optical measurement field, especially to methods for measuring pressure, and devices such as pressure sensors and scales.
  • Precise pressure measurements are necessary in a variety of technological fields.
  • oil and gas processing such as instrumentation for measuring pressure in oil wells and oil pipelines, monitoring of pressure in industrial and consumer liquid processing devices, such as boilers and the like, medical equipment manufacturing, and various weight measurement instruments, such as scales and the like, that rely on pressure for determining weight, and many other fields of use.
  • measuring pressure requires high precision that is not readily available within the present state of the art, or is expensive thus limiting the market reach of the technology at issue.
  • laboratory scales that provide high precision rely on complex components and therefore are expensive.
  • the instrumentation for determining pressure of oil wells is one of the principal applications for the pressure measurement technology.
  • the pressure inside an oil well is an important parameter of interest, the monitoring of which allows improvement of the yield from the well. It is especially important in maximizing the lifetime production of the well.
  • the pressure sensing components of the pressure measurement system must be placed deep inside the well, where environmental conditions, such as temperature and pressure, are very challenging. Also, the replacement and service of the pressure sensing components is a complicated and expensive process. Therefore, in addition to usual requirements of cost and ability to withstand conditions inside the well, the pressure sensors designed for use in oil wells preferably should be reliable, have a long useful lifetime, and minimal service requirements.
  • a variety of pressure sensors are available in the marketplace.
  • One type of conventional sensors is a spring-loaded sensor having a spring that provides a biasing force against the pressure being measured. Such sensors operate by balancing a load again a known biasing force of the spring, and determining the amount of spring deflection and the corresponding pressure exerted upon the spring.
  • the spring-loaded sensors have a number of known disadvantages, such as a relatively low degree of accuracy and the need for repeated re-calibration. Also, it is believed that the spring-loaded sensors cannot reliability operate at high pressures and temperatures .
  • Other known sensors are piezoelectric transducers, which are often used in pressure gauges and scales.
  • the piezoelectric pressure sensors operate by measuring the electric signal produced in response to changes created by the pressure being measured in a crystal lattice.
  • the piezoelectric transducers also have known disadvantages. They suffer from a need for re-calibration and a relatively short operating life. They also may be expensive and may not have sufficiently high precision for certain applications.
  • the piezoelectric transducers also are believed to require temperature compensation even at modest temperatures due to substantial differences in temperature expansion coefficients of various elements of the transducer and sensor assembly. For these and other reasons, various forms of optical sensor technology are more and more prevalent in challenging pressure measurement applications. Wave-guide elements, such as optical fiber, are often used as sensing or transmitting structures, or both, in optical sensors.
  • fiber optic sensors may be classified as either “intrinsic” or “extrinsic.”
  • the "intrinsic” fiber optic sensors rely on properties of the optical fiber itself to measure pressure or other environmental parameters .
  • optical fiber sensors include fluid level sensors, temperature sensors, fiber optic gyroscopes, and the like.
  • One type of “intrinsic” optical fiber sensors utilizes a portion of optical fiber having in-core fiber grating, such as Bragg grating (FBG) , which functions as an element upon pressure is exerted.
  • the Bragg grating may be formed by doping the optical fiber with various suitable materials (e.g., Ge) , and then exposing the doped fiber to an interference pattern, thus producing variations in the refractive index of the fiber transmission core.
  • the pressure sensor that uses Bragg grating fiber is disclosed in United States Patent No. 6,034,686.
  • the '686 patent discloses several embodiments of intrinsic optical sensors for measuring differential pressure. Essentially, in all of the embodiments of the "686 patent, an FBG element is set transversely to the direction of the pressure.
  • the FBG portion of the fiber optic cable is interrogated with a light source and a detector, with the sensing FBG portion of the fiber being under the transverse strain.
  • the spectral characteristics of the light that passes through the FBG sensing portion vary as a function of the transverse strain, and therefore the pressure, which may then be determined from the spectral analysis.
  • spectral demodulation systems such as Fabry-Perot filters, optical spectral analyzers and the like are coupled to the fiber as detectors to interpret the magnitude of spectral changes, with the signal being processed in a usual manner to calculate the strain and the differential pressure.
  • spectral sensing methodology may be excessively complicated and require expensive detecting devices.
  • the '680 patent describes an embedded fiber optic sensor having a fiber Fabry-Perot interferometer embedded into a metal part that is located in a housing. Pressure, acting on one end of the metal part, compresses the metal part, with a magnitude of compression sensed by the Fabry-Perot interferometer, thereby providing a measure of the pressure .
  • fiber optic pressure sensors are "extrinsic" sensors.
  • the fiber optic cable is used either as a transmitting structure to couple the portion of the device in direct contact with pressure, to a processing station, or to translate the pressure exerted upon a some type of mechanical element into spectral information, and ultimately into an electric signal .
  • a common type of such sensing element is Fabry-Perot interferometer.
  • the Fabry-Perot interferometers include two parallel reflective structures facing each other with one of the reflective structures being capable of deflection or movement.
  • the change in the interference pattern is a function of the magnitude of deflection.
  • United States Patent No. 5,128,537 describes a pressure sensor that uses a Fabry-Perot interferometer.
  • the '537 patent describes a pressure sensing system that includes two parallel mirrors, one of which is attached to a flexible diaphragm and another is attached to a transparent plate. A light is passed into the space between the mirrors, creating an interference pattern through the transparent plate. The change in the position of the mirror attached to the flexible diaphragm is interpreted on the basis of the changes in the interference pattern.
  • optical sensors have a number of disadvantages, some of which are inherent in their construction. Thus, many devices must utilize expensive parts, such as optical spectral analyzers, because of the nature of the pressure-sensing methodology.
  • the position of the flexible mechanical element, and therefore the signal received by a detector depends not only on the pressure but also on the temperature of the environment .
  • the material of the flexible mechanical element expands differently at different temperatures. Therefore, the temperature changes may be interpreted as the changes in pressure.
  • the changes in temperature may result in an indication of a pressure change that is erroneous, necessating various temperature-compensating elements and mechanisms.
  • the temperature compensation mechanisms inevitably rely either on independent temperature measurement or on assumptions regarding thermal expansion. The former has a potential of creating the same problems as the pressure measurement it seeks to correct, and the latter may be incorrect, and may depend on other parameters and their effects on the mechanical parts of the pressure sensing device.
  • the present invention seeks to address these needs by providing an apparatus for measuring pressure that includes a holographic element containing at least one volume hologram; a reference member; a sensing member coupled to the pressure being measured, and at least one light source; wherein the device operates by passing a reference light beam between the reference member and the holographic element, the reference beam having a constant optical path, and passing a sensing light beam between the sensing member and the holographic element, the sensing beam having optical path that varies as a function of the pressure; the volume hologram converting the reference beam and the sensing beam into an information light beam the intensity of which is a measure of the pressure .
  • the sensing member is a moving member, wherein the magnitude of the movement is a function of the pressure .
  • the sensing member may be a diaphragm, including the diaphragm made from materials having substantially identical coefficients of thermal expansion as the reference member.
  • the diaphragm and the reference member are parts of an integral unit made from the same material .
  • the preferred holographic element is a crystal of alkali halide.
  • the preferred light source is a laser source producing coherent monochromatic light, especially the light source that is a laser source producing coherent monochromatic light having a wavelength of from 635 nm to 680 nm.
  • the apparatus further includes a sensing wave guide element for passing the sensing light beam and a reference wave guide element for passing the reference light beam.
  • the diaphragm and the holographic element are not in direct contact .
  • the apparatus further includes a sensing wave guide element for passing the sensing light beam and a reference wave guide element for passing the reference light beam, wherein the wave guide elements are not in direct contact with the diaphragm or the reference member.
  • the apparatus further includes a remote component having the diaphragm and the reference element, and a measuring component having the hologram and the light source.
  • the holographic element of the apparatus may include one volume hologram or a plurality of volume holograms.
  • the apparatus may be pressure sensing gauge or a scales, including scales having a plurality of volume holograms .
  • the apparatus may include the sensing member containing transparent material having an index of refraction that changes as a function of the pressure coupled to the sensing member, wherein the sensing light beam passes through the transparent material thereby the optical path of the sensing beam varies as a function of the pressure being measured.
  • the transparent material having a low photo- elastic co-efficient.
  • the invention provides an apparatus for measuring pressure including: a light source capable of emitting at least one primary light beam; a reference member having a reference surface; a moving member having a sensing surface and a load surface, the moving member capable of movement or displacement the magnitude of which is a function of pressure applied onto the load surface of the moving member; a holographic element having at least one volume hologram located in alignment with the light source, the distance between the at least one volume hologram and the reference surface being substantially constant; and at least one signal detector; wherein, in operation of the apparatus, the at least one volume hologram splits the at least one primary light beam into a first secondary beam and a second secondary beam directed respectively onto the sensing surface of the moving member and the reference surface, wherein the first and second secondary beams are reflected thereby providing respectively a sensing beam having an optical path that changes as a function of pressure applied onto the load surface of the moving member, and a reference beam having a substantially constant optical path, the sensing beam and the reference beam being reflected toward the
  • the apparatus further includes a body including the reference member, the moving member having a first end, a second end, and a central portion, the first end and the second end being rigidly attached to the body thereby upon pressure being applied to the load surface of the moving member, the first end and the end remain stationary and the central portion moves or deflects, the sensing surface of the moving member having a sensing region located within the central portion of the moving member, the sensing region reflecting the first secondary beam; the being part of the body.
  • the apparatus may further include a sensing wave guide element for passing the sensing light beam and the first secondary light beam, and a reference wave guide element for passing the reference light beam and the second secondary light beam, wherein the wave guide elements are not in direct contact with the diaphragm or the reference member.
  • the apparatus further includes a remote component including the body, and a measuring component having the holographic element and the light source.
  • the moving member and the reference member are made from the same material whereby the thermal expansion of the moving member and the reference member is substantially identical .
  • the invention provides an apparatus for measuring pressure comprising: a light source capable of emitting at least one primary light beam; a reference member having a reference surface; a stationary member having a beam-return surface; an optically-transparent photo-elastic element having a load surface, the photo-elastic element possessing an index of refraction that changes as a function of pressure applied onto the load surface; a holographic element having at least one volume hologram located in alignment with the light source, the distance between the at least one volume hologram and the reference surface being substantially constant; and at least one signal detector; wherein, in operation of the apparatus, the at least one volume hologram splits the at least one primary light beam into a first secondary beam and a second secondary beam; the first secondary beam being directed onto the beam- return surface that reflects the first secondary beam thereby providing a sensing beam, at least one of the first secondary beam and the sensing beam passing through the optically- transparent photo-elastic element thereby the sensing beam has an optical path that is
  • the invention provides a method of measuring pressure that includes providing a reference light beam having a constant optical path; providing a sensing light beam, the optical path of which changes as a function of pressure; passing the reference beam and the sensing beam through a volume hologram thereby obtaining at least one signal beam that is a function of the pressure.
  • FIG. 1 illustrates a method of measuring pressure in accordance with one preferred aspect of the invention
  • FIG. 2A is a schematic representation of one variant of a preferred embodiment of the apparatus of the invention
  • FIG. 2B illustrates an example of suitable mathematic model for measuring pressure in accordance with the methodology of the invention
  • FIG. 2C is a schematic representation of another variant of the preferred embodiment of the apparatus of the invention.
  • FIG. 3 is a schematic representation of another preferred embodiment of the apparatus of the invention.
  • FIG. 4A is a cross-sectional view of one specific embodiment of the pressure sensor device in accordance with the invention.
  • FIG. 4B is a cross-sectional view of a specific embodiment of the pressure sensor system in accordance with the invention
  • FIGS. 5A-5C show schematic representations of various embodiments of scales in accordance with the invention. DETAILED DESCRIPTION
  • FIG. 1 illustrates the preferred pressure sensing methodology of the invention.
  • the pressure measuring system 1 incorporates a holographic element 2 with at least one volume hologram 3 , a reference element 4, a pressure-sensing element 5, and a detector 6.
  • One or more primary light beam(s) provide a reference beam Rl , directed from the reference element 4 to the volume hologram 3, and a sensing beam SI, directed from the pressure-sensing element 5 to the volume hologram 3.
  • One or more light sources (not shown) generate the primary light beam(s) .
  • the beams Rl and SI may be created in a variety of ways, some of which will be described below in reference to more specific embodiments.
  • the beams Rl and SI may be produced by using the volume hologram 3 to split a primary light beam from a single light source; by utilizing a separate splitting element (e.g., a prism) with or without a system of mirrors; by using multiple light sources, and the like.
  • a separate splitting element e.g., a prism
  • any optical methodologies including those known to skilled in the art, may be used to produce the beams Rl and SI.
  • the optical path of the reference beam Rl is kept essentially constant. As known to those of skill in the art, optical path depends on the distance its travels and the index of refraction of the medium.
  • the distance and the conditions of the medium between the reference element 4 and the holographic element 2 are kept constant.
  • the relative locations of the reference element 4 and the holographic element 2 may be kept constant.
  • the reference beam Rl is produced by reflection from the reference element 4, the beam Rl travels the same distance and its optical path remains constant unless there is change in the index of refraction of the medium.
  • the optical path of the sensing beam SI varies as a function of the pressure coupled to the sensing element 5.
  • either the index of refraction of the medium along the sensing beam SI or the distance between the elements 3 and 5 changes as a function of pressure. Sensing elements of various constructions would be suitable with the system 1.
  • the sensing element 5 may include a diaphragm or other moving element that deflects under pressure, or is displaced by the pressure being measured, with the magnitude of deflection being greater at greater pressures.
  • the sensing beam SI may be produced by reflection from the surface of the diaphragm; the optical path of the sensing beam SI would depend on the magnitude of the diaphragm deflection, and therefore would be a function of pressure exerted upon the diaphragm.
  • the medium between along the beam Rl and/or the beam SI may be gaseous or a vacuum, or may contain solid or semi-solid substance.
  • optical fiber or other wave-guide elements may be interposed between the reference element 4 and/or the sensing element 5 and the holographic element 2. Whether or not the solid elements are interposed along the beams Rl and SI, preferably, the system 1 operates without direct contact between holographic element 2 or wave-guide elements and the elements 4 and 5.
  • the beams Rl and SI are monochromatic light beams of the same wavelength. More preferably, the beams Rl and SI are coherent light beams, such as laser beams. Also, it is preferred that the wavelength of the beams Rl and SI is the same as the wavelength used to record the hologram. More than one sensing beam and/or more than one volume hologram may be utilized to obtain pressure measurement based on multiple data points.
  • volume holograms It is a property of volume holograms that if two light beams enter the hologram under Bragg angle, the resulting exiting beam(s) has intensity that depend on the phase difference ( ⁇ ) between the incoming beams. If the optical path of one of the incoming beams is constant, and the optical path of the second incoming beam is changing, the intensity of the resulting exiting beam(s) will vary as a function of the changing optical path of the second incoming beam.
  • the system 1 operates by using the volume hologram 3 to read a change in the optical path of the beam SI that, in turn, changes as a function of pressure coupled to the sensing element 5.
  • the sensing beam SI and the reference beam Rl are directed onto the volume hologram 3 of the holographic element 2 substantially under Bragg angle.
  • the beams SI and Rl interact providing at least one information beam I. . . While the invention is not limited to any specific theory, the interaction between the beams SI and Rl is believed to diffraction and interference.
  • the hologram 3 diffracts the beams, producing a transmitted beam and a diffracted beam for each of the beams Rl and SI.
  • the transmitted beam(s) and the diffracted beam(s) have the same direction and wavelength, and thus undergo interference, with the product of the interference being the information beam Ii (as well as the beam I 2 that may not be present in some conditions or may not be detected and used to measure the pressure) .
  • the intensity of the beam I x is a function of the phase difference ( ⁇ ) between the beams Rl and SI, which depends on the optical path of the beam SI.
  • the signal detector 6 measures the intensity of the information beam I ⁇ , providing information about the optical path of the beam SI, and thus the pressure coupled to the sensing element 5. Any methods known in the art may be used to describe the relationship between the intensity of beam I ⁇ and the phase difference ⁇ between the beams SI and Rl (and thus the change in the optical path of the beam SI) .
  • volume holograms For additional description of properties of volume holograms, please see, for example, Mandel et al . , The Use of Volume Holograms for Amplitude Modulation of Light, Soviet Journal of Optical Technology, 10, 19-21 (1994) , incorporated herein by reference in its entirety.
  • the methodology of the invention may be implemented in an apparatus for measuring pressure.
  • FIGS. 2A and 2C Two variants of the preferred embodiment of an apparatus 10 of the invention are shown in FIGS. 2A and 2C.
  • the apparatus 10 includes a diaphragm 11, a reference surface 12, a holographic element 13 having at least one volume hologram 13a, a light source 14, a signal detector 15, and a stationary diaphragm holding member 16 (FIG. 2A) .
  • a pinhole assembly 17 may be included to improve spatial coherence and/or to select a single mode from the light beam emitted by the light source 14. It should be understood that the apparatus 10 may include other suitable devices and systems without departing from the scope of the present invention.
  • the diaphragm 11 has a sensing surface 11a capable of reflecting light and a load surface 11a.
  • the diaphragm 11 includes diaphragm ends 21 and 22, and a central sensing region 23. As seen in FIG. 2A, the central sensing region 23 of the diaphragm 11 may deflect under pressure (shown by the LOAD arrow) applied to the load surface lib, while the ends 21 and 22 remain rigidly attached to the stationary diaphragm- holding member 16.
  • the magnitude of deflection of the diaphragm 11 is a function of the pressure upon the load surface lib.
  • the reference surface 12 may be a surface of any stationary element of the apparatus 10 capable of reflecting light.
  • the reference surface 12 is made of the same material as the diaphragm 11 or of material having substantially identical or very similar heat expansion coefficient.
  • the reference surface 12 is located near the diaphragm 11 to minimize temperature differential between the central sensing region 23 and the reference surface 12.
  • the holographic element 13 is made of media suitable for recording and storing volume (3-D) holograms. Suitable media includes, for example, alkali halide or binary glassy chalcogenide semiconductor. The media suitable for preparation of the holographic elements is discussed in greater details below. The nature of the desired holographic element is related to the wavelength of the light source 14, including relationships known to those of skill in the art .
  • the holographic element 13 is rigidly positioned between the laser source 14 and the diaphragm 11 so that the volume hologram 13a is aligned with the light source 14.
  • the rigid positioning of the holographic element 13 provides essentially constant distance between the volume hologram 13a and the reference surface 12.
  • the light source 14 is generally a laser that produces coherent light in a suitably narrow range of wavelengths, preferably monochromatic light.
  • the light source 14 may be a semiconductor laser diode, a solid-state laser, or any other suitable source of light.
  • the light source 14 is a continuously operating laser diode.
  • the preferred operational wavelength (s) of the light source 14 vary depending on the application. Generally, He-Ne laser source ( ⁇ 632 nm) and laser sources producing monochromatic light with a wavelength from 635 nm to 685 nm are preferred for use with alkali halide holographic elements.
  • the relative positioning of the light source 14, the holographic element 13, the diaphragm 11, and the reference surface 12 affects the operation of the apparatus 10.
  • the light source 14 and the holographic element 13 are permanently fixed in any manner known in the art.
  • the source 14 and the holographic element 13 are aligned so that a light beam emitted the source 14 falls onto the hologram 13a under the Bragg angle.
  • it is a characteristic property of volume holograms to split a light beam of suitable wavelength that enters the volume hologram at the Bragg angle into a transmitted light beam and a diffracted light beam, both of which exit the volume hologram under angles substantially equal to the Bragg angle of the hologram.
  • the angle between the diffracted and transmitted beams is known or easily determined.
  • the holographic element 13, Bragg-aligned with the source 14 is positioned relative to the diaphragm 11 and the reference surface 12 so that either the transmitted beam or the diffracted beam falls onto the sensing surface 11a of the diaphragm 11 in the sensing region 23, and the remaining beam falls onto the reference surface 12.
  • the transmitted beam falls onto the diaphragm 11, and the diffracted beam onto the reference surface 12.
  • the apparatus 10 may include a holographic element having a plurality of holograms having different spatial orientations, with each hologram providing a beam that falls onto different points of the sensing region 23 and is reflected as a different sensing beam into the corresponding holograms.
  • the light source 14 emits a beam Al that passes through the pinhole assembly 17 and falls onto the volume hologram 13a of the holographic element 13 at the Bragg angle (FIG. 2A) .
  • the hologram 13a splits the beam Al into a beam A2 and a beam B2.
  • the beam A2 is directed at the point 23a of the sensing surface 11a of the diaphragm 11.
  • the beam B2 is directed at the reference surface 12. Both beams exit the hologram 13a under angles substantially equal to the Bragg angle, and are reflected back to the hologram 13a as a reference beam B3 and a sensing beam A3 along the same optical paths as the beams B2 and A2, respectively.
  • the optical path of the beam B3 is constant .
  • the optical path of the beam A3 depends on the distance from the holographic element 13 to the sensing point 23a.
  • the deflection ⁇ d is a function of the change in pressure applied onto the load surface lib of the diaphragm 11.
  • the beams A3 and B3 enter the hologram 13a under the Bragg angle.
  • the beams A3 and B3 diffract and interfere, producing information beam I that also exits the hologram 13a under an angle substantially equal to the Bragg angle.
  • the intensity of the beam I changes a function of the deflection ⁇ d, which as described above may be easily correlated with the pressure change ⁇ P.
  • the intensity of the beam I likely depends on the deflection ⁇ d as a sinusoidal function.
  • FIG. 2B shows a non-limiting example of the relationship between the deflection ⁇ d and the intensity of the beam I .
  • the material and the construction of the diaphragm 11 are selected so that the intensity of the beam I varies between the deflection data points shown by arrows.
  • the intensity of the beam I is registered by the signal detector 15 and transformed into an output electrical signal, which may be measured and manipulated in any way known in the art to determine the deflection of the diaphragm 11 and consequently the pressure upon the load surface lib.
  • FIG. 2C Another variant of the apparatus 10 is shown in FIG. 2C.
  • the holographic element 13 and the diaphragm 11 may be in remote locations by using wave-guide elements, such as fiber optic cable.
  • the beams A2 and B2 may delivered to desired spatial points via wave-guide elements 27 and 28 (e.g., fiber optic cables), respectively.
  • wave-guide elements 27 and 28 e.g., fiber optic cables
  • the fiber optic cables 27 and 28 may be manipulated in any desired manner.
  • the fiber optic cable 27 has open ends 27a and 27b, placed into desired spatial points near the holographic element 13 and diaphragm 11, respectively.
  • the fiber optic element 28 has open ends 28a and 28b, connecting the reference surface 12 and the holographic element 13.
  • the open ends of the fiber optic elements 27 and 28, especially the open ends 27b and 28b, do not come in a direct contact with the diaphragm 11.
  • the open ends of the fiber optic elements 27 and 28 may be permanently fixed by any appropriate clamps or other holding elements (not shown) .
  • the distance between the open ends 27a and 28a, and the holographic crystal 13 is kept constant.
  • the optical path of the light beams inside the fiber optic cables remains constant in the absence of external strains.
  • the distance between the open end 28b and the reference surface 12 is kept the same. Therefore, optical path of the reference beam B3 is constant. Referring to FIG. 2C, the distance between the end 27b and the sensing point 23a changes as a function of pressure in the same manner as described above.
  • An important advantage of the apparatus 10 is that it is believed to require little or no temperature compensation, especially if the reference surface 12 and the diaphragm 11 are made of the same material and located near each other.
  • many prior art pressure sensors utilize direct contact between a diaphragm that transfers pressure information and the optical sensing element (e.g., optical fiber) . Because of the properties of volume holograms, such direct contact while possible in the apparatus of the invention, is not preferred, necessary, or required. If the material of the reference surface 12 and the diaphragm were the same, thermal expansion would equally affect the optical paths of both beams A3 and B3 equally. It is believed that for this reason, the temperature of the environment would have no effect on the pressure reading provided by the apparatus 10.
  • FIG. 3 An apparatus 30 includes a light source 34, a holographic element 33 with at least one volume hologram 33a, a reference surface 32, and a signal detector 36.
  • the apparatus 30 also includes a beam-return surface 39 and a photo-elastic element 31.
  • the photo-elastic element 31 is made of optically transparent material that changes its refractive index as a function of pressure. Such materials and their properties are well known to those of skill in the art. See, for example, United States Patent No. 6,219,139, incorporated herein by reference in its entirety.
  • the suitable materials include various plastics known for their photo-elastic properties.
  • the preferred materials have low photo-elastic coefficients.
  • the holographic element 33 splits the primary beam Al emitted by the light source 34 into beams A2 and B2.
  • the beam B2 is reflected by the reference surface 32 providing a reference beam B3.
  • the beam A2 is directed at the surface 39a of the beam-return element 39, providing a sensing beam A3.
  • the sensing beam A3 (as well as the beam A2) passes through the optically transparent photo-elastic element 31.
  • the optical path of the sensing beam A3 depends on the index of refraction of the photo-elastic element 31.
  • the pressure being measured is applied, preferably in a transverse manner to the sensing beam A3, to the photo-elastic element 31, thus changing its index of refraction.
  • the change in the index of refraction ( ⁇ n) is a function of the change in the cross-section of the photo-elastic element 31, which in turn is a function of pressure. Therefore,- the change in the optical path of the sensing beam A3 provides information about the pressure exerted, directly or indirectly, on the photo-elastic element 31.
  • the beams A3 and B3 are reflected back to the hologram 33a. At the hologram 33a, the beams A3 and B3 diffract and interfere, producing information beam I, the intensity of which is measured by the signal detector 15.
  • the methods and apparatuses of the invention can be used in a number of fields, including consumer, laboratory and medical scales, oil wells and pipeline sensor devices and gauges, and many others.
  • FIG. 4A shows an embodiment of a pressure sensor 100 that includes a pressure housing 110 attached to a sensor body 120 via fastener (s) 130.
  • the sensor body 120 encloses a laser source 121, a pinhole assembly 122, a holographic crystal 123 having at least one volume hologram 123a, and a photodiode 124.
  • the photodiode 124 is coupled to a signal transmission element 125 that transmits electrical signal from the photodiode for processing.
  • the holographic crystal 123 is firmly fixed in place by holding member (s) or fingers 129.
  • the pressure housing 110 includes a flange 115 for attaching the pressure housing 110 to the side surface 120a of the sensor body 120.
  • the pressure housing include a diaphragm 111 having a sensing surface Ilia and a load surface 111b that bears the pressure shown as arrow P.
  • the pressure housing 110 also includes a reference surface 112 located adjacent to the diaphragm 111.
  • the pressure housing 110 may be constructed as an integrated unit, in which the reference surface 112 and the diaphragm 111 are made of the same material and have identical thermal expansion coefficients. For this reason, the thermal expansion of diaphragm 111 and the reference surface 112 is believed to be the same, reducing or eliminating the need for temperature compensation.
  • the sensor 100 may be made of materials typically used for manufacturing pressure sensor devices and suitable for the intended application. If wave-guide elements are used with the apparatus 100, it is believed that inexpensive plastic fiber is suitable for use in the device 100.
  • the operation of the sensor 100 is similar to the operation of the apparatus described in reference to FIG. 2A.
  • the laser source 121 emits a primary light beam, which is split by the holographic crystal 123.
  • the transmitted beam is reflected off the sensing surface Ilia of the diaphragm 111 back to the crystal 123.
  • the refracted beam is reflected off reference surface 112.
  • the intensity of the diffracted /interference product beam I is recorded by the photodiode 124 and transmitted via the signal transmission element 125 for further processing.
  • the device 100 may be attached to the side pressure tap of a pipe to provide continuous information about the pressure in the pipe.
  • the holographic crystals used in the sensor 100 are alkali halide crystals (e.g., KCl and NaCl), which are very inexpensive and simple in use.
  • the device 100 shown in FIG. 4A utilizes direct light reflection. It is believed to be most suitable for applications that do not require remote sensing. If a separation between the subject of pressure measurement and the pressure sensor is desired, as, for example, in oil well applications, wave-guide elements (e.g., fiber optic cables) may be used.
  • the system 200 includes a remote sensing component 210 and a holographic measuring/processing component 220. Substantial distances may separate the components 210 and 220. For example, the component 210 may be lowered into an oil well, whereas the component 220 may remain on the surface.
  • the components 210 and 220 are connected by at least two waveguide elements, such fiber optic cables: a sensing cable 231 and a reference cable 232.
  • the sensing component 210 includes a cover 216 and a housing 213 coupled to a tap 214.
  • the housing 213 includes a diaphragm 211 with the sensing surface 211a and a reference surface 212.
  • the component 210 may be self-enclosed discrete unit or may be a part of larger device.
  • the sensing fiber optic cable 231 is rigidly positioned at a predetermined distance from a sensing surface 211a of the diaphragm 211.
  • the reference fiber optical fiber 232 is positioned at a fixed distance from the reference surface 212.
  • the diaphragm 211 operates to transfer pressure information in the manner described above.
  • the fittings 217 and 218 seal the respective fiber optic cables 231 and 232.
  • the fitting may also be used as position fixing elements.
  • the fiber optic cables 231 and 232 connect the remote sensing component to the measuring/processing component 220 that includes a light source 221, a pinhole assembly 222, a holographic crystal 223, and a photodiode 224, enclosed by a body 229 and a cover 226 with fittings 227 and 228. It should be noted that if substantial distance is present between the components 210 and 220, inexpensive plastic fiber may be inadequate, and the preferred operating wavelength of the light source 221 may be 780 nm or higher.
  • the operation of the component 220 is similar to that described previously in reference to the apparatus of Fig. 2C.
  • the signal is collected by the signal detector 224, and transmitted via the transmitting element 225 to a processing block 240.
  • the system 200 has important advantages.
  • the component 220 may be placed at convenient location, and may operate at ambient environmental conditions. The service and replacement of the component 220 is also facilitated.
  • the remote component 210 includes very small number of parts that would be subject to environmental degradation or excess wear.
  • the remote component 210 may be placed completely at a remote location within the medium the pressure of which is to be measured, thereby the temperature of the diaphragm 211 and the reference surface 212 being substantially the same, eliminating or minimizing the necessity for temperature compensation. If the remote component 210 is placed in a high temperature environment, the entire component is likely to be at the same temperature. The presence of temperature gradient between the diaphragm 211 and the surface 212 in such an environment is highly unlikely.
  • FIGS. 5A-5C show various embodiments of the scales according to the invention.
  • a single point scales 400 shown in FIG. 5A includes a measuring/display component 410 and a weight contact component 420.
  • the weight contact component 420 has a weighing platform 421 with a weighing surface 421a and a spring element 422.
  • the object to be weighted is placed on the weighing platform 421, exerting pressure (shown by arrow W) on the spring element 422.
  • the component 420 is connected to the measuring/display component 410 by a fiber optic cable 430 having open ends 430a and 430b.
  • the open end 430a is fixed in place at a predetermined distance from the spring element 422.
  • the end 430b is fixed at a desired distance from a holographic element 413 of the component 410.
  • the component 410 also may include a light source 411, a pinhole assembly 412, a stationary beam- return element 414, a photodiode 415, a processing block 416 and a display 417.
  • the primary beam Al is split, with the beam B2 reflected by the element 414, providing the reference beam B3.
  • the beam A2/sensing beam A3 travel along the fiber optic cable 430 to a sensing point 422a and back to the holographic element 413.
  • the pressure W exerted upon the surface 421a of the weighing platform 421 deflects the spring element 422, changing the distance between the sensing point 422a and end 430a of the fiber optic cable 430.
  • the change in the distance is changing the optical path of the sensing beam A3, and thus the intensity of the information beam I detected by the photo- detector 415.
  • the change in intensity is processed by the processing block 416 and displayed by the display 417.
  • the scales 500 includes a measuring/display component 510 and a weight contact component 520.
  • the component 510 is substantially identical to the component 410 of the scales 400.
  • the weight contact component 520 includes a weight platform 521 having a weighing surface 521a, a beam-return element 525 with a vertical reflective surface 525a, and a photo-elastic element 522 atop a rigid platform 528.
  • the component 510 is connected to the component 520 via a fiber optic cable 530 having a end 530a and 530b, terminating respectively in the photo-elastic element 522 and near the holographic crystal 513.
  • the weighing platform 521 compresses the photo-elastic element 522 against the platform 528, changing the cross-section of the photo- elastic element 522.
  • the scales utilizing the holographic measurement methodology may also be built as a multi-point scales 600 that include a weight contact component 620 having a plurality of spring elements 622.
  • a measuring/display component 610 of the scales 600 is substantially identical to the component 410 of the scales 400, with the exception of having a plurality of holograms within a holographic element 613 that corresponds to the number of the spring elements 622 and the corresponding number of photodiodes 615.
  • the multi-point scales 600 will have several spring elements 622 that could change their positions independently of each other and with different rate. The change in the locations of the spring elements could be measured independently by the plurality of photodiodes 615.
  • the rate of change may depend on the location of the center of gravity of the applied weight on the weighing platform 621. By comparing the outputs of the photodiodes 615, a improved precision of measurement may be achieved.
  • the holographic elements utilized in the methods and devices of the invention have volume (3-D) holograms recorded in a suitable media.
  • holograms are recorded in solid media, more preferably, alkali halide media.
  • the preferred alkali halide media for recording the 3-D holograms include KCL and NACL.
  • KBR binary glassy chalcogenide semiconductors (e.g., As 2 S 3 and As 2 Se 3 )
  • lithium niobite may be used.
  • the crystal is first grown by any methods known to those skilled in the art, for example by the methods of Bridgeman or Kiropolus .
  • Certain additives or activators may be added to increase the photosensitivity of the alkali halide crystal.
  • Such additives or activators may include, for example, divalent cations or anions, such as Cu 2+ , which are believed to help produce electron traps of desired depth in the alkali halide crystal lattice.
  • the electron traps are preferred to be sufficiently deep to require a sufficiently high energy to remove the electron from the trap at temperatures desired for recording of the 3-D holograms.
  • the traps that require ionization energy of 0.4 eV or higher are preferred.
  • additively colored alkali halide crystals having so-called F-centers are especially suitable since they create electron flows of high intensity.
  • Such additively colored crystals may be produced for example by heating alkali halide media in the presence of free alkali metals such as potassium and sodium, or by x-ray irradiation.
  • Alkali halide crystals having the F-centers exhibit certain characteristic F-center absorption bands in specific regions of electromagnetic spectra.
  • a crystal of KCL grown by the method described herein has the F-center absorption band in the range of from about 450 nm to about 600 nm with a maximum at approximately about 560 nm.
  • the F-center absorption band for the KBR crystal is observed in the range of from about 500 nm to about 700 nm, with the maximum at approximately about 620 nm.
  • the F-centers may be transformed into so-called X-centers, and ultimately into colloidal clusters, where the concentration of the X- centers is especially high.
  • F-centers may be transformed into X-centers, and further into colloidal clusters at certain process parameters by the action of the light beams.
  • the light beams are believed to cause the X-centers to align along their path, specifically in the area where the light beams interact within the crystal .
  • two coherent light beams preferably two laser beams, which intersect at an angle ⁇
  • the coherent light beams produce interference patterns inside the crystal, the areas of larger and smaller light intensity.
  • the coherent light beams induce formation of the X-centers, and ultimately the colloidal clusters, which are believed to align themselves in accordance with the interference pattern, thus producing a 3-D hologram.
  • Several 3-D holograms may be recorded in essentially the same or very proximately placed location (s) within the crystal. Selecting the location (s) where the recording beams intersect may affect the placement the hologram (s) within the crystal. If several different holograms were recorded, the external beam of light would be deflected at several angles.
  • KCL potassium chloride
  • KBR potassium bromide
  • the KCL crystals are grown in air.
  • EXAMPLE I The wafer of KCL, prepared from potassium chloride obtained from Donetsk Chemical Factory, Ukraine, has been heated in a hermetic metal camera in the presence of air and 3 to 5 g of potassium for 24 hours at about 640° C. After heating, the hermetic camera has been rapidly cooled down to room temperature. The wafer of alkali halide became additively colored, and contained F-center absorption bands. The processed alkali halide wafer was carved into plates or crystals of required size. The preferred size is 10 x 10 x 0.5 mm. The faces of the plates or crystals were polished using diamond disks until mirror surfaces formed, which took approximately 10 seconds. The crystals prepared by the above-described method were used to record three-dimensional holograms.
  • the exemplary light source for recording the holograms is helium He-Ne laser.
  • other light sources may also be used.
  • He-Cd laser may be used to record holograms in NACL. Air or gas convection or movement should be significantly minimized or eliminated from the surroundings of the crystal.
  • the crystal is held in a vacuum. The preferred pressure during the recording is 10 "3 torr or less.
  • the crystal is firmly held in place.
  • the vibrations, shaking and other disturbance should be minimized.
  • the use of some type of crystal stabilization apparatus is preferred.
  • the preferred recording temperature for alkali halide media is over 200° C.
  • the preferred temperature for KCL crystals is 280° C or above.
  • the most preferred temperature of recording in KCL media is 280° C.
  • the preferred wavelength of light used for recording the hologram is within the range of the wavelengths of the F-center absorption bands.
  • the preferred wavelength for recording a hologram is from about 450 nm to about 650 nm.
  • the preferred alkali halide media is KCL.
  • the above process may be repeated. If crystal change is desired, the time interval of approximately 10 seconds may be necessary to restore the chamber temperature after the crystal change.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

Dans un de ses modes de réalisation, la présente invention se rapporte à un appareil de mesure de la pression comportant un élément holographique contenant au moins un hologramme volumique ; un élément de référence ; un élément de détection couplé à la pression à mesurer, et au moins une source de lumière. Le dispositif fonctionne de manière à faire passer un faisceau lumineux de référence entre l'élément de référence et l'élément holographique, ledit faisceau de référence ayant un trajet optique constant, et à faire passer un faisceau lumineux de détection entre l'élément de détection et l'élément holographique, ledit faisceau de détection ayant un trajet optique qui varie en fonction de la pression. L'hologramme volumique convertit le faisceau de référence et le faisceau de détection en un faisceau lumineux d'informations dont l'intensité est une mesure de la pression. De préférence, l'élément de référence et l'élément de détection sont fabriqués à partir de la même matière.
PCT/US2002/011536 2001-04-11 2002-04-11 Procede et appareil de mesure de la pression WO2002084243A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002256193A AU2002256193A1 (en) 2001-04-11 2002-04-11 Method and apparatus for measuring pressure

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US28342601P 2001-04-11 2001-04-11
US60/283,426 2001-04-11
US28341601P 2001-04-12 2001-04-12
US60/283,416 2001-04-12

Publications (2)

Publication Number Publication Date
WO2002084243A2 true WO2002084243A2 (fr) 2002-10-24
WO2002084243A3 WO2002084243A3 (fr) 2003-05-22

Family

ID=26962034

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/011536 WO2002084243A2 (fr) 2001-04-11 2002-04-11 Procede et appareil de mesure de la pression

Country Status (3)

Country Link
US (1) US6856399B2 (fr)
AU (1) AU2002256193A1 (fr)
WO (1) WO2002084243A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104303379A (zh) * 2012-01-12 2015-01-21 Uab研究基金会 基于碱卤化物色心晶体的中红外体布拉格光栅

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7272976B2 (en) * 2004-03-30 2007-09-25 Asml Holdings N.V. Pressure sensor
US7492463B2 (en) 2004-04-15 2009-02-17 Davidson Instruments Inc. Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor
US20050230605A1 (en) * 2004-04-20 2005-10-20 Hamid Pishdadian Method of measuring using a binary optical sensor
US7310130B2 (en) * 2004-10-05 2007-12-18 Asml Netherlands B.V. Lithographic apparatus and position measuring method
EP1681540A1 (fr) 2004-12-21 2006-07-19 Davidson Instruments, Inc. Processeur de réseau à canaux multiples
EP1674833A3 (fr) 2004-12-21 2007-05-30 Davidson Instruments, Inc. Système de détection à fibres optiques
US20060274323A1 (en) 2005-03-16 2006-12-07 Gibler William N High intensity fabry-perot sensor
US7684051B2 (en) 2006-04-18 2010-03-23 Halliburton Energy Services, Inc. Fiber optic seismic sensor based on MEMS cantilever
US7743661B2 (en) 2006-04-26 2010-06-29 Halliburton Energy Services, Inc. Fiber optic MEMS seismic sensor with mass supported by hinged beams
US8115937B2 (en) 2006-08-16 2012-02-14 Davidson Instruments Methods and apparatus for measuring multiple Fabry-Perot gaps
WO2008091645A1 (fr) * 2007-01-24 2008-07-31 Davidson Energy Transducteur de mesure de paramètres environnementaux
EP2167931B1 (fr) * 2007-07-12 2015-11-04 ABB Research Ltd. Détecteur de pression
US8287488B2 (en) 2009-12-08 2012-10-16 Roche Diagnostics Operations, Inc. Holographic occlusion detection system for infusion pumps
US8685032B2 (en) * 2010-02-23 2014-04-01 Cook Medical Technologies Llc Pressure sensing vertebroplasty extension tube
RU2422786C1 (ru) * 2010-04-23 2011-06-27 Общество с ограниченной ответственностью "ФИРМА ПОДИЙ" (ООО "ФИРМА ПОДИЙ") Тензометрический преобразователь
US20140321494A1 (en) * 2012-01-12 2014-10-30 The Uab Research Foundation Middle-infrared volumetric bragg grating based on alkali halide or alkili-earth flouride color center crystals
DE102015121455A1 (de) * 2015-12-09 2017-06-14 Abb Schweiz Ag Verfahren und Einrichtung zur Druckbestimmung und Vorrichtung hierzu
WO2017115199A1 (fr) * 2015-12-30 2017-07-06 Novartis Ag Mesure de la pression optique pour chirurgie fluidique ophtalmique
DE102018209305A1 (de) * 2018-06-12 2019-12-12 Robert Bosch Gmbh Folie für einen berührungsempfindlichen Bildschirm, Bildschirm mit Folie, Gerät, insbesondere mobiles Gerät, mit Bildschirm und Verfahren zum Sensieren einer Druckintensität unter Verwendung einer Folie
AU2021358511A1 (en) * 2020-10-06 2023-05-11 QuantAQ, Inc. Air measurement device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5475489A (en) * 1991-06-07 1995-12-12 Goettsche; Allan Determination of induced change of polarization state of light
US5515459A (en) * 1992-02-19 1996-05-07 Sensor Dynamics Inc. Optical fibre pressure sensor
US5712612A (en) * 1996-01-02 1998-01-27 Hewlett-Packard Company Tunneling ferrimagnetic magnetoresistive sensor

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1266785A (fr) * 1968-03-14 1972-03-15
US3590640A (en) * 1969-04-24 1971-07-06 Chain Lakes Res Corp Holographic pressure sensor
DE2658609A1 (de) 1975-12-26 1977-07-07 Seiko Instr & Electronics Optisches messverfahren und vorrichtung zur durchfuehrung des verfahrens
US4945230A (en) 1984-07-06 1990-07-31 Metricor, Inc. Optical measuring device using a spectral modulation sensor having an optically resonant structure
CA1300369C (fr) 1987-03-24 1992-05-12 Timothy P. Dabbs Appareil servant a mesurer la distance
SU1696855A1 (ru) 1988-10-03 1991-12-07 Одесский государственный университет им.И.И.Мечникова Двухкоординатный оптикоэлектронный угломер
SU1657948A1 (ru) 1989-01-09 1991-06-23 Одесский государственный университет им.И.И.Мечникова Дифракционный способ измерени угловых перемещений объекта
EP0460357A3 (en) 1990-06-08 1992-07-29 Landis & Gyr Betriebs Ag Device for optical measurement of pressure differences
US5414507A (en) 1993-04-01 1995-05-09 Hughes Aircraft Company Fiber optics pressure sensor transducer having a temperature compensator
US5714680A (en) 1993-11-04 1998-02-03 The Texas A&M University System Method and apparatus for measuring pressure with fiber optics
US5452087A (en) 1993-11-04 1995-09-19 The Texas A & M University System Method and apparatus for measuring pressure with embedded non-intrusive fiber optics
GB9406142D0 (en) 1994-03-28 1994-05-18 British Tech Group A sensor
US5650612A (en) 1995-01-11 1997-07-22 The Boeing Company Optical sensor using swept wavelength light source
US5721612A (en) * 1996-08-08 1998-02-24 Motorola, Inc. Optical pressure sensor and method therefor
US5844667A (en) 1997-01-28 1998-12-01 Cidra Corporation Fiber optic pressure sensor with passive temperature compensation
US6281976B1 (en) * 1997-04-09 2001-08-28 The Texas A&M University System Fiber optic fiber Fabry-Perot interferometer diaphragm sensor and method of measurement
US6055053A (en) 1997-06-02 2000-04-25 Stress Photonics, Inc. Full field photoelastic stress analysis
NO305004B1 (no) 1997-06-30 1999-03-15 Optoplan As Trykksensor
US6246048B1 (en) 1999-05-18 2001-06-12 Schlumberger Technology Corporation Methods and apparatus for mechanically enhancing the sensitivity of longitudinally loaded fiber optic sensors
US6304686B1 (en) 2000-02-09 2001-10-16 Schlumberger Technology Corporation Methods and apparatus for measuring differential pressure with fiber optic sensor systems

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5475489A (en) * 1991-06-07 1995-12-12 Goettsche; Allan Determination of induced change of polarization state of light
US5515459A (en) * 1992-02-19 1996-05-07 Sensor Dynamics Inc. Optical fibre pressure sensor
US5712612A (en) * 1996-01-02 1998-01-27 Hewlett-Packard Company Tunneling ferrimagnetic magnetoresistive sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104303379A (zh) * 2012-01-12 2015-01-21 Uab研究基金会 基于碱卤化物色心晶体的中红外体布拉格光栅

Also Published As

Publication number Publication date
AU2002256193A1 (en) 2002-10-28
US6856399B2 (en) 2005-02-15
WO2002084243A3 (fr) 2003-05-22
US20020186377A1 (en) 2002-12-12

Similar Documents

Publication Publication Date Title
US6856399B2 (en) Method and apparatus for measuring pressure
US8218916B2 (en) Fiber optic temperature and pressure sensor and system incorporating same
US5844667A (en) Fiber optic pressure sensor with passive temperature compensation
US5877426A (en) Bourdon tube pressure gauge with integral optical strain sensors for measuring tension or compressive strain
US6304686B1 (en) Methods and apparatus for measuring differential pressure with fiber optic sensor systems
US4932263A (en) Temperature compensated fiber optic pressure sensor
US20120050735A1 (en) Wavelength dependent optical force sensing
US4932262A (en) Miniature fiber optic pressure sensor
US5132529A (en) Fiber-optic strain gauge with attached ends and unattached microbend section
WO2000025103A1 (fr) Procede et appareil pour l'amelioration mecanique de la sensibilite de capteurs a fibre optique charges tranversalement
EP1707924A2 (fr) Appareil de détection du déplacement, appareil de jaugeage du déplacement et appareil de détection du point fixe
US5258614A (en) Optical fiber loop temperature sensor
Gupta et al. Industrial fluid flow measurement using optical fiber sensors: A review
US5196694A (en) Temperature compensated self-referenced fiber optic microbend pressure transducer
CA1203701A (fr) Sonde de luminescence a fibre optique avec couche mince d'interference
JP2004530899A (ja) 対をなすブラッグ格子の使用に基づいた差分測定システム
US6341526B1 (en) Micromachined diffractive pressure sensor system
US20180136055A1 (en) A temperature sensor
Qi A comparison study of the sensing characteristics of FBG and TFBG
US3538772A (en) Monitoring apparatus
Karabacak et al. Fiber optic sensors for multiparameter monitoring of large scale assets
RU77420U1 (ru) Универсальный волоконно-оптический модульный телеметрический комплекс, регистрирующий модуль, сенсорная головка и модуль расширения числа оптических каналов
Xiao Self-calibrated interferometric/intensity based fiber optic pressure sensors
JP4742336B2 (ja) 光ファイバー歪みセンサーとそれを用いた測定機器
Xu et al. Novel hollow-glass microsphere sensor for monitoring high hydrostatic pressure

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SD SE SG SI SK SL TJ TM TN TR TT TZ UA UG UZ VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 69(1) EPC, FORM 1205A SENT 260204

122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP