WO2001024287A3 - Internal electrodes for a stacked piezoactuator and method for producing the same - Google Patents

Internal electrodes for a stacked piezoactuator and method for producing the same Download PDF

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Publication number
WO2001024287A3
WO2001024287A3 PCT/DE2000/003227 DE0003227W WO0124287A3 WO 2001024287 A3 WO2001024287 A3 WO 2001024287A3 DE 0003227 W DE0003227 W DE 0003227W WO 0124287 A3 WO0124287 A3 WO 0124287A3
Authority
WO
WIPO (PCT)
Prior art keywords
internal electrodes
piezoactuator
producing
same
alloys
Prior art date
Application number
PCT/DE2000/003227
Other languages
German (de)
French (fr)
Other versions
WO2001024287A2 (en
Inventor
Bertram Sugg
Marianne Hammer
Friedrich Boecking
Original Assignee
Bosch Gmbh Robert
Bertram Sugg
Marianne Hammer
Friedrich Boecking
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert, Bertram Sugg, Marianne Hammer, Friedrich Boecking filed Critical Bosch Gmbh Robert
Publication of WO2001024287A2 publication Critical patent/WO2001024287A2/en
Publication of WO2001024287A3 publication Critical patent/WO2001024287A3/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials

Abstract

The invention relates to a piezoactuator, e.g., for actuating a mechanical component. Said piezoactuator comprises a multilayered structure consisting of piezo layers (2) and internal electrodes (4, 5), to which an external electrical voltage can be applied, positioned between them. The internal electrodes (4, 5) are contacted with external electrodes (6, 7) on alternate sides. Said internal electrodes (4, 5) are produced from a base metal or its alloys, copper (Cu) or copper alloys or nickel (Ni) or nickel alloys being particularly suitable.
PCT/DE2000/003227 1999-09-30 2000-09-16 Internal electrodes for a stacked piezoactuator and method for producing the same WO2001024287A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19946834.6 1999-09-30
DE19946834A DE19946834A1 (en) 1999-09-30 1999-09-30 Piezo actuator and a method for its production

Publications (2)

Publication Number Publication Date
WO2001024287A2 WO2001024287A2 (en) 2001-04-05
WO2001024287A3 true WO2001024287A3 (en) 2002-04-04

Family

ID=7923815

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2000/003227 WO2001024287A2 (en) 1999-09-30 2000-09-16 Internal electrodes for a stacked piezoactuator and method for producing the same

Country Status (2)

Country Link
DE (1) DE19946834A1 (en)
WO (1) WO2001024287A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2830701A (en) * 1999-12-16 2001-06-25 Epcos Ag Piezoelectric component
DE10141820A1 (en) * 2001-08-27 2003-03-20 Elliptec Resonant Actuator Ag Piezomotor with copper electrodes
DE10146704A1 (en) * 2001-09-21 2003-04-10 Elliptec Resonant Actuator Ag Piezomotors with piezo elements, manufactured using the ceramic capacitor process

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0350941A2 (en) * 1988-07-15 1990-01-17 Hitachi, Ltd. Stack-type piezoelectric element and process for producing the same
JPH02224283A (en) * 1989-02-27 1990-09-06 Mitsui Toatsu Chem Inc Laminated electrostrictive element
EP0395018A2 (en) * 1989-04-26 1990-10-31 Hitachi, Ltd. Stack-type piezoelectric element and process for production thereof
JPH04171990A (en) * 1990-11-06 1992-06-19 Toto Ltd Piezoelectric ceramic sintered body
JPH04324687A (en) * 1991-04-24 1992-11-13 Onoda Cement Co Ltd Base metal electrode material

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19753930A1 (en) * 1997-12-05 1999-06-10 Ceramtec Ag Process for attaching external electrodes to solid state actuators

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0350941A2 (en) * 1988-07-15 1990-01-17 Hitachi, Ltd. Stack-type piezoelectric element and process for producing the same
JPH02224283A (en) * 1989-02-27 1990-09-06 Mitsui Toatsu Chem Inc Laminated electrostrictive element
EP0395018A2 (en) * 1989-04-26 1990-10-31 Hitachi, Ltd. Stack-type piezoelectric element and process for production thereof
JPH04171990A (en) * 1990-11-06 1992-06-19 Toto Ltd Piezoelectric ceramic sintered body
JPH04324687A (en) * 1991-04-24 1992-11-13 Onoda Cement Co Ltd Base metal electrode material

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 014, no. 528 (E - 1004) 20 November 1990 (1990-11-20) *
PATENT ABSTRACTS OF JAPAN vol. 016, no. 478 (E - 1274) 5 October 1992 (1992-10-05) *
PATENT ABSTRACTS OF JAPAN vol. 017, no. 165 (E - 1343) 30 March 1993 (1993-03-30) *

Also Published As

Publication number Publication date
DE19946834A1 (en) 2001-05-03
WO2001024287A2 (en) 2001-04-05

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