WO1999045569A3 - A device for determining the energy of ions scattered from a target surface - Google Patents

A device for determining the energy of ions scattered from a target surface Download PDF

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Publication number
WO1999045569A3
WO1999045569A3 PCT/NL1999/000110 NL9900110W WO9945569A3 WO 1999045569 A3 WO1999045569 A3 WO 1999045569A3 NL 9900110 W NL9900110 W NL 9900110W WO 9945569 A3 WO9945569 A3 WO 9945569A3
Authority
WO
WIPO (PCT)
Prior art keywords
ions
detection device
target body
sputtered
energy
Prior art date
Application number
PCT/NL1999/000110
Other languages
French (fr)
Other versions
WO1999045569A2 (en
Inventor
Hidde Herman Brongersma
Der Gon Denier Arnoud Will Van
Original Assignee
Calipso B V
Hidde Herman Brongersma
Gon Denier Arnoud Willem V D
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Calipso B V, Hidde Herman Brongersma, Gon Denier Arnoud Willem V D filed Critical Calipso B V
Priority to AU28604/99A priority Critical patent/AU2860499A/en
Publication of WO1999045569A2 publication Critical patent/WO1999045569A2/en
Publication of WO1999045569A3 publication Critical patent/WO1999045569A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/443—Dynamic spectrometers
    • H01J49/446—Time-of-flight spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

A device for determining the kinetic energy of ions scattered from a surface of a target body by a primary ion beam impinging on the surface, in accordance with the LEIS technique. Backscattered ions are separated by an electrostatic energy analyzer relative to their kinetic energy and are detected by a detector. A signal processing device, connected to the detection device, processes data provided by the detection device with respect to the number of detected ions relative to their energy. When measuring the energy spectrum of backscattered ions, in practice, a strong background signal occurs from ions sputtered from the target body surface. According to the invention, a time window/time-of-flight analysis is performed on ions reaching the detection device, based thereon that ions sputtered from the target body surface generally have a mass which signficantly differs from the mass of the ions of the primary ion beam impinging on the target body surface, and in that these sputtered ions with more or less the same kinetic energy as the backscattered ions, have greatly different propagation times, seen from the target body surface towards the detection device. By processing, during the measurement, only those ions of which the path/time-of-flight of the target body surface to the detection device is within a broad time window at the detection device, a disturbing influence by sputtered ions on the processed energy spectrum of the backscattered ions of the primary ion beam, the so-called background, is suppressed. Due to large differences in mass between sputtered ions and ions of the primary ion beam, a coarse and relative wide setting of the time window suffices.
PCT/NL1999/000110 1998-03-03 1999-03-02 A device for determining the energy of ions scattered from a target surface WO1999045569A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU28604/99A AU2860499A (en) 1998-03-03 1999-03-02 A device for determining the energy of ions scattered from target surface

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1008461A NL1008461C2 (en) 1998-03-03 1998-03-03 Device for determining the energy of ions scattered by a target surface.
NL1008461 1998-03-03

Publications (2)

Publication Number Publication Date
WO1999045569A2 WO1999045569A2 (en) 1999-09-10
WO1999045569A3 true WO1999045569A3 (en) 1999-11-11

Family

ID=19766642

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/NL1999/000110 WO1999045569A2 (en) 1998-03-03 1999-03-02 A device for determining the energy of ions scattered from a target surface

Country Status (3)

Country Link
AU (1) AU2860499A (en)
NL (1) NL1008461C2 (en)
WO (1) WO1999045569A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9627190B2 (en) 2015-03-27 2017-04-18 Agilent Technologies, Inc. Energy resolved time-of-flight mass spectrometry

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4945236A (en) * 1988-04-28 1990-07-31 Jeol Ltd. Direct imaging type SIMS instrument having TOF mass spectrometric mode
EP0427532A2 (en) * 1989-11-08 1991-05-15 Schultz, J. Albert High resolution mass spectrometry of recoiled ions for isotopic and trace elemental analysis
EP0488067A2 (en) * 1990-11-30 1992-06-03 Shimadzu Corporation Ion-scattering spectrometer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4945236A (en) * 1988-04-28 1990-07-31 Jeol Ltd. Direct imaging type SIMS instrument having TOF mass spectrometric mode
EP0427532A2 (en) * 1989-11-08 1991-05-15 Schultz, J. Albert High resolution mass spectrometry of recoiled ions for isotopic and trace elemental analysis
EP0488067A2 (en) * 1990-11-30 1992-06-03 Shimadzu Corporation Ion-scattering spectrometer

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
HELLINGS ET AL.: "simultaneous energy and angle resolved ion scattering spectrometer", SURFACE SCIENCE, vol. 162, 1985, pages 913 - 920, XP002083312 *
KNIBBELER ET AL.: "Novel two-dimensional positio-sensitive detection system.", REVIEW OF SCIENTIFIC INSTRUMENTS., vol. 58, no. 1, 1987, NEW YORK US, pages 125 - 126, XP002083313 *

Also Published As

Publication number Publication date
NL1008461C2 (en) 1999-09-06
AU2860499A (en) 1999-09-20
WO1999045569A2 (en) 1999-09-10

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