WO1998028101A1 - Texturing and electro-deburring of magnetic disk substrate - Google Patents

Texturing and electro-deburring of magnetic disk substrate Download PDF

Info

Publication number
WO1998028101A1
WO1998028101A1 PCT/SG1996/000019 SG9600019W WO9828101A1 WO 1998028101 A1 WO1998028101 A1 WO 1998028101A1 SG 9600019 W SG9600019 W SG 9600019W WO 9828101 A1 WO9828101 A1 WO 9828101A1
Authority
WO
WIPO (PCT)
Prior art keywords
texturing
electro
deburring
tape
magnetic disk
Prior art date
Application number
PCT/SG1996/000019
Other languages
French (fr)
Inventor
Tani Kazunori
Original Assignee
Unique Technology International Private Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unique Technology International Private Limited filed Critical Unique Technology International Private Limited
Priority to PCT/SG1996/000019 priority Critical patent/WO1998028101A1/en
Publication of WO1998028101A1 publication Critical patent/WO1998028101A1/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/002Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using electric current
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H5/00Combined machining
    • B23H5/04Electrical discharge machining combined with mechanical working
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/02Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements
    • B24B19/028Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements for microgrooves or oil spots
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers

Definitions

  • This invention relates to the mechanical texturing of the nickel-phosphorus, NiP layer of the magnetic disk aluminium substrate and in the same process electrolytically deburring and smoothing the textured surface profile.
  • the recording densities of magnetic hard disks are increasing rapidly year after year.
  • one of the ways to increase recording density is to decrease the height of the read/write head from the disk surface.
  • a flat and smooth surface morphology is required.
  • a perfectly smooth disk surface causes serious stiction problems.
  • a small amount of roughness or texture is formed to overcome the above stiction problem during contact-start-stop operation.
  • the current method of mechanical texturing involves a piled cloth and a slurry of abrasive grains, such as alumina or diamond, pressing on the disk surfaces as the disk is rotating. Texturing of the data zone is also desirable, and it helps to improve and maintain a high magnetic characteristic, besides enabling a thin lubrication layer to be maintained on the finished disk surfaces.
  • Texturing and electro-deburring of magnetic disk aluminium substrate comprising of a combination of mechanical texturing with free abrasive and electrolytic deburring and smoothening of the textured surfaces, wherein the disk substrate is made the anode, the texturing tape is made the cathode and passing a current through the electrolyte.
  • This regular and smoothened surface profile essentially allows the read/write head to fly at less than 25 nm from the disk surface, enhances the magnetic characteristic and allows a thin lubrication layer to remain on the finished disk surfaces.
  • Figure 1 shows an embodiment of the combined mechanical and electrolytic texturing process
  • Figure 2 shows the various structures of the new conductive texturing tape
  • Figure 3 shows the abrasive grains on the bristles, some of which are lodged into the bristles and cutting into the NiP layer of the Al substrate,
  • Figure 4 shows the irregularity of the textured surface being electrolytically deburred and the surface profile smoothened
  • Figure 5 shows a variation of the combined mechanical and electrolytic texturing process on a single disk substrate.
  • Figure 1 shows one embodiment of the present invention.
  • Figure 2 shows the various structures of the conductive texturing tape 1.
  • the backing cloth 2 or plastic film 2 such as polyethene (PE) or metal film 2 essentially gives the texturing tape 1 its strength and rigidity.
  • the pile fibres 3, substantially less than 5 micron in diameter, are implanted onto an adhesive binder 4 with the aid of an electrostatic field, after which the pile fibres are clipped flat; the piles 3, of length less than 1 mm long, for example, are essentially perpendicular to the backing material.
  • Non-conductive plastic pile materials can be used, such as, polyamide, polyester, polyethene, polyvinyl chloride and so on.
  • Both the conductive binder 4 and metallised backing cloth/film 2A/conductive backing cloth/film 2B are made the cathode, while the substrate 5 is made the anode.
  • the abrasive grains 6, typically diamond, aluminium oxide or silicon oxide, is mixed in an electrolyte 7, typically a mixture of phosphoric acid, H 3 PO 4 , sulphuric acid, H 2 SO 4 , texturing coolant and water.
  • an electrolyte 7 typically a mixture of phosphoric acid, H 3 PO 4 , sulphuric acid, H 2 SO 4 , texturing coolant and water.
  • the texturing process machine is started, a continuous stream or spray of the electrolyte and abrasive slurry is directed at or before the texturing region.
  • the texturing head may oscillate at frequency F, while the Al substrate spins at W revolutions per minute on a spindle 8.
  • an electrolytic cell As the electrolyte flows, an electrolytic cell is set up; a viscous film forms at the NiP surface.
  • the film is effectively thinner over micro-peaks and thicker at micro- valleys.
  • the lower electric resistance, shorter diffusion path and higher charge density at the micro-peaks result in a more rapid dissolution, as shown in Figure 4, resulting in micro-deburring and rounding of the micro-peaks of the NiP surface.
  • This micro- smoothening gives the planar disk surfaces a consistently regular and smooth textured profile, substantially of arithematic roughness Ra less than 10 nm; this enables the read/write head to both overcome the stiction problem during the contact start/stop cycles and allow the head to fly at substantially less than 25 nm from the disk surface, as compared to the current 25 to 50 nm fly height; overcoming the stiction problem means improvement in the drive reliability, while the lower flying height enables higher recording densities.
  • This smooth textured profile also enhances the magnetic characteristics and enables a thin lubrication layer to remain on the finished disk surface.
  • Figure 5 shows a variation of the above invention.
  • the texturing tape 1 can be implanted with a uniform layer of fibres 3, or the implantation can follow any particular patterns. Such patterns can be achieved by depositing the adhesive binder onto the backing material 2, 2A,2B by means of screen printing, after which the fibres 3 are implanted onto the adhesive binder in an electrostatic field.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

The combined processes of mechanical texturing with free abrasive and conductive texture tape (1) with electro-deburring and electro-smoothening of the textured surface of the NiP layer (5) of the aluminium disk substrate, or a combination of mechanical texturing with a non-conductive tape (9) and electro-deburring and electro-smoothening with a conductive tape (1); both types of combined processes yield a consistently regular surface texture with rounded micro peaks.

Description

Title: Texturing and Electrodeburring of Magnetic Disk Substrate
Technical field:
This invention relates to the mechanical texturing of the nickel-phosphorus, NiP layer of the magnetic disk aluminium substrate and in the same process electrolytically deburring and smoothing the textured surface profile.
Background:
The recording densities of magnetic hard disks are increasing rapidly year after year. With the current technologies in thin film and conventional recording, one of the ways to increase recording density is to decrease the height of the read/write head from the disk surface.
To achieve low flying height capability, a flat and smooth surface morphology is required. However, a perfectly smooth disk surface causes serious stiction problems. A small amount of roughness or texture is formed to overcome the above stiction problem during contact-start-stop operation. The current method of mechanical texturing involves a piled cloth and a slurry of abrasive grains, such as alumina or diamond, pressing on the disk surfaces as the disk is rotating. Texturing of the data zone is also desirable, and it helps to improve and maintain a high magnetic characteristic, besides enabling a thin lubrication layer to be maintained on the finished disk surfaces.
As the prices of computer and computer peripherals are dropping very fast but the hard disk capacities ever increasing, there is a need to find a new method in the magnetic disk manufacturing process that will improve on the present technology, but yet maintain or lower the manufacturing costs. Object of the invention:
It is a primary object of the invention to provide a new process for texturing the magnetic disk aluminium substrate that combines mechanical texturing with electro- deburring; electro-deburring microscopically smoothen the textured surface to give the surface a consistently regular and smooth profile. This consistently regular texture allows the read/write head to fly closer to the disk surface, and hence increase the present recording densities.
It is another objective to keep the process simple and cost effective.
Summary of the invention:
Texturing and electro-deburring of magnetic disk aluminium substrate comprising of a combination of mechanical texturing with free abrasive and electrolytic deburring and smoothening of the textured surfaces, wherein the disk substrate is made the anode, the texturing tape is made the cathode and passing a current through the electrolyte.
As the texturing tape presses against the rotating disk, some of the abrasive grains become lodged into the piles and mechanically cut the NiP surfaces in the circumferential direction. At the same time, an electro-chemical film forms on the NiP surfaces; the microscopic peaks of the textured surface dissociate at a faster rate and become rounded off, yielding a regular and smoothened surface texture on the NiP layer.
This regular and smoothened surface profile essentially allows the read/write head to fly at less than 25 nm from the disk surface, enhances the magnetic characteristic and allows a thin lubrication layer to remain on the finished disk surfaces. Brief Description of the Figures:
The accompanying drawings constitute a part of the description of the invention, illustrate and serve to explain the principles of the invention. It is to be understood, however, that the drawings are for purposes of illustration only, and not as a definition of the limits of the invention for which reference should be made to the claims at the end of this description:
Figure 1 shows an embodiment of the combined mechanical and electrolytic texturing process,
Figure 2 shows the various structures of the new conductive texturing tape,
Figure 3 shows the abrasive grains on the bristles, some of which are lodged into the bristles and cutting into the NiP layer of the Al substrate,
Figure 4 shows the irregularity of the textured surface being electrolytically deburred and the surface profile smoothened, and
Figure 5 shows a variation of the combined mechanical and electrolytic texturing process on a single disk substrate.
Description of the Invention:
Figure 1 shows one embodiment of the present invention. Figure 2 shows the various structures of the conductive texturing tape 1. Refering to Figure 1 and 2, the backing cloth 2 or plastic film 2, such as polyethene (PE) or metal film 2, essentially gives the texturing tape 1 its strength and rigidity. The pile fibres 3, substantially less than 5 micron in diameter, are implanted onto an adhesive binder 4 with the aid of an electrostatic field, after which the pile fibres are clipped flat; the piles 3, of length less than 1 mm long, for example, are essentially perpendicular to the backing material. Non-conductive plastic pile materials can be used, such as, polyamide, polyester, polyethene, polyvinyl chloride and so on. Both the conductive binder 4 and metallised backing cloth/film 2A/conductive backing cloth/film 2B are made the cathode, while the substrate 5 is made the anode. The abrasive grains 6, typically diamond, aluminium oxide or silicon oxide, is mixed in an electrolyte 7, typically a mixture of phosphoric acid, H3PO4, sulphuric acid, H2SO4 , texturing coolant and water. As the texturing process machine is started, a continuous stream or spray of the electrolyte and abrasive slurry is directed at or before the texturing region. As the texturing tape feeds at speed S, the texturing head may oscillate at frequency F, while the Al substrate spins at W revolutions per minute on a spindle 8. As Figure 3 shows, some of the abrasive grains 6 become attached to the piles while some of the grains become lodged between the piles and the NiP surface 5; as the process continues, the grains cut into the NiP surface. Many of this grain cutting process occur on a microscopic scale. Such a cutting process yields an irregular cut surface texture, and when two or more cuttings criss-cross, the cut surface texture can be very irregular, often with burrs.
As the electrolyte flows, an electrolytic cell is set up; a viscous film forms at the NiP surface. The film is effectively thinner over micro-peaks and thicker at micro- valleys. The lower electric resistance, shorter diffusion path and higher charge density at the micro-peaks result in a more rapid dissolution, as shown in Figure 4, resulting in micro-deburring and rounding of the micro-peaks of the NiP surface. This micro- smoothening gives the planar disk surfaces a consistently regular and smooth textured profile, substantially of arithematic roughness Ra less than 10 nm; this enables the read/write head to both overcome the stiction problem during the contact start/stop cycles and allow the head to fly at substantially less than 25 nm from the disk surface, as compared to the current 25 to 50 nm fly height; overcoming the stiction problem means improvement in the drive reliability, while the lower flying height enables higher recording densities. This smooth textured profile also enhances the magnetic characteristics and enables a thin lubrication layer to remain on the finished disk surface. Figure 5 shows a variation of the above invention. Mechanical texturing with a non- conductive texturing tape 9, similar to those illustrated in Figure 2 but without the conductive or metallised element, presses against the rotating disk surface with a rubber roller 10. As the texturing tape feeds at a constant speed S, a spray of abrasive slurry 11 is directed at or before the texturing region. The newly textured surface rotates over to the electrodeburring region; a conductive texture tape 1 or a porous piece of cloth tape 12 feeding at a slow speed S over a cathode roller, which is pressed against the disk surfaces. A stream or spray of electrolyte 7 is directed at the interface. As described earlier, the micro-peaks dissociate at a faster rate and such micro- deburring and micro-smoothening of the NiP surface produces a consistently regular and smoothened texture on the NiP surfaces.
The texturing tape 1 can be implanted with a uniform layer of fibres 3, or the implantation can follow any particular patterns. Such patterns can be achieved by depositing the adhesive binder onto the backing material 2, 2A,2B by means of screen printing, after which the fibres 3 are implanted onto the adhesive binder in an electrostatic field.
While only a few embodiments of the present invention have been described and illustrated, it will now be apparent to those skilled in the art that other modifications, improvements and variations can be made to the electro-texturing process of the present invention without departing from the scope or spirit of this invention.
As no additional process is involved, this should not increase the manufacturing costs to any great extent.

Claims

Claims:
1. Texturing and electro-deburring of magnetic disk aluminium substrate comprising of a combination of mechanical texturing with free abrasive and electrolytic deburring and smoothening of the textured surfaces, wherein the disk substrate is made the anode, the texturing tape is made the cathode and passing a current through the electrolyte,
2. Texturing and electro-deburring of magnetic disk aluminium substrate as claimed in 1, wherein the planar disk's microscopically textured surfaces are electrolytically deburred and smoothened to give a consistently regular and smooth textured surface profile, substantially of arithematic roughness of less than 10 nm,
3. Texturing and electro-deburring of magnetic disk aluminium substrate as claimed in 1 , wherein the mechanical texturing and electro-deburring and electro-smoothening of the textured surface profile occur at the same time,
4. Texturing and electro-deburring of magnetic disk aluminium substrate as claimed in 1, wherein the texturing tape adhesive binder and/or backing cloth/film are conductive, or wherein one/or both surfaces of the backing cloth/film is metallised and conductive,
5. Texturing and electro-deburring of magnetic disk aluminium substrate as claimed in 2, wherein the consistently regular and smooth textured surface profile enables the read/write head's fly height to be substantially less than 25 nm.
6. Texturing and electro-deburring of magnetic disk aluminium substrate comprising of separate mechanical texturing and electrolytic deburring and smoothening of disk surfaces, wherein mechanical texturing at one region use a non-conductive texturing tape, while electro-deburring and electro-smoothening process at an adjacent region use a conductive texturing tape or a porous cloth tape with a cathode roller.
7. The fibres of the texturing tape can be uniformly implanted onto the backing material or they can be implanted to any particular patterns.
PCT/SG1996/000019 1996-12-20 1996-12-20 Texturing and electro-deburring of magnetic disk substrate WO1998028101A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/SG1996/000019 WO1998028101A1 (en) 1996-12-20 1996-12-20 Texturing and electro-deburring of magnetic disk substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SG1996/000019 WO1998028101A1 (en) 1996-12-20 1996-12-20 Texturing and electro-deburring of magnetic disk substrate

Publications (1)

Publication Number Publication Date
WO1998028101A1 true WO1998028101A1 (en) 1998-07-02

Family

ID=20429173

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SG1996/000019 WO1998028101A1 (en) 1996-12-20 1996-12-20 Texturing and electro-deburring of magnetic disk substrate

Country Status (1)

Country Link
WO (1) WO1998028101A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001036138A1 (en) * 1999-11-16 2001-05-25 Unique Technology International Pte Ltd Combined electrolytic polishing and abrasive super-finishing process
WO2002028597A1 (en) * 2000-10-04 2002-04-11 Speedfam-Ipec Corporation Method and apparatus for electrochemical planarization of a workpiece
US8727832B2 (en) 2011-09-27 2014-05-20 HGST Netherlands B.V. System, method and apparatus for enhanced cleaning and polishing of magnetic recording disk
CN108127540A (en) * 2017-12-12 2018-06-08 山东金宝电子股份有限公司 A kind of polishing process of electrolytic copper foil production cathode roll

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988000871A1 (en) * 1986-08-08 1988-02-11 Ulrich Jordan Process and device for electrochemically machining workpieces
US4866886A (en) * 1987-11-23 1989-09-19 Magnetic Peripherals Inc. Textured lapping plate and process for its manufacture
JPH01246017A (en) * 1988-03-25 1989-10-02 Shizuoka Seiki Co Ltd Electrolytic finish machining method for wire-cut electric discharge machining workpiece
WO1993014249A1 (en) * 1992-01-10 1993-07-22 Ian Leonard Methods and apparatus for electrochemical machining
JPH07276247A (en) * 1994-04-11 1995-10-24 Nippon Micro Kooteingu Kk Polish member and manufacture thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988000871A1 (en) * 1986-08-08 1988-02-11 Ulrich Jordan Process and device for electrochemically machining workpieces
US4866886A (en) * 1987-11-23 1989-09-19 Magnetic Peripherals Inc. Textured lapping plate and process for its manufacture
JPH01246017A (en) * 1988-03-25 1989-10-02 Shizuoka Seiki Co Ltd Electrolytic finish machining method for wire-cut electric discharge machining workpiece
WO1993014249A1 (en) * 1992-01-10 1993-07-22 Ian Leonard Methods and apparatus for electrochemical machining
JPH07276247A (en) * 1994-04-11 1995-10-24 Nippon Micro Kooteingu Kk Polish member and manufacture thereof

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, Vol. 13, No. 588, (M-912), page 29; & JP,A,01 246 017 (SHIZUOKA SEIKO CO LTD) 2 October 1989. *
PATENT ABSTRACTS OF JAPAN, Vol. 96, No. 2; & JP,A,07 276 247 (NIPPON MICRO KOOTEINGU KK) 24 October 1995. *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001036138A1 (en) * 1999-11-16 2001-05-25 Unique Technology International Pte Ltd Combined electrolytic polishing and abrasive super-finishing process
WO2002028597A1 (en) * 2000-10-04 2002-04-11 Speedfam-Ipec Corporation Method and apparatus for electrochemical planarization of a workpiece
US8727832B2 (en) 2011-09-27 2014-05-20 HGST Netherlands B.V. System, method and apparatus for enhanced cleaning and polishing of magnetic recording disk
CN108127540A (en) * 2017-12-12 2018-06-08 山东金宝电子股份有限公司 A kind of polishing process of electrolytic copper foil production cathode roll
CN108127540B (en) * 2017-12-12 2021-01-12 山东金宝电子股份有限公司 Polishing process of cathode roller for electrolytic copper foil production

Similar Documents

Publication Publication Date Title
US5645471A (en) Method of texturing a substrate using an abrasive article having multiple abrasive natures
JPH1158205A (en) Electrolytic polishing as well as polishing texture processing device and manufacture thereof and electrolytic polishing as well as polishing texture tapeused thereto
US5816902A (en) Abrasive sheet and method of manufacturing same
US5695387A (en) CSS magnetic recording head slider and method of making same
WO1998028101A1 (en) Texturing and electro-deburring of magnetic disk substrate
JPH081698B2 (en) Manufacturing method of magnetic recording medium
US20070240295A1 (en) Surface treatment method and apparatus for tape
US6869340B2 (en) Polishing cloth for and method of texturing a surface
JP3185971B2 (en) Abrasive cloth, its manufacturing method and texture processing method
JPS63259830A (en) Production of magnetic recording medium
US4888212A (en) Process for the preparation of magnetic recording medium
JPH08249649A (en) Magnetic recording medium
WO2001036138A1 (en) Combined electrolytic polishing and abrasive super-finishing process
US6632547B2 (en) Substrate for magnetic recording medium, manufacturing method thereof, and magnetic recording medium
JP2854573B2 (en) Magnetic disk device
JPH11161946A (en) Texturing method of substrate for magnetic recording medium
JP2856783B2 (en) Polishing tool
JP2854323B2 (en) Magnetic disk drive
JPH07244845A (en) Manufacture of magnetic recording medium
JPH0896355A (en) Production of magnetic recording medium
JP3467162B2 (en) Manufacturing method of magnetic recording medium
KR101009608B1 (en) Abradant pad for magnetic recording media
JP2000057541A (en) Cleaning tape
JP2005088158A (en) Ground fabric for working magnetic disk texture
KR960002037B1 (en) Coating apparatus & method of a magnetic recording tape

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): JP KR SG US

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)