JPH07276247A - Polish member and manufacture thereof - Google Patents

Polish member and manufacture thereof

Info

Publication number
JPH07276247A
JPH07276247A JP9694994A JP9694994A JPH07276247A JP H07276247 A JPH07276247 A JP H07276247A JP 9694994 A JP9694994 A JP 9694994A JP 9694994 A JP9694994 A JP 9694994A JP H07276247 A JPH07276247 A JP H07276247A
Authority
JP
Japan
Prior art keywords
bag
elastic body
shaped elastic
abrasive
fibers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9694994A
Other languages
Japanese (ja)
Other versions
JP3367082B2 (en
Inventor
Nobuyoshi Watanabe
信義 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON MICRO KOOTEINGU KK
Nihon Micro Coating Co Ltd
Original Assignee
NIPPON MICRO KOOTEINGU KK
Nihon Micro Coating Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON MICRO KOOTEINGU KK, Nihon Micro Coating Co Ltd filed Critical NIPPON MICRO KOOTEINGU KK
Priority to JP09694994A priority Critical patent/JP3367082B2/en
Publication of JPH07276247A publication Critical patent/JPH07276247A/en
Application granted granted Critical
Publication of JP3367082B2 publication Critical patent/JP3367082B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Polishing Bodies And Polishing Tools (AREA)

Abstract

PURPOSE:To provide a polish member which can favorably polish the inside surface of a recessed part in particular by planting abrasive grain fiber on the surface of a bag-shaped elastic body, and sticking abrasive grain on the surface of the abrasive grain fiber. CONSTITUTION:A polish member 10 is constituted by planting abrasive grain fiber 3 on the surface of a bag-shaped elastic body 1. Namely, fiber 5 stuck with abrasive grain 6 is stuck (planted) on the surface of the bag-shaped elastic body 7 through adhesive 4 so that the abrasive grain fiber 3 are not stuck to each other. This polish member 10 is favorably provided with a plurality of polish layers 3' consisting of bundles of abrasive grain fiber 3 on the surface of the bag-shaped elastic body 1 spacedly from each other. At polishing an object to be polished, after inserting the polish member 10 into the recessed part of the object, air is blown in the bag-shaped elastic body 1, and the surface of the polish member 10 is pressed against the inside surface of the recessed part of the object. The whole surface in the recessed part of the object is polished by rotating the polish member 10 or the object in this condition.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、被研磨物の研磨に使用
する研磨部材およびその製造方法に関し、特に、凹凸部
を有する被研磨物の表面、特に凹部内側表面を研磨する
ための研磨部材およびその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing member used for polishing an object to be polished and a method for manufacturing the same, and more particularly to a polishing member for polishing the surface of an object to be polished having irregularities, particularly the inner surface of a recess. And a manufacturing method thereof.

【0002】[0002]

【従来の技術】従来、凹凸部を有する被研磨物表面の研
磨、特に凹部内側表面の研磨は、遊離砥粒をその被研磨
表面に塗布し研磨布等で研磨するか、或いは、その凹部
の形状にほぼ一致する形状の冶具を製造し、遊離砥粒を
被研磨表面に塗布し、被研磨表面の傷防止のためにその
冶具の外周を発砲ウレタン等で覆い、被研磨物の凹部内
側表面に押し当て、被研磨物および/または冶具を回転
させて被研磨表面を研磨していた。
2. Description of the Related Art Conventionally, the polishing of the surface of an object to be polished having irregularities, particularly the inner surface of a recess, is performed by applying free abrasive grains to the surface to be polished and polishing with a polishing cloth or the like. A jig with a shape that closely matches the shape is manufactured, free abrasive grains are applied to the surface to be polished, and the outer circumference of the jig is covered with foam urethane to prevent scratches on the surface to be polished. And the object to be polished and / or the jig was rotated to polish the surface to be polished.

【0003】[0003]

【発明が解決しようとする課題】しかし、被研磨物の凹
部が複雑な形状である場合、従来の遊離砥粒を使用した
研磨方法では、研磨布等を被研磨物の凹部表面に十分に
押し当てて研磨することが困難である場合が生じ、研磨
にムラが生じる原因となり、また、従来のような冶具を
使用して複雑な形状を有する被研磨表面を研磨すると、
冶具が固体であるため、被研磨表面全体を一様に研磨す
ることが困難となる場合が生じ、研磨残しが生じてい
た。
However, when the recess of the object to be polished has a complicated shape, the conventional polishing method using loose abrasive grains sufficiently presses the polishing cloth or the like onto the surface of the recess of the object to be polished. Occasionally it is difficult to polish by applying, causing unevenness in polishing, and when polishing a surface to be polished having a complicated shape using a conventional jig,
Since the jig is solid, it sometimes becomes difficult to uniformly polish the entire surface to be polished, and polishing residue occurs.

【0004】したがって、本発明の目的は、凹凸部を有
する被研磨物の表面、特に凹部内側表面の研磨が可能な
研磨部材およびその製造方法を提供することである。
Therefore, an object of the present invention is to provide a polishing member capable of polishing the surface of an object to be polished having an uneven portion, particularly the inner surface of the concave portion, and a method for manufacturing the same.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するた
め、本発明の研磨部材は、袋状弾性体の表面に砥粒繊維
を植毛させて成る。砥粒繊維は、繊維の表面に砥粒を付
着させたものである。
In order to achieve the above object, the polishing member of the present invention comprises a bag-like elastic body having abrasive grain fibers planted on the surface thereof. The abrasive grain fiber is one in which abrasive grains are attached to the surface of the fiber.

【0006】砥粒繊維の束から成る複数の研磨層が相互
に間隔をあけて袋状弾性体表面上に形成されることが望
ましい。これは、研磨中に生じた研磨くずをその間隔を
通じて排除させ、被研磨表面を傷つけずに研磨するため
である。
It is desirable that a plurality of polishing layers composed of a bundle of abrasive grain fibers are formed on the surface of the bag-shaped elastic body at intervals. This is because polishing debris generated during polishing is eliminated through the interval and polishing is performed without damaging the surface to be polished.

【0007】袋状弾性体の表面に植毛した砥粒繊維同士
は互いに付着せずに植毛される。
Abrasive grain fibers that are flocked on the surface of the bag-shaped elastic body are flocked without adhering to each other.

【0008】砥粒繊維は、ナイロン繊維、若しくはアク
リル系繊維の表面に砥粒を付着させたものである。
The abrasive grain fibers are nylon fibers or acrylic fibers having abrasive grains attached to the surface thereof.

【0009】本発明の研磨部材はまた、袋状弾性体の表
面に砥粒を付着させて成る。
The polishing member of the present invention also comprises abrasive particles adhered to the surface of the bag-shaped elastic body.

【0010】砥粒から成る複数の研磨層が相互に間隔を
あけて袋状弾性体表面上に形成されることが望ましい。
これは、研磨中に生じた研磨くずをその間隔を通じて排
除させ、被研磨表面を傷つけずに研磨するためである。
It is desirable that a plurality of polishing layers made of abrasive grains are formed on the surface of the bag-shaped elastic body at intervals.
This is because polishing debris generated during polishing is eliminated through the interval and polishing is performed without damaging the surface to be polished.

【0011】この砥粒は、袋状弾性体の表面に予め接着
剤を塗布したところに付着させてもよいし、または、袋
状弾性体の表面に砥粒とバインダー樹脂接着剤とを混練
させたスラリーを塗布してもよい。バインダー樹脂接着
剤は、天然ゴムおよびブタジエンゴム接着剤である。
The abrasive grains may be adhered to the surface of the bag-shaped elastic body after the adhesive has been applied in advance, or the surface of the bag-shaped elastic body may be kneaded with the abrasive grains and the binder resin adhesive. The slurry may be applied. Binder resin adhesives are natural rubber and butadiene rubber adhesives.

【0012】ここで、袋状弾性体は、加硫ゴム、ブタジ
エンゴム、ポリエチレン、ポリスチレン、ポリ塩化ビニ
ル、若しくはナイロン、若しくはそれらを積層にしたも
のである。
Here, the bag-shaped elastic body is vulcanized rubber, butadiene rubber, polyethylene, polystyrene, polyvinyl chloride, nylon, or a laminated body of these.

【0013】砥粒は、ダイヤモンド、酸化アルモニウ
ム、シリコンカーバイド、酸化クロム、酸化鉄、若しく
は酸化セリウムを使用できる。
As the abrasive grains, diamond, aluminum oxide, silicon carbide, chromium oxide, iron oxide or cerium oxide can be used.

【0014】砥粒の平均粒径は1μmと10μmとの間
の範囲にある。
The average grain size of the abrasive grains is in the range between 1 μm and 10 μm.

【0015】砥粒繊維の直径は5μmと50μmとの間
の範囲に、長さは0.2mmと1mmとの範囲にある。
The abrasive fibers have a diameter in the range between 5 and 50 μm and a length in the range between 0.2 mm and 1 mm.

【0016】本発明の研磨部材の製造方法は、繊維に砥
粒を付着させて砥粒繊維を製造する工程と、袋状弾性体
の表面に砥粒繊維を植毛する工程とから成る。
The method for producing an abrasive member of the present invention comprises the steps of producing abrasive particles by adhering abrasive particles to the fibers and the step of implanting the abrasive fibers on the surface of the bag-shaped elastic body.

【0017】砥粒繊維を製造する工程は、好適に、砥粒
を帯電させ、帯電させた砥粒と繊維とを電界中に位置さ
せて、砥粒を繊維の表面に付着させる工程を含む。ここ
で、繊維は、ナイロン繊維、若しくはアクリル系繊維を
使用できる。
The step of producing abrasive grain fibers preferably includes the step of charging the abrasive grains and placing the charged abrasive grains and the fibers in an electric field to adhere the abrasive grains to the surface of the fibers. Here, as the fibers, nylon fibers or acrylic fibers can be used.

【0018】袋状弾性体の表面に砥粒繊維を植毛する工
程は、接着剤を袋状弾性体の表面に塗布する工程と、砥
粒繊維同士を互いに付着させずに袋状弾性体表面に植毛
させる植毛工程とから成る。
The step of implanting abrasive fibers on the surface of the bag-shaped elastic body includes the step of applying an adhesive to the surface of the bag-shaped elastic body and the step of applying the adhesive to the surface of the bag-shaped elastic body without adhering the abrasive particle fibers to each other. And a flocking step of flocking hair.

【0019】接着剤は、間隔をあけて袋状弾性体の表面
に塗布されることが望ましい。
The adhesive is preferably applied to the surface of the bag-shaped elastic body at intervals.

【0020】植毛工程は、好適に、接地された高電圧源
に接続させた電極棒を袋状弾性体の内部に挿入し、電極
棒と間隔をあけ接地した電極板上に砥粒繊維を乗せ、電
極棒に高電圧を印加する工程である。
In the flocking step, preferably, an electrode rod connected to a grounded high voltage source is inserted into the bag-shaped elastic body, and an abrasive grain fiber is placed on the grounded electrode plate with a gap between the electrode rod and the electrode rod. The step of applying a high voltage to the electrode rod.

【0021】また、本発明の研磨部材の製造方法は、袋
状弾性体の表面に砥粒を付着させる工程から成る。
The method for manufacturing a polishing member of the present invention comprises a step of attaching abrasive grains to the surface of the bag-shaped elastic body.

【0022】この工程は、袋状弾性体の表面に接着剤を
塗布し、砥粒を袋状弾性体の表面の所望の箇所に付着さ
せる工程である。
This step is a step in which an adhesive is applied to the surface of the bag-shaped elastic body and the abrasive grains are adhered to desired positions on the surface of the bag-shaped elastic body.

【0023】接着剤は、袋状弾性体の表面に間隔をあけ
て塗布されることが望ましい。
It is desirable that the adhesive is applied to the surface of the bag-shaped elastic body at intervals.

【0024】袋状弾性体の表面に砥粒を付着させる工程
は、砥粒とバインダー樹脂接着剤とを混練したスラリー
を袋状弾性体の表面に塗布する工程であってもよい。
The step of adhering the abrasive grains to the surface of the bag-shaped elastic body may be a step of applying a slurry obtained by kneading the abrasive grains and a binder resin adhesive to the surface of the bag-shaped elastic body.

【0025】スラリーは、袋状弾性体の表面に間隔をあ
けて塗布されることが望ましい。
It is desirable that the slurry is applied to the surface of the bag-shaped elastic body at intervals.

【0026】バインダー樹脂接着剤は、天然ゴムおよび
ブタジエンゴム接着剤である。
Binder resin adhesives are natural rubber and butadiene rubber adhesives.

【0027】ここで、袋状弾性体は、加硫ゴム、ブタジ
エンゴム、ポリエチレン、ポリスチレン、ポリ塩化ビニ
ル、若しくはナイロン、若しくはそれらを積層にしたも
のである。
Here, the bag-shaped elastic body is vulcanized rubber, butadiene rubber, polyethylene, polystyrene, polyvinyl chloride, nylon, or a laminated body of these.

【0028】砥粒は、ダイヤモンド、酸化アルミニウ
ム、シリコンカーバイド、酸化クロム、酸化鉄、若しく
は酸化セリウムを使用できる。
As the abrasive grains, diamond, aluminum oxide, silicon carbide, chromium oxide, iron oxide or cerium oxide can be used.

【0029】砥粒の平均粒径は1μmと10μmとの間
の範囲にある。
The average grain size of the abrasive grains is in the range between 1 μm and 10 μm.

【0030】砥粒繊維の直径は5μmと50μmとの間
の範囲に、長さは0.2mmと1mmとの間の範囲にあ
る。
The abrasive fibers have a diameter in the range between 5 and 50 μm and a length in the range between 0.2 and 1 mm.

【0031】[0031]

【作用】袋状弾性体の表面に接着剤を塗布し、接地した
電極板上に砥粒繊維を乗せ、袋状弾性体内部に電極棒を
挿入し、この電極棒に高電圧を印加して袋状弾性体の表
面と砥粒繊維とを電界中に位置させると、電極板上の砥
粒繊維が静電的に帯電し、袋状弾性体表面へと移動し、
この表面上の予め接着剤を塗布した箇所に付着する。こ
のとき砥粒繊維はそれぞれ同極性に帯電しているので、
砥粒繊維同士が互いに付着して袋状弾性体表面に植毛さ
れることはない。
[Function] An adhesive is applied to the surface of the bag-shaped elastic body, abrasive fibers are placed on the grounded electrode plate, the electrode rod is inserted into the bag-shaped elastic body, and a high voltage is applied to the electrode rod. When the surface of the bag-shaped elastic body and the abrasive particles are positioned in the electric field, the abrasive particles on the electrode plate are electrostatically charged, and move to the bag-shaped elastic body surface,
The adhesive is attached to the surface where the adhesive has been applied in advance. At this time, since the abrasive grain fibers are charged to the same polarity,
The abrasive grain fibers do not adhere to each other and are not flocked on the surface of the bag-shaped elastic body.

【0032】袋状弾性体表面に砥粒若しくは砥粒繊維を
付着させた本発明の研磨部材を被研磨物の凹部に挿入
し、この袋状弾性体内部に空気を吹き込むと、研磨部材
の表面が被研磨物の凹部内側表面に押し付けられる。
When the polishing member of the present invention having abrasive grains or abrasive grain fibers adhered to the surface of the bag-shaped elastic body is inserted into the concave portion of the object to be polished and air is blown into the bag-shaped elastic body, the surface of the polishing member is polished. Are pressed against the inner surface of the recess of the object to be polished.

【0033】研磨部材若しくは被研磨物を回転させる
と、被研磨物の凹部内表面全体が研磨される。
When the polishing member or the object to be polished is rotated, the entire inner surface of the recess of the object to be polished is polished.

【0034】このとき、砥粒若しくは砥粒繊維は、袋状
弾性体表面上の所望の箇所に付着している。例えば、砥
粒若しくは砥粒繊維の束から成る複数の研磨層が相互に
隙間をあけて袋状弾性体表面上に形成させ、研磨中に、
この隙間を通じて研磨くずが被研磨物の外部に排除され
る。
At this time, the abrasive grains or the abrasive grain fibers are attached to desired positions on the surface of the bag-shaped elastic body. For example, a plurality of polishing layers composed of a bundle of abrasive grains or abrasive grains fibers are formed on the surface of the bag-shaped elastic body with a gap between them, and during polishing,
Polishing debris is removed to the outside of the object to be polished through this gap.

【0035】また、砥粒繊維同士が互いに付着せずに袋
状弾性体表面に付着しているため、研磨中、この砥粒繊
維が被研磨物表面に弾力的に作用し、研磨くずがその砥
粒繊維同士の隙間内に取り込まれる。
Further, since the abrasive grain fibers are not attached to each other but are attached to the surface of the bag-like elastic body, the abrasive grain fibers act elastically on the surface of the object to be polished during polishing, and the polishing waste is It is taken into the gap between the abrasive fibers.

【0036】袋状弾性体の形状および/または袋状弾性
体内の空気圧を調節することによって、所望の形状の研
磨部材が製造される。
By adjusting the shape of the bag-shaped elastic body and / or the air pressure in the bag-shaped elastic body, a polishing member having a desired shape is manufactured.

【0037】[0037]

【実施例】本発明の研磨部材10は、図1(a)および
(b)に示すとおり、袋状弾性体1表面に砥粒繊維3を
植毛させて成る。
EXAMPLE As shown in FIGS. 1 (a) and 1 (b), a polishing member 10 of the present invention is formed by implanting abrasive grain fibers 3 on the surface of a bag-shaped elastic body 1.

【0038】図1(b)は、図1(a)のA−A断面の
部分拡大図であり、本発明の研磨部材10は更に、砥粒
6を付着させた繊維5を袋状弾性体表面7上の接着剤4
を塗布した箇所に付着させ、砥粒繊維3同士が相互に付
着せずに袋状弾性体表面7に植毛して成る。
FIG. 1 (b) is a partially enlarged view of the AA cross section of FIG. 1 (a), and the polishing member 10 of the present invention further comprises fibers 5 to which abrasive grains 6 are attached and a bag-shaped elastic body. Adhesive 4 on surface 7
Is adhered to the coated area, and the abrasive grain fibers 3 do not adhere to each other, but are planted on the bag-shaped elastic body surface 7.

【0039】研磨部材10は、好適に、砥粒繊維3の束
から成る複数の研磨層3′を相互に間隔をあけて袋状弾
性体1表面上に形成させて成る(図1参照)。
The polishing member 10 is preferably formed by forming a plurality of polishing layers 3'consisting of a bundle of abrasive grain fibers 3 on the surface of the bag-shaped elastic body 1 at intervals (see FIG. 1).

【0040】本発明の研磨部材20は、図2(a)およ
び(b)に示すとおり、袋状弾性体1表面に砥粒6とバ
インダー樹脂接着剤9とを混練させたスラリー8を塗布
して成る。
As shown in FIGS. 2 (a) and 2 (b), the polishing member 20 of the present invention is obtained by coating the surface of the bag-shaped elastic body 1 with the slurry 8 in which the abrasive grains 6 and the binder resin adhesive 9 are kneaded. Consists of

【0041】図2(b)は袋状弾性体1表面の部分拡大
図である。
FIG. 2B is a partially enlarged view of the surface of the bag-shaped elastic body 1.

【0042】研磨部材20は、好適に、スラリー8から
成る複数の研磨層8′を相互に間隔をあけて袋状弾性体
1表面上に形成させて成る(図2参照)。
The polishing member 20 is preferably formed by forming a plurality of polishing layers 8'comprising the slurry 8 on the surface of the bag-shaped elastic body 1 at intervals (see FIG. 2).

【0043】袋状弾性体1は、図1(a)および図2
(a)に示されるとおり、その形状を被研磨物の凹凸部
表面の形状となるように空気を袋状弾性体1内に吹き込
むための開口部2を有している。
The bag-shaped elastic body 1 is shown in FIGS.
As shown in (a), it has an opening 2 for blowing air into the bag-shaped elastic body 1 so that its shape becomes the shape of the uneven surface of the object to be polished.

【0044】図3(a)および(b)は、図1(a)お
よび(b)に示す本発明の研磨部材10を製造するため
の装置を示す。
FIGS. 3 (a) and 3 (b) show an apparatus for producing the polishing member 10 of the present invention shown in FIGS. 1 (a) and 1 (b).

【0045】本発明の研磨部材10の製造装置は、好適
に、電極棒30と電極板31とから成り、電極棒30は
電極板31とほぼ平行に間隔をあけて位置され、電極板
31は接地され、電極棒30の一端はスイッチ33を介
して高電圧源32に接続され、この高電圧源32はさら
に接地されている。
The apparatus for manufacturing the polishing member 10 of the present invention preferably comprises an electrode rod 30 and an electrode plate 31, the electrode rod 30 being positioned substantially in parallel with the electrode plate 31 at a distance, and the electrode plate 31 being It is grounded, and one end of the electrode rod 30 is connected to a high voltage source 32 via a switch 33, and this high voltage source 32 is further grounded.

【0046】電極棒30を袋状弾性体1内部に挿入し、
電極板31上に砥粒繊維3を乗せて、スイッチ33を閉
じると、電極棒30と電極板31との間に電界が形成さ
れる。このとき、電極板31上の砥粒繊維3が帯電(例
えば、電極棒30の極性が正の場合、砥粒繊維3は負に
帯電する)し、電界の電気力線に沿って立ち上がり、さ
らには砥粒繊維3が電極棒30、すなわち袋状弾性体1
表面に向かって移動する(図3(a)参照)。このと
き、袋状弾性体1表面上の砥粒繊維3は互いに付着せず
に電界の方向に沿って袋状弾性体1表面上に起立してい
る。
The electrode rod 30 is inserted into the bag-shaped elastic body 1,
When the abrasive grain fibers 3 are placed on the electrode plate 31 and the switch 33 is closed, an electric field is formed between the electrode rod 30 and the electrode plate 31. At this time, the abrasive grain fibers 3 on the electrode plate 31 are charged (for example, when the polarity of the electrode rod 30 is positive, the abrasive grain fibers 3 are negatively charged), rise along the electric lines of force of the electric field, and The abrasive fiber 3 is the electrode rod 30, that is, the bag-shaped elastic body 1.
It moves toward the surface (see FIG. 3 (a)). At this time, the abrasive grain fibers 3 on the surface of the bag-shaped elastic body 1 do not adhere to each other and stand up on the surface of the bag-shaped elastic body 1 along the direction of the electric field.

【0047】次に、スイッチ33を開くと、袋状弾性体
1表面の砥粒繊維3は、袋状弾性体1表面上の予め接着
剤4を塗布してある箇所に砥粒繊維3を付着さたものを
除き、重力の作用によって落下する(図3(b)参
照)。
Next, when the switch 33 is opened, the abrasive fiber 3 on the surface of the bag-shaped elastic body 1 is attached to the surface of the surface of the bag-shaped elastic body 1 to which the adhesive 4 has been applied in advance. Except for fish, it falls by the action of gravity (see Fig. 3 (b)).

【0048】このように、スイッチ33開閉動作を繰り
返しながら袋状弾性体1を矢印34の方向に回転させる
と、本発明の研磨部材10が製造される。
As described above, when the bag-shaped elastic body 1 is rotated in the direction of the arrow 34 while repeating the opening / closing operation of the switch 33, the polishing member 10 of the present invention is manufactured.

【0049】図4は、本発明の研磨部材10に使用され
る砥粒繊維3の製造装置を示す。
FIG. 4 shows an apparatus for producing the abrasive grain fibers 3 used in the polishing member 10 of the present invention.

【0050】砥粒繊維3の製造装置は好適に、接着剤溶
液42を入れた液槽41と、砥粒吹付器44と、裁断器
45とから成る。
The apparatus for producing the abrasive grain fibers 3 preferably comprises a liquid tank 41 containing an adhesive solution 42, an abrasive grain spraying device 44, and a cutter 45.

【0051】砥粒繊維3は、繊維40をボビン43から
送り出し、液槽41中の接着剤溶液42に浸し、砥粒吹
付器44によって繊維40に砥粒6を付着させ、裁断器
45によって所望の長さに切断して製造される。切断さ
れた繊維40、つまり砥粒繊維3は、砥粒繊維受器47
に集められる。
For the abrasive grain fiber 3, the fiber 40 is sent from the bobbin 43, dipped in the adhesive solution 42 in the liquid tank 41, the abrasive grain 6 is attached to the fiber 40 by the abrasive grain spraying device 44, and the desired product is cut by the cutter 45. Manufactured by cutting to length. The cut fiber 40, that is, the abrasive fiber 3 is transferred to the abrasive fiber receiver 47.
Collected in.

【0052】ここで、繊維40は、ボビン43から送り
出されて裁断されるまでの間、繊維40同士が互いに付
着しないように間隔をあけられている。
Here, the fibers 40 are spaced so that the fibers 40 do not adhere to each other until they are sent from the bobbin 43 and cut.

【0053】また、砥粒6を繊維40に吹き付ける際、
好適に、吹付器44を高電圧源45に接続し、繊維40
をこの吹付器44と、接地した電極板46との間を走行
させて砥粒6を吹き付ける。これにより、吹き付けられ
る砥粒6が同極性に帯電され、繊維40に砥粒6の塊を
生じさせずに一様に付着させることができる。 [実施例1] 内径40mmの金属パイプの内部表面を
研磨するための、袋状弾性体の表面に砥粒繊維を植毛さ
せた研磨部材を製造した。
When the abrasive grains 6 are sprayed on the fibers 40,
Suitably, the spray gun 44 is connected to the high voltage source 45 and the fiber 40
Is run between this sprayer 44 and the grounded electrode plate 46 to spray the abrasive grains 6. As a result, the abrasive grains 6 to be sprayed are charged to the same polarity, and the abrasive grains 6 can be uniformly attached to the fibers 40 without causing lumps of the abrasive grains 6. [Example 1] A polishing member for polishing the inner surface of a metal pipe having an inner diameter of 40 mm was produced by implanting abrasive fibers on the surface of a bag-shaped elastic body.

【0054】実施例1の研磨部材は具体的に、厚さ0.
3mm、直径20mm、長さ100mmの袋状の加硫ゴ
ムの内部に空気を吹き込み、この直径を40mmまで膨
張させた状態で、図1(a)に示すように、砥粒繊維の
束から成る複数の研磨層を相互に間隔をあけて袋状弾性
体表面上に形成されるように、天然ゴムを主体とする接
着剤を袋状弾性体表面上に塗布し、この接着剤が乾燥す
る前に平均粒径1μmの酸化アルミニウム(Al23
を付着させた直径6μm、長さ0.5mmのアクリル繊
維(つまり、砥粒繊維)を袋状弾性体表面に移動させ
(図3(a)および(b)参照)、袋状弾性体内部に挿
入された電極棒に印加した高電圧を切って袋状弾性体表
面に移動した砥粒繊維のうち袋状弾性体表面上の予め接
着剤を塗布した箇所のみに砥粒繊維を付着させて製造し
た。
The polishing member of Example 1 has a specific thickness of 0.
Air is blown into a bag-shaped vulcanized rubber having a diameter of 3 mm, a diameter of 20 mm, and a length of 100 mm, and the vulcanized rubber is expanded to a diameter of 40 mm. As shown in FIG. Before the adhesive dries, apply an adhesive consisting mainly of natural rubber on the bag-shaped elastic body surface so that a plurality of polishing layers are formed on the bag-shaped elastic body surface at intervals. Aluminum oxide (Al 2 O 3 ) with an average particle size of 1 μm
The acrylic fiber (that is, abrasive fiber) having a diameter of 6 μm and a length of 0.5 mm, to which is attached, is moved to the surface of the bag-shaped elastic body (see FIGS. 3 (a) and (b)), and the inside of the bag-shaped elastic body is Manufactured by attaching the abrasive grain fiber only to the part of the abrasive grain fiber that has moved to the surface of the bag-shaped elastic body by cutting the high voltage applied to the inserted electrode rod and applying the adhesive in advance on the surface of the bag-shaped elastic body. did.

【0055】また、この砥粒繊維は、図4に示す装置を
用いて、多数の直径6μmのアクリル繊維表面に酢酸ビ
ニル系若しくは塩化ビニル系の接着剤を塗布し、平均粒
径1μmの砥粒を繊維表面に一様に付着するように帯電
させて散布し、乾燥させて、裁断器で0.5mmの長さ
に切断して製造した。
This abrasive grain fiber was coated with a vinyl acetate or vinyl chloride adhesive on the surface of a large number of acrylic fibers having a diameter of 6 μm using the apparatus shown in FIG. Was sprayed so as to be uniformly attached to the fiber surface, sprayed, dried, and cut into a length of 0.5 mm with a cutter to manufacture.

【0056】実施例1の研磨部材を用いて内径40mm
の金属パイプの内部表面を以下に示す方法で研磨した。
Using the polishing member of Example 1, an inner diameter of 40 mm
The inner surface of the metal pipe was polished by the following method.

【0057】本発明の研磨部材を金属パイプの内部に挿
入し、研磨部材開口部から研磨部材内部に空気を吹き込
む。研磨部材表面が金属パイプ内部表面に接触したとこ
ろで空気の送り込みを停止し、研磨部材および/または
金属パイプを回転させて研磨した。 [実施例2] 内径40mmの金属パイプの内部表面を
研磨するための、袋状弾性体表面に砥粒を付着させた研
磨部材を製造した。
The polishing member of the present invention is inserted into a metal pipe, and air is blown into the polishing member from the opening of the polishing member. When the surface of the polishing member came into contact with the inner surface of the metal pipe, the air supply was stopped, and the polishing member and / or the metal pipe was rotated for polishing. Example 2 A polishing member for polishing the inner surface of a metal pipe having an inner diameter of 40 mm, in which abrasive particles were attached to the surface of a bag-shaped elastic body, was manufactured.

【0058】実施例2の研磨部材は具体的に、厚さ0.
5mm、直径30mm、長さ100mmの袋状の加硫ゴ
ムの内部に空気を送り込み、この直径を約40mmまで
膨張させた状態で、その表面に砥粒とバインダー樹脂接
着剤とを混合したスラリーを塗布し(図2(a)および
(b)参照)、約20分間、140°Cの雰囲気でスラ
リーを乾燥させ、次いで研磨部材内の空気を抜いて製造
した。
Specifically, the polishing member of Example 2 has a thickness of 0.
Air was blown into a bag-shaped vulcanized rubber having a diameter of 5 mm, a diameter of 30 mm, and a length of 100 mm, and in a state where the diameter was expanded to about 40 mm, a slurry in which abrasive grains and a binder resin adhesive were mixed was formed on the surface thereof. It was applied (see FIGS. 2 (a) and 2 (b)), the slurry was dried in an atmosphere of 140 ° C. for about 20 minutes, and then the air in the polishing member was evacuated.

【0059】ここで、実施例2の研磨部材は、図2
(a)に示すように、スラリーから成る複数の研磨層を
相互に間隔をあけて袋状弾性体表面上に形成させて成
る。
Here, the polishing member of Example 2 is as shown in FIG.
As shown in (a), a plurality of polishing layers made of slurry are formed on the surface of the bag-shaped elastic body at intervals.

【0060】砥粒は平均粒径10μmの酸化アルミニウ
ム(Al23)を使用し、バインダー樹脂接着剤は天然
ゴムおよびブタジエンゴム接着剤を使用した。
Aluminum oxide (Al 2 O 3 ) having an average particle size of 10 μm was used as the abrasive grains, and natural rubber and butadiene rubber adhesives were used as the binder resin adhesive.

【0061】この研磨部材を用いた内径40mmの金属
パイプの内部表面の研磨方法は、実施例1と同様の方法
である。
The method for polishing the inner surface of a metal pipe having an inner diameter of 40 mm using this polishing member is the same as in Example 1.

【0062】[0062]

【発明の効果】以上、詳細に説明したとおり、本発明の
研磨部材は、袋状弾性体の表面の所望の箇所に砥粒繊維
または砥粒を付着させて成るため、被研磨物の内側表面
が複雑な形状であっても、袋状弾性体内部に空気等を送
り込むことによって研磨部材表面を被研磨物内側表面に
押し当てることができ、被研磨物の凹部内側表面を研磨
することができる。
As described above in detail, since the abrasive member of the present invention is formed by adhering abrasive grains or abrasive grains to desired positions on the surface of the bag-shaped elastic body, the inner surface of the object to be polished is Even if the shape is complicated, the surface of the polishing member can be pressed against the inner surface of the object to be polished by sending air or the like into the bag-shaped elastic body, and the inner surface of the recess of the object can be polished. .

【0063】また、砥粒繊維または砥粒を袋状弾性体表
面の所望の箇所に付着させることができるため、例えば
砥粒繊維の束、または砥粒から成る研磨層を袋状弾性体
表面に間隔をあけて形成させると、研磨くずがその間隔
を通じて外部へ排除されるため、特に砥粒繊維の場合、
砥粒繊維同士が互いに付着していないので、研磨くずを
その繊維同士の間に取り込み、研磨くずによって被研磨
表面を傷つけることなく研磨ができる。
Further, since the abrasive grain fibers or the abrasive grains can be adhered to desired positions on the surface of the bag-shaped elastic body, for example, a bundle of abrasive grain fibers or a polishing layer composed of the abrasive grains is formed on the bag-shaped elastic body surface. If formed at intervals, abrasive debris is removed to the outside through the intervals, so especially in the case of abrasive fibers,
Since the abrasive grain fibers are not attached to each other, polishing debris can be taken in between the fibers and polishing can be performed without damaging the surface to be polished by the polishing debris.

【0064】袋状弾性体の形状および/または研磨部材
内の空気圧を調節して所望の形状の研磨部材を製造でき
るため、その形状を被研磨物の凸部表面全体またはほぼ
全体に押し当てられるようにすると、被研磨物の凸部表
面全体も研磨できる。
Since the polishing member having a desired shape can be manufactured by adjusting the shape of the bag-shaped elastic body and / or the air pressure inside the polishing member, the shape can be pressed onto the entire convex surface of the object to be polished or almost the entire surface. By doing so, the entire convex surface of the object to be polished can be polished.

【図面の簡単な説明】[Brief description of drawings]

【図1】図1(a)は、本発明の、袋状弾性体表面の所
望の箇所に砥粒繊維を付着させた研磨部材を示し、図1
(b)は、図1(a)のA−A断面の部分拡大図であ
る。
FIG. 1 (a) shows a polishing member of the present invention in which abrasive grain fibers are attached to desired positions on the surface of a bag-shaped elastic body, and FIG.
FIG. 1B is a partially enlarged view of the AA cross section of FIG.

【図2】図2(a)は、本発明の、袋状弾性体表面の所
望の箇所に砥粒とバインダー樹脂接着剤とを混練したス
ラリーを塗布した研磨部材を示し、図2(b)は、図2
(a)のB−B断面の部分拡大図である。
FIG. 2 (a) shows a polishing member of the present invention, which is obtained by applying a slurry prepared by kneading abrasive grains and a binder resin adhesive to desired locations on the surface of a bag-shaped elastic body, and FIG. Is shown in FIG.
It is the elements on larger scale of the BB cross section of (a).

【図3】図3(a)および(b)は、図1に示す本発明
の研磨部材の製造装置を示す。
3 (a) and 3 (b) show an apparatus for manufacturing the polishing member of the present invention shown in FIG.

【図4】図4は、図1に示す本発明の研磨部材に使用さ
れる砥粒繊維の製造装置を示す。
4 shows an apparatus for producing abrasive fibers used in the polishing member of the present invention shown in FIG.

【符号の説明】[Explanation of symbols]

1 ...袋状弾性体 2 ...開口部 3 ...砥粒繊維 3′ ...砥粒繊維の束から成る研磨層 4 ...接着剤 5 ...繊維 6 ...砥粒 7 ...袋状弾性体表面 8 ...スラリー 8′ ...スラリーから成る研磨層 9 ...バインダー樹脂接着剤 10...研磨部材(砥粒繊維を付着させたもの) 20...研磨部材(砥粒を付着させたもの) 30...電極棒 31...電極板 32...高電圧源 33...スイッチ 34...袋状弾性体の回転方向 40...繊維 41...液槽 42...接着剤溶液 43...ボビン 44...砥粒吹付器 45...裁断器 46...電極板 47...砥粒繊維受器 48...高電圧源 1. . . Bag-shaped elastic body 2. . . Opening 3. . . Abrasive fiber 3 '. . . 3. A polishing layer composed of a bundle of abrasive fibers 4. . . Adhesive 5. . . Fiber 6. . . Abrasive grain 7. . . Bag-shaped elastic body surface 8. . . Slurry 8 '. . . Polishing layer composed of slurry 9. . . Binder resin adhesive 10. . . Polishing member (with abrasive grain fibers attached) 20. . . Polishing member (with abrasive grains attached) 30. . . Electrode rod 31. . . Electrode plate 32. . . High voltage source 33. . . Switch 34. . . Rotational direction of bag-shaped elastic body 40. . . Fiber 41. . . Liquid tank 42. . . Adhesive solution 43. . . Bobbin 44. . . Abrasive sprayer 45. . . Cutter 46. . . Electrode plate 47. . . Abrasive fiber receiver 48. . . High voltage source

Claims (11)

【特許請求の範囲】[Claims] 【請求項1】 袋状弾性体の表面に砥粒繊維を植毛させ
て成り、前記砥粒繊維が繊維の表面に砥粒を付着させて
成る、研磨部材。
1. A polishing member formed by implanting abrasive grain fibers on the surface of a bag-shaped elastic body, wherein the abrasive grain fibers adhere abrasive grains to the surface of the fiber.
【請求項2】 前記砥粒繊維の束から成る複数の研磨層
が相互に間隔をあけて前記袋状弾性体の表面に形成され
る、請求項1記載の研磨部材。
2. The polishing member according to claim 1, wherein a plurality of polishing layers formed of a bundle of abrasive grain fibers are formed on the surface of the bag-shaped elastic body at intervals.
【請求項3】 前記袋状弾性体の前記表面に植毛した前
記砥粒繊維同士が互いに付着せずに植毛されいている、
請求項1記載の研磨部材。
3. The bristles of the abrasive particles are flocked on the surface of the bag-shaped elastic body without adhering to each other.
The polishing member according to claim 1.
【請求項4】 袋状弾性体の表面に砥粒を付着させて成
る、研磨部材。
4. A polishing member formed by attaching abrasive grains to the surface of a bag-shaped elastic body.
【請求項5】 前記砥粒から成る複数の研磨層が相互に
間隔をあけて前記袋状弾性体の表面に形成される、請求
項4記載の研磨部材。
5. The polishing member according to claim 4, wherein a plurality of polishing layers made of the abrasive grains are formed on the surface of the bag-shaped elastic body at intervals.
【請求項6】 繊維に砥粒を付着させて砥粒繊維を製造
する工程と、袋状弾性体の表面に前記砥粒繊維を植毛す
る工程とから成る、研磨部材の製造方法。
6. A method of manufacturing an abrasive member, which comprises a step of producing abrasive grains by adhering abrasive grains to the fibers and a step of implanting the abrasive grains on the surface of a bag-shaped elastic body.
【請求項7】 前記砥粒繊維を製造する前記工程が、前
記砥粒を帯電させ、前記砥粒と前記繊維とを電界中に位
置させて前記砥粒を前記繊維の表面に付着させる工程を
含む、請求項6記載の研磨部材の製造方法。
7. The step of producing the abrasive grain fibers comprises the step of charging the abrasive grains, positioning the abrasive grains and the fibers in an electric field, and adhering the abrasive grains to the surface of the fibers. The method for manufacturing a polishing member according to claim 6, comprising:
【請求項8】 前記砥粒繊維を植毛する前記工程が、接
着剤を前記表面に塗布する工程と、接地された高電圧源
に接続させた電極棒を前記袋状弾性体の内部に挿入し、
前記電極棒と間隔をあけ接地した電極板上に前記砥粒繊
維を乗せ、前記電極棒に高電圧を印加する工程とから成
る、請求項6記載の研磨部材の製造方法。
8. The step of implanting the abrasive fiber includes the steps of applying an adhesive to the surface and inserting an electrode rod connected to a grounded high voltage source into the bag-shaped elastic body. ,
7. The method for manufacturing a polishing member according to claim 6, comprising a step of placing the abrasive grain fibers on an electrode plate which is grounded at a distance from the electrode rod and applies a high voltage to the electrode rod.
【請求項9】 袋状弾性体の表面に砥粒を付着させる工
程から成る、研磨部材の製造方法。
9. A method of manufacturing a polishing member, comprising the step of attaching abrasive grains to the surface of a bag-shaped elastic body.
【請求項10】 前記袋状弾性体の表面に前記砥粒を付
着させる工程が、前記袋状弾性体の表面に接着剤を塗布
する工程と、前記接着剤が塗布された箇所に前記砥粒を
付着させる工程とから成る、請求項9記載の方法。
10. The step of adhering the abrasive particles to the surface of the bag-shaped elastic body includes the step of applying an adhesive to the surface of the bag-shaped elastic body, and the abrasive particles at the location where the adhesive is applied. 10. The method of claim 9, comprising the step of:
【請求項11】 前記袋状弾性体の表面に前記砥粒を付
着させる工程が、前記砥粒とバインダー樹脂接着剤とを
混練させたスラリーを前記袋状弾性体の表面に塗布する
工程である、請求項9記載の方法。
11. The step of adhering the abrasive grains to the surface of the bag-shaped elastic body is a step of applying a slurry prepared by kneading the abrasive grains and a binder resin adhesive to the surface of the bag-shaped elastic body. The method according to claim 9.
JP09694994A 1994-04-11 1994-04-11 Polishing member and method of manufacturing the same Expired - Fee Related JP3367082B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP09694994A JP3367082B2 (en) 1994-04-11 1994-04-11 Polishing member and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP09694994A JP3367082B2 (en) 1994-04-11 1994-04-11 Polishing member and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPH07276247A true JPH07276247A (en) 1995-10-24
JP3367082B2 JP3367082B2 (en) 2003-01-14

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ID=14178555

Family Applications (1)

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Country Link
JP (1) JP3367082B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998028101A1 (en) * 1996-12-20 1998-07-02 Unique Technology International Private Limited Texturing and electro-deburring of magnetic disk substrate
WO2006126455A1 (en) * 2005-05-26 2006-11-30 Tokki Corporation Polishing apparatus
JP2008070280A (en) * 2006-09-15 2008-03-27 Nihon Micro Coating Co Ltd Probe cleaner and cleaning method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998028101A1 (en) * 1996-12-20 1998-07-02 Unique Technology International Private Limited Texturing and electro-deburring of magnetic disk substrate
WO2006126455A1 (en) * 2005-05-26 2006-11-30 Tokki Corporation Polishing apparatus
JP2006326754A (en) * 2005-05-26 2006-12-07 Tokki Corp Polishing device
JP2008070280A (en) * 2006-09-15 2008-03-27 Nihon Micro Coating Co Ltd Probe cleaner and cleaning method
KR101381491B1 (en) * 2006-09-15 2014-04-04 니혼 미크로 코팅 가부시끼 가이샤 Probe cleaner and cleaning method

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