WO1991013317A3 - Interferometre pour la determination de la position ou du deplacement d'un miroir de mesure mobile ou analogue - Google Patents
Interferometre pour la determination de la position ou du deplacement d'un miroir de mesure mobile ou analogue Download PDFInfo
- Publication number
- WO1991013317A3 WO1991013317A3 PCT/AT1991/000034 AT9100034W WO9113317A3 WO 1991013317 A3 WO1991013317 A3 WO 1991013317A3 AT 9100034 W AT9100034 W AT 9100034W WO 9113317 A3 WO9113317 A3 WO 9113317A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- laser light
- interferometer
- beam divider
- guide
- distance travelled
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
- G01B9/02051—Integrated design, e.g. on-chip or monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02058—Passive reduction of errors by particular optical compensation or alignment elements, e.g. dispersion compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP91905444A EP0517781B1 (fr) | 1990-03-02 | 1991-02-28 | Interferometre pour la determination de la position ou du deplacement d'un miroir de mesure mobile ou analogue |
US07/934,447 US5359415A (en) | 1990-03-02 | 1991-02-28 | Interferometer for determining the position of displacement travel of a movable measuring mirror or the like |
JP3505256A JP2739609B2 (ja) | 1990-03-02 | 1991-02-28 | 可動測定ミラー等の位置または移動走行決定用干渉計 |
DE59103914T DE59103914D1 (de) | 1990-03-02 | 1991-02-28 | Interferometer zur lage- bzw. verschiebewegbestimmung eines beweglichen messspiegels oder dergleichen. |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT0049790A AT397307B (de) | 1990-03-02 | 1990-03-02 | Interferometer insbesondere zur längenmessung |
ATA497/90 | 1990-03-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1991013317A2 WO1991013317A2 (fr) | 1991-09-05 |
WO1991013317A3 true WO1991013317A3 (fr) | 1991-10-17 |
Family
ID=3492176
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/AT1991/000034 WO1991013317A2 (fr) | 1990-03-02 | 1991-02-28 | Interferometre pour la determination de la position ou du deplacement d'un miroir de mesure mobile ou analogue |
Country Status (6)
Country | Link |
---|---|
US (1) | US5359415A (fr) |
EP (1) | EP0517781B1 (fr) |
JP (1) | JP2739609B2 (fr) |
AT (1) | AT397307B (fr) |
DE (1) | DE59103914D1 (fr) |
WO (1) | WO1991013317A2 (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69115477T2 (de) * | 1990-04-23 | 1996-05-30 | Commw Scient Ind Res Org | Interferometrisches system und verfahren |
DE19819762A1 (de) * | 1998-05-04 | 1999-11-25 | Bosch Gmbh Robert | Interferometrische Meßeinrichtung |
US7193721B2 (en) * | 2004-05-28 | 2007-03-20 | Agilent Technologies, Inc. | Systems using polarization-manipulating retroreflectors |
US7251040B2 (en) * | 2005-01-21 | 2007-07-31 | Uchicago Argonne Llc | Single metal nanoparticle scattering interferometer |
KR100908638B1 (ko) * | 2007-06-05 | 2009-07-21 | 한국표준과학연구원 | 3차원 좌표측정 장치 및 방법 |
US8063383B2 (en) * | 2008-11-04 | 2011-11-22 | Sergiy Pryadkin | Inertial positioner and an optical instrument for precise positioning |
JP5690541B2 (ja) * | 2010-09-30 | 2015-03-25 | 株式会社トプコン | 距離測定装置 |
JP6071572B2 (ja) * | 2013-01-17 | 2017-02-01 | キヤノン株式会社 | 干渉計システム、リソグラフィー装置、それを用いた物品の製造方法 |
US11841223B2 (en) * | 2022-02-23 | 2023-12-12 | Lockheed Martin Corporation | Optical systems with controlled mirror arrangements |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2012450A (en) * | 1978-01-13 | 1979-07-25 | Downs M J | Interferometer Systems |
US4627731A (en) * | 1985-09-03 | 1986-12-09 | United Technologies Corporation | Common optical path interferometric gauge |
US4767210A (en) * | 1983-02-24 | 1988-08-30 | British Telecommunications Plc | Optical fibre interferometer |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1138312B (it) * | 1981-05-06 | 1986-09-17 | Cise Spa | Interferometro con trasmissione in fibra ottica dell'informazione di fase utile |
US4909629A (en) * | 1987-07-07 | 1990-03-20 | Kabushiki Kaisha Topcon | Light interferometer |
FR2630537B1 (fr) * | 1988-04-22 | 1990-07-13 | Thomson Csf | Capteur de deplacement a fibre optique |
-
1990
- 1990-03-02 AT AT0049790A patent/AT397307B/de not_active IP Right Cessation
-
1991
- 1991-02-28 US US07/934,447 patent/US5359415A/en not_active Expired - Lifetime
- 1991-02-28 EP EP91905444A patent/EP0517781B1/fr not_active Expired - Lifetime
- 1991-02-28 JP JP3505256A patent/JP2739609B2/ja not_active Expired - Fee Related
- 1991-02-28 DE DE59103914T patent/DE59103914D1/de not_active Expired - Fee Related
- 1991-02-28 WO PCT/AT1991/000034 patent/WO1991013317A2/fr active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2012450A (en) * | 1978-01-13 | 1979-07-25 | Downs M J | Interferometer Systems |
US4767210A (en) * | 1983-02-24 | 1988-08-30 | British Telecommunications Plc | Optical fibre interferometer |
US4627731A (en) * | 1985-09-03 | 1986-12-09 | United Technologies Corporation | Common optical path interferometric gauge |
Non-Patent Citations (2)
Title |
---|
Appl. Phys. Lett., Band 35, Nr. 11, 1. Dezember 1979, American Institute of Physics R. Ulrich: "Polarization stabilization on single-mode fiber", Seiten 840-842 * |
Journal of Lightwave Technology, Band 6, Nr. 10, Oktober 1988 (New York, NY. US) A.D. Kersey et al.: "Optimization and stabilization of visibility in interferometric fiber-optic sensors using input-polarization control", Seiten 1599-1609 * |
Also Published As
Publication number | Publication date |
---|---|
AT397307B (de) | 1994-03-25 |
EP0517781B1 (fr) | 1994-12-14 |
US5359415A (en) | 1994-10-25 |
JP2739609B2 (ja) | 1998-04-15 |
WO1991013317A2 (fr) | 1991-09-05 |
ATA49790A (de) | 1993-07-15 |
JPH05506304A (ja) | 1993-09-16 |
DE59103914D1 (de) | 1995-01-26 |
EP0517781A1 (fr) | 1992-12-16 |
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