USD574792S1 - Lower heat insulating cylinder for manufacturing semiconductor wafers - Google Patents

Lower heat insulating cylinder for manufacturing semiconductor wafers Download PDF

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Publication number
USD574792S1
USD574792S1 US29/272,820 US27282007F USD574792S US D574792 S1 USD574792 S1 US D574792S1 US 27282007 F US27282007 F US 27282007F US D574792 S USD574792 S US D574792S
Authority
US
United States
Prior art keywords
heat insulating
semiconductor wafers
lower heat
manufacturing semiconductor
insulating cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/272,820
Inventor
Izumi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SAITO, IZUMI
Application granted granted Critical
Publication of USD574792S1 publication Critical patent/USD574792S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a perspective view of the design for a lower heat insulating cylinder for manufacturing semiconductor wafers in accordance with the invention;
FIG. 2 is a front view thereof;
FIG. 3 is a left side view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a rear view thereof;
FIG. 6 is a top view thereof;
FIG. 7 is a bottom view thereof;
FIG. 8 is another top view thereof which shows sectional line 99;
FIG. 9 is a sectional view thereof along line 99 of FIG. 8; and,
FIG. 10 shows a lower heat insulating cylinder for manufacturing semiconductor wafers in accordance with the invention in use wherein the broken line showing of the environment is for illustrative purpose only and forms no part of the claimed design.

Claims (1)

  1. The ornamental design for a lower heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
US29/272,820 2006-08-23 2007-02-20 Lower heat insulating cylinder for manufacturing semiconductor wafers Expired - Lifetime USD574792S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006022201 2006-08-23

Publications (1)

Publication Number Publication Date
USD574792S1 true USD574792S1 (en) 2008-08-12

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ID=39679078

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/272,820 Expired - Lifetime USD574792S1 (en) 2006-08-23 2007-02-20 Lower heat insulating cylinder for manufacturing semiconductor wafers

Country Status (1)

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US (1) USD574792S1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD744967S1 (en) * 2012-03-20 2015-12-08 Veeco Instruments Inc. Spindle key
USD748591S1 (en) 2012-03-20 2016-02-02 Veeco Instruments Inc. Keyed spindle
US9816184B2 (en) 2012-03-20 2017-11-14 Veeco Instruments Inc. Keyed wafer carrier

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD744967S1 (en) * 2012-03-20 2015-12-08 Veeco Instruments Inc. Spindle key
USD748591S1 (en) 2012-03-20 2016-02-02 Veeco Instruments Inc. Keyed spindle
US9816184B2 (en) 2012-03-20 2017-11-14 Veeco Instruments Inc. Keyed wafer carrier

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