US8663736B2 - Germanium complexes with amidine derivative ligand and process for preparing the same - Google Patents

Germanium complexes with amidine derivative ligand and process for preparing the same Download PDF

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US8663736B2
US8663736B2 US13/143,621 US201013143621A US8663736B2 US 8663736 B2 US8663736 B2 US 8663736B2 US 201013143621 A US201013143621 A US 201013143621A US 8663736 B2 US8663736 B2 US 8663736B2
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germanium
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Jae Sun Jung
Su Hyong Yun
Minchan Kim
Sung Won Han
Yong Joo Park
Su Jung Shin
Ki Whan Sung
Sang Kyung Lee
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    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/30—Germanium compounds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/003—Compounds containing elements of Groups 4 or 14 of the Periodic Table without C-Metal linkages

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  • the present invention relates to a novel germanium complex with an amidine derivative ligand and a method for preparing the same, more preferably to preparation of an asymmetric germanium complex useful as a precursor for preparing germanium thin film or germanium-containing compound thin film.
  • germanium precursors are used in silicon-germanium solar cells, optical coatings, or the like. Recently, they are used in various fields including the manufacture of GeSbTe (GST) thin film as next-generation semiconductor device.
  • GST GeSbTe
  • germane In general, germane (GeH 4 ) is used as a germanium precursor in producing germanium thin film or germanium-containing compound thin film. Germane is toxic gas in standard condition and is difficult to handle. Therefore, it needs safety equipment for process application. In addition, it is restricted in use in semiconductor processes requiring low temperature, since a deposition temperature of about 500° C. or higher is necessary for chemical vapor deposition (CVD). For other organometallic germanium precursors, those with alkyl (R), alkoxy (OR) or cyclopentadiene (Cp) groups as ligand are reported.
  • organometallic germanium precursors those with alkyl (R), alkoxy (OR) or cyclopentadiene (Cp) groups as ligand are reported.
  • US Patent Application No. 2003/0111013 discloses deposition methods of silicon germanium layer for thin film preparation using mono-, di-, tri- or tetrachlorogermane. However, these compounds are not appropriate for deposition of germanium because they are decomposed at low temperature.
  • Korean Patent Application No. 2007-0042805 discloses a method for preparing a germanium(II) complex with an aminoalkoxide ligand. This compound is a liquid material which is decomposed approximately at 236° C.
  • PCT/US2007/063830 discloses deposition methods of GST thin film using a germanium precursor with an alkylamino ligand
  • Korean Patent Application No. 2004/0112906 discloses deposition methods of GST thin film using a germanium(IV) precursor with a silylamino ligand.
  • the inventors of the present invention have developed a new asymmetric germanium precursor with an amidine derivative ligand, having improved thermal stability and being capable of deposition at low temperature.
  • An object of the present invention is to provide a novel asymmetric germanium complex and a method for preparing the same. Another object of the present invention is to provide a method for preparing germanium thin film by using novel germanium complex capable of deposition at low temperature of below 300° C.
  • the present invention relates to a germanium complex represented by Chemical Formula 1.
  • Y 1 and Y 2 are independently selected from R 3 , NR 4 R 5 or OR 6 , and R 1 through R 6 independently represent (C 1 -C 7 )alkyl.
  • the germanium complex according to the present invention is thermally stable, is highly volatile, and does not include halogen components. Therefore, it may be usefully used as a precursor to produce high-quality germanium thin film or germanium-containing compound thin film by metal organic chemical vapor deposition (MOCVD) or atomic layer deposition (ALD).
  • MOCVD metal organic chemical vapor deposition
  • ALD atomic layer deposition
  • Y 1 and Y 2 may be independently selected from —N(CH 3 ) 2 , —N(CH 3 )(CH 2 CH 3 ), —CH 3 , or —C(CH 3 ) 3 , and R 1 through R 2 may independently represent methyl, ethyl, propyl or t-butyl.
  • Y 1 and Y 2 may be the same ligand, but, more preferably, Y 1 and Y 2 may be different ligands.
  • germanium complex represented by Chemical Formula 1 may be selected from the following structures:
  • the germanium complex represented by Chemical Formula 1 according to the present invention may have various substituents introduced to the amidine ligand binding with the central metal germanium thus to control steric hindrance. As a result, intermolecular interaction may be reduced and the total molecular weight may be controlled thus to increase volatility.
  • Such a structural characteristic provides the germanium complex according to the present invention with the following advantages.
  • the germanium complex exists as liquid at room temperature, is highly soluble in organic solvents such as benzene, tetrahydrofuran, toluene, etc., and has good volatility. Accordingly, the germanium complex according to the present invention may be very useful as a precursor to produce germanium thin film or germanium-containing compound thin film.
  • the germanium complex represented by Chemical Formula 1 according to the present invention may be prepared by a method commonly used in the related art. Although not particularly limited thereto, the present invention provides the following preparation method.
  • a germanium complex may be prepared by a method comprising:
  • M 1 and M 2 independently represent an alkali metal
  • Y 1 and Y 2 are independently selected from R 3 , NR 4 R 5 or OR 6
  • R 1 through R 6 independently represent (C 1 -C 7 )alkyl.
  • Chemical Formula 1 may be rewritten as Chemical Formula 7.
  • germanium complex represented by Chemical Formula 7 may be selected from the following structures:
  • the germanium complex represented by Chemical Formula 7 may be prepared by the following preparation method.
  • the present invention provides a method for preparing a germanium complex, comprising:
  • M 1 represents an alkali metal
  • Y 1 is selected from R 3 , NR 4 R 5 or OR 6
  • R 1 through R 6 independently represent (C 1 -C 7 )alkyl.
  • germanium(II) halide may be Ge(II)Br 2 , Ge(II)Cl 2 (dioxane) or Ge(II)I 2 .
  • M 1 and M 2 may be independently lithium, sodium or potassium, more preferably lithium, and Y 1 and Y 2 may be independently —N(CH 3 ) 2 , —N(CH 3 )(CH 2 CH 3 ), —CH 3 or —C(CH 3 ) 3 .
  • alkylcarbodiimide (R 1 NCNR 2 ) represented by Chemical Formula 4 may be 1,3-diisopropylcarbodiimide.
  • the germanium complex according to the present invention may be prepared by Scheme 1.
  • M 1 represents an alkali metal
  • Y 1 is selected from R 3 , NR 4 R 5 or OR 6
  • R 1 through R 6 independently represent (C 1 -C 7 )alkyl.
  • the germanium complex according to the present invention may also be prepared by Scheme 2.
  • Y 2 may be represented by Y 1 .
  • the complex represented by Chemical Formula 5 and a germanium(II) halide (GeX 2 (dioxane)) are added and reacted at low temperature, for example at ⁇ 70° C., to obtain the germanium complex represented by Chemical Formula 7.
  • This reaction may be carried out by stirring for 8 to 14 hours after adding the germanium(II) halide.
  • the organic solvent that may be used in the present invention includes ether, hexane, toluene, etc.
  • germanium(II) halide GeX 2 (dioxane) may be Ge(II)Br 2 , Ge(II)Cl 2 (dioxane) or Ge(II)I 2 .
  • M 1 , Y 1 , R 1 and R 2 are the same as described above.
  • 1 molar equivalent of the alkali metal salt represented by Chemical Formula 3 is reacted with 1 molar equivalent of the alkylcarbodiimide represented by Chemical Formula 4 at low temperature, for example at ⁇ 70° C., to obtain the complex represented by Chemical Formula 5.
  • the step b) of the preparation method of the present invention may be carried out according to Scheme 4 and Scheme 5.
  • M 1 and M 2 independently represent an alkali metal
  • Y 1 and Y 2 are independently selected from R 3 , NR 4 R 5 or OR 6
  • R 1 through R 6 independently represent (C 1 -C 7 )alkyl.
  • prepared germanium complex according to the present invention may be liquid at room temperature, and T 1/2 (the temperature at which the weight of the sample reaches 1 ⁇ 2 of the original weight) in the thermogravimetric analysis (TGA) may be from 140 to 190° C.
  • TGA thermogravimetric analysis
  • the structure of the germanium complex may be identified by nuclear magnetic resonance spectroscopy (NMR) or elemental analysis (EA).
  • the present invention further provides a method for preparing a germanium thin film, comprising: injecting the germanium complex represented by Chemical Formula 1 to a substrate provided in a reactor to prepare a germanium thin film by chemical vapor deposition (CVD) or ALD (atomic layer deposition).
  • CVD chemical vapor deposition
  • ALD atomic layer deposition
  • the temperature of the substrate may range from 150 to 350° C.
  • the substrate may be a silicon monocrystalline substrate or other semiconductor substrate. More specifically, a TiN/SiO 2 /Si substrate may be used.
  • the germanium thin film may be prepared using a reaction gas.
  • the reaction gas may be oxygen, hydrogen, ammonia gas, etc., but is not limited thereto.
  • the inflow rate of the reaction gas may vary depending on the thin film to be deposited.
  • the deposition pressure may range from 3 to 5 torr, but is not particularly limited thereto.
  • the germanium complex with an amidine derivative according to the present invention has an asymmetric structure, exists as transparent liquid at room temperature, and may be easily obtained from a pure compound through vacuum distillation.
  • the germanium complex with an amidine derivative according to the present invention is thermally stable, is highly volatile, and does not include halogen components. Therefore, it may be usefully used as a precursor to produce high-quality germanium thin film or germanium-containing compound thin film by metal organic chemical vapor deposition (MOCVD) or atomic layer deposition (ALD).
  • MOCVD metal organic chemical vapor deposition
  • ALD atomic layer deposition
  • the germanium complex according to the present invention may have various substituents introduced to the amidine ligand binding with the central metal germanium thus to control steric hindrance.
  • intermolecular interaction may be reduced and the total molecular weight may be controlled thus to increase volatility.
  • germanium complex is pyrolyzable at low temperature in the absence of a reducing agent, it may be advantageously utilized as a precursor to produce high-quality germanium thin film or germanium-containing compound thin film.
  • FIG. 1 shows X-ray diffraction (XRD) analysis result of the germanium thin films deposited in Example 7 and Example 9 according to the present invention.
  • FIG. 2 shows X-ray photoelectron spectroscopy (XPS) analysis result of the germanium thin films deposited in Example 7 and Example 9 according to the present invention.
  • XPS X-ray photoelectron spectroscopy
  • FIG. 3A shows scanning electron microscopy (SEM) analysis result of the germanium thin film deposited in Example 7
  • FIG. 3 B shows SEM analysis result of the germanium thin film deposited in Example 8
  • FIG. 3 C shows SEM analysis result of the germanium thin film deposited in Example 9.
  • FIG. 4 shows proton nuclear magnetic resonance spectroscopy ( 1 H NMR) analysis result of the germanium complex prepared in Example 1.
  • FIG. 5 shows 1 H NMR analysis result of the germanium complex prepared in Example 3.
  • FIG. 6 shows 1 H NMR analysis result of the germanium complex prepared in Example 4.
  • FIG. 7 shows thermogravimetric analysis (TGA) and differential thermal analysis (DTA) results of the germanium complex prepared in Example 1.
  • FIG. 8 shows TGA and DTA results of the germanium complex prepared in Example 3.
  • FIG. 9 shows TGA and DTA results of the germanium complex prepared in Example 5.
  • TGA thermogravimetric analysis
  • lithium ethylmethylamide solution anhydrous n-hexane (50 mL) and ethylmethylamine (LiNEtMe, 1.40 g, 23.70 mmol) were added to another 250 mL Schlenk flask. The mixture was cooled to ⁇ 70° C. and, after slowly adding n-butyllithium 2.5 M solution (9.48 mL, 23.70 mmol) dropwise, slowly warmed to room temperature and stirred for 4 hours to prepare lithium ethylmethylamide solution (solution I). The previously synthesized (N,N′-diisopropyl-dimethylguanidyl)(chloro)germanium was cooled to ⁇ 70° C. and slowly added dropwise to thus prepared lithium ethylmethylamide solution (solution I). The mixture was slowly warmed to room temperature and stirred for 12 hours.
  • N,N′-diisopropyl-dimethylguanidyl)ethylmethylamino)germanium(II) was subjected to TGA.
  • T 1/2 was 166° C.
  • the N,N′-diisopropyl-dimethylguanidyl)(ethylmethylamino)germanium(II) was subjected to 1 H NMR analysis. The result is shown in FIG. 5 .
  • TGA and DTA results are shown in FIG. 8 .
  • dichlorogermanium-dioxane 7 g, 30.22 mmol
  • anhydrous ether 100 mL
  • lithium ethylmethylamide solution anhydrous n-hexane (50 mL) and ethylmethylamine (1.40 g, 23.70 mmol) were added to another 250 mL Schlenk flask and cooled to ⁇ 70° C.
  • n-butyllithium 2.5 M solution 9.48 mL, 23.70 mmol
  • the mixture was slowly warmed to room temperature and stirred for 4 hours to prepare lithium ethylmethylamide.
  • the previously synthesized (N,N′-diisopropyl-methylamidyl)(chloro)germanium was cooled to ⁇ 70° C.
  • a germanium thin film was formed by metal organic chemical vapor deposition (MOCVD) using the (N,N′-diisopropyl-dimethylguanidyl)(dimethylamino)germanium(II) synthesized in Example 1 as source material and using argon as carrier gas.
  • the (N,N′-diisopropyl-dimethylguanidyl)(dimethylamino)germanium(II) was carried to a TiN/SiO 2 /Si substrate inside a chamber at about 50 sccm using argon as the carrier gas.
  • the source temperature was maintained at about 60° C., and the substrate temperature at 300° C. Deposition was carried out for 1 hour. Deposition pressure was maintained at 3 torr.
  • X-ray diffraction (XRD) analysis result of thus deposited germanium thin film is shown in FIG. 1 , X-ray photoelectron spectroscopy (XPS) analysis result shown in FIG. 2 , and scanning electron microscopy (SEM) analysis result in FIG. 3 A).
  • the thin film had a thickness of about 1 ⁇ m.
  • Deposition was carried out in a similar manner as Example 7, except that the substrate temperature was maintained at 250° C.
  • Deposition was carried out in a similar manner as Example 7, except that the substrate temperature was maintained at 200° C.
  • FIG. 1 XRD analysis result of thus deposited germanium thin film is shown in FIG. 1 , XPS analysis result shown in FIG. 2 , and SEM analysis result in FIG. 3 C).
  • the germanium thin film prepared according to the present invention was an amorphous germanium thin film.
  • the XPS analysis result of FIG. 2 shows that thin film deposition could be accomplished in Example 9. Accordingly, it was confirmed that the germanium complex according to the present invention could be deposited to form a thin film even at a relatively low temperature of 200° C.

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Abstract

Provided is a germanium complex represented by Chemical Formula 1 wherein Y1 and Y2 are independently selected from R3, NR4R5 or OR6, and R1 through R6 independently represent (Ci-C7) alkyl. The provided germanium complex with an amidine derivative ligand is thermally stable, is highly volatile, and does not include halogen components. Therefore, it may be usefully used as a precursor to produce high-quality germanium thin film or germanium-containing compound thin film by metal organic chemical vapor deposition (MOCVD) or atomic layer deposition (ALD).
Figure US08663736-20140304-C00001

Description

TECHNICAL FIELD
The present invention relates to a novel germanium complex with an amidine derivative ligand and a method for preparing the same, more preferably to preparation of an asymmetric germanium complex useful as a precursor for preparing germanium thin film or germanium-containing compound thin film.
BACKGROUND ART
In preparation of thin film through thin film deposition, in particular in chemical vapor deposition and atomic layer deposition, highly pure precursors that can be easily deposited at low temperatures are required for ideal thin film deposition needed in semiconductor processes and various other fields. Especially, germanium precursors are used in silicon-germanium solar cells, optical coatings, or the like. Recently, they are used in various fields including the manufacture of GeSbTe (GST) thin film as next-generation semiconductor device.
In general, germane (GeH4) is used as a germanium precursor in producing germanium thin film or germanium-containing compound thin film. Germane is toxic gas in standard condition and is difficult to handle. Therefore, it needs safety equipment for process application. In addition, it is restricted in use in semiconductor processes requiring low temperature, since a deposition temperature of about 500° C. or higher is necessary for chemical vapor deposition (CVD). For other organometallic germanium precursors, those with alkyl (R), alkoxy (OR) or cyclopentadiene (Cp) groups as ligand are reported. However, because large steric hindrance occurring due to the ligands, these precursors are solid at room temperature or tend to be associated with thin film contamination during deposition (Veprek, S., Glatz, F.; Knowitschny, R. J. Non-Cryst. Solids 1991, 137 and 138, 779; Seigi Suh and David M. Hoffman, Inorg. Chem. 1996, 35, 6164-6169; Henry Gerung, Scott D. Bunge, Timothy J. Boyle, C. Jeffrey Brinkerab and Sang M. Han, Chem. Commun., 2005 1914-1916).
US Patent Application No. 2003/0111013 (Oosterlaken, et al.) discloses deposition methods of silicon germanium layer for thin film preparation using mono-, di-, tri- or tetrachlorogermane. However, these compounds are not appropriate for deposition of germanium because they are decomposed at low temperature.
Korean Patent Application No. 2007-0042805 (Chang-kyun Kim, et al.) discloses a method for preparing a germanium(II) complex with an aminoalkoxide ligand. This compound is a liquid material which is decomposed approximately at 236° C.
Recently, there have been patents and researches about the preparation of GST thin film and related precursor for the manufacture of phase-change random access memory (PRAM). PCT/US2007/063830 (Hunks, et al.) discloses deposition methods of GST thin film using a germanium precursor with an alkylamino ligand, and Korean Patent Application No. 2004/0112906 (Beom-seok Seo, at al.) discloses deposition methods of GST thin film using a germanium(IV) precursor with a silylamino ligand.
DISCLOSURE Technical Problem
In order to solve the problems associated with the aforesaid germanium complexes, the inventors of the present invention have developed a new asymmetric germanium precursor with an amidine derivative ligand, having improved thermal stability and being capable of deposition at low temperature.
An object of the present invention is to provide a novel asymmetric germanium complex and a method for preparing the same. Another object of the present invention is to provide a method for preparing germanium thin film by using novel germanium complex capable of deposition at low temperature of below 300° C.
Technical Solution
The present invention relates to a germanium complex represented by Chemical Formula 1.
Figure US08663736-20140304-C00002
In Chemical Formula 1, Y1 and Y2 are independently selected from R3, NR4R5 or OR6, and R1 through R6 independently represent (C1-C7)alkyl.
The germanium complex according to the present invention is thermally stable, is highly volatile, and does not include halogen components. Therefore, it may be usefully used as a precursor to produce high-quality germanium thin film or germanium-containing compound thin film by metal organic chemical vapor deposition (MOCVD) or atomic layer deposition (ALD).
In the present invention, Y1 and Y2 may be independently selected from —N(CH3)2, —N(CH3)(CH2CH3), —CH3, or —C(CH3)3, and R1 through R2 may independently represent methyl, ethyl, propyl or t-butyl. Y1 and Y2 may be the same ligand, but, more preferably, Y1 and Y2 may be different ligands.
More specifically, the germanium complex represented by Chemical Formula 1 may be selected from the following structures:
Figure US08663736-20140304-C00003
The germanium complex represented by Chemical Formula 1 according to the present invention may have various substituents introduced to the amidine ligand binding with the central metal germanium thus to control steric hindrance. As a result, intermolecular interaction may be reduced and the total molecular weight may be controlled thus to increase volatility. Such a structural characteristic provides the germanium complex according to the present invention with the following advantages. The germanium complex exists as liquid at room temperature, is highly soluble in organic solvents such as benzene, tetrahydrofuran, toluene, etc., and has good volatility. Accordingly, the germanium complex according to the present invention may be very useful as a precursor to produce germanium thin film or germanium-containing compound thin film.
Hereinafter, a method for preparing the germanium complex represented by Chemical Formula 1 according to the present invention will be described in detail. The germanium complex represented by Chemical Formula 1 according to the present invention may be prepared by a method commonly used in the related art. Although not particularly limited thereto, the present invention provides the following preparation method.
According to the present invention, a germanium complex may be prepared by a method comprising:
a) reacting an alkali metal salt represented by Chemical Formula 3 with an alkylcarbodiimide (R1NCNR2) compound represented by Chemical Formula 4 to prepare a complex represented by Chemical Formula 5; and
b) adding to the complex represented by Chemical Formula 5a germanium (II) halide and an alkali metal salt represented by Chemical Formula 6 to prepare a germanium complex represented by Chemical Formula 1:
Figure US08663736-20140304-C00004
wherein M1 and M2 independently represent an alkali metal, Y1 and Y2 are independently selected from R3, NR4R5 or OR6, and R1 through R6 independently represent (C1-C7)alkyl.
In case Y1 and Y2 in Chemical Formula 1 are the same, Chemical Formula 1 may be rewritten as Chemical Formula 7.
More specifically, the germanium complex represented by Chemical Formula 7 may be selected from the following structures:
Figure US08663736-20140304-C00005
The germanium complex represented by Chemical Formula 7 may be prepared by the following preparation method.
The present invention provides a method for preparing a germanium complex, comprising:
reacting an alkali metal salt represented by Chemical Formula 3 with an alkylcarbodiimide (R1NCNR2) compound represented by Chemical Formula 4 to prepare a complex represented by Chemical Formula 5; and
adding to the complex represented by Chemical Formula 5 a germanium(II) halide to prepare a germanium complex represented by Chemical Formula 7:
Figure US08663736-20140304-C00006
wherein M1 represents an alkali metal, Y1 is selected from R3, NR4R5 or OR6, and R1 through R6 independently represent (C1-C7)alkyl.
More specifically, the germanium(II) halide may be Ge(II)Br2, Ge(II)Cl2(dioxane) or Ge(II)I2.
M1 and M2 may be independently lithium, sodium or potassium, more preferably lithium, and Y1 and Y2 may be independently —N(CH3)2, —N(CH3)(CH2CH3), —CH3 or —C(CH3)3.
And, a specific example of the alkylcarbodiimide (R1NCNR2) represented by Chemical Formula 4 may be 1,3-diisopropylcarbodiimide.
In case Y1 and Y2 in Chemical Formula 1 are the same ligand, the germanium complex according to the present invention may be prepared by Scheme 1.
Figure US08663736-20140304-C00007
In Scheme 1, M1 represents an alkali metal, Y1 is selected from R3, NR4R5 or OR6, and R1 through R6 independently represent (C1-C7)alkyl.
According to Scheme 1, 2 molar equivalents of the alkali metal salt represented by Chemical Formula 3 is reacted with 1 molar equivalent of the alkylcarbodiimide represented by Chemical Formula 4 at low temperature, for example at −70° C., to obtain the complex represented by Chemical Formula 5. This reaction may be carried out by stirring for 3 to 12 hours.
In case Y1 and Y2 are the same ligand, the germanium complex according to the present invention may also be prepared by Scheme 2.
Figure US08663736-20140304-C00008
Figure US08663736-20140304-C00009
In case Y1 and Y2 are the same ligand, Y2 may be represented by Y1. As seen in Scheme 2, to an organic solvent including 1 molar equivalent of the alkali metal salt (M1Y1) represented by Chemical Formula 3, the complex represented by Chemical Formula 5 and a germanium(II) halide (GeX2(dioxane)) are added and reacted at low temperature, for example at −70° C., to obtain the germanium complex represented by Chemical Formula 7. This reaction may be carried out by stirring for 8 to 14 hours after adding the germanium(II) halide. The organic solvent that may be used in the present invention includes ether, hexane, toluene, etc. Prior to use, water and oxygen may be removed from these organic solvents according to the method known in the art. In Scheme 2, the germanium(II) halide GeX2(dioxane) may be Ge(II)Br2, Ge(II)Cl2(dioxane) or Ge(II)I2.
Hereinafter, a method for preparing the germanium complex according to the present invention in case Y1 and Y2 are different will be described in detail. In case Y1 and Y2 are different, the step a) of the preparation method of the present invention may be carried out according to Scheme 3.
Figure US08663736-20140304-C00010
In Scheme 3, M1, Y1, R1 and R2 are the same as described above. Specifically, in Scheme 3, 1 molar equivalent of the alkali metal salt represented by Chemical Formula 3 is reacted with 1 molar equivalent of the alkylcarbodiimide represented by Chemical Formula 4 at low temperature, for example at −70° C., to obtain the complex represented by Chemical Formula 5. Subsequently, the step b) of the preparation method of the present invention may be carried out according to Scheme 4 and Scheme 5.
Figure US08663736-20140304-C00011
Figure US08663736-20140304-C00012
In Schemes 4 and 5, M1 and M2 independently represent an alkali metal, Y1 and Y2 are independently selected from R3, NR4R5 or OR6, and R1 through R6 independently represent (C1-C7)alkyl.
Thus prepared germanium complex according to the present invention may be liquid at room temperature, and T1/2 (the temperature at which the weight of the sample reaches ½ of the original weight) in the thermogravimetric analysis (TGA) may be from 140 to 190° C. The structure of the germanium complex may be identified by nuclear magnetic resonance spectroscopy (NMR) or elemental analysis (EA).
The present invention further provides a method for preparing a germanium thin film, comprising: injecting the germanium complex represented by Chemical Formula 1 to a substrate provided in a reactor to prepare a germanium thin film by chemical vapor deposition (CVD) or ALD (atomic layer deposition). Here, the temperature of the substrate may range from 150 to 350° C. The substrate may be a silicon monocrystalline substrate or other semiconductor substrate. More specifically, a TiN/SiO2/Si substrate may be used.
The germanium thin film may be prepared using a reaction gas. However, thin film deposition is possible also without using a reaction gas. The reaction gas may be oxygen, hydrogen, ammonia gas, etc., but is not limited thereto. The inflow rate of the reaction gas may vary depending on the thin film to be deposited. The deposition pressure may range from 3 to 5 torr, but is not particularly limited thereto.
Advantageous Effects
The germanium complex with an amidine derivative according to the present invention has an asymmetric structure, exists as transparent liquid at room temperature, and may be easily obtained from a pure compound through vacuum distillation. In addition, the germanium complex with an amidine derivative according to the present invention is thermally stable, is highly volatile, and does not include halogen components. Therefore, it may be usefully used as a precursor to produce high-quality germanium thin film or germanium-containing compound thin film by metal organic chemical vapor deposition (MOCVD) or atomic layer deposition (ALD).
More specifically, the germanium complex according to the present invention may have various substituents introduced to the amidine ligand binding with the central metal germanium thus to control steric hindrance. As a result, intermolecular interaction may be reduced and the total molecular weight may be controlled thus to increase volatility.
In addition, since the germanium complex is pyrolyzable at low temperature in the absence of a reducing agent, it may be advantageously utilized as a precursor to produce high-quality germanium thin film or germanium-containing compound thin film.
DESCRIPTION OF DRAWINGS
The above and other objects, features and advantages of the present invention will become apparent from the following description of preferred embodiments given in conjunction with the accompanying drawings, in which:
FIG. 1 shows X-ray diffraction (XRD) analysis result of the germanium thin films deposited in Example 7 and Example 9 according to the present invention.
FIG. 2 shows X-ray photoelectron spectroscopy (XPS) analysis result of the germanium thin films deposited in Example 7 and Example 9 according to the present invention.
FIG. 3A) shows scanning electron microscopy (SEM) analysis result of the germanium thin film deposited in Example 7, FIG. 3 B) shows SEM analysis result of the germanium thin film deposited in Example 8, and FIG. 3 C) shows SEM analysis result of the germanium thin film deposited in Example 9.
FIG. 4 shows proton nuclear magnetic resonance spectroscopy (1H NMR) analysis result of the germanium complex prepared in Example 1.
FIG. 5 shows 1H NMR analysis result of the germanium complex prepared in Example 3.
FIG. 6 shows 1H NMR analysis result of the germanium complex prepared in Example 4.
FIG. 7 shows thermogravimetric analysis (TGA) and differential thermal analysis (DTA) results of the germanium complex prepared in Example 1.
FIG. 8 shows TGA and DTA results of the germanium complex prepared in Example 3.
FIG. 9 shows TGA and DTA results of the germanium complex prepared in Example 5.
 MODE FOR INVENTION
The examples and experiments will now be described. The following examples and experiments are for illustrative purposes only and not intended to limit the scope of the present invention.
Example 1 Preparation of (N,N′-diisopropyl-dimethylguanidyl)(dimethylamino)germanium(II)
Anhydrous ether (60 mL) and lithium dimethylamide (3.40 g, 66.49 mmol) were added to a 250 mL Schlenk flask and cooled to −70° C. to prepare solution A. After slowly adding 1,3-diisopropylcarbodiimide (4.20 g, 33.24 mmol) dropwise to the solution A, the mixture was slowly warmed to room temperature and stirred for 4 hours to prepare solution B.
In another 250 mL Schlenk flask, anhydrous ether (100 mL) was added to dichlorogermanium-dioxane (GeCl2(dioxane), 7.00 g, 30.22 mmol) and cooled to −70° C. to prepare solution C. After slowly adding dropwise the reaction solution (solution B) of lithium dimethylamide and 1,3-diisopropylcarbodiimide to the dichlorogermanium-dioxane solution (solution C), the mixture was slowly warmed to room temperature and stirred for 12 hours. After filtration, solvent was removed from the resulting filtrate at room temperature in vacuum. Thus obtained yellow liquid was distilled in vacuum (89° C./0.1 torr). (N,N′-diisopropyl-dimethylguanidyl)(dimethylamino)germanium(II) was obtained as colorless liquid.
Thus prepared (N,N′-diisopropyl-dimethylguanidyl)(dimethylamino)germanium(II) was subjected to thermogravimetric analysis (TGA). T1/2 (the temperature at which the weight of the sample reaches ½ of the original weight) was 162° C.
The (N,N′-diisopropyl-dimethylguanidyl)(dimethylamino)germanium(II) was subjected to proton nuclear magnetic resonance spectroscopy (1H NMR). The result is shown in FIG. 4. TGA and differential thermal analysis (DTA) results are shown in FIG. 7.
1H NMR (ppm, C6D6,): 1.12 (d, 12H), 2.31 (s, 6H), 3.02 (s, 6H), 3.45 (m, 2H).
Elemental analysis: C11N4H26Ge [calculated (measured)]: C, 46.04 (45.50); H, 9.13 (9.32); N, 19.52 (20.52).
Example 2 Preparation of (N,N′-diisopropyl-ethylmethylguanidyl)(ethylmethylamino)germanium(II)
Anhydrous n-hexane (50 mL) and ethylmethylamine (5.62 g, 94.98 mmol) were added to a 250 mL Schlenk flask and cooled to −70° C. to prepare solution D. After slowly adding n-butyllithium 2.5 M solution (38.00 mL, 94.98 mmol) dropwise to the solution D, the mixture was slowly warmed to room temperature and stirred for 4 hours to prepare lithium ethylmethylamide solution. The lithium ethylmethylamide solution was cooled to −70° C. and, after slowly adding 1,3-diisopropylcarbodiimide (6.00 g, 47.50 mmol) dropwise, the mixture was slowly warmed to room temperature and stirred for 4 hours to prepare solution E.
In another 250 mL Schlenk flask, anhydrous ether (100 mL) was added to dichlorogermanium-dioxane (7 g, 30.22 mmol) and cooled to −70° C. to prepare solution F. After slowly adding dropwise the reaction solution (solution E) of lithium ethylmethylamide and 1,3-diisopropylcarbodiimide to the solution F, the mixture was slowly warmed to room temperature and stirred for 12 hours. After filtration, solvent was removed from the resulting filtrate at room temperature in vacuum. Thus obtained yellow liquid was distilled in vacuum (78° C./0.1 torr). (N,N′-diisopropyl-ethylmethylguanidyl)(ethylmethylamino)germanium(II) was obtained as colorless liquid.
Thus prepared (N,N′-diisopropyl-ethylmethylguanidyl)(ethylmethylamino)germanium(II) was subjected to TGA. T1/2 was 175° C.
1H NMR (ppm, C6D6,): 0.79 (t, 3H), 1.17 (d, 12H), 1.30 (t, 3H), 2.31 (s, 3H), 2.70 (q, 2H), 3.00 (s, 3H), 3.36 (q, 2H), 3.47 (m, 2H).
Example 3 Preparation of (N,N′-diisopropyl-dimethylguanidyl)(ethylmethylamino)germanium(II)
Anhydrous ether (60 mL) and lithium dimethylamide (1.21 g, 23.7 mmol) were added to a 250 mL Schlenk flask and cooled to −70° C. to prepare solution G. After slowly adding 1,3-diisopropylcarbodiimide (3.27 g, 25.90 mmol) dropwise to the solution G, the mixture was slowly warmed to room temperature and stirred for 4 hours to prepare solution H.
In another 250 mL Schlenk flask, anhydrous ether (100 mL) was added to dichlorogermanium-dioxane (5.00 g, 21.6 mmol) and cooled to −70° C. After slowly adding dropwise the reaction solution (solution H) of lithium dithethylamide and 1,3-diisopropylcarbodiimide, the mixture was slowly warmed to room temperature and stirred for 12 hours to obtain (N,N′-diisopropyl-dimethylaminoguanidyl)(chloro)germanium.
To prepare lithium ethylmethylamide solution, anhydrous n-hexane (50 mL) and ethylmethylamine (LiNEtMe, 1.40 g, 23.70 mmol) were added to another 250 mL Schlenk flask. The mixture was cooled to −70° C. and, after slowly adding n-butyllithium 2.5 M solution (9.48 mL, 23.70 mmol) dropwise, slowly warmed to room temperature and stirred for 4 hours to prepare lithium ethylmethylamide solution (solution I). The previously synthesized (N,N′-diisopropyl-dimethylguanidyl)(chloro)germanium was cooled to −70° C. and slowly added dropwise to thus prepared lithium ethylmethylamide solution (solution I). The mixture was slowly warmed to room temperature and stirred for 12 hours.
After filtration, solvent was removed from the resulting filtrate at room temperature in vacuum. Thus obtained yellow liquid was distilled in vacuum (112° C./0.1 torr). (N,N′-diisopropyl-dimethylguanidyl)(ethylmethylamino)germanium(II) was obtained as yellow liquid.
Thus prepared N,N′-diisopropyl-dimethylguanidyl)ethylmethylamino)germanium(II) was subjected to TGA. T1/2 was 166° C. The N,N′-diisopropyl-dimethylguanidyl)(ethylmethylamino)germanium(II) was subjected to 1H NMR analysis. The result is shown in FIG. 5. TGA and DTA results are shown in FIG. 8.
1H NMR (ppm, C6D6,): 1.15 (d, 12H), 1.30 (t, 3H), 2.29 (s, 6H), 2.99 (s, 3H), 3.36 (q, 2H), 3.47 (m, 2H).
Example 4 Preparation of (N,N′-diisopropyl-methylamidyl)(ethylmethylamino)germanium(II)
Anhydrous ether (50 mL) and 1,3-diisopropylcarbodiimide (3.3 g, 25.91 mmol) were mixed in a 250 mL Schlenk flask and, after cooling to −70° C., methyllithium 1.6 M solution (15.00 mL, 23.75 mmol) was slowly added dropwise to prepare solution J. The solution J was slowly warmed to room temperature and stirred for 4 hours to prepare N,N′-diisopropyl-methylamidyllithium salt. In another 250 mL Schlenk flask, dichlorogermanium-dioxane (7 g, 30.22 mmol) and anhydrous ether (100 mL) were mixed and cooled to −70° C. to prepare dichlorogermanium solution.
After slowly adding dropwise the N,N′-diisopropyl-methylamidyllithium salt solution to the dichlorogermanium solution, the mixture was slowly warmed to room temperature and stirred for 4 hours to prepare (N,N′-diisopropyl-methylamidyl)(chloro)germanium.
To prepare lithium ethylmethylamide solution, anhydrous n-hexane (50 mL) and ethylmethylamine (1.40 g, 23.70 mmol) were added to another 250 mL Schlenk flask and cooled to −70° C. To the cooled solution of hexane and ethylmethylamine, n-butyllithium 2.5 M solution (9.48 mL, 23.70 mmol) was slowly added dropwise. The mixture was slowly warmed to room temperature and stirred for 4 hours to prepare lithium ethylmethylamide. The previously synthesized (N,N′-diisopropyl-methylamidyl)(chloro)germanium was cooled to −70° C. and the lithium ethylmethylamide solution prepared above was slowly added dropwise. The mixture was warmed to room temperature and stirred for over 12 hours. After filtration, solvent was removed from the resulting filtrate at room temperature in vacuum. Thus obtained yellow liquid was distilled in vacuum (82° C./0.1 torr). (N,N′-diisopropyl-methylamidyl)(ethylmethylamino)germanium(II) was obtained as colorless liquid.
Thus prepared (N,N′-diisopropyl-methylamidyl)(ethylmethylamino)germanium(II) was subjected to TGA. T1/2 was 158° C. The (N,N′-diisopropyl-methylamidyl)(ethylmethylamino)germanium(II) was subjected to 1H NMR analysis. The result is shown in FIG. 6.
1H NMR (ppm, C6D6,): 1.08 (d, 12H), 1.26 (t, 3H), 1.29 (s, 3H), 3.34 (q, 2H), 3.34 (m, 2H).
Example 5 Preparation of (N,N′-diisopropyl-methylamidyl)(dimethylamino)germanium(II)
Anhydrous ether (100 mL) and 1,3-diisopropylcarbodiimide (5.99 g, 47.50 mmol) were added to a 250 mL Schlenk flask and cooled to −70° C. To the resulting 1,3-diisopropylcarbodiimide solution, 1.6 M methyllithium solution (29.68 mL, 47.50 mmol) was slowly added dropwise. After warming to room temperature, the mixture was stirred for 4 hours to prepare N,N′-diisopropylmethylamidyllithium salt.
In another 250 ml Schlenk flask, dichlorogermanium-dioxane (10 g, 43.20 mmol) and anhydrous ether (100 mL) were added and cooled to −70° C. After slowly adding dropwise the N,N′-diisopropylmethylamidyllithium salt, the mixture was warmed to room temperature and stirred for 4 hours to prepare (N,N′-diisopropyl-methylamidyl)(chloro)germanium.
In another 250 mL Schlenk flask, anhydrous ether (100 mL) and lithium dimethylamide (2.42 g, 46.50 mmol) were cooled to −70° C. and the (N,N′-diisopropyl-methylamidyl)(chloro)germanium prepared above was slowly added dropwise. The resulting N,N′-diisopropyl-methylamidyl)(chloro)germanium solution was warmed to room temperature and stirred for 12 hours. After filtration, solvent was removed from the resulting filtrate at room temperature in vacuum. Thus obtained yellow liquid was distilled in vacuum (78° C./0.1 torr). (N,N′-diisopropyl-methylamidyl)(dimethylamino)germanium(II) was obtained as yellow liquid.
Thus prepared (N,N′-diisopropyl-methylamidyl)(dimethylamino)germanium(II) was subjected to TGA. T1/2 was 154° C. TGA and DTA results of the germanium complex are shown in FIG. 9.
1H NMR (ppm, C6D6,): 1.07 (d, 12H), 1.30 (s, 3H), 3.00 (s, 6H), 3.30 (m, 2H).
Example 6 Preparation of (N,N′-diisopropyl-dimethylguanidyl)(t-butyl)germanium(II)
Anhydrous ether (50 mL) and lithium dimethylamide (2.43 g, 47.49 mmol) were mixed in a 250 mL Schlenk flask and cooled to −70° C. After slowly adding dropwise 1,3-diisopropylcarbodiimide (6.54 g, 51.81 mmol) to the mixture solution of anhydrous ether and lithium dimethylamide, the mixture was slowly warmed to room temperature and stirred for 4 hours. In another 250 mL Schlenk flask, dichlorogermanium-dioxane (10.00 g, 43.17 mmol) and anhydrous ether (100 ml) were mixed and cooled to −70° C. To the resulting dichlorogermanium-dioxane solution, the reaction solution of lithium dimethylamide and 1,3-diisopropylcarbodiimide prepared above was slowly added dropwise. The mixture was slowly warmed to room temperature and stirred for 12 hours to prepare (N,N′-diisopropyl-dimethylguanidyl)(chloro)germanium.
Thus synthesized (N,N′-diisopropyl-dimethylguanidyl)(chloro)germanium was cooled to −70° C. and, after slowly adding dropwise t-butyllithium solution (9.50 mL, 47.49 mmol), the resulting mixture was slowly warmed to room temperature and allowed to react for over 12 hours. After filtration, solvent was removed from the resulting filtrate at room temperature in vacuum. Thus obtained yellow liquid was distilled in vacuum (120° C./0.1 torr). (N,N′-diisopropyl-dimethylguanidyl)(t-butyl)germanium(II) was obtained as colorless liquid.
Thus prepared (N,N′-diisopropyl-methylguanidyl) t-butyl)germanium(II) was subjected to TGA. T1/2 was 170° C.
1H NMR (ppm, C6D6,): 1.11 (q, 12H), 1.31 (s, 9H), 2.29 (s, 6H), 3.51 (m, 2H).
Example 7 Deposition of Germanium Thin Film
A germanium thin film was formed by metal organic chemical vapor deposition (MOCVD) using the (N,N′-diisopropyl-dimethylguanidyl)(dimethylamino)germanium(II) synthesized in Example 1 as source material and using argon as carrier gas. The (N,N′-diisopropyl-dimethylguanidyl)(dimethylamino)germanium(II) was carried to a TiN/SiO2/Si substrate inside a chamber at about 50 sccm using argon as the carrier gas. The source temperature was maintained at about 60° C., and the substrate temperature at 300° C. Deposition was carried out for 1 hour. Deposition pressure was maintained at 3 torr.
X-ray diffraction (XRD) analysis result of thus deposited germanium thin film is shown in FIG. 1, X-ray photoelectron spectroscopy (XPS) analysis result shown in FIG. 2, and scanning electron microscopy (SEM) analysis result in FIG. 3 A). The thin film had a thickness of about 1 μm.
Example 8 Deposition of Germanium Thin Film
Deposition was carried out in a similar manner as Example 7, except that the substrate temperature was maintained at 250° C.
SEM analysis result of thus deposited germanium thin film is shown in FIG. 3 B).
Example 9 Deposition of Germanium Thin Film
Deposition was carried out in a similar manner as Example 7, except that the substrate temperature was maintained at 200° C.
XRD analysis result of thus deposited germanium thin film is shown in FIG. 1, XPS analysis result shown in FIG. 2, and SEM analysis result in FIG. 3 C). As seen from FIG. 3, the germanium thin film prepared according to the present invention was an amorphous germanium thin film. The XPS analysis result of FIG. 2 shows that thin film deposition could be accomplished in Example 9. Accordingly, it was confirmed that the germanium complex according to the present invention could be deposited to form a thin film even at a relatively low temperature of 200° C.

Claims (19)

The invention claimed is:
1. A germanium complex represented by Chemical Formula 1:
Figure US08663736-20140304-C00013
wherein Y1 and Y2 are independently selected from R3, NR4R5 or OR6, and R1 through R6 independently represent (C1-C7)alkyl.
2. The germanium complex according to claim 1, wherein Y1 and Y2 independently represent —N(CH3)2, —N(CH3)(CH2CH3), —CH3 or —C(CH3)3.
3. The germanium complex according to claim 2, which is selected from the following structures:
Figure US08663736-20140304-C00014
.
4. A method for preparing a germanium thin film, comprising:
injecting the germanium complex according to claim 3 to a substrate provided in a reactor to prepare a germanium thin film by chemical vapor deposition or atomic layer deposition.
5. A method for preparing a germanium thin film, comprising:
injecting the germanium complex according to claim 2 to a substrate provided in a reactor to prepare a germanium thin film by chemical vapor deposition or atomic layer deposition.
6. The germanium complex according to claim 1, wherein R1 through R2 independently represent methyl, ethyl, propyl or t-butyl.
7. A method for preparing a germanium thin film, comprising:
injecting the germanium complex according to claim 6 to a substrate provided in a reactor to prepare a germanium thin film by chemical vapor deposition or atomic layer deposition.
8. A method for preparing a germanium thin film, comprising:
injecting the germanium complex according to claim 1 to a substrate provided in a reactor to prepare a germanium thin film by chemical vapor deposition or atomic layer deposition.
9. The method for preparing a germanium thin film according to claim 8, wherein the temperature of the substrate is from 150 to 350° C.
10. A method for preparing a germanium complex, comprising:
reacting an alkali metal salt represented by Chemical Formula 3 with an alkylcarbodiimide (R1NCNR2) compound represented by Chemical Formula 4 to prepare a complex represented by Chemical Formula 5; and
adding to the complex represented by Chemical Formula 5 a germanium(II) halide and an alkali metal salt represented by Chemical Formula 6 to prepare a germanium complex represented by Chemical Formula 1:
Figure US08663736-20140304-C00015
wherein M1 and M2 independently represent an alkali metal, Y1 and Y2 are independently selected from R3, NR4R5 or OR6, and R1 through R6 independently represent (C1-C7)alkyl.
11. The method for preparing a germanium complex according to claim 10, wherein Y1 and Y2 independently represent —N(CH3)2, —N(CH3)(CH2CH3), —CH3 or —C(CH3)3, and M1 and M2 independently represent lithium, sodium or potassium.
12. The method for preparing a germanium complex according to claim 10, or wherein the alkylcarbodiimide is 1,3-diisopropylcarbodiimide.
13. The method for preparing a germanium complex according to claim 10, wherein the germanium complex represented by Chemical Formula 1 or Chemical Formula 7 is selected from the following structures:
Figure US08663736-20140304-C00016
.
14. The method for preparing a germanium complex according to claim 10, wherein the germanium(II) halide is Ge(II)Br2, Ge(II)Cl2(dioxane) or Ge(II)I2.
15. A method for preparing a germanium complex, comprising:
reacting an alkali metal salt represented by Chemical Formula 3 with an alkylcarbodiimide (R1NCNR2) compound represented by Chemical Formula 4 to prepare a complex represented by Chemical Formula 5; and
adding to the complex represented by Chemical Formula 5 a germanium(II) halide to prepare a germanium complex represented by Chemical Formula 7:
Figure US08663736-20140304-C00017
wherein M1 represents an alkali metal, Y1 is selected from R3, NR4R5 or OR6, and R1 through R6 independently represent (C1-C7)alkyl.
16. The method for preparing a germanium complex according to claim 15, wherein Y1 represents —N(CH3)2, —N(CH3)(CH2CH3), —CH3 or —C(CH3)3, and M1 represents lithium, sodium or potassium.
17. The method for preparing a germanium complex according to claim 15, wherein the alkylcarbodiimide is 1,3-diisopropylcarbodiimide.
18. The method for preparing a germanium complex according to claim 15, wherein the germanium complex represented by Chemical Formula 1 or Chemical Formula 7 is selected from the following structures:
Figure US08663736-20140304-C00018
.
19. The method for preparing a germanium complex according to claim 15, wherein the germanium(II) halide is Ge(II)Br2, Ge(II)Cl2(dioxane) or Ge(II)I2.
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