US4497109A - Method of fabricating light-controlled thyristor utilizing selective etching and ion-implantation - Google Patents
Method of fabricating light-controlled thyristor utilizing selective etching and ion-implantation Download PDFInfo
- Publication number
- US4497109A US4497109A US06/587,839 US58783984A US4497109A US 4497109 A US4497109 A US 4497109A US 58783984 A US58783984 A US 58783984A US 4497109 A US4497109 A US 4497109A
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- US
- United States
- Prior art keywords
- zone
- depression
- subzone
- zones
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005530 etching Methods 0.000 title claims description 8
- 238000005468 ion implantation Methods 0.000 title claims description 7
- 238000004519 manufacturing process Methods 0.000 title description 3
- 239000004065 semiconductor Substances 0.000 claims abstract description 14
- 238000010276 construction Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 claims description 5
- 230000000873 masking effect Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 abstract description 7
- 238000002360 preparation method Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/111—Devices sensitive to infrared, visible or ultraviolet radiation characterised by at least three potential barriers, e.g. photothyristors
- H01L31/1113—Devices sensitive to infrared, visible or ultraviolet radiation characterised by at least three potential barriers, e.g. photothyristors the device being a photothyristor
Definitions
- the invention relates to a light-controlled thyristor with a semiconductor body including a first zone of the first conduction type adjacent to the surface of the semiconductor body; a second zone of the first conduction type containing a region intended for exposure; a third zone of the second conduction type lying under the first and second zone which emerges to the surface of the semiconductor body between the first and second zone; electrodes making contact with the first and second zone; and with a depression in the third zone in which the region intended for exposure lies.
- Such a light-controlled thyristor has been described, for instance, in German Published, Prosecuted application DE-AS 21 07 564.
- the problem in light-controlled thyristors is to make the dimensions of the thyristor so that it can be fired with small amounts of light power.
- the efficiency in the formation of the electron-hole pairs due to the incident light quanta must be as high as possible.
- the zone intended for exposure is disposed for this purpose in the depression in the semiconductor body in such a manner that the pn-junction is deeper between the zone intended for exposure and the third zone therebelow that the pn-junction between the first and third zone.
- the zone intended for exposure is made thinner than the first zone.
- this construction of the zone intended for exposure obviously requires at least two different diffusion depths for the preparation of the first zone and for the preparation of the second zone which is intended for exposure.
- a light-controlled thyristor comprising a semiconductor body having a surface, a first zone being of a given conduction type and having a given depth and being adjacent to the surface of the body, a second zone of the given conduction type having a region intended for exposure, a third zone of a conduction type opposite to the given type being disposed under the first and second zones and having a part thereof emerging to the surface of the body between the first and second zones and having a depression formed therein containing the region intended for exposure, electrodes contacting the first and second zones, the second zone having a first and a second subzone, the first subzone having the given depth and being disposed between the part of the third zone emerging to the surface of the body and the depression, the first subzone being in contact with one of the electrodes, the second subzone being the region intended for exposure in the depression and being formed by implanted ions, the second subzone being disposed parallel to the surface of the body and being
- the first subzone is an annular-shaped ring surrounding the second subzone.
- a step formed in the first subzone being in alignment with the bottom of the depression and pointing toward the second subzone, the step having ions implanted therein electrically connecting the second subzone to the first subzone.
- the first subzone has a side facing the second subzone, and there is provided a multiplicity of steps formed in the first subzone on the side thereof forming the second subzone, the steps having ions implanted therein electrically connecting the second subzone to the first subzone.
- a further zone formed of implanted ions of the opposite conduction type being disposed under and covering the second subzone, the further zone having a maximum charge carrier concentration being at least as high as the doping concentration at the surface of the third zone.
- FIG. 1 is a fragmentary diagrammatic cross-sectional view through a semiconductor body of a light-controlled thyristor after the first and second zones have been diffused-in;
- FIGS. 2 and 3 are views which are similar to FIG. 1, showing corresponding cross sections through the semiconductor bodies of two finished light-controlled thyristors.
- the semiconductor body of the thyristor has several zones of different conduction types.
- a heavily p-doped first zone 1 which forms a base zone is diffused into a semiconductor wafer having weak n-conduction, for instance.
- the first zone 1 is then provided with masks 3, 4, whereupon further zones 5, 6, respectively, of the opposite conduction type are diffused into the unmasked surface portions of zone 1.
- the diffusion of the zones 5 and 6 takes place simultaneously. Zones 5 and 6 therefore have the same depth and the same doping.
- the zones 5 and 6 may, for instance, be of annular shape or strip-shaped as well.
- a depression 7, which is shown in FIG. 2 is made into the surface of first zone 1 such as by etching, for instance.
- This etching can be made so that the second zone 6 is given an inclined or vertical flank 8 on the inside thereof. The etching is broken off so early that a step 9 is left.
- a layer 10 that is generated by implantation of ions and which has the same conduction type and at least approximately the same doping level as the second zone 6 is prepared in the bottom of the depression 7 and on the step 9.
- the thickness of this layer 10 may, for instance, be 0.5 to 1 ⁇ m.
- the preparation of such an ion-implanted layer is known per se and will therefore not be discussed further.
- the layer 10 is electrically connected to the second zone 6 by the step 9.
- the second zone 6 is provided with an electrode 11, and the zone 5 with an electrode 12.
- the layer 10 which forms the region that is intended for exposure is electrically connected to the electrode 11.
- a further zone highly doped 14 which is prepared by ion implantation and extends beyond layer 10 can be disposed under the layer 10.
- the dose and energy of this ion implantation is advantageously set so that doping is obtained for the zone 14 which is approximately equal to the doping concentration at the surface of the zone 1.
- This highly doped zone 14 has the purpose of shielding the zone 10 against the space charge zone forming in the zone 1.
- the embodiment example according to FIG. 3 differs from that according to FIG. 2 mainly in that the second zone 6 has many small steps 13 on the inside thereof instead of a single step 9, through which the zone 10 is electrically connected to the zone 6.
- the steps 13 can be made in a simple manner, such as by anisotropic etching of the depression 7, for instance. In the ion implantation, ions also penetrate into the steps 13 so that the inner edge of the depression 7 becomes highly doped and allows a perfect electrical connection of the zone 10 with the electrode 11.
- the thyristor according to FIG. 3 must, however, be provided with the additional zone 14.
- the operation of the thyristor corresponds to that of a known light-controlled thyristor so that special explanations regarding the action are not necessary. It is essential that the optoelectrical efficiency of the arrangement is relatively high due to the position of the layer 10 in the proximity of the space charge zone forming in the zones 1 and 2. In addition, only a single diffusion step is required for the preparation of the second and third zones 5 and 6, respectively, and only a single etching step. The same semiconductor body can also be used without the depression 7 for thyristors which can be controlled by firing current. Then, the second zone 6 is covered by the control electrode. It thus becomes inoperative.
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Thyristors (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2951916 | 1979-12-21 | ||
DE19792951916 DE2951916A1 (en) | 1979-12-21 | 1979-12-21 | LIGHT CONTROLLED THYRISTOR |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US06212505 Division | 1980-12-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
US4497109A true US4497109A (en) | 1985-02-05 |
Family
ID=6089356
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US06/587,839 Expired - Fee Related US4497109A (en) | 1979-12-21 | 1984-03-12 | Method of fabricating light-controlled thyristor utilizing selective etching and ion-implantation |
Country Status (4)
Country | Link |
---|---|
US (1) | US4497109A (en) |
JP (1) | JPS5694771A (en) |
DE (1) | DE2951916A1 (en) |
GB (1) | GB2066567B (en) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4567641A (en) * | 1982-04-12 | 1986-02-04 | General Electric Company | Method of fabricating semiconductor devices having a diffused region of reduced length |
US4641167A (en) * | 1981-12-01 | 1987-02-03 | Semiconductor Research Foundation | Semiconductor optoelectro transducer |
US4656076A (en) * | 1985-04-26 | 1987-04-07 | Triquint Semiconductors, Inc. | Self-aligned recessed gate process |
US5003369A (en) * | 1987-04-17 | 1991-03-26 | Hitachi, Ltd. | Thyristor of overvoltage self-protection type |
US5083177A (en) * | 1990-03-12 | 1992-01-21 | Siemens Aktiengesellschaft | Thyristor having a low-reflection light-triggering structure |
US5169790A (en) * | 1990-03-12 | 1992-12-08 | Siemens Aktiengesellschaft | Method of making thyristor having low reflection light-triggering structure |
US5204273A (en) * | 1990-08-20 | 1993-04-20 | Siemens Aktiengesellschaft | Method for the manufacturing of a thyristor with defined lateral resistor |
US5420045A (en) * | 1991-03-27 | 1995-05-30 | Siemens Aktiengesellschaft | Process for manufacturing thyristor with adjustable breakover voltage |
US5510274A (en) * | 1987-08-19 | 1996-04-23 | Mitsubishi Denki Kabushiki Kaisha | Method of controlling a carrier lifetime in a semiconductor switching device |
US6218682B1 (en) * | 1997-09-19 | 2001-04-17 | Optiswitch Technology Corporation | Optically controlled thyristor |
US20050001332A1 (en) * | 2003-07-01 | 2005-01-06 | Optiswitch Technology Corporation | Light-activated semiconductor switches |
US20070210328A1 (en) * | 2006-03-10 | 2007-09-13 | Bae Systems Information And Electronic Systems Integration Inc. | Monolithically integrated light-activated thyristor and method |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2695392B2 (en) * | 1995-04-06 | 1997-12-24 | ハードグラス工業株式会社 | Glass door |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA751084A (en) * | 1963-02-06 | 1967-01-17 | John W. Faust, Jr. | Photovoltaic devices with reduced reflection losses |
GB1242772A (en) * | 1969-10-02 | 1971-08-11 | V Elektrotech I V I Lenina | Photosensitive semi-conductor device |
US3697833A (en) * | 1970-02-20 | 1972-10-10 | Mitsubishi Electric Corp | Light activated thyristor |
GB1441261A (en) * | 1972-03-28 | 1976-06-30 | Emi Ltd | Semiconductor avalanche photodiodes |
JPS53112682A (en) * | 1977-03-14 | 1978-10-02 | Mitsubishi Electric Corp | Photo thyristor |
US4298880A (en) * | 1978-06-15 | 1981-11-03 | Bbc, Brown, Boveri & Co., Ltd. | Power thyristor and method of fabrication therefore utilizing control, generating, and firing gates |
US4305084A (en) * | 1979-11-16 | 1981-12-08 | General Electric Company | Semiconductor switching device capable of turn-on only at low applied voltages using self pinch-off means |
-
1979
- 1979-12-21 DE DE19792951916 patent/DE2951916A1/en not_active Ceased
-
1980
- 1980-12-05 JP JP17196180A patent/JPS5694771A/en active Pending
- 1980-12-12 GB GB8039932A patent/GB2066567B/en not_active Expired
-
1984
- 1984-03-12 US US06/587,839 patent/US4497109A/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA751084A (en) * | 1963-02-06 | 1967-01-17 | John W. Faust, Jr. | Photovoltaic devices with reduced reflection losses |
GB1242772A (en) * | 1969-10-02 | 1971-08-11 | V Elektrotech I V I Lenina | Photosensitive semi-conductor device |
US3697833A (en) * | 1970-02-20 | 1972-10-10 | Mitsubishi Electric Corp | Light activated thyristor |
GB1441261A (en) * | 1972-03-28 | 1976-06-30 | Emi Ltd | Semiconductor avalanche photodiodes |
JPS53112682A (en) * | 1977-03-14 | 1978-10-02 | Mitsubishi Electric Corp | Photo thyristor |
US4298880A (en) * | 1978-06-15 | 1981-11-03 | Bbc, Brown, Boveri & Co., Ltd. | Power thyristor and method of fabrication therefore utilizing control, generating, and firing gates |
US4305084A (en) * | 1979-11-16 | 1981-12-08 | General Electric Company | Semiconductor switching device capable of turn-on only at low applied voltages using self pinch-off means |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4641167A (en) * | 1981-12-01 | 1987-02-03 | Semiconductor Research Foundation | Semiconductor optoelectro transducer |
US4567641A (en) * | 1982-04-12 | 1986-02-04 | General Electric Company | Method of fabricating semiconductor devices having a diffused region of reduced length |
US4656076A (en) * | 1985-04-26 | 1987-04-07 | Triquint Semiconductors, Inc. | Self-aligned recessed gate process |
US5003369A (en) * | 1987-04-17 | 1991-03-26 | Hitachi, Ltd. | Thyristor of overvoltage self-protection type |
US5510274A (en) * | 1987-08-19 | 1996-04-23 | Mitsubishi Denki Kabushiki Kaisha | Method of controlling a carrier lifetime in a semiconductor switching device |
US5083177A (en) * | 1990-03-12 | 1992-01-21 | Siemens Aktiengesellschaft | Thyristor having a low-reflection light-triggering structure |
US5169790A (en) * | 1990-03-12 | 1992-12-08 | Siemens Aktiengesellschaft | Method of making thyristor having low reflection light-triggering structure |
US5204273A (en) * | 1990-08-20 | 1993-04-20 | Siemens Aktiengesellschaft | Method for the manufacturing of a thyristor with defined lateral resistor |
US5420045A (en) * | 1991-03-27 | 1995-05-30 | Siemens Aktiengesellschaft | Process for manufacturing thyristor with adjustable breakover voltage |
US6218682B1 (en) * | 1997-09-19 | 2001-04-17 | Optiswitch Technology Corporation | Optically controlled thyristor |
US20050001332A1 (en) * | 2003-07-01 | 2005-01-06 | Optiswitch Technology Corporation | Light-activated semiconductor switches |
US7057214B2 (en) | 2003-07-01 | 2006-06-06 | Optiswitch Technology Corporation | Light-activated semiconductor switches |
US20070210328A1 (en) * | 2006-03-10 | 2007-09-13 | Bae Systems Information And Electronic Systems Integration Inc. | Monolithically integrated light-activated thyristor and method |
US7582917B2 (en) * | 2006-03-10 | 2009-09-01 | Bae Systems Information And Electronic Systems Integration Inc. | Monolithically integrated light-activated thyristor and method |
US7824967B2 (en) | 2006-03-10 | 2010-11-02 | Bae Systems Information And Electronic Systems Integration Inc. | Monolithically integrated light-activated thyristor and method |
US20110025135A1 (en) * | 2006-03-10 | 2011-02-03 | Bae Systems Information And Electronic Systems Integration Inc. | Monolithically integrated light-actived thyristor and method |
US7972908B2 (en) | 2006-03-10 | 2011-07-05 | Bae Systems Information And Electronic Systems Integration Inc. | Method of switching off a monolithically integrated optically controlled thyristor |
US20110233380A1 (en) * | 2006-03-10 | 2011-09-29 | Bae Systems Information And Electronic Systems Integration Inc. | Monolithically integrated light-actived thyristor and method |
US8097900B2 (en) | 2006-03-10 | 2012-01-17 | Bae Systems Information And Electronic Systems Integration Inc. | Monolithically integrated light-actived thyristor and method |
Also Published As
Publication number | Publication date |
---|---|
JPS5694771A (en) | 1981-07-31 |
GB2066567B (en) | 1983-09-14 |
DE2951916A1 (en) | 1981-07-02 |
GB2066567A (en) | 1981-07-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: SIEMENS AKTIENGESELLSCHAFT, BERLIN AND MUNCHEN, GE Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:HUBER, PETER;STENGL, JENS P;TIHANYI, JENO;REEL/FRAME:004304/0628 Effective date: 19801121 |
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FEPP | Fee payment procedure |
Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
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FPAY | Fee payment |
Year of fee payment: 4 |
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REMI | Maintenance fee reminder mailed | ||
LAPS | Lapse for failure to pay maintenance fees | ||
FP | Lapsed due to failure to pay maintenance fee |
Effective date: 19930207 |
|
STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |