US20150239773A1 - Transparent omniphobic thin film articles - Google Patents

Transparent omniphobic thin film articles Download PDF

Info

Publication number
US20150239773A1
US20150239773A1 US14/186,349 US201414186349A US2015239773A1 US 20150239773 A1 US20150239773 A1 US 20150239773A1 US 201414186349 A US201414186349 A US 201414186349A US 2015239773 A1 US2015239773 A1 US 2015239773A1
Authority
US
United States
Prior art keywords
nanostructured
glass
lubricating fluid
article
interpenetrating structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US14/186,349
Inventor
Tolga Aytug
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UT Battelle LLC
Original Assignee
UT Battelle LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UT Battelle LLC filed Critical UT Battelle LLC
Priority to US14/186,349 priority Critical patent/US20150239773A1/en
Assigned to UT-BATTELLE, LLC reassignment UT-BATTELLE, LLC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: AYTUG, TOLGA
Assigned to U.S. DEPARTMENT OF ENERGY reassignment U.S. DEPARTMENT OF ENERGY CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). Assignors: UT-BATTELLE, LLC
Priority to PCT/US2015/010109 priority patent/WO2015156852A2/en
Publication of US20150239773A1 publication Critical patent/US20150239773A1/en
Priority to US15/843,471 priority patent/US10844479B2/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5873Removal of material
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C11/00Multi-cellular glass ; Porous or hollow glass or glass particles
    • C03C11/005Multi-cellular glass ; Porous or hollow glass or glass particles obtained by leaching after a phase separation step
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/006Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
    • C03C17/008Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character comprising a mixture of materials covered by two or more of the groups C03C17/02, C03C17/06, C03C17/22 and C03C17/28
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5806Thermal treatment
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/40Coatings comprising at least one inhomogeneous layer
    • C03C2217/425Coatings comprising at least one inhomogeneous layer consisting of a porous layer
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/40Coatings comprising at least one inhomogeneous layer
    • C03C2217/43Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase
    • C03C2217/44Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase characterized by the composition of the continuous phase
    • C03C2217/45Inorganic continuous phases
    • C03C2217/452Glass
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/40Coatings comprising at least one inhomogeneous layer
    • C03C2217/43Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase
    • C03C2217/46Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase characterized by the dispersed phase
    • C03C2217/47Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase characterized by the dispersed phase consisting of a specific material
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/154Deposition methods from the vapour phase by sputtering
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/30Aspects of methods for coating glass not covered above
    • C03C2218/32After-treatment
    • C03C2218/328Partly or completely removing a coating
    • C03C2218/33Partly or completely removing a coating by etching
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/249921Web or sheet containing structurally defined element or component
    • Y10T428/249953Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249967Inorganic matrix in void-containing component
    • Y10T428/249969Of silicon-containing material [e.g., glass, etc.]

Definitions

  • the present invention relates to articles with optically transparent, nanostructured omniphobic surfaces.
  • An artificial surface that is transparent and antireflective and that repels various liquids can have broad industrial application potential ranging from self-cleaning architectural windows and optical components to elimination of bio-adhesion and icing on surfaces as well as patterned devices (e.g., complex microfluidic devices) for liquid transportation, drug delivery and medical diagnostics.
  • Approaches for producing liquid repellent surfaces exhibiting these properties include producing micro-nano textured surfaces or chemically active antimicrobial surfaces. Despite the impressive properties achieved by such surfaces, the properties are either not durable or transparent, and the surfaces need to be replaced or otherwise maintained frequently.
  • Some examples of the current state of the art for omniphobic surface development is based on periodically ordered arrays of nanoposts functionalized with low-surface energy polyfluoralkyl silane, random network of Teflon nanofibres distributed thorough the bulk substrate, UV-cured and fluorinated polyurethane, surfaces created by colloidal templating, and randomly deposited polymer based electro spun fiber mats and ordered arrays of silicon dioxide micro caps.
  • One way to achieve a durable liquid repellent surface, at the same time exhibiting optical transparency, is to use certain phase separating glasses that phase separates into a connected structure (known as spinodal) when heat treated. These phase separated structurally connected features scatter light due to the slight differences in the phase's refractive indexes. This light scattering is wavelength dependent and is known as Raleigh scattering. When the spinodal structure features are small ( ⁇ 100 nm) the glass primarily scatters ultraviolet light and passes all other light, thus appearing transparent.
  • the invention includes an article having a nanostructured surface.
  • the article can include a substrate and a nanostructured layer bonded to the substrate.
  • the nanostructured layer can be directly bonded to the substrate, i.e., without any adhesive or intermediary layers.
  • the nanostructured layer can be atomically bonded to the substrate.
  • the nanostructured layer can include a plurality of spaced apart nanostructured features comprising a contiguous, protrusive material.
  • the nanostructured layer can include an oil pinned in a plurality of nanopores formed by a plurality of nanostructured features.
  • the nanostructured features can be sufficiently small so that the nanostructured layer is optically transparent.
  • the width, length and height of each of said plurality of spaced apart nanostructured features ranges from 1 to 500 nm.
  • a continuous hydrophobic coating can be disposed on the plurality of spaced apart nanostructured features.
  • the continuous hydrophobic coating can include a self-assembled monolayer.
  • the plurality of spaced apart nanostructured features provide an anti-reflective surface.
  • the plurality of spaced apart nanostructures features can provide an effective refractive index gradient such that the effective refractive index increases monotonically towards the substrate.
  • a method of forming the article with a nanostructured surface layer is also described.
  • the method can include providing a substrate; depositing a film on the substrate; decomposing the film to form a decomposed film; and etching the decomposed film to form the nanostructured layer.
  • the decomposition step can be performed under a non-oxidizing atmosphere.
  • the decomposing step can include heating the film to a sufficient temperature for a sufficient time to produce a nanoscale spinodal decomposition.
  • the method can also include applying a continuous hydrophobic coating to the plurality of spaced apart nanostructured features, pinning an oil within nanopores formed by the plurality of nanostructured features, or both.
  • FIG. 1 is a schematic cross-section of an article with a nanostructured layer.
  • FIGS. 2A-D are schematic cross-sections of a method of making an article with a nanostructure layer
  • FIG. 3 is a schematic cross-section of a nanostructured layer with oil pinned within the nanopores of the nanostructured layer;
  • FIG. 4 is a schematic cross-section showing oil pinned within a nanopore
  • FIG. 5 is an SEM image of nanostructured features as described herein (1 micron scale);
  • FIG. 6 is an SEM image of nanostructured features as described herein (2 micron scale);
  • FIG. 7 is a schematic illustration of a method for testing the contact angle hysteresis of a drop of liquid on a substrate
  • FIG. 8 is a chart plotting contact angle hysteresis measurements against liquid surface tension for films prepared according to Example 2, tested with a variety of fluids each having a different surface tension;
  • FIG. 9 is a chart plotting sliding angle against liquid surface tension for films prepared according to Example 3, tested with a variety of fluids each having a different surface tension;
  • FIGS. 10 a - e show frames of a video of a drop of polyethylene glycol sliding across the surface of the glass film;
  • FIGS. 11 a - e show frames of a video of a drop of octane sliding across the surface of the glass film;
  • FIGS. 12 a - e show frames of a video of a drop of water sliding across the surface of the glass film
  • FIGS. 13 a - e show frames of a video of a side-by-side comparison of a first drop of water sliding across the surface of a first glass film and a second drop of water sliding across the surface of a second glass film;
  • FIG. 14 is a chart plotting transmittance against wavelength for a variety of glass films.
  • a substrate including a superhydrophobic transparent glass thin film and method of making the same are described.
  • the glass thin film is applied in such a manner that it is possible to deposit thin films on a variety of substrates.
  • the glass thin film can be superhydrophobic, self-cleaning, anti-reflective across the visible light spectrum, the IR spectrum, or both, while blocking, i.e., reflecting or scattering, UV radiation.
  • the articles 10 with nanostructures surfaces described herein can include a substrate 12 and a nanostructured layer 14 attached to the substrate 12 .
  • the nanostructured layer 14 can include a plurality of spaced apart nanostructured features 16 comprising a contiguous, protrusive material 18 and the nanostructured features 16 can be sufficiently small that the nanostructured layer 14 is optically transparent.
  • the nanostructured layer 14 can include a plurality of nanopores 20 defined by the contiguous, protrusive material 18 , e.g., the nanostructured features 16 .
  • optically transparent refers to a material or layer that transmits rays of visible light in such a way that the human eye may see through the glass distinctly.
  • One definition of optically transparent is a maximum of 50% attenuation at a wavelength of 550 nm (green light) for a material or layer, e.g., a layer 1 ⁇ m thick.
  • Another definition can be based on the Strehl Ratio, which ranges from 0 to 1, with 1 being a perfectly transparent material.
  • Exemplary optically transparent materials can have a Strehl Ratio ⁇ 0.5, or a Strehl Ratio ⁇ 0.6, or a Strehl Ratio ⁇ 0.7, or a Strehl Ratio ⁇ 0.8, or a Strehl Ratio ⁇ 0.9, or a Strehl Ratio ⁇ 0.95, or a Strehl Ratio ⁇ 0.975, or a Strehl Ratio ⁇ 0.99.
  • nanopores refers to pores with a major diameter ranging from 1 to 750 nm. Nanopores can also refer to pores having a major diameter ranging from 5 to 500 nm, or 10 to 400 nm, or any combination thereof, e.g., 400 to 750 nm.
  • the nanostructured layer described herein can have a nanopore size ranging from 10 nm to about 10 ⁇ m, or 100 nm to 8 ⁇ m, or 500 nm to 6 ⁇ m, or 1 to 5 ⁇ m, or any combination thereof, e.g., 500 nm to 5 ⁇ m.
  • the nanostructures features formed from a contiguous, protrusive material described herein can be formed by differentially etching of spinodally decomposed materials as described in U.S. Pat. No. 7,258,731, “Composite, Nanostructured, Super-Hydrophobic Material”, issued to D'Urso et al., on Aug. 21, 2007; U.S. Patent Application Publication No. 2008/0286556, “Super-Hydrophobic Water Repellant Powder,” published Nov. 20, 2008; and U.S. patent application Ser. No. 12/901,072, “Superoleophilic Particles and Coatings and Methods of Making the Same,” (hereinafter “Differential Etching References”) filed Oct. 8, 2010, the entireties of which are incorporated by reference herein.
  • nanostructured feature has its literal meaning and includes, but is not limited to, nanoscale protrusions and nanoscale branched networks.
  • nanoscale branched network refers to a branched network where the individual branches are less than 1 ⁇ m.
  • the branches of the nanoscale branched networks described herein can be 750 nm or less in length, or 600 nm or less in length, or 500 nm or less in length.
  • a branch can be defined by the space (i) between adjacent junctions 22 , (ii) between a junction 22 and a terminal end 24 of the network, i.e., a nanoscale protrusion, or (iii) both. As shown in FIG.
  • the length (L) of a branch can be measured as the distance (i) between adjacent junctions 22 , (ii) between a junction 22 and a terminal end 24 of the network, i.e., a nanoscale protrusion, or (iii) both.
  • a nanoscale branched network staghorn coral ( A. cervicornis ) would be considered an exemplary branched network.
  • FIGS. 5 & 6 show an SEM image of an exemplary nanoscale branched network formed by differential etching of a specially treated spinodally decomposed glass substrate.
  • the width, length and height of each of the plurality of spaced apart nanostructured features 16 can independently range from 1 to 500 nm, or from 2 to 400, or from 3 to 300 nm, or from 4 to 250 nm, or from 5 to 200 nm, or any combination of these ranges, e.g., 1 to 200 nm.
  • the width, length and height of each of the plurality of spaced apart nanostructures features can be at least 5 nm, at least 7 nm, at least 10 nm, or at least 20 nm.
  • the nanostructured layer 14 can also include an etching residue disposed on the contiguous, protrusive material.
  • the etching residue can result from the differential etching process utilized to remove the boron-rich phase of a spinodally decomposed borosilicate layer 26 , which is an intermediate product of the spinodal decomposition described in the Differential Etching References referenced above.
  • the etching residue can include remnants of the recessive contiguous material that was interpenetrating with the protruding material in the spinodally decomposed film 26 intermediary.
  • the etching residue can be contiguous or non-contiguous.
  • the formation of the nanostructured layer 14 can include an intermediate spinodally decomposed glass film 26 formed from a film 28 selected from the group that includes, but is not limited to, a sodium borosilicate glass and a soda lime glass.
  • An exemplary sodium borosilicate glass can include 65.9 wt-% SiO 2 , 26.3 wt-% B 2 O 3 and 7.8 wt-% Na 2 O.
  • the soda lime glass can be any soda lime glass that can be spinodally decomposed and etched to form the nanostructured layer described herein.
  • the protrusive material e.g., silica-rich phase
  • the recessive material e.g., alkali and/or borate-rich phase
  • both can be glass.
  • the contiguous, protrusive material can be directly bonded to the substrate 12 .
  • the contiguous, protrusive material can be atomically, i.e., covalently, bonded to the substrate 12 .
  • the substrate 12 is a silica-rich glass and the nanostructured layer 14 is formed from differential etching of a spinodally decomposed sodium borosilicate glass 26
  • the silica-rich contiguous, protrusive phase of the nanostructured layer 14 can be covalently bonded to the substrate 12 .
  • the composition of the substrate 12 and the contiguous, protrusive phase of the nanostructured layer 14 can be the same. This can result in a structure where there is no clear interfacial delineation between the nanostructured layer 14 and the substrate 12 .
  • the contiguous, protrusive material of the nanostructured layer 14 can be directly bonded to the surface 30 of the substrate 12 by a means other than covalent bonding.
  • the bond between the substrate 12 and the contiguous, protrusive material 18 can be formed directly without reliance on an adhesive or interfacial material to join the contiguous, protrusive material 18 to the surface 30 of the substrate 12 .
  • Such a process could involve interfacial atomic or molecular interdiffusion due to high impact velocities or temperature of deposited species.
  • target source species arrive at the substrate with high kinetic energy and with various angles of incidence. Because of this, highly dense films with exceptional adherence and coverage can be obtained, even on irregular surfaces.
  • This direct bonding can result from the method of deposition of the precursor to the nanostructured layer, e.g., a physical or chemical vapor deposition technique.
  • one embodiment relates to a method including applying a glass film to a substrate; heating the glass film to a temperature and for a duration sufficient to phase-separate the glass; differentially etching the glass to create a porous interpenetrating structure; modifying a surface chemistry of the porous interpenetrating structure; and adding a lubricating fluid to at least one pore of the porous interpenetrating structure.
  • the glass film can be applied to the substrate by radio frequency (RF) sputtering, chemical vapor deposition (CVD), metallorganic chemical vapor deposition (MOCVD), wet chemical solution based approaches such as sol-gel and dip-coating, screen printing, ink-jet printing, spray painting, plasma spraying, pulsed laser ablation, sputtering, e-beam co-evaporation, and combinations thereof.
  • RF radio frequency
  • CVD chemical vapor deposition
  • MOCVD metallorganic chemical vapor deposition
  • wet chemical solution based approaches such as sol-gel and dip-coating, screen printing, ink-jet printing, spray painting, plasma spraying, pulsed laser ablation, sputtering, e-beam co-evaporation, and combinations thereof.
  • phase separating glass that is capable of spinodally decomposing when properly processed.
  • phase separating glasses e.g. soda lime, borosilicate
  • RF sputtering Chemical Vapor Deposition (CVD)
  • CVD Chemical Vapor Deposition
  • a certain amount of differential etching is required in order to remove one phase and partially remove another phase of the spinodal structure.
  • the resulting etched surface structure has a very porous and interpenetrating structure.
  • This reticulated porous surface can be used as a matrix to effectively lock-in place a lubricating fluid having a low surface energy (e.g., perfluoropolyether oil, ⁇ ⁇ 17 mN/m) with different viscosities.
  • the surface chemistry of nanostructured porous surface can be changed to match the chemical nature of the lubricant.
  • the invented nanostructured omniphobic glass coating is first treated with 1H,1H,2H,2H-perfluorooctyltrichlorosilane and then the lubricating liquid, Fomblin 16/6 oil, is applied onto the fluorinated surface via spin-coating at 1000 rpm for a duration of 30 sec.
  • the mechanical durability of the porous nanostructure is established during the deposition of the phase separating glass film onto various glass platforms and the interpenetrating porous network along with proper chemical affinity of the surface ensures the effective wetting and infusion of the lubricant.
  • the fluidic nature of the lubricant combined with the nanostructured surface features enable to heal the physical damage by simply filling the damaged regions by the lubricant via capillary action.
  • the tunability of the nanostructural features as well as the porosity can easily be used to tailor the optical properties of the coatings for specific applications and the patternability of the film matrix through manipulating the etching protocols will create complex surface designs of selective liquid repellency in microfluidic applications.
  • the plurality of spaced apart nanostructured features 16 can cause the nanostructured layer 14 to exhibit anti-reflective properties.
  • the plurality of spaced apart nanostructures features can produce an effective refractive index gradient, wherein the effective refractive index gradient increases monotonically towards the surface of the substrate.
  • Optical glass ordinarily reflects about 4% of incident visible light from each of its surface (i.e., total of 8% transmittance loss front and back surface combined).
  • the nanostructured layers 14 described herein can provide anti-reflective properties in addition to hydrophobic and transparent properties.
  • anti-reflective refers to ⁇ 1% reflection, and preferably ⁇ 0.1% for normally incident visible light (e.g., wavelengths from approximately 380-750 nm).
  • the nanostructured layer 14 described herein in general will have two “interfaces,” i.e., an air-layer interface 32 and a layer-substrate interface 34 , and a thickness (t). If the nanostructured layer has optically small features ( ⁇ 200 nm features) that are homogeneously distributed throughout the layer, then interfaces 32 , 34 will reflect a certain amount of light. If the air-layer reflection 32 returns to the surface 30 such that it is of equal amplitude and out of phase with the layer-substrate interface reflection 34 , the two reflections completely cancel (destructive interference) and the nanostructured layer 14 will be antireflective for that wavelength. The thickness (t) of the nanostructured layer 14 determines the reflected phase relationships while the optical indexes of refraction determine the reflective amplitudes.
  • the length (L) of the nanostructured features 16 is preferably about 1/4 of the wavelength ( ⁇ /4) of the relevant light, such as about 140 nm for green light, which has a wavelength range of approximately 495-570 nm.
  • the nanostructured layer 14 can have an effective optical index of refraction and its thickness (t) can be adjusted by the etch duration to obtain the correct thickness to produce an antireflective surface.
  • the use of diffusion limited differential etching of the spinodally decomposed nanostructured layer can be used to produce a variable porosity graded index of refraction layer 14 .
  • an anti-reflective surface can be created by applying a coating that provides a graded index of refraction.
  • the nanostructured layer 14 will generally have an effective reflective index gradient.
  • the porosity of the nanostructures layer 14 increases greatly approaching the layer-air interface 32 .
  • the porosity and resulting layer index of refraction would approach that of air ( ⁇ 1.01) near the layer-air interface 32 .
  • This reflective index gradient can provide broad spectrum anti-reflective properties.
  • narrow-spectrum antireflective properties refers to anti-reflectivity across a wavelength range of at least 150 nm of the visible and/or infrared light spectrum, at least 200 nm of the visible and/or infrared light spectrum, at least 250 nm of the visible and/or infrared light spectrum, at least 300 nm of the visible and/or infrared light spectrum, or at least 350 nm of the visible and/or infrared light spectrum. Based on the range described above, it will be understood that the visible and infrared light spectrum includes a range of 1120 nm, i.e., from 380 to 1500 nm.
  • the nanostructured layer 14 can be tailored to exhibit UV blocking properties.
  • UV radiation refers to radiation with a wavelength ranging from 10-400 nm.
  • the nanostructured layer can block or reflect at least 80% of UV radiation, at least 85% of UV radiation, at least 90% of UV radiation, at least 95% of UV radiation, at least 97.5% of UV radiation, at least 99% of UV radiation, or at least 99.5% of UV radiation.
  • the nanostructured layer 14 can have a thickness (t) of 2000 nm or less, 1000 nm or less, or 500 nm or less.
  • the nanostructured layer can have a thickness of at least 1 nm, at least 5 nm, at least 10 nm, at least 15 nm, or at least 20 nm.
  • the nanostructured layer 14 itself can be superhydrophobic when the surface 38 of the nanostructured features 16 are hydrophobic or are made hydrophobic, e.g., through application of a hydrophobic coating. This can be achieved by applying a fluorinated silane solution to the nanostructured layer 14 in order to create a hydrophobic monolayer on the surface 38 of the nanostructured layer 14 . Accordingly, one method of making the nanostructured layer 14 superhydrophobic would be to apply a continuous hydrophobic coating 36 on a surface 38 of the plurality of spaced apart nanostructured features 16 .
  • “superhydrophobic” refers to materials that exhibit contact angle with water of greater than 140°, greater than 150°, greater than 160°, or even greater than 170°.
  • the continuous hydrophobic coating 36 can be a self-assembled monolayer (SAM). As described in the referenced patent applications, the nanostructured layer 14 will be superhydrophobic only after a hydrophobic coating layer 36 is applied thereto. Prior to application of the hydrophobic coating 36 , the uncoated nanostructured layer will generally be hydrophilic.
  • the hydrophobic coating layer 36 can be a perfluorinated organic material, a self-assembled monolayer, or both. Methods and materials for applying the hydrophobic coating, whether as a self-assembled monolayer or not, are fully described in the U.S. patent applications referenced hereinabove.
  • the hydrophobic coating 36 can be continuously coated over the spaced apart nanostructured features 16 .
  • the coating 36 can be formed as a self-assembled monolayer.
  • Self-assembled monolayers are coatings consisting of a single layer of molecules on a surface, such as a surface 38 of the nanostructured features 16 .
  • the molecules are arranged in a manner where a head group is directed toward or adhered to the surface, generally by the formation of at least one covalent bond, and a tail group is directed to the air interface to provide desired surface properties, such as hydrophobicity.
  • the hydrophobic tail group has the lower surface energy it dominates the air-surface interface providing a continuous surface of the tail groups.
  • Additional exemplary surface treatment techniques include, but are not limited to, SAM; physical vapor deposition, e.g., sputtering, pulsed laser deposition, e-beam co-evaporation, and molecular beam epitaxy; chemical vapor deposition; and alternate chemical solution techniques.
  • SAMs useful in the instant invention can be prepared by adding a melt or solution of the desired SAM precursor onto the nanostructured layer 14 where a sufficient concentration of SAM precursor is present to produce a continuous conformal monolayer coating 36 . After the hydrophobic SAM is formed and fixed to the surface 38 of the nanostructured layer 14 , any excess precursor can be removed as a volatile or by washing. In this manner the SAM-air interface can be primarily or exclusively dominated by the hydrophobic moiety.
  • SAM precursor that can be useful for the compositions and methods described herein is tridecafluoro-1,1,2,2-tetrahydroctyltriclorosilane.
  • this molecule undergoes condensation with the silanol groups of the nanostructured layer, which releases HCl and covalently bonds the tridecafluoro-1,1,2,2-tetrahydroctylsilyls group to the silanols at the surface of the porous particle.
  • the tridecafluorohexyl moiety of the tridecafluoro-1,1,2,2-tetrahydroctylsilyl groups attached to the surface of the nanostructured layer provides a monomolecular layer that has a hydrophobicity similar to polytetrafluoroethylene.
  • SAMs make it possible to produce a nanostructured layer 14 having hydrophobic surfaces while retaining the desired nanostructured morphology that produces the desired superhydrophobic properties.
  • X is Cl, Br, I, H, HO, R′HN, R′ 2 N, imidizolo, R′C(O)N(H), R′C(O)N(R′′), R′O, F 3 CC(O)N(H), F 3 CC(O)N(CH 3 ), or F 3 S(O) 2 O, where R′ is a straight or branched chain hydrocarbon of 1 to 4 carbons and R′′ is methyl or ethyl;
  • L a linking group, is CH 2 CH 2 , CH 2 CH 2 CH 2 , CH 2 CH 2 O, CH 2 CH 2 CH 2 O, CH 2 CH 2 C(O), CH 2 CH 2 CH 2 C(O), CH 2 CH 2 OCH 2 , CH 2 CH 2 CH 2 OCH 2 ; and R is (CF 2) n CF 3 or (CF(CF 3 )OCF 2 ) n CF 2 CF 3 , where n is 0 to 24.
  • the hydrophobicity of the SAM surface increases with the value of n for the hydrophobic moiety, although in most cases sufficiently high hydrophobic properties are achieved when n is about 4 or greater where the SAM air interface is dominated by the hydrophobic moiety.
  • the precursor can be a single molecule or a mixture of molecules with different values of n for the perfluorinated moiety. When the precursor is a mixture of molecules it is preferable that the molecular weight distribution is narrow, typically a Poisson distribution or a more narrow distribution.
  • the SAM precursor can have a non-fluorinated hydrophobic moiety as long as the SAM precursor readily conforms to the nanostructured features 16 of the nanostructured layer 14 and exhibits a sufficiently low surface energy to exhibit the desired hydrophobic properties.
  • fluorinated SAM precursors may be preferred, in some embodiments of the invention silicones and hydrocarbon equivalents for the R groups of the fluorinated SAM precursors above can be used. Additional details regarding SAM precursors and methodologies can be found in the patent applications that have been incorporated herein by reference.
  • one embodiment relates to a method including applying a glass film to a substrate; heating the glass film to a temperature and for a duration sufficient to phase-separate the glass; differentially etching the glass to create a porous interpenetrating structure; modifying a surface chemistry of the porous interpenetrating structure; and adding a lubricating fluid to at least one pore of the porous interpenetrating structure.
  • the surface chemistry of the porous interpenetrating structure can be modified to correspond with at least one property of the lubricating fluid.
  • the surface chemistry of the porous interpenetrating structure can be a degree of hydrophobicity, a degree of oleophobicity, a degree of lipophobicity, and combinations thereof.
  • the surface chemistry of the porous interpenetrating structure can be modified by applying a surface chemistry modifying compound.
  • the surface chemistry modifying compound is 1H,1H,2H,2H-perfluorooctyltrichlorosilane.
  • the at least one property of the lubricating fluid can be a degree of hydrophobicity, a degree of oleophobicity, a degree of lipophobicity, and combinations thereof.
  • the property can be the surface energy of the lubricating oil.
  • the surface energy of the surface chemistry modifying compound can be within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9, 7, 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.7, 7.8, 7.9, 8, 8.1, 8.2, 8.3, 8.4, 8.5, 8.6, 8.7, 8.8, 8.9, 9, 9.1, 9.2, 9.3, 9.4, 9.5, 9.6, 9.7, 9.8, 9.9, 10, 10.1, 10.2, 10.3, 10.4, 10.5, 10.6, 10.7, 10.8, 10.9, 11, 11.1, 11.2, 11.3, 11.4, 11.5, 11.6, 11.7, 11.8, 11.9, 12, 12.1, 12.2, 12.3, 12.4, 12.5, 12.6, 12.7, 12.8, 12.9, 13, 13.1, 13.2, 13.3, 13.4, 13.5, 13.6, 13.7, 13.8, 13.9, 14, 14.1, 14.2, 14.3, 14.4, 14.5, 14.6, 14.7, 14.8, 14.9, 15, 15.1, 15.2, 15.3, 15.4, 15.5,
  • That article 10 can also, optionally, include an oil 40 pinned in the plurality of nanopores 20 formed by the plurality of nanostructured features 16 .
  • the oil 40 pinned by and/or within the nanopores 20 can be a non-nutritional oil.
  • non-nutritional is used to refer to oils that are not consumed as a nutrient source by microbes, e.g., bacteria, fungus, etc., or other living organisms.
  • Exemplary non-nutritional oils include, but are not limited to polysiloxanes.
  • pinned refers to being held in place by surface tension forces, van der Waal forces (e.g., suction), or combinations of both.
  • van der Waal forces e.g., suction
  • the interactions that prevent a liquid from being dispensed from a laboratory pipette until the plunger is depressed could be referred to as pinning.
  • oils are intended to refer to a non-polar fluid that is a stable, non-volatile, liquid at room temperature, e.g., 23-28° C.
  • the oils used herein should be incompressible and have no solubility or only trace solubility in water, e.g., a solubility of 0.01 g/l or 0.001 g/l or less.
  • Exemplary oils include non-volatile linear and branched alkanes, alkenes and alkynes, esters of linear and branched alkanes, alkenes and alkynes; polysiloxanes, and combinations thereof.
  • the oil 40 can be pinned in all or substantially all of the nanopores and/or surface nanopores of the nanostructured layer 14 .
  • oil 40 can be pinned in at least 70%, at least 80%, at least 90%, at least 95%, at least 97.5%, or at least 99% of the nanopores and/or surface nanopores of the nanostructured layer 14 described herein.
  • the oil 40 pinned within the nanostructured layer 14 can be a contiguous oil phase.
  • the superoleophilic layer 14 described herein can include an inner air phase with an oil phase at the air-nanostructured layer interface 32 .
  • the oil 40 pinned in the nanostructured layer 14 does not evaporate when the article 10 is exposed to the use environment.
  • the oil 40 can be an oil 40 that does not evaporate at ambient environmental conditions.
  • An exemplary oil 40 can have a boiling point of at least 120° C., or at least 135° C., or at least 150° C. or at least 175° C.
  • ambient environmental conditions refer generally to naturally occurring terrestrial or aquatic conditions to which superoleophilic materials may be exposed. For example, submerged in lakes, rivers and oceans around the world, and adhered to manmade structures around the world. Exemplary ambient environmental conditions include (i) a temperature range from ⁇ 40° C. to 45° C. at a pressure of one atmosphere, and (ii) standard temperature and pressure.
  • one embodiment relates to a method including applying a glass film to a substrate; heating the glass film to a temperature and for a duration sufficient to phase-separate the glass; differentially etching the glass to create a porous interpenetrating structure; modifying a surface chemistry of the porous interpenetrating structure; and adding a lubricating fluid to at least one pore of the porous interpenetrating structure.
  • the lubricating fluid can be a perfluoropolyether oil.
  • the lubricating fluid can be any prefluorinated liquids such as perfluoro-octane (surface tension 14 mN/m at 20 degrees Celsius) or any fluorocarbon-based fluid such as FLUORINERTTM available from 3M (FC-770, Surface tension 15 mN/m). Both are as vicous as water with viscosities close to 1 cP.
  • the perfluoropolyether oil can have a number average molecular weight within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 1000, 1100, 1200, 1300, 1400, 1500, 1600, 1700, 1800, 1900, 2000, 2100, 2200, 2300, 2400, 2500, 2600, 2700, 2800, 2900, 3000, 3100, 3200, 3300, 3400, 3500, 3600, 3700, 3800, 3900, 4000, 4100, 4200, 4300, 4400, 4500, 4600, 4700, 4800, 4900, 5000, 5100, 5200, 5300, 5400, 5500, 5600, 5700, 5800, 5900, 6000, 6100, 6200, 6300, 6400, 6500, 6600, 6700, 6800, 6900, 7000, 7100, 7200, 7300, 7400, 7500, 7600, 7700, 7800, 7900, 8000, 8100, 8200, 8300, 8400, 8500, 8600, 8700, 8800, 8900, 9000, 9100, 9200
  • the surface energy of the lubricating oil can be within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9, 7, 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.7, 7.8, 7.9, 8, 8.1, 8.2, 8.3, 8.4, 8.5, 8.6, 8.7, 8.8, 8.9, 9, 9.1, 9.2, 9.3, 9.4, 9.5, 9.6, 9.7, 9.8, 9.9, 10, 10.1, 10.2, 10.3, 10.4, 10.5, 10.6, 10.7, 10.8, 10.9, 11, 11.1, 11.2, 11.3, 11.4, 11.5, 11.6, 11.7, 11.8, 11.9, 12, 12.1, 12.2, 12.3, 12.4, 12.5, 12.6, 12.7, 12.8, 12.9, 13, 13.1, 13.2, 13.
  • the lubricating fluid can have a surface energy that is within +/ ⁇ 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, and 5 mN/m of a surface energy of the surface chemistry modifying compound.
  • the lubricating fluid can have a surface energy that is within +/ ⁇ 1 mN/m of a surface energy of the surface chemistry modifying compound.
  • the lubricating fluid can have a viscosity within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 1, 5, 10, 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300, 1400, 1500, 1600, 1700, 1800, 1900, 2000, 2100, 2200, 2300, 2400, and 2500 cP.
  • the lubricating fluid can have a viscosity of from 1 to 2,500 cP.
  • the lubricating fluid can have a refractive index within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, and 5 degrees Celsius.
  • the lubricating fluid can have a refractive index of from 1.2 to 1.4 at 20 degrees Celsius.
  • the lubricating fluid can have a refractive index within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 1.2, 1.201, 1.202, 1.203, 1.204, 1.205, 1.206, 1.207, 1.208, 1.209, 1.21, 1.211, 1.212, 1.213, 1.214, 1.215, 1.216, 1.217, 1.218, 1.219, 1.22, 1.221, 1.222, 1.223, 1.224, 1.225, 1.226, 1.227, 1.228, 1.229, 1.23, 1.231, 1.232, 1.233, 1.234, 1.235, 1.236, 1.237, 1.238, 1.239, 1.24, 1.241, 1.242, 1.243, 1.244, 1.245, 1.246, 1.247, 1.248, 1.249, 1.25, 1.251, 1.252, 1.253,
  • the lubricating fluid can have a vapor pressure within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 2 ⁇ 10 ⁇ 9 , 1 ⁇ 10 ⁇ 8 , 1 ⁇ 10 ⁇ 7 , 1 ⁇ 10 ⁇ 8 , 1 ⁇ 10 ⁇ 5 , 1 ⁇ 10 ⁇ 4 , 1 ⁇ 10 ⁇ 3 , 1 ⁇ 10 ⁇ 2 , torr at 20 degrees Celsius.
  • the lubricating fluid can have a vapor pressure of from 2 ⁇ 10 ⁇ 9 to 1.0 ⁇ 10 ⁇ 4 torr at 20 degrees Celsius.
  • the lubricating fluid can be applied by one selected from the group consisting of spin-coating, soaking, dip-coating, spray-coating, injecting, screen-printing, atomic layer deposition and combinations thereof.
  • the nanostructured layer 14 can be covalently or otherwise strongly bonded to the substrate 12 .
  • bonds especially, covalent bonds, are very strong and eliminate cracks that can act to concentrate stresses.
  • this is a significant improvement over conventional adhesive bonding and allows the flexibility to bond a nanostructured layer to a compositionally different substrate without the use of an adhesive.
  • This is yet another manner in which the durability of the nanostructured layer described herein is enhanced.
  • a method of forming an article 10 with a nanostructured surface 14 is also described. As shown in FIGS. 2A-D , the method can include providing a substrate 12 ( FIG. 2A ); depositing a film 28 on the substrate 12 ( FIG. 2B ); decomposing the film 28 to form a decomposed film 26 ( FIG. 2C ); and etching the decomposed film 26 to form the nanostructured layer 14 ( FIG. 2D ).
  • the decomposed film 26 can be a spinodally decomposed film.
  • the film 28 can be deposited on the substrate 12 using an in-situ thin film deposition process selected from the group that includes, but is not limited to, pulsed laser ablation, chemical vapor deposition (CVD), metallorganic chemical vapor deposition (MOCVD), sputtering and e-beam co-evaporation.
  • an in-situ thin film deposition process selected from the group that includes, but is not limited to, pulsed laser ablation, chemical vapor deposition (CVD), metallorganic chemical vapor deposition (MOCVD), sputtering and e-beam co-evaporation.
  • the film 28 can be deposited on the substrate 12 using an ex-situ thin film deposition process selected from the group that includes, but is not limited to chemical solution processes, and deposition of a halogen compound for an ex situ film process, followed by a heat treatment.
  • the depositing step can occur at a temperature between 15 and 800° C.
  • the decomposing step can be part of the depositing step, i.e., the film 28 may be deposited in decomposed state 26 .
  • the decomposing step can be a separate step, such as a heating step.
  • the decomposing step can include heating the deposited film 28 to a sufficient temperature for a sufficient time to produce a nanoscale spinodal decomposition.
  • nanoscale spinodal decomposition refers to spinodal decomposition where the protrusive and recessive interpenetrating networks are of dimensions that, upon differential etching, can result in the nanostructured layers described herein.
  • one embodiment relates to a method including applying a glass film to a substrate; heating the glass film to a temperature and for a duration sufficient to phase-separate the glass; differentially etching the glass to create a porous interpenetrating structure; modifying a surface chemistry of the porous interpenetrating structure; and adding a lubricating fluid to at least one pore of the porous interpenetrating structure.
  • the film can include one selected from the group consisting of sodium borosilicate glass, a soda lime glass, and combinations thereof.
  • the temperature to which the film is heated for a duration sufficient to phase-separate the glass can be within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 400, 405, 410, 415, 420, 425, 430, 435, 440, 445, 450, 455, 460, 465, 470, 475, 480, 485, 490, 495, 500, 505, 510, 515, 520, 525, 530, 535, 540, 545, 550, 555, 560, 565, 570, 575, 580, 585, 590, 595, 600, 605, 610, 615, 620, 625, 630, 635, 640, 645, 650, 655, 660, 665, 670, 675, 680, 685, 690, 695, 700, 705, 710, 715,
  • the duration for which the film is heated that is sufficient to phase-separate the glass can be within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93,
  • the duration for which the glass film is heated that is sufficient to phase-separate the glass can be from 1 second to 60 seconds.
  • the duration for which the glass film is heated that is sufficient to phase-separate the glass can be from 1 minute to 60 minutes.
  • the duration for which the film is heated that is sufficient to phase-separate the glass can be within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93,
  • the duration for which the film is heated that is sufficient to phase-separate the glass can be within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9, 7, 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.7,
  • the temperature can be about 700 degrees Celsius and the duration can be within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9, 7, 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.7, 7.8, 7.9, 8, 8.1,
  • the temperature can be about 500 degrees Celsius and the duration can be within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9, 7, 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.7, 7.8, 7.9, 8, 8.1,
  • the decomposition step can be performed under a non-oxidizing or inert atmosphere.
  • exemplary inert or non-oxidizing atmospheres include Ar, H 2 , N 2 , and combinations thereof (e.g., Ar & H 2 ).
  • Exemplary decomposed films 26 include a contiguous, protrusive phase and a contiguous, recessive phase that are differentially etchable (i.e. have different etch rates), when subjected to one or more etchants and have an interconnected structure, such as a spinodal structure.
  • the as-deposited film 28 may need to be heat treated in order to phase separate properly.
  • the decomposed film 26 can then be differentially etched to remove most or all of the recessive phase (such as borate-rich phase in the case of borosilicate glass), and to sharpen and thin the protrusive phase to form the plurality of nanostructured features 16 .
  • etching is generally described herein as being solution based, etching can also be carried out by vapor etchants.
  • the remaining surface features 16 after etching are characterized by general nanosize dimensions (width, length, and spacing) in a range of about 4 nm to no more than 500 nm, preferably ⁇ 200 nm, such as in a range of about 50 nm to no more than about 100 nm.
  • Nanostructured feature 16 dimensions may vary as a function of feature length if a wet etch process is used to form the nanostructured features 16 .
  • the feature dimensions at the air-layer interface 32 of the nanostructured layer 14 tends to be smallest, with the feature size increasing monotonically towards the layer-substrate interface 34 , which is inherently exposed to the etchant for a shorter period of time.
  • An exemplary etchant is hydrogen fluoride, such as a 0.05 to 1 mol-% aqueous hydrogen fluoride solution or a 0.1 to 0.5 mol-% aqueous hydrogen fluoride solution.
  • the dimensions of the nanostructured features 16 are dependent on a number of factors, such as composition, heat treating duration and temperature.
  • the nanostructured feature 16 dimensions, including height of the features, are generally determined by the etch rate and etch time selected. Compared to the processing described in the Differential Etching References cited herein, shorter heating and etch times are generally utilized to form features having dimensions ⁇ 200 nm.
  • the processing parameters are heavily dependent on the specific phase separating material used. For example, some glasses will phase separate and be spinodal from the initial glass deposition (no additional heat treating required). Other glasses require many days of specific heat treating to form a phase separated spinodal structure. This dependence on the processing parameters is applicable for other parameters as well (e.g., etchant type, etchant concentration and etch time).
  • the degree of transparency can often be typically less than optical quality, such as a Strehl ratio ⁇ 0.5, due to the imposed surface roughness (or porosity) of the features that make the surface superhydrophobic.
  • the method can also include applying a continuous hydrophobic coating 36 to a surface 38 of the plurality of spaced apart nanostructured features 16 .
  • the continuous hydrophobic coating 36 can be a self-assembled monolayer as described above.
  • the etching step can be continued until a width, length and height of each of the plurality of spaced apart nanostructured features 16 ranges from 1 to 500 nm, or can be continued until the nanostructured features 16 are any other size described herein.
  • the decomposed film 26 can include a first material and a second material different from the first material.
  • the first material can be contiguous and the second material can be contiguous, and the first and second materials can form an interpenetrating structure.
  • the first material and the second material can have differential susceptibility to an etchant, e.g., 0.5 molar HF.
  • the first material can be a protrusive phase, i.e., less susceptible to the etchant
  • the second material can be a recessive phase, i.e., more susceptible to the etchant.
  • the first and second materials can be independently selected from the group consisting of glass, metal, ceramic, polymer, resin, and combinations thereof.
  • the first material can be a first glass and the second material can be a second glass different from the first glass.
  • the recessive phase is completely etched, while in others exemplary methods portions of the recessive phase remain.
  • the nanostructured layer 14 can include an etching residue disposed on the contiguous, protrusive material, where the etching residue is from a recessive contiguous material that was interpenetrating with the protruding material in the decomposed film 26 .
  • one embodiment relates to a method including applying a glass film to a substrate; heating the glass film to a temperature and for a duration sufficient to phase-separate the glass; differentially etching the glass to create a porous interpenetrating structure; modifying a surface chemistry of the porous interpenetrating structure; and adding a lubricating fluid to at least one pore of the porous interpenetrating structure.
  • the differential etching can be performed using an etchant comprising one selected from hydrogen fluoride, ammonium fluoride, and combinations thereof.
  • the porous interpenetrating structure can have a porosity within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, and 95 volume percent.
  • the porous interpenetrating structure can include a plurality of pores having an average pore diameter within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95
  • the porous interpenetrating structure can include a plurality of pores having an average depth within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95,
  • the pore diameter can indicate a separation between peaks defining a perimeter of a pore.
  • the porous interpenetrating structure can include a continuous phase comprising the glass film having pores randomly distributed throughout.
  • the porous interpenetrating structure can include a reticulated network comprising glass film, having pores randomly distribute throughout.
  • the method can include pinning an oil or perfluorinated liquid 40 within nanopores 20 formed (or defined) by the plurality of spaced apart nanostructured features 16 .
  • the pinning step can include contacting an oil pinning solution with the nanopores 20 of the nanostructured layer 14 .
  • the oil pinning solution can include the oil 40 , a surfactant, or both.
  • Exemplary surfactants include volatile alcohols, e.g., methanol, ethanol, etc.; acetone; volatile linear and branched alkanes, alkenes and alkynes, e.g., hexane, heptanes and octane; and combinations thereof.
  • the surfactant can be the hydrophobic agent that is applied to the surface, i.e., a fluoropolymer.
  • the oil 40 being pinned should be miscible in the surfactant and the surfactant should have a viscosity that is lower than that of the oil. Because high viscosity fluids, such as some of the relevant non-volatile oils, cannot penetrate into nanopores 20 , a critical feature of the surfactants is reduction of the effective viscosity of the oil pinning solution to a range that can penetrate the nanopores 20 . Once the oil pinning solution penetrates the nanopores 20 , the surfactant can volatize leaving the oil 40 pined within the nanopores 20 .
  • the ratio of oil-to-surfactant should be such that the viscosity of the oil pinning solution is sufficiently low to penetrate into the nanopores of the nanostructured layer 14 .
  • the oil can be 0.01 to 100 wt-% of the oil pinning solution, 0.01 to 20 wt-% of the oil pinning solution, 0.05 to 10 wt-% of the oil pinning solution or 0.1-5 wt-% of the oil pinning solution.
  • the surfactant can be 99.99 to 80 wt-% of the oil pinning solution, or 99.95 to 90 wt-% of the oil pinning solution, or 99.99 to 95 wt-% of the oil pinning solution.
  • articles can include cover plates for optical systems, windows, labware and optical detectors.
  • One embodiment relates to an article including a substrate; a glass film disposed on the substrate, and a lubricating fluid disposed within the plurality of pores.
  • the glass film can have an interpenetrating structure, including a plurality of pores.
  • the interpenetrating structure can include at least one surface having a modified surface chemistry that corresponds with at least one property of the lubricating fluid.
  • the at least one property of the lubricating fluid can be a degree of hydrophobicity, a degree of oleophobicity, a degree of lipophobicity, and combinations thereof.
  • the article can be optically transparent.
  • the sliding angle is the angle at which a droplet, having a predefined weight, begins to slide across a surface that is inclined by the sliding angle.
  • the predefined weight can be within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 0.001, 0.005, 0.01, 0.05, 0.1, 0.5, 1, 5, 10, 20, 30, 40, 50, 60, 70, 80, 90, 100, 200, 300, 400, 500, 600, 700, 800, 900, and 1000 grams.
  • the predefined weight can be greater than or equal to 0.001 grams.
  • the article can exhibit a sliding angle within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9, 7, 7.1, 7.2,
  • the article can exhibit a sliding angle of from 0.1 to 4.5 degrees with respect to a 20 ⁇ L drop of a liquid.
  • the liquid can be selected from water, a hydrocarbon, and combinations thereof.
  • the hydrocarbon can be hexane, octane, ethylene glycol, and combinations thereof.
  • the article can exhibit a contact angle hysteresis within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9,
  • the contact angle hysteresis can be defined as a droplet advancing angle minus a receding angle.
  • FIG. 7 a schematic illustration of a method for testing the contact angle hysteresis of a drop of liquid 701 on a substrate 702 is shown.
  • the substrate can be tilted by an angle ⁇ and an advancing angle ⁇ a and a receding angle ⁇ r can be measured.
  • the article can have a transmittance within a range having a lower limit and/or an upper limit.
  • the range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, and 100%.
  • the article can have a transmittance greater than 60% with respect to light having a wavelength.
  • the wavelength can be within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit.
  • the lower limit and/or upper limit can be selected from 150, 175, 200, 225, 250, 275, 300, 325, 350, 375, 400, 425, 450, 475, 500, 525, 550, 575, 600, 625, 650, 675, 700, 725, 750, 775, 800, 825, 850, 875, 900, 925, 950, 975, and 1000, 1500, 200, 2500, 3000, 3500, 4000 nm.
  • the wavelength can be greater than 200 nm. More specifically, the article can have a transmittance greater than 60% with respect to light having a wavelength of greater than 200 nm.
  • a sodium borosilicate material was sputtered onto a glass substrate in Ar—H 2 or Ar—O 2 or Ar.
  • the composition of the sodium borosilicate material was 65.9 wt-% SiO 2 , 26.3 wt-% B 2 O 3 , and 7.8 wt-% Na 2 O.
  • the sputtering conditions were as follows:
  • Base Pressure Background pressure of the system ⁇ 1-3 ⁇ 10 ⁇ 7 Torr.
  • the sodium borosilicate-glasscomposite was heat treated for 5 minutes at a temperature of ⁇ 700° C. in order to spinodally decompose the sodium borosilicate layer.
  • the surface was then etched for 1 minute using 0.5 mol-% hydrogen fluoride.
  • the resulting material was optically clear and had a layer thickness of approximately 300 nm, feature sizes of ⁇ 75 nm, and good superhydrophobicity (contact angle>170 degrees). The surface showed antireflective behavior.
  • a sodium borosilicate material was sputtered onto a glass substrate in Ar—H 2 or Ar—O 2 or Ar. Processing details as follows:
  • the coated fused silica samples were heat treated in air at 700 degrees Celsius for 5-15 min. in order to produce adequate spinodal decomposition.
  • a heating rate of 5 degrees Celsius/min is employed and samples were furnace cooled to room temperature.
  • a phase separated spinodal structure is not, by itself, sufficient to create the required structure. Therefore, the surface coating is differentially etched with a 1:5 dilute mixture of 10:1 buffered oxide etchant (i.e., a mixture of ammonium fluoride and hydrofluoric acid) and deionized water.
  • the etchant creates a nanoscale branched network by eradicating all the sodium borate phase, leaving the silica-rich phase protruding from the surface.
  • the final thickness of the film's etched-out portion is adjusted through a combination of deposition time and variable etch parameters.
  • the etched surface is treated by immersing the samples in a mixture of hexane and 0.5 vol. % 1H,1H,2H,2H-perfluorooctyltrichlorosilane (Gelest, Inc., 95%) for 30 min., followed by annealing in air in an oven at 115 degrees Celsius for 15 min.
  • Static, advancing and receding contact angle measurements were performed using an Attension Theta model T301 optical tensiometer (Biolin Scientific, Finland). Static contact angles were determined by taking the average of at least ten 6 ⁇ l liquid droplets dispensed at different positions on the film. Sliding angles were established by using an automated tilting stage at a rate of 1 degree per second.
  • the lubricating fluid perfluorinated polyether (PFPE) oil
  • PFPE perfluorinated polyether
  • the lubricating fluid wicks into the pores by capillary forces, locking the fluid into the structure.
  • the mechanically robust nature of the reticulated silica scaffold coupled with interconnected nanopore network creates a robust and optically clear omniphobic state with highly effective repellency toward a variety of liquids.
  • the purpose of this example is to compare the contact angle hysteresis of glass films prepared with and without a lubricating fluid, specifically a perfluoropolyether oil, incorporated into the film's nanostructured features for a variety of liquids, each having a different surface tension.
  • a first nanostructured silica film was fabricated as described above without lubrication of the nanostructured surface.
  • a second nanostructured silica film was fabricated as described above with lubrication of the nanostructured surface.
  • the liquids tested included Hexane, Octane, Ethylene Glycol, and water.
  • FIG. 8 is a chart plotting contact angle hysteresis measurements against liquid surface tension for films prepared according to Example 2, tested with a variety of fluids each having a different surface tension. The data illustrated in FIG. 8 is also summarized in Table 1.
  • the nanostructured matrix enabled significantly decreased contact angle hysteresis.
  • the purpose of this example is to compare the sliding angle of glass films prepared with and without a lubricating fluid, specifically a perfluoropolyether oil, incorporated into the film's nanostructured features for a variety of liquids, each having a different surface tension.
  • the liquids tested included Hexane, Octane, Ethylene Glycol, and water.
  • a first nanostructured silica film was fabricated as described above without lubrication of the nanostructured surface.
  • a second nanostructured silica film was fabricated as described above with lubrication of the nanostructured surface.
  • Sliding angles were measured by using an automated tilting stage at a rate of 1 degree per second.
  • the sliding angle is determined by recording pictures of the liquid droplets, via an integrated camera at a rate of 4 frames per second, during tilting of the stage.
  • the value of the critical angle is assigned when the first sliding action of the liquid droplet is observed.
  • FIG. 9 is a chart plotting sliding angle against liquid surface tension for films prepared according to Example 3, tested with a variety of fluids each having a different surface tension. The data is also summarized in Table 2.
  • the data shows the sliding angle performance of the two nanostructured film coated quartz samples.
  • One sample is infused with oil and the other one is not.
  • the sample denoted as “with surface modifier” is in the superhydrophobic state and has only fluorinated surface chemistry.
  • the other one denoted as “with surface modifier and PFPE oil” has both underlying fluorinated chemistry and also coated (or infused) with oil.
  • the sample with lubricating oil trapped in its structure shows significantly lower sliding angles, and hence super-repellency for a wide variety of liquids having very different surface tensions (see videos 11 for water, 12 for ethylene glycohol, and 14 for octane).
  • Video presented in 13 compares the sliding behavior of water droplets on a smooth glass slide to the one coated with a nanostructured film. Both samples are lubricated with PFPE oil (FOMBLINTM 16/6 oil, available from Solvay Plastics). The video clearly shows that the nanostructured surface enables enhanced mobility and continuous sliding of the water droplet without any pinning, while a smooth-untextured-surface shows significant pinning of the droplet to substrate surface.
  • PFPE oil FOMBLINTM 16/6 oil
  • the purpose of this example is to compare the sliding behavior of various liquids across a nanostructured silica film that was fabricated as described above with lubrication of the nanostructured surface.
  • the liquids tested included octane, polyethylene glycol, and water. A drop of each liquid was placed on the glass film, which was held at an inclination angle of 5 degrees. Videos of each drop sliding across the surface of the glass film were recorded.
  • FIGS. 10 a - e show frames of a video of a drop of polyethylene glycol sliding across the surface of the glass film.
  • FIGS. 11 a - e show frames of a video of a drop of octane sliding across the surface of the glass film.
  • FIGS. 12 a - e show frames of a video of a drop of water sliding across the surface of the glass film. The frames are taken at approximately every two seconds.
  • the purpose of this example is to compare the sliding rate of water across glass films prepared with and without a lubricating fluid, specifically a perfluoropolyether oil, incorporated into the film's nanostructured features.
  • a first nanostructured silica film was fabricated as described above without lubrication of the nanostructured surface.
  • a second nanostructured silica film was fabricated as described above with lubrication of the nanostructured surface.
  • FIGS. 13 a - e show frames of a video of a side-by-side comparison of a first drop of water sliding across the surface the first glass film (left) without lubrication of the nanostructured surface and a second drop of water sliding across the surface of the second glass film (right) with lubrication of the nanostructured surface.
  • a drop of each liquid was placed on the glass film, which was held at an inclination angle of 5 degrees.
  • the frames are taken at approximately every two seconds.
  • the purpose of this example is to compare the transmittance of light at various wavelengths through glass films prepared with and without a lubricating fluid, specifically a perfluoropolyether oil, incorporated into the film's nanostructured features. It was discovered that the transparency is not compromised when a perfluoropolyether oil is pinned within the nanostructured features.
  • the perfluoropolyether oil had a index of refraction of n20/D 1.299).
  • a first nanostructured silica film was fabricated as described above without lubrication of the nanostructured surface.
  • a second nanostructured silica film was fabricated as described above with lubrication of the nanostructured surface.
  • a third sample of plain, uncoated fused silica was tested.
  • FIG. 14 is a chart plotting transmittance of the three films against wavelength.
  • FIG. 14 compares UV-Vis transmission spectra of the two nanostructured films, one with and the other without lubricant modification, to the plain untreated reference quartz sample. Whether it is lubricated state or not, the coated quartz sample enables higher transmittance that the uncoated counterpart because the effective index of refraction is significantly reduced (Note: we could not determine how much due to the complicated nature of the film microstructure) by the fact that the coating is not dense and has a porous submicron structure, and consequently acts as a broadband antireflective coating.
  • the measurements also showed a substantial decrease in transmittance at shorter wavelengths for the film without oil modification due to increased scattering by surface features ( ⁇ 100 nm), signifying UV-blocking functionality.

Abstract

An article having a nanostructured surface and a method of making the same are described. The article can include a substrate and a nanostructured layer bonded to the substrate. The nanostructured layer can include a plurality of spaced apart nanostructured features comprising a contiguous, protrusive material and the nanostructured features can be sufficiently small that the nanostructured layer is optically transparent. A surface of the nanostructured features can be coated with a continuous hydrophobic coating. The method can include providing a substrate; depositing a film on the substrate; decomposing the film to form a decomposed film; and etching the decomposed film to form the nanostructured layer.

Description

    STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH
  • This invention was made with government support under contract No. DE-AC05-000R22725 awarded by the U.S. Department of Energy. The government has certain rights in this invention.
  • FIELD OF THE INVENTION
  • The present invention relates to articles with optically transparent, nanostructured omniphobic surfaces.
  • BACKGROUND OF THE INVENTION
  • There are abundant uses for superhydrophobic materials, including self-cleaning surfaces, anti-fouling surfaces and anti-corrosion surfaces. Approaches for producing surfaces exhibiting these properties include producing micro-nano textured superhydrophobic surfaces or chemically active antimicrobial surfaces. Despite the impressive properties achieved by such known surfaces, the properties are not durable and the surfaces need to be replaced or otherwise maintained frequently. Thus, research to identify alternative approaches has continued.
  • An artificial surface that is transparent and antireflective and that repels various liquids can have broad industrial application potential ranging from self-cleaning architectural windows and optical components to elimination of bio-adhesion and icing on surfaces as well as patterned devices (e.g., complex microfluidic devices) for liquid transportation, drug delivery and medical diagnostics. Approaches for producing liquid repellent surfaces exhibiting these properties include producing micro-nano textured surfaces or chemically active antimicrobial surfaces. Despite the impressive properties achieved by such surfaces, the properties are either not durable or transparent, and the surfaces need to be replaced or otherwise maintained frequently. Some examples of the current state of the art for omniphobic surface development is based on periodically ordered arrays of nanoposts functionalized with low-surface energy polyfluoralkyl silane, random network of Teflon nanofibres distributed thorough the bulk substrate, UV-cured and fluorinated polyurethane, surfaces created by colloidal templating, and randomly deposited polymer based electro spun fiber mats and ordered arrays of silicon dioxide micro caps. One way to achieve a durable liquid repellent surface, at the same time exhibiting optical transparency, is to use certain phase separating glasses that phase separates into a connected structure (known as spinodal) when heat treated. These phase separated structurally connected features scatter light due to the slight differences in the phase's refractive indexes. This light scattering is wavelength dependent and is known as Raleigh scattering. When the spinodal structure features are small (˜100 nm) the glass primarily scatters ultraviolet light and passes all other light, thus appearing transparent.
  • SUMMARY OF THE INVENTION
  • The invention includes an article having a nanostructured surface. The article can include a substrate and a nanostructured layer bonded to the substrate. The nanostructured layer can be directly bonded to the substrate, i.e., without any adhesive or intermediary layers. The nanostructured layer can be atomically bonded to the substrate. The nanostructured layer can include a plurality of spaced apart nanostructured features comprising a contiguous, protrusive material. The nanostructured layer can include an oil pinned in a plurality of nanopores formed by a plurality of nanostructured features.
  • The nanostructured features can be sufficiently small so that the nanostructured layer is optically transparent. The width, length and height of each of said plurality of spaced apart nanostructured features ranges from 1 to 500 nm.
  • A continuous hydrophobic coating can be disposed on the plurality of spaced apart nanostructured features. The continuous hydrophobic coating can include a self-assembled monolayer.
  • The plurality of spaced apart nanostructured features provide an anti-reflective surface. The plurality of spaced apart nanostructures features can provide an effective refractive index gradient such that the effective refractive index increases monotonically towards the substrate.
  • A method of forming the article with a nanostructured surface layer is also described. The method can include providing a substrate; depositing a film on the substrate; decomposing the film to form a decomposed film; and etching the decomposed film to form the nanostructured layer.
  • The decomposition step can be performed under a non-oxidizing atmosphere. The decomposing step can include heating the film to a sufficient temperature for a sufficient time to produce a nanoscale spinodal decomposition.
  • The method can also include applying a continuous hydrophobic coating to the plurality of spaced apart nanostructured features, pinning an oil within nanopores formed by the plurality of nanostructured features, or both.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • These and other features, aspects, and advantages of the present invention will become better understood with reference to the following description and appended claims, and accompanying drawings where:
  • FIG. 1: is a schematic cross-section of an article with a nanostructured layer.
  • FIGS. 2A-D: are schematic cross-sections of a method of making an article with a nanostructure layer;
  • FIG. 3: is a schematic cross-section of a nanostructured layer with oil pinned within the nanopores of the nanostructured layer;
  • FIG. 4: is a schematic cross-section showing oil pinned within a nanopore;
  • FIG. 5: is an SEM image of nanostructured features as described herein (1 micron scale);
  • FIG. 6: is an SEM image of nanostructured features as described herein (2 micron scale);
  • FIG. 7: is a schematic illustration of a method for testing the contact angle hysteresis of a drop of liquid on a substrate;
  • FIG. 8: is a chart plotting contact angle hysteresis measurements against liquid surface tension for films prepared according to Example 2, tested with a variety of fluids each having a different surface tension;
  • FIG. 9: is a chart plotting sliding angle against liquid surface tension for films prepared according to Example 3, tested with a variety of fluids each having a different surface tension;
  • FIGS. 10 a-e: show frames of a video of a drop of polyethylene glycol sliding across the surface of the glass film;
  • FIGS. 11 a-e: show frames of a video of a drop of octane sliding across the surface of the glass film;
  • FIGS. 12 a-e: show frames of a video of a drop of water sliding across the surface of the glass film;
  • FIGS. 13 a-e: show frames of a video of a side-by-side comparison of a first drop of water sliding across the surface of a first glass film and a second drop of water sliding across the surface of a second glass film; and
  • FIG. 14: is a chart plotting transmittance against wavelength for a variety of glass films.
  • It should be understood that the various embodiments are not limited to the arrangements and instrumentality shown in the drawings.
  • DETAILED DESCRIPTION OF THE INVENTION
  • The present invention may be understood more readily by reference to the following detailed description of preferred embodiments of the invention as well as to the examples included therein. All numeric values are herein assumed to be modified by the term “about,” whether or not explicitly indicated. The term “about” generally refers to a range of numbers that one of skill in the art would consider equivalent to the recited value (i.e., having the same function or result). In many instances, the term “about” may include numbers that are rounded to the nearest significant figure.
  • U.S. patent application Ser. No. 12/915,183, filed Oct. 29, 2010, titled “Superhydrophobic Transparent Glass (STG) Thin Film Articles,” which was a continuation in part of U.S. patent application Ser. No. 12/901,072, filed Oct. 8, 2010, titled “Superoleophilic Particles and Coatings and Methods of Making the Same,” which issued as U.S. Pat. No. 8,497,021 on Jul. 30, 2013, is incorporated herein by reference in its entirety.
  • A substrate including a superhydrophobic transparent glass thin film and method of making the same are described. The glass thin film is applied in such a manner that it is possible to deposit thin films on a variety of substrates. The glass thin film can be superhydrophobic, self-cleaning, anti-reflective across the visible light spectrum, the IR spectrum, or both, while blocking, i.e., reflecting or scattering, UV radiation.
  • As shown in the Figures, the articles 10 with nanostructures surfaces described herein can include a substrate 12 and a nanostructured layer 14 attached to the substrate 12. The nanostructured layer 14 can include a plurality of spaced apart nanostructured features 16 comprising a contiguous, protrusive material 18 and the nanostructured features 16 can be sufficiently small that the nanostructured layer 14 is optically transparent. The nanostructured layer 14 can include a plurality of nanopores 20 defined by the contiguous, protrusive material 18, e.g., the nanostructured features 16.
  • As used herein, “optically transparent” refers to a material or layer that transmits rays of visible light in such a way that the human eye may see through the glass distinctly. One definition of optically transparent is a maximum of 50% attenuation at a wavelength of 550 nm (green light) for a material or layer, e.g., a layer 1 μm thick. Another definition can be based on the Strehl Ratio, which ranges from 0 to 1, with 1 being a perfectly transparent material. Exemplary optically transparent materials can have a Strehl Ratio≧0.5, or a Strehl Ratio≧0.6, or a Strehl Ratio≧0.7, or a Strehl Ratio≧0.8, or a Strehl Ratio≧0.9, or a Strehl Ratio≧0.95, or a Strehl Ratio≧0.975, or a Strehl Ratio≧0.99.
  • As used herein, the term “nanopores” refers to pores with a major diameter ranging from 1 to 750 nm. Nanopores can also refer to pores having a major diameter ranging from 5 to 500 nm, or 10 to 400 nm, or any combination thereof, e.g., 400 to 750 nm. The nanostructured layer described herein can have a nanopore size ranging from 10 nm to about 10 μm, or 100 nm to 8 μm, or 500 nm to 6 μm, or 1 to 5 μm, or any combination thereof, e.g., 500 nm to 5 μm.
  • The nanostructures features formed from a contiguous, protrusive material described herein can be formed by differentially etching of spinodally decomposed materials as described in U.S. Pat. No. 7,258,731, “Composite, Nanostructured, Super-Hydrophobic Material”, issued to D'Urso et al., on Aug. 21, 2007; U.S. Patent Application Publication No. 2008/0286556, “Super-Hydrophobic Water Repellant Powder,” published Nov. 20, 2008; and U.S. patent application Ser. No. 12/901,072, “Superoleophilic Particles and Coatings and Methods of Making the Same,” (hereinafter “Differential Etching References”) filed Oct. 8, 2010, the entireties of which are incorporated by reference herein.
  • As used herein, nanostructured feature has its literal meaning and includes, but is not limited to, nanoscale protrusions and nanoscale branched networks. As used herein, “nanoscale branched network” refers to a branched network where the individual branches are less than 1 μm. In some examples, the branches of the nanoscale branched networks described herein can be 750 nm or less in length, or 600 nm or less in length, or 500 nm or less in length. A branch can be defined by the space (i) between adjacent junctions 22, (ii) between a junction 22 and a terminal end 24 of the network, i.e., a nanoscale protrusion, or (iii) both. As shown in FIG. 3, the length (L) of a branch can be measured as the distance (i) between adjacent junctions 22, (ii) between a junction 22 and a terminal end 24 of the network, i.e., a nanoscale protrusion, or (iii) both. Though not a nanoscale branched network, staghorn coral (A. cervicornis) would be considered an exemplary branched network. In addition, FIGS. 5 & 6 show an SEM image of an exemplary nanoscale branched network formed by differential etching of a specially treated spinodally decomposed glass substrate.
  • The width, length and height of each of the plurality of spaced apart nanostructured features 16 can independently range from 1 to 500 nm, or from 2 to 400, or from 3 to 300 nm, or from 4 to 250 nm, or from 5 to 200 nm, or any combination of these ranges, e.g., 1 to 200 nm. The width, length and height of each of the plurality of spaced apart nanostructures features can be at least 5 nm, at least 7 nm, at least 10 nm, or at least 20 nm.
  • The nanostructured layer 14 can also include an etching residue disposed on the contiguous, protrusive material. As will be understood, the etching residue can result from the differential etching process utilized to remove the boron-rich phase of a spinodally decomposed borosilicate layer 26, which is an intermediate product of the spinodal decomposition described in the Differential Etching References referenced above. Thus, the etching residue can include remnants of the recessive contiguous material that was interpenetrating with the protruding material in the spinodally decomposed film 26 intermediary. The etching residue can be contiguous or non-contiguous.
  • The formation of the nanostructured layer 14 can include an intermediate spinodally decomposed glass film 26 formed from a film 28 selected from the group that includes, but is not limited to, a sodium borosilicate glass and a soda lime glass. An exemplary sodium borosilicate glass can include 65.9 wt-% SiO2, 26.3 wt-% B2O3 and 7.8 wt-% Na2O. The soda lime glass can be any soda lime glass that can be spinodally decomposed and etched to form the nanostructured layer described herein. The protrusive material (e.g., silica-rich phase), the recessive material (e.g., alkali and/or borate-rich phase) or both can be glass.
  • The contiguous, protrusive material can be directly bonded to the substrate 12. In some exemplary articles, the contiguous, protrusive material can be atomically, i.e., covalently, bonded to the substrate 12. For example, where the substrate 12 is a silica-rich glass and the nanostructured layer 14 is formed from differential etching of a spinodally decomposed sodium borosilicate glass 26, the silica-rich contiguous, protrusive phase of the nanostructured layer 14 can be covalently bonded to the substrate 12. In fact, in some cases, the composition of the substrate 12 and the contiguous, protrusive phase of the nanostructured layer 14 can be the same. This can result in a structure where there is no clear interfacial delineation between the nanostructured layer 14 and the substrate 12.
  • In some other examples, the contiguous, protrusive material of the nanostructured layer 14 can be directly bonded to the surface 30 of the substrate 12 by a means other than covalent bonding. In other words, the bond between the substrate 12 and the contiguous, protrusive material 18 can be formed directly without reliance on an adhesive or interfacial material to join the contiguous, protrusive material 18 to the surface 30 of the substrate 12. Such a process could involve interfacial atomic or molecular interdiffusion due to high impact velocities or temperature of deposited species. For example, during physical vapor deposition, target source species arrive at the substrate with high kinetic energy and with various angles of incidence. Because of this, highly dense films with exceptional adherence and coverage can be obtained, even on irregular surfaces. This direct bonding can result from the method of deposition of the precursor to the nanostructured layer, e.g., a physical or chemical vapor deposition technique.
  • Again, one embodiment relates to a method including applying a glass film to a substrate; heating the glass film to a temperature and for a duration sufficient to phase-separate the glass; differentially etching the glass to create a porous interpenetrating structure; modifying a surface chemistry of the porous interpenetrating structure; and adding a lubricating fluid to at least one pore of the porous interpenetrating structure. The glass film can be applied to the substrate by radio frequency (RF) sputtering, chemical vapor deposition (CVD), metallorganic chemical vapor deposition (MOCVD), wet chemical solution based approaches such as sol-gel and dip-coating, screen printing, ink-jet printing, spray painting, plasma spraying, pulsed laser ablation, sputtering, e-beam co-evaporation, and combinations thereof.
  • Various embodiments relate to a method of producing durable, transparent, antireflective, and omniphobic (i.e., repels various liquids) glass thin films. The basic approach to make such films is to begin with phase separating glass that is capable of spinodally decomposing when properly processed. In principle, a variety of different phase separating glasses (e.g. soda lime, borosilicate) can be applied to various existing surfaces (e.g. eye glasses, goggles, windows, metals, etc.), in a variety of ways (e.g. RF sputtering, Chemical Vapor Deposition (CVD), screen printing, ink-jet printing, spray painting, plasma spray, etc.). Once the coating has been applied and phased separated (typically by heat treating) into a spinodal pattern, a certain amount of differential etching is required in order to remove one phase and partially remove another phase of the spinodal structure. The resulting etched surface structure has a very porous and interpenetrating structure. This reticulated porous surface can be used as a matrix to effectively lock-in place a lubricating fluid having a low surface energy (e.g., perfluoropolyether oil, γ˜17 mN/m) with different viscosities. In order to effectively infuse the lubricant into the porous film matrix, in the final step the surface chemistry of nanostructured porous surface can be changed to match the chemical nature of the lubricant. After application of the lubricant the surface enable omniphobic repellency for liquids with surface tensions ranging from γ=18.2 mN/m (hexane) to 72.8 mN/m (water). The invented nanostructured omniphobic glass coating is first treated with 1H,1H,2H,2H-perfluorooctyltrichlorosilane and then the lubricating liquid, Fomblin 16/6 oil, is applied onto the fluorinated surface via spin-coating at 1000 rpm for a duration of 30 sec. The mechanical durability of the porous nanostructure is established during the deposition of the phase separating glass film onto various glass platforms and the interpenetrating porous network along with proper chemical affinity of the surface ensures the effective wetting and infusion of the lubricant. In addition, the fluidic nature of the lubricant combined with the nanostructured surface features enable to heal the physical damage by simply filling the damaged regions by the lubricant via capillary action. Moreover, the tunability of the nanostructural features as well as the porosity can easily be used to tailor the optical properties of the coatings for specific applications and the patternability of the film matrix through manipulating the etching protocols will create complex surface designs of selective liquid repellency in microfluidic applications.
  • The plurality of spaced apart nanostructured features 16 can cause the nanostructured layer 14 to exhibit anti-reflective properties. In some examples, the plurality of spaced apart nanostructures features can produce an effective refractive index gradient, wherein the effective refractive index gradient increases monotonically towards the surface of the substrate.
  • Optical glass ordinarily reflects about 4% of incident visible light from each of its surface (i.e., total of 8% transmittance loss front and back surface combined). The nanostructured layers 14 described herein can provide anti-reflective properties in addition to hydrophobic and transparent properties. As used herein, anti-reflective refers to<1% reflection, and preferably<0.1% for normally incident visible light (e.g., wavelengths from approximately 380-750 nm).
  • The nanostructured layer 14 described herein in general will have two “interfaces,” i.e., an air-layer interface 32 and a layer-substrate interface 34, and a thickness (t). If the nanostructured layer has optically small features (<200 nm features) that are homogeneously distributed throughout the layer, then interfaces 32, 34 will reflect a certain amount of light. If the air-layer reflection 32 returns to the surface 30 such that it is of equal amplitude and out of phase with the layer-substrate interface reflection 34, the two reflections completely cancel (destructive interference) and the nanostructured layer 14 will be antireflective for that wavelength. The thickness (t) of the nanostructured layer 14 determines the reflected phase relationships while the optical indexes of refraction determine the reflective amplitudes.
  • In order to exhibit anti-reflective properties, the length (L) of the nanostructured features 16 is preferably about 1/4 of the wavelength (λ/4) of the relevant light, such as about 140 nm for green light, which has a wavelength range of approximately 495-570 nm. The nanostructured layer 14 can have an effective optical index of refraction and its thickness (t) can be adjusted by the etch duration to obtain the correct thickness to produce an antireflective surface. For example, for a nanostructured layer 14 formed from sodium borosilicate glass, the refractive index to provide anti-reflectivity should be on the order of [(nfair+nfglass)/(nfglsass−nfair)]1/2=about 1.22 for a nfglass=1.5.
  • Alternately, the use of diffusion limited differential etching of the spinodally decomposed nanostructured layer can be used to produce a variable porosity graded index of refraction layer 14. Finally, an anti-reflective surface can be created by applying a coating that provides a graded index of refraction. The nanostructured layer 14 will generally have an effective reflective index gradient.
  • In some examples, with increasing duration of etching there will be little or no etching of the decomposed layer 26 at the layer-substrate interface 34, while preferably, the porosity of the nanostructures layer 14 increases greatly approaching the layer-air interface 32. In fact, the porosity and resulting layer index of refraction would approach that of air (˜1.01) near the layer-air interface 32. This reflective index gradient can provide broad spectrum anti-reflective properties. As used herein, “broad-spectrum antireflective properties” refers to anti-reflectivity across a wavelength range of at least 150 nm of the visible and/or infrared light spectrum, at least 200 nm of the visible and/or infrared light spectrum, at least 250 nm of the visible and/or infrared light spectrum, at least 300 nm of the visible and/or infrared light spectrum, or at least 350 nm of the visible and/or infrared light spectrum. Based on the range described above, it will be understood that the visible and infrared light spectrum includes a range of 1120 nm, i.e., from 380 to 1500 nm.
  • Relying on the same principles, the nanostructured layer 14 can be tailored to exhibit UV blocking properties. As used herein, “UV radiation” refers to radiation with a wavelength ranging from 10-400 nm. For example, the nanostructured layer can block or reflect at least 80% of UV radiation, at least 85% of UV radiation, at least 90% of UV radiation, at least 95% of UV radiation, at least 97.5% of UV radiation, at least 99% of UV radiation, or at least 99.5% of UV radiation.
  • The nanostructured layer 14 can have a thickness (t) of 2000 nm or less, 1000 nm or less, or 500 nm or less. The nanostructured layer can have a thickness of at least 1 nm, at least 5 nm, at least 10 nm, at least 15 nm, or at least 20 nm.
  • The nanostructured layer 14 itself can be superhydrophobic when the surface 38 of the nanostructured features 16 are hydrophobic or are made hydrophobic, e.g., through application of a hydrophobic coating. This can be achieved by applying a fluorinated silane solution to the nanostructured layer 14 in order to create a hydrophobic monolayer on the surface 38 of the nanostructured layer 14. Accordingly, one method of making the nanostructured layer 14 superhydrophobic would be to apply a continuous hydrophobic coating 36 on a surface 38 of the plurality of spaced apart nanostructured features 16. As used herein, “superhydrophobic” refers to materials that exhibit contact angle with water of greater than 140°, greater than 150°, greater than 160°, or even greater than 170°.
  • The continuous hydrophobic coating 36 can be a self-assembled monolayer (SAM). As described in the referenced patent applications, the nanostructured layer 14 will be superhydrophobic only after a hydrophobic coating layer 36 is applied thereto. Prior to application of the hydrophobic coating 36, the uncoated nanostructured layer will generally be hydrophilic. The hydrophobic coating layer 36 can be a perfluorinated organic material, a self-assembled monolayer, or both. Methods and materials for applying the hydrophobic coating, whether as a self-assembled monolayer or not, are fully described in the U.S. patent applications referenced hereinabove.
  • As shown schematically in FIG. 4, the hydrophobic coating 36 can be continuously coated over the spaced apart nanostructured features 16. The coating 36 can be formed as a self-assembled monolayer. Self-assembled monolayers (SAMs) are coatings consisting of a single layer of molecules on a surface, such as a surface 38 of the nanostructured features 16. In a SAM, the molecules are arranged in a manner where a head group is directed toward or adhered to the surface, generally by the formation of at least one covalent bond, and a tail group is directed to the air interface to provide desired surface properties, such as hydrophobicity. As the hydrophobic tail group has the lower surface energy it dominates the air-surface interface providing a continuous surface of the tail groups.
  • Although SAM methods are described, it will be understood that alternate surface treatment techniques can be used. Additional exemplary surface treatment techniques include, but are not limited to, SAM; physical vapor deposition, e.g., sputtering, pulsed laser deposition, e-beam co-evaporation, and molecular beam epitaxy; chemical vapor deposition; and alternate chemical solution techniques.
  • SAMs useful in the instant invention can be prepared by adding a melt or solution of the desired SAM precursor onto the nanostructured layer 14 where a sufficient concentration of SAM precursor is present to produce a continuous conformal monolayer coating 36. After the hydrophobic SAM is formed and fixed to the surface 38 of the nanostructured layer 14, any excess precursor can be removed as a volatile or by washing. In this manner the SAM-air interface can be primarily or exclusively dominated by the hydrophobic moiety.
  • One example of a SAM precursor that can be useful for the compositions and methods described herein is tridecafluoro-1,1,2,2-tetrahydroctyltriclorosilane. In some instances, this molecule undergoes condensation with the silanol groups of the nanostructured layer, which releases HCl and covalently bonds the tridecafluoro-1,1,2,2-tetrahydroctylsilyls group to the silanols at the surface of the porous particle. The tridecafluorohexyl moiety of the tridecafluoro-1,1,2,2-tetrahydroctylsilyl groups attached to the surface of the nanostructured layer provides a monomolecular layer that has a hydrophobicity similar to polytetrafluoroethylene. Thus, such SAMs make it possible to produce a nanostructured layer 14 having hydrophobic surfaces while retaining the desired nanostructured morphology that produces the desired superhydrophobic properties.
  • A non-exclusive list of exemplary SAM precursors that can be used for various embodiments of the invention is:

  • Xy(CH3)(3-y)SiLR
  • where y=1 to 3; X is Cl, Br, I, H, HO, R′HN, R′2N, imidizolo, R′C(O)N(H), R′C(O)N(R″), R′O, F3CC(O)N(H), F3CC(O)N(CH3), or F3S(O)2O, where R′ is a straight or branched chain hydrocarbon of 1 to 4 carbons and R″ is methyl or ethyl; L, a linking group, is CH2CH2, CH2CH2CH2, CH2CH2O, CH2CH2CH2O, CH2CH2C(O), CH2CH2CH2C(O), CH2CH2OCH2, CH2CH2CH2OCH2; and R is (CF2) nCF3 or (CF(CF 3)OCF2)nCF2CF3, where n is 0 to 24. Preferred SAM precursors have y=3 and are commonly referred to as silane coupling agents. These SAM precursors can attach to multiple OH groups on the surface and can link together with the consumption of water, either residual on the surface, formed by condensation with the surface, or added before, during or after the deposition of the SAM precursor. All SAM precursors yield a most thermodynamically stable structure where the hydrophobic moiety of the molecule is extended from the surface and establish normal conformational populations which permit the hydrophobic moiety of the SAM to dominate the air interface. In general, the hydrophobicity of the SAM surface increases with the value of n for the hydrophobic moiety, although in most cases sufficiently high hydrophobic properties are achieved when n is about 4 or greater where the SAM air interface is dominated by the hydrophobic moiety. The precursor can be a single molecule or a mixture of molecules with different values of n for the perfluorinated moiety. When the precursor is a mixture of molecules it is preferable that the molecular weight distribution is narrow, typically a Poisson distribution or a more narrow distribution.
  • The SAM precursor can have a non-fluorinated hydrophobic moiety as long as the SAM precursor readily conforms to the nanostructured features 16 of the nanostructured layer 14 and exhibits a sufficiently low surface energy to exhibit the desired hydrophobic properties. Although fluorinated SAM precursors may be preferred, in some embodiments of the invention silicones and hydrocarbon equivalents for the R groups of the fluorinated SAM precursors above can be used. Additional details regarding SAM precursors and methodologies can be found in the patent applications that have been incorporated herein by reference.
  • Again, one embodiment relates to a method including applying a glass film to a substrate; heating the glass film to a temperature and for a duration sufficient to phase-separate the glass; differentially etching the glass to create a porous interpenetrating structure; modifying a surface chemistry of the porous interpenetrating structure; and adding a lubricating fluid to at least one pore of the porous interpenetrating structure.
  • The surface chemistry of the porous interpenetrating structure can be modified to correspond with at least one property of the lubricating fluid. The surface chemistry of the porous interpenetrating structure can be a degree of hydrophobicity, a degree of oleophobicity, a degree of lipophobicity, and combinations thereof.
  • The surface chemistry of the porous interpenetrating structure can be modified by applying a surface chemistry modifying compound. The surface chemistry modifying compound is 1H,1H,2H,2H-perfluorooctyltrichlorosilane.
  • The at least one property of the lubricating fluid can be a degree of hydrophobicity, a degree of oleophobicity, a degree of lipophobicity, and combinations thereof. The property can be the surface energy of the lubricating oil. The surface energy of the surface chemistry modifying compound can be within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9, 7, 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.7, 7.8, 7.9, 8, 8.1, 8.2, 8.3, 8.4, 8.5, 8.6, 8.7, 8.8, 8.9, 9, 9.1, 9.2, 9.3, 9.4, 9.5, 9.6, 9.7, 9.8, 9.9, 10, 10.1, 10.2, 10.3, 10.4, 10.5, 10.6, 10.7, 10.8, 10.9, 11, 11.1, 11.2, 11.3, 11.4, 11.5, 11.6, 11.7, 11.8, 11.9, 12, 12.1, 12.2, 12.3, 12.4, 12.5, 12.6, 12.7, 12.8, 12.9, 13, 13.1, 13.2, 13.3, 13.4, 13.5, 13.6, 13.7, 13.8, 13.9, 14, 14.1, 14.2, 14.3, 14.4, 14.5, 14.6, 14.7, 14.8, 14.9, 15, 15.1, 15.2, 15.3, 15.4, 15.5, 15.6, 15.7, 15.8, 15.9, 16, 16.1, 16.2, 16.3, 16.4, 16.5, 16.6, 16.7, 16.8, 16.9, 17, 17.1, 17.2, 17.3, 17.4, 17.5, 17.6, 17.7, 17.8, 17.9, 18, 18.1, 18.2, 18.3, 18.4, 18.5, 18.6, 18.7, 18.8, 18.9, 19, 19.1, 19.2, 19.3, 19.4, 19.5, 19.6, 19.7, 19.8, 19.9, 20, 20.1, 20.2, 20.3, 20.4, 20.5, 20.6, 20.7, 20.8, 20.9, 21, 21.1, 21.2, 21.3, 21.4, 21.5, 21.6, 21.7, 21.8, 21.9, 22, 22.1, 22.2, 22.3, 22.4, 22.5, 22.6, 22.7, 22.8, 22.9, 23, 23.1, 23.2, 23.3, 23.4, 23.5, 23.6, 23.7, 23.8, 23.9, 24, 24.1, 24.2, 24.3, 24.4, 24.5, 24.6, 24.7, 24.8, 24.9, and 25 mN/m. For example, according to certain preferred embodiments, the surface energy of the surface chemistry modifying compound can be from 10 to 20 mN/m. According to other preferred embodiments, the surface energy of the surface chemistry modifying compound can be about 17 mN/m.
  • That article 10 can also, optionally, include an oil 40 pinned in the plurality of nanopores 20 formed by the plurality of nanostructured features 16. The oil 40 pinned by and/or within the nanopores 20 can be a non-nutritional oil. As used herein, the term “non-nutritional” is used to refer to oils that are not consumed as a nutrient source by microbes, e.g., bacteria, fungus, etc., or other living organisms. Exemplary non-nutritional oils include, but are not limited to polysiloxanes.
  • As used herein, “pinned” refers to being held in place by surface tension forces, van der Waal forces (e.g., suction), or combinations of both. For example, the interactions that prevent a liquid from being dispensed from a laboratory pipette until the plunger is depressed could be referred to as pinning.
  • As used herein, “oil” is intended to refer to a non-polar fluid that is a stable, non-volatile, liquid at room temperature, e.g., 23-28° C. The oils used herein should be incompressible and have no solubility or only trace solubility in water, e.g., a solubility of 0.01 g/l or 0.001 g/l or less. Exemplary oils include non-volatile linear and branched alkanes, alkenes and alkynes, esters of linear and branched alkanes, alkenes and alkynes; polysiloxanes, and combinations thereof.
  • The oil 40 can be pinned in all or substantially all of the nanopores and/or surface nanopores of the nanostructured layer 14. For example, oil 40 can be pinned in at least 70%, at least 80%, at least 90%, at least 95%, at least 97.5%, or at least 99% of the nanopores and/or surface nanopores of the nanostructured layer 14 described herein. The oil 40 pinned within the nanostructured layer 14 can be a contiguous oil phase. Alternately, the superoleophilic layer 14 described herein can include an inner air phase with an oil phase at the air-nanostructured layer interface 32.
  • In order to maintain the superoleophilic properties for an extended duration, it can be desirable that the oil 40 pinned in the nanostructured layer 14 does not evaporate when the article 10 is exposed to the use environment. For example, the oil 40 can be an oil 40 that does not evaporate at ambient environmental conditions. An exemplary oil 40 can have a boiling point of at least 120° C., or at least 135° C., or at least 150° C. or at least 175° C.
  • As used herein, “ambient environmental conditions” refer generally to naturally occurring terrestrial or aquatic conditions to which superoleophilic materials may be exposed. For example, submerged in lakes, rivers and oceans around the world, and adhered to manmade structures around the world. Exemplary ambient environmental conditions include (i) a temperature range from −40° C. to 45° C. at a pressure of one atmosphere, and (ii) standard temperature and pressure.
  • Again, one embodiment relates to a method including applying a glass film to a substrate; heating the glass film to a temperature and for a duration sufficient to phase-separate the glass; differentially etching the glass to create a porous interpenetrating structure; modifying a surface chemistry of the porous interpenetrating structure; and adding a lubricating fluid to at least one pore of the porous interpenetrating structure. The lubricating fluid can be a perfluoropolyether oil. The lubricating fluid can be any prefluorinated liquids such as perfluoro-octane (surface tension 14 mN/m at 20 degrees Celsius) or any fluorocarbon-based fluid such as FLUORINERT™ available from 3M (FC-770, Surface tension 15 mN/m). Both are as vicous as water with viscosities close to 1 cP. The perfluoropolyether oil can have a number average molecular weight within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 1000, 1100, 1200, 1300, 1400, 1500, 1600, 1700, 1800, 1900, 2000, 2100, 2200, 2300, 2400, 2500, 2600, 2700, 2800, 2900, 3000, 3100, 3200, 3300, 3400, 3500, 3600, 3700, 3800, 3900, 4000, 4100, 4200, 4300, 4400, 4500, 4600, 4700, 4800, 4900, 5000, 5100, 5200, 5300, 5400, 5500, 5600, 5700, 5800, 5900, 6000, 6100, 6200, 6300, 6400, 6500, 6600, 6700, 6800, 6900, 7000, 7100, 7200, 7300, 7400, 7500, 7600, 7700, 7800, 7900, 8000, 8100, 8200, 8300, 8400, 8500, 8600, 8700, 8800, 8900, 9000, 9100, 9200, 9300, 9400, 9500, 9600, 9700, 9800, 9900, and 10000 AMU. For example, according to certain preferred embodiments, the perfluoropolyether oil can have a number average molecular weight of from 1000 to 10000 AMU.
  • The surface energy of the lubricating oil can be within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9, 7, 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.7, 7.8, 7.9, 8, 8.1, 8.2, 8.3, 8.4, 8.5, 8.6, 8.7, 8.8, 8.9, 9, 9.1, 9.2, 9.3, 9.4, 9.5, 9.6, 9.7, 9.8, 9.9, 10, 10.1, 10.2, 10.3, 10.4, 10.5, 10.6, 10.7, 10.8, 10.9, 11, 11.1, 11.2, 11.3, 11.4, 11.5, 11.6, 11.7, 11.8, 11.9, 12, 12.1, 12.2, 12.3, 12.4, 12.5, 12.6, 12.7, 12.8, 12.9, 13, 13.1, 13.2, 13.3, 13.4, 13.5, 13.6, 13.7, 13.8, 13.9, 14, 4.1, 14.2, 14.3, 14.4, 14.5, 14.6, 14.7, 14.8, 14.9, 15, 5.1, 15.2, 5.3, 5.4, 15.5, 15.6, 15.7, 15.8, 15.9, 16, 16.1, 16.2, 16.3, 16.4, 16.5, 16.6, 16.7, 16.8, 16.9, 17, 7.1, 17.2, 17.3, 17.4, 17.5, 17.6, 17.7, 17.8, 17.9, 18, 8.1, 18.2, 8.3, 8.4, 18.5, 18.6, 18.7, 18.8, 18.9, 19, 19.1, 19.2, 19.3, 19.4, 19.5, 19.6, 19.7, 19.8, 19.9, 20, 20.1, 20.2, 20.3, 20.4, 20.5, 20.6, 20.7, 20.8, 20.9, 21, 21.1, 21.2, 21.3, 21.4, 21.5, 21.6, 21.7, 21.8, 21.9, 22, 22.1, 22.2, 22.3, 22.4, 22.5, 22.6, 22.7, 22.8, 22.9, 23, 23.1, 23.2, 23.3, 23.4, 23.5, 23.6, 23.7, 23.8, 23.9, 24, 24.1, 24.2, 24.3, 24.4, 24.5, 24.6, 24.7, 24.8, 24.9, 25, 25.1, 25.2, 25.3, 25.4, 25.5, 25.6, 25.7, 25.8, 25.9, 26, 26.1, 26.2, 26.3, 26.4, 26.5, 26.6, 26.7, 26.8, 26.9, 27, 27.1, 27.2, 27.3, 27.4, 27.5, 27.6, 27.7, 27.8, 27.9, 28, 28.1, 28.2, 28.3, 28.4, 28.5, 28.6, 28.7, 28.8, 28.9, 29, 29.1, 29.2, 29.3, 29.4, 29.5, 29.6, 29.7, 29.8, 29.9, and 30 mN/m. For example, according to certain preferred embodiments, the surface energy of the lubricating oil can be from 10 to 25 mN/m. The surface energy of the lubricating oil can be about 17 mN/m.
  • The lubricating fluid can have a surface energy that is within +/−0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, and 5 mN/m of a surface energy of the surface chemistry modifying compound. For example, according to certain preferred embodiments, the lubricating fluid can have a surface energy that is within +/−1 mN/m of a surface energy of the surface chemistry modifying compound.
  • The lubricating fluid can have a viscosity within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 1, 5, 10, 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300, 1400, 1500, 1600, 1700, 1800, 1900, 2000, 2100, 2200, 2300, 2400, and 2500 cP. For example, according to certain preferred embodiments, the lubricating fluid can have a viscosity of from 1 to 2,500 cP.
  • The lubricating fluid can have a refractive index within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, and 5 degrees Celsius. For example, according to certain preferred embodiments, the lubricating fluid can have a refractive index of from 1.2 to 1.4 at 20 degrees Celsius.
  • The lubricating fluid can have a refractive index within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 1.2, 1.201, 1.202, 1.203, 1.204, 1.205, 1.206, 1.207, 1.208, 1.209, 1.21, 1.211, 1.212, 1.213, 1.214, 1.215, 1.216, 1.217, 1.218, 1.219, 1.22, 1.221, 1.222, 1.223, 1.224, 1.225, 1.226, 1.227, 1.228, 1.229, 1.23, 1.231, 1.232, 1.233, 1.234, 1.235, 1.236, 1.237, 1.238, 1.239, 1.24, 1.241, 1.242, 1.243, 1.244, 1.245, 1.246, 1.247, 1.248, 1.249, 1.25, 1.251, 1.252, 1.253, 1.254, 1.255, 1.256, 1.257, 1.258, 1.259, 1.26, 1.261, 1.262, 1.263, 1.264, 1.265, 1.266, 1.267, 1.268, 1.269, 1.27, 1.271, 1.272, 1.273, 1.274, 1.275, 1.276, 1.277, 1.278, 1.279, 1.28, 1.281, 1.282, 1.283, 1.284, 1.285, 1.286, 1.287, 1.288, 1.289, 1.29, 1.291, 1.292, 1.293, 1.294, 1.295, 1.296, 1.297, 1.298, 1.299, 1.3, 1.301, 1.302, 1.303, 1.304, 1.305, 1.306, 1.307, 1.308, 1.309, 1.31, 1.311, 1.312, 1.313, 1.314, 1.315, 1.316, 1.317, .318, 1.319, 1.32, 1.321, 1.322, 1.323, 1.324, 1.325, 1.326, 1.327, 1.328, 1.329, 1.33, 1.331, 1.332, 1.333, 1.334, 1.335, 1.336, 1.337, 1.338, 1.339, 1.34, 1.341, 1.342, 1.343, 1.344, 1.345, 1.346, 1.347, 1.348, 1.349, 1.35, 1.351, 1.352, 1.353, 1.354, 1.355, 1.356, 1.357, 1.358, 1.359, 1.36, 1.361, 1.362, 1.363, 1.364, 1.365, 1.366, 1.367, 1.368, 1.369, 1.37, 1.371, 1.372, 1.373, 1.374, 1.375, 1.376, 1.377, 1.378, 1.379, 1.38, 1.381, 1.382, 1.383, 1.384, 1.385, 1.386, 1.387, 1.388, 1.389, 1.39, 1.391, 1.392, 1.393, 1.394, 1.395, 1.396, 1.397, 1.398, 1.399, and 1.4 degrees Celsius. For example, according to certain preferred embodiments, the lubricating fluid can have a refractive index of about 1.296 degrees Celsius.
  • The lubricating fluid can have a vapor pressure within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 2×10−9, 1×10−8, 1×10−7, 1×10−8, 1×10−5, 1×10−4, 1×10−3, 1×10−2, torr at 20 degrees Celsius. For example, according to certain preferred embodiments, the lubricating fluid can have a vapor pressure of from 2×10−9 to 1.0×10−4 torr at 20 degrees Celsius.
  • The lubricating fluid can be applied by one selected from the group consisting of spin-coating, soaking, dip-coating, spray-coating, injecting, screen-printing, atomic layer deposition and combinations thereof.
  • As described above, the nanostructured layer 14 can be covalently or otherwise strongly bonded to the substrate 12. Such bonds, especially, covalent bonds, are very strong and eliminate cracks that can act to concentrate stresses. In particular, this is a significant improvement over conventional adhesive bonding and allows the flexibility to bond a nanostructured layer to a compositionally different substrate without the use of an adhesive. This is yet another manner in which the durability of the nanostructured layer described herein is enhanced.
  • A method of forming an article 10 with a nanostructured surface 14 is also described. As shown in FIGS. 2A-D, the method can include providing a substrate 12 (FIG. 2A); depositing a film 28 on the substrate 12 (FIG. 2B); decomposing the film 28 to form a decomposed film 26 (FIG. 2C); and etching the decomposed film 26 to form the nanostructured layer 14 (FIG. 2D). The decomposed film 26 can be a spinodally decomposed film.
  • In the depositing step, the film 28 can be deposited on the substrate 12 using an in-situ thin film deposition process selected from the group that includes, but is not limited to, pulsed laser ablation, chemical vapor deposition (CVD), metallorganic chemical vapor deposition (MOCVD), sputtering and e-beam co-evaporation.
  • Alternately, the film 28 can be deposited on the substrate 12 using an ex-situ thin film deposition process selected from the group that includes, but is not limited to chemical solution processes, and deposition of a halogen compound for an ex situ film process, followed by a heat treatment. The depositing step can occur at a temperature between 15 and 800° C.
  • In some exemplary methods, the decomposing step can be part of the depositing step, i.e., the film 28 may be deposited in decomposed state 26. For example, by depositing the film 28 at a temperature sufficient to induce decomposition, e.g., spinodal decomposition, during the depositing step. In other exemplary methods, the decomposing step can be a separate step, such as a heating step. The decomposing step can include heating the deposited film 28 to a sufficient temperature for a sufficient time to produce a nanoscale spinodal decomposition. As used herein, “nanoscale spinodal decomposition” refers to spinodal decomposition where the protrusive and recessive interpenetrating networks are of dimensions that, upon differential etching, can result in the nanostructured layers described herein.
  • Again, one embodiment relates to a method including applying a glass film to a substrate; heating the glass film to a temperature and for a duration sufficient to phase-separate the glass; differentially etching the glass to create a porous interpenetrating structure; modifying a surface chemistry of the porous interpenetrating structure; and adding a lubricating fluid to at least one pore of the porous interpenetrating structure. The film can include one selected from the group consisting of sodium borosilicate glass, a soda lime glass, and combinations thereof.
  • The temperature to which the film is heated for a duration sufficient to phase-separate the glass can be within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 400, 405, 410, 415, 420, 425, 430, 435, 440, 445, 450, 455, 460, 465, 470, 475, 480, 485, 490, 495, 500, 505, 510, 515, 520, 525, 530, 535, 540, 545, 550, 555, 560, 565, 570, 575, 580, 585, 590, 595, 600, 605, 610, 615, 620, 625, 630, 635, 640, 645, 650, 655, 660, 665, 670, 675, 680, 685, 690, 695, 700, 705, 710, 715, 720, 725, 730, 735, 740, 745, 750, 755, 760, 765, 770, 775, 780, 785, 790, 795, 800, 805, 810, 815, 820, 825, 830, 835, 840, 845, 850, 855, 860, 865, 870, 875, 880, 885, 890, 895, and 900 degrees Celsius. For example, according to certain preferred embodiments, the temperature to which the glass film is heated for a duration sufficient to phase-separate the glass can be from 500 to 800 degrees Celsius.
  • The duration for which the film is heated that is sufficient to phase-separate the glass can be within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 117, 118, 119, and 120 seconds. For example, according to certain preferred embodiments, the duration for which the glass film is heated that is sufficient to phase-separate the glass can be from 1 second to 60 seconds. The duration for which the glass film is heated that is sufficient to phase-separate the glass can be from 1 minute to 60 minutes.
  • The duration for which the film is heated that is sufficient to phase-separate the glass can be within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 117, 118, 119, 120, 121, 122, 123, 124, 125, 126, 127, 128, 129, 130, 131, 132, 133, 134, 135, 136, 137, 138, 139, 140, 141, 142, 143, 144, 145, 146, 147, 148, 149, 150, 151, 152, 153, 154, 155, 156, 157, 158, 159, 160, 161, 162, 163, 164, 165, 166, 167, 168, 169, 170, 171, 172, 173, 174, 175, 176, 177, 178, 179, 180, 181, 182, 183, 184, 185, 186, 187, 188, 189, 190, 191, 192, 193, 194, 195, 196, 197, 198, 199, 200, 201, 202, 203, 204, 205, 206, 207, 208, 209, 210, 211, 212, 213, 214, 215, 216, 217, 218, 219, 220, 221, 222, 223, 224, 225, 226, 227, 228, 229, 230, 231, 232, 233, 234, 235, 236, 237, 238, 239, and 240 hours. For example, according to certain preferred embodiments, the duration for which the glass film is heated that is sufficient to phase-separate the glass can be from 1 hour to 240 hours.
  • The duration for which the film is heated that is sufficient to phase-separate the glass can be within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9, 7, 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.7, 7.8, 7.9, 8, 8.1, 8.2, 8.3, 8.4, 8.5, 8.6, 8.7, 8.8, 8.9, 9, 9.1, 9.2, 9.3, 9.4, 9.5, 9.6, 9.7, 9.8, 9.9, and 10 days. For example, according to certain preferred embodiments, the duration for which the glass film is heated that is sufficient to phase-separate the glass can be from 1 second to 10 days.
  • The temperature can be about 700 degrees Celsius and the duration can be within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9, 7, 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.7, 7.8, 7.9, 8, 8.1, 8.2, 8.3, 8.4, 8.5, 8.6, 8.7, 8.8, 8.9, 9, 9.1, 9.2, 9.3, 9.4, 9.5, 9.6, 9.7, 9.8, 9.9, 10, 10.1, 10.2, 10.3, 10.4, 10.5, 10.6, 10.7, 10.8, 10.9, 11, 11.1, 11.2, 11.3, 11.4, 11.5, 11.6, 11.7, 11.8, 11.9, 12, 12.1, 12.2, 12.3, 12.4, 12.5, 12.6, 12.7, 12.8, 12.9, 13, 13.1, 13.2, 13.3, 13.4, 13.5, 13.6, 13.7, 13.8, 13.9, 14, 14.1, 14.2, 14.3, 14.4, 14.5, 14.6, 14.7, 14.8, 14.9, and 15 minutes. For example, according to certain preferred embodiments, the temperature can be about 700 degrees Celsius and the duration can be from 1 to 10 minutes.
  • The temperature can be about 500 degrees Celsius and the duration can be within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9, 7, 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.7, 7.8, 7.9, 8, 8.1, 8.2, 8.3, 8.4, 8.5, 8.6, 8.7, 8.8, 8.9, 9, 9.1, 9.2, 9.3, 9.4, 9.5, 9.6, 9.7, 9.8, 9.9, and 10 days. For example, according to certain preferred embodiments, the temperature can be about 500 degrees Celsius and the duration can be from 3-5 days.
  • The decomposition step can be performed under a non-oxidizing or inert atmosphere. Exemplary inert or non-oxidizing atmospheres include Ar, H2, N2, and combinations thereof (e.g., Ar & H2).
  • Exemplary decomposed films 26 include a contiguous, protrusive phase and a contiguous, recessive phase that are differentially etchable (i.e. have different etch rates), when subjected to one or more etchants and have an interconnected structure, such as a spinodal structure. The as-deposited film 28 may need to be heat treated in order to phase separate properly. The decomposed film 26 can then be differentially etched to remove most or all of the recessive phase (such as borate-rich phase in the case of borosilicate glass), and to sharpen and thin the protrusive phase to form the plurality of nanostructured features 16.
  • Although etching is generally described herein as being solution based, etching can also be carried out by vapor etchants. The remaining surface features 16 after etching are characterized by general nanosize dimensions (width, length, and spacing) in a range of about 4 nm to no more than 500 nm, preferably<200 nm, such as in a range of about 50 nm to no more than about 100 nm.
  • Nanostructured feature 16 dimensions may vary as a function of feature length if a wet etch process is used to form the nanostructured features 16. In this case, the feature dimensions at the air-layer interface 32 of the nanostructured layer 14 tends to be smallest, with the feature size increasing monotonically towards the layer-substrate interface 34, which is inherently exposed to the etchant for a shorter period of time. An exemplary etchant is hydrogen fluoride, such as a 0.05 to 1 mol-% aqueous hydrogen fluoride solution or a 0.1 to 0.5 mol-% aqueous hydrogen fluoride solution.
  • The dimensions of the nanostructured features 16 are dependent on a number of factors, such as composition, heat treating duration and temperature. The nanostructured feature 16 dimensions, including height of the features, are generally determined by the etch rate and etch time selected. Compared to the processing described in the Differential Etching References cited herein, shorter heating and etch times are generally utilized to form features having dimensions<200 nm.
  • Smaller feature sizes (<200 nm) make the nanostructured layer 14 more optically transparent. The processing parameters are heavily dependent on the specific phase separating material used. For example, some glasses will phase separate and be spinodal from the initial glass deposition (no additional heat treating required). Other glasses require many days of specific heat treating to form a phase separated spinodal structure. This dependence on the processing parameters is applicable for other parameters as well (e.g., etchant type, etchant concentration and etch time). The degree of transparency can often be typically less than optical quality, such as a Strehl ratio<0.5, due to the imposed surface roughness (or porosity) of the features that make the surface superhydrophobic.
  • The method can also include applying a continuous hydrophobic coating 36 to a surface 38 of the plurality of spaced apart nanostructured features 16. The continuous hydrophobic coating 36 can be a self-assembled monolayer as described above.
  • The etching step can be continued until a width, length and height of each of the plurality of spaced apart nanostructured features 16 ranges from 1 to 500 nm, or can be continued until the nanostructured features 16 are any other size described herein.
  • The decomposed film 26 can include a first material and a second material different from the first material. The first material can be contiguous and the second material can be contiguous, and the first and second materials can form an interpenetrating structure. The first material and the second material can have differential susceptibility to an etchant, e.g., 0.5 molar HF. For example, the first material can be a protrusive phase, i.e., less susceptible to the etchant, and the second material can be a recessive phase, i.e., more susceptible to the etchant.
  • The first and second materials can be independently selected from the group consisting of glass, metal, ceramic, polymer, resin, and combinations thereof. The first material can be a first glass and the second material can be a second glass different from the first glass.
  • In some exemplary methods, the recessive phase is completely etched, while in others exemplary methods portions of the recessive phase remain. Accordingly, the nanostructured layer 14 can include an etching residue disposed on the contiguous, protrusive material, where the etching residue is from a recessive contiguous material that was interpenetrating with the protruding material in the decomposed film 26.
  • Again, one embodiment relates to a method including applying a glass film to a substrate; heating the glass film to a temperature and for a duration sufficient to phase-separate the glass; differentially etching the glass to create a porous interpenetrating structure; modifying a surface chemistry of the porous interpenetrating structure; and adding a lubricating fluid to at least one pore of the porous interpenetrating structure. The differential etching can be performed using an etchant comprising one selected from hydrogen fluoride, ammonium fluoride, and combinations thereof.
  • The porous interpenetrating structure can have a porosity within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, and 95 volume percent. For example, according to certain preferred embodiments, the porous interpenetrating structure can have a porosity of from 10 to 90 volume percent.
  • The porous interpenetrating structure can include a plurality of pores having an average pore diameter within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 117, 118, 119, 120, 121, 122, 123, 124, 125, 126, 127, 128, 129, 130, 131, 132, 133, 134, 135, 136, 137, 138, 139, 140, 141, 142, 143, 144, 145, 146, 147, 148, 149, 150, 151, 152, 153, 154, 155, 156, 157, 158, 159, 160, 161, 162, 163, 164, 165, 166, 167, 168, 169, 170, 171, 172, 173, 174, 175, 176, 177, 178, 179, 180, 181, 182, 183, 184, 185, 186, 187, 188, 189, 190, 191, 192, 193, 194, 195, 196, 197, 198, 199, 200, 201, 202, 203, 204, 205, 206, 207, 208, 209, 210, 211, 212, 213, 214, 215, 216, 217, 218, 219, 220, 221, 222, 223, 224, 225, 226, 227, 228, 229, 230, 231, 232, 233, 234, 235, 236, 237, 238, 239, 240, 241, 242, 243, 244, 245, 246, 247, 248, 249, and 250 nm. For example, according to certain preferred embodiments, the porous interpenetrating structure can include a plurality of pores having an average pore diameter of from 10-200 nm.
  • The porous interpenetrating structure can include a plurality of pores having an average depth within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 117, 118, 119, 120, 121, 122, 123, 124, 125, 126, 127, 128, 129, 130, 131, 132, 133, 134, 135, 136, 137, 138, 139, 140, 141, 142, 143, 144, 145, 146, 147, 148, 149, 150, 151, 152, 153, 154, 155, 156, 157, 158, 159, 160, 161, 162, 163, 164, 165, 166, 167, 168, 169, 170, 171, 172, 173, 174, 175, 176, 177, 178, 179, 180, 181, 182, 183, 184, 185, 186, 187, 188, 189, 190, 191, 192, 193, 194, 195, 196, 197, 198, 199, 200, 201, 202, 203, 204, 205, 206, 207, 208, 209, 210, 211, 212, 213, 214, 215, 216, 217, 218, 219, 220, 221, 222, 223, 224, 225, 226, 227, 228, 229, 230, 231, 232, 233, 234, 235, 236, 237, 238, 239, 240, 241, 242, 243, 244, 245, 246, 247, 248, 249, and 250 nm. For example, according to certain preferred embodiments, the porous interpenetrating structure can include a plurality of pores having an average depth of from 10-200 nm.
  • The pore diameter can indicate a separation between peaks defining a perimeter of a pore. The porous interpenetrating structure can include a continuous phase comprising the glass film having pores randomly distributed throughout. The porous interpenetrating structure can include a reticulated network comprising glass film, having pores randomly distribute throughout.
  • The method can include pinning an oil or perfluorinated liquid 40 within nanopores 20 formed (or defined) by the plurality of spaced apart nanostructured features 16. The pinning step can include contacting an oil pinning solution with the nanopores 20 of the nanostructured layer 14. The oil pinning solution can include the oil 40, a surfactant, or both. Exemplary surfactants include volatile alcohols, e.g., methanol, ethanol, etc.; acetone; volatile linear and branched alkanes, alkenes and alkynes, e.g., hexane, heptanes and octane; and combinations thereof. It should be noted that the surfactant can be the hydrophobic agent that is applied to the surface, i.e., a fluoropolymer.
  • The oil 40 being pinned should be miscible in the surfactant and the surfactant should have a viscosity that is lower than that of the oil. Because high viscosity fluids, such as some of the relevant non-volatile oils, cannot penetrate into nanopores 20, a critical feature of the surfactants is reduction of the effective viscosity of the oil pinning solution to a range that can penetrate the nanopores 20. Once the oil pinning solution penetrates the nanopores 20, the surfactant can volatize leaving the oil 40 pined within the nanopores 20.
  • In general, the ratio of oil-to-surfactant should be such that the viscosity of the oil pinning solution is sufficiently low to penetrate into the nanopores of the nanostructured layer 14. The oil can be 0.01 to 100 wt-% of the oil pinning solution, 0.01 to 20 wt-% of the oil pinning solution, 0.05 to 10 wt-% of the oil pinning solution or 0.1-5 wt-% of the oil pinning solution. Where the surfactant is present, the surfactant can be 99.99 to 80 wt-% of the oil pinning solution, or 99.95 to 90 wt-% of the oil pinning solution, or 99.99 to 95 wt-% of the oil pinning solution. Additional features of the exemplary materials with oil 40 pinned in the nanopores 20 of nanostructured layer 14 are provided in U.S. application Ser. No. 12/901,072, “Superoleophilic Particles and Coatings and Methods of Making the Same,” filed Oct. 8, 2010, the entirety of which is incorporated herein by reference.
  • The present invention can be used to make a variety of articles. For example, articles can include cover plates for optical systems, windows, labware and optical detectors.
  • One embodiment relates to an article including a substrate; a glass film disposed on the substrate, and a lubricating fluid disposed within the plurality of pores. The glass film can have an interpenetrating structure, including a plurality of pores. The interpenetrating structure can include at least one surface having a modified surface chemistry that corresponds with at least one property of the lubricating fluid. The at least one property of the lubricating fluid can be a degree of hydrophobicity, a degree of oleophobicity, a degree of lipophobicity, and combinations thereof. According to various embodiments, the article can be optically transparent. For purposes of the present invention, the sliding angle is the angle at which a droplet, having a predefined weight, begins to slide across a surface that is inclined by the sliding angle. The predefined weight can be within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 0.001, 0.005, 0.01, 0.05, 0.1, 0.5, 1, 5, 10, 20, 30, 40, 50, 60, 70, 80, 90, 100, 200, 300, 400, 500, 600, 700, 800, 900, and 1000 grams. For example, according to certain preferred embodiments, the predefined weight can be greater than or equal to 0.001 grams.
  • The article can exhibit a sliding angle within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9, 7, 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.7, 7.8, 7.9, 8, 8.1, 8.2, 8.3, 8.4, 8.5, 8.6, 8.7, 8.8, 8.9, 9, 9.1, 9.2, 9.3, 9.4, 9.5, 9.6, 9.7, 9.8, 9.9, and 10 degrees with respect to a 20 μL drop of a liquid. For example, according to certain preferred embodiments, the article can exhibit a sliding angle of from 0.1 to 4.5 degrees with respect to a 20 μL drop of a liquid. The liquid can be selected from water, a hydrocarbon, and combinations thereof. The hydrocarbon can be hexane, octane, ethylene glycol, and combinations thereof.
  • The article can exhibit a contact angle hysteresis within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9, 4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9, 5, 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, 6, 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.7, 6.8, 6.9, 7, 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.7, 7.8, 7.9, 8, 8.1, 8.2, 8.3, 8.4, 8.5, 8.6, 8.7, 8.8, 8.9, 9, 9.1, 9.2, 9.3, 9.4, 9.5, 9.6, 9.7, 9.8, 9.9, and 10 with respect to a 20 μL drop of a liquid. For example, according to certain preferred embodiments, the article can exhibit a contact angle hysteresis of from 0.4 to 4 with respect to a 20 μL drop of a liquid.
  • The contact angle hysteresis can be defined as a droplet advancing angle minus a receding angle. Referring to FIG. 7 a schematic illustration of a method for testing the contact angle hysteresis of a drop of liquid 701 on a substrate 702 is shown. The substrate can be tilted by an angle Θ and an advancing angle Θa and a receding angle Θr can be measured.
  • The article can have a transmittance within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, and 100%. For example, according to certain preferred embodiments, the article can have a transmittance greater than 60% with respect to light having a wavelength. The wavelength can be within a range having a lower limit and/or an upper limit. The range can include or exclude the lower limit and/or the upper limit. The lower limit and/or upper limit can be selected from 150, 175, 200, 225, 250, 275, 300, 325, 350, 375, 400, 425, 450, 475, 500, 525, 550, 575, 600, 625, 650, 675, 700, 725, 750, 775, 800, 825, 850, 875, 900, 925, 950, 975, and 1000, 1500, 200, 2500, 3000, 3500, 4000 nm. For example, according to certain preferred embodiments, the wavelength can be greater than 200 nm. More specifically, the article can have a transmittance greater than 60% with respect to light having a wavelength of greater than 200 nm.
  • EXAMPLES Example 1
  • A sodium borosilicate material was sputtered onto a glass substrate in Ar—H2 or Ar—O2 or Ar. The composition of the sodium borosilicate material was 65.9 wt-% SiO2, 26.3 wt-% B2O3, and 7.8 wt-% Na2O. The sputtering conditions were as follows:
  • Base Pressure (Background pressure of the system)˜1-3×10−7 Torr.
  • Sputter Pressure=5×10−3 Torr
  • Sputter Temperature (Substrate Temperature)=Room temperature (˜25° C.)
  • Sputter Power=100 Watt
  • Sputter Gas=Ar
  • The sodium borosilicate-glasscomposite was heat treated for 5 minutes at a temperature of ˜700° C. in order to spinodally decompose the sodium borosilicate layer. The surface was then etched for 1 minute using 0.5 mol-% hydrogen fluoride. The resulting material was optically clear and had a layer thickness of approximately 300 nm, feature sizes of ˜75 nm, and good superhydrophobicity (contact angle>170 degrees). The surface showed antireflective behavior.
  • Examples 2-6
  • A sodium borosilicate material was sputtered onto a glass substrate in Ar—H2 or Ar—O2 or Ar. Processing details as follows:
  • Fabrication of Nanostructured Silica Films:
  • Radio-frequency magnetron sputtering was used to deposit thin film glass coatings (thickness=0.5 μm-1 μm) onto fused silica substrates at room temperature using a two inch diameter target that is made from a borosilicate glass composition comprising 66 mole % SiO2, 26 mole % B2O3, and 8 mole % Na2O. This composition ensures metastable phase separation after post-deposition thermal processing. Typical sputtering conditions consisted of a gas mixture of argon and oxygen (oxygen/argon=1/3) at a total pressure in the range of 3-5 mTorr. Before the growth, glass substrates were ultrasonically cleaned with isopropanol for 15 min. Following deposition, the coated fused silica samples were heat treated in air at 700 degrees Celsius for 5-15 min. in order to produce adequate spinodal decomposition. A heating rate of 5 degrees Celsius/min is employed and samples were furnace cooled to room temperature. A phase separated spinodal structure is not, by itself, sufficient to create the required structure. Therefore, the surface coating is differentially etched with a 1:5 dilute mixture of 10:1 buffered oxide etchant (i.e., a mixture of ammonium fluoride and hydrofluoric acid) and deionized water. The etchant creates a nanoscale branched network by eradicating all the sodium borate phase, leaving the silica-rich phase protruding from the surface. The final thickness of the film's etched-out portion is adjusted through a combination of deposition time and variable etch parameters. To create a superhydrophobic surface, the etched surface is treated by immersing the samples in a mixture of hexane and 0.5 vol. % 1H,1H,2H,2H-perfluorooctyltrichlorosilane (Gelest, Inc., 95%) for 30 min., followed by annealing in air in an oven at 115 degrees Celsius for 15 min.
  • Water Droplet Contact Angle Measurements:
  • Static, advancing and receding contact angle measurements were performed using an Attension Theta model T301 optical tensiometer (Biolin Scientific, Finland). Static contact angles were determined by taking the average of at least ten 6 μl liquid droplets dispensed at different positions on the film. Sliding angles were established by using an automated tilting stage at a rate of 1 degree per second.
  • Lubrication of the Nanotextured Surface:
  • The lubricating fluid, perfluorinated polyether (PFPE) oil, was applied to the porous nanostructure surface by using spin coating technique at a spin rate of 1000 rpm for 30 seconds. With matching surface chemistry paired with porous microstructure, the lubricating fluid wicks into the pores by capillary forces, locking the fluid into the structure. Here the mechanically robust nature of the reticulated silica scaffold coupled with interconnected nanopore network creates a robust and optically clear omniphobic state with highly effective repellency toward a variety of liquids.
  • Example 2
  • The purpose of this example is to compare the contact angle hysteresis of glass films prepared with and without a lubricating fluid, specifically a perfluoropolyether oil, incorporated into the film's nanostructured features for a variety of liquids, each having a different surface tension. A first nanostructured silica film was fabricated as described above without lubrication of the nanostructured surface. A second nanostructured silica film was fabricated as described above with lubrication of the nanostructured surface. The liquids tested included Hexane, Octane, Ethylene Glycol, and water.
  • FIG. 8 is a chart plotting contact angle hysteresis measurements against liquid surface tension for films prepared according to Example 2, tested with a variety of fluids each having a different surface tension. The data illustrated in FIG. 8 is also summarized in Table 1.
  • TABLE 1
    Surface Tension of Hysteresis
    Liquid with PFPE Hysteresis without
    Liquid (mN/m) oil (degrees) PFPE oil (degrees)
    Hexane 18.43 1.12 90
    Octane 21.62 1.31 90
    Ethylene glycol 48.4 3.93 90
    Water 72.8 0.43 13.89
  • As shown from the data, with a trapped lubricant, the nanostructured matrix enabled significantly decreased contact angle hysteresis.
  • Example 3
  • The purpose of this example is to compare the sliding angle of glass films prepared with and without a lubricating fluid, specifically a perfluoropolyether oil, incorporated into the film's nanostructured features for a variety of liquids, each having a different surface tension. The liquids tested included Hexane, Octane, Ethylene Glycol, and water.
  • A first nanostructured silica film was fabricated as described above without lubrication of the nanostructured surface. A second nanostructured silica film was fabricated as described above with lubrication of the nanostructured surface.
  • Sliding angles were measured by using an automated tilting stage at a rate of 1 degree per second. The sliding angle is determined by recording pictures of the liquid droplets, via an integrated camera at a rate of 4 frames per second, during tilting of the stage. The value of the critical angle is assigned when the first sliding action of the liquid droplet is observed.
  • FIG. 9 is a chart plotting sliding angle against liquid surface tension for films prepared according to Example 3, tested with a variety of fluids each having a different surface tension. The data is also summarized in Table 2.
  • TABLE 2
    Sliding Angle with Sliding Angle with
    Surface Tension surface modifier surface modifier and
    (mN/m) (SAM) (degrees) PFPE oil (degrees)
    Hexane 18.43 90
    Octane 21.62 90 2.7
    Ethylene 48.4 90 4.42
    glycol
    Water 72.8 8 0.5
  • The data shows the sliding angle performance of the two nanostructured film coated quartz samples. The processing details of the films have been described in the above examples. One sample is infused with oil and the other one is not. The sample denoted as “with surface modifier” is in the superhydrophobic state and has only fluorinated surface chemistry. The other one denoted as “with surface modifier and PFPE oil” has both underlying fluorinated chemistry and also coated (or infused) with oil. The sample with lubricating oil trapped in its structure shows significantly lower sliding angles, and hence super-repellency for a wide variety of liquids having very different surface tensions (see videos 11 for water, 12 for ethylene glycohol, and 14 for octane). Video presented in 13 compares the sliding behavior of water droplets on a smooth glass slide to the one coated with a nanostructured film. Both samples are lubricated with PFPE oil (FOMBLIN™ 16/6 oil, available from Solvay Plastics). The video clearly shows that the nanostructured surface enables enhanced mobility and continuous sliding of the water droplet without any pinning, while a smooth-untextured-surface shows significant pinning of the droplet to substrate surface.
  • Example 4
  • The purpose of this example is to compare the sliding behavior of various liquids across a nanostructured silica film that was fabricated as described above with lubrication of the nanostructured surface. The lubricating fluid was a perfluoropolyether oil (P=3×10−5 Torr@20 degrees Celsius). The liquids tested included octane, polyethylene glycol, and water. A drop of each liquid was placed on the glass film, which was held at an inclination angle of 5 degrees. Videos of each drop sliding across the surface of the glass film were recorded. FIGS. 10 a-e show frames of a video of a drop of polyethylene glycol sliding across the surface of the glass film. FIGS. 11 a-e show frames of a video of a drop of octane sliding across the surface of the glass film. FIGS. 12 a-e show frames of a video of a drop of water sliding across the surface of the glass film. The frames are taken at approximately every two seconds.
  • Example 5
  • The purpose of this example is to compare the sliding rate of water across glass films prepared with and without a lubricating fluid, specifically a perfluoropolyether oil, incorporated into the film's nanostructured features. A first nanostructured silica film was fabricated as described above without lubrication of the nanostructured surface. A second nanostructured silica film was fabricated as described above with lubrication of the nanostructured surface.
  • FIGS. 13 a-e show frames of a video of a side-by-side comparison of a first drop of water sliding across the surface the first glass film (left) without lubrication of the nanostructured surface and a second drop of water sliding across the surface of the second glass film (right) with lubrication of the nanostructured surface. A drop of each liquid was placed on the glass film, which was held at an inclination angle of 5 degrees. The frames are taken at approximately every two seconds.
  • Example 6
  • The purpose of this example is to compare the transmittance of light at various wavelengths through glass films prepared with and without a lubricating fluid, specifically a perfluoropolyether oil, incorporated into the film's nanostructured features. It was discovered that the transparency is not compromised when a perfluoropolyether oil is pinned within the nanostructured features. The perfluoropolyether oil had a index of refraction of n20/D 1.299). A first nanostructured silica film was fabricated as described above without lubrication of the nanostructured surface. A second nanostructured silica film was fabricated as described above with lubrication of the nanostructured surface. A third sample of plain, uncoated fused silica was tested.
  • FIG. 14 is a chart plotting transmittance of the three films against wavelength. FIG. 14 compares UV-Vis transmission spectra of the two nanostructured films, one with and the other without lubricant modification, to the plain untreated reference quartz sample. Whether it is lubricated state or not, the coated quartz sample enables higher transmittance that the uncoated counterpart because the effective index of refraction is significantly reduced (Note: we could not determine how much due to the complicated nature of the film microstructure) by the fact that the coating is not dense and has a porous submicron structure, and consequently acts as a broadband antireflective coating. On the other hand, the measurements also showed a substantial decrease in transmittance at shorter wavelengths for the film without oil modification due to increased scattering by surface features (≦100 nm), signifying UV-blocking functionality. Infusion of a lower index of refraction lubricant [refractive index lower than quartz (approximately n=1.47) and higher than air n=1] to the structure fills in the pores and hence reduces the Rayleigh scattering effect thereby increasing the transmittance at lower wavelengths (i.e., <400 nm).
  • Although the present invention has been described in considerable detail with reference to certain preferred versions thereof, other versions are possible. Therefore, the spirit and scope of the appended claims should not be limited to the description of the preferred versions contained herein.
  • The reader's attention is directed to all papers and documents which are filed concurrently with this specification and which are open to public inspection with this specification, and the contents of all such papers and documents are incorporated herein by reference.
  • All the features disclosed in this specification (including any accompanying claims, abstract, and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. Thus, unless expressly stated otherwise, each feature disclosed is one example only of a generic series of equivalent or similar features.
  • Any element in a claim that does not explicitly state “means for” performing a specified function, or “step for” performing a specific function, is not to be interpreted as a “means” or “step” clause as specified in 35 U.S.C §112, sixth paragraph. In particular, the use of “step of” in the claims herein is not intended to invoke the provisions of 35 U.S.C §112, sixth paragraph.

Claims (39)

What is claimed is:
1. A method comprising:
applying a glass film to a substrate;
heating the glass film to a temperature and for a duration sufficient to phase-separate the glass;
differentially etching the glass to create a porous interpenetrating structure;
modifying a surface chemistry of the porous interpenetrating structure; and
adding a lubricating fluid to at least one pore of the porous interpenetrating structure.
2. The method according to claim 1, wherein the glass film is applied to the substrate by one selected from the group consisting of radio frequency (RF) sputtering, chemical vapor deposition (CVD), metallorganic chemical vapor deposition (MOCVD), screen printing, ink-jet printing, spray painting, plasma spraying, pulsed laser ablation, sputtering, e-beam co-evaporation, wet solution chemical deposition (sol-gel, dip-coating) approaches and combinations thereof.
3. The method according to claim 1, wherein the glass film comprises one selected from the group consisting of sodium borosilicate glass, a soda lime glass, and combinations thereof.
4. The method according to claim 1, wherein the temperature is from 500 to 800 degrees Celsius.
5. The method according to claim 1, wherein the duration is from 1 second to 5 days.
6. The method according to claim 1, wherein the temperature is about 700 degrees Celsius and the duration is from 1 to 10 minutes.
7. The method according to claim 1, wherein the temperature is about 500 degrees Celsius and the duration is from 3-5 days.
8. The method according to claim 1, wherein the differential etching is performed using an etchant comprising one selected from hydrogen fluoride, ammonium fluoride, and combinations thereof.
9. The method according to claim 1, wherein the porous interpenetrating structure has a porosity of from 10% to 90% volume percent.
10. The method according to claim 1, wherein the porous interpenetrating structure comprises a plurality of pores having an average pore diameter of from 10-200 nm.
11. The method according to claim 10, wherein the pore diameter indicates a separation between peaks defining a perimeter of a pore.
12. The method according to claim 1, wherein the porous interpenetrating structure comprises a plurality of pores having an average depth of from 10-200 nm.
13. The method according to claim 1, wherein the porous interpenetrating structure comprises a continuous phase comprising the glass film having pores randomly distributed throughout.
14. The method according to claim 1, wherein the porous interpenetrating structure comprises a reticulated network comprising glass film, having pores randomly distribute throughout.
15. The method according to claim 1, wherein the surface chemistry of the porous interpenetrating structure is one selected from the group consisting of a degree of hydrophobicity, a degree of oleophobicity, a degree of lipophobicity, and combinations thereof.
16. The method according to claim 1, wherein the surface chemistry of the porous interpenetrating structure is modified by applying a surface chemistry modifying compound.
17. The method according to claim 16, wherein the surface chemistry modifying compound is a fluorinated low surface energy material selected from the group consisting of 1H,1H,2H,2H-perfluorooctyltrichlorosilane, tridecafluoro-1,1,2,2-tetrahydrooctyl) trichlorosilane, fluorosilanes, 5-trifluoromethylbenzyltrichlorosilane, and combinations thereof.
18. The method according to claim 1, wherein the surface chemistry of the porous interpenetrating structure is modified to correspond with at least one property of the lubricating fluid.
19. The method according to claim 18, wherein the at least one property of the lubricating fluid is one selected from the group consisting of a degree of hydrophobicity, a degree of oleophobicity, a degree of lipophobicity and combinations thereof.
20. The method according to claim 18, wherein the property is the surface energy of the lubricating oil.
21. The method according to claim 20, wherein the surface energy of the surface chemistry modifying compound is from 10 to 20 mN/m.
22. The method according to claim 20, wherein the surface energy of the surface chemistry modifying compound about 17 mN/m.
23. The method according to claim 1, wherein the lubricating fluid is a perfluoropolyether oil.
24. The method according to claim 23, wherein the perfluoropolyether oil has a number average molecular weight of from 1000 to 10000 AMU.
25. The method according to claim 23, wherein the surface energy of the lubricating oil is from 10 to 25 mN/m.
26. The method according to claim 23, wherein the surface energy of the lubricating oil about 17 mN/m.
27. The method according to claim 1, wherein the lubricating fluid has a surface energy that is within +/−1 mN/m of a surface energy of the surface chemistry modifying compound.
28. The method according to claim 1, wherein the lubricating fluid has a viscosity of from 1 to 2,500 cP.
29. The method according to claim 1, wherein the lubricating fluid has a refractive index of from 1.2 to 1.4 at 20 degrees Celsius.
30. The method according to claim 1, wherein the lubricating fluid has a refractive index of about 1.296 degrees Celsius.
31. The method according to claim 1, wherein the lubricating fluid has a vapor pressure of from 1.0×10−4 to 2×10−9 torr at 20 degrees Celsius.
32. The method according to claim 1, wherein the lubricating fluid is applied by one selected from the group consisting of spin-coating, soaking, dip-coating, spray-coating, injecting, screen-printing, atomic layer deposition and combinations thereof.
33. An article comprising
a substrate;
a glass film disposed on the substrate, wherein the glass film has an interpenetrating structure, comprising a plurality of pores;
a lubricating fluid disposed within the plurality of pores,
wherein the interpenetrating structure comprises at least one surface having a modified surface chemistry that corresponds with at least one property of the lubricating fluid, selected from the group consisting of a degree of hydrophobicity, a degree of oleophobicity, a degree of lipophobicity, and combinations thereof.
34. The article according to claim 33, wherein the article exhibits a sliding angle of from 0.1 to 4.5 degrees with respect to a 20 μL drop of a liquid.
35. The article according to claim 34, wherein the liquid is selected from water, a hydrocarbon and combinations.
36. The article according to claim 34, wherein the hydrocarbon is hexane, octane, ethylene glycol.
37. The article according to claim 33, wherein the article exhibits a contact angle hysteresis of from 0.4 to 4 with respect to a 20 μL drop of a liquid, and wherein the contact angle hysteresis is defined as a droplet advancing angle minus a receding angle.
38. The article according to claim 33, wherein the article has a transmittance greater than 60% with respect to light having a wavelength greater than 200 nm.
39. The article according to claim 33, wherein the article is optically transparent.
US14/186,349 2014-02-21 2014-02-21 Transparent omniphobic thin film articles Abandoned US20150239773A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US14/186,349 US20150239773A1 (en) 2014-02-21 2014-02-21 Transparent omniphobic thin film articles
PCT/US2015/010109 WO2015156852A2 (en) 2014-02-21 2015-01-05 Transparent omniphobic thin film articles
US15/843,471 US10844479B2 (en) 2014-02-21 2017-12-15 Transparent omniphobic thin film articles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14/186,349 US20150239773A1 (en) 2014-02-21 2014-02-21 Transparent omniphobic thin film articles

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US15/843,471 Division US10844479B2 (en) 2014-02-21 2017-12-15 Transparent omniphobic thin film articles

Publications (1)

Publication Number Publication Date
US20150239773A1 true US20150239773A1 (en) 2015-08-27

Family

ID=53881564

Family Applications (2)

Application Number Title Priority Date Filing Date
US14/186,349 Abandoned US20150239773A1 (en) 2014-02-21 2014-02-21 Transparent omniphobic thin film articles
US15/843,471 Active 2035-04-11 US10844479B2 (en) 2014-02-21 2017-12-15 Transparent omniphobic thin film articles

Family Applications After (1)

Application Number Title Priority Date Filing Date
US15/843,471 Active 2035-04-11 US10844479B2 (en) 2014-02-21 2017-12-15 Transparent omniphobic thin film articles

Country Status (2)

Country Link
US (2) US20150239773A1 (en)
WO (1) WO2015156852A2 (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109311266A (en) * 2016-06-13 2019-02-05 日产自动车株式会社 Antifouling tectosome and the auto parts for using the antifouling tectosome
WO2019074901A1 (en) * 2017-10-10 2019-04-18 Carlex Glass America, Llc Durable functional coatings
EP3694815A4 (en) * 2017-10-10 2020-11-11 Central Glass Co., Ltd. Improved anti-reflective functional coating for glazings
US10906044B2 (en) * 2015-09-02 2021-02-02 Illumina Cambridge Limited Methods of improving droplet operations in fluidic systems with a filler fluid including a surface regenerative silane
US11155490B1 (en) * 2020-04-22 2021-10-26 Waymo Llc Superomniphobic thin film
EP3945080A1 (en) * 2020-07-29 2022-02-02 Waymo Llc Superomniphobic bulk optical glass
US20220290699A1 (en) * 2021-03-15 2022-09-15 Bruce Preston Williams Multi Functional Microstructured Surface Development Three Dimensional Form Solutions in Individual Tile and Multiple Tile Array Configurations
CN115582537A (en) * 2022-10-08 2023-01-10 温州医科大学 Preparation method and application of large-size uniform nano noble metal film
US11603329B2 (en) 2020-04-22 2023-03-14 Waymo Llc Methods for preparing a superomniphobic coating
US11709156B2 (en) 2017-09-18 2023-07-25 Waters Technologies Corporation Use of vapor deposition coated flow paths for improved analytical analysis
US11709155B2 (en) 2017-09-18 2023-07-25 Waters Technologies Corporation Use of vapor deposition coated flow paths for improved chromatography of metal interacting analytes
US11918936B2 (en) 2020-01-17 2024-03-05 Waters Technologies Corporation Performance and dynamic range for oligonucleotide bioanalysis through reduction of non specific binding

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107311471A (en) * 2017-07-14 2017-11-03 昆明理工大学 A kind of preparation method of the smooth porous surface of glass

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012100099A2 (en) * 2011-01-19 2012-07-26 President And Fellows Of Harvard College Slippery surfaces with high pressure stability, optical transparency, and self-healing characteristics

Family Cites Families (289)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2221709A (en) 1938-01-29 1940-11-12 Corning Glass Works Borosilicate glass
US2315328A (en) 1938-11-04 1943-03-30 Corning Glass Works High silica glass article
US2286275A (en) 1940-09-10 1942-06-16 Corning Glass Works Method of treating borosilicate glasses
US3790475A (en) 1972-03-27 1974-02-05 Corning Glass Works Porous glass support material
US3931428A (en) 1974-01-04 1976-01-06 Michael Ebert Substrate coated with super-hydrophobic layers
JPS5588767A (en) 1978-12-27 1980-07-04 Tokyo Eizai Lab Composition for thermal plastic fixing bandage that can be manufactured in solventless shape and preparation of fixing bandage
US4214919A (en) 1978-12-28 1980-07-29 Burroughs Corporation Technique of growing thin silicon oxide films utilizing argon in the contact gas
US4377608A (en) 1979-09-24 1983-03-22 Dow Corning Corporation Method of modifying a substrate
CA1184877A (en) 1982-05-12 1985-04-02 James B. Webb Method and apparatus for depositing conducting oxide on a substrate
JPH0735449B2 (en) 1986-06-18 1995-04-19 エヌオーケー株式会社 Oil-containing resin and composition thereof
DE3854238T2 (en) 1987-04-08 1996-03-21 Hitachi Ltd Process for producing a superconducting element.
JPS6465718A (en) 1987-09-04 1989-03-13 Furukawa Electric Co Ltd Manufacture of ceramic superconductive wire
JPH01100817A (en) 1987-10-14 1989-04-19 Fujikura Ltd High temperature superconducting material
JPH01100816A (en) 1987-10-14 1989-04-19 Fujikura Ltd High temperature superconducting material
JP3585087B2 (en) 1987-12-15 2004-11-04 純子 中嶋 Superconducting oxide film laminated structure
JPH01220307A (en) 1988-02-26 1989-09-04 Mitsubishi Metal Corp High strength superconductive wire having high critical current density and its manufacture
US6040251A (en) 1988-03-14 2000-03-21 Nextec Applications Inc. Garments of barrier webs
JPH0818836B2 (en) 1988-07-29 1996-02-28 株式会社日立製作所 Oxide superconductor, its manufacturing method and applied products
DE68909395T2 (en) 1989-02-10 1994-02-17 Toshiba Kawasaki Kk Process for the deposition of a thin oxide film.
GB2228682B (en) 1989-02-23 1992-08-12 Ultra Lab Ltd Wound dressing
US5086764A (en) 1989-04-13 1992-02-11 Thomas Gilman Absorbent dressing
US7323581B1 (en) 1990-07-06 2008-01-29 Advanced Technology Materials, Inc. Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition
US5258221A (en) 1990-12-17 1993-11-02 Kimberly-Clark Corporation Polyolefin article
DE69232591T2 (en) 1991-01-23 2002-08-22 Matsushita Electric Ind Co Ltd Water and oil repellent adsorbed film
DE69127070T2 (en) 1991-05-01 1998-02-12 Ibm Superconducting circuit components with a metallic substrate and their manufacturing processes
US5215635A (en) 1991-12-13 1993-06-01 General Electric Company Method for making silicone gels using ultrasonic energy
US5180845A (en) 1992-04-07 1993-01-19 E. I. Du Pont De Nemours And Company Thermally stable, fluorine-containing organsilanes
US5264722A (en) 1992-06-12 1993-11-23 The United States Of America As Represented By The Secretary Of The Navy Nanochannel glass matrix used in making mesoscopic structures
US5650378A (en) 1992-10-02 1997-07-22 Fujikura Ltd. Method of making polycrystalline thin film and superconducting oxide body
DE69412168T2 (en) 1993-05-14 1998-12-10 Asahi Glass Co Ltd Surface treated substrate and process for its manufacture
US5432151A (en) 1993-07-12 1995-07-11 Regents Of The University Of California Process for ion-assisted laser deposition of biaxially textured layer on substrate
JPH09503989A (en) 1993-07-28 1997-04-22 モナシュ・ユニバーシティー Zirconia particles
US6151610A (en) 1993-12-27 2000-11-21 Digital Equipment Corporation Document display system using a scripting language having container variables setting document attributes
US5736249A (en) 1994-08-16 1998-04-07 Decora, Incorporated Non-stick polymer-coated articles of manufacture
JP3567003B2 (en) 1994-12-19 2004-09-15 株式会社日立製作所 Thallium-based superconducting wire
US6074990A (en) 1994-12-23 2000-06-13 Neocera, Inc. Superconducting garnet thin film system
US5543630A (en) 1995-01-31 1996-08-06 The United States Of America As Represented By The Secretary Of The Air Force High Tc superconducting devices on bi-crystal substrates
US6716795B2 (en) 1999-09-27 2004-04-06 Ut-Battelle, Llc Buffer architecture for biaxially textured structures and method of fabricating same
US6451450B1 (en) 1995-04-10 2002-09-17 Ut-Battelle, Llc Method of depositing a protective layer over a biaxially textured alloy substrate and composition therefrom
US6077344A (en) 1997-09-02 2000-06-20 Lockheed Martin Energy Research Corporation Sol-gel deposition of buffer layers on biaxially textured metal substances
US5741377A (en) 1995-04-10 1998-04-21 Martin Marietta Energy Systems, Inc. Structures having enhanced biaxial texture and method of fabricating same
US5872080A (en) 1995-04-19 1999-02-16 The Regents Of The University Of California High temperature superconducting thick films
US5753934A (en) 1995-08-04 1998-05-19 Tok Corporation Multilayer thin film, substrate for electronic device, electronic device, and preparation of multilayer oxide thin film
US5846912A (en) 1996-01-04 1998-12-08 Lockheed Martin Energy Systems, Inc. Method for preparation of textured YBa2 Cu3 Ox superconductor
US6657229B1 (en) 1996-05-28 2003-12-02 United Microelectronics Corporation Semiconductor device having multiple transistors sharing a common gate
EP0872579B2 (en) 1996-10-23 2014-11-26 Fujikura, Ltd. Process for preparing polycrystalline thin film, process for preparing oxide superconductor, and apparatus therefor
EP0909340B1 (en) 1996-12-06 2003-03-19 Theva Dünnschichttechnik GmbH Multilayered material, process and device for producing a multilayered material
JPH10259038A (en) 1997-01-24 1998-09-29 Samsung Corning Co Ltd Durable water-repelling glass and its production
US5691392A (en) 1997-02-05 1997-11-25 Ppg Industries, Inc. Stable particulate dispersions
US6440211B1 (en) 1997-09-02 2002-08-27 Ut-Battelle, Llc Method of depositing buffer layers on biaxially textured metal substrates
US6270908B1 (en) 1997-09-02 2001-08-07 Ut-Battelle, Llc Rare earth zirconium oxide buffer layers on metal substrates
US6256521B1 (en) 1997-09-16 2001-07-03 Ut-Battelle, Llc Preferentially oriented, High temperature superconductors by seeding and a method for their preparation
DE19740964A1 (en) 1997-09-17 1999-03-18 Access Ev Substrate especially for supporting a superconductive functional layer
US5964966A (en) 1997-09-19 1999-10-12 Lockheed Martin Energy Research Corporation Method of forming biaxially textured alloy substrates and devices thereon
US6384293B1 (en) 1997-09-30 2002-05-07 Coloplast A/S Dressing
US6231779B1 (en) 1997-10-20 2001-05-15 Massachusetts Institute Of Technology Piezoelectric actuators and method of making same
US20020036282A1 (en) 1998-10-19 2002-03-28 Yet-Ming Chiang Electromechanical actuators
US6190752B1 (en) 1997-11-13 2001-02-20 Board Of Trustees Of The Leland Stanford Junior University Thin films having rock-salt-like structure deposited on amorphous surfaces
GB9726636D0 (en) 1997-12-17 1998-02-18 Dow Corning Method for preparing hydrophobic clay
US6218015B1 (en) 1998-02-13 2001-04-17 World Properties, Inc. Casting mixtures comprising granular and dispersion fluoropolymers
US6159610A (en) 1998-06-12 2000-12-12 Ut-Battelle, Llc Buffer layers on metal surfaces having biaxial texture as superconductor substrates
US6150034A (en) 1998-06-12 2000-11-21 Ut-Battelle, Llc Buffer layers on rolled nickel or copper as superconductor substrates
US6261704B1 (en) 1998-06-12 2001-07-17 Ut-Battelle, Llc MgO buffer layers on rolled nickel or copper as superconductor substrates
US6154599A (en) 1998-06-16 2000-11-28 Christopher M. Rey Superconducting wires fabricated using thin optical fibers
US6180570B1 (en) 1998-07-09 2001-01-30 Ut-Battelle, Llc Biaxially textured articles formed by plastic deformation
ATE354811T1 (en) 1998-08-12 2007-03-15 Rofin Australia Pty Ltd LIQUID LIGHT GUIDE
EP0985392A1 (en) 1998-09-07 2000-03-15 The Procter & Gamble Company Absorbent article having super hydrophobic layers
US6114287A (en) 1998-09-30 2000-09-05 Ut-Battelle, Llc Method of deforming a biaxially textured buffer layer on a textured metallic substrate and articles therefrom
KR100276003B1 (en) 1998-09-30 2000-12-15 윤덕용 Apparatus for forming thin film on a tape-type substrate and method for forming the same
US6296701B1 (en) 1998-09-30 2001-10-02 Ut-Battelle, Llc Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom
JP2000144116A (en) 1998-11-10 2000-05-26 Central Glass Co Ltd Super water repellent film
US6174352B1 (en) 1998-11-24 2001-01-16 Uop Llc Round profile multi-capillary assembly and method of making
US7033637B1 (en) 1999-01-12 2006-04-25 Microcoating Technologies, Inc. Epitaxial thin films
US6553788B1 (en) 1999-02-23 2003-04-29 Nippon Sheet Glass Co., Ltd. Glass substrate for magnetic disk and method for manufacturing
US6331329B1 (en) 1999-05-17 2001-12-18 University Of Massachusetts Surface modification using hydridosilanes to prepare monolayers
US6607313B1 (en) 1999-06-23 2003-08-19 Jds Fitel Inc. Micro-optic delay element for use in a polarization multiplexed system
US6155900A (en) 1999-10-12 2000-12-05 Micron Technology, Inc. Fiber spacers in large area vacuum displays and method for manufacture
US6451437B1 (en) 1999-10-13 2002-09-17 Chugoku Marine Paints, Ltd. Curable composition, coating composition, paint, antifouling paint, cured product thereof and method of rendering base material antifouling
JP2001207123A (en) 1999-11-16 2001-07-31 Sentan Kagaku Gijutsu Incubation Center:Kk Film having high hardness and high droplet slidability and method for producing the same
US6537689B2 (en) 1999-11-18 2003-03-25 American Superconductor Corporation Multi-layer superconductor having buffer layer with oriented termination plane
WO2001040536A1 (en) 1999-11-29 2001-06-07 Fujikura Ltd. Polycrystalline thin film and method for preparation thereof, and superconducting oxide and method for preparation thereof
US6675229B1 (en) 1999-11-29 2004-01-06 Lucent Technologies Inc. Methods and apparatus for providing quality of service for legacy applications
US7193015B1 (en) 2000-03-24 2007-03-20 Mabry Joseph M Nanostructured chemicals as alloying agents in fluorinated polymers
DE10016485A1 (en) 2000-04-01 2001-10-11 Dmc2 Degussa Metals Catalysts Glass, ceramic and metal substrates with a self-cleaning surface, process for their production and their use
US7491286B2 (en) 2000-04-21 2009-02-17 International Business Machines Corporation Patterning solution deposited thin films with self-assembled monolayers
US6331199B1 (en) 2000-05-15 2001-12-18 Ut-Battelle, Llc Biaxially textured articles formed by powder metallurgy
US6447714B1 (en) 2000-05-15 2002-09-10 Ut-Battelle, Llc Method for forming biaxially textured articles by powder metallurgy
US8119571B2 (en) 2006-08-03 2012-02-21 Amit Goyal High performance electrical, magnetic, electromagnetic and electrooptical devices enabled by three dimensionally ordered nanodots and nanorods
US6784139B1 (en) 2000-07-10 2004-08-31 Applied Thin Films, Inc. Conductive and robust nitride buffer layers on biaxially textured substrates
US6361598B1 (en) 2000-07-20 2002-03-26 The University Of Chicago Method for preparing high temperature superconductor
US6916301B1 (en) 2000-07-24 2005-07-12 Kenneth Clare Elastomeric waterproof cast and bandage cover
US6562715B1 (en) 2000-08-09 2003-05-13 Applied Materials, Inc. Barrier layer structure for copper metallization and method of forming the structure
US20030036483A1 (en) 2000-12-06 2003-02-20 Arendt Paul N. High temperature superconducting thick films
DE10063739B4 (en) 2000-12-21 2009-04-02 Ferro Gmbh Substrates with self-cleaning surface, process for their preparation and their use
US6673646B2 (en) 2001-02-28 2004-01-06 Motorola, Inc. Growth of compound semiconductor structures on patterned oxide films and process for fabricating same
JP4294884B2 (en) 2001-04-05 2009-07-15 本田技研工業株式会社 Fuel cell power supply
US7056455B2 (en) 2001-04-06 2006-06-06 Carnegie Mellon University Process for the preparation of nanostructured materials
DE10118345A1 (en) 2001-04-12 2002-10-17 Creavis Tech & Innovation Gmbh Properties of structure formers for self-cleaning surfaces and the production of the same
DE10118349A1 (en) 2001-04-12 2002-10-17 Creavis Tech & Innovation Gmbh Self-cleaning surfaces through hydrophobic structures and processes for their production
DE10118351A1 (en) 2001-04-12 2002-10-17 Creavis Tech & Innovation Gmbh Self-cleaning surfaces through hydrophobic structures and processes for their production
US6552842B2 (en) 2001-04-13 2003-04-22 Ut-Battelle, Llc Reflective coherent spatial light modulator
US6657792B2 (en) 2001-05-08 2003-12-02 Pentax Corporation Zoom lens system
FR2824941B1 (en) 2001-05-16 2003-12-12 Air Liquide DISTRIBUTION SYSTEM AND STORAGE OF GAS BOTTLES
ATE334809T1 (en) 2001-05-29 2006-08-15 Essilor Int METHOD FOR PRODUCING A COATED OPTICAL OBJECT
US20020187082A1 (en) 2001-06-06 2002-12-12 Chang-Yu Wu Photocatalyst coated magnetic composite particle
US6617283B2 (en) 2001-06-22 2003-09-09 Ut-Battelle, Llc Method of depositing an electrically conductive oxide buffer layer on a textured substrate and articles formed therefrom
DE10134477A1 (en) 2001-07-16 2003-02-06 Creavis Tech & Innovation Gmbh Self-cleaning surfaces through hydrophobic structures and processes for their production
DE10138036A1 (en) 2001-08-03 2003-02-20 Creavis Tech & Innovation Gmbh Structured self-cleaning surface is hydrophobic, and has a pattern of raised surfaces with lower burrs linking neighboring projections
US6610414B2 (en) 2001-08-16 2003-08-26 Ut-Battelle, Llc Biaxially textured articles formed by power metallurgy
US6645313B2 (en) 2002-02-22 2003-11-11 Ut-Battelle, Llc Powder-in-tube and thick-film methods of fabricating high temperature superconductors having enhanced biaxial texture
US6670308B2 (en) 2002-03-19 2003-12-30 Ut-Battelle, Llc Method of depositing epitaxial layers on a substrate
JP2003286196A (en) 2002-03-28 2003-10-07 Enex Co Ltd Sustained release porous fine particle and method for producing the same
US6756139B2 (en) 2002-03-28 2004-06-29 The Regents Of The University Of California Buffer layers on metal alloy substrates for superconducting tapes
JP2003296196A (en) 2002-04-01 2003-10-17 Fuji Photo Film Co Ltd Information storage medium and digital camera
US6833186B2 (en) 2002-04-10 2004-12-21 Ppg Industries Ohio, Inc. Mineral-filled coatings having enhanced abrasion resistance and wear clarity and methods for using the same
US7951853B2 (en) 2002-05-02 2011-05-31 Smart Anti-Microbial Solutions, Llc Polymer-based antimicrobial agents, methods of making said agents, and products incorporating said agents
AU2003231304A1 (en) 2002-05-09 2003-11-11 Dow Global Technologies Inc. Breathable articles
PL205816B1 (en) 2002-05-29 2010-05-31 Erlus Ag Ceramic moulded body comprising a photocatalytic coating and method for producing the same
US7087113B2 (en) 2002-07-03 2006-08-08 Ut-Battelle, Llc Textured substrate tape and devices thereof
JP2006502837A (en) 2002-07-23 2006-01-26 シエル・インターナシヨネイル・リサーチ・マーチヤツピイ・ベー・ウイ Hydrophobic surface treatment composition, and production and use thereof
US6899928B1 (en) 2002-07-29 2005-05-31 The Regents Of The University Of California Dual ion beam assisted deposition of biaxially textured template layers
US7068898B2 (en) 2002-09-05 2006-06-27 Nanosys, Inc. Nanocomposites
US20070237812A1 (en) 2006-04-11 2007-10-11 Tyco Healthcare Group Multi-layer wound dressings
US7020899B1 (en) 2002-10-23 2006-04-04 Frank Vincent Carlopio Fluid impervious cast protector
DE10254718A1 (en) 2002-11-23 2004-06-03 Creavis Gesellschaft Für Technologie Und Innovation Mbh Hydrophobic, permeable composite material with self-cleaning properties
US6764770B2 (en) 2002-12-19 2004-07-20 Ut-Battelle, Llc Buffer layers and articles for electronic devices
US7265256B2 (en) 2003-01-17 2007-09-04 Ther Memorial Hospital Bandaging device for sequestering a wound or inoculation site
JP2006514160A (en) 2003-02-20 2006-04-27 ナムローゼ・フェンノートシャップ・ベーカート・ソシエテ・アノニム Manufacturing method of sputter target
AU2003901734A0 (en) 2003-04-11 2003-05-01 Unisearch Limited Transparent superhydrophobic coating
AU2003901735A0 (en) 2003-04-11 2003-05-01 Unisearch Limited Durable superhydrophobic coating
US6867447B2 (en) 2003-05-20 2005-03-15 Texas Instruments Incorporated Ferroelectric memory cell and methods for fabricating the same
ATE422525T1 (en) 2003-05-20 2009-02-15 Dsm Ip Assets Bv METHOD FOR PRODUCING NANOSTRUCTURED SURFACE COATINGS, THEIR COATINGS AND OBJECTS CONTAINING THE COATING
IL157437A0 (en) 2003-07-14 2004-03-28 Superseal Ltd Superseal Ltd Hydrophobic aggregate and applications thereof
US6740421B1 (en) 2003-07-14 2004-05-25 Ut-Battelle, Llc Rolling process for producing biaxially textured substrates
US6984857B2 (en) 2003-07-16 2006-01-10 Texas Instruments Incorporated Hydrogen barrier for protecting ferroelectric capacitors in a semiconductor device and methods for fabricating the same
US6884527B2 (en) 2003-07-21 2005-04-26 The Regents Of The University Of California Biaxially textured composite substrates
DE60328421D1 (en) 2003-09-02 2009-08-27 Univ Sabanci PROCESS FOR PREPARING SUPER HYDROPHOBIC SURFACES, SURFACES PRODUCED THEREFROM AND USE THEREOF
WO2005039753A1 (en) 2003-10-15 2005-05-06 Dow Corning Ireland Limited Fonctionalisation of particles
US8034173B2 (en) 2003-12-18 2011-10-11 Evonik Degussa Gmbh Processing compositions and method of forming the same
US7828889B2 (en) 2003-12-18 2010-11-09 The Clorox Company Treatments and kits for creating transparent renewable surface protective coatings
US8501642B2 (en) 2004-02-19 2013-08-06 Toray Industries, Inc. Nano-fiber compound solutions, emulsions and gels, production method thereof, Nano-fiber synthetic papers, and production method thereof
JP2007523096A (en) 2004-02-23 2007-08-16 張才騰 Metal complex solution and its application
CA2559999A1 (en) 2004-03-16 2005-09-29 Maximilian Munte Mobile paper record processing system
US7432229B2 (en) 2004-03-23 2008-10-07 Ut-Battelle, Llc Superconductors on iridium substrates and buffer layers
US6872988B1 (en) 2004-03-23 2005-03-29 Ut-Battelle, Llc Semiconductor films on flexible iridium substrates
US7718574B2 (en) 2004-04-08 2010-05-18 Superpower, Inc. Biaxially-textured film deposition for superconductor coated tapes
CN1942545B (en) 2004-04-12 2010-12-01 大金工业株式会社 Anti-fouling coating composition
DE102004026344B4 (en) 2004-05-26 2008-10-16 Saint-Gobain Sekurit Deutschland Gmbh & Co. Kg Method for producing a hydrophobic coating, device for carrying out the method and substrate having a hydrophobic coating
US8501277B2 (en) 2004-06-04 2013-08-06 Applied Microstructures, Inc. Durable, heat-resistant multi-layer coatings and coated articles
US7121998B1 (en) 2004-06-08 2006-10-17 Eurica Califorrniaa Vented microcradle for prenidial incubator
JP4818923B2 (en) 2004-07-14 2011-11-16 新日本製鐵株式会社 Multilayer coating method and product having multilayer coating
US7258731B2 (en) 2004-07-27 2007-08-21 Ut Battelle, Llc Composite, nanostructured, super-hydrophobic material
US7150904B2 (en) 2004-07-27 2006-12-19 Ut-Battelle, Llc Composite, ordered material having sharp surface features
WO2006011512A1 (en) 2004-07-28 2006-02-02 Dainippon Ink And Chemicals, Inc. Organic-inorganic composite coating film and aqueous coating composition
US20060029808A1 (en) 2004-08-06 2006-02-09 Lei Zhai Superhydrophobic coatings
US7642309B2 (en) 2004-08-09 2010-01-05 Behr Process Corporation Exterior paint formulation
US7338907B2 (en) 2004-10-04 2008-03-04 Sharp Laboratories Of America, Inc. Selective etching processes of silicon nitride and indium oxide thin films for FeRAM device applications
US20090318717A1 (en) 2004-10-12 2009-12-24 Jorma Virtanen Novel hybride materials and related methods and devices
US7147659B2 (en) 2004-10-28 2006-12-12 Cordis Neurovascular, Inc. Expandable stent having a dissolvable portion
US7659230B2 (en) 2004-11-24 2010-02-09 E.I. Du Pont De Nemours And Company Thermoplastic resin composition containing mesoporous powders absorbed with lubricating oils
US7208044B2 (en) 2004-11-24 2007-04-24 Mark A. Zurbuchen Topotactic anion exchange oxide films and method of producing the same
US7906177B2 (en) 2004-12-22 2011-03-15 The Board Of Regents Of The University Of Oklahoma Method for making an article hydrophobic and oleophobic as well as articles made therefrom and their use
CN100540153C (en) 2005-02-28 2009-09-16 财团法人工业技术研究院 The hydrophobic structure of substrate surface and method for making thereof
US7341978B2 (en) 2005-03-04 2008-03-11 Lsi Logic Corporation Superconductor wires for back end interconnects
US20060216476A1 (en) 2005-03-28 2006-09-28 General Electric Company Articles having a surface with low wettability and method of making
JP2006292522A (en) 2005-04-08 2006-10-26 Denso Corp Route guidance system
US7524531B2 (en) 2005-04-27 2009-04-28 Ferro Corporation Structured self-cleaning surfaces and method of forming same
US7527832B2 (en) 2005-04-27 2009-05-05 Ferro Corporation Process for structuring self-cleaning glass surfaces
US7820064B2 (en) 2005-05-10 2010-10-26 The Regents Of The University Of California Spinodally patterned nanostructures
US7267881B2 (en) 2005-05-19 2007-09-11 Rolf Thomas Weberg Protective surface modification system and application to substrates
US7553799B2 (en) 2005-06-02 2009-06-30 Ut-Battelle, Llc Chemical solution deposition method of fabricating highly aligned MgO templates
DE102005028395A1 (en) 2005-06-20 2006-12-28 Vega Grieshaber Kg Component for e.g. pressure measuring device, has coating with micro-smooth upper surface, where coating is divided into two areas of different material concentration, and one area has anti-adhesive property
US20070027232A1 (en) 2005-07-27 2007-02-01 Chemcoat, Inc. Coating compositions incorporating nanotechnology and methods for making same
US8034745B2 (en) 2005-08-01 2011-10-11 Amit Goyal High performance devices enabled by epitaxial, preferentially oriented, nanodots and/or nanorods
US7930369B2 (en) 2005-10-19 2011-04-19 Apple Inc. Remotely configured media device
US20070104922A1 (en) 2005-11-08 2007-05-10 Lei Zhai Superhydrophilic coatings
FR2893266B1 (en) 2005-11-14 2007-12-21 Commissariat Energie Atomique SUPERHYDROPHIL OR SUPERHYDROPHOBIC PRODUCT, PROCESS FOR PRODUCING THE SAME AND USE THEREOF
US8067065B2 (en) 2005-12-08 2011-11-29 Toyota Motor Engineering & Manufacturing North America, Inc. Fibrillar, nanotextured coating and method for its manufacture
US20080221009A1 (en) 2006-01-30 2008-09-11 Subbareddy Kanagasabapathy Hydrophobic self-cleaning coating compositions
US20080221263A1 (en) 2006-08-31 2008-09-11 Subbareddy Kanagasabapathy Coating compositions for producing transparent super-hydrophobic surfaces
WO2007102960A2 (en) 2006-01-30 2007-09-13 Ashland Licensing And Intellectual Property Llc Hydrophobic self-cleaning coating compositions
US20070184247A1 (en) 2006-02-03 2007-08-09 Simpson John T Transparent, super-hydrophobic, disordered composite material
US20080213853A1 (en) 2006-02-27 2008-09-04 Antonio Garcia Magnetofluidics
US20090011222A1 (en) 2006-03-27 2009-01-08 Georgia Tech Research Corporation Superhydrophobic surface and method for forming same
US20070231542A1 (en) 2006-04-03 2007-10-04 General Electric Company Articles having low wettability and high light transmission
EP1844863A1 (en) 2006-04-12 2007-10-17 General Electric Company Article having a surface with low wettability and its method of making
US8193285B2 (en) 2006-05-16 2012-06-05 Nippon Soda Co., Ltd. Block copolymers
US8354160B2 (en) 2006-06-23 2013-01-15 3M Innovative Properties Company Articles having durable hydrophobic surfaces
JP2009542359A (en) 2006-06-29 2009-12-03 ボストン サイエンティフィック リミテッド Medical device with selective covering
US20080015298A1 (en) 2006-07-17 2008-01-17 Mingna Xiong Superhydrophobic coating composition and coated articles obtained therefrom
US7923075B2 (en) 2006-07-17 2011-04-12 The Hong Kong University Of Science And Technology Methods for preparing nanotextured surfaces and applications thereof
WO2008045022A2 (en) 2006-08-09 2008-04-17 Luna Innovations Incorporated Additive particles having superhydrophobic characteristics and coatings and methods of making and using the same
US8202614B2 (en) 2006-08-09 2012-06-19 Luna Innovations Incorporated Additive particles having superhydrophobic characteristics and coatings and methods of making and using the same
US7553514B2 (en) * 2006-08-28 2009-06-30 3M Innovative Properties Company Antireflective article
IL178239A (en) 2006-09-21 2012-02-29 Eduard Bormashenko Method of manufacturing superhydrophobic nanotextured polymer or metal surfaces
DE102006050381A1 (en) 2006-10-25 2008-05-08 Bayer Materialscience Ag Process for the separation of an organic from an electrolyte-containing aqueous and organic phase
DE102006054158A1 (en) 2006-11-16 2008-05-21 Wacker Chemie Ag Ultrahydrophobic coatings
JP2008127214A (en) 2006-11-16 2008-06-05 Honda Motor Co Ltd Silicon carbide nanostructure and its manufacturing method
WO2008063134A1 (en) 2006-11-24 2008-05-29 Agency For Science, Technology And Research Method of producing a pattern of discriminative wettability
DE102007039652A1 (en) 2006-12-05 2008-06-12 Henkel Kgaa Agent for the treatment of hard surfaces
AU2006351753B2 (en) 2006-12-11 2012-12-20 Essity Hygiene And Health Aktiebolag Absorbent article with a strongly hydrophobic layer
ES2302462B1 (en) 2006-12-27 2009-06-05 Consejo Superior Investigacion Cientificas PROCEDURE FOR THE FUNCTIONALIZATION OF A SUBSTRATE, FUNCTIONALIZED SUBSTRATE AND DEVICE CONTAINING IT.
EP2129736A2 (en) 2007-02-23 2009-12-09 Tex-a-tec AG Anti-static multi-functional layer and method for use of the same
DE102007009512A1 (en) 2007-02-27 2008-08-28 Friedrich-Schiller-Universität Jena Optical element with anti-fogging polymer layer, for use e.g. as spectacle lenses or display covers, has a reflection-reducing nano-structure formed on the surface of the polymer layer
KR100910613B1 (en) 2007-03-08 2009-08-04 한국과학기술원 Apparatus for continuous fabrication of superconducting tapes
US20080248263A1 (en) 2007-04-02 2008-10-09 Applied Microstructures, Inc. Method of creating super-hydrophobic and-or super-hydrophilic surfaces on substrates, and articles created thereby
EP2444545B1 (en) 2007-04-17 2014-03-12 HeiQ Materials AG Water, oil and dirt repellent finishing on fibres and textile area-measured material
WO2008137973A1 (en) 2007-05-08 2008-11-13 Erik Jonas Jarvholm Water repellant golf balls containing a hydrophobic or superhydrophobic outer layer or coating
US8216674B2 (en) 2007-07-13 2012-07-10 Ut-Battelle, Llc Superhydrophobic diatomaceous earth
US8193406B2 (en) 2007-05-17 2012-06-05 Ut-Battelle, Llc Super-hydrophobic bandages and method of making the same
US8741158B2 (en) 2010-10-08 2014-06-03 Ut-Battelle, Llc Superhydrophobic transparent glass (STG) thin film articles
US20080286556A1 (en) 2007-05-17 2008-11-20 D Urso Brian R Super-hydrophobic water repellant powder
EP2011817B1 (en) 2007-07-04 2009-11-18 Evonik Degussa GmbH Moulded part with a super hydrophobic surface with high compressive and shearing resistance
US9539149B2 (en) 2007-07-13 2017-01-10 Ut-Battelle, Llc Superhydrophobic, diatomaceous earth comprising bandages and method of making the same
TWI349701B (en) 2007-07-26 2011-10-01 Ind Tech Res Inst Superhydrophobic self-cleaning powders and fabrication method thereof
WO2009018327A2 (en) 2007-07-30 2009-02-05 Soane Labs, Llc Ultraphobic compositions and methods of use
WO2009020633A2 (en) 2007-08-07 2009-02-12 President And Fellows Of Harvard College Metal oxide coating on surfaces
US7879161B2 (en) 2007-08-08 2011-02-01 Ut-Battelle, Llc Strong, non-magnetic, cube textured alloy substrates
US20090042469A1 (en) 2007-08-10 2009-02-12 Ut-Battelle, Llc Superhydrophilic and Superhydrophobic Powder Coated Fabric
KR101497936B1 (en) 2007-08-28 2015-03-03 에이전시 포 사이언스, 테크놀로지 앤드 리서치 A method of manufacturing an organic electronic or optoelectronic device
WO2009029979A1 (en) 2007-09-03 2009-03-12 Deakin University Coating composition and process for the preparation thereof
US8227082B2 (en) 2007-09-26 2012-07-24 Ut-Battelle, Llc Faceted ceramic fibers, tapes or ribbons and epitaxial devices therefrom
US8211969B2 (en) 2007-10-10 2012-07-03 University Of Central Florida Research Foundation, Inc. Dispersions of carbon nanotubes in copolymer solutions and functional composite materials and coatings therefrom
US8324285B2 (en) 2007-11-06 2012-12-04 The Boeing Company Hydrophobic and/or oleophobic open cell polyimide acoustic and thermal insulation foams and methods of making
US20090136741A1 (en) 2007-11-28 2009-05-28 Toyota Motor Engineering & Manufacturing North America, Inc. Nanoscopically modified superhydrophobic coating
WO2009073901A2 (en) 2007-12-05 2009-06-11 Corrine Jean Greyling A polymeric high voltage insulator with a hard, hydrophobic surface
US9993403B2 (en) 2007-12-20 2018-06-12 Avon Products, Inc. Cosmetic compositions for imparting superhydrophobic films
CN101225226B (en) 2008-01-28 2010-11-24 浙江大学 Method for preparing water-dispersion montmorillonite/organic block polyurethane nano composite material and uses thereof
WO2009094768A1 (en) 2008-01-28 2009-08-06 The University Of Western Ontario Phosphonium ionic liquids and coatings made therefrom
US7754279B2 (en) 2008-02-05 2010-07-13 Ut-Battelle, Llc Article coated with flash bonded superhydrophobic particles
US20110008401A1 (en) 2008-03-04 2011-01-13 Avon Products, Inc. Cosmetic Compositions For Imparting Superhydrophobic Films
CN101544476A (en) 2008-03-28 2009-09-30 皮尔金顿集团有限公司 Super-hydrophobic transparent coating and preparation method thereof
GB0806443D0 (en) 2008-04-09 2008-05-14 Ucl Business Plc polymer films
US8870839B2 (en) 2008-04-22 2014-10-28 The Procter & Gamble Company Disposable article including a nanostructure forming material
US8999307B2 (en) 2008-05-16 2015-04-07 Avon Products, Inc. Compositions for imparting superhydrophobicity
CN102056739B (en) 2008-06-12 2013-07-31 Dic株式会社 Structures coated with ultrahydrophobic nanostructure composite and processes for producing the same
ES2556356T3 (en) 2008-06-12 2016-01-15 Avery Dennison Corporation Material and method to produce it
DE102008028141A1 (en) 2008-06-13 2009-12-17 Audi Ag glass product
WO2009158046A1 (en) 2008-06-27 2009-12-30 The Board Of Trustees Of The University Of Illinois Polymer composite formulations from poly(vinylidine fluoride) (pvdf) and cyanoacrylates (ca) and methods for use in large-area applications
US20100004373A1 (en) 2008-07-02 2010-01-07 Jingxu Zhu Compositions and processes for producing durable hydrophobic and/or olephobic surfaces
WO2010000493A2 (en) 2008-07-04 2010-01-07 Universite De Liege Interface Entreprises Universite Inorganic-binding peptides and quality control methods using them
WO2010017558A2 (en) 2008-08-08 2010-02-11 The Board Of Trustees Of The University Of Illinois Composite material compositions and methods
US20110195181A1 (en) 2008-08-11 2011-08-11 Dic Corporation Superhydrophobic powders, structure with superhydrophobic surface, and processes for producing these
WO2010022107A2 (en) 2008-08-18 2010-02-25 The Regents Of The University Of California Nanostructured superhydrophobic, superoleophobic and/or superomniphobic coatings, methods for fabrication, and applications thereof
US8906814B2 (en) 2008-08-18 2014-12-09 Massachusetts Institute Of Technology Highly reactive multilayer assembled coating of metal oxides on organic and inorganic substrates
CA2734864A1 (en) 2008-08-21 2010-02-25 Innova Dynamics, Inc. Enhanced surfaces, coatings, and related methods
RU2426771C2 (en) 2008-09-11 2011-08-20 Общество с ограниченной ответственностью ФИРМА "БКМ" Lubricant composition
US20100068509A1 (en) 2008-09-17 2010-03-18 Nanochip, Inc. Media having improved surface smoothness and methods for making the same
CA2776672A1 (en) 2008-10-03 2010-04-08 Chamelic Ltd Ab diblock copolymers and applications for their use
WO2010042555A2 (en) 2008-10-06 2010-04-15 The Brigham And Women's Hospital, Inc. Particles with multiple functionalized surface domains
US8247325B2 (en) 2008-10-10 2012-08-21 Uchicago Argonne, Llc Direct growth of metal nanoplates on semiconductor substrates
US8784385B2 (en) 2008-10-31 2014-07-22 The Invention Science Fund I, Llc Frozen piercing implements and methods for piercing a substrate
US8636826B2 (en) 2009-11-03 2014-01-28 Societe Bic Hydrogen membrane separator
DE102008044396A1 (en) 2008-12-05 2010-06-10 Wacker Chemie Ag Highly hydrophobic coatings
DE102009022628A1 (en) 2008-12-05 2010-06-10 Evonik Goldschmidt Gmbh Method for modifying surfaces
WO2010069731A1 (en) 2008-12-16 2010-06-24 Unilever Nv Method and composition for the treatment of a substrate
US8409448B2 (en) 2009-01-13 2013-04-02 The University Of Akron Mixed hydrophilic/hydrophobic fiber media for liquid-liquid coalescence
DE102009001675A1 (en) 2009-03-19 2010-09-23 Eberhard-Karls-Universität Tübingen cutting tool
JP5766178B2 (en) 2009-03-24 2015-08-19 ザ・ユニバーシティ・オブ・シカゴThe University Of Chicago Slipchip apparatus and method
WO2010120531A2 (en) 2009-04-01 2010-10-21 Cornell University Conformal particle coatings on fiber materials for use in spectroscopic methods for detecting targets of interest and methods based thereon
US20100304086A1 (en) 2009-05-29 2010-12-02 Alain Robert Emile Carre Super non-wetting, anti-fingerprinting coatings for glass
US20120058355A1 (en) 2009-06-02 2012-03-08 Hyomin Lee Coatings
KR101100380B1 (en) 2009-06-10 2011-12-30 도레이첨단소재 주식회사 A method for treating high hydrophobic surface of substrate
US20130146459A1 (en) 2009-06-16 2013-06-13 Massachusetts Institute Of Technology Multiphase non-linear electrokinetic devices
DE102009028640A1 (en) 2009-08-19 2011-02-24 Evonik Goldschmidt Gmbh Curable composition containing urethane-containing silylated polymers and their use in sealants and adhesives, binders and / or surface modifiers
WO2011022678A1 (en) 2009-08-21 2011-02-24 The University Of South Dakota Fluorinated aromatic materials and their use in optoelectronics
US7973997B2 (en) 2009-08-31 2011-07-05 Korea University Research And Business Foundation Transparent structures
WO2011034678A1 (en) 2009-09-21 2011-03-24 Arizona Board Of Regents, A Body Corporate Of The State Of Arizona Use of superhydrophobic surfaces for liquid agglutination assays
US8896077B2 (en) 2009-10-23 2014-11-25 The Board Of Trustees Of The Leland Stanford Junior University Optoelectronic semiconductor device and method of fabrication
US8834964B2 (en) 2009-12-11 2014-09-16 Ngimat, Co. Process for forming high surface area embedded coating with high abrasion resistance
GB2476093A (en) 2009-12-11 2011-06-15 Manvers Engineering Ltd Oil Collecting Device Made Of Hydrophobic And Oleophilic Materials.
WO2011084811A1 (en) 2009-12-21 2011-07-14 Innovative Surface Technologies, Inc. Coating agents and coated articles
US8853317B2 (en) 2010-03-01 2014-10-07 Cabot Corporation Coating comprising multipopulation fumed silica particles
US8496997B2 (en) 2010-03-10 2013-07-30 The University Of Melbourne Process for the preparation of a cross-linked multilayer film
US20110277393A1 (en) 2010-05-11 2011-11-17 Mitek Holdings, Inc. Water-Shedding Flashings
US9125625B2 (en) 2010-06-10 2015-09-08 The Regents Of The University Of California Textile-based printable electrodes for electrochemical sensing
WO2011163556A2 (en) 2010-06-24 2011-12-29 Massachusetts Institute Of Technology Conductive polymer on a textured or plastic substrate
EP2591060B1 (en) 2010-07-09 2016-12-21 Luna Innovations Incorporated Coating systems capable of forming ambiently cured highly durable hydrophobic coatings on substrates
AU2011282218A1 (en) 2010-07-19 2013-02-28 President And Fellows Of Harvard College Hierarchically structured surfaces to control wetting characteristics
ITRM20100407A1 (en) 2010-07-22 2012-01-23 Fabio Cipri MEMBRANES AND PROCEDURE FOR THEIR REALIZATION.
DE102010038768A1 (en) 2010-08-02 2012-02-02 Evonik Goldschmidt Gmbh Modified alkoxylation products having at least one non-terminal alkoxysilyl group with increased storage stability and increased extensibility of the polymers prepared using them
DE102010038774A1 (en) 2010-08-02 2012-02-02 Evonik Goldschmidt Gmbh Modified alkoxylation products having at least one non-terminal alkoxysilyl group, with increased storage stability and increased extensibility of the polymers prepared using them
US8119314B1 (en) 2010-08-12 2012-02-21 Xerox Corporation Imaging devices comprising structured organic films
US8119315B1 (en) 2010-08-12 2012-02-21 Xerox Corporation Imaging members for ink-based digital printing comprising structured organic films
US20130202866A1 (en) 2010-09-30 2013-08-08 The Trustees Of The University Of Pennsylvania Mechanically stable nanoparticle thin film coatings and methods of producing the same
US11292919B2 (en) 2010-10-08 2022-04-05 Ut-Battelle, Llc Anti-fingerprint coatings
US8497021B2 (en) 2010-10-08 2013-07-30 Ut-Battelle, Llc Superoleophilic particles and coatings and methods of making the same
WO2012054039A1 (en) 2010-10-21 2012-04-26 Hewlett-Packard Development Company, L.P. Article with controlled wettability
US9221076B2 (en) 2010-11-02 2015-12-29 Ut-Battelle, Llc Composition for forming an optically transparent, superhydrophobic coating

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012100099A2 (en) * 2011-01-19 2012-07-26 President And Fellows Of Harvard College Slippery surfaces with high pressure stability, optical transparency, and self-healing characteristics

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
3M, "3M Fluorinert Electronic Liquid FC-70", 2000, p. 1-4.Accessed at http://multimedia.3m.com/mws/media/64891O/fluorinert-electronic-liquid-fc-70.pdf. *
Dupont, "Dupont Krytox Performance Lubricants Product Overview", 2002, p. 1-12.Accessed at http://www.vacsysspec.com/files/121193149.pdf. *
FOCtek, "Fused Silica", 2007, p. 1; Accessed at https://web.archive.org/web/20071030032647/http://www.foctek.net/products/optics/Fus_Sil.htm. *

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10906044B2 (en) * 2015-09-02 2021-02-02 Illumina Cambridge Limited Methods of improving droplet operations in fluidic systems with a filler fluid including a surface regenerative silane
EP3470222A4 (en) * 2016-06-13 2019-04-17 Nissan Motor Co., Ltd. Antifouling structure and automotive component using antifouling structure
CN109311266B (en) * 2016-06-13 2021-11-02 日产自动车株式会社 Antifouling structure and automobile part using same
CN109311266A (en) * 2016-06-13 2019-02-05 日产自动车株式会社 Antifouling tectosome and the auto parts for using the antifouling tectosome
US11709155B2 (en) 2017-09-18 2023-07-25 Waters Technologies Corporation Use of vapor deposition coated flow paths for improved chromatography of metal interacting analytes
US11709156B2 (en) 2017-09-18 2023-07-25 Waters Technologies Corporation Use of vapor deposition coated flow paths for improved analytical analysis
WO2019074901A1 (en) * 2017-10-10 2019-04-18 Carlex Glass America, Llc Durable functional coatings
EP3694815A4 (en) * 2017-10-10 2020-11-11 Central Glass Co., Ltd. Improved anti-reflective functional coating for glazings
US11422294B2 (en) * 2017-10-10 2022-08-23 Central Glass Company, Limited Durable functional coatings
US11918936B2 (en) 2020-01-17 2024-03-05 Waters Technologies Corporation Performance and dynamic range for oligonucleotide bioanalysis through reduction of non specific binding
US11603329B2 (en) 2020-04-22 2023-03-14 Waymo Llc Methods for preparing a superomniphobic coating
US11155490B1 (en) * 2020-04-22 2021-10-26 Waymo Llc Superomniphobic thin film
US20220033295A1 (en) * 2020-07-29 2022-02-03 Waymo Llc Superomniphobic Bulk Optical Glass
CN114057400A (en) * 2020-07-29 2022-02-18 伟摩有限责任公司 Super-lyophobic block-shaped optical glass
US11724955B2 (en) * 2020-07-29 2023-08-15 Waymo Llc Superomniphobic bulk optical glass
EP3945080A1 (en) * 2020-07-29 2022-02-02 Waymo Llc Superomniphobic bulk optical glass
US20220290699A1 (en) * 2021-03-15 2022-09-15 Bruce Preston Williams Multi Functional Microstructured Surface Development Three Dimensional Form Solutions in Individual Tile and Multiple Tile Array Configurations
US11815111B2 (en) * 2021-03-15 2023-11-14 Bruce Preston Williams Multi-functional microstructured surface development three dimensional form solutions in individual tile and multiple tile array configurations
CN115582537A (en) * 2022-10-08 2023-01-10 温州医科大学 Preparation method and application of large-size uniform nano noble metal film

Also Published As

Publication number Publication date
WO2015156852A9 (en) 2015-11-12
WO2015156852A2 (en) 2015-10-15
US20180171469A1 (en) 2018-06-21
WO2015156852A3 (en) 2016-01-07
US10844479B2 (en) 2020-11-24

Similar Documents

Publication Publication Date Title
US10844479B2 (en) Transparent omniphobic thin film articles
US20220298361A1 (en) Anti-fingerprint coatings
US11292288B2 (en) Superhydrophobic transparent glass (STG) thin film articles
US9073782B2 (en) Substrate having a self cleaning anti-reflecting coating and method for its preparation
US20070104922A1 (en) Superhydrophilic coatings
KR100482261B1 (en) Substrate having irregularities, application and process for preparing thereof, and process for forming a coating on the substrate
KR101091851B1 (en) A coating composition endowing transparent substrate with anti-reflection effect and a preparing method for transparent substrate with anti-reflection effect using the composition
US20080248263A1 (en) Method of creating super-hydrophobic and-or super-hydrophilic surfaces on substrates, and articles created thereby
US20130216807A1 (en) Optical coating comprising porous silica nanoparticles
CA2279828C (en) Inorganic polymeric material with tantalic acid anhydride base, in particular with high refractive index, mechanically abrasionproof, method of manufacture, optical materials comprising such material
WO2009062140A2 (en) Improved anti-reflective coating
US10450225B2 (en) Low reflective and superhydrophobic or super water-repellent glasses and method of fabricating the same
KR20140098178A (en) Process for making of glass articles with optical and easy-to-clean coatings
WO2012044522A1 (en) Mechanically stable nanoparticle thin film coatings and methods of producing the same
WO2010129807A1 (en) Superhydrophilic nanostructure
US20150376535A1 (en) Water-slidable/oil-slidable film, production method thereof, and articles having the surface coated therewith
US10253190B2 (en) Transparent durable superhydrophobic ceramic coating
WO2012020295A1 (en) Optical elements having long-lasting hydrophilic and anti-fog properties and method for their preparation
Power et al. Versatile Self‐Cleaning Coating Production Through Sol–Gel Chemistry
CN111201455A (en) Coating of objects
US20210031232A1 (en) Transparent superhydrophobic composition
Shang et al. Optically transparent superhydrophobic silica-based coatings
Liao et al. Engineering an Almost All-Waterborne System for Transparent yet Superhydrophobic Surfaces with High Liquid Impalement Resistance
AU2004291564B2 (en) Silica films and method of production thereof
CN112608679A (en) Glass surface atomization scratch-resistant nano coating and preparation method thereof

Legal Events

Date Code Title Description
AS Assignment

Owner name: UT-BATTELLE, LLC, TENNESSEE

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:AYTUG, TOLGA;REEL/FRAME:032698/0716

Effective date: 20140411

AS Assignment

Owner name: U.S. DEPARTMENT OF ENERGY, DISTRICT OF COLUMBIA

Free format text: CONFIRMATORY LICENSE;ASSIGNOR:UT-BATTELLE, LLC;REEL/FRAME:032912/0845

Effective date: 20140423

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION