US20130058823A1 - Screw vacuum pump - Google Patents

Screw vacuum pump Download PDF

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Publication number
US20130058823A1
US20130058823A1 US13/698,691 US201113698691A US2013058823A1 US 20130058823 A1 US20130058823 A1 US 20130058823A1 US 201113698691 A US201113698691 A US 201113698691A US 2013058823 A1 US2013058823 A1 US 2013058823A1
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US
United States
Prior art keywords
rotor
screw
vacuum pump
male rotor
female
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US13/698,691
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English (en)
Inventor
Tadahiro Ohmi
Isao Akutsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tohoku University NUC
Original Assignee
Tohoku University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tohoku University NUC filed Critical Tohoku University NUC
Assigned to NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY reassignment NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: AKUTSU, ISAO, OHMI, TADAHIRO
Publication of US20130058823A1 publication Critical patent/US20130058823A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/402—Plurality of electronically synchronised motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps

Definitions

  • This invention relates to a screw vacuum pump.
  • a screw vacuum pump has a feature that it can be used in a region from the atmospheric pressure to 0.5 Pa and that it is possible to prevent the pressure in the pump from sharply increasing near an outlet port, to prevent abnormal heat generation, and to reduce the power consumption, and has a feature that even if a large amount of product is formed, it is possible to rake out the product to the exterior of the pump by screw tooth surfaces.
  • This conventional screw vacuum pump comprises a male rotor and a female rotor engaging each other, a stator receiving therein the male rotor and the female rotor, a first shaft and a second shaft serving as rotation shafts of the male rotor and the female rotor, bearings for the first shaft and the second shaft, and a drive motor for rotating the first shaft and the second shaft.
  • the bearings and the drive motor are disposed outside the male rotor or the female rotor, i.e. the male rotor or the female rotor, the bearings, and the drive motor are aligned in a rotation-axis longitudinal direction.
  • Patent Document 1 JP-A-2004-263629
  • this invention is intended to solve the conventional problems, that is, it is an object of this invention to achieve a reduction in pump size in the rotation-axis longitudinal direction.
  • a screw vacuum pump of the present invention comprises a male rotor and a female rotor respectively having, on their outer peripheral sides, screw gear portions engaging each other, a stator receiving therein the male rotor and the female rotor, and a drive motor/motors for rotating the male rotor and the female rotor, wherein the screw gear portion of the male rotor, the screw gear portion of the female rotor, and the stator cooperatively form a gas working chamber, the stator has an inlet port and an outlet port adapted to communicate with one end and the other end of the gas working chamber, at least one of the male rotor and the female rotor has a rotor hollow portion which is opened on at least one end face side of the male rotor and/or the female rotor in a rotation-axis longitudinal direction, and the drive motor is at least partially received in the rotor hollow portion, and thus, resolved the foregoing problems.
  • the drive motor/motors is/are at least partially received in the rotor hollow portion/portions, it is possible to reduce the pump size in the rotation-axis longitudinal direction. Further, since it is possible to make most of the drive heat of the drive motor/motors stay inside the male rotor or/and the female rotor and thus to reduce the influence of the drive heat of the drive motor/motors on the pump components other than the male rotor and the female rotor, it is possible to achieve high flexibility of design of the pump components.
  • FIG. 1 is a plan view schematically showing a screw vacuum pump according to a first embodiment of this invention.
  • FIG. 2 is an explanatory diagram conceptually showing circulation paths of lubricating oil.
  • FIG. 3 is a perspective view showing a male rotor.
  • FIG. 4 is an explanatory diagram exemplarily showing screw gear portions of the male rotor and a female rotor.
  • FIG. 5 is a perpendicular-to-axis cross-sectional view of the male rotor and the female rotor.
  • FIG. 6 is a plan view schematically showing a screw vacuum pump according to a second embodiment of this invention.
  • FIG. 7 is a perspective view showing a male rotor of a screw vacuum pump according to a modification of this invention.
  • a screw vacuum pump 100 comprises a pair of a male rotor 110 and a female rotor 120 that are disposed in engagement with each other while maintaining an engagement gap therebetween and are rotated synchronously in opposite directions (driven synchronously by a non-illustrated inverter), a stator 130 receiving therein the male rotor 110 and the female rotor 120 , drive motors 140 A and 140 B for rotating the male rotor 110 and the female rotor 120 , rotation shafts (rotation axes) 150 A and 150 B fixed to the male rotor 110 and the female rotor 120 , bearings 160 Aa, 160 Ab, 160 Ac, 160 Ba, 160 Bb, and 160 Bc for the rotation shafts 150 A and 150 B, a pair of gears 170 A and 170 B (which prevent contact between the male and female screw rotors in abnormality and, in particular, which significantly reduce vibration and noise due to backlash of gears at the
  • the male rotor 110 , the female rotor 120 , and the stator 130 cooperatively form a gas working chamber which transfers and compresses a gas.
  • the male rotor 110 and the female rotor 120 respectively have, on their outer peripheral sides, screw gear portions 111 and 121 which engage each other while maintaining an engagement gap therebetween.
  • the screw gear portions 111 and 121 of the male rotor 110 and the female rotor 120 each comprise an unequal lead unequal inclination angle screw portion 111 a , 121 a disposed on an inlet port 134 side for transferring and compressing a gas, and an equal lead screw portion 111 b , 121 b with one lead or a plurality of leads which is continuous with the unequal lead unequal inclination angle screw portion 111 a , 121 a for transferring the gas.
  • a tooth lead angle changes according to a rotation angle of the male rotor 110 and the female rotor 120 so that the volume of a V-shaped gas working chamber formed by the male rotor 110 , the female rotor 120 , and the stator 130 changes to decrease, thereby carrying out transfer and compression and carrying out compression and exhaust near an outlet port 135 .
  • the male rotor 110 and the female rotor 120 have rotor hollow portions 112 and 122 which are opened on both end face sides of at least one of the male rotor 110 and the female rotor 120 in a rotation-axis longitudinal direction, i.e. which pass through the male rotor 110 and the female rotor 120 in the rotation-axis longitudinal direction.
  • each of the rotor hollow portions 112 and 122 is circular.
  • the stator 130 comprises a stator body portion 131 receiving therein the male rotor 110 and the female rotor 120 , a first support portion 132 fixed to the stator 130 and supporting the drive motors 140 A and 140 B and the bearings 160 Aa, 160 Ab, 160 Ba, and 160 Bb, a second support portion 133 fixed to the stator 130 and supporting the bearings 160 Ac and 160 Bc, and the inlet port 134 and the outlet port 135 formed in the stator body portion 131 for communicating with one end and the other end of a gas working chamber.
  • the first support portion 132 is partially received in the rotor hollow portions 112 and 122 .
  • the drive motors 140 A and 140 B are partially received in the rotor hollow portions 112 and 122 of the male rotor 110 and the female rotor 120 , respectively, and are synchronously controlled by the inverter (not illustrated).
  • the drive motor 140 A is disposed between the bearings 160 Aa and 160 Ab.
  • the drive motor 140 B is disposed between the bearings 160 Ba and 160 Bb.
  • the rotation shafts 150 A and 150 B are partially received in the rotor hollow portions 112 and 122 .
  • the rotation shafts 150 A and 150 B respectively have flange portions 151 A and 151 B extending toward and fixed to inner peripheral walls of the rotor hollow portions 112 and 122 .
  • the bearing mechanisms of the rotation shafts 150 A and 150 B are formed by the bearings 160 Aa and 160 Ba disposed on the inlet port 134 side, the bearings 160 Ac and 160 Bc disposed on the outlet port 135 side, and the bearings 160 Ab and 160 Bb disposed between the bearings 160 Aa and 160 Ac and between the bearings 160 Ba and 160 Bc.
  • the gears 170 A and 170 B are attached to the rotation shafts 150 A and 150 B and function to prevent contact between the screw gear portion 111 of the male rotor 110 and the screw gear portion 121 of the female rotor 120 at the time of occurrence of abnormality and in particular to reduce vibration and noise due to backlash of the screw gear portions 111 and 121 at the time of starting and stopping rotation of the male and female rotors 110 and 120 .
  • the oil supply means 180 serves to supply the lubricating oil to the pump components and, as shown in FIG. 2 , comprises an oil storage portion 181 storing the lubricating oil, push-up heads 182 each for pushing up the lubricating oil from the oil storage portion 181 by centrifugal force and drag effect, and oil flow paths 183 each for supplying the lubricating oil, pushed up by the push-up head 182 , to the pump components.
  • FIG. 2 is a diagram for conceptually explaining the circulation paths of the lubricating oil by hatching the respective portions associated with the circulation paths of the lubricating oil.
  • arrows are given for conceptually explaining the circulation paths of the lubricating oil, but not for showing specific circulation paths of the lubricating oil.
  • the oil storage portion 181 is a space formed in the lower part of the stator 130 for storing the lubricating oil.
  • a cooling pipe 191 of the later-described cooling device 190 is disposed.
  • each push-up head 182 has a through hole passing through in a vertical direction and an inner peripheral surface of this through hole is formed in a tapered shape which increases in diameter from lower to upper.
  • the push-up heads 182 are fixed to lower ends of the rotation shafts 150 A and 150 B so that while the screw vacuum pump 100 is driven, the push-up heads 182 are configured to rotate along with the rotation shafts 150 A and 150 B, thereby pushing up the lubricating oil from the oil storage portion 181 by the tapered inner peripheral surfaces, centrifugal force due to the rotation of the rotation shafts 150 A and 150 B, and the drag effect.
  • Each oil flow path 183 is a circulation path that is formed at a position physically isolated from the above-mentioned gas working chamber, that supplies the lubricating oil, pushed up by the push-up head 182 , to the pump components, and that again returns the lubricating oil, supplied to the pump components, to the oil storage portion 181 .
  • the lubricating oil flows along inner walls defining the oil flow paths 183 and simultaneously flows in the form of mist in the hollow oil flow paths 183 . Specifically, in this embodiment, as shown in FIG.
  • the lubricating oil is pushed up from the oil storage portion 181 by the push-up heads 182 to move upward by centrifugal force in the hollow portions formed in the rotation shafts 150 A and 150 B and is ejected to the outside of the rotation shafts 150 A and 150 B near upper portions of the bearings 160 Aa and 160 Ba. Then, the ejected lubricating oil is supplied into the bearings 160 Aa and 160 Ba, then flows in the form of mist in hollow portions formed between the bearings 160 Aa and 160 Ba and the drive motors 140 A and 140 B and simultaneously flows along inner walls defining the hollow portions, and then is supplied into the drive motors 140 A and 140 B.
  • the lubricating oil exiting the drive motors 140 A and 140 B flows in the form of mist in hollow portions formed between the drive motors 140 A and 140 B and the bearings 160 Ab and 160 Bb and simultaneously flows along inner walls defining the hollow portions, and then is supplied into the bearings 160 Ab and 160 Bb.
  • the lubricating oil exiting the bearings 160 Ab and 160 Bb flows in the form of mist in hollow portions formed between the bearings 160 Ab and 160 Bb and the synchronous gears 170 A and 170 B and simultaneously flows along inner walls defining the hollow portions, and then is supplied to the synchronous gear 170 A, 170 B side.
  • Lubricating oil supplied to the synchronous gear 170 A, 170 B side is supplied to surfaces of the synchronous gears 170 A and 170 B, including a meshing portion between the synchronous gears 170 A and 170 B. Then, the lubricating oil is supplied into the bearings 160 Ac and 160 Bc and is again returned to the oil storage portion 181 .
  • Lubricating oil supply portions may be arbitrarily set according to a carrying-out mode.
  • the cooling device 190 is for water-cooling the lubricating oil stored in the oil storage portion 181 and, as shown in FIG. 2 , comprises the cooling pipe 191 disposed in the oil storage portion 181 for circulating cooling water and a cooling pump 192 for supplying the cooling water into the cooling pipe 191 .
  • illustration of the cooling device 190 is omitted.
  • engagement of the male rotor 110 and the female rotor 120 is located outside gear engagement pitch circles SA and SB determined by a distance between the rotation shaft (rotation axis) 150 A of the male rotor 110 and the rotation shaft (rotation axis) 150 B of the female rotor 120 and the numbers of teeth of the male rotor 110 and the female rotor 120 .
  • Symbols DA and DB shown in FIG. 5 represent the outer diameters of the male rotor 110 and the female rotor 120 .
  • the drive motors 140 A and 140 B are partially received in the rotor hollow portions 112 and 122 , the drive heat generated from the drive motors 140 A and 140 B causes the temperature of the screw gear portions 111 and 121 of the male rotor 110 and the female rotor 120 to be uniform so that thermal expansion of the screw gear portion 111 of the male rotor 110 and that of the screw gear portion 121 of the female rotor 120 can be maintained on the same level. Therefore, the engagement gap between the screw gear portions 111 and 121 of the male rotor 110 and the female rotor 120 is maintained uniform without localization.
  • the drive motors 140 A and 140 B are disposed between the bearings 160 Aa and 160 Ab and between the bearings 160 Ba and 160 Bb.
  • the male rotor 110 and the female rotor 120 have the unequal lead unequal inclination angle screw portions 111 a and 121 a on the inlet port 134 side and the equal lead screw portions 111 b and 121 b on the outlet port 135 side and since the engagement of the male rotor 110 and the female rotor 120 is located outside the gear engagement pitch circles SA and SB determined by the distance between the axes of the male rotor 110 and the female rotor 120 and the numbers of teeth of the male rotor 110 and the female rotor 120 , it is possible to increase the compression ratio, to obtain the effect of raking out the product, and to maintain the stable pumping speed down to 0.5 Pa.
  • the structures, other than a drive motor 240 , of the screw vacuum pump 200 according to the second embodiment are totally the same as those described above. Therefore, by reading 100 s symbols shown in the description relating to the screw vacuum pump 100 of the first embodiment and shown in FIGS. 1 to 5 as 200 s symbols, explanation of the structures other than the drive motor 240 is omitted.
  • the single drive motor 240 as a drive source common to a male rotor 210 and a female rotor 220 is received in a rotor hollow portion 212 formed in the male rotor 210 .
  • the drive motor 240 rotates a rotation shaft 250 A and a drive force of the drive motor 240 is synchronously transmitted also to a rotation shaft 250 B through synchronous gears 270 A and 270 B.
  • the synchronous gears 270 A and 270 B are formed larger in width and stronger than the gears 170 A and 1708 of the first embodiment.
  • oil supply means 280 and a cooling device configured in the same manner as in the first embodiment are provided.
  • oil supply means 280 and a cooling device configured in the same manner as in the first embodiment are provided.
  • illustration and explanation thereof are omitted.
  • the motor is placed inside the screw rotor, the external size of the pump can be largely reduced. While a conventional pump cannot be disposed near a semiconductor device manufacturing apparatus, a liquid crystal panel manufacturing apparatus, or a solar panel manufacturing apparatus, this motor built-in screw pump can be disposed near the apparatus or under a chamber so that it is possible to largely improve an apparatus installation space.
  • the screw gear portions 111 and 121 , 211 and 221 of the male rotor 110 , 210 and the female rotor 120 , 220 each have the unequal lead unequal inclination angle screw portion 111 a , 121 a , 211 a , 221 a and the equal lead screw portion 111 b , 121 b , 211 b , 221 b with one lead or a plurality of leads.
  • screw gear portions 311 and 321 of a male rotor 310 and a female rotor 320 each comprise a first equal lead screw portion 311 a , 321 a which is disposed on an inlet port 335 side, an unequal lead unequal inclination angle screw portion 311 b , 321 b which is continuous with the first equal lead screw portion 311 a , 321 a , and a second equal lead screw portion 311 c , 321 c with one lead or a plurality of leads which is continuous with the unequal lead unequal inclination angle screw portion 311 b , 321 b.
  • FIG. 7 shows only the male rotor 310 .
  • each screw gear portion of the male rotor and the female rotor each have the unequal lead unequal inclination angle screw portion and the equal lead screw portion.
  • each screw gear portion may be designed to have only an unequal lead unequal inclination angle screw portion.
  • size design and combination of an unequal lead unequal inclination angle screw portion and an equal lead screw portion may be properly set according to a carrying-out mode.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
US13/698,691 2010-05-24 2010-05-13 Screw vacuum pump Abandoned US20130058823A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010-118315 2010-05-24
JP2010118315 2010-05-24
PCT/JP2011/061077 WO2011148797A1 (ja) 2010-05-24 2011-05-13 スクリュー真空ポンプ

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US20130058823A1 true US20130058823A1 (en) 2013-03-07

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ID=45003789

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Application Number Title Priority Date Filing Date
US13/698,691 Abandoned US20130058823A1 (en) 2010-05-24 2010-05-13 Screw vacuum pump

Country Status (5)

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US (1) US20130058823A1 (de)
JP (1) JPWO2011148797A1 (de)
KR (1) KR20130125703A (de)
DE (1) DE112011101773T5 (de)
WO (1) WO2011148797A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20180030983A1 (en) * 2015-09-24 2018-02-01 In Cheol Lee Vacuum pump with cooling apparatus
WO2019210053A1 (en) * 2018-04-27 2019-10-31 Carrier Corporation Screw compressor with external motor rotor
CN112943603A (zh) * 2021-01-27 2021-06-11 宁波市润桥工业设计有限公司 一种充排可控的螺杆泵

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6155423B2 (ja) * 2013-12-02 2017-07-05 株式会社飯塚鉄工所 スクリュー真空ポンプ
WO2015083195A1 (ja) * 2013-12-02 2015-06-11 株式会社飯塚鉄工所 スクリュー真空ポンプ
JPWO2015128906A1 (ja) * 2014-02-28 2017-03-30 国立大学法人東北大学 スクリュー排気ポンプ用のオイル供給部品及びその部品を備えたスクリュー排気ポンプ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01267384A (ja) * 1988-04-15 1989-10-25 Hitachi Ltd 勾配歯を有するスクリューロータ
JPH02283898A (ja) * 1989-04-21 1990-11-21 Hitachi Koki Co Ltd ねじ溝分子ポンプ
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH08100779A (ja) * 1994-10-04 1996-04-16 Matsushita Electric Ind Co Ltd 真空ポンプ
JP2004263629A (ja) 2003-03-03 2004-09-24 Tadahiro Omi スクリュー真空ポンプ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20180030983A1 (en) * 2015-09-24 2018-02-01 In Cheol Lee Vacuum pump with cooling apparatus
CN107709787A (zh) * 2015-09-24 2018-02-16 李仁喆 具有冷却装置的真空泵
US10690135B2 (en) * 2015-09-24 2020-06-23 In Cheol Lee Vacuum pump with cooling apparatus
WO2019210053A1 (en) * 2018-04-27 2019-10-31 Carrier Corporation Screw compressor with external motor rotor
US11519409B2 (en) 2018-04-27 2022-12-06 Carrier Corporation Screw compressor with external motor rotor
CN112943603A (zh) * 2021-01-27 2021-06-11 宁波市润桥工业设计有限公司 一种充排可控的螺杆泵

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DE112011101773T5 (de) 2013-03-14
JPWO2011148797A1 (ja) 2013-07-25
WO2011148797A1 (ja) 2011-12-01
KR20130125703A (ko) 2013-11-19

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AS Assignment

Owner name: NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY,

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:OHMI, TADAHIRO;AKUTSU, ISAO;SIGNING DATES FROM 20121010 TO 20121012;REEL/FRAME:029318/0432

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION