US20070229097A1 - Probe, probe card, and testing device - Google Patents
Probe, probe card, and testing device Download PDFInfo
- Publication number
- US20070229097A1 US20070229097A1 US11/439,227 US43922706A US2007229097A1 US 20070229097 A1 US20070229097 A1 US 20070229097A1 US 43922706 A US43922706 A US 43922706A US 2007229097 A1 US2007229097 A1 US 2007229097A1
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- United States
- Prior art keywords
- probe
- hole
- contact
- circuit board
- contact portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
Definitions
- the present invention relates to a probe (in particular, a cantilever type probe) , a probe card, and a testing device. More particularly, the present invention relates to a probe, a probe card, and a testing device, especially suitable for testing a through hole (a via or a contact hole) to be filled with conductor, and which is provided in a circuit board, a wafer, or the like (hereinafter, referred to as “circuit board”).
- a probe card 152 is used to conduct a short/open test on wiring 151 in a wafer or a circuit board 150 .
- a cantilever type probe 153 is adopted as the probe card 152 .
- the probe 153 is provided so as to be precisely positioned in relation to the probe card 152 . It should be noted that some probe cards have spring type probes (not shown) provided thereto.
- the conventional cantilever type probe 153 has, as illustrated in FIG. 20 , a tip side which is bent in a direction away from the probe card 152 , thereby a linear contact portion 154 is formed.
- the contact portion 154 is formed in relatively thin.
- a rectangular portion 155 which is rectangular in section is provided to the tip of the contact portion 154 .
- the contact portion 154 of the probe 153 is brought into contact with the wiring 151 of the circuit board 150 , and the probe card 152 further descends by a small distance. This makes the probe 153 elastically deformed to cause the contact portion 154 to slide a little over the wiring 151 in a longitudinal direction (in an X direction in FIG. 19 ) of the probe 153 .
- the probe card 152 having the conventional cantilever type probe 153 is used for testing a through hole provided in a circuit board and to be filled with the conductor to test how well it is filled with conductor the following problem arises.
- FIG. 21 shows the circuit board 150 having a contact hole (via) 157 provided thereto.
- This contact hole 157 is formed by filling a through hole 158 with a conductor 159 to hole 158 .
- plating 160 is provide to an inner surface of the through hole 158 and a rear surface 150 b of the circuit board 150 .
- a front surface 150 a and the rear surface 150 b of the circuit board are provided with wiring connected thereto.
- the wiring (not shown) provided on the front surface 150 a and the rear surface 150 b of the circuit board 150 can be electrically connectable. Further, a space between the front surface 150 a side and the rear surface 150 b side of the circuit board 150 can be kept as hermetic.
- the probe card 152 and the probe 153 are disposed, for example, on the side of the front surface 150 a of the circuit board 150 . Then, the contact portion 154 of the probe 153 is brought into contact with the conductor 159 . With this state, the resistance between the front surface 150 a and the rear surface 150 b of the conductor 159 and the resistance of a plating 160 provided on the inner periphery of the through hole 158 are measured with the probe 153 .
- the resistance is relatively high as compared with a case where the through hole 158 is completely filled with the conductor 159 .
- the resistance is higher than that when the through hole 158 is completely filled with the conductor 159 , and lower than that when the through hole 158 is hardly filled with the conductor 159 .
- the contact portion 154 of the probe 153 When the contact portion 154 of the probe 153 has entered he through hole 158 as described above, there is a possibility that the contact portion 154 might be brought into contact with the lower portion side of the plating 160 in the through hole 158 or with a support 161 for supporting the circuit board 150 , provided that the thickness t of the circuit board 150 is thin or the length of the contact portion 154 of the probe 153 is relatively longer with respect to the thickness t of the circuit board 150 (as shown by a broken line).
- the resistance measured by using the probe card 152 is lower than the actual resistance. More specifically, a problem arises that, although the through hole 158 is hardly filled with the conductor 159 or the through hole 158 is only partly filled with the conductor 159 , the result of measuring the resistance would be similar to that of a case where the through hole 158 is completely filled with the conductor 159 . As described above, the conventional probe 153 has a problem that it can not accurately measure how well the through hole 158 is filled with the conductor 159 .
- the present invention has been made in view of the above-mentioned problem, and an object is to provide a probe, a probe card, and a testing device for precisely testing the state of a hole provided in a circuit board, in particular, how well a through hole provided in a circuit board and being to be filled with conductor, is filled with conductor.
- the present invention adopts the following devices.
- Examples of the above-described hole include a through hole and a contact hole. According to the present invention, even when a hole in a circuit board where conductive wiring is to be provided is hardly filled with the conductive wiring, or, when the hole is only partly filled with the conductive wiring, the contact portion of the probe can be prevented from entering the hole. Therefore, conductivity in the conductive wiring in the hole can be precisely tested.
- Examples of the contact portion include the one in the shape of an arc having a radius of curvature larger than a radius of the hole.
- Examples of the contact portion also include the one linear in shape which is in parallel with a surface of the circuit board to be tested and is longer than a diameter of the through hole.
- the present invention is a probe card having a probe to be brought into contact with the conductive wiring for performing a test for conductivity of the conductive wiring in a hole, such as a through hole or a contact hole, provided in a circuit board,
- a testing device of the present invention comprises:
- a contact portion of a probe can be prevented from getting in a hole provided in a circuit board.
- the contact portion of the probe can be prevented from entering the through hole. Therefore, it is possible to precisely test how well the through hole is filled with the conductor.
- FIG. 1 is a diagram illustrating a probe and a probe card according to a first embodiment of the present invention
- FIG. 2 is a diagram illustrating the probe according to the first embodiment of the present invention.
- FIG. 3 is a diagram illustrating a rough surface having abrasion-like marks of the probe according to the first embodiment of the present invention
- FIG. 4 is a diagram illustrating the rough surface having abrasion-like marks of the probe viewed from an arrow A in FIG. 3 according to the first embodiment of the present invention
- FIG. 5 is a sectional diagram illustrating a state of use of the probe of the first embodiment according to the present invention and illustrating a case where a through hole in a circuit board is not filled with conductor;
- FIG. 6 is a sectional diagram illustrating a state of use of the probe of the first embodiment according the present invention and illustrating a case where a through hole in a circuit board is only partly filled with conductor;
- FIG. 7 is a diagram illustrating a state where an oxide film on the circuit board is scraped off by the rough surface having abrasion-like marks of the probe of the first embodiment according to the present invention
- FIG. 8 is a sectional diagram illustrating a probe according to a second embodiment of the present invention.
- FIG. 9 is a diagram illustrating a rough surface having abrasion-like marks of the probe of the second embodiment according to the present invention.
- FIG. 10 is a sectional diagram illustrating a probe according to a third embodiment of the present invention.
- FIG. 11 is a diagram illustrating a rough surface having abrasion-like marks of the probe of the third embodiment according to the present invention.
- FIG. 12 is a diagram illustrating a probe according to a fourth embodiment of the present invention.
- FIG. 13 is a diagram illustrating a rough surface having abrasion-like marks of the probe of the fourth embodiment according to the present invention.
- FIG. 14 is a diagram illustrating a state of use to of the probe of the fourth embodiment according to the present invention.
- FIG. 15 is a diagram illustrating a variation of the probe of the fourth embodiment according to the present invention.
- FIG. 16 is a diagram illustrating a state where a probe according to a fifth embodiment of the present invention is disposed on each side of a circuit board;
- FIG. 17 is a diagram illustrating a testing device for testing a circuit board according to a sixth embodiment of the present invention.
- FIG. 18 is a flow chart of a test procedure performed by the testing device for testing the circuit board according to the fifth embodiment of the present invention.
- FIG. 19 is a diagram illustrating a conventional probe card
- FIG. 20 is a diagram illustrating a conventional probe
- FIG. 21 is a diagram illustrating a state of use of the conventional probe and illustrating a case where a through hole in a circuit board is completely filled with conductor;
- FIG. 22 is a diagram illustrating a state of use of the conventional probe and illustrating a case where the through hole in the circuit board is hardly filled with conductor.
- FIG. 1 illustrates a cantilever type probe 10 and a probe card 1 using the probe 10 according to a first embodiment of the present invention.
- the probe card 1 is used for testing how well a through hole 22 , which is provided in a circuit board 20 and is to be filled with a conductor 21 , is filled with the conductor 21 .
- the through hole 22 is filled with the conductor 21 to form a contact hole (VIA).
- the probe 10 is provided with an elastically deformable leg portion 11 diagonally extending from the probe card 1 , a bent portion 12 which is provided on a tip side of the leg portion 11 and extends to the circuit board 20 side, and a contact portion 13 provided on a tip side of the bent portion 12 .
- the contact portion 13 is formed to be in a shape and size so as to be prevented from entering in the through hole 22 of the circuit board 20 .
- the contact portion 13 is formed to have an arc-shape.
- the contact portion 13 is disposed over the through hole 22 to test how well the through hole 22 is filled with the conductor 21 . It should be noted that a tip 13 b of the contact portion 13 is disposed outside the through hole 22 .
- the bent portion 12 is formed by bending a tip side of the leg portion 11 in a direction away from the probe card 1 so as to form an appropriate angle. Further the contact portion 13 is formed by bending a tip side of the bent portion 12 in a direction toward the probe card 1 so as to form an arc.
- the contact surface 13 a of the contact portion 13 slightly enters in the through hole 22 , but only a little part of the contact surface 13 a enters in the through hole 22 . Therefore, it can be substantially assumed that the contact portion 13 hardly enters in the through hole 22 .
- abrasion marks 14 are provided over a predetermined area of the contact surface 13 a of the contact portion 13 including a portion which is to be brought into contact with the conductor 21 . As illustrated in FIG. 4 , the abrasion marks 14 extend in a direction X which is substantially orthogonal to a longitudinal direction Y of the probe 10 .
- the contact portion 13 of the probe 10 is disposed over the through hole 22 and the conductor 21 as illustrated in FIG. 2 .
- the contact portion 13 is brought into contact with the conductor 21 .
- the resistance of a plating 23 and the resistance between the upper surface 20 a and the lower surface 20 b of the conductor 21 measured by the probe card 1 are relatively small. From this result of the measurement, it can be determined that the through hole 22 is completely filled with the conductor 21 .
- the through hole 22 is hardly filled with the conductor 21 , the contact portion 13 straddles an opening 22 a of the through hole 22 to be locked on the edge of the opening 22 a . Thereby, the contact portion 13 is presented from entering the through hole 22 .
- the resistance between the upper end surface 20 a and the lower end surface 20 b of the plating 23 measured by the probe card 1 is longer than that of a case where the through hole 22 is completely filled with the conductor 21 , and smaller than that of a case where the through hole 22 is hardly filled with the conductor 21 . From the result of the measurement, it can be determined that the through hole 22 is only partly filled with the conductor 21 .
- the probe 10 of the present invention is provided with the abrasion marks 14 over the contact surface 13 a of the contact portion 13 which is to be brought into contact with the circuit board 20 .
- FIG. 8 illustrates a probe 30 according to a second embodiment of the present invention. It should be noted that parts of the probe 30 similar to those of the probe 10 of the first embodiment are designated by the same reference numerals and detailed description thereof will be omitted.
- the probe 30 has a leg portion 11 , a bent portion 12 , and a linear contact portion 33 .
- the contact portion 33 is made of a material having an electrical conductivity.
- the contact portion 33 is fixed to a tip of the bent portion 12 by means of using an electrically conductive adhesive or welding.
- the contact portion 33 is disposed substantially in parallel with a surface 20 a to be tested of a circuit board 20 .
- the length L of the contact portion 33 is longer than the diameter dl of a through hole 22 in the circuit board 20 .
- abrasion marks 14 are formed over a contact surface 33 a of the contact portion 33 which is brought into contact with the circuit board 20 .
- the contact portion 33 of the probe 30 is disposed over the through hole 22 of the circuit board 20 and over the conductor 21 as illustrated in FIG. 8 . Further, both end surfaces 33 b and 33 c of the contact portion 33 are disposed outside the through hole 22 .
- the contact portion 33 of the probe 30 is prevented from entering in the through hole 22 even when the through hole 22 of the circuit board 20 is hardly filled with the conductor 21 or when the through hole 22 is only partly filled with the conductor 21 .
- FIG. 10 illustrates a probe 40 according to a third embodiment of the present invention.
- the probe 40 has a leg portion 11 , a bent portion 12 , and a linear contact portion 43 .
- the contact portion 43 is formed by bending a tip side of the bent portion 12 so as to be in parallel with a probe card 1 .
- the length L of the contact portion 43 is formed to be longer than the diameter d 1 of a through hole 22 .
- abrasion marks 14 are formed on a contact surface 43 a of which the contact portion 43 which is brought into contact with the circuit board 20 .
- the contact portion 43 of the probe 40 is disposed over the through hole 22 in the circuit board 20 and the conductor 21 .
- a tips surface 43 b of the contact portion 43 is disposed outside the through hole 22 .
- the contact portion 43 of the probe 40 can be prevented from entering in the through hole 22 even when the through hole 22 is hardly filled with the conductor 21 or the through hole 22 is only partly filled with the conductor 21 . Therefore, it is possible to perform a test for conductive state of the conductor 21 in the through hole 22 with precision.
- FIG. 12 illustrates a probe 50 according to a fourth embodiment of the present invention.
- the probe 50 has a leg portion 11 , a bent portion 12 , and a contact portion 53 .
- the contact portion 53 is provided with the bent portion 12 having the tip thereof formed to be hemispherical.
- abrasion marks 14 are provided over a contact surface 53 a of the contact portion 53 is which brought into contact with the circuit board 20 .
- the contact portion 53 is disposed over the through hole 22 and the conductor 21 .
- the contact portion 53 is locked on the edge of an opening 22 a of the through hole 22 .
- the contact portion 53 is prevented from entering in the through hole 22 . Therefore, it is possible to test how well the through hole 22 is filled with the conductor 21 , accurately.
- the contact surface 53 a of the contact portion 53 may be a flat surface which is in parallel with a surface 20 a of the circuit board 20 as illustrated in FIG. 15 .
- Abrasion marks 14 (not shown) may be provided on the contact surface 53 a.
- the contact surface 53 a of the contact portion 53 is a flat surface, even when the contact portion 53 is misaligned with the through hole 22 to some extent, it is possible to bring the contact surface 53 a into contact with the conductor 21 in the through hole 22 , which makes it possible to perform the test precisely.
- the probe card 1 (see FIG. 1 ) and the probe 10 are disposed on both of a front surface 20 a and a rear surface 20 b of a circuit board 20 .
- FIG. 17 illustrates a testing device 60 of a circuit board according to a sixth embodiment of the present invention.
- the testing device 60 of a circuit board is provided with a mechanism portion 61 having a vacuum chuck for holding a circuit board 20 , and with X, Y, Z, and ⁇ stages for adjusting the position of the circuit board 20 , and the like, a control portion 62 for controlling the mechanism portion 61 , the probe card 1 , alignment mark detecting devices 63 for recognizing a mark for positioning the circuit board 20 , measuring devices 64 for carrying out a measurement of predetermined items such as the resistance of a portion to be measured, and a personal computer 65 .
- the probe card 1 is provided with the probe 10 of the first embodiment. It should be noted that the probe card 1 may also be provided with, instead of the probe 10 , the probe 30 , 40 , or 50 of the second, third, fourth, or fifth embodiment described above.
- FIG. 18 is a flow chart illustrating a test procedure performed by the testing device 60 of the circuit board.
- a plurality of chips are provided on the circuit board 20 and a plurality of through holes 22 are provided in each chip. A case where all the through holes in each chip are simultaneously tested will be described.
- the circuit board 20 is mounted on a predetermined position of the mechanism portion 61 and is held by the vacuum chuck (S 101 )
- the circuit board 20 is moved to a center position and position adjustment is made in X, Y, and Z directions (S 102 ).
- adjustment of the rotational position of the circuit board 20 ( ⁇ adjustment) is made (S 103 )
- This adjustment of the rotational position is made in order to align an arrangement of the plurality of through holes 22 provided in the circuit board 20 with an arrangement of the plurality of probes 10 of the probe card 1 .
- the adjustment is made based on the result of detection performed by the alignment mark detecting device 63 .
- the Z stage ascends.
- the contact portion 13 of the probe 10 is brought into contact with the conductor 21 in the through hole 22 .
- the contact portion 13 of the probe 10 is brought into contact with plating 23 provided on the inner surface of the through hole 22 (S 105 ).
- the resistance between the upper end surface 20 a and the lower end surface 20 b of the conductor 21 and the resistance of the plating 23 provided on the inner periphery of the through hole 22 are measured by the measuring device 64 (S 107 ).
- the result of measurement is stored in a database or the like (S 108 ).
- the circuit board 20 is moved to a replacement position (S 112 ). Further, the test result is displayed on the personal computer 65 . This is the end of the test on one circuit board 20 .
- the testing device 60 of a circuit board or the like can test states of conductivity of the conductor 21 is many through holes 22 provided in the circuit board 20 and to be filled with the conductor 21 , simultaneously and accurately. Therefore, the test on the circuit board 20 can be completed in a short time.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
An object is to provide a probe, a probe card, and a testing device which can precisely perform a test for conductive state of a conductive wiring in, for example, a through hole or a contact hole provided in a circuit board. Provided is a probe (10) for performing a test for conductivity of a conductive wiring in a hole such as a through hole or a contact hole provided in a circuit board. The probe (10) is provided with an elastically deformable leg portion (11) and a contact portion (13) provided on a tip side of the leg portion (11) to be brought into contact with the conductive wiring (21) provided in a through hole (22). The contact portion (13) is formed to be in a shape and size so as to be prevented from entering the through hole (22).
Description
- 1. Field of the Invention
- The present invention relates to a probe (in particular, a cantilever type probe) , a probe card, and a testing device. More particularly, the present invention relates to a probe, a probe card, and a testing device, especially suitable for testing a through hole (a via or a contact hole) to be filled with conductor, and which is provided in a circuit board, a wafer, or the like (hereinafter, referred to as “circuit board”).
- 2. Description of the Related Technology
- As illustrated in
FIG. 19 , aprobe card 152 is used to conduct a short/open test onwiring 151 in a wafer or acircuit board 150. In some cases, acantilever type probe 153 is adopted as theprobe card 152. Theprobe 153 is provided so as to be precisely positioned in relation to theprobe card 152. It should be noted that some probe cards have spring type probes (not shown) provided thereto. - The conventional
cantilever type probe 153 has, as illustrated inFIG. 20 , a tip side which is bent in a direction away from theprobe card 152, thereby alinear contact portion 154 is formed. Thecontact portion 154 is formed in relatively thin. Arectangular portion 155 which is rectangular in section is provided to the tip of thecontact portion 154. - In performing a test on the
circuit board 150 using theprobe card 152, thecontact portion 154 of theprobe 153 is brought into contact with thewiring 151 of thecircuit board 150, and theprobe card 152 further descends by a small distance. This makes theprobe 153 elastically deformed to cause thecontact portion 154 to slide a little over thewiring 151 in a longitudinal direction (in an X direction inFIG. 19 ) of theprobe 153. - At this time, an oxide film formed on a surface of the
wiring 151 is scraped off by therectangular portion 155 of thecontact portion 154, thereby attain stable electrical contact between thecontact portion 154 of theprobe 153 and thewiring 151. -
- [Patent Document 1] JP 11-51970 A
- [Patent Document 2] JP 56-56646 A
- [Patent Document 3] Japanese Utility Model Application Laid-open No. Hei 5-92749
- [Patent Document 4] Japanese Utility Model Application Laid-open No. Hei 6-40869
- However, when the
probe card 152 having the conventionalcantilever type probe 153 is used for testing a through hole provided in a circuit board and to be filled with the conductor to test how well it is filled with conductor the following problem arises. -
FIG. 21 shows thecircuit board 150 having a contact hole (via) 157 provided thereto. Thiscontact hole 157 is formed by filling a throughhole 158 with aconductor 159 tohole 158. - It should be noted that, descriptions of the conventional probe will be made on the premise that plating 160 is provide to an inner surface of the
through hole 158 and arear surface 150 b of thecircuit board 150. In reality, afront surface 150 a and therear surface 150 b of the circuit board are provided with wiring connected thereto. - By providing the
contact hole 157, the wiring (not shown) provided on thefront surface 150 a and therear surface 150 b of thecircuit board 150 can be electrically connectable. Further, a space between thefront surface 150 a side and therear surface 150 b side of thecircuit board 150 can be kept as hermetic. - When the
probe card 152 is used for testing how well thecontact hole 157 is filled with theconductor 159, theprobe card 152 and theprobe 153 are disposed, for example, on the side of thefront surface 150 a of thecircuit board 150. Then, thecontact portion 154 of theprobe 153 is brought into contact with theconductor 159. With this state, the resistance between thefront surface 150 a and therear surface 150 b of theconductor 159 and the resistance of aplating 160 provided on the inner periphery of thethrough hole 158 are measured with theprobe 153. - At this time, when the
through hole 158 of thecontact hole 157 is completely filled with theconductor 159, electric current for the measurement flows through both theplating 160 provided on the inner surface of thethrough hole 158 and theconductor 159, which relatively reduces the resistance. - On the other hand, when the
through hole 158 is hardly filled with theconductor 159 as illustrated inFIG. 22 , or, when thethrough hole 158 is only partly filled with theconductor 159 as shown by the double-dashed chain line isFIG. 22 , the electric current for the measurement flows through only theplating 160 provided on the inner surface of thethrough hole 158. - Therefore, when the
through hole 158 is hardly filled with theconductor 159, the resistance is relatively high as compared with a case where the throughhole 158 is completely filled with theconductor 159. When only a part of thethrough hole 158 is filled with theconductor 159, the resistance is higher than that when thethrough hole 158 is completely filled with theconductor 159, and lower than that when thethrough hole 158 is hardly filled with theconductor 159. - Here, when the
through hole 158 of thecontact hole 157 is hardly filled with theconductor 159 or only a part of the throughhole 159 is filled with theconductor 159 as described above, there is a possibility that thecontact portion 154 of theprobe 153 enters the throughhole 158 as illustrated inFIG. 22 . - When the
contact portion 154 of theprobe 153 has entered he throughhole 158 as described above, there is a possibility that thecontact portion 154 might be brought into contact with the lower portion side of theplating 160 in the throughhole 158 or with asupport 161 for supporting thecircuit board 150, provided that the thickness t of thecircuit board 150 is thin or the length of thecontact portion 154 of theprobe 153 is relatively longer with respect to the thickness t of the circuit board 150 (as shown by a broken line). - In such a case, the resistance measured by using the
probe card 152 is lower than the actual resistance. More specifically, a problem arises that, although thethrough hole 158 is hardly filled with theconductor 159 or the throughhole 158 is only partly filled with theconductor 159, the result of measuring the resistance would be similar to that of a case where the throughhole 158 is completely filled with theconductor 159. As described above, theconventional probe 153 has a problem that it can not accurately measure how well the throughhole 158 is filled with theconductor 159. - The present invention has been made in view of the above-mentioned problem, and an object is to provide a probe, a probe card, and a testing device for precisely testing the state of a hole provided in a circuit board, in particular, how well a through hole provided in a circuit board and being to be filled with conductor, is filled with conductor.
- In order to achieve the above object, the present invention adopts the following devices.
-
- (1) The present invention is a probe performing a test for conductivity in conductive wiring in a hole such as, a through hole or a contact hole provided in a circuit board, comprising:
- an elastically deformable leg portion; and
- a contact portion provided on a tip side of the leg portion to be brought into contact with the conductive wiring,
wherein the contact portion is formed to be in a shape and size so as to be prevented from entering the hole.
- (1) The present invention is a probe performing a test for conductivity in conductive wiring in a hole such as, a through hole or a contact hole provided in a circuit board, comprising:
- Examples of the above-described hole include a through hole and a contact hole. According to the present invention, even when a hole in a circuit board where conductive wiring is to be provided is hardly filled with the conductive wiring, or, when the hole is only partly filled with the conductive wiring, the contact portion of the probe can be prevented from entering the hole. Therefore, conductivity in the conductive wiring in the hole can be precisely tested.
- (2) Examples of the contact portion include the one in the shape of an arc having a radius of curvature larger than a radius of the hole.
- (3) Examples of the contact portion also include the one linear in shape which is in parallel with a surface of the circuit board to be tested and is longer than a diameter of the through hole.
- (4) Further, the present invention is a probe card having a probe to be brought into contact with the conductive wiring for performing a test for conductivity of the conductive wiring in a hole, such as a through hole or a contact hole, provided in a circuit board,
-
- the probe comprising:
- an elastically deformable leg portion; and
- a contact portion provided on a tip side of the leg portion to be brought into contact with the conductive wiring,
- wherein the contact portion is formed to be in a shape and size so as to be prevented from entering the hole.
- the probe comprising:
- (5) Further, a testing device of the present invention comprises:
-
- a probe card having a probe to be brought into contact with conductive wiring performing a test for conductivity of the conductive wiring in a hole, such as a through hole or a contact hole, provided in a circuit board;
- a holding device holding the circuit board;
- a position detecting device detecting whether or not the circuit board is disposed in a predetermined position;
- a position adjusting device adjusting a position of the circuit board based on a result of the detection by the position detecting devices; and
- a resistance measuring device measuring, resistance of an inner peripheral portion of the hole and resistance between both ends of the conductive wiring with the probe,
- wherein the probe includes:
- an elastically deformable leg portion; and
- a contact portion provided on a tip side of the leg portion to be brought into contact with the conductive wiring,
- wherein the contact portion is formed to be in a shape and size so as to be prevented from entering the hole.
- As described above, according to the present invention, a contact portion of a probe can be prevented from getting in a hole provided in a circuit board. In particular, even when the through hole in a circuit board is hardly filled with conductor or the through hole is only partly filled with conductor, the contact portion of the probe can be prevented from entering the through hole. Therefore, it is possible to precisely test how well the through hole is filled with the conductor.
-
FIG. 1 is a diagram illustrating a probe and a probe card according to a first embodiment of the present invention; -
FIG. 2 is a diagram illustrating the probe according to the first embodiment of the present invention; -
FIG. 3 is a diagram illustrating a rough surface having abrasion-like marks of the probe according to the first embodiment of the present invention; -
FIG. 4 is a diagram illustrating the rough surface having abrasion-like marks of the probe viewed from an arrow A inFIG. 3 according to the first embodiment of the present invention; -
FIG. 5 is a sectional diagram illustrating a state of use of the probe of the first embodiment according to the present invention and illustrating a case where a through hole in a circuit board is not filled with conductor; -
FIG. 6 is a sectional diagram illustrating a state of use of the probe of the first embodiment according the present invention and illustrating a case where a through hole in a circuit board is only partly filled with conductor; -
FIG. 7 is a diagram illustrating a state where an oxide film on the circuit board is scraped off by the rough surface having abrasion-like marks of the probe of the first embodiment according to the present invention; -
FIG. 8 is a sectional diagram illustrating a probe according to a second embodiment of the present invention; -
FIG. 9 is a diagram illustrating a rough surface having abrasion-like marks of the probe of the second embodiment according to the present invention; -
FIG. 10 is a sectional diagram illustrating a probe according to a third embodiment of the present invention; -
FIG. 11 is a diagram illustrating a rough surface having abrasion-like marks of the probe of the third embodiment according to the present invention; -
FIG. 12 is a diagram illustrating a probe according to a fourth embodiment of the present invention; -
FIG. 13 is a diagram illustrating a rough surface having abrasion-like marks of the probe of the fourth embodiment according to the present invention; -
FIG. 14 is a diagram illustrating a state of use to of the probe of the fourth embodiment according to the present invention; -
FIG. 15 is a diagram illustrating a variation of the probe of the fourth embodiment according to the present invention; -
FIG. 16 is a diagram illustrating a state where a probe according to a fifth embodiment of the present invention is disposed on each side of a circuit board; -
FIG. 17 is a diagram illustrating a testing device for testing a circuit board according to a sixth embodiment of the present invention; -
FIG. 18 is a flow chart of a test procedure performed by the testing device for testing the circuit board according to the fifth embodiment of the present invention; -
FIG. 19 is a diagram illustrating a conventional probe card; -
FIG. 20 is a diagram illustrating a conventional probe; -
FIG. 21 is a diagram illustrating a state of use of the conventional probe and illustrating a case where a through hole in a circuit board is completely filled with conductor; and -
FIG. 22 is a diagram illustrating a state of use of the conventional probe and illustrating a case where the through hole in the circuit board is hardly filled with conductor. - Hereinbelow, embodiments of a probe, a probe card, and a testing device according to the present invention will be described in detail with reference to the drawings.
-
FIG. 1 illustrates acantilever type probe 10 and aprobe card 1 using theprobe 10 according to a first embodiment of the present invention. Theprobe card 1 is used for testing how well a throughhole 22, which is provided in acircuit board 20 and is to be filled with aconductor 21, is filled with theconductor 21. - It should be noted that, in this embodiment, the through
hole 22 is filled with theconductor 21 to form a contact hole (VIA). - The
probe 10 is provided with an elasticallydeformable leg portion 11 diagonally extending from theprobe card 1, abent portion 12 which is provided on a tip side of theleg portion 11 and extends to thecircuit board 20 side, and acontact portion 13 provided on a tip side of thebent portion 12. - As illustrated in
FIG. 2 , thecontact portion 13 is formed to be in a shape and size so as to be prevented from entering in the throughhole 22 of thecircuit board 20. - In this embodiment, the
contact portion 13 is formed to have an arc-shape. Here, d1 denotes the diameter of the throughhole 22 and r1 denotes the radius of the throughhole 22, and when it is r1=d1/2, acontact surface 13 a, which is an outer peripheral. surface of thecontact portion 13, has a radius of curvature r2 which is larger than the radius r1 of the through hole 22 (r2>r1) - The
contact portion 13 is disposed over the throughhole 22 to test how well the throughhole 22 is filled with theconductor 21. It should be noted that atip 13 b of thecontact portion 13 is disposed outside the throughhole 22. - The
bent portion 12 is formed by bending a tip side of theleg portion 11 in a direction away from theprobe card 1 so as to form an appropriate angle. Further thecontact portion 13 is formed by bending a tip side of thebent portion 12 in a direction toward theprobe card 1 so as to form an arc. - When the through
hole 22 is not filled with the conductor 21 (seeFIG. 6 ) , thecontact surface 13 a of thecontact portion 13 slightly enters in the throughhole 22, but only a little part of thecontact surface 13 a enters in the throughhole 22. Therefore, it can be substantially assumed that thecontact portion 13 hardly enters in the throughhole 22. - As illustrated in
FIG. 3 , abrasion marks 14 are provided over a predetermined area of thecontact surface 13 a of thecontact portion 13 including a portion which is to be brought into contact with theconductor 21. As illustrated inFIG. 4 , the abrasion marks 14 extend in a direction X which is substantially orthogonal to a longitudinal direction Y of theprobe 10. - In the case to where the conductive state (filled state) of the
conductor 21 in the throughhole 22 provided in thecircuit board 20 is tested by theprobe card 1 provided theprobe 10, thecontact portion 13 of theprobe 10 is disposed over the throughhole 22 and theconductor 21 as illustrated inFIG. 2 . - Here, when the through
hole 22 is completely filled with theconductor 21, thecontact portion 13 is brought into contact with theconductor 21. In this case, the resistance of aplating 23 and the resistance between theupper surface 20 a and thelower surface 20 b of theconductor 21 measured by theprobe card 1 are relatively small. From this result of the measurement, it can be determined that the throughhole 22 is completely filled with theconductor 21. - Further, as illustrated in
FIG. 5 , the throughhole 22 is hardly filled with theconductor 21, thecontact portion 13 straddles anopening 22 a of the throughhole 22 to be locked on the edge of the opening 22 a. Thereby, thecontact portion 13 is presented from entering the throughhole 22. - In this case, electric current for the measurement which flows between the
probe 10 and therear surface 20 b of thecircuit board 20 passes through only theplating 23 in the throughhole 22. Accordingly, the resistance between the upper end surface 20 a and thelower end surface 20 b of theplating 23 is longer than that of a case where the throughhole 22 is completely filled with theconductor 21. From this result, it can be determined that the throughhole 22 is hardly filled with theconductor 21. - Further, as illustrated in
FIG. 6 , when the throughhole 22 is only partly filled with theconductor 21, electric current which flows between theprobe 10 and therear surface 20 b of thecircuit board 20 passes through the plating 23 in the throughhole 22 and theconductor 21 which only partly fills the throughhole 22. - Therefore, the resistance between the upper end surface 20 a and the
lower end surface 20 b of theplating 23 measured by theprobe card 1 is longer than that of a case where the throughhole 22 is completely filled with theconductor 21, and smaller than that of a case where the throughhole 22 is hardly filled with theconductor 21. From the result of the measurement, it can be determined that the throughhole 22 is only partly filled with theconductor 21. - Further, as described above, the
probe 10 of the present invention is provided with the abrasion marks 14 over thecontact surface 13 a of thecontact portion 13 which is to be brought into contact with thecircuit board 20. - Therefore, when the
probe card 1 descends to cause thecontact portion 13 to slide in a longitudinal direction Y of theprobe 10 as illustrated inFIG. 7 , anoxide film 24 formed on the surface of thecircuit board 20 is scraped off by the abrasion marks 14. - This makes it possible to attain stable electrical contact between the
contact portion 13 of theprobe 10 and theconductor 21. -
FIG. 8 illustrates aprobe 30 according to a second embodiment of the present invention. It should be noted that parts of theprobe 30 similar to those of theprobe 10 of the first embodiment are designated by the same reference numerals and detailed description thereof will be omitted. - The
probe 30 has aleg portion 11, abent portion 12, and alinear contact portion 33. Thecontact portion 33 is made of a material having an electrical conductivity. Thecontact portion 33 is fixed to a tip of thebent portion 12 by means of using an electrically conductive adhesive or welding. - Further, the
contact portion 33 is disposed substantially in parallel with asurface 20 a to be tested of acircuit board 20. The length L of thecontact portion 33 is longer than the diameter dl of a throughhole 22 in thecircuit board 20. - Further, as illustrated in
FIG. 9 , abrasion marks 14 are formed over acontact surface 33 a of thecontact portion 33 which is brought into contact with thecircuit board 20. - In a case where a test is performed for conductive state (filled state) of a
conductor 21 in the throughhole 22 of thecircuit board 20 by aprobe card 1 having theprobe 30, thecontact portion 33 of theprobe 30 is disposed over the throughhole 22 of thecircuit board 20 and over theconductor 21 as illustrated inFIG. 8 . Further, both end surfaces 33 b and 33 c of thecontact portion 33 are disposed outside the throughhole 22. - Accordingly, the
contact portion 33 of theprobe 30 is prevented from entering in the throughhole 22 even when the throughhole 22 of thecircuit board 20 is hardly filled with theconductor 21 or when the throughhole 22 is only partly filled with theconductor 21. - Therefore, it is possible to perform a test for conductive state (filled state) of the
conductor 21 accurately even is the case where. the throughhole 22 is completely filled with theconductor 21, where the throughhole 22 is hardly filled with theconductor 21, or where the throughhole 22 is only partly filled with theconductor 21. -
FIG. 10 illustrates aprobe 40 according to a third embodiment of the present invention. Theprobe 40 has aleg portion 11, abent portion 12, and alinear contact portion 43. - The
contact portion 43 is formed by bending a tip side of thebent portion 12 so as to be in parallel with aprobe card 1. The length L of thecontact portion 43 is formed to be longer than the diameter d1 of a throughhole 22. - As illustrated in
FIG. 11 , abrasion marks 14 are formed on acontact surface 43 a of which thecontact portion 43 which is brought into contact with thecircuit board 20. - In a care where a test is performed for conductive state (filled state) of the
conductor 21 in the throughhole 22 of thecircuit board 20 by aprobe card 1 having theprobe 40, thecontact portion 43 of theprobe 40 is disposed over the throughhole 22 in thecircuit board 20 and theconductor 21. A tips surface 43 b of thecontact portion 43 is disposed outside the throughhole 22. - The
contact portion 43 of theprobe 40 can be prevented from entering in the throughhole 22 even when the throughhole 22 is hardly filled with theconductor 21 or the throughhole 22 is only partly filled with theconductor 21. Therefore, it is possible to perform a test for conductive state of theconductor 21 in the throughhole 22 with precision. -
FIG. 12 illustrates aprobe 50 according to a fourth embodiment of the present invention. Theprobe 50 has aleg portion 11, abent portion 12, and acontact portion 53. - The
contact portion 53 is provided with thebent portion 12 having the tip thereof formed to be hemispherical. A radius of curvature r3 of thecontact portion 53 is larger than the radius r1 of the throughhole 22 in the circuit board 20 (r1=d1/2). - Further, as illustrated in
FIG. 13 , abrasion marks 14 are provided over acontact surface 53 a of thecontact portion 53 is which brought into contact with thecircuit board 20. - In a care where a test is perform for conductive state (filled state) of
conductor 21 in the throughhole 22 of thecircuit board 20 by aprobe card 1 having theprobe 50, thecontact portion 53 is disposed over the throughhole 22 and theconductor 21. - Here, as illustrated in
FIG. 14 , when the throughhole 22 is completely filled with theconductor 21, thecontact portion 53 is brought into contact with theconductor 21. Further, a test for conductivity of theconductor 21 can be made accurately. - Further, when the through
hole 22 is hardly filled with theconductor 21 as illustrated inFIG. 12 , or when the throughhole 22 is only partly filled with the conductor 21 (not shown) , thecontact portion 53 is locked on the edge of anopening 22 a of the throughhole 22. - Accordingly, the
contact portion 53 is prevented from entering in the throughhole 22. Therefore, it is possible to test how well the throughhole 22 is filled with theconductor 21, accurately. - It should be noted that the
contact surface 53 a of thecontact portion 53 may be a flat surface which is in parallel with asurface 20 a of thecircuit board 20 as illustrated inFIG. 15 . Abrasion marks 14 (not shown) may be provided on thecontact surface 53 a. - By forming the
contact surface 53 a of thecontact portion 53 is a flat surface, even when thecontact portion 53 is misaligned with the throughhole 22 to some extent, it is possible to bring thecontact surface 53 a into contact with theconductor 21 in the throughhole 22, which makes it possible to perform the test precisely. - While, in the above first to fourth embodiments, the cases where the
plating 23 is formed on therear surface 20 b of thecircuit board 20 and on the inner surface of the throughhole 22 are described, there is another case where theplating 23 is formed only on the inner surface of the throughhole 22 as illustrated inFIG. 16 . - In this case, the probe card 1 (see
FIG. 1 ) and theprobe 10 are disposed on both of afront surface 20 a and arear surface 20 b of acircuit board 20. This makes it possible to measure by theprobes lower end surface 20 b of theplating 23 provided on the inner periphery of the throughhole 22. Therefore, it is possible to perform the test for conductive state of theconductor 21 in the throughhole 22 with precision. -
FIG. 17 illustrates atesting device 60 of a circuit board according to a sixth embodiment of the present invention. Thetesting device 60 of a circuit board is provided with amechanism portion 61 having a vacuum chuck for holding acircuit board 20, and with X, Y, Z, and θ stages for adjusting the position of thecircuit board 20, and the like, acontrol portion 62 for controlling themechanism portion 61, theprobe card 1, alignmentmark detecting devices 63 for recognizing a mark for positioning thecircuit board 20, measuringdevices 64 for carrying out a measurement of predetermined items such as the resistance of a portion to be measured, and apersonal computer 65. - The
probe card 1 is provided with theprobe 10 of the first embodiment. It should be noted that theprobe card 1 may also be provided with, instead of theprobe 10, theprobe -
FIG. 18 is a flow chart illustrating a test procedure performed by thetesting device 60 of the circuit board. In the present description, there are n through holes in one chip and there are m chips in a circuit board or a wafer. All the through holes in one chip are collectively brought into contact with the probe. Actually, the through holes may be brought into contact with probes collectively or individually. - Further, in this embodiment, a plurality of chips are provided on the
circuit board 20 and a plurality of throughholes 22 are provided in each chip. A case where all the through holes in each chip are simultaneously tested will be described. - Here, first, the
circuit board 20 is mounted on a predetermined position of themechanism portion 61 and is held by the vacuum chuck (S101) Next, thecircuit board 20 is moved to a center position and position adjustment is made in X, Y, and Z directions (S102). Then, adjustment of the rotational position of the circuit board 20 (θ adjustment) is made (S103) - This adjustment of the rotational position is made in order to align an arrangement of the plurality of through
holes 22 provided in thecircuit board 20 with an arrangement of the plurality ofprobes 10 of theprobe card 1. The adjustment is made based on the result of detection performed by the alignmentmark detecting device 63. - When it is determined that the predetermined number M is m (S104), the Z stage ascends. When the through
hole 22 is completely filled with theconductor 21, thecontact portion 13 of theprobe 10 is brought into contact with theconductor 21 in the throughhole 22. When the throughhole 22 is hardly filled with theconductor 21 or when the throughhole 22 is only partly filled with theconductor 21, thecontact portion 13 of theprobe 10 is brought into contact with plating 23 provided on the inner surface of the through hole 22 (S105). - Then, the number n of the tests (n=1, 2, 3, . . . ) is set based on a predetermined number N (S106). Next, the resistance between the upper end surface 20 a and the
lower end surface 20 b of theconductor 21 and the resistance of theplating 23 provided on the inner periphery of the throughhole 22 are measured by the measuring device 64 (S107). Then, the result of measurement is stored in a database or the like (S108). - Further, it is determined whether a predetermined number M is 0 or not (S109). When the predetermined number M is 0, the resistance is measured in the above step (S107).
- When the predetermined number M is not 0, the stage further descends (S110). Next it is determined whether measurement of the resistance is completed or not with respect to all the chips on the circuit board 20 (S111).
- When it is determined in the above step (S111), that the test is completed on all the chips, the
circuit board 20 is moved to a replacement position (S112). Further, the test result is displayed on thepersonal computer 65. This is the end of the test on onecircuit board 20. - When it is determined in the above step (S111), that the test is not completed on all the chips, then, the processes are repeated from the above step (S104).
- Accordingly, the
testing device 60 of a circuit board or the like according to the present invention can test states of conductivity of theconductor 21 is many throughholes 22 provided in thecircuit board 20 and to be filled with theconductor 21, simultaneously and accurately. Therefore, the test on thecircuit board 20 can be completed in a short time. - It should be noted that, although the above first to sixth embodiments describe the cases where the present invention is applied to a circuit board having a through hole in which the conductive wiring is provided, the present invention is also applicable to a wafer having a hole in which the conductive wiring is to be provided or the like.
- <Others>
- The disclosures of Japanese patent application No.JP2006-042313 filed on Feb. 20, 2006 including the specification, drawings and abstract are incorporated herein by reference.
Claims (12)
1. A probe performing a test for conductivity of a conductive wiring in a hole provided in a circuit board, comprising:
a long and elastically deformable leg portion; and
a contact portion provided on a tip side of the leg portion to be brought into contact with the conductive wiring, with the elasticity possessed by the probe itself,
wherein the contact portion is formed to be in a shape or size so as to be prevented from entering the hole.
2. A probe in order to determine a state of a hole provided in a circuit board, comprising:
a long and elastically deformable leg portion; and
a contact portion provided on a tip side of the leg portion to be brought into contact with the conductive wiring with the elasticity possessed by the probe itself,
wherein the contact portion is formed to be in a shape or size so as to be prevented from entering the hole.
3. The probe according to claim 1 ,
wherein the contact portion is formed in the shape of an arc larger than a diameter of the hole.
4. The probe according to claim 1 ,
wherein the contact portion is formed by folding the tip side of the leg portion.
5. The probe according to claim 1 ,
wherein a contact surface of the contact portion which is brought into contact with the conductive wiring is formed to have a flat surface in parallel with a surface of the circuit board to be tested.
6. The probe according to claim 1 ,
wherein the contact portion is formed to be linear in shape, which is in parallel with a surface of the circuit board to be tested and longer than a diameter of the hole.
7. (canceled)
8. The probe according to claim 6 ,
wherein the contact portion is a conductive part joined to a tip of the leg portion.
9. The probe according to claim 1 ,
wherein a contact surface of the contact portion which is brought into contact with the conductive wiring is given a rough shape like an abrasion mark extending in a direction to cross a longitudinal direction of the contact portion.
10. A probe card having a probe performing a test for conductive state of conductive wiring in a hole such as a through hole or a contact hole provided in a circuit board,
the probe comprising:
a long and elastically deformable leg portion; and
a contact portion provided on a tip side of the leg portion to be brought into contact with the conductive wiring, with the elasticity possessed by the probe itself
wherein the contact portion is formed to be in a shape or size so as to be prevented from entering the hole.
11. A testing device performing a test of conductive state of a conductive wiring in a hole provided in a circuit board, comprising:
a probe card having a probe to be brought into contact with the conductive wiring;
a holding device holding the circuit board;
a position detecting device detecting whether or not the circuit board is disposed in a predetermined position;
a position adjusting device adjusting a position of the circuit board based on a result of the detection by the position detecting device; and
a resistance measuring device measuring a resistance of the inner periphery of the hole and a resistance between both ends of the conductive wiring, with the probe,
wherein the probe includes:
a long and elastically deformable leg portion; and
a contact portion provided on a tip side of the leg portion to be brought into contact with the conductive wiring, with the elasticity possessed by the probe itself
wherein the contact portion is formed to be in a shape or size so as to be prevented from entering the hole.
12. The testing device according to claim 11 ,
wherein the probe card is provided with a plurality of probes and
the position adjusting device includes a rotational position adjusting device adjusting a rotational position of the probe card.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/073,114 US7868635B2 (en) | 2006-02-20 | 2008-02-29 | Probe |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006042313A JP2007218840A (en) | 2006-02-20 | 2006-02-20 | Probe, probe card, and inspecting device |
JPJP2006-042313 | 2006-02-20 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/073,114 Division US7868635B2 (en) | 2006-02-20 | 2008-02-29 | Probe |
Publications (1)
Publication Number | Publication Date |
---|---|
US20070229097A1 true US20070229097A1 (en) | 2007-10-04 |
Family
ID=38496290
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/439,227 Abandoned US20070229097A1 (en) | 2006-02-20 | 2006-05-24 | Probe, probe card, and testing device |
US12/073,114 Expired - Fee Related US7868635B2 (en) | 2006-02-20 | 2008-02-29 | Probe |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/073,114 Expired - Fee Related US7868635B2 (en) | 2006-02-20 | 2008-02-29 | Probe |
Country Status (2)
Country | Link |
---|---|
US (2) | US20070229097A1 (en) |
JP (1) | JP2007218840A (en) |
Cited By (5)
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ITMI20100724A1 (en) * | 2010-04-28 | 2011-10-29 | Technoprobe Spa | METHOD FOR THE CLEANING OF A CONTACT PITCH OF A MICROSTRUCTURE AND RELATED SHUTTER CONTACT PROBE AND HEAD OF MEASURING PROBES [CANTILEVER]. |
US20150123689A1 (en) * | 2010-09-07 | 2015-05-07 | Johnstech International Corporation | Electrically Conductive Pins For Microcircuit Tester |
US20150192614A1 (en) * | 2012-11-28 | 2015-07-09 | Technoprobe S.P.A. | Cantilever contact probe for a testing head |
US10073117B2 (en) | 2010-03-10 | 2018-09-11 | Johnstech International Corporation | Resilient interposer with electrically conductive slide-by pins as part of a microcircuit tester |
CN114167259A (en) * | 2021-12-07 | 2022-03-11 | 华东光电集成器件研究所 | Method for programming and testing on-off of through holes of multi-piece substrate |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101322265B1 (en) | 2007-09-13 | 2013-10-28 | 주식회사 코리아 인스트루먼트 | Test probe apparatus |
JP5361518B2 (en) * | 2009-04-27 | 2013-12-04 | 株式会社ヨコオ | Contact probe and socket |
US20130277095A1 (en) * | 2010-10-15 | 2013-10-24 | Advanced Flexible Circuits Co., Ltd. | Double-side-conducting flexible-circuit flat cable with cluster section |
JP5782261B2 (en) | 2011-01-17 | 2015-09-24 | 株式会社ヨコオ | socket |
IT201800001170A1 (en) * | 2018-01-17 | 2019-07-17 | Technoprobe Spa | Cantilever-type measuring head and relative contact probe |
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
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US10073117B2 (en) | 2010-03-10 | 2018-09-11 | Johnstech International Corporation | Resilient interposer with electrically conductive slide-by pins as part of a microcircuit tester |
US10302675B2 (en) | 2010-03-10 | 2019-05-28 | Johnstech International Corporation | Electrically conductive pins microcircuit tester |
ITMI20100724A1 (en) * | 2010-04-28 | 2011-10-29 | Technoprobe Spa | METHOD FOR THE CLEANING OF A CONTACT PITCH OF A MICROSTRUCTURE AND RELATED SHUTTER CONTACT PROBE AND HEAD OF MEASURING PROBES [CANTILEVER]. |
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CN114167259A (en) * | 2021-12-07 | 2022-03-11 | 华东光电集成器件研究所 | Method for programming and testing on-off of through holes of multi-piece substrate |
Also Published As
Publication number | Publication date |
---|---|
US7868635B2 (en) | 2011-01-11 |
JP2007218840A (en) | 2007-08-30 |
US20080157797A1 (en) | 2008-07-03 |
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