UA86366C2 - Способ осаждения первого материала на подложку, способ осаждения первого материала на титановой основе на подкложку, устройство для осаждения конденсата на подкложку, металлическая деталь - Google Patents

Способ осаждения первого материала на подложку, способ осаждения первого материала на титановой основе на подкложку, устройство для осаждения конденсата на подкложку, металлическая деталь

Info

Publication number
UA86366C2
UA86366C2 UAA200509014A UAA200509014A UA86366C2 UA 86366 C2 UA86366 C2 UA 86366C2 UA A200509014 A UAA200509014 A UA A200509014A UA A200509014 A UAA200509014 A UA A200509014A UA 86366 C2 UA86366 C2 UA 86366C2
Authority
UA
Ukraine
Prior art keywords
support
deposition
condensate
melt
metal part
Prior art date
Application number
UAA200509014A
Other languages
English (en)
Ukrainian (uk)
Inventor
Игорь В. Белоусов
Игорь С. Малашенко
Григорий А. Сергиенко
Евгений А. Шелковой
Роберт Л. Меммен
Девид А. Рутц
Моника Д. КИНСТЛЕР
Original Assignee
Юнайтед Текнолоджиз Корпорейшн
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Юнайтед Текнолоджиз Корпорейшн filed Critical Юнайтед Текнолоджиз Корпорейшн
Publication of UA86366C2 publication Critical patent/UA86366C2/ru

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12639—Adjacent, identical composition, components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12778—Alternative base metals from diverse categories
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)

Abstract

Способ осаждения первого материала на подложку включает расположение подложки в камере для осаждения. Образуют расплав между подложкой и источником первого материала путем расплавления одного или нескольких вторых материалов. Поток первого материала проходит сквозь расплав и от расплава к подложке как поток пара. Практически нерасходная часть расплава включает сплав, который имеет температуру плавления, ниже температуры плавления первого материала.
UAA200509014A 2004-11-17 2005-09-23 Способ осаждения первого материала на подложку, способ осаждения первого материала на титановой основе на подкложку, устройство для осаждения конденсата на подкложку, металлическая деталь UA86366C2 (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/991,605 US7329436B2 (en) 2004-11-17 2004-11-17 Vapor deposition of dissimilar materials

Publications (1)

Publication Number Publication Date
UA86366C2 true UA86366C2 (ru) 2009-04-27

Family

ID=35997795

Family Applications (1)

Application Number Title Priority Date Filing Date
UAA200509014A UA86366C2 (ru) 2004-11-17 2005-09-23 Способ осаждения первого материала на подложку, способ осаждения первого материала на титановой основе на подкложку, устройство для осаждения конденсата на подкложку, металлическая деталь

Country Status (6)

Country Link
US (2) US7329436B2 (ru)
EP (1) EP1659192A1 (ru)
CN (1) CN1776001A (ru)
MX (1) MXPA05012357A (ru)
SG (1) SG122957A1 (ru)
UA (1) UA86366C2 (ru)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100611673B1 (ko) * 2005-01-31 2006-08-10 삼성에스디아이 주식회사 박막 형성 방법 및 유기전계발광소자의 제조 방법
US20070125303A1 (en) * 2005-12-02 2007-06-07 Ward Ruby High-throughput deposition system for oxide thin film growth by reactive coevaportation
US8419857B2 (en) * 2009-03-31 2013-04-16 United Technologies Corporation Electron beam vapor deposition apparatus and method of coating
US20130236659A1 (en) * 2012-03-07 2013-09-12 Honeywell International Inc. Methods for vapor depositing high temperature coatings on gas turbine engine components utilizing pre-alloyed pucks
EP4053303A1 (en) * 2021-03-01 2022-09-07 Carl Zeiss Vision International GmbH Vapor deposition method for coating a spectacle lens, physical vapor deposition system and crucible for physical vapor deposition

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356487A (en) 1966-12-06 1967-12-05 Air Reduction Prevention of splattering during vaporization processing
US3667421A (en) * 1970-09-17 1972-06-06 United Aircraft Corp Mechanism for controlling the thickness of a coating in a vapor deposition apparatus
JPS4848334A (ru) 1971-10-07 1973-07-09
JPS51149008A (en) * 1975-05-23 1976-12-21 Fuji Photo Film Co Ltd Magnetic recording medium manufacturing method
US5500301A (en) * 1991-03-07 1996-03-19 Kabushiki Kaisha Kobe Seiko Sho A1 alloy films and melting A1 alloy sputtering targets for depositing A1 alloy films
US5474809A (en) * 1994-12-27 1995-12-12 General Electric Company Evaporation method
UA21807C2 (ru) 1996-05-17 2000-09-15 Юнайтед Технолоджіз Корп. Пратт Енд Уітні Способ высокоскоростного вакуумного выпаривания металлов и сплавов с использованием ванны-посредника
JPH1149506A (ja) * 1997-07-31 1999-02-23 Kyocera Corp 装飾部材
US6145470A (en) 1998-12-11 2000-11-14 General Electric Company Apparatus for electron beam physical vapor deposition
US6190473B1 (en) 1999-08-12 2001-02-20 The Boenig Company Titanium alloy having enhanced notch toughness and method of producing same
JP2001123255A (ja) * 1999-10-21 2001-05-08 Ykk Corp 高強度アルミニウム合金材の製造方法
AU2957400A (en) 1999-12-29 2001-07-16 International Center For Electron Beam Technologies Of E.O. Paton Electric Welding Institute A method of forming on a substrate a coating of complex alloy containing elements whose evaporation temperatures differ by more than 350 degrees
SG106639A1 (en) * 2000-10-10 2004-10-29 Gen Electric Apparatus and method for introducing small amounts of refractory elements into a vapor deposition coating
US20020121702A1 (en) * 2001-03-01 2002-09-05 Siemens Dematic Electronics Assembly Systems, Inc. Method and structure of in-situ wafer scale polymer stud grid array contact formation
US20050205415A1 (en) * 2004-03-19 2005-09-22 Belousov Igor V Multi-component deposition

Also Published As

Publication number Publication date
US8286582B2 (en) 2012-10-16
EP1659192A1 (en) 2006-05-24
MXPA05012357A (es) 2006-05-19
US20060105195A1 (en) 2006-05-18
CN1776001A (zh) 2006-05-24
SG122957A1 (en) 2006-06-29
US20100285330A1 (en) 2010-11-11
US7329436B2 (en) 2008-02-12

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