UA21807C2 - Спосіб високошвидкісhого вакуумhого випаровуваhhя металів і сплавів з використаhhям ваhhи-посередhика - Google Patents
Спосіб високошвидкісhого вакуумhого випаровуваhhя металів і сплавів з використаhhям ваhhи-посередhикаInfo
- Publication number
- UA21807C2 UA21807C2 UA96051932A UA96051932A UA21807C2 UA 21807 C2 UA21807 C2 UA 21807C2 UA 96051932 A UA96051932 A UA 96051932A UA 96051932 A UA96051932 A UA 96051932A UA 21807 C2 UA21807 C2 UA 21807C2
- Authority
- UA
- Ukraine
- Prior art keywords
- bath
- intermediary
- alloys
- metals
- vacuum evaporation
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
- Manufacture And Refinement Of Metals (AREA)
Abstract
Даний винахід належить до парового осадження металів. Спосіб включає одержання сплаву, що випаровується, розміщеного у водоохолоджуваному мідному тиглі, із застосуванням електронного променя як теплового джерела, нагрівання матеріалу до температури його випаровування й осадження парового потоку. У ванну вводять тугоплавкий метал, температура випаровування якого не нижче температури випаровування компонента сплаву, що випаровується, з найвищою температурою випаровування.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
UA96051932A UA21807C2 (uk) | 1996-05-17 | 1996-05-17 | Спосіб високошвидкісhого вакуумhого випаровуваhhя металів і сплавів з використаhhям ваhhи-посередhика |
DE69732252T DE69732252T2 (de) | 1996-05-17 | 1997-05-05 | Verfahren zur Vakuumbedampfung von Metallen |
EP97204158A EP0969115B1 (en) | 1996-05-17 | 1997-05-05 | Method of vacuum vaporization of metals |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
UA96051932A UA21807C2 (uk) | 1996-05-17 | 1996-05-17 | Спосіб високошвидкісhого вакуумhого випаровуваhhя металів і сплавів з використаhhям ваhhи-посередhика |
Publications (1)
Publication Number | Publication Date |
---|---|
UA21807C2 true UA21807C2 (uk) | 2000-09-15 |
Family
ID=21689125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
UA96051932A UA21807C2 (uk) | 1996-05-17 | 1996-05-17 | Спосіб високошвидкісhого вакуумhого випаровуваhhя металів і сплавів з використаhhям ваhhи-посередhика |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0969115B1 (uk) |
DE (1) | DE69732252T2 (uk) |
UA (1) | UA21807C2 (uk) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001049892A1 (en) * | 1999-12-29 | 2001-07-12 | United Technology Corporation Pratt & Whitney | A method of forming on a substrate a coating of complex alloy containing elements whose evaporation temperatures differ by more than 350 °c |
SG106639A1 (en) | 2000-10-10 | 2004-10-29 | Gen Electric | Apparatus and method for introducing small amounts of refractory elements into a vapor deposition coating |
US7329436B2 (en) | 2004-11-17 | 2008-02-12 | United Technologies Corporation | Vapor deposition of dissimilar materials |
US20130236659A1 (en) * | 2012-03-07 | 2013-09-12 | Honeywell International Inc. | Methods for vapor depositing high temperature coatings on gas turbine engine components utilizing pre-alloyed pucks |
US11325182B2 (en) | 2020-03-12 | 2022-05-10 | Raytheon Technologies Corporation | Method for removing refractory metal cores |
CN113249586B (zh) * | 2021-03-22 | 2023-02-28 | 洛阳双瑞精铸钛业有限公司 | 一种用于eb炉熔炼钛合金的双层式冷凝罩 |
CN113249587B (zh) * | 2021-03-22 | 2022-10-18 | 洛阳双瑞精铸钛业有限公司 | 一种用于eb炉熔炼钛合金的组合式冷凝罩 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3356487A (en) * | 1966-12-06 | 1967-12-05 | Air Reduction | Prevention of splattering during vaporization processing |
JPS6220865A (ja) * | 1985-07-22 | 1987-01-29 | Mitsubishi Heavy Ind Ltd | 蒸発方法 |
JPH03207852A (ja) * | 1990-01-08 | 1991-09-11 | Nkk Corp | シリコン薄膜の成膜方法 |
US5474809A (en) * | 1994-12-27 | 1995-12-12 | General Electric Company | Evaporation method |
-
1996
- 1996-05-17 UA UA96051932A patent/UA21807C2/uk unknown
-
1997
- 1997-05-05 EP EP97204158A patent/EP0969115B1/en not_active Expired - Lifetime
- 1997-05-05 DE DE69732252T patent/DE69732252T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69732252T2 (de) | 2005-06-23 |
EP0969115A1 (en) | 2000-01-05 |
EP0969115B1 (en) | 2005-01-12 |
DE69732252D1 (de) | 2005-02-17 |
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