TWM598344U

TWM598344U - Vacuum system

Info

Publication number: TWM598344U
Application number: TW109202175U
Authority: TW
Inventors: 陳昭淵
Original assignee: 致揚科技股份有限公司
Priority date: 2020-02-27
Filing date: 2020-02-27
Publication date: 2020-07-11

Abstract

Disclosed is a vacuum system, which includes a chamber unit, a detection unit, a pipeline unit, an output unit, a check unit and a control unit. The detection unit detects the internal air pressure of the chamber unit to generate at least one piece of pressure information. The pipeline unit is connected to the chamber unit and communicates with the interior of the chamber unit. The output unit is connected to the pipeline unit, and the output unit sucks and discharges a gas in the chamber unit through the pipeline unit. The check unit is provided in the pipeline unit. The control unit is electrically connected to the detection unit, the output unit and the check unit. When the control unit receives and determines that the at least one piece of pressure information is lower than a preset pressure standard, the control unit drives the output unit to reduce a current operating rotation speed. By means of the manner, the vacuum system of the present disclosure can achieve the effect of adjusting the rotation speed.

Description

真空系統Vacuum system

本創作關於一種真空系統，特別是關於一種能調整轉速且能充電的真空系統。This creation is about a vacuum system, especially about a vacuum system that can adjust the speed and can be charged.

抽氣系統廣泛地用於半導體處理系統中。在抽氣系統中，半導體晶圓的處理會在反應室中進行。處理期間之處理反應室中的反應氣體之壓力會藉由真空泵或抽氣機構而保持相當低的處理壓力。正常的製程處理過程中，藉由真空泵抽氣，將反應腔內部的氣體以及反應生成物、副產物等灰塵顆粒抽走，使反應腔內處於真空負壓狀態。Air extraction systems are widely used in semiconductor processing systems. In the pumping system, the processing of semiconductor wafers is carried out in the reaction chamber. During the processing, the pressure of the reaction gas in the processing reaction chamber is maintained at a relatively low processing pressure by means of a vacuum pump or an air extraction mechanism. In the normal processing process, the gas in the reaction chamber and dust particles such as reaction products and by-products are drawn away by vacuum pumping, so that the reaction chamber is in a vacuum negative pressure state.

然而，目前抽氣系統中的真空泵或抽氣機構的運轉速度都維持相同轉速，而無法調整。並且，現有的抽氣系統在停電時，也無任何避免汙染源回流反應室的機制。However, the operating speed of the vacuum pump or the pumping mechanism in the current pumping system maintains the same rotation speed and cannot be adjusted. In addition, the existing air extraction system does not have any mechanism to prevent the pollution source from returning to the reaction chamber when the power is cut off.

故，如何通過結構設計的改良，來克服上述的缺陷，已成為本領域所欲解決的重要課題之一。Therefore, how to overcome the above-mentioned shortcomings through the improvement of structural design has become one of the important issues to be solved in this field.

本創作所要解決的技術問題在於，針對現有技術的不足提供一種真空系統。The technical problem to be solved by this creation is to provide a vacuum system for the shortcomings of the existing technology.

為了解決上述的技術問題，本創作所採用的其中一技術方案是提供一種真空系統，其包括一腔室單元、一偵測單元、一管路單元、一輸出單元、一止逆單元以及一控制單元。偵測單元偵測該腔室單元的內部氣壓，以產生至少一壓力資訊。管路單元連接於該腔室單元，並與該腔室單元的內部相通。輸出單元連接於該管路單元，該輸出單元通過該管路單元吸取且排出該腔室單元中的一氣體。止逆單元設置於該管路單元。控制單元電性連接該偵測單元、該輸出單元以及該止逆單元，該控制單元接收且判斷至少一該壓力資訊低於一預設氣壓標準時，該控制單元驅使該輸出單元降低一當前運作轉速。In order to solve the above technical problems, one of the technical solutions adopted in this creation is to provide a vacuum system, which includes a chamber unit, a detection unit, a pipeline unit, an output unit, a non-return unit, and a control unit. unit. The detecting unit detects the internal air pressure of the chamber unit to generate at least one pressure information. The pipeline unit is connected to the chamber unit and communicates with the inside of the chamber unit. The output unit is connected to the pipeline unit, and the output unit sucks and discharges a gas in the chamber unit through the pipeline unit. The check unit is arranged on the pipeline unit. The control unit is electrically connected to the detection unit, the output unit and the non-return unit. When the control unit receives and determines that at least one piece of the pressure information is lower than a preset air pressure standard, the control unit drives the output unit to reduce a current operating speed .

為了解決上述的技術問題，本創作所採用的另外一技術方案是提供一種真空系統，其包括一腔室單元、一偵測單元、一管路單元、一輸出單元以及一控制單元。偵測單元偵測該腔室單元的內部氣壓，以產生至少一壓力資訊。管路單元連接於該腔室單元，並與該腔室單元的內部相通。輸出單元連接於該管路單元，該輸出單元通過該管路單元吸取且排出該腔室單元中的一氣體。控制單元電性連接該偵測單元以及該輸出單元，該控制單元接收且判斷至少一該壓力資訊低於一預設氣壓標準時，該控制單元驅使該輸出單元降低一當前運作轉速。In order to solve the above technical problem, another technical solution adopted in this creation is to provide a vacuum system, which includes a chamber unit, a detection unit, a pipeline unit, an output unit, and a control unit. The detecting unit detects the internal air pressure of the chamber unit to generate at least one pressure information. The pipeline unit is connected to the chamber unit and communicates with the inside of the chamber unit. The output unit is connected to the pipeline unit, and the output unit sucks and discharges a gas in the chamber unit through the pipeline unit. The control unit is electrically connected to the detection unit and the output unit. When the control unit receives and determines that at least one piece of the pressure information is lower than a preset air pressure standard, the control unit drives the output unit to reduce a current operating speed.

為了解決上述的技術問題，本創作所採用的另外再一技術方案是提供一種真空系統，其包括一腔室單元、一管路單元、一輸出單元、一止逆單元以及一控制單元。管路單元連接於該腔室單元，並與該腔室單元的內部相通。輸出單元連接於該管路單元，該輸出單元通過該管路單元吸取且排出該腔室單元中的一氣體。止逆單元設置於該管路單元，並電性連接該輸出單元。控制單元電性連接該輸出單元以及該止逆單元。其中，在該控制單元驅使該輸出單元進行一降速作動，以降低該輸出單元的一當前運作轉速時，該輸出單元依據該降速作動而產生一電能，且該止逆單元接收且儲存該電能。In order to solve the above-mentioned technical problems, another technical solution adopted in this creation is to provide a vacuum system, which includes a chamber unit, a pipeline unit, an output unit, a non-return unit and a control unit. The pipeline unit is connected to the chamber unit and communicates with the inside of the chamber unit. The output unit is connected to the pipeline unit, and the output unit sucks and discharges a gas in the chamber unit through the pipeline unit. The check unit is arranged on the pipeline unit and is electrically connected to the output unit. The control unit is electrically connected to the output unit and the anti-reverse unit. Wherein, when the control unit drives the output unit to perform a speed reduction operation to reduce a current operating speed of the output unit, the output unit generates an electric energy according to the speed reduction operation, and the non-return unit receives and stores the Electrical energy.

本創作的其中一有益效果在於，本創作所提供的真空系統，其能通過“偵測單元偵測該腔室單元的內部氣壓，以產生至少一壓力資訊”、“輸出單元連接於該管路單元，該輸出單元通過該管路單元吸取且排出該腔室單元中的一氣體”以及“控制單元電性連接該偵測單元、該輸出單元以及該止逆單元，該控制單元接收且判斷至少一該壓力資訊低於一預設氣壓標準時，該控制單元驅使該輸出單元降低一當前運作轉速”的技術方案，以達到調整轉速的功效。One of the beneficial effects of this creation is that the vacuum system provided by this creation can detect the internal air pressure of the chamber unit through the detection unit to generate at least one pressure information, and the output unit is connected to the pipeline Unit, the output unit sucks and discharges a gas in the chamber unit through the pipeline unit" and "the control unit is electrically connected to the detection unit, the output unit and the non-return unit, and the control unit receives and determines at least When the pressure information is lower than a preset air pressure standard, the control unit drives the output unit to reduce a current operating speed" technical solution to achieve the effect of adjusting the speed.

本創作的另外一有益效果在於，本創作所提供的真空系統，其能通過“輸出單元連接於該管路單元，該輸出單元通過該管路單元吸取且排出該腔室單元中的一氣體”、“止逆單元設置於該管路單元，並電性連接該輸出單元”、“控制單元電性連接該輸出單元以及該止逆單元”以及“在該控制單元驅使該輸出單元進行一降速作動，以降低該輸出單元的一當前運作轉速時，該輸出單元依據該降速作動而產生一電能，且該止逆單元接收且儲存該電能”的技術方案，以達到充電的功效。Another beneficial effect of this creation is that the vacuum system provided by this creation can be connected to the pipeline unit through an output unit, and the output unit sucks and discharges a gas in the chamber unit through the pipeline unit. , "The non-return unit is installed in the pipeline unit and is electrically connected to the output unit", "The control unit is electrically connected to the output unit and the non-reverse unit", and "The control unit drives the output unit to perform a speed reduction When the output unit is operated to reduce a current operating speed of the output unit, the output unit generates an electric energy according to the deceleration operation, and the non-return unit receives and stores the electric energy" to achieve the charging effect.

為使能更進一步瞭解本創作的特徵及技術內容，請參閱以下有關本創作的詳細說明與圖式，然而所提供的圖式僅用於提供參考與說明，並非用來對本創作加以限制。In order to further understand the features and technical content of this creation, please refer to the following detailed descriptions and drawings about this creation. However, the provided drawings are only for reference and explanation, not to limit this creation.

以下是通過特定的具體實施例來說明本創作所公開有關“真空系統”的實施方式，本領域技術人員可由本說明書所公開的內容瞭解本創作的優點與效果。本創作可通過其他不同的具體實施例加以施行或應用，本說明書中的各項細節也可基於不同觀點與應用，在不悖離本創作的構思下進行各種修改與變更。並且，本創作的附圖僅為簡單示意說明，並非依實際尺寸的描繪，事先聲明。以下的實施方式將進一步詳細說明本創作的相關技術內容，但所公開的內容並非用以限制本創作的保護範圍。另外，本文中所使用的術語“或”，應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。The following is a specific embodiment to illustrate the implementation of the "vacuum system" disclosed in this creation, and those skilled in the art can understand the advantages and effects of this creation from the content disclosed in this specification. This creation can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this creation. In addition, the drawings in this creation are merely schematic illustrations, and are not depicted in actual size, and are stated in advance. The following implementations will further describe the related technical content of this creation in detail, but the disclosed content is not intended to limit the protection scope of this creation. In addition, the term "or" used in this document may include any one or a combination of more of the associated listed items depending on the actual situation.

[第一實施例][First Embodiment]

請參閱圖1，為本創作第一實施例的真空系統的功能方塊圖。如圖所示，本創作第一實施例提供一種真空系統Z，其包括一腔室單元1、一偵測單元2、一管路單元3、一輸出單元4、一止逆單元5以及一控制單元6。偵測單元2偵測腔室單元1的內部氣壓，以產生至少一個壓力資訊。管路單元3連接於腔室單元1，並與腔室單元1的內部相通。輸出單元4連接於管路單元3，輸出單元4通過管路單元3吸取且排出腔室單元1中的一氣體。止逆單元5設置於管路單元3。控制單元6電性連接偵測單元2、輸出單元4以及止逆單元5，控制單元6接收且判斷至少一壓力資訊低於一預設氣壓標準時，控制單元6驅使輸出單元4降低一當前運作轉速。Please refer to FIG. 1, which is a functional block diagram of the vacuum system of the first embodiment of the creation. As shown in the figure, the first embodiment of this creation provides a vacuum system Z, which includes a chamber unit 1, a detection unit 2, a pipeline unit 3, an output unit 4, a non-return unit 5, and a control Unit 6. The detecting unit 2 detects the internal air pressure of the chamber unit 1 to generate at least one piece of pressure information. The pipeline unit 3 is connected to the chamber unit 1 and communicates with the inside of the chamber unit 1. The output unit 4 is connected to the pipeline unit 3, and the output unit 4 sucks and discharges a gas in the chamber unit 1 through the pipeline unit 3. The check unit 5 is provided in the pipeline unit 3. The control unit 6 is electrically connected to the detection unit 2, the output unit 4, and the non-return unit 5. When the control unit 6 receives and determines that at least one piece of pressure information is lower than a preset air pressure standard, the control unit 6 drives the output unit 4 to reduce a current operating speed .

具體來說，本創作所提供的真空系統Z包括了腔室單元1、偵測單元2、管路單元3、輸出單元4、止逆單元5以及控制單元6。腔室單元1可為半導體處理設備或化學處理設備中的反應室，但不以此為限。偵測單元2可為氣壓感測組件，但不以此為限；偵測單元2可設置於腔室單元1內部或外部，並偵測腔室單元1的內部氣壓，以產生至少一個壓力資訊，例如氣壓值或氣壓訊號。管路單元3設置於腔室單元1與輸出單元4之間，並連通腔室單元1與輸出單元4。輸出單元4可為真空泵裝置，輸出單元4可藉由管路單元3抽取腔室單元1中的氣體後，並該氣體排出至腔室單元1的外部。止逆單元5設置於管路單元3上，用於開通或中斷管路單元3，以導通或截斷腔室單元1與輸出單元4之間的通路。控制單元6可為控制設備，控制單元6電性連接偵測單元2、輸出單元4以及止逆單元5。Specifically, the vacuum system Z provided by this creation includes a chamber unit 1, a detection unit 2, a pipeline unit 3, an output unit 4, a check unit 5, and a control unit 6. The chamber unit 1 can be a reaction chamber in a semiconductor processing equipment or a chemical processing equipment, but is not limited to this. The detection unit 2 can be an air pressure sensing component, but is not limited to this; the detection unit 2 can be arranged inside or outside the chamber unit 1 and detect the internal air pressure of the chamber unit 1 to generate at least one piece of pressure information , Such as air pressure value or air pressure signal. The pipeline unit 3 is arranged between the chamber unit 1 and the output unit 4 and communicates with the chamber unit 1 and the output unit 4. The output unit 4 may be a vacuum pump device, and the output unit 4 may extract the gas in the chamber unit 1 through the pipeline unit 3 and discharge the gas to the outside of the chamber unit 1. The non-return unit 5 is arranged on the pipeline unit 3 and is used to open or interrupt the pipeline unit 3 to conduct or intercept the passage between the chamber unit 1 and the output unit 4. The control unit 6 may be a control device, and the control unit 6 is electrically connected to the detection unit 2, the output unit 4 and the non-return unit 5.

因此，在偵測單元2產生壓力資訊後，控制單元6可接收壓力資訊，並將壓力資訊與預設氣壓標準進行比較；其中，比較方式可為將所測得的氣壓值與控制單元6中做為比較基準的預設氣壓值進行比較，但不以此為限，預設氣壓值可由操作者或使用者依據所需自行設定，單位可為帕斯卡（或簡稱帕，Pa）。當控制單元6判別壓力資訊低於預設氣壓標準時，控制單元6驅使輸出單元4降低當前運作轉速，以減緩抽氣速度。Therefore, after the detection unit 2 generates the pressure information, the control unit 6 can receive the pressure information and compare the pressure information with the preset air pressure standard; wherein the comparison method can be to compare the measured air pressure value with the control unit 6 The preset air pressure value is used as a comparison basis for comparison, but it is not limited to this. The preset air pressure value can be set by the operator or user according to the needs, and the unit can be Pascal (or Pa for short). When the control unit 6 determines that the pressure information is lower than the preset air pressure standard, the control unit 6 drives the output unit 4 to reduce the current operating speed to slow down the pumping speed.

相對地，在控制單元6判斷至少一個壓力資訊超過預設氣壓標準時，控制單元6驅使輸出單元4提高當前運作轉速。也就是說，當控制單元6判別壓力資訊超過或高於預設氣壓標準時，控制單元6驅使輸出單元4提高當前運作轉速，以提高抽氣速度。In contrast, when the control unit 6 determines that at least one piece of pressure information exceeds the preset air pressure standard, the control unit 6 drives the output unit 4 to increase the current operating speed. That is to say, when the control unit 6 determines that the pressure information exceeds or exceeds the preset air pressure standard, the control unit 6 drives the output unit 4 to increase the current operating speed to increase the pumping speed.

藉此，本創作所提供的真空系統Z藉由上述的技術方案，來調整輸出單元4的運轉速度的增加或減少，以達到真空泵排氣速率修改的目的，進而修改排氣系統的真空度。In this way, the vacuum system Z provided by the present creation adjusts the increase or decrease of the operating speed of the output unit 4 through the above-mentioned technical solution, so as to achieve the purpose of modifying the exhaust rate of the vacuum pump, thereby modifying the vacuum degree of the exhaust system.

然而，上述所舉的例子只是其中一可行的實施例而並非用以限定本創作。However, the above-mentioned example is only one of the feasible embodiments and is not intended to limit this creation.

[第二實施例][Second Embodiment]

請參閱圖2及圖3，分別為本創作第二實施例的真空系統的第一功能方塊圖以及第二功能方塊圖，並請一併參閱圖1。如圖所示，本實施例的真空系統Z與上述第一實施例的真空系統Z相同的元件的作動方式相似，在此不再贅述，值得注意的是，在本實施例中，輸出單元4可包括一真空泵元件40、一減速元件41以及一轉換元件42。真空泵元件40電性連接控制單元6，並通過管路單元3而與腔室單元1的內部相通。減速元件41電性連接控制單元6，並連接真空泵元件40。轉換元件42連接於減速元件41。其中，在控制單元6判斷至少一個壓力資訊低於預設氣壓標準時，控制單元6驅使減速元件41進行一降速作動，以帶動真空泵元件40降低當前運作轉速，且轉換元件42依據減速元件41的降速作動而產生一電能。Please refer to FIG. 2 and FIG. 3, which are respectively the first functional block diagram and the second functional block diagram of the vacuum system of the second embodiment of the creation, and please refer to FIG. 1 together. As shown in the figure, the vacuum system Z of this embodiment and the vacuum system Z of the above-mentioned first embodiment operate in a manner similar to the same components, which will not be repeated here. It is worth noting that in this embodiment, the output unit 4 It may include a vacuum pump element 40, a deceleration element 41, and a conversion element 42. The vacuum pump element 40 is electrically connected to the control unit 6 and communicates with the inside of the chamber unit 1 through the pipeline unit 3. The deceleration element 41 is electrically connected to the control unit 6 and connected to the vacuum pump element 40. The conversion element 42 is connected to the deceleration element 41. Wherein, when the control unit 6 determines that at least one piece of pressure information is lower than the preset air pressure standard, the control unit 6 drives the deceleration element 41 to perform a deceleration operation to drive the vacuum pump element 40 to reduce the current operating speed, and the conversion element 42 is based on the deceleration element 41 Reduce the speed to generate an electric energy.

舉例來說，本創作的輸出單元4包括了真空泵元件40、減速元件41以及轉換元件42。真空泵元件40可藉由管路單元3而與腔室單元1的內部相通。減速元件41可為減速裝置，例如減速機，但不以此為限。轉換元件42可為能量轉換組件，可用於將減速元件41的動能轉換成電能。因此，在控制單元6判斷壓力資訊低於預設氣壓標準時，控制單元6可驅使減速元件41進行作動，以對真空泵元件40進行降速作動，降低轉速；同時，轉換元件42可根據減速元件41的作動，而將減速元件41所產生的動能轉換為電能。For example, the output unit 4 of this creation includes a vacuum pump element 40, a deceleration element 41, and a conversion element 42. The vacuum pump element 40 can communicate with the inside of the chamber unit 1 through the pipe unit 3. The deceleration element 41 may be a deceleration device, such as a reducer, but is not limited thereto. The conversion element 42 may be an energy conversion component, which may be used to convert the kinetic energy of the deceleration element 41 into electrical energy. Therefore, when the control unit 6 determines that the pressure information is lower than the preset air pressure standard, the control unit 6 can drive the deceleration element 41 to act, so as to reduce the speed of the vacuum pump element 40 and reduce the rotation speed. At the same time, the conversion element 42 can act according to the deceleration element 41 The kinetic energy generated by the deceleration element 41 is converted into electric energy.

進一步地，止逆單元5可包括一閥門元件50以及一儲能元件51。閥門元件50電性連接控制單元6，閥門元件50設置於管路單元3。儲能元件51電性連接閥門元件50與轉換元件42，儲能元件51接收並儲存電能。其中，在真空泵元件40停止運作時，控制單元6依據儲能元件51的電能而驅使閥門元件50進行一閉閥作動，以使腔室單元1的內部呈一封閉狀態。Furthermore, the check unit 5 may include a valve element 50 and an energy storage element 51. The valve element 50 is electrically connected to the control unit 6, and the valve element 50 is disposed in the pipeline unit 3. The energy storage element 51 is electrically connected to the valve element 50 and the conversion element 42, and the energy storage element 51 receives and stores electric energy. Wherein, when the vacuum pump element 40 stops operating, the control unit 6 drives the valve element 50 to perform a valve closing operation according to the electric energy of the energy storage element 51, so that the inside of the chamber unit 1 is in a closed state.

舉例來說，配合圖2所示，本創作的止逆單元5包括了閥門元件50以及儲能元件51。閥門元件50設置於管路單元3上，可用於開通或中斷管路單元3。儲能元件51可為能重複充放電的電池，但不以此為限；儲能元件51電性連接閥門元件50、轉換元件42以及控制單元6。因此，在轉換元件42將減速元件41所產生的動能轉換為電能後，儲能元件51即可將該電能進行儲存。因此，在真空系統Z遇到停電而導致真空泵元件40停止運作時，即可藉由儲能元件51對閥門元件50以及控制單元6進行緊急供電，使得控制單元6能驅使閥門元件50進行閉閥作動，以截斷腔室單元1與真空泵元件40之間的通路，而使腔室單元1的內部呈封閉狀態，進而避免外部的汙染源經由管路單元3回流進入腔室單元1的內部。藉此，本創作的真空系統Z可利用真空泵元件40減速時的能量對閥門元件50的備用電源進行充電且管理，以達到閥門元件50在停電狀態下，可使用儲能元件51快速的進行危險避免。For example, as shown in FIG. 2, the non-return unit 5 of the present invention includes a valve element 50 and an energy storage element 51. The valve element 50 is arranged on the pipeline unit 3 and can be used to open or interrupt the pipeline unit 3. The energy storage element 51 may be a battery that can be repeatedly charged and discharged, but is not limited to this; the energy storage element 51 is electrically connected to the valve element 50, the conversion element 42 and the control unit 6. Therefore, after the conversion element 42 converts the kinetic energy generated by the deceleration element 41 into electrical energy, the energy storage element 51 can store the electrical energy. Therefore, when the vacuum system Z encounters a power outage and the vacuum pump element 40 stops operating, the energy storage element 51 can be used to provide emergency power to the valve element 50 and the control unit 6 so that the control unit 6 can drive the valve element 50 to close the valve. Actuated to cut off the passage between the chamber unit 1 and the vacuum pump element 40, and make the interior of the chamber unit 1 in a closed state, thereby preventing external pollution sources from flowing back into the chamber unit 1 via the pipeline unit 3. In this way, the vacuum system Z of the present invention can use the energy of the vacuum pump element 40 to charge and manage the backup power supply of the valve element 50, so that when the valve element 50 is in a power failure state, the energy storage element 51 can be used to quickly carry out danger avoid.

更進一步地，止逆單元5可包括一閥門元件50、一儲能元件51以及一處理元件52。閥門元件50電性連接控制單元6，閥門元件50設置於管路單元3。儲能元件51電性連接閥門元件50與轉換元件42，儲能元件51接收並儲存電能。處理元件52電性連接閥門元件50與儲能元件51。其中，在真空泵元件40停止運作時，處理元件52驅使閥門元件50進行一閉閥作動，以使腔室單元1的內部呈一封閉狀態。Furthermore, the check unit 5 may include a valve element 50, an energy storage element 51 and a processing element 52. The valve element 50 is electrically connected to the control unit 6, and the valve element 50 is disposed in the pipeline unit 3. The energy storage element 51 is electrically connected to the valve element 50 and the conversion element 42, and the energy storage element 51 receives and stores electric energy. The processing element 52 is electrically connected to the valve element 50 and the energy storage element 51. Wherein, when the vacuum pump element 40 stops operating, the processing element 52 drives the valve element 50 to perform a valve closing action, so that the inside of the chamber unit 1 is in a closed state.

舉例來說，配合圖2與圖3的比較所示，本創作的止逆單元5還可進一步包括處理元件52，其可為具有控制功能的處理器。處理元件52可電性連接閥門元件50與儲能元件51。因此，在真空系統Z遇到停電而導致真空泵元件40停止運作時，即可藉由儲能元件51對閥門元件50以及處理元件52進行緊急供電，使得處理元件52能驅使閥門元件50進行閉閥作動，以截斷腔室單元1與真空泵元件40之間的通路，而使腔室單元1的內部呈封閉狀態，進而避免外部的汙染源經由管路單元3回流進入腔室單元1的內部。For example, as shown in the comparison between FIG. 2 and FIG. 3, the non-return unit 5 of the present invention may further include a processing element 52, which may be a processor with a control function. The processing element 52 can be electrically connected to the valve element 50 and the energy storage element 51. Therefore, when the vacuum system Z encounters a power failure and the vacuum pump element 40 stops operating, the energy storage element 51 can be used to provide emergency power to the valve element 50 and the processing element 52, so that the processing element 52 can drive the valve element 50 to close the valve. Actuated to cut off the passage between the chamber unit 1 and the vacuum pump element 40, and make the interior of the chamber unit 1 in a closed state, thereby preventing external pollution sources from flowing back into the chamber unit 1 via the pipeline unit 3.

[第三實施例][Third Embodiment]

請參閱圖4，為本創作第三實施例的真空系統的功能方塊圖，並請一併參閱圖1至圖3。如圖所示，本創作第三實施例提供一種真空系統Z，其包括一腔室單元1、一偵測單元2、一管路單元3、一輸出單元4以及一控制單元6。偵測單元2偵測腔室單元1的內部氣壓，以產生至少一個壓力資訊。管路單元3連接於腔室單元1，並與腔室單元1的內部相通。輸出單元4連接於管路單元3，輸出單元4通過管路單元3吸取且排出腔室單元1中的一氣體。控制單元6電性連接偵測單元2以及輸出單元4，控制單元6接收且判斷至少一個壓力資訊低於一預設氣壓標準時，控制單元6驅使輸出單元4降低一當前運作轉速。Please refer to FIG. 4, which is a functional block diagram of the vacuum system according to the third embodiment of the creation, and please refer to FIGS. 1 to 3 together. As shown in the figure, the third embodiment of the present invention provides a vacuum system Z, which includes a chamber unit 1, a detection unit 2, a pipeline unit 3, an output unit 4, and a control unit 6. The detecting unit 2 detects the internal air pressure of the chamber unit 1 to generate at least one piece of pressure information. The pipeline unit 3 is connected to the chamber unit 1 and communicates with the inside of the chamber unit 1. The output unit 4 is connected to the pipeline unit 3, and the output unit 4 sucks and discharges a gas in the chamber unit 1 through the pipeline unit 3. The control unit 6 is electrically connected to the detection unit 2 and the output unit 4. When the control unit 6 receives and determines that at least one piece of pressure information is lower than a preset air pressure standard, the control unit 6 drives the output unit 4 to reduce a current operating speed.

具體來說，配合將圖1至圖3，與圖4比較所示可知，本實施例所提供的真空系統Z相較於前述第一實施例與第二實施例，省略了止逆單元5。因此，同樣地，在本實施例中，當控制單元6判別壓力資訊低於預設氣壓標準時，控制單元6驅使輸出單元4降低當前運作轉速，以減緩抽氣速度。Specifically, as shown by comparing FIGS. 1 to 3 with FIG. 4, it can be seen that the vacuum system Z provided in this embodiment, compared with the foregoing first and second embodiments, omits the non-return unit 5. Therefore, in this embodiment, when the control unit 6 determines that the pressure information is lower than the preset air pressure standard, the control unit 6 drives the output unit 4 to reduce the current operating speed to slow down the pumping speed.

[第四實施例][Fourth Embodiment]

請參閱圖5及圖6，為本創作第四實施例的真空系統的第一功能方塊圖以及第二功能方塊圖，並請一併參閱圖1至圖4。如圖所示，本創作第四實施例提供一種真空系統Z，其包括一腔室單元1、一管路單元3、一輸出單元4、一止逆單元5以及一控制單元6。管路單元3連接於腔室單元1，並與腔室單元1的內部相通。輸出單元4連接於管路單元3，輸出單元4通過管路單元3吸取且排出腔室單元1中的一氣體。止逆單元5設置於管路單元3，並電性連接輸出單元4。控制單元6電性連接輸出單元4以及止逆單元5。其中，在控制單元6驅使輸出單元4進行一降速作動，以降低輸出單元4的一當前運作轉速時，輸出單元4依據降速作動而產生一電能，且止逆單元5接收且儲存電能。Please refer to FIGS. 5 and 6, which are the first functional block diagram and the second functional block diagram of the vacuum system of the fourth embodiment of the creation, and please refer to FIGS. 1 to 4 together. As shown in the figure, the fourth embodiment of the present creation provides a vacuum system Z, which includes a chamber unit 1, a pipeline unit 3, an output unit 4, a non-return unit 5, and a control unit 6. The pipeline unit 3 is connected to the chamber unit 1 and communicates with the inside of the chamber unit 1. The output unit 4 is connected to the pipeline unit 3, and the output unit 4 sucks and discharges a gas in the chamber unit 1 through the pipeline unit 3. The non-return unit 5 is provided in the pipeline unit 3 and is electrically connected to the output unit 4. The control unit 6 is electrically connected to the output unit 4 and the anti-reverse unit 5. Wherein, when the control unit 6 drives the output unit 4 to perform a speed reduction operation to reduce a current operating speed of the output unit 4, the output unit 4 generates an electric energy according to the speed reduction operation, and the anti-reverse unit 5 receives and stores the electric energy.

舉例來說，配合將圖1以及圖4，與圖5比較所示可知，本實施例所提供的真空系統Z相較於前述第一實施例與第三實施例，省略了偵測單元2。並且，在本實施例中，在控制單元6根據操作員控制或程式設定而驅使輸出單元4進行降速作動時，輸出單元4可將降速作動時的動能轉換成電能，且止逆單元5接收且儲存電能。For example, by comparing FIGS. 1 and 4 with FIG. 5, it can be seen that the vacuum system Z provided in this embodiment, compared with the foregoing first and third embodiments, omits the detection unit 2. In addition, in this embodiment, when the control unit 6 drives the output unit 4 to perform deceleration operation according to operator control or program settings, the output unit 4 can convert the kinetic energy during the deceleration operation into electric energy, and the non-reverse unit 5 Receive and store electrical energy.

進一步地，輸出單元4包括一真空泵元件40、一減速元件41以及一轉換元件42。真空泵元件40電性連接控制單元6，並通過管路單元3而與腔室單元1的內部相通。減速元件41電性連接控制單元6，並連接真空泵元件40。轉換元件42，其連接於減速元件41。其中，在控制單元6驅使減速元件41進行降速作動，以帶動真空泵元件40降低當前運作轉速時，轉換元件42依據減速元件41的降速作動而產生電能。Furthermore, the output unit 4 includes a vacuum pump element 40, a deceleration element 41 and a conversion element 42. The vacuum pump element 40 is electrically connected to the control unit 6 and communicates with the inside of the chamber unit 1 through the pipeline unit 3. The deceleration element 41 is electrically connected to the control unit 6 and connected to the vacuum pump element 40. The conversion element 42 is connected to the deceleration element 41. Wherein, when the control unit 6 drives the deceleration element 41 to perform a deceleration operation to drive the vacuum pump element 40 to reduce the current operating speed, the conversion element 42 generates electrical energy according to the deceleration operation of the deceleration element 41.

舉例來說，配合將圖2與圖6比較所示可知，本實施例所提供的真空系統Z相較於前述第二實施例，省略了偵測單元2。因此，在本實施例中，控制單元6可驅使減速元件41進行作動，以對真空泵元件40進行降速作動，降低運轉速度；同時，轉換元件42可根據減速元件41的作動，而將減速元件41所產生的動能轉換為電能。For example, in conjunction with the comparison between FIG. 2 and FIG. 6, it can be seen that compared with the foregoing second embodiment, the vacuum system Z provided in this embodiment omits the detection unit 2. Therefore, in this embodiment, the control unit 6 can drive the deceleration element 41 to actuate to reduce the speed of the vacuum pump element 40 and reduce the operating speed; at the same time, the conversion element 42 can actuate the deceleration element according to the actuation of the deceleration element 41. The kinetic energy produced by 41 is converted into electrical energy.

更進一步地，止逆單元5包括一閥門元件50以及一儲能元件51。閥門元件50電性連接控制單元6，閥門元件50設置於管路單元3。儲能元件51電性連接閥門元件50與轉換元件42，儲能元件51接收並儲存電能。其中，在真空泵元件40停止運作時，控制單元6依據儲能元件51的電能而驅使閥門元件50進行一閉閥作動，以使腔室單元1的內部呈一封閉狀態。Furthermore, the check unit 5 includes a valve element 50 and an energy storage element 51. The valve element 50 is electrically connected to the control unit 6, and the valve element 50 is disposed in the pipeline unit 3. The energy storage element 51 is electrically connected to the valve element 50 and the conversion element 42, and the energy storage element 51 receives and stores electric energy. Wherein, when the vacuum pump element 40 stops operating, the control unit 6 drives the valve element 50 to perform a valve closing operation according to the electric energy of the energy storage element 51, so that the inside of the chamber unit 1 is in a closed state.

舉例來說，配合將圖2與圖6比較所示可知，本實施例所提供的真空系統Z相較於前述第二實施例，省略了偵測單元2。因此，在本實施例中，當真空系統Z遇到停電而導致真空泵元件40停止運作時，即可藉由儲能元件51對閥門元件50以及控制單元6進行緊急供電，使得控制單元6能驅使閥門元件50進行閉閥作動，以截斷腔室單元1與真空泵元件40之間的通路，而使腔室單元1的內部呈封閉狀態，進而避免外部的汙染源經由管路單元3回流進入腔室單元1的內部。藉此，本創作的真空系統Z可利用真空泵元件40減速時的能量對閥門元件50的備用電源進行充電且管理，以達到閥門元件50在停電狀態下，可使用儲能元件51快速的進行危險避免。For example, in conjunction with the comparison between FIG. 2 and FIG. 6, it can be seen that compared with the foregoing second embodiment, the vacuum system Z provided in this embodiment omits the detection unit 2. Therefore, in this embodiment, when the vacuum system Z encounters a power failure and the vacuum pump element 40 stops operating, the energy storage element 51 can be used to provide emergency power to the valve element 50 and the control unit 6, so that the control unit 6 can drive The valve element 50 performs a valve closing action to block the passage between the chamber unit 1 and the vacuum pump element 40, so that the interior of the chamber unit 1 is in a closed state, thereby preventing external pollution sources from flowing back into the chamber unit through the pipeline unit 3 1's interior. In this way, the vacuum system Z of the present invention can use the energy of the vacuum pump element 40 to charge and manage the backup power supply of the valve element 50, so that when the valve element 50 is in a power failure state, the energy storage element 51 can be used to quickly carry out danger avoid.

[實施例的有益效果][Beneficial effects of the embodiment]

本創作的其中一有益效果在於，本創作所提供的真空系統，其能通過“偵測單元2偵測腔室單元1的內部氣壓，以產生至少一個壓力資訊”、“輸出單元4連接於管路單元3，輸出單元4通過管路單元3吸取且排出腔室單元1中的一氣體”以及“控制單元6電性連接偵測單元2、輸出單元4以及止逆單元5，控制單元6接收且判斷至少一壓力資訊低於一預設氣壓標準時，控制單元6驅使輸出單元4降低一當前運作轉速”的技術方案，以達到調整轉速的功效。One of the beneficial effects of this creation is that the vacuum system provided by this creation can detect the internal air pressure of the chamber unit 1 through the “detection unit 2 to generate at least one pressure information” and “the output unit 4 is connected to the pipe The circuit unit 3, the output unit 4 sucks and discharges a gas in the chamber unit 1 through the pipeline unit 3" and "the control unit 6 is electrically connected to the detection unit 2, the output unit 4, and the non-return unit 5, and the control unit 6 receives And when it is judged that at least one piece of pressure information is lower than a preset air pressure standard, the control unit 6 drives the output unit 4 to reduce a “current operating speed” technical solution to achieve the effect of adjusting the speed.

本創作的另外一有益效果在於，本創作所提供的真空系統，其能通過“輸出單元4連接於管路單元3，輸出單元4通過管路單元3吸取且排出腔室單元1中的一氣體”、“止逆單元5設置於管路單元3，並電性連接輸出單元4”、“控制單元6電性連接輸出單元4以及止逆單元5。其中，在控制單元6驅使輸出單元4進行一降速作動，以降低輸出單元4的一當前運作轉速時，輸出單元4依據降速作動而產生一電能，且止逆單元5接收且儲存電能”的技術方案，以達到充電的功效。Another beneficial effect of this creation is that the vacuum system provided by this creation can be connected to the pipeline unit 3 through the output unit 4, and the output unit 4 sucks and discharges a gas in the chamber unit 1 through the pipeline unit 3. ", "The non-reverse unit 5 is provided in the pipeline unit 3 and is electrically connected to the output unit 4", "The control unit 6 is electrically connected to the output unit 4 and the non-reverse unit 5. The control unit 6 drives the output unit 4 to perform When a speed reduction operation is used to reduce a current operating speed of the output unit 4, the output unit 4 generates an electric energy according to the speed reduction operation, and the non-reverse unit 5 receives and stores electric energy" to achieve the charging effect.

更進一步來說，本創作所提供的真空系統Z藉由上述的技術方案，來調整輸出單元4的運轉速度的增加或減少，以達到真空泵排氣速率修改的目的，進而修改排氣系統的真空度。並且，本創作的真空系統Z還可利用真空泵元件40減速時的能量對閥門元件50的備用電源進行充電且管理，以達到閥門元件50在停電狀態下，可使用儲能元件51快速的進行危險避免。Furthermore, the vacuum system Z provided by this creation adjusts the increase or decrease of the operating speed of the output unit 4 through the above-mentioned technical solution, so as to achieve the purpose of modifying the exhaust rate of the vacuum pump, thereby modifying the vacuum of the exhaust system. degree. In addition, the vacuum system Z of the present creation can also use the energy of the vacuum pump element 40 to charge and manage the backup power supply of the valve element 50, so that when the valve element 50 is in a power failure state, the energy storage element 51 can be used to quickly carry out the danger. avoid.

以上所公開的內容僅為本創作的優選可行實施例，並非因此侷限本創作的申請專利範圍，所以凡是運用本創作說明書及圖式內容所做的等效技術變化，均包含於本創作的申請專利範圍內。The content disclosed above is only a preferred and feasible embodiment of this creation, and does not limit the scope of the patent application of this creation. Therefore, all equivalent technical changes made using this creation specification and schematic content are included in the application for this creation Within the scope of the patent.

Z:真空系統 1:腔室單元 2:偵測單元 3:管路單元 4:輸出單元 40:真空泵元件 41:減速元件 42:轉換元件 5:止逆單元 50:閥門元件 51:儲能元件 52:處理元件 6:控制單元 Z: Vacuum system 1: Chamber unit 2: Detection unit 3: Pipeline unit 4: output unit 40: Vacuum pump components 41: Deceleration element 42: Conversion element 5: Non-reverse unit 50: valve components 51: Energy storage element 52: processing components 6: Control unit

圖1為本創作第一實施例的真空系統的功能方塊圖。Figure 1 is a functional block diagram of the vacuum system of the first embodiment of the creation.

圖2為本創作第二實施例的真空系統的第一功能方塊圖。Figure 2 is a first functional block diagram of the vacuum system of the second embodiment of the creation.

圖3為本創作第二實施例的真空系統的第二功能方塊圖。Fig. 3 is a second functional block diagram of the vacuum system of the second embodiment of the creation.

圖4為本創作第三實施例的真空系統的功能方塊圖。Fig. 4 is a functional block diagram of the vacuum system of the third embodiment of the creation.

圖5為本創作第四實施例的真空系統的第一功能方塊圖。Fig. 5 is a first functional block diagram of the vacuum system of the fourth embodiment of the creation.

圖6為本創作第四實施例的真空系統的第二功能方塊圖。Fig. 6 is a second functional block diagram of the vacuum system of the fourth embodiment of the creation.

Z:真空系統 Z: Vacuum system

1:腔室單元 1: Chamber unit

2:偵測單元 2: Detection unit

3:管路單元 3: Pipeline unit

4:輸出單元 4: output unit

5:止逆單元 5: Non-reverse unit

6:控制單元 6: Control unit

Claims

一種真空系統，其包括：一腔室單元；一偵測單元，其偵測該腔室單元的內部氣壓，以產生至少一壓力資訊；一管路單元，其連接於該腔室單元，並與該腔室單元的內部相通；一輸出單元，其連接於該管路單元，該輸出單元通過該管路單元吸取且排出該腔室單元中的一氣體；一止逆單元，其設置於該管路單元；以及一控制單元，其電性連接該偵測單元、該輸出單元以及該止逆單元，該控制單元接收且判斷至少一該壓力資訊低於一預設氣壓標準時，該控制單元驅使該輸出單元降低一當前運作轉速。 A vacuum system, which includes: A chamber unit; A detection unit that detects the internal air pressure of the chamber unit to generate at least one pressure information; A pipeline unit connected to the chamber unit and communicated with the inside of the chamber unit; An output unit connected to the pipeline unit, and the output unit sucks and discharges a gas in the chamber unit through the pipeline unit; A non-return unit installed in the pipeline unit; and A control unit electrically connected to the detection unit, the output unit and the non-return unit. When the control unit receives and determines that at least one piece of the pressure information is lower than a preset air pressure standard, the control unit drives the output unit to lower by one Current operating speed.

如請求項1所述的真空系統，其中，該控制單元判斷至少一該壓力資訊超過該預設氣壓標準時，該控制單元驅使該輸出單元提高該當前運作轉速。The vacuum system according to claim 1, wherein, when the control unit determines that at least one of the pressure information exceeds the preset air pressure standard, the control unit drives the output unit to increase the current operating speed.

如請求項1所述的真空系統，其中，該輸出單元包括：一真空泵元件，其電性連接該控制單元，並通過該管路單元而與該腔室單元的內部相通；一減速元件，其電性連接該控制單元，並連接該真空泵元件；以及一轉換元件，其連接於該減速元件；其中，在該控制單元判斷至少一該壓力資訊低於該預設氣壓標準時，該控制單元驅使該減速元件進行一降速作動，以帶動該真空泵元件降低該當前運作轉速，且該轉換元件依據該減速元件的該降速作動而產生一電能。 The vacuum system according to claim 1, wherein the output unit includes: A vacuum pump element which is electrically connected to the control unit and communicates with the inside of the chamber unit through the pipeline unit; A deceleration element electrically connected to the control unit and to the vacuum pump element; and A conversion element, which is connected to the deceleration element; Wherein, when the control unit determines that at least one of the pressure information is lower than the preset air pressure standard, the control unit drives the deceleration element to perform a deceleration action to drive the vacuum pump element to reduce the current operating speed, and the conversion element is based on the The deceleration action of the deceleration element generates an electric energy.

如請求項3所述的真空系統，其中，該止逆單元包括：一閥門元件，其電性連接該控制單元，該閥門元件設置於該管路單元；一儲能元件，其電性連接該閥門元件與該轉換元件，該儲能元件接收並儲存該電能；其中，在該真空泵元件停止運作時，該控制單元依據該儲能元件的該電能而驅使該閥門元件進行一閉閥作動，以使該腔室單元的內部呈一封閉狀態。 The vacuum system according to claim 3, wherein the non-return unit includes: A valve element electrically connected to the control unit, and the valve element is arranged in the pipeline unit; An energy storage element electrically connected to the valve element and the conversion element, and the energy storage element receives and stores the electrical energy; Wherein, when the vacuum pump element stops operating, the control unit drives the valve element to perform a valve closing operation according to the electric energy of the energy storage element, so that the inside of the chamber unit is in a closed state.

如請求項3所述的真空系統，其中，該止逆單元包括：一閥門元件，其電性連接該控制單元，該閥門元件設置於該管路單元；一儲能元件，其電性連接該閥門元件與該轉換元件，該儲能元件接收並儲存該電能；一處理元件，其電性連接該閥門元件與該儲能元件；其中，在該真空泵元件停止運作時，該處理元件驅使該閥門元件進行一閉閥作動，以使該腔室單元的內部呈一封閉狀態。 The vacuum system according to claim 3, wherein the non-return unit includes: A valve element electrically connected to the control unit, and the valve element is arranged in the pipeline unit; An energy storage element electrically connected to the valve element and the conversion element, and the energy storage element receives and stores the electrical energy; A processing element, which is electrically connected to the valve element and the energy storage element; Wherein, when the vacuum pump element stops operating, the processing element drives the valve element to perform a valve closing action, so that the inside of the chamber unit is in a closed state.

一種真空系統，其包括：一腔室單元；一偵測單元，其偵測該腔室單元的內部氣壓，以產生至少一壓力資訊；一管路單元，其連接於該腔室單元，並與該腔室單元的內部相通；一輸出單元，其連接於該管路單元，該輸出單元通過該管路單元吸取且排出該腔室單元中的一氣體；以及一控制單元，其電性連接該偵測單元以及該輸出單元，該控制單元接收且判斷至少一該壓力資訊低於一預設氣壓標準時，該控制單元驅使該輸出單元降低一當前運作轉速。 A vacuum system, which includes: A chamber unit; A detection unit that detects the internal air pressure of the chamber unit to generate at least one pressure information; A pipeline unit connected to the chamber unit and communicated with the inside of the chamber unit; An output unit connected to the pipeline unit, the output unit sucks and discharges a gas in the chamber unit through the pipeline unit; and A control unit is electrically connected to the detection unit and the output unit. When the control unit receives and determines that at least one piece of the pressure information is lower than a preset air pressure standard, the control unit drives the output unit to reduce a current operating speed.

如請求項6所述的真空系統，其中，該控制單元判斷至少一該壓力資訊超過一預設氣壓標準時，該控制單元驅使該輸出單元提高該當前運作轉速；其中，該輸出單元為一真空泵元件。The vacuum system according to claim 6, wherein when the control unit determines that at least one of the pressure information exceeds a preset air pressure standard, the control unit drives the output unit to increase the current operating speed; wherein the output unit is a vacuum pump element .

一種真空系統，其包括：一腔室單元；一管路單元，其連接於該腔室單元，並與該腔室單元的內部相通；一輸出單元，其連接於該管路單元，該輸出單元通過該管路單元吸取且排出該腔室單元中的一氣體；一止逆單元，其設置於該管路單元，並電性連接該輸出單元；以及一控制單元，其電性連接該輸出單元以及該止逆單元；其中，在該控制單元驅使該輸出單元進行一降速作動，以降低該輸出單元的一當前運作轉速時，該輸出單元依據該降速作動而產生一電能，且該止逆單元接收且儲存該電能。 A vacuum system, which includes: A chamber unit; A pipeline unit connected to the chamber unit and communicated with the inside of the chamber unit; An output unit connected to the pipeline unit, and the output unit sucks and discharges a gas in the chamber unit through the pipeline unit; A non-return unit installed in the pipeline unit and electrically connected to the output unit; and A control unit electrically connected to the output unit and the check unit; Wherein, when the control unit drives the output unit to perform a speed reduction operation to reduce a current operating speed of the output unit, the output unit generates an electric energy according to the speed reduction operation, and the non-return unit receives and stores the Electrical energy.

如請求項8所述的真空系統，其中，該輸出單元包括：一真空泵元件，其電性連接該控制單元，並通過該管路單元而與該腔室單元的內部相通；一減速元件，其電性連接該控制單元，並連接該真空泵元件；以及一轉換元件，其連接於該減速元件；其中，在該控制單元驅使該減速元件進行該降速作動，以帶動該真空泵元件降低該當前運作轉速時，該轉換元件依據該減速元件的該降速作動而產生該電能。 The vacuum system according to claim 8, wherein the output unit includes: A vacuum pump element which is electrically connected to the control unit and communicates with the inside of the chamber unit through the pipeline unit; A deceleration element electrically connected to the control unit and to the vacuum pump element; and A conversion element, which is connected to the deceleration element; Wherein, when the control unit drives the deceleration element to perform the deceleration action to drive the vacuum pump element to reduce the current operating speed, the conversion element generates the electric energy according to the deceleration action of the deceleration element.

如請求項9所述的真空系統，其中，該止逆單元包括：一閥門元件，其電性連接該控制單元，該閥門元件設置於該管路單元；一儲能元件，其電性連接該閥門元件與該轉換元件，該儲能元件接收並儲存該電能；其中，在該真空泵元件停止運作時，該控制單元依據該儲能元件的該電能而驅使該閥門元件進行一閉閥作動，以使該腔室單元的內部呈一封閉狀態。 The vacuum system according to claim 9, wherein the non-return unit includes: A valve element electrically connected to the control unit, and the valve element is arranged in the pipeline unit; An energy storage element electrically connected to the valve element and the conversion element, and the energy storage element receives and stores the electrical energy; Wherein, when the vacuum pump element stops operating, the control unit drives the valve element to perform a valve closing operation according to the electric energy of the energy storage element, so that the inside of the chamber unit is in a closed state.