TWM576710U

TWM576710U - Chemical replacement system

Info

Publication number: TWM576710U
Application number: TW107215494U
Authority: TW
Inventors: 楊元凱; 熊天林; 林清海
Original assignee: 宇辰系統科技股份有限公司
Priority date: 2018-11-14
Filing date: 2018-11-14
Publication date: 2019-04-11

Abstract

本新型提出一種化學換裝系統，係包括：至少一身分訊息攜載單元、至少一料品訊息攜載單元、至少一機台訊息攜載單元、以及至少一可攜式電子裝置。特別地，在該可攜式電子裝置以其讀取單元讀取該些訊息攜載單元所攜載的基礎訊息之後，後端的中央監控系統便可以在確認操作人員是否具有機台操作權限以及該料品容置器所盛裝的料品之品名、批號、有效日期、與序號是否正確之後，自動地解除機台的櫃門，令操作人員接著進行相關料品的去舊換新作業。如此方式，係能夠確保所有機台的料品更換皆在電子化的系統管理下進行，免除任何的紙本記錄，是以能夠有效避免在執行料品的去舊換新的程序過程中發生人為操作異常。 The present invention provides a chemical transposition system comprising: at least one identity message carrying unit, at least one item message carrying unit, at least one machine message carrying unit, and at least one portable electronic device. In particular, after the portable electronic device reads the basic information carried by the message carrying units with its reading unit, the central monitoring system of the back end can confirm whether the operator has the operating authority of the machine and the After the item name, batch number, expiration date, and serial number of the item contained in the item container are correct, the door of the machine is automatically released, so that the operator can carry out the old and new operation of the related item. In this way, it is ensured that the item replacement of all the machines is carried out under the electronic system management, and any paper record is exempted, so that it can effectively avoid the occurrence of artifacts in the process of executing the replacement of the item. The operation is abnormal.

Description

化學換裝系統 Chemical dressing system

本新型係關於半導體製程的技術領域，尤指用於協助積體電路製造廠(IC foundry)能夠透過線上檢核的方式安全地完成化學儲液桶(Chemical container)的更換作業。 This new type relates to the technical field of semiconductor manufacturing, especially to assist IC foundry to safely complete the replacement of chemical containers by means of online inspection.

化學機械研磨/化學液(Chemical Mechanical Polishing,CMP)/(Chemical fluid)目前已被廣泛地用於半導體IC製造程序之中的全面性平坦化製程。執行CMP製程時，必須將晶圓放置在一晶圓承載體(Carrier/Head)與表面鋪有拋光墊的一旋轉工作台之間。並且，以具有拋光墊的該旋轉工作台對晶圓執行全面性平坦化的過程中，一化學流體拋光液(Chemical mechanical polishing slurry)會經由一噴注管不斷地噴向晶圓表面。可想而知，拋光墊與化學流體拋光液(簡稱“研磨液”)或其他化學液為CMP製程之中或其他製程的耗材，必須由現場操作人員定時或定期進行更換。 Chemical Mechanical Polishing (CMP)/(Chemical fluid) has been widely used in a comprehensive planarization process in semiconductor IC fabrication processes. When performing a CMP process, the wafer must be placed between a carrier carrier (Carrier/Head) and a rotating table with a polishing pad on the surface. Moreover, during the overall planarization of the wafer by the rotary table having the polishing pad, a chemical mechanical polishing slurry is continuously sprayed onto the wafer surface via a nozzle. It is conceivable that polishing pads and chemical fluid polishing fluids ("abrasives") or other chemical fluids are used in CMP processes or other processes, and must be replaced periodically or periodically by field operators.

必須補充說明的是，隨著半導體IC製造技術的線寬不斷地微縮，製程技術也跟著改變。例如，傳統上應用於全面性平坦化製程的化學機械研磨技術也被轉用於高介電質金屬閘極(High-K metal gate)的製造程序之中。然而，由於金屬閘極的線寬多為16奈米以下，因此在注入研磨液或其他化學液至相關製造平台之前，係必須先以過濾器對研磨液或其他化學液進行過濾程序，藉此方式去除研磨液或其他化學液所帶有的尺寸大於100奈米的顆粒。可想而知，過濾器的濾心或濾材自然也是CMP製程之中的耗材，必須由現場操作人員定時或定期進行更換。 It must be added that as the line width of semiconductor IC manufacturing technology continues to shrink, process technology has also changed. For example, chemical mechanical polishing techniques traditionally applied to a comprehensive planarization process have also been transferred to the fabrication process of high-k metal gates. However, since the metal gate has a line width of 16 nm or less, it is necessary to filter the slurry or other chemical solution with a filter before injecting the slurry or other chemical liquid into the relevant manufacturing platform. The method removes particles larger than 100 nm from the slurry or other chemical solution. It is conceivable that the filter core or filter material is naturally a consumable in the CMP process and must be replaced periodically or periodically by the field operator.

然而，根據積體電路製造廠(IC foundry)所提供的實務操作經驗，可以發現目前使用的研磨液或其他化學液與/或濾心更換程序存在著一個重大缺陷，說明如下。研磨液或其他化學液與/或濾心之更換作業與歷史係透過紙本記錄，且紙本記錄內容至少包括：更換人員姓名、更換人員工號、更換時間、更換品料號、品料上機時間、與品料下機時間等。然而，肇因於更換作業與紙本記錄同時由人力完成，一旦在執行程序的過程中發生人為操作異常，例如操作人員以料號不符的研磨液或其他化學液進行換裝，類似這種的人為操作錯誤勢必導致積體電路製造廠(IC foundry)與其客戶的重大損失。 However, based on the practical experience provided by IC foundry, it can be found that there is a major defect in the currently used slurry or other chemical and/or filter replacement procedures, as explained below. The replacement work and history of the slurry or other chemical liquid and/or filter are recorded on the paper, and the contents of the paper record include at least: the name of the replacement person, the employee number of the replacement, the replacement time, the replacement item number, and the product. Machine time, time with product, etc. However, due to the fact that the replacement work and the paper record are simultaneously completed by human power, once the human operation abnormality occurs during the execution of the program, for example, the operator replaces the slurry or other chemical liquid whose material number does not match, similar to this. Man-made operational errors are bound to result in significant losses to IC foundry and its customers.

由上述說明可知，將研磨液或其他化學液與/或濾心之物料管理、更換作業、程序步驟與記錄同步電子化對於積體電路製造廠而言是亟迫切的。如此，積體電路製造廠的廠管便能夠透過中心控制系統而完整、全面性地監控研磨液或其他化學液與/或濾心的更換料號是否正確以及操作人員是否具備換裝權限。有鑑於此，本新型之創作人係極力加以研究創作，而終於研發完成本新型之一種化學換裝系統。 As can be seen from the above description, the electronic management of the polishing liquid or other chemical liquid and/or the filter material, the replacement operation, the program steps and the recording synchronization are urgent for the integrated circuit manufacturer. In this way, the plant of the integrated circuit manufacturer can completely and comprehensively monitor the replacement of the slurry or other chemical liquid and/or filter through the central control system. Is the number correct and the operator has the right to change. In view of this, the creators of this new type have tried their best to research and create, and finally developed a chemical dressing system of this new type.

積體電路製造廠(IC foundry)所提供的實務操作經驗指出，研磨液或其他化學液與/或濾心之更換作業與歷史通常僅透過紙本記錄。然而，肇因於更換作業與紙本記錄皆由人力所完成，一旦在執行程序的過程中發生人為操作異常，例如：操作人員以料號不符的研磨液或其他化學液進行化學換裝，類似這種的人為操作錯誤勢必導致積體電路製造廠(IC foundry)與其客戶的重大損失。本新型之主要目的在於提供一種化學換裝系統，係包括：至少一身分訊息攜載單元、至少一料品訊息攜載單元、至少一機台訊息攜載單元、以及至少一可攜式電子裝置。特別地，在該可攜式電子裝置以其讀取單元讀取該些訊息攜載單元所攜載的基礎訊息之後，後端的中央監控系統便可以在確認操作人員是否具有機台操作權限以及該料品容置器所盛裝的料品之品名、批號、有效日期、與序號是否正確之後，自動地解除機台的櫃門，令操作人員接著進行相關料品的去舊換新作業。如此方式，係能夠確保所有機台的料品更換皆在電子化的系統管理下進行，免除任何的紙本記錄，是以能夠有效避免在執行料品的去舊換新的程序過程中發生人為操作異常。 Practical experience provided by IC foundry indicates that the replacement and history of polishing fluids or other chemical fluids and/or filter cartridges is usually only recorded on paper. However, due to the replacement work and the paper record are all completed by manpower, once the human operation abnormality occurs during the execution of the program, for example, the operator performs chemical change with the slurry or other chemical liquid whose material number does not match, similarly This kind of human error will inevitably lead to significant losses to IC foundry and its customers. The main purpose of the present invention is to provide a chemical transposition system comprising: at least one identity message carrying unit, at least one item message carrying unit, at least one machine message carrying unit, and at least one portable electronic device. . In particular, after the portable electronic device reads the basic information carried by the message carrying units with its reading unit, the central monitoring system of the back end can confirm whether the operator has the operating authority of the machine and the After the item name, batch number, expiration date, and serial number of the item contained in the item container are correct, the door of the machine is automatically released, so that the operator can carry out the old and new operation of the related item. In this way, it is ensured that the item replacement of all the machines is carried out under the electronic system management, and any paper record is exempted, so that it can effectively avoid the occurrence of artifacts in the process of executing the replacement of the item. The operation is abnormal.

為了達成上述本新型之主要目的，本新型之創作人係提供所述化學換裝系統的一實施例，係包括：至少一身分訊息攜載單元，係設置於至少一操作人員身分卡之上；至少一料品訊息攜載單元，係設置於至少一料品容置器之上，且該料品容置器係容置有一特定料品；至少一機台訊息攜載單元，係設置於至少一機台之上，且該機台係用以預處理或直接使用該特定料品；以及至少一可攜式電子裝置，係具有一讀取單元；其中，藉由該讀取單元，該可攜式電子裝置可透過讀取該機台訊息攜載單元的方式確認該機台之類型與其運作狀態；同時，藉由該讀取單元，該可攜式電子裝置可透過讀取該身分訊息攜載單元的方式確認持有該操作人員身分卡之一操作人員是否具有操作該機台的權限；其中，藉由該讀取單元，該可攜式電子裝置可透過讀取該料品訊息攜載單元的方式確認該料品容置器所容置的該特定料品之複數個基礎訊息，以確保該料品容置器於該特定料品處於一正常狀態之下被裝入正確的該機台之中。 In order to achieve the above-mentioned main purpose of the present invention, the creator of the present invention provides an embodiment of the chemical refilling system, comprising: at least one identity message carrying unit disposed on at least one operator identity card; At least one item message carrying unit is disposed on at least one item container, and the item container is provided with a specific item; at least one machine message carrying unit is disposed at least Above a machine, and the machine is used for pre-processing or directly using the specific item; and at least one portable electronic device has a reading unit; wherein, by the reading unit, the The portable electronic device can confirm the type of the machine and its operating state by reading the information carrying unit of the machine. At the same time, the portable electronic device can carry the identity information through the reading unit. The manner of carrying the unit confirms whether the operator holding one of the operator identity cards has the authority to operate the machine; wherein the portable unit can carry the message by reading the item by the reading unit single The manner of confirming the plurality of basic messages of the specific item accommodated by the item container to ensure that the item container is loaded into the correct machine under the normal condition of the specific item. Among them.

<本新型> <This new type>

21‧‧‧身分訊息攜載單元 21‧‧‧ Identity Message Carrying Unit

31‧‧‧料品訊息攜載單元 31‧‧‧Site message carrying unit

41‧‧‧機台訊息攜載單元 41‧‧‧ machine information carrying unit

5‧‧‧可攜式電子裝置 5‧‧‧Portable electronic devices

CSRC‧‧‧中央監控系統 CSRC‧‧‧Central Monitoring System

2‧‧‧操作人員身分卡 2‧‧‧Operator ID card

3‧‧‧料品容置器 3‧‧‧ Item Holder

4‧‧‧機台 4‧‧‧ machine

5‧‧‧可攜式電子裝置 5‧‧‧Portable electronic devices

51‧‧‧讀取單元 51‧‧‧Reading unit

6‧‧‧收發裝置 6‧‧‧Transceiver

7‧‧‧控制裝置 7‧‧‧Control device

8‧‧‧電子權杖單元 8‧‧‧Electronic Scepter Unit

S1-S6‧‧‧步驟 S1-S6‧‧‧ steps

<習知> <知知>

無 no

圖1係顯示本新型之一種化學換裝系統的架構圖；圖2係顯示可攜式電子裝置的立體圖；圖3A與圖3B係顯示本新型之化學換裝系統的作業流程圖；圖4A係顯示可攜式電子裝置的螢幕的正視圖；以及圖4B係顯示可攜式電子裝置的螢幕的正視圖。 1 is a structural view showing a chemical transposition system of the present invention; FIG. 2 is a perspective view showing a portable electronic device; and FIGS. 3A and 3B are flowcharts showing the operation of the chemical refilling system of the present invention; 4A is a front view showing a screen of a portable electronic device; and FIG. 4B is a front view showing a screen of the portable electronic device.

為了能夠更清楚地描述本新型所提出之一種化學換裝系統，以下將配合圖式，詳盡說明本新型之較佳實施例。 In order to more clearly describe a chemical dressing system proposed by the present invention, a preferred embodiment of the present invention will be described in detail below with reference to the drawings.

請參閱圖1，係顯示本新型之一種化學換裝系統的架構圖。如圖1所示，本新型之化學換裝系統係於架構組成上主要包括：至少一身分訊息攜載單元21、至少一料品訊息攜載單元31、至少一機台訊息攜載單元41、至少一可攜式電子裝置5、與一中央監控系統CSRC。根據本新型之設計，該身分訊息攜載單元21係設置於一操作人員身分卡2之上。簡單地說，身分訊息攜載單元21用以攜載持有該操作人員身分卡2的一操作人員的基本資料，包括：姓名、工號、所屬單元、職級、與是否完成機台操作的資格考(Qualify)。特別說明的是，完成機台操作的資格考的操作人員才會被允許進行機台操作；另外，職級越高的操作人員被允許進行操作的機台之種類則越多。舉例而言，廠長、高級工程師、與主任工程師皆能夠對不同單位的機台進行操作，但操作人員(Operator,OP)僅被限制對其所屬單位的機台進行操作。 Referring to Figure 1, there is shown an architectural diagram of a chemical dressing system of the present invention. As shown in FIG. 1 , the chemical replacement system of the present invention mainly comprises: at least one identity message carrying unit 21, at least one item message carrying unit 31, at least one machine message carrying unit 41, At least one portable electronic device 5 and a central monitoring system CSRC. According to the design of the present invention, the identity message carrying unit 21 is disposed on an operator identity card 2. Briefly, the identity message carrying unit 21 is used to carry the basic information of an operator who holds the operator identity card 2, including: name, job number, unit, rank, and eligibility for completing the operation of the machine. Qualify. In particular, the operator who completes the qualification test for the machine operation is allowed to operate the machine; in addition, the more types of machines that the higher-ranking operators are allowed to operate, the more. For example, the factory manager, senior engineer, and chief engineer can operate on different units of the machine, but the operator (OP) is only restricted to operate on the machine of the unit to which it belongs.

另一方面，該料品訊息攜載單元31被設置於對應的一料品容置器(Chemical container)3之上，且該料品容置器3係容置有一特定料品。其中，該料品訊息攜載單元31攜載有關於該特定料品的複數個基礎訊息，包括：品名、批號、有效日期、與序號。舉例而言，所述品名可用以顯示該特定料品為化學流體拋光液(Chemical mechanical polishing slurry)、化學研磨液、化學液體、相關耗用材料、O型環、墊片或一研磨液濾心(濾材)。另一方面，該機台訊息攜載單元41係設置於對應的機台4之上，且該機台4係用以預處理或直接使用該特定料品。舉例而言，該機台4為一研磨液供應系統，則該料品容置器3所盛裝者必須是化學流體拋光液(簡稱“研磨液”)。或者，該機台4為一研磨液過濾機台，則該特定料品則為研磨液濾材，且該料品容置器3為過濾器殼體。 On the other hand, the item message carrying unit 31 is disposed on a corresponding one of the chemical containers 3, and the item container 3 houses a specific item. Wherein, the item message carrying unit 31 carries a complex information about the specific item. Several basic messages, including: product name, batch number, effective date, and serial number. For example, the product name may be used to indicate that the specific item is a chemical mechanical polishing slurry, a chemical polishing liquid, a chemical liquid, a related consumable material, an O-ring, a gasket, or a slurry filter. (filter material). On the other hand, the machine information carrying unit 41 is disposed on the corresponding machine 4, and the machine 4 is used for pre-processing or directly using the specific item. For example, if the machine table 4 is a slurry supply system, the container holder 3 must be a chemical fluid polishing liquid (referred to as "grinding liquid"). Alternatively, the machine table 4 is a slurry filter table, and the specific item is a slurry liquid filter, and the item container 3 is a filter case.

由上述說明可知，單位“至少一”係用以表示所述三種訊息攜載單元(21,31,41)的數量為一個或多個。換句話說，這三種訊息攜載單元(21,31,41)的數量的確實數量係決定於該操作人員身分卡2、該料品容置器3與該機台4的數量。另一方面，該可攜式電子裝置5係具有一讀取單元51。藉由該讀取單元51，可攜式電子裝置5可透過讀取該機台訊息攜載單元41的方式確認機台4之一運作狀態。並且，如圖1所示，可攜式電子裝置5係透過一收發裝置而與一中央監控系統CSRC相互溝通，收發裝置6與可攜式電子裝置5間的通訊協定可以是無線通訊網路，包含WIFI、3G、4G、藍芽、Zigbee等，收發裝置6與中央監控系統CSRC間的通訊協定可以是無線通訊網路或有線通訊網路，其中無線通訊網路包含WIFI、3G、4G、藍芽、Zigbee等。且該中央監控系統CSRC則透過一控制裝置7控制該機台4的運作狀態，其中控制裝置7包含可編程式控制裝置 (Programmable logic controller,PLC)或直接數位控制器(Direct Digital Controller,DDC)或對象鏈接與嵌入裝置(Object Linking and Embedding,OLE)或用於流程控制的OLE裝置(OLE for Process Control,OPC)其中之一。因此，在完成該機台訊息攜載單元41的讀取之後，可攜式電子裝置5便可自該中央監控系統CSRC得知該機台4的類型、設定參數及其運作情況。此外，藉由該讀取單元51，該可攜式電子裝置5可進一步地透過讀取該身分訊息攜載單元21的方式確認持有該操作人員身分卡2的操作人員是否具有操作該機台4的權限。 As can be seen from the above description, the unit "at least one" is used to indicate that the number of the three types of message carrying units (21, 31, 41) is one or more. In other words, the exact number of the three types of message carrying units (21, 31, 41) is determined by the number of the operator identity card 2, the item container 3 and the machine 4. On the other hand, the portable electronic device 5 has a reading unit 51. With the reading unit 51, the portable electronic device 5 can confirm the operating state of the machine 4 by reading the information carrying unit 41 of the machine. Moreover, as shown in FIG. 1 , the portable electronic device 5 communicates with a central monitoring system CSRC through a transceiver device, and the communication protocol between the transceiver device 6 and the portable electronic device 5 may be a wireless communication network, including WIFI, 3G, 4G, Bluetooth, Zigbee, etc., the communication protocol between the transceiver device 6 and the central monitoring system CSRC can be a wireless communication network or a wired communication network, wherein the wireless communication network includes WIFI, 3G, 4G, Bluetooth, Zigbee, etc. . And the central monitoring system CSRC controls the operating state of the machine 4 through a control device 7, wherein the control device 7 includes a programmable control device (Programmable logic controller, PLC) or Direct Digital Controller (DDC) or Object Linking and Embedding (OLE) or OLE for Process Control (OPC). one. Therefore, after the reading of the machine information carrying unit 41 is completed, the portable electronic device 5 can know the type, setting parameters and operation status of the machine 4 from the central monitoring system CSRC. In addition, the portable electronic device 5 can further confirm whether the operator holding the operator identity card 2 has the operation of the machine by reading the identity message carrying unit 21 by the reading unit 51. 4 permissions.

特別說明的是，在進行物料更換之前，透過讀取該料品訊息攜載單元31的方式能夠確認該料品容置器3所容置的該特定料品的相關基礎訊息，藉以確保料品容置器3係於該特定料品處於正常狀態之下被裝入正確的該機台4之中。舉例而言，若該機台4為研磨液供應系統，則讀取該料品訊息攜載單元31係能夠確認料品容置器3所容置的該特定料品的品名是否為研磨液。除此之外，讀取該料品訊息攜載單元31還能夠確認該特定料品的批號是否已經被禁用、該特定料品的批號是否具有入庫紀錄、以及該特定料品的保存日是否超過有效日期。 Specifically, before the material exchange is performed, the basic information of the specific item contained in the item container 3 can be confirmed by reading the item information carrying unit 31, thereby ensuring the item. The container 3 is loaded into the correct machine 4 under the normal condition of the particular item. For example, if the machine 4 is a polishing liquid supply system, reading the item information carrying unit 31 can confirm whether the product name of the specific item accommodated in the item container 3 is a polishing liquid. In addition, reading the item message carrying unit 31 can also confirm whether the batch number of the specific item has been disabled, whether the batch number of the specific item has an inbound record, and whether the storage date of the specific item exceeds Effective date.

在料品容置器3被確認屬於正常狀態之後，則中央監控系統CSRC便會自動解除機台4的機櫃的櫃門，此時操作人員可以自該機台4取下已經耗盡該特定料品的該料品容置器3，並將新的料品容置器3裝入該機台4內。並且，當該料品容置器3於該特定料品處於正常狀態的情況下被裝入正確的機台4之後，必須以可攜式電子裝置5再次讀取該身分訊息攜載單元21；之後，該中央監控系統CSRC便會記錄新的料品容置器3的上機時間，並記錄此料品容置器3的狀態為“使用中(In machine)”。相反地，中央監控系統CSRC會將舊的料品容置器3紀錄為空桶(Empty)。同時，中央監控系統CSRC會透過控制裝置7將操作人員的資料(例如：姓名與工號)以及該料品容置器3所容置的該特定料品的批號(或料號)顯示於機台4的人機介面(Human machine interface,HMI)。 After the item container 3 is confirmed to be in a normal state, the central monitoring system CSRC will automatically release the cabinet door of the machine 4, and the operator can remove the specific material from the machine 4 and have exhausted the specific material. The item holder 3 of the product is loaded into the machine table 4 with a new item container 3. And, when the item container 3 is in the normal condition of the specific item After the state is loaded into the correct machine 4, the identity message carrying unit 21 must be read again by the portable electronic device 5; after that, the central monitoring system CSRC records the new item container. The time of the machine is set to 3, and the state of the item container 3 is recorded as "In machine". Conversely, the central monitoring system CSRC will record the old item container 3 as an empty (Empty). At the same time, the central monitoring system CSRC displays the operator's data (for example: name and job number) and the batch number (or item number) of the specific item contained in the item container 3 through the control device 7. The human machine interface (HMI) of the station 4.

雖然圖1係顯示該身分訊息攜載單元21、該料品訊息攜載單元31與該機台訊息攜載單元41皆為一維條碼(1D barcode)，然而不應以此限制所述訊息攜載單元(21,31,41)的實施態樣。於實際應用本新型之時，該身分訊息攜載單元21、該料品訊息攜載單元31與該機台訊息攜載單元41可為下列任一者：圖形、文字、字母、數字、一維條碼(1D barcode)、二維條碼(2D barcode)、漢信碼(Chinese-sensible code)、QR碼、矩陣條碼(Maxicode)、RFID標籤、NFC標籤、上述任兩者之組合、或上述任兩者以上之組合。 Although FIG. 1 shows that the identity message carrying unit 21, the item message carrying unit 31 and the machine message carrying unit 41 are both 1D barcodes, the message carrying should not be limited thereby. Embodiments of the carrying unit (21, 31, 41). When the present invention is actually applied, the identity message carrying unit 21, the item message carrying unit 31 and the machine message carrying unit 41 can be any of the following: graphics, text, letters, numbers, one-dimensional Bar code (1D barcode), 2D barcode, Chinese-sensible code, QR code, matrix barcode (Maxicode), RFID tag, NFC tag, a combination of the above, or both The combination of the above.

以一維條碼(1D barcode)為例，該料品訊息攜載單元31可利用Code 39條碼產生器製作，並使其攜載該料品容置器3所盛裝的該特定料品之品名、批號、有效日期、與序號。值得特別說明的是，為了利於可攜式電子裝置5對於品名、批號、有效日期、與序號之清楚讀取，製作料品訊息攜載單元31的一維條碼之時，必須於相鄰兩個基礎訊息之間係***有一訊息分隔符號(Central seperating character)，例如：%、$、/、~、！、@、#、^、&、*、(、)、-、_、|、{、}、？、<、>、\、[、]或+。 Taking a 1D barcode as an example, the item message carrying unit 31 can be manufactured by using a Code 39 barcode generator and carrying the product name of the specific item contained in the item container 3, Batch number, effective date, and serial number. It should be particularly noted that in order to facilitate the clear reading of the product name, batch number, expiration date, and serial number of the portable electronic device 5, the one-dimensional bar code of the item message carrying unit 31 must be created in the adjacent two. A message separator is inserted between the basic messages (Central seperating) Character), for example: %, $, /, ~, ! , @,#,^,&,*, (,), -, _, |, {,},? , <, >, \, [,] or +.

可想而知，對應於不同實施態樣的訊息攜載單元(21,31,41)，可攜式電子裝置5的讀取單元51可為下列任一者：RFID標籤讀取器、NFC標籤讀取器、影像辨識器、一維條碼讀取器、二維條碼讀取器、漢信碼讀取器、QR碼讀取器、矩陣條碼讀取器、或影像擷取器。若可攜式電子裝置5為智慧型手機、個人數位助理、筆記型電腦、平板電腦、智慧眼鏡、或智慧手錶，則可直接以可攜式電子裝置5內建的影像擷取模組作為該讀取單元51；如此，於該可攜式電子裝置5安裝一影像(或條碼)辨識軟體之後，便能夠藉由配合使用該讀取單元51與該影像辨識單元的方式，令可攜式電子裝置5完成該身分訊息攜載單元21、該料品訊息攜載單元31、與/或該機台訊息攜載單元41之讀取。然而，有鑑於大部分的積體電路製造廠(IC foundry)皆禁止於廠內使用任何類型的智慧型電子裝置，搭載有條碼掃描器(即，讀取單元51)的個人數位助理(Digital personal assistant,PDA)便成為所述可攜式電子裝置5的最佳實施態樣。 It is conceivable that the message carrying unit (21, 31, 41) corresponding to different implementations, the reading unit 51 of the portable electronic device 5 can be any of the following: an RFID tag reader, an NFC tag A reader, an image recognizer, a one-dimensional barcode reader, a two-dimensional barcode reader, a Hanxin code reader, a QR code reader, a matrix barcode reader, or an image capture device. If the portable electronic device 5 is a smart phone, a personal digital assistant, a notebook computer, a tablet computer, a smart glasses, or a smart watch, the image capturing module built in the portable electronic device 5 can be directly used as the smart phone. The reading unit 51; after the image (or barcode) recognition software is installed in the portable electronic device 5, the portable electronic device can be used by using the reading unit 51 and the image recognition unit. The device 5 completes the reading of the identity message carrying unit 21, the item message carrying unit 31, and/or the machine message carrying unit 41. However, in view of the fact that most IC foundry bans the use of any type of smart electronic device in the factory, a personal digital assistant equipped with a barcode scanner (ie, reading unit 51) (Digital personal) The assistant, PDA) is the best embodiment of the portable electronic device 5.

繼續地參閱圖1，並請同時參閱圖2，係顯示可攜式電子裝置的立體圖。值得注意的是，雖然可攜式電子裝置5可以透過讀取身分訊息攜載單元21的方式確認持有該操作人員身分卡2之操作人員是否具有操作該機台4的權限，但是考慮到低職級的操作人員有可能借用高職級的廠長或工程師的操作人員身分卡2而妄加地操作該些不需要更換料品的機台4，本新型又於化學換裝系統之中增設所謂的電子權杖單元(Electronic token unit)8；其中，該電子權杖單元8之中係儲存有一次性認證碼(One-time password,OTP)。特別地，於該可攜式電子裝置5完成該身分訊息攜載單元21的讀取之後，中央監控系統CSRC可透過可攜式電子裝置5要求操作人員提供與電子權杖單元8溝通；之後，可攜式電子裝置5可透過存取所述一次性認證碼的方式，重複確認持有該操作人員身分卡2之該操作人員是否具有操作該機台4的權限，避免高職級的廠長或工程師的操作人員身分卡2被拿來胡亂操作該些不需要更換料品的機台4。本新型並不限制電子權杖單元8的實施態樣，如圖2所示，電子權杖單元8可以是：藍牙電子裝置、USB電子裝置、NFC標籤、或RFID標籤。並且，在可攜式電子裝置5自該電子權杖單元8之中完成所述一次性認證碼的存取之後，可攜式電子裝置5內部的一權杖碼產生單元(未圖示)會重新生成一組一次性認證碼，並寫入該電子權杖單元8之中，藉此方式提高機台4的操作權限。 With continued reference to FIG. 1, and also to FIG. 2, a perspective view of the portable electronic device is shown. It should be noted that although the portable electronic device 5 can confirm whether the operator holding the operator identity card 2 has the authority to operate the machine 4 by reading the identity message carrying unit 21, it is considered to be low. The operator of the rank may use the operator's identity card 2 of the senior rank or the engineer to operate the machine 4 that does not need to replace the item. This new type adds the so-called electric power to the chemical dressing system. An electronic token unit 8; wherein the electronic token unit 8 stores a One-time password (OTP). In particular, after the portable electronic device 5 completes the reading of the identity message carrying unit 21, the central monitoring system CSRC can request the operator to provide communication with the electronic token unit 8 through the portable electronic device 5; The portable electronic device 5 can repeatedly confirm whether the operator holding the operator identity card 2 has the authority to operate the machine 4 by accessing the one-time authentication code, thereby avoiding the senior manager or The engineer's operator ID card 2 is used to manipulate the machine 4 that does not require replacement of the item. The present invention does not limit the implementation of the electronic token unit 8. As shown in FIG. 2, the electronic token unit 8 may be: a Bluetooth electronic device, a USB electronic device, an NFC tag, or an RFID tag. And after the portable electronic device 5 completes the access of the one-time authentication code from the electronic token unit 8, a token code generating unit (not shown) inside the portable electronic device 5 A set of one-time authentication codes is regenerated and written into the electronic token unit 8, thereby improving the operation authority of the machine 4.

如此，上述說明係已完整、清楚地介紹說明本新型之一種化學換裝系統。接著，下文將繼續介紹說明本新型之一種化學換裝作業流程。請重複參閱圖2，並請同時參閱圖3A與圖3B，係顯示本新型之化學換裝系統的作業流程圖。並且，請再同時參閱圖4A與圖4B，係顯示可攜式電子裝置的螢幕的正視圖。如圖2與圖3A所示，所述化學換裝作業流程係首先執行步驟S1，將至少一身分訊息攜載單元21設置於至少一操作人員身分卡2之上，將至少一料品訊息攜載單元31設置於至少一料品容置器3之上，並將至少一機台訊息攜載單元41設置於至少一機台4之上；其中，該料品容置器3容置有一特定料品(例如：研磨液或濾心)，且該機台4用以預處理或直接使用該特定料品。並且，於步驟S2之中，係提供至少一可攜式電子裝置5，且該可攜式電子裝置5具有一讀取單元51(例如：條碼掃描器)。 Thus, the above description has completely and clearly described a chemical dressing system of the present invention. Next, a chemical dressing operation flow illustrating the present invention will be further described below. Please refer to FIG. 2 repeatedly, and please refer to FIG. 3A and FIG. 3B simultaneously, showing the operation flow chart of the chemical replacement system of the present invention. 4A and 4B, a front view of the screen of the portable electronic device is shown. As shown in FIG. 2 and FIG. 3A, the chemical refilling process first performs step S1, and at least one identity message carrying unit 21 is disposed on at least one operator identity card 2 to carry at least one item message. The loading unit 31 is disposed on the at least one item container 3 and sets at least one of the machine information carrying units 41 Placed on at least one machine 4; wherein the item container 3 houses a specific item (for example, a slurry or a filter), and the machine 4 is used for pretreatment or directly using the specific material. Product. In addition, in step S2, at least one portable electronic device 5 is provided, and the portable electronic device 5 has a reading unit 51 (for example, a barcode scanner).

本新型之化學換裝作業流程係接著執行步驟S3，藉由該讀取單元51，令該可攜式電子裝置5透過讀取該機台訊息攜載單元41的方式確認該機台4之一運作狀態。並且，於步驟S4之中，藉由該讀取單元51，該可攜式電子裝置5透過讀取該身分訊息攜載單元21的方式確認持有該操作人員身分卡2之一操作人員是否具有操作該機台4的權限。如圖4A的圖(a)所示，在讀取機台訊息攜載單元41之後，可攜式電子裝置5的螢幕上係顯示機台4的Machine ID，同時該可攜式電子裝置5可自中央監控系統CSRC得知機台4的設定參數與運作情況。如圖4A的圖(b)所示，若操作人員經檢核後確認具有操作該機台4的權限，則中央監控系統CSRC便會透過控制裝置7自動解除機台4的機櫃的櫃門。此時，如圖4A的圖(c)所示，在點選螢幕上的料品更換作業選項之上，操作人員可接著開始進行料品容置器3的去舊換新作業。 The chemical refilling process of the present invention is followed by step S3. The reading unit 51 causes the portable electronic device 5 to confirm one of the machines 4 by reading the information carrying unit 41 of the machine. Operational status. In the step S4, the portable electronic device 5 confirms whether the operator holding the operator identity card 2 has the operator by reading the identity message carrying unit 21. The authority to operate the machine 4. As shown in FIG. 4A (a), after the machine information carrying unit 41 is read, the screen ID of the portable device 5 is displayed on the screen of the portable electronic device 5, and the portable electronic device 5 can be The setting parameters and operation of the machine 4 are known from the central monitoring system CSRC. As shown in the diagram (b) of FIG. 4A, if the operator confirms the authority to operate the machine 4 after checking, the central monitoring system CSRC automatically releases the cabinet door of the machine table 4 through the control device 7. At this time, as shown in the diagram (c) of FIG. 4A, on the item selection operation option on the selection screen, the operator can then start the de-newing operation of the item container 3.

完成步驟S4之後，所述化學換裝作業流程係接著執行步驟S5，藉由該讀取單元51，該可攜式電子裝置5透過讀取該料品訊息攜載單元31的方式確認該料品容置器3所容置的該特定料品之複數個基礎訊息，以確保該料品容置器3於該特定料品處於一正常狀態之下被裝入正確的該機台4之中。如圖4B的圖(a)、圖(b)與圖(c)所示，執行料品容置器3的去舊換新作業之前，操作人員必須以可攜式電子裝置5透過讀取該料品訊息攜載單元31所攜載的複數個基礎訊息，包括：品名、批號、有效日期、與序號。舉例而言，若機台4為研磨液供應系統，則讀取該料品訊息攜載單元31係能夠確認料品容置器3所容置的該特定料品的品名是否為研磨液。除此之外，讀取該料品訊息攜載單元31還能夠確認該特定料品的批號是否已經被禁用、該特定料品的批號是否具有入庫紀錄、以及該特定料品的保存日是否超過有效日期。 After the step S4 is completed, the chemical refilling process is followed by step S5. The portable unit 5 confirms the item by reading the item message carrying unit 31 by the reading unit 51. A plurality of basic messages of the specific item accommodated by the container 3 to ensure that the item container 3 is loaded into the correct machine 4 under the normal condition of the specific item. As shown in Figure (a), Figure (b) and Figure (c) of Figure 4B, the execution material Before the replacement operation of the product container 3, the operator must read the plurality of basic messages carried by the item information carrying unit 31 by the portable electronic device 5, including: product name, batch number, and valid Date, and serial number. For example, if the machine 4 is a polishing liquid supply system, reading the item information carrying unit 31 can confirm whether the product name of the specific item accommodated in the item container 3 is a polishing liquid. In addition, reading the item message carrying unit 31 can also confirm whether the batch number of the specific item has been disabled, whether the batch number of the specific item has an inbound record, and whether the storage date of the specific item exceeds Effective date.

在確認品名、批號、有效日期、與序號皆為正常之後，中央監控系統CSRC便會自動解除機台4的機櫃的櫃門，此時操作人員可以自該機台4取下已經耗盡該特定料品的該料品容置器3，並將新的料品容置器3裝入該機台4內。相反地，若系統發現品名、批號、有效日期、與序號之中有任一者非屬正常，則中央監控系統CSRC不會解除機台4的機櫃的櫃門。此時，操作人員必須更換搭載正確的料品訊息攜載單元31的料品容置器3，並重複執行步驟S1。完成步驟S5之後，所述化學換裝作業流程係接著執行步驟S6：藉由該讀取單元51，該可攜式電子裝置5再次讀取該身分訊息攜載單元21，完成該特定料品於該機台4之中的更換作業(如圖4B的圖(b)與圖(d)所示)。 After confirming that the product name, batch number, expiration date, and serial number are all normal, the CSRC of the central monitoring system will automatically release the cabinet door of the cabinet of the machine 4. At this time, the operator can remove the specific unit from the machine 4 and have exhausted the specific The item holder 3 of the item is loaded into the machine table 4 with a new item container 3. Conversely, if the system finds that any of the product name, batch number, expiration date, and serial number is not normal, the central monitoring system CSRC will not release the cabinet door of the machine cabinet 4. At this time, the operator must replace the item container 3 equipped with the correct item information carrying unit 31, and repeat step S1. After the step S5 is completed, the chemical refilling process is followed by step S6: the portable electronic device 5 reads the identity message carrying unit 21 again by the reading unit 51, and completes the specific item. The replacement work in the machine 4 (shown in Figures (b) and (d) of Figure 4B).

本新型之化學換裝作業流程係透過步驟S4確認持有該操作人員身分卡2之操作人員是否具有操作該機台4的權限。然而，必須預先想到的是，低職級的操作人員有可能借用高職級的廠長或工程師的操作人員身分卡2而妄加胡亂地操作該些不需要更換料品的機台 4，因此，本新型又於此化學換裝作業流程之中增設步驟4A，其可***於該步驟(4)與該步驟(5)之間。執行步驟4A之時，可攜式電子裝置5會要求與一電子權杖單元8(如圖2所示)相互溝通，以重複確認持有該操作人員身分卡2之該操作人員是否具有操作該機台4的權限。簡單地說，可攜式電子裝置5可透過存取該電子權杖單元8之中的一次性認證碼的方式，重複確認持有該操作人員身分卡2之該操作人員是否具有操作該機台4的權限，避免高職級的廠長或工程師的操作人員身分卡2被拿來胡亂操作該些不需要更換料品的機台4。 The chemical refilling operation flow of the present invention confirms whether the operator holding the operator identity card 2 has the authority to operate the machine 4 through step S4. However, it must be preliminarily thought that the lower-ranking operators may use the operator's identity card 2 of the higher-ranking factory manager or engineer to operate the machines that do not need to be replaced. 4. Therefore, the present invention adds a step 4A to the chemical refilling process, which can be inserted between the step (4) and the step (5). When step 4A is performed, the portable electronic device 5 is required to communicate with an electronic token unit 8 (shown in FIG. 2) to repeatedly confirm whether the operator holding the operator identity card 2 has the operation. The authority of the machine 4. Briefly, the portable electronic device 5 can repeatedly confirm whether the operator holding the operator identity card 2 has the operation of the machine by accessing the one-time authentication code in the electronic token unit 8. 4 permission, to avoid the high-ranking factory manager or engineer's operator ID card 2 is used to manipulate the machine 4 that does not need to replace the item.

如此，上述係已完整且清楚地說明本新型之一種化學換裝系統；並且，經由上述可知本新型係具有下列之優點：(1)本新型提出一種化學換裝系統，係包括：至少一身分訊息攜載單元21、至少一料品訊息攜載單元31、至少一機台訊息攜載單元41、以及至少一可攜式電子裝置5。特別地，在該可攜式電子裝置5以其讀取單元51讀取該些訊息攜載單元(21,31,41)所攜載的基礎訊息之後，後端的中央監控系統CSRC便可以在確認操作人員是否具有機台操作權限以及該料品容置器3所盛裝的料品之品名、批號、有效日期、與序號是否正確之後，自動解除機台的櫃門，令操作人員接著進行料品容置器3的去舊換新作業。如此方式，係能夠確保所有機台的料品更換皆在電子化的系統管理下進行，免除任何的紙本記錄，是以能夠有效避免在執行料品的去舊換新的程序過程中發生人為操作異常。 Thus, the above-mentioned system has completely and clearly explained a chemical dressing system of the present invention; and, through the above, the present invention has the following advantages: (1) The present invention proposes a chemical dressing system comprising: at least one identity The message carrying unit 21, the at least one item message carrying unit 31, the at least one machine message carrying unit 41, and the at least one portable electronic device 5. In particular, after the portable electronic device 5 reads the basic information carried by the message carrying units (21, 31, 41) with its reading unit 51, the central monitoring system CSRC of the back end can confirm Whether the operator has the operation authority of the machine and the item name, batch number, expiration date, and serial number of the item contained in the item container 3, the door of the machine is automatically released, and the operator then carries out the item. The replacement operation of the container 3 is performed. In this way, it is ensured that the item replacement of all the machines is carried out under the electronic system management, and any paper record is exempted, so that it can effectively avoid the occurrence of artifacts in the process of executing the replacement of the item. The operation is abnormal.

必須加以強調的是，上述之詳細說明係針對本新型可行實施例之具體說明，惟該實施例並非用以限制本新型之專利範圍，凡未脫離本新型技藝精神所為之等效實施或變更，均應包含於本案之專利範圍中。 It is to be understood that the foregoing detailed description of the preferred embodiments of the present invention is not intended to limit the scope of the invention, Both should be included in the scope of the patent in this case.

Claims

一種化學換裝系統，係包括：至少一身分訊息攜載單元，係設置於至少一操作人員身分卡之上；至少一料品訊息攜載單元，係設置於至少一料品容置器之上，且該料品容置器係容置有一特定料品；至少一機台訊息攜載單元，係設置於至少一機台之上，且該機台係用以預處理或直接使用該特定料品；以及至少一可攜式電子裝置，係具有一讀取單元；其中，藉由該讀取單元，該可攜式電子裝置可透過讀取該機台訊息攜載單元的方式確認該機台之類型與其運作狀態；同時，藉由該讀取單元，該可攜式電子裝置可透過讀取該身分訊息攜載單元的方式確認持有該操作人員身分卡之一操作人員是否具有操作該機台的權限；其中，藉由該讀取單元，該可攜式電子裝置可透過讀取該料品訊息攜載單元的方式確認該料品容置器所容置的該特定料品之複數個基礎訊息，以確保該料品容置器於該特定料品處於一正常狀態之下被裝入正確的該機台之中。 A chemical dressing system includes: at least one identity message carrying unit disposed on at least one operator identity card; at least one item message carrying unit disposed on at least one item container And the item container is provided with a specific item; at least one machine message carrying unit is disposed on at least one machine, and the machine is used for pre-processing or directly using the specific material And at least one portable electronic device having a reading unit; wherein, by the reading unit, the portable electronic device can confirm the machine by reading the information carrying unit of the machine And the type of operation of the operator; at the same time, the portable electronic device can confirm whether the operator holding the operator identity card has the operation of the machine by reading the identity message carrying unit The permission of the station; wherein, by the reading unit, the portable electronic device can confirm the plurality of the specific items accommodated by the item container by reading the item information carrying unit Basic message, Ensure that the item receiving at the specific item is in a normal state under the machine table is loaded correctly.

如申請專利範圍第1項所述之化學換裝系統，其中，更包括：一中央監控系統，係透過一收發裝置與該可攜式電子裝置溝通，並透過一控制裝置監視與控制該機台的運作狀態。 The chemical refilling system of claim 1, further comprising: a central monitoring system that communicates with the portable electronic device through a transceiver device and monitors and controls the machine through a control device The state of operation.

申請專利範圍第1項所述之化學換裝系統，其中，該特定料品為一化學流體拋光液、一化學研磨液、一化學液體、一相關耗用材料、一O型環、一墊片或濾材其中之一。 The chemical refilling system of claim 1, wherein the specific material is a chemical fluid polishing liquid, a chemical polishing liquid, a chemical liquid, a related consumable material, an O-ring, and a gasket. Or one of the filters.

申請專利範圍第1項所述之化學換裝系統，其中，該身分訊息攜載單元、該料品訊息攜載單元與該機台訊息攜載單元皆可為下列任一者：圖形、文字、字母、數字、一維條碼(1D barcode)、二維條碼(2D barcode)、漢信碼(Chinese-sensible code)、QR碼、矩陣條碼(Maxicode)、RFID標籤、NFC標籤、上述任兩者之組合、或上述任兩者以上之組合。 The chemical refilling system of claim 1, wherein the identity message carrying unit, the item message carrying unit and the machine message carrying unit can be any of the following: graphics, text, Letters, numbers, 1D barcode, 2D barcode, Chinese-sensible code, QR code, Maxicode, RFID tag, NFC tag, both Combination, or a combination of any two or more of the above.

如申請專利範圍第1項所述之化學換裝系統，其中，該可攜式電子裝置可為下列任一者：智慧型手機、個人數位助理、筆記型電腦、平板電腦、智慧眼鏡、或智慧手錶；該讀取單元可為下列任一者：RFID標籤讀取器、NFC標籤讀取器、影像辨識器、一維條碼讀取器、二維條碼讀取器、漢信碼讀取器、QR碼讀取器、或矩陣條碼讀取器。 The chemical refilling system of claim 1, wherein the portable electronic device can be any of the following: a smart phone, a personal digital assistant, a notebook computer, a tablet computer, smart glasses, or a smart phone. The reading unit can be any of the following: an RFID tag reader, an NFC tag reader, an image recognizer, a one-dimensional bar code reader, a two-dimensional bar code reader, a Hanxin code reader, QR code reader, or matrix bar code reader.

如申請專利範圍第1項所述之化學換裝系統，其中，該讀取單元為一影像擷取器，且該可攜式電子裝置更具有一影像辨識單元；其中，藉由配合使用該讀取單元與該影像辨識單元，該可攜式電子裝置可完成該身分訊息攜載單元、該料品訊息攜載單元、與/或該機台訊息攜載單元之讀取。 The chemical transposition system of claim 1, wherein the reading unit is an image capturing device, and the portable electronic device further has an image recognition unit; wherein the reading is performed by using the reading And taking the unit and the image recognition unit, the portable electronic device can complete reading of the identity message carrying unit, the item message carrying unit, and/or the machine message carrying unit.

如申請專利範圍第1項所述之化學換裝系統，其中，由該料品訊息攜載單元所攜載的該複數個基礎訊息係包括：品名、批號、有效日期、與序號，且相鄰兩個基礎訊息之間係***有一訊息分隔符號(Central seperating character)。 The chemical refilling system of claim 1, wherein the plurality of basic messages carried by the item information carrying unit comprise: a product name, a batch number, an expiration date, and a serial number, and adjacent A Central seperating character is inserted between the two basic messages.

如申請專利範圍第7項所述之化學換裝系統，其中，該正常狀態可為下列任一者：該特定料品的品名正確、該特定料品的批號未被禁用、該特定料品的批號具有入庫紀錄、或該特定料品的保存日未超過有效日期。 The chemical refilling system of claim 7, wherein the normal state can be any one of the following: the product name of the specific item is correct, the batch number of the specific item is not disabled, and the specific item is The batch number has an inbound record, or the save date for that particular item does not exceed the effective date.

如申請專利範圍第7項所述之化學換裝系統，其中，該訊息分隔符號可為下列任一者：%、$、/、~、！、@、#、^、&、*、(、)、-、_、|、{、}、？、<、>、\、[、]或+。 The chemical dressing system of claim 7, wherein the message separator can be any of the following: %, $, /, ~, ! , @,#,^,&,*, (,), -, _, |, {,},? , <, >, \, [,] or +.

如申請專利範圍第1項所述之化學換裝系統，更包括：一電子權杖單元，係用於與該可攜式電子裝置相互溝通；其中，於該可攜式電子裝置完成該身分訊息攜載單元的讀取之後，該電子權杖單元係用於重複確認持有該操作人員身分卡之該操作人員是否具有操作該機台的權限。 The chemical refilling system of claim 1, further comprising: an electronic token unit for communicating with the portable electronic device; wherein the portable electronic device completes the identity message After reading the carrying unit, the electronic token unit is used to repeatedly confirm whether the operator holding the operator identity card has the authority to operate the machine.