TWI662220B - Gas cylinders replacement system and method - Google Patents
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Abstract
本發明提出一種氣體換裝系統及方法，係特別於操作人員的身分卡、氣體鋼瓶、鋼瓶容置機櫃皆貼置有特別設計的訊息攜載單元。以一可攜式電子裝置讀取這些訊息攜載單元所攜載的基礎訊息之後，後端的中央監控系統CSRC便可以在確認操作人員是否具有機台操作權限之後，要求操作人員先執行氣體管線的吹淨作業(Purge)，避免高危險氣體(例如：NH3或SiH4)洩漏。之後，中央監控系統才會解除待更換的氣體鋼瓶的安全裝置(Auto guard)，允許操作人員以新的氣體鋼瓶替換之。如此方式，係能夠確保所有機台的料品更換皆在電子化的系統管理下進行，免除任何的紙本記錄，是以能夠有效避免在執行料品的去舊換新的程序過程中發生人為操作異常。 The invention provides a gas replacement system and method, which are specially designed for an operator's identity card, a gas cylinder, and a cylinder storage cabinet, which are provided with a specially designed message carrying unit. After a portable electronic device reads the basic information carried by these message-carrying units, the back-end central monitoring system CSRC can ask the operator to perform the gas pipeline first after confirming whether the operator has machine operation authority. Purge operation to avoid leakage of high-risk gases (such as NH 3 or SiH 4 ). After that, the central monitoring system will release the auto guard of the gas cylinder to be replaced, allowing the operator to replace it with a new gas cylinder. In this way, it is possible to ensure that the material replacement of all machines is performed under the electronic system management, eliminating any paper records, and effectively avoiding man-made during the process of performing the old and new materials replacement program. Operation is abnormal.
Description
本發明係關於半導體製程的技術領域，尤指用於協助積體電路製造廠(IC foundry)能夠透過線上檢核的方式安全地完成氣體鋼瓶(Gas cylinder)的更換作業。 The present invention relates to the technical field of semiconductor manufacturing processes, and is particularly used to assist IC foundries to safely complete the replacement of gas cylinders through online inspection.
高純度氣體與一些特用氣體是半導體積體電路製造所不可或缺的原料。它們經常儲存在鋼瓶和儲槽之中，並且供應到半導體製程所使用的製程設備，包括擴散設備、化學氣相沉積(chemical vapor deposition，CVD)設備、原子層沉積(atomic layer deposition，ALD)設備、蝕刻設備、摻雜設備、離子佈植設備、與濺鍍設備。目前，積體電路製造廠(IC foundry)係將需要使用的氣體鋼瓶放置於特別設計的防爆式氣體鋼瓶機櫃之中。該氣體鋼瓶機櫃具有許多特別的安全防護機構，包括：火焰偵測器(Fire sensor)、高溫感測器(High temperature sensor)、鋼瓶接口的氣閥守衛裝置 (Auto guard)、噴灑裝置(Sprinkler)、防震探測器(Seismic detector)、毒氣偵測器(Gas leak detector)。 High-purity gases and some special gases are indispensable raw materials for semiconductor integrated circuit manufacturing. They are often stored in cylinders and storage tanks, and are supplied to process equipment used in semiconductor processes, including diffusion equipment, chemical vapor deposition (CVD) equipment, atomic layer deposition (ALD) equipment , Etching equipment, doping equipment, ion implantation equipment, and sputtering equipment. At present, integrated circuit manufacturing plants (IC foundry) place gas cylinders to be used in specially designed explosion-proof gas cylinder cabinets. The gas cylinder cabinet has many special safety protection mechanisms, including: a fire sensor, a high temperature sensor, and a valve guard device for the cylinder interface (Auto guard), Sprinkler, Seismic detector, Gas leak detector.
可想而知，當特定的氣體鋼瓶用罄時，製造廠內的相關單位的操作人員必須依照標準作業程序(SOP)進行相關氣體鋼瓶的更換。舉例而言，為了防止管線內仍殘留氣體，操作人員依照SOP必須在執行氣體鋼瓶的去舊換新之前先執行管線的吹淨作業(Purge)。吹淨作業的次數會根據氣體的種類而有所不同，但至少是3次。完成吹淨作業之後，操作人員才可以解除連接於氣體鋼瓶接口處的氣閥守衛裝置，並接著以新的氣體鋼瓶替換用罄的氣體鋼瓶。 It is conceivable that when a specific gas cylinder is used up, the operator of the relevant unit in the manufacturing plant must replace the relevant gas cylinder in accordance with the standard operating procedure (SOP). For example, in order to prevent the gas from remaining in the pipeline, the operator must perform the purge of the pipeline before performing the old and new gas cylinder replacement according to the SOP. The number of blow-off operations varies depending on the type of gas, but at least three. After the blowing operation is completed, the operator can release the gas valve guard device connected to the gas cylinder interface, and then replace the used gas cylinder with a new gas cylinder.
然而，根據積體電路製造廠所提供的實務操作經驗，可以發現目前使用的氣體鋼瓶更換程序係存在著一個重大缺陷。亦即，氣體鋼瓶之更換作業與歷史係透過紙本記錄，且紙本記錄內容至少包括：更換人員姓名、更換人員工號、更換時間、更換品料號、品料上機時間、與品料下機時間等。然而，肇因於更換作業與紙本記錄同時由人力完成，一旦在執行程序的過程中發生人為操作異常，例如：操作人員並未確實完成SOP所規定的吹淨次數便逕自解除氣閥守衛裝置，類似這種的人為操作錯誤勢必導致積體電路製造廠(IC foundry)與其客戶的重大損失。尤其，積體電路製造廠經常使用到高危險性氣體與有毒氣體(如PH3與BF3)。高危險性氣體係例如NH3與SiH4，其中NH3雖為不可燃，但當其在空氣中的濃度超過15%便會有引發***的危險。另一方面，SiH4是可燃氣體，且與空氣反應後會引發吸入者窒息。有毒氣體則例如PH3與BF3。 However, according to the practical operation experience provided by the integrated circuit manufacturing plant, it can be found that there is a major flaw in the current gas cylinder replacement procedure. That is, the replacement operation and history of gas cylinders are through paper records, and the paper records at least include: the name of the replacement person, the employee number of the replacement person, the replacement time, the replacement material number, the time when the product is on the machine, and Off time and so on. However, because the replacement operation and the paper record were performed by humans at the same time, once the human operation abnormality occurred during the execution of the procedure, for example: the operator did not complete the blowout times specified in the SOP, and then automatically released the air valve guard device Human error like this will inevitably lead to significant losses for IC foundry and its customers. In particular, integrated circuit manufacturers often use highly hazardous and toxic gases (such as PH 3 and BF 3 ). High-risk gas systems such as NH 3 and SiH 4. Although NH 3 is non-combustible, when its concentration in the air exceeds 15%, there is a danger of causing explosion. On the other hand, SiH4 is a flammable gas and can cause asphyxiation by inhalers after reacting with air. Toxic gases are, for example, PH 3 and BF 3 .
由上述說明可知，將特用氣體鋼瓶之物料管理、更換作業、與程序步驟進行同步電子化的控制與紀錄對於積體電路製造廠而言是非常迫切的。如此，積體電路製造廠的廠管便能夠透過中心控制系統而完整、全面性地監控特用氣體鋼瓶的更換料號是否正確以及強迫操作人員確人遵守氣體鋼瓶換裝的標準作業程序。有鑑於此，本案之發明人係極力加以研究創作，而終於研發完成本發明之一種氣體換裝系統與方法。 From the above description, it can be seen that it is very urgent for the integrated circuit manufacturing plant to control and record the material management, replacement operation, and electronic synchronization with the program steps of special gas cylinders. In this way, the factory management of the integrated circuit manufacturing plant can completely and comprehensively monitor whether the replacement material number of the special gas cylinder is correct through a central control system and force the operator to confirm the standard operating procedures for gas cylinder replacement. In view of this, the inventor of this case has made great efforts to research and create, and finally developed a gas replacement system and method of the present invention.
積體電路製造廠(IC foundry)所提供的實務操作經驗指出，氣體鋼瓶之更換作業與歷史係透過紙本記錄。然而，肇因於更換作業與紙本記錄皆由人力所完成，一旦在執行程序的過程中發生人為操作異常，例如：操作人員並未確實完成SOP所規定的吹淨次數便逕自解除氣閥守衛裝置，類似這種的人為操作錯誤勢必導致積體電路製造廠與其客戶的重大損失。本發明之主要目的在於提供一種氣體換裝系統與方法，係特別於操作人員的身分卡、氣體鋼瓶、鋼瓶容置機櫃皆貼置有特別設計的訊息攜載單元。以一可攜式電子裝置讀取這些訊息攜載單元所攜載的基礎訊息之後，後端的中央監控系統便可以在確認操作人員是否具有機台操作權限之後，要求操作人員先執行氣體管線的吹淨作業(Purge)，避免高危險氣體(例如：NH3或SiH4)洩漏。之後，中央監控系統才會解除待更換的氣體鋼瓶的安全裝置(Auto guard)，允許操作人員以新的氣體鋼瓶替換之。如此方 式，係能夠確保所有機台的料品更換皆在電子化的系統管理下進行，免除任何的紙本記錄，是以能夠有效避免在執行料品的去舊換新的程序過程中發生人為操作異常。 The practical operation experience provided by IC foundry pointed out that the replacement operation and history of gas cylinders are recorded on paper. However, the replacement operation and the paper records were completed by human resources. Once an abnormal operation occurred during the execution of the procedure, for example, the operator did not complete the blowout times specified in the SOP, and then the valve guard was released. Devices, such as human error, will inevitably lead to significant losses for integrated circuit manufacturers and their customers. The main object of the present invention is to provide a gas replacement system and method, which are specially designed for an operator's identity card, a gas cylinder, and a cylinder storage cabinet with a specially designed message carrying unit. After reading the basic information carried by these message carrying units with a portable electronic device, the central monitoring system at the back end can ask the operator to perform the blowing of the gas pipeline after confirming whether the operator has the machine operation authority. Clean operation (Purge) to avoid leakage of high-risk gases (such as: NH3 or SiH4). After that, the central monitoring system will release the auto guard of the gas cylinder to be replaced, allowing the operator to replace it with a new gas cylinder. So side It is able to ensure that all machine materials are replaced under the electronic system management, eliminating any paper records, and is able to effectively avoid human operations during the process of performing old and new materials abnormal.
為了達成上述本發明之主要目的，本案發明人係提供所述氣體換裝系統的一實施例，係包括：至少一第一身分訊息攜載單元，係設置於至少一操作人員身分卡之上；至少一料品訊息攜載單元，係設置於至少一料品容置器之上，且該料品容置器係容置有一特定料品；至少一機台訊息攜載單元，係設置於至少一機台之上，且該機台係用以預處理或直接使用該特定料品；以及至少一可攜式電子裝置，係具有一讀取單元；其中，藉由該讀取單元，該可攜式電子裝置可透過讀取該機台訊息攜載單元的方式確認該機台之類型與其運作狀態；同時，藉由該讀取單元，該可攜式電子裝置可透過讀取該第一身分訊息攜載單元的方式確認持有該操作人員身分卡之一操作人員是否具有操作該機台的權限；其中，藉由該讀取單元，該可攜式電子裝置可透過讀取該料品訊息攜載單元的方式確認該料品容置器所容置的該特定料品之複數個基礎訊息，以確保該料品容置器於該特定料品處於一正常狀態之下被裝入正確的該機台之中。 In order to achieve the above-mentioned main purpose of the present invention, the inventor of the present invention provides an embodiment of the gas replacement system, which includes: at least a first identity information carrying unit, which is disposed on at least one operator identity card; At least one material information carrying unit is disposed on at least one material receptacle, and the material receptacle contains a specific material; at least one machine information carrying unit is disposed at least On a machine, and the machine is used to pre-process or directly use the specific material; and at least one portable electronic device has a reading unit; wherein, through the reading unit, the The portable electronic device can confirm the type of the machine and its operating state by reading the message carrying unit of the machine; at the same time, the portable electronic device can read the first identity by reading the unit The method of the message carrying unit confirms whether one of the operators holding the identity card of the operator has the authority to operate the machine; wherein, through the reading unit, the portable electronic device can read the material information by carry The unit method confirms the plurality of basic information of the specific material contained in the material container to ensure that the material container is loaded into the correct machine when the specific material is in a normal state. In the middle.
於上述本發明之氣體換裝系統的實施例之中，係更包括： 一第二身分訊息攜載單元，係設置於至少一檢查人員身分卡之上；其中，藉由該讀取單元，該可攜式電子裝置可透過讀取該第二身分訊息攜載單元的方式確認持有該檢查人員身分卡之一檢查人員是否對操作人員的操作完成相關檢查。 In the above embodiment of the gas refilling system of the present invention, the system further includes: A second identity information carrying unit is disposed on at least one inspector's identity card; wherein, with the reading unit, the portable electronic device can read the second identity information carrying unit Confirm whether the inspector who holds one of the inspector's identity cards has completed the relevant inspection on the operation of the operator.
並且，為了達成上述本發明之主要目的，本案發明人係提供所述氣體換裝方法的一實施例，係包括以下步驟：(1)將至少一第一身分訊息攜載單元設置於至少一操作人員身分卡之上，將至少一第二身分訊息攜載單元設置於至少一檢查人員身分卡之上，將至少一料品訊息攜載單元設置於至少一料品容置器之上，並將至少一機台訊息攜載單元設置於至少一機台之上；其中，該料品容置器容置有一特用氣體，且該機台為該特用氣體的一氣體供應系統；(2)提供至少一可攜式電子裝置，且該可攜式電子裝置具有一讀取單元；(3)該可攜式電子裝置透過有線連接或無線連接的方式與該機台建立溝通；(4)藉由該讀取單元，該可攜式電子裝置透過讀取該機台訊息攜載單元的方式確認該機台之類型與其運作狀態；(5)藉由該讀取單元，該可攜式電子裝置透過讀取該第一身分訊息攜載單元的方式確認持有該操作人員身分卡之一操作人員是否具有操作該機台的權限；同時，該可攜式電子裝置讀取該第二身分 訊息攜載單元以確認一檢查人員已經對該操作人員的操作完成檢查；(6)執行至少一氣體管線的吹淨作業(Purge)；(7)藉由該讀取單元，該可攜式電子裝置透過讀取該料品訊息攜載單元的方式確認該料品容置器所容置的該特用氣體之複數個基礎訊息；(8)藉由該讀取單元，該可攜式電子裝置再次讀取該第一身分訊息攜載單元以確認該操作人員的權限；同時，該可攜式電子裝置再次讀取該第二身分訊息攜載單元以確認該檢查人員已經對該操作人員的操作完成檢查；(9)確認該料品容置器於一正常狀態之下被裝入正確的該機台之中，接著該機台的一安全裝置(Auto guard)連接至該料品容置器；以及(10)藉由該讀取單元，該可攜式電子裝置再次讀取該第一身分訊息攜載單元與該第二身分訊息攜載單元，確認完成該料品容置器於該機台之中的更換作業。 In addition, in order to achieve the above-mentioned main purpose of the present invention, the inventor of the present invention provides an embodiment of the gas refilling method, which includes the following steps: (1) setting at least one first identity information carrying unit in at least one operation The at least one second identity information carrying unit is set on the at least one inspector identity card on the personnel identity card, the at least one material information carrying unit is set on the at least one material receptacle, and At least one machine information carrying unit is disposed on at least one machine; wherein the material container contains a special gas, and the machine is a gas supply system for the special gas; (2) Provide at least one portable electronic device, and the portable electronic device has a reading unit; (3) the portable electronic device establishes communication with the machine through a wired or wireless connection; (4) borrows By the reading unit, the portable electronic device confirms the type of the machine and its operating state by reading the message carrying unit of the machine; (5) through the reading unit, the portable electronic device By reading that first identity Carrying information holding unit according to one of the art to confirm the identity card has permission to operation of the operator for its operation station; simultaneously, the portable electronic device reads the second identity A message carrying unit to confirm that an inspector has completed the inspection of the operation of the operator; (6) performing a purge operation of at least one gas line; (7) by the reading unit, the portable electronic The device confirms the plurality of basic messages of the special gas contained in the material container by reading the material information carrying unit; (8) through the reading unit, the portable electronic device Read the first identity message carrying unit again to confirm the authority of the operator; meanwhile, the portable electronic device reads the second identity message carrying unit again to confirm that the inspector has operated the operator Complete the inspection; (9) Confirm that the material container is loaded into the correct machine under a normal state, and then a safety device (Auto guard) of the machine is connected to the material container ; And (10) with the reading unit, the portable electronic device reads the first identity message carrying unit and the second identity message carrying unit again, and confirms that the material container is completed on the machine Replacement in the station.
於上述本發明之氣體換裝方法的實施例之中，其中，於該步驟(3)之中，該可攜式電子裝置係透過一收發裝置與一中央監控系統相互溝通，且該中央監控系統係透過一控制裝置監視與控制該機台的運作狀態。 In the above embodiment of the gas replacement method of the present invention, in the step (3), the portable electronic device communicates with a central monitoring system through a transceiving device, and the central monitoring system A control device is used to monitor and control the operating status of the machine.
於上述本發明之氣體換裝方法的實施例之中，其中，於該步驟(3)之中，該可攜式電子裝置係透過一有線通訊模組直接與該機台建立溝通或進行資料傳輸。 In the above-mentioned embodiment of the gas replacement method of the present invention, in the step (3), the portable electronic device directly establishes communication or data transmission with the machine through a wired communication module. .
<本發明> <Invention>
21‧‧‧第一身分訊息攜載單元 21‧‧‧ First Identity Message Carrying Unit
31‧‧‧料品訊息攜載單元 31‧‧‧Material information carrying unit
41‧‧‧機台訊息攜載單元 41‧‧‧machine information carrying unit
81‧‧‧第二身分訊息攜載單元 81‧‧‧Second Identity Message Carrying Unit
5‧‧‧可攜式電子裝置 5‧‧‧ Portable electronic device
CSRC‧‧‧中央監控系統 CSRC‧‧‧ Central Monitoring System
2‧‧‧操作人員身分卡 2‧‧‧ Operator ID Card
8‧‧‧檢查人員身分卡 8‧‧‧ Inspector Identity Card
3‧‧‧料品容置器 3‧‧‧ material container
4‧‧‧機台 4‧‧‧machine
51‧‧‧讀取單元 51‧‧‧reading unit
6‧‧‧收發裝置 6‧‧‧ Transceiver
7‧‧‧控制裝置 7‧‧‧control device
10‧‧‧電子權杖單元 10‧‧‧ Electronic scepter unit
WC‧‧‧有線通訊模組 WC‧‧‧Wired Communication Module
S1-S10‧‧‧步驟 S1-S10‧‧‧step
圖1係顯示本發明之一種氣體換裝系統的架構圖；圖2係顯示可攜式電子裝置的立體圖；圖3A與圖3B係顯示本發明之氣體換裝方法的流程圖；圖4A係顯示可攜式電子裝置的螢幕的正視圖；圖4B係顯示可攜式電子裝置的螢幕的正視圖；圖4C係顯示可攜式電子裝置的螢幕的正視圖；以及圖4D係顯示可攜式電子裝置的螢幕的正視圖。 FIG. 1 is a structural diagram of a gas replacement system according to the present invention; FIG. 2 is a perspective view of a portable electronic device; FIGS. 3A and 3B are flowcharts showing a gas replacement method of the present invention; Front view of the screen of the portable electronic device; FIG. 4B is a front view of the screen of the portable electronic device; FIG. 4C is a front view of the screen of the portable electronic device; and FIG. 4D is a view of the portable electronic device Front view of the device's screen.
為了能夠更清楚地描述本發明所提出之一種氣體換裝系統及方法，以下將配合圖式，詳盡說明本發明之較佳實施例。 In order to more clearly describe a gas replacement system and method provided by the present invention, the preferred embodiments of the present invention will be described in detail below with reference to the drawings.
請參閱圖1，係顯示本發明之一種氣體換裝系統的架構圖。如圖1所示，本發明之氣體換裝系統係於架構組成上主要包括：至少一第一身分訊息攜載單元21、至少一第二身分訊息攜載單元81、至少一料品訊息攜載單元31、至少一機台訊息攜載單元41、至少一可攜式電子裝置5、與一中央監控系統CSRC。根據本發明之設計，該第一身分訊息攜載單元21係設置於一操作人員身分卡2之上，且該第二身分訊息攜載單元81係設置於一檢查人員身分卡8之上。簡單地說，第一身分訊息攜載單元21用以攜載持有該操作人員身分卡2的一操 作人員的基本資料，包括：姓名、工號、所屬單元、職級、與是否完成機台操作的資格考(Qualify)。特別說明的是，完成機台操作的資格考的操作人員才會被允許進行機台操作。該第二身分訊息攜載單元81則用以攜載持有該檢查人員身分卡8的一檢查人員的基本資料，包括：姓名、工號、所屬單元、與職級。 Please refer to FIG. 1, which is a structural diagram of a gas refilling system according to the present invention. As shown in FIG. 1, the gas replacement system of the present invention is mainly composed of at least one first identity information carrying unit 21, at least one second identity information carrying unit 81, and at least one product information carrying The unit 31, at least one machine information carrying unit 41, at least one portable electronic device 5, and a central monitoring system CSRC. According to the design of the present invention, the first identity information carrying unit 21 is disposed on an operator identity card 2, and the second identity information carrying unit 81 is disposed on an inspector identity card 8. In brief, the first identity message carrying unit 21 is used to carry an operation that holds the identity card 2 of the operator. The basic information of the staff, including: name, job number, unit, rank, and whether to complete the qualification test (Qualify). In particular, only operators who have completed the qualification test for machine operation will be allowed to perform machine operation. The second identity information carrying unit 81 is used to carry basic information of an inspector who holds the identity card 8 of the inspector, including: name, job number, affiliated unit, and rank.
職級越高的操作人員被允許進行操作的機台之種類則越多。 舉例而言，檢查人員、廠長、高級工程師、與主任工程師皆能夠對不同單位的機台進行操作，但操作人員(Operator,OP)僅被限制對其所屬單位的機台進行操作。另一方面，該料品訊息攜載單元31被設置於對應的一料品容置器3之上，且該料品容置器3係容置有一特定料品。於此，所述特定料品為一特用氣體，且料品容置器3為一氣體鋼瓶。特用氣體指的是積體電路製造廠經常使用到高危險性氣體與有毒氣體。高危險性氣體係例如NH3與SiH4，其中NH3雖為不可燃，但當其在空氣中的濃度超過15%便會有引發***的危險。另一方面，SiH4是可燃氣體，且與空氣反應後會引發吸入者窒息。有毒氣體則例如PH3與BF3。 The higher the rank of the operator, the more types of machines are allowed to operate. For example, inspectors, plant managers, senior engineers, and chief engineers can operate the machines of different units, but operators (OP) are only restricted to operate the machines of their units. On the other hand, the material information carrying unit 31 is disposed on a corresponding material container 3, and the material container 3 contains a specific material. Here, the specific material is a special gas, and the material container 3 is a gas cylinder. Special gas refers to the highly hazardous gas and toxic gas often used by integrated circuit manufacturers. High-risk gas systems such as NH 3 and SiH 4. Although NH 3 is non-combustible, when its concentration in the air exceeds 15%, there is a danger of causing explosion. On the other hand, SiH4 is a flammable gas and can cause asphyxiation by inhalers after reacting with air. Toxic gases are, for example, PH 3 and BF 3 .
該料品訊息攜載單元31攜載有關於該特定料品的複數個基礎訊息，包括：品名、批號、有效日期、與序號。舉例而言，所述品名可用以顯示該特定料品為與SiH4或NH3。另一方面，該機台訊息攜載單元41係設置於對應的機台4之上，且該機台4為該特用氣體的一氣體供應系統。由上述說明可知，單位“至少一”係用以表示所述四種訊息攜載單元(21,81,31,41)的數量為一個或多個。換句話說， 這四種訊息攜載單元(21,81,31,41)的數量的確實數量係決定於該操作人員身分卡2、該檢查人員身分卡8、該料品容置器3、與該機台4的數量。 The material information carrying unit 31 carries a plurality of basic information about the specific material, including: a product name, a batch number, an expiration date, and a serial number. For example, the product name can be used to show that the specific product is SiH 4 or NH 3 . On the other hand, the machine information carrying unit 41 is arranged on the corresponding machine 4, and the machine 4 is a gas supply system for the special gas. It can be known from the above description that the unit "at least one" is used to indicate that the number of the four types of message carrying units (21, 81, 31, 41) is one or more. In other words, the exact number of the four types of information carrying units (21, 81, 31, 41) is determined by the identity card of the operator 2, the identity card of the inspector 8, the material container 3, With the number of the machine 4.
另一方面，該可攜式電子裝置5係具有一讀取單元51。藉由該讀取單元51，可攜式電子裝置5可透過讀取該機台訊息攜載單元41的方式確認機台4之一運作狀態。如圖1所示，可攜式電子裝置5係透過一收發裝置6而與一中央監控系統CSRC相互溝通，收發裝置6與可攜式電子裝置5間的通訊協定可以是無線通訊網路，包含WIFI、3G、4G、藍芽、Zigbee等，收發裝置6與中央監控系統CSRC間的通訊協定可以是無線通訊網路或有線通訊網路，其中無線通訊網路包含WIFI、3G、4G、藍芽、Zigbee等。且該中央監控系統CSRC則透過一控制裝置7控制該機台4的運作狀態，其中控制裝置7包含可編程式控制裝置(Programmable logic controller,PLC)或直接數位控制器(Direct Digital Controller,DDC)或對象鏈接與嵌入裝置(Object Linking and Embedding,OLE)或用於流程控制的OLE裝置(OLE for Process Control,OPC)其中之一。因此，在完成該機台訊息攜載單元41的讀取之後，可攜式電子裝置5便可自該中央監控系統CSRC得知該機台4的類型、設定參數及其運作情況。此外，如圖1所示，可攜式電子裝置5也可以透過一有線通訊模組WC直接與該機台4溝通或進行資料傳輸。 On the other hand, the portable electronic device 5 has a reading unit 51. With the reading unit 51, the portable electronic device 5 can confirm an operation state of one of the machines 4 by reading the machine message carrying unit 41. As shown in FIG. 1, the portable electronic device 5 communicates with a central monitoring system CSRC through a transceiving device 6. The communication protocol between the transceiving device 6 and the portable electronic device 5 may be a wireless communication network, including WIFI , 3G, 4G, Bluetooth, Zigbee, etc., the communication protocol between the transceiver 6 and the central monitoring system CSRC can be a wireless communication network or a wired communication network, among which the wireless communication network includes WIFI, 3G, 4G, Bluetooth, Zigbee, etc. And the central monitoring system CSRC controls the operating state of the machine 4 through a control device 7, wherein the control device 7 includes a programmable logic controller (PLC) or a direct digital controller (DDC) Or one of Object Linking and Embedding (OLE) or OLE for Process Control (OPC). Therefore, after the reading of the machine information carrying unit 41 is completed, the portable electronic device 5 can learn the type of the machine 4, the setting parameters, and the operation status thereof from the central monitoring system CSRC. In addition, as shown in FIG. 1, the portable electronic device 5 can also directly communicate with the machine 4 or perform data transmission through a wired communication module WC.
特別說明的是，在進行氣體鋼瓶的物料更換之前，藉由該讀取單元51，該可攜式電子裝置5可進一步地透過讀取該第一身分訊息 攜載單元21的方式確認持有該操作人員身分卡2的操作人員是否具有操作該機台4的權限。進一步地，中央監控系統CSRC會透過可攜式電子裝置5要求操作人員根據SOP執行氣體管線的吹淨作業(Purge)。吹淨作業的次數會根據氣體的種類而有所不同，但至少是3次；並且，吹淨作業的持續時間也必須同時遵守SOP的規定。完成吹淨作業之後，透過讀取該料品訊息攜載單元31的方式係能夠確認該料品容置器3所容置的該特定料品的相關基礎訊息，藉以確保料品容置器3係於該特定料品處於正常狀態之下被裝入正確的該機台4之中。舉例而言，若該機台4為SiH4的氣體供應系統，則讀取該料品訊息攜載單元31係能夠確認料品容置器3所容置的該特定料品的品名是否為SiH4氣體。除此之外，讀取該料品訊息攜載單元31還能夠確認該特定料品的批號是否已經被禁用、該特定料品的批號是否具有入庫紀錄、以及該特定料品的保存日是否超過有效日期。 In particular, before the material replacement of the gas cylinder, the portable electronic device 5 can further confirm that the portable electronic device 5 holds the first identity information carrying unit 21 by reading the first identity information carrying unit 21. Whether the operator of the operator identity card 2 has the authority to operate the machine 4. Further, the central monitoring system CSRC will request the operator to perform a purge of the gas pipeline according to the SOP through the portable electronic device 5. The number of blow-off operations will vary depending on the type of gas, but at least three; and the duration of the blow-off operation must also comply with SOP regulations. After the blowing operation is completed, the basic information of the specific material contained in the material container 3 can be confirmed by reading the material information carrying unit 31 to ensure the material container 3 The specific material is put into the correct machine 4 under the normal state. For example, if the machine 4 is a SiH 4 gas supply system, reading the material information carrying unit 31 can confirm whether the product name of the specific material contained in the material container 3 is SiH. 4 gas. In addition, reading the material information carrying unit 31 can also confirm whether the batch number of the specific material has been disabled, whether the batch number of the specific material has a storage record, and whether the storage date of the specific material exceeds Effective date.
在料品容置器3被確認屬於正常狀態之後，此時操作人員可以自該機台4取下已經用罄的氣體鋼瓶(料品容置器3)，並將新的料品容置器3裝入該機台4內。並且，當該料品容置器3於該特定料品處於正常狀態的情況下被裝入正確的機台4之後，必須以可攜式電子裝置5再次讀取該第一身分訊息攜載單元21；之後，該中央監控系統CSRC便會記錄新的料品容置器3的上機時間，並記錄此料品容置器3的狀態為“使用中(In machine)”。相反地，中央監控系統CSRC會將舊的料品容置器3紀錄為空桶(Empty)。同時，中央監控系統CSRC會透過控制裝置7將操作人員的資料(例如：姓名與工號)以及該料品 容置器3所容置的該特定料品的批號(或料號)顯示於機台4的人機介面(Human machine interface,HMI)。接著，將該機台4的一安全裝置(Auto guard)連接至該料品容置器3(氣體鋼瓶)之後，啟用該安全裝置。 After the material container 3 is confirmed to be in a normal state, at this time, the operator can remove the used gas cylinder (material container 3) from the machine 4 and place a new material container 3 into the machine 4. In addition, after the material container 3 is loaded into the correct machine 4 when the specific material is in a normal state, the first identity information carrying unit must be read again with the portable electronic device 5 21; After that, the central monitoring system CSRC will record the operating time of the new material container 3, and record the state of the material container 3 as "In machine". On the contrary, the central monitoring system CSRC records the old material container 3 as Empty. At the same time, the central monitoring system CSRC will pass the control device 7 to the information of the operator (such as: name and work number) and the material The batch number (or material number) of the specific material contained in the container 3 is displayed on a human machine interface (HMI) of the machine 4. Next, a safety device (Auto guard) of the machine 4 is connected to the material container 3 (gas cylinder), and then the safety device is activated.
必須特別說明的是，有鑑於特用氣體通常是高危險性氣體或有毒氣體，因此在操作人員完成氣體管線的吹淨作業(Purge)之後，必須由陪同的檢查人員完成檢查。當然，在操作人員完成氣體鋼瓶的去舊換新作業之後，也同樣必須由陪同的檢查人員完成相關檢查。 並且，檢查人員完成檢查之後，必須使用可攜式電子裝置5讀取該第二身分訊息攜載單元81的方式確認持有該檢查人員身分卡8之該檢查人員是否完成相關檢查。 It must be particularly noted that in view of the fact that special gases are usually highly dangerous or toxic, after the operator has completed the purge of the gas pipeline, the inspection must be completed by an accompanying inspector. Of course, after the operator completes the replacement and replacement of gas cylinders, the accompanying inspectors must also complete the relevant inspections. In addition, after the inspector completes the inspection, the portable electronic device 5 must be used to read the second identity information carrying unit 81 to confirm whether the inspector holding the inspector's identity card 8 has completed the relevant inspection.
在此必須強調的是，雖然圖1係顯示該第一身分訊息攜載單元21、該料品訊息攜載單元31與該機台訊息攜載單元41皆為一維條碼(1D barcode)，然而不應以此限制所述訊息攜載單元(21,31,41)的實施態樣。於實際應用本發明之時，該第一身分訊息攜載單元21、該料品訊息攜載單元31與該機台訊息攜載單元41可為下列任一者：圖形、文字、字母、數字、一維條碼(1D barcode)、二維條碼(2D barcode)、漢信碼(Chinese-sensible code)、QR碼、矩陣條碼(Maxicode)、RFID標籤、NFC標籤、上述任兩者之組合、或上述任兩者以上之組合。以一維條碼(1D barcode)為例，該料品訊息攜載單元31可利用Code 39條碼產生器製作，並使其攜載該料品容置器3所盛裝的該特定料品之品名、批號、有效日期、與序號。值得特別說 明的是，為了利於可攜式電子裝置5對於品名、批號、有效日期、與序號之清楚讀取，製作料品訊息攜載單元31的一維條碼之時，必須於相鄰兩個基礎訊息之間係***有一訊息分隔符號(Central seperating character)，例如：%、$、/、~、！、@、#、^、&、*、(、)、-、_、|、{、}、？、<、>、\、[、]或+。 It must be emphasized here that although FIG. 1 shows that the first identity information carrying unit 21, the material information carrying unit 31, and the machine information carrying unit 41 are all 1D barcodes, however The implementation of the message carrying unit (21, 31, 41) should not be limited in this way. When the present invention is actually applied, the first identity information carrying unit 21, the material information carrying unit 31, and the machine information carrying unit 41 may be any of the following: graphics, text, letters, numbers, 1D barcode, 2D barcode, Chinese-sensible code, QR code, Maxicode, RFID tag, NFC tag, any combination of the above, or the above Any combination of the two. Taking a 1D barcode as an example, the material information carrying unit 31 can be made using a Code 39 barcode generator, and it can be made to carry the product name of the specific material contained in the material container 3, Lot number, expiration date, and serial number. Worth special It is clear that in order to facilitate the clear reading of the product name, batch number, expiration date, and serial number of the portable electronic device 5, when the one-dimensional barcode of the material information carrying unit 31 is produced, the two basic information must be adjacent A central seperating character is inserted between them, for example:%, $, /, ~,! , @, #, ^, &, *, (,),-, _, |, {,},? , <,>, \, [,], Or +.
可想而知，對應於不同實施態樣的訊息攜載單元(21,31,41)，可攜式電子裝置5的讀取單元51可為下列任一者：RFID標籤讀取器、NFC標籤讀取器、影像辨識器、一維條碼讀取器、二維條碼讀取器、漢信碼讀取器、QR碼讀取器、矩陣條碼讀取器、或影像擷取器。若可攜式電子裝置5為智慧型手機、個人數位助理、筆記型電腦、平板電腦、智慧眼鏡、或智慧手錶，則可直接以可攜式電子裝置5內建的影像擷取模組作為該讀取單元51；如此，於該可攜式電子裝置5安裝一影像(或條碼)辨識軟體之後，便能夠藉由配合使用該讀取單元51與該影像辨識單元的方式，令可攜式電子裝置5完成該第一身分訊息攜載單元21、該料品訊息攜載單元31、與/或該機台訊息攜載單元41之讀取。然而，有鑑於大部分的積體電路製造廠(IC foundry)皆禁止於廠內使用任何類型的智慧型電子裝置，搭載有條碼掃描器(即，讀取單元51)的個人數位助理(Digital personal assistant,PDA)便成為所述可攜式電子裝置5的最佳實施態樣。 It is conceivable that corresponding to the information carrying units (21, 31, 41) of different implementation aspects, the reading unit 51 of the portable electronic device 5 may be any of the following: RFID tag reader, NFC tag Reader, image recognizer, one-dimensional barcode reader, two-dimensional barcode reader, Chinese letter reader, QR code reader, matrix barcode reader, or image capture device. If the portable electronic device 5 is a smart phone, a personal digital assistant, a notebook computer, a tablet computer, smart glasses, or a smart watch, the image capture module built in the portable electronic device 5 can be used as the Reading unit 51; In this way, after installing an image (or barcode) identification software on the portable electronic device 5, the portable electronic device 5 can be used to make the portable electronic device by using the reading unit 51 and the image recognition unit together. The device 5 finishes reading the first identity information carrying unit 21, the material information carrying unit 31, and / or the machine information carrying unit 41. However, in view of the fact that most integrated circuit manufacturers (IC foundry) prohibit the use of any type of smart electronic devices in the factory, Digital personals equipped with a barcode scanner (ie, reading unit 51) assistant (PDA) becomes the best implementation of the portable electronic device 5.
繼續地參閱圖1，並請同時參閱圖2，係顯示可攜式電子裝置的立體圖。值得注意的是，雖然可攜式電子裝置5可以透過讀取第一身分訊息攜載單元21的方式確認持有該操作人員身分卡2之操作人 員是否具有操作該機台4的權限，但是考慮到低職級的操作人員有可能借用高職級的廠長或工程師的操作人員身分卡2而妄加地操作該些不需要更換料品的機台4，本發明又於氣體換裝系統之中增設所謂的電子權杖單元(Electronic token unit)10；其中，該電子權杖單元10之中係儲存有一次性認證碼(One-time password,OTP)。特別地，於該可攜式電子裝置5完成該第一身分訊息攜載單元21的讀取之後，中央監控系統CSRC可透過可攜式電子裝置5要求操作人員提供與電子權杖單元10溝通；之後，可攜式電子裝置5可透過存取所述一次性認證碼的方式，重複確認持有該操作人員身分卡2之該操作人員是否具有操作該機台4的權限，避免高職級的廠長或工程師的操作人員身分卡2被拿來胡亂操作該些不需要更換料品的機台4。本發明並不限制電子權杖單元10的實施態樣，如圖2所示，電子權杖單元10可以是：藍牙電子裝置、USB電子裝置、NFC標籤、或RFID標籤。並且，在可攜式電子裝置5自該電子權杖單元10之中完成所述一次性認證碼的存取之後，可攜式電子裝置5內部的一權杖碼產生單元(未圖示)會重新生成一組一次性認證碼，並寫入該電子權杖單元10之中，藉此方式提高機台4的操作權限。 Continue to refer to FIG. 1 and also refer to FIG. 2, which are perspective views showing the portable electronic device. It is worth noting that although the portable electronic device 5 can confirm the operator holding the identity card 2 of the operator by reading the first identity information carrying unit 21 Whether the operator has the authority to operate the machine 4, but considering that lower-level operators may borrow the higher-level plant manager or engineer's operator ID card 2 to arbitrarily operate the machines 4 that do not need to change materials In the present invention, a so-called Electronic token unit 10 is added to the gas replacement system. The electronic token unit 10 stores a one-time password (OTP). . Specifically, after the portable electronic device 5 finishes reading the first identity information carrying unit 21, the central monitoring system CSRC can request the operator to provide communication with the electronic token unit 10 through the portable electronic device 5; After that, the portable electronic device 5 can repeatedly confirm whether the operator holding the identity card 2 of the operator has the authority to operate the machine 4 by accessing the one-time authentication code, thereby avoiding high-level factories The operator or engineer's operator identity card 2 is used to randomly operate the machines 4 which do not need to be replaced. The present invention does not limit the implementation of the electronic token unit 10. As shown in FIG. 2, the electronic token unit 10 may be a Bluetooth electronic device, a USB electronic device, an NFC tag, or an RFID tag. In addition, after the portable electronic device 5 completes the one-time authentication code access from the electronic token unit 10, a token code generating unit (not shown) inside the portable electronic device 5 will A set of one-time authentication codes are generated again and written into the electronic token unit 10, thereby increasing the operation authority of the machine 4.
如此，上述說明係已完整、清楚地介紹說明本發明之一種氣體換裝系統。接著，下文將繼續介紹說明本發明之一種氣體換裝方法。請重複參閱圖2，並請同時參閱圖3A與圖3B，係顯示本發明之氣體換裝方法的流程圖。並且，請再同時參閱圖4A、圖4B、圖4C、與圖4D，係顯示可攜式電子裝置的螢幕的正視圖。如圖1與圖3A所 示，所述氣體換裝方法係首先執行步驟S1，將至少一第一身分訊息攜載單元21設置於至少一操作人員身分卡2之上，將至少一第二身分訊息攜載單元81設置於至少一檢查人員身分卡8之上，將至少一料品訊息攜載單元31設置於至少一料品容置器3之上，並將至少一機台訊息攜載單元41設置於至少一機台4之上；其中，該料品容置器3容置有一特用氣體(例如：NH3或SiH4)，且該機台4為該特用氣體的一氣體供應系統。並且，於步驟S2之中，係提供至少一可攜式電子裝置5，且該可攜式電子裝置5具有一讀取單元51(例如：條碼掃描器)。 Thus, the above description has completely and clearly introduced a gas replacement system of the present invention. Next, a gas replacement method according to the present invention will be described below. Please refer to FIG. 2 repeatedly, and refer to FIG. 3A and FIG. 3B at the same time, which are flowcharts showing the gas replacement method of the present invention. Moreover, please refer to FIG. 4A, FIG. 4B, FIG. 4C, and FIG. 4D together, which are front views showing a screen of the portable electronic device. As shown in FIG. 1 and FIG. 3A, the gas replacement method first performs step S1, setting at least one first identity information carrying unit 21 on at least one operator identity card 2, and at least one second identity The message carrying unit 81 is disposed on at least one identity card 8 of the inspector, the at least one article information carrying unit 31 is disposed on the at least one article container 3, and the at least one machine message carrying unit is 41 is arranged on at least one machine 4; wherein the material container 3 contains a special gas (for example: NH 3 or SiH 4 ), and the machine 4 is a gas supply for the special gas system. Moreover, in step S2, at least one portable electronic device 5 is provided, and the portable electronic device 5 has a reading unit 51 (for example, a barcode scanner).
本發明之氣體換裝方法係接著執行步驟S3，如圖4A的(a)圖與(b)圖所示，該可攜式電子裝置透過有線連接或無線連接的方式與該機台4建立溝通。於本發明中，可攜式電子裝置5係透過收發裝置6而與中央監控系統CSRC相互溝通，且該中央監控系統CSRC則透過控制裝置7控制該機台4的運作狀態。並且，如圖1所示，可攜式電子裝置5也可以透過一有線通訊模組WC直接與該機台4溝通或進行資料傳輸。本發明之氣體換裝方法係接著執行步驟S4，藉由該讀取單元51，令該可攜式電子裝置5透過讀取該機台訊息攜載單元41的方式確認該機台4之類型與其運作狀態(如圖4A的(c)圖所示)。 The gas refilling method of the present invention then performs step S3, as shown in (a) and (b) of FIG. 4A. The portable electronic device establishes communication with the machine 4 through a wired connection or a wireless connection. . In the present invention, the portable electronic device 5 communicates with the central monitoring system CSRC through the transceiver device 6, and the central monitoring system CSRC controls the operating state of the machine 4 through the control device 7. Moreover, as shown in FIG. 1, the portable electronic device 5 can also directly communicate with the machine 4 or perform data transmission through a wired communication module WC. The gas refilling method of the present invention then executes step S4, and through the reading unit 51, causes the portable electronic device 5 to confirm the type of the machine 4 and its type by reading the machine message carrying unit 41. Operating status (as shown in Figure 4A (c)).
由於可攜式電子裝置5透過機台4的Machine ID得知該機台4係為氣體供應設備，因此，如圖4B的(a)圖所示，後端的中央監控系統CSRC要求操作人員先執行氣體管線的吹淨作業。有鑑於特用氣體通常是高危險性氣體或有毒氣體，因此吹淨作業必須由檢查人員陪同操作人員完成。是以，於步驟S5之中，藉由該讀取單元51，該可 攜式電子裝置5透過讀取該第一身分訊息攜載單元21的方式確認持有該操作人員身分卡2之一操作人員是否具有操作該機台4的權限；同時，該可攜式電子裝置5讀取該第二身分訊息攜載單元81以確認一檢查人員已經對該操作人員的操作完成檢查(如圖4B的(b)圖所示)。 之後，於步驟S6之中，如圖4B的(c)圖所示，操作人員係對至少一氣體管線執行吹淨作業(Purge)。完成吹淨作業之後，如圖4C的(a)圖所示，接著便可以開始進行氣體鋼瓶的去舊換新作業。 Since the portable electronic device 5 learns from the Machine ID of the machine 4 that the machine 4 is a gas supply device, as shown in (a) of FIG. 4B, the central monitoring system CSRC at the back end requires the operator to perform first Purge operation of gas lines. In view of the fact that special gases are usually highly dangerous or toxic gases, the blowing operation must be completed by the inspectors accompanied by the operators. Therefore, in step S5, with the reading unit 51, the available The portable electronic device 5 confirms whether the operator holding one of the operator's identity cards 2 has the authority to operate the machine 4 by reading the first identity message carrying unit 21; at the same time, the portable electronic device 5 Read the second identity message carrying unit 81 to confirm that an inspector has completed the inspection of the operation of the operator (as shown in FIG. 4B (b)). Thereafter, in step S6, as shown in FIG. 4B (c), the operator performs a purge operation on at least one gas line. After the blowing operation is completed, as shown in (a) of FIG. 4C, the gas cylinder can be replaced and replaced.
更換氣體鋼瓶之前，方法流程係先執行步驟S7與步驟S8。於步驟S7之中，藉由該讀取單元51，該可攜式電子裝置5透過讀取該料品訊息攜載單元31的方式確認該料品容置器3所容置的該特用氣體之複數個基礎訊息，至少包括：品名、批號、有效日期、與序號。並且，於步驟S8之中，藉由該讀取單元51，該可攜式電子裝置5再次讀取該第一身分訊息攜載單元21以確認該操作人員的權限；同時，該可攜式電子裝置5再次讀取該第二身分訊息攜載單元81以確認該檢查人員已經對該操作人員的操作完成檢查(如圖4C的(b)圖所示)。 Before the gas cylinder is replaced, the method flow first executes steps S7 and S8. In step S7, with the reading unit 51, the portable electronic device 5 confirms the special gas contained in the material container 3 by reading the material information carrying unit 31. The basic information includes at least: product name, batch number, expiration date, and serial number. Moreover, in step S8, with the reading unit 51, the portable electronic device 5 reads the first identity information carrying unit 21 again to confirm the authority of the operator; at the same time, the portable electronic The device 5 reads the second identity message carrying unit 81 again to confirm that the inspector has completed the inspection of the operation of the operator (as shown in FIG. 4C (b)).
完成氣體鋼瓶的去舊換新作業之後，如圖4C的(c)圖所示，後端的中央監控系統CSRC會要求操作人員對新換上的氣體鋼瓶進行安全上的檢查。因此，於步驟S9之中，係確認該料品容置器3於一正常狀態之下被裝入正確的該機台4之中，接著該機台的一安全裝置(Auto guard)連接至該料品容置器3。最終，如圖4D的(a)圖與(b)圖所示，方法流程係最終執行步驟S10，藉由該讀取單元51，該可攜式 電子裝置5再次讀取該第一身分訊息攜載單元21與該第二身分訊息攜載單元81，確認完成該料品容置器3於該機台4之中的更換作業。 After completing the gas cylinder decommissioning operation, as shown in Figure 4C (c), the central monitoring system CSRC at the back end will require the operator to perform a safety inspection on the newly replaced gas cylinder. Therefore, in step S9, it is confirmed that the material container 3 is loaded into the correct machine 4 under a normal state, and then a safety device (Auto guard) of the machine is connected to the machine.料 品 容器 3。 Material container 3. Finally, as shown in (a) and (b) of FIG. 4D, the method flow finally executes step S10. With the reading unit 51, the portable The electronic device 5 reads the first identity information carrying unit 21 and the second identity information carrying unit 81 again, and confirms that the replacement operation of the material container 3 in the machine 4 is completed.
補充說明的是，本發明之氣體換裝方法係透過步驟S5確認持有該操作人員身分卡2之操作人員是否具有操作該機台4的權限。然而，必須預先想到的是，低職級的操作人員有可能借用高職級的廠長或工程師的操作人員身分卡2而妄加胡亂地操作該些不需要更換料品的機台4，因此，本發明又於此氣體換裝方法之中增設步驟5A，其可***於該步驟(5)與該步驟(6)之間。執行步驟5A之時，可攜式電子裝置5會要求與一電子權杖單元10(如圖2所示)相互溝通，以重複確認持有該操作人員身分卡2之該操作人員是否具有操作該機台4的權限。簡單地說，可攜式電子裝置5可透過存取該電子權杖單元10之中的一次性認證碼的方式，重複確認持有該操作人員身分卡2之該操作人員是否具有操作該機台4的權限，避免高職級的廠長或工程師的操作人員身分卡2被拿來胡亂操作該些不需要更換料品的機台4。 It is added that the gas replacement method of the present invention confirms through step S5 whether the operator holding the operator identity card 2 has the authority to operate the machine 4. However, it must be thought in advance that lower-level operators may use the higher-level plant manager or engineer's operator ID card 2 to arbitrarily operate these machines 4 that do not need to be replaced. Therefore, this In the invention, a step 5A is added to the gas replacement method, which can be inserted between the step (5) and the step (6). When step 5A is performed, the portable electronic device 5 will require mutual communication with an electronic token unit 10 (as shown in FIG. 2) to repeatedly confirm whether the operator holding the operator identity card 2 has the ability to operate the The authority of machine 4. Simply put, the portable electronic device 5 can repeatedly confirm whether the operator holding the operator identity card 2 has the operation of the machine by accessing the one-time authentication code in the electronic token unit 10. 4 to prevent high-level factory directors or engineers from operating the identity card 2 from being used to operate these machines 4 without the need to change materials.
必須加以強調的是，上述之詳細說明係針對本發明可行實施例之具體說明，惟該實施例並非用以限制本發明之專利範圍，凡未脫離本發明技藝精神所為之等效實施或變更，均應包含於本案之專利範圍中。 It must be emphasized that the above detailed description is a specific description of the feasible embodiment of the present invention, but this embodiment is not intended to limit the patent scope of the present invention, and any equivalent implementation or change without departing from the technical spirit of the present invention, All should be included in the patent scope of this case.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW490724B (en) * | 2001-06-11 | 2002-06-11 | United Microelectronics Corp | Interlocking management method and system in semiconductor material supply equipment |
| CN202040537U (en) * | 2011-03-24 | 2011-11-16 | 上海盛韬半导体科技有限公司 | Full automatic special gas conveying cabinet |
| US20160245426A1 (en) * | 2012-11-09 | 2016-08-25 | Zachary L. Fowler | Method and apparatus for controlling gas flow from cylinders |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW490724B (en) * | 2001-06-11 | 2002-06-11 | United Microelectronics Corp | Interlocking management method and system in semiconductor material supply equipment |
| CN202040537U (en) * | 2011-03-24 | 2011-11-16 | 上海盛韬半导体科技有限公司 | Full automatic special gas conveying cabinet |
| US20160245426A1 (en) * | 2012-11-09 | 2016-08-25 | Zachary L. Fowler | Method and apparatus for controlling gas flow from cylinders |
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