TWM519320U - Dry film pressing device - Google Patents
Dry film pressing device Download PDFInfo
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- TWM519320U TWM519320U TW104216126U TW104216126U TWM519320U TW M519320 U TWM519320 U TW M519320U TW 104216126 U TW104216126 U TW 104216126U TW 104216126 U TW104216126 U TW 104216126U TW M519320 U TWM519320 U TW M519320U
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Description
本創作係有關於乾膜壓合裝置，尤指一種氣壓式乾膜壓合裝置。 This creation is about a dry film pressing device, especially a pneumatic dry film pressing device.
基材貼膜裝置用於將具有特定功能的乾膜貼附在晶圓基材上，為了使乾膜能夠有效地發揮其功效，因此乾膜與基材之間必需完全密合貼附。現有的基材貼膜裝置採用充氣的矽膠氣囊對乾膜加壓而將乾膜貼附在基材上，氣囊為彈性材質所製成因此在重覆充氣使用後會因材料疲乏而影響貼膜的精確性，故氣囊為必需視消耗程度而更換的耗材，其增加了製程的成本。 The substrate filming device is used to attach a dry film having a specific function to a wafer substrate, and in order for the dry film to effectively exhibit its efficacy, the dry film and the substrate must be completely adhered and attached. The existing substrate filming device uses an air-filled silicone airbag to pressurize the dry film and attach the dry film to the substrate. The airbag is made of an elastic material, so that after repeated use of the aerated air, the film is affected by the fatigue of the film. Sexuality, so the airbag is a consumable that must be replaced depending on the degree of consumption, which increases the cost of the process.
有鑑於此，本創作人遂針對上述現有技術，特潛心研究並配合學理的運用，盡力解決上述之問題點，即成為本創作人改良之目標。 In view of this, the creator has made great efforts to solve the above problems by focusing on the above-mentioned prior art, and has devoted himself to the application of the theory, that is, the goal of the creator's improvement.
本創作提供一種氣壓式乾膜壓合裝置。 This creation provides a pneumatic dry film pressing device.
本創作提供一種乾膜壓合裝置，係用於將具有特定功能性的一乾膜貼附至一基材，其包含一載台、一壓台及一供料輪。載台用於承載基材。壓台與載台相對配置且能夠相對於載台移動，壓台具有一吹嘴且吹嘴朝向載台配置用以直接對乾膜吹氣。供料輪能夠旋轉而將述乾膜供應至載台與壓台之間。 The present invention provides a dry film pressing device for attaching a dry film having a specific function to a substrate comprising a stage, a pressing table and a supply wheel. The stage is used to carry the substrate. The pressure table is disposed opposite the stage and movable relative to the stage. The pressure table has a mouthpiece and the mouthpiece is disposed toward the stage for directly blowing the dry film. The feed wheel is rotatable to supply the dry film between the stage and the press table.
較佳地，乾膜壓合裝置更包含一第一收料輪，與供料輪相對配置在載台的二側，乾膜跨越載台且乾膜的二端分別捲撓在供料輪及第一收料輪。 乾膜上貼附有一離形膜，乾膜壓合裝置更包含供離形膜捲撓的一第二收料輪，離形膜的二端分別捲撓在供料輪及第二收料輪，且第二收料輪與供料輪配置在載台的同一側。 Preferably, the dry film pressing device further comprises a first receiving wheel disposed opposite to the feeding wheel on two sides of the loading platform, the dry film spanning the loading platform and the two ends of the dry film are respectively wound on the feeding wheel and The first receiving wheel. A release film is attached to the dry film, and the dry film pressing device further comprises a second receiving wheel for winding the release film, and the two ends of the release film are respectively wound on the supply wheel and the second receiving wheel And the second receiving wheel and the supply wheel are disposed on the same side of the stage.
較佳地，乾膜壓合裝置更包含一分膜導輪，分膜導輪配置在供料輪、第一收料輪及第二收料輪之間。分膜導輪與第一收料輪相對配置在載台的二側。 Preferably, the dry film pressing device further comprises a split film guide wheel disposed between the feed wheel, the first receiving wheel and the second receiving wheel. The split film guide wheel is disposed opposite to the first receiving wheel on two sides of the stage.
較佳地，乾膜壓合裝置更包含一定位機構，定位機構包含用以導引乾膜的一脫膜導輪，且脫膜導輪連接一組升降致動器而且配置在該供料輪、該第一收料輪及該第二收料輪之間。脫膜導輪連接一水平位移致動器且能夠被水平位移致動器帶動。分膜導輪連接另一組升降致動器上而且配置在供料輪、第一收料輪及第二收料輪之間。當乾膜跨設在脫膜導輪以及分膜導輪之間時，脫膜導輪以及分膜導輪分別接觸乾膜的不同面。 Preferably, the dry film pressing device further comprises a positioning mechanism, the positioning mechanism includes a release guide roller for guiding the dry film, and the release guide roller is connected to the set of lifting actuators and disposed on the feeding wheel Between the first receiving wheel and the second receiving wheel. The stripper guide wheel is coupled to a horizontal displacement actuator and is capable of being driven by a horizontal displacement actuator. The split film guide wheel is coupled to the other set of lift actuators and disposed between the feed wheel, the first receiving wheel and the second receiving wheel. When the dry film is disposed between the release guide wheel and the split guide wheel, the release guide wheel and the split guide wheel respectively contact different faces of the dry film.
較佳地，乾膜壓合裝置更包含對應載台配置的一裁刀。 Preferably, the dry film pressing device further comprises a cutter corresponding to the stage configuration.
本創作的乾膜壓合裝置藉由氣流將乾膜貼附於基材而能夠使乾膜與基材之間完全密合貼附。 The dry film pressing device of the present invention can adhere the dry film to the substrate completely by attaching the dry film to the substrate by air flow.
10‧‧‧乾膜 10‧‧‧ dry film
11‧‧‧離形膜 11‧‧‧Fractal film
20‧‧‧基材 20‧‧‧Substrate
100‧‧‧載台 100‧‧‧stage
101‧‧‧定位槽 101‧‧‧ positioning slot
102‧‧‧氣密膠條 102‧‧‧Airtight strip
200‧‧‧壓台 200‧‧‧pressure table
210‧‧‧吹嘴 210‧‧‧Blowing mouth
300‧‧‧供料輪 300‧‧‧ Feeding wheel
410‧‧‧第一收料輪 410‧‧‧First receiving wheel
420‧‧‧第二收料輪 420‧‧‧Second receiving wheel
500‧‧‧定位機構 500‧‧‧ Positioning agency
510‧‧‧脫膜導輪 510‧‧‧Release guide wheel
520‧‧‧分膜導輪 520‧‧‧Separate guide wheel
530‧‧‧升降致動器 530‧‧‧ Lift actuator
540‧‧‧水平位移致動器 540‧‧‧Horizontal displacement actuator
600‧‧‧裁刀 600‧‧‧Cutter
圖1係本創作較佳實施例之乾膜壓合裝置之示意圖。 BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic illustration of a dry film press apparatus of the preferred embodiment of the present invention.
圖2係圖1中本創作較佳實施例之乾膜壓合裝置之局部放大圖。 Figure 2 is a partial enlarged view of the dry film pressing device of the preferred embodiment of Figure 1.
圖3係本創作較佳實施例之乾膜壓合裝置之一作動示意圖。 Fig. 3 is a schematic view showing the operation of one of the dry film pressing devices of the preferred embodiment of the present invention.
圖4係圖3中本創作較佳實施例之乾膜壓合裝置之局部放大圖。 Figure 4 is a partial enlarged view of the dry film pressing device of the preferred embodiment of Figure 3;
圖5係本創作較佳實施例之乾膜壓合裝置之壓合作動示意圖。 Fig. 5 is a schematic view showing the cooperation of the dry film pressing device of the preferred embodiment of the present invention.
圖6係圖5中本創作較佳實施例之乾膜壓合裝置之局部放大圖。 Figure 6 is a partial enlarged view of the dry film pressing device of the preferred embodiment of Figure 5;
圖7係本創作較佳實施例之乾膜壓合裝置之一貼膜作動示意圖。 Fig. 7 is a schematic view showing the operation of a film of a dry film pressing device according to a preferred embodiment of the present invention.
圖8係本創作較佳實施例之乾膜壓合裝置之另一貼膜作動示意圖。 Figure 8 is a schematic view showing another film operation of the dry film pressing device of the preferred embodiment of the present invention.
圖9係本創作較佳實施例之乾膜壓合裝置之裁切作動示意圖。 Figure 9 is a schematic view showing the cutting operation of the dry film pressing device of the preferred embodiment of the present invention.
圖10係圖9中本創作較佳實施例之乾膜壓合裝置之局部放大圖。 Figure 10 is a partial enlarged view of the dry film pressing device of the preferred embodiment of Figure 9;
參閱圖1及圖2，本創作之較佳實施例提供一種乾膜壓合裝置，係用於將具有特定功能的一乾膜10貼附至一基材20，於本實施例中，乾膜10具有光阻之特性，基材20較佳地為一晶圓，但基材20也可以是玻璃或是其他材料製成，本創作不以此為限。於本實施例中，乾膜10較佳地呈帶狀，且其至少在用於貼附基材20的一面上貼覆有一離形膜11藉此避免沾黏塵粒。本創作的乾膜壓合裝置包含有一載台100、一壓台200、一供料輸300、一第一收料輪410、一第二收料輪420、一定位機構500及一裁刀600。 Referring to Figures 1 and 2, a preferred embodiment of the present invention provides a dry film pressing apparatus for attaching a dry film 10 having a specific function to a substrate 20, in the present embodiment, the dry film 10 The substrate 20 is preferably a wafer, but the substrate 20 can also be made of glass or other materials, and the present invention is not limited thereto. In the present embodiment, the dry film 10 is preferably in the form of a strip, and at least one side of the film for attaching the substrate 20 is coated with a release film 11 to avoid sticking dust particles. The dry film pressing device of the present invention comprises a loading platform 100, a pressing table 200, a feeding and conveying 300, a first receiving wheel 410, a second receiving wheel 420, a positioning mechanism 500 and a cutting knife 600. .
於本實施例中，載台100較佳地呈水平配置，其用於水平承載基材20，且載台100上較佳地設有一定位槽101，定位槽101供基材20置入其中而能夠定位於載台100上，且定位槽101的外緣較佳地設置有氣密膠條102。壓台200與載台100相對配置且能夠相對於載台100移動，壓台200具有一吹嘴210且吹嘴210下向配置而朝向載台100，再者吹嘴210對應定位槽101的中心配置。供料輪300用於供乾膜10捲撓於其上，供料輪300能夠旋轉而將述乾膜10供應至載台100與壓台200之間。第一收料輪410與供料輪300相對配置在載台100的二側，乾膜10跨越載台100且帶狀的乾膜10的二端分別捲撓在供料輪300及第一收料輪410。第二收料 輪420供離形膜11捲撓，於本實施例中離形膜11的二端分別捲撓在供料輪300及第二收料輪420。於本實施例中，第二收料輪420與供料輪300配置在載台100的同一側。定位機構500包含用以導引乾膜10的一脫膜導輪510、一分膜導輪520以及至少一組升降致動器530，於本實施例中，脫膜導輪510及分膜導輪520設置在不同的的升降致動器530上而能夠分別被各組升降致動器530帶動升降。再者，脫膜導輪510可以直接或間接連接一水平位移致動器540，脫膜導輪510能夠被水平位移致動器540帶動而在水平方向上相對於分膜導輪520移動，且脫膜導輪510配置在供料輪300、第一收料輪410及第二收料輪420之間。分膜導輪520與第一收料輪410相對配置在載台100的二側，且分膜導輪520配置在供料輪300、第一收料輪410及第二收料輪420之間。裁刀600對應載台100配置。 In this embodiment, the stage 100 is preferably horizontally disposed for the horizontal load-bearing substrate 20, and the stage 100 is preferably provided with a positioning groove 101 for the substrate 20 to be placed therein. It can be positioned on the stage 100, and the outer edge of the positioning groove 101 is preferably provided with a gas-tight strip 102. The pressure table 200 is disposed opposite to the stage 100 and movable relative to the stage 100. The pressure table 200 has a mouthpiece 210, and the mouthpiece 210 is disposed downwardly toward the stage 100. Further, the mouthpiece 210 corresponds to the center of the positioning groove 101. Configuration. The supply wheel 300 is used to wrap the dry film 10 thereon, and the supply wheel 300 is rotatable to supply the dry film 10 between the stage 100 and the platen 200. The first receiving wheel 410 and the feeding wheel 300 are disposed opposite to the two sides of the stage 100, and the dry film 10 spans the stage 100, and the two ends of the strip-shaped dry film 10 are respectively wound on the feeding wheel 300 and the first receiving Feeder 410. Second receipt The wheel 420 is wound by the release film 11, and in the present embodiment, the two ends of the release film 11 are respectively wound around the supply wheel 300 and the second receiving wheel 420. In the present embodiment, the second receiving wheel 420 and the supply wheel 300 are disposed on the same side of the stage 100. The positioning mechanism 500 includes a release guide wheel 510 for guiding the dry film 10, a split guide wheel 520, and at least one set of lift actuator 530. In this embodiment, the release guide wheel 510 and the film guide The wheels 520 are disposed on different lift actuators 530 and can be lifted and lowered by the respective sets of lift actuators 530. Furthermore, the stripper guide roller 510 can be directly or indirectly connected to a horizontal displacement actuator 540 that can be driven by the horizontal displacement actuator 540 to move horizontally relative to the split guide wheel 520, and The strip guide roller 510 is disposed between the supply wheel 300, the first receiving wheel 410, and the second receiving wheel 420. The split film guide wheel 520 is disposed on the two sides of the stage 100 opposite to the first receiving wheel 410 , and the split film guide wheel 520 is disposed between the supply wheel 300 , the first receiving wheel 410 and the second receiving wheel 420 . . The cutter 600 is disposed corresponding to the stage 100.
本創作的乾膜壓合裝置其使用時作動如後述。參閱圖1及圖2，乾膜10的一部分跨設在脫膜導輪510及分膜導輪520之間。分膜導520輪接觸離形膜11，當乾膜10通過分膜導520時，分膜導520引導離形膜11轉向至第二收料輪420而與乾膜10分離。由於乾膜10用以貼附基材的一面可具有黏性，因此脫膜導輪510則接觸乾膜10的另一面藉此避免脫膜導輪510沾黏乾膜10。藉由升降致動器530抬升脫膜導輪510及分膜導輪520而使得乾膜10懸於載台100上方，且乾膜10與載台100之間具有足夠的空間以供將基材20置於載台100上。於本實施例中帶狀的乾膜10經由供料輪300捲動而連續輸送至基材20上方。但乾膜10也可以預先裁切為獨立的條狀或片狀，經由人工放置方式或供料輪300推動之方式依序置於基材20上方，且能夠遮蔽氣密膠條102。藉由供料輪300及第一收料輪410配合旋轉而能夠將乾膜10自供料輪300越過載台100而輸送至第一收料輪410。乾膜10貼有離形膜11的一面朝向載台100，且藉由分膜導輪520能夠在乾膜10上待貼附的部分輸送 至載台100之前預先將離形膜11自乾膜10上剝離，被剝離的離形膜11則被第二收料輪420捲收。待基材20安置於載台100上之後，再藉由前述之機構作動將待貼附的乾膜10移除離形膜11後再輸送至基材20上方。 The dry film press-fit apparatus of the present invention is described as follows when it is used. Referring to FIGS. 1 and 2, a portion of the dry film 10 is interposed between the release guide roller 510 and the split guide roller 520. The split film guide 520 wheel contacts the release film 11, and when the dry film 10 passes through the split film guide 520, the split film guide 520 guides the release film 11 to the second take-up wheel 420 to be separated from the dry film 10. Since the side of the dry film 10 for attaching the substrate may be viscous, the release guide roller 510 contacts the other side of the dry film 10 thereby preventing the release guide roller 510 from adhering to the dry film 10. The lifting film 10 is suspended above the stage 100 by lifting the release guide roller 510 and the film dividing guide wheel 520, and there is sufficient space between the dry film 10 and the stage 100 for the substrate. 20 is placed on the stage 100. In the present embodiment, the strip-shaped dry film 10 is continuously conveyed to the upper side of the substrate 20 via the supply wheel 300. However, the dry film 10 can also be cut into individual strips or sheets in advance, and placed on the substrate 20 in a manual manner or by the feeding wheel 300, and the airtight strip 102 can be shielded. By rotating the supply wheel 300 and the first receiving wheel 410, the dry film 10 can be transported to the first receiving wheel 410 from the supply wheel 300 over the loading stage 100. The dry film 10 is attached with one side of the release film 11 toward the stage 100, and the portion to be attached on the dry film 10 by the film guide roller 520 is transported. The release film 11 is peeled off from the dry film 10 before the stage 100, and the peeled release film 11 is taken up by the second take-up wheel 420. After the substrate 20 is placed on the stage 100, the dry film 10 to be attached is removed from the film 11 by the mechanism described above and then transported to the substrate 20.
參閱圖3及圖4，藉由升降致動器530將脫膜導輪510及分膜導輪520朝向載台100降下而使待貼附的乾膜10靠近基材20，且乾膜10與基材20之間具有間隙。 Referring to FIG. 3 and FIG. 4, the lifting guide roller 510 and the film dividing guide wheel 520 are lowered toward the stage 100 by the lifting actuator 530 to bring the dry film 10 to be attached close to the substrate 20, and the dry film 10 and There is a gap between the substrates 20.
參閱圖5及圖6，將壓台200向下移向載台100至接觸乾膜10，其較佳地將乾膜10壓制固定於載台100上。且壓台200抵壓氣密膠條102而使乾膜10與定位槽內101之間呈氣密狀態，並且將定位槽內101抽氣呈負壓。 Referring to Figures 5 and 6, the platen 200 is moved downwardly toward the stage 100 to contact the dry film 10, which preferably presses the dry film 10 to the stage 100. The pressure table 200 presses the airtight rubber strip 102 to make the dry film 10 and the positioning groove 101 airtight, and draws the air in the positioning groove 101 to a negative pressure.
參閱圖7，壓台200藉由其吹嘴210直接向乾膜10吹氣以提供正壓氣源，藉由氣壓差將乾膜10推向定位槽內101的負壓區，而且氣流推擠乾膜10而使乾膜10先接觸基材20的中心。 Referring to FIG. 7, the platen 200 is directly blown to the dry film 10 by its mouthpiece 210 to provide a positive pressure gas source, and the dry film 10 is pushed toward the negative pressure zone of the positioning groove 101 by the air pressure difference, and the air flow is pushed. The film 10 is dried to bring the dry film 10 into contact with the center of the substrate 20.
參閱圖8，當吹嘴210繼續向乾膜10吹氣時，其氣流沿基材20的中心輻射擴散而使乾膜10自基材20的中心向外呈放射狀逐漸覆蓋基材20直至基材20的邊緣。 Referring to FIG. 8, when the mouthpiece 210 continues to blow the dry film 10, its airflow diffuses along the center of the substrate 20 to cause the dry film 10 to radially cover the substrate 20 from the center of the substrate 20 to the base. The edge of the material 20.
參閱圖9及圖10，將壓台200向上移離載台100，並且將裁刀600置入載台100與壓台200之間，藉由裁刀600將乾膜10覆蓋基材20的部分裁下將脫膜導輪510沿水平方向朝向分膜導輪520移動以利於將剩餘的乾膜10餘料與載台100分離。因此，乾膜10餘料能夠繼續輸送至第一收料輪410。 Referring to FIGS. 9 and 10, the platen 200 is moved upwardly away from the stage 100, and the cutter 600 is placed between the stage 100 and the platen 200, and the dry film 10 is covered by the cutter 600 to cover the portion of the substrate 20. The stripper guide roller 510 is moved in the horizontal direction toward the split guide wheel 520 to facilitate separation of the remaining dry film 10 from the stage 100. Therefore, the dry film 10 residual material can continue to be delivered to the first receiving wheel 410.
本創作的乾膜壓合裝置藉由氣流將乾膜10貼附於基材20，其貼附時能夠自基材20的中心向外呈放射狀逐漸覆蓋基材20。因此能夠使乾膜10與基材20之間完全密合貼附，而且不採用氣囊耗材而能夠降低貼膜製程的成本。 The dry film laminating apparatus of the present invention attaches the dry film 10 to the substrate 20 by air flow, and can gradually cover the substrate 20 radially from the center of the substrate 20 when attached. Therefore, the dry film 10 and the substrate 20 can be completely adhered to each other, and the cost of the filming process can be reduced without using the airbag consumable.
以上所述僅為本創作之較佳實施例，非用以限定本創作之專利範圍，其他運用本創作之專利精神之等效變化，均應俱屬本創作之專利範圍。 The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the scope of the patents of the present invention. Other equivalent variations of the patent spirit using the present invention are all within the scope of the patent.
10‧‧‧乾膜 10‧‧‧ dry film
11‧‧‧離形膜 11‧‧‧Fractal film
20‧‧‧基材 20‧‧‧Substrate
100‧‧‧載台 100‧‧‧stage
200‧‧‧壓台 200‧‧‧pressure table
210‧‧‧吹嘴 210‧‧‧Blowing mouth
300‧‧‧供料輪 300‧‧‧ Feeding wheel
410‧‧‧第一收料輪 410‧‧‧First receiving wheel
420‧‧‧第二收料輪 420‧‧‧Second receiving wheel
500‧‧‧定位機構 500‧‧‧ Positioning agency
510‧‧‧脫膜導輪 510‧‧‧Release guide wheel
520‧‧‧分膜導輪 520‧‧‧Separate guide wheel
530‧‧‧升降致動器 530‧‧‧ Lift actuator
540‧‧‧水平位移致動器 540‧‧‧Horizontal displacement actuator
600‧‧‧裁刀 600‧‧‧Cutter
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104216126U TWM519320U (en) | 2015-10-07 | 2015-10-07 | Dry film pressing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104216126U TWM519320U (en) | 2015-10-07 | 2015-10-07 | Dry film pressing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWM519320U true TWM519320U (en) | 2016-03-21 |
Family
ID=56086792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104216126U TWM519320U (en) | 2015-10-07 | 2015-10-07 | Dry film pressing device |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWM519320U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111710620A (en) * | 2019-03-18 | 2020-09-25 | 广东思沃精密机械有限公司 | Film sticking device |
-
2015
- 2015-10-07 TW TW104216126U patent/TWM519320U/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111710620A (en) * | 2019-03-18 | 2020-09-25 | 广东思沃精密机械有限公司 | Film sticking device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4K | Annulment or lapse of a utility model due to non-payment of fees |