TWM491159U - Dynamic Raman scatter optical analysis device - Google Patents
Dynamic Raman scatter optical analysis device Download PDFInfo
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- TWM491159U TWM491159U TW103209557U TW103209557U TWM491159U TW M491159 U TWM491159 U TW M491159U TW 103209557 U TW103209557 U TW 103209557U TW 103209557 U TW103209557 U TW 103209557U TW M491159 U TWM491159 U TW M491159U
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Description
本創作係有關於一種動態拉曼散射光分析裝置。This creation is about a dynamic Raman scattered light analysis device.
拉曼散射光經由光譜分析儀分析後可得到拉曼散射光譜，習知的拉曼散射光譜係由測試樣品之小區域範圍所被激發出，如欲測得測試樣品之較大區域範圍的拉曼散射光譜，則需將激發光源分多次照射測試樣品的不同區域，才能測得測試樣品之較大區域範圍的拉曼散射光譜。此外，較大區域範圍的拉曼散射光影像也無法快速取得，每次僅能測得測試樣品之小區域範圍的拉曼散射光影像，如欲測得測試樣品之較大區域範圍的拉曼散射光影像，也需將激發光源分多次照射測試樣品的不同區域，才能測得測試樣品之較大區域範圍的拉曼散射光影像。The Raman scattering spectrum is analyzed by a spectrum analyzer to obtain a Raman scattering spectrum. The conventional Raman scattering spectrum is excited by a small area of the test sample, and a large area of the test sample is to be measured. For the scatter spectrum of the Mann, the excitation source is required to illuminate different regions of the test sample multiple times in order to measure the Raman scattering spectrum over a large area of the test sample. In addition, large areas of Raman scattered light images can not be quickly obtained, only a small range of Raman scattered light images of the test sample can be measured at a time, such as Raman, which is to measure a large area of the test sample. For the scattered light image, the excitation light source is also required to illuminate different regions of the test sample multiple times to measure the Raman scattered light image over a large area of the test sample.
有鑑於此，本創作為了解決上述問題而提供一種動態拉曼散射光分析裝置，經由調整照射於測試樣品之激發光源的光束斑點大小，可激發出不同區域範圍的拉曼散射光，以供後續的拉曼散射光譜與拉曼散射光影像量測。此外，經由調整光譜分析儀中稜鏡之光柵面或反射面位置，使得拉曼散射光分別入射光柵面或反射面，可分別測得測試樣品之拉曼散射光譜或拉曼散射光影像。In view of this, the present invention provides a dynamic Raman scattered light analyzing device for solving the above problems, and by adjusting the size of the beam spot of the excitation light source irradiated to the test sample, Raman scattered light of different region ranges can be excited for subsequent Raman scattering spectra and Raman scattered light image measurements. In addition, by adjusting the position of the grating surface or the reflecting surface of the chirp in the spectrum analyzer, the Raman scattered light is respectively incident on the grating surface or the reflecting surface, and the Raman scattering spectrum or the Raman scattered light image of the test sample can be respectively measured.
本創作之動態拉曼散射光分析裝置，包括一激發光源、一光 束擴束器、一物鏡及一光譜分析儀。激發光源發出一激發光束，此激發光束照射一測試樣品。光束擴束器可使通過的激發光束之一光束斑點改變大小。物鏡可使通過的激發光束匯聚。光譜分析儀接收從測試樣品所被激發出之一拉曼散射光，光譜分析儀包括一第一濾波器、一準直面鏡、一稜鏡、一聚焦面鏡、一第二濾波器及一影像感測裝置，當拉曼散射光入射光譜分析儀時將依序入射第一濾波器、準直面鏡、稜鏡、聚焦面鏡、第二濾波器、影像感測裝置。稜鏡包括一光柵面及一反射面，光柵面具有光柵功能，反射面具有反射功能，此稜鏡可調整光柵面及反射面位置，使拉曼散射光入射光柵面或反射面。The dynamic Raman scattered light analysis device of the present invention comprises an excitation light source and a light A beam expander, an objective lens and an optical spectrum analyzer. The excitation source emits an excitation beam that illuminates a test sample. The beam expander can change the size of the beam spot of one of the passing excitation beams. The objective lens converges the passing excitation beam. The spectrum analyzer receives one of the Raman scattered light excited from the test sample, and the spectrum analyzer includes a first filter, a collimating mirror, a pupil, a focusing mirror, a second filter, and an image. The sensing device, when the Raman scattered light is incident on the spectrum analyzer, sequentially enters the first filter, the collimating mirror, the pupil, the focusing mirror, the second filter, and the image sensing device. The 稜鏡 includes a grating surface and a reflecting surface. The grating surface has a grating function, and the reflecting surface has a reflecting function. The 稜鏡 can adjust the position of the grating surface and the reflecting surface to make the Raman scattered light enter the grating surface or the reflecting surface.
其中激發光源為一連續波雷射發出一連續波雷射光。The excitation source emits a continuous wave of laser light for a continuous wave of laser light.
其中第一濾波器包括一低通濾波器及一高通濾波器。The first filter includes a low pass filter and a high pass filter.
其中第二濾波器包括一高通濾波器及一低通濾波器。The second filter includes a high pass filter and a low pass filter.
其中低通濾波器為一可變波段低通濾波器，高通濾波器為一可變波段高通濾波器。The low pass filter is a variable band low pass filter and the high pass filter is a variable band high pass filter.
其中光束擴束器為一可變倍率光束擴束器。The beam expander is a variable power beam expander.
其中物鏡為一可變倍率物鏡。The objective lens is a variable magnification objective lens.
其中影像感測裝置為一電子倍增CCD(Electron Multiplying CCD,EMCCD)。The image sensing device is an Electron Multiplying CCD (EMCCD).
本創作之動態拉曼散射光分析裝置可更包括一汞燈設置於物鏡之一側，此汞燈用以照射測試樣品。The dynamic Raman scattered light analysis device of the present invention may further comprise a mercury lamp disposed on one side of the objective lens for illuminating the test sample.
本創作之動態拉曼散射光分析裝置可更包括一螢光照相機設置於物鏡之一側，此螢光照相機用以擷取測試樣品之螢光影像。The dynamic Raman scattered light analysis device of the present invention further includes a fluorescent camera disposed on one side of the objective lens for capturing a fluorescent image of the test sample.
10、20‧‧‧動態拉曼散射光分析裝置10, 20‧‧‧ Dynamic Raman Scattering Light Analysis Device
101、201‧‧‧激發光源101, 201‧‧‧ excitation light source
1011‧‧‧激發光束1011‧‧‧Excitation beam
102、202‧‧‧光束擴束器102, 202‧‧‧beam beam expander
103、203‧‧‧反射鏡103, 203‧‧‧ mirror
104、204‧‧‧反射鏡104, 204‧‧‧ mirror
105、205‧‧‧帶通濾波器105, 205‧‧‧ bandpass filter
106、206‧‧‧反射鏡106, 206‧‧‧ mirror
107、207‧‧‧分光鏡107, 207‧‧‧ beamsplitter
108、208‧‧‧物鏡108, 208‧‧‧ objective lens
109、209‧‧‧置物平台109, 209‧‧ ‧ storage platform
110、210‧‧‧反射鏡110, 210‧‧‧ mirror
111、211‧‧‧帶拒濾波器111, 211‧‧‧Rejection filter
112、212‧‧‧耦合透鏡112, 212‧‧‧ coupling lens
113、213‧‧‧光譜分析儀113, 213‧‧‧spectral analyzer
1131、2131‧‧‧第一濾波器1131, 2131‧‧‧ first filter
11311、21311‧‧‧低通濾波器11311, 21311‧‧‧ low pass filter
11312、21312‧‧‧高通濾波器11312, 21112‧‧‧ high-pass filter
1132、2132‧‧‧反射鏡1132, 2132‧‧‧ mirror
1133、2133‧‧‧準直面鏡1133, 2133‧‧ ‧ collimating mirror
1134、2134‧‧‧稜鏡1134, 2134‧‧‧稜鏡
11341、21341‧‧‧光柵面11341, 21341‧‧ ‧ grating surface
11342、21342‧‧‧反射面11342, 21342‧‧‧reflecting surface
1135、2135‧‧‧聚焦面鏡1135, 2135‧‧ ‧ focus mirror
1136、2136‧‧‧反射鏡1136, 2136‧‧‧ mirror
1137、2137‧‧‧第二濾波器1137, 2137‧‧‧ second filter
11371、21371‧‧‧高通濾波器11371, 21371‧‧‧ high-pass filter
11372、21372‧‧‧低通濾波器11372, 21372‧‧‧ low pass filter
1138、2138‧‧‧影像感測裝置1138, 2138‧‧‧ image sensing device
114、214‧‧‧測試樣品114, 214‧‧‧ test samples
RSL‧‧‧拉曼散射光RSL‧‧‧ Raman scattered light
215‧‧‧汞燈215‧‧ ‧ mercury lamp
216、219‧‧‧可變波段濾波器216, 219‧‧ ‧variable band filter
217‧‧‧分光鏡217‧‧ ‧beam splitter
218‧‧‧螢光照相機218‧‧‧Fluorescent camera
220‧‧‧反射鏡220‧‧‧Mirror
2151‧‧‧白光2151‧‧‧White light
2152‧‧‧螢光2152‧‧‧Fluorescent
第1圖係本創作之動態拉曼散射光分析裝置之第一實施例之示意圖。Fig. 1 is a schematic view showing a first embodiment of the dynamic Raman scattered light analyzing device of the present invention.
第2圖係本創作之動態拉曼散射光分析裝置之第一實施例的激發光束光路示意圖。Fig. 2 is a schematic view showing the optical path of the excitation beam of the first embodiment of the dynamic Raman scattered light analyzing device of the present invention.
第3圖係本創作之動態拉曼散射光分析裝置之第一實施例的拉曼散射光譜量測示意圖。Fig. 3 is a schematic diagram showing the measurement of the Raman scattering spectrum of the first embodiment of the dynamic Raman scattered light analyzing device of the present invention.
第4圖係本創作之動態拉曼散射光分析裝置之第一實施例的拉曼散射光影像量測示意圖。Fig. 4 is a schematic diagram showing the measurement of the Raman scattered light image of the first embodiment of the dynamic Raman scattered light analyzing device of the present invention.
第5圖係本創作之動態拉曼散射光分析裝置之第二實施例的螢光影像量測示意圖。Fig. 5 is a schematic diagram of the fluorescence image measurement of the second embodiment of the dynamic Raman scattered light analyzing device of the present invention.
請參閱第1圖，第1圖係本創作之動態拉曼散射光分析裝置之第一實施例之示意圖。動態拉曼散射光分析裝置10包括一激發光源101、一光束擴束器102、一反射鏡103、一反射鏡104、一帶通濾波器(Bandpass Filter)105、一反射鏡106、一分光鏡(Beamsplitter)107、一物鏡108、一置物平台109、一反射鏡110、一帶拒濾波器(Notch Filter)111、一耦合透鏡112及一光譜分析儀(Spectrometer)113。光譜分析儀(Spectrometer)113包括一第一濾波器1131、一反射鏡1132、一準直面鏡1133、一稜鏡1134、一聚焦面鏡1135、一反射鏡1136、一第二濾波器1137及一影像感測裝置1138。第一濾波器1131包括一低通濾波器11311及一高通濾波器11312，第二濾波器1137包括一高通濾波器11371及一低通濾波器11372。稜鏡1134包括一光柵面11341及一反射面11342。當欲量測一測試樣品(未圖示)之拉曼散射光譜時，需調整稜鏡1134使光柵面11341面向入射的一拉曼散射光(未圖示)，當欲測量測試樣品(未圖示)之拉曼散射光影像時，需調整稜鏡1134使反射面11342面向入射的拉曼散射光(未圖示)。底下將更進一步詳細說明動態拉曼散射光 分析裝置10量測拉曼散射光譜與拉曼散射光影像之過程與其對應之光學路徑。Please refer to FIG. 1 , which is a schematic diagram of a first embodiment of the dynamic Raman scattered light analysis device of the present invention. The dynamic Raman scattered light analyzing device 10 includes an excitation light source 101, a beam expander 102, a mirror 103, a mirror 104, a bandpass filter 105, a mirror 106, and a beam splitter ( Beamsplitter 107, an objective lens 108, a storage platform 109, a mirror 110, a Notch Filter 111, a coupling lens 112, and a Spectrometer 113. The spectrum analyzer (Spectrometer) 113 includes a first filter 1131, a mirror 1132, a collimating mirror 1133, a 稜鏡 1134, a focusing mirror 1135, a mirror 1136, a second filter 1137, and a Image sensing device 1138. The first filter 1131 includes a low pass filter 11311 and a high pass filter 1112. The second filter 1137 includes a high pass filter 11371 and a low pass filter 11372. The crucible 1134 includes a grating surface 11341 and a reflective surface 11342. When measuring the Raman scattering spectrum of a test sample (not shown), it is necessary to adjust 稜鏡1134 so that the grating surface 11341 faces the incident Raman scattered light (not shown) when the test sample is to be measured (not shown) In the case of the Raman scattered light image shown in Fig. 7, it is necessary to adjust the 稜鏡 1134 so that the reflecting surface 11342 faces the incident Raman scattered light (not shown). Dynamic Raman scattered light will be further elaborated below. The analyzing device 10 measures the process of the Raman scattering spectrum and the Raman scattered light image and the optical path corresponding thereto.
請參閱第2圖，第2圖係本創作之動態拉曼散射光分析裝置之第一實施例的激發光束光路示意圖。當欲量測拉曼散射光譜時，先將一測試樣品114放置於置物平台109，啟動激發光源101，激發光源101發出一激發光束1011，激發光束1011先入射光束擴束器102使激發光束1011之一光束斑點(未圖示)變大，再由反射鏡103、104反射後改變行進方向射向帶通濾波器105，帶通濾波器105只允許激發光束1011通過，其它波長光束將被濾除無法通過，接著經由反射鏡106反射後改變行進方向射向分光鏡107，分光鏡107可使部份的激發光束1011通過及部份的激發光束1011反射，被分光鏡107反射的激發光束1011將改變行進方向射向物鏡108，最後由物鏡108將激發光束1011聚焦照射於測試樣品114。Please refer to FIG. 2, which is a schematic diagram of the excitation beam optical path of the first embodiment of the dynamic Raman scattered light analysis apparatus of the present invention. When the Raman scattering spectrum is to be measured, a test sample 114 is first placed on the storage platform 109, the excitation light source 101 is activated, and the excitation light source 101 emits an excitation beam 1011. The excitation beam 1011 is first incident on the beam expander 102 to make the excitation beam 1011. One of the beam spots (not shown) becomes larger, and is reflected by the mirrors 103, 104 to change the direction of travel to the band pass filter 105. The band pass filter 105 allows only the excitation beam 1011 to pass, and the other wavelength beams are filtered. After passing through the mirror 106, the direction of travel is changed to the beam splitter 107. The beam splitter 107 can pass part of the excitation beam 1011 and a portion of the excitation beam 1011, and the excitation beam 1011 reflected by the beam splitter 107. The changing direction of travel is directed toward the objective lens 108, and finally the excitation beam 1011 is focused by the objective lens 108 onto the test sample 114.
請參閱第3圖，第3圖係本創作之動態拉曼散射光分析裝置之第一實施例的拉曼散射光譜量測示意圖。如上述【0016】行所述，激發光束1011最後將由物鏡108聚焦照射於測試樣品114，測試樣品114因此將被激發光束1011激發出拉曼散射光RSL，此拉曼散射光RSL之前進方向與入射的激發光束1011相反，其將依序通過物鏡108、分光鏡107，經反射鏡110反射後改變行進方向射向帶拒濾波器111，帶拒濾波器111只允許入射的拉曼散射光RSL通過，入射的殘餘激發光束1011將被濾除，最後經由耦合透鏡112將拉曼散射光RSL導入光譜分析儀113，光譜分析儀113再量測出測試樣品114之拉曼散射光譜。拉曼散射光RSL射入光譜分析儀113時，依序通過第一濾波器1131中的低通濾波器11311、高通濾波器11312，以濾除不必要的雜光，再入射反射鏡1132改變行進方向入射準直面鏡1133，準直面鏡1133將拉曼散射光RSL變為準直的拉曼散射光RSL再入射稜鏡 1134，稜鏡1134已事先調整使其光柵面11341面向入射的拉曼散射光RSL，光柵面11341具有光柵功能，可將入射的拉曼散射光RSL分光後射向聚焦面鏡1135，聚焦面鏡1135將分光後的拉曼散射光RSL入射反射鏡1136改變行進方向後依序通過第二濾波器1137中的高通濾波器11371、低通濾波器11372，以濾除不必要的雜光，最後射入影像感測裝置1138以測得測試樣品114之拉曼散射光譜。Please refer to FIG. 3, which is a schematic diagram of the Raman scattering spectrum measurement of the first embodiment of the dynamic Raman scattered light analysis device of the present invention. As described in [0016] above, the excitation beam 1011 will finally be focused by the objective lens 108 on the test sample 114, and the test sample 114 will thus be excited by the excitation beam 1011 out of the Raman scattered light RSL, which is forward-oriented. The incident excitation beam 1011 is reversed, which will pass through the objective lens 108 and the beam splitter 107 in sequence, and is reflected by the mirror 110 to change the traveling direction to the band rejection filter 111. The band rejection filter 111 allows only the incident Raman scattered light RSL. By passing, the incident residual excitation beam 1011 will be filtered out, and finally the Raman scattered light RSL is introduced into the spectrum analyzer 113 via the coupling lens 112, and the spectrum analyzer 113 measures the Raman scattering spectrum of the test sample 114 again. When the Raman scattered light RSL is incident on the spectrum analyzer 113, it sequentially passes through the low pass filter 11311 and the high pass filter 11312 in the first filter 1131 to filter out unnecessary stray light, and then enters the mirror 1132 to change the traveling. The directionally incident collimating mirror 1133, the collimating mirror 1133 converts the Raman scattered light RSL into a collimated Raman scattered light RSL and re-incidents 1134, the 稜鏡1134 has been previously adjusted so that the grating surface 11341 faces the incident Raman scattered light RSL, and the grating surface 11341 has a grating function, and the incident Raman scattered light RSL can be split and then directed to the focusing mirror 1135, the focusing mirror 1135, the split Raman scattered light RSL incident mirror 1136 changes the direction of travel, and then sequentially passes through the high pass filter 11371 and the low pass filter 11372 in the second filter 1137 to filter out unnecessary stray light, and finally shoot Image sensing device 1138 is incorporated to measure the Raman scattering spectrum of test sample 114.
請參閱第4圖，第4圖係本創作之動態拉曼散射光分析裝置之第一實施例的拉曼散射光影像量測示意圖。當欲測量測試樣品114之拉曼散射光影像時，需先調整稜鏡1134使其反射面11342面向入射的拉曼散射光RSL，反射面11342只有反射功能無法分光，入射反射面11342的拉曼散射光RSL將被直接反射。測量測試樣品114之拉曼散射光影像之過程與其對應之光學路徑與【0016】、【0017】行所述近似，因此省略其說明。Please refer to FIG. 4, which is a schematic diagram of the Raman scattered light image measurement of the first embodiment of the dynamic Raman scattered light analysis device of the present invention. When the Raman scattered light image of the test sample 114 is to be measured, the 稜鏡1134 needs to be adjusted so that the reflective surface 11342 faces the incident Raman scattered light RSL, and the reflective surface 11342 can only be split by the reflection function, and the Raman incident incident surface 11342 The scattered light RSL will be reflected directly. The process of measuring the Raman scattered light image of the test sample 114 and its corresponding optical path are similar to those described in [0016] and [0017], and thus the description thereof will be omitted.
請參閱第5圖，第5圖係本創作之動態拉曼散射光分析裝置之第二實施例的螢光影像量測示意圖。動態拉曼散射光分析裝置20包括一激發光源201、一光束擴束器202、一反射鏡203、一反射鏡204、一帶通濾波器(Bandpass Filter)205、一反射鏡206、一分光鏡(Beamsplitter)207、一物鏡208、一置物平台209、一反射鏡210、一帶拒濾波器(Notch Filter)211、一耦合透鏡212、一光譜分析儀(Spectrometer)213、一汞燈215、一可變波段濾波器216、一分光鏡(Beamsplitter)217、一螢光照相機218、一可變波段濾波器219及一反射鏡220。光譜分析儀(Spectrometer)213包括一第一濾波器2131、一反射鏡2132、一準直面鏡2133、一稜鏡2134、一聚焦面鏡2135、一反射鏡2136、一第二濾波器2137及一影像感測裝置2138。第一濾波器2131包括一低通濾波器21311及一高通濾波器21312，第二濾波器2137包括一高通濾波器21371及一低通濾波器21372。稜鏡2134包括一光柵面21341及一反 射面21342。當欲測量一測試樣品214之拉曼散射光譜或拉曼散射光影像時，需將反射鏡220及分光鏡(Beamsplitter)217移動，使其不再位於拉曼散射光(未圖示)之光學路徑。測量測試樣品214之拉曼散射光譜及拉曼散射光影像之過程與其對應之光學路徑與【0016】、【0017】、【0018】行所述近似，因此省略其說明。底下將更進一步詳細說明動態拉曼散射光分析裝置20量測螢光影像之過程與其對應之光學路徑。Please refer to FIG. 5, which is a schematic diagram of the fluorescence image measurement of the second embodiment of the dynamic Raman scattered light analysis device of the present invention. The dynamic Raman scattered light analyzing device 20 includes an excitation light source 201, a beam expander 202, a mirror 203, a mirror 204, a band pass filter 205, a mirror 206, and a beam splitter ( Beamsplitter) 207, an objective lens 208, a storage platform 209, a mirror 210, a rejection filter (Notch Filter) 211, a coupling lens 212, a spectrum analyzer (Spectrometer) 213, a mercury lamp 215, a variable A band filter 216, a beam splitter (217), a fluorescent camera 218, a variable band filter 219, and a mirror 220. The spectrometer 213 includes a first filter 2131, a mirror 2132, a collimating mirror 2133, a 稜鏡 2134, a focusing mirror 2135, a mirror 2136, a second filter 2137, and a Image sensing device 2138. The first filter 2131 includes a low pass filter 21311 and a high pass filter 21312. The second filter 2137 includes a high pass filter 21371 and a low pass filter 21372.稜鏡 2134 includes a grating surface 21341 and an inverse The surface 21342. When a Raman scattering spectrum or a Raman scattered light image of a test sample 214 is to be measured, the mirror 220 and the Beamsplitter 217 are moved so that they are no longer located in the Raman scattered light (not shown). path. The process of measuring the Raman scattering spectrum and the Raman scattered light image of the test sample 214 and its corresponding optical path are similar to those described in [0016], [0017], [0018], and thus the description thereof is omitted. The process of measuring the fluorescent image by the dynamic Raman scattered light analyzing device 20 and its corresponding optical path will be further described in detail below.
如第五圖所示，將測試樣品214放置於置物平台209，汞燈215發出一束白光2151，白光2151通過可變波段濾波器216後只允許部份波段光束通過，再經分光鏡217部份反射後改變行進方向，最後經物鏡208聚焦入射測試樣品214。測試樣品214將被激發出一螢光2152，螢光2152再依序入射物鏡208、分光鏡217，經反射鏡220反射後改變行進方向入射可變波段濾波器219，最後入射螢光照相機218以擷取測試樣品214之螢光影像。As shown in the fifth figure, the test sample 214 is placed on the storage platform 209, the mercury lamp 215 emits a white light 2151, and the white light 2151 passes through the variable band filter 216, and only a part of the band beam is allowed to pass, and then the beam splitter 217 is passed. After the reflection, the direction of travel is changed, and finally the incident test sample 214 is focused by the objective lens 208. The test sample 214 will be excited by a fluorescent light 2152. The fluorescent light 2152 is sequentially incident on the objective lens 208 and the beam splitter 217. After being reflected by the mirror 220, the traveling direction is changed to enter the variable band filter 219, and finally the fluorescent camera 218 is incident. A fluorescent image of test sample 214 is taken.
上述實施例中的激發光源可為連續波雷射發出連續波雷射光，低通濾波器可為可變波段低通濾波器，高通濾波器可為可變波段高通濾波器，光束擴束器可為可變倍率光束擴束器，物鏡可為可變倍率物鏡，影像感測裝置可為電子倍增CCD(Electron Multiplying CCD,EMCCD)。The excitation light source in the above embodiment may emit continuous wave laser light for continuous wave laser, the low pass filter may be a variable band low pass filter, the high pass filter may be a variable band high pass filter, and the beam expander may be For the variable magnification beam expander, the objective lens can be a variable magnification objective lens, and the image sensing device can be an Electron Multiplying CCD (EMCCD).
雖然本創作已以較佳實施例揭露如上，然其並非用以限定本創作，任何於其所屬技術領域中具有通常知識者，在不脫離本創作之精神和範圍內，仍可作些許的更動與潤飾，因此本創作之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the present invention, and any person having ordinary knowledge in the technical field can make some changes without departing from the spirit and scope of the present invention. And the retouching, therefore, the scope of protection of this creation is subject to the definition of the scope of the patent application attached.
10‧‧‧動態拉曼散射光分析裝置10‧‧‧Dynamic Raman Scattering Light Analysis Device
101‧‧‧激發光源101‧‧‧Excitation source
102‧‧‧光束擴束器102‧‧‧beam beam expander
103‧‧‧反射鏡103‧‧‧Mirror
104‧‧‧反射鏡104‧‧‧Mirror
105‧‧‧帶通濾波器105‧‧‧Bandpass filter
106‧‧‧反射鏡106‧‧‧Mirror
107‧‧‧分光鏡107‧‧‧beam splitter
108‧‧‧物鏡108‧‧‧ Objective lens
109‧‧‧置物平台109‧‧‧Store platform
110‧‧‧反射鏡110‧‧‧Mirror
111‧‧‧帶拒濾波器111‧‧‧Rejection filter
112‧‧‧耦合透鏡112‧‧‧Coupling lens
113‧‧‧光譜分析儀113‧‧‧Spectrum Analyzer
1131‧‧‧第一濾波器1131‧‧‧First filter
11311‧‧‧低通濾波器11311‧‧‧ low pass filter
11312‧‧‧高通濾波器11312‧‧‧High-pass filter
1132‧‧‧反射鏡1132‧‧‧Mirror
1133‧‧‧準直面鏡1133‧‧‧ collimating mirror
1134‧‧‧稜鏡1134‧‧‧稜鏡
11341‧‧‧光柵面11341‧‧‧Grating surface
11342‧‧‧反射面11342‧‧‧reflecting surface
1135‧‧‧聚焦面鏡1135‧‧‧Focus mirror
1136‧‧‧反射鏡1136‧‧‧Mirror
1137‧‧‧第二濾波器1137‧‧‧second filter
11371‧‧‧高通濾波器11371‧‧‧High-pass filter
11372‧‧‧低通濾波器11372‧‧‧Low-pass filter
1138‧‧‧影像感測裝置1138‧‧‧Image sensing device
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