M3 3 7741 八、新型說明： 【新型所屬之技術領域】 摘作·卽-辦接觸式探針卡㈣裝置，直接讀取探M3 3 7741 VIII. New description: [New technical field] Abstract: 卽-contact probe card (4) device, direct reading
針卡架上複數娜針卡抽屜_的探針卡無線㈣身份 ⑽Tm 〇 J 【先前技術】 近年來，搭财半導體繼電路妓（崎_:半導體裝置) 之電子機器之小型化及低價格化等之進展非常迅速;隨之，對於半 導體之小型化及低價格化之要求亦日益趨強。 通系’半$贱置乃將半導體晶片（chip)與引線框架 frame)以焊接導線(bonding wire)，在電氣加以連接後，半導體 晶片及引線框架靖絲陶絲加以封止等狀縣供給，而被裝 配在印刷基恆。在半導黯業的製造糾tJi，主要可分成ic設計、 晶圓製程、晶圓職及晶圓封細大步驟。其中所謂的晶圓測試 v驟就疋對日日圓上的母顆晶粒進行電性特性檢測，以檢測和淘 汰晶圓上的不合格晶粒。進行晶圓職時，利用晶圓探針卡的探 針刺入晶粒上的接點塾(pad)而構成電性接觸，再將經由探針所測 得的測試訊魏往自_試設備(ATE)做分析與順，藉此可取得 曰曰圓上的母顆晶粒的電性特性測試結果。隨著半導體製程技術的 進步，半導體元件的尺寸愈來愈小，積體電路愈來愈精密，半導 體凡件從次微米（Sub-M i cr 〇)進入深次微米（Deepsub-M i cro)的領 M337741 二電路運作時的準確性及效率必需提高之外，晶圓、 新材料開鱗，所不可雜之重要技術。 汁及 之骑卡麵，聰針切輯之複_針卡搬到 ，令各以魏上細送_(1Qader/unlQa_， 2子元件__如㈣，進行_後，職完了利 用機贈將複數1C自猶機㈤er/uni她侧⑽ 測4結果將1C分類成良品或不良品。 以 在探針卡的管理方面，目前常用的探針卡管理辨識方式有 下幾種’但這些做法都有—些使用上的限制。 1·在探針卡儲存盒上貼條碼 寬度不等❹個黑條和“，按照_定的編碼規則排列，用 以表達-姆息_形標鑛。常見的條碼是岐料相差很大 的黑條（簡稱條）和白條（簡稱空）排成的平行線圖案。條媽可 以標出物品的生產國、製造廠家、商品名稱、生產日期、圖書分 類號、郵件起止地點、類別、日期等信息 條碼的優越性在於條碼的讀取準確率遠遠超過人工記錄，平 均每15GGG個字it才會出現-個錯誤。條碼的讀取速度很快，相 M337741 田於母心40個子元。與其它自動化識別技術相比較，條碼技術僅 僅需要-小張貼紙和相對構造簡單的光學掃描儀，成本相當低廉。 但是條碼容錢損，造成資料讀取資料不易。條碼所需佔居 的空間過大，對於探針卡儲存盒管理，是不易整合大量條碼。 2.在祕卡上焊接電阻。再细電腦讀取阻值，做為探針卡的辨 i 認 利用電_阻值來做為探針卡的觸。電_優越性在於電 阻讀輯歧快。電阻所需佔居的㈣不大，騎佈滿電路的探 針卡而5，是易整合電阻於探針卡上。 但是電阻的阻值會有誤差且隨使科間日久和溫度的改變， 電阻的阻值會產生變化。另外資料無法寫人電_，需資 配合使用 ' 由此可見，傳統以貼條碼或電阻作為辨識的方法已 頸；本案發日狀為了解決上述制方式所衍生的各·題，乃^ :後，終於開 思加以嘗試突雜統，麵乡次苦思與實驗研级證； ° 發以射頻識別（RFID)為主體的探針卡儲存管理裝置 7 M33 7741 f新型内容j 一本創作料改善傳贿針㈣管理，目需要不同的探針卡測 試不同的ic晶片，探針卡的管理對於晶片測試而言是不易整 合0 使用的問題 、本劍作係為改善傳統探針卡的管理，其利用電阻作為辨識的 方法，電__會有縣，且隨朗_日久和溫度的改變， 電阻的阻值會產生變化和·無法寫人電_，需資料庫的配合 本創作主要目的在提供—種不易磨損，使用時間日久不 生資料讀取誤差，並可以儲存資料的裝置 有鑑於前述習知的探針卡的管理上的不便之處， 提出一種非接觸式探針卡管理裝置，直接萨 乍口此 探針卡抽__探針卡無祕頻身份識卿⑽^ 用之接觸式識別系統之缺點加以改良，採用射賴 白 傳送數碼資料’因此翻卡不必_卡.〜4方式 斗π祕射 C 5)接觸就能讀寫數碼資 2求這種非接賦之射射職料_卡機(5)之啦方向4 M337741 本創作利用非接觸式感測器讀取在探針卡抽屜的狀態，而做 出辨識並使用讀卡機讀取射頻識別標戴（3) (RFID)内的資料。 本創作具有觸控螢幕的電腦。供做查詢及其他與探針卡管理 有關之工作。觸控電腦與内部的探針卡抽屜的射頻識別標籤(RFID) 的探針卡以通用串列匯流排介面（USB)或序列埠介面（RS232)的方 式相連接，用以存取探針卡的相關資料。資料的讀取可電腦主動 讀取，也可以由感測器控制系統通知電腦讀取。電腦主機與網路 相連接，可直接用瀏覽器查詢或將資料上傳至資料庫。 本創作利用無線網路通信技術(WiFi)將資料直接傳輸到伺服 器，探針卡架無需搭配電腦控制只需有電源即可使用，移動容易， 便於安裝。 本創作主要採用如下所詳述之特徵以為了要解決上述之問 題，而創作出-種非接觸式探針卡管理裝置，其特徵包括有：複 數個探針卡抽屜，-或-個以上的探針卡架，_個天線，—或 一個以上的讀卡機，複數個非接觸式感測养 〜—或一個以上的感 測器控制系統’-或-個以上的收發器，以解決探針卡不易管理 的問題。 【實施方式】 9 M337741 為使能對摘作之目的，雜構造裝置概及功效作更進一 步的認識與瞭解，茲舉實施例配合圖示，詳細說明如下： 參閱本創麵第2 ®的非細式探針卡管理裝置實施例，本 實施例為探針卡架(21a、抓)放置複數個探針卡抽屜幽、级、 22c".22n)。該複數個探針卡抽屜似、既、n)用於儲存設 有射頻識別標籤(RFID)(24)的探針卡(23)。 參閱第3圖所示本非接觸式探針卡管理裝置創作一實施例之 放大示意圖，對應各個放至於探針卡抽屜(22、22a、22b、22c...22n) 内具有射頻識別標籤(RFIDX24)的探針卡(23)設有複數個天線，其 用於讀取設有射頻識別標籤(RFID)(24)的探針卡(23)資料。該天線 連接至一或一個以上的讀卡機，該讀卡機利用天線讀取設有射頻 識別標籤(RFID)(24)的探針卡(23)資料。對應各個放至於探針卡抽 履(22、22a、22b、22c".22n)設有複數個非接觸式感測器，其用於 讀取探針卡抽屜(22、22a、22b、22c."22n)的狀態資料。該非接觸 式感測斋連接至一或一個以上的感測器控制系統，該感測器控制 系統利用非接觸式感測器讀取探針卡抽屜(22、22a、22b、22c...22n) 的狀態資料。 參閱第4圖所示本創作一實施例之放大示意圖其係一種「非 接觸式探針卡管理裝置」，其特徵包括有：複數個探針卡抽屜，一 10 M337741 或-個以上的探針卡架，複數個天線，—或—個以上的讀卡機， 複數個非接觸式感測器，-或一個以上的感測器控制系統，一或 -個以上的收發ϋ，以解決探針卡不易f理的問題。 該讀卡機讀取天線所讀取到的射頻識別標藏肿即㈣的探 針卡(23)資料傳遞到該收發ϋ内。此外該感測器控制系統將讀取到 •的非接觸式感·的資料傳遞到該收發器。收發器與感測器控制 售 系統和讀卡機連接，並將感測器控制系統和讀卡機所讀取到的資 料傳輸到外部系統。 參閱本創作的第4圖的一實施例，每16個探針卡抽屜由一個 夕天線的頃卡機讀取探針卡(23)上射頻識別標籤的資 料。每個探針卡抽屜都有一個非接觸式感測器偵測探針卡抽屜是 否有開關的動作，並用以做為資料存取的依據。資料的讀取可由 * 電腦主動讀取或者可以由感測器控制系統通知電腦自動讀取探針 .卡(23)上射頻識別標籤(处1；〇)(24)的資料。 參閱第5圖所示本創作又一實施例，讀卡機(42a、42b)和天線 (31a、31b ··· 31η)之間設有天線開關(4la、41b)，而感測器控制系 統(34a、34b)讀取非接觸式感測器(32a、32b…32η)的資料，藉由 天線開關(41a、41b)控制讀卡機(42a、42b)讀取天線(31a、31b ··, 31η) 所接收到該探針卡架上探針卡抽屜(22a、22b、22c…22η)***頻 11 M337741 識別標籤(RFID)的探針卡的資料經由收發器(35)到外部系統(36)。 每個探針卡抽屜(22a、22b、22c ··· 22η)由一個天線(31a、31b ··· 31η)負責項取資料。每個探針卡抽屜(22a、22b、22c…22η)都有一 個非接觸式感測器(32a、32b…32η)偵測探針卡抽屜(22a、22b、 22c ...2211)是否有開關的動作，並用以做為資料存取的依據。當非 ‘ 接觸式感測器(32a、32b…32η)偵測到探針卡抽屜(22a、22b、22c ... 售 22n)有開關動作時，由電腦(36)經由收發器控制天線開關(41a、 41b)，切換天線(31a、31b…31η)與讀卡機(42a、42b)的連接，再 控制讀卡機(42a、42b)讀取資料。資料的讀取可外部系統(36)的電 腦主動讀取，也可以由感測器控制系統(34a、34b)通知外部系統(36) 的電腦讀取。 參閱第6圖所示本創作另一實施例，該讀卡機(42a、42b)和該 ⑩ 天線(31a、31b…31η)之間設有天線開關(41a、41b)，由該感測器 • 控制系統(34a、34b)讀取該非接觸式感測器(32a、32b…32η)的資 • 料和控制天線開關(41a、41b)的資料，並且藉由天線開關(41a、41b) 控制該讀卡機(42a、42b)讀取天線(31a、31b…31η)所接收到該探 針卡架上探針卡抽屜(22a、22b、22c…22η)***頻識別標籤(RFID) 的探針卡的資料經由收發器(35)到外部系統(36)。 每個探針卡抽屜(22a、22b、22c…22η)由一個天線(31a、31b ... 12 M337741 31η)負責讀取資料。每個探針卡抽屜(22a、22b、22c…22η)都有一 個非接觸式感測器(32a、32b…32η)偵測探針卡抽屜(22a、22b、 22c…22η)疋否有開關的動作，並用以做為資料存取的依據。當非 接觸式感測器(22a、22b、22c…22η)偵測到探針卡抽屜(22a、22b、 22c…22η)有開關動作時，由感測器控制系統(34a、34b)控制天線 開關(41a、41b),切換天線(3ia、31b…3In)與讀卡機(42a、42b) 、的連接，再控制讀卡機(42a、42b)讀取資料。資料的讀取可感測器 售 控制系統(34a、34b)主動讀取，也可以由感測器控制系統(3½、Mb) 通知電腦讀取。 本創作再-實_，讀卡機和天線之間設有天_關和顯示 权組’由喊測II控制織讀取非接觸式感·的資料和控制天 線開關和顯示模組，並且藉由天線_控制讀卡機讀取天線所接 收到該探針卡架上探針卡抽屜***頻識別標獻腿D)的探針卡的 • 資料經由收發器到外部系統。 參Μ 7 _示，探針卡架的正面，魄—倾有觸控勞幕 的電腦(51a、51b)。供做查詢讀卡機(似、银）、感測器控制系統 (34a、34b)、天線_(化、41b)的資料及其他與探針卡管理有關 之工作。觸控電腦⑽、5_内部的探針卡抽屜的射頻識別標鐵 (RFID)的探針卡以通用串列匯流排介面⑽b)或序列璋介面 (RS232)的方式相連接，用.以存取探針卡的相關資料。資料的讀取 13 M337741 可電腦主動讀取，也可以由感測器控制系統通知電腦讀取。電腦 主機與網路相連接，可直接用㈣器查詢或將資料上傳至資料 庫。觸控瑩幕電腦上主動並及時更新探針卡抽屜内的探針卡資 訊，每個探針卡抽屜可以設定放只特定探針卡，並在放置錯誤時， 主動顯示。在搜尋探針卡時，可以使用模糊字串搜尋，減少搜尋 的複雜度。在搜尋到特定的探針卡時，可以讓前端的發光二極體 、 （LED)點亮，便於找到特定的探針卡位置。 售 此外非接觸式探針卡管理裝置可設有多個讀卡機以加速讀取 速度，參閱第8圖所示，一天線(3la、31b…31η)對應一讀卡機 (42a、42b…42η)，一個讀卡機(42a、42b…42η)只負責讀取一天 線(31a、31b…31η)，以加速讀取的速度。當系統需要確認探針卡 架(21)上的所有探針卡抽屜(22a、22b、22c…22η)的射頻識別標鐵 (RFID)日$，瀆卡機只負責讀取負責的天線，並將其資料經由收發 器(35)傳遞到外部系統(36)。 • 當速度不是非接觸式探針卡管理裝置考慮的重點時，一讀卡 機(42a、42b)可對應多組天線(31a、31b…31η)，利用循環讀取的 • 方式讀取各個天線資料，並將其資料經由收發器(35)傳遞到外部系 統(36)。參閱第9圖所示，一讀卡機(42a)可對應多組天線(31a、 31b…31η)，一個讀卡機(42a)負責讀取多組天線(31a、31b… 31η)。當系統需要確認探針卡架(21)上的所有探針卡抽展(22a、 22b、22c…22η)的射頻識別標籤(rfid)時，讀卡機利用天線開關 (41a)循環讀取的方式續取各個天線資料’並將其資料經由收發器 14 M337741 傳遞到外部系統。 參閱第10圖所示，當系統需要確認探針卡架(21)上的所有探 針卡抽屜(22a、22b、22c…22η)的射頻識別標籤(RFID)(24)時，每 個探針卡抽屜(22a、22b、22c…22η)都有一個非接觸式感測器(32) 偵測探針卡抽屜(22a、22b、22c…22η)是否有開關的動作，並用 以做為資料存取的依據，此外所有探針卡抽屜(22a、22b、22c… 上設有天線(31)做為讀取射頻識別標籤(RFID)(24)的資料。探針卡 架(21)上另設有發光二極體（61)做為顯示個偵測探针卡抽屜 (22a、22b、22c …22η)的狀態。 參閱第11圖所示，上述連接到收發器(35)的所有資料可以利 用無線網路系統(62)來傳送資料。利用無線網路通信技術(wiFi) 將資料直接傳輸_服器，探針卡架(21)無需搭配電腦控制只需有 電源即可使用，移動容易，便於安裝。 ，本創作之技_容及技術_已揭示如上，細熟悉本項技 办之人士仍可％基於補作之教不及揭㈣作讎外離本創作 精神之替換及修飾。g此，本I彳作之保護範園應不限於實施例所 揭示者’喊色括各種不背離本創作之替換及修飾，並為以下之 申請專利範園所涵蓋。 【圖式簡單說明】 請參閱以下有關本實用新型—較佳實施例的詳細說明 及其附圖，將可進—步瞭解本實用新型的技術内容及其目 15 M337741 的功放’有關該實施例的附圖為： 第1圖為傳統探針卡管理裝置的示意圖； 第2圖為非接觸式探針卡管理裝置的探針卡架示意圖； 第3 0為非接觸式探針卡管理裝置的實施例示意圖（1); 第4圖為非接觸式探針卡管理裝置的實施例示意圖（2); 弟5圖為非接觸式探針卡管理裝置的實施例示意圖（3); ‘ 第6圖為非接觸式探針卡管理裝置的實施例示意圖（4); -· 第7圖為非接觸式探針卡管理裝置的實施例示意圖（5); 第8圖為非接觸式探針卡管理裝置的實施例示意圖（6); k 第9圖為非接觸式探針卡管理裝置的實施例示意圖（7); 第10圖為非接觸式探針卡管理裝置的設有發光二極體探針 卡架示意圖；以及 第11圖為非接觸式探針卡管理I置的實施例示意圖（8)。On the needle card holder, the number of the needle card drawers _ the probe card wireless (four) identity (10) Tm 〇 J [prior art] In recent years, the miniaturization and low price of the electronic device of the circuit semiconductor circuit (saki _: semiconductor device) The progress of the chemical industry is very rapid; accordingly, the requirements for miniaturization and low price of semiconductors are becoming stronger. The "semi-$" device is a semiconductor chip and a lead frame, which are electrically connected, and then the semiconductor wafer and the lead frame are sealed and sealed. And it is assembled on the printing base. In the manufacturing process of semi-conducting industry, it can be divided into ic design, wafer process, wafer job and wafer sealing step. The so-called wafer test v is used to detect the electrical characteristics of the parent crystal grains on the Japanese yen to detect and eliminate the defective crystal grains on the wafer. During the wafer job, the probe of the wafer probe card is used to pierce the contact pad on the die to form an electrical contact, and then the test signal measured by the probe is sent to the test device. (ATE) performs analysis and smoothing, thereby obtaining the electrical property test results of the parent crystal grains on the round circle. With the advancement of semiconductor process technology, the size of semiconductor components is getting smaller and smaller, and the integrated circuits are becoming more and more precise. The semiconductor components enter the submicron (Sub-M i cr 〇) into deep sub-M cro The accuracy and efficiency of the collar M337741 two circuits must be improved, and wafers, new materials, and scaled materials are important technologies that cannot be mixed. The juice and the riding card face, the Cong pin cutting series of the complex _ pin card moved to the order, each sent to Wei _ (1Qader / unlQa_, 2 sub-component __ such as (four), after _, after the job is finished using the machine gift The plural 1C self-semi-computer (five) er/uni her side (10) test 4 results 1C into good or bad products. In the management of the probe card, the current commonly used probe card management identification methods have the following 'but these practices are There are some restrictions on the use. 1. The barcode width on the probe card storage box is not equal to a black bar and ", according to the coding rules of _, used to express - _ _ standard mine. Common The bar code is a parallel line pattern of black bars (abbreviated as bars) and white bars (referred to as empty) which are very different from each other. The mother can mark the country of manufacture, manufacturer, product name, date of manufacture, book classification number, The superiority of the information bar code for the start and end of the mail, category, date, etc. is that the reading accuracy of the bar code far exceeds the manual record, and the average of every 15GGG words will appear - an error. The bar code reading speed is very fast, phase M337741 40 mothers in the mother's heart. And other automated identification technologies In comparison, the bar code technology only needs - small sheet stickers and relatively simple optical scanners, and the cost is quite low. However, the barcodes are difficult to read and the data is difficult to read. The barcode needs to occupy too much space for the probe card storage. Box management, it is not easy to integrate a large number of bar codes. 2. Solder the resistor on the secret card. Then read the resistance value on the computer, and use it as the probe card to identify the power of the probe card. _ superiority is that the resistance reading is fast. The resistor needs to occupy (4) is not big, riding the probe card full of circuit and 5, is easy to integrate the resistor on the probe card. But the resistance of the resistor will have errors and As the time difference between the subjects and the temperature changes, the resistance of the resistor will change. In addition, the data cannot be written to the human power _, and it needs to be used together. It can be seen that the traditional method of using bar code or resistor as the identification method has been used; In order to solve the problems arising from the above-mentioned system, it is ^: After that, finally, I will try to make a fuss, and I will use the radio frequency identification (RFID) for The probe card storage management device of the main body 7 M33 7741 f new content j a creative material to improve the bribery needle (four) management, the need for different probe cards to test different ic chips, probe card management is not easy to integrate for wafer testing 0 use, this sword In order to improve the management of traditional probe cards, the use of resistance as a method of identification, electricity _ _ there will be counties, and with the change of temperature and temperature, the resistance of the resistance will change and · can not write human _, need to cooperate with the database The main purpose of this creation is to provide a device that is not easy to wear, has a long time to use data reading error, and can store data in view of the inconvenience of the aforementioned conventional probe card management. At the same time, a non-contact probe card management device is proposed, which directly improves the shortcomings of the contact card recognition system by using the probe card __probe card without the secret frequency identification (10) Transfer digital data 'so flip card does not have _ card. ~ 4 way bucket π secret shot C 5) contact can read and write digital resources 2 seeking this non-received shot material _ card machine (5) direction 4 M337741 This creation uses a non-contact sensor to read Take the status of the probe card drawer and identify it and use the card reader to read the data in the radio frequency identification (3) (RFID). This creation has a computer with a touch screen. For queries and other work related to probe card management. The RFID card of the touch computer and the internal probe card drawer is connected by a universal serial bus interface (USB) or serial port interface (RS232) for accessing the probe card. Relevant information. The reading of the data can be read by the computer or notified to the computer by the sensor control system. The host computer is connected to the network and can be directly queried by the browser or uploaded to the database. This creation uses wireless network communication technology (WiFi) to transmit data directly to the server. The probe card holder can be used without a power supply, and it is easy to move and easy to install. The present invention mainly adopts the features detailed as follows to create a non-contact probe card management device, which includes: a plurality of probe card drawers, - or more than one Probe card holder, _ antenna, or more than one card reader, multiple non-contact sensing systems ~ or more than one sensor control system '- or more than one transceiver to solve The needle card is not easy to manage. [Embodiment] 9 M337741 In order to enable the understanding and understanding of the purpose and characteristics of the hybrid structure, the following examples are combined with the diagram, and the details are as follows: Refer to the 2nd of this wound. The embodiment of the thin probe card management device, in this embodiment, a plurality of probe card drawers, stages, 22c ". 22n) are placed for the probe card holder (21a, grasping). The plurality of probe card drawers, i.e., n) are used to store a probe card (23) provided with a radio frequency identification tag (RFID) (24). Referring to FIG. 3, an enlarged schematic view of an embodiment of the non-contact probe card management device is provided, and each of the probe card drawers (22, 22a, 22b, 22c, ... 22n) has a radio frequency identification tag ( The probe card (23) of the RFIDX 24) is provided with a plurality of antennas for reading probe card (23) data provided with a radio frequency identification tag (RFID) (24). The antenna is coupled to one or more card readers that utilize an antenna to read probe card (23) data with a radio frequency identification tag (RFID) (24). Corresponding to each of the probe card pulls (22, 22a, 22b, 22c ". 22n) are provided with a plurality of non-contact sensors for reading the probe card drawers (22, 22a, 22b, 22c. "22n) status data. The non-contact sensing is connected to one or more sensor control systems that read the probe card drawer (22, 22a, 22b, 22c...22n using a non-contact sensor) Status data. Referring to FIG. 4, an enlarged schematic view of an embodiment of the present invention is a "non-contact probe card management device", which comprises: a plurality of probe card drawers, a 10 M337741 or more probes. Card holder, multiple antennas, or more than one card reader, multiple non-contact sensors, or more than one sensor control system, one or more transceivers to resolve the probe The card is not easy to deal with. The card reader reads the radio frequency identification mark read by the antenna, that is, the probe card (23) of the (4) data is transmitted to the transceiver. In addition, the sensor control system transmits the data of the non-contact sense read to the transceiver. The transceiver is connected to the sensor control system and the card reader, and the information read by the sensor control system and the card reader is transferred to the external system. Referring to an embodiment of Fig. 4 of the present creation, each of the 16 probe card drawers reads the information of the RFID tag on the probe card (23) by a card reader of an antenna. Each probe card drawer has a non-contact sensor that detects whether the probe card drawer has a switch action and is used as a basis for data access. The reading of the data can be actively read by the computer or the computer can automatically notify the computer to read the data of the RFID tag (1; 〇) (24) on the card (23). Referring to still another embodiment of the present invention shown in FIG. 5, an antenna switch (4la, 41b) is provided between the card reader (42a, 42b) and the antenna (31a, 31b, ..., 31n), and the sensor control system (34a, 34b) reading the data of the non-contact sensor (32a, 32b, ... 32n), and controlling the card reader (42a, 42b) to read the antenna (31a, 31b) by the antenna switch (41a, 41b) , 31η) receiving the data of the probe card of the radio frequency 11 M337741 identification tag (RFID) in the probe card drawer (22a, 22b, 22c...22n) on the probe card holder via the transceiver (35) to the external system ( 36). Each of the probe card drawers (22a, 22b, 22c, ..., 22n) is responsible for taking data by an antenna (31a, 31b, ..., 31n). Each probe card drawer (22a, 22b, 22c ... 22n) has a non-contact sensor (32a, 32b ... 32n) to detect whether the probe card drawer (22a, 22b, 22c ... 2211) has The action of the switch and used as the basis for data access. When the non-contact sensor (32a, 32b...32n) detects that the probe card drawer (22a, 22b, 22c ... 22n) has a switching action, the computer (36) controls the antenna switch via the transceiver. (41a, 41b), switching the antenna (31a, 31b, ... 31n) to the card reader (42a, 42b), and then controlling the card reader (42a, 42b) to read the data. The reading of the data can be actively read by the computer of the external system (36), or can be notified to the computer of the external system (36) by the sensor control system (34a, 34b). Referring to another embodiment of the present invention shown in Fig. 6, an antenna switch (41a, 41b) is provided between the card reader (42a, 42b) and the 10 antennas (31a, 31b, ... 31n) by the sensor. • The control system (34a, 34b) reads the information of the non-contact sensors (32a, 32b...32n) and controls the data of the antenna switches (41a, 41b) and is controlled by the antenna switches (41a, 41b) The card reader (42a, 42b) reads the radio frequency identification tag (RFID) of the probe card drawer (22a, 22b, 22c ... 22n) received by the antenna (31a, 31b ... 31n) on the probe card holder. The data of the card is passed through the transceiver (35) to the external system (36). Each probe card drawer (22a, 22b, 22c...22n) is responsible for reading data by an antenna (31a, 31b ... 12 M337741 31n). Each probe card drawer (22a, 22b, 22c...22n) has a non-contact sensor (32a, 32b...32n) to detect the probe card drawer (22a, 22b, 22c...22n). The action is used as the basis for data access. When the non-contact sensor (22a, 22b, 22c...22n) detects that the probe card drawer (22a, 22b, 22c...22n) has a switching action, the antenna is controlled by the sensor control system (34a, 34b) The switches (41a, 41b) switch the connection between the antennas (3ia, 31b, ... 3In) and the card readers (42a, 42b), and then control the card readers (42a, 42b) to read the data. The reading of the data can be read by the sensor control system (34a, 34b), or can be notified to the computer by the sensor control system (31⁄2, Mb). This creation re-real_, between the card reader and the antenna, there is a day_off and display right group 'reading the non-contact feeling data by the spoofing II control and controlling the antenna switch and display module, and borrowing The data of the probe card received by the antenna_control reader to the probe receiving the radio frequency identification leg D) in the probe card drawer of the probe card holder is transmitted to the external system via the transceiver. Μ 7 _, the front of the probe card holder, 魄 - computer with a touch screen (51a, 51b). For the inquiry card reader (like, silver), sensor control system (34a, 34b), antenna _ (chemical, 41b) data and other work related to probe card management. The probe card of the radio frequency identification (RFID) of the probe card drawer of the touch computer (10), 5_ is connected by the universal serial bus interface (10) b) or the serial interface (RS232). Take the relevant information of the probe card. Reading data 13 M337741 can be read by the computer or notified to the computer by the sensor control system. The computer host is connected to the network, and can directly query (4) or upload the data to the database. The touch screen computer actively and timely updates the probe card information in the probe card drawer. Each probe card drawer can be set to put only a specific probe card and display it actively when placed incorrectly. When searching for probe cards, you can use fuzzy string search to reduce the complexity of the search. When a specific probe card is found, the front LEDs (LEDs) can be illuminated to facilitate finding a specific probe card position. The non-contact probe card management device can be provided with a plurality of card readers to accelerate the reading speed. As shown in Fig. 8, an antenna (3la, 31b...31n) corresponds to a card reader (42a, 42b... 42η), a card reader (42a, 42b...42n) is only responsible for reading an antenna (31a, 31b...31n) to speed up the reading. When the system needs to confirm the radio frequency identification (RFID) date of all the probe card drawers (22a, 22b, 22c...22n) on the probe card holder (21), the Leica machine is only responsible for reading the responsible antenna, and The data is passed to the external system (36) via the transceiver (35). • When speed is not the focus of the contactless probe card management device, a card reader (42a, 42b) can correspond to multiple sets of antennas (31a, 31b...31n), and each antenna is read by means of cyclic reading. The data is passed to the external system (36) via the transceiver (35). Referring to Fig. 9, a card reader (42a) can correspond to a plurality of antennas (31a, 31b, ... 31n), and a card reader (42a) is responsible for reading a plurality of antennas (31a, 31b, ... 31n). When the system needs to confirm the radio frequency identification (rfid) of all the probe cards (22a, 22b, 22c...22n) on the probe card holder (21), the card reader uses the antenna switch (41a) to cyclically read The method continues with the individual antenna data' and passes its data to the external system via the transceiver 14 M337741. Referring to Figure 10, each probe is required when the system needs to identify the radio frequency identification tag (RFID) (24) of all probe card drawers (22a, 22b, 22c...22n) on the probe card holder (21). The card drawers (22a, 22b, 22c...22n) have a non-contact sensor (32) for detecting whether the probe card drawers (22a, 22b, 22c...22n) have a switch action and are used as data storage. According to the basis, in addition, all the probe card drawers (22a, 22b, 22c... are provided with an antenna (31) as a material for reading a radio frequency identification (RFID) tag (24). The probe card holder (21) is separately provided. The light-emitting diode (61) is in a state of displaying a detection probe card drawer (22a, 22b, 22c, ... 22n). As shown in Fig. 11, all the data connected to the transceiver (35) can be utilized. The wireless network system (62) transmits data. The wireless network communication technology (wiFi) is used to directly transmit data to the server. The probe card holder (21) can be used without a power supply, and is easy to move. Easy to install. The skill of this creation _ _ and technology _ has been revealed above, those who are familiar with this technical office can still be based on the teachings of the supplement (4) The replacement and modification of the spirit of this creation is not limited to those disclosed in the examples. The screaming color includes all kinds of substitutions and modifications that do not deviate from the creation, and the following patents are applied. [Further description of the drawings] Please refer to the following detailed description of the preferred embodiment of the present invention and its accompanying drawings, and the technical contents of the present invention and the power amplifier of the object 15 M337741 will be further understood. The drawings relating to this embodiment are: FIG. 1 is a schematic diagram of a conventional probe card management device; FIG. 2 is a schematic diagram of a probe card holder of a non-contact probe card management device; Schematic diagram of an embodiment of a needle card management device (1); FIG. 4 is a schematic diagram of an embodiment of a non-contact probe card management device (2); FIG. 5 is a schematic diagram of an embodiment of a non-contact probe card management device (3) Fig. 6 is a schematic view of an embodiment of a non-contact probe card management device (4); -· Fig. 7 is a schematic view of an embodiment of a non-contact probe card management device (5); Schematic diagram of an embodiment of a contact probe card management device (6); k is a schematic diagram of an embodiment of a non-contact probe card management device (7); FIG. 10 is a schematic diagram of a non-contact probe card management device with a light-emitting diode probe card holder; and FIG. A schematic diagram (8) of an embodiment of managing a non-contact probe card.
【主要元件符號說明】 22 > 22a - 22b > 22c..,22η 探針卡抽屜 21、21a、21b 24 23 42a > 42b ... 42n 33a、33b ··· 33n 探針卡架 射頻識別標籤 探針卡 讀卡機 讀卡機 16[Main component symbol description] 22 > 22a - 22b > 22c.., 22η Probe card drawer 21, 21a, 21b 24 23 42a > 42b ... 42n 33a, 33b ··· 33n Probe card holder RF Identification tag probe card reader card reader 16
M337741 31a、31b·.· 31η 天線 41a、41b 天線開關 34a、34b".34n 感測器控制系統 32、32a、32b ··· 32n 非接觸式感測器 35 收發器 36 外部系統 51a、51b 觸控電腦 61 發光二極體 62 無線網路系統 17M337741 31a, 31b·.· 31η Antennas 41a, 41b Antenna switches 34a, 34b".34n Sensor control systems 32, 32a, 32b ··· 32n Non-contact sensors 35 Transceivers 36 External systems 51a, 51b Control computer 61 light-emitting diode 62 wireless network system 17