M330556 八、新型說明： 【新型所屬之技術領域】 本創作涉及一種具有無線晶片標籤功能之測試載板裝 置，特別涉及一種利用射頻識別標籤（RFID)在探針卡上。 【先前技術】 在半導體產業的製造流程上，主要可分成IC設計、晶 圓‘程、晶圓測试及晶圓封裝四大步驟。其中所謂的晶圓 測试步驟，就是對晶圓上的每顆晶粒進行電性特性檢測， 以檢測和淘汰晶圓上的不合格晶粒。進行晶圓測試時，利 用晶圓探針卡的探針刺入晶粒上的接點塾（pad)而構成電 性接觸，再將經由探針所測得的測試訊號送往自動測試設 備（ATE)做分析與判斷，藉此可取得晶圓上的每顆晶粒的電 性特性測試結果。隨著半導體製程技術的進步，半導體元 件的尺寸愈來愈小，積體電路愈來愈精密，半導體元件從 次微米(Sub-Mi⑽）進人深次微米（_如㈣⑽）的領 域’除了積體電路運作時的準確性及效率必需提高之外， :圓=導體元件及積體電路的測試技術是在諸多新元 牛、製程技術及新材料開發等， 特別是晶圓不可或缺之重要技術， 探針卡等，為進行探針及具有多根探針的 於半導趙元件的用之測試設備，然而，* 、 赵j、，積體電路内部的電晶體密 M330556 度大幅增加，集積度不斷上升，使得晶圓層級的分析量測 越趨困難。 在晶圓探針卡的控管方面，目前常用的探針卡辨識方 式有以下幾種，但這些做法都有一些使用上的限制。 1.在探針卡上貼條碼 寬度不等的多個黑條和空白，按照一定的編碼規則排列， 用以表達一組信息的圖形標識符。常見的條碼是由反射率 相差很大的黑條（簡稱條）和白條（簡稱空）排成的平行 線圖案。條碼可以標出物品的生產國、製造廠家、商品名 稱、生產日期、圖書分類號、郵件起止地點、類別、日期 等信息。 條碼的優越性在於條碼的讀取準確率遠遠超過人工記錄， 平均每15000個字元才會出現一個錯誤。條碼的讀取速度 很快，相當於每秒40個字元。與其它自動化識別技術相比 較，條碼技術僅僅需要一小張貼紙和相對構造簡單的光學 掃描儀，成本相當低廉。 但是條碼容易磨損，造成資料讀取資料不易。條碼所需佔 居的空間過大，對於佈滿電路的探針卡而言，是不易整合 條碼於探針卡上。 2.在探針卡上焊接電阻 6 M330556 值會產生變化和資料無法寫入電阻内，需資料庫的配合使 • 用的問題。 ί.-·· , . 本創作主要目的在提供一種不易磨損，使用時間曰久 不會產生資料讀取誤差，並可以儲存資料的裝置。 ，_ 有鑑於前述習知的轉接器在使用上的不使之處，·本創 • 作因此提出一種利用射頻識別標籤（RFID)在探針卡上，解 決上述問題的技術手段。 無線射頻身份識別（R FID)，乃是針對習用之接觸式識 別系統之缺點加以改良，採用射頻訊號以無線方式傳送數 碼資料，因《別卡不必與讀卡機接觸?尤能讀寫數碼資 料，這種非接觸式之射頻身份識別卡與讀卡機之間無方向 性之要求。 本創作利用讀卡機讀取在探針卡的射頻識別標鐵 (RFID)的資料，而做出辨識，並使用讀卡機寫入資料於射 頻識別標籤（RFID)内。 訊號源，並送至 天線’產生穩定之交流磁場’使無線身份識別卡能夠將其 8 M330556 —射頻訊號轉為可使其動作之穩定電源。並且可以感測讀卡 機天線上微小的電流（或電壓）變化，以接收來自無線身 份識別卡的資料。 由於讀卡機是感測天線上微小的電壓變化量，在電源 • 任何雜訊都會影響到讀卡機的解調動作。所以必須藉 自穩壓電路錄電源雜訊。而發射端將是由—單晶片微電 籲藤制其㈣之石英.振盪器，，輸出訊號經放大器放大後， 經電_合至天線。接收端則感測此電阻之壓降，經二極 體解調後，放大數次，並以帶通據波器消除㈣頻寬以外 之雜訊，送至單晶片微電腦做處理。 本創作主要採用如下所詳述之特徵以為了要解決上述 之問題，而創作出-種具有無線晶片標籤功能之測試載板 隹·纟t其特试包括有：一 IC探針卡⑴，其設有複數個印刷 電路，基座⑵，其設於Ic探針卡⑴上；一射頻識別標 •籤（3)其置於该基座⑵上，該基座⑵用於固定和架高射 頻識別標籤⑶於IC探針卡⑴上；以及一讀卡機⑸，其 <有天線⑷用於讀寫射頻識別標籤⑶上的資料，該讀卡 機（5)置於測試頭内。 【實施方式】 9 M330556 該基座（2)的作用一方面在於固定射頻識別標籤 (3)(RFID)於1C探針卡⑴並易於更換和安裝。另一方面， 該基座（2)把射頻識別標籤（3)(RFID)架高便於讀卡機⑺的 天線(4)讀取資料。 安裝射頻識別標籤(3)(RFID)的1C探針卡（1)，在測試過 程中導入測試機台（7)内。經由電腦（6)起動讀卡機並利 用項卡枝（5)的天線（4)讀取射頻識別標籤（3)(rfid)的資M330556 VIII. New Description: [New Technology Field] This creation relates to a test carrier device with a wireless wafer tag function, and more particularly to a radio frequency identification tag (RFID) on a probe card. [Prior Art] In the manufacturing process of the semiconductor industry, it can be divided into four major steps: IC design, wafer process, wafer test and wafer package. The so-called wafer testing step is to perform electrical property detection on each die on the wafer to detect and eliminate unqualified grains on the wafer. In the wafer test, the probe of the wafer probe card is used to pierce the contact pad on the die to form an electrical contact, and then the test signal measured by the probe is sent to the automatic test equipment ( ATE) analyzes and judges the results of electrical characteristics of each die on the wafer. With the advancement of semiconductor process technology, the size of semiconductor components is getting smaller and smaller, and the integrated circuits are becoming more and more sophisticated. The semiconductor components are sub-micro (Sub-Mi(10)) into the submicron (_(4)(10)) field. The accuracy and efficiency of the operation of the body circuit must be improved. The testing technology of the circle=conductor component and integrated circuit is indispensable for many new New York cattle, process technology and new material development, especially for wafers. Technology, probe card, etc., for the probe and the test device for the semi-conducting element with multiple probes, however, *, Zhao j, the internal capacitance of the integrated circuit M330556 is greatly increased, Increasingly, the level of analysis at the wafer level becomes more difficult. In terms of the control of the wafer probe card, the commonly used probe card identification methods are as follows, but these practices have some limitations in use. 1. Sticking barcodes on the probe card A plurality of black bars and spaces of different widths are arranged according to certain coding rules to express a graphical identifier of a group of information. A common bar code is a parallel line pattern of black bars (abbreviated as bars) and white bars (short for empty) which differ greatly in reflectance. The bar code can indicate the country of manufacture, the manufacturer, the name of the item, the date of manufacture, the classification number of the book, the start and end of the mail, the category, and the date. The advantage of bar code is that the bar code reading accuracy far exceeds the manual record, and an error occurs every 15,000 characters on average. Barcode reading is fast, equivalent to 40 characters per second. Compared to other automated identification technologies, bar code technology requires only a small sticker and a relatively simple optical scanner, which is relatively inexpensive. However, the bar code is prone to wear and tear, making it difficult to read the data. The space required for the bar code is too large. For a probe card with a circuit, it is difficult to integrate the bar code on the probe card. 2. Soldering the resistor on the probe card 6 The value of M330556 will change and the data cannot be written into the resistor, which requires the cooperation of the database. ..-··, . The main purpose of this creation is to provide a device that is not easy to wear, has a long time of use, does not cause data reading errors, and can store data. In view of the above-mentioned conventional use of the adapter, the present invention proposes a technical means for solving the above problem by using a radio frequency identification tag (RFID) on the probe card. Radio Frequency Identification (R FID) is an improvement to the shortcomings of the conventional contact identification system. The RF signal is used to transmit digital data wirelessly. Because the card does not need to be in contact with the card reader, it can read and write digital data. There is no directional requirement between this contactless RF identification card and the card reader. This creation uses a card reader to read the radio frequency identification (RFID) data of the probe card, and recognizes it, and uses the card reader to write data into the radio frequency identification tag (RFID). The source of the signal is sent to the antenna 'to generate a stable AC magnetic field' that enables the wireless ID card to turn its 8 M330556-RF signal into a stable power source that can operate. It can also sense small current (or voltage) changes on the reader antenna to receive data from the wireless identity card. Since the card reader is sensing the small amount of voltage change on the antenna, the power supply • any noise will affect the card reader's demodulation action. Therefore, the power supply noise must be recorded by the voltage regulator circuit. The transmitting end will be a quartz oscillator that is made up of a single-chip micro-electricity, and the output signal is amplified by an amplifier and then connected to the antenna. The receiving end senses the voltage drop of the resistor, and after being demodulated by the diode, it is amplified several times, and is sent to the single-chip microcomputer for processing by removing the noise other than the bandwidth of the (B) bandwidth. The present invention mainly adopts the features detailed as follows to create a test carrier with a wireless wafer label function in order to solve the above problems. The special test includes: an IC probe card (1), which A plurality of printed circuits are provided, the base (2) is disposed on the Ic probe card (1); a radio frequency identification tag (3) is placed on the base (2), and the base (2) is used for fixing and raising the RF The identification tag (3) is on the IC probe card (1); and a card reader (5) having an antenna (4) for reading and writing data on the RFID tag (3), the card reader (5) being placed in the test head. [Embodiment] 9 M330556 The base (2) functions on the one hand to fix the radio frequency identification tag (3) (RFID) to the 1C probe card (1) and is easy to replace and install. On the other hand, the base (2) holds the radio frequency identification tag (3) (RFID) to facilitate reading of the data by the antenna (4) of the card reader (7). A 1C probe card (1) with a radio frequency identification tag (3) (RFID) is installed and introduced into the test machine (7) during the test. Start the card reader via the computer (6) and use the antenna (4) of the item card branch (5) to read the RFID tag (3) (rfid)
而後於與測试機台（7)内的資料庫的資料比對，確認1C 探針卡士⑴是否為所需之冚探針卡⑴。發現不合的ic探針Then compare the data with the database in the test machine (7) and check if the 1C probe card (1) is the desired probe card (1). I found an ic probe that is not compatible
Ic^ ^通知彳呆作人員更換IC探針卡（1)。當確認合格的 沉、·()日守，電腦（6)啟動測試系統開始測試。上述步驟 請參閱第4圖。 本創作之技術内容及技術特點已揭示如上，然而熟悉 尽項技術之人丄， _ 士仍可能基於本創作之教示及揭示而作種種 不月離本創作 π神之《換及修飾，並不局限使用在WAT或 WS機台用的 施例所揭示罙針卡。因此，本創作之保護範園應不限於實 、，…、者，而應色括各種不背離本創作之替換及修 飾，亚為以下+出▲士出 之申#專利範園所涵蓋。 【圖式簡單說明】Ic^ ^Notifies the squatter to replace the IC probe card (1). When the qualified Shen,·() day guard is confirmed, the computer (6) starts the test system and starts the test. The above steps are shown in Figure 4. The technical content and technical characteristics of this creation have been revealed as above. However, those who are familiar with the techniques of the 丄 _ _ 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士Limitations are made to the use of the needle card disclosed in the WAT or WS machine. Therefore, the protection of this creation should not be limited to the actual, ..., but should be replaced by a variety of replacements and modifications that do not deviate from the creation, and the following is the coverage of the following patents. [Simple description of the map]