捌、新型說明: t朝*型内t屬之"智[迴 新型領域 皿移轉用升降 之水平狀態自 本創作係關於半導體裝置製造過 機系統,特別係關於具有對舟皿内側之晶圓 動控制功能之舟皿移轉用升降機系統。 t先前技術3 新型背景 因此需要多 通常,多種製程涉及半導體裝置之製造 種設備及輔助設備。 導體裝置提供電特性 驟’其中晶圓表面暴 〇 其係由石英管及加熱 前述製程中,擴散製程係針對半 包含形成氧化物膜步驟及退火處理步 露於高壓條件下含硼或磷固體或氣體 爐為用於擴散製程之設備之一, 石英管之加熱腔室組成。 '至於爐以外之輔助設備,有供氣單元供供給精練加工 氣體至腔室⑽狀時間,升降機供移純於舟皿之晶圓 至爐内同時上下移動,晶圓移轉裝置供裝載/卸載晶圓之舟 皿,切移轉裝置供移轉其中附有晶圓之卡E至晶圓移轉 裝置,讀控制單元供機械控制前述元件。 如第1圖所不,習知擴散加工系統包含石英管19設計供 保護加工處理不_加卫環境,加熱石英管19用之^ 熱腔至18,裝載/卸載舟皿之晶圓1()之爐内同時上下移動之 升降機17,裝載/卸載晶圓1〇之舟皿14之晶圓移轉裝置13, 私轉其中載有晶® 10之卡£11至晶圓移轉裝㈣之卡匡移 =農置12 ’及叹備控制單元(未顯示於附圖)供機械控制 刖述το件,及供氣單元供將多種各製程所需精練氣體注入 加熱腔室。 卜驾知舟盟移轉用升降機系統包含垂直舉升上下 移動之舟皿14供移轉載於其中之晶圓1〇至加熱腔室18,底 座15固定於舟皿14下方並垂直支持舟皿14,上下移動之升 降機系統及螺接偶聯於升降機17上板與底座15間並人工控 制底座15之平部之水平控制板16。 如不例說明水平控制板16底部之第2圖所示,四個六角 頭螺栓2G位於χ_γ軸方向各點,晶圓1()之水平度係由順時針 或逆時針方向旋轉六角《栓2〇㈣,藉此調整底座15於 水平控制板娜之傾角,翼形螺帽21置於六角頭螺检胸 側用於扣接對應螺栓2G以防六角頭螺栓2〇鬆脫。 仁於舟皿14之例,舟皿需以直角牴住底座15垂直舉高 且傾斜’原因有多種,例如來自外在之過載或壓力,安裝 於舟=14之晶圓無法置於水平對正狀態,因而導致晶圓偏 於7圓生產不佳及設備損害等’故操作員需定期鬆脫置 ;、’控制板16底部之翼形螺帽21因而旋轉六角頭螺栓2〇 、人工肉眼调整底座15之水平度並再旋緊八個翼 形螺帽21。 、 因為操作員需反覆直接依據其視 個六角頭螺栓與八個翼形螺帽之 但習知方法不足,原 力控制六角頭螺拴,而四 偶聯工作極為耗時。 【杂f ^^内】 新型概要 平自=:::對提供一種半導體裝置製造過程中具有水 工!功此之舟皿移轉用升降 相關技術之缺點及_。 、,…,、可大體免除 本創作之目的係提供_且 “移轉用升降機系統,其,二=能用之 度俾以水平狀態移轉在舟面之半導趙晶圓舟皿水平 本創作之另一目的係提供一種具有水 能之舟里移轉用升降機系統以防晶圓偏差_動: 正時間及改良晶圓品質。 u而㈣曰日圓對 顯示==及其他優點及本創作之目的如此處具體 維=之::舟:有晶_於其上且具有底座 官一水+部升降機供裝載/卸載舟皿至加工腔 _測早祕檢測舟皿水平㈣,—财平自 制、位於舟皿底座與升降機間, : 舟皿水平壯能u 一者間距維持 奸狀& ’及-個控制單元供接收來自感測單元 皿水平狀態資訊及輸出控制信號至水平控制單元。舟 水平控鮮元包含水平控制油定於升降機上側 數水平控制驅動部件其位於底座與水平控制板間,及介於 —者間彈性上τ移動俾水平對正,故縣底座之傾斜度,、 …品動力產生„卩件供供給驅動力至水平控制驅動部件。 感挪早凡包含高度錶或兩對感光器及發光感挪器。感 光器及發光感測器設置成來自發光感測器之入射光於水平 底座俾彼此垂直交叉,及安裝於接近待水平對正之舟皿。 同時,於本創作之半導體裝置製造過程具有水平自動 控制功能及升降機系統,該系統又包含單元連結於控制單 元及顯示由感測單元接受之舟皿水平資訊,及輸入單元連 結至控制單元,接收水平對正工作順序,將可轉成順序碼 及送至控制單元。 需瞭解前文概略說明及後文詳細說明僅供舉例說明之 用,意圖對申請專利之本創作提供進一步說明。 圖式簡單說明 第1圖為示意代表圖示例說明習知半導體舟凰移轉用 升降機系統之工作; 第2圖為底視圖示例說明第1圖之半導體舟皿移轉用升 降機系統; 第3圖為示意代表圖示例說明根據本創作之具體例之 半導體舟m移轉用升降機系統之作業; 第4圖為示意圖示例説明第3圖之具有自動水平控制功 處之半導體舟皿移轉用升降機***;及 弟5圖為底視圖示例説明第4圖之水平控制單元 t 貧jj 車父佳實施例之詳細說明 “將參照本創作之較隹具體例說明其細節,其範例 說明於附圖。 第3圖為示意代表圖禾例說明根據本創作之具體例之 半導體舟皿移轉用升降機系統之㈣,及第4圖為示意圖, 不例說明第3圖之具有自動水平控制功能之半導體舟皿移 轉用升降機系統。 參照第3及4圖,半導體舟皿移轉用升降機系統包含: 舟皿34其為垂直成形及由石英製成,移轉複數晶圓至加工 腔室其有魏晶圓水平絲其上,及具有—㈣㈣其為 圓盤形及水平支撐舟里34,升_37供上下移動,水平控 制板36水平固定於升降機37,複數水平軸部件雜㈣ 舟及底座35,及介於底座35底部於水平控制板%頂部 間上下彈性移動因而調整二者間距以控制底座35之水平狀 態,驅動力產生部件41供產生水平控制驅動部件仙之驅動 力及藉驅動力移轉部件移轉該驅動力至複數水平控制驅動 部件40,控制單元44供接收晶圓水平狀態資訊級控制水平 控制驅動部件40之m料元43供檢職座35及盆 上之晶圓之水平狀態並輸㈣訊至控制單以4。水平控制 駆動部件40係由置於底座35頂軸一側控制底座%之上 下傾斜之X軸水平控制驅動部件術,及置於底座%下方y 軸之一側及控制底座35之上下傾斜之γ轴水平控制驅 件40b組成。 、可製作夕種水平控制驅動部件40例如液壓油缸或氣壓 汽缸或可於接收來自驅動力產生料之液壓或氣壓時於單 一方向或雙向伸縮之管。 於使用氣壓或液壓作為水平控制驅動部件之例中,驅 動力產生部件使職料提供氣壓紐壓,及流體移轉管 或氣·至水平控制驅 /閉俾押心机和轉管可根據内側路徑之開/閉選擇性開 部:之:::控制軸部件之工作,及來自水平控-動 平控㈣& 由㈣單元44選馳移轉㈣力至水 抑麻動部件之汽紅而控制。 置包2艘水平控制驅動部件40之較佳構造為螺紋升高裝 孔· I螺 件聯結至底座35 ’其中具有垂直形母螺絲 以順件透料料料職偶财平㈣板36及 部件==轉上下移動’及經_力移轉 及適 ]接收之旋轉力改變成具有適當轉速 袭置轉力之旋轉力並將其移轉至公螺絲部件用之傳遞 裝置Γΐ用觀伸高裝置作為水平㈣梅卩件例,傳動 輪之电八至少一個傳動齒輪組合’帶及滑輪組合,鍵及鏈 輪輪^合及較佳包含複數傳動齒 此外,產生旋轉驅動力之驅動力產生部件較佳使用馬 達’至於馬達41可使用DC馬達(直流馬達)供 Π妾收%功率源後產生旋轉驅動力,Μ馬達(交流馬達 由控制單元44接收AC功率源後產生旋轉驅動力,有奸 馬達其於接收功率後產生旋轉驅動力,及以配備儀器中之 齒輪組合產生適當轉數及適當旋轉力,或步進馬達供於接 2脈衝功率源後準確㈣作業,但步進馬達較佳用 馬達44。 切 如第5圖所示,馬達41係經由聯結χ軸馬達41a&Y軸鬲 達41b至X軸水平控制驅動部件4〇a&Y軸水平控制驅動部 件40b組成。 此外控制DC及AC馬達之控制單元40接收來自感測器 43之舟皿水平狀態資訊,及比較接收得知資料與已經輸入 資料。然後控制單元44改變電壓或電流而校正資料間之誤 差且施加前述功率至DC或AC馬達控制。於控制部件馬達之 例,控制單元44接收來自感測器43之舟皿水平度資訊,比 較接收传知貧祝與已經輸入之貧訊’將功率改變成正或負 脈波而校正兩資料間之誤差,及藉施加脈波之至部件馬達 控制。 聯結於馬達41旋轉之軸42作為驅動力移轉部件供移轉 旋轉驅動力至水平控制驅動部件4〇之公螺絲部件。此外兩 對感光器及發光感測器水平安裝接近底座35或晶圓1 〇故發 至感光器及發光感測器之光彼此垂直交又以檢測底座3 5或 晶圓10之傾斜角,換言之底座35或晶圓1〇之水平狀態誤差 係由前述感光器檢測。或複數感壓器設置於底座35下方及 檢測裝載晶圓10之各側裝載壓力。或水平度感測器設置供 檢測底座35或晶圓10之水平度誤差,該感測器安裝成垂直 固定於底座35及檢側重力方向,採用方式係於設置於内部 之重力擺錘周圍提供接觸感測器或壓力感測器。或高度錶 設置於底座35上。 此外,提供顯示單元與控制單元44連接俾顯示由感測 器43接收得知底座35或晶圓10之水平狀態資訊,及輸入單 M248014 元供連結控财元44俾接收水平對正作#指令,將其轉成 指令碼及移轉至控制單元44。 10 15 因此操作員透過顯示單元檢查底座35或晶圓10之水平 對正狀態。於非水平對正狀態之情況,操作員之指令透過 輸入單元輸人控料元44。㈣單元44及於制純接收 之貧料分析XY軸水平度資訊’及透過軸連結至水平控制驅 動部件之馬達經控制而水平對正底座或晶圓。 、此外’水平對正卫作根據控制單元44内部之程式定期 重複,某些情況下係根據操作員的指令步進進行。 根據本創作之水平自動控制功能之舟I移轉用升降機 系統,升降機系統經由檢測舟皿之傾斜度及自動控制晶圓 之水平度可使舟皿上之晶圓水平對正,因而節省操作時間 及努力,及防止晶圓偏差因*生產高品質晶圓。 又復,雖然已經詳細說明本創作,但須瞭解可未背離 _之中請專職圍界定之本創叙精髓及範圍做出多種 變化、取代及改變。新型, new type description: "t" * in the "t" of the "smart" back to the horizontal state of the vertical transfer of the state of the plate since the creation of this system is about the semiconductor device manufacturing machine system, especially about the crystal with the inside of the boat Lifting system for boat transfer with circular motion control function. Prior art 3 New background So much is needed Generally, a variety of processes involve the manufacture of semiconductor devices and auxiliary equipment. The conductor device provides electrical characteristics, in which the wafer surface is exposed to a quartz tube and heated. In the foregoing process, the diffusion process is directed to a half-containing oxide film forming step and an annealing step exposed to a boron or phosphorus-containing solid under high pressure or The gas furnace is one of the equipment used in the diffusion process, and is composed of a heating chamber of a quartz tube. 'As for auxiliary equipment outside the furnace, there is a gas supply unit to supply the refining processing gas to the chamber-like time, the elevator to move the wafers purely from the boat into the furnace and move up and down at the same time, and the wafer transfer device for loading / unloading The wafer boat, the cutting and transferring device is used to transfer the card E with the wafer to the wafer transferring device, and the read control unit is used for mechanically controlling the aforementioned components. As shown in Figure 1, the conventional diffusion processing system includes a quartz tube 19 designed to protect the processing environment. It is used to heat the quartz tube 19 ^ Hot cavity to 18, load / unload wafers 1 () A lifter 17 moving up and down in the furnace at the same time, loading / unloading wafers 10, a wafer transfer device 13 of a boat 14, and private transfer of a card with a wafer® 10 in it £ 11 to a wafer transfer loading card Kuangyin = Farm Home 12 'and the device control unit (not shown in the drawing) are used for mechanical control of το, and the gas supply unit is used to inject the refined gas required for various processes into the heating chamber. The driving lift system for the Zhimengzhou League includes a boat 14 which is vertically moved up and down for transferring the wafers 10 contained therein to the heating chamber 18, and the base 15 is fixed below the boat 14 and supports the boat 14 vertically. The elevator system moving up and down and the horizontal control board 16 which is coupled between the upper plate of the elevator 17 and the base 15 and controls the flat portion of the base 15 manually. As shown in the second figure at the bottom of the horizontal control board 16, the four hexagon head bolts 2G are located at various points in the χ_γ axis direction. The horizontality of the wafer 1 () is rotated by the clockwise or counterclockwise hexagon 〇㈣, so as to adjust the inclination of the base 15 to the horizontal control board, the wing nut 21 is placed on the chest side of the hex head screw inspection for fastening the corresponding bolt 2G to prevent the hex head bolt 20 from loosening. For example, the boat 14 needs to hold the base 15 at a right angle and lift it vertically and tilt it. There are many reasons, such as external overload or pressure. The wafer mounted on the boat = 14 cannot be placed horizontally. Condition, resulting in wafers skewed to 7 circles, poor production, and equipment damage, etc. 'Therefore, operators need to loosen regularly;' wing nut 21 at the bottom of the control board 16 thus rotates the hex head bolt 20, and manual visual adjustment Level the base 15 and tighten the eight wing nuts 21 again. Because the operator needs to directly and repeatedly rely on his view of the six hex head bolts and eight wing nuts, but the known method is insufficient, the force control of the hex head bolts, and the four coupling work is extremely time consuming. [Miscellaneous f ^^] Overview of the new level Ping Zi = ::: To provide a semiconductor device manufacturing process with hydraulics! The shortcomings of related technologies for boat transfer and lifting ,,,,, The purpose of this exemption is to provide _ and "a lift system for transfer, where two = the degree of usability 俾 the semi-conductor Zhao wafer on the boat level in the horizontal state. Another purpose is to provide a lift system with a boat for water transfer to prevent wafer deviations: positive timing and improved wafer quality. U and Japanese yen = display and other advantages and the purpose of this creation As detailed here = :: boat: there is a crystal_on it with a base and a lift + a lift for loading / unloading the boat to the processing chamber Between the boat's base and the lift, the boat's level can be maintained at a distance & 'and a control unit for receiving horizontal status information from the sensing unit and output control signals to the horizontal control unit. Boat level control Xianyuan contains horizontal control oil, which is located on the upper side of the elevator. Horizontal control drive components are located between the base and the horizontal control board, and are elastically moved between τ and horizontal alignment. Therefore, the inclination of the county base, ... Produce "Jie member for supplying a driving force to control the horizontal drive means. Sensitive movements include altimeters or two pairs of photoreceptors and luminous sensing devices. The light sensor and the light-emitting sensor are arranged such that incident light from the light-emitting sensor is horizontally intersected with each other on a horizontal base, and is installed near a boat to be horizontally aligned. At the same time, the semiconductor device manufacturing process in this creation has a horizontal automatic control function and a lift system, which also includes a unit connected to the control unit and displays the boat level information accepted by the sensing unit, and the input unit is connected to the control unit to receive The horizontal alignment work sequence can be converted into a sequence code and sent to the control unit. It should be understood that the foregoing brief description and the detailed description below are for illustration purposes only, and are intended to provide further explanation of the patent application. Brief Description of the Drawings Figure 1 is a schematic representative diagram illustrating the operation of the conventional semiconductor boat lifter system; Figure 2 is a bottom view example illustrating the semiconductor boat lifter system of Figure 1; Fig. 3 is a schematic representative diagram illustrating the operation of the lifter system for semiconductor boat m transfer according to the specific example of this creation; Fig. 4 is a schematic diagram illustrating the semiconductor boat movement with automatic horizontal control function of Fig. 3 Switch to a lift system; and Figure 5 is a bottom view to illustrate the horizontal control unit t in Figure 4. Detailed description of the embodiment of the car father ’s car "The details will be explained with reference to the specific examples of this creation, examples of which It is illustrated in the accompanying drawings. Fig. 3 is a schematic representation of an example of a hoist system for a semiconductor boat transfer according to a specific example of the present creation, and Fig. 4 is a schematic diagram, which illustrates the automatic level of Fig. 3 without examples. Lifting system for semiconductor boat transfer with control function. Referring to Figures 3 and 4, the lifter system for semiconductor boat transfer includes: Boat 34 which is vertically formed and made of quartz, transfers multiple crystals To the processing chamber, it has Wei wafer horizontal wire on it, and it has a disk-shaped and horizontal support boat 34, _37 for up and down movement, the horizontal control plate 36 is fixed horizontally to the elevator 37, and multiple horizontal axis components are miscellaneous. ㈣ The boat and the base 35, and the elastic movement between the bottom of the base 35 and the top of the horizontal control board, so that the distance between the two is adjusted to control the horizontal state of the base 35. The driving force generating part 41 is used to generate the driving force of the horizontal control driving part. And the driving force is transferred to the plurality of horizontal control driving parts 40 by the driving force transfer part, and the control unit 44 is used to receive the wafer level status information level control level control driving part 40, the material element 43 is provided to the inspection seat 35 and the basin The horizontal state of the wafer is transmitted to the control sheet to 4. The horizontal control moving part 40 is an X-axis horizontal control driving part tilted by the top and bottom sides of the base 35, which controls the base%. It consists of one side of the y-axis below and the γ-axis horizontal control driver 40b which tilts up and down of the control base 35. It is possible to make a horizontal control drive component 40 such as a hydraulic cylinder or air pressure. The cylinder may be a tube that can expand or contract in one direction or two directions when receiving hydraulic pressure or pneumatic pressure from the driving force generating material. In the case of using pneumatic or hydraulic pressure as a horizontally controlled driving component, the driving force generating component makes the material provide pneumatic pressure, And fluid transfer tube or gas · to-horizontal control drive / closing core press and rotary tube can be selectively opened according to the opening / closing of the inner path :::: controls the work of shaft components, and comes from the horizontal control-moving level Control & Control is selected by the unit 44 to move the hydraulic force to the steam red of the water-inhibiting moving parts. The preferred configuration of the two horizontal control drive parts 40 is a screw-up mounting hole. I screw connection to The base 35 'has vertical female screws to pass through the material in order to pass through the material. The flat plate 36 and the components == turn up and down' and the force is transferred to a proper speed. Set the rotation force of the turning force and transfer it to the male screw part. The transmission device Γ is used as an example of a horizontal extension device. The transmission wheel is composed of at least one transmission gear combination 'belt and pulley combination. And sprocket wheels Contains multiple transmission teeth. In addition, the driving force generating part that generates the rotational driving force preferably uses a motor. As for the motor 41, a DC motor (DC motor) can be used to generate a rotational driving force after receiving a% power source. The M motor (the AC motor consists of The control unit 44 generates a rotational driving force after receiving the AC power source. There is a motor that generates a rotational driving force after receiving the power, and a suitable combination of gears in the equipment to generate an appropriate number of revolutions and an appropriate rotational force. After the 2 pulse power source, the operation is accurate, but the stepper motor preferably uses the motor 44. As shown in Fig. 5, the motor 41 is constituted by coupling a x-axis motor 41a & Y-axis 41 up to 41b to an X-axis horizontal control drive part 40a & Y-axis horizontal control drive part 40b. In addition, the control unit 40 that controls the DC and AC motors receives the boat level status information from the sensor 43 and compares the received learned data with the input data. The control unit 44 then changes the voltage or current to correct the error between the data and applies the aforementioned power to the DC or AC motor control. In the case of the control unit motor, the control unit 44 receives the boat level information from the sensor 43, and compares the received poor wishes with the poor inputs that have been input to change the power to positive or negative pulses and correct the difference between the two data. Error, and by applying a pulse wave to the component motor control. The shaft 42 connected to the rotation of the motor 41 serves as a driving force transfer member for transferring the rotation driving force to the male screw member of the horizontal control driving member 40. In addition, the two pairs of photoreceptors and light-emitting sensors are mounted horizontally close to the base 35 or the wafer 10, so the light sent to the photoreceptors and the light-emitting sensor is perpendicular to each other to detect the inclination of the base 35 or the wafer 10, in other words The horizontal state error of the base 35 or the wafer 10 is detected by the aforementioned photoreceptor. Or a plurality of pressure sensors are arranged below the base 35 and detect the loading pressure on each side of the loaded wafer 10. Or the level sensor is installed to detect the level error of the base 35 or the wafer 10. The sensor is installed to be fixed vertically to the base 35 and the detection side gravity direction, and is provided around the gravity pendulum provided inside. Touch sensor or pressure sensor. Or the altimeter is set on the base 35. In addition, a display unit is connected to the control unit 44 to display the horizontal status information of the base 35 or wafer 10 received by the sensor 43, and an input form M248014 for the link control financial yuan 44. The receiving level is set as the # instruction , Convert it to an instruction code and transfer to the control unit 44. 10 15 Therefore, the operator checks the level alignment state of the base 35 or the wafer 10 through the display unit. In the case of non-horizontal alignment, the operator's instruction inputs the material control element 44 through the input unit. The unit 44 and the analysis of the XY axis leveling information received by Yu Zhichun and the motor connected to the horizontal control driving component through the axis are controlled to horizontally align the base or wafer. In addition, the level is periodically repeated according to the program inside the control unit 44, and in some cases, it is performed step by step according to the operator's instructions. According to the original boat I transfer elevator system with horizontal automatic control function, the elevator system can align the wafer level on the boat by detecting the boat's inclination and automatically controlling the level of the wafer, thus saving operating time. And efforts to prevent wafer deviations * to produce high-quality wafers. Again, although this creation has been explained in detail, you must understand that you can not deviate from the essence and scope of the original narrative as defined by the full-time professional to make a variety of changes, substitutions and changes.
【圖式簡單說明】[Schematic description]
第1圖為示意代表圖 升降機系統之工作; 不例說明習知半導體舟里移轉用 20 弟2圖為底視圖示例說明第 降機系統; 圖之半導體舟孤移轉用升 第3圖為示意代表圖示例說明根據本創作之具體例之 半導體舟m移轉用升降機系統之作業; 第4圖為示意圖示例說明第3圖之具有自動水平控制功 12 M248014 能之半導體舟孤移轉用升降機系統;及 第5圖為底視圖示例說明第4圖之水平控制單元。 【圖式之主要元件代表符號表】 10.. .晶圓 12.. .卡匣移轉裝置 13.. .晶圓移轉裝置 14···舟 m 15.. .底座 16.. .水平控制板 17.. .升降機 18.. .加熱腔室 19.. .石英管 20.. .六角頭螺栓 21.. .翼形螺帽 34…·舟 35.. .底座 36.. .水平控制板 37.. .升降機 40.. .水平控制驅動部件 41.. .驅動力產生部件 43.. .感測單元 44…控制單元 40a·.. X軸水平控制驅動部件 40b…Y軸水平控制·鶴部件 41a.. .X轴馬達 41b...Y軸馬達 42.. .軸 11…卡匣Figure 1 is a schematic representation of the work of the elevator system; no example illustrates the conventional semiconductor boat transfer 20; Figure 2 is a bottom view example illustrating the first lowering system; Figure 3 semiconductor boat solitary transfer 3 The figure is a schematic representative diagram illustrating the operation of the lifter system for semiconductor boat m transfer according to the specific example of this creation; Figure 4 is a schematic illustration illustrating the solitary movement of a semiconductor boat with automatic level control function 12 M248014 in Figure 3 Switch to a lift system; and Figure 5 is a bottom view illustrating the horizontal control unit of Figure 4. [Representative symbol table of main components of the drawing] 10.... Wafer 12.... Cassette transfer device 13.... Wafer transfer device 14... Boat m 15.. Base 16... Control panel 17. Lift 18. Heating chamber 19. Quartz tube 20. Hex head bolt 21. Wing nut 34 ... Boat 35. Base 36. Control level Plate 37 .. Elevator 40 .. Horizontal control drive part 41 .. Driving force generation part 43 .. Sensing unit 44 ... Control unit 40a .... X-axis horizontal control drive part 40b ... Y-axis horizontal control ... Crane parts 41a ... X axis motor 41b ... Y axis motor 42 ... axis 11 ... cassette
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