JP2009012107A - Tool and method for teaching installation and conveyance information for substrate processing apparatus - Google Patents

Tool and method for teaching installation and conveyance information for substrate processing apparatus Download PDF

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JP2009012107A
JP2009012107A JP2007175260A JP2007175260A JP2009012107A JP 2009012107 A JP2009012107 A JP 2009012107A JP 2007175260 A JP2007175260 A JP 2007175260A JP 2007175260 A JP2007175260 A JP 2007175260A JP 2009012107 A JP2009012107 A JP 2009012107A
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installation
acceleration
substrate
conveyance
gripping
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Hidenobu Goto
日出信 後藤
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NEC Electronics Corp
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NEC Electronics Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a tool for teaching installation and conveyance information more correctly and efficiently teaching a conveyance position, horizontality check and adjustment of a substrate conveyance robot and a holder in a processing chamber, and measurement of operating acceleration of the substrate conveyance robot where a substrate mounted on the robot begins to slide, and also to provide a method of teaching. <P>SOLUTION: The tool for teaching installation and conveyance information of a target to be processed includes: an acceleration detector; a support plate for supporting the acceleration detector; a communication means for converting acceleration of gravity or acting acceleration applied to the acceleration detector into an electric signal to communicate; and a control means for processing the electric signal communicated from the communication means and displaying and outputting the obtained installation and conveyance information. The method employs the tool. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は基板を処理するための基板処理装置における、設置・搬送情報教示治具と設置・搬送情報教示方法に関する。   The present invention relates to an installation / transport information teaching jig and an installation / transport information teaching method in a substrate processing apparatus for processing a substrate.

たとえば、半導体ウェハなどの基板を1枚ずつ処理する枚葉式の基板処理装置では、その処理の内容に適した状態で基板を把持するための基板把持装置と、この基板把持装置に対して基板を搬送するための基板搬送ロボットが備えられている。基板に対する処理は基板搬送ロボットから基板把持装置に基板が受け渡されて、基板把持装置に基板が把持された状態で行われる。   For example, in a single-wafer type substrate processing apparatus that processes a substrate such as a semiconductor wafer one by one, a substrate gripping apparatus for gripping the substrate in a state suitable for the contents of the processing, and a substrate with respect to the substrate gripping apparatus A substrate transfer robot for transferring the substrate is provided. The processing for the substrate is performed in a state where the substrate is transferred from the substrate transfer robot to the substrate gripping device and the substrate is gripped by the substrate gripping device.

基板搬送ロボットには、受け渡し時に基板把持装置から基板が脱落したり、基板が正しい把持位置からずれた状態で基板把持装置に把持されて、処理中に基板把持装置から基板が脱落したりすることのないよう、基板把持装置との基板の受け渡し位置に基板を高精度で搬送することが要求される。基板が正しい把持位置からずれた状態で把持されたまま、基板への処理が行われた場合、その基板に対する処理液の供給むらや加熱、冷却むらなどの処理むらを生じるおそれがある。   The substrate transfer robot may drop the substrate from the substrate gripping device during delivery, or the substrate may be gripped by the substrate gripping device in a state of being displaced from the correct gripping position, and the substrate may be dropped from the substrate gripping device during processing. Therefore, it is required to transport the substrate with high accuracy to the substrate transfer position with the substrate gripping device. If processing is performed on a substrate while the substrate is held in a state of being deviated from the correct holding position, processing unevenness such as uneven supply of processing liquid to the substrate, uneven heating, or cooling may occur.

また、基板搬送ロボットに把持された基板は水平であることが望ましい。なぜならば、基板が水平でなく、傾いた状態で把持されて搬送された場合、基板の搬送経路上にある他の構造物に基板が接触して、基板の破損、基板への異物付着などの問題が生じるおそれがあるからである。   Further, it is desirable that the substrate held by the substrate transfer robot is horizontal. This is because when the substrate is held in a tilted state and is not horizontal, the substrate may come into contact with other structures on the substrate transport path, causing damage to the substrate or adhesion of foreign matter to the substrate. This is because a problem may occur.

また、基板処理室内に設置された基板把持装置に把持された基板においても水平であることが望ましい。なぜならば、基板が水平でなく、傾いた状態で把持されて処理された場合、その基板に対する処理液の供給むらや加熱、冷却むらなどの処理むらを生じるおそれがあるからである。   In addition, it is desirable that the substrate held by the substrate holding apparatus installed in the substrate processing chamber be horizontal. This is because if the substrate is gripped and processed in an inclined state instead of being horizontal, processing unevenness such as uneven supply of processing liquid to the substrate, uneven heating, and cooling may occur.

また、基板を固定せず、載置しただけの状態で基板を搬送する基板搬送ロボットでは、基板搬送ロボット上で基板が滑る事を防ぐ必要がある。なぜならば、基板搬送ロボット上で基板が滑った場合、基板の搬送位置ずれが発生し、その基板に対する加熱、冷却むらなどの処理むらや、基板への異物付着などの問題が生じる恐れがあるからである。   In addition, in a substrate transfer robot that transfers a substrate while it is mounted without fixing the substrate, it is necessary to prevent the substrate from sliding on the substrate transfer robot. This is because if the substrate slides on the substrate transfer robot, the transfer position of the substrate may shift, which may cause processing irregularities such as heating and cooling unevenness on the substrate and adhesion of foreign matters to the substrate. It is.

基板搬送ロボット及び基板把持装置の配置は設計によって決められているため、それぞれを設計通りに組み付ける事ができれば、その設計上の基板搬送ロボットと基板把持装置との相対的な位置関係に基づいて、基板を問題なく受け渡すことができる位置に基板を搬送することができる筈である。しかし、基板搬送ロボット及び基板把持装置の組み付けには誤差が生じるため、設計上の基板搬送ロボット及び基板把持装置の相対的な位置関係と実際の基板搬送ロボット及び基板把持装置の相対的な位置関係との間にはずれが生じる。そのため、基板把持装置及び基板搬送ロボットを組み付けた後には、基板搬送ロボットの動作を制御する制御装置に対して、そのずれ量を教示するティーチングが行われる。   Since the arrangement of the substrate transfer robot and the substrate gripping device is determined by design, if each can be assembled as designed, based on the relative positional relationship between the substrate transfer robot and the substrate gripping device on the design, It should be possible to transport the substrate to a position where the substrate can be transferred without problems. However, since errors occur in the assembly of the substrate transfer robot and the substrate gripping device, the relative positional relationship between the designed substrate transfer robot and the substrate gripping device and the relative positional relationship between the actual substrate transfer robot and the substrate gripping device. Deviation occurs between the two. Therefore, after assembling the substrate gripping device and the substrate transport robot, teaching is performed to teach the deviation amount to the control device that controls the operation of the substrate transport robot.

また、同様に基板搬送ロボットの水平及び基板処理室内の基板把持装置の水平も、設計通りに組み付ける事が出来れば、基板が水平になる筈である。しかし、基板搬送ロボット及び基板処理室内の基板把持装置の組み付けには誤差が生じるため、組み付けた後に、水平調整が行われる。   Similarly, the level of the substrate transfer robot and the level of the substrate gripping device in the substrate processing chamber should be leveled if they can be assembled as designed. However, since an error occurs in the assembly of the substrate transport robot and the substrate gripping apparatus in the substrate processing chamber, the horizontal adjustment is performed after the assembly.

また、基板を固定せず、載置しただけの状態で基板を搬送する基板搬送ロボットでは、基板搬送ロボットの動作、停止時の動作加速度を、基板搬送ロボット上に載せられた基板が、慣性によって滑らないような値に設定しなければならない。   In addition, in a substrate transfer robot that transfers a substrate while it is just placed without fixing the substrate, the operation of the substrate transfer robot is stopped and the operation acceleration when stopped is determined by the inertia of the substrate placed on the substrate transfer robot. It must be set to a value that does not slip.

従来、このようなティーチングはオペレーターの手作業によって行われることが一般的であった。第一の従来技術として、図５に、基板把持装置と、従来の設置・搬送情報教示治具を使用した基板の搬送位置を調整する方法の一例を示した。（ａ）は上面図、（ｂ）は側面図（一部断面図）である。   Conventionally, such teaching has generally been performed manually by an operator. As a first prior art, FIG. 5 shows an example of a method of adjusting the substrate transfer position using a substrate gripping device and a conventional installation / transfer information teaching jig. (A) is a top view, (b) is a side view (partial sectional view).

この方法の場合、オペレーターは基板搬送ロボット（図示せず）のハンドを少しずつ動かしながら、目視によって、そのハンドに把持されたセンター指標付きガラスウェハ４０の中心と基板把持装置であるスピンモーター２１の回転中心との合わせ込みを行う。そして、基板搬送ロボットのハンドに把持されたセンター指標付きガラスウェハ４０の中心と基板把持装置であるスピンモーター２１の回転中心が合致した位置の基板搬送ロボットのハンドの位置座標を基板搬送ロボットの制御情報として基板搬送ロボットの制御装置に入力する。   In the case of this method, the operator moves the hand of a substrate transfer robot (not shown) little by little and visually observes the center of the glass wafer 40 with a center index held by the hand and the spin motor 21 which is a substrate gripping device. Align with the center of rotation. Then, the substrate transfer robot controls the position coordinates of the substrate transfer robot hand at the position where the center of the glass wafer 40 with the center index held by the hand of the substrate transfer robot and the rotation center of the spin motor 21 which is the substrate holding apparatus match. Information is input to the control device of the substrate transfer robot.

なお、図面参照符号は、後述の実施形態における構成要素などと対応している。以下の文中に記載される符号においても同様である。   Note that reference numerals in the drawings correspond to components in the embodiments described later. The same applies to the symbols described in the following text.

また、第二の従来技術として、特許文献１があり、図６に、その方法の一例を示した。（ａ）は上面図、（ｂ）は側面図（一部断面図）である。ここでは、処理室内にＣＣＤカメラ５１を収容し、このＣＣＤカメラ５１によって得られる画像から、基板把持装置であるスピンモーター２１の中心を求め、次に基板搬送ロボットによって搬送された基板３０をＣＣＤカメラ５１によって撮影し、同様に基板３０の中心を求め、スピンモーター２１の中心と基板３０の中心との位置ずれ量を教示情報とする方法が記載されている。   Moreover, there exists patent document 1 as a 2nd prior art, and the example of the method was shown in FIG. (A) is a top view, (b) is a side view (partial sectional view). Here, a CCD camera 51 is accommodated in the processing chamber, the center of the spin motor 21 as a substrate gripping device is obtained from an image obtained by the CCD camera 51, and then the substrate 30 transported by the substrate transport robot is taken as the CCD camera. A method is described in which the image is taken by 51, the center of the substrate 30 is similarly obtained, and the amount of positional deviation between the center of the spin motor 21 and the center of the substrate 30 is used as teaching information.

また、図４に、基板搬送ロボットの水平を調整する従来方法の一例を示した。（ａ）は上面図、（ｂ）は側面図である。この方法の場合、基板搬送ロボット１０に基板３０を把持させ、その上に水準器３１を載置し、水準器３１の気泡を見ながら、水準調整を行うものであるが、基板３０を把持せず、基板搬送ロボット１０の任意の基準位置を決め、水準器３１を使用して、基準位置の水平を調整する場合もある。   FIG. 4 shows an example of a conventional method for adjusting the level of the substrate transfer robot. (A) is a top view, (b) is a side view. In the case of this method, the substrate transport robot 10 grips the substrate 30, and the level 31 is placed on the substrate 30, and the level is adjusted while looking at the bubbles in the level 31. First, an arbitrary reference position of the substrate transfer robot 10 may be determined and the level of the reference position may be adjusted using the level 31.

また、基板を基板搬送ロボット上に載置しただけの状態で搬送した時、基板搬送ロボット上で基板が滑ったか否かは、目視で判断されることが多く、判断が難しい事から、基板搬送ロボットの動作加速度は、実際に基板が滑り出す動作加速度に対して、十分に余裕を持たせた値に設定される。   In addition, when a substrate is transported in a state where it is just placed on the substrate transport robot, it is often difficult to judge whether or not the substrate has slipped on the substrate transport robot. The motion acceleration of the robot is set to a value having a sufficient margin with respect to the motion acceleration at which the substrate actually slides.

特開２００６−１４０３５０JP 2006-140350 A

以下の分析は、本発明によって与えられる。上記、第一の従来技術に示すようなオペレーターの手作業によるティーチングは、目視での位置合わせが非常に面倒で手間のかかる作業であり、また、オペレーターの主観によって受け渡し位置が決められるために、オペレーターの経験や技術力によって搬送位置精度に差が生じる。   The following analysis is given by the present invention. The teaching by the operator's manual work as shown in the first prior art is a work that is very troublesome and time-consuming to align visually, and the delivery position is determined by the subjectivity of the operator. Differences in transport position accuracy occur depending on operator experience and technical capabilities.

上記、第二の従来技術に示すようなＣＣＤカメラを用いたティーチングでは、ティーチングを行う時だけ、処理室内へのＣＣＤカメラの取り付け、取り外しが行われる。なぜならば、基板の処理に使用されるフッ酸、アンモニア過酸化水素水、純水、炭酸水などの薬液にＣＣＤカメラがさらされた場合、レンズの一般的なコーティング膜の損傷、ＣＣＤカメラの腐食などの問題が発生する為である。このため、ＣＣＤカメラの脱着のために、ティーチング作業時間が長くなる。   In teaching using the CCD camera as shown in the second prior art, the CCD camera is attached to and detached from the processing chamber only when teaching is performed. This is because when the CCD camera is exposed to chemicals such as hydrofluoric acid, ammonia hydrogen peroxide solution, pure water, or carbonated water used for substrate processing, the lens coating film is generally damaged and the CCD camera is corroded. This is because problems such as these occur. For this reason, the teaching work time becomes longer due to the attachment / detachment of the CCD camera.

また、図４に示すような基板搬送ロボット及び基板処理室内の基板把持装置の水平調整は、水準器の向きを変え、水準器の気泡の位置から、Ｘ方向、Y方向の傾き方向を読み取り、傾き修正を行う作業であり、オペレーターの主観によって傾きが決められるため、オペレーターの経験や技術力によって傾き量に差が生じる。加えて、真空中にある基板搬送ロボットや基板把持装置の傾き測定を行う場合、大気状態に戻す必要があり、測定及び測定後の復旧にかかる作業時間が長くなる。   Further, the horizontal adjustment of the substrate transport robot and the substrate gripping apparatus in the substrate processing chamber as shown in FIG. 4 changes the direction of the level, reads the tilt direction in the X direction and the Y direction from the position of the bubble of the level, This is a work to correct the tilt, and the tilt is determined by the operator's subjectivity. Therefore, the tilt amount varies depending on the experience and technical ability of the operator. In addition, when measuring the tilt of the substrate transfer robot or the substrate gripping device in a vacuum, it is necessary to return to the atmospheric state, and the work time required for the measurement and recovery after the measurement becomes longer.

また、基板を基板搬送ロボット上に載置しただけで搬送する基板搬送ロボットにおいて、基板搬送ロボットの動作、停止時の動作加速度を、基板搬送ロボット上に載置された基板が滑り出す動作加速度に対して、十分に余裕を持たせた値に設定した場合、基板の搬送にかかる時間が長くなり、基板処理装置の処理能力を上げることが出来ない。   Also, in a substrate transfer robot that transfers a substrate simply by placing it on the substrate transfer robot, the operation acceleration when the substrate transfer robot is stopped or stopped is compared with the operation acceleration at which the substrate placed on the substrate transfer robot slides. If the value is set with a sufficient margin, the time required for transporting the substrate becomes long, and the processing capability of the substrate processing apparatus cannot be increased.

本発明の課題は、より正確な搬送位置ティーチングや、基板搬送ロボット及び処理室内の基板把持装置の水平確認、調整、及び基板搬送ロボット上に載置された基板が滑り出す基板搬送ロボットの動作加速度測定を、効率的に行うことができる設置・搬送情報教示治具及び教示方法を提供することである。   An object of the present invention is to provide more accurate transfer position teaching, horizontal confirmation and adjustment of a substrate transfer robot and a substrate gripping device in a processing chamber, and measurement of motion acceleration of a substrate transfer robot on which a substrate placed on the substrate transfer robot slides. Is to provide an installation / conveyance information teaching jig and a teaching method capable of efficiently performing the above.

本発明の第１の視点に係る設置・搬送情報教示治具は、板状の処理対象を把持するための把持手段と、該把持手段に該処理対象を搬送するための搬送手段と、該搬送手段が該把持手段に該処理対象を搬送するときの動作を制御するための搬送動作制御手段とを有する処理装置に対し、処理対象の設置・搬送情報を取得、教示するための設置・搬送情報教示治具であって、加速度検出器と、該加速度検出器を支持する支持板と、該加速度検出器に加わる重力加速度又は動作加速度を電気信号に変換して通信する通信手段と、該通信手段から通信される電気信号を処理し、得られる該設置・搬送情報を表示、出力する制御手段とを含むことを特徴とする。   An installation / conveyance information teaching jig according to a first aspect of the present invention includes a gripping unit for gripping a plate-like processing target, a transporting unit for transporting the processing target to the gripping unit, and the transporting Installation / conveying information for obtaining and teaching processing target installation / conveyance information to a processing apparatus having a conveying operation control means for controlling the operation when the means conveys the processing object to the gripping means. A teaching jig, an acceleration detector, a support plate for supporting the acceleration detector, a communication means for converting a gravitational acceleration or an operation acceleration applied to the acceleration detector into an electrical signal, and a communication means, and the communication means And a control means for processing the electrical signal communicated from and displaying and outputting the obtained installation / conveyance information.

本発明に係る設置・搬送情報教示治具は、前記加速度検出器が３軸方向それぞれの加速度を検出でき、それを２個以上有することが好ましい。   In the installation / conveyance information teaching jig according to the present invention, it is preferable that the acceleration detector can detect the acceleration in each of the three axial directions and has two or more of them.

さらに本発明に係る設置・搬送情報教示治具は、前記支持板が、前記板状の処理対象を模擬した形状、寸法、材質を有することが好ましい。もちろん、処理対象自体を支持板として用いることが可能である。   Furthermore, in the installation / conveyance information teaching jig according to the present invention, it is preferable that the support plate has a shape, a dimension, and a material simulating the plate-like processing target. Of course, the processing target itself can be used as a support plate.

さらに本発明に係る設置・搬送情報教示治具は、特に前記把持手段及び搬送手段が密閉された室内に設置されている場合に好ましく適用できる。   Furthermore, the installation / conveyance information teaching jig according to the present invention can be preferably applied particularly when the gripping means and the conveyance means are installed in a sealed room.

また、本発明の第２の視点に係る設置・搬送情報教示方法は、加速度検出器と、該加速度検出器を支持する支持板と、該加速度検出器に加わる重力加速度又は動作加速度を電気信号に変換して通信する通信手段と、該通信手段から通信される電気信号を処理し、得られる設置・搬送情報を表示、出力する制御手段とを含む設置・搬送情報教示治具を、搬送手段によって回転機構を有する把持手段に搬送、把持、回転させることにより、処理対象の把持位置ずれ量を取得、教示することを特徴とする。なお、ここでいう「搬送手段」、「把持手段」及び「処理対象」とは、上記段落００２１に記載したような処理装置が有する搬送手段及び把持手段と、その処理装置が処理する処理対象を意味する。   In addition, the installation / conveyance information teaching method according to the second aspect of the present invention uses an acceleration detector, a support plate for supporting the acceleration detector, and gravitational acceleration or motion acceleration applied to the acceleration detector as an electrical signal. An installation / conveyance information teaching jig including a communication means that converts and communicates, and a control means that processes electrical signals communicated from the communication means and displays and outputs the obtained installation / conveyance information. The gripping position deviation amount to be processed is acquired and taught by conveying, gripping, and rotating the gripping means having a rotation mechanism. The “conveying means”, “gripping means”, and “processing target” referred to here are the conveying means and gripping means included in the processing apparatus as described in the above paragraph 0021 and the processing target processed by the processing apparatus. means.

また、本発明の第３の視点に係る設置・搬送情報教示方法は、加速度検出器と、該加速度検出器を支持する支持板と、該加速度検出器に加わる重力加速度又は動作加速度を電気信号に変換して通信する通信手段と、該通信手段から通信される電気信号を処理し、得られる設置・搬送情報を表示、出力する制御手段とを含む設置・搬送情報教示治具を、搬送手段又は把持手段に把持させることにより、該搬送手段又は該把持手段の水平度を取得、教示することを特徴とする。なお、ここでいう「搬送手段」及び「把持手段」とは、上記段落００２１に記載したような処理装置が有する搬送手段及び把持手段を意味する。   The installation / conveyance information teaching method according to the third aspect of the present invention includes an acceleration detector, a support plate for supporting the acceleration detector, and gravitational acceleration or motion acceleration applied to the acceleration detector as an electrical signal. An installation / conveyance information teaching jig including a communication means that converts and communicates, and a control means that processes electrical signals communicated from the communication means and displays and outputs the obtained installation / conveyance information. It is characterized by acquiring and teaching the level of the conveying means or the gripping means by causing the gripping means to grip. Here, “conveying means” and “gripping means” mean conveying means and gripping means included in the processing apparatus as described in paragraph 0021 above.

また、本発明の第４の視点に係る設置・搬送情報教示方法は、加速度検出器と、該加速度検出器を支持する支持板と、該加速度検出器に加わる重力加速度又は動作加速度を電気信号に変換して通信する通信手段と、該通信手段から通信される電気信号を処理し、得られる設置・搬送情報を表示、出力する制御手段とを含む設置・搬送情報教示治具を、搬送手段で搬送させることにより、処理対象の滑りの有無を取得、教示することを特徴とする。なお、ここでいう「搬送手段」及び「処理対象」とは、上記段落００２１に記載したような処理装置が有する搬送手段と、その処理装置が処理する処理対象を意味する。   The installation / conveyance information teaching method according to the fourth aspect of the present invention is an acceleration signal, a support plate for supporting the acceleration detector, and gravitational acceleration or motion acceleration applied to the acceleration detector as an electrical signal. An installation / conveyance information teaching jig including a communication means that converts and communicates, and a control means that processes electrical signals communicated from the communication means and displays and outputs the obtained installation / conveyance information. It is characterized by acquiring and teaching the presence or absence of the slip of the processing object by conveying. Here, “conveying means” and “processing object” mean the conveying means included in the processing apparatus as described in the above paragraph 0021 and the processing object processed by the processing apparatus.

また、本発明に係る設置・搬送情報教示方法は、特に前記把持手段及び搬送手段が密閉された室内に設置されている場合に好ましく適用できる。   The installation / conveyance information teaching method according to the present invention can be preferably applied particularly when the gripping means and the conveyance means are installed in a sealed room.

さらに、本発明の第５の視点に係るティーチング方法は、板状の処理対象を把持するための把持手段と、該把持手段に該処理対象を搬送するための搬送手段と、該搬送手段が該把持手段に該処理対象を搬送するときの動作を制御するための搬送動作制御手段とを有する処理装置の該搬送動作制御手段に、加速度検出器と、該加速度検出器を支持する支持板と、該加速度検出器に加わる重力加速度又は動作加速度を電気信号に変換して通信する通信手段と、該通信手段から通信される電気信号を処理し、得られる設置・搬送情報を表示、出力する制御手段とを含む設置・搬送情報教示治具によって得られる該設置・搬送情報を教示することを特徴とする。   Furthermore, the teaching method according to the fifth aspect of the present invention includes a gripping means for gripping a plate-like processing target, a transporting means for transporting the processing target to the gripping means, and An acceleration detector, a support plate for supporting the acceleration detector, and a transfer plate for supporting the acceleration detector in the transfer operation control unit of the processing apparatus having a transfer operation control unit for controlling an operation when transferring the processing target to the gripping unit, Communication means for converting gravitational acceleration or motion acceleration applied to the acceleration detector into an electrical signal for communication, and control means for processing the electrical signal communicated from the communication means and displaying and outputting the obtained installation / transport information The installation / conveyance information teaching jig includes the installation / conveyance information obtained.

また、本発明に係るティーチング方法は、特に前記把持手段及び搬送手段が密閉された室内に設置されている場合に好ましく適用できる。   Further, the teaching method according to the present invention can be preferably applied particularly when the gripping means and the conveying means are installed in a sealed room.

本発明の設置・搬送情報教示治具を用いた設置・搬送情報教示方法により、搬送手段及び把持手段、特に密閉された室内に設置された搬送手段及び把持手段の水平調整が、人の感覚に依存することなく、精度良く、かつ再現性良く確認・調整することができるとともに、搬送手段上での基板の滑りの有無が、精度良く確認することができ、基板の滑りが発生しない動作加速度に容易に設定できる。また、本発明のティーチング方法により、処理対象の搬送位置の確認・調整を精度良く、かつ再現性良く行うことができる。さらに、基板処理室や基板搬送室等を開放することがないため、確認後の装置復旧時間が短く、基板処理室開放による異物の進入を防ぐことができる。   By the installation / conveying information teaching method using the installation / conveying information teaching jig of the present invention, the horizontal adjustment of the conveying means and the gripping means, particularly the conveying means and the gripping means installed in a sealed room, can be made to human sense. It is possible to check and adjust with high accuracy and reproducibility without depending on it, and it is possible to check accurately whether or not the substrate slips on the transport means, and the operation acceleration that does not cause the substrate to slide is achieved. Easy to set. In addition, the teaching method of the present invention enables confirmation and adjustment of the conveyance position to be processed with high accuracy and reproducibility. Furthermore, since the substrate processing chamber, the substrate transfer chamber, and the like are not opened, the apparatus restoration time after confirmation is short, and entry of foreign matter due to the opening of the substrate processing chamber can be prevented.

次に、本発明の典型的な実施形態について図面を参照して詳細に説明する。   Next, exemplary embodiments of the present invention will be described in detail with reference to the drawings.

図１は、本発明に係る設置・搬送情報教示治具６の典型的な実施形態を示す構成図である。構成は、重力加速度及び動作加速度を検出する４個の３軸加速度センサ（４ａ、４ｂ、４ｃ、４ｄ）、各３軸加速度センサ（４ａ、４ｂ、４ｃ、４ｄ）を固定する支持板２、各３軸加速度センサ（４ａ、４ｂ、４ｃ、４ｄ）の出力を制御部１へ送る通信手段（無線通信ブロック）５、無線通信ブロック５から送られた加速度情報を受信し、信号処理し、各種情報を表示、出力する制御部１からなる。   FIG. 1 is a configuration diagram showing a typical embodiment of an installation / conveyance information teaching jig 6 according to the present invention. The configuration includes four triaxial acceleration sensors (4a, 4b, 4c, 4d) for detecting gravitational acceleration and motion acceleration, a support plate 2 for fixing each triaxial acceleration sensor (4a, 4b, 4c, 4d), Communication means (wireless communication block) 5 that sends the output of the three-axis acceleration sensor (4a, 4b, 4c, 4d) to the control unit 1, receives acceleration information sent from the wireless communication block 5, performs signal processing, and various information The control unit 1 displays and outputs.

この治具は、板状の処理対象（本実施形態においては半導体ウェハ等の基板）の搬送手段及び把持手段を含む処理装置に対して用いられるものである。特に、半導体ウェハ等の基板を処理する、通常密閉（又は真空密閉）された室内に設置された搬送手段及び把持手段を含む処理装置に好ましく用いることができる。   This jig is used for a processing apparatus including a conveying unit and a gripping unit for a plate-shaped processing target (a substrate such as a semiconductor wafer in the present embodiment). In particular, it can be preferably used for a processing apparatus including a transfer means and a gripping means installed in a normally sealed (or vacuum-sealed) room for processing a substrate such as a semiconductor wafer.

支持板２は、３軸加速度センサを支持できるものであれば特に形状、寸法、材質等を問わないが、板状の処理対象である基板の搬送手段及び把持手段により把持されるものでなければならない。また、各手段の水平度及び搬送手段上での基板の滑りの有無を検出する必要があるため、基板の形状、寸法、材質（摩擦係数）等を模擬したものが好ましい。もちろん基板そのものを用いることが最適である。   The support plate 2 is not particularly limited in shape, size, material, etc. as long as it can support the three-axis acceleration sensor. However, the support plate 2 must be gripped by the transport means and grip means for the substrate that is the plate-like processing target. Don't be. Further, since it is necessary to detect the level of each means and the presence or absence of slippage of the substrate on the conveying means, it is preferable to simulate the shape, dimensions, material (friction coefficient), etc. of the substrate. Of course, it is optimal to use the substrate itself.

４個の３軸加速度センサ（４ａ、４ｂ、４ｃ、４ｄ）は、支持板２の中心点３で直交する２本の中心線（２点鎖線で図示）と、支持板２の中心点３を中心として、支持板２の半径より小さい任意の半径を持つ円（点線で図示）との交点に固定する。なお、図示の固定位置に限定するものではない。   The four triaxial acceleration sensors (4a, 4b, 4c, 4d) include two center lines orthogonal to each other at the center point 3 of the support plate 2 (shown by a two-dot chain line) and the center point 3 of the support plate 2. The center is fixed at the intersection with a circle (shown by a dotted line) having an arbitrary radius smaller than the radius of the support plate 2. Note that the present invention is not limited to the illustrated fixed position.

また、使用する３軸加速度センサの数は４個と限定するものではない。例えば、搬送手段及び把持装置の水平測定や、搬送手段上での基板の滑りの有無検出は１個の３軸加速度センサで実施可能である。ただし、基板搬送位置のずれ量検出は、少なくとも２個の３軸加速度センサが必要となる。１個だと、搬送位置での回転中心と加速度センサとの距離が、支持板２の中心点と加速度センサとの距離に偶然一致する可能性があるからである。従って、２個以上の３軸加速度センサを使用することが好ましい。   Further, the number of triaxial acceleration sensors to be used is not limited to four. For example, the horizontal measurement of the conveying means and the gripping device and the presence / absence detection of the substrate on the conveying means can be performed by one three-axis acceleration sensor. However, at least two three-axis acceleration sensors are required to detect the shift amount of the substrate transfer position. If there is one, the distance between the rotation center at the transport position and the acceleration sensor may coincide with the distance between the center point of the support plate 2 and the acceleration sensor. Therefore, it is preferable to use two or more triaxial acceleration sensors.

３軸加速度センサ（４ａ、４ｂ、４ｃ、４ｄ）は、静止時は、Ｘ軸、Ｙ軸、Ｚ軸方向の３軸方向への重力加速度の大きさを電気信号に変えて出力し、移動時は、Ｘ軸、Ｙ軸、Ｚ軸方向の３軸方向への動作加速度の大きさを電気信号に変えて出力する。従って、加速度センサは１軸センサよりも３軸センサのほうが好ましい。なお、Ｘ、Ｙ軸は水平面内にとり、Ｚ軸は鉛直方向にとって説明する。   The three-axis acceleration sensor (4a, 4b, 4c, 4d) outputs the magnitude of gravitational acceleration in the three-axis directions of the X-axis, Y-axis, and Z-axis directions as an electric signal when stationary, and when moving Outputs the magnitude of the motion acceleration in the three-axis directions of the X-axis, Y-axis, and Z-axis directions into electric signals. Therefore, the acceleration sensor is preferably a three-axis sensor rather than a one-axis sensor. The X and Y axes are in the horizontal plane and the Z axis is in the vertical direction.

無線通信ブロック５は、前述の３軸加速度センサ（４ａ、４ｂ、４ｃ、４ｄ）が出力した電気信号を無線通信によって制御部１へ送信する。なお、図１では３軸加速度センサ（４ａ、４ｂ、４ｃ、４ｄ）と無線通信ブロック５とが別々に設置されているが、加速度センサと通信手段とを一体化したものを用いても良い。   The wireless communication block 5 transmits the electrical signal output from the above-described three-axis acceleration sensor (4a, 4b, 4c, 4d) to the control unit 1 by wireless communication. In FIG. 1, the three-axis acceleration sensor (4a, 4b, 4c, 4d) and the wireless communication block 5 are separately installed, but an integrated acceleration sensor and communication means may be used.

制御部１は、無線通信ブロック５から送られた電気信号を受信し、以下のような信号処理を行う。   The control unit 1 receives the electrical signal sent from the wireless communication block 5 and performs the following signal processing.

（実施例１、搬送手段の傾きを調整する場合）
図２に、本発明に係る設置・搬送情報教示治具６を用いて、搬送手段（基板搬送ロボット１０）の傾きを調整する一実施例を示す。図２は基板搬送ロボット１０上に設置・搬送情報教示治具６を載置した状態を示し、（ａ）はその上面図、（ｂ）は側面図である。本実施例に係る基板搬送ロボット１０は、水平多関節型搬送ロボットであり、真空室内での半導体用基板の搬送によく用いられる。なお、搬送手段には基板を固定する把持機構を有していても、有していなくても良い。 (Example 1, when adjusting the inclination of the conveying means)
FIG. 2 shows an embodiment in which the inclination of the transfer means (substrate transfer robot 10) is adjusted using the installation / transfer information teaching jig 6 according to the present invention. 2A and 2B show a state where the installation / transfer information teaching jig 6 is placed on the substrate transfer robot 10, wherein FIG. 2A is a top view and FIG. 2B is a side view. The substrate transfer robot 10 according to the present embodiment is a horizontal articulated transfer robot and is often used for transferring a semiconductor substrate in a vacuum chamber. Note that the transport unit may or may not have a gripping mechanism for fixing the substrate.

設置・搬送情報教示治具６を、基板搬送ロボット１０で保持する。この時（静止状態）の４個の３軸加速度センサ（４ａ、４ｂ、４ｃ、４ｄ）の出力は、設置・搬送情報教示治具６が水平な場合、Ｘ軸方向、Ｙ軸方向への出力は０であり、Ｚ軸方向への出力（重力加速度）は、全て同じとなる。設置・搬送情報教示治具６が傾いていた場合、Ｘ軸方向、Ｙ軸方向、Ｚ軸方向、それぞれの出力が４個の３軸加速度センサ（４ａ、４ｂ、４ｃ、４ｄ）で同じになる。制御部は、Ｘ軸方向、Ｙ軸方向、Ｚ軸方向の出力から、傾きの方向と傾き量を演算して表示する。この演算結果を基に、これらの演算結果が所望の値以下となるように手動又は自動で傾きを調整することができる。以下に説明する基板把持装置についても同様である。   The installation / transfer information teaching jig 6 is held by the substrate transfer robot 10. The outputs of the four triaxial acceleration sensors (4a, 4b, 4c, 4d) at this time (stationary state) are output in the X axis direction and the Y axis direction when the installation / transport information teaching jig 6 is horizontal. Is 0, and the outputs in the Z-axis direction (gravity acceleration) are all the same. When the installation / conveyance information teaching jig 6 is inclined, the outputs in the X-axis direction, the Y-axis direction, and the Z-axis direction are the same for the four three-axis acceleration sensors (4a, 4b, 4c, 4d). . The control unit calculates and displays a tilt direction and a tilt amount from outputs in the X-axis direction, the Y-axis direction, and the Z-axis direction. Based on the calculation results, the inclination can be adjusted manually or automatically so that these calculation results are equal to or less than a desired value. The same applies to the substrate gripping apparatus described below.

（実施例２、回転機構を有する把持手段に対する搬送位置ずれを調整する場合）
図３に、本発明に係る設置・搬送情報教示治具６を用いて、基板搬送位置ずれを調整する一実施例を示す。本実施例においては、把持手段（基板把持装置）は、スピンモーター２１と、その先端部にあって基板を把持できる真空吸着部から構成されている。なお、把持方式は真空吸着方式に限られない。基板処理カップ２０は、例えば基板の洗浄処理を行う場合に用いられる。図３は、真空吸着部に設置・搬送情報教示治具６を把持させた状態を示し、（ａ）はその上面図、（ｂ）は側面図（一部断面図）である。 (Embodiment 2, when adjusting the transfer position deviation with respect to the gripping means having a rotation mechanism)
FIG. 3 shows an embodiment for adjusting the substrate transfer position deviation using the installation / transfer information teaching jig 6 according to the present invention. In the present embodiment, the gripping means (substrate gripping device) is composed of a spin motor 21 and a vacuum suction unit at the tip of the motor that can grip the substrate. The gripping method is not limited to the vacuum suction method. The substrate processing cup 20 is used, for example, when performing a substrate cleaning process. 3A and 3B show a state in which the installation / conveyance information teaching jig 6 is gripped by the vacuum suction portion, where FIG. 3A is a top view and FIG. 3B is a side view (partially sectional view).

スピンモーター２１の先端部に設置された真空吸着部へ、基板搬送ロボット１０を用いて本発明に係る設置・搬送情報教示治具６を搬送、把持させた後、任意の回転速度でスピンモーター２１を回転させる。この時、４個の３軸加速度センサには基板の中心から外側へ向かって遠心力が加わる。スピンモーター２１の回転中心と、設置・搬送情報教示治具６の中心がずれた状態で設置・搬送情報教示治具６を把持した場合、スピンモーター２１の回転中心から４個の３軸加速度センサまでの距離に差が生じる。遠心力は、回転中心から離れるほど大きくなる為、スピンモーター２１の回転中心から遠くなる３軸加速度センサの出力が大きくなる。制御部は、上記実施例１の基板の傾きを求める場合と同様に、３軸加速度センサが出力するＸ軸、Ｙ軸、Ｚ軸方向のそれぞれの動作加速度の差から、位置ずれ方向とずれ量を演算して表示する。このずれ量を教示情報として基板処理装置の搬送動作制御手段に自動又は手動で入力することにより、基板搬送ロボットの搬送位置座標の調整を行うことができる。   After the installation / transport information teaching jig 6 according to the present invention is transported and gripped by the substrate transport robot 10 to the vacuum suction section installed at the tip of the spin motor 21, the spin motor 21 is rotated at an arbitrary rotational speed. Rotate. At this time, centrifugal force is applied to the four triaxial acceleration sensors from the center of the substrate to the outside. When the installation / conveyance information teaching jig 6 is gripped in a state where the center of rotation of the spin motor 21 is shifted from the center of the installation / conveyance information teaching jig 6, four three-axis acceleration sensors from the rotation center of the spin motor 21. There is a difference in distance. Since the centrifugal force increases as the distance from the rotation center increases, the output of the triaxial acceleration sensor that is far from the rotation center of the spin motor 21 increases. As in the case of obtaining the substrate inclination in the first embodiment, the control unit determines the displacement direction and the displacement amount based on the difference in motion acceleration in the X-axis, Y-axis, and Z-axis directions output from the 3-axis acceleration sensor. Is calculated and displayed. By inputting this deviation amount as teaching information to the transfer operation control means of the substrate processing apparatus automatically or manually, the transfer position coordinates of the substrate transfer robot can be adjusted.

（実施例３、搬送手段で基板が滑らない加速度を確認する場合）
例えば真空吸着等により基板を固定する把持機構を持たない基板搬送ロボット１０上に、本発明に係る設置・搬送情報教示治具６を載置し、基板搬送ロボット１０を動作させる。この時、設置・搬送情報教示治具６上の３軸加速度センサは、移動方向に応じた動作加速度を出力する。制御部１では、３軸加速度センサに加わるＸ軸方向、Ｙ軸方向、Ｚ軸方向の加速度の推移を電圧アナログ信号として出力する。 (Example 3, when confirming the acceleration at which the substrate does not slip by the transport means)
For example, the installation / transfer information teaching jig 6 according to the present invention is placed on the substrate transfer robot 10 that does not have a gripping mechanism for fixing the substrate by vacuum suction or the like, and the substrate transfer robot 10 is operated. At this time, the triaxial acceleration sensor on the installation / conveyance information teaching jig 6 outputs an operation acceleration corresponding to the moving direction. In the control unit 1, the transition of acceleration in the X-axis direction, Y-axis direction, and Z-axis direction applied to the 3-axis acceleration sensor is output as a voltage analog signal.

設置・搬送情報教示治具６にもっとも大きな慣性力が働くのは、基板搬送ロボット１０の動作開始、動作停止時であり、その時の設置・搬送情報教示治具６の加速度と、基板搬送ロボット１０の制御信号から計算される動作加速度の推移に相違が有るとき、それは設置・搬送情報教示治具６が滑った事を意味する。基板搬送ロボット１０の動作加速度を変化させて、設置・搬送情報教示治具６と基板搬送ロボット１０の動作加速度の推移が同一となる動作加速度を求めれば、基板搬送ロボット１０上の基板が滑らないで搬送できる最大動作加速度を知ることができ、基板の位置ずれが発生しない、安全な最高速度での基板搬送加速度を搬送動作制御手段に設定することができる。   The greatest inertial force acts on the installation / transfer information teaching jig 6 when the operation of the substrate transfer robot 10 starts and stops, and the acceleration of the installation / transfer information teaching jig 6 at that time and the substrate transfer robot 10 When there is a difference in the transition of the motion acceleration calculated from the control signal, it means that the installation / transport information teaching jig 6 has slipped. If the operation acceleration of the substrate transfer robot 10 is changed to obtain an operation acceleration at which the transitions of the operation acceleration of the installation / transfer information teaching jig 6 and the substrate transfer robot 10 are the same, the substrate on the substrate transfer robot 10 does not slip. Thus, the maximum motion acceleration that can be transported can be known, and the substrate transport acceleration at a safe maximum speed that does not cause displacement of the substrate can be set in the transport operation control means.

（実施例４）
本発明の設置・搬送情報教示治具、方法の別の使用方法として、ウェハを持ち上げたり、ウェハを下げたりするときの動作速度の検知、適正化も可能である。搬送ロボットから、処理室内の把持装置へウェハを移す時、多くの装置では、ウェハの下からウェハを持ち上げ、搬送ロボットを退避、ウェハを下げて処理室内の把持装置上へ置くという動作をする。ウェハを持ち上げ、下げるという動作の速度が適正でない場合、ウェハを跳ね上げてしまうことがある。本発明の治具を使用することで、これも検出可能であり適正な動作を設定できる。特に、真空室内など外部から見えない場所でのウェハの受け渡し時の状態把握にこの治具は有効である。 Example 4
As another method of using the installation / transfer information teaching jig and method of the present invention, it is possible to detect and optimize the operation speed when the wafer is lifted or lowered. When transferring a wafer from a transfer robot to a gripping device in the processing chamber, many devices operate to lift the wafer from under the wafer, retract the transfer robot, and lower the wafer and place it on the gripping device in the processing chamber. If the speed of the operation of lifting and lowering the wafer is not appropriate, the wafer may be flipped up. By using the jig of the present invention, this can also be detected and an appropriate operation can be set. In particular, this jig is effective for grasping the state at the time of wafer transfer in a place that cannot be seen from the outside such as a vacuum chamber.

以上の実施例からも理解されるように、本発明の設置・搬送情報教示治具、方法では、従来の方法に比べて簡単に、十分な精度の調整が出来るようになる。その理由は、加速度センサに加わる遠心力が測定できるからである。通常の搬送の妨げにならないように薄く、小さい加速度センサを用いるのがよい。このセンサを搬送するもの（たとえばウェハ）に付けると、通常の搬送をし、回転させるだけで位置ズレ量の測定が可能である。さらに、実施例で説明したように水平調整、滑りの検出も可能である。   As can be understood from the above embodiments, the installation / conveyance information teaching jig and method of the present invention can be adjusted with sufficient accuracy more easily than the conventional method. This is because the centrifugal force applied to the acceleration sensor can be measured. It is preferable to use a thin and small acceleration sensor so as not to hinder normal conveyance. When this sensor is attached to an object to be transported (for example, a wafer), it is possible to measure the amount of positional deviation only by rotating it normally and rotating it. Further, as described in the embodiment, level adjustment and slip detection are possible.

また、加速度センサで検出した重力加速度や遠心力の電気信号は、無線で送る事が可能である。無線で送ることが出来るということは、密閉された処理室の中で加速度センサに掛かる荷重を、密閉された状態のままで知る事が出来る。真空処理室などは、一度開放すると、ウェハ処理開始状態に戻す為に長時間掛かってしまうが、本発明の治具を使用する事によって、測定を行う為に処理室を開放する必要がなくなる。   In addition, electrical signals of gravity acceleration and centrifugal force detected by the acceleration sensor can be sent wirelessly. The fact that it can be transmitted by radio means that the load applied to the acceleration sensor in the sealed processing chamber can be known in a sealed state. Once the vacuum processing chamber or the like is opened, it takes a long time to return to the wafer processing start state. However, by using the jig of the present invention, it is not necessary to open the processing chamber for measurement.

以上、本発明を上記実施例に即して説明したが、本発明は上記実施例の構成にのみ制限されるものでなく、本発明の範囲内で当業者であればなし得るであろう各種変形、修正を含むことは勿論である。   Although the present invention has been described with reference to the above-described embodiments, the present invention is not limited to the configurations of the above-described embodiments, and various modifications that can be made by those skilled in the art within the scope of the present invention. Of course, including modifications.

本発明に係る設置・搬送情報教示治具の実施形態を示す構成図である。It is a block diagram which shows embodiment of the installation and conveyance information teaching jig | tool which concerns on this invention. 本発明に係る設置・搬送情報教示治具を用いた傾き調整の実施例である。It is the Example of inclination adjustment using the installation and conveyance information teaching jig | tool which concerns on this invention. 本発明に係る設置・搬送情報教示治具を用いた搬送位置ずれ調整の実施例である。It is an Example of conveyance position shift adjustment using the installation and conveyance information teaching jig | tool which concerns on this invention. 従来方法による傾き調整の実施例である。It is an Example of the inclination adjustment by a conventional method. 従来技術による搬送位置ずれ調整の実施例である。It is an Example of conveyance position shift adjustment by a prior art. 従来技術による搬送位置ずれ調整の実施例である。It is an Example of conveyance position shift adjustment by a prior art.

符号の説明Explanation of symbols

１ 制御部
２ 支持板
３ 中心点
４ａ、４ｂ、４ｃ、４ｄ ３軸加速度センサ
５ 無線通信ブロック
６ 設置・搬送情報教示治具
１０ 基板搬送ロボット
２０ 基板処理カップ
２１ スピンモーター
３０ 基板
３１ 水準器
４０ センター指標付きガラスウェハ
５０ カメラステー
５１ ＣＣＤカメラ DESCRIPTION OF SYMBOLS 1 Control part 2 Support plate 3 Center point 4a, 4b, 4c, 4d 3-axis acceleration sensor 5 Wireless communication block 6 Installation and conveyance information teaching jig 10 Substrate conveyance robot 20 Substrate processing cup 21 Spin motor 30 Substrate 31 Level 40 Center Glass wafer with index 50 Camera stay 51 CCD camera

Claims (10)

板状の処理対象を把持するための把持手段と、
該把持手段に該処理対象を搬送するための搬送手段と、
該搬送手段が該把持手段に該処理対象を搬送するときの動作を制御するための搬送動作制御手段とを有する処理装置に対し、該処理対象の設置・搬送情報を取得、教示するための設置・搬送情報教示治具であって、
加速度検出器と、該加速度検出器を支持する支持板と、該加速度検出器に加わる重力加速度又は動作加速度を電気信号に変換して通信する通信手段と、該通信手段から通信される電気信号を処理し、得られる該設置・搬送情報を表示、出力する制御手段とを含むことを特徴とする、設置・搬送情報教示治具。 A gripping means for gripping a plate-like processing target;
Conveying means for conveying the processing object to the gripping means;
Installation for acquiring and teaching information about installation / conveyance of the processing target for a processing apparatus having transporting operation control means for controlling operation when the transporting means transports the processing target to the gripping means・ Transport information teaching jig,
An acceleration detector, a support plate for supporting the acceleration detector, a communication means for converting gravitational acceleration or motion acceleration applied to the acceleration detector into an electric signal, and an electric signal communicated from the communication means. And a control means for displaying and outputting the installation / conveyance information to be processed and obtained, and an installation / conveyance information teaching jig. 前記加速度検出器は３軸方向それぞれの加速度を検出でき、それを２個以上有することを特徴とする、請求項１に記載の設置・搬送情報教示治具。   The installation / conveyance information teaching jig according to claim 1, wherein the acceleration detector is capable of detecting acceleration in each of three axial directions and has two or more. 前記支持板は、前記板状の処理対象を模擬した形状、寸法、材質を有することを特徴とする、請求項１又は２に記載の設置・搬送情報教示治具。   The installation / conveyance information teaching jig according to claim 1, wherein the support plate has a shape, a size, and a material simulating the plate-like processing target. 前記把持手段及び搬送手段が密閉された室内に設置されていることを特徴とする、請求項１から３のいずれか一に記載の設置・搬送情報教示治具。   The installation / conveyance information teaching jig according to any one of claims 1 to 3, wherein the gripping means and the conveyance means are installed in a sealed room. 加速度検出器と、該加速度検出器を支持する支持板と、該加速度検出器に加わる重力加速度又は動作加速度を電気信号に変換して通信する通信手段と、該通信手段から通信される電気信号を処理し、得られる設置・搬送情報を表示、出力する制御手段とを含む設置・搬送情報教示治具を、搬送手段によって回転機構を有する把持手段に搬送、把持、回転させることにより、処理対象の把持位置ずれ量を取得、教示することを特徴とする、設置・搬送情報教示方法。   An acceleration detector, a support plate for supporting the acceleration detector, a communication means for converting gravitational acceleration or motion acceleration applied to the acceleration detector into an electric signal, and an electric signal communicated from the communication means. The installation / transport information teaching jig including the control means for processing and displaying and outputting the obtained installation / transport information is transported, gripped, and rotated by the transport means to the gripping means having the rotation mechanism. An installation / conveyance information teaching method characterized by acquiring and teaching a grip position deviation amount. 加速度検出器と、該加速度検出器を支持する支持板と、該加速度検出器に加わる重力加速度又は動作加速度を電気信号に変換して通信する通信手段と、該通信手段から通信される電気信号を処理し、得られる設置・搬送情報を表示、出力する制御手段とを含む設置・搬送情報教示治具を、搬送手段又は把持手段に把持させることにより、該搬送手段又は該把持手段の水平度を取得、教示することを特徴とする、設置・搬送情報教示方法。   An acceleration detector, a support plate for supporting the acceleration detector, a communication means for converting gravitational acceleration or motion acceleration applied to the acceleration detector into an electric signal, and an electric signal communicated from the communication means. The level of the conveying means or the gripping means is adjusted by causing the conveying means or the gripping means to grip an installation / conveying information teaching jig including a control means for processing and displaying and outputting the obtained installation / conveying information. An installation / conveyance information teaching method, characterized by acquiring and teaching. 加速度検出器と、該加速度検出器を支持する支持板と、該加速度検出器に加わる重力加速度又は動作加速度を電気信号に変換して通信する通信手段と、該通信手段から通信される電気信号を処理し、得られる設置・搬送情報を表示、出力する制御手段とを含む設置・搬送情報教示治具を、搬送手段で搬送させることにより、処理対象の滑りの有無を取得、教示することを特徴とする、設置・搬送情報教示方法。   An acceleration detector, a support plate for supporting the acceleration detector, a communication means for converting gravitational acceleration or motion acceleration applied to the acceleration detector into an electric signal, and an electric signal communicated from the communication means. The installation / transport information teaching jig including the control means for processing and displaying and outputting the obtained installation / transport information is transported by the transport means to acquire and teach the presence / absence of slipping on the processing target. The installation / transport information teaching method. 前記把持手段及び搬送手段が密閉された室内に設置されていることを特徴とする、請求項５から７のいずれか一に記載の設置・搬送情報教示方法。   The installation / conveyance information teaching method according to any one of claims 5 to 7, wherein the gripping means and the conveyance means are installed in a sealed room. 板状の処理対象を把持するための把持手段と、
該把持手段に該処理対象を搬送するための搬送手段と、
該搬送手段が該把持手段に該処理対象を搬送するときの動作を制御するための搬送動作制御手段とを有する処理装置の該搬送動作制御手段に、
加速度検出器と、該加速度検出器を支持する支持板と、該加速度検出器に加わる重力加速度又は動作加速度を電気信号に変換して通信する通信手段と、該通信手段から通信される電気信号を処理し、得られる設置・搬送情報を表示、出力する制御手段とを含む設置・搬送情報教示治具によって得られる該設置・搬送情報を教示することを特徴とする、ティーチング方法。 A gripping means for gripping a plate-like processing target;
Conveying means for conveying the processing object to the gripping means;
A transfer operation control unit of a processing apparatus having a transfer operation control unit for controlling an operation when the transfer unit transfers the processing object to the gripping unit;
An acceleration detector, a support plate for supporting the acceleration detector, a communication means for converting gravitational acceleration or motion acceleration applied to the acceleration detector into an electric signal, and an electric signal communicated from the communication means. A teaching method characterized by teaching the installation / conveyance information obtained by an installation / conveyance information teaching jig including control means for processing and displaying and outputting the obtained installation / conveyance information. 前記把持手段及び搬送手段が密閉された室内に設置されていることを特徴とする、請求項９に記載のティーチング方法。   The teaching method according to claim 9, wherein the gripping means and the conveying means are installed in a sealed room.
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