TWI847803B

TWI847803B - Wafer Storage Box

Info

Publication number: TWI847803B
Application number: TW112126985A
Authority: TW
Inventors: 陳延方
Original assignee: 鼎洲科技股份有限公司
Filing date: 2023-07-19
Publication date: 2024-07-01

Abstract

一種晶圓儲存盒包含一盒體、一蓋體及一晶圓保持器。該盒體界定出一容置空間供該承載架放置。該蓋體樞接於該盒體，並包括一頂壁及多個形成於該頂壁底面的定位柱。該等定位柱形成於該頂壁底面中央且排列成上下左右完全對稱的圖形。該晶圓保持器可拆卸地設置該蓋體的頂壁底面，並包括一基壁、兩個分別自該基壁兩相反側向下延伸並適用於抵接晶圓的延伸壁，及多個形成於該基壁頂面的接合柱，該等接合柱形成於基壁頂面中央且排列成上下左右完全對稱的圖形，以能分別對應接合該等定位柱，使該晶圓保持器在設置於該蓋體時能在一橫向狀態與一直向狀態間轉換。A wafer storage box includes a box body, a cover body and a wafer holder. The box body defines a containing space for the carrier to be placed. The cover body is hinged to the box body and includes a top wall and a plurality of positioning posts formed on the bottom surface of the top wall. The positioning posts are formed in the center of the bottom surface of the top wall and arranged in a completely symmetrical pattern from top to bottom and from left to right. The wafer holder is detachably mounted on the bottom surface of the top wall of the cover body, and includes a base wall, two extension walls extending downward from opposite sides of the base wall and suitable for abutting the wafer, and a plurality of engagement posts formed on the top surface of the base wall. The engagement posts are formed in the center of the top surface of the base wall and are arranged in a completely symmetrical pattern in the upper and lower directions and the left and right directions, so that the positioning posts can be respectively engaged, so that the wafer holder can be switched between a horizontal state and a vertical state when it is set on the cover body.

Description

晶圓儲存盒Wafer Storage Box

本發明是有關於一種儲存盒，特別是指一種用於儲存晶圓的晶圓儲存盒。 The present invention relates to a storage box, in particular to a wafer storage box for storing wafers.

為了確保晶圓的安全儲存、運輸、搬運，晶圓儲存盒被廣泛地運用作為晶圓的承載及運輸工具。然而，現有的晶圓儲存盒通常只能對應存放單一尺寸的晶圓，如要放置另一尺寸的晶圓，必須使用另外的晶圓儲存盒，導致購買晶圓儲存盒的成本增加。 In order to ensure the safe storage, transportation and handling of wafers, wafer storage boxes are widely used as wafer carriers and transport tools. However, existing wafer storage boxes can usually only store wafers of a single size. If wafers of another size are to be placed, another wafer storage box must be used, resulting in an increase in the cost of purchasing wafer storage boxes.

因此，本發明之一目的，即在提供一種可放置不同尺寸晶圓且能避免晶圓震動或晃動的晶圓儲存盒。 Therefore, one of the purposes of the present invention is to provide a wafer storage box that can hold wafers of different sizes and prevent the wafers from vibrating or shaking.

於是，本發明晶圓儲存盒適用於供一承載架放置，該承載架適用於承載多個晶圓，該晶圓儲存盒並包含一盒體、一蓋體，及一晶圓保持器。該盒體包括一底壁，及一自該底壁周緣向上延伸的第一圍壁，該底壁與第一圍壁共同界定出一容置空間供該承載架放置。該蓋體樞接於該第一圍壁，並包括一頂壁，及多個形成於該頂壁底面的定位柱，該等定位柱形成於該頂壁底面中央且排列成上下左右完全對稱的圖形。該晶圓保持器可拆卸地設置該蓋體的頂壁底面，並包括一基壁、兩個分別自該基壁兩相反側向下延伸並適用於抵接該等晶圓的延伸壁，及多個形成於該基壁頂面的接合柱，該等接合柱形成於基壁頂面中央且排列成上下左右完全對稱的圖形，以能分別對應接合該等定位柱，使該晶圓保持器在設置於該蓋體時能在一橫向狀態與一直向狀態間轉換。 Therefore, the wafer storage box of the present invention is suitable for placing a carrier, and the carrier is suitable for carrying multiple wafers. The wafer storage box includes a box body, a cover body, and a wafer holder. The box body includes a bottom wall and a first surrounding wall extending upward from the periphery of the bottom wall. The bottom wall and the first surrounding wall together define a containing space for the carrier to be placed. The cover body is hinged to the first surrounding wall and includes a top wall and a plurality of positioning posts formed on the bottom surface of the top wall. The positioning posts are formed in the center of the bottom surface of the top wall and arranged in a completely symmetrical pattern from top to bottom and from left to right. The wafer holder is detachably mounted on the bottom surface of the top wall of the cover, and includes a base wall, two extension walls extending downward from opposite sides of the base wall and suitable for contacting the wafers, and a plurality of engagement posts formed on the top surface of the base wall. The engagement posts are formed in the center of the top surface of the base wall and arranged in a completely symmetrical pattern in the upper and lower directions, so as to respectively correspond to and engage with the positioning posts, so that the wafer holder can be switched between a horizontal state and a vertical state when it is mounted on the cover.

在一些實施態樣中，該等定位柱的數量為四個且排列成一第一正方形，該等接合柱的數量為四個且排列成一第二正方形。 In some embodiments, the number of the positioning posts is four and they are arranged in a first square, and the number of the engagement posts is four and they are arranged in a second square.

本發明具有以下功效：藉由該蓋體的定位柱與該晶圓保持器的接合柱相配合，使不同態樣的該晶圓保持器安裝於該晶圓儲存盒的蓋體時可在直向狀態與橫向狀態間轉換，因此不論該晶圓儲存盒中放入讓晶圓直向排列的承載架還是放入讓晶圓橫向排列的承載架，該蓋體蓋合於該盒體時，該晶圓保持器的延伸壁皆能抵接於該等晶圓，防止晶圓因震動或晃動而損壞。 The invention has the following effects: by cooperating with the positioning column of the cover and the engagement column of the wafer holder, the wafer holder of different forms can be switched between the vertical state and the horizontal state when installed on the cover of the wafer storage box. Therefore, no matter whether the wafer storage box is placed with a carrier that allows the wafers to be arranged vertically or a carrier that allows the wafers to be arranged horizontally, when the cover is closed on the box, the extension wall of the wafer holder can abut against the wafers to prevent the wafers from being damaged due to vibration or shaking.

100:晶圓儲存盒 100: Wafer storage box

1:盒體 1: Box body

11:底壁 11: Bottom wall

12:第一圍壁 12: First wall

121:第一側壁部 121: First side wall portion

122:第二側壁部 122: Second side wall portion

13:容置空間 13: Storage space

2:蓋體 2: Cover

21:頂壁 21: Top wall

22:第二圍壁 22: Second Wall

23:定位柱 23: Positioning column

3:晶圓保持器 3: Wafer holder

31:基壁 31: Base wall

32:延伸壁 32: Extension wall

33:接合柱 33:Joint column

8:承載架 8: Carrier frame

9:晶圓 9: Wafer

本發明之其他的特徵及功效，將於參照圖式的實施方式中清楚地呈現，其中：圖1是本發明晶圓儲存盒的一實施例放入一承載架且該承載架上的多個晶圓與該實施例的一晶圓保持器是呈橫向排列的一立體圖；圖2是該實施例的一蓋體的一仰視圖；圖3是沿圖2中的III-III線所取的一剖視圖；圖4是該晶圓保持器的一俯視圖；圖5是沿圖4中的V-V線所取的一剖視圖；及圖6是該實施例放入一承載架且該承載架上的多個晶圓與該晶圓保持器是呈直向排列的一立體圖。 Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, wherein: FIG. 1 is a three-dimensional view of an embodiment of the wafer storage box of the present invention placed in a carrier and multiple wafers on the carrier and a wafer holder of the embodiment are arranged horizontally; FIG. 2 is a bottom view of a cover of the embodiment; FIG. 3 is a cross-sectional view taken along line III-III in FIG. 2; FIG. 4 is a top view of the wafer holder; FIG. 5 is a cross-sectional view taken along line V-V in FIG. 4; and FIG. 6 is a three-dimensional view of the embodiment placed in a carrier and multiple wafers on the carrier and the wafer holder are arranged vertically.

在本發明被詳細描述之前，應當注意在以下的說明內容中，類似的元件是以相同的編號來表示。 Before the present invention is described in detail, it should be noted that similar components are represented by the same numbers in the following description.

參閱圖1至圖3，本發明晶圓儲存盒100之一實施例，適用於供一承載架8放置，該承載架8適用於承載多個晶圓9。晶圓9可至少為兩種態樣，一種為4.5英吋方片晶圓9，另一種為6英吋圓片晶圓9(見圖6)。該承載架8可至少為兩種態樣，一種為4.5英吋晶圓承載架8，另一種為6英吋晶圓承載架8(見圖6)。晶圓尺寸、外觀不以上述為限，承載架的態樣也不以上述為限。 Referring to Figures 1 to 3, an embodiment of the wafer storage box 100 of the present invention is suitable for placing a carrier 8, and the carrier 8 is suitable for carrying multiple wafers 9. The wafer 9 can be in at least two forms, one is a 4.5-inch square wafer 9, and the other is a 6-inch round wafer 9 (see Figure 6). The carrier 8 can be in at least two forms, one is a 4.5-inch wafer carrier 8, and the other is a 6-inch wafer carrier 8 (see Figure 6). The wafer size and appearance are not limited to the above, and the form of the carrier is not limited to the above.

該晶圓儲存盒100包含一盒體1、一蓋體2，及一晶圓保持器3。該盒體1呈長方體，並包括一底壁11，及一自該底壁11周緣向上延伸的第一圍壁12。該第一圍壁12具有兩個彼此相對的第一側壁部121，及兩個彼此相對的第二側壁部122。於本實施例中，該等第一側壁部121的長度大於該等第二側壁部122的長度。該底壁11與第一圍壁12共同界定出一容置空間13供該承載架8放置。 The wafer storage box 100 includes a box body 1, a cover body 2, and a wafer holder 3. The box body 1 is a rectangular parallelepiped and includes a bottom wall 11 and a first surrounding wall 12 extending upward from the periphery of the bottom wall 11. The first surrounding wall 12 has two first side wall portions 121 opposite to each other and two second side wall portions 122 opposite to each other. In this embodiment, the length of the first side wall portions 121 is greater than the length of the second side wall portions 122. The bottom wall 11 and the first surrounding wall 12 jointly define a accommodating space 13 for the carrier 8 to be placed.

該蓋體2樞接於該第一圍壁12的其中一第一側壁部121，並包括一頂壁21、一自該頂壁21周緣向下延伸的第二圍壁22，及多個形成於該頂壁21底面的定位柱23。該等定位柱23形成於該頂壁21底面中央且排列成上下左右完全對稱的圖形。具體而言，於本實施例中，該等定位柱23的數量為四個且呈陣列排列地排列成一第一正方形S1。該等定位柱23的行數等於該等定位柱23的列數，且為二乘二的排列方式。 The cover 2 is pivoted to one of the first side wall portions 121 of the first surrounding wall 12, and includes a top wall 21, a second surrounding wall 22 extending downward from the periphery of the top wall 21, and a plurality of positioning posts 23 formed on the bottom surface of the top wall 21. The positioning posts 23 are formed in the center of the bottom surface of the top wall 21 and are arranged in a completely symmetrical pattern from top to bottom and from left to right. Specifically, in this embodiment, the number of the positioning posts 23 is four and they are arranged in an array to form a first square S1. The number of rows of the positioning posts 23 is equal to the number of columns of the positioning posts 23, and the arrangement is two by two.

配合參閱圖4與圖5，該晶圓保持器3於本實施例中有兩種態樣(見圖1與圖6)，並可拆卸地設置該蓋體2的頂壁21底面。該晶圓保持器3包括一基壁31、兩個分別自該基壁31兩相反側向下延伸並適用於抵接該等晶圓9的延伸壁32，及多個形成於該基壁31頂面的接合柱33。該等接合柱33形成於基壁31頂面中央且排列成上下左右完全對稱的圖形。具體而言，於本實施例中，該等接合柱33的數量為四個且呈陣列排列地排列成一第二正方形S2。該等接合柱33的行數等於該等接合柱33的列數，且同樣為二乘二的排列方式，以能分別對應接合該等定位柱23，並藉由二乘二的排列方式，使對應於不同尺寸的晶圓9的晶圓保持器3在設置於該蓋體2時能在一如圖1所示的橫向狀態與一如圖6所示的直向狀態間轉換。 Referring to FIG. 4 and FIG. 5 , the wafer holder 3 has two forms in this embodiment (see FIG. 1 and FIG. 6 ), and is detachably disposed on the bottom surface of the top wall 21 of the cover 2. The wafer holder 3 includes a base wall 31, two extension walls 32 extending downward from opposite sides of the base wall 31 and adapted to abut against the wafers 9, and a plurality of engagement posts 33 formed on the top surface of the base wall 31. The engagement posts 33 are formed in the center of the top surface of the base wall 31 and are arranged in a completely symmetrical pattern from top to bottom and from left to right. Specifically, in this embodiment, the number of the engagement posts 33 is four and they are arranged in an array to form a second square S2. The number of rows of the engagement posts 33 is equal to the number of columns of the engagement posts 33, and the two-by-two arrangement is also used to respectively correspond to the positioning posts 23. By the two-by-two arrangement, the wafer holder 3 corresponding to the wafers 9 of different sizes can be switched between a horizontal state as shown in FIG. 1 and a vertical state as shown in FIG. 6 when it is set on the cover 2.

在一變化的實施態樣中，該等定位柱23和該等接合柱33的數量也可以多於四個，排列方式也可不限於正方形，可以是排列成圓形或菱形或其他形狀，只要能使該晶圓保持器3安裝於該蓋體2底面時能橫向地安裝且也能直向地安裝即可。 In a modified implementation, the number of the positioning posts 23 and the engagement posts 33 may be more than four, and the arrangement is not limited to a square, but may be arranged in a circle, a diamond, or other shapes, as long as the wafer holder 3 can be installed horizontally and vertically on the bottom surface of the cover 2.

參閱圖1，當該晶圓儲存盒100放入4.5英吋的晶圓9，該承載架8是橫向地置入該容置空間13，該承載架8上的多個晶圓9是面對該第二側壁部122並沿該第一側壁部121排列，對應於4.5英吋的晶圓9的該晶圓保持器3是橫向地設置於該蓋體2底面，以能在該蓋體2蓋合於該盒體1時，該晶圓保持器3的延伸壁32能抵接於每一片晶圓9，防止晶圓9因震動或晃動而損壞 Referring to FIG. 1 , when a 4.5-inch wafer 9 is placed in the wafer storage box 100, the carrier 8 is placed horizontally in the accommodating space 13, and the multiple wafers 9 on the carrier 8 face the second side wall 122 and are arranged along the first side wall 121. The wafer holder 3 corresponding to the 4.5-inch wafer 9 is horizontally arranged on the bottom surface of the cover 2, so that when the cover 2 is covered on the box 1, the extension wall 32 of the wafer holder 3 can abut against each wafer 9 to prevent the wafer 9 from being damaged due to vibration or shaking.

參閱圖6，當該晶圓儲存盒100放入6英吋的晶圓9，該承載架8是直向地置入該容置空間13，該承載架8上的多個晶圓9是面對該第一側壁部121並沿該第二側壁部122排列，對應於6英吋的晶圓9的該晶圓保持器3是直向地設置於該蓋體2底面，以能在該蓋體2蓋合於該盒體1時，該晶圓保持器3的延伸壁32能抵接於每一片晶圓9，防止晶圓9因震動或晃動而損壞。 Referring to FIG. 6 , when the wafer storage box 100 is loaded with a 6-inch wafer 9, the carrier 8 is vertically placed in the accommodating space 13, and the plurality of wafers 9 on the carrier 8 face the first side wall 121 and are arranged along the second side wall 122. The wafer holder 3 corresponding to the 6-inch wafer 9 is vertically arranged on the bottom surface of the cover 2, so that when the cover 2 is closed on the box 1, the extension wall 32 of the wafer holder 3 can abut against each wafer 9 to prevent the wafer 9 from being damaged due to vibration or shaking.

綜上所述，當該晶圓儲存盒100欲放入較小片的晶圓9時，可放入面向該第二側壁部122且沿該第一側壁部121延伸的承載架8，使該等晶圓9表面是面向該第二側壁部122且沿該第一側壁部121排列；當該晶圓儲存盒100欲放入較大片的晶圓9時，可放入面向該第一側壁部121且沿第二側壁部122延伸的承載架8，使該等晶圓9表面是面向該第一側壁部121且沿該第二側壁部122排列；此外，該晶圓儲存盒100可因應晶圓9不同的排列方向而置換不同態樣的該晶圓保持器3在直向狀態與橫向狀態間轉換，確保晶圓9在不同的排列方向時晶圓保持器3的延伸壁32皆能抵接於該等晶圓9，防止晶圓9因震動或晃動而損壞，故確實能達成本發明之目的。 In summary, when the wafer storage box 100 is to be loaded with smaller wafers 9, the carrier 8 facing the second side wall 122 and extending along the first side wall 121 can be loaded, so that the surfaces of the wafers 9 face the second side wall 122 and are arranged along the first side wall 121; when the wafer storage box 100 is to be loaded with larger wafers 9, the carrier 8 facing the first side wall 121 and extending along the second side wall 122 can be loaded, so that the surfaces of the wafers 9 face the second side wall 122 and are arranged along the first side wall 121. The surfaces of the wafers 9 face the first side wall 121 and are arranged along the second side wall 122. In addition, the wafer storage box 100 can replace the wafer holder 3 in different states in response to different arrangement directions of the wafers 9 to switch between the vertical state and the horizontal state, ensuring that the extension wall 32 of the wafer holder 3 can abut against the wafers 9 when the wafers 9 are in different arrangement directions, preventing the wafers 9 from being damaged due to vibration or shaking, so the purpose of the present invention can be achieved.

惟以上所述者，僅為本發明之實施例而已，當不能以此限定本發明實施之範圍，凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾，皆仍屬本發明專利涵蓋之範圍內。 However, the above is only an example of the implementation of the present invention, and it cannot be used to limit the scope of the implementation of the present invention. All simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the content of the patent specification are still within the scope of the patent of the present invention.

100:晶圓儲存盒 100: Wafer storage box

1:盒體 1: Box body

11:底壁 11: Bottom wall

12:第一圍壁 12: First wall

121:第一側壁部 121: First side wall portion

122:第二側壁部 122: Second side wall portion

13:容置空間 13: Storage space

2:蓋體 2: Cover

21:頂壁 21: Top wall

22:第二圍壁 22: Second Wall

3:晶圓保持器 3: Wafer holder

31:基壁 31: Base wall

32:延伸壁 32: Extension wall

8:承載架 8: Carrier frame

9:晶圓 9: Wafer

Claims

一種晶圓儲存盒，適用於供一承載架放置，該承載架適用於承載多個晶圓，該晶圓儲存盒並包含：一盒體，界定出一容置空間供該承載架放置；一蓋體，樞接於該盒體，並包括一頂壁，及多個形成於該頂壁底面的定位柱，該等定位柱形成於該頂壁底面中央且排列成上下左右完全對稱的圖形；一晶圓保持器，可拆卸地設置該蓋體的頂壁底面，並包括一基壁、兩個分別自該基壁兩相反側向下延伸並適用於抵接該等晶圓的延伸壁，及多個形成於該基壁頂面的接合柱，該等接合柱形成於基壁頂面中央且排列成上下左右完全對稱的圖形，以能分別對應接合該等定位柱，使該晶圓保持器在設置於該蓋體時能在一橫向狀態與一直向狀態間轉換。 A wafer storage box is suitable for placing a carrier, which is suitable for carrying multiple wafers. The wafer storage box includes: A box body, which defines a storage space for the carrier; A cover body, which is hinged to the box body and includes a top wall and a plurality of positioning posts formed on the bottom surface of the top wall. The positioning posts are formed in the center of the bottom surface of the top wall and arranged in a completely symmetrical pattern from top to bottom and from left to right; A wafer holder is detachably disposed on the bottom surface of the top wall of the cover body, and includes a base wall, two extension walls extending downward from opposite sides of the base wall and suitable for abutting the wafers, and a plurality of engagement posts formed on the top surface of the base wall. The engagement posts are formed in the center of the top surface of the base wall and arranged in a completely symmetrical pattern in the upper and lower directions, so as to respectively correspond to and engage with the positioning posts, so that the wafer holder can be switched between a horizontal state and a vertical state when it is disposed on the cover body.

如請求項1所述的晶圓儲存盒，其中，該等定位柱的數量為四個且排列成一第一正方形，該等接合柱的數量為四個且排列成一第二正方形。A wafer storage box as described in claim 1, wherein the number of the positioning pillars is four and they are arranged in a first square, and the number of the bonding pillars is four and they are arranged in a second square.