TWI823259B

TWI823259B - Filmless dry photoresist exposure process

Info

Publication number: TWI823259B
Application number: TW111105854A
Authority: TW
Inventors: 李家銘
Original assignee: 李家銘
Priority date: 2022-02-17
Filing date: 2022-02-17
Publication date: 2023-11-21
Also published as: TW202335550A

Abstract

A filmless dry photoresist exposure process, comprising: forming at least one copper plated layer on a copper foil layer of a circuit substrate; forming a photoresist layer on a surface of the copper plated layer, the photoresist layer being coated on a PET film before being formed on the surface of the copper plating layer; removing the PET film; exposing the photoresist layer to make a part of the photoresist layer a reserved area and the other part a to-be-removed area; removing the photoresist layer in the to-be-removed area to expose the copper plated layer by which it originally covered; removing the exposed copper plating layer and the copper foil layer originally covered by the exposed copper plating layer with etching solution; and removing the photoresist layer in the reserved area.

Description

無膜式乾式光阻曝光製程Filmless dry photoresist exposure process

本發明是關於一種電路基板的銅層圖形化技術，特別是關於一種能減少曝光誤差的電路基板的銅層圖形化技術。The present invention relates to a copper layer patterning technology for a circuit substrate, and in particular to a copper layer patterning technology for a circuit substrate that can reduce exposure errors.

電路基板的電路圖形化處理中，經常需要對電鍍銅層進行貼附光阻、曝光、顯影、蝕刻等一系列處理，其中，貼附光阻時，光阻層通常是預先形成於一透明的載體上（例如PET膜）。在本技術領域中存在一種技術偏見在於，為了避免光阻層在曝光作業的過程受到污損，因此在曝光作業時，PET膜並不會被移除，以此保護光阻層不被刮傷或污損。In the circuit patterning process of circuit substrates, the electroplated copper layer often needs to undergo a series of processes such as attaching photoresist, exposure, development, etching, etc. Among them, when attaching photoresist, the photoresist layer is usually pre-formed on a transparent on a carrier (e.g. PET film). There is a technical bias in this technical field that in order to prevent the photoresist layer from being stained during the exposure process, the PET film is not removed during the exposure process to protect the photoresist layer from being scratched. or defaced.

然而，在現有技術中，光阻曝光作業時所使用的光束並非是理想的平行光，其光束無可避免地具有平行半角及傾斜角，並且，光束需要經過PET膜及光阻層這兩層介質，亦即，光束會產生兩次折射，從而增加了因折射而產生的曝光誤差；除此之外，由於兩介質的折射率並不同，因此也增加了光束的反射。However, in the existing technology, the light beam used in the photoresist exposure operation is not an ideal parallel light. The light beam inevitably has a parallel half-angle and an inclination angle. Moreover, the light beam needs to pass through the PET film and the photoresist layer. The medium, that is, the light beam will be refracted twice, thereby increasing the exposure error caused by refraction; in addition, because the refractive index of the two media is different, the reflection of the light beam is also increased.

有鑑於此，本發明之主要目的在於提供一種能通過降低曝光誤差的曝光製程。In view of this, the main purpose of the present invention is to provide an exposure process that can reduce exposure errors.

為了達成上述的目的，本發明提供一種無膜式乾式光阻曝光製程，包括：在一電路基板的一銅箔層上形成至少一鍍銅層；在該鍍銅層表面形成一光阻層，該光阻層被形成於該鍍銅層表面前是被塗布於一PET膜；移除該PET膜；對該光阻層進行曝光處理，使該光阻層一部份成為保留區且另一部份成為待移除區；將該待移除區的光阻層移除而裸露其原先覆蓋的所述鍍銅層；以蝕刻液移除裸露的所述鍍銅層及所述裸露的鍍銅層原先覆蓋的所述銅箔層；以及移除該保留區的光阻層。 In order to achieve the above objectives, the present invention provides a film-less dry photoresist exposure process, which includes: forming at least one copper plating layer on a copper foil layer of a circuit substrate; A photoresist layer is formed on the surface of the copper plating layer, and the photoresist layer is coated on a PET film before being formed on the surface of the copper plating layer; Remove the PET film; Exposing the photoresist layer so that part of the photoresist layer becomes the reserved area and the other part becomes the area to be removed; Remove the photoresist layer in the area to be removed and expose the copper plating layer originally covered by it; Using an etching solution to remove the exposed copper plating layer and the copper foil layer originally covered by the exposed copper plating layer; and Remove the photoresist layer from the reserved area.

本發明一改本技術領域的技術偏見，在曝光處理前即預先移除了光阻層上的PET膜，這使得曝光光束減少了額外的折射及反射，進而減少了曝光誤差，曝光誤差一旦明顯降低，即有助於實現更精細的線寬解析度。The present invention changes the technical prejudice in this technical field and pre-removes the PET film on the photoresist layer before the exposure process, which reduces additional refraction and reflection of the exposure beam, thus reducing the exposure error. Once the exposure error is obvious, Lowering it helps achieve finer linewidth resolution.

請參考第1至8圖，所繪示者是本發明的無膜式乾式光阻曝光製程的其中一實施例。Please refer to Figures 1 to 8, which illustrate one embodiment of the filmless dry photoresist exposure process of the present invention.

首先，請參考第1圖，在一電路基板10的一銅箔層11上形成至少一鍍銅層12，鍍銅層12例如是以電鍍方式形成，鍍銅層12的數量可視需求增加。需說明的是，所述銅箔層11可以是以化學鍍銅法形成的。First, please refer to FIG. 1 , at least one copper plating layer 12 is formed on a copper foil layer 11 of a circuit substrate 10 . The copper plating layer 12 is formed by electroplating, for example. The number of copper plating layers 12 can be increased as required. It should be noted that the copper foil layer 11 may be formed by electroless copper plating.

請參考第2、3圖，在鍍銅層12的表面形成一光阻層20，光阻層20的厚度不大於10μm。本實施例中，光阻層20被形成於鍍銅層12表面前是被塗布於一PET膜21，其中，光阻層的厚度均勻度較佳可被控制於±2μm或更高的均勻度。Please refer to Figures 2 and 3. A photoresist layer 20 is formed on the surface of the copper plating layer 12. The thickness of the photoresist layer 20 is no more than 10 μm. In this embodiment, the photoresist layer 20 is coated on a PET film 21 before being formed on the surface of the copper plating layer 12. The thickness uniformity of the photoresist layer can preferably be controlled to a uniformity of ±2 μm or higher. .

而後，如第4圖所示，PET膜21被移除，亦即，PET膜21是在光阻層20被形成於鍍銅層12表面後、進行後續曝光處理前被移除，從而使得後續曝光處理時，光阻層20的表面不具有該PET膜。Then, as shown in FIG. 4 , the PET film 21 is removed. That is, the PET film 21 is removed after the photoresist layer 20 is formed on the surface of the copper plating layer 12 and before subsequent exposure processing is performed, so that the subsequent During the exposure process, the surface of the photoresist layer 20 does not have the PET film.

如第5圖所示，使用曝光機31及光罩32對光阻層20進行曝光處理，使光阻層20一部份成為保留區201且另一部份成為待移除區202。本實施例中，曝光處理是以非接觸式曝光方式進行，但並不以此為限。需說明的是，本實施例所使用的光阻層20適用於正顯影製程（正性光阻），亦即，受光束照射的區域會溶解於顯影液中，從而，本實施例中，受光束照射的區域為待移除區；在其他可能的實施方式中，也可以使用適用於負顯影製程的光阻層（負性光阻），此時，未受光束照射的區域會溶解於顯影液中，亦即，未受光束照射的區域為待移除區；從而，正性光阻及負性光阻的保留區及待移除區會是相反的，並不侷限於本實施例所示的位置。As shown in FIG. 5 , an exposure machine 31 and a photomask 32 are used to perform exposure processing on the photoresist layer 20 , so that part of the photoresist layer 20 becomes the reserved area 201 and the other part becomes the area to be removed 202 . In this embodiment, the exposure process is performed in a non-contact exposure method, but it is not limited to this. It should be noted that the photoresist layer 20 used in this embodiment is suitable for the positive development process (positive photoresist), that is, the area irradiated by the light beam will be dissolved in the developer. Therefore, in this embodiment, the area affected by the light beam will be dissolved in the developer. The area irradiated by the beam is the area to be removed; in other possible implementations, a photoresist layer suitable for the negative development process (negative photoresist) can also be used. At this time, the area not irradiated by the beam will be dissolved in the development process In the liquid, that is, the area not illuminated by the light beam is the area to be removed; therefore, the retention area and the area to be removed of the positive photoresist and the negative photoresist will be opposite, which is not limited to this embodiment. position shown.

接著，請參考第6圖，將待移除區202的光阻層20移除而裸露其原先覆蓋的鍍銅層12。Next, please refer to FIG. 6 to remove the photoresist layer 20 in the area to be removed 202 to expose the copper plating layer 12 originally covered by the photoresist layer 20 .

如第7圖所示，以蝕刻液40移除裸露的鍍銅層12及所述裸露鍍銅層12原先覆蓋的銅箔層11，亦即，未被保留區201的光阻層20覆蓋的鍍銅層12及銅箔層11被蝕刻液移除了。需說明的是，在蝕刻製程中，保留區201的光阻層20底部受到鍍銅層12的支撐，因此不易在蝕刻液沖洗的過程中產生破損。As shown in FIG. 7 , the etching solution 40 is used to remove the exposed copper plating layer 12 and the copper foil layer 11 originally covered by the exposed copper plating layer 12 , that is, the parts that are not covered by the photoresist layer 20 in the reserved area 201 The copper plating layer 12 and the copper foil layer 11 are removed by the etching liquid. It should be noted that during the etching process, the bottom of the photoresist layer 20 in the reserved area 201 is supported by the copper plating layer 12, so it is not easily damaged during the rinsing process of the etching solution.

最後，如第8圖所示，移除保留區的光阻層，完成至少一部份所需的電路圖形化處理。Finally, as shown in Figure 8, the photoresist layer in the reserved area is removed to complete at least part of the required circuit patterning.

10：電路基板 11：銅箔層 12：鍍銅層 20：光阻層 201：保留區 202：待移除區 21：PET膜 31：曝光機 32：光罩 40：蝕刻液 10: Circuit substrate 11: Copper foil layer 12: Copper plating layer 20: Photoresist layer 201: Reserved area 202: Area to be removed 21: PET film 31: Exposure machine 32: Photomask 40: Etching liquid

第1至8圖是本發明其中一實施例的製程示意圖。Figures 1 to 8 are schematic diagrams of a manufacturing process according to one embodiment of the present invention.

20：光阻層 201：保留區 202：待移除區 31：曝光機 32：光罩 20: Photoresist layer 201: Reserved area 202: Area to be removed 31: Exposure machine 32: Photomask

Claims

一種無膜式乾式光阻曝光製程，包括：在一電路基板的一銅箔層上形成至少一鍍銅層；在該鍍銅層表面形成一光阻層，該光阻層被形成於該鍍銅層表面前是被塗布於一PET膜；移除該PET膜；對該光阻層進行曝光處理，使該光阻層一部份成為保留區且另一部份成為待移除區；將該待移除區的光阻層移除而裸露其原先覆蓋的所述鍍銅層；以蝕刻液移除裸露的所述鍍銅層及所述裸露的鍍銅層原先覆蓋的所述銅箔層；以及移除該保留區的光阻層。 A film-less dry photoresist exposure process, including: forming at least one copper plating layer on a copper foil layer of a circuit substrate; A photoresist layer is formed on the surface of the copper plating layer, and the photoresist layer is coated on a PET film before being formed on the surface of the copper plating layer; Remove the PET film; Exposing the photoresist layer so that part of the photoresist layer becomes the reserved area and the other part becomes the area to be removed; Remove the photoresist layer in the area to be removed and expose the copper plating layer originally covered by it; Using an etching solution to remove the exposed copper plating layer and the copper foil layer originally covered by the exposed copper plating layer; and Remove the photoresist layer from the reserved area.