TWI804427B - Droplet image detection system and its device and method - Google Patents

Droplet image detection system and its device and method Download PDF

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TWI804427B
TWI804427B TW111132310A TW111132310A TWI804427B TW I804427 B TWI804427 B TW I804427B TW 111132310 A TW111132310 A TW 111132310A TW 111132310 A TW111132310 A TW 111132310A TW I804427 B TWI804427 B TW I804427B
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droplet
image
drop
image detection
needle
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TW202410231A (en
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桑友樂
陳榮忠
蔡明諺
曹永昌
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瀚軒股份有限公司
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Abstract

一種液滴影像檢測系統，包含：一影像檢測裝置，具有一相機，可拍攝位於一物件上的一液滴的一側面影像，該液滴具有一體積V，且該物件與該液滴的接觸邊緣在一切線方向形成一液滴接觸角θ；一控制計算單元，與該影像檢測裝置電連接，可接收該側面影像，且該控制計算單元根據該側面影像計算得一液滴直徑值2a；該控制計算單元根據該體積V及該液滴直徑值2a，以數學公式計算該液滴的液滴高度h，再計算該液滴接觸角θ，可據以替代直接量測的液滴接觸角及液滴高度，以克服因障礙物阻擋而必須斜看液滴的側面時所造成的液滴接觸角及液滴高度誤差。A droplet image detection system, comprising: an image detection device having a camera capable of taking a side image of a droplet on an object, the droplet having a volume V, and the contact between the object and the droplet The edge forms a droplet contact angle θ in the tangential direction; a control calculation unit is electrically connected to the image detection device and can receive the side image, and the control calculation unit calculates a droplet diameter value 2a according to the side image; The control calculation unit calculates the droplet height h of the droplet with a mathematical formula according to the volume V and the droplet diameter value 2a, and then calculates the droplet contact angle θ, which can replace the directly measured droplet contact angle And droplet height, to overcome the droplet contact angle and droplet height error caused by obliquely looking at the side of the droplet due to obstacles.

Description

液滴影像檢測系統及其裝置與方法Droplet image detection system and its device and method

一種檢測系統，尤指一種液滴影像檢測系統及其裝置與方法。A detection system, especially a droplet image detection system and its device and method.

一般的液體接觸角測量的主要應用是確定一固體表面與一特定液體的潤濕狀態。水滴接觸角可用於測量一固體表面的疏水性或親水性。水滴接觸角測量的一般用途還包含：確認如清潔度和其他表面處理的效果。如圖8所示，一水滴91與固體表面92形成一水滴接觸角

Figure 02_image001
。 The main application of general liquid contact angle measurement is to determine the wetting state of a solid surface with a specific liquid. The water drop contact angle can be used to measure the hydrophobicity or hydrophilicity of a solid surface. Common uses of water drop contact angle measurements include: confirmation of effects such as cleanliness and other surface treatments. As shown in Figure 8, a water drop 91 forms a water drop contact angle with a solid surface 92
Figure 02_image001
.

表面處理是工業製程中不可或缺的工藝，例如在對一矽晶圓進行一長晶的製程(epitaxy growth)前，首先要去除矽晶圓表面的雜質及氧化層等，然後才能在矽晶圓的表面進行長晶，此時如何確認矽晶圓的表面潔淨度就十分的重要，對此，以水滴接觸角來確認矽晶圓的表面潔淨度，是一般用於確認矽晶圓的表面潔淨度的方法。至於其他製程工件的表面，同樣也可以水滴接觸角度來確認其表面的潔淨度。Surface treatment is an indispensable process in the industrial process. For example, before performing an epitaxy growth process on a silicon wafer, the impurities and oxide layers on the surface of the silicon wafer must first be removed, and then the silicon wafer can be processed. For crystal growth on a round surface, how to confirm the surface cleanliness of the silicon wafer is very important at this time. For this, the surface cleanliness of the silicon wafer is confirmed by the water drop contact angle, which is generally used to confirm the surface cleanliness of the silicon wafer. method of cleanliness. As for the surface of other process workpieces, the cleanliness of the surface can also be confirmed by the contact angle of water droplets.

水滴接觸角的量測一般是使用照像機/攝影機對準位於一工件表面上的一水滴的側面，拍攝得該水滴與該工件表面二者接觸的一影像，進而從該影像量測得到該水滴與該工件表面的一水滴接觸角，如圖9所示，根據一水滴95與一工件表面96二者接觸的一影像，一水滴接觸角

Figure 02_image001
被量測為47.3度。 The measurement of the contact angle of a water drop is generally to use a camera/video camera to aim at the side of a water drop on a workpiece surface, and take an image of the contact between the water drop and the surface of the workpiece, and then measure the image from the image. A water droplet contact angle of water drop and this workpiece surface, as shown in Figure 9, according to an image that a water droplet 95 contacts with a workpiece surface 96, a water droplet contact angle
Figure 02_image001
Measured at 47.3 degrees.

但是當該工件表面96被一物體所阻礙，以致於該照像機/攝影機無法平視工件表面96的水滴95的側面時，就退而求其次以斜看水滴的方式來量測水滴接觸角。如圖10A與圖10B所示，圖10A顯示一矽晶片97被置於一封裝結構98之內的俯視圖，圖10B為該矽晶片97與該封裝結構98在圖10A的一剖面之剖面圖。可知當一攝影機100欲以正視一水滴99的側面的方式來量測該矽晶片97表面的水滴接觸角時，該矽晶片97上的該水滴99會被該封裝結構98所遮擋；因此必須以一攝影機101以斜看該水滴99的側面的方式來量測該矽晶片97上的水滴接觸角。此時，相較於以正視該水滴99的側面的方式所測得的水滴接觸角與水滴高度，以斜看該水滴99的側面的方式所測得的水滴接觸角與水滴高度會有較大的誤差。因此如何減小斜看水滴的側面時所產生關於量測水滴接觸角與水滴高度的誤差，是工程上實際量測一工件表面的水滴接觸角時會經常遭遇且必須克服的問題。However, when the workpiece surface 96 is obstructed by an object, so that the camera/camera cannot look straight at the side of the water drop 95 on the workpiece surface 96, the water drop contact angle is measured by obliquely looking at the water drop. . As shown in FIG. 10A and FIG. 10B , FIG. 10A shows a top view of a silicon chip 97 placed in a package structure 98 , and FIG. 10B is a cross-sectional view of a section of the silicon chip 97 and the package structure 98 in FIG. 10A . It can be seen that when a camera 100 intends to measure the water drop contact angle on the surface of the silicon wafer 97 by looking squarely at the side of a water drop 99, the water drop 99 on the silicon wafer 97 will be blocked by the encapsulation structure 98; A camera 101 measures the contact angle of the water drop on the silicon wafer 97 by looking obliquely at the side of the water drop 99 . At this time, the water drop contact angle and water drop height measured by obliquely looking at the side of the water drop 99 will be larger than those measured by looking squarely at the side of the water drop 99. error. Therefore, how to reduce the error in measuring the contact angle of water droplets and the height of water droplets produced when looking obliquely at the side of the water droplets is a problem that is often encountered and must be overcome when actually measuring the contact angle of water droplets on the surface of a workpiece in engineering.

為了解決上述問題，本發明提出一種液滴影像檢測系統，包含： 一影像檢測裝置，具有 一相機，該相機可以平視或斜視的方式拍攝位於一物件上的一液滴的一側面影像，該液滴具有一體積V，且該物件與該液滴的接觸邊緣在一切線方向形成一液滴接觸角

Figure 02_image001
； 一控制計算單元，與該影像檢測裝置電連接，接收該側面影像，且該控制計算單元根據該側面影像量測得一液滴直徑值2a；其中 該控制計算單元先計算該液滴的一液滴高度h；
Figure 02_image003
該控制計算單元再計算該液滴接觸角
Figure 02_image001
；
Figure 02_image005
。 In order to solve the above problems, the present invention proposes a droplet image detection system, which includes: an image detection device with a camera, which can shoot a side image of a droplet on an object in a horizontal or oblique way. The droplet has a volume V, and the contact edge of the object and the droplet forms a droplet contact angle in the tangential direction
Figure 02_image001
; A control calculation unit, electrically connected with the image detection device, receives the side image, and the control calculation unit measures a droplet diameter value 2a according to the side image; wherein the control calculation unit first calculates a droplet diameter value 2a; Droplet height h;
Figure 02_image003
The control calculation unit calculates the droplet contact angle again
Figure 02_image001
;
Figure 02_image005
.

較佳的，該影像檢測裝置進一步包含一針頭，可滴落一液滴；其中該液滴的該體積V是給定的，或是由以下步驟計算所得： 該相機，拍攝該液滴從該針頭完全分離之瞬間的一滴落側面影像； 該控制計算單元，可接收該滴落側面影像，且該控制計算單元沿著該液滴滴落的方向由頭至尾每隔一厚度∆x在該滴落側面影像上切出一第k圓盤，該第k圓盤具有一第k半徑

Figure 02_image007
，總共可得直徑分別為2
Figure 02_image007
的N個圓盤, k = 1, 2,…N，N為大於2的整數； 該控制計算單元以下列算式計算該液滴體積V；
Figure 02_image009
。 Preferably, the image detection device further comprises a needle capable of dripping a liquid drop; wherein the volume V of the liquid drop is given, or is calculated by the following steps: The camera shoots the liquid drop from the A drop silhouette image at the moment when the needle is completely separated; the control calculation unit can receive the drop silhouette image, and the control calculation unit is along the direction of the drop drop from the beginning to the end at every thickness ∆x at the A kth disk is cut out on the drop silhouette, the kth disk has a kth radius
Figure 02_image007
, the total available diameters are 2
Figure 02_image007
N disks, k = 1, 2,...N, N is an integer greater than 2; the control calculation unit calculates the droplet volume V with the following formula;
Figure 02_image009
.

本發明還提出一種影像檢測裝置，包含： 一二維移動機構、一乘載架、及一固定柱，分別設置於一平面基板上； 一平台，設置於該二維移動機構上； 一線性移動機構，設置於該乘載架上； 一注射裝置，設置於該線性移動機構上，該注射裝置具有一針頭； 一控制計算單元，分別電連至該二維移動機構、該線性移動機構及該注射裝置，並控制該二維移動機構將該平台上的一物件移動至該針頭的正下方，並控制該線性移動機構將該針頭移動至該物件上方的一高度後，使該注射裝置輸出一體積V的一液滴，並經由該針頭滴落於該物件上； 一相機設置於該固定柱上，該相機可拍攝該液滴與該物件接觸的一影像； 該控制計算單元根據該影像可識別出該液滴的一液滴直徑； 該控制計算單元根據該液滴直徑及該液滴的該體積V，執行一液滴接觸角計算步驟，以獲得該物件與該液滴的接觸邊緣在一切線方向所形成的一液滴接觸角。 The present invention also proposes an image detection device, comprising: A two-dimensional moving mechanism, a carrier, and a fixed column are respectively arranged on a flat base plate; a platform, set on the two-dimensional moving mechanism; a linear movement mechanism, arranged on the carrier; an injection device, arranged on the linear movement mechanism, the injection device has a needle; A control calculation unit, electrically connected to the two-dimensional moving mechanism, the linear moving mechanism and the injection device, and controls the two-dimensional moving mechanism to move an object on the platform to the right below the needle, and controls the linear After the moving mechanism moves the needle to a certain height above the object, the injection device outputs a liquid drop with a volume V, and drops on the object through the needle; A camera is arranged on the fixed post, and the camera can take an image of the liquid drop contacting the object; The control calculation unit can identify a droplet diameter of the droplet according to the image; The control calculation unit performs a droplet contact angle calculation step according to the droplet diameter and the volume V of the droplet, so as to obtain a droplet contact angle formed by the contact edge between the object and the droplet in the tangential direction .

在另一實施例中，本發明還提出一種液滴影像檢測系統，包含： 一影像檢測裝置，具有 一針頭，可滴落一液滴； 一相機，可拍攝該液滴從該針頭分離滴落時的一側面影像； 一控制計算單元，與該影像檢測裝置電連接，可接收該側面影像，且該控制計算單元沿著該液滴滴落的方向由頭至尾每隔一厚度∆x在該側面影像上切出一第k圓盤，該第k圓盤具有一第k半徑

Figure 02_image007
，總共可得直徑分別為2
Figure 02_image007
的N個圓盤, k = 1, 2,…N，N為大於2的整數； 該控制計算單元以下列算式計算該液滴體積V；
Figure 02_image011
其中該厚度∆x係為該側面影像的至少一畫素所對應的一長度，該第k半徑
Figure 02_image013
為該側面影像中對應於該第k圓盤的半徑的所有畫素所對應的一長度。 In another embodiment, the present invention also proposes a droplet image detection system, comprising: an image detection device having a needle that can drop a droplet; a camera that can photograph the droplet falling from the needle A side image at the time; a control calculation unit, electrically connected with the image detection device, can receive the side image, and the control calculation unit is along the direction of the droplet dripping at every thickness ∆x from head to tail A k-th disk is cut out on the silhouette image, and the k-th disk has a k-th radius
Figure 02_image007
, the total available diameters are 2
Figure 02_image007
N disks, k = 1, 2,...N, N is an integer greater than 2; the control calculation unit calculates the droplet volume V with the following formula;
Figure 02_image011
Wherein the thickness ∆x is a length corresponding to at least one pixel of the silhouette image, and the kth radius
Figure 02_image013
is a length corresponding to all pixels corresponding to the radius of the k-th disk in the silhouette image.

本發明還提出一種液滴影像檢測方法，包含： 提供位於一物件上的一液滴的一側面影像，該液滴具有一體積V； 根據該側面影像量測得該液滴的一液滴直徑值2a； 根據以下公式計算該液滴的一液滴高度h；

Figure 02_image003
根據以下公式計算該液滴的一液滴接觸角
Figure 02_image015
Figure 02_image017
。 The present invention also provides a droplet image detection method, comprising: providing a side image of a droplet on an object, the droplet having a volume V; measuring a droplet diameter of the droplet according to the volume of the side image Value 2a; Calculate the droplet height h of the droplet according to the following formula;
Figure 02_image003
Calculate the one-drop contact angle of the droplet according to the following formula
Figure 02_image015
Figure 02_image017
.

請參閱圖1所示，圖1顯示了本發明的液滴影像檢測裝置1。本發明的影像檢測裝置1具有一平面基板2，在該平面基板2上設置有一二維移動機構3、一乘載架4、一固定柱5，該二維移動機構3上設置一平台6，該乘載架4上設置一線性移動機構7，該固定柱5上設置一側視相機8及一斜視相機9，該側視相機8經由一第一固定夾10固定在該固定柱5上，該斜視相機9經由一第二固定夾11固定在該固定柱5上。該線性移動機構7上設置一注射裝置12，該注射裝置12具有一針頭13，本發明的影像檢測裝置1還具有一控制計算單元(未圖示)，分別電連至該二維移動機構3、該線性移動機構7及該注射裝置12。該控制計算單元可為一微控制器、一微處理器、一個人電腦、一筆電、一手機、一平板電腦、或一伺服器。Please refer to FIG. 1 , which shows a droplet image detection device 1 of the present invention. The image detection device 1 of the present invention has a planar substrate 2, on which a two-dimensional moving mechanism 3, a carriage 4, and a fixed column 5 are arranged, and a platform 6 is arranged on the two-dimensional moving mechanism 3 , a linear movement mechanism 7 is set on the carriage 4, a side-view camera 8 and a squint camera 9 are set on the fixed column 5, and the side-view camera 8 is fixed on the fixed column 5 via a first fixing clip 10 , the squint camera 9 is fixed on the fixing post 5 via a second fixing clip 11 . An injection device 12 is arranged on the linear movement mechanism 7, and the injection device 12 has a needle 13. The image detection device 1 of the present invention also has a control calculation unit (not shown), which is electrically connected to the two-dimensional movement mechanism 3 respectively. , the linear movement mechanism 7 and the injection device 12 . The control calculation unit can be a microcontroller, a microprocessor, a personal computer, a laptop, a mobile phone, a tablet computer, or a server.

其中該二維移動機構3係可沿著一XY平面移動，可帶動該平台6沿著該XY平面移動。該線性移動機構7係沿著一Z軸方向移動，可帶動該注射裝置12及該針頭13沿著該Z軸方向移動。該平台6上可放置一待測物件14，以量測該待測物件14的表面的一水滴接觸角，該控制計算單元(未圖示)控制該二維移動機構3的作動而將該待測物件14移動至該針頭13的正下方，該控制計算單元(未圖示)經由控制該線性移動機構7可控制移動該注射裝置12的該針頭13至該待測物件14上方的一適當高度後，使該注射裝置12輸出一體積V的液體至該針頭13，並經由該針頭13形成一液滴，滴落於該待測物件14上，該液滴例如是一水滴15。其中該XY平面係平行於該平面基板2，該Z軸方向則係垂直於該平面基板2。Wherein the two-dimensional moving mechanism 3 can move along an XY plane, and can drive the platform 6 to move along the XY plane. The linear moving mechanism 7 moves along a Z-axis direction, and can drive the injection device 12 and the needle 13 to move along the Z-axis direction. An object to be measured 14 can be placed on the platform 6 to measure a water droplet contact angle on the surface of the object to be measured 14, and the control calculation unit (not shown) controls the operation of the two-dimensional moving mechanism 3 so that The measuring object 14 is moved to directly below the needle head 13, and the control calculation unit (not shown) can control the moving of the needle head 13 of the injection device 12 to an appropriate height above the measuring object 14 by controlling the linear moving mechanism 7 Afterwards, the injection device 12 outputs a volume V of liquid to the needle 13 , and forms a liquid drop through the needle 13 , and drops on the object 14 to be tested. The liquid drop is, for example, a water drop 15 . The XY plane is parallel to the planar substrate 2 , and the Z-axis direction is perpendicular to the planar substrate 2 .

如圖2所示，圖2顯示本發明之影像檢測裝置的相機平視水滴與斜視水滴，其中該第一固定夾10可沿著該固定柱5被調整固定於該固定柱5上，使得該側視相機8平視位於該待測物件14上的該水滴15的側面。該第二固定夾11亦可沿著該固定柱5被調整固定於該固定柱5上，使得該斜視相機9可斜視位於該待測物件14上的該水滴15的側面以避過一障礙物(未圖示)的阻擋，如一半導體晶片的封裝結構。當該側視相機8平視該水滴15的側面時，該側視相機8可拍攝該水滴15與該待測物件14的一平視影像，經由該平視影像可識別出該水滴15與該待測物件14的一平視水滴接觸角(類似於圖9所示之量測到的水滴接觸角

Figure 02_image001
)、一平視水滴高度、以及一平視水滴直徑。當該斜視相機9斜視該水滴15的側面時，該斜視相機9可拍攝該水滴15與該待測物件14的一斜視影像，經由該斜視影像可識別出該水滴15與該待測物件14的一斜視水滴接觸角、一斜視水滴高度、以及一斜視水滴直徑。 As shown in Fig. 2, Fig. 2 shows the water droplet of the camera of the image detection device of the present invention, which is viewed horizontally and obliquely, wherein the first fixing clip 10 can be adjusted and fixed on the fixing column 5 along the fixing column 5, so that the The side looking camera 8 looks up at the side of the water droplet 15 on the object 14 to be tested. The second fixing clip 11 can also be adjusted and fixed on the fixing column 5 along the fixing column 5, so that the oblique camera 9 can obliquely look at the side of the water drop 15 on the object 14 to avoid an obstacle (not shown) barrier, such as a packaging structure of a semiconductor chip. When the side-view camera 8 is looking at the side of the water drop 15, the side-view camera 8 can take a head-up image of the water drop 15 and the object 14 to be tested, and the water drop 15 and the object to be tested can be identified through the head-up image. A water drop contact angle (similar to the measured water drop contact angle shown in Fig. 9) of measuring object 14
Figure 02_image001
), a head-up droplet height, and a head-up droplet diameter. When the squint camera 9 squints at the side of the water drop 15, the squint camera 9 can take a squint image of the water drop 15 and the object 14 to be tested, and the water drop 15 and the object 14 to be tested can be identified through the squint image. A squinted droplet contact angle, a squinted droplet height, and a squinted droplet diameter.

經過多次的量測與比較，採用斜看水滴的方式所得到的該斜視水滴接觸角及該斜視水滴高度，相較於該平視水滴接觸角及該平視水滴高度都會存在較大的誤差，但是該斜視水滴直徑與該平視水滴直徑二者則無明顯差異，如圖3所示，圖3為本發明影像檢測裝置斜看水滴時的量測直徑與平視水滴時的量測直徑二者之間的誤差，其中橫軸代表量測樣品的編號，縱軸代表該二者之間的誤差，且該平視水滴的量測直徑的一平均值為1.67毫米(mm)，可知該二者之間的誤差係在±3%以內。After many times of measurement and comparison, the contact angle and height of water droplets obtained by looking at water droplets obliquely will have a larger error than the contact angle of water droplets and the height of water droplets in head-up , but there is no significant difference between the diameter of the squinted water droplet and the diameter of the water droplet when viewed head-on, as shown in Figure 3, Figure 3 shows the measured diameter when the image detection device of the present invention looks obliquely at the water droplet and the measured diameter when the water droplet is viewed head-on The error between the two, wherein the horizontal axis represents the numbering of the measurement sample, the vertical axis represents the error between the two, and an average value of the measured diameter of the head-up water drop is 1.67 millimeters (mm), it can be known that the The error between the two is within ±3%.

因此本發明提出一水滴計算方法，包含一水滴模型，係根據該針頭13滴落的液滴具有一體積V，及該斜視水滴直徑(令其值為2a)，並依據該水滴模型來推導出一水滴高度h，並以該水滴高度h替代該斜視水滴高度，然後再經由一切線角度公式，推導出一水滴接觸角

Figure 02_image001
用以替代該斜視水滴接觸角的量測值；請參考圖4，圖4顯示本發明的水滴模型，其包含一理想球體16，具有一圓心O，以及由該理想球體16的上方部分所構成的一圓球缺體17，該圓球缺體17代表的是本發明該水滴模型中的水滴，其為該理想球體16的一部份，並具有一體積V、一水滴半徑a、及一水滴高度h。經推導可得以下的公式1：
Figure 02_image019
……公式1 將公式1展開可得公式2：
Figure 02_image021
……公式2 公式2為水滴高度h的3次方程式，解出公式2中的水滴高度h，可得公式3：
Figure 02_image003
……公式3 Therefore, the present invention proposes a water drop calculation method, including a water drop model, based on the fact that the liquid drop dropped by the needle 13 has a volume V, and the diameter of the oblique water drop (make its value 2a), and deduce according to the water drop model A water drop height h, and replace the oblique water drop height with the water drop height h, and then deduce a water drop contact angle through the tangent line angle formula
Figure 02_image001
It is used to replace the measurement value of the oblique water drop contact angle; please refer to FIG. 4, which shows the water drop model of the present invention, which includes an ideal sphere 16, has a center O, and is formed by the upper part of the ideal sphere 16 A spheroid 17 of the spheroid, what this spheroid 17 represents is the water drop in the water drop model of the present invention, and it is a part of this ideal sphere 16, and has a volume V, a water drop radius a, and a water drop height h. After derivation, the following formula 1 can be obtained:
Figure 02_image019
... Formula 1 Expand Formula 1 to get Formula 2:
Figure 02_image021
...Formula 2 Formula 2 is the cubic equation of water drop height h, solve the water drop height h in formula 2, and formula 3 can be obtained:
Figure 02_image003
...Formula 3

請參考圖5，圖5顯示本發明的水滴接觸角計算模型，其中一圓弧21及一底弦22代表該圓球缺體17的一剖面，在該圓弧21及該底弦22的交點K，具有一切線T，該切線T與該底弦22的夾角即為該水滴接觸角

Figure 02_image001
，該圓弧21的中點M與該底弦22的距離為公式3中的水滴高度h，該底弦22的長度的一半為該水滴半徑a，該圓弧21及該底弦22的交點K與該圓弧21的中點M二者間形成一線段T1，該線段T1與該底弦22的夾角
Figure 02_image023
經推導係為該水滴接觸角
Figure 02_image001
的一半，由圖5可知公式4：
Figure 02_image025
……公式4 及公式5：
Figure 02_image027
……公式5 所以該水滴接觸角
Figure 02_image001
即可由該水滴高度h與該水滴半徑a得出。 Please refer to Fig. 5, Fig. 5 shows the calculation model of water droplet contact angle of the present invention, wherein a circular arc 21 and a bottom chord 22 represent a section of this spherical truncated body 17, at the intersection of this circular arc 21 and this bottom chord 22 K, has a tangent line T, the angle between the tangent line T and the bottom chord 22 is the water drop contact angle
Figure 02_image001
, the distance between the midpoint M of the arc 21 and the bottom chord 22 is the drop height h in formula 3, half of the length of the bottom chord 22 is the drop radius a, the intersection point of the arc 21 and the bottom chord 22 A line segment T1 is formed between K and the midpoint M of the arc 21, and the angle between the line segment T1 and the bottom chord 22 is
Figure 02_image023
The deduced system is the contact angle of the water droplet
Figure 02_image001
Half of , from Figure 5 we can see formula 4:
Figure 02_image025
...Formula 4 and Formula 5:
Figure 02_image027
...Formula 5 So the droplet contact angle
Figure 02_image001
It can be obtained from the water drop height h and the water drop radius a.

如圖6所示，圖6為本發明之液滴影像檢測系統所計算的水滴接觸角度與實際量測的水滴接觸角度二者之間的誤差，其中橫軸代表量測樣品的編號，縱軸代表該二者之間的誤差，可知該二者之間的誤差係為±4.3度，仍在一般水滴接觸角度量測可接受的誤差的範圍(±5度)之內。As shown in Figure 6, Figure 6 is the error between the water droplet contact angle calculated by the liquid droplet image detection system of the present invention and the actual measured water droplet contact angle, wherein the horizontal axis represents the serial number of the measurement sample, and the vertical axis Representing the error between the two, it can be seen that the error between the two is ±4.3 degrees, which is still within the acceptable error range (±5 degrees) of the general water drop contact angle measurement.

如圖7所示，圖7為本發明的一實施例，圖7顯示計算一水滴23的體積之近似值模型。在本實施例中，該水滴23的體積V，可以使用積分的方式求出近似值。如圖7所示，將一水滴23的影像切成很多小圓盤加總，假設每個小圓盤厚度皆為

Figure 02_image029
，且
Figure 02_image029
為該水滴23的影像中的一個畫素所對應的厚度，則一第k圓盤體積
Figure 02_image031
為：
Figure 02_image033
其中，
Figure 02_image007
為該第k圓盤的半徑，
Figure 02_image007
為該水滴23的影像中對應於該第k圓盤的半徑的所有畫素所對應的長度，N為大於2的整數。 依體積積分的方式，即公式6，可求出完整水滴體積的近似值V:
Figure 02_image035
……公式6 由於該斜視相機9斜視該水滴15的側面時所量測到的該斜視水滴高度並不準確，故在本實施例中，該水滴23的影像較佳的是以該側視相機8平視該水滴23從該針頭13完全分離之瞬間的一水滴滴落側面影像為準，如此可以計算出較為準確的水滴體積的近似值V。 As shown in FIG. 7 , which is an embodiment of the present invention, FIG. 7 shows an approximate model for calculating the volume of a water drop 23 . In this embodiment, the approximate value of the volume V of the water droplet 23 can be obtained by means of integration. As shown in Figure 7, the image of a water droplet 23 is cut into a lot of small disks and summed up, assuming that the thickness of each small disk is
Figure 02_image029
,and
Figure 02_image029
is the thickness corresponding to one pixel in the image of the water droplet 23, then the volume of a kth disk
Figure 02_image031
for:
Figure 02_image033
in,
Figure 02_image007
is the radius of the kth disc,
Figure 02_image007
is the length corresponding to all pixels corresponding to the radius of the k-th disk in the image of the water drop 23 , and N is an integer greater than 2. According to the method of volume integration, that is, formula 6, the approximate value V of the complete water droplet volume can be obtained:
Figure 02_image035
...Formula 6 Since the height of the squinted water droplet measured when the squinted camera 9 squints at the side of the water droplet 15 is not accurate, in this embodiment, the image of the water droplet 23 is preferably taken from the side-viewing camera 8. The silhouette image of a water drop when the water drop 23 is completely separated from the needle 13 is taken as the standard, so that a more accurate approximate value V of the volume of the water drop can be calculated.

在一實施例中，無論是使用側視相機8平視該水滴15的側面時，拍攝所得的該平視影像，或是使用斜視相機9斜視該水滴15的側面時，拍攝所得的該斜視影像，只要根據該平視影像/該斜視影像量測到該平視水滴直徑/該斜視水滴直徑後，皆可使用前述公式1~6來計算該水滴高度h及該水滴接觸角

Figure 02_image001
，以替代直接量測的水滴高度及直接量測的水滴接觸角。 In one embodiment, whether the side-view camera 8 is used to look at the side of the water drop 15, the head-up image is taken, or the side-view camera 9 is used to look obliquely at the side of the water drop 15, and the oblique view image is taken. , as long as the head-up water droplet diameter/the squint-view water droplet diameter is measured according to the head-up image/the squint-view image, the water drop height h and the water drop contact angle can be calculated using the aforementioned formulas 1~6
Figure 02_image001
, to replace the directly measured water drop height and the directly measured water drop contact angle.

由上述說明及實施例可知本發明的液滴影像檢測系統可根據由本發明影像檢測裝置量測一斜視水滴直徑，並由一控制計算單元跟據該斜視水滴直徑以及一水滴的體積，依前述公式3計算得到一水滴高度h，然後再依前述公式5計算得到一水滴接觸角

Figure 02_image001
，可避開因斜看水滴的側面時所產生關於量測水滴接觸角與水滴高度的誤差，達到本發明的目的。 From the above description and examples, it can be known that the droplet image detection system of the present invention can measure the diameter of a squinted water droplet by the image detection device of the present invention, and a control calculation unit can follow the diameter of the squinted water droplet and the volume of a water droplet according to the aforementioned formula 3 Calculate the height h of a water drop, and then calculate the contact angle of a water drop according to the above formula 5
Figure 02_image001
, can avoid the error about measuring the contact angle of the water drop and the height of the water drop produced when looking obliquely at the side of the water drop, and achieve the purpose of the present invention.

1:影像檢測裝置 2:平面基板 3:二維移動機構 4:乘載架 5:固定柱 6:平台 7:線性移動機構 8:側視相機 9:斜視相機 10:固定夾 11:固定夾 12:注射裝置 13:針頭 14:待測物件 15:水滴 16:理想圓球 17:圓球缺體 21:圓弧 22:底弦 23:水滴 91:水滴 92:物件 95:水滴 96:物件 97:晶片 98:封裝機構 99:水滴 100:攝影機 101:攝影機 r:理想球體的半徑 O:理想球體的圓心 a:圓球缺體的底面半徑 h:圓球缺體的高度 V:水滴體積 T:切線 T1:線段 K:交點 M:中點

Figure 02_image007
:第k圓盤的半徑
Figure 02_image029
:一個畫素所對應的厚度
Figure 02_image001
:水滴接觸角
Figure 02_image023
:夾角1: Image detection device 2: Planar substrate 3: Two-dimensional moving mechanism 4: Carrier 5: Fixed column 6: Platform 7: Linear moving mechanism 8: Side-view camera 9: Oblique camera 10: Fixing clip 11: Fixing clip 12 : Injection device 13: Needle 14: Object to be measured 15: Water drop 16: Ideal sphere 17: Spherical incomplete body 21: Arc 22: Bottom string 23: Water drop 91: Water drop 92: Object 95: Water drop 96: Object 97: Chip 98: packaging mechanism 99: water droplet 100: camera 101: camera r: radius of ideal sphere O: center of circle of ideal sphere a: radius of bottom surface of sphere h: height of sphere V: volume of water drop T: tangent T1: line segment K: intersection point M: midpoint
Figure 02_image007
: Radius of the kth disk
Figure 02_image029
: The thickness corresponding to a pixel
Figure 02_image001
: Water droplet contact angle
Figure 02_image023
: Angle

圖1係本發明影像檢測裝置的示意圖。 圖2係本發明之影像檢測裝置的相機平視水滴與斜視水滴的示意圖。 圖3係本發明影像檢測裝置其斜看水滴時的量測直徑與平視水滴時的量測直徑二者之間的誤差圖。 圖4係本發明之液滴影像檢測系統的水滴模型示意圖。 圖5係本發明之液滴影像檢測系統的水滴接觸角計算模型示意圖。 圖6係本發明之液滴影像檢測系統所計算的水滴接觸角度與實際量測的水滴接觸角度二者之間的誤差圖。 圖7係本發明的一實施例，顯示計算水滴體積之模型。 圖8係一水滴及相對應的一水滴接觸角的示意圖。 圖9係一水滴的影像及量測到的一水滴接觸角。 圖10A係一矽晶片位於一封裝結構中的俯視圖。 圖10B係為圖10A在一剖面的剖面圖。 FIG. 1 is a schematic diagram of an image detection device of the present invention. FIG. 2 is a schematic diagram of a camera of the image detection device of the present invention looking straight at a water droplet and looking obliquely at a water droplet. 3 is an error diagram between the measured diameter of the image detection device of the present invention when looking obliquely at the water droplet and the measured diameter when looking straight at the water droplet. FIG. 4 is a schematic diagram of a water drop model of the liquid drop image detection system of the present invention. 5 is a schematic diagram of a water droplet contact angle calculation model of the liquid droplet image detection system of the present invention. FIG. 6 is an error diagram between the water drop contact angle calculated by the liquid drop image detection system of the present invention and the actually measured water drop contact angle. Fig. 7 is an embodiment of the present invention, showing a model for calculating the volume of water droplets. FIG. 8 is a schematic diagram of a water droplet and a corresponding contact angle of a water droplet. FIG. 9 is an image of a water drop and the measured contact angle of a water drop. FIG. 10A is a top view of a silicon chip in a package structure. FIG. 10B is a cross-sectional view of FIG. 10A in a section.

1:影像檢測裝置 1: Image detection device

2:平面基板 2: Flat substrate

3:二維移動機構 3: Two-dimensional mobile mechanism

4:乘載架 4: take the carrier

5:固定柱 5: fixed column

6:平台 6: Platform

7:線性移動機構 7: Linear movement mechanism

8:側視相機 8: Side view camera

9:斜視相機 9: Squint the camera

10:固定夾 10: Fixing clip

11:固定夾 11: Fixing clip

12:注射裝置 12: Injection device

13:針頭 13: Needle

14:待測物件 14: Object to be tested

15:水滴 15: water drop

Claims (10)

一種液滴影像檢測系統，包含： 一影像檢測裝置，具有 一相機，該相機可以平視或斜視的方式拍攝位於一物件上的一液滴的一側面影像，該液滴具有一體積V，且該物件與該液滴的接觸邊緣在一切線方向形成一液滴接觸角
Figure 03_image001
； 一控制計算單元，與該影像檢測裝置電連接，接收該側面影像，且該控制計算單元根據該側面影像量測得一液滴直徑值2a；其中 該控制計算單元以下列算式先計算該液滴的一液滴高度h；
Figure 03_image003
該控制計算單元再以下列算式計算該液滴接觸角
Figure 03_image015
Figure 03_image037
。 A droplet image detection system, comprising: an image detection device having a camera, the camera can shoot a side image of a droplet on an object in a horizontal or oblique view, the droplet has a volume V, and The contact edge of the object and the drop forms a drop contact angle in the tangential direction
Figure 03_image001
; A control calculation unit, electrically connected with the image detection device, receives the side image, and the control calculation unit measures a droplet diameter value 2a according to the side image; wherein the control calculation unit first calculates the liquid droplet with the following formula: droplet height h;
Figure 03_image003
The control computing unit calculates the droplet contact angle with the following formula
Figure 03_image015
Figure 03_image037
. 如請求項1所述之液滴影像檢測系統，其中該影像檢測裝置進一步包含一針頭，可滴落該液滴；其中該液滴的該體積V是由以下步驟計算所得： 該相機拍攝該液滴從該針頭完全分離之瞬間的一滴落側面影像； 該控制計算單元接收該滴落側面影像，且該控制計算單元沿著該液滴滴落的方向由頭至尾每隔一厚度
Figure 03_image029
在該滴落側面影像上切出一第k圓盤，該第k圓盤具有一第k半徑
Figure 03_image007
，總共可得直徑分別為2
Figure 03_image013
的N個圓盤，k = 1, 2,…N ，N為大於2的整數； 該控制計算單元以下列算式計算該液滴體積V；
Figure 03_image039
。 The droplet image detection system as described in Claim 1, wherein the image detection device further includes a needle that can drop the droplet; wherein the volume V of the droplet is calculated by the following steps: The camera shoots the liquid A drop silhouette image at the moment when the drop is completely separated from the needle; the control calculation unit receives the drop silhouette image, and the control calculation unit follows the direction of the drop drop from head to tail every other thickness
Figure 03_image029
Cutting a kth disk on the drop silhouette, the kth disk has a kth radius
Figure 03_image007
, the total available diameters are 2
Figure 03_image013
N disks, k = 1, 2,...N, N is an integer greater than 2; the control calculation unit calculates the droplet volume V with the following formula;
Figure 03_image039
. 如請求項1所述之液滴影像檢測系統，其中該影像檢測裝置進一步包含一針頭，可滴落該液滴；其中該液滴的該體積V是給定的。The droplet image detection system according to claim 1, wherein the image detection device further comprises a needle capable of dropping the droplet; wherein the volume V of the droplet is given. 如請求項1所述之液滴影像檢測系統，其中該影像檢測裝置，進一步具有 一二維移動機構； 一線性移動機構； 一注射裝置，設置於該線性移動機構上，該注射裝置具有一針頭； 該控制計算單元，分別電連至該二維移動機構、該線性移動機構及該注射裝置，並控制該二維移動機構將該物件移動至該針頭的正下方，並控制該線性移動機構將該針頭移動至位於該物件上方的一高度後，使該注射裝置輸出該液滴，並經由該針頭滴落於該物件上。 The droplet image detection system according to claim 1, wherein the image detection device further has One-dimensional moving mechanism; A linear movement mechanism; an injection device, arranged on the linear movement mechanism, the injection device has a needle; The control calculation unit is electrically connected to the two-dimensional moving mechanism, the linear moving mechanism and the injection device, and controls the two-dimensional moving mechanism to move the object directly under the needle, and controls the linear moving mechanism to After the needle moves to a height above the object, the injection device outputs the liquid drop, and drops on the object through the needle. 一種影像檢測裝置，包含： 一二維移動機構、一乘載架、及一固定柱，分別設置於一平面基板上； 一平台，設置於該二維移動機構上； 一線性移動機構，設置於該乘載架上； 一注射裝置，設置於該線性移動機構上，該注射裝置具有一針頭； 一控制計算單元，分別電連至該二維移動機構、該線性移動機構及該注射裝置，並控制該二維移動機構將該平台上的一物件移動至該針頭的正下方，並控制該線性移動機構將該針頭移動至該物件上方的一高度後，使該注射裝置輸出一體積V的一液滴，並經由該針頭滴落於該物件上； 一相機設置於該固定柱上，該相機可拍攝該液滴與該物件接觸的一影像； 該控制計算單元根據該影像可識別出該液滴的一液滴直徑； 該控制計算單元根據該液滴直徑及該液滴的該體積V，執行一液滴接觸角計算步驟，以獲得該物件與該液滴的接觸邊緣在一切線方向所形成的一液滴接觸角。 An image detection device, comprising: A two-dimensional moving mechanism, a carrier, and a fixed column are respectively arranged on a flat base plate; a platform, set on the two-dimensional moving mechanism; a linear movement mechanism, arranged on the carrier; an injection device, arranged on the linear movement mechanism, the injection device has a needle; A control calculation unit, electrically connected to the two-dimensional moving mechanism, the linear moving mechanism and the injection device, and controls the two-dimensional moving mechanism to move an object on the platform to the right below the needle, and controls the linear After the moving mechanism moves the needle to a certain height above the object, the injection device outputs a liquid drop with a volume V, and drops on the object through the needle; A camera is arranged on the fixed post, and the camera can take an image of the liquid drop contacting the object; The control calculation unit can identify a droplet diameter of the droplet according to the image; The control calculation unit performs a droplet contact angle calculation step according to the droplet diameter and the volume V of the droplet, so as to obtain a droplet contact angle formed by the contact edge between the object and the droplet in the tangential direction . 如請求項5所述之影像檢測裝置，其中該液滴的該體積V是給定的，或是由以下步驟計算所得： 該相機，可拍攝該液滴從該針頭完全分離之瞬間的一滴落側面影像； 該控制計算單元，可接收該滴落側面影像，且該控制計算單元沿著該液滴滴落的方向由頭至尾每隔一厚度∆x在該滴落側面影像上切出一第k圓盤，該第k圓盤具有一第k半徑
Figure 03_image007
，總共可得直徑分別為2
Figure 03_image007
的N個圓盤, k = 1, 2,…N，N為大於2的整數； 然後該控制計算單元將該第1至第N圓盤的體積相加得到該液滴體積V。 The image detection device as described in Claim 5, wherein the volume V of the droplet is given, or is calculated by the following steps: The camera can photograph a drop at the moment when the droplet is completely separated from the needle Silhouette image; the control computing unit can receive the dripping silhouette image, and the control computing unit cuts out a droplet on the dripping silhouette image at intervals of thickness ∆x along the droplet’s falling direction. The kth disk, the kth disk has a kth radius
Figure 03_image007
, the total available diameters are 2
Figure 03_image007
N disks, k = 1, 2,...N, N is an integer greater than 2; then the control calculation unit adds the volumes of the 1st to Nth disks to obtain the droplet volume V. 一種液滴影像檢測系統，包含： 一影像檢測裝置，具有 一針頭，可滴落一液滴； 一相機，可拍攝該液滴從該針頭分離滴落時的一側面影像； 一控制計算單元，與該影像檢測裝置電連接，可接收該側面影像，且該控制計算單元沿著該液滴滴落的方向由頭至尾每隔一厚度
Figure 03_image029
在該側面影像上切出一第k圓盤，該第k圓盤具有一第k半徑
Figure 03_image007
，總共可得直徑分別為2
Figure 03_image007
的N個圓盤，k = 1, 2,…N，N為大於2的整數； 該控制計算單元以下列算式計算該液滴體積V；
Figure 03_image041
。 A liquid droplet image detection system, comprising: an image detection device, having a needle, capable of dripping a liquid drop; a camera, capable of taking a side image of the liquid drop falling from the needle; a control computing unit, It is electrically connected with the image detection device and can receive the side image, and the control calculation unit is along the direction of the droplet falling from head to tail every other thickness
Figure 03_image029
Cut out a kth disk on the silhouette image, the kth disk has a kth radius
Figure 03_image007
, the total available diameters are 2
Figure 03_image007
N discs, k = 1, 2,...N, N is an integer greater than 2; the control calculation unit calculates the droplet volume V with the following formula;
Figure 03_image041
. 如請求項7之液滴影像檢測系統，該厚度∆x係為該側面影像的至少一畫素所對應的一長度，該第k半徑
Figure 03_image013
為該側面影像中對應於該第k圓盤的半徑的所有畫素所對應的一長度。 As in the droplet image detection system of claim 7, the thickness ∆x is a length corresponding to at least one pixel of the side image, and the kth radius
Figure 03_image013
is a length corresponding to all pixels corresponding to the radius of the k-th disk in the silhouette image. 一種液滴影像檢測方法，包含： 提供一液滴的一側面影像，該液滴具有一體積V； 根據該側面影像量測得該液滴的一液滴直徑值2a； 根據以下公式計算該液滴的一液滴高度h；
Figure 03_image003
根據以下公式計算該液滴的一液滴接觸角
Figure 03_image001
；
Figure 03_image043
。 A droplet image detection method, comprising: providing a side image of a droplet, the droplet has a volume V; measuring a droplet diameter value 2a of the droplet according to the volume of the side image; calculating the droplet according to the following formula droplet height h;
Figure 03_image003
Calculate the one-drop contact angle of the droplet according to the following formula
Figure 03_image001
;
Figure 03_image043
. 如請求項9之液滴影像檢測方法，其中 該液滴的該體積V是給定的，或是由以下步驟計算所得： 提供該液滴在滴落瞬間時的一滴落側面影像； 沿著該液滴的滴落方向依序每隔一厚度
Figure 03_image029
在該滴落側面影像上切出一第k圓盤，該第k圓盤具有一第k半徑
Figure 03_image007
，總共可得直徑分別為2
Figure 03_image045
的N個圓盤，k = 1, 2,…N ，N為大於2的整數； 依據下式計算該液滴體積V；
Figure 03_image047
。 The droplet image detection method according to claim 9, wherein the volume V of the droplet is given, or is calculated by the following steps: providing a drop silhouette image of the droplet at the instant of drop; along the The dripping direction of the droplets is sequentially every other thickness
Figure 03_image029
Cutting a kth disk on the drop silhouette, the kth disk has a kth radius
Figure 03_image007
, the total available diameters are 2
Figure 03_image045
N discs, k = 1, 2,...N, N is an integer greater than 2; Calculate the droplet volume V according to the following formula;
Figure 03_image047
.
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