TWI799873B - 測試座及其製造方法 - Google Patents
測試座及其製造方法 Download PDFInfo
- Publication number
- TWI799873B TWI799873B TW110119211A TW110119211A TWI799873B TW I799873 B TWI799873 B TW I799873B TW 110119211 A TW110119211 A TW 110119211A TW 110119211 A TW110119211 A TW 110119211A TW I799873 B TWI799873 B TW I799873B
- Authority
- TW
- Taiwan
- Prior art keywords
- manufacturing
- same
- test socket
- socket
- test
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
- G01R1/0441—Details
- G01R1/0466—Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
- G01R1/0441—Details
- G01R1/0458—Details related to environmental aspects, e.g. temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Geometry (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2020-0065853 | 2020-06-01 | ||
KR1020200065853A KR102295761B1 (ko) | 2020-06-01 | 2020-06-01 | 검사소켓 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202146906A TW202146906A (zh) | 2021-12-16 |
TWI799873B true TWI799873B (zh) | 2023-04-21 |
Family
ID=77779704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW110119211A TWI799873B (zh) | 2020-06-01 | 2021-05-27 | 測試座及其製造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20230228808A1 (zh) |
EP (1) | EP4158358A4 (zh) |
JP (1) | JP7513760B2 (zh) |
KR (1) | KR102295761B1 (zh) |
CN (1) | CN115698729A (zh) |
TW (1) | TWI799873B (zh) |
WO (1) | WO2021246719A1 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102315536B1 (ko) * | 2021-08-31 | 2021-10-21 | 하병호 | 검사소켓 및 그 제조방법 |
KR102598055B1 (ko) * | 2023-01-10 | 2023-11-06 | 하이콘 주식회사 | 반도체 소자 테스트용 소켓장치 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005180922A (ja) * | 2003-12-15 | 2005-07-07 | Yamaichi Electronics Co Ltd | 検査装置用ケーブルの配線構造 |
JP2010060527A (ja) * | 2008-09-05 | 2010-03-18 | Yokowo Co Ltd | グランド用コンタクトプローブを有する検査ユニット |
TW201339583A (zh) * | 2012-03-16 | 2013-10-01 | Choice Sun Technology Co Ltd | 測試用探針裝置 |
TW201723490A (zh) * | 2015-12-18 | 2017-07-01 | 吳俊杰 | 探針裝置 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0782026B2 (ja) * | 1992-12-15 | 1995-09-06 | 日本電気株式会社 | コンタクトプローブ |
JP3233195B2 (ja) * | 1996-07-02 | 2001-11-26 | 信越ポリマー株式会社 | 半導体素子検査用ソケット |
US6788080B1 (en) * | 2003-05-15 | 2004-09-07 | Seymour Lenz | Test probe assembly for circuits, circuit element arrays, and associated methods |
JP2006250732A (ja) | 2005-03-10 | 2006-09-21 | Ricoh Co Ltd | プローブピン及びicソケット |
JP4979214B2 (ja) * | 2005-08-31 | 2012-07-18 | 日本発條株式会社 | プローブカード |
JP2009129877A (ja) | 2007-11-28 | 2009-06-11 | S Ii R:Kk | 電子部品用ソケット |
JP2011163807A (ja) * | 2010-02-05 | 2011-08-25 | Advantest Corp | 電子部品試験装置 |
JP5960383B2 (ja) * | 2010-06-01 | 2016-08-02 | スリーエム イノベイティブ プロパティズ カンパニー | 接触子ホルダ |
KR101095907B1 (ko) * | 2010-08-17 | 2011-12-21 | 리노공업주식회사 | 검사용 소켓 |
JP6157047B2 (ja) * | 2011-02-01 | 2017-07-05 | スリーエム イノベイティブ プロパティズ カンパニー | Icデバイス用ソケット |
US8708159B2 (en) | 2011-02-16 | 2014-04-29 | Oakwood Laboratories, Llc | Manufacture of microspheres using a hydrocyclone |
KR101552552B1 (ko) * | 2014-08-22 | 2015-09-14 | 리노공업주식회사 | 테스트 소켓 |
JP6475479B2 (ja) | 2014-11-27 | 2019-02-27 | 株式会社ヨコオ | 検査ユニット |
KR101762836B1 (ko) * | 2015-09-10 | 2017-07-28 | 리노공업주식회사 | 프로브 소켓 |
KR101798853B1 (ko) * | 2016-02-12 | 2017-11-20 | 리노공업주식회사 | 테스트 소켓 |
KR101882209B1 (ko) * | 2016-03-23 | 2018-07-27 | 리노공업주식회사 | 동축 테스트소켓 조립체 |
KR101827860B1 (ko) * | 2016-08-12 | 2018-02-12 | 주식회사 아이에스시 | 핀 블록 어셈블리 |
KR101975836B1 (ko) * | 2017-08-11 | 2019-08-28 | 리노공업주식회사 | 검사장치 |
KR102044753B1 (ko) * | 2018-05-25 | 2019-11-15 | 리노공업주식회사 | 검사장치 |
-
2020
- 2020-06-01 KR KR1020200065853A patent/KR102295761B1/ko active IP Right Grant
-
2021
- 2021-05-27 TW TW110119211A patent/TWI799873B/zh active
- 2021-05-28 WO PCT/KR2021/006641 patent/WO2021246719A1/en unknown
- 2021-05-28 CN CN202180039310.2A patent/CN115698729A/zh active Pending
- 2021-05-28 JP JP2022572646A patent/JP7513760B2/ja active Active
- 2021-05-28 US US17/928,867 patent/US20230228808A1/en active Pending
- 2021-05-28 EP EP21818206.1A patent/EP4158358A4/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005180922A (ja) * | 2003-12-15 | 2005-07-07 | Yamaichi Electronics Co Ltd | 検査装置用ケーブルの配線構造 |
JP2010060527A (ja) * | 2008-09-05 | 2010-03-18 | Yokowo Co Ltd | グランド用コンタクトプローブを有する検査ユニット |
TW201339583A (zh) * | 2012-03-16 | 2013-10-01 | Choice Sun Technology Co Ltd | 測試用探針裝置 |
TW201723490A (zh) * | 2015-12-18 | 2017-07-01 | 吳俊杰 | 探針裝置 |
Also Published As
Publication number | Publication date |
---|---|
EP4158358A1 (en) | 2023-04-05 |
CN115698729A (zh) | 2023-02-03 |
US20230228808A1 (en) | 2023-07-20 |
KR102295761B1 (ko) | 2021-09-01 |
TW202146906A (zh) | 2021-12-16 |
JP7513760B2 (ja) | 2024-07-09 |
EP4158358A4 (en) | 2024-07-10 |
WO2021246719A1 (en) | 2021-12-09 |
JP2023529323A (ja) | 2023-07-10 |
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