TWI799470B - 電性檢查方法 - Google Patents
電性檢查方法 Download PDFInfo
- Publication number
- TWI799470B TWI799470B TW107141581A TW107141581A TWI799470B TW I799470 B TWI799470 B TW I799470B TW 107141581 A TW107141581 A TW 107141581A TW 107141581 A TW107141581 A TW 107141581A TW I799470 B TWI799470 B TW I799470B
- Authority
- TW
- Taiwan
- Prior art keywords
- inspection method
- electrical inspection
- electrical
- inspection
- Prior art date
Links
- 238000007689 inspection Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/041—Mountings in enclosures or in a particular environment
- G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J5/064—Ambient temperature sensor; Housing temperature sensor; Constructional details thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0801—Means for wavelength selection or discrimination
- G01J5/0802—Optical filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0875—Windows; Arrangements for fastening thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/005—Testing of reflective surfaces, e.g. mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/0675—Needle-like
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2605—Measuring capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
- G01R31/52—Testing for short-circuits, leakage current or ground faults
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/207—Filters comprising semiconducting materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1213—Filters in general, e.g. dichroic, band
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
- G01R31/54—Testing for continuity
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Geometry (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Dicing (AREA)
- Optical Filters (AREA)
- Micromachines (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017-226092 | 2017-11-24 | ||
JP2017226092A JP7025903B2 (ja) | 2017-11-24 | 2017-11-24 | 電気的検査方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201935077A TW201935077A (zh) | 2019-09-01 |
TWI799470B true TWI799470B (zh) | 2023-04-21 |
Family
ID=66630925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW107141581A TWI799470B (zh) | 2017-11-24 | 2018-11-22 | 電性檢查方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20200309637A1 (zh) |
EP (1) | EP3715934B1 (zh) |
JP (1) | JP7025903B2 (zh) |
KR (1) | KR102658807B1 (zh) |
CN (2) | CN116338431A (zh) |
TW (1) | TWI799470B (zh) |
WO (1) | WO2019102880A1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112701057A (zh) * | 2020-12-25 | 2021-04-23 | 上海华力集成电路制造有限公司 | 一种改善金属层漏电流的测试方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002033604A (ja) * | 2000-05-11 | 2002-01-31 | Murata Mfg Co Ltd | マイクロストリップラインフィルタ、デュプレクサ、通信機および共振器装置の特性調整方法 |
JP2002174721A (ja) * | 2000-12-06 | 2002-06-21 | Yokogawa Electric Corp | ファブリペローフィルタ |
TW200712551A (en) * | 2005-08-30 | 2007-04-01 | Hewlett Packard Development Co | Capacitance gap calibration |
JP2008058647A (ja) * | 2006-08-31 | 2008-03-13 | Tokyo Seimitsu Co Ltd | 光学フィルタ及び顕微鏡装置 |
US20110086443A1 (en) * | 2008-06-17 | 2011-04-14 | Takashi Kobayashi | Method of manufacturing semiconductor device |
US20140092478A1 (en) * | 2012-10-01 | 2014-04-03 | Seiko Epson Corporation | Wavelength tunable interference filter, method of manufacturing wavelength tunable interference filter, optical apparatus, and optical component |
CN105992964A (zh) * | 2014-02-13 | 2016-10-05 | 浜松光子学株式会社 | 法布里-珀罗干涉滤光器 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8900070A (nl) * | 1989-01-12 | 1990-08-01 | Philips Nv | Inrichting voor het inspekteren van een interferentiefilter voor een projektie-televisiebeeldbuis. |
JPH09331225A (ja) * | 1996-06-10 | 1997-12-22 | Sanyo Electric Co Ltd | 弾性表面波フィルターの製造方法 |
GB2418028B (en) | 2003-05-07 | 2007-08-01 | Qinetiq Ltd | Dynamic optical reflector and interrogation system |
US20060176487A1 (en) | 2004-09-27 | 2006-08-10 | William Cummings | Process control monitors for interferometric modulators |
JP2008261692A (ja) * | 2007-04-11 | 2008-10-30 | Oki Electric Ind Co Ltd | 基板検査システム及び基板検査方法 |
JP5370246B2 (ja) | 2009-05-27 | 2013-12-18 | セイコーエプソン株式会社 | 光フィルター、光フィルター装置、分析機器、および光フィルターの製造方法 |
FI20095976A0 (fi) | 2009-09-24 | 2009-09-24 | Valtion Teknillinen | Mikromekaanisesti säädettävä Fabry-Perot -interferometri ja menetelmä sen tuottamiseksi |
JP5987573B2 (ja) * | 2012-09-12 | 2016-09-07 | セイコーエプソン株式会社 | 光学モジュール、電子機器、及び駆動方法 |
JP6613564B2 (ja) | 2014-12-26 | 2019-12-04 | セイコーエプソン株式会社 | 光学フィルターデバイス、光学モジュール、及び電子機器 |
JP6606962B2 (ja) | 2015-10-08 | 2019-11-20 | セイコーエプソン株式会社 | 波長可変干渉フィルター、電子機器、波長可変干渉フィルターの設計方法、波長可変干渉フィルターの製造方法 |
-
2017
- 2017-11-24 JP JP2017226092A patent/JP7025903B2/ja active Active
-
2018
- 2018-11-09 CN CN202310320764.8A patent/CN116338431A/zh active Pending
- 2018-11-09 CN CN201880075447.1A patent/CN111406228A/zh active Pending
- 2018-11-09 US US16/765,564 patent/US20200309637A1/en active Pending
- 2018-11-09 WO PCT/JP2018/041734 patent/WO2019102880A1/ja unknown
- 2018-11-09 EP EP18881898.3A patent/EP3715934B1/en active Active
- 2018-11-09 KR KR1020207016001A patent/KR102658807B1/ko active IP Right Grant
- 2018-11-22 TW TW107141581A patent/TWI799470B/zh active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002033604A (ja) * | 2000-05-11 | 2002-01-31 | Murata Mfg Co Ltd | マイクロストリップラインフィルタ、デュプレクサ、通信機および共振器装置の特性調整方法 |
JP2002174721A (ja) * | 2000-12-06 | 2002-06-21 | Yokogawa Electric Corp | ファブリペローフィルタ |
TW200712551A (en) * | 2005-08-30 | 2007-04-01 | Hewlett Packard Development Co | Capacitance gap calibration |
JP2008058647A (ja) * | 2006-08-31 | 2008-03-13 | Tokyo Seimitsu Co Ltd | 光学フィルタ及び顕微鏡装置 |
US20110086443A1 (en) * | 2008-06-17 | 2011-04-14 | Takashi Kobayashi | Method of manufacturing semiconductor device |
US20140092478A1 (en) * | 2012-10-01 | 2014-04-03 | Seiko Epson Corporation | Wavelength tunable interference filter, method of manufacturing wavelength tunable interference filter, optical apparatus, and optical component |
CN105992964A (zh) * | 2014-02-13 | 2016-10-05 | 浜松光子学株式会社 | 法布里-珀罗干涉滤光器 |
Also Published As
Publication number | Publication date |
---|---|
US20200309637A1 (en) | 2020-10-01 |
TW201935077A (zh) | 2019-09-01 |
WO2019102880A1 (ja) | 2019-05-31 |
EP3715934A4 (en) | 2021-09-15 |
JP2019095668A (ja) | 2019-06-20 |
KR102658807B1 (ko) | 2024-04-19 |
CN111406228A (zh) | 2020-07-10 |
CN116338431A (zh) | 2023-06-27 |
EP3715934A1 (en) | 2020-09-30 |
JP7025903B2 (ja) | 2022-02-25 |
KR20200090797A (ko) | 2020-07-29 |
EP3715934B1 (en) | 2024-04-24 |
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