TWI794727B - Recycling mechanism for supporting jig - Google Patents

Recycling mechanism for supporting jig Download PDF

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TWI794727B
TWI794727B TW110101326A TW110101326A TWI794727B TW I794727 B TWI794727 B TW I794727B TW 110101326 A TW110101326 A TW 110101326A TW 110101326 A TW110101326 A TW 110101326A TW I794727 B TWI794727 B TW I794727B
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feeding
module
supporting
supporting jig
guide rails
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TW110101326A
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TW202212234A (en
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霆 朱
葉賢斌
李文強
楊建新
張凱
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大陸商深圳泰德半導體裝備有限公司
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Abstract

本發明公開一種托料治具循環機構,該托料治具循環機構包括托料治具、送料模組、回料模組和升降裝置。托料治具用於放置待清洗的物料,送料模組包括並行且間隔排布的兩條送料導軌、以及滑動安裝於兩條送料導軌上的送料件。兩條送料導軌的間隔大於托料治具在兩條送料導軌的排布方向上的寬度,送料件呈具有開口的半包圍結構並能夠定位以及帶動托料治具移動。回料模組設於送料模組的兩條送料導軌之間且位於送料件的下方,並能夠帶動托料治具移動。升降裝置設於回料模組的下方,升降裝置能夠帶動托料治具在送料模組和回料模組之間循環切換。本發明托料治具循環機構可有效提高等離子清洗機的清洗效率。 The invention discloses a material supporting jig circulation mechanism, which comprises a material supporting jig, a material feeding module, a material returning module and a lifting device. The material support fixture is used to place the materials to be cleaned, and the feeding module includes two feeding guide rails arranged in parallel and at intervals, and a feeding member slidingly installed on the two feeding guide rails. The distance between the two feeding guide rails is greater than the width of the supporting fixture in the direction of arrangement of the two feeding guide rails, and the feeding part has a semi-enclosed structure with an opening and can be positioned and driven to move the supporting fixture. The return module is located between the two feeding guide rails of the feeding module and is located below the feeding part, and can drive the material supporting jig to move. The lifting device is arranged under the feeding module, and the lifting device can drive the supporting jig to switch cyclically between the feeding module and the returning module. The circulation mechanism of the supporting jig of the present invention can effectively improve the cleaning efficiency of the plasma cleaning machine.

Description

托料治具循環機構 Recycling mechanism for supporting jig

本發明涉及等離子清洗機技術領域,特別涉及一種托料治具循環機構。 The invention relates to the technical field of plasma cleaning machines, in particular to a circulation mechanism for a material holding jig.

在IC行業中,基板和引線框架在生產時通常會遺留有溢膠、氧化物等污染物,進而影響焊線效果。目前主要是通過等離子清洗機對基板和引線框架進行清洗,但是一些等離子清洗機的清洗效率較低,進而影響生產成本。 In the IC industry, substrates and lead frames usually leave pollutants such as overflow glue and oxides during production, which will affect the effect of bonding wires. At present, the substrate and the lead frame are mainly cleaned by a plasma cleaning machine, but some plasma cleaning machines have low cleaning efficiency, thereby affecting production costs.

上述內容僅用於輔助理解發明的技術方案,並不代表承認上述內容是現有技術。 The above content is only used to assist in understanding the technical solution of the invention, and does not mean that the above content is admitted as prior art.

本發明的主要目的是提出一種托料治具循環機構,旨在解決一些等離子清洗機的清洗效率較低,進而影響生產成本的技術問題。 The main purpose of the present invention is to propose a material support jig circulation mechanism, aiming to solve the technical problem that the cleaning efficiency of some plasma cleaning machines is low, which further affects the production cost.

為實現上述目的,本發明提出的托料治具循環機構,包括托料治具、送料模組、回料模組和升降裝置。所述托料治具用於放置待清洗的物料,所述送料模組包括並行且間隔排布的兩條送料導軌、以及滑動安裝於所述兩條送料導軌上的送料件。所述兩條送料導軌的間隔大於所述托料治具在所述兩條送料導軌的排布方向上的寬度,所述送料件呈具有開口的半包圍結構並 能夠定位以及帶動所述托料治具移動。所述回料模組設於所述送料模組的所述兩條送料導軌之間且位於所述送料件的下方,並能夠帶動所述托料治具移動。升降裝置設於所述回料模組的下方,所述升降裝置能夠帶動所述托料治具在所述送料模組和所述回料模組之間循環切換。 In order to achieve the above object, the circulation mechanism of the supporting jig proposed by the present invention includes a supporting jig, a feeding module, a returning module and a lifting device. The material holding jig is used to place the materials to be cleaned, and the feeding module includes two feeding guide rails arranged in parallel and at intervals, and a feeding member slidably installed on the two feeding guide rails. The interval between the two feeding guide rails is larger than the width of the supporting fixture in the direction of arrangement of the two feeding guide rails, and the feeding member has a semi-enclosed structure with openings and It can locate and drive the material supporting jig to move. The feeding module is located between the two feeding guide rails of the feeding module and is located under the feeding part, and can drive the supporting jig to move. The lifting device is arranged below the material returning module, and the lifting device can drive the material supporting jig to switch cyclically between the feeding module and the returning material module.

在一實施例中,所述送料件具有與所述兩條送料導軌一一對應滑動連接的兩個滑動部,每個所述滑動部連接有朝向另一滑動部凸出的定位塊,所述定位塊用以支撐及定位所述托料治具。 In one embodiment, the feeding member has two sliding parts that are slidably connected to the two feeding guide rails in one-to-one correspondence, and each of the sliding parts is connected with a positioning block that protrudes toward the other sliding part. The positioning block is used for supporting and positioning the material supporting jig.

在一實施例中,所述托料治具設有與所述定位塊適配的第一定位槽,所述定位塊可卡接於所述第一定位槽內;和/或,每個所述滑動部上的所述定位塊具有面向另一滑動部的限位面,多個所述限位面共同限位所述托料治具在所述兩條送料導軌的排布方向上的位移。 In one embodiment, the supporting jig is provided with a first positioning slot adapted to the positioning block, and the positioning block can be snapped into the first positioning slot; and/or, each The positioning block on the sliding part has a limiting surface facing the other sliding part, and a plurality of the limiting surfaces jointly limit the displacement of the supporting jig in the arrangement direction of the two feeding guide rails .

在一實施例中,所述定位塊與所述送料件轉動連接,且其轉動軸線平行於所述送料導軌的延伸方向,以使所述定位塊能夠向上翻轉。 In one embodiment, the positioning block is rotatably connected with the feeding member, and its rotation axis is parallel to the extending direction of the feeding guide rail, so that the positioning block can be turned upward.

在一實施例中,每個所述滑動部上的所述定位塊還具有朝向所述回料模組上的導向面,所述導向面在遠離所述回料模組的方向上,逐漸朝另一滑動部所在的一側傾斜。 In one embodiment, the positioning block on each of the sliding parts also has a guiding surface facing the recycling module, and the guiding surface gradually moves toward the The side where the other sliding portion is located is inclined.

在一實施例中,所述回料模組包括並行且間隔排布的兩條回料導軌,至少一條所述回料導軌上滑動安裝有回料件,所述回料件能夠定位以及帶動所述托料治具移動。 In one embodiment, the returning material module includes two returning material guide rails arranged in parallel and at intervals, at least one of the returning material guide rails is slidably installed with a returning material, and the returning material can be positioned and driven The supporting fixture moves.

在一實施例中,托料治具還設有與所述回料件適配的第二定位槽,所述回料件可卡接於所述第二定位槽內。 In one embodiment, the material holding jig is further provided with a second positioning groove adapted to the return material, and the return material can be snapped into the second positioning groove.

在一實施例中,所述托料治具的底面和/或側面凸設有滾珠結構,所述滾珠結構可與所回料模組的所述回料導軌滾動接觸。 In one embodiment, the bottom surface and/or the side surface of the material supporting jig are protrudingly provided with a ball structure, and the ball structure can be in rolling contact with the material return guide rail of the material return module.

在一實施例中,所述送料模組和所述回料模組均具有換料端和清洗端,所述升降裝置設有兩個,且其中一個與所述換料端對應,另一個與所述清洗端對應。 In one embodiment, both the feeding module and the returning module have a refueling end and a cleaning end, and there are two lifting devices, one of which corresponds to the refueling end, and the other corresponds to the refueling end. The cleaning end corresponds.

在一實施例中,所述升降裝置具有用於與所述托料治具抵接的抵接部,所述抵接部和所述托料治具中的一者設有定位凸起,另一者設有與所述定位凸起適配的定位孔。 In one embodiment, the lifting device has an abutting portion for abutting against the material holding jig, one of the abutting portion and the material holding jig is provided with a positioning protrusion, and the other One is provided with a positioning hole adapted to the positioning protrusion.

本發明托料治具循環機構在應用至等離子清洗機時,可使送料模組(或回料模組)的兩端分別對應在等離子清洗機的換料工位和清洗工位上,以及使送料模組(或回料模組)的一端位於反應腔體的下方。 When the supporting fixture circulation mechanism of the present invention is applied to a plasma cleaning machine, the two ends of the feeding module (or the feeding module) can be respectively corresponding to the refueling station and the cleaning station of the plasma cleaning machine, and the One end of the feeding module (or feeding module) is located below the reaction chamber.

在清洗時,可先將待清洗的物料放置在托料治具上,再通過送料模組將托料治具送至清洗工位處,接著通過升降裝置將托料治具頂升至反應腔體內進行清洗。在清洗結束後可通過升降裝置的下降而將托料治具帶至回料模組上,回料模組再將托料治具帶動至換料工位進行物料的更換,並且在物料更換結束後,升降裝置可將托料治具帶回至送料模組上的送料件上,以進行下一批物料的清洗。 When cleaning, the material to be cleaned can be placed on the supporting fixture first, and then the supporting fixture is sent to the cleaning station through the feeding module, and then the supporting fixture is lifted to the reaction chamber by the lifting device The body is cleansed. After cleaning, the lifting device can be lowered to bring the supporting jig to the return module, and the returning module will drive the supporting jig to the refueling station for material replacement. Finally, the lifting device can bring the supporting fixture back to the feeding parts on the feeding module to clean the next batch of materials.

可以理解的是,因為送料件呈具有開口的半包圍結構,因而當升降裝置將送料件上的托料治具頂升並進行清洗時,送料件可以通過其開口避開升降裝置的阻礙而運動回換料工位,進而使得清洗機在進行清洗工序的同時,可以通過在送料件上定位另一個托料治具而同步進行換料工序,大大的提高了等離子清洗機的清洗效率,進而有利於降低生產成本。 It can be understood that, because the feeding part has a semi-enclosed structure with an opening, when the lifting device lifts the holding jig on the feeding part and cleans it, the feeding part can move through its opening avoiding the obstruction of the lifting device Back to the refueling station, so that the cleaning machine can simultaneously perform the refueling process by positioning another support jig on the feeding part while performing the cleaning process, which greatly improves the cleaning efficiency of the plasma cleaning machine, and is beneficial to reduce production costs.

另外,升降裝置還可以將回料模組上的托料治具帶回送料模組上,使得等離子清洗機可通過兩個托料治具實現換料和清洗的循環,提高清洗效率。 In addition, the lifting device can also bring the supporting jig on the return module back to the feeding module, so that the plasma cleaning machine can realize the cycle of refueling and cleaning through the two supporting jigs, and improve the cleaning efficiency.

為了更清楚地說明本發明實施例或現有技術中的技術方案,下面將對實施例或現有技術描述中所需要使用的附圖作簡單地介紹,顯而易見地,下面描述中的附圖僅僅是本發明的一些實施例,對於本領域普通技術人員來講,在不付出創造性勞動的前提下,還可以根據這些附圖示出的結構獲得其他的附圖。 In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only the present invention. For some embodiments of the invention, those skilled in the art can also obtain other drawings according to the structures shown in these drawings without creative effort.

10:等離子清洗機 10: Plasma cleaning machine

20:托料治具循環機構 20: Circulation mechanism of supporting jig

21:托料治具 21: Supporting jig

211:第一定位槽 211: The first positioning slot

212:第二定位槽 212: the second positioning slot

213:滾珠結構 213: Ball structure

214:定位孔 214: positioning hole

22:送料模組 22: Feeding module

221:送料導軌 221: Feeding guide rail

222:送料件 222: Feeding parts

2221:滑動部 2221: sliding part

2222:定位塊 2222: positioning block

2223:限位面 2223: limit surface

2224:導向面 2224: guide surface

23:回料模組 23: Recycling module

231:回料導軌 231: Return guide rail

232:回料件 232: Return parts

24:升降裝置 24: Lifting device

241:定位凸起 241: positioning protrusion

30:推料機構 30: Pushing mechanism

40:料盒安裝機構 40:Material box installation mechanism

50:導料機構 50: Guide mechanism

60:腔體模組 60: cavity module

70:料盒 70:Material box

圖1為本發明托料治具循環機構所應用的等離子清洗機一實施例的結構示意圖;圖2為本發明托料治具循環機構的治具循環示意圖;圖3為本發明托料治具循環機構一實施例的結構示意圖;圖4為本發明托料治具循環機構的送料件一實施例的結構示意圖;圖5為本發明托料治具循環機構的托料治具一實施例的結構示意圖;圖6為本發明托料治具循環機構又一實施例的治具循環示意圖。 Fig. 1 is a schematic structural view of an embodiment of the plasma cleaning machine used in the circulation mechanism of the supporting fixture of the present invention; Fig. 2 is a schematic diagram of the circulation of the fixture of the circulating mechanism of the supporting fixture of the present invention; Fig. 3 is a schematic diagram of the supporting fixture of the present invention A schematic structural view of an embodiment of the circulation mechanism; Fig. 4 is a schematic structural view of an embodiment of the feeding part of the circulation mechanism of the supporting fixture of the present invention; Fig. 5 is a schematic diagram of an embodiment of the supporting fixture of the circulating mechanism of the supporting fixture of the present invention Schematic diagram of the structure; FIG. 6 is a schematic diagram of the jig cycle of another embodiment of the cycle mechanism of the supporting jig of the present invention.

本發明目的的實現、功能特點及優點將結合實施例,參照附圖做進一步說明。 The realization of the purpose of the present invention, functional characteristics and advantages will be further described in conjunction with the embodiments and with reference to the accompanying drawings.

需要說明,若本發明實施例中有涉及方向性指示(諸如上、下、左、右、前、後……),則該方向性指示僅用於解釋在某一特定姿態(如附圖所示)下各部件之間的相對位置關係、運動情況等,如果該特定姿態發生改變時,則該方向性指示也相應地隨之改變。 It should be noted that if there is a directional indication (such as up, down, left, right, front, back...) in the embodiment of the present invention, the directional indication is only used to explain the position in a certain posture (as shown in the accompanying drawing). If the specific posture changes, the directional indication will also change accordingly.

另外,若本發明實施例中有涉及“第一”、“第二”等的描述,則該“第一”、“第二”等的描述僅用於描述目的,而不能理解為指示或暗示其相對重要性或者隱含指明所指示的技術特徵的數量。由此,限定有“第 一”、“第二”的特徵可以明示或者隱含地包括至少一個該特徵。另外,全文中出現的“和/或”的含義為,包括三個並列的方案,以“A和/或B”為例,包括A方案,或B方案,或A和B同時滿足的方案。另外,各個實施例之間的技術方案可以相互結合,但是必須是以本領域普通技術人員能夠實現為基礎,當技術方案的結合出現相互矛盾或無法實現時應當認為這種技術方案的結合不存在,也不在本發明要求的保護範圍之內。 In addition, if there are descriptions involving "first", "second" and so on in the embodiments of the present invention, the descriptions of "first", "second" and so on are only for descriptive purposes, and should not be interpreted as indicating or implying Its relative importance or implicitly indicates the number of technical features indicated. Therefore, it is limited to "the The features of "one", "second" can explicitly or implicitly include at least one of these features. In addition, the meaning of "and/or" appearing in the whole text is to include three parallel schemes, starting with "A and/or B "For example, including A scheme, or B scheme, or a scheme that satisfies A and B at the same time. In addition, the technical schemes between the various embodiments can be combined with each other, but it must be based on the realization of those skilled in the art. When When the combination of technical solutions contradicts each other or cannot be realized, it should be considered that the combination of technical solutions does not exist, and it is not within the protection scope of the present invention.

如圖1所示,現有的一些等離子清洗機10主要包括有料盒安裝機構40、推料機構30、導料機構50、物料運送機構(比如托料治具循環機構20,下同)以及腔體模組60。在等離子清洗機10對基板、引線框架等物料進行清洗之前,會通過料盒70將多個物料存放好,料盒70呈盒狀結構並具有前後貫通的開口,料盒70內具有上下排布的多層物料放置層,其中每一層都能夠放置一片待清洗或已經清洗結束的物料。料盒70前後貫通的開口使得物料可以被推出或推回,進而實現物料在料盒70內的上下料。 As shown in Figure 1, some existing plasma cleaning machines 10 mainly include a material box installation mechanism 40, a material pushing mechanism 30, a material guiding mechanism 50, a material conveying mechanism (such as a material holder circulation mechanism 20, the same below) and a cavity Module 60. Before the plasma cleaning machine 10 cleans materials such as substrates and lead frames, a plurality of materials will be stored through the material box 70. A multi-layer material placement layer, each of which can place a piece of material to be cleaned or has been cleaned. The front and back openings of the material box 70 enable the material to be pushed out or pushed back, thereby realizing the loading and unloading of the material in the material box 70 .

料盒安裝機構40則用於安裝及定位料盒70,並且可帶動料盒70做升降運動,以使每一層物料放置層內的物料都可以被推出或推回。 The material box installation mechanism 40 is used for installing and positioning the material box 70, and can drive the material box 70 to perform lifting movement, so that the materials in each layer of material storage layer can be pushed out or pushed back.

推料機構30主要用於將料盒70內的基板或引線框架推到物料運送機構上(比如托料治具21),進而完成上料工序。以及,推料機構30還用於將托料治具21上清洗好的基板或引線框架推回料盒70內,進而完成下料工序。當然,推料機構30可以設置有多個,比如設置有兩個推料機構30,其中一個設於料盒安裝機構40的後方並且負責將料盒70內的物料推出,另一個則可以設於料盒安裝機構40的前方並且負責將托料治具21上清洗好的物料推回料盒70內。 The material pushing mechanism 30 is mainly used to push the substrate or lead frame in the material box 70 onto the material conveying mechanism (such as the material supporting jig 21 ), and then complete the material loading process. And, the material pushing mechanism 30 is also used to push the cleaned substrate or lead frame on the material holding jig 21 back into the material box 70 to complete the material unloading process. Of course, multiple pushing mechanisms 30 can be provided, for example, two pushing mechanisms 30 are provided, one of which is located at the rear of the magazine installation mechanism 40 and is responsible for pushing out the material in the magazine 70, and the other can be located at The front of the magazine installation mechanism 40 is responsible for pushing the cleaned material on the material holder 21 back into the magazine 70 .

而導料機構50設於料盒安裝機構40和物料運送機構之間,主要用於將物料在料盒70和物料運送機構(如托料治具21)之間進行傳送,既能夠 避免推料機構30推料不完全而影響上下料的情況,還能夠減少粉塵污染的產生。具體的,在推料機構30將料盒70內的物料推出之後,導料機構50將物料傳送至物料運送機構上;在推料機構30將物料運送機構上的物料推出之後,導料機構50將物料反向運送回料盒70內,保證上下料的順利進行。 The material guide mechanism 50 is located between the material box installation mechanism 40 and the material delivery mechanism, and is mainly used to transmit the material between the material box 70 and the material delivery mechanism (such as the material holder 21). Avoiding the situation that the material pushing mechanism 30 is incompletely pushing the material affects loading and unloading, and can also reduce the generation of dust pollution. Specifically, after the pushing mechanism 30 pushes out the material in the material box 70, the material guiding mechanism 50 transmits the material to the material delivery mechanism; after the pushing mechanism 30 pushes out the material on the material delivery mechanism, the material guiding mechanism 50 The material is reversely transported back into the material box 70 to ensure the smooth progress of loading and unloading.

物料運送機構主要用於將料盒安裝機構40處的物料運送至腔體模組60處進行清洗,以及將腔體模組60處清洗完成的物料運回料盒安裝機構40處進行存放。物料運送機構在運送物料時,可以通過托料治具21先將物料放置並定位好,再通過驅動件、運送軌道等將托料治具21運送至腔體模組60處或料盒安裝機構40處。 The material conveying mechanism is mainly used to transport the materials at the box installation mechanism 40 to the cavity module 60 for cleaning, and transport the cleaned materials at the cavity module 60 back to the box installation mechanism 40 for storage. When the material delivery mechanism transports the material, it can first place and position the material through the material support jig 21, and then transport the material support jig 21 to the cavity module 60 or the material box installation mechanism through the driving part and the delivery track. 40 places.

腔體模組60包括用於清洗物料的反應腔體,物料被運送至腔體模組60後,可將物料置入反應腔體內,反應腔體內的電場會通過電離氣體(如氬氣)而產生等離子體,進而借助等離子體具有活性組分的性能而對物料進行清洗。 The chamber module 60 includes a reaction chamber for cleaning materials. After the materials are transported to the chamber module 60, the materials can be placed in the reaction chamber. Plasma is generated, and then the material is cleaned with the help of plasma with the properties of active components.

然而在現有的一些等離子清洗機10的清洗效率較低,進而影響生產成本,因此本發明提出一種托料治具循環機構20,以通過提高物料的運送效率來提高等離子清洗機10的清洗效率,進而解決上述的技術問題。 However, the cleaning efficiency of some existing plasma cleaning machines 10 is relatively low, which in turn affects the production cost. Therefore, the present invention proposes a material holder circulation mechanism 20 to improve the cleaning efficiency of the plasma cleaning machine 10 by improving the delivery efficiency of materials. And then solve above-mentioned technical problem.

在本發明實施例中,如圖2至圖6所示,該托料治具循環機構20包括托料治具21、送料模組22、回料模組23和升降裝置24。所述托料治具21用於放置待清洗的物料,托料治具21可以通過夾持、緊壓、吸附等等方式對所放置的物料進行定位,具體的可以根據實際需要自行設定。在本實施例中,推料治具上可以設置多個用於夾持物料的夾料槽,夾料槽可以同料盒70一樣具有前後貫通的開口,以便於物料的推進和退出。夾料槽的寬度可調,進而方便物料的推進和推出,並且還能夠更好的夾緊物料、以及適應不同寬度的物料。 In the embodiment of the present invention, as shown in FIG. 2 to FIG. 6 , the supporting fixture circulation mechanism 20 includes a supporting fixture 21 , a feeding module 22 , a returning module 23 and a lifting device 24 . The material holding jig 21 is used to place the materials to be cleaned. The material holding jig 21 can position the placed materials by clamping, pressing, absorbing, etc., and can be specifically set according to actual needs. In this embodiment, a plurality of clamping grooves for clamping materials can be arranged on the material pushing jig, and the material clamping grooves can have front and rear through openings like the material box 70, so as to facilitate the advancement and withdrawal of materials. The width of the clamping groove is adjustable, which facilitates the advancement and ejection of materials, and can better clamp materials and adapt to materials of different widths.

所述送料模組22包括並行且間隔排布的兩條送料導軌221、以及滑動安裝於所述兩條送料導軌221上的送料件222。本發明托料治具循環機構20在應用至等離子清洗機10時,可使送料模組22(或回料模組23)的兩端分別對應在等離子清洗機10的料盒安裝機構40和腔體模組60處,也即對應在換料工位和清洗工位上,以及使送料模組22(或回料模組23)的一端位於腔體模組60的反應腔體的下方。 The feeding module 22 includes two feeding guide rails 221 arranged in parallel and at intervals, and a feeding member 222 slidably mounted on the two feeding guide rails 221 . When the supporting fixture circulation mechanism 20 of the present invention is applied to the plasma cleaning machine 10, the two ends of the feeding module 22 (or the feeding module 23) can be respectively corresponding to the material box installation mechanism 40 and the chamber of the plasma cleaning machine 10. Body module 60, that is, corresponding to the refueling station and the cleaning station, and one end of the feeding module 22 (or returning module 23) is located below the reaction chamber of the cavity module 60.

所述兩條送料導軌221的間隔大於所述托料治具21在所述兩條送料導軌221的排布方向上的寬度,具體的,以托料治具21呈長方形結構為例,托料治具21被運送時,兩條送料導軌221與托料治具21的兩條寬邊相平行,兩條送料導軌221之間的間距大於托料治具21的長邊。托料治具21通過定位在送料件222上而能夠在兩條送料軌道上滑動。 The interval between the two feeding rails 221 is greater than the width of the supporting fixture 21 in the direction of arrangement of the two feeding rails 221. Specifically, taking the rectangular structure of the supporting fixture 21 as an example, the supporting fixture 21 has a rectangular structure. When the jig 21 is transported, the two feeding guide rails 221 are parallel to the two wide sides of the material supporting jig 21 , and the distance between the two feeding guide rails 221 is greater than the long sides of the material supporting jig 21 . The material supporting jig 21 can slide on two feeding rails by being positioned on the feeding member 222 .

所述送料件222呈具有開口的半包圍結構並能夠定位以及帶動所述托料治具21移動。具體的,送料件222大致呈C型開口結構,送料件222具有兩個滑動部2221和連接於兩個滑動部2221之間的連接部,連接部能夠保持兩個滑動部2221的相對位置,避免兩個滑動部2221相對偏移而影響托料治具21的定位。 The feeding member 222 has a semi-enclosed structure with an opening and can be positioned and driven to move the material holding jig 21 . Specifically, the feeding part 222 is roughly a C-shaped opening structure. The feeding part 222 has two sliding parts 2221 and a connecting part connected between the two sliding parts 2221. The connecting part can maintain the relative position of the two sliding parts 2221 to avoid The relative offset of the two sliding parts 2221 affects the positioning of the material holder 21 .

托料治具21定位在送料件222上的方式有多種,可以在送料件222上設置定位凹槽,再直接將托料治具21放置在送料件222上,也可以通過夾持、卡接、托架等方式定位托料治具21,具體的可以根據實際需要進行設定。當然,送料模組22還可以包括電機、氣缸等驅動件,以用於驅動送料件222在送料導軌221上滑動,進而帶動托料治具21滑動。 There are many ways for the supporting fixture 21 to be positioned on the feeding part 222. A positioning groove can be set on the feeding part 222, and then the supporting fixture 21 can be directly placed on the feeding part 222, or it can be clamped or clamped. , bracket, etc. to position the material holding fixture 21, which can be set according to actual needs. Certainly, the feeding module 22 may also include driving parts such as motors and cylinders, which are used to drive the feeding part 222 to slide on the feeding guide rail 221 , and then drive the supporting jig 21 to slide.

可以理解的是,因為送料件222呈具有開口的半包圍結構,當升降裝置24自送料件222的下方穿過送料件222並將送料件222上物料頂升時,送料件222可以通過其開口避開升降裝置24而沿送料導軌221往回運動,並且不 受升降裝置24的影響。並且送料件222往回運動後便不會再限制托料治具21在豎向方向上的運動,進而升降裝置24可以將頂升後的托料治具21帶至回料模組23上。 It can be understood that, because the feeding part 222 is a semi-enclosed structure with an opening, when the lifting device 24 passes through the feeding part 222 from below the feeding part 222 and lifts the material on the feeding part 222, the feeding part 222 can pass through its opening Avoid lifting device 24 and move back along feeding guide rail 221, and do not Affected by the lifting device 24. And after the feeding part 222 moves back, it will no longer restrict the movement of the material supporting fixture 21 in the vertical direction, and then the lifting device 24 can bring the lifted material supporting fixture 21 to the return module 23 .

所述回料模組23設於所述送料模組22的所述兩條送料導軌221之間且位於所述送料件222的下方,並能夠帶動所述托料治具21移動。回料模組23可以是傳送帶、滾筒等傳送機構,也可以由回料導軌231與回料件232組成。回料模組23可以只設置一條回料導軌231,也可以設置多條,具體的可以根據實際需要進行設定。 The material returning module 23 is located between the two feeding guide rails 221 of the feeding module 22 and below the feeding member 222 , and can drive the material supporting jig 21 to move. The return module 23 can be a conveying mechanism such as a conveyor belt or a roller, and can also be composed of a return guide rail 231 and a return member 232 . The material returning module 23 can be provided with only one material returning guide rail 231 , and can also be provided with multiple ones, which can be specifically set according to actual needs.

升降裝置24設於所述回料模組23的下方,所述升降裝置24能夠帶動所述托料治具21在所述送料模組22和所述回料模組23之間循環切換。具體的,在清洗時,可先將待清洗的物料放置在托料治具21上,再通過送料模組22將托料治具21送至清洗工位處,接著通過升降裝置24將托料治具21頂升至反應腔體內進行清洗。在清洗結束後可通過升降裝置24的下降而將托料治具21帶至回料模組23上,回料模組23再將托料治具21帶動至換料工位進行物料的更換,並且在物料更換結束後,升降裝置24可將托料治具21帶回至送料模組22上的送料件222上,以進行下一批物料的清洗。 The lifting device 24 is arranged below the material returning module 23 , and the lifting device 24 can drive the material supporting jig 21 to cycle switch between the feeding module 22 and the returning material module 23 . Specifically, when cleaning, the material to be cleaned can be placed on the material support jig 21 first, and then the support material jig 21 is sent to the cleaning station through the feeding module 22, and then the support material is lifted by the lifting device 24. The jig 21 is lifted into the reaction chamber for cleaning. After cleaning, the lifting device 24 can be lowered to bring the supporting fixture 21 to the return module 23, and the return module 23 will drive the supporting fixture 21 to the refueling station for material replacement. And after the replacement of the materials, the lifting device 24 can bring the material supporting jig 21 back to the feeding member 222 on the feeding module 22 to clean the next batch of materials.

其中,升降裝置24將托料治具21從回料模組23上帶回送料模組22上的送料件222的方式有多種。例如,可以先使送料件222和托料治具21在上下方向上錯位,在升降裝置24將托料治具21頂升至送料模組22的上方之後再將托料治具21定位在送料件222上。也可以在送料件222上設置可以移動、翻轉、折疊的結構,以避免送料件222阻礙托料治具21回到送料模組22上。 There are many ways for the lifting device 24 to bring the supporting jig 21 from the returning module 23 back to the feeding part 222 on the feeding module 22 . For example, the feeding member 222 and the supporting fixture 21 can be dislocated in the up and down direction first, and the supporting fixture 21 is positioned on the feeding module 22 after the lifting device 24 lifts the supporting fixture 21 to the top of the feeding module 22. Item 222 on. A movable, overturned, and foldable structure can also be provided on the feeding member 222 to prevent the feeding member 222 from hindering the feeding jig 21 from returning to the feeding module 22 .

在更換物料時,可以直接在回料模組23上更換,也可以在將托料治具21回到送料件222上之後在更換,或者其他的更換方式。例如,在一實施例中,物料主要是在送料模組22的上方進行更換,此時可以先通過升降裝置 24將托料治具21頂升至托料模組的上方並進行物料的更換。在更換結束後,升降裝置24帶動托料治具21下降,同時送料件222在下方截住並定位托料治具21,使得托料治具21不跟隨升降裝置24繼續往下運動,以繼續對物料進行循環清洗。 When replacing the material, it can be replaced directly on the return module 23 , or it can be replaced after the material support jig 21 is returned to the feeding part 222 , or other replacement methods. For example, in one embodiment, the material is mainly replaced above the feeding module 22, at this time, it can first pass through the lifting device 24. Lift the material supporting jig 21 to the top of the material supporting module and replace the material. After the replacement, the lifting device 24 drives the material supporting fixture 21 to descend, and at the same time, the feeding part 222 intercepts and positions the material supporting fixture 21 below, so that the material supporting fixture 21 does not follow the lifting device 24 and continues to move downwards to continue The material is cleaned circularly.

可以理解的是,因為送料件222呈具有開口的半包圍結構,因而當升降裝置24將送料件222上的托料治具21頂升並進行清洗時,送料件222可以通過其開口避開升降裝置24的阻礙而運動回換料工位,進而使得清洗機在進行清洗工序的同時,可以通過在送料件222上定位另一個托料治具21而同步進行換料工序,大大的提高了等離子清洗機10的清洗效率,進而有利於降低生產成本。另外,升降裝置24還可以將回料模組23上的托料治具21帶回送料模組22上,使得等離子清洗機10可通過兩個托料治具21實現換料和清洗的循環,提高清洗效率。 It can be understood that, because the feeding part 222 has a semi-enclosed structure with an opening, when the lifting device 24 lifts the holding jig 21 on the feeding part 222 and cleans it, the feeding part 222 can avoid lifting and lowering through its opening. The obstruction of device 24 moves back to the refueling station, so that the cleaning machine can perform the refueling process synchronously by positioning another supporting fixture 21 on the feeding part 222 while performing the cleaning process, which greatly improves the plasma The cleaning efficiency of the cleaning machine 10 is beneficial to reduce the production cost. In addition, the lifting device 24 can also bring the material supporting jig 21 on the return module 23 back to the feeding module 22, so that the plasma cleaning machine 10 can realize the cycle of refueling and cleaning through the two supporting jigs 21, Improve cleaning efficiency.

在一實施例中,結合圖3至圖5,所述送料件222具有與所述兩條送料導軌221一一對應滑動連接的兩個滑動部2221,每個所述滑動部2221連接有朝向另一滑動部2221凸出的定位塊2222,所述定位塊2222用以支撐及定位所述托料治具21。每個滑動部2221大致呈板狀結構,兩個滑動部2221之間還連接有連接部,以保證兩個滑動部2221之間的相對位置保持穩定。自滑動部2221上凸出的定位塊2222可以與滑動部2221固定連接,也可以活動連接,僅需能夠支撐托料治具21即可。 In one embodiment, with reference to FIGS. 3 to 5 , the feeding member 222 has two sliding parts 2221 that are slidably connected to the two feeding guide rails 221 one by one, and each of the sliding parts 2221 is connected with a A positioning block 2222 protrudes from the sliding portion 2221 , and the positioning block 2222 is used for supporting and positioning the material holding jig 21 . Each sliding part 2221 is roughly in the shape of a plate, and a connecting part is connected between the two sliding parts 2221 to ensure that the relative position between the two sliding parts 2221 remains stable. The positioning block 2222 protruding from the sliding part 2221 can be fixedly connected with the sliding part 2221 , or can be connected flexibly, as long as it can support the material holding jig 21 .

而定位塊2222定位托料治具21的方式有多種,例如,可以是所述托料治具21設有與所述定位塊2222適配的第一定位槽211,所述定位塊2222可卡接於所述第一定位槽211內。當然,也可以是定位塊2222上設有凹槽,而托料治具21上對應設有凸起,進而可以通過凸起與凹槽的卡接將托料治具21進行定位。 There are many ways for the positioning block 2222 to position the supporting fixture 21. For example, the supporting fixture 21 may be provided with a first positioning groove 211 adapted to the positioning block 2222, and the positioning block 2222 can be clamped. connected to the first positioning groove 211. Of course, it is also possible that the positioning block 2222 is provided with a groove, and the material supporting jig 21 is correspondingly provided with a protrusion, and then the material supporting jig 21 can be positioned through the engagement between the protrusion and the groove.

在另外的一些實施例中,如圖4所示,每個所述滑動部2221上的所述定位塊2222具有面向另一滑動部2221的限位面2223,多個所述限位面2223共同限位所述托料治具21在所述兩條送料導軌221的排布方向上的位移。具體的,當托料治具21定位到送料件222上時,每個定位塊2222上的限位面2223可以與托料治具21的側面相抵接,以避免托料治具21在兩條送條導軌的排布方向上發生偏移。 In some other embodiments, as shown in FIG. 4 , the positioning block 2222 on each of the sliding parts 2221 has a limiting surface 2223 facing the other sliding part 2221, and a plurality of the limiting surfaces 2223 have a common Limiting the displacement of the material supporting jig 21 in the arrangement direction of the two feeding guide rails 221 . Specifically, when the material supporting jig 21 is positioned on the feeding member 222, the limit surface 2223 on each positioning block 2222 can be abutted against the side of the material supporting jig 21, so as to prevent the material supporting jig 21 from being placed between the two sides. The direction in which the strip guides are arranged deviates.

在一實施例中,如圖4所示,所述定位塊2222與所述送料件222轉動連接,且其轉動軸線平行於所述送料導軌221的延伸方向,以使所述定位塊2222能夠向上翻轉。進而使得托料治具21能夠從送料件222的下方直接穿過送料件222而被頂升至送料件222的上方,而不需要送料件222移動避讓,簡化了托料治具21的切換過程。當然,需要注意的是,應確保托料治具21抵接在定位塊2222上時定位塊2222不會向下翻轉,為達到這個目的,可以通過在定位塊2222的轉軸、或定位塊2222與送料件222之間的接觸面等設置限位元結構,確保托料治具21定位在定位塊2222上時不會往下掉落,同時又能夠從送料件222的下方推動定位塊2222翻轉而運動至送料件222的上方。 In one embodiment, as shown in FIG. 4, the positioning block 2222 is rotatably connected to the feeding member 222, and its rotation axis is parallel to the extension direction of the feeding guide rail 221, so that the positioning block 2222 can move upward Flip. Furthermore, the supporting jig 21 can pass directly through the feeding member 222 from below the feeding member 222 and be lifted to the top of the feeding member 222 without the need for the feeding member 222 to move and avoid, which simplifies the switching process of the supporting jig 21 . Of course, it should be noted that the positioning block 2222 will not turn downwards when the supporting jig 21 abuts on the positioning block 2222. The contact surface between the feeding parts 222 and the like are provided with a limiter structure to ensure that the material support fixture 21 will not fall down when it is positioned on the positioning block 2222, and at the same time, the positioning block 2222 can be pushed from the bottom of the feeding part 222 to turn over. Move to the top of the feeding part 222.

在一實施例中,結合圖3及圖4,為使得托料治具21向上穿過送料件222時可以更加順暢,每個所述滑動部2221上的所述定位塊2222還具有朝向所述回料模組23上的導向面2224,所述導向面2224在遠離所述回料模組23的方向上,逐漸朝另一滑動部2221所在的一側傾斜。托料治具21可以通過抵接導向面2224而很好的推動定位塊2222翻轉,進而更加快速的運動至送料件222的上方。 In one embodiment, referring to FIG. 3 and FIG. 4 , in order to make the supporting jig 21 go upwards through the feeding member 222 more smoothly, the positioning block 2222 on each sliding part 2221 also has a The guiding surface 2224 on the recycling module 23 is gradually inclined towards the side where the other sliding part 2221 is located in the direction away from the recycling module 23 . The material supporting jig 21 can well push the positioning block 2222 to turn over by abutting against the guide surface 2224 , and then move to the top of the feeding member 222 more quickly.

在一實施例中,如圖6所示,所述回料模組23包括並行且間隔排布的兩條回料導軌231,至少一條所述回料導軌231上滑動安裝有回料件232,所述回料件232能夠定位以及帶動所述托料治具21移動。如此使得托料治具21 可以直接落到兩條回料導軌231上,並在回料件232的帶動下沿著回料導軌231運動。而不需要再設置用於托住托料治具21的輔助裝置,使得托料治具循環機構20的結構更為簡單緊湊、所佔用的安裝空間更小。 In one embodiment, as shown in FIG. 6 , the returning material module 23 includes two returning material guide rails 231 arranged in parallel and at intervals, at least one returning material guide rail 231 is slidably mounted with a returning material 232 , The return material 232 can be positioned and drives the material supporting jig 21 to move. So that the holding jig 21 It can directly fall onto the two return guide rails 231 and move along the return guide rails 231 driven by the return member 232 . There is no need to provide an auxiliary device for supporting the material holding jig 21 , so that the structure of the material holding jig circulation mechanism 20 is simpler and more compact, and the installation space occupied is smaller.

在一實施例中,結合圖5及圖6,托料治具21還設有與所述回料件232適配的第二定位槽212,所述回料件232可卡接於所述第二定位槽212內。在本實施例中,第二定位槽212為設置於托料治具21邊緣的貫通槽,如此不僅便於回料件232的卡接,還便於托料治具21的加工。當然,第二定位槽212也可以為開口朝下的非貫通槽,第二定位槽212的數量也可設置有多個,在此均不作具體的限定,僅需能夠與回料件232卡接適配即可。 In one embodiment, referring to FIG. 5 and FIG. 6 , the holding jig 21 is further provided with a second positioning groove 212 adapted to the return member 232 , and the return member 232 can be clipped to the first Inside the two positioning slots 212. In this embodiment, the second positioning groove 212 is a through groove provided on the edge of the material holding jig 21 , which not only facilitates the clamping of the return material 232 but also facilitates the processing of the material holding jig 21 . Of course, the second positioning groove 212 can also be a non-through groove with the opening facing downwards, and the number of the second positioning groove 212 can also be provided in multiples, which are not specifically limited here, and only need to be able to be clamped with the return member 232 Just adapt.

在一實施例中,如圖5所示,所述托料治具21的底面和/或側面凸設有滾珠結構213,所述滾珠結構213可與所回料模組23的所述回料導軌231滾動接觸。如此可減少托料治具21與回料導軌231之間的摩擦,使得托料治具21可以滑動得更加順暢和快速,提高等離子清洗機10的清洗效率。 In one embodiment, as shown in FIG. 5 , a ball structure 213 is protruded from the bottom surface and/or side of the material holding jig 21 , and the ball structure 213 can be connected with the return material of the return material module 23 . The guide rail 231 is in rolling contact. In this way, the friction between the material supporting jig 21 and the return guide rail 231 can be reduced, so that the material supporting jig 21 can slide more smoothly and quickly, and the cleaning efficiency of the plasma cleaning machine 10 can be improved.

在一實施例中,如圖2或圖3所示,所述送料模組22和所述回料模組23均具有換料端和清洗端,所述升降裝置24設有兩個,且其中一個與所述換料端對應,另一個與所述清洗端對應。可以理解的是,通過兩個升降裝置24分別負責托料治具21的頂升換料和頂升清洗,進而不需要控制升降裝置24沿送料導軌221(或回料導軌231)的延伸方向來回運動,不僅有利於提高等離子清洗機10的清洗效率,還不需要為升降裝置24預留來回運動的空間,使得等離子清洗機10的結構可以更加的緊湊。 In one embodiment, as shown in FIG. 2 or FIG. 3, both the feeding module 22 and the returning module 23 have a refueling end and a cleaning end, and two lifting devices 24 are provided, and wherein One corresponds to the refueling end, and the other corresponds to the cleaning end. It can be understood that the two elevating devices 24 are respectively responsible for the lifting and refueling and lifting cleaning of the supporting jig 21, so that there is no need to control the elevating device 24 back and forth along the extending direction of the feeding guide rail 221 (or the return guide rail 231). The movement not only helps to improve the cleaning efficiency of the plasma cleaning machine 10, but also does not need to reserve a space for the lifting device 24 to move back and forth, so that the structure of the plasma cleaning machine 10 can be more compact.

在一實施例中,如圖6所示,所述升降裝置24具有用於與所述托料治具21抵接的抵接部,所述抵接部和所述托料治具21中的一者設有定位凸起241,另一者設有與所述定位凸起241適配的定位孔214。具體的,可以是升降裝置24的抵接部上設置有定位凸起241,托料治具21的底面設置有定位孔 214。在升降裝置24將托料治具21頂升時,抵接部上的定位凸起241伸入定位孔214內。直至抵接部與托料治具21相抵接。以保證托料治具21在頂升和下降的過程中都不會發生偏移或掉落的情況。 In one embodiment, as shown in FIG. 6 , the lifting device 24 has an abutting portion for abutting against the material holding jig 21 , and the abutting portion and the material holding jig 21 One is provided with a positioning protrusion 241 , and the other is provided with a positioning hole 214 adapted to the positioning protrusion 241 . Specifically, positioning protrusions 241 may be provided on the abutting portion of the lifting device 24, and positioning holes may be provided on the bottom surface of the material holding jig 21. 214. When the lifting device 24 lifts the material holding jig 21 up, the positioning protrusion 241 on the abutting portion extends into the positioning hole 214 . until the abutting portion abuts against the material holding jig 21 . In order to ensure that the material holding jig 21 will not be shifted or dropped during the process of jacking up and down.

以上所述僅為本發明的優選實施例,並非因此限制本發明的專利範圍,凡是在本發明的發明構思下,利用本發明說明書及附圖內容所作的等效結構變換,或直接/間接運用在其他相關的技術領域均包括在本發明的專利保護範圍內。 The above is only a preferred embodiment of the present invention, and does not therefore limit the patent scope of the present invention. Under the inventive concept of the present invention, the equivalent structural transformation made by using the description of the present invention and the contents of the accompanying drawings, or direct/indirect use All other relevant technical fields are included in the patent protection scope of the present invention.

20:托料治具循環機構 20: Circulation mechanism of supporting jig

21:托料治具 21: Supporting jig

222:送料件 222: Feeding parts

22:送料模組 22: Feeding module

23:回料模組 23: Recycling module

24:升降裝置 24: Lifting device

Claims (9)

一種托料治具循環機構,其特徵在於,包括:托料治具,用於放置待清洗的物料;送料模組,包括並行且間隔排布的兩條送料導軌、以及滑動安裝於所述兩條送料導軌上的送料件;所述兩條送料導軌的間隔大於所述托料治具在所述兩條送料導軌的排布方向上的寬度,所述送料件呈具有開口的半包圍結構並能夠定位以及帶動所述托料治具移動;回料模組,設於所述送料模組的所述兩條送料導軌之間且位於所述送料件的下方,並能夠帶動所述托料治具移動;以及,升降裝置,設於所述回料模組的下方,所述升降裝置能夠帶動所述托料治具在所述送料模組和所述回料模組之間循環切換;所述送料件具有與所述兩條送料導軌一一對應滑動連接的兩個滑動部,每個所述滑動部連接有朝向另一滑動部凸出的定位塊,所述定位塊用以支撐及定位所述托料治具;每個所述滑動部呈板狀結構,兩個所述滑動部之間還連接有一連接部,以保證兩個所述滑動部之間的相對位置保持穩定。 A material support fixture circulation mechanism, characterized in that it includes: a material support fixture for placing materials to be cleaned; a feeding module, including two feeding guide rails arranged in parallel and spaced apart, and slidingly installed on the two feeding guide rails. The feeding part on the strip feeding guide rail; the interval between the two feeding guide rails is greater than the width of the supporting fixture in the arrangement direction of the two feeding guide rails, and the feeding part is a semi-enclosed structure with an opening and It can locate and drive the material supporting jig to move; the return module is located between the two feeding guide rails of the feeding module and is located below the feeding part, and can drive the material supporting jig tool movement; and, the lifting device is located below the returning module, and the lifting device can drive the supporting fixture to switch cyclically between the feeding module and the returning module; The feeding part has two sliding parts that are slidably connected to the two feeding guide rails one by one, and each of the sliding parts is connected with a positioning block that protrudes toward the other sliding part, and the positioning block is used for supporting and positioning The material holding jig; each of the sliding parts has a plate-like structure, and a connecting part is connected between the two sliding parts to ensure that the relative position between the two sliding parts remains stable. 如請求項1所述的托料治具循環機構,所述托料治具設有與所述定位塊適配的第一定位槽,所述定位塊可卡接於所述第一定位槽內;和/或,每個所述滑動部上的所述定位塊具有面向另一滑動部的限位面,多個所述限位面共同限位所述托料治具在所述兩條送料導軌的排布方向上的位移。 According to the circulation mechanism of the supporting jig described in claim 1, the supporting jig is provided with a first positioning slot adapted to the positioning block, and the positioning block can be snapped into the first positioning slot and/or, the positioning block on each of the sliding parts has a limiting surface facing the other sliding part, and a plurality of the limiting surfaces jointly limit the material holding jig in the two feeding Displacement in the direction of rail arrangement. 如請求項1所述的托料治具循環機構,所述定位塊與所述送料件轉動連接,以使所述定位塊能夠向上翻轉。 According to the circulation mechanism of the supporting jig described in claim 1, the positioning block is rotatably connected with the feeding member, so that the positioning block can be turned upwards. 如請求項3所述的托料治具循環機構,每個所述滑動部上的所述定位塊還具有朝向所述回料模組上的導向面,所述導向面在遠離所述回料模組的方向上,逐漸朝另一滑動部所在的一側傾斜。 According to the circulation mechanism of the supporting jig described in claim 3, the positioning block on each of the sliding parts also has a guiding surface facing the returning material module, and the guiding surface is away from the returning material In the direction of the module, it gradually inclines to the side where the other sliding part is located. 如請求項1所述的托料治具循環機構,所述回料模組包括並行且間隔排布的兩條回料導軌,至少一條所述回料導軌上滑動安裝有回料件,所述回料件能夠定位以及帶動所述托料治具移動。 According to the circulatory mechanism of the supporting jig described in claim 1, the material return module includes two return material guide rails arranged in parallel and at intervals, at least one of the return material guide rails is slidably installed with a return material, and the The return material can be positioned and drive the material supporting jig to move. 如請求項5所述的托料治具循環機構,托料治具還設有與所述回料件適配的第二定位槽,所述回料件可卡接於所述第二定位槽內。 According to the circulation mechanism of the supporting jig described in claim item 5, the supporting jig is also provided with a second positioning groove adapted to the return material, and the return material can be snapped into the second positioning groove Inside. 如請求項5所述的托料治具循環機構,所述托料治具的底面和/或側面凸設有滾珠結構,所述滾珠結構可與所回料模組的所述回料導軌滾動接觸。 According to the circulatory mechanism of the material supporting jig described in claim 5, the bottom surface and/or side of the material supporting jig are protrudingly provided with a ball structure, and the ball structure can roll with the returning material guide rail of the returning material module touch. 如請求項1至7任一項所述的托料治具循環機構,所述送料模組和所述回料模組均具有換料端和清洗端,所述升降裝置設有兩個,且其中一個與所述換料端對應,另一個與所述清洗端對應。 According to the circulation mechanism of the supporting jig described in any one of claims 1 to 7, the feeding module and the returning module both have a refueling end and a cleaning end, and the lifting device is provided with two, and One of them corresponds to the refueling end, and the other corresponds to the cleaning end. 如請求項1至7任一項所述的托料治具循環機構,所述升降裝置具有用於與所述托料治具抵接的抵接部,所述抵接部和所述托料治具中的一者設有定位凸起,另一者設有與所述定位凸起適配的定位孔。 According to the circulation mechanism of the material supporting jig according to any one of claims 1 to 7, the lifting device has an abutting part for abutting against the material supporting jig, and the abutting part and the material supporting One of the jigs is provided with a positioning protrusion, and the other is provided with a positioning hole adapted to the positioning protrusion.
TW110101326A 2020-09-27 2021-01-13 Recycling mechanism for supporting jig TWI794727B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201311536A (en) * 2011-09-09 2013-03-16 Hon Hai Prec Ind Co Ltd Tray recycling mechanism
TWM497654U (en) * 2014-06-16 2015-03-21 All Way Prec Technology Co Ltd Circulation type feeding station
CN107986031A (en) * 2017-12-28 2018-05-04 合肥中鼎信息科技股份有限公司 Frameless pallet disc stack machine
CN208947845U (en) * 2018-11-13 2019-06-07 刘敏 Assemble type logistics pallet

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201311536A (en) * 2011-09-09 2013-03-16 Hon Hai Prec Ind Co Ltd Tray recycling mechanism
TWM497654U (en) * 2014-06-16 2015-03-21 All Way Prec Technology Co Ltd Circulation type feeding station
CN107986031A (en) * 2017-12-28 2018-05-04 合肥中鼎信息科技股份有限公司 Frameless pallet disc stack machine
CN208947845U (en) * 2018-11-13 2019-06-07 刘敏 Assemble type logistics pallet

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