TWI786751B - System of analyzing and measuring distance sensor - Google Patents
System of analyzing and measuring distance sensor Download PDFInfo
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本發明係有關於一種系統，尤其是指一種距離感測器量測分析系統。The invention relates to a system, in particular to a distance sensor measurement and analysis system.
感測器是一種檢測裝置，能感測外界環境的變化，並將接收到的信號轉換為電信號或是其他形式的資訊輸出。距離感測器為感測器中的其中一個數量多以及應用廣泛的類別，用以感測距離，常見的應用為加工、製造、檢測等領域。距離感測器依據其用途而有不同的工作原理，可以大致分為接觸式距離感測器與非接觸式距離感測器。A sensor is a detection device that can sense changes in the external environment and convert the received signal into an electrical signal or other forms of information output. Distance sensors are one of the most numerous and widely used types of sensors, which are used to sense distances, and are commonly used in processing, manufacturing, testing and other fields. Distance sensors have different working principles according to their usage, and can be roughly divided into contact distance sensors and non-contact distance sensors.
每個距離感測器都具有量測特性，常見的量測特性包含：線性度、解析度、響應時間等。請參閱第一圖，第一圖係顯示先前技術之距離感測器測試裝置之示意圖。如圖所示，一種距離感測器測試裝置PA1用以量測一距離感測器PAS1的至少一量測特性，並包含一底座PA11、一位移平台PA12、一支撐架PA13與一被測板PA14，其中，位移平台PA12包含一手動調整桿PA121。Each distance sensor has measurement characteristics, common measurement characteristics include: linearity, resolution, response time, etc. Please refer to the first figure, which shows a schematic diagram of a distance sensor testing device in the prior art. As shown in the figure, a distance sensor testing device PA1 is used to measure at least one measurement characteristic of a distance sensor PAS1, and includes a base PA11, a displacement platform PA12, a support frame PA13 and a tested board PA14, wherein the displacement platform PA12 includes a manual adjustment rod PA121.
位移平台PA12設置於底座PA11上。支撐架PA13設置於位移平台PA12上，用以連結距離感測器PAS1，其中，距離感測器PAS1為非接觸式距離感測器，例如：光學式、渦電流式等。被測板PA14則會相對支撐架PA13而設置於底座PA11上。使用者可以旋轉手動調整桿PA121，藉以調整距離感測器PAS1與被測板PA14之間的距離，以進行至少一測試作業。使用者可以利用距離感測器PAS1與被測板PA14之間的距離以及距離感測器PAS1所產生的信號，得出距離感測器PAS1的量測特性。The displacement platform PA12 is set on the base PA11. The support frame PA13 is disposed on the displacement platform PA12 for connecting the distance sensor PAS1 , wherein the distance sensor PAS1 is a non-contact distance sensor, such as an optical type, an eddy current type, and the like. The board under test PA14 is set on the base PA11 relative to the support frame PA13. The user can rotate the manual adjustment lever PA121 to adjust the distance between the distance sensor PAS1 and the tested board PA14 to perform at least one test operation. The user can use the distance between the distance sensor PAS1 and the board under test PA14 and the signal generated by the distance sensor PAS1 to obtain the measurement characteristics of the distance sensor PAS1 .
常見的量測特性中，「線性度」是指距離感測器PAS1的輸出訊號與移動的距離之間的關係，並計算出兩者的關係式（迴歸直線）；「解析度」為距離感測器PAS1所能感測到的最小距離；「響應時間」則是距離感測器PAS1在每個特定時間移動一個解析度，接收的輸出信號開始產生變化的時間。Among the common measurement characteristics, "linearity" refers to the relationship between the output signal of the distance sensor PAS1 and the distance moved, and the relationship between the two is calculated (regression line); "resolution" refers to the distance sense The minimum distance that can be sensed by the sensor PAS1; "response time" is the time when the distance sensor PAS1 moves a resolution at each specific time and the received output signal starts to change.
然而，使用者利用手動調整距離感測器測試裝置PA1會因為人為手動調整造成量測上的誤差，進而衍生出種種問題。量測都是微米（micrometer）等級，人為手動調整造成的誤差，可能導致線性度的關係式（迴歸直線）錯誤、導致解析度錯誤進而造成等於解析度的物件無法被偵測等問題。此外，先前技術中的距離感測器測試裝置PA1無法量測「響應時間」，需要利用額外的裝置進行量測。因此，先前技術存在改善的空間。However, if the user manually adjusts the distance sensor testing device PA1 , measurement errors will be caused by the manual adjustment, and various problems will arise. The measurements are all at the micrometer level. Errors caused by manual adjustments may lead to errors in the relationship between linearity (regression line), resolution errors, and objects equal to the resolution cannot be detected. In addition, the distance sensor test device PA1 in the prior art cannot measure the "response time", and an additional device is required for measurement. Therefore, there is room for improvement in the prior art.
有鑒於在先前技術中，人為手動調整存在量測誤差及其衍生出的線性度關係式錯誤、解析度錯誤以及無法量測響應時間等種種問題。本發明之一主要目的係提供一種距離感測器量測分析系統，用以解決先前技術中的至少一個問題。In view of the fact that in the prior art, there are various problems such as measurement error and its derived linearity relationship error, resolution error, and inability to measure response time in the manual adjustment. One of the main objectives of the present invention is to provide a distance sensor measurement and analysis system to solve at least one problem in the prior art.
本發明為解決先前技術之問題，所採用之必要技術手段為提供一種距離感測器量測分析系統，用以量測至少一距離感測器之至少一量測特性，包含一主機、一伺服驅動器、一伺服馬達、一編碼器、一滾珠螺桿、一固定組件、一被測板與一操作顯示介面。主機電性連接距離感測器。伺服驅動器電性連接主機，並受主機控制。伺服馬達電性連接伺服驅動器，並受伺服驅動器所驅動。編碼器電性連接伺服馬達與伺服驅動器。滾珠螺桿對應伺服馬達而設置，藉以受伺服馬達驅動而移動。固定組件連結滾珠螺桿，用以承載距離感測器。被測板對應固定組件而設置，用以供距離感測器進行至少一測試作業。操作顯示介面電性連接主機與距離感測器，並顯示量測特性。In order to solve the problems of the prior art, the necessary technical means adopted by the present invention is to provide a distance sensor measurement and analysis system, which is used to measure at least one measurement characteristic of at least one distance sensor, including a host computer, a servo A driver, a servo motor, an encoder, a ball screw, a fixed component, a tested board and an operation display interface. The host is electrically connected to the distance sensor. The servo driver is electrically connected to the host computer and controlled by the host computer. The servo motor is electrically connected to the servo driver and driven by the servo driver. The encoder is electrically connected to the servo motor and the servo driver. The ball screw is arranged corresponding to the servo motor so as to be driven by the servo motor to move. The fixing component is connected with the ball screw to carry the distance sensor. The board under test is set corresponding to the fixed component, and is used for the distance sensor to perform at least one test operation. The operation display interface is electrically connected to the host and the distance sensor, and displays measurement characteristics.
其中，距離感測器量測分析系統利用主機與伺服驅動器電控伺服馬達而驅動固定組件移動，藉以使距離感測器進行測試作業，並利用編碼器記錄對應於測試作業過程中之至少一組位置資訊，進而使主機利用位置資訊量測出距離感測器之量測特性，其中，量測特性係一線性度、一解析度與一響應時間中之至少一者。Among them, the distance sensor measurement and analysis system uses the host computer and the servo driver to electronically control the servo motor to drive the fixed component to move, so as to make the distance sensor perform the test operation, and use the encoder to record at least one group corresponding to the test operation process. The position information, and then the host uses the position information to measure the measurement characteristic of the distance sensor, wherein the measurement characteristic is at least one of a linearity, a resolution and a response time.
在上述必要技術手段的基礎下，本發明所衍生之一附屬技術手段為使距離感測器量測分析系統，更包含一無背隙聯軸器，無背隙聯軸器連結伺服馬達與滾珠螺桿，藉以在伺服馬達驅動時，使滾珠螺桿同步移動。On the basis of the above-mentioned necessary technical means, an auxiliary technical means derived from the present invention is to make the distance sensor measurement and analysis system further include a backlash-free coupling, which connects the servo motor and the ball The screw is used to make the ball screw move synchronously when driven by the servo motor.
在上述必要技術手段的基礎下，本發明所衍生之一附屬技術手段為使距離感測器量測分析系統中之固定組件，係包含一承載板，承載板用以供距離感測器放置。On the basis of the above-mentioned necessary technical means, an auxiliary technical means derived from the present invention is to make the fixed component in the distance sensor measurement and analysis system include a carrying board, which is used for placing the distance sensor.
在上述必要技術手段的基礎下，本發明所衍生之一附屬技術手段為使距離感測器量測分析系統中之固定組件，係包含一固定座與一鎖固元件。固定座對應被測板而設置。鎖固元件用以將距離感測器鎖固於固定座。On the basis of the above-mentioned necessary technical means, an auxiliary technical means derived from the present invention is to make the fixing component in the distance sensor measurement and analysis system include a fixing seat and a locking element. The fixing seat is set corresponding to the tested board. The locking element is used for locking the distance sensor to the fixing seat.
在上述必要技術手段的基礎下，本發明所衍生之一附屬技術手段為使距離感測器量測分析系統中之主機，係包含一控制單元，控制單元電性連接伺服驅動器，用以控制伺服驅動器。On the basis of the above-mentioned necessary technical means, an auxiliary technical means derived from the present invention is to make the host computer in the distance sensor measurement and analysis system include a control unit, and the control unit is electrically connected to the servo driver to control the servo drive. driver.
在上述必要技術手段的基礎下，本發明所衍生之一附屬技術手段為使距離感測器量測分析系統中之主機，更包含一處理單元，處理單元電性連接控制單元，用以利用測試作業與位置資訊，處理並量測出量測特性。On the basis of the above-mentioned necessary technical means, an auxiliary technical means derived from the present invention is to make the host in the distance sensor measurement and analysis system further include a processing unit, and the processing unit is electrically connected to the control unit for using the test Work and location information, process and measure measurement characteristics.
在上述必要技術手段的基礎下，本發明所衍生之一附屬技術手段為使距離感測器量測分析系統中之主機，更包含一儲存單元，儲存單元電性連接處理單元，用以接收並儲存量測特性。On the basis of the above-mentioned necessary technical means, an auxiliary technical means derived from the present invention is to make the host in the distance sensor measurement and analysis system further include a storage unit, which is electrically connected to the processing unit for receiving and Store measurement properties.
在上述必要技術手段的基礎下，本發明所衍生之一附屬技術手段為使距離感測器量測分析系統中之主機，更包含一通訊單元，通訊單元電性連接處理單元與操作顯示介面，用以將量測特性傳送至操作顯示介面。On the basis of the above-mentioned necessary technical means, an auxiliary technical means derived from the present invention is to make the host in the distance sensor measurement and analysis system further include a communication unit, the communication unit is electrically connected to the processing unit and the operation display interface, It is used to transmit the measured characteristics to the operation display interface.
在上述必要技術手段的基礎下，本發明所衍生之一附屬技術手段為使距離感測器量測分析系統中之主機，更包含一接收單元，接收單元電性連接距離感測器，用以接收距離感測器進行測試作業時所產生之至少一測試信號。On the basis of the above-mentioned necessary technical means, an auxiliary technical means derived from the present invention is to make the host in the distance sensor measurement and analysis system further include a receiving unit, which is electrically connected to the distance sensor for At least one test signal generated by the distance sensor during the test operation is received.
在上述必要技術手段的基礎下，本發明所衍生之一附屬技術手段為使距離感測器量測分析系統中之主機，更包含一類比數位轉換單元，類比數位轉換單元電性連接接收單元與處理單元，用以將測試信號自類比格式轉換成數位格式並傳送至處理單元。On the basis of the above-mentioned necessary technical means, an auxiliary technical means derived from the present invention is to make the host in the distance sensor measurement and analysis system further include an analog-to-digital conversion unit, which is electrically connected to the receiving unit and The processing unit is used for converting the test signal from the analog format into the digital format and sending it to the processing unit.
承上所述，本發明所提供之距離感測器量測分析系統，利用主機、伺服驅動器、伺服馬達、編碼器、滾珠螺桿、固定組件、被測板與操作顯示介面，用以量測距離感測器的量測特性，相較於先前技術的人為手動調整，本發明利用電控的方式移動距離感測器，因此不會存在人為手動調整的誤差，故不會產生先前技術中人為誤差所衍生出的問題，例如：導致線性度的關係式（迴歸直線）錯誤、導致解析度錯誤進而造成等於解析度的物件卻無法被偵測。此外，本發明還可以達到先前技術中所無法達到的量測響應時間的功效。Based on the above, the distance sensor measurement and analysis system provided by the present invention uses a host, a servo driver, a servo motor, an encoder, a ball screw, a fixing component, a measured board, and an operation display interface to measure distance The measurement characteristics of the sensor, compared with the manual adjustment of the prior art, the present invention uses an electronic control method to move the distance sensor, so there will be no error of manual adjustment, so there will be no human error in the prior art Derived problems, for example: lead to linearity relationship (regression line) error, cause resolution error and cause objects equal to the resolution to be unable to be detected. In addition, the present invention can also achieve the effect of measuring response time that cannot be achieved in the prior art.
下面將結合示意圖對本發明的具體實施方式進行更詳細的描述。根據下列描述和申請專利範圍，本發明的優點和特徵將更清楚。需說明的是，圖式均採用非常簡化的形式且均使用非精準的比例，僅用以方便、明晰地輔助說明本發明實施例的目的。The specific implementation manner of the present invention will be described in more detail below with reference to schematic diagrams. The advantages and features of the present invention will be more clear from the following description and claims. It should be noted that all the drawings are in very simplified form and use imprecise scales, which are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.
請參閱第二圖至第四圖，其中，第二圖係顯示本發明較佳實施例所提供之距離感測器量測分析系統之方塊圖；第三圖係顯示本發明較佳實施例所提供之距離感測器量測分析系統之示意圖；以及，第四圖係顯示本發明較佳實施例所提供之距離感測器量測分析系統之側視圖。如圖所示，一種距離感測器量測分析系統1用以量測至少一距離感測器的至少一量測特性，並包含一主機11、一伺服驅動器12、一伺服馬達13、一編碼器14、一無背隙聯軸器15、一滾珠螺桿16、一固定組件17、一被測板18與一操作顯示介面19。其中，在本實施例中，圖式繪製二距離感測器S1、S2示意，而量測特性則為一線性度、一解析度與一響應時間中的至少一者。Please refer to the second figure to the fourth figure, wherein the second figure shows the block diagram of the distance sensor measurement and analysis system provided by the preferred embodiment of the present invention; the third figure shows the preferred embodiment of the present invention. The schematic diagram of the distance sensor measurement and analysis system provided; and, the fourth figure shows the side view of the distance sensor measurement and analysis system provided by the preferred embodiment of the present invention. As shown in the figure, a distance sensor measurement and
主機11用以控制伺服驅動器12，並包含一控制單元111、一處理單元112、一接收單元113、一類比數位轉換單元114、一通訊單元115與一儲存單元116。The
伺服驅動器12電性連接主機11、伺服馬達13與編碼器14，用以受主機11控制而驅動伺服馬達13。編碼器14也會電性連接伺服馬達13。在本實施例中，無背隙聯軸器15連結伺服馬達13與滾珠螺桿16，藉以在伺服驅動器驅動伺服馬達13時，使滾珠螺桿16同步移動。The
固定組件17連結滾珠螺桿16，用以承載距離感測器S1、S2。被測板18則是對應固定組件17而設置，通常採用鋁、S45C中碳鋼等金屬材質，但不以此為限，也可以採用其他可以供距離感測器S1、S2量測上述量測特性的材質。因應不同的距離感測器S1、S2，固定組件17更包含一承載板171、一固定座172與一鎖固元件173。部分距離感測器可以直接鎖固於承載板171，如圖所示的距離感測器S2。部分距離感測器無法直接鎖固於承載板171，或是鎖固於承載板171無法對被測板18進行測試作業時，便需要利用固定座172與鎖固元件173。如圖所示，固定座172固定於承載板171，而鎖固元件173則是將距離感測器S1鎖固於固定座172上，藉以使得距離感測器S1可以對被測板18進行測試作業。The
在本實施例中，距離感測器量測分析系統1更包含一底座10，其中，伺服馬達13、編碼器14、無背隙聯軸器15、滾珠螺桿16、固定組件17與被測板18都會對應底座10而設置。In this embodiment, the distance sensor measurement and
操作顯示介面19則是電性連接主機11與距離感測器S1、S2。距離感測器S1、S2屬於非接觸式距離感測器，例如：光學式距離感測器、渦電流式距離感測器等。在本實施例中，距離感測器S1為渦電流式距離感測器，距離感測器S2為光學式距離感測器。The
更詳細的說明，一使用者可以利用主機11進行電控與處理。控制單元111電性連接伺服驅動器12，用以受使用者操作而電控伺服驅動器12，進而驅動伺服馬達13。在本實施例中，因為無背隙聯軸器15連結驅動伺服馬達13與滾珠螺桿16，所以滾珠螺桿16可以在伺服馬達13被驅動時而同步地移動，不會產生驅動上的誤差。滾珠螺桿16會沿一第一方向D1或一第二方向D2移動，藉以調整距離感測器S1、S2與被測板18之間的一感測距離d。In more detail, a user can use the
使用者可以直接操作主機11進行電控，也可以藉由操作該操作顯示介面19，而進一步利用控制單元111進行電控，以調整距離感測器S1、S2與被測板18之間的感測距離d，並使距離感測器S1、S2對被測板18進行至少一測試作業。The user can directly operate the
在距離感測器S1、S2對被測板18進行測試作業時，接收單元113會接收距離感測器S1、S2所產生的至少一測試信號。在本實施例中，因為測試信號的格式為類比格式，因此，類比數位轉換單元114電性連接該接收單元113，會接收距離感測器S1、S2的測試信號，並將測試信號的格式自類比格式轉換成數位格式。同時，編碼器14會分別記錄距離感測器S1、S2的至少一組位置資訊。When the distance sensors S1 and S2 perform a test operation on the tested
處理單元112電性連接類比數位轉換單元114與控制單元111，用以接收測試信號與位置資訊。因為控制單元111電控伺服驅動器12，因此，處理單元112可藉由控制單元111獲取位置資訊。處理單元112會依據測試信號以及位置資訊，處理並量測出距離感測器S1、S2的量測特性。The
通訊單元115電性連接處理單元112與操作顯示介面19，用以將量測特性傳送至操作顯示介面19並藉由操作顯示介面19顯示量測特性。儲存單元116電性連接處理單元112，用以接收並儲存量測特性。The
最後，請一併參閱第二圖、第三圖與第五圖至第七圖，其中，第五圖係顯示本發明較佳實施例所提供之距離感測器量測分析系統之操作顯示介面之示意圖；第六圖係顯示本發明較佳實施例所提供之距離感測器量測分析系統之量測特性之示意圖；以及，第七圖係顯示本發明較佳實施例所提供之距離感測器量測分析系統之另一量測特性之示意圖。如圖所示，操作顯示介面19會顯示距離感測器S1、S2的相關資訊、測試作業的相關資訊、供使用者操作的介面等。Finally, please refer to the second figure, the third figure and the fifth figure to the seventh figure together, wherein the fifth figure shows the operation display interface of the distance sensor measurement and analysis system provided by the preferred embodiment of the present invention Figure 6 is a schematic diagram showing the measurement characteristics of the distance sensor measurement and analysis system provided by the preferred embodiment of the present invention; and Figure 7 is a schematic diagram showing the distance sense provided by the preferred embodiment of the present invention Schematic diagram of another measurement characteristic of the instrument measurement analysis system. As shown in the figure, the
如第五圖的右半部所示，操作顯示介面19會供選擇並設定距離感測器S1、S2的種類，也會一併顯示設定結果、測試作業的即時資訊等。如圖所示，距離感測器S1為渦電流式距離感測器便顯示「Eddy Current」，距離感測器S2為光學式距離感測器便顯示「Laser」；左半部的「250」則是顯示距離感測器S1、S2設定滾珠螺桿16的移動距離，單位為微米（micrometer）。此外，操作顯示介面19也會顯示多個圖標（icon）供使用者觸控操作，進而達到電控伺服驅動器12、距離感測器S1、S2進行測試作業等功效。圖式僅為示意，操作顯示介面19也可以顯示波形圖、即時數據、歷史數據等。As shown in the right half of FIG. 5 , the
如第六圖所示，線型L1為電控距離感測器S1、S2所移動距離的理想回授曲線，線型L2則為電控距離感測器S1、S2移動距離的實際量測結果。從圖式可以看出線型L1（理想回授曲線）與線型L2（實際量測結果）會有些許差異，此差異即是「線性度」、「解析度」、「響應」等綜合因子所影響的結果。As shown in Figure 6, the line type L1 is the ideal feedback curve of the moving distance of the electronically controlled distance sensors S1 and S2, and the line type L2 is the actual measurement result of the moving distance of the electronically controlled distance sensors S1 and S2. From the figure, it can be seen that the line type L1 (ideal feedback curve) and the line type L2 (actual measurement results) will be slightly different. This difference is the influence of comprehensive factors such as "linearity", "resolution" and "response" the result of.
如第七圖所示，上述線型L1與線型L2合併後形成複數個數據點P1。而線型L3則為利用所有數據點P1所計算出的關係式（迴歸直線）。As shown in FIG. 7 , the above-mentioned line type L1 and line type L2 are combined to form a plurality of data points P1 . The line type L3 is a relational expression (regression line) calculated by using all the data points P1.
「線性度」是指距離感測器S1、S2的輸出訊號與移動的距離之間的關係，並計算出兩者的關係式（迴歸直線）。如第七圖所示，線型L3即為距離感測器S1、S2的關係式（迴歸直線）。因為本發明為電控，並不存在人為手動調整上的誤差，因此，本發明不會像先前技術一樣計算出錯誤的關係式（迴歸直線）。"Linearity" refers to the relationship between the output signals of the distance sensors S1 and S2 and the moving distance, and the relationship between the two (regression line) is calculated. As shown in the seventh figure, the line type L3 is the relational expression (regression line) of the distance sensors S1 and S2. Because the present invention is electronically controlled, there is no error in manual adjustment, so the present invention will not calculate the wrong relationship (regression line) like the prior art.
「解析度」為距離感測器S1、S2所能感測到的最小距離。舉例來說，位移平台PA12的解析度為0.1微米（micrometer），使用者轉動手動調整桿PA121至格數5，此時信號產生變化，則會得出距離感測器PAS1的解析度為0.5微米。然而，因為手動調整桿PA121的格數並非齒輪，而是屬於平滑的旋轉，因此，可能存在人為手動調整上的誤差，也就是說，距離感測器PAS1的實際解析度可能為0.6微米而非上述量測出來的0.5微米。"Resolution" is the minimum distance that the distance sensors S1 and S2 can sense. For example, the resolution of the displacement platform PA12 is 0.1 micron (micrometer), the user rotates the manual adjustment lever PA121 to the grid number 5, and the signal changes at this time, it will be concluded that the resolution of the distance sensor PAS1 is 0.5 micron . However, because the number of divisions of the manual adjustment lever PA121 is not a gear, but a smooth rotation, there may be errors in manual adjustment, that is, the actual resolution of the distance sensor PAS1 may be 0.6 microns instead of The above measurements come out to 0.5 microns.
解析度錯誤會衍生出非常多的問題，以掃描電路板來說，電路板上最小的尺寸為0.5微米的電子元件，上述檢測出來解析度為0.5微米而實際為0.6微米的距離感測器PAS1便無法檢測出0.5微米的電子元件。若電路板又是要出口至國外，更會衍生出造成生產線停產、面臨鉅額違約賠款等問題。Resolution error will lead to a lot of problems. For scanning circuit boards, the smallest size of electronic components on the circuit board is 0.5 microns. The above-mentioned detection resolution is 0.5 microns but the actual distance sensor PAS1 is 0.6 microns. Electronic components of 0.5 microns cannot be detected. If the circuit boards are to be exported to foreign countries, there will be problems such as stopping production of the production line and facing huge compensation for breach of contract.
「響應時間」則是距離感測器在每個特定時間移動一個解析度，接收的輸出信號開始產生變化的時間。舉例來說，特定時間為0.01毫秒（ms），距離感測器S1、S2的解析度為0.5毫米，當距離感測器S1、S2移動了五個特定時間時，測試信號產生變化，則距離感測器S1、S2的響應時間就是0.05毫秒。因為特定時間通常為毫秒甚至是微秒等級，解析度也是毫米等級，先前技術中利用人為手動調整距離感測器測試裝置PA1自然無法達到量測響應時間的功效。"Response time" is the time when the distance sensor moves a resolution at a specific time and the received output signal starts to change. For example, the specific time is 0.01 milliseconds (ms), and the resolution of the distance sensors S1 and S2 is 0.5 mm. When the distance sensors S1 and S2 move for five specific times, the test signal changes, and the distance The response time of the sensors S1, S2 is 0.05 milliseconds. Since the specific time is usually at the level of milliseconds or even microseconds, and the resolution is also at the level of millimeters, it is naturally impossible to measure the response time by manually adjusting the distance sensor testing device PA1 in the prior art.
在本發明中，使用者利用距離感測器量測分析系統1的主機11，電控伺服馬達13與滾珠螺桿16，可以精確的移動距離感測器S1、S2。此外，控制單元111可以是可程式化邏輯控制器（Programmable Logic Controller；PLC），因此除了可以控制移動距離感測器S1、S2，也可以控制在特定時間內移動距離感測器S1、S2。In the present invention, the user can accurately move the distance sensors S1 and S2 by using the
實務上，控制單元111會利用「延時啟動」、「移動至絕對位置」、「延時」、「回到原點」、「資料擷取」等步驟進而量測出響應時間；並利用「延時啟動計數次數」、「移動至相對位置」、「等待伺服穩定」、「記錄數據」等步驟量測線性度等。上述量測主要量測特性的步驟，為所屬技術領域中具有通常知識者所能理解的，故僅簡單描述，不多加以說明。In practice, the
此外，量測特性因應各個廠牌也會有不同的名詞，例如：部分廠牌的「直線性」、「線性精度」即為上述的「線性度」；「分解能力」、「分辨率」即為上述的「解析度」；另外，「應答時間」、「取樣週期」也是表示「響應時間」的說法。上述響應時間僅為其中一種較為普遍的描述，因部分廠牌會針對響應時間額外再進行處理，而得出其他與響應時間相似名詞的量測特性，或是將處理後的量測特性稱為響應時間，特此說明。In addition, the measurement characteristics will have different nouns depending on the brand. For example, the "linearity" and "linear accuracy" of some brands are the above-mentioned "linearity"; the "resolution" and "resolution" are the It is the above-mentioned "resolution"; in addition, "response time" and "sampling cycle" are also expressions of "response time". The above response time is only one of the more common descriptions, because some manufacturers will additionally process the response time to obtain other measurement characteristics similar to response time, or the processed measurement characteristics are called Response time is hereby stated.
另外，常見的量測特性還有「重覆精度」。「重覆精度」表示從原點重覆移動特定距離特定次數，並將最大量測值與最小量測值的差值除以特定距離即為重覆精度。例如：特定距離為10微米，特定次數為100次，量測結果可能為9.97、9.97、10.03、10.02…等。當使用先前技術手動控制時，因手動操作與觀察刻度上的誤差，無法準確移動特定距離，而本發明利用電控達到精準移動，對量測重覆精度的有利功效也將會顯著提升。In addition, the common measurement characteristic is "repeat accuracy". "Repeat accuracy" means repeating a specific distance from the origin for a specific number of times, and dividing the difference between the maximum measurement value and the minimum measurement value by a specific distance is the repeat accuracy. For example: the specific distance is 10 microns, the specific number of times is 100, and the measurement results may be 9.97, 9.97, 10.03, 10.02...etc. When using manual control in the prior art, due to errors in manual operation and observation scales, it is impossible to accurately move a certain distance. However, the present invention uses electronic control to achieve precise movement, which will significantly improve the measurement repeatability.
綜上所述，本發明所提供之距離感測器量測分析系統，利用主機、伺服驅動器、伺服馬達、編碼器、滾珠螺桿、固定組件、被測板與操作顯示介面，用以量測距離感測器的量測特性，相較於先前技術的人為手動調整，本發明利用電控的方式移動距離感測器，因此不會存在人為手動調整的誤差，故不會產生先前技術中人為誤差所衍生出的問題，例如：導致線性度的關係式（迴歸直線）錯誤、導致解析度錯誤進而造成等於解析度的物件卻無法被偵測。此外，本發明還可以達到先前技術中所無法達到的量測響應時間的功效。To sum up, the distance sensor measurement and analysis system provided by the present invention uses a host, a servo driver, a servo motor, an encoder, a ball screw, a fixing component, a measured board, and an operation display interface to measure distance The measurement characteristics of the sensor, compared with the manual adjustment of the prior art, the present invention uses an electronic control method to move the distance sensor, so there will be no error of manual adjustment, so there will be no human error in the prior art Derived problems, for example: lead to linearity relationship (regression line) error, cause resolution error and cause objects equal to the resolution to be unable to be detected. In addition, the present invention can also achieve the effect of measuring response time that cannot be achieved in the prior art.
藉由以上較佳具體實施例之詳述，係希望能更加清楚描述本發明之特徵與精神，而並非以上述所揭露的較佳具體實施例來對本發明之範疇加以限制。相反地，其目的是希望能涵蓋各種改變及具相等性的安排於本發明所欲申請之專利範圍的範疇內。Through the above detailed description of the preferred embodiments, it is hoped that the characteristics and spirit of the present invention can be described more clearly, and the scope of the present invention is not limited by the preferred embodiments disclosed above. On the contrary, the intention is to cover various changes and equivalent arrangements within the scope of the patent application for the present invention.
PA1:距離感測器測試裝置 PAS1:距離感測器 PA11:底座 PA12:位移平台 PA121:手動調整桿 PA13:支撐架 PA14:被測板 1:距離感測器量測分析系統 11:主機 111:控制單元 112:處理單元 113:接收單元 114:類比數位轉換單元 115:通訊單元 116:儲存單元 12:伺服驅動器 13:伺服馬達 14:編碼器 15:無背隙聯軸器 16:滾珠螺桿 17:固定組件 171:承載板 172:固定座 173:鎖固元件 18:被測板 19:操作顯示介面 10:底座 D1:第一方向 D2:第二方向 d:感測距離 L1:線型 L2:線型 L3:線型 P1:數據點 S1,S2:距離感測器 PA1: distance sensor test device PAS1: distance sensor PA11: base PA12: Displacement Platform PA121: Manual adjustment lever PA13: support frame PA14: board under test 1: Distance sensor measurement and analysis system 11: Host 111: Control unit 112: Processing unit 113: Receiving unit 114: Analog-to-digital conversion unit 115: Communication unit 116: storage unit 12:Servo drive 13:Servo motor 14: Encoder 15: backlash free coupling 16: Ball screw 17: Fixed components 171: Loading board 172: fixed seat 173: locking element 18: Board under test 19: Operation display interface 10: Base D1: the first direction D2: Second direction d: Sensing distance L1: Line type L2: Line type L3: Line type P1: data point S1, S2: distance sensor
第一圖係顯示先前技術之距離感測器測試裝置之示意圖； 第二圖係顯示本發明較佳實施例所提供之距離感測器量測分析系統之方塊圖； 第三圖係顯示本發明較佳實施例所提供之距離感測器量測分析系統之示意圖； 第四圖係顯示本發明較佳實施例所提供之距離感測器量測分析系統之側視圖； 第五圖係顯示本發明較佳實施例所提供之距離感測器量測分析系統之操作顯示介面之示意圖； 第六圖係顯示本發明較佳實施例所提供之距離感測器量測分析系統之量測特性之示意圖；以及 第七圖係顯示本發明較佳實施例所提供之距離感測器量測分析系統之另一量測特性之示意圖。 The first figure is a schematic diagram showing a distance sensor testing device in the prior art; The second figure shows the block diagram of the distance sensor measurement and analysis system provided by the preferred embodiment of the present invention; The third figure is a schematic diagram showing the distance sensor measurement and analysis system provided by the preferred embodiment of the present invention; The fourth figure is a side view showing the distance sensor measurement and analysis system provided by the preferred embodiment of the present invention; The fifth figure is a schematic diagram showing the operation display interface of the distance sensor measurement and analysis system provided by the preferred embodiment of the present invention; The sixth figure is a schematic diagram showing the measurement characteristics of the distance sensor measurement and analysis system provided by the preferred embodiment of the present invention; and The seventh figure is a schematic diagram showing another measurement characteristic of the distance sensor measurement and analysis system provided by the preferred embodiment of the present invention.
1:距離感測器量測分析系統 1: Distance sensor measurement and analysis system
11:主機 11: Host
12:伺服驅動器 12:Servo drive
13:伺服馬達 13:Servo motor
14:編碼器 14: Encoder
15:無背隙聯軸器 15: backlash free coupling
16:滾珠螺桿 16: Ball screw
17:固定組件 17: Fixed components
171:承載板 171: Loading board
172:固定座 172: fixed seat
173:鎖固元件 173: locking element
18:被測板 18: Board under test
19:操作顯示介面 19: Operation display interface
10:底座 10: base
S1,S2:距離感測器 S1, S2: distance sensor
Claims (10)
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| WO2008152229A2 (en) * | 2007-05-04 | 2008-12-18 | Centre National De La Recherche Scientifique - Cnrs | Array of waveguides making it possible to deflect a light beam |
| TW200912260A (en) * | 2007-05-31 | 2009-03-16 | Thk Co Ltd | Position detecting system for linear motor |
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