TWI782544B - Connector for electrical connection - Google Patents

Connector for electrical connection Download PDF

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TWI782544B
TWI782544B TW110118995A TW110118995A TWI782544B TW I782544 B TWI782544 B TW I782544B TW 110118995 A TW110118995 A TW 110118995A TW 110118995 A TW110118995 A TW 110118995A TW I782544 B TWI782544 B TW I782544B
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elastic material
conductive
elastic
connector
pressurized state
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TW110118995A
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TW202146903A (en
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鄭永倍
朴晶默
金賢永
金俊用
鄭友鎔
李埈湖
金岡德
朴勇奎
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南韓商Ｉｓｃ股份有限公司
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/03—Contact members characterised by the material, e.g. plating, or coating materials

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  • Coupling Device And Connection With Printed Circuit (AREA)
  • Details Of Connecting Devices For Male And Female Coupling (AREA)
  • Cable Accessories (AREA)

Abstract

本發明提供配置於檢查裝置與受檢設備之間的用於電連接的連接器。用於電連接的連接器包括沿著上下方向傳輸訊號的至少一個導電部。導電部包括中心導電部及第一周邊部，上述中心導電部包含第一彈性物質並可沿著上下方向導電，上述第一周邊部包含第二彈性物質並沿著上下方向包圍中心導電部，在導電部的上下方向上的加壓狀態下，第一彈性物質與第二彈性物質具有不同的膨脹率。The invention provides a connector for electrical connection arranged between an inspection device and a device under inspection. The connector for electrical connection includes at least one conductive portion that transmits signals along the vertical direction. The conductive part includes a central conductive part and a first peripheral part. The central conductive part contains a first elastic material and can conduct electricity along the vertical direction. The first peripheral part contains a second elastic material and surrounds the central conductive part along the vertical direction. In a pressurized state in the vertical direction of the conductive portion, the first elastic material and the second elastic material have different expansion coefficients.

Description

用於電連接的連接器connector for electrical connection

本發明關於使檢查裝置與受檢設備電連接的連接器。 The present invention relates to a connector for electrically connecting an inspection device with a device under inspection.

為了對如半導體設備的受檢設備進行檢查，在所屬技術領域中使用了使檢查裝置與受檢設備電連接的連接器。連接器配置於檢查裝置與受檢設備之間。連接器向受檢設備傳輸檢查裝置的電測試訊號，向檢查裝置傳輸受檢設備的電回應訊號。作為這種連接器的一例，所屬技術領域中已知的有導電性橡膠片。 In order to inspect a device under inspection such as a semiconductor device, a connector for electrically connecting an inspection device with the device under inspection is used in the technical field. The connector is arranged between the inspection device and the device under inspection. The connector transmits the electrical test signal of the inspection device to the inspected equipment, and transmits the electrical response signal of the inspected equipment to the inspection device. As an example of such a connector, a conductive rubber sheet is known in the technical field.

導電性橡膠片具有多個彈性導電部，彈性導電部由矽橡膠形成，上述矽橡膠沿著上下方向維持以可導電的方式沿著上下方向接觸的多個金屬粒子與多個金屬粒子。多個彈性導電部在檢查裝置與受檢設備之間執行訊號傳輸。彈性導電部可由包括向液態的矽橡膠及液態的矽橡膠分散的多個金屬粒子成型。可藉由向上述液態成型材料施加磁場來沿著上下方向集合多個金屬粒子，由此可以成型彈性導電部。 The conductive rubber sheet has a plurality of elastic conductive parts formed of silicone rubber that maintains a plurality of metal particles and a plurality of metal particles that are in contact with each other in a conductive manner along the vertical direction. A plurality of elastic conductive parts perform signal transmission between the inspection device and the equipment under inspection. The elastic conductive part can be formed by including a plurality of metal particles dispersed in the liquid silicone rubber and the liquid silicone rubber. By applying a magnetic field to the above-mentioned liquid molding material, a plurality of metal particles can be aggregated in the vertical direction, whereby the elastic conductive part can be molded.

導電性橡膠片可構成導電性橡膠片的一部分，由矽橡膠形成的絕緣部可以沿著上下方向支撐多個彈性導電部。或者，導電性橡膠片並不具備上述絕緣部，與多個彈性導電部的上端部及下端部相結合的絕緣膜可以沿著上下方向支撐多個彈性導電部。 The conductive rubber sheet can constitute a part of the conductive rubber sheet, and the insulating part formed of silicon rubber can support a plurality of elastic conductive parts in the vertical direction. Alternatively, the conductive rubber sheet does not have the above-mentioned insulating portion, and the insulating film combined with the upper end and the lower end of the plurality of elastic conductive portions can support the plurality of elastic conductive portions in the vertical direction.

當檢查半導體設備時，為了在導電性橡膠片緊貼半導體設備而藉由半導體設備向導電性橡膠片施壓力。這種壓力使彈性導電部彈性變形。若去除壓力，則彈性導電部藉由彈性復原力復原到原狀態。為了防止半導體設備或導電性橡膠片的損傷而需要少的壓力，在少的壓力下，彈性導電部需要具備良好 的彈性復原力。 When inspecting a semiconductor device, the conductive rubber sheet is pressed against the conductive rubber sheet by the semiconductor device in order to adhere to the semiconductor device. This pressure elastically deforms the elastic conductive part. If the pressure is removed, the elastic conductive part returns to its original state by the elastic restoring force. In order to prevent damage to semiconductor devices or conductive rubber sheets, less pressure is required. Under less pressure, the elastic conductive part needs to have good of elastic resilience.

半導體設備可以在完全低於常溫(例如，25℃)的溫度至完全高於常溫的溫度的溫度環境下檢查。構成導電性橡膠片的矽橡膠或導電性橡膠片根據檢查溫度膨脹成不同程度。 The semiconductor device can be inspected under a temperature environment from a temperature completely lower than normal temperature (for example, 25° C.) to a temperature completely higher than normal temperature. The silicone rubber or conductive rubber sheet constituting the conductive rubber sheet expands to varying degrees depending on the inspection temperature.

在高溫環境下檢查半導體設備的情況下，矽橡膠比在常溫下的膨脹程度更為過度膨脹。因矽橡膠或彈性導電部的過度膨脹，在常溫下的壓力及相同壓力下，發生比常溫下的彈性導電部的按壓量更大的按壓量。高溫環境下的過度膨脹有可能引發導電性橡膠片的變形，無法保障檢查可靠性達到常溫檢查時的檢查可靠性水平。 In the case of inspecting semiconductor devices in a high-temperature environment, silicone rubber expands more excessively than at normal temperature. Due to the excessive expansion of the silicone rubber or the elastic conductive part, a larger pressing amount than that of the elastic conductive part at normal temperature occurs under the pressure at normal temperature and under the same pressure. Excessive expansion in a high-temperature environment may cause deformation of the conductive rubber sheet, and the inspection reliability cannot be guaranteed to reach the inspection reliability level of the normal temperature inspection.

當在低溫環境下檢查半導體設備時，矽橡膠的膨脹程度比常溫下的膨脹程度更低，與常溫下的膨脹相比，有可能過度收縮。因矽橡膠或彈性導電部的過度收縮，為了獲得如常溫下的按壓量程度的按壓量而需要向彈性導電部施加大的壓力。若施加常溫檢查時的壓力，則彈性導電部不會被輕鬆按壓，彈性導電部的導電性並未達到所需水平。由此，當在低溫環境下進行檢查時，為了獲得彈性導電部的適當導電性而需要向彈性導電部施加大的壓力，大的壓力有可能對半導體設備及導電橡膠插座帶來損傷。 When inspecting semiconductor devices in a low-temperature environment, the degree of expansion of silicone rubber is lower than that at normal temperature, and there is a possibility of excessive contraction compared with the expansion at normal temperature. Due to the excessive shrinkage of the silicone rubber or the elastic conductive part, it is necessary to apply a large pressure to the elastic conductive part in order to obtain a pressing amount equivalent to that at normal temperature. If the pressure during normal temperature inspection is applied, the elastic conductive part will not be easily pressed, and the conductivity of the elastic conductive part will not reach the desired level. Therefore, when testing in a low-temperature environment, it is necessary to apply a large pressure to the elastic conductive part in order to obtain proper conductivity of the elastic conductive part, and the high pressure may cause damage to the semiconductor device and the conductive rubber socket.

在具有由多個金屬粒子及矽橡膠形成的彈性導電部的先前技術的導電性橡膠片中，在上述多種溫度範圍中無法呈現出良好的檢查可靠性。當進行高溫環境即低溫環境下的檢查時，為了提高檢查可靠性而需要與常溫下的檢查中的壓力及按壓量並無太大變化的壓力及按壓量。 In the prior art conductive rubber sheet having elastic conductive parts formed of a plurality of metal particles and silicone rubber, good inspection reliability cannot be exhibited in the above-mentioned various temperature ranges. When performing an inspection in a high-temperature environment, that is, a low-temperature environment, a pressure and a pressing amount that do not greatly change from those in an inspection at normal temperature are required in order to improve inspection reliability.

本發明的實施例提供如下的用於電連接的連接器，即，當在低溫環境下進行檢查時，在適當的壓力下呈現出確切的彈性復原力並具有耐寒性。本發明的一實施例提供如下的用於電連接的連接器，即，當在高溫環境下進行檢 查時，防止過度的膨脹及變形並具有耐熱性。本發明的一實施例提供如下的用於電連接的連接器，即，具有耐寒性及耐熱性，從而在多種溫度範圍內具有良好的檢查可靠性。 Embodiments of the present invention provide a connector for electrical connection that, when inspected in a low-temperature environment, exhibits a definite elastic restoring force under an appropriate pressure and has cold resistance. An embodiment of the present invention provides a connector for electrical connection as follows, that is, when testing in a high-temperature environment When inspected, it prevents excessive expansion and deformation and has heat resistance. An embodiment of the present invention provides a connector for electrical connection having cold resistance and heat resistance so as to have good inspection reliability in various temperature ranges.

本發明的實施例涉及配置於兩個電子設備之間來用於使兩個電子設備電連接的連接器。多個實施例的連接器的結構要素包含第一彈性物質及第二彈性物質中的一個，上述第一彈性物質及第二彈性物質在上下方向上的加壓狀態下具有不同的膨脹率。包含第一彈性物質的區域與包含第二彈性物質的區域可以交互配置。在第一彈性物質及第二彈性物質中的一個可以提高耐寒性，在第一彈性物質及第二彈性物質中的另一個可以提高耐熱性。與不具有耐寒性的彈性物質相比，具有耐寒性的彈性物質可具有高的膨脹率，與不具有耐熱性的彈性物質相比，具有耐熱性的彈性物質可具有低的膨脹率。 Embodiments of the present invention relate to a connector disposed between two electronic devices for electrically connecting the two electronic devices. The structural elements of the connectors of the various embodiments include one of a first elastic material and a second elastic material having different expansion rates in a pressurized state in the vertical direction. The regions containing the first elastic substance and the regions containing the second elastic substance may be alternately arranged. One of the first elastic material and the second elastic material can improve cold resistance, and the other one of the first elastic material and the second elastic material can improve heat resistance. The elastic material having cold resistance may have a high expansion rate compared to the elastic material not having cold resistance, and the elastic material having heat resistance may have a low expansion rate compared to the elastic material not having heat resistance.

根據本發明實施方式的用於電連接的連接器包括沿著上下方向傳輸訊號的至少一個導電部。導電部包括中心導電部及第一周邊部，上述中心導電部包含第一彈性物質並可沿著上下方向導電，上述第一周邊部包含第二彈性物質並沿著上下方向包圍中心導電部。在導電部的上下方向上的加壓狀態下，第一彈性物質與第二彈性物質具有不同的膨脹率。 A connector for electrical connection according to an embodiment of the present invention includes at least one conductive portion that transmits signals along an up-down direction. The conductive part includes a central conductive part and a first peripheral part. The central conductive part contains a first elastic material and can conduct electricity along the vertical direction. The first peripheral part contains a second elastic material and surrounds the central conductive part along the vertical direction. In a pressurized state in the vertical direction of the conductive portion, the first elastic material and the second elastic material have different expansion coefficients.

在一實施例中，在第一溫度範圍內的加壓狀態下，第一彈性物質及第二彈性物質中的一個的膨脹率小於另一個的膨脹率，在比第一溫度範圍低的第二溫度範圍內的加壓狀態下，第一彈性物質及第二彈性物質中的一個的膨脹率大於另一個的膨脹率。在第一溫度範圍內的加壓狀態或第二溫度範圍內的加壓狀態下，中心導電部及第一周邊部能夠以不同程度膨脹。 In one embodiment, in a pressurized state within the first temperature range, the expansion rate of one of the first elastic material and the second elastic material is smaller than that of the other, and in the second temperature range lower than the first In a pressurized state within the temperature range, one of the first elastic material and the second elastic material has a larger expansion rate than the other. In the pressurized state within the first temperature range or the pressurized state within the second temperature range, the central conductive portion and the first peripheral portion can expand to different degrees.

在一實施例中，第一彈性物質及第二彈性物質中的一個包含氧化鐵、氮化硼及氮化鋁中的一種及矽橡膠，第一彈性物質及第二彈性物質中的另一個包含氟及矽橡膠。 In one embodiment, one of the first elastic material and the second elastic material includes one of iron oxide, boron nitride, and aluminum nitride and silicon rubber, and the other of the first elastic material and the second elastic material includes Fluorine and silicone rubber.

在一實施例中，中心導電部包含以能夠沿著上下方向導電的方式接觸並藉由第一彈性物質維持上下方向的多個第一導電性物質，第一周邊部包含以能夠沿著上下方向導電的方式接觸並藉由第二彈性物質維持上下方向的多個第二導電性物質。 In one embodiment, the central conductive portion includes a plurality of first conductive materials that are in contact with each other in a manner capable of conducting electricity in the vertical direction and are maintained in the vertical direction by the first elastic material, and the first peripheral portion includes a plurality of first conductive materials that can conduct electricity in the vertical direction. A plurality of second conductive substances in an up-and-down direction are in contact with and maintained by the second elastic substance in a conductive manner.

在一實施例中，導電部還包括第二周邊部，第二周邊部沿著上下方向包圍第一周邊部，包含第一彈性物質。第二周邊部可包含以能夠沿著上下方向導電的方式接觸並藉由第一彈性物質維持上下方向的多個第三導電性物質。 In an embodiment, the conductive part further includes a second peripheral part, the second peripheral part surrounds the first peripheral part along the vertical direction, and contains the first elastic material. The second peripheral portion may include a plurality of third conductive materials that are in contact with the vertical direction and maintain the vertical direction by the first elastic material.

在一實施例中，本發明還包括：支撐部，與中心導電部的下端部相結合，沿著上下方向支撐導電部；以及絕緣膜，與第一周邊部的上端部相結合。 In an embodiment, the present invention further includes: a supporting part combined with the lower end of the central conductive part to support the conductive part along the vertical direction; and an insulating film combined with the upper end of the first peripheral part.

在一實施例中，連接器包括多個上述導電部，多個導電部藉由作為空心空間的間隙來沿著與上下方向正交的水平方向隔開。 In one embodiment, the connector includes a plurality of the above-mentioned conductive parts, and the plurality of conductive parts are separated along a horizontal direction perpendicular to the up-down direction by gaps serving as hollow spaces.

本發明再一實施方式的用於電連接的連接器包括至少一個導電部及絕緣部，上述至少一個導電部沿著上下方向傳輸訊號。導電部包括：中心導電部，包含第一彈性物質，能夠沿著上下方向導電；以及第一周邊部，包含第二彈性物質，沿著上下方向包圍中心導電部。絕緣部具有可使導電部沿著上下方向***的至少一個貫通孔，包含第一彈性物質。在導電部的上下方向上的加壓狀態下，第一彈性物質與第二彈性物質具有不同的膨脹率。 A connector for electrical connection according to another embodiment of the present invention includes at least one conductive portion and an insulating portion, and the at least one conductive portion transmits signals along the vertical direction. The conductive part includes: a central conductive part containing a first elastic material capable of conducting electricity along a vertical direction; and a first peripheral part containing a second elastic material surrounding the central conductive part along a vertical direction. The insulating part has at least one through hole through which the conductive part can be inserted in the vertical direction, and contains a first elastic material. In a pressurized state in the vertical direction of the conductive portion, the first elastic material and the second elastic material have different expansion coefficients.

在一實施例中，在第一溫度範圍內的加壓狀態下，第一彈性物質及第二彈性物質中的一個的膨脹率小於另一個的膨脹率，在比第一溫度範圍低的第二溫度範圍內的加壓狀態下，第一彈性物質及第二彈性物質中的一個的膨脹率大於另一個的膨脹率。在第一溫度範圍內的加壓狀態或第二溫度範圍內的加壓狀態下，中心導電部及第一周邊部能夠以不同程度膨脹。 In one embodiment, in a pressurized state within the first temperature range, the expansion rate of one of the first elastic material and the second elastic material is smaller than that of the other, and in the second temperature range lower than the first In a pressurized state within the temperature range, one of the first elastic material and the second elastic material has a larger expansion rate than the other. In the pressurized state within the first temperature range or the pressurized state within the second temperature range, the central conductive portion and the first peripheral portion can expand to different degrees.

在一實施例中，第一彈性物質及第二彈性物質中的一個包含氧化鐵、氮化硼及氮化鋁中的一種及矽橡膠，第一彈性物質及第二彈性物質中的另一個包含氟及矽橡膠。 In one embodiment, one of the first elastic material and the second elastic material includes one of iron oxide, boron nitride, and aluminum nitride and silicon rubber, and the other of the first elastic material and the second elastic material includes Fluorine and silicone rubber.

在一實施例中，中心導電部包含以能夠沿著上下方向導電的方式接觸並藉由第一彈性物質維持上下方向的多個第一導電性物質，第一周邊部包含以能夠沿著上下方向導電的方式接觸並藉由第二彈性物質維持上下方向的多個第二導電性物質。 In one embodiment, the central conductive portion includes a plurality of first conductive materials that are in contact with each other in a manner capable of conducting electricity in the vertical direction and are maintained in the vertical direction by the first elastic material, and the first peripheral portion includes a plurality of first conductive materials that can conduct electricity in the vertical direction. A plurality of second conductive substances in an up-and-down direction are in contact with and maintained by the second elastic substance in a conductive manner.

在一實施例中，絕緣部包括貫通部，貫通部沿著上述上下方向包圍第一周邊部，在內周面限定貫通孔，包含第二彈性物質。 In one embodiment, the insulation part includes a through part, the through part surrounds the first peripheral part along the up-down direction, defines a through hole on the inner peripheral surface, and contains the second elastic material.

在一實施例中，在貫通孔的內周面與第一周邊部的外周面之間形成藉由內周面的至少一部分與外周面的至少一部分形成的作為空心空間的間隙。 In one embodiment, a gap as a hollow space formed by at least a part of the inner peripheral surface and at least a part of the outer peripheral surface is formed between the inner peripheral surface of the through hole and the outer peripheral surface of the first peripheral portion.

在一實施例中，本發明還可包括：支撐部，與中心導電部的下端部相結合，沿著上下方向支撐中心導電部；以及絕緣膜，與第一周邊部的上端部相結合。 In an embodiment, the present invention may further include: a support part combined with a lower end part of the central conductive part to support the central conductive part in an up-down direction; and an insulating film combined with an upper end part of the first peripheral part.

本發明另一實施方式的用於電連接的連接器包括至少一個導電部及絕緣部，上述導電部包含：多個第一導電性物質，以能夠沿著上下方向導電的方式接觸；以及第一彈性物質，沿著上下方向維持上述第一導電性物質，上述連接器包括絕緣部，上述絕緣部具有可使導電部沿著上下方向***的至少一個貫通孔，包含第二彈性物質。在導電部的上下方向上的加壓狀態下，第一彈性物質與第二彈性物質具有不同的膨脹率。 A connector for electrical connection according to another embodiment of the present invention includes at least one conductive part and an insulating part, and the conductive part includes: a plurality of first conductive substances contacting in a manner capable of conducting electricity in the vertical direction; and a first The elastic material maintains the first conductive material in the vertical direction, the connector includes an insulating part having at least one through hole through which the conductive part can be inserted in the vertical direction, and contains the second elastic material. In a pressurized state in the vertical direction of the conductive portion, the first elastic material and the second elastic material have different expansion coefficients.

在一實施例中，在第一溫度範圍內的加壓狀態下，第一彈性物質及第二彈性物質中的一個的膨脹率小於另一個的膨脹率，在比第一溫度範圍低的第二溫度範圍內的加壓狀態下，第一彈性物質及第二彈性物質中的一個的膨脹率大於另一個的膨脹率。 In one embodiment, in a pressurized state within the first temperature range, the expansion rate of one of the first elastic material and the second elastic material is smaller than that of the other, and in the second temperature range lower than the first In a pressurized state within the temperature range, one of the first elastic material and the second elastic material has a larger expansion rate than the other.

在一實施例中，第一彈性物質及第二彈性物質中的一個包含氧化鐵、氮化硼及氮化鋁中的一種及矽橡膠，第一彈性物質及第二彈性物質中的另一個包含氟及矽橡膠。 In one embodiment, one of the first elastic material and the second elastic material includes one of iron oxide, boron nitride, and aluminum nitride and silicon rubber, and the other of the first elastic material and the second elastic material includes Fluorine and silicone rubber.

在一實施例中，在導電部的外周面與貫通孔的內周面之間形成藉由 外周面的至少一部分與內周面的至少一部分形成的作為空心空間的間隙。 In one embodiment, a via A gap as a hollow space formed by at least a part of the outer peripheral surface and at least a part of the inner peripheral surface.

根據本發明的一實施例，導電部包含具有耐寒性的彈性物質，因此，當在低溫或極低溫環境下進行檢查時，連接器可以在適當的壓力下呈現出確切的彈性復原力及所需的導電性。因此，與不包含具有耐寒性的彈性物質的一般的連接器相比，無需在低溫環境下進行檢查時向連接器施加過度的壓力。根據本發明的一實施例，導電部包含具有耐熱性的彈性物質，因此，當在高溫或極高溫環境下進行檢查時，可以防止連接器過度膨脹及變形。根據本發明的一實施例，導電部或導電部及絕緣部包含具有耐寒性及耐熱性的彈性物質，因此，與常溫檢查下的壓力及導電部的按壓量相比，連接器藉助沒有太大變化的壓力及按壓量，在多種溫度範圍內，藉助良好的檢查可靠性實現對受檢設備的檢查。 According to an embodiment of the present invention, the conductive portion contains an elastic material with cold resistance, so when inspected in a low temperature or extremely low temperature environment, the connector can exhibit the exact elastic recovery force and the required pressure under appropriate pressure. conductivity. Therefore, compared with a general connector that does not contain a cold-resistant elastic material, it is not necessary to apply excessive pressure to the connector when performing an inspection in a low-temperature environment. According to an embodiment of the present invention, the conductive portion includes a heat-resistant elastic material, so that excessive expansion and deformation of the connector can be prevented when the inspection is performed in a high-temperature or extremely high-temperature environment. According to an embodiment of the present invention, the conductive part or the conductive part and the insulating part contain an elastic material with cold resistance and heat resistance. Therefore, compared with the pressure under normal temperature inspection and the pressing amount of the conductive part, the connector does not have too much pressure. Varying pressure and pressing amount, in a variety of temperature ranges, with good inspection reliability to realize the inspection of the equipment under inspection.

10:檢查裝置 10: Check device

11:檢查電路 11: Check the circuit

12:端子 12: terminal

20:受檢設備 20: Checked equipment

21:端子 21: terminal

30:測試插座 30: Test socket

100:連接器 100: Connector

110:導電部 110: conductive part

111:中心導電部 111: Central conductive part

112:第一周邊部 112: The first peripheral part

113:第一導電性物質 113: The first conductive substance

114:第一彈性物質 114: The first elastic substance

115:第二彈性物質 115: second elastic substance

116:第二導電性物質 116: Second conductive substance

120:導電模組 120: Conductive module

121:支撐部 121: support part

130:絕緣膜 130: insulating film

150:間隙 150: Gap

200:連接器 200: connector

210:導電部 210: conductive part

217:第二周邊部 217: The second peripheral part

218:上端部 218: upper end

219:第三導電性物質 219: The third conductive substance

300:連接器 300: connector

340:絕緣部 340: insulation part

341:貫通孔 341: through hole

400:連接器 400: Connector

442:貫通部 442: Penetrating part

443:本體部 443: Body Department

500:連接器 500: Connector

550:間隙 550: Gap

600:連接器 600: Connector

610:導電部 610: conductive part

640:絕緣部 640: insulation part

P:壓力 P: pressure

VD:上下方向 VD: up and down direction

HD:水平方向 HD: horizontal direction

圖1簡要示出應用一實施例的連接器的例。 FIG. 1 schematically shows an example to which a connector of an embodiment is applied.

圖2為示出本發明第一實施例的連接器的一部分的剖視圖。 Fig. 2 is a sectional view showing a part of the connector of the first embodiment of the present invention.

圖3簡要示出圖2所示的連接器的水平方向的剖面形狀。 FIG. 3 schematically shows a horizontal cross-sectional shape of the connector shown in FIG. 2 .

圖4為示出第一實施例的連接器的代替例的剖視圖。 Fig. 4 is a sectional view showing an alternative example of the connector of the first embodiment.

圖5為示出本發明第二實施例的連接器的一部分的剖視圖。 Fig. 5 is a sectional view showing a part of a connector of a second embodiment of the present invention.

圖6簡要示出圖5所示的連接器的水平方向的剖面形狀。 FIG. 6 schematically shows a horizontal cross-sectional shape of the connector shown in FIG. 5 .

圖7示出第二實施例的連接器的代替例的剖視圖。 Fig. 7 shows a sectional view of an alternative example of the connector of the second embodiment.

圖8為示出本發明第三實施例的連接器的一部分的剖視圖。 Fig. 8 is a sectional view showing a part of a connector according to a third embodiment of the present invention.

圖9簡要示出圖8所示的連接器的水平方向的剖面形狀。 FIG. 9 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 8 .

圖10為示出本發明第四實施例的連接器的一部分的剖視圖。 Fig. 10 is a sectional view showing a part of a connector of a fourth embodiment of the present invention.

圖11簡要示出圖10所示的連接器的水平方向的剖面形狀。 FIG. 11 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 10 .

圖12為示出本發明第五實施例的連接器的一部分的剖視圖。 Fig. 12 is a sectional view showing a part of a connector of a fifth embodiment of the present invention.

圖13簡要示出圖12所示的連接器的水平方向的剖面形狀。 FIG. 13 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 12 .

圖14示出本發明第六實施例的連接器的一部分的剖視圖。 Fig. 14 shows a sectional view of a part of a connector of a sixth embodiment of the present invention.

圖15簡要示出圖14所示的連接器的水平方向的剖面形狀。 FIG. 15 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 14 .

本發明的實施例以說明本發明的技術思想為目的而例示。本發明的發明要求保護範圍並不限定於以下公開的實施例或對實施例的具體說明。 The embodiments of the present invention are illustrated for the purpose of explaining the technical idea of the present invention. The claimed scope of the present invention is not limited to the following disclosed embodiments or specific descriptions of the embodiments.

除非另有定義，否則本發明中所使用的所有技術術語及科學術語具有本發明所屬技術領域中具有通常知識者通常所理解的含義。本發明中所使用的所有術語用於進一步明確說明本發明，並非用於限制本發明的發明要求保護範圍。 Unless otherwise defined, all technical and scientific terms used in the present invention have the meanings commonly understood by those skilled in the art to which this invention belongs. All terms used in the present invention are used to further clarify the present invention, and are not used to limit the protection scope of the present invention.

除非在包括以下表達方式的句子或文章中另有說明，否則本發明中所使用的“包括”、“設置”、“具有”等表達方式應以開放性術語(open-ended terms)加以理解，具有包括其他實施例的可能性。 Unless otherwise stated in sentences or articles including the following expressions, expressions such as "comprising", "configured" and "having" used in the present invention should be understood as open-ended terms, There is the possibility of including other embodiments.

除非另有定義，否則本發明中所記述的單數的表達可包括複數的含義，這也同樣適用於發明要求保護範圍中所記載的單數的表達。 Unless otherwise defined, singular expressions described in the present invention may include plural meanings, and this is also applicable to singular expressions described in the scope of protection of the invention.

本發明中所使用的“第一”、“第二”等表達方式用於相互區分多個結構要素，並不限定相應結構要素的順序或重要性。 Expressions such as "first" and "second" used in the present invention are used to distinguish multiple structural elements from each other, and do not limit the order or importance of the corresponding structural elements.

在本發明中，當某結構要素與另一結構要素相“連接”或相“結合”時，應當理解為上述某結構要素可直接連接或結合在上述另一結構要素，或者，以其他新的結構要素為介質相連接或相結合。 In the present invention, when a structural element is "connected" or "combined" with another structural element, it should be understood that the above-mentioned certain structural element can be directly connected or combined with the above-mentioned another structural element, or, with other new Structural elements are connected or combined by media.

本發明中所使用的方向指示語“上方”基於連接器相對於檢查裝置所處的方向，而方向指示語“下方”是指與上方相反的方向。雖然本發明中所使用的方向指示語“上下方向”包括上方方向和下方方向，但應當理解的是，並不表示上方方向和下方方向中的特定的一個方向。 The direction indicator "above" used in the present invention is based on the direction in which the connector is located relative to the inspection device, while the direction indicator "below" refers to the opposite direction from above. Although the direction designation "up and down" used in the present invention includes the upper direction and the lower direction, it should be understood that it does not mean a specific one of the upper direction and the lower direction.

以下，參照圖式所示出的例來說明實施例。在圖式中，對於相同或相對應的結構要素賦予了相同的元件符號。並且，在說明以下實施例的過程中，省略了對於相同或相對應的結構要素的說明。但即使省略了對於有關結構要素的記述，也並不意味著這種結構要素不屬於某實施例。 Hereinafter, embodiments will be described with reference to examples shown in the drawings. In the drawings, the same reference symbols are assigned to the same or corresponding structural elements. Also, in describing the following embodiments, descriptions of the same or corresponding structural elements are omitted. However, even if the description of related structural elements is omitted, it does not mean that such structural elements do not belong to a certain embodiment.

以下說明的實施例和圖式所示出的例涉及用於使連個電子設備之間電連接的連接器。在實施例的連接器等應用例中，上述兩個電子設備中的一個可以為檢查裝置，上述連個電子設備中的另一個可以為由檢查裝置進行檢查的受檢設備。實施例的連接器可以在受檢設備的電檢查時用於使檢查裝置與受檢設備電連接。作為一例，實施例的連接器在半導體設備的製造步驟中的後步驟中，可用於半導體設備的最終電檢查，應用實施例的連接器的例並不限定於此。 The embodiments described below and the examples shown in the drawings relate to a connector for electrically connecting two electronic devices. In the application examples such as connectors of the embodiment, one of the above two electronic devices may be an inspection device, and the other of the above two electronic devices may be a device to be inspected by the inspection device. The connector of the embodiment can be used to electrically connect the inspection device to the device under inspection during the electrical inspection of the device under inspection. As an example, the connector of the embodiment can be used in the final electrical inspection of the semiconductor device in a post-production step of the semiconductor device, but examples of applying the connector of the embodiment are not limited thereto.

圖1示出應用一實施例的連接器的例。圖1簡要示出連接器與連接器相接觸的電子設備，圖1所示的形狀僅是為了理解實施例而選擇的例。 FIG. 1 shows an example to which a connector of an embodiment is applied. Fig. 1 schematically shows an electronic device in which connectors are in contact with the connectors, and the shapes shown in Fig. 1 are only examples selected for understanding the embodiments.

參照圖1，在本發明多種實施例中的一個實施例的連接器可配置於兩個電子設備之間。多個實施例的連接器為片(sheet)形狀的結構物。兩個電子設備中的一個可以為檢查裝置10，另一個可以為由檢查裝置10進行檢查的受檢設備20。圖1中示出本發明一實施例的連接器100配置於檢查裝置10與受檢設備20之間，以用於檢查受檢設備20。 Referring to FIG. 1 , a connector in one embodiment of various embodiments of the present invention can be configured between two electronic devices. The connectors of various embodiments are sheet-shaped structures. One of the two electronic devices may be the inspection device 10 , and the other may be the device 20 to be inspected by the inspection device 10 . FIG. 1 shows that a connector 100 according to an embodiment of the present invention is disposed between an inspection device 10 and an inspected device 20 for inspecting the inspected device 20 .

連接器100可安裝於測試插座30，藉由測試插座30來位於檢查裝置10上。測試插座30以可去除的方式安裝於檢查裝置10。測試插座30在內部收容藉助手工作業或藉由搬運裝置向檢查裝置10搬運的受檢設備20，可將受檢設備20排列在連接器100。當檢查受檢設備20時，連接器100沿著上下方向VD與檢查裝置10及受檢設備20相接觸，檢查裝置10及受檢設備20相互電連接。 The connector 100 can be installed on the test socket 30 , and the test socket 30 is located on the inspection device 10 . The test socket 30 is removably mounted on the inspection device 10 . The test socket 30 accommodates the tested equipment 20 that is transported to the inspection device 10 by manual work or by a transport device, and the tested equipment 20 can be arranged on the connector 100 . When inspecting the device under inspection 20 , the connector 100 contacts the inspection device 10 and the device under inspection 20 along the vertical direction VD, and the inspection device 10 and the device under inspection 20 are electrically connected to each other.

受檢設備20可以為使用樹脂材料來以六面體形狀封裝半導體積體電路(IC)晶片和多個端子的半導體設備。受檢設備20在下側具有多個端子21。 受檢設備20的端子21可以為球(ball)型端子。 The device under inspection 20 may be a semiconductor device that uses a resin material to package a semiconductor integrated circuit (IC) wafer and a plurality of terminals in a hexahedral shape. The device under test 20 has a plurality of terminals 21 on the lower side. The terminals 21 of the device under test 20 may be ball-type terminals.

檢查裝置10可以檢查受檢設備20的各種工作特性。檢查裝置10可具有執行檢查的板，上述板可包括用於檢查受檢設備的檢查電路11。並且，檢查電路11包括藉由連接器100與受檢設備的端子21電連接的多個端子12。檢查裝置10的端子12可以收發電測試訊號並接收回應訊號。 The inspection device 10 can inspect various operating characteristics of the device under inspection 20 . The inspection device 10 may have a board for performing the inspection, and the board may include an inspection circuit 11 for inspecting the device to be inspected. Furthermore, the inspection circuit 11 includes a plurality of terminals 12 electrically connected to the terminals 21 of the device under inspection through the connector 100 . The terminal 12 of the inspection device 10 can send and receive electrical test signals and receive response signals.

連接器100可藉由測試插座30與檢查裝置10的端子12相接觸。當檢查受檢設備20時，連接器100使受檢設備的各個端子21和與此對應的檢查裝置的各個端子12沿著上下方向VD電連接，藉由連接器100，由檢查裝置10執行對受檢設備20的檢查。 The connector 100 can be in contact with the terminal 12 of the inspection device 10 through the test socket 30 . When inspecting the device 20 under inspection, the connector 100 electrically connects each terminal 21 of the device under inspection and each terminal 12 of the corresponding inspection device along the vertical direction VD. Inspection of the device under inspection 20 .

連接器100的至少一部分可以由彈性物質形成。當檢查受檢設備20時，受檢設備20放置於連接器100的上側。為了檢查受檢設備20，可藉由機械裝置或手動沿著上下方向VD中的下方，向連接器100施加壓力P。藉助壓力P，受檢設備的端子21與連接器100可以沿著上下方向VD相接觸，連接器100與檢查裝置的端子12可以沿著上下方向VD相接觸。並且，藉助壓力P，連接器100的一部分結構要素可以沿著下方和水平方向HD彈性變形。若去除壓力P，則連接器100的上述一部分結構要素可以復原成原來形狀。 At least a portion of the connector 100 may be formed of an elastic substance. When inspecting the device 20 to be inspected, the device 20 to be inspected is placed on the upper side of the connector 100 . In order to inspect the device under test 20 , a pressure P can be applied to the connector 100 in the downward direction VD by mechanical means or manually. With the help of the pressure P, the terminal 21 of the device under test and the connector 100 can contact along the vertical direction VD, and the connector 100 can contact the terminal 12 of the inspection device along the vertical direction VD. Also, with the pressure P, some structural elements of the connector 100 can be elastically deformed in the downward and horizontal direction HD. When the pressure P is removed, some of the components of the connector 100 can return to their original shape.

參照圖1，一實施例的連接器100包括至少一個導電部110，當檢查受檢設備20時沿著上下方向VD傳輸訊號。導電部110可包括：中心導電部111，可沿著上下方向VD導電；以及第一周邊部112，包圍中心導電部111。並且，連接器100可包括：支撐部121，與導電部110的下端部附近結合成一體，沿著上下方向VD支撐導電部110；以及絕緣膜130，與導電部110的上端部相結合。 Referring to FIG. 1 , a connector 100 according to an embodiment includes at least one conductive portion 110 for transmitting signals along the vertical direction VD when inspecting the device 20 under inspection. The conductive portion 110 may include: a central conductive portion 111 capable of conducting electricity along the vertical direction VD; and a first peripheral portion 112 surrounding the central conductive portion 111 . Also, the connector 100 may include: a supporting part 121 integrated near the lower end of the conductive part 110 to support the conductive part 110 in the vertical direction VD; and an insulating film 130 combined with the upper end of the conductive part 110 .

導電部110的一部分由彈性物質形成，導電部110具有彈性。導電部110可藉助壓力P沿著上下方向VD及與上下方向VD正交的水平方向HD彈性變形。 A part of the conductive part 110 is formed of an elastic material, and the conductive part 110 has elasticity. The conductive part 110 can be elastically deformed by the pressure P along the vertical direction VD and the horizontal direction HD perpendicular to the vertical direction VD.

在施加壓力P的狀態下，導電部110的上端與受檢設備的端子21相接 觸，下端與檢查裝置的端子12相接觸。由此，在與一個導電部110對應的受檢設備的端子21與檢查裝置的端子12之間，以導電部110為介質來形成上下方向的導電路。檢查裝置的測試訊號可從端子12藉由導電部110向受檢設備20的端子21傳輸，受檢設備20的回應訊號可從端子21藉由導電部110向檢查裝置10的端子12傳輸。 In the state of applying pressure P, the upper end of the conductive part 110 is in contact with the terminal 21 of the device under test Touch, the lower end is in contact with the terminal 12 of the inspection device. Thus, between the terminal 21 of the device under test corresponding to one conductive part 110 and the terminal 12 of the inspection device, a conductive path in the vertical direction is formed with the conductive part 110 as a medium. The test signal of the inspection device can be transmitted from the terminal 12 to the terminal 21 of the device under inspection 20 through the conductive part 110 , and the response signal of the device under inspection 20 can be transmitted from the terminal 21 to the terminal 12 of the inspection device 10 through the conductive part 110 .

在壓力P的作用下，導電部110在受檢設備20與檢查裝置10之間，受到向下方的按壓，藉由導電部110沿著上下方向VD傳輸電訊號。以下，導電部110藉助壓力P受到下方的按壓並沿著上下方向及水平方向彈性變形的狀態參照在導電部的上下方向上的加壓狀態或連接器的加壓狀態。 Under the action of the pressure P, the conductive part 110 is pressed downward between the device under inspection 20 and the inspection device 10 , and electrical signals are transmitted along the vertical direction VD through the conductive part 110 . Hereinafter, the state where the conductive part 110 is pressed downward by the pressure P and elastically deforms in the vertical and horizontal directions refers to the pressurized state of the conductive part in the vertical direction or the pressurized state of the connector.

若從連接器100去除壓力P，則導電部110可以彈性復原成其原本形狀。以下，壓力P並不向導電部110施加，導電部110維持其原本形狀的狀態參照在導電部的上下方向上的非加壓狀態或連接器的非加壓狀態。在實施例的連接器中，導電部110在上述非加壓狀態與上述加壓狀態之間可逆地彈性變形。 If the pressure P is removed from the connector 100, the conductive portion 110 can elastically return to its original shape. Hereinafter, the pressure P is not applied to the conductive portion 110 , and the state where the conductive portion 110 maintains its original shape refers to the non-pressurized state in the vertical direction of the conductive portion or the non-pressurized state of the connector. In the connector of the embodiment, the conductive portion 110 elastically deforms reversibly between the above-mentioned non-pressurized state and the above-mentioned pressurized state.

例如，受檢設備可以在如-60℃至160℃的溫度範圍內接受檢查。當在上述溫度範圍內檢查時，多個實施例的連接器可以保證與常溫檢查的檢查可靠性類似的檢查可靠性。當進行比較高的溫度範圍內的檢查時，多個實施例的連接器的結構要素可從常溫的膨脹程度膨脹成稍大的程度。當進行比較低的溫度範圍內的檢查時，與常溫下的膨脹程度相比，多個實施例的連接器的結構要素能夠以稍小的程度膨脹，即，更少膨脹。當進行比較高的溫度範圍及比較低的溫度範圍內的檢查時，為了保證常溫檢查的檢查可靠性，多個實施例的連接器可具有在加壓狀態下，兩種不同類型的彈性物質交互配置的結構。 For example, the inspected equipment can be inspected in a temperature range of eg -60°C to 160°C. When inspected in the above temperature range, the connectors of various embodiments can ensure inspection reliability similar to that of normal temperature inspection. When inspected in a relatively high temperature range, the structural elements of the connectors of various embodiments can expand from normal temperature to a slightly larger degree. When inspected in a relatively low temperature range, the structural elements of the connectors of various embodiments can expand to a slightly smaller extent, ie, less, than at normal temperature. When performing inspections in a relatively high temperature range and a relatively low temperature range, in order to ensure the inspection reliability of room temperature inspections, the connectors in various embodiments may have two different types of elastic materials that interact under pressure. Configuration structure.

在本發明的實施例中，上述兩種類型的彈性物質中的一個包含耐寒性材料，另一個包含耐熱性材料。包含耐寒性材料的彈性材料可以在比較低的溫度範圍內的加壓狀態下呈現出高的膨脹率。包含耐熱性材料的彈性材料可以在比較高的溫度範圍內的加壓狀態下呈現出低的膨脹率。因此，在比較低的溫 度及比較高的溫度的加壓狀態下，一實施例的連接器以與常溫的膨脹程度類似的程度膨脹，從而可以保證與常溫檢查的檢查可靠性類似的檢查可靠性。 In an embodiment of the present invention, one of the above two types of elastic substances includes a cold-resistant material, and the other includes a heat-resistant material. An elastic material including a cold-resistant material can exhibit a high expansion rate in a pressurized state in a relatively low temperature range. An elastic material including a heat-resistant material can exhibit a low expansion rate in a pressurized state in a relatively high temperature range. Therefore, at lower temperature In a pressurized state at a high temperature or a relatively high temperature, the connector of one embodiment expands to an extent similar to that at normal temperature, thereby ensuring inspection reliability similar to that of normal temperature inspection.

在本發明的實施例中，上述兩種類型的彈性物質中的一個參照第一彈性物質，另一個參照第二彈性物質。若第一彈性物質包含耐寒性材料，則第二彈性物質可包含耐熱性材料。若第一彈性物質包含耐熱性材料，則第二彈性物質可包含耐寒性材料。上述耐寒性材料可以為氟，但並不局限於此。上述耐熱性材料可以為氧化鐵、氮化硼及氮化鋁中的一種，但並不局限於此。因此，在本發明的實施例中，第一彈性物質可選自第一組及第二組，上述第一組包含氧化鐵、氮化硼及氮化鋁中的一種及矽橡膠，上述第二組包含氟及矽橡膠，第二彈性物質可選自上述第一組及第二組中的剩餘一組。 In an embodiment of the present invention, one of the above two types of elastic substances refers to the first elastic substance, and the other refers to the second elastic substance. If the first elastic substance contains a cold-resistant material, the second elastic substance may contain a heat-resistant material. If the first elastic substance contains a heat-resistant material, the second elastic substance may contain a cold-resistant material. The above-mentioned cold-resistant material may be fluorine, but is not limited thereto. The above-mentioned heat-resistant material may be one of iron oxide, boron nitride and aluminum nitride, but is not limited thereto. Therefore, in an embodiment of the present invention, the first elastic material can be selected from the first group and the second group, the first group includes iron oxide, boron nitride and aluminum nitride and silicon rubber, the second group The group includes fluorine and silicone rubber, and the second elastic material can be selected from the remaining group in the first group and the second group.

參照圖1，在一實施例的連接器100中，構成中心導電部111的彈性物質及構成第一周邊部112的彈性物質在加壓狀態下具有不同的膨脹率。 Referring to FIG. 1 , in a connector 100 according to one embodiment, the elastic material constituting the central conductive portion 111 and the elastic material constituting the first peripheral portion 112 have different expansion rates in a pressurized state.

實施例的連接器可包括多個導電部110。多個導電部110的平面排列形態可根據受檢設備20的端子21的平面排列形態改變。例如，多個導電部可以在連接器內以一個行列形態或一對以上的行列形態排列。 The connector of the embodiment may include a plurality of conductive parts 110 . The planar arrangement of the plurality of conductive parts 110 can be changed according to the planar arrangement of the terminals 21 of the device under test 20 . For example, a plurality of conductive parts can be arranged in a row and column or more than one pair of rows and columns in the connector.

在實施例的連接器中，導電部110與支撐部121可形成為一體並構成一個導電模組120。在這種導電模組120中，多個導電部110從一個支撐部121向上方突出，因此，導電模組120具有一個支撐部121及多股導電部110。 In the connector of the embodiment, the conductive part 110 and the support part 121 can be integrated to form a conductive module 120 . In such a conductive module 120 , a plurality of conductive parts 110 protrude upward from a support part 121 , therefore, the conductive module 120 has a support part 121 and a plurality of conductive parts 110 .

為了說明實施例的連接器而參照圖2至圖15。圖2至圖15簡要示出連接器的形狀、導電部的形狀、導電部之外的連接器的結構要素的形狀。圖2至圖15所示的形狀僅是為了理解實施例而選擇的例。 2 to 15 are referred to in order to describe the connector of the embodiment. 2 to 15 schematically show the shape of the connector, the shape of the conductive portion, and the shapes of the components of the connector other than the conductive portion. The shapes shown in FIGS. 2 to 15 are merely examples selected for understanding the embodiment.

圖2為示出本發明第一實施例的連接器的一部分的剖視圖，圖3簡要示出圖2所示的連接器的水平方向的剖面形狀。一同參照圖2及圖3來說明第一實施例的連接器。 FIG. 2 is a cross-sectional view showing part of a connector according to a first embodiment of the present invention, and FIG. 3 schematically shows a horizontal cross-sectional shape of the connector shown in FIG. 2 . The connector of the first embodiment will be described with reference to FIGS. 2 and 3 together.

在連接器100中，導電部110在檢查裝置與受檢設備之間沿著上下方 向VD傳輸訊號。連接器100可包括沿著至少一個導電部110或與上下方向VD正交的水平方向HD相互隔開的多個導電部110。 In the connector 100, the conductive part 110 runs along the upper and lower sides between the inspection device and the device under inspection. Send signal to VD. The connector 100 may include a plurality of conductive parts 110 spaced apart from each other along at least one conductive part 110 or a horizontal direction HD orthogonal to the up-down direction VD.

導電部110可呈沿著上下方向VD延伸的圓柱形狀，導電部的形狀並不局限於圓柱形狀。在一實施例中，導電部110採取包括中心導電部111及第一周邊部112的雙重結構。 The conductive portion 110 may have a cylindrical shape extending along the vertical direction VD, and the shape of the conductive portion is not limited to the cylindrical shape. In one embodiment, the conductive portion 110 adopts a double structure including a central conductive portion 111 and a first peripheral portion 112 .

中心導電部111可沿著上下方向VD進行導電。中心導電部111包括個第一導電性物質113及第一彈性物質114。多個第一導電性物質113以可沿著上下方向VD導電的方式接觸，沿著上下方向VD，例如，以圓柱形狀集合。以可沿著上下方向VD導電的方式接觸的多個第一導電性物質113在導電部110內形成沿著上下方向VD執行訊號傳輸的導電體。 The central conductive portion 111 can conduct electricity along the vertical direction VD. The central conductive portion 111 includes a first conductive material 113 and a first elastic material 114 . The plurality of first conductive substances 113 are in contact with each other so as to be conductive in the vertical direction VD, and are assembled in a cylindrical shape along the vertical direction VD, for example. The plurality of first conductive substances 113 contacted so as to be conductive along the vertical direction VD form a conductor that performs signal transmission along the vertical direction VD in the conductive portion 110 .

如圖2所示，第一導電性物質113可以為粒子。第一導電性物質113的粒子可以由高導電性金屬材料形成。或者，第一導電性物質113的粒子可具有在由具有彈性的樹脂材料或金屬材料形成的芯塗敷上述高導電性金屬材料的形態。作為另一例，第一導電性物質113可以為細長纖維或金屬線，這種纖維或金屬線可以由金屬或碳形成。 As shown in FIG. 2 , the first conductive substance 113 may be particles. The particles of the first conductive substance 113 may be formed of a highly conductive metal material. Alternatively, the particles of the first conductive substance 113 may have a form in which the above-mentioned highly conductive metal material is coated on a core formed of an elastic resin material or metal material. As another example, the first conductive substance 113 may be an elongated fiber or a metal wire, and such fiber or metal wire may be formed of metal or carbon.

第一彈性物質114處於固化的狀態並具有彈性。在第一彈性物質114中，以使多個第一導電性物質113形成上述導電體形狀的方式使多個第一導電性物質113維持上下方向VD。在多個第一導電性物質113之間可填充第一彈性物質114。第一彈性物質114與多個第一導電性物質113形成為一體來構成中心導電部111。在中心導電部111中，第一彈性物質114與第一導電性物質113相混合。 The first elastic substance 114 is in a cured state and has elasticity. In the first elastic material 114 , the plurality of first conductive materials 113 are maintained in the vertical direction VD so that the plurality of first conductive materials 113 form the above-mentioned conductor shape. The first elastic substance 114 may be filled between the plurality of first conductive substances 113 . The first elastic material 114 is integrally formed with the plurality of first conductive materials 113 to form the central conductive portion 111 . In the central conductive portion 111 , the first elastic substance 114 is mixed with the first conductive substance 113 .

第一彈性物質114可以為具有絕緣性的彈性物質或具有導電性的彈性物質。第一彈性物質114包含耐寒性材料。作為一例，第一彈性物質114可包含氟及矽橡膠，也可以具有在比較低的溫度範圍內具有相對高的膨脹率的耐寒性材料。氟可作為添加劑存在於矽橡膠。由氟及矽橡膠形成的第一彈性物質114可以在比較低的溫度範圍內呈現出比通常的矽橡膠的膨脹率高的膨脹率，因 此，在比較低的溫度範圍內的加壓狀態下可以具有耐寒性。 The first elastic material 114 may be an insulating elastic material or a conductive elastic material. The first elastic substance 114 contains a cold-resistant material. As an example, the first elastic material 114 may include fluorine and silicone rubber, or may be a cold-resistant material with a relatively high expansion rate in a relatively low temperature range. Fluorine can be present as an additive in silicone rubber. The first elastic substance 114 formed by fluorine and silicone rubber can exhibit a higher expansion rate than that of ordinary silicone rubber in a relatively low temperature range, so Therefore, it is possible to have cold resistance in a pressurized state in a relatively low temperature range.

第一周邊部112沿著上下方向VD包圍中心導電部111。作為一例，如圖3所示，第一周邊部112能夠以環形狀包圍中心導電部111。第一周邊部112可僅由第二彈性物質115形成。第二彈性物質115可以為具有絕緣性的彈性物質或具有導電性的彈性物質。第二彈性物質115包含耐熱性材料。作為一例，第二彈性物質115可包含氧化鐵、氮化硼及氮化鋁中的一種及矽橡膠，也可以具有在比較高的溫度範圍內具有低的膨脹率的耐熱性材料。氧化鐵、氮化硼或氮化鋁可作為添加劑存在於矽橡膠。包含氧化鐵、氮化硼及氮化鋁中的一種及矽橡膠的第二彈性物質115可以在比較高的溫度範圍內呈現出比一般的矽橡膠的膨脹率低的膨脹率，因此，在比較高的溫度範圍內的加壓狀態下可具有耐熱性。 The first peripheral portion 112 surrounds the central conductive portion 111 along the vertical direction VD. As an example, as shown in FIG. 3 , the first peripheral portion 112 can surround the central conductive portion 111 in a ring shape. The first peripheral portion 112 may be formed of only the second elastic substance 115 . The second elastic material 115 may be an insulating elastic material or a conductive elastic material. The second elastic substance 115 includes a heat-resistant material. As an example, the second elastic material 115 may include iron oxide, one of boron nitride and aluminum nitride, and silicon rubber, or may be a heat-resistant material with a low expansion rate in a relatively high temperature range. Iron oxide, boron nitride or aluminum nitride can be present as additives in silicone rubber. The second elastic material 115 comprising one of iron oxide, boron nitride and aluminum nitride and silicon rubber can exhibit a lower expansion rate than that of general silicon rubber in a relatively high temperature range. Therefore, in comparison It can have heat resistance in a pressurized state in a high temperature range.

在連接器100中，支撐部121位於朝向檢查裝置的一側。支撐部121起到沿著上下方向VD支撐一個導電部或多個導電部的支撐體的功能。在實施例的連接器中，至少一個導電部110與支撐部121或多個導電部110與支撐部121可以為形成為一體的結構物。因此，形成為一體的多個導電部110及支撐部121可構成沿著上下方向傳輸訊號的一個導電模組120。 In the connector 100, the support portion 121 is located on a side facing the inspection device. The support portion 121 functions as a support body that supports one conductive portion or a plurality of conductive portions along the vertical direction VD. In the connector of the embodiment, at least one conductive part 110 and the support part 121 or a plurality of conductive parts 110 and the support part 121 may be an integral structure. Therefore, the plurality of conductive parts 110 and support parts 121 formed in one body can constitute a conductive module 120 that transmits signals along the vertical direction.

支撐部121沿著水平方向HD配置，與導電部110的中心導電部111的下端部結合成一體。支撐部121可以與導電部110的中心導電部111的下端部形成為一體。支撐部121使多個導電部110沿著水平方向HD隔開及絕緣。導電部110的下端中心導電部111的下端比支撐部121的下部面更向下方突出。或者，導電部110的下端可以不從支撐部121的下部面突出。 The supporting portion 121 is arranged along the horizontal direction HD, and is integrated with the lower end portion of the central conductive portion 111 of the conductive portion 110 . The support part 121 may be integrally formed with a lower end part of the central conductive part 111 of the conductive part 110 . The supporting part 121 separates and insulates the plurality of conductive parts 110 along the horizontal direction HD. Lower end of the conductive part 110 The lower end of the central conductive part 111 protrudes downward from the lower surface of the support part 121 . Alternatively, the lower end of the conductive part 110 may not protrude from the lower surface of the support part 121 .

支撐部121可以由具有絕緣性的物質或具有絕緣性及彈性的物質形成。作為一例，支撐部121可以為配置在與上下方向VD正交的連接器的水平面的一個膜。構成支撐部121的膜可以包含聚醯亞胺，構成支撐部121的材料並不局限於此。 The supporting part 121 may be formed of an insulating material or an insulating and elastic material. As an example, the supporting portion 121 may be a single film arranged on a horizontal plane of the connector perpendicular to the vertical direction VD. The film constituting the support part 121 may include polyimide, and the material constituting the support part 121 is not limited thereto.

在連接器100中，絕緣膜130位於面向受檢設備的一側。絕緣膜130 可以與導電部110的上端部相結合。作為一例，絕緣膜130可以為與導電部110的第一周邊部112的上端部相結合，且形成連接器100的上部面的一個膜。絕緣膜130可以使多個導電部110絕緣，可以沿著上下方向VD支撐多個導電部110。作為一例，絕緣膜130可包括具有絕緣性的聚醯亞胺膜或由具有絕緣性的聚合物形成的膜。 In the connector 100, the insulating film 130 is located on the side facing the device under test. insulating film 130 It may be combined with the upper end of the conductive part 110 . As an example, the insulating film 130 may be a single film that is combined with the upper end of the first peripheral portion 112 of the conductive portion 110 and forms the upper surface of the connector 100 . The insulating film 130 may insulate the plurality of conductive parts 110 and may support the plurality of conductive parts 110 in the vertical direction VD. As an example, the insulating film 130 may include an insulating polyimide film or a film formed of an insulating polymer.

在連接器100中，多個導電部110藉由間隙150來沿著與上下方向VD正交的水平方向HD隔開。間隙150可以為相鄰的多個導電部110的第一周邊部112的外周面之間的空心空間。間隙150可以被空氣填充。 In the connector 100 , the plurality of conductive parts 110 are separated along the horizontal direction HD perpendicular to the vertical direction VD by gaps 150 . The gap 150 may be a hollow space between the outer peripheral surfaces of the first peripheral parts 112 of the adjacent plurality of conductive parts 110 . The gap 150 may be filled with air.

在導電部110的上下方向上的加壓狀態下，根據用於受檢設備的檢查的溫度環境，中心導電部111的第一彈性物質114及第一周邊部112的第二彈性物質115具有不同的膨脹率。在規定的溫度範圍內的加壓狀態下，上述膨脹率可根據導電部的膨脹程度改變。當藉助壓力向上下方向按壓導電部時，導電部可沿著上下方向VD收縮，並沿著水平方向HD或相對於沿著上下方向經過直徑方向導電部的中心軸的直徑方向擴大的形態膨脹。當導電部膨脹時，以導電部的橫截面形狀的面積增加的形態彈性變形。在加壓狀態下的導電部的體積或直徑可大於非加壓狀態下的體積或直徑。考慮到導電部的這種變形，膨脹率可以為非加壓狀態下的導電部的體積或直徑與加壓狀態下的導電部的體積或直徑的比。 In the pressurized state in the vertical direction of the conductive part 110, the first elastic material 114 of the central conductive part 111 and the second elastic material 115 of the first peripheral part 112 have different expansion rate. In a pressurized state within a predetermined temperature range, the above-mentioned expansion ratio can be changed according to the degree of expansion of the conductive portion. When the conductive portion is pressed vertically by pressure, the conductive portion can shrink in the vertical direction VD and expand in the horizontal direction HD or in a diametrically expanded form relative to the vertical direction passing through the center axis of the diametrical conductive portion. When the conductive part expands, it deforms elastically in such a manner that the area of the cross-sectional shape of the conductive part increases. The volume or diameter of the conductive portion in a pressurized state may be larger than that in a non-pressurized state. In consideration of such deformation of the conductive portion, the expansion ratio may be the ratio of the volume or diameter of the conductive portion in a non-pressurized state to the volume or diameter of the conductive portion in a pressurized state.

受檢設備可以在比較高的第一溫度範圍及比較低的第二溫度範圍內檢查。上述第一溫度範圍可以為25℃至160℃的溫度範圍。上述第二溫度範圍為比上述第一溫度範圍低的溫度範圍，可以為-60℃至25℃的溫度範圍。在上述第一溫度範圍內的加壓狀態下，第一彈性物質114可具有第一膨脹率，第二彈性物質115可具有與第一膨脹率不同的第二膨脹率。在上述第二溫度範圍內的加壓狀態下，第一彈性物質114可具有第三膨脹率，第二彈性物質115可具有與第三膨脹率不同的第四膨脹率。 The inspected equipment can be inspected in a relatively high first temperature range and a relatively low second temperature range. The above-mentioned first temperature range may be a temperature range from 25°C to 160°C. The above-mentioned second temperature range is a temperature range lower than the above-mentioned first temperature range, and may be a temperature range of -60°C to 25°C. In a pressurized state within the aforementioned first temperature range, the first elastic substance 114 may have a first expansion rate, and the second elastic material 115 may have a second expansion rate different from the first expansion rate. In a pressurized state within the aforementioned second temperature range, the first elastic substance 114 may have a third expansion rate, and the second elastic material 115 may have a fourth expansion rate different from the third expansion rate.

在上述第一溫度範圍內的加壓狀態下，包含耐熱性材料的第二彈性 物質115具有比第一彈性物質114的第一膨脹率低的第二膨脹率或比一般的矽橡膠的膨脹率低的膨脹率。在上述第二溫度範圍內的加壓狀態下，包含耐寒性材料的第一彈性物質114具有比第二彈性物質115的第四膨脹率高的第三膨脹率或比一般的矽橡膠的膨脹率高的膨脹率。如上所述，在上述第一溫度範圍內的加壓狀態下，第二彈性物質115具有比第一彈性物質114的膨脹率低的膨脹率，在上述第二溫度範圍內的加壓狀態下，第一彈性物質114具有比第二彈性物質115的膨脹率高的膨脹率。 In the pressurized state within the above-mentioned first temperature range, the second elasticity including the heat-resistant material The material 115 has a second expansion rate lower than the first expansion rate of the first elastic material 114 or an expansion rate lower than that of general silicone rubber. In a pressurized state within the above-mentioned second temperature range, the first elastic substance 114 including a cold-resistant material has a third expansion ratio higher than the fourth expansion ratio of the second elastic substance 115 or an expansion ratio higher than that of general silicone rubber. High expansion rate. As described above, in the pressurized state within the above-mentioned first temperature range, the second elastic material 115 has an expansion coefficient lower than that of the first elastic material 114, and in the pressurized state in the above-mentioned second temperature range, The first elastic material 114 has a higher expansion rate than that of the second elastic material 115 .

構成中心導電部111的彈性物質具有耐寒性，構成第一周邊部112的彈性物質具有耐熱性。中心導電部111及第一周邊部112可以在上述第一溫度範圍內的加壓狀態或上述第二溫度範圍內的加壓狀態下能夠以不同的程度膨脹，導電部110在多種溫度下的加壓狀態下能夠以良好的水平膨脹。因此，與常溫下的加壓狀態的膨脹程度相比，在上述第一溫度範圍內的加壓狀態或上述第二溫度範圍內的加壓狀態下，導電部110能夠以並未發生太大改變的程度進行膨脹。因此，上述實施例的連接器在比較高溫的加壓狀態(例如，在上述第一溫度範圍內的加壓狀態)下，可以防止導電部110的過度膨脹來具有得到提高的耐熱性。並且，上述實施例的連接器在比較低溫的加壓狀態(例如，在上述第二溫度範圍內的加壓狀態)下，可藉助防止導電部110的過度收縮來具有得到提高的耐寒性。在比較低的溫度下的加壓狀態下，若導電部110過度收縮(即，以極少程度膨脹)，則導電部110為了呈現出適當的導電性，需要向導電部110施加過大的壓力。但是，當在比較低的溫度下進行檢查時，上述實施例的連接器100可無需施加強力壓力，在適當的壓力下，即可以獲得確切的導電部的彈性復原力。 The elastic material constituting the central conductive portion 111 has cold resistance, and the elastic material constituting the first peripheral portion 112 has heat resistance. The central conductive part 111 and the first peripheral part 112 can expand to different degrees under the pressurized state within the above-mentioned first temperature range or the pressurized state within the above-mentioned second temperature range. Can expand at a good level under pressure. Therefore, in the pressurized state in the above-mentioned first temperature range or in the pressurized state in the above-mentioned second temperature range, the conductive part 110 can be expanded without much change compared with the degree of expansion in the pressurized state at normal temperature. degree of expansion. Therefore, the connector of the above embodiment can prevent excessive expansion of the conductive portion 110 and have improved heat resistance in a relatively high temperature pressurized state (for example, a pressurized state within the first temperature range). In addition, the connector of the above embodiment can have improved cold resistance by preventing excessive shrinkage of the conductive part 110 under a relatively low temperature pressurized state (for example, a pressurized state within the above-mentioned second temperature range). In a pressurized state at a relatively low temperature, if the conductive part 110 contracts excessively (that is, expands to a small extent), the conductive part 110 needs to apply excessive pressure to the conductive part 110 in order to exhibit appropriate conductivity. However, when the inspection is performed at a relatively low temperature, the connector 100 of the above-mentioned embodiment can obtain the exact elastic recovery force of the conductive part under an appropriate pressure without applying strong pressure.

與常溫下的加壓狀態相比，在上述第一溫度範圍內的加壓狀態下，導電部110可以進一步膨脹。在上述第一溫度範圍內的加壓狀態下，包含耐熱性材料的第一周邊部112提高導電部110的耐熱性。與在上述第一溫度範圍內對包 括並不具有上述耐熱性材料的一般的矽橡膠的導電部施壓力的情況相比，導電部110可以更少膨脹，由此，可具有更低的膨脹率。與常溫下的加壓狀態相比，在上述第二溫度範圍內的加壓狀態下，導電部110可以更少膨脹。在上述第二溫度範圍內的加壓狀態下，包含上述耐寒性材料的中心導電部111提高導電部110的耐寒性。因此，與在上述第二溫度範圍內對包括並不具有上述耐寒性材料的一般的矽橡膠的導電部施壓力的情況相比，導電部110可以更少膨脹，由此，可具有更高的膨脹率。 In the pressurized state within the above-mentioned first temperature range, the conductive part 110 may expand further than in the pressurized state at normal temperature. In the pressurized state within the above-mentioned first temperature range, the first peripheral portion 112 including the heat-resistant material improves the heat resistance of the conductive portion 110 . with packages within the above first temperature range The conductive part 110 can expand less than the case where the conductive part including general silicon rubber which does not have the above-mentioned heat-resistant material is pressed, and thus can have a lower expansion rate. In the pressurized state within the above-mentioned second temperature range, the conductive part 110 may expand less than in the pressurized state at normal temperature. In the pressurized state within the second temperature range, the central conductive part 111 including the cold-resistant material improves the cold resistance of the conductive part 110 . Therefore, compared with the case where pressure is applied to the conductive part including general silicone rubber which does not have the above-mentioned cold-resistant material in the above-mentioned second temperature range, the conductive part 110 can expand less, and thus, can have a higher Expansion rate.

膨脹率能夠以在特定的極限溫度(例如，-60℃或150℃)下的行程(stroke)及壓力的相關關係為基礎，對並不包含上述耐寒性及耐熱性材料的一般的導電部及包含上述耐寒性或耐熱性材料的導電部的膨脹程度進行比較來測定。行程可以為非加壓狀態下的導電部的高度與在以可檢查的方式使電流流動的加壓狀態下的導電部的高度之間的差異。 The expansion rate can be based on the relationship between stroke and pressure at a specific extreme temperature (for example, -60°C or 150°C), and it can be used for general conductive parts and The degree of expansion of the conductive part including the above-mentioned cold-resistant or heat-resistant materials was compared and measured. The stroke may be the difference between the height of the conductive portion in a non-pressurized state and the height of the conductive portion in a pressurized state in which current flows in a checkable manner.

作為一例，對以使上述一般導電部和實施例的導電部呈現出相同行程的方式施加的多個壓力進行比較來比較及測定膨脹率。為了在如-60℃的極限溫度下產生相同的行程，需要向並不具有耐寒性材料的上述一般的導電部施加比實施例的導電部高的壓力。這意味著在上述第二溫度範圍內的加壓狀態下，實施例的導電部比上述一般的導電部更膨脹以及實施例的導電部具有更高的膨脹率。 As an example, a plurality of pressures applied so that the above-mentioned general conductive portion and the conductive portion of the example show the same stroke were compared to compare and measure the expansion rate. In order to generate the same stroke at an extreme temperature such as -60°C, it is necessary to apply a higher pressure than the conductive part of the embodiment to the above-mentioned general conductive part that does not have a cold-resistant material. This means that in a pressurized state within the above-mentioned second temperature range, the conductive portion of the example expands more than the above-mentioned general conductive portion and the conductive portion of the example has a higher expansion rate.

作為另一例，可藉由比較上述一般的導電部與實施例的導電部在相同的壓力下呈現的多個行程來比較及測定膨脹率。在如-60℃的極限溫度下施加相同的壓力的情況下，上述一般的導電部所呈現的行程可小於實施例的導電部所呈現的行程。這意味著在上述第二溫度範圍內的加壓狀態下，實施例的導電部比上述一般的導電部更膨脹以及實施例的導電部具有更高的膨脹率。 As another example, the expansion rate can be compared and measured by comparing multiple strokes of the above-mentioned general conductive part and the conductive part of the embodiment under the same pressure. Under the condition that the same pressure is applied at an extreme temperature such as -60° C., the stroke exhibited by the above-mentioned general conductive portion may be smaller than that exhibited by the conductive portion of the embodiment. This means that in a pressurized state within the above-mentioned second temperature range, the conductive portion of the example expands more than the above-mentioned general conductive portion and the conductive portion of the example has a higher expansion rate.

當在特定溫度下，向導電部施加相同的壓力時，膨脹率可作為導電部沿著水平方向延伸的長度的比例或體積的比例測定。針對上述長度的比例， 以在非加壓狀態下的導電部的最外側表面的直徑尺寸為基準，可以求出加壓狀態下的導電部的膨脹的最外側表面的尺寸。針對上述體積的比例，以在非加壓狀態下的導電部的體積的尺寸為基準，可求出在加壓狀態下的導電部的膨脹的體積的尺寸。 When the same pressure is applied to the conductive part at a specific temperature, the expansion rate can be measured as the ratio of the length or volume of the conductive part extending in the horizontal direction. For the ratio of the above lengths, Based on the diameter dimension of the outermost surface of the conductive part in the non-pressurized state, the dimension of the expanded outermost surface of the conductive part in the pressurized state can be obtained. With respect to the above volume ratio, the expanded volume size of the conductive portion in the pressurized state can be obtained based on the volume size of the conductive portion in the non-pressurized state.

在參照圖2及圖3說明的一實施例的連接器中，中心導電部111具有耐寒性，第一周邊部112具有耐熱性。作為代替例，中心導電部111可具有耐熱性，第一周邊部112可具有耐寒性。即，第一彈性物質114可包含氧化鐵、氮化硼及氮化鋁及矽橡膠中的一個，第二彈性物質115可包含氟及矽橡膠。在此情況下，在上述第一溫度範圍內的加壓狀態下，第一彈性物質114具有比第二彈性物質115的膨脹率低的膨脹率，在上述第二溫度範圍內的加壓狀態下，第二彈性物質115具有比第一彈性物質114的高的膨脹率。 In the connector of one embodiment described with reference to FIGS. 2 and 3 , the central conductive portion 111 has cold resistance, and the first peripheral portion 112 has heat resistance. As an alternative, the central conductive part 111 may have heat resistance, and the first peripheral part 112 may have cold resistance. That is, the first elastic material 114 may include one of iron oxide, boron nitride, aluminum nitride, and silicon rubber, and the second elastic material 115 may include fluorine and silicon rubber. In this case, the first elastic material 114 has an expansion coefficient lower than that of the second elastic material 115 in a pressurized state within the above-mentioned first temperature range, and in a pressurized state in the above-mentioned second temperature range. , the second elastic material 115 has a higher expansion rate than that of the first elastic material 114 .

圖4示出上述實施例的連接器的代替例。參照圖4，第一周邊部112包含第二彈性物質115及多個第二導電性物質116。多個第二導電性物質116以可沿著上下方向VD導電的方式接觸，藉由第二彈性物質115，沿著上下方向VD維持第一周邊部112的形狀。在第一周邊部112中，第二彈性物質115與第二導電性物質116相混合。第二導電性物質116可以為與中心導電部111的第一導電性物質113相同或不同物質。 FIG. 4 shows an alternative to the connector of the above-described embodiment. Referring to FIG. 4 , the first peripheral portion 112 includes a second elastic material 115 and a plurality of second conductive materials 116 . The plurality of second conductive substances 116 are in contact with each other so as to conduct electricity along the vertical direction VD, and the shape of the first peripheral portion 112 is maintained along the vertical direction VD by the second elastic material 115 . In the first peripheral portion 112 , the second elastic substance 115 is mixed with the second conductive substance 116 . The second conductive substance 116 may be the same as or different from the first conductive substance 113 of the central conductive portion 111 .

作為一例，導電部110及支撐部121可藉由向成型模具注入液態成型材料，藉助磁場的施加來使多個導電性物質沿著上下方向集合並進行固化處理來製造。上述液態成型材料可包含用於耐熱性或耐寒性的液態彈性物質，向上述液態彈性物質分散導電性物質。上述成型模具可以在每個形成導電部的位置設置於導電部的形狀對應的成型空腔。在上述成型模具可包括可沿著上下方向向成型空腔施加磁場的磁鐵。並且，向成型模具投入構成支撐部121的膜部件，在上述膜部件中，在每個形成中心導電部111的位置穿有貫通孔。藉助磁鐵施加的磁場，多個導電性物質沿著上下方向集合並接觸，由此形成設置於中心導電 部並沿著上下方向傳輸訊號的導電體。之後，藉助規定的固化處理，多個中心導電部111可以與支撐部121形成為一體。之後，從用於耐熱性或耐寒性的液態彈性物質，使用另一個成型模具來成型形成有包圍中心導電部的第一周邊的導電部。在此情況下，用於成型第一周邊部的液態彈性物質可包含上述第二導電性物質。 As an example, the conductive part 110 and the supporting part 121 can be manufactured by injecting a liquid molding material into a molding die, and applying a magnetic field to assemble a plurality of conductive substances along the vertical direction and perform curing treatment. The liquid molding material may contain a liquid elastic substance for heat resistance or cold resistance, and a conductive substance may be dispersed in the liquid elastic substance. The above-mentioned forming mold may be provided in a forming cavity corresponding to the shape of the conducting part at each position where the conducting part is formed. The molding die may include a magnet capable of applying a magnetic field to the molding cavity in the vertical direction. Then, the film member constituting the supporting portion 121 is put into the molding die, and through-holes are pierced in the film member at positions where the central conductive portion 111 is formed. With the help of the magnetic field applied by the magnet, a plurality of conductive substances gather and contact along the up and down direction, thereby forming a conductive material arranged in the center. A conductor that transmits signals along the top and bottom. Afterwards, the plurality of central conductive parts 111 can be integrated with the supporting part 121 by a prescribed curing process. Afterwards, from a liquid elastic substance for heat resistance or cold resistance, another molding die is used to mold the conductive part formed with the first periphery surrounding the central conductive part. In this case, the liquid elastic substance used to form the first peripheral portion may contain the above-mentioned second conductive substance.

圖5為示出本發明第二實施例的連接器的一部分的剖視圖，圖6簡要示出圖5所示的在連接器的水平方向的剖面形狀。一同參照圖5及圖6來說明第二實施例的連接器。 5 is a cross-sectional view showing a part of a connector according to a second embodiment of the present invention, and FIG. 6 schematically shows a cross-sectional shape of the connector shown in FIG. 5 in the horizontal direction. The connector of the second embodiment will be described with reference to FIGS. 5 and 6 together.

與上述第一實施例的連接器相比，本實施例的連接器200除導電部包括追加的周邊部之外，與上述第一實施例的連接器的結構類似。 Compared with the connector of the above-mentioned first embodiment, the connector 200 of this embodiment is similar in structure to the connector of the above-mentioned first embodiment except that the conductive portion includes an additional peripheral portion.

連接器200的導電部210採取包括中心導電部111及第一周邊部112、第二周邊部217的三重結構。第一周邊部112可僅包括上述第二彈性物質。第二周邊部217沿著上下方向VD包圍第一周邊部112。作為一例，如圖6所示，第二周邊部217能夠以環形狀包圍第一周邊部112。第二周邊部217可僅包括中心導電部111的第一彈性物質114。多個導電部110可藉由間隙150沿著水平方向HD來隔開，間隙150可以由相鄰的多個導電部110的第二周邊部217的外周面之間的空心空間形成。 The conductive portion 210 of the connector 200 adopts a triple structure including a central conductive portion 111 , a first peripheral portion 112 , and a second peripheral portion 217 . The first peripheral portion 112 may only include the above-mentioned second elastic substance. The second peripheral portion 217 surrounds the first peripheral portion 112 along the vertical direction VD. As an example, as shown in FIG. 6 , the second peripheral portion 217 can surround the first peripheral portion 112 in a ring shape. The second peripheral portion 217 may only include the first elastic substance 114 of the central conductive portion 111 . The plurality of conductive portions 110 may be separated along the horizontal direction HD by gaps 150 , and the gaps 150 may be formed by hollow spaces between outer peripheral surfaces of the second peripheral portions 217 of adjacent plurality of conductive portions 110 .

在三重結構的導電部110中，在中心配置第一彈性物質114，在第一彈性物質114的外側配置第二彈性物質115，在第二彈性物質115的外側配置第一彈性物質114。因此，在上述實施例的導電部110中，中心導電部111包含上述耐寒性材料，第一周邊部112包含上述耐熱性材料，第二周邊部217包含上述耐寒性材料。作為代替例，中心導電部111可包含上述耐熱性材料，第一周邊部112可包含上述耐寒性材料，第二周邊部217可包含上述耐熱性材料。 In the conductive part 110 of the triple structure, the first elastic material 114 is arranged at the center, the second elastic material 115 is arranged outside the first elastic material 114 , and the first elastic material 114 is arranged outside the second elastic material 115 . Therefore, in the conductive portion 110 of the above embodiment, the central conductive portion 111 includes the above-mentioned cold-resistant material, the first peripheral portion 112 includes the above-mentioned heat-resistant material, and the second peripheral portion 217 includes the above-mentioned cold-resistant material. As an alternative, the central conductive portion 111 may include the aforementioned heat-resistant material, the first peripheral portion 112 may include the aforementioned cold-resistant material, and the second peripheral portion 217 may include the aforementioned heat-resistant material.

在上述實施例中，導電部110的中心導電部111具有從絕緣膜130的上部面突出的上端部218。中心導電部111的上端可以不從絕緣膜130的上部面突 出。中心導電部111的上端部218可以與中心導電部111的本體形成為一體，絕緣膜130可以與上端部218相結合。或者，中心導電部111的上端部218可包含上述第一導電性物質及上述第一彈性物質並預先設置於絕緣膜130，這種上端部218可以與中心導電部111的本體相結合。 In the above-described embodiments, the central conductive portion 111 of the conductive portion 110 has the upper end portion 218 protruding from the upper surface of the insulating film 130 . The upper end of the central conductive portion 111 may not protrude from the upper surface of the insulating film 130 out. The upper end portion 218 of the central conductive portion 111 may be integrally formed with the body of the central conductive portion 111 , and the insulating film 130 may be combined with the upper end portion 218 . Alternatively, the upper end 218 of the central conductive portion 111 may include the first conductive material and the first elastic material and be pre-disposed on the insulating film 130 , and the upper end 218 may be combined with the body of the central conductive portion 111 .

圖7示出上述第二實施例的連接器的代替例。參照圖7，第二周邊部217包含第一彈性物質114及多個第三導電性物質219。多個第三導電性物質219以可沿著上下方向VD導電的方式接觸，藉由第一彈性物質114，沿著上下方向VD維持第二周邊部217的形狀。在第二周邊部217中，第一彈性物質114與多個第三導電性物質219相混合。第三導電性物質219可以為與中心導電部111的第一導電性物質相同或不同的物質。 FIG. 7 shows an alternative to the connector of the second embodiment described above. Referring to FIG. 7 , the second peripheral portion 217 includes the first elastic material 114 and a plurality of third conductive materials 219 . The plurality of third conductive substances 219 are in contact with each other so as to conduct electricity along the vertical direction VD, and the shape of the second peripheral portion 217 is maintained along the vertical direction VD by the first elastic substance 114 . In the second peripheral portion 217 , the first elastic substance 114 is mixed with a plurality of third conductive substances 219 . The third conductive substance 219 may be the same as or different from the first conductive substance of the central conductive portion 111 .

圖8為示出本發明第三實施例的連接器的一部分的剖視圖，圖9簡要示出圖8所示的在連接器的水平方向的剖面形狀。一同參照圖8及圖9來說明第三實施例的連接器。 8 is a sectional view showing a part of a connector according to a third embodiment of the present invention, and FIG. 9 schematically shows a sectional shape of the connector shown in FIG. 8 in a horizontal direction. The connector of the third embodiment will be described with reference to FIG. 8 and FIG. 9 together.

與上述第一實施例的連接器相比，本實施例的連接器300除包括使多個導電部110沿著水平方向隔開及絕緣的絕緣部之外，與上述第一實施例的連接器的結構類似。 Compared with the connector of the above-mentioned first embodiment, the connector 300 of this embodiment includes an insulating portion that separates and insulates a plurality of conductive portions 110 along the horizontal direction, and is similar to the connector of the above-mentioned first embodiment. structure is similar.

在上述實施例中，導電部110與上述第一實施例的導電部構成相同。導電部110的中心導電部111包含上述第一導電性物質113及上述第一彈性物質114。導電部110的第一周邊部112包含上述第二彈性物質115。因此，在導電部110的加壓狀態下，導電部110的第一彈性物質114及第二彈性物質115具有不同的膨脹率。 In the above-mentioned embodiment, the conductive portion 110 has the same structure as that of the above-mentioned first embodiment. The central conductive portion 111 of the conductive portion 110 includes the first conductive material 113 and the first elastic material 114 . The first peripheral portion 112 of the conductive portion 110 includes the above-mentioned second elastic material 115 . Therefore, in the pressurized state of the conductive part 110 , the first elastic material 114 and the second elastic material 115 of the conductive part 110 have different expansion rates.

絕緣部340使多個導電部110沿著水平方向隔開及絕緣。絕緣部340位於支撐部121與絕緣膜130之間。支撐部121與中心導電部111的下端部相結合，沿著上下方向VD支撐中心導電部111。導電部110與支撐部121可形成為一體並構成一個導電模組120。上述實施例的連接器300可包括一個以上的導電模 組120。支撐部121以可去除的方式與絕緣部340相結合。例如，支撐部121的上部面與絕緣部340的下部面黏結，由此，支撐部121與絕緣部340可以結合，支撐部121與絕緣部340的結合方式並不局限於使用黏結劑的黏結方式。絕緣膜130與第一周邊部112的上端部相結合來形成連接器300的上部面。絕緣膜130的下部面可藉由黏結方式與絕緣部340的上部面相結合。 The insulation part 340 separates and insulates the plurality of conductive parts 110 along the horizontal direction. The insulating part 340 is located between the supporting part 121 and the insulating film 130 . The support portion 121 is combined with the lower end portion of the central conductive portion 111 to support the central conductive portion 111 along the vertical direction VD. The conductive part 110 and the supporting part 121 can be integrated to form a conductive module 120 . The connector 300 of the above embodiment may include more than one conductive pattern Group 120. The supporting part 121 is combined with the insulating part 340 in a removable manner. For example, the upper surface of the support part 121 is bonded to the lower surface of the insulating part 340, thereby, the support part 121 and the insulating part 340 can be combined, and the combination method of the support part 121 and the insulating part 340 is not limited to the bonding method using an adhesive . The insulating film 130 forms the upper surface of the connector 300 in combination with the upper end of the first peripheral portion 112 . The lower surface of the insulating film 130 can be combined with the upper surface of the insulating part 340 by bonding.

絕緣部340可以由一個彈性體形成。絕緣部340由中心導電部111的第一彈性物質114形成。絕緣部340具有使導電部110沿著上下方向VD***的至少一個貫通孔341。貫通孔341沿著貫通孔341在絕緣部340穿孔而成，沿著上下方向VD，從絕緣部340的上部面延伸至絕緣部340的下部面。在導電部110被支撐部121支撐的狀態下，從下往上向貫通孔341***。在貫通孔341的水準方向的形狀可以與導電部110的橫截面形狀對應。若導電部110呈圓柱形狀，則在貫通孔341的水準方向的形狀可大致為圓形。 The insulating part 340 may be formed of an elastic body. The insulation part 340 is formed by the first elastic material 114 of the central conductive part 111 . The insulating part 340 has at least one through hole 341 through which the conductive part 110 is inserted along the vertical direction VD. The through hole 341 is formed by piercing the insulating portion 340 along the through hole 341 , and extends from the upper surface of the insulating portion 340 to the lower surface of the insulating portion 340 along the vertical direction VD. In a state where the conductive part 110 is supported by the supporting part 121 , it is inserted into the through hole 341 from bottom to top. The shape in the horizontal direction of the through hole 341 may correspond to the cross-sectional shape of the conductive part 110 . If the conductive portion 110 has a cylindrical shape, the shape in the horizontal direction of the through hole 341 may be substantially circular.

在由雙重結構形成的導電部110中，在中心配置第一彈性物質114，在第一彈性物質114的外側配置第二彈性物質115。在配置於導電部110的外側的絕緣部340配置第一彈性物質。第一彈性物質114包含氟及矽橡膠，第二彈性物質115包含氧化鐵、氮化硼及氮化鋁中的一種及矽橡膠。因此，中心導電部111包含上述耐寒性材料，第一周邊部112包含上述耐熱性材料，絕緣部340包含上述耐寒性材料。在上述第一溫度範圍內的加壓狀態下，包含耐熱性材料的第二彈性物質115具有比第一彈性物質114的膨脹率低的膨脹率或比不包含耐熱性材料的矽橡膠低的膨脹率。在上述第二溫度範圍內的加壓狀態下，包含耐寒性材料的第一彈性物質114具有比第二彈性物質115的膨脹率高的膨脹率及比不包含耐寒性材料的矽橡膠高的膨脹率。 In the conductive part 110 formed by the double structure, the first elastic material 114 is arranged at the center, and the second elastic material 115 is arranged outside the first elastic material 114 . The first elastic material is disposed on the insulating portion 340 disposed outside the conductive portion 110 . The first elastic material 114 includes fluorine and silicon rubber, and the second elastic material 115 includes iron oxide, one of boron nitride and aluminum nitride, and silicon rubber. Therefore, the central conductive portion 111 includes the above-mentioned cold-resistant material, the first peripheral portion 112 includes the above-mentioned heat-resistant material, and the insulating portion 340 includes the above-mentioned cold-resistant material. In a pressurized state within the above-mentioned first temperature range, the second elastic substance 115 containing a heat-resistant material has a lower expansion coefficient than that of the first elastic substance 114 or a lower expansion than silicone rubber not containing a heat-resistant material. Rate. In a pressurized state within the above-mentioned second temperature range, the first elastic substance 114 containing a cold-resistant material has a higher expansion rate than that of the second elastic material 115 and a higher expansion rate than silicone rubber not containing a cold-resistant material. Rate.

在上述實施例的連接器300中，構成中心導電部111的彈性物質具有耐寒性，構成第一周邊部112的彈性物質具有耐熱性，絕緣部340包括構成中心導電部111的彈性物質。因此，與常溫下的加壓狀態的膨脹程度相比，在上述第 一溫度範圍內的加壓狀態下或上述第二溫度範圍內的加壓狀態下，導電部110以並未發生太大改變的程度膨脹。並且，絕緣部340具有耐寒性或耐熱性，在比較高溫的加壓狀態下不會過度膨脹，在比較低溫的加壓狀態下不會過度收縮。因此，上述實施例的連接器在比較高溫的加壓狀態(例如，在上述第一溫度範圍內的加壓狀態)下，可以防止導電部110及絕緣部340的過度膨脹，在比較低溫的加壓狀態(例如，在上述第二溫度範圍的加壓狀態)下，可以防止導電部110及絕緣部340過度收縮。因此，當在比較低的溫度下進行檢查時，上述實施例的連接器100可以無需施加強力壓力，在比較高溫下進行檢查時可以防止連接器的變形。 In the connector 300 of the above embodiment, the elastic material constituting the central conductive portion 111 has cold resistance, the elastic material constituting the first peripheral portion 112 has heat resistance, and the insulating portion 340 includes the elastic material constituting the central conductive portion 111 . Therefore, compared with the degree of expansion in the pressurized state at normal temperature, in the above-mentioned In the pressurized state within the first temperature range or the pressurized state within the above-mentioned second temperature range, the conductive portion 110 expands to such a degree that it does not change much. In addition, the insulating portion 340 has cold resistance or heat resistance, does not expand excessively in a relatively high-temperature pressurized state, and does not excessively contract in a relatively low-temperature pressurized state. Therefore, the connector of the above-mentioned embodiment can prevent the excessive expansion of the conductive part 110 and the insulating part 340 under the relatively high temperature pressurized state (for example, the pressurized state within the first temperature range mentioned above), In a pressurized state (for example, in a pressurized state in the above-mentioned second temperature range), excessive shrinkage of the conductive part 110 and the insulating part 340 can be prevented. Therefore, when inspecting at a relatively low temperature, the connector 100 of the above embodiment does not need to apply strong pressure, and can prevent deformation of the connector when inspecting at a relatively high temperature.

作為代替例，中心導電部111可包含上述耐熱性材料，第一周邊部112可包含上述耐寒性材料，絕緣部340可包含上述耐熱性材料。即，第一彈性物質114包含氧化鐵、氮化硼及氮化鋁中的一種及矽橡膠，第二彈性物質115包含氟及矽橡膠。在上述情況下，在上述第一溫度範圍內的加壓狀態下，包含耐熱性材料的第一彈性物質114具有比第二彈性物質115的膨脹率低的膨脹率。在上述第二溫度範圍內的加壓狀態下，包含耐寒性材料的第二彈性物質115具有比第一彈性物質114的膨脹率高的膨脹率。 As an alternative, the central conductive portion 111 may include the aforementioned heat-resistant material, the first peripheral portion 112 may include the aforementioned cold-resistant material, and the insulating portion 340 may include the aforementioned heat-resistant material. That is, the first elastic material 114 includes one of iron oxide, boron nitride, and aluminum nitride, and silicon rubber, and the second elastic material 115 includes fluorine and silicon rubber. In the above case, the first elastic substance 114 including the heat-resistant material has an expansion coefficient lower than that of the second elastic substance 115 in a pressurized state within the above first temperature range. In a pressurized state within the above-mentioned second temperature range, the second elastic substance 115 including a cold-resistant material has a higher expansion ratio than that of the first elastic substance 114 .

作為另一代替例，在上述實施例的連接器300中，第一周邊部112可包含上述第二導電性物質，上述第二導電性物質以可沿著上下方向VD導電的方式接觸，藉由第二彈性物質115，沿著上下方向VD維持第一周邊部112的形狀。 As another alternative, in the connector 300 of the above-mentioned embodiment, the first peripheral portion 112 may include the second conductive substance, and the second conductive substance is in contact with the conductive material along the vertical direction VD, by The second elastic material 115 maintains the shape of the first peripheral portion 112 along the vertical direction VD.

準備構成絕緣部340的如膜或塊的絕緣部件，在上述絕緣部件，貫通孔34藉由雷射或鑽機形成，由此製造絕緣部340。之後，導電部110及支撐部121的導電模組120藉由使用黏結劑的接合方式與絕緣部340結合並構成上述實施例的連接器。 An insulating member such as a film or a block constituting the insulating portion 340 is prepared, and in the insulating member, the through-hole 34 is formed by a laser or a drill, thereby manufacturing the insulating portion 340 . Afterwards, the conductive part 110 and the conductive module 120 of the supporting part 121 are combined with the insulating part 340 by using an adhesive to form the connector of the above embodiment.

圖10為示出本發明第四實施例的連接器的一部分，圖11簡要示出圖10所示的在連接器的水平方向的剖面形狀。一同參照圖10及圖11來說明第四實 施例的連接器。 FIG. 10 is a part of a connector showing a fourth embodiment of the present invention, and FIG. 11 schematically shows a cross-sectional shape of the connector shown in FIG. 10 in the horizontal direction. Referring to Figure 10 and Figure 11 together to illustrate the fourth example Example connectors.

與上述第三實施例的連接器相比，本實施例的連接器400除絕緣部包含兩種類型的彈性物質之外，與上述第三實施例的連接器的結構類似。 Compared with the connector of the above-mentioned third embodiment, the connector 400 of this embodiment is similar in structure to the connector of the above-mentioned third embodiment except that the insulating part contains two types of elastic materials.

絕緣部340包括：貫通部442，用於限定貫通孔341；以及本體部443，作為在絕緣部340中除貫通部442之外的部分。貫通部442可呈沿著上下方向VD延伸的環形狀，在上述圓筒型的內周面限定貫通孔341。貫通部442沿著上下方向VD包圍導電部110的第一周邊部112。貫通部442包含與導電部110的第一周邊部112的彈性物質相同的第二彈性物質115。絕緣部340的本體部443包含與中心導電部111的彈性物質相同的第一彈性物質114。 The insulating part 340 includes: a penetrating part 442 for defining the through hole 341 ; and a body part 443 as a part in the insulating part 340 except for the penetrating part 442 . The penetrating portion 442 may have a ring shape extending in the vertical direction VD, and defines the penetrating hole 341 on the inner peripheral surface of the above-mentioned cylindrical shape. The through portion 442 surrounds the first peripheral portion 112 of the conductive portion 110 along the vertical direction VD. The penetrating portion 442 includes the same second elastic material 115 as the elastic material of the first peripheral portion 112 of the conductive portion 110 . The body portion 443 of the insulating portion 340 includes the same first elastic material 114 as the elastic material of the central conductive portion 111 .

在上述實施例的連接器400中，構成中心導電部111的彈性物質及構成第一周邊部112的彈性物質在上述第一溫度範圍及第二溫度範圍內的加壓狀態下分別具有不同的膨脹率。並且，絕緣部340的貫通部442包含構成第一周邊部112的彈性物質，絕緣部340的本體部443包含構成中心導電部111的彈性物質。中心導電部111包含上述耐寒性材料，第一周邊部112包含上述耐熱性材料。絕緣部340的貫通部442包含上述耐熱性材料，絕緣部340的本體部443包含上述耐寒性材料。 In the connector 400 of the above-mentioned embodiment, the elastic material constituting the central conductive portion 111 and the elastic material constituting the first peripheral portion 112 have different expansions under pressure in the first temperature range and the second temperature range. Rate. Furthermore, the penetrating portion 442 of the insulating portion 340 includes an elastic material constituting the first peripheral portion 112 , and the main body portion 443 of the insulating portion 340 includes an elastic material constituting the central conductive portion 111 . The central conductive portion 111 includes the above-mentioned cold-resistant material, and the first peripheral portion 112 includes the above-mentioned heat-resistant material. The penetration part 442 of the insulating part 340 is made of the above-mentioned heat-resistant material, and the main body part 443 of the insulating part 340 is made of the above-mentioned cold-resistant material.

因此，與常溫下的加壓狀態的膨脹程度相比，在上述第一溫度範圍內的加壓狀態下或上述第二溫度範圍內的加壓狀態下，具有中心導電部111及第一周邊部112的導電部110以並未發生太大改變的程度膨脹。並且，絕緣部340包含上述耐寒性材料及上述耐熱性材料，與在比較高溫的過度膨脹及比較低溫的過度收縮對應。因此，上述實施例的連接器在比較高溫的加壓狀態(例如，在上述第一溫度範圍內的加壓狀態)下可防止導電部110及絕緣部340的過度膨脹，在比較低溫的加壓狀態(例如，在上述第二溫度範圍內的加壓狀態)下可以防止導電部110及絕緣部340過度收縮。 Therefore, compared with the expansion degree of the pressurized state at normal temperature, in the pressurized state in the above-mentioned first temperature range or in the pressurized state in the above-mentioned second temperature range, the central conductive part 111 and the first peripheral part The conductive portion 110 of 112 expands to such an extent that it does not change much. In addition, the insulating portion 340 includes the above-mentioned cold-resistant material and the above-mentioned heat-resistant material, and responds to excessive expansion at a relatively high temperature and excessive contraction at a relatively low temperature. Therefore, the connector of the above-mentioned embodiment can prevent the excessive expansion of the conductive part 110 and the insulating part 340 under a relatively high-temperature pressurized state (for example, a pressurized state within the first temperature range mentioned above), state (for example, a pressurized state within the above-mentioned second temperature range) can prevent the conductive part 110 and the insulating part 340 from shrinking excessively.

作為代替例，中心導電部111可包含上述耐熱性材料，第一周邊部 112可包括第一周邊部112，絕緣部340的貫通部442可包含上述耐寒性材料，絕緣部340的本體部443可包含上述耐熱性材料。 As an alternative, the central conductive portion 111 may include the above-mentioned heat-resistant material, and the first peripheral portion 112 may include the first peripheral portion 112, the penetration portion 442 of the insulating portion 340 may include the above-mentioned cold-resistant material, and the body portion 443 of the insulating portion 340 may include the above-mentioned heat-resistant material.

作為另一代替例，在上述實施例的連接器400中，第一周邊部112也可包含上述第二導電性物質及第二彈性物質。 As another alternative, in the connector 400 of the above embodiment, the first peripheral portion 112 may also include the above-mentioned second conductive material and second elastic material.

圖12為示出本發明的第五實施例的連接器的一部分的剖視圖，圖13簡要示出圖12所示的在連接器的水平方向的剖面形狀。一同參照圖12及圖13來說明第五實施例的連接器。 12 is a sectional view showing a part of a connector according to a fifth embodiment of the present invention, and FIG. 13 schematically shows a sectional shape of the connector shown in FIG. 12 in the horizontal direction. The connector of the fifth embodiment will be described with reference to FIG. 12 and FIG. 13 together.

與上述第三實施例的連接器相比，本實施例的連接器500除在導電部與絕緣部之間形成間隙之外，與上述第三實施例的連接器的結構類似。 Compared with the connector of the above-mentioned third embodiment, the connector 500 of this embodiment is similar in structure to the connector of the above-mentioned third embodiment except that a gap is formed between the conductive part and the insulating part.

在連接器500中，導電部110具有與上述第三實施例或第五實施例的導電部相同的結構。作為代替性例，導電部110的第一周邊部112也可包含第二彈性物質115及上述第二導電性物質。絕緣部340具有與上述第三實施例的絕緣部相同的結構。即，絕緣部340包含與中心導電部111的第一彈性物質相同的第一彈性物質114。 In the connector 500 , the conductive portion 110 has the same structure as that of the third embodiment or the fifth embodiment described above. As an alternative, the first peripheral portion 112 of the conductive portion 110 may also include the second elastic material 115 and the above-mentioned second conductive material. The insulating portion 340 has the same structure as that of the third embodiment described above. That is, the insulating part 340 includes the same first elastic material 114 as the first elastic material of the central conductive part 111 .

在連接器500中，在貫通孔341的水平方向的大小尺寸大於在導電部110的水平方向的大小尺寸。由此，貫通孔341的內周面與導電部110的外周面(詳細地，第一周邊部112的外周面)之間形成藉由貫通孔341的內周面的一部分或整體及導電部110的外周面的一部分或整體形成的間隙550。間隙550被空氣填充。間隙550為貫通孔341的內周面與第一周邊部112的外周面之間的空心空間。在導電部的非加壓狀態下，在間隙550的水平方向的形狀可以為甜甜圈形狀(例如，內側圓及外側面以同心形成的形狀)。 In the connector 500 , the dimension in the horizontal direction of the through hole 341 is larger than the dimension in the horizontal direction of the conductive portion 110 . Thus, a portion or the whole of the inner peripheral surface of the through hole 341 and the conductive portion 110 are formed between the inner peripheral surface of the through hole 341 and the outer peripheral surface of the conductive portion 110 (specifically, the outer peripheral surface of the first peripheral portion 112 ). A part or the whole of the outer peripheral surface forms the gap 550. The gap 550 is filled with air. The gap 550 is a hollow space between the inner peripheral surface of the through hole 341 and the outer peripheral surface of the first peripheral portion 112 . In the non-pressurized state of the conductive part, the shape in the horizontal direction of the gap 550 may be a donut shape (for example, a shape in which an inner circle and an outer surface are concentrically formed).

在導電部110的非加壓狀態下，位於一個貫通孔341的一個導電部110的在間隙550所在的其外周面的一部分不與貫通孔341接觸。在間隙550具有上述甜甜圈形狀的情況下，導電部110在整個間隙550中並不與貫通孔341相接觸。在導電部的非加壓狀態下，一個導電部110藉由在一個貫通孔341和與此對 應的導電部110之間形成的間隙550與絕緣部340分離。在導電部的加壓狀態下，間隙550允許在各個貫通孔341內的各個導電部110的彈性變形。間隙550允許各個導電部110在不受到絕緣部340的貫通孔341的限制的情況下沿著上下方向及水平方向彈性變形。即，在加壓狀態下，導電部110在除固定於支撐部121及絕緣膜130的部分之外的部分，在貫通孔341內自由地彈性變形。導電部110、貫通孔341及間隙550的尺寸可以為了導電部110的順暢的彈性變形而確定。 In the non-pressurized state of the conductive portion 110 , a part of the outer peripheral surface of the one conductive portion 110 located in the one through hole 341 where the gap 550 is located does not come into contact with the through hole 341 . In the case where the gap 550 has the above-mentioned donut shape, the conductive portion 110 is not in contact with the through hole 341 throughout the gap 550 . In the non-pressurized state of the conductive part, a conductive part 110 is The gap 550 formed between the corresponding conductive parts 110 is separated from the insulating part 340 . The gap 550 allows elastic deformation of each conductive portion 110 within each through hole 341 in a pressurized state of the conductive portion. The gap 550 allows each conductive part 110 to elastically deform in the vertical direction and the horizontal direction without being restricted by the through hole 341 of the insulating part 340 . That is, in the pressurized state, the conductive portion 110 is freely elastically deformable in the through hole 341 except for the portion fixed to the supporting portion 121 and the insulating film 130 . The dimensions of the conductive part 110 , the through hole 341 and the gap 550 may be determined for smooth elastic deformation of the conductive part 110 .

圖14為示出本發明第六實施例的連接器的一部分的剖視圖，圖15簡要示出圖14所示的在連接器的水平方向的剖面形狀。一同參照圖14及圖15來說明第六實施例的連接器。 14 is a sectional view showing a part of a connector according to a sixth embodiment of the present invention, and FIG. 15 schematically shows a sectional shape of the connector shown in FIG. 14 in the horizontal direction. The connector of the sixth embodiment will be described with reference to FIG. 14 and FIG. 15 together.

與上述第五實施例的連接器相比，本實施例的連接器600除導電部採取單一結構且絕緣部包括與導電部的彈性物質不同的彈性物質之外，與上述第五實施例的連接器的結構類似。 Compared with the connector of the above-mentioned fifth embodiment, the connector 600 of this embodiment is connected with the above-mentioned fifth embodiment except that the conductive part adopts a single structure and the insulating part includes an elastic material different from that of the conductive part. The structure of the device is similar.

連接器600包括沿著上下方向VD傳輸訊號的至少一個導電部610。導電部610可呈沿著上下方向VD延伸的圓柱形狀，但是，導電部的形狀並不局限於圓柱形狀。導電部610包含上述多個第一導電性物質113及上述第一彈性物質114。多個第一導電性物質113以可沿著上下方向VD導電的方式接觸，第一彈性物質114以使多個第一導電性物質113形成導電部610的形狀的方式使多個第一導電性物質113維持上下方向VD。在導電部610中，第一彈性物質114與多個第一導電性物質113相混合。 The connector 600 includes at least one conductive portion 610 transmitting signals along the vertical direction VD. The conductive part 610 may have a cylindrical shape extending along the vertical direction VD, however, the shape of the conductive part is not limited to the cylindrical shape. The conductive part 610 includes the plurality of first conductive materials 113 and the first elastic material 114 . The plurality of first conductive substances 113 are in contact with each other so as to be conductive along the vertical direction VD, and the first elastic substance 114 makes the plurality of first conductive substances 113 form the shape of the conductive part 610. The substance 113 maintains the vertical direction VD. In the conductive part 610 , the first elastic substance 114 is mixed with a plurality of first conductive substances 113 .

支撐部121起到沿著上下方向VD支撐一個導電部610或多個導電部610的功能。支撐部121可沿著水平方向HD配置，與導電部610的下端部結合成一體。支撐部121使多個導電部610沿著水平方向HD隔開及絕緣。至少一個導電部610與支撐部121或多個導電部610與支撐部121形成為一體並構成執行上下方向訊號傳輸的一個導電模組120。絕緣膜130可以與導電部610的上端部相結合來形成連接器600的上部面。絕緣膜130可以使多個導電部610絕緣，可以沿著上下 方向VD支撐多個導電部610。 The supporting part 121 functions to support one conductive part 610 or a plurality of conductive parts 610 along the vertical direction VD. The supporting part 121 may be arranged along the horizontal direction HD and integrated with the lower end of the conductive part 610 . The supporting part 121 separates and insulates the plurality of conductive parts 610 along the horizontal direction HD. At least one conductive part 610 and the support part 121 or a plurality of conductive parts 610 and the support part 121 are integrally formed to form a conductive module 120 for performing vertical signal transmission. The insulating film 130 may be combined with the upper end of the conductive part 610 to form the upper face of the connector 600 . The insulating film 130 can insulate a plurality of conductive parts 610, and can The direction VD supports the plurality of conductive parts 610 .

絕緣部640使多個導電部610沿著水平方向隔開及絕緣。絕緣部640位於支撐部121及絕緣膜130之間。支撐部121以可去除的方式與絕緣部640相結合。例如，支撐部121的上部面與絕緣部640的下部面黏結，由此支撐部121與絕緣部640可以相結合。絕緣膜130的下部面可藉由黏結方式與絕緣部640的上部面相結合。 The insulating part 640 separates and insulates the plurality of conductive parts 610 along the horizontal direction. The insulating part 640 is located between the supporting part 121 and the insulating film 130 . The supporting part 121 is combined with the insulating part 640 in a removable manner. For example, the upper surface of the supporting part 121 is bonded to the lower surface of the insulating part 640 , so that the supporting part 121 and the insulating part 640 can be combined. The lower surface of the insulating film 130 can be combined with the upper surface of the insulating part 640 by bonding.

絕緣部640可以由一個彈性體形成。絕緣部340由上述第二彈性物質115形成。絕緣部640具有使導電部610沿著上下方向VD***的至少一個貫通孔341。貫通孔341沿著上下方向VD在絕緣部640穿孔而成，沿著上下方向VD，從絕緣部640的上部面延伸至絕緣部640的下部面。在導電部610被支撐部121支撐的狀態下，從下往上向貫通孔341***。在貫通孔341的水平方向的形狀可以與導電部610的橫截面形狀對應。 The insulating part 640 may be formed of an elastic body. The insulating part 340 is formed of the above-mentioned second elastic material 115 . The insulating part 640 has at least one through hole 341 through which the conductive part 610 is inserted along the vertical direction VD. The through hole 341 is formed through the insulating portion 640 along the vertical direction VD, and extends from the upper surface of the insulating portion 640 to the lower surface of the insulating portion 640 along the vertical direction VD. In a state where the conductive portion 610 is supported by the supporting portion 121 , it is inserted into the through hole 341 from bottom to top. The shape in the horizontal direction of the through hole 341 may correspond to the cross-sectional shape of the conductive part 610 .

在導電部610配置第一彈性物質114，在絕緣部640配置第二彈性物質115。第一彈性物質114可包含氟及矽橡膠並具有耐寒性。第二彈性物質可包含氧化鐵、氮化硼及氮化鋁中的一種及矽橡膠並具有耐熱性。在上述第一溫度範圍內的加壓狀態下，包含耐熱性材料的第二彈性物質115具有比第一彈性物質114的膨脹率低的膨脹率或比不包含耐熱性材料的矽橡膠低的膨脹率。在上述第二溫度範圍加壓狀態下，包含耐寒性材料的第一彈性物質114具有比第二彈性物質115的膨脹率低的膨脹率或比不包含耐寒性材料的矽橡膠高的膨脹率。 The first elastic material 114 is disposed on the conductive portion 610 , and the second elastic material 115 is disposed on the insulating portion 640 . The first elastic substance 114 may contain fluorine and silicon rubber and has cold resistance. The second elastic material can include iron oxide, one of boron nitride and aluminum nitride, and silicon rubber, and has heat resistance. In a pressurized state within the above-mentioned first temperature range, the second elastic substance 115 containing a heat-resistant material has a lower expansion coefficient than that of the first elastic substance 114 or a lower expansion than silicone rubber not containing a heat-resistant material. Rate. In the pressurized state in the second temperature range, the first elastic substance 114 containing the cold-resistant material has a lower expansion rate than that of the second elastic material 115 or a higher expansion rate than the silicone rubber not containing the cold-resistant material.

作為代替例，導電部610可包含上述耐熱性材料，絕緣部640可包含上述耐寒性材料。即，導電部610的第一彈性物質114可包含氧化鐵、氮化硼及氮化鋁中的一種及矽橡膠，絕緣部640的第二彈性物質115可包含氟及矽橡膠。在此情況下，在上述第一溫度範圍內的加壓狀態下，包含耐熱性材料的第一彈性物質114具有比第二彈性物質115的膨脹率低的膨脹率或具有比並不包含耐熱性材料的矽橡膠低的膨脹率。並且，在上述第二溫度範圍內的加壓狀態下，包 含耐寒性材料的第二彈性物質115具有比第一彈性物質114的膨脹率高的膨脹率或比並不包含耐寒性材料的矽橡膠高的膨脹率。 As an alternative, the conductive part 610 may include the above-mentioned heat-resistant material, and the insulating part 640 may include the above-mentioned cold-resistant material. That is, the first elastic material 114 of the conductive portion 610 may include one of iron oxide, boron nitride, and aluminum nitride, and silicon rubber, and the second elastic material 115 of the insulating portion 640 may include fluorine and silicon rubber. In this case, in a pressurized state within the above-mentioned first temperature range, the first elastic substance 114 including a heat-resistant material has an expansion coefficient lower than that of the second elastic substance 115 or has a lower expansion coefficient than the second elastic substance 115 that does not contain heat resistance. Material silicone rubber with low expansion rate. And, in the pressurized state within the above-mentioned second temperature range, the package The second elastic material 115 containing the cold-resistant material has a higher expansion rate than that of the first elastic material 114 or a higher expansion rate than the silicone rubber that does not contain the cold-resistant material.

在上述實施例的連接器600中，構成導電部610的彈性物質包含上述耐寒性材料，構成絕緣部640的彈性物質包含上述耐熱性材料。或者，構成導電部610的彈性物質包含上述耐熱性材料，構成絕緣部640的彈性物質包含上述耐寒性材料。 In the connector 600 of the above embodiment, the elastic material constituting the conductive portion 610 includes the above-mentioned cold-resistant material, and the elastic material constituting the insulating portion 640 includes the above-mentioned heat-resistant material. Alternatively, the elastic material constituting the conductive portion 610 includes the aforementioned heat-resistant material, and the elastic material constituting the insulating portion 640 includes the aforementioned cold-resistant material.

因此，在比較高溫的加壓狀態(例如，在上述第一溫度範圍內的加壓狀態)下，可以防止導電部610及絕緣部640過度膨脹，在比較低溫的加壓狀態(例如，在上述第二溫度範圍內的加壓狀態)下，可以防止導電部610及絕緣部640過度收縮。因此，當在比較低的溫度下進行檢查時，上述實施例的連接器100可以無需施加強力的壓力，當在比較高溫下進行檢查時，可以防止變形。 Therefore, in a pressurized state at a relatively high temperature (for example, in the pressurized state within the above-mentioned first temperature range), excessive expansion of the conductive part 610 and the insulating part 640 can be prevented, and in a pressurized state at a relatively low temperature (for example, in the above-mentioned first temperature range). In the pressurized state in the second temperature range), excessive shrinkage of the conductive part 610 and the insulating part 640 can be prevented. Therefore, the connector 100 of the above embodiment does not need to apply strong pressure when inspecting at a relatively low temperature, and can prevent deformation when inspecting at a relatively high temperature.

作為另一個代替例，導電部610及絕緣部640均可包含上述耐寒性材料，導電部610及絕緣部640均可包含上述耐熱性材料。在這種情況下，連接器600可具有耐寒性及耐熱性中的一個。 As another alternative, both the conductive part 610 and the insulating part 640 may include the above-mentioned cold-resistant material, and both the conductive part 610 and the insulating part 640 may include the above-mentioned heat-resistant material. In this case, the connector 600 may have one of cold resistance and heat resistance.

在連接器600中，能夠以使在貫通孔341的水平方向的大小尺寸大於在導電部110的水平方向的大小尺寸的方式形成絕緣部640的貫通孔341。在此情況下，如圖14及圖15所示，在貫通孔341的內周面與導電部610的外周面之間形成藉由貫通孔341的內周面的一部分或整體及導電部610的外周面的一部分或整體形成的間隙550。間隙550為貫通孔341的內周面與導電部610的外周面之間的空心空間。在導電部610的非加壓狀態下，一個導電部610藉由在一個貫通孔341和與此對應的導電部610之間形成的間隙550與絕緣部640分離。在導電部610的加壓狀態下，間隙550允許電部610在不受到絕緣部640的貫通孔341的限制的情況下沿著上下方向及水平方向彈性變形。由此，除基於上述耐寒性材料的耐寒性的提高之外，導電部610在低的壓力下可以呈現出充分的導電性。 In the connector 600 , the through hole 341 of the insulating portion 640 can be formed such that the size of the through hole 341 in the horizontal direction is larger than the size of the conductive portion 110 in the horizontal direction. In this case, as shown in FIG. 14 and FIG. 15 , between the inner peripheral surface of the through hole 341 and the outer peripheral surface of the conductive portion 610 , a part or the whole of the inner peripheral surface of the through hole 341 and the conductive portion 610 are formed. The gap 550 is formed by a part or the whole of the outer peripheral surface. The gap 550 is a hollow space between the inner peripheral surface of the through hole 341 and the outer peripheral surface of the conductive portion 610 . In the non-pressurized state of the conductive portion 610 , one conductive portion 610 is separated from the insulating portion 640 by a gap 550 formed between a through hole 341 and the corresponding conductive portion 610 . In the pressurized state of the conductive part 610 , the gap 550 allows the electrical part 610 to elastically deform in the vertical direction and the horizontal direction without being restricted by the through hole 341 of the insulating part 640 . Thereby, in addition to the improvement of the cold resistance by the above-mentioned cold resistant material, the conductive part 610 can exhibit sufficient electrical conductivity under a low pressure.

以上，雖然藉助一部分實施例和圖式所示的例說明了本發明的技術 思想，但應當理解的是，本發明所屬技術領域中具有通常知識者可在不脫離本發明的技術思想及範疇內進行多種修改、變形及變更。並且，這種修改、變形及變更均屬於所附的發明要求保護範圍內。 Above, although the technology of the present invention has been described with the help of some embodiments and the examples shown in the drawings, Thoughts, but it should be understood that those skilled in the technical field of the present invention can make various modifications, changes and changes without departing from the technical thought and scope of the present invention. Moreover, such modifications, deformations and alterations all fall within the protection scope of the appended invention claims.

100:連接器100: Connector

110:導電部110: conductive part

111:中心導電部111: Central conductive part

112:第一周邊部112: The first peripheral part

113:第一導電性物質113: The first conductive substance

114:第一彈性物質114: The first elastic substance

115:第二彈性物質115: second elastic substance

120:導電模組120: Conductive module

121:支撐部121: support part

130:絕緣膜130: insulating film

150:間隙150: Gap

VD:上下方向VD: up and down direction

HD:水平方向HD: horizontal direction

Claims (21)

一種用於電連接的連接器，包括至少一個導電部，所述導電部包括：中心導電部，包含第一彈性物質，能夠沿著上下方向導電；以及第一周邊部，包含第二彈性物質，沿著所述上下方向包圍所述中心導電部，在所述導電部的所述上下方向上的加壓狀態下，所述第一彈性物質與所述第二彈性物質具有不同的膨脹率；所述第一彈性物質及所述第二彈性物質中的一個的耐熱性高於所述第一彈性物質及所述第二彈性物質中的另一個的耐熱性，所述第一彈性物質及所述第二彈性物質中的另一個的耐寒性高於所述第一彈性物質及所述第二彈性物質中的一個的耐寒性。 A connector for electrical connection, comprising at least one conductive part, the conductive part includes: a central conductive part, containing a first elastic substance, capable of conducting electricity in an up-down direction; and a first peripheral part, containing a second elastic substance, Surrounding the central conductive portion along the up-down direction, the first elastic material and the second elastic material have different expansion rates in the pressurized state of the conductive portion in the up-down direction; One of the first elastic material and the second elastic material has higher heat resistance than the other of the first elastic material and the second elastic material, and the first elastic material and the The cold resistance of the other one of the second elastic materials is higher than that of one of the first elastic material and the second elastic material. 如請求項1所述之連接器，其中，在第一溫度範圍內的所述加壓狀態下，所述第一彈性物質及所述第二彈性物質中的一個的膨脹率小於另一個的膨脹率，在比所述第一溫度範圍低的第二溫度範圍內的所述加壓狀態下，所述第一彈性物質及所述第二彈性物質中的一個的膨脹率大於另一個的膨脹率。 The connector according to claim 1, wherein, in the pressurized state within the first temperature range, one of the first elastic substance and the second elastic substance has a smaller expansion rate than the other In the pressurized state in the second temperature range lower than the first temperature range, the expansion rate of one of the first elastic material and the second elastic material is greater than the expansion rate of the other . 如請求項2所述之連接器，其中，在所述第一溫度範圍內的所述加壓狀態或所述第二溫度範圍內的所述加壓狀態下，所述中心導電部及所述第一周邊部以不同程度膨脹。 The connector according to claim 2, wherein in the pressurized state within the first temperature range or the pressurized state within the second temperature range, the central conductive portion and The first peripheral portion expands to different degrees. 如請求項1所述之連接器，其中，所述第一彈性物質及所述第二彈性物質中的一個包含氧化鐵、氮化硼及氮化鋁中的一種及矽橡膠，所述第一彈性物質及所述第二彈性物質中的另一個包含氟及矽橡膠。 The connector according to claim 1, wherein one of the first elastic material and the second elastic material includes iron oxide, one of boron nitride and aluminum nitride, and silicon rubber, and the first The other of the elastic material and the second elastic material includes fluorine and silicon rubber. 如請求項1所述之連接器，其中，所述中心導電部還包含以能夠沿著所述上下方向導電的方式接觸並藉由所述第一彈性物質維持所述上下 方向的多個第一導電性物質，所述第一周邊部還包含以能夠沿著所述上下方向導電的方式接觸並藉由所述第二彈性物質維持所述上下方向的多個第二導電性物質。 The connector according to claim 1, wherein the central conductive part further includes contacting in a manner capable of conducting electricity along the up-down direction and maintaining the up-down direction through the first elastic material. direction, the first peripheral portion also includes a plurality of second conductive materials that are in contact with the vertical direction and maintained by the second elastic material in the vertical direction. sexual substance. 如請求項1所述之連接器，其中，所述導電部還包括第二周邊部，所述第二周邊部沿著所述上下方向包圍所述第一周邊部，包含所述第一彈性物質。 The connector according to claim 1, wherein the conductive part further includes a second peripheral part, the second peripheral part surrounds the first peripheral part along the up-down direction, and contains the first elastic material . 如請求項6所述之連接器，其中，所述第二周邊部還包含以能夠沿著所述上下方向導電的方式接觸並藉由所述第一彈性物質維持所述上下方向的多個第三導電性物質。 The connector as claimed in claim 6, wherein the second peripheral portion further includes a plurality of first contact points that can conduct electricity along the vertical direction and maintain the vertical direction through the first elastic material. Three conductive substances. 如請求項1所述之連接器，其還包括：支撐部，與所述中心導電部的下端部相結合，沿著所述上下方向支撐所述導電部；以及絕緣膜，與所述第一周邊部的上端部相結合。 The connector according to claim 1, further comprising: a supporting part combined with the lower end of the central conductive part to support the conductive part along the up-down direction; and an insulating film connected to the first The upper end portions of the peripheral portions are combined. 如請求項1所述之連接器，其中，包括多個所述導電部，多個所述導電部藉由作為空心空間的間隙來沿著與所述上下方向正交的水平方向隔開。 The connector according to claim 1, further comprising a plurality of the conductive parts separated along a horizontal direction perpendicular to the vertical direction by gaps serving as hollow spaces. 一種用於電連接的連接器，包括至少一個導電部，所述導電部包括：中心導電部，包含第一彈性物質，能夠沿著上下方向導電；以及第一周邊部，包含第二彈性物質，沿著所述上下方向包圍所述中心導電部，所述連接器還包括絕緣部，所述絕緣部具有能夠使所述導電部沿著所述上下方向***的至少一個貫通孔，包含所述第一彈性物質，在所述導電部的所述上下方向上的加壓狀態下，所述第一彈性物質與所述第二彈性物質具有不同的膨脹率；所述第一彈性物質及所述第二彈性物質中的一個的耐熱性高於所述第一彈 性物質及所述第二彈性物質中的另一個的耐熱性，所述第一彈性物質及所述第二彈性物質中的另一個的耐寒性高於所述第一彈性物質及所述第二彈性物質中的一個的耐寒性。 A connector for electrical connection, comprising at least one conductive part, the conductive part includes: a central conductive part, containing a first elastic substance, capable of conducting electricity in an up-down direction; and a first peripheral part, containing a second elastic substance, Enclosing the central conductive portion along the up-down direction, the connector further includes an insulating portion having at least one through hole capable of inserting the conductive portion along the up-down direction, including the first an elastic substance, the first elastic substance and the second elastic substance have different expansion ratios in a pressurized state of the conductive part in the up-down direction; the first elastic substance and the second elastic substance One of the two elastic materials has a higher heat resistance than the first elastic The heat resistance of the other of the elastic material and the second elastic material, and the cold resistance of the other of the first elastic material and the second elastic material is higher than that of the first elastic material and the second elastic material. Cold resistance of one of the elastic materials. 如請求項10所述之連接器，其中，在第一溫度範圍內的所述加壓狀態下，所述第一彈性物質及所述第二彈性物質中的一個的膨脹率小於另一個的膨脹率，在比所述第一溫度範圍低的第二溫度範圍內的所述加壓狀態下，所述第一彈性物質及所述第二彈性物質中的一個的膨脹率大於另一個的膨脹率。 The connector according to claim 10, wherein, in the pressurized state within the first temperature range, one of the first elastic material and the second elastic material has a smaller expansion rate than the other In the pressurized state in the second temperature range lower than the first temperature range, the expansion rate of one of the first elastic material and the second elastic material is greater than the expansion rate of the other . 如請求項11所述之連接器，其中，在所述第一溫度範圍內的所述加壓狀態或所述第二溫度範圍內的所述加壓狀態下，所述中心導電部及所述第一周邊部以不同程度膨脹。 The connector according to claim 11, wherein in the pressurized state within the first temperature range or the pressurized state within the second temperature range, the central conductive portion and the The first peripheral portion expands to different degrees. 如請求項10所述之連接器，其中，所述第一彈性物質及所述第二彈性物質中的一個包含氧化鐵、氮化硼及氮化鋁中的一種及矽橡膠，所述第一彈性物質及所述第二彈性物質中的另一個包含氟及矽橡膠。 The connector according to claim 10, wherein one of the first elastic material and the second elastic material includes iron oxide, one of boron nitride and aluminum nitride, and silicon rubber, and the first The other of the elastic material and the second elastic material includes fluorine and silicon rubber. 如請求項10所述之連接器，其中，所述中心導電部還包括以能夠沿著所述上下方向導電的方式接觸並藉由所述第一彈性物質維持所述上下方向的多個第一導電性物質，所述第一周邊部還包括以能夠沿著所述上下方向導電的方式接觸並藉由所述第二彈性物質維持所述上下方向的多個第二導電性物質。 The connector according to claim 10, wherein, the central conductive portion further includes a plurality of first first contacts that can conduct electricity along the vertical direction and maintain the vertical direction through the first elastic material. The conductive substance, the first peripheral portion further includes a plurality of second conductive substances that are in contact with the vertical direction and maintain the vertical direction through the second elastic substance. 如請求項10所述之連接器，其中，所述絕緣部還包括貫通部，所述貫通部沿著所述上下方向包圍所述第一周邊部，在內周面限定所述貫通孔，包含所述第二彈性物質。 The connector according to claim 10, wherein the insulating part further includes a through part, the through part surrounds the first peripheral part along the up-down direction, and the inner peripheral surface defines the through hole, including the second elastic substance. 如請求項10所述之連接器，其中，在所述貫通孔的內周面與所述第一周邊部的外周面之間形成藉由所述內周面的至少一部分與所述外周面的至少一部分形成的作為空心空間的間隙。 The connector according to claim 10, wherein a gap between at least a part of the inner peripheral surface and the outer peripheral surface is formed between the inner peripheral surface of the through hole and the outer peripheral surface of the first peripheral portion. At least a portion of the gap formed as a hollow space. 如請求項10所述之連接器，其還包括：支撐部，與所述中心導電部的下端部相結合，沿著所述上下方向支撐所述中心導電部；以及絕緣膜，與所述第一周邊部的上端部相結合。 The connector according to claim 10, further comprising: a support part combined with the lower end of the central conductive part to support the central conductive part along the up-down direction; and an insulating film connected to the second conductive part The upper ends of one peripheral portion are combined. 一種用於電連接的連接器，包括至少一個導電部，所述導電部包含：多個第一導電性物質，以能夠沿著上下方向導電的方式接觸；以及第一彈性物質，沿著所述上下方向維持所述第一導電性物質，所述連接器還包括絕緣部，所述絕緣部具有能夠使所述導電部沿著所述上下方向***的至少一個貫通孔，包含第二彈性物質，在所述導電部的所述上下方向上的加壓狀態下，所述第一彈性物質與所述第二彈性物質具有不同的膨脹率；所述第一彈性物質及所述第二彈性物質中的一個的耐熱性高於所述第一彈性物質及所述第二彈性物質中的另一個的耐熱性，所述第一彈性物質及所述第二彈性物質中的另一個的耐寒性高於所述第一彈性物質及所述第二彈性物質中的一個的耐寒性。 A connector for electrical connection, comprising at least one conductive part, the conductive part contains: a plurality of first conductive substances contacted in a manner capable of conducting electricity in an up-down direction; and a first elastic substance along the maintaining the first conductive substance in the up-down direction, the connector further includes an insulating part, the insulating part has at least one through hole capable of inserting the conductive part along the up-down direction, and contains a second elastic material, In the pressurized state in the vertical direction of the conductive part, the first elastic material and the second elastic material have different expansion ratios; The heat resistance of one of the first elastic material and the second elastic material is higher than the heat resistance of the other one of the first elastic material and the second elastic material, and the cold resistance of the other one of the first elastic material and the second elastic material is higher than that of the first elastic material. Cold resistance of one of the first elastic material and the second elastic material. 如請求項18所述之連接器，其中，在第一溫度範圍內的所述加壓狀態下，所述第一彈性物質及所述第二彈性物質中的一個的膨脹率小於另一個的膨脹率，在比所述第一溫度範圍低的第二溫度範圍內的所述加壓狀態下，所述第一彈性物質及所述第二彈性物質中的一個的膨脹率大於另一個的膨脹率。 The connector according to claim 18, wherein, in the pressurized state within the first temperature range, one of the first elastic material and the second elastic material has a smaller expansion rate than the other In the pressurized state in the second temperature range lower than the first temperature range, the expansion rate of one of the first elastic material and the second elastic material is greater than the expansion rate of the other . 如請求項18所述之連接器，其中，所述第一彈性物質及所述第二彈性物質中的一個包含氧化鐵、氮化硼及氮化鋁中的一種及矽橡膠，所述第一彈性物質及所述第二彈性物質中的另一個包含氟及矽橡膠。 The connector according to claim 18, wherein one of the first elastic material and the second elastic material includes iron oxide, one of boron nitride and aluminum nitride, and silicon rubber, and the first The other of the elastic material and the second elastic material includes fluorine and silicon rubber. 如請求項18所述之連接器，其中，在所述導電部的外周面與 所述貫通孔的內周面之間形成藉由所述外周面的至少一部分與所述內周面的至少一部分形成的作為空心空間的間隙。 The connector according to claim 18, wherein the outer peripheral surface of the conductive part and the A gap as a hollow space formed by at least a part of the outer peripheral surface and at least a part of the inner peripheral surface is formed between the inner peripheral surfaces of the through holes.
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