TWI770993B

TWI770993B - Testing device

Info

Publication number: TWI770993B
Application number: TW110116611A
Authority: TW
Inventors: 王慶中; 饒瑞修
Original assignee: 南亞科技股份有限公司
Priority date: 2021-05-07
Filing date: 2021-05-07
Publication date: 2022-07-11
Also published as: CN115308500A; TW202244503A

Abstract

A testing device includes a probe platform, at least one arc-shaped rail and at least one probe module. The probe platform is formed with a placement area that is used to place a DUT. The arc-shaped rail is fixed on the probe platform, and the outer shape of the arc-shaped rail has an arc, and the placement area is located within a range of the imaginary circle of curvature of this arc. The probe module includes a probe holder, a fixing part and a probe needle. The probe holder is slidably connected to the arc-shaped rail, the probe needle is arranged on the probe holder for touching the DUT, and the fixing part is used to removably fix the probe holder on the arc-shaped rail.

Description

測試裝置test device

本發明有關於一種測試裝置，尤指一種具有可滑動探針之測試裝置。The present invention relates to a test device, especially a test device with a slidable probe.

一般而言，完成後之電子元件(例如電路板等)會進行電性檢測，以確保出貨品質。在電性檢測時，將藉由測試裝置之探針電性導接每個電子元件之導電接點，以便篩選出不良品。目前之探針座需要固定在載台上，使得探針座上之探針只能依據現有尺寸規格對電子元件上特定位置之電氣接點進行導接。Generally speaking, after the completion of electronic components (such as circuit boards, etc.), electrical testing will be carried out to ensure the quality of shipments. During electrical testing, the probes of the testing device will be electrically connected to the conductive contacts of each electronic component in order to screen out defective products. The current probe holder needs to be fixed on the carrier, so that the probes on the probe holder can only conduct electrical contacts at specific positions on the electronic components according to the existing size specifications.

然而，當改對不同規格之電子元件進行電性檢測時，檢測人員必須先拆下探針座，並透過長時間的調整對位以及間距確認，才能鎖固探針座，以確保探針得以正確接觸電子元件之電氣接點。如此，相當費力與費時，不僅降低了工作效率，也降低了電子元件之檢測速度。However, when changing the electrical inspection of electronic components of different specifications, the inspector must first remove the probe seat, and then lock the probe seat through long-term adjustment of alignment and spacing confirmation to ensure that the probe can be Make proper contact with electrical contacts of electronic components. In this way, it is laborious and time-consuming, which not only reduces the work efficiency, but also reduces the detection speed of the electronic components.

由此可見，上述作法仍存在不便與缺陷，而有待加以進一步改良。因此，如何能有效地解決上述不便與缺陷，實屬當前重要研發課題之一，亦成爲當前相關領域亟需改進的目標。It can be seen that the above-mentioned method still has inconvenience and defects, and needs to be further improved. Therefore, how to effectively solve the above-mentioned inconveniences and defects is one of the important research and development issues at present, and it has also become an urgent need for improvement in the current related fields.

為此，本發明提出一種測試裝置，用以解決以上先前技術所提到的困難。To this end, the present invention proposes a testing device to solve the above-mentioned difficulties in the prior art.

本發明之一實施例為提供一種測試裝置。測試裝置包括一工作載台、至少一弧形軌道及至少一探針模組。工作載台具有一配置區。配置區用以放置一待測物。弧形軌道固設於工作載台上。弧形軌道之外型之至少一段具有一弧度。配置區位於弧度之假想曲率圓的範圍內。探針模組包含一探針座、一固定部與一探針。探針座可滑移地銜接於弧形軌道上。探針之一端設於探針座上，探針之另端用以觸壓待測物，固定部將探針座固定於弧形軌道上。An embodiment of the present invention provides a testing device. The testing device includes a working stage, at least one arc track and at least one probe module. The work stage has a configuration area. The configuration area is used to place an object to be tested. The arc track is fixed on the working platform. At least one section of the outer shape of the arc-shaped track has an arc. The configuration area is located within the range of an imaginary curvature circle of radians. The probe module includes a probe seat, a fixing part and a probe. The probe seat is slidably connected to the arc track. One end of the probe is set on the probe seat, the other end of the probe is used to touch the object to be tested, and the fixing part fixes the probe seat on the arc track.

依據本發明一或複數個實施例，在上述之測試裝置中，工作載台具有一頂面、一底面與一凹槽。頂面與底面彼此相對配置。凹槽形成於頂面上，且完全位於假想曲率圓的範圍內。弧形軌道位於頂面上，且配置區位於凹槽內。According to one or more embodiments of the present invention, in the above-mentioned testing device, the work stage has a top surface, a bottom surface and a groove. The top surface and the bottom surface are disposed opposite to each other. The grooves are formed on the top surface completely within the confines of an imaginary circle of curvature. The arcuate track is located on the top surface, and the configuration area is located in the groove.

依據本發明一或複數個實施例，在上述之測試裝置中，弧形軌道呈環形、C字形或漩渦形。According to one or more embodiments of the present invention, in the above-mentioned test device, the arc-shaped track is annular, C-shaped or swirling.

依據本發明一或複數個實施例，在上述之測試裝置中，當弧形軌道為一環形軌道，且環形軌道完整地圍繞配置區。當探針模組為多數個時，這些探針模組之探針座分別間隔地位於環形軌道上。According to one or more embodiments of the present invention, in the above-mentioned test device, when the arc-shaped track is an annular track, and the annular track completely surrounds the configuration area. When there are a plurality of probe modules, the probe bases of these probe modules are respectively located on the annular track at intervals.

依據本發明一或複數個實施例，在上述之測試裝置中，當弧形軌道為多數個時，這些弧形軌道分別間隔配置，且共同圍繞配置區。當探針模組為多數個時，這些探針模組之探針座分別可滑移地銜接於這些弧形軌道上。According to one or more embodiments of the present invention, in the above-mentioned test device, when there are a plurality of arc-shaped tracks, the arc-shaped tracks are respectively arranged at intervals and jointly surround the configuration area. When there are a plurality of probe modules, the probe bases of the probe modules are respectively slidably connected to the arc-shaped tracks.

依據本發明一或複數個實施例，在上述之測試裝置中，這些弧形軌道之這些假想曲率圓具有彼此相同之圓心與半徑。According to one or more embodiments of the present invention, in the above-mentioned test device, the imaginary circles of curvature of the arc-shaped tracks have the same center and radius as each other.

依據本發明一或複數個實施例，在上述之測試裝置中，任二相鄰之這些弧形軌道具有不同曲率之弧度。According to one or more embodiments of the present invention, in the above-mentioned test device, any two adjacent arc-shaped tracks have radians with different curvatures.

依據本發明一或複數個實施例，在上述之測試裝置中，這些弧形軌道之假想曲率圓分別具有不同半徑。According to one or more embodiments of the present invention, in the above-mentioned test device, the imaginary circles of curvature of the arc-shaped tracks respectively have different radii.

依據本發明一或複數個實施例，在上述之測試裝置中，探針包含有一懸臂段及至少一針端。懸臂段固定於探針座上，且連接針端。According to one or more embodiments of the present invention, in the above-mentioned testing device, the probe includes a cantilever segment and at least one needle end. The cantilever segment is fixed on the probe base and connected to the needle end.

依據本發明一或複數個實施例，在上述之測試裝置中，當針端為多數個時，這些針端彼此電性分離且並排地位於懸臂段之末端。According to one or more embodiments of the present invention, in the above-mentioned testing device, when there are a plurality of needle ends, the needle ends are electrically separated from each other and are located side by side at the end of the cantilever segment.

依據本發明一或複數個實施例，在上述之測試裝置中，探針座包括一底座、一導溝及一固定塊。導溝凹設於底座上，且可滑移地容納弧形軌道。固定塊固定至底座上，用以設置探針。According to one or more embodiments of the present invention, in the above-mentioned testing device, the probe base includes a base, a guide groove and a fixing block. The guide groove is concavely arranged on the base and slidably accommodates the arc-shaped track. The fixing block is fixed to the base for setting the probe.

依據本發明一或複數個實施例，在上述之測試裝置中，固定塊包括一塊體、一導槽與一固定栓。導槽形成於塊體之一面。探針可伸縮地位於導槽內。固定栓抵靠導槽內之探針，用以將探針固定於固定塊上。According to one or more embodiments of the present invention, in the above-mentioned testing device, the fixing block includes a body, a guide groove and a fixing pin. The guide groove is formed on one surface of the block. The probe is telescopically located within the guide groove. The fixing bolt abuts against the probe in the guide groove to fix the probe on the fixing block.

依據本發明一或複數個實施例，在上述之測試裝置中，固定塊之一面具有一螺栓槽。探針具有一螺孔，螺孔對齊螺栓槽。探針模組更具有一升降螺栓。升降螺栓可螺轉地位於螺孔內，且抵靠於螺栓槽內，用以升降探針。According to one or more embodiments of the present invention, in the above-mentioned testing device, one surface of the fixing block has a bolt groove. The probe has a threaded hole aligned with the bolt groove. The probe module further has a lifting bolt. The lifting bolt is rotatably located in the screw hole and abuts in the bolt groove for lifting and lowering the probe.

依據本發明一或複數個實施例，上述之測試裝置更包含一動力裝置。動力裝置連接探針座，用以驅動探針座於弧形軌道上移動。According to one or more embodiments of the present invention, the above-mentioned testing device further includes a power device. The power device is connected with the probe seat and is used to drive the probe seat to move on the arc track.

如此，透過以上各實施例之所述架構，本發明不僅能夠縮短探針模組之對位調整及間距確認之時程，更能夠提供不同延伸方向之探針，以因應不同接點位置之電子元件。In this way, through the structures of the above embodiments, the present invention can not only shorten the time course of alignment adjustment and spacing confirmation of the probe module, but also provide probes with different extension directions to respond to the electronic components at different contact positions. element.

以上所述僅為用以闡述本發明所欲解決的問題、解決問題的技術手段、及其產生的功效等等，本發明之具體細節將在下文的實施方式及相關圖式中詳細介紹。The above descriptions are only used to illustrate the problems to be solved by the present invention, the technical means for solving the problems, and the effects thereof, etc. The specific details of the present invention will be described in detail in the following embodiments and related drawings.

以下將以圖式揭露本發明之複數實施方式，為明確說明起見，許多實務上的細節將在以下敘述中一併說明。然而，熟悉本領域之技術人員應當瞭解到，在本發明部分實施方式中，這些實務上的細節並非必要的，因此不應用以限制本發明。此外，為簡化圖式起見，一些習知慣用的結構與元件在圖式中將以簡單示意的方式繪示之。另外，為了便於讀者觀看，圖式中各元件的尺寸並非依實際比例繪示。Plural embodiments of the present invention will be disclosed in the drawings below, and for the sake of clarity, many practical details will be described together in the following description. However, those skilled in the art should appreciate that these practical details are not necessary in some embodiments of the present invention and should not be used to limit the present invention. In addition, for the purpose of simplifying the drawings, some well-known structures and elements will be shown in a simple and schematic manner in the drawings. In addition, for the convenience of the reader, the size of each element in the drawings is not drawn according to the actual scale.

第1圖為本發明一實施例之測試裝置10的上視圖。第2圖為第1圖之測試裝置10沿線段AA所製成的剖視圖。如第1圖與第2圖所示，測試裝置10包括一工作載台100、一弧形軌道200及一或多個探針模組300。工作載台100具有一配置區120。配置區120用以放置一待測物DUT(例如電路板)。弧形軌道200固設於工作載台100上。弧形軌道200之外型具有一弧度。配置區120位於弧度之假想曲率圓250的範圍內。須了解到，所述假想曲率圓250(curvature circle)為依據弧形軌道200之弧度之曲率所延長並完成的。探針模組300包含一探針座310、一探針400與一固定部500。探針座310可滑移地銜接於弧形軌道200上。固定部500將探針座310固定於弧形軌道200上。探針400之一端設於探針座310上，探針400之另端用以觸壓待測物DUT之電氣接點T。FIG. 1 is a top view of a testing device 10 according to an embodiment of the present invention. FIG. 2 is a cross-sectional view of the testing device 10 of FIG. 1 along the line AA. As shown in FIGS. 1 and 2 , the testing device 10 includes a work stage 100 , an arc track 200 and one or more probe modules 300 . The work stage 100 has an arrangement area 120 . The configuration area 120 is used to place a DUT (such as a circuit board) under test. The arc-shaped track 200 is fixed on the working platform 100 . The outer shape of the arc track 200 has an arc. The configuration area 120 is located within the range of an imaginary curvature circle 250 of radians. It should be understood that the imaginary curvature circle 250 is extended and completed according to the curvature of the arc of the arc track 200 . The probe module 300 includes a probe base 310 , a probe 400 and a fixing portion 500 . The probe seat 310 is slidably connected to the arc track 200 . The fixing part 500 fixes the probe holder 310 on the arc track 200 . One end of the probe 400 is disposed on the probe base 310 , and the other end of the probe 400 is used to touch the electrical contact T of the DUT.

如此，當測試人員需要改變探針400之位置時，測試人員透過固定部500解除探針座310與弧形軌道200之固定；接著，將探針座310沿著弧形軌道200相對移動至預定位置；接著，讓固定部500再次鎖固探針座310與弧形軌道200之後，測試人員便能夠對待測物DUT進行電性檢測。In this way, when the tester needs to change the position of the probe 400, the tester releases the fixation between the probe seat 310 and the arc-shaped track 200 through the fixing part 500; then, the probe seat 310 is relatively moved along the arc-shaped track 200 to a predetermined position. position; then, after the fixing portion 500 locks the probe base 310 and the arc track 200 again, the tester can conduct electrical inspection of the DUT to be tested.

更具體地，工作載台100具有一頂面101與一底面102。頂面101與底面102彼此相對配置。弧形軌道200位於頂面101上，更具體地，在本實施例中，弧形軌道200透過固定柱210鎖固於工作載台100之頂面101。工作載台100更具有一凹槽110。凹槽110形成於頂面101上，且完全位於假想曲率圓250的範圍內，且配置區120位於凹槽110內。More specifically, the work stage 100 has a top surface 101 and a bottom surface 102 . The top surface 101 and the bottom surface 102 are disposed opposite to each other. The arc-shaped rail 200 is located on the top surface 101 . More specifically, in this embodiment, the arc-shaped rail 200 is locked to the top surface 101 of the working platform 100 through the fixing column 210 . The working stage 100 further has a groove 110 . The groove 110 is formed on the top surface 101 and is completely within the range of the imaginary curvature circle 250 , and the configuration area 120 is located within the groove 110 .

此外，弧形軌道200為一全向式環形軌道，全向式環形軌道之外型為一例如為圓形或橢圓形之封閉輪廓，且全向式環形軌道完整地圍繞配置區120。如此，因為全向式環形軌道之配置，探針模組300能夠因應任意特定之角度變化於工作載台100上對待測物DUT進行電性檢測，從而提高檢測效率和穩定性。In addition, the arc-shaped track 200 is an omnidirectional annular track, the outer shape of the omnidirectional annular track is a closed contour such as a circle or an ellipse, and the omnidirectional annular track completely surrounds the configuration area 120 . In this way, due to the configuration of the omnidirectional circular track, the probe module 300 can perform electrical detection on the DUT on the work stage 100 according to any specific angle change, thereby improving the detection efficiency and stability.

第3圖為第1圖之測試裝置10之探針模組300的立體圖。如第2圖與第3圖所示，更具體地，探針座310包括一底座311及一固定塊340。底座311具有彼此相對之頂部312與底部313。固定塊340固定至底座311之頂部312，用以設置探針400。底座311之底部313凹設有一導溝320，導溝320能夠容納弧形軌道200之一部分。在本實施例中，弧形軌道200之橫截面及導溝320之橫截面呈燕尾形或梯形，故，探針座310不易脫離弧形軌道200。然而，本發明不限於弧形軌道200及導溝320之橫截面外型。FIG. 3 is a perspective view of the probe module 300 of the testing apparatus 10 of FIG. 1 . As shown in FIGS. 2 and 3 , more specifically, the probe base 310 includes a base 311 and a fixing block 340 . The base 311 has a top 312 and a bottom 313 opposite to each other. The fixing block 340 is fixed to the top 312 of the base 311 for setting the probe 400 . A guide groove 320 is recessed on the bottom 313 of the base 311 , and the guide groove 320 can accommodate a part of the arc track 200 . In this embodiment, the cross-section of the arc-shaped rail 200 and the cross-section of the guide groove 320 are dovetail-shaped or trapezoidal, so the probe seat 310 is not easily separated from the arc-shaped rail 200 . However, the present invention is not limited to the cross-sectional shape of the arc-shaped track 200 and the guide channel 320 .

又，在本實施例中，底座311更具有一螺柱槽330，且固定部500為一螺柱510。故，當探針座310移至預定位置時，測試人員能夠將螺柱510經由螺柱槽330而抵著弧形軌道200，以提高待測物DUT之檢測穩定度。然而，只要能將探針座310固定於弧形軌道200上，本發明不限固定部500之種類與形式。In addition, in this embodiment, the base 311 further has a stud groove 330 , and the fixing portion 500 is a stud 510 . Therefore, when the probe base 310 moves to the predetermined position, the tester can push the stud 510 against the arc track 200 through the stud groove 330 to improve the detection stability of the DUT. However, as long as the probe base 310 can be fixed on the arc-shaped rail 200 , the present invention is not limited to the type and form of the fixing portion 500 .

探針400包含有一懸臂段410及一針端420。懸臂段410之一端固定於探針座310之固定塊340上，且懸臂段410之另端連接針端420。本發明不限針端420為組裝於懸臂段410上，或者為一體成型地形成於懸臂段410上，且懸臂段410不限為直線狀或彎折狀。在本實施例中，此探針模組300之探針座310為高頻(RF)探針座，然而，本發明不限探針座之種類。The probe 400 includes a cantilever section 410 and a needle end 420 . One end of the cantilever segment 410 is fixed on the fixing block 340 of the probe base 310 , and the other end of the cantilever segment 410 is connected to the needle end 420 . In the present invention, the needle end 420 is not limited to be assembled on the cantilever section 410, or integrally formed on the cantilever section 410, and the cantilever section 410 is not limited to be linear or bent. In this embodiment, the probe base 310 of the probe module 300 is a high frequency (RF) probe base, however, the present invention is not limited to the type of the probe base.

第4圖為本發明一實施例之探針模組301的上視圖。如第4圖所示，本實施例之探針模組301與第3圖之探針模組300大致相同，其差異在於，每個探針401更包含多個(例如2個)針端430，並非單一個針端430。這些針端430並排於同個懸臂段410上，且彼此電性分離，用以分別觸壓待測物DUT之不同電氣接點T。更具體地，每個針端430透過導線431連接一檢測電路板(圖中未示)。在本實施例中，此探針模組301之探針座310為無線鏈路控制層協議 (Radio Link Control，RLC)探針座，然而，本發明不限探針座310之種類。FIG. 4 is a top view of the probe module 301 according to an embodiment of the present invention. As shown in FIG. 4 , the probe module 301 of this embodiment is substantially the same as the probe module 300 of FIG. 3 , the difference is that each probe 401 further includes a plurality of (eg, two) needle ends 430 , not a single needle end 430. The needle ends 430 are arranged side by side on the same cantilever section 410 and are electrically separated from each other, so as to touch and press different electrical contacts T of the DUT respectively. More specifically, each pin end 430 is connected to a detection circuit board (not shown in the figure) through a wire 431 . In this embodiment, the probe base 310 of the probe module 301 is a radio link control layer (Radio Link Control, RLC) probe base, however, the present invention is not limited to the type of the probe base 310 .

第5圖為本發明一實施例之測試裝置11的正視圖。第6圖為第5圖之測試裝置11沿線段BB所製成的剖視圖。如第5圖與第6圖所示，本實施例之測試裝置11與第1圖之測試裝置10大致相同，其差異在於，測試裝置11之探針模組300之數量為多數個(例如4個)，並非單一個探針模組300。這些探針座310分別間隔地位於弧形軌道200 (即全向式環形軌道)上。在本實施例中，任二相鄰之探針模組300相隔90度，用以觸壓待測物DUT之不同區域之不同電氣接點T。然而，本發明不限這些探針模組在弧形軌道上之位置。FIG. 5 is a front view of the testing device 11 according to an embodiment of the present invention. FIG. 6 is a cross-sectional view of the testing device 11 of FIG. 5 along line BB. As shown in FIG. 5 and FIG. 6, the test device 11 of this embodiment is substantially the same as the test device 10 of FIG. 1, the difference is that the number of probe modules 300 of the test device 11 is a plurality (for example, four ), not a single probe module 300 . The probe bases 310 are respectively located on the arc track 200 (ie, the omnidirectional annular track) at intervals. In the present embodiment, any two adjacent probe modules 300 are separated by 90 degrees for contacting different electrical contacts T in different regions of the DUT under test. However, the present invention is not limited to the positions of the probe modules on the arc track.

第7A圖至第7D圖分別為本發明不同實施例之弧形軌道201~205的示意圖。如第7A圖所示，本實施例之弧形軌道201與第1圖之弧形軌道200差異在於，弧形軌道201為C字形或U字形，並非O字形(即全向式環形軌道)。更具體地，弧形軌道201之外型具有一開放凹部220，且弧形軌道201之假想曲率圓250之圓心260位於開放凹部220的範圍內。弧形軌道201之二末端230至假想曲率圓250之圓心260之距離270相同。須了解到。為了因應工作載台之空間配置需求或限制，本實施例之弧形軌道201可以從O字形(即全向式環形軌道)改為C字形或U字形。FIGS. 7A to 7D are schematic diagrams of arc-shaped rails 201 to 205 according to different embodiments of the present invention, respectively. As shown in FIG. 7A , the difference between the curved track 201 of this embodiment and the curved track 200 of FIG. 1 is that the curved track 201 is C-shaped or U-shaped, not O-shaped (ie, an omnidirectional circular track). More specifically, the outer shape of the arc-shaped rail 201 has an open concave portion 220 , and the center 260 of the imaginary curvature circle 250 of the arc-shaped rail 201 is located within the range of the open concave portion 220 . The distance 270 from the two ends 230 of the arc-shaped track 201 to the center 260 of the imaginary curvature circle 250 is the same. must understand. In order to meet the space configuration requirements or limitations of the working platform, the arc track 201 of this embodiment can be changed from an O-shape (ie, an omnidirectional circular track) to a C-shape or a U-shape.

如第7B圖所示，本實施例之弧形軌道202與第1圖之弧形軌道200差異在於，本實施例之弧形軌道202為漩渦形，並非O字形(即全向式環形軌道)。換句話說，此弧形軌道202之一末端240不連接另一末端241，且弧形軌道202之所述二末端240、241至假想曲率圓250之圓心260之距離彼此不同，且此弧形軌道202之末端240位於假想曲率圓250的範圍內。如此，不須移除且置換至其他軌道，探針模組300之探針400就能夠在同一弧形軌道202上移動以選擇對不同距離之電氣接點進行觸壓。As shown in FIG. 7B , the difference between the arc-shaped track 202 of this embodiment and the arc-shaped track 200 of FIG. 1 is that the arc-shaped track 202 of this embodiment is a spiral shape, not an O-shape (ie, an omnidirectional circular track). . In other words, one end 240 of the arc-shaped track 202 is not connected to the other end 241, and the distances from the two ends 240, 241 of the arc-shaped track 202 to the center 260 of the imaginary curvature circle 250 are different from each other, and the arc The end 240 of the track 202 lies within the confines of the imaginary circle of curvature 250 . In this way, the probes 400 of the probe module 300 can move on the same arc-shaped track 202 to selectively press the electrical contacts at different distances without removing and replacing to other tracks.

如第7C圖所示，本實施例之弧形軌道203與第5圖之弧形軌道200之差異在於，本實施例之弧形軌道203並非單一個，而是多數個(例如4個)，且這些弧形軌道203分別間隔配置，並且共同圍繞上述之配置區120。這些探針模組300分別可滑移地銜接於其中一弧形軌道203上。每個弧形軌道203所具有的假想曲率圓250彼此重疊，意即，這些弧形軌道203之這些假想曲率圓250具有彼此相同之圓心260與半徑280。As shown in FIG. 7C, the difference between the arc-shaped rail 203 of this embodiment and the arc-shaped rail 200 of FIG. 5 is that the arc-shaped rail 203 of this embodiment is not a single one, but a plurality of (for example, four), And these arc-shaped rails 203 are respectively arranged at intervals, and together surround the above-mentioned arrangement area 120 . The probe modules 300 are respectively slidably connected to one of the arc-shaped rails 203 . The imaginary circles of curvature 250 of each arc-shaped track 203 overlap each other, that is, the imaginary circles of curvature 250 of the arc-shaped tracks 203 have the same center 260 and radius 280 as each other.

須了解到。為了因應工作載台100之空間配置需求或限制，本實施例之弧形軌道203可以從O字形(即全向式環形軌道)改為非連續式之圓形軌道。must understand. In order to meet the requirements or limitations of the space configuration of the working stage 100 , the arc track 203 in this embodiment can be changed from an O-shaped (ie, omnidirectional circular track) to a discontinuous circular track.

如第7D圖所示，本實施例之弧形軌道204、205與第7C圖之弧形軌道203之差異在於，在本實施例之這些弧形軌道204與205中，任二相鄰之弧形軌道204、205具有不同曲率之弧度，且任二相鄰之弧形軌道204、205之假想曲率圓250、251分別具有不同半徑281、282。As shown in FIG. 7D, the difference between the arc-shaped rails 204 and 205 in this embodiment and the arc-shaped rail 203 in FIG. 7C is that in these arc-shaped rails 204 and 205 in this embodiment, any two adjacent arcs The arc-shaped rails 204 and 205 have different curvatures, and the imaginary curvature circles 250 and 251 of any two adjacent arc-shaped rails 204 and 205 have different radii 281 and 282 respectively.

第8圖為本發明一實施例之探針模組302的側視圖。如第8圖所示，本實施例之探針模組302與第1圖之探針模組300大致相同，其差異在於，探針402伸縮地位於探針座310上，以調整探針402於探針座310上之伸出長度。更具體地，固定塊340包括一塊體341、一螺孔350、一導槽360與一固定栓370。導槽360形成於塊體341之一外側面342，螺孔350形成於塊體341之頂側面343，且接通塊體341內之導槽360。導槽360之長軸方向361與螺孔350之軸心方向351相互垂直。探針402可伸縮地位於導槽360內，以選擇不同長度之探針402。探針402具有多個卡固槽440。這些卡固槽440沿著探針402之長軸方向441依序排列。固定栓370位於螺孔350內，且伸入其中一卡固槽440內，用以穩固地抵靠導槽360內之探針402。故，當測試人員將探針402部分地伸入固定塊340之導槽360內時，測試人員藉由固定栓370抵靠其中一卡固槽440，以決定探針402之伸出長度。如此，不須移除且置換至其他軌道，此探針402就能夠在同位置選擇對不同距離之電氣接點進行觸壓，縮短測試時間並提高工作效率。FIG. 8 is a side view of the probe module 302 according to an embodiment of the present invention. As shown in FIG. 8 , the probe module 302 of this embodiment is substantially the same as the probe module 300 of FIG. 1 , the difference is that the probe 402 is telescopically located on the probe base 310 to adjust the probe 402 The protruding length on the probe base 310 . More specifically, the fixing block 340 includes a body 341 , a screw hole 350 , a guide groove 360 and a fixing bolt 370 . The guide groove 360 is formed on an outer side surface 342 of the block body 341 , and the screw hole 350 is formed on the top side surface 343 of the block body 341 , and is connected to the guide groove 360 in the block body 341 . The long axis direction 361 of the guide groove 360 and the axis direction 351 of the screw hole 350 are perpendicular to each other. The probes 402 are telescopically located in the guide grooves 360 to select probes 402 of different lengths. The probe 402 has a plurality of clamping grooves 440 . The securing grooves 440 are arranged in sequence along the long axis direction 441 of the probe 402 . The fixing bolt 370 is located in the screw hole 350 and extends into one of the clamping grooves 440 for firmly abutting against the probe 402 in the guide groove 360 . Therefore, when the tester partially extends the probe 402 into the guide groove 360 of the fixing block 340 , the tester uses the fixing bolt 370 to abut one of the locking grooves 440 to determine the protruding length of the probe 402 . In this way, the probe 402 can selectively press the electrical contacts of different distances at the same position without removing and replacing to other tracks, thereby shortening the test time and improving the work efficiency.

第9圖為本發明一實施例之測試裝置12的側視圖。如第9圖所示，本實施例之測試裝置12與第1圖之測試裝置12大致相同，其差異在於，探針403可升降地位於探針座310上，以調整探針403於探針座310上之垂直高度。更具體地，固定塊340之一面具有一或多個螺栓槽380。探針403具有一或多個螺孔411，螺孔411對齊其中一螺栓槽380，且螺孔411內具有螺紋(圖中未示)。探針模組303更具有一或多個升降螺栓390。每個升降螺栓390可螺轉地位於其中一螺孔411內，且抵靠於其中一螺栓槽380內。故，當測試人員轉動升降螺栓390，讓探針403相對探針座310升降，以調整探針403於探針座310上之垂直高度，從而調整探針403對電氣接點T之觸壓力道。FIG. 9 is a side view of the testing device 12 according to an embodiment of the present invention. As shown in FIG. 9 , the test device 12 of this embodiment is substantially the same as the test device 12 of FIG. 1 , the difference is that the probe needle 403 can be raised and lowered on the probe base 310 to adjust the probe needle 403 to the probe needle Vertical height on seat 310. More specifically, one surface of the fixing block 340 has one or more bolt grooves 380 . The probe 403 has one or more screw holes 411 , the screw holes 411 are aligned with one of the screw grooves 380 , and the screw holes 411 have threads (not shown in the figure). The probe module 303 further has one or more lifting bolts 390 . Each lifting bolt 390 is rotatably located in one of the screw holes 411 and abuts in one of the bolt grooves 380 . Therefore, when the tester rotates the lifting bolt 390, the probe 403 is raised and lowered relative to the probe base 310 to adjust the vertical height of the probe 403 on the probe base 310, thereby adjusting the contact pressure of the probe 403 to the electrical contact T. .

第10圖為本發明一實施例之測試裝置13的側視圖。如第10圖所示，本實施例之測試裝置13與第1圖之測試裝置10大致相同，其差異在於，本實施例之測試裝置13為自動滑移以調整探針座310上於弧形軌道200上之位置，不須於弧形軌道200上人力手動探針座310。更具體地，測試裝置13更包含一動力裝置600。動力裝置600連接探針座310，用以驅動探針座310於弧形軌道200上移動。在本實施例中，動力裝置600例如為馬達、汽缸或電磁閥。然而，本發明不限於此，只要能於弧形軌道200上任意移動探針座310，本發明不限動力裝置600之種類與位置，且探針座310不限具有滑輪或齒輪，以提升探針座310於位移時之流暢性。FIG. 10 is a side view of a testing device 13 according to an embodiment of the present invention. As shown in FIG. 10, the testing device 13 of this embodiment is substantially the same as the testing device 10 of FIG. 1, the difference is that the testing device 13 of this embodiment automatically slides to adjust the probe seat 310 on the arc The position on the track 200 does not require manual manual operation of the probe seat 310 on the curved track 200 . More specifically, the testing device 13 further includes a power device 600 . The power device 600 is connected to the probe base 310 for driving the probe base 310 to move on the arc track 200 . In this embodiment, the power device 600 is, for example, a motor, a cylinder or a solenoid valve. However, the present invention is not limited to this, as long as the probe holder 310 can be moved arbitrarily on the arc-shaped track 200, the present invention is not limited to the type and position of the power device 600, and the probe holder 310 is not limited to having pulleys or gears to lift the probe The smoothness of the needle seat 310 during displacement.

如此，透過以上架構，本實施例不僅能夠縮短探針模組之對位調整及間距確認之時程，更能夠提供不同延伸方向之探針，以因應不同接點位置之電子元件。In this way, through the above structure, the present embodiment can not only shorten the time for alignment adjustment and spacing confirmation of the probe module, but also provide probes with different extension directions to correspond to electronic components with different contact positions.

最後，上述所揭露之各實施例中，並非用以限定本發明，任何熟習此技藝者，在不脫離本發明之精神和範圍內，當可作各種之更動與潤飾，皆可被保護於本發明中。因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。Finally, the above disclosed embodiments are not intended to limit the present invention. Anyone who is familiar with the art can make various changes and modifications without departing from the spirit and scope of the present invention. invention. Therefore, the protection scope of the present invention should be determined by the scope of the appended patent application.

10、11、12、13:測試裝置10, 11, 12, 13: Test device

100:工作載台100: work stage

101:頂面101: Top surface

102:底面102: Underside

110:凹槽110: Groove

120:配置區120: Configuration area

200、201、202、203、204、205:弧形軌道200, 201, 202, 203, 204, 205: Arc track

210:固定柱210: Fixed column

220:開放凹部220: Open recess

230:末端230: end

240、241:末端240, 241: end

250、251:假想曲率圓250, 251: Imaginary curvature circle

260:圓心260: circle center

270:距離270: Distance

280、281:半徑280, 281: radius

300、301、302、303:探針模組300, 301, 302, 303: probe modules

310:探針座310: Probe Holder

311:底座311: Base

312:頂部312: Top

313:底部313: Bottom

320:導溝320: Guide ditch

330:螺柱槽330: Stud slot

340:固定塊340: Fixed block

341:塊體341: Block

342:外側面342: outer side

343:頂側面343: Top Side

350:螺孔350: screw hole

351:軸心方向351: axis direction

360:導槽360: Guide groove

361:長軸方向361: long axis direction

370:固定栓370: Fixed Bolt

380:螺栓槽380: Bolt slot

390:升降螺栓390: Lifting Bolt

400、401、402、403:探針400, 401, 402, 403: Probes

410:懸臂段410: Cantilever Section

411:螺孔411: screw hole

420、430:針端420, 430: pin end

431:導線431: Wire

440:卡固槽440: Snap groove

441:長軸方向441: long axis direction

500:固定部500: Fixed part

510:螺柱510: Stud

600:動力裝置600: Powerplant

AA:線段AA: line segment

BB:線段BB: line segment

DUT:待測物DUT: object to be tested

T:電氣接點T: electrical contact

為讓本發明之上述和其他目的、特徵、優點與實施例能更明顯易懂，所附圖式之說明如下：第1圖為本發明一實施例之測試裝置的上視圖；第2圖為第1圖之測試裝置沿線段AA所製成的剖視圖；第3圖為第1圖之測試裝置之探針模組的立體圖；第4圖為本發明一實施例之探針模組的上視圖；第5圖為本發明一實施例之測試裝置的正視圖；第6圖為第5圖之測試裝置沿線段BB所製成的剖視圖；第7A圖至第7D圖分別為本發明不同實施例之弧形軌道的示意圖；第8圖為本發明一實施例之探針模組的側視圖；第9圖為本發明一實施例之測試裝置的側視圖；以及第10圖為本發明一實施例之測試裝置的側視圖。 In order to make the above and other objects, features, advantages and embodiments of the present invention more clearly understood, the accompanying drawings are described as follows: FIG. 1 is a top view of a testing device according to an embodiment of the present invention; Figure 2 is a cross-sectional view of the test device of Figure 1 along line AA; Figure 3 is a perspective view of the probe module of the testing device of Figure 1; FIG. 4 is a top view of a probe module according to an embodiment of the present invention; FIG. 5 is a front view of a testing device according to an embodiment of the present invention; Fig. 6 is a cross-sectional view of the test device of Fig. 5 along line BB; 7A to 7D are schematic diagrams of arc-shaped tracks according to different embodiments of the present invention; FIG. 8 is a side view of a probe module according to an embodiment of the present invention; FIG. 9 is a side view of a testing device according to an embodiment of the present invention; and FIG. 10 is a side view of a testing device according to an embodiment of the present invention.

10:測試裝置 10: Test device

100:工作載台 100: work stage

110:凹槽 110: Groove

120:配置區 120: Configuration area

200:弧形軌道 200: Arc Track

210:固定柱 210: Fixed column

250:假想曲率圓 250: Imaginary curvature circle

310:探針座 310: Probe Holder

400:探針 400: Probe

AA:線段 AA: line segment

DUT:待測物 DUT: object to be tested

T:電氣接點 T: electrical contact

Claims

一種測試裝置，包括：一工作載台，具有一配置區，該配置區用以放置一待測物；至少一弧形軌道，固設於該工作載台上，該弧形軌道之外型之至少一段具有一弧度，該弧度具有一假想曲率圓，且該配置區位於該弧度之該假想曲率圓的範圍內；以及至少一探針模組，包含一探針座、一固定部與一探針，該探針座可滑移地銜接於該弧形軌道上，該探針之一端設於該探針座上，該探針之另端用以觸壓該待測物，該固定部將該探針座固定於該弧形軌道上，該探針座包括一底座、一導溝及一固定塊，該導溝凹設於該底座上，且可滑移地容納該弧形軌道，該固定塊固定至該底座上，用以設置該探針。 A testing device, comprising: a working platform with a configuration area, the configuration area is used to place an object to be tested; at least one arc-shaped track, fixed on the working platform, the outer shape of the arc-shaped track is different At least one section has an radian, the radian has an imaginary curvature circle, and the configuration area is located within the range of the imaginary curvature circle of the radian; and at least one probe module includes a probe seat, a fixing portion and a probe The probe base is slidably connected to the arc-shaped track, one end of the probe is set on the probe base, the other end of the probe is used to touch the object to be tested, and the fixing part will The probe seat is fixed on the arc-shaped track. The probe seat includes a base, a guide groove and a fixing block. The guide groove is recessed on the base and slidably accommodates the arc-shaped track. The fixing block is fixed on the base for setting the probe.

如請求項1所述之測試裝置，其中該工作載台具有一頂面、一底面與一凹槽，該頂面與該底面彼此相對配置，該凹槽形成於該頂面上，且完全位於該假想曲率圓的範圍內，其中該弧形軌道位於該頂面上，且該配置區位於該凹槽內。 The testing device according to claim 1, wherein the working stage has a top surface, a bottom surface and a groove, the top surface and the bottom surface are disposed opposite to each other, and the groove is formed on the top surface and is completely located on the top surface. Within the range of the imaginary curvature circle, the arc-shaped track is located on the top surface, and the configuration area is located in the groove.

如請求項1所述之測試裝置，其中該弧形軌道呈環形、C字形或漩渦形。 The testing device according to claim 1, wherein the arc-shaped track is annular, C-shaped or swirling.

如請求項1所述之測試裝置，其中當該弧形軌道為一環形軌道，且該環形軌道完整地圍繞該配置區；以及當該至少一探針模組為多數個時，該些探針模組之該些探針座分別間隔地位於該環形軌道上。 The test device of claim 1, wherein when the arc-shaped track is a circular track, and the circular track completely surrounds the configuration area; and when the at least one probe module is a plurality of probes, the probes The probe bases of the module are respectively located on the annular track at intervals.

如請求項1所述之測試裝置，其中當該至少一弧形軌道為多數個時，該些弧形軌道分別間隔配置，且共同圍繞該配置區；以及當該至少一探針模組為多數個時，該些探針模組之該些探針座分別可滑移地銜接於該些弧形軌道上。 The test device according to claim 1, wherein when the at least one arc-shaped track is in a plurality, the arc-shaped tracks are respectively arranged at intervals and together surround the configuration area; and when the at least one probe module is in a plurality In each case, the probe bases of the probe modules are respectively slidably connected to the arc-shaped rails.

如請求項5所述之測試裝置，其中該些弧形軌道之該些假想曲率圓具有彼此相同之圓心與半徑。 The test device of claim 5, wherein the imaginary curvature circles of the arc-shaped tracks have the same center and radius as each other.

如請求項5所述之測試裝置，其中任二相鄰之該些弧形軌道具有不同曲率之弧度。 The testing device according to claim 5, wherein any two adjacent arc-shaped tracks have radians with different curvatures.

如請求項5所述之測試裝置，其中該些弧形軌道之該些假想曲率圓分別具有不同半徑。 The test device of claim 5, wherein the imaginary circles of curvature of the arc-shaped tracks have different radii respectively.

如請求項1所述之測試裝置，其中該探針包含有一懸臂段及至少一針端，該懸臂段固定於該探針座上，且連接該針端。 The testing device according to claim 1, wherein the probe comprises a cantilever segment and at least one needle end, the cantilever segment is fixed on the probe base, and is connected to the needle end.

如請求項9所述之測試裝置，其中當該至少一針端為多數個時，該些針端彼此電性分離且並排地位於該懸臂段之末端。 The testing device of claim 9, wherein when the at least one needle end is plural, the needle ends are electrically separated from each other and are located side by side at the end of the cantilever segment.

如請求項1所述之測試裝置，其中該固定塊包括一塊體、一導槽與一固定栓，該導槽形成於該塊體之一面，該探針可伸縮地位於該導槽內，該固定栓抵靠該導槽內之該探針，用以將該探針固定於該固定塊上。 The testing device according to claim 1, wherein the fixing block comprises a block, a guide groove and a fixing pin, the guide groove is formed on a surface of the block, the probe is telescopically located in the guide groove, the The fixing bolt abuts against the probe in the guide groove for fixing the probe on the fixing block.

如請求項1所述之測試裝置，其中該固定塊之一面具有一螺栓槽，該探針具有一螺孔，該螺孔對齊該螺栓槽；以及該探針模組更具有一升降螺栓，該升降螺栓可螺轉地位於該螺孔內，且抵靠於該螺栓槽內，用以升降該探針。 The test device according to claim 1, wherein one surface of the fixing block has a bolt groove, the probe has a screw hole, and the screw hole is aligned with the bolt groove; and the probe module further has a lifting bolt, the The lifting bolt is rotatably located in the screw hole and abuts against the bolt groove for lifting and lowering the probe.

如請求項1所述之測試裝置，更包含：一動力裝置，連接該探針座，用以驅動該探針座於該弧形軌道上移動。 The testing device as claimed in claim 1, further comprising: a power device connected to the probe holder for driving the probe holder to move on the arc track.