TWI763196B - actuator - Google Patents

actuator Download PDF

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Publication number
TWI763196B
TWI763196B TW109145227A TW109145227A TWI763196B TW I763196 B TWI763196 B TW I763196B TW 109145227 A TW109145227 A TW 109145227A TW 109145227 A TW109145227 A TW 109145227A TW I763196 B TWI763196 B TW I763196B
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Taiwan
Prior art keywords
rod
central axis
actuator
support portion
cylinder
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TW109145227A
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Chinese (zh)
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TW202126930A (en
Inventor
篠平大輔
吉田達矢
中島龍太
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日商住友重機械工業股份有限公司
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
    • F15B15/1423—Component parts; Constructional details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/28—Means for indicating the position, e.g. end of stroke
    • F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/28—Means for indicating the position, e.g. end of stroke
    • F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
    • F15B15/2838—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT with out using position sensors, e.g. by volume flow measurement or pump speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/28—Means for indicating the position, e.g. end of stroke
    • F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
    • F15B15/2861—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using magnetic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
    • F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Actuator (AREA)

Abstract

[課題]　本發明提供一種致動器，係構成為能夠在軸方向上移動桿且在圓周方向上旋轉，並且容易組裝。 [解決手段]　致動器(100)具備：缸體(102)；活塞(104)，係可滑動地容納在缸體(102)中；桿(106)，係從活塞(104)延伸並向缸體(102)的外部突出；旋轉驅動源，係與桿(106)同軸並且用於旋轉驅動前述桿；以及支撐部(108)，係將桿(106)支撐為旋轉自如。支撐部(108)構成為允許桿(106)的中心軸相對於該支撐部(108)的中心軸偏移。[Problem] The present invention provides an actuator which can move a rod in an axial direction and rotate in a circumferential direction and is easy to assemble. [Solution] An actuator (100) includes: a cylinder (102); a piston (104) slidably accommodated in the cylinder (102); and a rod (106) extending from the piston (104) toward The cylinder (102) protrudes from the outside; a rotational drive source is coaxial with the rod (106) and is used to rotationally drive the rod; and a support part (108) supports the rod (106) rotatably. The support portion (108) is configured to allow the central axis of the rod (106) to be offset with respect to the central axis of the support portion (108).

Description

致動器actuator

本發明有關致動器。 本申請案係主張基於2020年1月6日申請之日本專利申請第2020-000442號的優先權。該日本申請案的全部內容係藉由參考而援用於本說明書中。The present invention relates to actuators. This application claims priority based on Japanese Patent Application No. 2020-000442 filed on January 6, 2020. The entire contents of the Japanese application are incorporated herein by reference.

專利文獻1揭示了流體壓致動器，係將流體作為工作媒體並在軸方向上使桿滑動。該流體壓致動器構成為藉由從旋轉驅動經由帶體傳遞之驅動力使桿亦在圓周方向上旋轉。 [先前技術文獻]Patent Document 1 discloses a fluid pressure actuator that slides a rod in the axial direction using a fluid as a working medium. The fluid pressure actuator is configured to also rotate the rod in the circumferential direction by the driving force transmitted from the rotational drive through the belt body. [Prior Art Literature]

[專利文獻1] 日本特開2017-133593號公報[Patent Document 1] Japanese Patent Laid-Open No. 2017-133593

[發明所欲解決之問題][Problems to be Solved by Invention]

專利文獻1中揭示之致動器通常難以組裝，即使組裝，活塞亦可能會咬合(接觸)缸體。The actuator disclosed in Patent Document 1 is generally difficult to assemble, and even if assembled, the piston may bite (contact) the cylinder.

本發明係鑑於該種狀況而完成者，其一態樣的示例性目的之一係提供一種致動器，係構成為能夠在軸方向上移動桿且在圓周方向上旋轉，並且容易組裝。 [解決問題之技術手段]The present invention has been made in view of such a situation, and an exemplary object of one aspect of the present invention is to provide an actuator which can move a rod in an axial direction and rotate in a circumferential direction and is easy to assemble. [Technical means to solve problems]

為了解決上述課題，本發明的一實施形態之致動器具備：缸體；活塞，係可滑動地容納在缸體中；桿，係從活塞延伸並向缸體的外部突出；旋轉驅動源，係具有與桿同軸之旋轉軸並且用於旋轉驅動桿；以及支撐部，係將桿支撐為旋轉自如。支撐部構成為允許桿的中心軸相對於該支撐部的中心軸偏移。In order to solve the above-mentioned problems, an actuator according to an embodiment of the present invention includes: a cylinder; a piston slidably accommodated in the cylinder; a rod extending from the piston and protruding to the outside of the cylinder; and a rotational drive source, The system has a rotating shaft coaxial with the rod and is used to rotate the driving rod; and a support portion supports the rod to be rotatable. The support portion is configured to allow the center axis of the rod to be offset with respect to the center axis of the support portion.

另外，在方法、裝置、系統等之間相互轉換而得之以上構成要件的任意組合以及本發明的構成要件或表述，亦作為本發明的實施形態係有效。 [發明之效果]In addition, any combination of the above constituent elements obtained by mutual conversion between methods, apparatuses, systems, etc., and the constituent elements or expressions of the present invention are also effective as embodiments of the present invention. [Effect of invention]

根據本發明，係能夠提供一種致動器，前述致動器係構成為能夠在軸方向上移動桿且在圓周方向上旋轉，並且容易組裝。According to the present invention, it is possible to provide an actuator that can move a rod in an axial direction and rotate in a circumferential direction and is easy to assemble.

以下，基於較佳實施形態並參考圖示來說明本發明。在各圖示中顯示出之相同或等同之構成要件、構件、處理中標註同一符號並適當地省略重複之說明。又，實施形態係並非限定本發明之示例，並且在實施形態中記述之所有特徵和其組合未必係本發明的本質者。Hereinafter, the present invention will be described based on preferred embodiments with reference to the drawings. The same or equivalent constituent elements, members, and processes shown in the respective drawings are denoted by the same symbols, and overlapping explanations are appropriately omitted. In addition, the embodiment is not an example to limit the present invention, and all the features and combinations described in the embodiment are not necessarily essential to the present invention.

(第1實施形態) 圖1係示意性地顯示出第1實施形態之致動器100之圖。致動器100係將流體作為工作媒體之流體壓力致動器。以下，例示出將空氣作為工作媒體之情況。(first embodiment) FIG. 1 is a diagram schematically showing an actuator 100 according to the first embodiment. The actuator 100 is a fluid pressure actuator using fluid as a working medium. Hereinafter, the case where air is used as a working medium is exemplified.

致動器100具備缸體102、活塞104、桿106、支撐部108、壓力調整部110、旋轉驅動源112以及控制器114。The actuator 100 includes a cylinder 102 , a piston 104 , a rod 106 , a support portion 108 , a pressure adjustment portion 110 , a rotational drive source 112 , and a controller 114 .

以下，將與缸體102的中心軸平行之方向設為軸方向，將沿以缸體102的中心軸為中心且與該中心軸垂直之圓的圓周的方向設為圓周方向來進行說明。Hereinafter, the direction parallel to the central axis of the cylinder block 102 is referred to as the axial direction, and the direction along the circumference of a circle with the central axis of the cylinder block 102 as the center and perpendicular to the central axis is referred to as the circumferential direction.

缸體102包括筒部116、底部118以及蓋殼部120。筒部116的中空部116a具有圓形截面。上述缸體102的中心軸具體係指筒部116的中空部116a的中心軸。筒部116的外形並沒有特別限定，例如具有四角形之截面。底部118封閉筒部116的一端(圖1中之左端)，而蓋殼部120封閉筒部116的另一端(圖1中之右端)。底部118和蓋殼部120可以分別與筒部116一體形成，亦可以在與筒部116分體形成的基礎上與筒部116結合。在蓋殼部120形成有在軸方向上貫穿蓋殼部120之桿貫穿孔120a。The cylinder block 102 includes a cylindrical portion 116 , a bottom portion 118 and a cover case portion 120 . The hollow portion 116a of the cylindrical portion 116 has a circular cross section. Specifically, the central axis of the cylinder block 102 refers to the central axis of the hollow portion 116 a of the cylindrical portion 116 . The outer shape of the cylindrical portion 116 is not particularly limited, and for example, it has a quadrangular cross-section. The bottom portion 118 closes one end (the left end in FIG. 1 ) of the cylindrical portion 116 , and the cover portion 120 closes the other end (the right end in FIG. 1 ) of the cylindrical portion 116 . The bottom portion 118 and the cover case portion 120 may be formed integrally with the cylindrical portion 116 respectively, or may be combined with the cylindrical portion 116 on the basis of being formed separately from the cylindrical portion 116 . The cover part 120 is formed with a rod penetration hole 120 a that penetrates the cover part 120 in the axial direction.

活塞104容納在缸體102的內部。活塞104包括：圓柱狀之第1活塞頭122；圓柱狀之第2活塞頭124；以及連結部126，係連結第1活塞頭122和第2活塞頭124。連結部126可以與第1活塞頭122和第2活塞頭124一體形成，亦可以在與第1活塞頭122和第2活塞頭124中之至少一個分體形成的基礎上進行結合。活塞104以第1活塞頭122位於底部118側，第2活塞頭124位於蓋殼部120側之方式容納在缸體102中。The piston 104 is accommodated inside the cylinder 102 . The piston 104 includes: a cylindrical first piston head 122 ; a cylindrical second piston head 124 ; and a connecting portion 126 for connecting the first piston head 122 and the second piston head 124 . The connecting portion 126 may be integrally formed with the first piston head 122 and the second piston head 124 , or may be formed separately from at least one of the first piston head 122 and the second piston head 124 and combined. The piston 104 is accommodated in the cylinder 102 such that the first piston head 122 is positioned on the bottom 118 side and the second piston head 124 is positioned on the cover portion 120 side.

藉由活塞104，缸體102內的空間區劃為第1缸體室128和第2缸體室130。前述第1缸體室128相對於活塞104(具體而言，第1活塞頭122)位於與桿106相反之一側(亦即，底部118側)，前述第2缸體室130相對於活塞104(具體而言，第2活塞頭124)位於桿106側(亦即，蓋殼部120側)。在筒部116形成有第1端口132和第2端口134，前述第1端口132用於向第1缸體室128供排壓縮氣體，第2端口134用於向第2缸體室130供排壓縮氣體。The space in the cylinder 102 is divided into a first cylinder chamber 128 and a second cylinder chamber 130 by the piston 104 . The first cylinder chamber 128 is located on the opposite side of the rod 106 (ie, the bottom 118 side) with respect to the piston 104 (specifically, the first piston head 122 ), and the second cylinder chamber 130 is located on the side of the piston 104 (Specifically, the second piston head 124) is located on the side of the rod 106 (that is, on the side of the cover portion 120). A first port 132 and a second port 134 are formed in the cylindrical portion 116 . The first port 132 is for supplying and discharging compressed gas to the first cylinder chamber 128 , and the second port 134 is for supplying and discharging the compressed gas to the second cylinder chamber 130 . compressed gas.

在第1活塞頭122的外周面122a設置有作為靜壓空氣軸承之空氣墊162。在空氣墊162設置有未圖示之進氣孔。經由該進氣孔，從未圖示之進氣系統供給之壓縮空氣供給到第1間隙136，前述第1間隙136係筒部116的內周面116b與第1活塞頭122的外周面122a之間之間隙。藉此，在第1間隙136形成有高壓氣體層，並且空氣墊162以及第1活塞頭122從缸體102浮出。 An air pad 162 serving as a hydrostatic air bearing is provided on the outer peripheral surface 122a of the first piston head 122 . The air cushion 162 is provided with an air intake hole (not shown). Through the air intake hole, compressed air supplied from an air intake system (not shown) is supplied to the first gap 136, which is the space between the inner peripheral surface 116b of the cylindrical portion 116 and the outer peripheral surface 122a of the first piston head 122. gap between. Thereby, a high-pressure gas layer is formed in the first gap 136 , and the air cushion 162 and the first piston head 122 are raised from the cylinder 102 .

桿106係細長構件，係插穿桿貫穿孔120a，並且一端連接到活塞104，而另一端向缸體102的外部突出。桿106可以與活塞104一體形成，亦可以在與活塞104分體形成的基礎上與活塞104結合。桿106具有方形形狀(例如矩形)之截面。 The rod 106 is an elongated member which is inserted through the rod penetration hole 120 a, and is connected to the piston 104 at one end and protrudes to the outside of the cylinder 102 at the other end. The rod 106 may be integrally formed with the piston 104 , or may be combined with the piston 104 on the basis of being formed separately from the piston 104 . The rod 106 has a square-shaped (eg, rectangular) cross-section.

壓力調整部110調整第1缸體室128內之壓力和第2缸體室130內之壓力。壓力調整部110經由第1端口132將藉由伺服閥進行減壓調整之空氣供給到第1缸體室128，並且經由第2端口134將恆定壓力之空氣供給到第2缸體室130。另外，壓力調整部110並不限定於該種構成，例如，亦可以構成為藉由伺服閥來分別調整供給到第1缸體室128之空氣的壓力和供給到第2缸體室130之空氣的壓力。 The pressure adjustment unit 110 adjusts the pressure in the first cylinder chamber 128 and the pressure in the second cylinder chamber 130 . The pressure adjustment unit 110 supplies the air pressure-reduced by the servo valve to the first cylinder chamber 128 through the first port 132 , and supplies the air of constant pressure to the second cylinder chamber 130 through the second port 134 . In addition, the pressure adjustment unit 110 is not limited to such a configuration, and may be configured to adjust the pressure of the air supplied to the first cylinder chamber 128 and the air supplied to the second cylinder chamber 130 , for example, by a servo valve, respectively. pressure.

旋轉驅動源112係使桿106在圓周方向上在既定角度範圍內轉動之驅動源。旋轉驅動源112特別地具有與旋轉驅動對象之桿106的中心軸同軸之旋轉軸，從而直接轉動桿106而不經由傳遞機構。藉此，如專利文獻1中記載之習知的致動器那般，與旋轉驅動源之旋轉利用帶體傳遞從而使桿旋轉之情況相比，桿106在旋轉方向上之定位精度提高，並且響應性亦提高。其中，前述旋轉驅動源具有與桿的中心軸不同軸之旋轉軸。 The rotational drive source 112 is a drive source that rotates the rod 106 in the circumferential direction within a predetermined angular range. The rotational drive source 112 particularly has a rotational axis coaxial with the central axis of the rod 106 of the rotationally driven object, so that the rod 106 is directly rotated without going through a transmission mechanism. As a result, as in the conventional actuator described in Patent Document 1, the positioning accuracy of the lever 106 in the rotational direction is improved compared to the case where the rotation of the rotational drive source is transmitted by the belt to rotate the lever, and Responsiveness is also improved. Wherein, the aforementioned rotational drive source has a rotational axis that is not coaxial with the central axis of the rod.

在圖示例中，旋轉驅動源112係直驅馬達，並且包括轉子144以及環繞轉子144之定子146。轉子144係 磁體，並且固定在第1環繞構件166之外周。第1環繞構件166具有：內周面166a，係具有與桿106相對應之多角形狀截面；以及外周面166b，係具有圓形截面。第1環繞構件166環繞桿106並且固定在桿106。在定子146上以在徑方向上與轉子144對向之方式設置有線圈160。藉由向線圈160供給驅動電流，在線圈160之周圍產生磁場，並且轉子144以及桿106、活塞104藉由與和線圈160對向之轉子(磁體)144之間之電磁作用而旋轉驅動。另外，第1環繞構件166與桿106分體形成，但是第1環繞構件166亦可以與桿106一體形成。亦即，第1環繞構件166可以係桿106之一部份。 In the illustrated example, the rotational drive source 112 is a direct drive motor and includes a rotor 144 and a stator 146 surrounding the rotor 144 . Rotor 144 series The magnet is fixed to the outer periphery of the first surrounding member 166 . The first surrounding member 166 has an inner peripheral surface 166a having a polygonal cross-section corresponding to the rod 106, and an outer peripheral surface 166b having a circular cross-section. The first surrounding member 166 surrounds the rod 106 and is fixed to the rod 106 . A coil 160 is provided on the stator 146 so as to face the rotor 144 in the radial direction. By supplying a driving current to the coil 160, a magnetic field is generated around the coil 160, and the rotor 144, the rod 106, and the piston 104 are rotationally driven by electromagnetic action with the rotor (magnet) 144 opposed to the coil 160. In addition, the first surrounding member 166 is formed separately from the rod 106 , but the first surrounding member 166 may be formed integrally with the rod 106 . That is, the first surrounding member 166 may tie a portion of the rod 106 .

支撐部108設置在缸體102與旋轉驅動源112之間。支撐部108將桿106在軸方向上支撐為滑動自如，並且在圓周方向上支撐為旋轉自如。支撐部108包括：殼體148；容納在殼體148中之一軸承150；以及內嵌在軸承150中並且環繞桿106之第2環繞構件168。 The support portion 108 is provided between the cylinder block 102 and the rotational drive source 112 . The support portion 108 supports the rod 106 to be slidable in the axial direction and rotatably supported in the circumferential direction. The support portion 108 includes: a housing 148 ; a bearing 150 received in the housing 148 ; and a second surrounding member 168 embedded in the bearing 150 and surrounding the rod 106 .

殼體148係筒狀構件，並且其中空部148a具有圓形截面。殼體148的外形並沒有特別限定，但具有四角形之截面。殼體148的中空部148a連接到筒部116，使得其中空部148a與缸體102的中心軸同軸。 The housing 148 is a cylindrical member, and the hollow portion 148a thereof has a circular cross-section. The outer shape of the casing 148 is not particularly limited, but has a quadrangular cross-section. The hollow portion 148 a of the housing 148 is connected to the cylindrical portion 116 such that the hollow portion 148 a thereof is coaxial with the central axis of the cylinder block 102 .

軸承150在圖示例中係滾珠軸承，並且配置在殼體148的內側，使得其中心軸與缸體102的中心軸同軸。 The bearing 150 is a ball bearing in the illustrated example, and is arranged inside the housing 148 so that its central axis is coaxial with the central axis of the cylinder block 102 .

第2環繞構件168具有：內周面168a，係具有與桿106相對應之多角形狀截面；以及外周面168b，係具有與軸承150的內圈150a相對應之圓形截面。在桿106的外周面106a上，以與第2環繞構件168的內周面168a對向之方式設置有作為靜壓空氣軸承之空氣墊164。在空氣墊164設置有未圖示之進氣孔。經由該進氣孔，從未圖示之進氣系統供給之壓縮空氣供給到第2間隙138，前述第2間隙138係第2環繞構件168的內周面168a與桿106的外周面106a之間之間隙。藉此，在第2間隙138形成有高壓氣體層，並且空氣墊164以及桿106從第2環繞構件168浮出。另外，第2環繞構件168經由形成在第2間隙138中之高壓氣體層從桿106接受旋轉力，並且以與桿106非接觸之狀態與桿106一起旋轉。The second surrounding member 168 has an inner peripheral surface 168a having a polygonal cross-section corresponding to the rod 106, and an outer peripheral surface 168b having a circular cross-section corresponding to the inner ring 150a of the bearing 150. On the outer peripheral surface 106a of the rod 106, an air cushion 164 serving as a hydrostatic air bearing is provided so as to face the inner peripheral surface 168a of the second surrounding member 168. The air cushion 164 is provided with an air intake hole (not shown). Through this air intake hole, compressed air supplied from an air intake system (not shown) is supplied to the second gap 138, which is between the inner peripheral surface 168a of the second surrounding member 168 and the outer peripheral surface 106a of the rod 106 the gap. Thereby, a high-pressure gas layer is formed in the second gap 138 , and the air cushion 164 and the rod 106 are floated from the second surrounding member 168 . In addition, the second surrounding member 168 receives rotational force from the rod 106 via the high-pressure gas layer formed in the second gap 138, and rotates together with the rod 106 in a non-contact state with the rod 106.

活塞104和桿106經由作為靜壓空氣軸承之空氣墊162和空氣墊164，以與缸體102和支撐部108不接觸之狀態，在軸方向(圖1中之左右方向)上支撐為滑動自如。藉此，活塞104和桿106之移動變得平滑，並且高精度之定位和力之控制成為可能。另外，在圖1中，第1間隙136和第2間隙138被放大，但實際上，第1間隙136和第2間隙138係約例如幾微米。The piston 104 and the rod 106 are supported slidably in the axial direction (the left-right direction in FIG. 1 ) in a state that they do not contact the cylinder block 102 and the support portion 108 via the air pad 162 and the air pad 164 as hydrostatic air bearings. . Thereby, the movement of the piston 104 and the rod 106 becomes smooth, and high-precision positioning and force control become possible. In addition, in FIG. 1, although the 1st gap 136 and the 2nd gap 138 are enlarged, in reality, the 1st gap 136 and the 2nd gap 138 are about several micrometers, for example.

接著，雖然省略了圖示，但本實施形態之致動器100具備位置檢測部，前述位置檢測部用於檢測桿106或活塞104之軸方向位置和旋轉方向位置。位置檢測部以既定周期檢測桿106或活塞104之軸方向位置和旋轉方向位置，並將表示檢測到之軸方向位置的軸方向位置訊號和表示檢測到之旋轉方向位置的旋轉方向位置訊號輸出至控制器114。Next, although illustration is omitted, the actuator 100 of the present embodiment includes a position detection unit for detecting the axial position and the rotational direction position of the rod 106 or the piston 104 . The position detection section detects the axial position and the rotational position of the rod 106 or the piston 104 at a predetermined cycle, and outputs an axial position signal indicating the detected axial position and a rotational direction position signal indicating the detected rotational position to controller 114.

控制器114將移動指令輸出至壓力調整部110，使得軸方向位置訊號和來自外部之位置指令值之間沒有差分。壓力調整部110根據該移動指令驅動伺服閥，並且控制桿106之軸方向上之定位。The controller 114 outputs the movement command to the pressure adjustment unit 110 so that there is no difference between the axis direction position signal and the position command value from the outside. The pressure adjusting part 110 drives the servo valve according to the movement command, and controls the positioning of the rod 106 in the axial direction.

又，控制器114將轉動指令輸出至旋轉驅動源112，使得旋轉方向位置訊號和來自外部之位置指令值之間沒有差分。旋轉驅動源112根據該轉動指令進行驅動，並且控制桿106之旋轉方向上之定位。In addition, the controller 114 outputs the rotation command to the rotation drive source 112 so that there is no difference between the rotation direction position signal and the position command value from the outside. The rotational drive source 112 is driven according to the rotational command, and controls the positioning of the lever 106 in the rotational direction.

另外，當控制器114進行負載控制時，將負載指令輸出至壓力調整部110，使得由第1缸體室128和第2缸體室130之間之壓力差產生之負載與來自外部之負載指令之間沒有差分。壓力調整部110根據該負載指令驅動伺服閥，並且進行向桿106施加負載(力)之負載控制。In addition, when the controller 114 performs load control, a load command is output to the pressure adjustment unit 110 so that the load generated by the pressure difference between the first cylinder chamber 128 and the second cylinder chamber 130 and the load command from the outside There is no difference between. The pressure adjustment unit 110 drives the servo valve according to the load command, and performs load control for applying a load (force) to the rod 106 .

以上係致動器100的基本構成。接著，對支撐部108的構成進行更詳細說明。The above is the basic configuration of the actuator 100 . Next, the configuration of the support portion 108 will be described in more detail.

實際上，將支撐部108亦即軸承150的中心軸組裝成與缸體102的中心軸同軸並不容易。中空部148a必須以具有完全的圓形截面之方式形成殼體148，殼體148(更具體而言，中空部148a)的中心軸必須以與缸體102的中心軸同軸之方式將殼體148連接到缸體102，而且，軸承150的中心軸必須以與殼體148和缸體102的中心軸同軸之方式配置軸承150。實際上，該些之中可能會產生誤差，其結果，可能會發生活塞104咬合(接觸)缸體102之情況。Actually, it is not easy to assemble the support portion 108 , that is, the central axis of the bearing 150 to be coaxial with the central axis of the cylinder block 102 . The hollow portion 148a must form the housing 148 in such a manner as to have a completely circular cross-section, and the central axis of the housing 148 (more specifically, the hollow portion 148a ) must be coaxial with the central axis of the cylinder 102 to connect the housing 148 Attached to the cylinder 102 , and the central axis of the bearing 150 must be arranged in such a manner as to be coaxial with the housing 148 and the central axis of the cylinder 102 . In practice, errors may occur among these, and as a result, the piston 104 may engage (contact) the cylinder 102 .

另一方面，在如專利文獻1中之記載之習知的致動器中，由於具有與桿不同軸之旋轉軸之旋轉驅動源之旋轉利用帶體傳遞至桿，因此桿藉由帶體沿與軸方向正交之方向被拉動。為了抵抗沿與軸方向正交之方向拉動之力，要求習知的致動器在支撐桿的支撐部中具有高剛性。相對於此，在本實施形態中，如上所述，由於藉由具有與桿106同軸之旋轉軸之旋轉驅動源112來旋轉桿106，因此桿106不會沿與軸方向正交之方向被拉動。因此，支撐部108所需之剛性相對較低。On the other hand, in the conventional actuator as described in Patent Document 1, since the rotation of the rotational drive source having the rotation axis not coaxial with the rod is transmitted to the rod by the belt, the rod is moved along the belt by the belt. The direction orthogonal to the axis direction is pulled. In order to resist the pulling force in the direction orthogonal to the axial direction, the conventional actuator is required to have high rigidity in the support portion of the support rod. On the other hand, in the present embodiment, as described above, since the rod 106 is rotated by the rotational drive source 112 having the rotation shaft coaxial with the rod 106, the rod 106 is not pulled in the direction orthogonal to the axial direction. . Therefore, the rigidity required for the support portion 108 is relatively low.

因此，在本實施形態中，支撐部108不具備複數個軸承150，而是如上所述，特意僅具備一軸承150。而且，軸承150構成為在設計上不損害作為軸承之功能之範圍內，允許桿106的中心軸相對於該軸承150的中心軸偏移。在此，所謂桿106的中心軸相對於軸承150的中心軸偏移係指，桿106在徑方向上稍微平行移動，並且桿106的中心軸與軸承150的中心軸成為不一致(不重疊)之狀態，或者桿106稍微傾斜，並且桿106的中心軸相對於軸承150的中心軸成為傾斜之狀態。允許偏移亦可以例如藉由特意相對增加軸承150的內部間隙來實現。藉此，即使軸承150的中心軸相對於殼體148和缸體102的中心軸稍微偏移，亦可以藉由軸承150允許偏移而被吸收，並且防止活塞104和桿106被咬住。又，致動器100的組裝變得比較容易，並且能夠降低組裝成本。Therefore, in the present embodiment, the support portion 108 is not provided with a plurality of bearings 150, but is provided with only one bearing 150 as described above. Further, the bearing 150 is configured to allow the center axis of the rod 106 to be offset with respect to the center axis of the bearing 150 within a range that does not impair the function as a bearing in design. Here, the offset of the central axis of the rod 106 with respect to the central axis of the bearing 150 means that the rod 106 moves slightly in parallel in the radial direction, and the central axis of the rod 106 and the central axis of the bearing 150 do not coincide (do not overlap) with each other. state, or the rod 106 is slightly inclined and the central axis of the rod 106 is inclined with respect to the central axis of the bearing 150 . Allowing the deflection can also be achieved, for example, by intentionally increasing the internal clearance of the bearing 150 relatively. Thereby, even if the center axis of the bearing 150 is slightly offset with respect to the center axis of the housing 148 and the cylinder block 102, the offset can be absorbed by the bearing 150, and the piston 104 and the rod 106 are prevented from being caught. Moreover, the assembly of the actuator 100 becomes relatively easy, and the assembly cost can be reduced.

如上構成之致動器100例如在半導體晶片之晶片接合製程和安裝製程等中使用。具體而言，在半導體製造裝置中，將在末端安裝有保持半導體晶片之工具之桿106沿軸方向滑動(移動)。或者，將桿106以所需之角度範圍轉動。藉此，能夠將半導體晶片安裝在引線框或基板等安裝面上。The actuator 100 constructed as described above is used in, for example, a wafer bonding process and a mounting process of semiconductor wafers. Specifically, in a semiconductor manufacturing apparatus, the rod 106 to which a tool for holding a semiconductor wafer is attached at the end is slid (moved) in the axial direction. Alternatively, the lever 106 is rotated through the desired angular range. Thereby, the semiconductor chip can be mounted on a mounting surface such as a lead frame or a substrate.

(第2實施形態) 圖2係示意性地顯示出第2實施形態之致動器200之圖。圖2對應於圖1。以下，以與第1實施形態之致動器100的不同點為中心來說明致動器200。(Second Embodiment) FIG. 2 is a diagram schematically showing an actuator 200 according to the second embodiment. FIG. 2 corresponds to FIG. 1 . Hereinafter, the actuator 200 will be described focusing on the differences from the actuator 100 of the first embodiment.

致動器200具備缸體102、活塞104、桿106、支撐部208、壓力調整部110、旋轉驅動源112以及控制器114。亦即，在本實施形態中，代替支撐部108而設置有支撐部208。又，在本實施形態中，桿106具有圓形截面。The actuator 200 includes a cylinder 102 , a piston 104 , a rod 106 , a support portion 208 , a pressure adjustment portion 110 , a rotational drive source 112 , and a controller 114 . That is, in this embodiment, the support part 208 is provided in place of the support part 108 . Moreover, in this embodiment, the rod 106 has a circular cross section.

支撐部208將桿106以非接觸狀態在軸方向上支撐為滑動自如，並且在圓周方向上支撐為旋轉自如，並且支撐為允許桿106的中心軸相對於該支撐部208的中心軸偏移。在圖示例中，支撐部208包括：殼體148；磁體252，係固定在桿106的外周面；以及複數個線圈254，係以環繞磁體252之方式設置在殼體148，並且藉由磁力支撐桿106。另外，亦可以在桿106的外周面設置複數個線圈，並且以環繞複數個線圈之方式在殼體148的內周面固定磁體。The support portion 208 supports the rod 106 slidably in the axial direction in a non-contact state, rotatably in the circumferential direction, and allows the center axis of the rod 106 to be displaced relative to the center axis of the support portion 208 . In the illustrated example, the support portion 208 includes: a housing 148; a magnet 252, which is fixed on the outer peripheral surface of the rod 106; Support rod 106 . In addition, a plurality of coils may be provided on the outer peripheral surface of the rod 106, and the magnets may be fixed on the inner peripheral surface of the housing 148 so as to surround the plurality of coils.

又，支撐部208包括用於測定桿106與殼體148之間之距離之複數個感測器(在圖2中僅顯示出一個感測器)256。複數個感測器256例如在圓周方向上隔著45度配置。複數個感測器256以既定周期測定桿106與殼體148之間之距離，並將測定結果發送至控制器114。 Also, the support portion 208 includes a plurality of sensors (only one sensor is shown in FIG. 2 ) 256 for measuring the distance between the rod 106 and the housing 148 . The plurality of sensors 256 are arranged at intervals of 45 degrees in the circumferential direction, for example. The plurality of sensors 256 measure the distance between the rod 106 and the housing 148 at a predetermined period, and transmit the measurement result to the controller 114 .

基於測定結果，控制器114控制流過線圈之電流之大小和方向，以使桿106固定在桿106的中心軸與支撐部208和缸體102的中心軸重疊之位置。由於該種控制方法係已知者，因此將省略進一步之說明。 Based on the measurement results, the controller 114 controls the magnitude and direction of the current flowing through the coil so that the rod 106 is fixed at a position where the central axis of the rod 106 overlaps the central axis of the support portion 208 and the cylinder 102 . Since such a control method is known, further description will be omitted.

另外，支撐部208並不限定於該種構成。支撐部208可以以非接觸之方式支撐桿106，例如，可以構成為藉由與桿106之間形成靜壓空氣軸承並以非接觸之方式支撐桿106。 In addition, the support part 208 is not limited to this kind of structure. The support portion 208 may support the rod 106 in a non-contact manner, for example, may be configured to support the rod 106 in a non-contact manner by forming a hydrostatic air bearing with the rod 106 .

根據本實施形態之致動器200，係能夠達成與第1實施形態之致動器100相同之效果。 According to the actuator 200 of the present embodiment, the same effects as those of the actuator 100 of the first embodiment can be achieved.

又，在本實施形態中，以非接觸之方式支撐桿106，但是當以非接觸之方式支撐桿106時，如果桿106轉動則其中心軸從支撐部208和缸體102的中心軸偏移。在該狀態下，例如，如果桿106高速旋轉，則桿106振動。另一方面，根據本實施形態，支撐部208控制為將桿106的中心軸固定在與支撐部208以及缸體102的中心軸重疊之位置。亦即，支撐部208控制為抑制桿106的中心軸相對於支撐部208和缸體102的中心軸偏移。此時，桿106的中心軸與支撐部208和缸體102的中心軸之偏移得到抑制。藉此， 例如，即使桿106高速轉動，亦可以抑制桿106振動。換言之，由於抑制了偏移，因此能夠以更高之旋轉速度轉動桿106，亦即，能夠在更短之時間內在旋轉方向上定位。 Also, in this embodiment, the rod 106 is supported in a non-contact manner, but when the rod 106 is supported in a non-contact manner, when the rod 106 rotates, the central axis of the rod 106 is displaced from the central axis of the support portion 208 and the cylinder block 102 . In this state, for example, if the rod 106 rotates at a high speed, the rod 106 vibrates. On the other hand, according to the present embodiment, the support portion 208 is controlled so as to fix the central axis of the rod 106 at a position overlapping the central axis of the support portion 208 and the cylinder 102 . That is, the support portion 208 is controlled so as to suppress the displacement of the central axis of the rod 106 with respect to the central axis of the support portion 208 and the cylinder block 102 . At this time, the deviation between the central axis of the rod 106 and the central axis of the support portion 208 and the cylinder 102 is suppressed. By this, For example, even if the rod 106 is rotated at a high speed, the vibration of the rod 106 can be suppressed. In other words, since the offset is suppressed, the lever 106 can be rotated at a higher rotational speed, that is, can be positioned in the rotational direction in a shorter time.

又，在本實施形態中，活塞104和桿106藉由第1靜壓空氣軸承140和支撐部208在軸方向上支撐為滑動自如。此時，由於在第2間隙138中不需要靜壓流體軸承，因此能夠相應地降低成本。 Furthermore, in the present embodiment, the piston 104 and the rod 106 are slidably supported in the axial direction by the first hydrostatic air bearing 140 and the support portion 208 . In this case, since the hydrostatic bearing is not required in the second gap 138, the cost can be reduced accordingly.

以上，基於實施形態對本發明進行了說明。該實施形態係示例，並且本技術領域具有普遍知識者應理解，對於該些各構成要件和各處理過程之組合，可以有各種變形例，並且該種變形例亦在本發明的範圍內。 The present invention has been described above based on the embodiments. This embodiment is an example, and it should be understood by those skilled in the art that various modifications are possible for the combination of the constituent elements and the processing procedures, and such modifications are also within the scope of the present invention.

100,200:致動器 100,200: Actuator

102:缸體 102: Cylinder block

104:活塞 104: Piston

106:桿 106: Rod

112:旋轉驅動源 112: Rotary drive source

108,208:支撐部 108,208: Support Department

150:軸承(滾珠軸承) 150: Bearing (ball bearing)

[圖1]係概略地顯示出第1實施形態之致動器之圖。 [圖2]係概略地顯示出第2實施形態之致動器之圖。Fig. 1 is a diagram schematically showing the actuator of the first embodiment. [ Fig. 2 ] A diagram schematically showing the actuator of the second embodiment.

100:致動器 100: Actuator

102:缸體 102: Cylinder block

104:活塞 104: Piston

106:桿 106: Rod

108:支撐部 108: Support Department

110:壓力調整部 110: Pressure adjustment part

112:旋轉驅動源 112: Rotary drive source

114:控制器 114: Controller

116:筒部 116: Tube

116a:中空部 116a: hollow part

116b:內周面 116b: inner peripheral surface

118:底部 118: Bottom

120:蓋殼部 120: Cover part

120a:桿貫穿孔 120a: Rod through hole

122:第1活塞頭 122: 1st piston head

122a:外周面 122a: Peripheral surface

124:第2活塞頭 124: 2nd piston head

126:連結部 126: Links

128:第1缸體室 128: 1st Cylinder Chamber

130:第2缸體室 130: 2nd Cylinder Chamber

132:第1端口 132: port 1

134:第2端口 134: port 2

136:第1間隙 136: 1st gap

138:第2間隙 138: 2nd gap

140:第1靜壓空氣軸承 140: 1st hydrostatic air bearing

144:轉子 144: Rotor

146:定子 146: Stator

148:殼體 148: Shell

148a:中空部 148a: hollow part

150:軸承 150: Bearing

150a:內圈 150a: inner ring

160:線圈 160: Coil

162:空氣墊 162: Air Cushion

164:空氣墊 164: Air Cushion

166:第1環繞構件 166: 1st Surrounding Member

166a:內周面 166a: Inner peripheral surface

166b:外周面 166b: Peripheral surface

168:第2環繞構件 168: 2nd Surrounding Member

168a:內周面 168a: Inner perimeter

168b:外周面 168b: Peripheral surface

Claims (5)

一種致動器，其特徵為係具備： 缸體； 活塞，係可滑動地容納在前述缸體中； 桿，係從前述活塞延伸並向前述缸體的外部突出； 旋轉驅動源，係用於旋轉驅動前述桿，並且具有與前述桿同軸之旋轉軸；以及 支撐部，係將前述桿支撐為旋轉自如， 前述支撐部係構成為允許前述桿的中心軸相對於前述支撐部的中心軸偏移。An actuator, characterized in that the system has: cylinder; a piston, slidably received in the aforementioned cylinder; a rod extending from the aforesaid piston and protruding outside the aforesaid cylinder; a rotational drive source for rotationally driving the rod, and having a rotating shaft coaxial with the rod; and The support part supports the rod to be rotatable, The said support part is comprised so that the center axis|shaft of the said rod may be offset with respect to the center axis of the said support part. 如請求項1所述之致動器，其中 前述支撐部係以非接觸方式支撐前述桿，並且被控制成抑制前述桿的中心軸相對於前述支撐部的中心軸偏移。The actuator of claim 1, wherein The support portion supports the rod in a non-contact manner, and is controlled so as to suppress the central axis of the rod from being displaced relative to the central axis of the support portion. 如請求項2所述之致動器，其中 前述支撐部係藉由磁力而以非接觸方式支撐前述桿，並且被控制成抑制前述桿的中心軸相對於前述支撐部的中心軸偏移。The actuator of claim 2, wherein The support portion supports the rod in a non-contact manner by magnetic force, and is controlled so as to prevent the central axis of the rod from being displaced relative to the central axis of the support portion. 如請求項1所述之致動器，其中 前述支撐部係包括軸承，前述軸承構成為以允許前述桿的中心軸相對於前述支撐部的中心軸偏移之方式支撐前述桿。The actuator of claim 1, wherein The support portion includes a bearing, and the bearing is configured to support the rod so as to allow the central axis of the rod to be displaced relative to the central axis of the support portion. 如請求項4所述之致動器，其中 前述軸承係一滾珠軸承。The actuator of claim 4, wherein The aforementioned bearing is a ball bearing.
TW109145227A 2020-01-06 2020-12-21 actuator TWI763196B (en)

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