TWI749507B - Piezoelectric vibration device - Google Patents

Piezoelectric vibration device Download PDF

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TWI749507B
TWI749507B TW109111467A TW109111467A TWI749507B TW I749507 B TWI749507 B TW I749507B TW 109111467 A TW109111467 A TW 109111467A TW 109111467 A TW109111467 A TW 109111467A TW I749507 B TWI749507 B TW I749507B
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piezoelectric
piezoelectric ceramic
ceramic body
rigid structure
opening
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TW109111467A
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TW202139583A (en
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張鳴助
鄭宇琪
李政達
謝祥瑋
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詠業科技股份有限公司
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Abstract

A piezoelectric vibration device, including a rigid structure with a first surface and a second surface opposite to the first surface, and a piezoelectric ceramic structure bonded on the second surface through adhesive, wherein the piezoelectric ceramic structure is provided with at least a hole to increase the amplitude of first surface by adjusting the shape or size of the hole, and the hole area of piezoelectric ceramic structure is smaller or equal to half the total area of adhesive surface between the piezoelectric ceramic structure and the rigid structure plus the hole area.

Description

壓電振動裝置 Piezoelectric vibration device

本發明大體上與一種壓電振動裝置有關，更具體言之，其係關於一種壓電陶瓷體具有開孔的壓電振動裝置，該壓電陶瓷體具有至少一開孔，經由調整該開孔之形狀或尺寸，使該壓電陶瓷體與該剛性結構體所形成之壓電振動裝置提高振福。 The present invention is generally related to a piezoelectric vibrating device, and more specifically, it relates to a piezoelectric vibrating device with a piezoelectric ceramic body having an opening. The piezoelectric ceramic body has at least one opening. The shape or size of the piezoelectric vibrating device made of the piezoelectric ceramic body and the rigid structure improves the vibration.

壓電材料由於擁有正壓電和逆壓電效應的特殊性質，其可以將電能與機械能互相轉換。若在極化後之壓電體兩端加上與極化方向相同之直流電場，則極化強度會增強，正負電荷間的距離就會增大，壓電體即沿極化方向伸張，而其材料的形變量會依電場的大小而改變。反之，若施加與極化方向相反之直流電場，則壓電體會沿極化方向收縮。若所加入者為交流電場，則壓電體的形變方向會隨著交流電場的極性改變而改變。故此效應是將電能轉換成機械能。以逆壓電效應為例，其可將輸入壓電材料的電子訊號轉換成壓電材料的機械位移或是產生超聲波，如此性質可應用在各種需要產生高功率或低功率的振動、位移、出力、霧化的產品中，如各式感測器、致動器、振盪機、制振裝置、噴霧器或是超聲波清洗機等。 Piezoelectric materials have the special properties of positive piezoelectric and inverse piezoelectric effects, which can convert electrical energy and mechanical energy into each other. If a DC electric field with the same polarization direction is applied to both ends of the polarized piezoelectric body, the polarization intensity will increase, and the distance between the positive and negative charges will increase, and the piezoelectric body stretches along the polarization direction. The deformation of the material will change according to the magnitude of the electric field. Conversely, if a DC electric field opposite to the polarization direction is applied, the piezoelectric body will shrink along the polarization direction. If the input is an AC electric field, the direction of deformation of the piezoelectric body will change as the polarity of the AC electric field changes. So the effect is to convert electrical energy into mechanical energy. Take the inverse piezoelectric effect as an example. It can convert the electronic signal of the input piezoelectric material into the mechanical displacement of the piezoelectric material or generate ultrasonic waves. This property can be applied to various kinds of vibration, displacement, and output that require high or low power. , Atomized products, such as various sensors, actuators, oscillators, vibration damping devices, sprayers or ultrasonic cleaners, etc.

在上述應用中，壓電材料的共振頻率必須匹配所欲產生振動的結構體的振動頻率，如此才能達到最佳的振動效果。對此，不同的結構體形狀與尺 寸可能會具有不同的應用頻率，如何提供一個簡易的方法來使壓電材料與共振的結構體匹配為本領域的技術人士需要持續研究與開發的。 In the above applications, the resonance frequency of the piezoelectric material must match the vibration frequency of the structure to be vibrated, so as to achieve the best vibration effect. In this regard, different structure shapes and sizes Inches may have different application frequencies. How to provide a simple method to match the piezoelectric material with the resonant structure is the need for those skilled in the art to continue research and development.

為了讓閱者對本創作之面向有基本的了解，以下段落提出了本創作的簡要說明。此概要並非是本發明內容詳盡的綜覽，並未意欲要表明本發明的所有關鍵或必要元件或是要限定本發明之範疇，其訴求僅在於對後續所將探討的本發明細節描述先以簡化的形式提出其中的某些概念。 In order to give readers a basic understanding of the orientation of this creation, the following paragraphs propose a brief description of this creation. This summary is not an exhaustive overview of the content of the present invention. It is not intended to show all the key or essential elements of the present invention or to limit the scope of the present invention. Some of these concepts are presented in a simplified form.

本發明的目的即在於提出一種新穎的壓電振動裝置，其特點在於其壓電陶瓷體上具有開孔來使得壓電陶瓷體的共振頻率與共振的剛性結構體的振動頻率匹配，以增加裝置的振幅與振動效率。 The purpose of the present invention is to provide a novel piezoelectric vibration device, which is characterized in that the piezoelectric ceramic body has openings to match the resonance frequency of the piezoelectric ceramic body with the vibration frequency of the resonant rigid structure to increase the device The amplitude and vibration efficiency.

本發明的面向之一在於提出一種壓電振動裝置，包含一剛性結構體，其具有一第一表面以及與該第一表面相對的一第二表面，以及一壓電陶瓷體，其經由膠材黏合在該剛性結構體的第二表面上，其中該壓電陶瓷體具有至少一開孔，經由調整該開孔之形狀或尺寸以提高該第一表面的振幅，且該壓電陶瓷體之開孔的面積小於等於該壓電陶瓷體與該剛性結構體的貼合面的面積加上該開孔的面積之總面積的50%。 One aspect of the present invention is to provide a piezoelectric vibrating device, including a rigid structure having a first surface and a second surface opposite to the first surface, and a piezoelectric ceramic body, which is made of glue Bonded to the second surface of the rigid structure, wherein the piezoelectric ceramic body has at least one opening, and the shape or size of the opening is adjusted to increase the amplitude of the first surface, and the piezoelectric ceramic body is opened The area of the hole is less than or equal to 50% of the total area of the bonding surface of the piezoelectric ceramic body and the rigid structure plus the area of the opening.

本發明的又一面向在於提出一種具有開孔的壓電振動裝置，其壓電陶瓷體之開孔為圓形、三角形、方形或多邊形。 Another aspect of the present invention is to provide a piezoelectric vibrating device with openings, and the openings of the piezoelectric ceramic body are circular, triangular, square or polygonal.

本發明的又一面向在於提出一種具有剛性結構體的壓電振動裝置，其剛性結構體為圓柱體、多邊形柱體、錐形體或其他形狀。 Another aspect of the present invention is to provide a piezoelectric vibration device with a rigid structure, the rigid structure of which is a cylinder, a polygonal cylinder, a cone or other shapes.

本發明的又一面向在於提出一種具有剛性結構體的壓電振動裝置，其剛性結構體為變幅桿結構，該第一表面為平面、斜面或是球面等形狀。 Another aspect of the present invention is to provide a piezoelectric vibrating device with a rigid structure. The rigid structure is an horn structure, and the first surface is in the shape of a flat surface, an inclined surface, or a spherical surface.

本發明的又一面向在於提出一種具有壓電陶瓷體的壓電振動裝置， 其壓電陶瓷體為多個壓電陶瓷片疊合在一起所構成，其中至少有一個壓電陶瓷體具有開孔。 Another aspect of the present invention is to provide a piezoelectric vibration device with a piezoelectric ceramic body, The piezoelectric ceramic body is composed of a plurality of piezoelectric ceramic sheets stacked together, and at least one piezoelectric ceramic body has an opening.

本發明的這類目的與其他目的，在閱者讀過下文中以多種圖形與繪圖來描述的較佳實施例細節說明後，必然可變得更為明瞭顯見。 Such objects and other objects of the present invention will inevitably become more apparent after readers have read the detailed description of the preferred embodiments described below with various figures and drawings.

100:壓電振動裝置 100: Piezoelectric vibration device

101:剛性結構體 101: rigid structure

101a:第一表面 101a: first surface

101b:第二表面 101b: second surface

103:壓電陶瓷體 103: Piezoelectric ceramic body

103a:壓電陶瓷片 103a: Piezoelectric ceramic sheet

105:膠材 105: plastic

107:開孔 107: Hole

113a:正電極 113a: positive electrode

113b:負電極 113b: negative electrode

200:壓電振動裝置 200: Piezoelectric vibration device

201:剛性結構體 201: rigid structure

201a:第一表面 201a: first surface

203:壓電陶瓷體 203: Piezoelectric ceramic body

207:開孔 207: Hole

300:壓電振動裝置 300: Piezoelectric vibration device

301:剛性結構體 301: rigid structure

303:壓電陶瓷體 303: Piezoelectric ceramic body

307:開孔 307: Hole

400:壓電振動裝置 400: Piezoelectric vibration device

401:剛性結構體 401: rigid structure

403:壓電陶瓷體 403: Piezoelectric ceramic body

407:開孔 407: Hole

500:壓電振動裝置 500: Piezoelectric vibration device

501:剛性結構體 501: rigid structure

503:壓電陶瓷體 503: Piezoelectric ceramic body

507:開孔 507: hole

d:孔徑 d: Aperture

D:直徑 D: diameter

本說明書含有附圖併於文中構成了本說明書之一部分，俾使閱者對本發明實施例有進一步的瞭解。該些圖示係描繪了本創作的一些實施例並連同本文描述一起說明了其原理。在該些圖示中：第1圖為根據本發明實施例中一壓電振動裝置的透視圖；第2圖為根據本發明實施例中一剛性結構體的側視圖；第3圖為根據本發明實施例中一壓電陶瓷體的側視圖；第4圖與第5圖分別為根據本發明實施例中一壓電振動裝置在壓電陶瓷體不具有開孔與具有開孔的情況下的振動頻率對z軸振幅的曲線圖；第6圖為根據本發明另一實施例中一壓電振動裝置的透視圖；第7圖為根據本發明又一實施例中一壓電振動裝置的透視圖；第8圖為根據本發明又一實施例中一壓電振動裝置的透視圖；以及第9圖為根據本發明又一實施例中一壓電振動裝置的透視圖。 This specification contains drawings and constitutes a part of this specification in the text, so that readers have a further understanding of the embodiments of the present invention. These illustrations depict some embodiments of this creation and together with the description in this document, explain its principles. In these figures: Figure 1 is a perspective view of a piezoelectric vibration device according to an embodiment of the present invention; Figure 2 is a side view of a rigid structure according to an embodiment of the present invention; Figure 3 is a perspective view of a rigid structure according to an embodiment of the present invention. A side view of a piezoelectric ceramic body in an embodiment of the invention; Figures 4 and 5 are respectively a piezoelectric vibrating device according to an embodiment of the invention when the piezoelectric ceramic body does not have openings and has openings Vibration frequency vs. z-axis amplitude; Figure 6 is a perspective view of a piezoelectric vibration device according to another embodiment of the present invention; Figure 7 is a perspective view of a piezoelectric vibration device according to another embodiment of the present invention Figures; Figure 8 is a perspective view of a piezoelectric vibration device according to another embodiment of the present invention; and Figure 9 is a perspective view of a piezoelectric vibration device according to another embodiment of the present invention.

須注意本說明書中的所有圖示皆為圖例性質，為了清楚與方便圖示說明之故，圖示中的各部件在尺寸與比例上可能會被誇大或縮小地呈現，一般而言，圖中相同的參考符號會用來標示修改後或不同實施例中對應或類似的元件特徵。 It should be noted that all the illustrations in this manual are illustrations in nature. For clarity and convenience of illustration, the components in the illustrations may be exaggerated or reduced in size and proportion. Generally speaking, the figures The same reference symbols will be used to indicate corresponding or similar element features in modified or different embodiments.

在下文的本發明細節描述中，元件符號會標示在隨附的圖示中成為其中的一部份，並且以可實行該實施例之特例描述方式來表示。這類的實施例會說明足夠的細節俾使該領域之一般技藝人士得以具以實施。為了圖例清楚之故，圖示中可能有部分元件的尺寸會加以誇大。閱者須瞭解到本發明中亦可利用其他的實施例或是在不悖離所述實施例的前提下，作出結構性、邏輯性、及電性上的改變。因此，下文之細節描述不可被視為是一種限定，反之，其中所包含的實施例將由隨附的申請專利範圍來加以界定。 In the following detailed description of the present invention, component symbols will be marked as a part of the accompanying drawings, and are represented in a special description manner that can implement the embodiment. This type of embodiment will explain enough details to enable ordinary skilled persons in the field to implement it. For the clarity of the illustration, the size of some components in the figure may be exaggerated. The reader should understand that other embodiments can also be used in the present invention or structural, logical, and electrical changes can be made without departing from the described embodiments. Therefore, the following detailed description should not be regarded as a limitation, on the contrary, the embodiments contained therein will be defined by the scope of the attached patent application.

首先請參照第1圖，其繪示出根據本發明實施例中一壓電振動裝置100的透視圖。本發明的壓電振動裝置100大體上是由一剛性結構體101與一壓電陶瓷體103所構成，其中，請同時參照第2圖，剛性結構體101可為一圓柱體，其具有隔著剛性結構體101的本體相對的一第一表面101a與一第二表面101b。另一方面，在本發明實施例中，壓電陶瓷體103可呈一圓片形，並經由膠材105黏合在剛性結構體101的第二表面101b上。其中，壓電陶瓷體103具有一開孔107，從壓電陶瓷體103裸露的外平面延伸至與剛性結構體101相接的內平面。 First, please refer to FIG. 1, which is a perspective view of a piezoelectric vibration device 100 according to an embodiment of the present invention. The piezoelectric vibrating device 100 of the present invention is generally composed of a rigid structure 101 and a piezoelectric ceramic body 103. Please also refer to FIG. 2. The rigid structure 101 may be a cylinder with a spacer A first surface 101a and a second surface 101b of the rigid structure body 101 are opposite to each other. On the other hand, in the embodiment of the present invention, the piezoelectric ceramic body 103 may be in the shape of a wafer and adhered to the second surface 101b of the rigid structure body 101 via the glue 105. The piezoelectric ceramic body 103 has an opening 107 extending from the exposed outer plane of the piezoelectric ceramic body 103 to the inner plane connected to the rigid structure body 101.

在其他實施例中，剛性結構體101可為多邊形柱體，如方柱體、五角柱體或是六角柱體等，不以此為限。壓電陶瓷體103的形狀大致會對應剛性結構體101的第二表面101b的形狀，例如可為方形或多邊形，不以此為限。剛性結構體101的振動頻率會隨著其形狀與尺寸的不同而不同。開孔107的形狀可為圓形、三角形方形或多邊形，不以此為限。在本發明中，經由調整開孔107，會使得壓電陶瓷體103與剛性結構體101所形成之壓電振動裝置的第一表面達到最大振幅。此部分的細節將於後續實施例中說明。 In other embodiments, the rigid structure 101 may be a polygonal column, such as a square column, a pentagonal column, a hexagonal column, etc., and is not limited thereto. The shape of the piezoelectric ceramic body 103 roughly corresponds to the shape of the second surface 101b of the rigid structure body 101, for example, it may be a square or a polygon, and is not limited thereto. The vibration frequency of the rigid structure 101 varies with its shape and size. The shape of the opening 107 may be a circle, a triangle square, or a polygon, and is not limited thereto. In the present invention, by adjusting the opening 107, the first surface of the piezoelectric vibrating device formed by the piezoelectric ceramic body 103 and the rigid structure body 101 will reach the maximum amplitude. The details of this part will be described in subsequent embodiments.

復參照第1圖與第2圖。剛性結構體101可為變幅桿結構。另一方面， 壓電陶瓷體103還包含一正電極113a以及一負電極113b，其可分別位於壓電陶瓷片103相對的兩平面上，並經由導線連接到外部電源，如一交流電源。 Refer to Figure 1 and Figure 2 again. The rigid structure 101 may be a horn structure. on the other hand, The piezoelectric ceramic body 103 also includes a positive electrode 113a and a negative electrode 113b, which can be respectively located on two opposite planes of the piezoelectric ceramic sheet 103 and connected to an external power source, such as an AC power source, via a wire.

在實際運作中，流經壓電陶瓷體103的交流電會因為逆壓電效應不斷地使壓電陶瓷體103產生伸張與收縮的機械形變，如此使得壓電陶瓷體103在z軸方向產生高頻的振動，進而帶動了剛性結構體101在z軸方向的振動。這樣的振動與其他所連結的外部裝置共作來達致許多功效，例如使壓電振動裝置100所接觸之液體振動來清洗物件、使液體振動霧化來產生霧氣、產生振動來精準控制物件的位移、產生對應的振動來制振、產生振動來進料與選料等。 In actual operation, the alternating current flowing through the piezoelectric ceramic body 103 will continuously cause the piezoelectric ceramic body 103 to expand and contract mechanical deformation due to the inverse piezoelectric effect, so that the piezoelectric ceramic body 103 generates high frequency in the z-axis direction. The vibration of, in turn, drives the vibration of the rigid structure 101 in the z-axis direction. Such vibrations work with other connected external devices to achieve many effects, such as vibrating the liquid contacted by the piezoelectric vibrating device 100 to clean the object, vibrating the liquid to generate mist, and generating vibration to precisely control the object. Displacement, generate corresponding vibration to dampen vibration, generate vibration to feed and select materials, etc.

在材料方面，剛性結構體101的材料可為金屬、工程塑膠或是陶瓷，如鋁、鈦、不鏽鋼等金屬材料或是碳化矽、氮化矽、氧化鋁等陶瓷材料。壓電陶瓷體103的材料可包含鋯鈦酸鉛(Pb(ZrTi)O3)、鈦酸鉛(PbTiO3)等含鉛的壓電材料，或是鈦酸鋇(BaTiO3)、鈮酸鉀鈉((NaK)NbO3)等不含鉛的壓電材料。在其他實施例中，如第3圖所示，壓電陶瓷體103也可能是由多個疊合在一起的壓電陶瓷片103a所構成，其中至少一個壓電陶瓷片具有開孔。這種多層疊合的壓電陶瓷片103a設計可以減少壓電陶瓷體103所需的驅動電壓。 In terms of materials, the material of the rigid structure 101 can be metal, engineering plastic, or ceramic, such as metal materials such as aluminum, titanium, and stainless steel, or ceramic materials such as silicon carbide, silicon nitride, and alumina. The material of the piezoelectric ceramic body 103 may include lead-containing piezoelectric materials such as lead zirconate titanate (Pb(ZrTi)O 3 ), lead titanate (PbTiO 3 ), or barium titanate (BaTiO 3 ), potassium niobate Lead-free piezoelectric materials such as sodium ((NaK)NbO 3 ). In other embodiments, as shown in FIG. 3, the piezoelectric ceramic body 103 may also be composed of a plurality of piezoelectric ceramic sheets 103a laminated together, and at least one of the piezoelectric ceramic sheets has an opening. This multi-layer laminated piezoelectric ceramic sheet 103a design can reduce the driving voltage required by the piezoelectric ceramic body 103.

接下來請參照第4圖與第5圖，其分別繪示出了前述壓電振動裝置100在壓電陶瓷體103不具有開孔107與具有開孔107(孔徑為2.5mm)的情況下的振動頻率(赫茲)在z軸方向上的振幅(米)的曲線圖。從第4圖可以看到，在壓電陶瓷體103不具有開孔107的情形下，壓電振動裝置100的位移(也就是振幅)在振動頻率1.8x105赫茲以及2.35 x105赫茲的波段會有位移峰值產生，其分別約為14x10-7米以及20x10-7米。另一方面，從第5圖可以看到，在壓電陶瓷體103具有中心開孔107的情形下，壓電振動裝置100的位移在振動頻率為1.8x105赫茲的波段會有約為80x10-7米的位移峰值產生，而原本接近振動頻率2.35x105赫茲波段的位移峰值則略為偏移且下降為15x10-7米。從兩張圖的比對可知，壓電陶瓷體103具有開孔107 的特徵可以讓原本壓電振動裝置100的最大振幅增加達四倍之多，這是由於開孔107的存在使得壓電陶瓷體103的共振頻率與剛性結構體101的振動頻率匹配，進而使得整個壓電振動裝置100達到最佳的振動所致。如此可知壓電陶瓷體103上開孔107的存在可以大幅增加壓電振動裝置100在z軸方向的振幅。 Next, please refer to Figures 4 and 5, which respectively illustrate the piezoelectric vibration device 100 in the piezoelectric ceramic body 103 does not have an opening 107 and has an opening 107 (aperture 2.5mm) in the case A graph of the amplitude (meters) of the vibration frequency (Hz) in the z-axis direction. It can be seen from Figure 4 that in the case where the piezoelectric ceramic body 103 does not have the opening 107, the displacement (that is, the amplitude) of the piezoelectric vibrating device 100 will change at the vibration frequency of 1.8× 10 5 Hz and 2.35×10 5 Hz. generating a peak with a displacement, which are approximately 14x10 -7 m and 20x10 -7 meters. On the other hand, can be seen from FIG. 5, the piezoelectric ceramic body 103 having a central opening 107 of the case, displacement of the piezoelectric vibration device 100 in the vibration frequency of 1.8 x 10 5 Hz bands have about 80x10 - The displacement peak of 7 meters is generated, while the displacement peak in the band close to the vibration frequency of 2.35x10 5 Hz is slightly shifted and dropped to 15x10 -7 meters. It can be seen from the comparison of the two figures that the piezoelectric ceramic body 103 has the feature of the opening 107, which can increase the maximum amplitude of the original piezoelectric vibration device 100 by up to four times. This is because the existence of the opening 107 makes the piezoelectric ceramic The resonance frequency of the body 103 matches the vibration frequency of the rigid structure body 101, so that the entire piezoelectric vibration device 100 achieves the best vibration. In this way, it can be seen that the existence of the opening 107 on the piezoelectric ceramic body 103 can greatly increase the amplitude of the piezoelectric vibration device 100 in the z-axis direction.

除了開孔的存在與否這個特徵，下方的表一與表二說明了開孔107的孔徑d大小(即開孔面積)對於壓電振動裝置100在z軸方向上的振動的增幅表現，其所使用之壓電振動裝置100與上述描述之實施例相同，應用頻率設定為180千赫茲，驅動電壓設定在50Vpp。如表一中所示者，可以看到只要挖出來的開孔107的孔徑d達2mm以上，都可以大幅增加裝置的振幅，其中在孔徑為4mm的時候接近最佳值，增幅約21倍。根據表一，可以看出當壓電陶瓷體103之開孔107的面積與壓電陶瓷體103與剛性結構體101貼合面的面積加上開孔107的面積之總面積比為16%時，其增幅的效果最好。此外，在其他實驗中，壓電陶瓷體103之開孔107的邊長(即開孔面積)與壓電陶瓷體103的邊長比例也可以得到類似的增幅結果。 In addition to the feature of the presence or absence of openings, the following Tables 1 and 2 illustrate how the aperture d of the opening 107 (that is, the opening area) can increase the vibration of the piezoelectric vibration device 100 in the z-axis direction. The piezoelectric vibration device 100 used is the same as the embodiment described above, the application frequency is set to 180 kHz, and the driving voltage is set to 50Vpp. As shown in Table 1, it can be seen that as long as the diameter d of the excavated hole 107 is more than 2 mm, the amplitude of the device can be greatly increased, and when the diameter is 4 mm, the amplitude is close to the optimal value, which is about 21 times the increase. According to Table 1, it can be seen that when the total area ratio of the area of the opening 107 of the piezoelectric ceramic body 103 to the area of the bonding surface of the piezoelectric ceramic body 103 and the rigid structure body 101 plus the area of the opening 107 is 16% , The effect of its increase is the best. In addition, in other experiments, the ratio of the side length of the opening 107 of the piezoelectric ceramic body 103 (ie, the opening area) to the side length of the piezoelectric ceramic body 103 can also be similarly increased.

Figure 109111467-A0305-02-0008-1
Figure 109111467-A0305-02-0008-1
Figure 109111467-A0305-02-0009-2
Figure 109111467-A0305-02-0009-2

Figure 109111467-A0305-02-0009-3
Figure 109111467-A0305-02-0009-3
Figure 109111467-A0305-02-0010-4
Figure 109111467-A0305-02-0010-4

現在請參照第6圖，其繪示出根據本發明另一實施例中一壓電振動裝置200的透視圖。此實施例的壓電振動裝置200大體上與前一實施例中的壓電振動裝置100相同，差別在於壓電振動裝置200的壓電陶瓷體203係具有多個開孔207，如圖中所示的第一開孔、第二開孔、第三開孔、第四開孔等四個開孔207。這些開孔207從壓電陶瓷體203裸露的外平面延伸至與剛性結構體201相接的內平面。開孔207的形狀可為圓形、三角形、方形或多邊形，不以此為限。壓電陶瓷體203也可能是由多個疊合在一起的壓電陶瓷片103a所構成，如第3圖所示。與前述的機制相同，複數個開孔207的存在同樣能讓壓電陶瓷體203的共振頻率與剛性結構體201的振動頻率匹配，進而提高壓電振動裝置200的振幅。此部分的細節將於後續實施例中說明。 Please refer now to FIG. 6, which is a perspective view of a piezoelectric vibration device 200 according to another embodiment of the present invention. The piezoelectric vibrating device 200 of this embodiment is basically the same as the piezoelectric vibrating device 100 in the previous embodiment, except that the piezoelectric ceramic body 203 of the piezoelectric vibrating device 200 has a plurality of openings 207, as shown in the figure. Four openings 207 are shown, such as the first opening, the second opening, the third opening, and the fourth opening. These openings 207 extend from the exposed outer plane of the piezoelectric ceramic body 203 to the inner plane connected to the rigid structure body 201. The shape of the opening 207 may be a circle, a triangle, a square, or a polygon, and is not limited thereto. The piezoelectric ceramic body 203 may also be composed of a plurality of piezoelectric ceramic sheets 103a laminated together, as shown in FIG. 3. Similar to the aforementioned mechanism, the existence of a plurality of openings 207 can also match the resonance frequency of the piezoelectric ceramic body 203 with the vibration frequency of the rigid structure 201, thereby increasing the amplitude of the piezoelectric vibration device 200. The details of this part will be described in subsequent embodiments.

下方的表三與表四說明了開孔207的數目對於壓電振動裝置200在z軸方向上振動的增幅表現，其孔徑設定為1mm與2mm，應用頻率為180千赫茲，驅動電壓為50Vpp。如表中所示者，可以看到多個開孔的設計同樣具有增幅效果，只是效果沒有前一實施例的單一開孔設計來的顯著。在本實施例中，壓電陶瓷體203之開孔207的面積與壓電陶瓷體203與剛性結構體201貼合面面積加上開孔207面積之總面積比為36.13%時，其增幅的效果最好。此外，在其他實驗中，壓電陶瓷體203之開孔207的邊長與壓電陶瓷體203的邊長比例也可以得到類似的增 幅結果。 Table 3 and Table 4 below illustrate how the number of openings 207 can increase the vibration of the piezoelectric vibrating device 200 in the z-axis direction. The apertures are set to 1 mm and 2 mm, the application frequency is 180 kHz, and the driving voltage is 50 Vpp. As shown in the table, it can be seen that the design of multiple openings also has an amplification effect, but the effect is not as significant as that of the single opening design of the previous embodiment. In this embodiment, when the ratio of the area of the opening 207 of the piezoelectric ceramic body 203 to the area of the bonding surface of the piezoelectric ceramic body 203 and the rigid structure 201 plus the area of the opening 207 is 36.13%, the increase is best effect. In addition, in other experiments, the ratio of the side length of the opening 207 of the piezoelectric ceramic body 203 to the side length of the piezoelectric ceramic body 203 can also be similarly increased. Results.

Figure 109111467-A0305-02-0011-5
Figure 109111467-A0305-02-0011-5

Figure 109111467-A0305-02-0011-6
Figure 109111467-A0305-02-0011-6
Figure 109111467-A0305-02-0012-7
Figure 109111467-A0305-02-0012-7

現在請參照第7圖，其繪示出根據本發明又一實施例中一壓電振動裝置300的透視圖。此實施例的壓電振動裝置300大體上與第一實施例中的壓電振動裝置100相同，差別在於壓電振動裝置300的剛性結構體301是方柱體而非圓柱體，其邊長約為10mm，而其壓電陶瓷體303則呈一方片形。 Please refer now to FIG. 7, which illustrates a perspective view of a piezoelectric vibration device 300 according to another embodiment of the present invention. The piezoelectric vibrating device 300 of this embodiment is basically the same as the piezoelectric vibrating device 100 of the first embodiment. The difference is that the rigid structure 301 of the piezoelectric vibrating device 300 is a square cylinder instead of a cylinder. It is 10mm, and the piezoelectric ceramic body 303 is in the shape of a square plate.

下方的表五說明了壓電陶瓷體303的開孔對於方形的壓電振動裝置300是否有提升振幅的效果。從表五中可以看出，在壓電振動裝置300的剛性結構體301是方柱體的情況下，在壓電陶瓷體303的開孔同樣會有顯著的增幅效果。其中，在壓電陶瓷體303的開孔307的孔徑為2.5mm的條件下，其z軸方向上的位移增幅可達1793.33%。而在孔徑為4mm的條件下，z軸的位移反而大幅降低，代表此開孔307孔徑下的壓電陶瓷體303的共振頻率與剛性結構體301的振動頻率十分地不匹配。此外，可以看到此實施例中裝置的應用頻率約為160kHz-170kHz之間，與先前的180kHz有些許差異，這是由於壓電振動裝置300整體的形狀由圓柱形改變成方柱形之故。 Table 5 below shows whether the opening of the piezoelectric ceramic body 303 has the effect of increasing the amplitude of the square piezoelectric vibrating device 300. It can be seen from Table 5 that when the rigid structure 301 of the piezoelectric vibrating device 300 is a square cylinder, the opening of the piezoelectric ceramic body 303 will also have a significant amplification effect. Among them, under the condition that the aperture 307 of the piezoelectric ceramic body 303 has a diameter of 2.5 mm, the displacement in the z-axis direction can increase by 1793.33%. On the other hand, under the condition of the aperture of 4 mm, the displacement of the z-axis is greatly reduced, which means that the resonance frequency of the piezoelectric ceramic body 303 under the aperture of the opening 307 and the vibration frequency of the rigid structure 301 are quite mismatched. In addition, it can be seen that the application frequency of the device in this embodiment is about 160kHz-170kHz, which is slightly different from the previous 180kHz. This is because the overall shape of the piezoelectric vibration device 300 is changed from a cylindrical shape to a square cylindrical shape. .

Figure 109111467-A0305-02-0013-8
Figure 109111467-A0305-02-0013-8

現在請參照第8圖，其繪示出根據本發明又一實施例中一壓電振動裝置400的透視圖。此實施例的壓電振動裝置400大體上與第一實施例中的壓電振動裝置100相同，差別在於其剛性結構體401與壓電陶瓷體403的直徑較小，例如從第一實施例中的10mm變為5mm，如此整體壓電振動裝置400的尺寸變小，且高寬比變得較大。 Please refer now to FIG. 8, which illustrates a perspective view of a piezoelectric vibration device 400 according to another embodiment of the present invention. The piezoelectric vibrating device 400 of this embodiment is substantially the same as the piezoelectric vibrating device 100 of the first embodiment. The difference lies in that the diameters of the rigid structure 401 and the piezoelectric ceramic body 403 are smaller. For example, from the first embodiment 10mm becomes 5mm, so the size of the whole piezoelectric vibration device 400 becomes smaller, and the aspect ratio becomes larger.

下方的表六說明了改變壓電振動裝置400的高寬比會對振幅效果帶來什麼影響。從表六中可以看出，除了因形狀與尺寸改變所導致的應用頻率與固有振幅的改變外，壓電陶瓷體403之開孔407同樣能在本體尺寸較小的情況下帶來明顯的增幅效果，其在孔徑1.25mm與2mm的情況下都可以達到約二\倍的位移增幅。 Table 6 below illustrates the impact of changing the aspect ratio of the piezoelectric vibrating device 400 on the amplitude effect. It can be seen from Table 6 that, in addition to the changes in application frequency and inherent amplitude caused by changes in shape and size, the opening 407 of the piezoelectric ceramic body 403 can also bring a significant increase in the case of a smaller body size. The effect is that it can achieve about two times the displacement increase in the case of the aperture of 1.25mm and 2mm.

Figure 109111467-A0305-02-0014-9
Figure 109111467-A0305-02-0014-9

最後請參照第9圖，其繪示出根據本發明又一實施例中一壓電振動裝置500的透視圖。此實施例的壓電振動裝置500大體上與第一實施例中的壓電振動裝置100相同，差別在於其剛性結構體501與壓電陶瓷體503的直徑較大，例如從第一實施例10mm變為20mm，如此整體壓電振動裝置500的尺寸變大，且高寬比變得較小。 Finally, please refer to FIG. 9, which illustrates a perspective view of a piezoelectric vibration device 500 according to another embodiment of the present invention. The piezoelectric vibrating device 500 of this embodiment is substantially the same as the piezoelectric vibrating device 100 of the first embodiment. The difference lies in that the diameters of the rigid structure 501 and the piezoelectric ceramic body 503 are larger, for example, 10 mm from the first embodiment. It becomes 20 mm, so the size of the whole piezoelectric vibration device 500 becomes larger, and the aspect ratio becomes smaller.

下方的表七說明了改變壓電振動裝置500的高寬比會對振幅效果帶來什麼影響。從表七中可以看出，除了因形狀與尺寸改變所導致的應用頻率與固有振幅的改變外，開孔507同樣能在本體尺寸較小的情況下帶來明顯的增幅效果，其中在壓電陶瓷體503之開孔507的孔徑為2.5mm的情況下，z軸振幅的增幅可達261.14%。而在孔徑為4mm的條件下，z軸的位移反而大幅降低，代表此壓電陶瓷體503之開孔507的孔徑為4mm下的壓電陶瓷體503的共振頻率與剛性結構體 501的振動頻率十分地不匹配。 Table 7 below illustrates how changing the aspect ratio of the piezoelectric vibrating device 500 will affect the amplitude effect. It can be seen from Table 7 that, in addition to the changes in the application frequency and inherent amplitude caused by changes in shape and size, the opening 507 can also bring significant amplification effects when the body size is small. When the diameter of the opening 507 of the ceramic body 503 is 2.5 mm, the amplitude of the z-axis amplitude can be increased by 261.14%. On the contrary, under the condition of the hole diameter of 4mm, the displacement of the z-axis is greatly reduced, which represents the resonance frequency of the piezoelectric ceramic body 503 and the rigid structure body when the hole 507 of the piezoelectric ceramic body 503 has a hole diameter of 4mm. The vibration frequency of 501 is quite mismatched.

Figure 109111467-A0305-02-0015-10
Figure 109111467-A0305-02-0015-10

根據上述所提出的各種實施例以及相關實驗結果，本發明於此提出了一種新穎的壓電振動裝置，其特點在於其壓電陶瓷體上具有至少一開孔，經由調整該開孔之形狀或尺寸，使該壓電陶瓷體與該剛性結構體所形成之壓電振動裝置，大幅提高振幅。 Based on the various embodiments proposed above and related experimental results, the present invention proposes a novel piezoelectric vibration device, which is characterized in that the piezoelectric ceramic body has at least one opening, and the shape or shape of the opening is adjusted. The size enables the piezoelectric vibrating device formed by the piezoelectric ceramic body and the rigid structure to greatly increase the amplitude.

以上所述僅為本發明之較佳實施例，凡依本發明申請專利範圍所做之均等變化與修飾，皆應屬本發明之涵蓋範圍。 The foregoing descriptions are only preferred embodiments of the present invention, and all equivalent changes and modifications made in accordance with the scope of the patent application of the present invention shall fall within the scope of the present invention.

100:壓電振動裝置 100: Piezoelectric vibration device

101:剛性結構體 101: rigid structure

101a:第一表面 101a: first surface

101b:第二表面 101b: second surface

103:壓電陶瓷體 103: Piezoelectric ceramic body

105:膠材 105: plastic

107:開孔 107: Hole

113a:正電極 113a: positive electrode

113b:負電極 113b: negative electrode

Claims (5)

一種壓電振動裝置，包含：一剛性結構體，具有一中心軸、一第一表面以及一第二表面，其中該第一表面與該第二表面分別位於該中心軸的兩端並彼此相對；以及一壓電陶瓷體，該壓電陶瓷體經由膠材黏合在該剛性結構體的該第二表面上且該剛性結構體的其他部位上並未設置其他壓電陶瓷體；其中該壓電陶瓷體具有至少一開孔，經由調整該開孔之形狀或尺寸以提高該第一表面在該中心軸方向上的振幅，且該壓電陶瓷體之該開孔的面積小於等於該壓電陶瓷體與該剛性結構體的貼合面的面積加上該開孔的面積之總面積的50%。 A piezoelectric vibration device includes: a rigid structure having a central axis, a first surface and a second surface, wherein the first surface and the second surface are respectively located at two ends of the central axis and are opposite to each other; And a piezoelectric ceramic body, the piezoelectric ceramic body is adhered to the second surface of the rigid structure body through glue, and other piezoelectric ceramic bodies are not arranged on other parts of the rigid structure body; wherein the piezoelectric ceramic body The body has at least one opening, the shape or size of the opening is adjusted to increase the amplitude of the first surface in the direction of the central axis, and the area of the opening of the piezoelectric ceramic body is less than or equal to the piezoelectric ceramic body The area of the bonding surface with the rigid structure plus the area of the opening is 50% of the total area. 根據申請專利範圍第1項所述之壓電振動裝置，其中該剛性結構體為圓柱體、多邊形柱體或錐狀體。 According to the piezoelectric vibration device described in item 1 of the scope of patent application, the rigid structure is a cylinder, a polygonal cylinder, or a cone. 根據申請專利範圍第1項所述之壓電振動裝置，其中該壓電陶瓷體的該開孔為圓形、三角形、方形或多邊形。 According to the piezoelectric vibrating device described in item 1 of the scope of patent application, the opening of the piezoelectric ceramic body is circular, triangular, square or polygonal. 根據申請專利範圍第1項所述之壓電振動裝置，其中該剛性結構體為變幅桿結構，該第一表面的形狀是平面、斜面或球面。 According to the piezoelectric vibrating device described in item 1 of the scope of patent application, the rigid structure is an horn structure, and the shape of the first surface is a flat surface, an inclined surface, or a spherical surface. 根據申請專利範圍第1項所述之壓電振動裝置，其中該壓電陶瓷體為多個壓電陶瓷片疊合在一起所構成，其中至少一該壓電陶瓷片具有該開孔。 The piezoelectric vibrating device according to the first item of the scope of patent application, wherein the piezoelectric ceramic body is composed of a plurality of piezoelectric ceramic sheets stacked together, and at least one of the piezoelectric ceramic sheets has the opening.
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