JP2012210575A - Ultrasonic transducer - Google Patents

Ultrasonic transducer Download PDF

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Publication number
JP2012210575A
JP2012210575A JP2011077333A JP2011077333A JP2012210575A JP 2012210575 A JP2012210575 A JP 2012210575A JP 2011077333 A JP2011077333 A JP 2011077333A JP 2011077333 A JP2011077333 A JP 2011077333A JP 2012210575 A JP2012210575 A JP 2012210575A
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Prior art keywords
longitudinal direction
ultrasonic
horn
ultrasonic transducer
ultrasonic horn
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Tonshaku To
敦灼 董
Haruo Yamamori
春男 山森
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Honda Electronics Co Ltd
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Honda Electronics Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/08—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/80—General aspects of machine operations or constructions and parts thereof
    • B29C66/81—General aspects of the pressing elements, i.e. the elements applying pressure on the parts to be joined in the area to be joined, e.g. the welding jaws or clamps
    • B29C66/814—General aspects of the pressing elements, i.e. the elements applying pressure on the parts to be joined in the area to be joined, e.g. the welding jaws or clamps characterised by the design of the pressing elements, e.g. of the welding jaws or clamps
    • B29C66/8145—General aspects of the pressing elements, i.e. the elements applying pressure on the parts to be joined in the area to be joined, e.g. the welding jaws or clamps characterised by the design of the pressing elements, e.g. of the welding jaws or clamps characterised by the constructional aspects of the pressing elements, e.g. of the welding jaws or clamps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic transducer which can make the height of using machines short and in which the vibration of the output surface of an ultrasonic horn is uniform in the longitudinal direction of the same.SOLUTION: The ultrasonic transducer 1 includes: the ultrasonic horn including a rectangular input surface 11 and an output to surface 12; and a driving member 20 that having a rectangular plate shape and has a rectangular driving main surface 20D and a back surface 20U, and in which a driving main surface 20D is fixed to the input surface. The ultrasonic transducer resonates in half a wavelength in the longitudinal direction Z in a predetermined frequency Fr, and is constituted such that the ultrasonic horn 10 resonates in the longitudinal direction X. The ultrasonic horn 10 has longitudinally long holes 10H. The longitudinally long holes 10H are located at the position where the end parts 10H1 of the input surface 11 side is located in the input surface 11 side from a node part ZF and the end parts 10H2 of the output surface 12 side are located at a position where L1=(0.05±0.03)L is satisfied and are located in body parts XH of resonance in an longitudinal direction X.

Description

本発明は、長手方向に長い矩形状の出力面を有するホーンを有する超音波振動子に関する。   The present invention relates to an ultrasonic transducer having a horn having a rectangular output surface that is long in the longitudinal direction.

プラスチックの固着加工用の超音波ウェルダや各種材料の切断加工用の超音波カッタなどに用いる超音波工具ホーンとして、横断面を長細い矩形状とし、スロット（縦長の貫通孔）を開けたものが知られている（例えば、特許文献１の第１図参照）。この超音波工具ホーンは、入力面にねじ穴（めねじ）が形成されており、このねじ穴を用いて、ボルト締めランジュバン型超音波振動子（以下、ＢＬＴともいう。）を接続し、共振させて用いる。具体的には、特定周波数で入力面と出力面との間で縦方向に半波長共振するように各寸法を選択して超音波ホーンを形成しておく。更に、この特定周波数で半波長共振するＢＬＴを、この超音波ホーンに前述のねじ穴を利用して取り付ける。ＢＬＴを特定周波数で駆動し、超音波振動を発生させると、超音波ホーンも共振して、出力面において、大きな超音波振動が得られるというものである。   Ultrasonic tool horns used for ultrasonic welders for plastic fixing and cutting cutters for various materials, etc., with a long and narrow rectangular cross section and slots (vertical through holes). It is known (for example, see FIG. 1 of Patent Document 1). This ultrasonic tool horn has a screw hole (female screw) formed on the input surface, and a bolted Langevin type ultrasonic transducer (hereinafter also referred to as BLT) is connected using this screw hole to resonate. Use it. Specifically, the ultrasonic horn is formed by selecting each dimension so that half-wavelength resonance occurs in the vertical direction between the input surface and the output surface at a specific frequency. Further, the BLT that resonates at half wavelength at the specific frequency is attached to the ultrasonic horn using the screw hole. When the BLT is driven at a specific frequency to generate ultrasonic vibration, the ultrasonic horn also resonates, and a large ultrasonic vibration is obtained on the output surface.

特許第２６９４３５２号公報（第１図）Japanese Patent No. 2694352 (FIG. 1)

しかしながら、このように、ＢＬＴと超音波ホーンを組合せて用いる場合には、その縦方向の全長は、１波長分の大きさとなり、超音波ウェルダなどの装置全体の低背化を図ることが難しい。また、ＢＬＴと超音波ホーンの両者を用いるので、コストアップとなる。
また、特許文献１の第１図を見れば理解できるように、超音波ホーンの入力面の一部（例えば中央部）にＢＬＴを接続して、超音波ホーンを駆動するので、超音波ホーンの出力面の振動を、その長手方向に均一にし難い。 However, when the BLT and the ultrasonic horn are used in combination as described above, the total length in the vertical direction is one wavelength, and it is difficult to reduce the overall height of the apparatus such as the ultrasonic welder. . Further, since both the BLT and the ultrasonic horn are used, the cost is increased.
Further, as can be understood by referring to FIG. 1 of Patent Document 1, since the BLT is connected to a part of the input surface of the ultrasonic horn (for example, the central portion) and the ultrasonic horn is driven, It is difficult to make the vibration of the output surface uniform in the longitudinal direction.

本発明の課題は、かかる問題点に鑑みてなされたものであって、使用機器の低背化を図り得、しかも超音波ホーンの出力面の振動が、その長手方向に均一な超音波振動子を提供することである。   An object of the present invention has been made in view of such a problem, and can reduce the height of equipment used, and an ultrasonic transducer in which the vibration of the output surface of the ultrasonic horn is uniform in the longitudinal direction. Is to provide.

その態様は、矩形状の入力面とこの入力面に対向する矩形状の出力面とを含み、これらを結ぶ縦方向に対して、この縦方向に直交する横断面が、この横断面に沿う長手方向に長く、上記長手方向に直交する横幅方向に短い矩形状を有する、超音波ホーンと、上記長手方向に長い矩形状の駆動主面及び背面を有する矩形板状で、上記入力面に上記駆動主面が固着された圧電セラミック材からなる駆動部材と、を備え、所定周波数で上記駆動部材を駆動したときに、上記縦方向に半波長共振すると共に、上記超音波ホーンが、上記長手方向に共振する形態に構成されてなる超音波振動子であって、上記超音波ホーンは、自身を上記横幅方向に貫通し、上記縦方向に延びた形状の縦長貫通孔を有し、上記縦長貫通孔は、上記入力面側の端部が、上記縦方向の半波長共振の節部よりも上記入力面側に位置し、上記縦方向の半波長共振の節部から上記出力面までの距離をＬとし、上記出力面側の端部から上記出力面までの距離をＬ１としたとき、上記出力面側の端部が、距離Ｌ１＝（０．０５±０．０３)Ｌとなる部位に位置すると共に、上記長手方向の共振の腹部に位置してなる超音波振動子である。   The aspect includes a rectangular input surface and a rectangular output surface opposite to the input surface, and a longitudinal cross section perpendicular to the longitudinal direction connects the longitudinal direction along the transverse section. An ultrasonic horn having a rectangular shape that is long in the direction and short in the transverse direction perpendicular to the longitudinal direction, and a rectangular plate having a rectangular driving main surface and a back surface that are long in the longitudinal direction, and the drive on the input surface. A drive member made of a piezoelectric ceramic material with a main surface fixed thereto, and when the drive member is driven at a predetermined frequency, the ultrasonic horn resonates in the longitudinal direction while resonating at half wavelength in the longitudinal direction. An ultrasonic vibrator configured to resonate, wherein the ultrasonic horn has a vertically long through hole that penetrates itself in the lateral width direction and extends in the longitudinal direction. The end on the input surface side is Is located on the input surface side from the node of the half-wave resonance in the direction, the distance from the node of the half-wave resonance in the vertical direction to the output surface is L, and the output surface to the output surface When the distance up to L1 is L1, the end on the output surface side is located at a position where the distance L1 = (0.05 ± 0.03) L and at the abdomen of resonance in the longitudinal direction. This is an ultrasonic transducer.

この超音波振動子では、全体の縦方向寸法が半波長共振の大きさとなる。このため、超音波ホーンの縦方向寸法だけで半波長の大きさに達し、ＢＬＴを含めると１波長分の寸法となる、特許文献１に記載の超音波工具ホーンを用いた場合に比して、超音波振動子全体の縦方向寸法の低背化を図ることができる。
このため、これを用いた超音波ウェルダなどの装置の低背化をも図ることができる。
しかも、距離Ｌ１を上述のように規定しているので、超音波ホーンの出力面の振動が、縦方向の振動で、かつその振動の振幅が長手方向に均一な超音波振動を励起できる。 In this ultrasonic transducer, the overall longitudinal dimension is the half-wave resonance magnitude. For this reason, compared with the case where the ultrasonic tool horn of patent document 1 which reaches the half-wave size only by the vertical dimension of an ultrasonic horn, and becomes a size for one wavelength when BLT is included is used. In addition, it is possible to reduce the vertical dimension of the entire ultrasonic transducer.
For this reason, it is possible to reduce the height of an apparatus such as an ultrasonic welder using the same.
Moreover, since the distance L1 is defined as described above, the vibration of the output surface of the ultrasonic horn can be excited in the longitudinal direction and the vibration amplitude can be excited in the longitudinal direction.

なお、この超音波振動子において、超音波ホーンは、その節部に縦方向に直交する方向に延びるフランジを有するものとしても、有さないものとしても良い。   In this ultrasonic transducer, the ultrasonic horn may or may not have a flange extending in the direction perpendicular to the vertical direction at the node.

さらに、超音波振動子であって、前記超音波ホーンは、前記縦方向の半波長共振の節部に、前記縦方向に直交する方向に突出するフランジを有する超音波振動子とすると良い。   The ultrasonic horn may be an ultrasonic vibrator having a flange protruding in a direction perpendicular to the vertical direction at a node of the vertical half-wave resonance.

超音波ホーンに上述のフランジを設けることで、超音波振動子の振動を妨げることなく、超音波振動子を保持することができる。   By providing the above-mentioned flange on the ultrasonic horn, the ultrasonic vibrator can be held without disturbing the vibration of the ultrasonic vibrator.

実施形態に係る超音波振動子の正面図である。It is a front view of the ultrasonic transducer | vibrator which concerns on embodiment. 実施形態に係る超音波振動子の側面図である。It is a side view of the ultrasonic transducer | vibrator which concerns on embodiment. 実施形態に係る超音波振動子を共振させた場合に、出力面に生じる振動分布を示すグラフである。It is a graph which shows the vibration distribution which arises on an output surface when the ultrasonic transducer | vibrator which concerns on embodiment is made to resonate.

本実施形態に係る超音波振動子について、図１〜図３を参照しつつ説明する。本実施形態の超音波振動子１は、超音波ホーン１０と圧電素子２０とからなり、所定の共振周波数Ｆｒで共振する。なお、図１及び図２において、図中、上下方向を縦方向Ｚとする。また、図１において、図中、左右方向を長手方向Ｘとする。また図２のうち、図中、左右方向を横幅方向Ｙとする。   The ultrasonic transducer | vibrator which concerns on this embodiment is demonstrated referring FIGS. 1-3. The ultrasonic transducer 1 according to this embodiment includes an ultrasonic horn 10 and a piezoelectric element 20 and resonates at a predetermined resonance frequency Fr. 1 and 2, the vertical direction is the vertical direction Z in the drawings. In FIG. 1, the left-right direction is the longitudinal direction X in the drawing. In FIG. 2, the horizontal direction Y is defined as the horizontal direction in the drawing.

この超音波振動子１のうち、超音波ホーン１０は、アルミニウム材からなり、縦方向Ｚの一方端面（図中上端面）が、長手方向Ｘに長い矩形状の入力面１１とされ、他方端面（図中下端面）が、長手方向Ｘに長い矩形状の出力面１２とされている。なお、図１及び図２に示すように、入力面１１は、長手方向Ｘの寸法が２・Ａ１、横幅方向Ｙの寸法がＷ１である。また、出力面１２は、長手方向Ｘの寸法が同じく２・Ａ１であるが、横幅方向Ｙの寸法がＷ２（Ｗ２＜Ｗ１）である。また、縦方向Ｚに直交する仮想の横断面ＫＦが、この横断面ＫＦに沿う長手方向Ｘに長く、これに直交する横幅方向Ｙに短い矩形状を有している。   Among the ultrasonic transducers 1, the ultrasonic horn 10 is made of an aluminum material, and one end face (upper end face in the figure) in the vertical direction Z is a rectangular input face 11 that is long in the longitudinal direction X, and the other end face. The lower end surface in the figure is a rectangular output surface 12 that is long in the longitudinal direction X. As shown in FIGS. 1 and 2, the input surface 11 has a dimension in the longitudinal direction X of 2 · A1 and a dimension in the width direction Y of W1. Further, the output surface 12 has the same dimension in the longitudinal direction X of 2 · A1, but the dimension in the lateral width direction Y is W2 (W2 <W1). Further, a virtual cross section KF orthogonal to the vertical direction Z has a rectangular shape that is long in the longitudinal direction X along the cross section KF and short in the horizontal width direction Y orthogonal thereto.

また、この超音波ホーン１０は、ホーン部１３と、ホーン部１３の縦方向Ｚの図中上方に位置し、圧電素子２０を固着する台座ともなる基部１６とを有している。加えて、ホーン部１３の縦方向Ｚの上方端には、縦方向Ｚに直交する周囲に向けて、寸法Ｗ４分だけ突出してなるフランジ１４が形成されている。このフランジ１４は、超音波振動子１を、共振周波数Ｆｒで縦方向Ｚに半波長共振させた場合に、音響的に節部ＺＦとなる位置に設けられている。このため、超音波振動子１を縦方向Ｚに半波長共振させた場合でも、このフランジ１４にはほとんど振動が生じないので、このフランジ１４を把持しても、共振に影響を与えない。このため、このフランジ１４を用いて、超音波振動子１を、適切かつ容易に保持することができる。   Further, the ultrasonic horn 10 includes a horn portion 13 and a base portion 16 that is located above the horn portion 13 in the longitudinal direction Z in the drawing and also serves as a base to which the piezoelectric element 20 is fixed. In addition, a flange 14 is formed at the upper end of the horn portion 13 in the vertical direction Z so as to protrude by a dimension W4 toward the periphery orthogonal to the vertical direction Z. The flange 14 is provided at a position where the ultrasonic transducer 1 becomes acoustically a node ZF when the ultrasonic vibrator 1 is resonated by half wavelength in the longitudinal direction Z at the resonance frequency Fr. For this reason, even when the ultrasonic transducer 1 is caused to resonate at half wavelength in the longitudinal direction Z, the flange 14 hardly vibrates, so even if the flange 14 is gripped, the resonance is not affected. For this reason, the ultrasonic vibrator 1 can be appropriately and easily held using the flange 14.

また、圧電素子２０を所定の共振周波数Ｆｒで駆動し、超音波振動子１を縦方向Ｚに縦振動の半波長共振させた場合、この超音波振動子１の縦方向の全長Ｌ０は、音響的にλｚ／２の長さに、また、このフランジ１４から出力面１２に至るホーン部１３の縦方向Ｚの寸法Ｌは、音響的にλｚ／４の長さに相当している。なお、λｚは、超音波振動子１に、縦方向Ｚに励起される超音波振動の波長を指す。
加えて、この超音波ホーン１０（ホーン部１３）は、上述の共振をさせた場合に、長手方向Ｘにも共振するように寸法が選択されている。 In addition, when the piezoelectric element 20 is driven at a predetermined resonance frequency Fr and the ultrasonic vibrator 1 is caused to resonate in the longitudinal direction Z by half-wave length of longitudinal vibration, the longitudinal total length L0 of the ultrasonic vibrator 1 is acoustic. In particular, the length L of the horn 13 extending from the flange 14 to the output surface 12 is acoustically equivalent to the length λz / 4. Note that λz indicates the wavelength of ultrasonic vibration excited in the longitudinal direction Z by the ultrasonic transducer 1.
In addition, the size of the ultrasonic horn 10 (horn unit 13) is selected so that it also resonates in the longitudinal direction X when the above-described resonance is caused.

この超音波ホーン１０のうち、ホーン部１３は、出力面１２側（図中下方）に向けて、横幅方向Ｙの寸法が小さくなる先細の部分の先端（出力面側）に、横幅方向Ｙの寸法が変化しない板状の部分を加えた形状を有している。   Of this ultrasonic horn 10, the horn portion 13 is arranged in the width direction Y at the tip (output surface side) of the tapered portion where the dimension in the width direction Y decreases toward the output surface 12 side (downward in the figure). It has a shape to which a plate-like portion whose dimensions do not change is added.

加えて、このホーン部１３及び基部１６には、これらを横幅方向Ｙに貫通し、縦方向Ｚに延び、幅（長手方向Ｘ寸法）Ａ３の、縦長形状の縦長貫通孔１０Ｈ（本実施形態では３つ）を備えている。
この縦長貫通孔１０Ｈは、縦方向Ｚに見て、入力面１１と出力面１２との間に配置されている。本実施形態では、具体的には、上端である入力面側端１０Ｈ１は、節部ＺＦよりも入力面１１側に、さらに具体的には、縦方向Ｚに見て、入力面１１より僅かに出力面１２側（図中、下方）に位置している。また、下端である出力面側端１０Ｈ２から出力面１２に至る縦方向Ｚの寸法Ｌ１は、Ｌ１＝０．０５Ｌの大きさにされている。 In addition, the horn portion 13 and the base portion 16 penetrate through them in the lateral width direction Y, extend in the longitudinal direction Z, and have a width (longitudinal direction X dimension) A3, which is a vertically long longitudinal through hole 10H (in this embodiment). 3).
The vertically long through hole 10 </ b> H is disposed between the input surface 11 and the output surface 12 when viewed in the vertical direction Z. In the present embodiment, specifically, the input surface side end 10H1 that is the upper end is slightly closer to the input surface 11 side than the node portion ZF, more specifically in the longitudinal direction Z, slightly more than the input surface 11. It is located on the output surface 12 side (downward in the figure). Further, the dimension L1 in the vertical direction Z from the output surface side end 10H2 which is the lower end to the output surface 12 is set to L1 = 0.05L.

また、縦長貫通孔１０Ｈは、ホーン部１３の長手方向Ｘについて、中心線（Ｘ＝０）に対称（図１において左右対称）に形成されている。即ち、３つの縦長貫通孔１０Ｈの１つは、ホーン部１３の長手方向Ｘの中心（Ｘ＝０）に、他の２つは長手方向Ｘの中心から、それぞれ距離Ａ２だけ離れた部位に形成されている。これら３つの縦長貫通孔１０Ｈの位置は、この超音波振動子１を縦方向Ｚに半波長共振させると共に、超音波ホーン１０を長手方向Ｘに共振させたとき、この長手方向Ｘに生じる共振の腹部ＸＨの位置にそれぞれ対応している。   Further, the vertically long through hole 10 </ b> H is formed symmetrically with respect to the center line (X = 0) in the longitudinal direction X of the horn portion 13 (left-right symmetric in FIG. 1). That is, one of the three vertically long through-holes 10H is formed at the center of the horn part 13 in the longitudinal direction X (X = 0), and the other two are separated from the center of the longitudinal direction X by a distance A2. Has been. The positions of the three vertically long through holes 10H are such that when the ultrasonic vibrator 1 is caused to resonate at half wavelength in the longitudinal direction Z and the ultrasonic horn 10 is caused to resonate in the longitudinal direction X, Each corresponds to the position of the abdomen XH.

また、超音波振動子１のうち、圧電素子２０は、具体的には、厚みがＴ１であり、長手方向Ｘ寸法がホーン部１３より僅かに短い２・Ａ４（＜２・Ａ１）、横幅方向Ｙ寸法もホーン部１３より僅かに短いＷ３（＜Ｗ１）の矩形板状で、ＰＺＴ系の圧電セラミックス材からなる。この圧電素子２０は、その厚み方向（縦方向Ｚ）に直交する駆動主面２０Ｄ及び背面２０Ｕに、図示しない電極層が形成され、かつ、この厚み方向に分極されている。
この圧電素子２０は、駆動主面２０Ｄが、前述した超音波ホーン１０の基部１６の入力面１１に、図示しない接着剤を介して固着されている。 In the ultrasonic transducer 1, the piezoelectric element 20 specifically has a thickness T <b> 1, and the longitudinal direction X dimension is slightly shorter than the horn part 13 2 · A4 (<2 · A1), in the lateral width direction. The Y dimension is a rectangular plate shape of W3 (<W1) slightly shorter than the horn part 13, and is made of a PZT-based piezoelectric ceramic material. The piezoelectric element 20 has an electrode layer (not shown) formed on the drive main surface 20D and the back surface 20U orthogonal to the thickness direction (vertical direction Z), and is polarized in the thickness direction.
In the piezoelectric element 20, the drive main surface 20 </ b> D is fixed to the input surface 11 of the base 16 of the ultrasonic horn 10 described above via an adhesive (not shown).

なお、圧電素子２０の駆動主面２０Ｄに形成された電極層（図示しない）は、超音波ホーン１０と電気的に導通している。
このため、この超音波振動子１（圧電素子２０）を駆動するには、超音波ホーン１０と圧電素子２０の背面２０Ｕとの間に駆動電圧を印加すればよい。 Note that an electrode layer (not shown) formed on the drive main surface 20 </ b> D of the piezoelectric element 20 is electrically connected to the ultrasonic horn 10.
For this reason, in order to drive the ultrasonic transducer 1 (piezoelectric element 20), a drive voltage may be applied between the ultrasonic horn 10 and the back surface 20U of the piezoelectric element 20.

この超音波振動子１を、共振周波数Ｆｒ（＝４０kHz)で駆動した場合に、出力面１２に生じる超音波振動の長手方向Ｘの分布の例を、図３に示す。
なお、本実施形態において、各寸法は、Ｌ＝40.0ｍｍ、Ｌ１＝2.0ｍｍ、Ｌ０＝67.0ｍｍ、Ｗ１＝12.0ｍｍ、Ｗ２＝2.0ｍｍ、Ｗ３＝10.0ｍｍ、Ｔ１＝2.0ｍｍ、Ａ１＝50.0ｍｍ、Ａ２＝31.5ｍｍ、Ａ３=3.0ｍｍ、Ａ４＝49.0ｍｍとした。 FIG. 3 shows an example of the distribution in the longitudinal direction X of the ultrasonic vibration generated on the output surface 12 when the ultrasonic vibrator 1 is driven at the resonance frequency Fr (= 40 kHz).
In this embodiment, the dimensions are L = 40.0 mm, L1 = 2.0 mm, L0 = 67.0 mm, W1 = 12.0 mm, W2 = 2.0 mm, W3 = 10.0 mm, T1 = 2.0 mm, A1 = 50.0 mm A2 = 31.5 mm, A3 = 3.0 mm, and A4 = 49.0 mm.

この図３のグラフによれば、長手方向Ｘの原点Ｘ＝０を中心に、振動分布がほぼ左右対称となっていることが判る。超音波振動子１の形態が、長手方向Ｘの原点（Ｘ＝０）を中心に左右対称の形状となっているためである。また、その振動（Ｚ方向変位）は、長手方向Ｘに見て、０．３１〜０．４１μｍp-p(０．３６±０．０５μｍp-p）の範囲（±１４％）に収まっており、この超音波振動子１において、Ｚ方向変位は、長手方向Ｘに均一であると言える。   According to the graph of FIG. 3, it can be seen that the vibration distribution is substantially symmetric about the origin X = 0 in the longitudinal direction X. This is because the form of the ultrasonic transducer 1 is symmetrical with respect to the origin (X = 0) in the longitudinal direction X. Further, the vibration (displacement in the Z direction) is within the range (± 14%) of 0.31 to 0.41 μmp-p (0.36 ± 0.05 μmp-p) when viewed in the longitudinal direction X. In this ultrasonic transducer 1, it can be said that the displacement in the Z direction is uniform in the longitudinal direction X.

このように、本実施形態では、超音波振動子１は、矩形状の入力面１１とこの入力面に対向する矩形状の出力面１２とを含み、これらを結ぶ縦方向Ｚに対して、この縦方向Ｚに直交する横断面ＫＦが、この横断面ＫＦに沿う長手方向Ｘに長く、長手方向Ｘに直交する横幅方向Ｙに短い矩形状を有する、超音波ホーン１０と、長手方向Ｘに長い矩形状の駆動主面２０Ｄ及び背面２０Ｕを有する矩形板状で、入力面に駆動主面２０Ｄが固着された圧電セラミック材からなる駆動部材である圧電素子２０と、を備えている。しかも、所定周波数Ｆｒで圧電素子２０を駆動したときに、縦方向Ｚに半波長共振すると共に、超音波ホーン１０が、長手方向Ｘに共振する形態に構成されてなる。超音波ホーン１０は、自身を横幅方向Ｙに貫通し、縦方向Ｚに延びた形状の縦長貫通孔１０Ｈを有している。この縦長貫通孔１０Ｈは、入力面１１側の端部１０Ｈ１が、縦方向Ｚの半波長共振の節部ＺＦよりも入力面１１側に位置している。かつ、縦方向Ｚの半波長共振の節部ＺＦから出力面１２までの距離をＬとし、出力面１２側の端部１０Ｈ２から出力面１２までの距離をＬ１としたとき、出力面１２側の端部１０Ｈ２が、距離Ｌ１＝（０．０５±０．０３)Ｌとなる部位に位置すると共に、長手方向Ｘの共振の腹部ＸＨにそれぞれ位置している。   As described above, in the present embodiment, the ultrasonic transducer 1 includes the rectangular input surface 11 and the rectangular output surface 12 facing the input surface. An ultrasonic horn 10 having a transverse section KF perpendicular to the longitudinal direction Z and having a rectangular shape that is long in the longitudinal direction X along the transverse section KF and short in the transverse width direction Y perpendicular to the longitudinal direction X, and long in the longitudinal direction X The piezoelectric element 20 is a rectangular plate having a rectangular driving main surface 20D and a back surface 20U, and is a driving member made of a piezoelectric ceramic material having the driving main surface 20D fixed to the input surface. In addition, when the piezoelectric element 20 is driven at a predetermined frequency Fr, the ultrasonic horn 10 resonates in the longitudinal direction X while resonating in the longitudinal direction Z by half wavelength. The ultrasonic horn 10 has a vertically long through-hole 10 </ b> H that penetrates itself in the lateral width direction Y and extends in the longitudinal direction Z. In the vertically long through hole 10H, the end 10H1 on the input surface 11 side is located closer to the input surface 11 than the node ZF of half-wave resonance in the vertical direction Z. When the distance from the node ZF of the half-wave resonance in the longitudinal direction Z to the output surface 12 is L, and the distance from the end 10H2 on the output surface 12 side to the output surface 12 is L1, the output surface 12 side The end 10H2 is located at a site where the distance L1 = (0.05 ± 0.03) L, and is located at the resonance antinode XH in the longitudinal direction X.

この超音波振動子１では、全体の縦方向寸法Ｌ０が半波長共振の大きさとなる。このため、超音波ホーンの縦方向寸法だけで半波長の大きさに達し、ＢＬＴを含めると１波長分の寸法となる、特許文献１に記載の超音波工具ホーンを用いた場合に比して、超音波振動子１全体の縦方向寸法の低背化を図ることができる。
このため、これを用いた超音波ウェルダなどの装置の低背化をも図ることができる。
しかも、距離Ｌ１を上述のように規定しているので、超音波ホーン１０の出力面１２の振動が、縦方向Ｚの振動で、かつその振動の振幅が長手方向Ｘに均一な超音波振動を励起できる。 In this ultrasonic transducer 1, the overall longitudinal dimension L0 is the magnitude of half-wave resonance. For this reason, compared with the case where the ultrasonic tool horn of patent document 1 which reaches the half-wave size only by the vertical dimension of an ultrasonic horn, and becomes a size for one wavelength when BLT is included is used. Thus, the overall height of the ultrasonic transducer 1 can be reduced.
For this reason, it is possible to reduce the height of an apparatus such as an ultrasonic welder using the same.
Moreover, since the distance L1 is defined as described above, the vibration of the output surface 12 of the ultrasonic horn 10 is the vibration in the longitudinal direction Z and the vibration amplitude is uniform in the longitudinal direction X. Can be excited.

さらに本実施形態では、超音波ホーン１０のうち、縦方向Ｚの半波長共振の節部ＺＦに、縦方向Ｚに直交する方向に突出するフランジ１４を有する超音波振動子１としている。   Furthermore, in the present embodiment, the ultrasonic transducer 1 having the flange 14 protruding in the direction orthogonal to the vertical direction Z is provided at the node ZF of the half-wave resonance in the vertical direction Z of the ultrasonic horn 10.

このように超音波ホーン１０に上述のフランジ１４を設けることで、超音波振動子１の振動を妨げることなく、超音波振動子１を容易に保持することができる。   By providing the above-described flange 14 in the ultrasonic horn 10 in this way, the ultrasonic vibrator 1 can be easily held without disturbing the vibration of the ultrasonic vibrator 1.

次いで、本実施形態に係る超音波振動子１の製造について説明する。
予め、超音波ホーン１０のほか、圧電素子２０を用意し、超音波ホーン１０の入力面１１と圧電素子２０の駆動主面２０Ｄとを対向させ、接着剤で固着する。
かくして、超音波振動子１が完成する。 Next, the manufacture of the ultrasonic transducer 1 according to this embodiment will be described.
In addition to the ultrasonic horn 10, the piezoelectric element 20 is prepared in advance, the input surface 11 of the ultrasonic horn 10 and the drive main surface 20D of the piezoelectric element 20 are opposed to each other, and are fixed with an adhesive.
Thus, the ultrasonic transducer 1 is completed.

以上において、本発明を実施形態に即して説明したが、本発明は上記実施形態に限定されるものではなく、その要旨を逸脱しない範囲で、適宜変更して適用できることはいうまでもない。
例えば、上述の実施形態では、寸法Ｌ１をＬ１＝０．０５Ｌの大きさとしたが、Ｌ１＝０．０２Ｌ〜０．０８Ｌ、即ち、Ｌ１＝（０．０５±０．０３）Ｌの範囲で、超音波振動子１を縦方向Ｚに半波長共振させた場合に、出力面１２の長手方向Ｘの振動分布をほぼ均一にできることが判っている。即ち、Ｌ１＝（０．０５±０．０３）Ｌとすると良い。 In the above, the present invention has been described with reference to the embodiments. However, the present invention is not limited to the above embodiments, and it is needless to say that the present invention can be appropriately modified and applied without departing from the gist thereof.
For example, in the above-described embodiment, the dimension L1 is set to L1 = 0.05L, but L1 = 0.02L to 0.08L, that is, L1 = (0.05 ± 0.03) L. It has been found that when the ultrasonic vibrator 1 is caused to resonate at half wavelength in the longitudinal direction Z, the vibration distribution in the longitudinal direction X of the output surface 12 can be made substantially uniform. That is, L1 = (0.05 ± 0.03) L is preferable.

また、上述の実施形態では、超音波ホーン１０のホーン部１３にフランジ１４を設けた例を示したが、フランジを設けない形態の超音波ホーンを用いても良い。この場合にも、超音波振動子を保持するにあたり、縦方向Ｚにおいてフランジ１４に相当する縦方向Ｚの節部ＺＦを把持するのが好ましい。   Moreover, although the example which provided the flange 14 in the horn part 13 of the ultrasonic horn 10 was shown in the above-mentioned embodiment, you may use the ultrasonic horn of the form which does not provide a flange. Also in this case, when holding the ultrasonic transducer, it is preferable to hold the node ZF in the vertical direction Z corresponding to the flange 14 in the vertical direction Z.

１ 超音波振動子
１０ 超音波ホーン
１１ 入力面
１２ 出力面
１３ ホーン部
１４ フランジ
１６ 基部
１０Ｈ 縦長貫通孔
１０Ｈ１ （縦長貫通孔の）入力面側端
１０Ｈ２ （縦長貫通孔の）出力面側端
２０ 圧電素子（駆動部材）
２０Ｄ （圧電素子の）駆動主面
２０Ｕ （圧電素子の）背面
３０ 後背部材
Ｘ 長手方向
Ｙ 横幅方向
Ｚ 縦方向
ＺＦ 節部
ＸＨ 腹部
Ｆｒ 共振周波数（所定周波数）
ＫＦ 横断面 DESCRIPTION OF SYMBOLS 1 Ultrasonic transducer 10 Ultrasonic horn 11 Input surface 12 Output surface 13 Horn part 14 Flange 16 Base 10H Longitudinal through-hole 10H1 (Longitudinal through-hole) Input surface side end 10H2 (Vertical long through-hole) Output surface side end 20 Piezoelectric Element (drive member)
20D (Piezoelectric element) driving main surface 20U (Piezoelectric element) back surface 30 Rear member X Longitudinal direction Y Horizontal width direction Z Vertical direction ZF Node XH Abdominal part Fr Resonance frequency (predetermined frequency)
KF cross section

Claims (2)

矩形状の入力面とこの入力面に対向する矩形状の出力面とを含み、
これら結ぶ縦方向に対して、この縦方向に直交する横断面が、この横断面に沿う長手方向に長く、上記長手方向に直交する横幅方向に短い矩形状を有する、
超音波ホーンと、
上記長手方向に長い矩形状の駆動主面及び背面を有する矩形板状で、上記入力面に上記駆動主面が固着された圧電セラミック材からなる駆動部材と、を備え、
所定周波数で上記駆動部材を駆動したときに、
上記縦方向に半波長共振すると共に、
上記超音波ホーンが、上記長手方向に共振する形態に構成されてなる
超音波振動子であって、
上記超音波ホーンは、
自身を上記横幅方向に貫通し、上記縦方向に延びた形状の縦長貫通孔を有し、
上記縦長貫通孔は、
上記入力面側の端部が、上記縦方向の半波長共振の節部よりも上記入力面側に位置し、
上記縦方向の半波長共振の節部から上記出力面までの距離をＬとし、
上記出力面側の端部から上記出力面までの距離をＬ１としたとき、
上記出力面側の端部が、距離Ｌ１＝（０．０５±０．０３)Ｌとなる部位に位置すると共に、
上記長手方向の腹部に位置してなる
超音波振動子。 A rectangular input surface and a rectangular output surface opposite the input surface;
With respect to these connecting longitudinal directions, the transverse section perpendicular to the longitudinal direction has a rectangular shape that is long in the longitudinal direction along the transverse section and short in the transverse width direction perpendicular to the longitudinal direction.
An ultrasonic horn,
A rectangular plate having a long rectangular main driving surface and a back surface in the longitudinal direction, and a driving member made of a piezoelectric ceramic material with the driving main surface fixed to the input surface;
When driving the drive member at a predetermined frequency,
While resonating half wavelength in the vertical direction,
The ultrasonic horn is an ultrasonic vibrator configured to resonate in the longitudinal direction,
The ultrasonic horn is
It has a vertically long through hole penetrating itself in the lateral width direction and extending in the longitudinal direction,
The vertically long through hole is
The end on the input surface side is located on the input surface side with respect to the node portion of the longitudinal half-wave resonance,
The distance from the node of the longitudinal half-wave resonance to the output surface is L,
When the distance from the end on the output surface side to the output surface is L1,
The end on the output surface side is located at a site where the distance L1 = (0.05 ± 0.03) L, and
The ultrasonic transducer | vibrator located in the said abdominal part of a longitudinal direction. 請求項１に記載の超音波振動子であって、
前記超音波ホーンは、
前記縦方向の半波長共振の節部に、前記縦方向に直交する方向に突出するフランジを有する
超音波振動子。 The ultrasonic transducer according to claim 1,
The ultrasonic horn is
An ultrasonic transducer having a flange projecting in a direction perpendicular to the longitudinal direction at a node of the longitudinal half-wave resonance.
JP2011077333A 2011-03-31 2011-03-31 Ultrasonic transducer Pending JP2012210575A (en)

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