TWI732992B - 貯藏庫 - Google Patents
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Abstract
[課題]有效率地在保管區域形成空氣流來確保保管區域的清淨度。 [解決手段]貯藏庫(100),是具備:區隔出貯藏庫內外的壁部(11)、配置在壁部(11)的內側且保管物品(M)的保管區域(12)、配置在保管區域(12)的壁部(11)側且於上下方向延伸的通道(13)、設置在通道(13)的上端且將朝向下方流動的空氣導入至通道(13)的導入口(13a)、用來限制通道(13)的上側與下側之間之空氣流通的流通限制部(13b)、設在通道(13)的保管區域(12)側且對保管區域(12)噴出空氣的噴出口(13c、13d)、以及設在通道(13)之中的流通限制部(13b)的下側且吸引外部的空氣來導入至通道(13)內的風扇(14)。
Description
[0001] 本發明是關於貯藏庫。
[0002] 貯藏庫,是為了將收容光柵或半導體晶圓等的容器予以複數保管而設置在半導體工場等。貯藏庫,是具有:區隔出內外的壁部、以及配置在壁部的內側且保管有容器的保管區域。在這種貯藏庫,因保管的容器(或容器的收容物),要求著使保管區域的清淨度成為ISO規格等級4以上。因此,是將外部之清淨的空氣導入至保管區域來謀求保管區域的清淨化,例如,已知有使用從建築物之頂棚部所具備的頂棚風扇往下方流動之清淨的空氣,來在保管區域形成水平方向的空氣流之構造(例如參照專利文獻1)。 [0003] 專利文獻1所記載的貯藏庫,是設置成:使在保管區域之背面側所設置的通道之上側開放,將藉由頂棚風扇而往下方流動的空氣導入至通道內,並從通道對保管區域於水平方向噴出空氣。且,在通道的下側,設有鼓風馬達,而將貯藏庫內的氣體送入至通道內來循環。該專利文獻1所記載的貯藏庫,由於從頂棚往下方流動的空氣是從通道的上方往下方變弱,故在保管區域的下方側,其水平方向的噴出量會比上方側還要少。因此,藉由鼓風馬達往通道內送入氣體,來在上下方向抑制從通道往水平方向噴出之量的偏差。 [0004] 且,已知有不使用從頂棚風扇往下方流動的空氣,而是例如在通道的背面側配置風扇的貯藏庫(例如參照專利文獻2)。專利文獻2所記載的貯藏庫,是藉由風扇將貯藏庫外部的空氣吸入至通道內,並在保管區域內將空氣往水平方向噴出,藉此在保管區域形成空氣流。 [先前技術文獻] [專利文獻] [0005] [專利文獻1]日本特開2000-16521號公報 [專利文獻2]日本專利第5251980號公報
[發明所欲解決的課題] [0006] 上述之專利文獻1所記載的貯藏庫,雖可確保從通道的下方往保管區域噴出之空氣的量,但由於是將貯藏庫內的氣體從鼓風馬達送入至通道內而再次噴出至保管區域,故會產生無法確保保管區域之清淨度的情況。且,上述之專利文獻2所記載的貯藏庫,欲在保管區域的全體形成一定量之空氣流的情況時,有必要在通道的上下方向配置複數個風扇,而使風扇的數量變多,不只是增加設備成本,還有著在貯藏庫的運作中用來驅動風扇的消耗電力變大的問題。且,風扇的數量變多的話,風扇的驅動所伴隨的發熱量也會變多,故有招致貯藏庫內之溫度上昇的情況。 [0007] 本發明,以提供一種貯藏庫為目的,其有效率地在保管區域形成空氣流來確保保管區域的清淨度,此外,還可抑制貯藏庫內的溫度上昇。 [用以解決課題的手段] [0008] 關於本發明的貯藏庫,是具備:區隔出貯藏庫內外的壁部、配置在壁部的內側且保管物品的保管區域、配置在保管區域的壁部側且於上下方向延伸的通道、設置在通道的上端且將朝向下方流動的空氣導入至通道的導入口、用來限制通道的上側與下側之間之空氣流通的流通限制部、設在通道保管區域側且對保管區域噴出空氣的噴出口、以及設在通道之中的流通限制部的下側且吸引外部的空氣來導入至通道內的風扇。 [0009] 且,噴出口,在通道的上側部分,是從上部往下部使開口率變大亦可。且,導入口,亦可將空氣導入至通道,該空氣是藉由在設置有貯藏庫之建築物之頂棚部所具備的頂棚風扇而往下方流動。且,亦可具備:從壁部的上部往頂棚部延伸設置的連接壁部、以及將保管區域的上端予以封閉的蓋部。且,風扇,亦可將導入至通道的外部空氣從噴出口朝向保管區域噴出。 [發明的效果] [0010] 根據本發明,可將在通道的上側部分從導入口往下方導入且在流通限制部被限制流動的空氣從噴出口噴出至保管區域而形成空氣流,且可將在通道的下側部分從風扇所吸引之外部的空氣予以噴出至保管區域而形成空氣流。藉由該構造,可遍及通道的上下對保管區域噴出適當流量的空氣,可有效率地於保管區域形成空氣流而容易保持保管區域的清淨度。且,通道的上側部分是吸取來自頂棚風扇的空氣,故沒有必要遍及通道的上下來配置多個風扇,可降低設備成本,進一步可降低驅動風扇用的消耗電力。且,由於不需要多個風扇,故可抑制貯藏庫內(保管區域)的溫度上昇。 [0011] 且,噴出口,在通道的上側部分,是從上部往下部使開口率變大,這構造是因應往下方流動之空氣的流量降低而使開口率變大,故可使形成於保管區域之空氣流的強度遍及上下地均勻化或是幾乎均勻化。且,導入口,是將空氣導入至通道,該空氣是藉由在設置有貯藏庫之建築物之頂棚部所具備的頂棚風扇而往下方流動,這構造可使用來自頂棚風扇的下氣流來有效率地將空氣從導入口吸入至通道內。 [0012] 且,具備:從壁部的上部往頂棚部延伸設置的連接壁部、以及將保管區域的上端予以封閉的蓋部,這構造可將從頂棚風扇往下方流動的空氣予以有效率地吸入至通道。且,風扇,是將導入至通道的外部空氣從噴出口朝向保管區域噴出,這構造是在通道的下側部分,驅動風扇藉此可對保管區域有效率地形成水平方向的空氣流。
[0014] 以下,針對本發明的實施形態一邊參照圖式一邊說明。但是,本發明並不限定於此形態。且,圖式中為了說明實施形態,有將一部分放大或強調來記載等適當變更尺寸來表現。 [0015] 圖1至圖3,為表示關於實施形態之貯藏庫100之一例的圖。圖1,表示從側方(搬送機構40的行走方向)觀看貯藏庫100之情況的剖面。圖2,表示沿著圖1之A-A線之剖面的構造。圖3,表示沿著圖1之B-B線之剖面的構造。貯藏庫100,是如圖1至圖3所示般,具有:本體部10、棚部20、移載裝置30、搬送機構40。貯藏庫100,是在內部保管物品M。本實施形態中,物品M是例如為收容光柵的光柵盒。物品M,其收容的光柵為1片或數片。物品M,在收容複數片光柵的情況,是以上下方向並排的狀態來收容光柵。 [0016] 本體部10,是在半導體工場等之建築物F的地面部FL設置,例如管理內部的溫度或濕度等。本體部10,具有:壁部11、保管區域12、通道13、風扇14。壁部11,是配置成包圍包含保管區域12的空間,且區隔出貯藏庫100的內外。壁部11,例如從上方觀看的情況是形成矩形狀。保管區域12,是保管有物品M的空間,且設在壁部11的內側。保管區域12,是形成在搬送機構40(移載裝置30)行走之區域的兩側。 [0017] 通道13,是分別配置在2個保管區域12的壁部11側。通道13,例如為矩形的箱狀,且設置成往上下方向延伸。通道13,是往上下方向設置成從保管區域12的最下部遍及至最上部來延伸。且,通道13,是如圖2所示般,沿著壁部11的水平方向複數並排配置。在圖2,雖然是對應載置在棚部20的2個物品M來設置通道13,但並不限定於此構造,亦可對應1個物品M來設置通道13,亦可對應3個以上的物品M來設置通道13。且,於水平方向配置的複數個通道13,亦可為相同大小,亦可為不同大小。 [0018] 通道13,是使內側的通道壁部13e與外側的通道壁部13f空出既定間隔來配置藉此形成,具有:導入口13a、流通限制部13b、噴出口13c、13d。又,外側的通道壁部13f,是形成貯藏庫100的壁部11。導入口13a,是配置在通道13的上端。導入口13a,是將朝向下方流動的空氣導入至通道13。 [0019] 導入口13a,例如,是將藉由在建築物F的頂棚部CL所具備的頂棚風扇CF而往下方流動的空氣予以導入。又,於建築物F的頂棚部CL配置有複數個頂棚風扇CF,而在建築物F內形成下氣流。頂棚風扇CF,例如使用有風扇過濾器單元。導入口13a,是為了將該頂棚風扇CF所致之下氣流(往下方流動的空氣)的一部分吸入至通道13內,而以朝向上方開口的狀態來配置。 [0020] 流通限制部13b,是配置在通道13內。流通限制部13b,例如,為用來分隔通道13之上側與下側的分隔板。流通限制部13b,是限制通道13上側與下側之間的空氣流通。藉由設置流通限制部13b,來限制從導入口13a導入的空氣流動至通道13下側的情況。又,流通限制部13b,並不限定為將通道13的上側與下側無間隙地分隔的構造。流通限制部13b,例如,亦可為在通道13的壁部之間以空出間隙的狀態來配置,亦可使用通氣度較小的過濾器。 [0021] 且,設置流通限制部13b的高度可任意設定。流通限制部13b,例如,亦可設在通道13之上下方向的中間位置或中間位置附近的高度。且,例如,在頂棚風扇CF所致之下氣流較強的情況時,因為空氣充分地被送至通道13的下方,故將流通限制部13b的高度設定在比通道13之上下方向的中間位置還要下方亦可,在頂棚風扇CF所致之下氣流較弱的情況時,因為空氣沒有充分地被送至通道13的下方,故將流通限制部13b的高度設定在比通道13之上下方向的中間位置還要上方。且,亦可使流通限制部13b的高度在上下方向可變更。 [0022] 噴出口13c、13d,是設在通道13之中之保管區域12側的通道壁部13e。噴出口13c、13d,是形成為使導入至通道13的空氣噴出至保管區域12。噴出口13c,是形成在通道13之中之流通限制部13b之上側部分13P的通道壁部13e。噴出口13d,是形成在通道13之中之流通限制部13b之下側部分13Q的通道壁部13e。 [0023] 圖4(A)及(B),分別為表示噴出口13c、13d之一例,表示從貯藏庫100的內側觀看通道13時的通道壁部13e。圖4(A)是表示下側部分13Q之通道壁部13e的一例,圖4(B)是表示上側部分13P之通道壁部13e的一例。如圖4(A)及(B)所示般,通道壁部13e,是例如使用沖壓金屬。噴出口13c、13d,如圖4(A)及(B)所示般,是在下側部分13Q及上側部分13P,於上下方向及水平方向分別以等間距來並排配置。 [0024] 如圖4(A)所示般,在下側部分13Q,於通道壁部13e配置有具有相同開口直徑的複數個噴出口13d。藉由該構造,使通道13的下側部分13Q從上部遍及下部使開口率幾乎成為均勻。因此,從通道13的下側部分13Q朝向保管區域12噴出的空氣,在通道13之下側部分13Q內的壓力為上下一定的情況,是下側部分13Q之上部與下部所噴出的空氣流量幾乎成為均勻。
如圖4(B)所示般,在上側部分13P,於通道壁部13e配置有使開口直徑從上部往下方變大的噴出口13c。藉由該構造,使通道13的上側部分13P從上部往下部使開口率變大。從通道13之上部的導入口13a所導入的空氣,是從上側部分13P的上部往下部會逐漸減少壓力。因此,在壓力較高的上部是從開口率較小的(開口直徑較小的)噴出口13c朝向保管區域12噴出空氣,在壓力較低的下部是從開口率較大的(開口直徑較大的)噴出口13d朝向保管區域12噴出空氣。藉由該構造,而從上側部分13P的上部遍及下部,使噴出至保管區域12的空氣流量幾乎成為均勻。
又,噴出口13c、13d的配置,並不限定於上述,亦可使複數個噴出口13c、13d以不等間隔來配置。且,噴出口13c、13d的形狀亦不限定於圓形狀,例如,亦可適用楕圓形狀、長圓形狀或多角形狀等任意的形狀。且,在通道13的上側部分13P,開口率的變化是從上部往下部線形地變化亦可,非線形地變化亦可。且,在通道13之上側部分13P的一部或全部,使開口率不變化亦可。
風扇14,是配置在通道13的下側部分13Q。風扇14,是配置在通道13之中與保管區域12相反側之外側的通道壁部13f。通道壁部13f,是面對貯藏庫100的外部來配置。風扇14,是使空氣的吸入口面對貯藏庫100的壁部11,將壁部11(本體部10)之外側的空氣予以吸引並導入至
通道13之下側部分13Q的內部。壁部11之外側的空氣,是建築物F內的空氣,是頂棚風扇CF所致之下氣流的一部分。且,風扇14,例如為風扇過濾器單元。
風扇14,是將所吸引之外部的空氣導入通道13,透過通道13的下側部分13Q來將空氣朝向保管區域12於水平方向(與搬送機構40的行走方向正交的方向)噴出。亦即,藉由風扇14吸引至通道13之下側部分13Q內的空氣,是從複數個噴出口13d朝向保管區域12噴出。又,從噴出口13d噴出之空氣的朝向為任意,不是水平方向而是往上下傾斜的方向亦可,且,從與搬送機構40的行走方向正交的方向開始傾斜的方向亦可。
風扇14,雖如圖1所示般,在通道13之下側部分13Q的上下方向無間隙地並排配置,但亦可為有間隙。且,風扇14,雖如圖3所示般,在通道13之下側部分13Q的水平方向無間隙地並排配置,但亦可為有間隙。根據該構造,在通道13的下側部分13Q,於上下方向及水平方向消除內部壓力的不均,且在下側部分13Q將所吸引的外部空氣朝向保管區域12噴出之際,可使空氣的流量在上下方向及水平方向成為均勻化或幾乎均勻化。
又,複數配置的風扇14,雖使用相同的風扇14,但並不限定於此構造,例如,亦可在上下方向配置有不同的風扇14,亦可在水平方向配置有不同的風扇14。且,複數個風扇14,並不限定於同時驅動全部,亦可交互或依順序驅動。且,複數個風扇14的一部分或全部,並不限定於連續驅動,亦可間歇驅動。
[0031] 本體部10,如圖1所示般,具有連接壁部11a與蓋部11b。連接壁部11a,是從壁部11的上部往頂棚部CL延伸設置。連接壁部11a,從上方觀看時,是配置成將貯藏庫100的壁部11包圍。藉由該構造,連接壁部11a,是將藉由頂棚部CL的頂棚風扇CF而往下方流動的空氣,導引至貯藏庫100的上方(被壁部11包圍之空間的上方)。藉由該連接壁部11a,可將藉由頂棚部CL的頂棚風扇CF而往下方流動的空氣容易吸入至通道13的導入口13a。 [0032] 蓋部11b,是將包含保管區域12的貯藏庫100之內部空間的上端予以封閉。藉由蓋部11b,來限制藉由頂棚部CL的頂棚風扇CF而往下方流動的空氣直接進入貯藏庫100之內部的情況。因此,是對於保管區域12從通道13噴出空氣。且,由於有蓋部11b,而能防止空氣從貯藏庫100內部往上側脫離的情況。 [0033] 又,是否設置上述的連接壁部11a及蓋部11b為任意,連接壁部11a及蓋部11b的一方或雙方沒有亦可。且,連接壁部11a及蓋部11b,並不限定於設置成沒有間隙,以在一部分設置間隙的狀態來設置亦可。且,連接壁部11a,並不限定於從貯藏庫100之壁部11往上方延伸,例如,從壁部11往外側擴張,或是往內側限縮地設置亦可。 [0034] 棚部20,是配置在保管區域12內,形成為可載置物品M。棚部20,是被未圖示的支柱部等所支撐,且在保管區域12內於上下方向設置複數層。本實施形態中,這種複數層的棚部20,是分別配置在沿著搬送機構40之行走方向的兩側。於各棚部20,分別形成有未圖示的切口部。且,各棚部20,例如亦可在上面具備未不圖示的3根銷。銷,是從棚部20的上面往上方突出設置,藉由進入在物品M的底面所具備的溝部,而可將物品M定位在棚部20。 [0035] 且,各棚部20,是設有淨化用裝置的供給噴嘴21。供給噴嘴21,是在將物品M載置於棚部20之際,配置成與在物品M的底面所具備之未圖示的淨化用氣體導入口連接。物品M的淨化用氣體導入口,是在將物品M載置於棚部20之際,從供給噴嘴21透過配管22而連接於淨化用氣體源23,來對物品M內供給淨化用氣體。又,亦可不在棚部20的一部分或全部設置供給噴嘴21。且,對物品M之淨化用氣體的供給,亦可在棚部20以外來進行,例如以將物品M搬入至貯藏庫100用之未圖示的裝載埠等來對物品M供給淨化用氣體亦可。 [0036] 移載裝置30,是對移載場所的棚部20移載物品M。移載裝置30,具有:基部31、伸縮部32、物品保持部33。基部31,是固定於後述的昇降台43。伸縮部32,是設置成可相對於基部31伸縮。物品保持部33,是安裝在伸縮部32的前端,且可保持物品M。物品保持部33,例如可往伸縮部32的伸縮方向移動。又,物品保持部33,是適用載置物品M來保持的構造,且可於上下方向通過上述棚部20的切口。又,移載裝置30,並不限定於載置物品M的構造,例如亦可適用有將設置在物品M之上部的凸緣部予以夾住保持的構造,或是把持物品M的側面來保持的構造等。 [0037] 搬送機構40,具有:軌道R、沿著該軌道R行走之未圖示的行走部、設在該行走部的塔42、以及沿著塔42昇降的昇降台43。軌道R,是在貯藏庫100內的地面部及頂棚部(蓋部11b)平行配置。且,軌道R,是相對於設有風扇14的壁部11平行地沿著保管區域12來配置。又,在圖1,雖表示2條軌道R,但數量為任意,亦可為1條軌道R。在軌道R行走的行走部,是藉由電動馬達等之驅動源來沿著軌道R行走。塔42,是沿著上下方向來配置,藉由行走部的驅動來與行走部一起移動。昇降台43,是藉由電動馬達等之驅動源來沿著塔42於上下方向昇降,而保持在任意的高度。 [0038] 在上述的貯藏庫100,是藉由未圖示的控制裝置,來控制往貯藏庫100之物品M的搬入動作及搬出動作、以及往棚部20之物品M的移載動作等。在將物品M搬入貯藏庫100的情況時,將未圖示的裝載埠所載置的物品M藉由移載裝置30來承接之後,藉由搬送機構40將移載裝置30移動至搬入目標的棚部20。之後,將移載裝置30的伸縮部32從基部31拉伸來將物品保持部33移動至棚部20的上方,在此狀態使昇降台43下降藉此將物品M載置於棚部20。藉由該動作,使物品M被載置於搬送目標的棚部20。 [0039] 接著,進行物品M之搬出的情況時,藉由搬送機構40將移載裝置30移動至載置有成為搬出對象之物品M的棚部20。接著,將伸縮部32拉伸來將物品保持部33移動至棚部20的下方,在此狀態使昇降台43上昇藉此使物品M從棚部20被移載至物品保持部33。之後,使伸縮部32收縮,而將載置有物品M的物品保持部33保持在基部31上。之後,藉由搬送機構40使移載裝置30移動至裝載埠,且藉由移載裝置30將物品M載置於裝載埠。藉由該動作,完成物品M的搬出。 [0040] 在上述般的貯藏庫100,因保管的物品M或物品M的收容物,要求著例如使保管區域12的清淨度成為ISO規格等級4以上。因此,將貯藏庫100之外部的清淨空氣導入至保管區域12來謀求保管區域12的清淨化。本實施形態中,貯藏庫100,是將藉由頂棚部CL的頂棚風扇CF而往下方流動的空氣從通道13的導入口13a予以導入,且透過噴出口13c而噴出至保管區域12,藉此在保管區域12形成水平方向的空氣流。且,貯藏庫100,是藉由風扇14將貯藏庫外部的空氣吸引至通道13,且透過噴出口13c噴出至保管區域12,藉此在保管區域12形成水平方向的空氣流。 [0041] 如上述般,關於本實施形態的貯藏庫100,可將在通道13的上側部分13P從導入口13a往下方導入且在流通限制部13b被限制流動的空氣從噴出口13c噴出至保管區域12而形成空氣流。且,在通道13的下側部分13Q,可將藉由風扇14所吸引的空氣噴出至保管區域12而形成空氣流。根據該構造,可容易且確實地在保管區域12的上下形成空氣流,可確保保管區域12的清淨度。此外,風扇14,僅配置在通道13的下側部分13Q,故不需要設置較多的風扇14,便可抑制貯藏庫100內(保管區域12)的溫度上昇。且,在通道13的上側部分13P及下側部分13Q均沒有在貯藏庫100內使空氣循環,而是將從外部吸取的空氣從貯藏庫100的底面往下方放出(參照圖1)。根據該構造,可防止貯藏庫100內(保管區域12)的溫度上昇,且降低對保管區域12的棚部20所載置之物品M之熱的影響。
上述的說明中,在通道13的下側部分13Q,雖舉例出風扇14在上下方向沒有間隙地並排配置的構造,但並不限定於該構造,可因應通道13之下側部分Q之上下方向的尺寸,或是因應風扇14的能力來適當變更風扇14的配置。
圖5,表示關於風扇14之配置之其他例子的圖。又,圖5所示的貯藏庫100A,除了風扇14之配置以外的構造,是適用與上述圖1所示的貯藏庫100相同的構造。如圖5所示般,當通道13之下側部分13Q之上下方向的尺寸比上述的實施形態還要短的情況,或是使用高性能的(每單位時間之空氣的吸引量或噴出量較大的)風扇14的情況,可以不將風扇14於上下方向無間隙地配置,而減少風扇14的設置數量。又,在圖5雖記載著1個風扇14,但亦可空出間隔配置複數個風扇14。
如上述般,在下側部分13Q之上下方向的尺寸
較短的情況,或是使用高性能的風扇14的情況,即使減少風扇14的設置數,亦可從噴出口13d對保管區域12供給充分的空氣流。根據該構造,可降低設備成本及風扇14之驅動所致的成本。
且,上述的說明中,說明了可取代將風扇14於上下方向無間隙地配置的情況,而改成使風扇14空出間隔來設置的情況,而這於水平方向也是相同。圖6,是表示關於風扇14之配置之其他例子的圖。又,圖6所示的貯藏庫100B,除了風扇14之配置以外的構造,是適用與上述圖1所示的貯藏庫100相同的構造。如圖6所示般,當通道13之下側部分13Q之左右方向的尺寸比上述的實施形態還要短的情況,或是使用高性能的風扇14的情況,可以不將風扇14於左右方向無間隙地配置,而減少風扇14的設置數。
如上述般,在下側部分13Q之左右方向的尺寸較短的情況,或是使用高性能的風扇14的情況,即使減少風扇14的設置數,亦可從噴出口13d對保管區域12供給充分的空氣流。根據該構造,可降低設備成本及風扇14之驅動所致的成本。
以上,雖針對實施形態進行了說明,但本發明並不限定於上述的說明,只要在不超脫本發明之主旨的範圍,可進行各種的變更。例如,在上述的實施形態,雖舉例說明了噴出口13c在通道13的上側部分13P,是從上部往下部使開口率變大的構造,但並不限定於該構造。例如,噴出口13c,亦可為從通道13的上部往下部使開口率為均勻的構造。
[0048] 且,在上述的實施形態中,雖舉例說明了通道13的導入口13a,是將藉由在建築物F的頂棚部CL所具備的頂棚風扇CF而往下方流動的空氣予以導入的構造,但並不限定於該構造。例如,通道13的導入口13a,亦可導入:藉由與頂棚風扇CF不同的手段來往下方流動的空氣。且,在法令所容許的條件下,將日本專利申請案的特願2017-020226、以及本說明書所引用之所有的文獻的內容援用成為本文記載的一部分。
[0049]F‧‧‧建築物M‧‧‧物品CL‧‧‧頂棚部CF‧‧‧頂棚風扇10‧‧‧本體部11‧‧‧壁部11a‧‧‧連接壁部11b‧‧‧蓋部12‧‧‧保管區域13‧‧‧通道13P‧‧‧上側部分13Q‧‧‧下側部分13a‧‧‧導入口13b‧‧‧流通限制部13c、13d‧‧‧噴出口14‧‧‧風扇20‧‧‧棚部30‧‧‧移載裝置40‧‧‧搬送機構100、100A、100B‧‧‧貯藏庫
[0013] 圖1為表示關於實施形態之貯藏庫之一例的剖面圖。 圖2為沿著圖1之A-A線的剖面圖。 圖3為沿著圖1之B-B線的剖面圖。 圖4(A)及(B)分別為表示噴出口之一例的圖。 圖5為表示風扇之配置之其他例子的圖。 圖6為表示風扇之配置之其他例子的圖。
10‧‧‧本體部
11‧‧‧壁部
11a‧‧‧連接壁部
11b‧‧‧蓋部
12‧‧‧保管區域
13‧‧‧通道
13P‧‧‧上側部分
13Q‧‧‧下側部分
13a‧‧‧導入口
13b‧‧‧流通限制部
13c、13d‧‧‧噴出口
13e‧‧‧內側的通道壁部
13f‧‧‧外側的通道壁部
14‧‧‧風扇
20‧‧‧棚部
21‧‧‧供給噴嘴
22‧‧‧配管
23‧‧‧淨化用氣體源
30‧‧‧移載裝置
31‧‧‧基部
32‧‧‧伸縮部
33‧‧‧物品保持部
40‧‧‧搬送機構
42‧‧‧塔
43‧‧‧昇降台
100‧‧‧貯藏庫
F‧‧‧建築物
M‧‧‧物品
CL‧‧‧頂棚部
CF‧‧‧頂棚風扇
FL‧‧‧地面部
Claims (5)
- 一種貯藏庫,是具備:區隔出貯藏庫內外的壁部、配置在前述壁部內側且保管物品的保管區域、配置在前述保管區域的前述壁部側且於上下方向延伸的通道、設置在前述通道的上端且將朝向下方流動的空氣導入至前述通道的導入口、用來限制前述通道的上側與下側之間之空氣流通的流通限制部、設在前述通道的前述保管區域側且對前述保管區域噴出空氣的噴出口、以及設在前述通道之中的前述流通限制部的下側且從橫方向吸引外部的空氣來直線地導入至前述通道內的風扇。
- 如請求項1所述的貯藏庫,其中,前述噴出口,在前述通道的上側部分,是從上部往下部使開口率變大。
- 如請求項1所述的貯藏庫,其中,前述導入口,是將空氣導入至前述通道內,該空氣是藉由設置有前述貯藏庫之建築物之頂棚部所具備的頂棚風扇而往下方流動。
- 如請求項3所述的貯藏庫,其具備:從前述壁部的上部往前述頂棚部延伸設置的連接壁部、以及將前述保管區 域的上端予以封閉的蓋部。
- 如請求項1~4中任一項所述的貯藏庫,其中,前述風扇,是將導入至前述通道的外部空氣從前述噴出口朝向前述保管區域噴出。
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2018
- 2018-01-11 US US16/483,066 patent/US10889438B2/en active Active
- 2018-01-11 CN CN201880010180.8A patent/CN110249419B/zh active Active
- 2018-01-11 KR KR1020197022699A patent/KR102227862B1/ko active IP Right Grant
- 2018-01-11 JP JP2018566802A patent/JP6747527B2/ja active Active
- 2018-01-11 WO PCT/JP2018/000436 patent/WO2018146987A1/ja unknown
- 2018-01-11 EP EP18751047.4A patent/EP3582255B1/en active Active
- 2018-01-11 SG SG11201906992YA patent/SG11201906992YA/en unknown
- 2018-02-06 TW TW107104086A patent/TWI732992B/zh active
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2019
- 2019-07-28 IL IL268308A patent/IL268308B2/en unknown
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EP3582255B1 (en) | 2021-09-29 |
JPWO2018146987A1 (ja) | 2019-11-14 |
IL268308A (en) | 2019-09-26 |
KR102227862B1 (ko) | 2021-03-15 |
IL268308B (en) | 2022-10-01 |
KR20190101448A (ko) | 2019-08-30 |
US20190375587A1 (en) | 2019-12-12 |
US10889438B2 (en) | 2021-01-12 |
EP3582255A4 (en) | 2020-12-30 |
JP6747527B2 (ja) | 2020-08-26 |
TW201829268A (zh) | 2018-08-16 |
CN110249419B (zh) | 2023-04-18 |
EP3582255A1 (en) | 2019-12-18 |
SG11201906992YA (en) | 2019-08-27 |
IL268308B2 (en) | 2023-02-01 |
WO2018146987A1 (ja) | 2018-08-16 |
CN110249419A (zh) | 2019-09-17 |
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