TWI728668B - Workpiece holding jig and surface treatment device - Google Patents

Workpiece holding jig and surface treatment device Download PDF

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Publication number
TWI728668B
TWI728668B TW109102378A TW109102378A TWI728668B TW I728668 B TWI728668 B TW I728668B TW 109102378 A TW109102378 A TW 109102378A TW 109102378 A TW109102378 A TW 109102378A TW I728668 B TWI728668 B TW I728668B
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workpiece
dummy
aforementioned
holding jig
edge
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TW109102378A
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Chinese (zh)
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TW202033841A (en
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石井勝己
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日商Ａｌｍｅｘ Ｐｅ股份有限公司
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06—Suspending or supporting devices for articles to be coated
    • C25D17/08—Supporting racks, i.e. not for suspending
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/007—Current directing devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/008—Current shielding devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating

Abstract

可保持欲表面處理的工件(20)，並且能與整流器電氣性連接的工件保持治具(30)具有：至少一個支承部(521、522)，具有導電性，可與整流器導通；和至少一個夾持器(510、520)，具有導電性，由支承部所支承，夾持工件之緣部的一部分；和至少一個虛設板，具有導電性，由支承部所支承，配置成與「工件的緣部中未被夾持器所保持的領域」接近；及至少一個絕緣板(630、630A、630B)，在虛設板的至少其中一面支承成可移動，以覆蓋該一面，用來調整虛設板的露出導電面積。The workpiece holding jig (30) that can hold the workpiece (20) to be surface treated and can be electrically connected to the rectifier has: at least one support portion (521, 522), which is conductive and can be connected to the rectifier; and at least one Holders (510, 520), which are conductive, are supported by the supporting part, and clamp a part of the edge of the workpiece; and at least one dummy plate, which is conductive, is supported by the supporting part, and is arranged to be The area in the edge that is not held by the holder" approaches; and at least one insulating plate (630, 630A, 630B) is supported on at least one side of the dummy board so as to be movable so as to cover that side for adjusting the dummy board The exposed conductive area.

Description

工件保持治具及表面處理裝置Workpiece holding jig and surface treatment device

本發明關於：電解電鍍(Electrolytic plating)等表面處理所使用的工件保持治具及表面處理裝置。The present invention relates to a workpiece holding jig and a surface treatment device used for surface treatment such as electrolytic plating.

已知有一種連續電鍍裝置，利用工件保持治具使工件垂下而浸漬於處理槽內的處理液，連續搬送工件並執行電解電鍍(專利文獻1、2)。工件保持治具，用來保持工件，並將工件設定於陰極。 [先前技術文獻] [專利文獻]There is known a continuous electroplating device that uses a workpiece holding jig to hang down the workpiece and immerse the workpiece in a processing solution in a processing tank, continuously convey the workpiece and perform electrolytic plating (Patent Documents 1 and 2). The workpiece holding jig is used to hold the workpiece and set the workpiece to the cathode. [Prior Technical Literature] [Patent Literature]

[專利文獻1]日本特許第5898540號公報 [專利文獻2]WO2018/062259號公報[Patent Document 1] Japanese Patent No. 5898540 [Patent Document 2] WO2018/062259 Publication

[發明欲解決之問題][Problem to be solved by invention]

工件保持治具，藉由夾持器夾持工件的緣部而保持工件，且夾持器成為用來將工件設定於陰極的導通路徑。欲表面處理之工件的緣部，舉例來說，倘若電鍍的話，在被夾持之領域的附近、及未被夾持的領域，電鍍膜厚不同，阻礙欲表面處理之工件的面內均一性(in-plane uniformity)。The workpiece holding jig holds the workpiece by gripping the edge of the workpiece by the gripper, and the gripper serves as a conduction path for setting the workpiece on the cathode. The edge of the workpiece to be surface treated, for example, if electroplated, the thickness of the electroplating film is different in the vicinity of the clamped area and the non-clamped area, which hinders the in-plane uniformity of the work to be surface treated (in-plane uniformity).

本發明的幾個樣態，其目的為：藉由設於工件保持治具的虛設板，調整流動於工件之緣部的電流，提高表面處理之工件的面內均一性。 本發明的其他幾個樣態，其目的為：可藉由虛設板，調整工件的緣部中未被夾持之領域的表面處理，並可藉由自動機器將工件對工件保持治具裝卸。Several aspects of the present invention aim to adjust the current flowing at the edge of the workpiece by using the dummy plate provided on the workpiece holding jig to improve the in-plane uniformity of the workpiece for surface treatment. The other aspects of the present invention have the purpose of adjusting the surface treatment of the un-clamped area at the edge of the workpiece by using the dummy plate, and by using an automatic machine to load and unload the workpiece to the workpiece holding jig.

[解決問題之手段][Means to Solve the Problem]

(1)本發明中一種樣態，關於可保持欲表面處理的工件，並且可與整流器電氣性連接的工件保持治具， 具有：至少一個支承部，可與前述整流器導通；和 至少一個夾持器，具有導電性，由前述至少一個支承部所支承，用來夾持前述工件之緣部的一部分；和 至少一個虛設板，具有導電性，由前述至少一個支承部所支承，配置成與前述工件的前述緣部中未被前述至少一個夾持器所保持的領域接近；和 至少一個絕緣板，可移動地支承於前述至少一個虛設板的至少其中一面，以覆蓋前述至少其中一面，進而調整前述至少其中一個虛設板的露出導電面積。(1) One aspect of the present invention relates to a workpiece holding jig that can hold the workpiece to be surface-treated and can be electrically connected to the rectifier, Having: at least one supporting part which can be connected to the aforementioned rectifier; and At least one holder, which has conductivity, is supported by the aforementioned at least one supporting portion, and is used to hold a part of the edge of the aforementioned workpiece; and At least one dummy board having conductivity, supported by the aforementioned at least one supporting portion, and arranged to be close to an area of the aforementioned edge portion of the aforementioned workpiece that is not held by the aforementioned at least one holder; and At least one insulating board is movably supported on at least one surface of the aforementioned at least one dummy board to cover the aforementioned at least one surface, thereby adjusting the exposed conductive area of the aforementioned at least one dummy board.

根據本發明的一種樣態，能藉由絕緣板的移動，調整虛設板的露出導電面積。藉由變更虛設板的露出導電面積，可調整對虛設板表面處理時所耗費的電流。如此一來，能調整透過夾持器而流動於工件之緣部的電流，而提高欲表面處理之工件的面內均一性。本發明之一種樣態的治具，可在處理槽內連續搬送或者間歇搬送，或者亦可不搬送地在處理槽內支承成自由進出。According to one aspect of the present invention, the exposed conductive area of the dummy board can be adjusted by moving the insulating board. By changing the exposed conductive area of the dummy board, the current consumed during the surface treatment of the dummy board can be adjusted. In this way, the current flowing through the clamper and flowing to the edge of the workpiece can be adjusted, and the in-plane uniformity of the workpiece to be surface-treated can be improved. One aspect of the jig of the present invention can be continuously transported or intermittently transported in the processing tank, or it can also be supported in the processing tank to be freely in and out without being transported.

(2)在本發明的一種樣態(1)中， 具有圍繞前述工件的框體，前述框體含有上框、下框及一對縱框， 前述至少一個支承部，含有前述上框與前述下框， 前述至少一個夾持器含有：上側夾持器，由前述上框所支承，用來夾持前述工件之上緣部的一部分；及下側夾持器，由前述下框所支承，用來夾持前述工件之下緣部的一部分， 前述至少一個虛設板含有：上側虛設板，配置成與前述工件的前述上緣部中未被前述上側夾持器所保持的領域接近；及下側虛設板，配置成與前述工件的前述下緣部中未被前述下側夾持器所保持的領域接近， 前述至少一個絕緣板可含有：上側絕緣板，覆蓋前述上側虛設板的至少其中一面；及下側絕緣板，覆蓋前述下側虛設板的至少其中一面。 如此一來，能調整流動於工件之上緣部及下緣部的電流，而提高欲表面處理之工件的面內均一性。(2) In one aspect (1) of the present invention, It has a frame surrounding the work piece, and the frame includes an upper frame, a lower frame and a pair of vertical frames, The aforementioned at least one supporting portion includes the aforementioned upper frame and the aforementioned lower frame, The aforementioned at least one holder includes: an upper holder supported by the upper frame for holding a part of the upper edge of the workpiece; and a lower holder supported by the lower frame for holding Holding a part of the lower edge of the aforementioned workpiece, The at least one dummy board includes: an upper dummy board arranged to be close to an area of the upper edge portion of the work that is not held by the upper clamp; and a lower dummy board arranged to be close to the lower edge of the work Is not close to the area held by the aforementioned lower gripper, The at least one insulating plate may include: an upper insulating plate covering at least one surface of the upper dummy plate; and a lower insulating plate covering at least one surface of the lower dummy plate. In this way, the current flowing in the upper and lower edges of the workpiece can be adjusted, and the in-plane uniformity of the workpiece to be surface-treated can be improved.

(3)在本發明的一種樣態(1)或(2)中， 前述至少一個絕緣板可含有：表側絕緣板，覆蓋前述至少一個虛設板的表面；及背側絕緣板，覆蓋前述至少一個虛設板的背面。 如此一來，可在工件的表面及背面的雙方，調整流動於工件之緣部(上緣部及下緣部)的電流，而提高欲表面處理之工件的面內均一性。(3) In one aspect (1) or (2) of the present invention, The aforementioned at least one insulating board may include: a front-side insulating board covering the surface of the aforementioned at least one dummy board; and a back-side insulating board covering the back surface of the aforementioned at least one dummy board. In this way, the current flowing through the edges (upper edge and lower edge) of the workpiece can be adjusted on both the front and back sides of the workpiece, and the in-plane uniformity of the workpiece to be surface-treated can be improved.

(4)在本發明的一種樣態(1)至(3)的其中任一個中， 前述至少一個虛設板，可透過鉸鍊而彎曲，並可朝第1位置與第2位置移動，該第1位置，與前述工件的前述緣部中未被前述至少一個夾持器所保持的領域接近，並配置成與前述工件平行，該第2位置，藉由前述鉸鍊而彎曲，而配置成與前述工件非平行。(4) In any one of the aspects (1) to (3) of the present invention, The aforementioned at least one dummy board can be bent through a hinge and can be moved to a first position and a second position, the first position being close to the area of the edge of the workpiece that is not held by the at least one holder , And arranged to be parallel to the workpiece, and the second position, which is bent by the hinge, is arranged to be non-parallel to the workpiece.

當對工件表面處理時，虛設板設定於第1位置，當藉由自動機器對工件保持治具裝卸工件時，虛設板設定於第2位置。藉由將虛設板設定於第2位置，可在工件的緣部與支承部之間確保間隙。藉此，在與「工件保持治具之夾持器」不同的位置，可藉由自動機器夾持工件的緣部。在該場合中，亦可由自動機器推動虛設板，使虛設板從第1位置朝向第2位置移動。When processing the surface of the workpiece, the dummy plate is set at the first position. When the workpiece is held by an automatic machine for loading and unloading the workpiece, the dummy plate is set at the second position. By setting the dummy board at the second position, a gap can be secured between the edge of the workpiece and the support. In this way, the edge of the workpiece can be clamped by an automatic machine at a different position from the "holding fixture of the workpiece". In this case, the dummy board may be pushed by an automatic machine to move the dummy board from the first position to the second position.

(5)在本發明的一種樣態(4)中，前述至少一個虛設板，亦可藉由前述鉸鍊本身的彈性、或者設於前述鉸鍊的彈推構件，而朝前述第1位置彈推移動。 一旦如此，不必作用外部的復原力，便能使虛設板從第2位置朝向第1位置復位。特別的是，藉由自動機器之前進的外力來推動虛設板，使虛設板從第1位置朝向第2位置移動，當自動機器後退時，可藉由非外力的彈推力，使虛設板從第2位置朝第1位置復位。 (5) In one aspect (4) of the present invention, the at least one dummy board may also be pushed and moved toward the first position by the elasticity of the hinge itself or the elastic pushing member provided on the hinge . Once this is done, it is possible to reset the dummy board from the second position to the first position without having to act on the external restoring force. In particular, the dummy board is pushed from the first position to the second position by the external force that the automatic machine advances. When the automatic machine retreats, the dummy board can be moved from the first position by a non-external force. The 2 position returns to the first position.

(6)本發明的另一種樣態，關於可保持欲表面處理的工件，並且可與整流器電氣性連接的工件保持治具，具有：至少一個支承部，可與前述整流器導通；和至少一個夾持器，具有導電性，由前述至少一個支承部所支承，用來夾持前述工件之緣部的一部分；和至少一個虛設板，透過鉸鍊由前述至少一個支承部所支承，並可朝第1位置與第2位置移動，該第1位置，與前述工件的前述緣部中未被前述至少一個夾持器所保持的領域接近，並配置成與前述工件平行，該第2位置，藉由前述鉸鍊而彎曲，而配置成與前述工件非平行。 (6) Another aspect of the present invention relates to a workpiece holding jig that can hold the workpiece to be surface-treated and can be electrically connected to the rectifier, which has: at least one support portion that can be electrically connected to the rectifier; and at least one clamp The holder is electrically conductive and is supported by the at least one supporting portion for holding a part of the edge of the workpiece; and at least one dummy board, which is supported by the at least one supporting portion through a hinge, and can face the first The position moves to the second position. The first position is close to the area of the edge of the workpiece that is not held by the at least one holder, and is arranged to be parallel to the workpiece. The second position is The hinge is bent and arranged so as to be non-parallel to the aforementioned workpiece.

根據本發明的另一種樣態(6)，與本發明的一種樣態(4)相同，可藉由虛設板，調整工件的緣部中未被夾持之領域的表面處理，並可藉由自動機器將工件對工件保持治具裝卸。 According to another aspect (6) of the present invention, which is the same as the aspect (4) of the present invention, the surface treatment of the area that is not clamped at the edge of the workpiece can be adjusted by using a dummy board, and by The automatic machine loads and unloads the workpiece to the workpiece holding the jig.

(7)本發明的另外一種樣態，關於具有下述構件的表面處理裝置：上述(1)~(6)之其中任一個的工件保持治具；和 供電部，連接於整流器，並與前述工件保持治具接觸；及表面處理槽，具備連接於前述整流器的陽極，前述工件保持治具含有：與前述供電部接觸，並與前述至少一個支承部導通的接觸部。 (7) Another aspect of the present invention relates to a surface treatment device having the following components: the workpiece holding jig of any one of (1) to (6) above; and The power supply part is connected to the rectifier and is in contact with the workpiece holding jig; and the surface treatment tank is provided with an anode connected to the rectifier, and the workpiece holding jig includes: contact with the power supply part and conduction with the at least one support part的contact part.

根據本發明的另外一種樣態(7)，能藉由上述(1)~(6)之各樣態的作用效果，提高欲表面處理之工件的面內均一性，或者，可設置虛設板，同時藉由自動機器對工件保持治具裝卸工件。在治具於表面處理槽內搬送的場合中，設於表面處理裝置且接觸治具的供電部，由供電軌道形成。在不搬送治具的場合中，供電部，可形成與治具的導電構件接觸的固定接點。 According to another aspect (7) of the present invention, the in-plane uniformity of the workpiece to be surface treated can be improved by the effects of the above-mentioned aspects (1) to (6), or a dummy board may be provided, At the same time, the workpiece is held by the automatic machine to load and unload the workpiece. When the jig is transported in the surface treatment tank, the power supply part provided in the surface treatment device and in contact with the jig is formed by a power supply rail. In the case where the jig is not transported, the power supply part can form a fixed contact that contacts the conductive member of the jig.

在以下的揭示中，提供多個不同的實施形態和實施例，用來實施所提示之主題的不同特徵。當然，這些說明僅為例子，並不具有限定本發明的意圖。除此之外，在本揭示中，有時參考號碼及/或文字反覆地於各種的例子出現。反覆的內容，是為了有助於理解本發明，其本身在各個實施形態及/或所說明的構造之間不具有關聯。除此之外，當描述第1元件「連接」或者「連結」於第2元件時，這樣的描述包含：第1元件與第2元件彼此直接地連接或者連結的實施形態，並且包含：第1元件與第2元件，具有1個以上的其他元件存在於兩者之間，而彼此間接地連接或者連結的實施形態。此外，當描述成第1元件相對於第2元件「移動」時，該描述包含「第1元件及第2元件中的至少其中一個，相對於另一個移動」之相對移動的實施形態。In the following disclosure, a number of different implementation forms and examples are provided to implement different features of the suggested theme. Of course, these descriptions are only examples, and are not intended to limit the present invention. In addition, in the present disclosure, sometimes reference numbers and/or characters appear repeatedly in various examples. The content of the repetition is to help the understanding of the present invention, and it does not have any relationship between each embodiment and/or the structure described. In addition, when the first element is described as "connected" or "connected" to the second element, such description includes: the first element and the second element are directly connected or connected to each other, and include: the first The element and the second element have an embodiment in which one or more other elements exist between them and are indirectly connected or connected to each other. In addition, when it is described that the first element "moves" with respect to the second element, the description includes an embodiment of relative movement of "at least one of the first element and the second element moves with respect to the other".

1、表面處理裝置的概要 圖1，為表面處理裝置譬如連續電鍍處理裝置的縱剖面圖。連續電鍍處理裝置10，分別用來保持電路基板等工件20的複數個搬送治具30，朝向與圖1的紙面垂直的方向循環搬送。在圖1中，於循環搬送通路100之中，顯示了平行的2個直線搬送通路110、120。該2個直線搬送通路110、120，於兩端連結而形成環圈狀的循環搬送通路100。1. Outline of the surface treatment device Fig. 1 is a longitudinal sectional view of a surface treatment device such as a continuous electroplating treatment device. The continuous plating processing apparatus 10 is used for holding a plurality of conveying jigs 30 for holding workpieces 20 such as circuit boards, respectively, and is cyclically conveyed in a direction perpendicular to the paper surface of FIG. 1. In FIG. 1, in the circulating conveyance path 100, two parallel linear conveyance paths 110 and 120 are shown. The two linear conveying paths 110 and 120 are connected at both ends to form a loop-shaped circulating conveying path 100.

在循環搬送通路100設有：電鍍槽(廣義的表面處理槽)200，由複數個工件保持治具30所分別保持，對工件20執行表面處理，譬如電鍍處理；和搬入部(圖面中未顯示)，將未處理的工件20搬入複數個搬送治具30；及搬出部(圖面中未顯示)，將處理完畢的工件20從複數個工件保持治具30搬出。The circulating conveyance path 100 is provided with: an electroplating tank (surface treatment tank in a broad sense) 200, which is held by a plurality of workpiece holding jigs 30, and performs surface treatment on the workpiece 20, such as electroplating; and a carry-in part (not shown in the figure) Show), the unprocessed workpiece 20 is carried into the plurality of transfer jigs 30; and the carry-out part (not shown in the figure), the processed workpiece 20 is carried out from the plurality of workpiece holding jigs 30.

在本實施形態中，電鍍槽200沿著第2直線搬送通路120設置，搬入部及搬出部則設於第1直線搬送通路110。在循環搬送通路100，更進一步具有：配置於電鍍槽200之上游側的前處理槽群230、及配置於電鍍槽200之下游側的後處理槽群(圖面中未顯示)。In this embodiment, the plating tank 200 is provided along the second linear conveying path 120, and the carrying-in part and the carrying-out part are provided in the first linear conveying path 110. The circulating transport path 100 further includes a pre-treatment tank group 230 arranged on the upstream side of the electroplating tank 200 and a post-processing tank group arranged on the downstream side of the electroplating tank 200 (not shown in the drawing).

如圖1所示，連續電鍍處理裝置10具有：收容電鍍液(廣義的處理液)，且具有上端開口201的電鍍槽(廣義的表面處理槽)200。連續電鍍處理裝置10，更進一步如放大顯示圖1之局部的圖2所示，在從電鍍槽200之上端開口201的上方分離的位置，具有沿著與「電鍍槽200之長度方向」平行的第1方向(與紙面垂直的方向)延伸設置的至少1個，譬如2個第1導引軌道130及第2導引軌道140。複數個搬送治具30，配置於電鍍槽200的處理液中分別保持工件20，並由第1、第2導引軌道130、140所支承。As shown in FIG. 1, the continuous plating processing apparatus 10 has a plating tank (surface treatment tank in a broad sense) 200 that contains a plating solution (a processing solution in a broad sense) and has an upper end opening 201. The continuous electroplating processing apparatus 10, as shown in FIG. 2 showing a part of FIG. 1 enlarged, has a position separated from above the opening 201 at the upper end of the electroplating tank 200, and has a line parallel to the "length direction of the electroplating tank 200" At least one extending in the first direction (direction perpendicular to the paper surface), for example, two first guide rails 130 and second guide rails 140. A plurality of transfer jigs 30 are arranged in the treatment liquid of the electroplating tank 200 to hold the workpiece 20 respectively, and are supported by the first and second guide rails 130 and 140.

複數個工件保持治具30，分別如圖3所示，大致具有搬送部300、工件保持部500。作為搬送部300，具有水平臂部301、第1被導引部310、第2被導引部320。第1被導引部310，由水平臂部301的其中一端側所支承，並由第1導引軌道130所導引。第2被導引部320，由水平臂部301的另一端側所支承，並由第2導引軌道140所導引。第1被導引部310含有：與第1導引軌道130的上表面及兩側面滾動接觸的滾子311、312、313。第2被導引部320含有：與第2導引軌道140的上表面滾動接觸的滾子321。The plural workpiece holding jigs 30, respectively, as shown in FIG. 3, generally have a conveying part 300 and a workpiece holding part 500. The conveying unit 300 has a horizontal arm unit 301, a first guided unit 310, and a second guided unit 320. The first guided portion 310 is supported by one end of the horizontal arm portion 301 and guided by the first guide rail 130. The second guided portion 320 is supported by the other end side of the horizontal arm portion 301 and guided by the second guide rail 140. The first guided portion 310 includes rollers 311, 312, and 313 that are in rolling contact with the upper surface and both side surfaces of the first guide rail 130. The second guided portion 320 includes a roller 321 that is in rolling contact with the upper surface of the second guide rail 140.

在電鍍處理裝置10中，將工件20作為陰極(cathode)，電鍍槽200在隔著工件20之搬送路徑的兩側，設有用來收容陽極(anode)410L、410R的陽極箱202、203。由圖面中未顯示的整流器在陰極與陽極之間形成電場(electric field)而對電鍍液進行電解(electrolysis)，進而對工件20進行電解電鍍。因此，有必要對搬送中的工件20通電。為了對工件20供電，而設有供電部，譬如供電軌道210。特別是，本實施形態的供電軌道210，為了實施日本特開2009-132999所揭示的電流控制方法，而如圖2所示，具有彼此絕緣的複數個，譬如4個分支(Branched)供電軌道210A~210D。複數個工件保持治具30，分別具有：與4個分支供電軌道210A~210D之其中任一個接觸而被供電的被供電部340(圖2及圖3)。In the electroplating apparatus 10, the workpiece 20 is used as a cathode, and the electroplating tank 200 is provided with anode boxes 202 and 203 for accommodating anodes 410L and 410R on both sides of the conveying path of the workpiece 20 therebetween. A rectifier (not shown in the figure) forms an electric field between the cathode and the anode to electrolyze the electroplating solution, and then electrolyze the workpiece 20. Therefore, it is necessary to energize the workpiece 20 that is being transported. In order to supply power to the workpiece 20, a power supply unit, such as a power supply rail 210, is provided. In particular, in order to implement the current control method disclosed in Japanese Patent Application Publication No. 2009-132999, the power supply rail 210 of the present embodiment has a plurality of insulated power supply rails, such as four branched power supply rails 210A, as shown in FIG. ~210D. The plurality of workpiece holding jigs 30 respectively have a powered portion 340 (FIG. 2 and FIG. 3) that is in contact with any one of the four branch power supply rails 210A to 210D to be powered.

圖4，顯示被供電部340的細部。被供電部340，在固定於水平臂部301的支承板330，具有與供電軌道210接觸之導電性的接觸部(集電器；current collector) 341。接觸部341，藉由「具有2個平行連桿342A、342B的平行連桿機構342」而連結於支承板330。2個連桿342A、342B，藉由本身為彈推構件的扭力螺旋彈簧(torsion coil spring)343、343，而持續地朝順時鐘方向移動彈推。其結果，能以適度的接觸壓使接觸部341接觸於供電軌道210。FIG. 4 shows the details of the powered part 340. The power supply portion 340 has a conductive contact portion (current collector) 341 that is in contact with the power supply rail 210 on the support plate 330 fixed to the horizontal arm portion 301. The contact portion 341 is connected to the support plate 330 by a "parallel link mechanism 342 with two parallel links 342A and 342B". The two links 342A and 342B are driven by a torsion coil spring ( torsion coil spring) 343, 343, while continuously moving the bounce in the clockwise direction. As a result, the contact portion 341 can be brought into contact with the power supply rail 210 with a moderate contact pressure.

此外，2個平行連桿342A、342B，相對於治具30的搬送方向A形成傾斜，而成為上側支點在前，下側支點在後。其結果，由於接觸部341以被工件保持治具30所牽引的狀態行走，因此行走穩定。In addition, the two parallel links 342A and 342B are inclined with respect to the conveying direction A of the jig 30 so that the upper fulcrum is at the front and the lower fulcrum is at the rear. As a result, since the contact portion 341 travels in a state of being pulled by the workpiece holding jig 30, the travel is stable.

2、工件保持部 如圖5所示，工件保持部500具有：導電性的複數個上側夾持器510，夾持矩形工件20的上緣部20a；和導電性的複數個下側夾持器520，夾持矩形工件20的下緣部20b；及框體530，配置成包圍矩形工件20，並支承複數個上側夾持器510及複數個下側夾持器520。2. Workpiece holding part As shown in FIG. 5, the workpiece holding portion 500 has: a plurality of conductive upper grippers 510, which grip the upper edge portion 20a of the rectangular workpiece 20; and a plurality of conductive lower grippers 520, which grip the rectangular workpiece 20 The lower edge portion 20b of the workpiece 20; and the frame body 530 are arranged to surround the rectangular workpiece 20 and support a plurality of upper grippers 510 and a plurality of lower grippers 520.

框體530具有：導電性的上框531，支承複數個上側夾持器510；和導電性的下框532，支承複數個下側夾持器520；及導電性的一對縱框533、534，分別與上框531的兩端部與下框532的兩端部連結。在此，一對縱框533、534，與上框531的兩端部形成電氣性絕緣，另外與下框532的兩端部形成電氣性連接。上框531及/或下框532，也被稱為：用來支承夾持器(上側夾持器510及/或下側夾持器520)的支承部。The frame 530 has: a conductive upper frame 531 that supports a plurality of upper clamps 510; a conductive lower frame 532 that supports a plurality of lower clamps 520; and a pair of conductive vertical frames 533, 534 , Are respectively connected to both ends of the upper frame 531 and the both ends of the lower frame 532. Here, the pair of vertical frames 533 and 534 are electrically insulated from both ends of the upper frame 531, and are electrically connected to both ends of the lower frame 532. The upper frame 531 and/or the lower frame 532 are also referred to as supporting parts for supporting the holders (the upper holder 510 and/or the lower holder 520).

3、將工件設定為陰極的導電構件 在本實施形態中，設於工件保持治具30且可與整流器及工件20電氣性連接的導電構件，含有：第1及第2分歧導電構件；以及共通導電構件，與第1及第2分歧導電構件電氣性連接。3. Set the workpiece as the conductive member of the cathode In this embodiment, the conductive member that is provided in the workpiece holding jig 30 and can be electrically connected to the rectifier and the workpiece 20 includes: the first and second branch conductive members; and the common conductive member, which is separated from the first and second branch The conductive member is electrically connected.

具體地說，如圖5所示，一對接觸部341，在工件保持治具30的搬送方向A，保持間隔地配置2個。將搬送方向A之上游側的接觸部341稱為第1接觸部341A，將搬送方向A之下游側的接觸部341稱為第2接觸部341B。在第1、第2接觸部341A、341B，電氣性地連接有一對第1纜線350A、350B的各自一端。Specifically, as shown in FIG. 5, the pair of contact portions 341 are arranged at an interval in the conveying direction A of the workpiece holding jig 30. The contact portion 341 on the upstream side in the conveying direction A is referred to as a first contact portion 341A, and the contact portion 341 on the downstream side in the conveying direction A is referred to as a second contact portion 341B. To the first and second contact portions 341A, 341B, one ends of a pair of first cables 350A, 350B are electrically connected.

一對第1纜線350A、350B之各自的另一端，共通連接於共通連接部360。作為共通導電構件的共通連接部360，可含有：第1導電構件361，可供一對第1纜線350A、350B的各自另一端電氣性地共通連接；及一對第2導電構件362、363，固定於第1導電構件361的兩端部。一對第2導電構件362、363，在從「一對第1纜線350A、350B之各自的另一端電氣性地共通連接於第1導電構件361的位置」起之相等距離L的位置，固定於第1導電構件361的兩端部。為了在「從第1導電構件361的兩端部起相等距離L的位置」，共通連接一對第1纜線350A、350B，亦可將一對第1纜線350A、350B的其中一個連接於第1導電構件361的表面，並將另一個連接於第1導電構件361的背面。The other ends of each of the pair of first cables 350A and 350B are commonly connected to the common connection part 360. The common connection portion 360 as a common conductive member may include: a first conductive member 361 for electrically and commonly connecting the other ends of the pair of first cables 350A, 350B; and a pair of second conductive members 362, 363 , Are fixed to both ends of the first conductive member 361. The pair of second conductive members 362, 363 are fixed at a position equal to the distance L from "the position where the other end of each of the pair of first cables 350A, 350B is electrically and commonly connected to the first conductive member 361" At both ends of the first conductive member 361. In order to connect a pair of first cables 350A and 350B at "a position at an equal distance L from both ends of the first conductive member 361", one of the pair of first cables 350A and 350B may be connected to The surface of the first conductive member 361 and the other one is connected to the back surface of the first conductive member 361.

作為設於工件保持治具30的導電構件，更進一步具有：一對第1連接部370A、370B，電氣性地連接上框531的兩端部與共通連接部360；及一對第2連接部380A、380B，電氣性地連接「與下框532的兩端部電氣性連接的一對縱框533、534」、與共通連接部360。一對縱框533、534，與上框531形成電氣性絕緣。藉由調整一對第2連接部380A、380B的形狀、厚度、材質等，進而調整電阻值，藉此，能調整流動於上側夾持器510的電流。As a conductive member provided in the workpiece holding jig 30, it further has: a pair of first connection portions 370A, 370B, which electrically connect both ends of the upper frame 531 and the common connection portion 360; and a pair of second connection portions 380A and 380B are electrically connected to "a pair of vertical frames 533 and 534 electrically connected to both ends of the lower frame 532" and the common connection part 360. The pair of vertical frames 533 and 534 are electrically insulated from the upper frame 531. By adjusting the shape, thickness, material, etc. of the pair of second connecting portions 380A, 380B, and further adjusting the resistance value, the current flowing through the upper gripper 510 can be adjusted.

第1分歧導電構件，是由「使共通連接部360，經由一對第1連接部370A、370B的其中一個以及上框531，而與複數個上側夾持器510的其中一個形成電氣性導通」的構件形成。在該場合中，第2分歧導電構件，是由「使共通連接部360，經由一對第1連接部370A、370B中的另一個以及上框531，而與複數個上側夾持器510中的另一個形成電氣性導通」的構件形成。The first branch conductive member is formed by "making the common connection portion 360 electrically conduct with one of the plurality of upper clamps 510 via one of the pair of first connection portions 370A, 370B and the upper frame 531." The components are formed. In this case, the second branch conductive member is composed of the "common connection part 360, via the other one of the pair of first connection parts 370A, 370B and the upper frame 531," Another member that forms electrical conduction is formed.

或者，第1分歧導電構件，是由「使共通連接部360，經由一對第2連接部380A、380B的其中一個；一對縱框533、534的其中一個；以及下框532，而與複數個下側夾持器520的其中一個形成電氣性導通」的構件形成。在該場合中，第2分歧導電構件，是由「使共通連接部360，經由一對第2連接部380A、380B中的另一個；一對縱框533、534中的另一個；以及下框532，而與複數個下側夾持器520中的另一個形成電氣性導通」的構件形成。Alternatively, the first branched conductive member is composed of "the common connection part 360, via one of a pair of second connection parts 380A, 380B; one of a pair of vertical frames 533, 534; and a lower frame 532, which is combined with the plural One of the lower clamps 520 is formed as a member that is electrically conductive. In this case, the second branch conductive member is made up of the common connection part 360 via the other of the pair of second connection parts 380A, 380B; the other of the pair of vertical frames 533, 534; and the lower frame 532, and a member that forms electrical conduction with the other of the plurality of lower clamps 520 is formed.

在此，共通導電構件亦即共通連接部360含有：電阻值r的高電阻材料，該電阻值r為第1及第2分歧導電構件間之最大電阻差ΔRΩ的103 倍以上，並且大於銅及鋁的電阻值。在本實施形態中，共通連接部360，其一對第2導電構件362、363是由高電阻材料所形成，第1導電構件361是由低電阻構件所形成。Here, the common conductive member, that is, the common connecting portion 360 contains a high-resistance material with a resistance value r that is more than 103 times the maximum resistance difference ΔRΩ between the first and second branch conductive members and is greater than copper And the resistance value of aluminum. In this embodiment, in the common connection portion 360, the pair of second conductive members 362 and 363 are formed of a high-resistance material, and the first conductive member 361 is formed of a low-resistance member.

作為高電阻材料，譬如可列舉出不鏽鋼(SUS)。舉例來說，SUS304的體積電阻率(volume resistivity) (Ω•m)為73.7，相對於銅的1.7Ω•m和鋁的2.8Ω•m，更大一位數。由於所測得的最大電阻差ΔRΩ為10~20mΩ，因此該高電阻材料的電阻值r，符合r≧ΔR×103 。同樣地，舉例來說，53.3Ω•m的鈦，也適合作為高電阻材料。As the high-resistance material, for example, stainless steel (SUS) can be cited. For example, the volume resistivity (Ω•m) of SUS304 is 73.7, which is one digit larger than copper's 1.7Ω•m and aluminum's 2.8Ω•m. Since the measured maximum resistance difference ΔRΩ is 10-20mΩ, the resistance value r of the high-resistance material conforms to r≧ΔR×10 3 . Similarly, for example, 53.3Ω•m titanium is also suitable as a high-resistance material.

在此，透過供電軌道210而與工件保持治具30電氣性連接的整流器，為了流過所設定的一定(恆定)電流I，而對應電流路徑之閉環系統的阻抗(impedance)Z來調整電壓E，以形成E=R×I。在本實施形態中，閉環系統的電阻R，含有共通導電構件亦即一對第2導電構件的高電阻值r，該電阻值r具有較一般認為低電阻的銅和鋁更大的電阻值。相對於在第1、第2分歧導電構件間(亦即，複數個上側夾持器510之間、或者複數個下側夾持器520之間)所產生的最大電阻差ΔRΩ，倘若為r≧103 ×ΔRΩ，含有電阻值r之系統的電阻R也變大。因此，整流器調整成較大的電壓V，並供給一定(恆定)電流I。如此一來，流動於第1、第2分歧導電構件的電流(或者電子)在共通連接部360合流，並且只要以電壓E來流通電流I，便能無視電阻的變化ΔRΩ，該電壓E遠遠大於：相當於「第1、第2分歧導電構件間之電阻的變化ΔRΩ」的變化電壓ΔV。Here, the rectifier electrically connected to the workpiece holding jig 30 through the power supply rail 210 adjusts the voltage E according to the impedance Z of the closed loop system of the current path in order to flow a set constant (constant) current I , To form E=R×I. In this embodiment, the resistance R of the closed loop system includes a common conductive member, that is, a high resistance value r of a pair of second conductive members, and the resistance value r has a resistance value larger than that of copper and aluminum, which are generally considered low resistance. With respect to the maximum resistance difference ΔRΩ generated between the first and second branch conductive members (that is, between the plurality of upper clamps 510, or between the plurality of lower clamps 520), if r≧ 10 3 ×ΔRΩ, the resistance R of the system including the resistance value r also increases. Therefore, the rectifier is adjusted to a larger voltage V and supplies a constant (constant) current I. In this way, the currents (or electrons) flowing in the first and second branch conductive members merge at the common connection part 360, and as long as the current I is passed with the voltage E, the change in resistance ΔRΩ can be ignored, and the voltage E is much larger于: Corresponding to the change voltage ΔV of "the change in resistance between the first and second branch conductive members ΔRΩ".

3.1、比較例的電流監控 圖6，示意地顯示比較例的治具，該比較例並未如本實施形態般，於共通連接部360含有高電阻值r的材料。將圖6中，流動於比較例的治具之搬送方向A上游側之接觸部的電流設為A1，流動於搬送方向A下游側之接觸部的電流設為A2。3.1. Current monitoring of the comparative example FIG. 6 schematically shows a jig of a comparative example. The comparative example does not contain a material with a high resistance value r in the common connection portion 360 as in the present embodiment. In FIG. 6, the current flowing in the contact part on the upstream side in the conveying direction A of the jig of the comparative example is denoted as A1, and the current flowing in the contact part on the downstream side in the conveying direction A is denoted as A2.

在圖7所示的測量中，將整流器的設定電流設為204A(=A1+A2)，將分歧為2個部分而流動的分歧設定電流(A1、A2)設為102A。將工件保持治具朝圖6的搬送方向A搬送的同時，所測得的電流A1、A2，如圖7所示，相對於分歧設定電流，上下地變動。在時刻T1、T2的前後，如同日本特開2009-132999號所揭示，由於治具是透過供電軌道之間的接縫，從其中一個供電軌道轉移至另一個供電軌道，因此，採用整流器來實施以下的控制：與其中一個供電軌道接觸之接觸部的電流值逐漸減少，與另一個供電軌道接觸之接觸部的電流值逐漸增加。在這種「電流逐漸減少-逐漸增加」之控制以外的區間，整流器則依據設定電流進行輸出控制。但是，圖7所示之比較例的電流A1、A2，在恆定電流控制區間形成小幅度的變動，在「電流逐漸減少-逐漸增加」的控制下則大幅變動。In the measurement shown in FIG. 7, the set current of the rectifier is set to 204A (=A1+A2), and the branch set currents (A1, A2) flowing in two parts are set to 102A. While the workpiece holding jig is being conveyed in the conveying direction A of Fig. 6, the measured currents A1 and A2, as shown in Fig. 7, fluctuate up and down with respect to the branch setting current. Before and after time T1 and T2, as disclosed in Japanese Patent Application Publication No. 2009-132999, the fixture is transferred from one of the power supply rails to the other power supply rail through the joints between the power supply rails. Therefore, a rectifier is used for implementation. The following control: the current value of the contact part in contact with one of the power supply rails gradually decreases, and the current value of the contact part in contact with the other power supply rail gradually increases. In the interval other than the control of "gradual decrease-gradual increase of current", the rectifier performs output control according to the set current. However, the currents A1 and A2 of the comparative example shown in FIG. 7 have small fluctuations in the constant current control section, and have large fluctuations under the control of "gradual decrease-gradual increase of current".

3.2、本實施形態的電流監控 圖8，示意地顯示於共通連接部360含有高電阻值r的材料之本實施形態的治具30。將圖8中，流動於治具30的搬送方向A上游側之接觸部341A的電流設為A1，流動於搬送方向A下游側之接觸部341B的電流設為A2，將流動於一對第1連接部370A、370B的電流設為A3、A4，將流動於一對第2連接部380A、380B的電流設為A5、A6。3.2. Current monitoring of this embodiment FIG. 8 schematically shows the jig 30 of the present embodiment in which a material with a high resistance value r is contained in the common connection part 360. In FIG. 8, the current flowing in the contact portion 341A on the upstream side in the transport direction A of the jig 30 is referred to as A1, and the current flowing in the contact portion 341B on the downstream side in the transport direction A is referred to as A2. The currents of the connection parts 370A and 370B are referred to as A3 and A4, and the currents flowing through the pair of second connection parts 380A and 380B are referred to as A5 and A6.

在圖9所示的測量中，將整流器的設定電流設為131A(=A1+A2)，將分歧為2個部分而流動的分歧電流(A1、A2)設為65.5A。在時刻T的前後，執行與圖7所示之時刻T1、T2相同的「電流逐漸減少-逐漸增加」控制，並在其他的區間，依據設定電流進行輸出控制。將工件保持治具30朝圖8的搬送方向A搬送的同時，所測得的電流A3~A6，如圖9所示，從治具30的左右流向上側夾持器510的分歧電流A3、A4形成恆定(一定)，從治具30的左右流向下側夾持器520的分歧電流A5、A6也形成恆定(一定)。In the measurement shown in FIG. 9, the set current of the rectifier is set to 131A (=A1+A2), and the branch currents (A1, A2) flowing in two parts are set to 65.5A. Before and after time T, the same "current gradual decrease-gradual increase" control is executed as at time T1, T2 shown in FIG. 7, and output control is performed according to the set current in other sections. While the workpiece holding jig 30 is conveyed in the conveying direction A of FIG. 8, the measured currents A3 to A6, as shown in Fig. 9, flow from the left and right sides of the jig 30 to the branch currents A3, A4 of the upper gripper 510 The currents A5 and A6 flowing from the left and right sides of the jig 30 to the lower gripper 520 are also constant (constant).

在本實施形態中，雖然在整流器與共通連接部360之間的導通路徑，存在「因為供電軌道210的局部髒污而產生的第1、第2接觸部341A、341B之接觸電阻的變化」所衍生的電阻差、和供電軌道210之轉移時的電阻差，但藉由設置具有上述電阻值的共通連接部360，能降低上述的不良影響。In the present embodiment, although the conduction path between the rectifier and the common connection portion 360 has "changes in the contact resistance of the first and second contact portions 341A, 341B due to local contamination of the power supply rail 210" The derived resistance difference and the resistance difference when the power supply rail 210 is transferred, but by providing the common connection part 360 having the above-mentioned resistance value, the above-mentioned adverse effects can be reduced.

在本實施形態中，除了一對第1連接部含有一對金屬板370A、370B之外，一對第2連接部也可以含有一對第2纜線380A、380B。如此一來，能使「從共通連接部360到達上側夾持器510為止的電阻值」，大於「從共通連接部360到達下側夾持器520為止的電阻值」。 In this embodiment, in addition to the pair of first connecting portions including a pair of metal plates 370A and 370B, the pair of second connecting portions may include a pair of second cables 380A and 380B. In this way, the "resistance value from the common connection part 360 to the upper clamp 510" can be made larger than the "resistance value from the common connection part 360 to the lower clamp 520".

一旦如此，相較於僅前端部浸漬於處理液中的上側夾持器510，可使整體浸漬於處理液中的下側夾持器520的表面處理所額外耗費之電流量的電流，透過下側夾持器520對工件通電。在圖9中，藉由使流動於下側夾持器520的電流A5、A6，大於流動於上側夾持器510的電流A3、A4，結果能使從上下流向工件20的電流形成大致一定(恆定)。 Once this is done, compared to the upper gripper 510 in which only the tip portion is immersed in the treatment liquid, the current of the extra current consumed by the surface treatment of the lower gripper 520, which is entirely immersed in the treatment liquid, can be transmitted through the lower gripper 510. The side gripper 520 energizes the workpiece. In FIG. 9, by making the currents A5 and A6 flowing through the lower gripper 520 larger than the currents A3 and A4 flowing through the upper gripper 510, the current flowing from the upper and lower sides to the workpiece 20 can be made substantially constant ( Constant).

4、上側虛設板/下側虛設板 4. Upper dummy board/lower dummy board

如圖5所示，當將上框531及/或下框532作為導電性的支承部時，在支承部除了上側及/或下側夾持器510、520之外，也能具有導電性的上側虛設板610及/或導電性的下側虛設板620。上側虛設板610，在工件20的上緣部20a中未受到上側夾持器510所保持的領域，配置成接近工件20的上緣部20a。下側虛設板620，在工件20的下緣部20b中未受到下側夾持器520所保持的領域，配置成接近工件20的下緣部20b。 As shown in FIG. 5, when the upper frame 531 and/or the lower frame 532 are used as conductive support portions, in addition to the upper and/or lower clamps 510 and 520, the support portion can also have conductive The upper dummy board 610 and/or the conductive lower dummy board 620. The upper dummy plate 610 is arranged close to the upper edge 20a of the workpiece 20 in a region not held by the upper gripper 510 in the upper edge portion 20a of the workpiece 20. The lower dummy plate 620 is arranged close to the lower edge 20b of the workpiece 20 in an area not held by the lower gripper 520 in the lower edge portion 20b of the workpiece 20.

上側虛設板610及導電性的下側虛設板620，分別可在至少其中一面譬如表面、背面，具有絕緣板630，該絕緣板630被支承成可移動而能分別覆蓋表面及背面，並能分別調整虛設板610、620的露出導電面積。 The upper dummy board 610 and the conductive lower dummy board 620 may respectively have an insulating plate 630 on at least one of the surfaces, such as the front surface and the back surface, respectively. The insulating plate 630 is supported so as to be movable so as to cover the surface and the back surface, respectively. Adjust the exposed conductive areas of the dummy boards 610 and 620.

放大上側虛設板610並顯示於圖10。圖10所 示的構造，也應用於下側虛設板620。如圖10所示，上側虛設板610，透過與上側虛設板610形成一體、或者不同個體的鉸鍊611，譬如由螺絲612固定於上框531。覆蓋上側虛設板610之兩面的絕緣板630，可以具有「覆蓋上側虛設板610之表面的絕緣板630A」、「覆蓋上側虛設板610之背面的絕緣板630B」的其中任一個或者雙方。絕緣板620A、620B，是藉由螺栓641、與鎖合於螺栓641的螺帽642，而例如共同鎖附於上側虛設板610，該螺栓641可穿過：絕緣板630A、630B所分別設置之縱向的長孔631A、631B(在圖10中，僅顯示長孔631A)；及設於上側虛設板610的孔612。 The upper dummy board 610 is enlarged and shown in FIG. 10. Figure 10 The structure shown is also applied to the lower dummy board 620. As shown in FIG. 10, the upper dummy board 610 is fixed to the upper frame 531 through a hinge 611 formed integrally with the upper dummy board 610 or a different individual, for example, by screws 612. The insulating plates 630 covering both surfaces of the upper dummy plate 610 may have either or both of "the insulating plate 630A covering the surface of the upper dummy plate 610" and "the insulating plate 630B covering the back surface of the upper dummy plate 610". The insulating plates 620A and 620B are fixed to the upper dummy plate 610 by bolts 641 and nuts 642 locked to the bolts 641. The bolts 641 can pass through: the insulating plates 630A and 630B are respectively provided Longitudinal long holes 631A, 631B (in FIG. 10, only the long hole 631A is shown); and a hole 612 provided on the upper dummy plate 610.

絕緣板620A、620B，分別可在長孔631A、631B的範圍內，相對於上側虛設板610(下側虛設板620)調整上下方向的位置。藉此，如圖10所示，上側虛設板610的前端部610A所露出之導電面的露出面積S，可在表面與背面獨立地調整。藉由變更上側虛設板610的露出導電面積S，可調整對上側虛設板610表面處理時所耗費的電流。藉此，透過上側夾持器510而流動於工件20之上緣部20a的電流受到調整。如此一來，能調整流動於工件20之上緣部20a的電流，而提高欲表面處理之工件的面內均一性。針對下側虛設板620，藉由相同的調整，能調整流動於工件20之下緣部20b的電流，而提高欲表面處理之工件的面內均一性。 The insulating plates 620A and 620B can be adjusted in the vertical direction relative to the upper dummy plate 610 (lower dummy plate 620) within the range of the elongated holes 631A and 631B, respectively. Thereby, as shown in FIG. 10, the exposed area S of the conductive surface exposed by the front end portion 610A of the upper dummy board 610 can be adjusted independently on the front and back surfaces. By changing the exposed conductive area S of the upper dummy board 610, the current consumed during the surface treatment of the upper dummy board 610 can be adjusted. Thereby, the current flowing through the upper gripper 510 and flowing to the upper edge portion 20a of the workpiece 20 is adjusted. In this way, the current flowing through the upper edge portion 20a of the workpiece 20 can be adjusted, and the in-plane uniformity of the workpiece to be surface-treated can be improved. For the lower dummy board 620, the current flowing through the lower edge portion 20b of the workpiece 20 can be adjusted by the same adjustment, thereby improving the in-plane uniformity of the workpiece to be surface-treated.

上側虛設板610，可透過鉸鍊611，而在圖12 的實線所示的第1位置P1、與鏈線所示的第2位置P2之間擺動(移動)。在第1位置P1，上側虛設板610接近工件20之上緣部20a中未被上側夾持器510保持的領域，並配置成與工件20平行。在第2位置P2，上側虛設板610與工件20的主面形成非平行，舉例來說，對工件20的主面交叉成直角。 The upper dummy board 610 can pass through the hinge 611, and in Figure 12 Swing (move) between the first position P1 shown by the solid line and the second position P2 shown by the chain line. In the first position P1, the upper dummy plate 610 approaches the area not held by the upper gripper 510 in the upper edge portion 20a of the workpiece 20, and is arranged in parallel with the workpiece 20. At the second position P2, the upper dummy plate 610 is non-parallel to the main surface of the workpiece 20, for example, intersects the main surface of the workpiece 20 at a right angle.

當對工件20表面處理時，上側虛設板610被設定在第1位置P1。另外，當利用自動機器對工件保持治具30裝卸工件20時，上側虛設板610被設定在第2位置P2。藉由將上側虛設板610設定於第2位置P2，可在工件20的上緣部20a與上框351之間確保間隙。藉此，在與「工件保持治具30之上側夾持器510」不同的位置，可藉由自動機器夾持工件20的上緣部。在該場合中，亦可由自動機器推動上側虛設板610，使上側虛設板610從第1位置P1朝向第2位置P2移動於箭號F1方向。舉例來說，亦可如圖12所示，藉由設於自動機器且可移動之臂1000前端的輥子1100，推動上側虛設板610。下側虛設板620也是一樣，可在第1位置P1與第2位置P2之間擺動(移動)。 When the workpiece 20 is surface-treated, the upper dummy plate 610 is set at the first position P1. In addition, when the workpiece 20 is loaded and unloaded on the workpiece holding jig 30 by an automatic machine, the upper dummy plate 610 is set at the second position P2. By setting the upper dummy plate 610 at the second position P2, a gap can be secured between the upper edge portion 20a of the workpiece 20 and the upper frame 351. Thereby, the upper edge part of the workpiece 20 can be gripped by an automatic machine at a position different from the "upper gripper 510 of the workpiece holding jig 30". In this case, the upper dummy board 610 may be pushed by an automatic machine, and the upper dummy board 610 may be moved in the arrow F1 direction from the first position P1 to the second position P2. For example, as shown in FIG. 12, the upper dummy board 610 can be pushed by a roller 1100 provided at the front end of the movable arm 1000 of an automatic machine. The same is true for the lower dummy plate 620, which can swing (move) between the first position P1 and the second position P2.

上側虛設板610，亦可藉由鉸鍊611本身的彈性、或者設於鉸鍊611的板簧或螺旋彈簧等的彈推構件，而朝第1位置P1彈推移動。一旦如此，不必作用外部的復原力，便能使上側虛設板610沿著箭號F2方向從第2位置P2朝向第1位置P1復位。下側虛設板620也是一樣，不必作用外部的復原力，便能沿著箭號F2方向從第2位置P2朝向第1位置P1復位。 The upper dummy plate 610 may be elastically moved toward the first position P1 by the elasticity of the hinge 611 itself, or an elastic member such as a leaf spring or a coil spring provided on the hinge 611. Once this is done, the upper dummy plate 610 can be reset from the second position P2 to the first position P1 along the arrow F2 direction without acting on the external restoring force. The same is true for the lower dummy plate 620, which can be reset from the second position P2 to the first position P1 along the arrow F2 direction without applying an external restoring force.

在「工件保持治具，具有夾持矩形工件20的四邊之上下左右的夾持器」的場合中，亦可將虛設板及絕緣板設於四邊的各夾持器。 In the case of a "work holding jig with clamps that clamp the four sides of the rectangular workpiece 20, top, bottom, left, and right", a dummy plate and an insulating plate may be provided on each of the four clamps.

5、夾持器的虛設板及調整構件 5. The dummy plate and adjustment components of the holder

以下，列舉下側夾持器520作為例子，說明設在上側夾持器510及下側夾持器520之其中一個或雙方的虛設板及調整構件。藉由將以下的說明中的「下側夾持器520」置換為「上側夾持器510」，並將「下框532」置換為「上框531」，便能理解上側夾持器510所設置的虛設板及調整構件。 Hereinafter, the lower gripper 520 is taken as an example, and the dummy board and the adjustment member provided on one or both of the upper gripper 510 and the lower gripper 520 will be described. By replacing "lower gripper 520" with "upper gripper 510" in the following description, and replacing "lower frame 532" with "upper frame 531", it is possible to understand the position of upper gripper 510. Set the dummy board and adjustment components.

圖13，顯示設於下側夾持器520的虛設板700及調整構件720。首先，下側夾持器520含有：固定於下框532的固定部521、支承成可相對於固定部521搖動的可動部523。固定部521具有第1面521A、及相反側的第2面521B。固定部521，其第2面521B與下框532形成面接觸，並由螺栓522固定於下框532。固定部521，具有從第1面521A垂直豎起的2個側壁521C。 FIG. 13 shows the dummy board 700 and the adjusting member 720 provided on the lower clamp 520. As shown in FIG. First, the lower gripper 520 includes a fixed portion 521 fixed to the lower frame 532 and a movable portion 523 supported to be swingable with respect to the fixed portion 521. The fixed portion 521 has a first surface 521A and a second surface 521B on the opposite side. The fixing portion 521 has a second surface 521B in surface contact with the lower frame 532 and is fixed to the lower frame 532 by bolts 522. The fixing portion 521 has two side walls 521C that stand vertically from the first surface 521A.

在可搖動的可動部523、與固定部521的第1面521A之間，工件20的下緣部20b局部地受到夾持。可動部523，可繞著「由固定部521的2個側壁521C所支承的銷524」，搖動。螺旋彈簧525穿過銷524。可動部523，由螺旋彈簧525所彈推而朝向固定部521移動。可動部523，經由固定部521、銷524或者螺旋彈簧525，而與下框532電氣性連接。為了降低該導通路徑的電阻值，亦可將螺旋彈簧525變更為板簧等。Between the swingable movable portion 523 and the first surface 521A of the fixed portion 521, the lower edge portion 20b of the workpiece 20 is partially clamped. The movable portion 523 can swing around the "pin 524 supported by the two side walls 521C of the fixed portion 521". The coil spring 525 passes through the pin 524. The movable part 523 is urged by the coil spring 525 to move toward the fixed part 521. The movable portion 523 is electrically connected to the lower frame 532 via the fixed portion 521, the pin 524, or the coil spring 525. In order to reduce the resistance value of the conduction path, the coil spring 525 may be changed to a leaf spring or the like.

導電性的虛設板700含有：面向固定部521之第2面521B的第3面700A、第3面700A之相反側的第4面700B。此外，將虛設板700的其中一端部稱為基端部701，並將另一端部稱為前端部704。虛設板700，其第4面700B與固定部521的第2面521B形成平行，基端部701由固定部521所支承。The conductive dummy board 700 includes a third surface 700A facing the second surface 521B of the fixing portion 521 and a fourth surface 700B on the opposite side of the third surface 700A. In addition, one end of the dummy board 700 is referred to as a base end 701, and the other end is referred to as a front end 704. The fourth surface 700B of the dummy board 700 is parallel to the second surface 521B of the fixing portion 521, and the base end portion 701 is supported by the fixing portion 521.

在此，如圖14所示，可在虛設板700的基端部701，形成有譬如2個長孔702、703。將螺栓710穿過該長孔702、703，並將螺栓710連結(鎖緊)於下框532。藉由長孔702、703，虛設板700可在圖13的箭號C方向調整固定位置。Here, as shown in FIG. 14, the base end 701 of the dummy board 700 may be formed with, for example, two long holes 702 and 703. Pass the bolt 710 through the long holes 702 and 703, and connect (lock) the bolt 710 to the lower frame 532. With the elongated holes 702 and 703, the dummy board 700 can be adjusted in a fixed position in the direction of arrow C in FIG. 13.

如圖13及圖14所示，絕緣性的調整構件720，覆蓋虛設板700之第4面700B的局部，而重疊於虛設板700。並未由調整構件720所經常覆蓋的導電面，可以僅設為前端部704。在圖13及圖14中如同剖面線所示，並未由調整構件720所覆蓋的其他面，被施以絕緣塗裝。As shown in FIGS. 13 and 14, the insulating adjustment member 720 covers a part of the fourth surface 700B of the dummy board 700 and overlaps the dummy board 700. The conductive surface that is not always covered by the adjustment member 720 may be only the tip portion 704. In FIGS. 13 and 14, as shown by the cross-sectional line, the other surfaces not covered by the adjustment member 720 are coated with insulating coating.

如圖14所示，在調整構件720形成有譬如2個長孔721、722。將螺栓730穿過該長孔721、722，並將螺栓730連結(鎖緊)於虛設板700。藉由長孔702、703，調整構件720可在圖13的箭號C方向調整固定位置。藉此，調整構件720可調整：在虛設板700的前端部704之第4面700B側的露出導電面積S2。As shown in FIG. 14, for example, two long holes 721 and 722 are formed in the adjustment member 720. Pass the bolt 730 through the elongated holes 721 and 722, and connect (lock) the bolt 730 to the dummy board 700. With the elongated holes 702 and 703, the adjusting member 720 can adjust the fixed position in the direction of arrow C in FIG. 13. Thereby, the adjustment member 720 can adjust the exposed conductive area S2 on the fourth surface 700B side of the front end portion 704 of the dummy board 700.

在虛設板700的前端部704之第4面700B側的露出導電面，受到表面處理。藉由變更虛設板700的露出導電面積S2，可調整對虛設板700表面處理時所耗費的電流。藉此，透過下側夾持器520的固定部521而流動於工件20之下緣部20b的電流受到調整。倘若沒有虛設板700及調整構件720，透過下側夾持器520的固定部521而流動於工件20之下緣部20b的電流將增大。這是由於如以上所述，可動部523與下框532之間的電阻值比較大的緣故。據此，電流不會集中於與可動部523接觸的領域附近之工件20的下緣部20b，且不會集中於與可動部523接觸的那一側的面20b1(圖13)。另外，以下的傾向則明顯強烈：電流集中於與固定部521接觸的領域附近之工件20的下緣部20b，且集中於與固定部521接觸的那一側的面20b2(圖13)。結果導致在固定部521附近的領域，局部地進行工件20的表面處理。根據本實施形態，可調整「流動於工件20的下緣部20b之局部領域20b2的電流」，而提高欲表面處理之工件的面內均一性。The exposed conductive surface on the fourth surface 700B side of the front end portion 704 of the dummy board 700 is subjected to surface treatment. By changing the exposed conductive area S2 of the dummy board 700, the current consumed when the surface of the dummy board 700 is processed can be adjusted. Thereby, the current flowing through the fixing portion 521 of the lower gripper 520 and flowing to the lower edge portion 20b of the workpiece 20 is adjusted. Without the dummy board 700 and the adjusting member 720, the current flowing to the lower edge portion 20b of the workpiece 20 through the fixing portion 521 of the lower gripper 520 will increase. This is because the resistance value between the movable portion 523 and the lower frame 532 is relatively large as described above. Accordingly, the current does not concentrate on the lower edge portion 20b of the workpiece 20 near the area in contact with the movable portion 523, and does not concentrate on the surface 20b1 on the side in contact with the movable portion 523 (FIG. 13). In addition, the following tendency is obviously strong: the current concentrates on the lower edge portion 20b of the workpiece 20 near the area in contact with the fixed portion 521, and concentrates on the surface 20b2 on the side in contact with the fixed portion 521 (FIG. 13). As a result, the surface treatment of the workpiece 20 is locally performed in the area near the fixed portion 521. According to this embodiment, it is possible to adjust the "current flowing in the local area 20b2 of the lower edge portion 20b of the workpiece 20" to improve the in-plane uniformity of the workpiece to be surface-treated.

此外，藉由長孔702、703，可在與「調整構件720可移動的箭號C方向」平行的方向上，調整「虛設板700的基端部701相對於固定部521的固定位置」。一旦如此，可以調整：在從「與工件20的主面正交的方向」所見的側面視角中，下側夾持器520之固定部521的第2面521B或者工件的主面、與虛設板700之間的重疊面積。藉由這樣的位置調整，也能調整對虛設板700表面處理時所耗費的電流。In addition, with the elongated holes 702 and 703, the "fixed position of the base end portion 701 of the dummy board 700 with respect to the fixed portion 521" can be adjusted in a direction parallel to the "direction of the arrow C in which the adjustment member 720 is movable". Once so, it can be adjusted: in the side view from the "direction orthogonal to the main surface of the workpiece 20", the second surface 521B of the fixed portion 521 of the lower gripper 520 or the main surface of the workpiece, and the dummy plate Overlap area between 700. Through such position adjustment, the current consumed when the surface of the dummy board 700 is processed can also be adjusted.

在此，圖1所示之處理槽200內的處理液Q，相對於治具30設定了圖5所示的液面L。據此，下側夾持器520整體沒入處理液Q。因此，虛設板700，除了位於前端部704的第4面700B，在圖13及圖14中如同剖面線所示，並未由調整構件720所覆蓋的其他面，被施以絕緣塗裝。如此一來，除了虛設板700在前端部704的第4面700B以外，皆有效地實施表面處理。Here, the processing liquid Q in the processing tank 200 shown in FIG. 1 is set to the liquid level L shown in FIG. 5 with respect to the jig 30. Accordingly, the entire lower gripper 520 is submerged in the processing liquid Q. Therefore, the dummy board 700, except for the fourth surface 700B located at the front end portion 704, as shown by the hatching in FIGS. 13 and 14, the other surfaces not covered by the adjusting member 720 are coated with insulating coating. In this way, except for the dummy board 700 on the fourth surface 700B of the front end portion 704, the surface treatment is effectively performed.

上述設於下側夾持器520的虛設板700及調整構件720的構造，也能適用於設於上側夾持器510的虛設板及調整構件。而與下側夾持器520不同之處在於：從圖5所示的處理液Q之液面L的位置起，上側夾持器510並未整體沒入處理液Q。因此，設於上側夾持器510的虛設板，亦可將絕緣塗裝領域，限縮成沒入處理液Q中的領域。這是因為：未浸漬於處理液Q的領域並未表面處理，因此不需要絕緣塗裝。The structures of the dummy board 700 and the adjustment member 720 provided on the lower gripper 520 can also be applied to the dummy board and the adjustment member provided on the upper gripper 510. The difference from the lower gripper 520 is that from the position of the liquid surface L of the processing liquid Q shown in FIG. 5, the upper gripper 510 is not entirely submerged in the processing liquid Q. Therefore, the dummy board provided on the upper gripper 510 can also limit the insulating coating area to the area submerged in the processing liquid Q. This is because the area not immersed in the treatment liquid Q is not surface-treated, and therefore insulation coating is not required.

6、第1、第2側面虛設構件 如圖5所示，工件保持治具30，可以進一步具有：配置成接近工件20的兩側緣部之導電性的第1及第2側面虛設構件800A、800B。如作為圖5之D-D箭號方向視圖的圖15所示，第1側面虛設構件800A，配置於工件20的側緣部20d與縱框534之間。第2側面虛設構件800B，配置於工件20的側緣部20c與縱框534之間。6. Dummy members on the first and second sides As shown in FIG. 5, the workpiece holding jig 30 may further include conductive first and second side dummy members 800A and 800B arranged close to the edges of both sides of the workpiece 20. As shown in FIG. 15 which is a view from the arrow direction of D-D in FIG. 5, the first side dummy member 800A is arranged between the side edge portion 20d of the workpiece 20 and the vertical frame 534. The second side dummy member 800B is arranged between the side edge portion 20 c of the workpiece 20 and the vertical frame 534.

在此，「與共通導電構件360的第2導電構件362電氣性連接，且從共通導電構件360分歧，透過上側夾持器510而與工件20導通」的第1分歧導通構件，是由一對第1連接部370A、370B；及該一對第1連接部370A、370B連接於兩端部的上框531所定義。工件保持治具30更進一步具有：與共通導電構件360電氣性連接，且從共通導電構件360分歧，與第1及第2側面虛設構件800A、800B導通的第2分歧導通構件900(900A、900B)。第2分歧導通構件900的第1虛設導通構件900A，從共通導電構件360分歧，並與第1側面虛設構件800A導通。第2分歧導通構件900的第2虛設導通構件900B，從共通導電構件360分歧，並與第2側面虛設構件800B導通。Here, the first branching conductive member "is electrically connected to the second conductive member 362 of the common conductive member 360, and branched from the common conductive member 360, and is electrically connected to the workpiece 20 through the upper gripper 510" is composed of a pair of The first connecting portions 370A, 370B; and the pair of first connecting portions 370A, 370B are defined by the upper frames 531 connected to both ends. The workpiece holding jig 30 further has: a second branch conductive member 900 (900A, 900B) electrically connected to the common conductive member 360 and branched from the common conductive member 360 to conduct with the first and second side dummy members 800A, 800B ). The first dummy conductive member 900A of the second branch conductive member 900 is branched from the common conductive member 360 and conducts with the first side dummy member 800A. The second dummy conductive member 900B of the second branch conductive member 900 is branched from the common conductive member 360 and conducts with the second side dummy member 800B.

可與整流器電氣性連接的共通導電構件360，經由第1分歧導通構件370A、370B、531，藉由上側夾持器510與工件20導通。該共通導電構件360，透過第2分歧導通構件900(900A、900B)與第1及第2側面虛設構件800A、800B導通。流動於工件20、第1及第2側面虛設構件800A、800B的全體電流，可藉由整流器來設定。在此，縱框533、534被施以絕緣塗裝。倘若沒有第1及第2側面虛設構件800A、800B，電場將集中於工件20的兩側緣部20c、20d，流動於工件20之兩側緣部20c、20d的電流變多。在縱框533、534未絕緣塗裝的場合中，為了對導電性的縱框533、534進行電鍍而耗費電流，而使流動於工件20之兩側緣部20c、20d的電流減少。因此，設置第1虛設導通構件900A與第2虛設導通構件900B，可調整流動於工件20之兩側緣部20c、20d的電流。不僅如此，相對於第1分歧導通構件370A、370B、531，藉由獨自地設定第2分歧導通構件900(900A、900B)的電阻值，而與流動於工件20的電流形成獨立，可設定流動於第1及第2側面虛設構件800A、800B的電流。藉此，藉由對「配置成接近工件20之側緣部20c、20d的第1及第2側面虛設構件」實施表面處理，能調整流動於工件20之側緣部20c、20d的電流，而提高欲表面處理之工件的面內均一性。此外，藉由獨自地設定第1虛設導通構件900A與第2虛設導通構件900B之間的電阻值，能獨立地設定流動於第1及第2側面虛設構件800A、800B的電流。如此一來，可以調整流動於工件20之其中一個側緣部20c與另一個側緣部20d的電流。The common conductive member 360 that can be electrically connected to the rectifier is electrically connected to the workpiece 20 by the upper clamp 510 via the first branch conductive members 370A, 370B, and 531. The common conductive member 360 is electrically connected to the first and second side dummy members 800A, 800B through the second branch conductive member 900 (900A, 900B). The overall current flowing through the workpiece 20 and the first and second side dummy members 800A and 800B can be set by a rectifier. Here, the vertical frames 533 and 534 are coated with insulating coating. Without the first and second side dummy members 800A, 800B, the electric field would be concentrated on the side edges 20c, 20d of the workpiece 20, and the current flowing through the side edges 20c, 20d of the workpiece 20 would increase. When the vertical frames 533 and 534 are not coated with insulation, electric current is consumed for electroplating the conductive vertical frames 533 and 534, and the current flowing in the both side edges 20c and 20d of the workpiece 20 is reduced. Therefore, by providing the first dummy conducting member 900A and the second dummy conducting member 900B, it is possible to adjust the current flowing in the both side edges 20c and 20d of the workpiece 20. Moreover, with respect to the first branch conduction members 370A, 370B, and 531, by independently setting the resistance value of the second branch conduction member 900 (900A, 900B), it is independent of the current flowing in the workpiece 20 and can be set to flow. The currents of dummy members 800A and 800B on the first and second side surfaces. Thereby, by performing surface treatment on the "first and second side dummy members arranged close to the side edge portions 20c and 20d of the workpiece 20", the current flowing through the side edge portions 20c and 20d of the workpiece 20 can be adjusted, and Improve the in-plane uniformity of the workpiece to be surface treated. In addition, by independently setting the resistance value between the first dummy conductive member 900A and the second dummy conductive member 900B, the current flowing through the first and second side dummy members 800A, 800B can be independently set. In this way, the current flowing through one of the side edge portions 20c and the other side edge portion 20d of the workpiece 20 can be adjusted.

第1虛設導通構件900A，譬如具有：纜線910A，其中一端連接於共通導電構件360的第2導電構件362；和導電板920A，連接著纜線910A的另一端；及纜線930A，其中一端連接於導電板，另一端連接於第1側面虛設構件800A。第2虛設導通構件900B，也同樣具有纜線910B、導電板920B及纜線930B。The first dummy conductive member 900A includes, for example, a cable 910A, one end of which is connected to the second conductive member 362 of the common conductive member 360; and a conductive plate 920A, which is connected to the other end of the cable 910A; and a cable 930A, one end of which is It is connected to the conductive plate, and the other end is connected to the first side dummy member 800A. The second dummy conducting member 900B also has a cable 910B, a conductive plate 920B, and a cable 930B in the same way.

第1、第2虛設導通構件900A、900B，可具有第1、第2可變電阻器。設於第1虛設導通構件900A的第1可變電阻器，是由設於導電板920A的長孔921A、與沿著長孔921A移動的可動接點部922A所構成。長孔921A，將「從纜線910A的連接部起的距離變長的方向(圖5中的水平方向)」作為長度方向。藉由變更「與纜線930A連接之可動接點部922A」的位置，可變更電阻值。設於第2虛設導通構件900B的第2可變電阻器，也同樣是由長孔921B與可動接點部922B所構成。如此一來，藉由以第1、第2可變電阻器調整電阻值，可在特定的範圍內，任意地調整第1虛設導通構件900A的電阻值、與第2側面虛設構件800B的電阻值。可動接點部922A及可動接點部922B，能以手動或者自動進行位置調整。The first and second dummy conductive members 900A and 900B may have first and second variable resistors. The first variable resistor provided in the first dummy conducting member 900A is composed of an elongated hole 921A provided in the conductive plate 920A, and a movable contact portion 922A that moves along the elongated hole 921A. The long hole 921A has the "direction in which the distance from the connection portion of the cable 910A becomes longer (the horizontal direction in FIG. 5)" as the longitudinal direction. By changing the position of the "movable contact portion 922A connected to the cable 930A", the resistance value can be changed. The second variable resistor provided in the second dummy conducting member 900B is similarly composed of the long hole 921B and the movable contact portion 922B. In this way, by adjusting the resistance value with the first and second variable resistors, the resistance value of the first dummy conducting member 900A and the resistance value of the second side dummy member 800B can be arbitrarily adjusted within a specific range . The movable contact portion 922A and the movable contact portion 922B can be adjusted in position manually or automatically.

在本實施形態中，如圖5所示，第1虛設導通構件900A與第1側面虛設構件800A的上部導通，第2虛設導通構件900B與第2側面虛設構件800B的上部導通。在該場合中，如圖16所示，第1側面虛設構件800A及第2側面虛設構件800B，最好是分別形成：與工件20的厚度方向平行的寬度W1、W2、W3，上部較下部更窄(W1＜W2＜W3)。寬度，可階段性地改變，亦可連續性地改變。第1及第2側面虛設構件800A、800B，由於上部靠近整流器，而具有：上部較下部受到更多表面處理的傾向。因為這緣故，而具有「工件20之兩側緣部20c、20d的上部不易表面處理」的傾向(電鍍厚度變薄)。藉由在上部將第1及第2側面虛設構件800A、800B的寬度變窄，工件20之兩側緣部20c、20d的上部變得容易表面處理，即使是上部也能確保電鍍膜厚。藉此，在工件20的兩側緣部，能有效地執行「從上部朝下部流動之電流」的調整。In this embodiment, as shown in FIG. 5, the first dummy conducting member 900A is electrically connected to the upper part of the first side dummy member 800A, and the second dummy conducting member 900B is electrically connected to the upper part of the second side dummy member 800B. In this case, as shown in FIG. 16, the first side dummy member 800A and the second side dummy member 800B are preferably formed separately: widths W1, W2, W3 parallel to the thickness direction of the workpiece 20, and the upper part is larger than the lower part. Narrow (W1<W2<W3). The width can be changed in stages or continuously. The first and second side dummy members 800A and 800B have a tendency that the upper part is more surface treated than the lower part because the upper part is close to the rectifier. For this reason, there is a tendency that "the upper part of both side edges 20c and 20d of the workpiece 20 is not easily surface-treated" (the plating thickness becomes thinner). By narrowing the widths of the first and second side dummy members 800A and 800B at the upper part, the upper part of both side edges 20c and 20d of the workpiece 20 can be easily surface-treated, and the thickness of the plating film can be ensured even at the upper part. Thereby, the adjustment of the "current flowing from the upper part to the lower part" can be effectively performed at the edges of both sides of the workpiece 20.

參考圖17~圖19，說明設於工件保持治具30的第1、第2側面虛設支承部。在圖17~圖19中，第1、第2側面虛設支承部，舉例來說，可使第1、第2側面虛設構件800A、800B如圖15所示，朝向表示工件20之寬度方向的箭號E方向、與表示工件20之厚度方向的箭號F方向移動。 Referring to FIGS. 17 to 19, the dummy support portions provided on the first and second side surfaces of the workpiece holding jig 30 will be described. In FIGS. 17 to 19, the first and second side dummy support portions, for example, can make the first and second side dummy members 800A, 800B, as shown in FIG. 15, face the arrow indicating the width direction of the workpiece 20 It moves in the E direction and the arrow F direction indicating the thickness direction of the workpiece 20.

圖17及圖18，為用來支承第1側面虛設構件800A的上部之支承部的前視圖及俯視圖。在縱框534的上部，設有朝向工件保持治具30的內側延伸的2個安裝片820A。在該2個安裝片820A之間，配置用來支承第1側面虛設構件800A之上部的上部支承片830A。2個安裝片820A，具有將箭號E方向作為長度方向的長孔821。穿過該長孔821的螺栓835，鎖合於上部支承片830A。只要鬆開螺栓835，上部支承片830A便能與第1側面虛設構件800A一起朝箭號E方向移動。只要將螺栓835鎖緊，上部支承片830A便固定於2個安裝片820A。 17 and 18 are a front view and a plan view of the supporting part for supporting the upper part of the first side dummy member 800A. On the upper part of the vertical frame 534, two attachment pieces 820A extending toward the inner side of the workpiece holding jig 30 are provided. Between the two attachment pieces 820A, an upper support piece 830A for supporting the upper portion of the first side dummy member 800A is arranged. The two attachment pieces 820A have long holes 821 with the arrow E direction as the longitudinal direction. The bolt 835 passing through the long hole 821 is locked to the upper supporting piece 830A. As long as the bolt 835 is loosened, the upper supporting piece 830A can move in the arrow E direction together with the first side dummy member 800A. As long as the bolt 835 is tightened, the upper supporting piece 830A is fixed to the two mounting pieces 820A.

如圖18所示，上部支承片830A具有：貫穿上下，並將箭號F方向作為長度方向的長孔831。穿過該長孔831的螺栓810，鎖合於第1側面虛設構件800A的上部。只要鬆開螺栓810，第1側面虛設構件800A便能朝箭號F方向移動。只要將螺栓810鎖緊，第1側面虛設構件800A便固定於上部支承片830A。雖然圖示省略，但是第2側面虛設構件800B的上部，也和第1側面虛設構件800A的上部一樣受到支承。 As shown in FIG. 18, the upper support piece 830A has the long hole 831 which penetrates up and down, and makes the arrow F direction the longitudinal direction. The bolt 810 passing through the long hole 831 is locked to the upper part of the first side dummy member 800A. As long as the bolt 810 is loosened, the first side dummy member 800A can move in the arrow F direction. As long as the bolt 810 is tightened, the first side dummy member 800A is fixed to the upper support piece 830A. Although the illustration is omitted, the upper part of the second side dummy member 800B is also supported in the same manner as the upper part of the first side dummy member 800A.

圖19，顯示用來支承第1側面虛設構件800A之下部的支承部。在縱框534的上部，設有朝向工件保持 治具30的內側延伸的2個安裝片820A。在該2個安裝片820A之間，配置用來支承第1側面虛設構件800A之下部的下部支承片830B。下部支承片830B，除了稍後所述之用來支承連接部850的構造之外，具有與上部支承片830A相同的構造。此外，第2側面虛設構件800B的下部，也和第1側面虛設構件800A的下部一樣受到支承。 Fig. 19 shows a supporting part for supporting the lower part of the first side dummy member 800A. On the upper part of the vertical frame 534, there is a Two mounting pieces 820A extending inside the jig 30. Between the two attachment pieces 820A, a lower support piece 830B for supporting the lower portion of the first side dummy member 800A is arranged. The lower support piece 830B has the same structure as the upper support piece 830A except for the structure for supporting the connecting portion 850 described later. In addition, the lower part of the second side dummy member 800B is also supported in the same manner as the lower part of the first side dummy member 800A.

第1、第2側面虛設構件800A、800B，藉由將纜線930A、930B連接於譬如圖18所示的螺栓810，能與整流器連接。為了使第1、第2側面虛設構件800A、800B從縱框933、934電氣性絕緣，安裝片820A及/或上部、下部支承片830A、830B，是由絕緣體所形成。 The first and second side dummy members 800A, 800B can be connected to the rectifier by connecting the cables 930A, 930B to the bolt 810 as shown in FIG. 18, for example. In order to electrically insulate the first and second side dummy members 800A and 800B from the vertical frames 933 and 934, the mounting piece 820A and/or the upper and lower supporting pieces 830A and 830B are formed of an insulator.

藉由使第1、第2側面虛設構件800A、800B在工件20的寬度方向E移動，可分別在工件的兩側緣部20c、20d，調整工件的表面處理量(電鍍膜厚)。舉例來說，只要使第1側面虛設構件800A朝圖15的左側方向移動，便能使工件20之側緣部20d的電鍍膜厚變薄。相反地，只要使第1側面虛設構件800A朝圖15的右側方向移動，便能使工件20之側緣部20d的電鍍膜厚變厚。據此，使第1、第2側面虛設構件800A、800B僅朝工件20的寬度方向E移動的構造即可。 By moving the first and second side dummy members 800A, 800B in the width direction E of the workpiece 20, the amount of surface treatment (plating film thickness) of the workpiece can be adjusted on both side edges 20c and 20d of the workpiece, respectively. For example, by moving the first side dummy member 800A in the left direction in FIG. 15, the thickness of the plating film of the side edge portion 20d of the workpiece 20 can be reduced. Conversely, if the first side dummy member 800A is moved in the right direction in FIG. 15, the plating film thickness of the side edge portion 20d of the workpiece 20 can be thickened. According to this, it is only necessary to move the first and second side dummy members 800A, 800B in the width direction E of the workpiece 20.

藉由使第1、第2側面虛設構件800A、800B在工件20的厚度方向F移動，可分別在工件20的兩側緣部20c、20d，調整圖15所示之工件20的表面20d1及背面20d2處的表面處理量(電鍍膜厚)。舉例來說，只要使第1側面 虛設構件800A朝圖15的上側方向移動，便能使工件20之表面20d1的電鍍膜厚變薄。相反地，只要使第1側面虛設構件800A朝圖15的下側方向移動，便能使工件20之背面20d2的電鍍膜厚變薄。據此，使第1、第2側面虛設構件800A、800B僅朝工件20的厚度方向F移動的構造即可。 By moving the first and second side dummy members 800A, 800B in the thickness direction F of the workpiece 20, it is possible to adjust the surface 20d1 and the back surface of the workpiece 20 shown in FIG. 15 at the side edges 20c, 20d of the workpiece 20, respectively. The amount of surface treatment (plating film thickness) at 20d2. For example, just make the first side By moving the dummy member 800A in the upper direction of FIG. 15, the thickness of the plating film on the surface 20d1 of the workpiece 20 can be reduced. Conversely, by moving the first side dummy member 800A in the lower direction of FIG. 15, the thickness of the plating film on the back surface 20d2 of the workpiece 20 can be reduced. According to this, it is only necessary to move the first and second side dummy members 800A, 800B in the thickness direction F of the workpiece 20.

如圖19所示，可以更進一步設置：電氣性連接第1側面虛設構件800A的下部、與第2側面虛設構件800B的下部的連接構件850。藉由設置連接構件850，電流容易流動於第1及第2側面虛設構件800A、800B的下部，在工件20的兩側緣部20c、20d，能有效地執行「從上部朝下部流動之電流」的調整。 As shown in FIG. 19, a connection member 850 that electrically connects the lower part of the first side dummy member 800A and the lower part of the second side dummy member 800B may be further provided. By providing the connecting member 850, electric current can easily flow to the lower part of the first and second side dummy members 800A, 800B. At the side edges 20c, 20d of the workpiece 20, the "current flowing from the upper part to the lower part" can be effectively performed. Adjustment.

連接構件850的兩端部，譬如由圖19所示的2個下部支承片830B支承成可滑動。藉此，容許2個下部支承片830B朝圖15所示之箭號E方向移動。此外，連接構件850的兩端部，在第1、第2側面虛設構件800A、800B的下部，以可撓的導電構件形成電氣性連接。藉此，容許第1、第2側面虛設構件800A、800B朝圖15所示之箭號E、F方向移動。 Both ends of the connecting member 850 are slidably supported by, for example, two lower support pieces 830B shown in FIG. 19. This allows the two lower support pieces 830B to move in the direction of the arrow E shown in FIG. 15. In addition, both ends of the connecting member 850 are electrically connected to the lower part of the first and second side dummy members 800A, 800B by flexible conductive members. This allows the first and second side dummy members 800A and 800B to move in the directions of arrows E and F shown in FIG. 15.

20:工件 20: Workpiece

20a:上緣部 20a: Upper edge

20b:下緣部 20b: lower edge

20c,20d:側緣部 20c, 20d: side edge

30:工件保持治具 30: Workpiece holding fixture

210:供電部(供電軌道) 210: Power supply department (power supply rail)

341A,341B:第1、第2接觸部 341A, 341B: the first and second contacts

341A,350A:第1分歧導電構件 341A, 350A: first branch conductive member

341B,350B:第2分歧導電構件 341B, 350B: second branch conductive member

350A,350B:一對第1纜線 350A, 350B: a pair of first cables

360:共通連接部(共通導電構件) 360: Common connection part (common conductive member)

361:第1導電構件 361: The first conductive member

362,363:一對第2導電構件 362,363: A pair of second conductive members

370A,370B:一對第1連接部(一對金屬板) 370A, 370B: A pair of first connecting parts (a pair of metal plates)

370A,370B,531:第1分歧導通構件 370A, 370B, 531: the first branch conduction member

380A,380B:一對第2連接部(一對第2纜線) 380A, 380B: A pair of second connecting parts (a pair of second cables)

380A,380B,533,534:第1分歧導通構件 380A, 380B, 533, 534: the first branch conduction member

410R,410L:陽極 410R, 410L: anode

510:上側夾持器(upper clamper) 510: upper clamper

520:下側夾持器 520: Lower side gripper

521:固定部 521: Fixed part

521A:第1面 521A: Side 1

521B:第2面 521B: Side 2

523:可動部 523: movable part

530:框體 530: frame

531:上框(支承部) 531: Upper frame (support part)

532:下框(支承部) 532: Lower frame (support part)

533,534:一對縱框 533,534: a pair of vertical frames

610:上側虛設板 610: upper dummy board

620:下側虛設板 620: lower dummy board

611:鉸鍊 611: Hinge

630,630A,630B:絕緣板(上側絕緣板、下側絕緣板、表側絕緣板、背側絕緣板) 630, 630A, 630B: Insulation plate (upper side insulating plate, lower side insulating plate, front side insulating plate, back side insulating plate)

700:虛設板(dummy board) 700: dummy board

700A:第3面 700A: Side 3

700B:第4面 700B: Side 4

701:基端部 701: base end

704:前端部 704: Front end

720:調整構件 720: adjustment component

800A:第1側面虛設構件 800A: Dummy member on the first side

800B:第2側面虛設構件 800B: Dummy member on the second side

850:連接構件 850: connecting member

900(900A,900B):第2分歧導通構件 900 (900A, 900B): The second branch conduction member

900A(910A,920A,922A,930A):第1虛設導通構件 900A (910A, 920A, 922A, 930A): the first dummy conduction member

900B(910B,920B,922B,930B):第2虛設導通構件 900B (910B, 920B, 922B, 930B): the second dummy conduction member

920A,921A,922A:第1可變電阻器(variable resistor) 920A, 921A, 922A: the first variable resistor (variable resistor)

920B,921B,922B:第2可變電阻器 920B, 921B, 922B: 2nd variable resistor

P1:第1位置 P1: 1st position

P2:第2位置 P2: 2nd position

S,S2:露出導電面積 S, S2: exposed conductive area

[圖1]：為本發明之實施形態的表面處理裝置的縱剖面圖。 [Fig. 1]: A longitudinal cross-sectional view of the surface treatment device according to the embodiment of the present invention.

[圖2]：為圖1的局部放大圖。 [Figure 2]: is a partial enlarged view of Figure 1.

[圖3]：是從搬送方向所見之工件保持治具的側視圖。 [Figure 3]: It is a side view of the workpiece holding jig as seen from the conveying direction.

[圖4]：是顯示設於工件保持治具之接觸部的支承構造的圖。 [Fig. 4]: A diagram showing the support structure provided in the contact portion of the workpiece holding jig.

[圖5]：為工件保持治具的前視圖。 [Figure 5]: The front view of the workpiece holding jig.

[圖6]：為示意地顯示比較例之治具的圖。 [圖7]：為顯示流動於圖6中之治具的電流的比較例的特性圖。 [圖8]：為示意地顯示本發明實施形態之治具的圖。 [圖9]：為顯示流動於圖8中之治具的電流的本實施形態的特性圖。 [圖10]：為放大顯示上側虛設板及絕緣板的圖。 [圖11]：為上側虛設板的側視圖。 [圖12]：是顯示上側虛設板可在第1位置與第2位置之間移動的圖。 [圖13]：為顯示設於下側夾持器的虛設板及調整構件的圖。 [圖14]：為顯示調整構件重疊於虛設板之狀態的俯視圖。 [圖15]：是圖5的D-D箭號方向視圖。 [圖16]：為第1側面虛設構件的前視圖。 [圖17]：為顯示第1及第2側面虛設構件之上部支承構造的圖。 [圖18]：為第1及第2側面虛設構件之上部支承構造的俯視圖。 [圖19]：為顯示第1及第2側面虛設構件之下部支承構造的圖。[Fig. 6]: A diagram schematically showing the jig of the comparative example. [Fig. 7]: A characteristic diagram showing a comparative example of current flowing through the jig in Fig. 6. [Fig. 8]: A diagram schematically showing a jig according to an embodiment of the present invention. [Fig. 9]: A characteristic diagram of the present embodiment showing the current flowing through the jig in Fig. 8. [Fig. [Figure 10]: An enlarged view showing the upper dummy board and insulating board. [Figure 11]: A side view of the upper dummy board. [Fig. 12]: A diagram showing that the upper dummy board can move between the first position and the second position. [Fig. 13]: A diagram showing the dummy board and the adjustment member provided on the lower gripper. [Fig. 14]: A plan view showing the state where the adjustment member overlaps the dummy board. [Fig. 15]: A view from the direction of the arrow D-D in Fig. 5. [Figure 16]: It is a front view of the first side dummy member. [Fig. 17]: A diagram showing the supporting structure of the upper portion of the first and second side dummy members. [Fig. 18]: A plan view of the upper support structure of the first and second side dummy members. [Fig. 19]: A diagram showing the supporting structure of the lower part of the first and second side dummy members.

20a:上緣部 20a: Upper edge

531:上框(支承部) 531: Upper frame (support part)

610:上側虛設板 610: upper dummy board

610A:前端部 610A: Front end

611:鉸鍊 611: Hinge

612:螺絲 612: Screw

630,630A:絕緣板 630, 630A: Insulation board

631A:長孔 631A: Long hole

641A:螺栓 641A: Bolt

Claims (7)

一種工件保持治具，是可保持欲表面處理的工件，且可與整流器電氣性連接的工具保持治具，其特徵為具有：至少一個支承部，可與前述整流器導通；和至少一個夾持器，具有導電性，由前述至少一個支承部所支承，用來夾持前述工件之緣部的一部分；和至少一個虛設板，具有導電性，由前述至少一個支承部所支承，配置成與前述工件的前述緣部中未被前述至少一個夾持器所保持的領域接近；和至少一個絕緣板，可移動地支承於前述至少一個虛設板的至少其中一面，以覆蓋前述至少其中一面，進而調整前述至少其中一個虛設板的露出導電面積。 A workpiece holding jig, which is a tool holding jig that can hold a workpiece to be surface-treated and can be electrically connected to a rectifier, and is characterized by having: at least one supporting portion that can be connected to the aforementioned rectifier; and at least one holder , Having conductivity, supported by the aforementioned at least one supporting portion, used to clamp a part of the edge of the aforementioned workpiece; and at least one dummy board, having conductivity, supported by the aforementioned at least one supporting portion, and configured to be in contact with the aforementioned workpiece The aforementioned edge portion is not close to the area held by the aforementioned at least one holder; and at least one insulating plate is movably supported on at least one surface of the aforementioned at least one dummy plate to cover at least one of the aforementioned surfaces, thereby adjusting the aforementioned The exposed conductive area of at least one of the dummy boards. 如請求項1所記載的工件保持治具，其中具有圍繞前述工件的框體，前述框體含有上框、下框及一對縱框，前述至少一個支承部，含有前述上框與前述下框，前述至少一個夾持器含有：上側夾持器，由前述上框所支承，用來夾持前述工件之上緣部的一部分；及下側夾持器，由前述下框所支承，用來夾持前述工件之下緣部的一部分，前述至少一個虛設板含有；上側虛設板，配置成與前述工件的前述上緣部中未被前述上側夾持器所保持的領域接近；及下側虛設板，配置成與前述工件的前述下緣部中 未被前述下側夾持器所保持的領域接近，前述至少一個絕緣板含有：上側絕緣板，覆蓋前述上側虛設板的至少其中一面；及下側絕緣板，覆蓋前述下側虛設板的至少其中一面。 The workpiece holding jig described in claim 1, which has a frame surrounding the workpiece, the frame includes an upper frame, a lower frame, and a pair of vertical frames, and the at least one supporting portion includes the upper frame and the lower frame The aforementioned at least one gripper includes: an upper gripper, supported by the upper frame, for holding a part of the upper edge of the workpiece; and a lower gripper, supported by the lower frame, for holding a part of the upper edge of the workpiece; To clamp a part of the lower edge of the workpiece, the at least one dummy plate includes; an upper dummy plate arranged to be close to the area of the upper edge of the workpiece that is not held by the upper gripper; and a lower dummy plate Plate, arranged to be aligned with the aforementioned lower edge of the aforementioned workpiece Close to the area not held by the lower holder, the at least one insulating plate includes: an upper insulating plate covering at least one surface of the upper dummy plate; and a lower insulating plate covering at least one of the lower dummy plate one side. 如請求項1所記載的工件保持治具，其中前述至少一個絕緣板含有：表側絕緣板，覆蓋前述至少一個虛設板的表面；及背側絕緣板，覆蓋前述至少一個虛設板的背面。 The workpiece holding jig according to claim 1, wherein the at least one insulating plate includes: a front insulating plate covering the surface of the at least one dummy plate; and a back insulating plate covering the back surface of the at least one dummy plate. 如請求項1所記載的工件保持治具，其中前述至少一個虛設板，可透過鉸鍊而彎曲，並可朝第1位置與第2位置移動，該第1位置，與前述工件的前述緣部中未被前述至少一個夾持器所保持的領域接近，並配置成與前述工件平行，該第2位置，藉由前述鉸鍊而彎曲，而配置成與前述工件非平行。 The workpiece holding jig described in claim 1, wherein the at least one dummy plate can be bent through a hinge and can be moved toward a first position and a second position, and the first position is in contact with the edge of the workpiece The area not held by the at least one holder is close and is arranged parallel to the workpiece, and the second position is bent by the hinge and is arranged non-parallel to the workpiece. 如請求項4所記載的工件保持治具，其中前述至少一個虛設板，可藉由前述鉸鍊本身的彈性、或者設於前述鉸鍊的彈推構件，而朝前述第1位置彈推移動。 The workpiece holding jig according to claim 4, wherein the at least one dummy plate can be pushed and moved toward the first position by the elasticity of the hinge itself or the elastic pushing member provided on the hinge. 一種工件保持治具，是可保持欲表面處理的工件，且可與整流器電氣性連接的工具保持治具，其特徵為具有：至少一個支承部，可與前述整流器導通；和至少一個夾持器，具有導電性，由前述至少一個支承部所支承，用來夾持前述工件之緣部的一部分；和至少一個虛設板，透過鉸鍊由前述至少一個支承部所 支承，並可朝第1位置與第2位置移動，該第1位置，與前述工件的前述緣部中未被前述至少一個夾持器所保持的領域接近，並配置成與前述工件平行，該第2位置，藉由前述鉸鍊而彎曲，而配置成與前述工件非平行。 A workpiece holding jig, which is a tool holding jig that can hold a workpiece to be surface-treated and can be electrically connected to a rectifier, and is characterized by having: at least one supporting portion that can be connected to the aforementioned rectifier; and at least one holder , With conductivity, supported by the aforementioned at least one supporting portion, used to clamp a part of the edge of the aforementioned workpiece; and at least one dummy board, which is held by the aforementioned at least one supporting portion through a hinge Supported and movable toward a first position and a second position. The first position is close to the area of the edge portion of the workpiece that is not held by the at least one holder, and is arranged parallel to the workpiece. The second position is bent by the hinge and arranged so as to be non-parallel to the workpiece. 一種表面處理裝置，其特徵為具有：請求項1至請求項6之其中任一項所記載的工件保持治具；和供電部，連接於整流器，並與前述工件保持治具接觸；及表面處理槽，具備連接於前述整流器的陽極，前述工件保持治具含有：與前述供電部接觸，並與前述至少一個支承部導通的接觸部。 A surface treatment device, characterized by having: the workpiece holding jig described in any one of claim 1 to claim 6; and a power supply part connected to the rectifier and in contact with the workpiece holding jig; and surface treatment The tank includes an anode connected to the rectifier, and the workpiece holding jig includes a contact portion that is in contact with the power supply portion and is electrically connected to the at least one support portion.
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