TWI706905B - Vertical process device - Google Patents
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- TWI706905B TWI706905B TW108135556A TW108135556A TWI706905B TW I706905 B TWI706905 B TW I706905B TW 108135556 A TW108135556 A TW 108135556A TW 108135556 A TW108135556 A TW 108135556A TW I706905 B TWI706905 B TW I706905B
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Abstract
Description
本發明涉及一種垂直製程裝置，尤指一種適用於軟性銅箔基板等電鍍裝置的垂直製程裝置。 The invention relates to a vertical process device, in particular to a vertical process device suitable for electroplating devices such as flexible copper foil substrates.
在軟性銅箔基板(軟性基板)的製程中，常會有將軟性銅箔基板由水平轉成垂直的需求，然而在現有技術的軟性銅箔基板的電鍍裝置中，將軟性銅箔基板由水平轉成垂直的轉向機構，大多容易造成軟性銅箔基板的刮傷。再者，現有的垂直製程裝置，在軟性銅箔基板的輸送過程中，也容易因為張力等問題，而使得軟性銅箔基板造成皺褶、張力或刮傷，顯然仍具有可改善的空間。 In the manufacturing process of flexible copper foil substrates (flexible substrates), there is often a need to convert the flexible copper foil substrate from horizontal to vertical. However, in the electroplating device for flexible copper foil substrates in the prior art, the flexible copper foil substrate is converted from horizontal to vertical. A vertical turning mechanism is likely to cause scratches on the soft copper foil substrate. Furthermore, in the existing vertical process equipment, during the conveying process of the flexible copper foil substrate, it is also prone to wrinkles, tension or scratches on the flexible copper foil substrate due to tension and other problems. Obviously, there is still room for improvement.
本發明所要解決的技術問題在於，提供一種垂直製程裝置，可有效的避免造成軟性基板的刮傷。 The technical problem to be solved by the present invention is to provide a vertical process device, which can effectively avoid scratches on the flexible substrate.
本發明所要解決的技術問題在於，還提供一種垂直製程裝置，使軟性基板在輸送過程中具有適當的張力，使軟性基板不會造成皺褶、張力或刮傷的問題。 The technical problem to be solved by the present invention is to also provide a vertical process device to enable the flexible substrate to have proper tension during the conveying process, so that the flexible substrate will not cause wrinkles, tension or scratches.
為了解決上述的技術問題，本發明提供一種垂直製程裝置，包括：一放板機構，該放板機構包含至少一進料滾筒、一接板台、一第一張力 檢測單元、一暫存機構及一第一轉向機構，該進料滾筒、該接板台、該第一張力檢測單元、該暫存機構及該第一轉向機構設置於一輸送路徑上，軟性基板能沿著該輸送路徑輸送，該進料滾筒配置於一第一方向上，該第一方向為水平方向，該進料滾筒能用以放置該軟性基板，該接板台設置於該進料滾筒的下游位置，該接板台能用以接合該軟性基板，該第一張力檢測單元設置於該接板台的下游位置，該第一張力檢測單元能用以檢測該軟性基板的張力，該暫存機構設置於該第一張力檢測單元的下游位置，該暫存機構能用以暫存該軟性基板，該第一轉向機構設置於該暫存機構的下游位置，該第一轉向機構能用以將該軟性基板由該第一方向轉向為一第二方向，該第二方向為垂直方向，該第一轉向機構包含一第一轉向元件、一第一導入滾筒及一第一導出滾筒，該第一轉向元件位於該第一導入滾筒及該第一導出滾筒之間，該第一導入滾筒配置於該第一方向上，該第一導出滾筒配置於該第二方向上，該第一轉向元件呈傾斜狀，該第一轉向元件具有一第一中空體，該第一中空體上設置多個第一氣孔，該軟性基板依序通過該第一導入滾筒、該第一轉向元件及該第一導出滾筒，該些第一氣孔能用以輸出氣體，使該軟性基板不與該第一轉向元件直接接觸；以及一收板機構，該收板機構設置於該放板機構的下游位置，該收板機構包含一第二轉向機構、一導正機構、一第二張力檢測單元及至少一出料滾筒，該第二轉向機構、該導正機構、該第二張力檢測單元及該出料滾筒設置於該輸送路徑上，該第二轉向機構能用以將該軟性基板由該第二方向轉向為該第一方向，該第二轉向機構包含一第二轉向元件、一第二導入滾筒及一第二導出滾筒，該第二轉向元件位於該第二導入滾筒及該第二導出滾筒之間，該第二導入滾筒配置於該第二方向上，該第二導出滾筒配置於該第一方向上，該第二轉向元件呈傾斜狀，該第二轉向元件具有一第二中空體，該第二中空體上設置多個第二氣孔，該軟性基板依序通過該第二導 入滾筒、該第二轉向元件及該第二導出滾筒，該些第二氣孔能用以輸出氣體，使該軟性基板不與該第二轉向元件直接接觸，該導正機構設置於該第二轉向機構的下游位置，能用以導正該軟性基板，該第二張力檢測單元設置於該導正機構的下游位置，該第二張力檢測單元能用以檢測該軟性基板的張力，該出料滾筒設置於該第二張力檢測單元的下游位置，該出料滾筒配置於該第一方向上，該出料滾筒能用以放置該軟性基板。 In order to solve the above-mentioned technical problems, the present invention provides a vertical process device, including: a plate placing mechanism, the plate placing mechanism includes at least one feed roller, a plate connecting table, a first tension The detection unit, a temporary storage mechanism and a first steering mechanism, the feed roller, the plate receiving table, the first tension detection unit, the temporary storage mechanism and the first steering mechanism are arranged on a conveying path, and the flexible substrate It can be conveyed along the conveying path, the feed roller is arranged in a first direction, the first direction is a horizontal direction, the feed roller can be used to place the flexible substrate, and the plate connecting table is arranged on the feed roller The board connecting table can be used to join the flexible substrate, the first tension detecting unit is arranged at a downstream position of the board connecting table, and the first tension detecting unit can be used to detect the tension of the flexible substrate. The storage mechanism is arranged at a downstream position of the first tension detection unit, the temporary storage mechanism can be used to temporarily store the flexible substrate, the first steering mechanism is arranged at a downstream position of the temporary storage mechanism, and the first steering mechanism can be used The flexible substrate is turned from the first direction to a second direction, and the second direction is a vertical direction. The first turning mechanism includes a first turning element, a first introduction roller, and a first delivery roller. A steering element is located between the first introduction roller and the first delivery roller, the first introduction roller is arranged in the first direction, the first delivery roller is arranged in the second direction, and the first steering element is Inclined shape, the first turning element has a first hollow body, the first hollow body is provided with a plurality of first air holes, the flexible substrate sequentially passes through the first introduction roller, the first turning element and the first outlet A roller, the first air holes can be used to output gas so that the flexible substrate does not directly contact the first steering element; and a plate receiving mechanism, the plate receiving mechanism is arranged at a downstream position of the plate releasing mechanism, the plate receiving mechanism The mechanism includes a second steering mechanism, a guiding mechanism, a second tension detection unit, and at least one discharging drum. The second turning mechanism, the guiding mechanism, the second tension detecting unit and the discharging drum are arranged at On the conveying path, the second turning mechanism can be used to turn the flexible substrate from the second direction to the first direction, and the second turning mechanism includes a second turning element, a second introduction roller, and a second A lead-out roller, the second turning element is located between the second lead-in roller and the second lead-out roller, the second lead-in roller is arranged in the second direction, the second lead-out roller is arranged in the first direction, the The second turning element is inclined. The second turning element has a second hollow body. A plurality of second air holes are provided on the second hollow body. The flexible substrate sequentially passes through the second guide. Into the roller, the second turning element and the second exiting roller, the second air holes can be used to output gas so that the flexible substrate does not directly contact the second turning element, and the guiding mechanism is arranged in the second turning The downstream position of the mechanism can be used to guide the flexible substrate, the second tension detection unit is arranged at the downstream position of the guide mechanism, the second tension detection unit can be used to detect the tension of the flexible substrate, the discharge roller It is arranged at a downstream position of the second tension detection unit, the discharge roller is arranged in the first direction, and the discharge roller can be used to place the flexible substrate.
本發明的有益效果在於，本發明的垂直製程裝置包括放板機構及收板機構，放板機構及收板機構分別包含第一轉向機構及第二轉向機構，第一轉向機構包含第一轉向元件、第一導入滾筒及第一導出滾筒，第一轉向元件具有第一中空體，第一中空體上設置多個第一氣孔，軟性基板依序通過第一導入滾筒、第一轉向元件及第一導出滾筒，該些第一氣孔能用以輸出氣體，使軟性基板不與第一轉向元件直接接觸。第二轉向機構包含第二轉向元件、第二導入滾筒及第二導出滾筒，第二轉向元件具有第二中空體，第二中空體上設置多個第二氣孔，軟性基板依序通過第二導入滾筒、第二轉向元件及第二導出滾筒，第一導入滾筒、第一導出滾筒及第二導入滾筒、第二導出滾筒能用以導引軟性基板順利的通過，且該些第二氣孔能用以輸出氣體，使軟性基板不與第二轉向元件直接接觸，因此可有效的避免造成軟性基板的刮傷。 The beneficial effect of the present invention is that the vertical process device of the present invention includes a plate placing mechanism and a plate receiving mechanism. The plate placing mechanism and the plate receiving mechanism respectively include a first steering mechanism and a second steering mechanism, and the first steering mechanism includes a first steering element. , The first introduction roller and the first exit roller, the first steering element has a first hollow body, a plurality of first air holes are arranged on the first hollow body, and the flexible substrate passes through the first introduction roller, the first steering element and the first The lead-out roller, the first air holes can be used to output gas, so that the flexible substrate does not directly contact the first turning element. The second steering mechanism includes a second steering element, a second introduction roller, and a second exit roller. The second steering element has a second hollow body. A plurality of second air holes are provided on the second hollow body. The flexible substrate sequentially passes through the second introduction. The roller, the second turning element and the second lead-out roller, the first lead-in roller, the first lead-out roller, the second lead-in roller, and the second lead-out roller can be used to guide the flexible substrate to pass smoothly, and the second air holes can be used With the output gas, the flexible substrate is not in direct contact with the second turning element, so the scratches on the flexible substrate can be effectively avoided.
再者，本發明的垂直製程裝置，該放板機構包含有第一張力檢測單元及暫存機構，該收板機構包含有第二張力檢測單元，暫存機構能用以暫存軟性基板，第一張力檢測單元及第二張力檢測單元能用以檢測軟性基板的張力，以便適時的進行軟性基板的張力調整，使軟性基板在輸送過程中具有適當的張力，使軟性基板不會造成皺褶、張力或刮傷的問題。 Furthermore, in the vertical manufacturing apparatus of the present invention, the board placement mechanism includes a first tension detection unit and a temporary storage mechanism, the collection mechanism includes a second tension detection unit, and the temporary storage mechanism can be used to temporarily store the flexible substrate. A tension detection unit and a second tension detection unit can be used to detect the tension of the flexible substrate, so as to adjust the tension of the flexible substrate in a timely manner, so that the flexible substrate has proper tension during the conveying process, so that the flexible substrate will not cause wrinkles, Problems with tension or scratches.
為使能更進一步瞭解本發明的特徵及技術內容，請參閱以下有 關本發明的詳細說明與圖式，然而所提供的圖式僅用於提供參考與說明，並非用來對本發明加以限制。 In order to further understand the features and technical content of the present invention, please refer to the following Regarding the detailed description and drawings of the present invention, the provided drawings are only for reference and description, and are not used to limit the present invention.
1:放板機構 1: Board release mechanism
11:進料滾筒 11: Feed roller
12:接板台 12: pallet connection
13:第一張力檢測單元 13: The first tension detection unit
14:暫存機構 14: Temporary storage organization
141:驅動裝置 141: Drive
142:暫存輪 142: Temporary Storage Wheel
143:伺服馬達 143: Servo motor
144:皮帶輪組 144: Pulley
145:升降座 145: Lift seat
15:第一轉向機構 15: The first steering mechanism
151:第一轉向元件 151: First steering element
152:第一導入滾筒 152: The first introduction drum
153:第一導出滾筒 153: The first lead-out roller
154:第一中空體 154: The first hollow body
155:第一氣孔 155: First Stoma
156:第一弧形表面 156: The first curved surface
16:第一膜軸 16: first film axis
2:收板機構 2: Receiving mechanism
21:第二轉向機構 21: The second steering mechanism
211:第二轉向元件 211: Second steering element
212:第二導入滾筒 212: The second lead-in roller
213:第二導出滾筒 213: The second lead-out roller
214:第二中空體 214: second hollow body
215:第二氣孔 215: Second Stoma
216:第二弧形表面 216: second curved surface
22:導正機構 22: Guiding mechanism
221:導正輪 221: Guide Wheel
23:第二張力檢測單元 23: The second tension detection unit
24:出料滾筒 24: discharge drum
25:第二膜軸 25: second film axis
3:電鍍槽 3: Electroplating tank
A:輸送路徑 A: Conveying path
B:第一方向 B: First direction
C:第二方向 C: second direction
圖1為本發明垂直製程裝置之放板機構的立體圖。 Fig. 1 is a perspective view of the board placement mechanism of the vertical manufacturing apparatus of the present invention.
圖2為本發明垂直製程裝置之放板機構的平面圖。 Fig. 2 is a plan view of the board placement mechanism of the vertical process device of the present invention.
圖3為本發明垂直製程裝置之收板機構的立體圖。 Fig. 3 is a perspective view of the plate receiving mechanism of the vertical manufacturing apparatus of the present invention.
圖4為本發明垂直製程裝置之收板機構的平面圖。 Fig. 4 is a plan view of the plate receiving mechanism of the vertical process device of the present invention.
圖5為本發明暫存機構的立體圖。 Figure 5 is a perspective view of the temporary storage mechanism of the present invention.
圖6為本發明暫存機構另一角度的立體圖。 Figure 6 is a perspective view of the temporary storage mechanism of the present invention from another angle.
圖7為本發明第一轉向機構的立體圖。 Fig. 7 is a perspective view of the first steering mechanism of the present invention.
圖8為本發明第一轉向機構使用狀態的立體圖。 Figure 8 is a perspective view of the first steering mechanism of the present invention in use.
圖9為本發明第二轉向機構的立體圖。 Figure 9 is a perspective view of the second steering mechanism of the present invention.
圖10為本發明第二轉向機構使用狀態的立體圖。 Figure 10 is a perspective view of the second steering mechanism of the present invention in use.
圖11為本發明垂直製程裝置之方塊示意圖。 Fig. 11 is a block diagram of the vertical process apparatus of the present invention.
以下是通過特定的具體實施例來說明本發明所公開的實施方式，本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用，本說明書中的各項細節也可基於不同觀點與應用，在不悖離本發明的構思下進行各種修改與變更。另外，本發明的附圖僅為簡單示意說明，並非依實際尺寸的描繪，事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容，但所公開的內容並非用以限制本發明的保護範圍。 The following are specific examples to illustrate the disclosed embodiments of the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are merely schematic illustrations, and are not drawn according to actual dimensions, and are stated in advance. The following embodiments will further describe the related technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention.
[實施例] [Example]
請參閱圖1至圖4，本發明提供一種垂直製程裝置，適用於軟性銅箔基板等電鍍裝置，包括一放板機構1及一收板機構2，收板機構2設置於放板機構1的下游位置。具體而言，放板機構1及收板機構2之間可設置一電鍍槽3(如圖11所示)，該放板機構1可設置於電鍍槽3的上游位置，該收板機構2可設置於電鍍槽3的下游位置，放板機構1及收板機構2之間形成一輸送路徑A，軟性基板(例如軟性銅箔基板)能沿著輸送路徑A輸送，該放板機構1能將軟性基板沿著輸送路徑A輸送至電鍍槽3，以便進行電鍍的製程，軟性基板在電鍍完成後，再沿著輸送路徑A輸送至收板機構2上存放。
Please refer to Figures 1 to 4, the present invention provides a vertical process device suitable for electroplating devices such as flexible copper foil substrates, including a board release mechanism 1 and a
該放板機構1包含至少一進料滾筒11、一接板台12、一第一張力檢測單元13、一暫存機構14及一第一轉向機構15。該進料滾筒11設置於輸送路徑A上，該進料滾筒11可設置有一個或多個，本實施例揭示設置兩進料滾筒11，以便於備用。該進料滾筒11能用以放置軟性基板，進料滾筒11能配置於一第一方向B上，該第一方向B可為水平方向或垂直方向，在本實施例中，該第一方向B為水平方向，使得軟性基板可沿著水平方向輸送。該進料滾筒11的一側(下側)亦可進一步設置一第一膜軸16，以便捲收由軟性基板上撕離的膠膜。
The board placement mechanism 1 includes at least one
該接板台12設置於進料滾筒11的下游位置，該接板台12設置於輸送路徑A上，該接板台12能用以接合軟性基板，亦即可將新軟性基板的前端接合於舊軟性基板的後端，使軟性基板可連續的供料。
The plate receiving table 12 is arranged at a downstream position of the
該第一張力檢測單元13設置於接板台12的下游位置，該第一張力檢測單元13設置於輸送路徑A上，該第一張力檢測單元13可為電子式的張力檢測裝置，該第一張力檢測單元13接觸軟性基板，能用以檢測軟性基板的張力，以便適時的進行軟性基板的張力調整。該第一張力檢測單元13的構造並 不限制，也可以是其他形式的張力檢測裝置。 The first tension detection unit 13 is arranged at a downstream position of the plate joining table 12, and the first tension detection unit 13 is arranged on the conveying path A. The first tension detection unit 13 may be an electronic tension detection device. The tension detection unit 13 contacts the flexible substrate and can be used to detect the tension of the flexible substrate, so as to adjust the tension of the flexible substrate in a timely manner. The structure of the first tension detection unit 13 and It is not limited, and other forms of tension detection devices can also be used.
該暫存機構14設置於第一張力檢測單元13的下游位置，該暫存機構14設置於輸送路徑A上，當新、舊的軟性基板接合時，可利用該暫存機構14暫存軟性基板，使軟性基板能維持適當的張力。請參閱圖5及圖6，該暫存機構14包含一驅動裝置141及至少一暫存輪142，在本實施例中，設置有兩暫存輪142，該兩暫存輪142呈水平狀且間隔的設置，該兩暫存輪142連接於驅動裝置141，軟性基板能放置於兩暫存輪142上，該驅動裝置141能驅動兩暫存輪142升降，使軟性基板能維持適當的張力。
The
在本實施例中，驅動裝置141包含一伺服馬達143，該伺服馬達143通過一皮帶輪組144及一升降座145連接於兩暫存輪142，亦即兩暫存輪142樞設於升降座145上，皮帶輪組144連接於伺服馬達143及升降座145之間。當伺服馬達143轉動時，可通過皮帶輪組144帶動升降座145及兩暫存輪142上升、下降，使軟性基板能維持適當的張力。
In this embodiment, the driving
該第一轉向機構15設置於該暫存機構14的下游位置，該第一轉向機構15設置於輸送路徑A上，能用以將軟性基板由第一方向B轉向為第二方向C，亦即能將水平輸送的軟性基板轉向為垂直輸送，使得軟性基板以垂直狀態輸入電鍍槽3。
The
如圖7及圖8所示，該第一轉向機構15包含一第一轉向元件(轉向元件)151、一第一導入滾筒(導入滾筒)152及一第一導出滾筒(導出滾筒)153，第一轉向元件151位於第一導入滾筒152及第一導出滾筒153之間。第一導入滾筒152及第一導出滾筒153配置於不同的方向，第一導入滾筒152配置於第一方向B上，第一導出滾筒153配置於第二方向C上，第二方向C垂直於第一方向B，在本實施例中，該第一方向B為水平方向，該第二方向C為垂直方向，該軟性基板依序通過第一導入滾筒152、第一轉向元件151及第一導出滾筒153，軟性
基板通過第一導入滾筒152時為水平狀，經過第一轉向元件151轉向輸送至第一導出滾筒153成垂直狀。在另一實施例中，該第一方向B可為垂直方向，該第二方向C可為水平方向。
As shown in Figures 7 and 8, the
該第一轉向元件151可為鈑金件，由金屬板體彎折組成。該第一轉向元件151呈傾斜狀，該第一轉向元件151具有一第一中空體(中空體)154，且該第一中空體154上設置多個第一氣孔(氣孔)155，該些第一氣孔155能用以輸出氣體，該第一轉向元件151設置於輸送路徑A上，能用導引軟性基板改變方向，且使得軟性基板不與第一轉向元件151直接接觸，用以避免軟性基板產生刮傷。該些第一氣孔155的形狀並不限制，可以是圓形、方形、多邊形或長條狀等各種形狀。在本實施例中，該第一中空體154具有一第一弧形表面(弧形表面)156，該些第一氣孔155分布於第一弧形表面156上。該第一轉向元件151連接於現有的供氣裝置，可用以輸送氣體至第一轉向元件151內，並由該些第一氣孔155輸出氣體。
The
該收板機構2包含一第二轉向機構21、一導正機構22、一第二張力檢測單元23及至少一出料滾筒24。該第二轉向機構21設置於電鍍槽3的下游位置，該第二轉向機構21設置於輸送路徑A上，能用以將軟性基板由第二方向C轉向為第一方向B，亦即能將垂直輸送的軟性基板轉向為水平輸送，使得軟性基板轉能以水平狀態依序輸送至導正機構22、第二張力檢測單元23及出料滾筒24。
The
如圖9及圖10所示，該第二轉向機構21包含一第二轉向元件(轉向元件)211、一第二導入滾筒(導入滾筒)212及一第二導出滾筒(導出滾筒)213，第二轉向元件211位於第二導入滾筒212及第二導出滾筒213之間。第二導入滾筒212及第二導出滾筒213配置於不同的方向，第二導入滾筒212配置於第二方向C上，第二導出滾筒213配置於第一方向B上，在本實施例中，該第
一方向B為水平方向，該第二方向C為垂直方向，該軟性基板依序通過第二導入滾筒212、第二轉向元件211及第二導出滾筒213，軟性基板通過第二導入滾筒212時為垂直狀，經過第二轉向元件211轉向輸送至第二導出滾筒213成水平狀。在另一實施例中，該第一方向B可為垂直方向，該第二方向C可為水平方向。
As shown in Figures 9 and 10, the
該第二轉向元件211可為鈑金件，由金屬板體彎折組成。該第二轉向元件211呈傾斜狀，該第二轉向元件211具有一第二中空體(中空體)214，且該第二中空體214上設置多個第二氣孔(氣孔)215，該些第二氣孔215能用以輸出氣體，該第二轉向元件211設置於輸送路徑A上，能用導引軟性基板改變方向，且使得軟性基板不與第二轉向元件211直接接觸，用以避免軟性基板產生刮傷。該些第二氣孔215的形狀並不限制，可以是圓形、方形、多邊形或長條狀等各種形狀。在本實施例中，該第二中空體214具有一第二弧形表面(弧形表面)216，該些第二氣孔215分布於第二弧形表面216上。該第二轉向元件211連接於現有的供氣裝置，可用以輸送氣體至第二轉向元件211內，並由該些第二氣孔215輸出氣體。
The
該導正機構22設置於第二轉向機構21的下游位置，該導正機構22設置於輸送路徑A上，能用導正軟性基板，以避免軟性基板發生偏移，使得輸送程序得以順利進行。該導正機構22的構造並不限制，在本實施例中，該導正機構22具有多個導正輪221，而具有將偏斜的軟性基板件予以導正的功效。
The guiding
該第二張力檢測單元23設置於導正機構22的下游位置，該第二張力檢測單元23設置於輸送路徑A上，該第二張力檢測單元23可為電子式的張力檢測裝置，該第二張力檢測單元23接觸軟性基板，可用以檢測軟性基板的張力，以便適時的進行軟性基板的張力調整。該第二張力檢測單元23的構造
並不限制，也可以是其他形式的張力檢測裝置。
The second
該出料滾筒24設置於第二張力檢測單元23的下游位置，該出料滾筒24設置設置於輸送路徑A上，該輸送路徑A位於進料滾筒11及出料滾筒24之間，該出料滾筒24可設置有一個或多個，本實施例揭示設置兩出料滾筒24，以便於備用。軟性基板能放置於出料滾筒24上，出料滾筒24能配置於第一方向B上，該第一方向B可為水平方向或垂直方向，在本實施例中，該第一方向B為水平方向，使得軟性基板可沿著水平方向輸送至出料滾筒24。該出料滾筒24的一側(下側)亦可進一步設置一第二膜軸25，該第二膜軸25上可放置膠膜，以便將膠膜貼附於軟性基板上，用以保護該軟性基板。
The discharging
在本發明的另一實施例中，該轉向機構包含一轉向元件(如前述的第一轉向元件151、第二轉向元件211)、一導入滾筒(如前述的第一導入滾筒152、第二導入滾筒212)及一導出滾筒(如前述的第一導出滾筒153、第二導出滾筒213)，轉向元件位於導入滾筒及導出滾筒之間，導入滾筒配置於第一方向上，第一方向可為水平方向或垂直方向，導出滾筒配置於第二方向上，第二方向可為垂直方向或水平方向。轉向元件呈傾斜狀，轉向元件具有中空體(如前述的第一中空體154、第二中空體214)，中空體上設置多個氣孔(如前述的第一氣孔155、第二氣孔215)，軟性基板依序通過導入滾筒、轉向元件及導出滾筒，該些氣孔能用以輸出氣體，使軟性基板不與轉向元件直接接觸。
In another embodiment of the present invention, the steering mechanism includes a steering element (such as the aforementioned
[實施例的有益效果] [Beneficial effects of the embodiment]
本發明的有益效果在於，本發明的垂直製程裝置包括放板機構及收板機構，放板機構及收板機構分別包含第一轉向機構及第二轉向機構，第一轉向機構包含第一轉向元件、第一導入滾筒及第一導出滾筒，第一轉向元件具有第一中空體，第一中空體上設置多個第一氣孔，軟性基板依序通過第一導入滾筒、第一轉向元件及第一導出滾筒，該些第一氣孔能用以輸出氣 體，使軟性基板不與第一轉向元件直接接觸。第二轉向機構包含第二轉向元件、第二導入滾筒及第二導出滾筒，第二轉向元件具有第二中空體，第二中空體上設置多個第二氣孔，軟性基板依序通過第二導入滾筒、第二轉向元件及第二導出滾筒，第一導入滾筒、第一導出滾筒及第二導入滾筒、第二導出滾筒能用以導引軟性基板順利的通過，且該些第二氣孔能用以輸出氣體，使軟性基板不與第二轉向元件直接接觸。是以，本發明可有效的避免造成軟性基板的刮傷。 The beneficial effect of the present invention is that the vertical process device of the present invention includes a plate placing mechanism and a plate receiving mechanism. The plate placing mechanism and the plate receiving mechanism respectively include a first steering mechanism and a second steering mechanism, and the first steering mechanism includes a first steering element. , The first introduction roller and the first exit roller, the first steering element has a first hollow body, a plurality of first air holes are arranged on the first hollow body, and the flexible substrate passes through the first introduction roller, the first steering element and the first Lead out the drum, these first air holes can be used to output air Body, so that the flexible substrate does not directly contact the first turning element. The second steering mechanism includes a second steering element, a second introduction roller, and a second exit roller. The second steering element has a second hollow body. A plurality of second air holes are provided on the second hollow body. The flexible substrate sequentially passes through the second introduction. The roller, the second turning element and the second lead-out roller, the first lead-in roller, the first lead-out roller, the second lead-in roller, and the second lead-out roller can be used to guide the flexible substrate to pass smoothly, and the second air holes can be used To output gas, the flexible substrate does not directly contact the second turning element. Therefore, the present invention can effectively avoid scratches on the flexible substrate.
再者，本發明的垂直製程裝置，該放板機構包含有第一張力檢測單元及暫存機構，該收板機構包含有第二張力檢測單元，暫存機構能用以暫存軟性基板，第一張力檢測單元及第二張力檢測單元能用以檢測軟性基板的張力，以便適時的進行軟性基板的張力調整，使軟性基板在輸送過程中具有適當的張力，使軟性基板不會造成皺褶、張力或刮傷的問題。 Furthermore, in the vertical manufacturing apparatus of the present invention, the board placement mechanism includes a first tension detection unit and a temporary storage mechanism, the collection mechanism includes a second tension detection unit, and the temporary storage mechanism can be used to temporarily store the flexible substrate. A tension detection unit and a second tension detection unit can be used to detect the tension of the flexible substrate, so as to adjust the tension of the flexible substrate in a timely manner, so that the flexible substrate has proper tension during the conveying process, so that the flexible substrate will not cause wrinkles, Problems with tension or scratches.
以上所公開的內容僅為本發明的優選可行實施例，並非因此侷限本發明的申請專利範圍，所以凡是運用本發明說明書及圖式內容所做的等效技術變化，均包含於本發明的申請專利範圍內。 The content disclosed above is only a preferred and feasible embodiment of the present invention, and does not limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made using the description and schematic content of the present invention are included in the application of the present invention. Within the scope of the patent.
15:第一轉向機構 15: The first steering mechanism
151:第一轉向元件 151: First steering element
152:第一導入滾筒 152: The first introduction drum
153:第一導出滾筒 153: The first lead-out roller
154:第一中空體 154: The first hollow body
155:第一氣孔 155: First Stoma
156:第一弧形表面 156: The first curved surface
A:輸送路徑 A: Conveying path
B:第一方向 B: First direction
C:第二方向 C: second direction
Claims (8)
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| TW108135556A TWI706905B (en) | 2019-10-01 | 2019-10-01 | Vertical process device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI790818B (en) * | 2021-11-16 | 2023-01-21 | 迅得機械股份有限公司 | Board placing device and vertical guiding mechanism thereof |
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