TWI702394B

TWI702394B - Resilient cushioning block of bio-chip test and test module and test apparatus thereof

Info

Publication number: TWI702394B
Application number: TW107140861A
Authority: TW
Inventors: 劉光祥; 呂傑文; 周錫華; 邱昱豪; 賴柏廷
Original assignee: 京元電子股份有限公司
Priority date: 2018-11-16
Filing date: 2018-11-16
Publication date: 2020-08-21
Also published as: TW202020444A

Abstract

The present invention relates to a resilient cushioning block of bio-chip test and a test module and a test apparatus thereof, the resilient cushioning block includes a cushioning block body and an extended outer rim. The resilient cushioning block is provided a bottom-groove surface and two through holes, which comprises an input hole and an output hole. The extended outer rim covers the bottom-groove surface forming a circular arc-shaped groove part, the two through holes are located in the circumference of the groove part corresponding to the two terminals. Therefore, test fluid can flow gently to the sensing area of the bio-chip to avoid turbulence due to corner effects, resulting in many bubbles. When the test is completed, the surface tension of the test fluid can be overcome, the test fluid is smoothly extracted to avoid testing liquids and bubbles remaining between the resilient cushioning block and the bio-chip surface.

Description

用於生物晶片測試之彈性緩衝座及其測試模組與測試設備Elastic buffer seat for biochip testing and its testing module and testing equipment

本發明係關於一種用於生物晶片測試之彈性緩衝座及其測試模組與測試設備，尤指一種適用於在測試液體環境下進行檢測之生物晶片測試之彈性緩衝座及其測試模組與測試設備。The present invention relates to an elastic buffer seat for biochip testing and its test module and testing equipment, in particular to an elastic buffer seat and its test module and test equipment suitable for testing biological chips in a test liquid environment equipment.

本發明所述之生物晶片係為一種搭載有生物感測器(Bio-Sensor)之晶片結構，該生物感測器係為使用固定化生物分子之結合換能器，用來偵測生體內或生體外的環境化學物質或與之起特異***互作用後產生回應的一種裝置。其中，生物感測器之應用層面相當廣泛，例如：可利用離子感測場效應之原理檢測尿素，或針對過敏原、酵素、微生物、細胞等進行生物檢測，又或者對於土壤、海洋酸鹼度等環境因子進行監測分析。The biochip described in the present invention is a chip structure equipped with a Bio-Sensor. The biosensor is a combined transducer using immobilized biomolecules to detect or A device that responds to environmental chemicals outside the body or interacts specifically with them. Among them, the application level of biological sensors is quite wide. For example, the principle of ion sensing field effect can be used to detect urea, or for biological detection of allergens, enzymes, microorganisms, cells, etc., or for environments such as soil and ocean pH. Factors are monitored and analyzed.

本發明則將生物感測器著重於─種利用離子選擇性場效電晶體(Ion Sensitive Field Effect Transistor, ISFET)之半導體離子感測器，其應用MOSFET的原理，將其閘極金屬去除，改為選用絕緣感測膜(SiO2)直接與測試液體接觸，並利用電極提供一參考電壓，以便測試模組可精準測量生物晶片的感測訊號。因此，生物感測器必須保持在與測試液體接觸的環境下進行測試方可達到效果，故對於測試液體裝載的方式於過去文獻中有多種設計方式，習知技術如美國專利公開號第US2014/0239986號專利案，其直接將探針卡(probe Card)內部設有擋水部(Fluid Well)，使得當生物感測器與探針卡接觸時，會形成密閉的通道，藉以將測試液體輸入至生物感測器之測試區內。The present invention focuses on the biological sensor-a semiconductor ion sensor using ion selective field effect transistors (Ion Sensitive Field Effect Transistor, ISFET), which uses the principle of MOSFET to remove the gate metal, and improve In order to select the insulating sensing film (SiO2) to directly contact the test liquid, and use the electrode to provide a reference voltage, so that the test module can accurately measure the sensing signal of the biological chip. Therefore, the biosensor must be kept in contact with the test liquid to perform the test to achieve the effect. Therefore, there are many design methods for the test liquid loading method in the past literature. The conventional technology such as US Patent Publication No. US2014/ Patent No. 0239986, which directly provided a fluid well inside the probe card, so that when the biosensor contacts the probe card, a closed channel is formed so that the test liquid can be input To the test area of the biological sensor.

請參閱圖1係習知用於生物晶片測試之彈性緩衝座，彈性緩衝座9包括有：一緩衝座本體91及一擴展外緣92，緩衝座本體91具有一凹槽部96及二貫孔94，該二貫孔94包括有一輸入孔及一輸出孔，作為測試液體輸入與輸出之用；擴展外緣92設置於該凹槽部96之周緣，緩衝座本體形成一周緣呈長方形97之凹槽部96，該二貫孔94則分別位於該凹槽部96之二側。Please refer to FIG. 1 for a conventional elastic buffer seat for biochip testing. The elastic buffer seat 9 includes: a buffer seat body 91 and an extended outer edge 92. The buffer seat body 91 has a groove portion 96 and two through holes 94. The two through holes 94 include an input hole and an output hole for testing liquid input and output; an expanded outer edge 92 is provided on the periphery of the groove portion 96, and the buffer seat body forms a recess with a rectangular periphery 97 The groove portion 96 and the two through holes 94 are respectively located on two sides of the groove portion 96.

前述彈性緩衝座9其凹槽部96之周緣係呈長方形97，於測試前輸入孔所輸入之測試液體容易因角落效應而引起紊流，進而產生許多氣泡，影響接續之測試結果，且於完成測試後，需將測試液體從輸出孔吸出，也容易因角落效應(Corner Effect)再加上測試液體表面張力的現象，無法完全抽取測試液體抽取，造成部分測試液體及氣泡殘留於彈性緩衝座9與生物晶片表面之間，進而污染接續之測試流程，故習用之彈性緩衝座9於使用上仍有很大的改進空間。The peripheral edge of the groove portion 96 of the aforementioned elastic buffer seat 9 is rectangular 97. The test liquid input into the input hole before the test is likely to cause turbulence due to the corner effect, and then generate many bubbles, which will affect the subsequent test results. After the test, the test liquid needs to be sucked out from the output hole. It is also easy to be unable to completely extract the test liquid due to the corner effect and the surface tension of the test liquid, causing part of the test liquid and bubbles to remain in the elastic buffer seat 9 Between the surface of the biochip and the surface of the biochip, the subsequent testing process is contaminated. Therefore, the conventional elastic buffer seat 9 still has a lot of room for improvement in use.

發明人緣因於此，本於積極發明創作之精神，亟思一種可以解決上述問題之「用於生物晶片測試之彈性緩衝座及其測試模組與測試設備」，幾經研究實驗終至完成本發明。This is the reason for the inventor. Based on the spirit of active invention and creation, he was eager to think of a "flexible buffer seat for biochip testing and its test module and test equipment" that can solve the above problems. After several research experiments, the invention was finally completed. .

本發明之主要目的係在提供一種用於生物晶片測試之彈性緩衝座，藉由特定幾何形狀之凹槽部結構，於測試前，測試液體可平緩流至生物晶片之感測區，避免因角落效應而引起紊流，進而產生許多氣泡，影響接續之測試結果。且當完成測試後，可以克服測試液體的表面張力，平順地抽取測試液體，避免測試液體及氣泡殘留於彈性緩衝座與生物晶片表面之間，進而污染接續之測試流程。The main purpose of the present invention is to provide an elastic buffer seat for biochip testing. With the groove structure of a specific geometry, the test liquid can flow smoothly to the sensing area of the biochip before testing, avoiding corners. The effect causes turbulence, and then generates many bubbles, which affect the subsequent test results. And when the test is completed, the surface tension of the test liquid can be overcome, and the test liquid can be drawn smoothly, avoiding the test liquid and air bubbles remaining between the elastic buffer seat and the surface of the biochip, thereby contaminating the subsequent test process.

為達成上述目的，本發明之用於生物晶片測試之彈性緩衝座包括有一緩衝座本體及一擴展外緣。其中，緩衝座本體具有一凹槽部及二貫孔，該二貫孔包括有一輸入孔及一輸出孔；擴展外緣設置於該緩衝座本體之周緣，且緩衝座本體凹設形成一周緣呈圓弧狀之該凹槽部，該二貫孔分別位於該凹槽部之周緣之相對應二端。To achieve the above objective, the elastic buffer seat for biochip testing of the present invention includes a buffer seat body and an expanded outer edge. Wherein, the buffer seat body has a groove portion and two through holes, the two through holes include an input hole and an output hole; the extended outer edge is arranged on the periphery of the buffer seat body, and the buffer seat body is recessed to form a peripheral edge The arc-shaped groove portion and the two through holes are respectively located at two corresponding ends of the periphery of the groove portion.

上述凹槽部可呈橢圓狀，該二貫孔可分別位於該凹槽部之短弧部。此外，上述凹槽部也可呈圓形狀，該二貫孔可相隔180度設置。藉此，二貫孔皆位於圓弧狀凹槽部之周緣，可順利地抽取測試液體，避免測試液體及氣泡殘留於彈性緩衝座與生物晶片表面之間。The groove portion may be elliptical, and the two through holes may be respectively located at the short arc portion of the groove portion. In addition, the above-mentioned groove portion may also be circular, and the two through holes may be arranged 180 degrees apart. Thereby, the two through holes are all located on the periphery of the arc-shaped groove portion, and the test liquid can be smoothly drawn, and the test liquid and bubbles are prevented from remaining between the elastic buffer seat and the surface of the biochip.

上述每一貫孔可穿設該凹槽部處並分別形成一凸緣，以形成延伸該輸出孔與該輸入孔之設計，方便抽取測試液體。Each of the above-mentioned through holes can pass through the groove portion and respectively form a flange to form a design extending the output hole and the input hole to facilitate the extraction of the test liquid.

上述緩衝座本體之該凹槽部具有一水平、斜向、弧狀凸部、弧狀凹部或其他等效形狀之底面，其皆可達成可順利地抽取測試液體之功效。The groove part of the buffer seat body has a horizontal, oblique, arc-shaped convex part, arc-shaped concave part or other equivalent shape bottom surface, which can achieve the effect of smoothly extracting test liquid.

上述彈性緩衝座可以聚二甲基矽氧烷(PDMS)或其他等效材質所製成之一體式結構，且緩衝座本體之凹槽部的側壁可具有一導圓角。The above-mentioned elastic buffer seat can be made of polydimethylsiloxane (PDMS) or other equivalent materials in a one-piece structure, and the side wall of the groove portion of the buffer seat body can have a rounded corner.

本發明之次要目的係在提供一種生物晶片之測試模組，主要可藉由具有彈性緩衝座之壓測頭，減緩壓測頭與生物晶片接觸時之壓合力道，同時可利用中空套管內之空間安置測試管路，有效減少該測試模組之體積，提供一合適的環境，讓生物晶片在與測試液體接觸下進行測試。此外，壓測頭之彈性緩衝座藉由特定幾何形狀之凹槽部結構，於測試前，測試液體可平緩流至生物晶片之感測區，避免因角落效應而引起紊流，進而產生許多氣泡，影響接續之測試結果。且當完成測試後，可以克服測試液體的表面張力，平順地抽取測試液體，避免測試液體及氣泡殘留於彈性緩衝座與生物晶片表面之間，進而污染接續之測試流程。The secondary purpose of the present invention is to provide a test module for biochips, which can reduce the pressure of the pressure probe when contacting the biochip by using a pressure probe with an elastic buffer seat, and at the same time can use a hollow sleeve The inner space is equipped with test pipes, which effectively reduces the volume of the test module and provides a suitable environment for biochips to be tested in contact with the test liquid. In addition, the elastic buffer seat of the pressure probe uses a groove structure with a specific geometric shape. Before testing, the test liquid can flow smoothly to the sensing area of the biochip, avoiding turbulence caused by corner effects, and thus many bubbles. , Affecting the test result of the connection. And when the test is completed, the surface tension of the test liquid can be overcome, and the test liquid can be drawn smoothly, avoiding the test liquid and air bubbles remaining between the elastic buffer seat and the surface of the biochip, thereby contaminating the subsequent test process.

為達成上述目的，本發明之生物晶片之測試模組包括有一固定座、一中空套管以及一壓測頭。固定座具有一通孔，並於固定座之底部固設一探針卡，對於晶片進行功能性測試；中空套管穿過通孔，穿設於固定座內，並於中空套管穿設有至少二管路，提供一垂直縱向之容置空間，其用以安置所述管路。壓測頭包括一壓測頭本體及一彈性緩衝座，壓測頭本體組設於中空套管上，彈性緩衝座卡合於壓測頭本體內，並連接至少二管路。彈性緩衝座包括有一緩衝座本體及一擴展外緣，該緩衝座本體具有一凹槽部及二貫孔，該二貫孔包括有一輸入孔及一輸出孔，該擴展外緣設置於該凹槽部之周緣，且緩衝座本體形成一圓弧狀之該凹槽部，該二貫孔分別位於該凹槽部之周緣之相對應二端。To achieve the above objective, the biochip test module of the present invention includes a fixing seat, a hollow sleeve and a pressure measuring head. The fixing seat has a through hole, and a probe card is fixed at the bottom of the fixing seat to perform functional testing on the chip; the hollow sleeve passes through the through hole and passes through the fixing seat, and the hollow sleeve has at least Two pipelines provide a vertical and longitudinal accommodating space for arranging the pipelines. The pressure probe includes a pressure probe body and an elastic buffer seat. The pressure probe body is assembled on the hollow sleeve, and the elastic buffer seat is clamped in the pressure probe body and connected with at least two pipelines. The elastic buffer seat includes a buffer seat body and an expanded outer edge. The buffer seat body has a groove portion and two through holes. The two through holes include an input hole and an output hole. The expanded outer edge is arranged in the groove And the buffer seat body forms an arc-shaped groove portion, and the two through holes are respectively located at two ends of the groove portion.

上述緩衝座本體可更具有一電極孔，該中空套管穿設有一電極，該電極穿設該電極孔。藉此，電極可提供參考電壓，以便測試模組可精準測量生物晶片的感測訊號。The buffer seat body may further have an electrode hole, the hollow sleeve is penetrated with an electrode, and the electrode penetrates the electrode hole. In this way, the electrode can provide a reference voltage so that the test module can accurately measure the sensing signal of the biochip.

本發明之另一次要目的係在提供一種生物晶片之測試設備，該測試設備於測試過程中，可準確地將壓測頭與生物晶片壓合接觸，使得晶片上之感測區域可完全包覆於彈性緩衝座內，並保持彈性緩衝座內測試液的流動性，在含有溶液的環境下進行檢測作業。此外，壓測頭之彈性緩衝座藉由特定幾何形狀之凹槽部結構，於測試前，測試液體可平緩流至生物晶片之感測區，避免因角落效應而引起紊流，進而產生許多氣泡，影響接續之測試結果。且當完成測試後，可以克服測試液體的表面張力，平順地抽取測試液體，避免測試液體及氣泡殘留於彈性緩衝座與生物晶片表面之間，進而污染接續之測試流程。Another secondary objective of the present invention is to provide a biochip testing equipment that can accurately press and contact the pressure probe with the biochip during the testing process so that the sensing area on the chip can be completely covered In the elastic buffer seat, and maintain the fluidity of the test liquid in the elastic buffer seat, and perform the detection operation in the environment containing the solution. In addition, the elastic buffer seat of the pressure probe uses a groove structure with a specific geometric shape. Before testing, the test liquid can flow smoothly to the sensing area of the biochip, avoiding turbulence caused by corner effects, and thus many bubbles. , Affecting the test result of the connection. And when the test is completed, the surface tension of the test liquid can be overcome, and the test liquid can be drawn smoothly, avoiding the test liquid and air bubbles remaining between the elastic buffer seat and the surface of the biochip, thereby contaminating the subsequent test process.

為達成上述目的，本發明之生物晶片之測試設備包括有：一針測機、一生物晶片之測試模組以及一測試頭。針測機具有一移動載臺，用以承載一生物晶片。生物晶片之測試模組置放於該移動載臺上，包括一固定座、一中空套管以及一壓測頭，固定座具有一通孔，並於固定座之底部固設一探針卡；中空套管穿過通孔，穿設於固定座內，其中，中空套管穿設有至少一管路；壓測頭包括一壓測頭本體及一彈性緩衝座，壓測頭本體組設於中空套管上，彈性緩衝座卡合於壓測頭本體內，並連接至少一管路。此外，測試頭電連接探針卡，其中測試頭設有多個測試電路板。其中，彈性緩衝座包括有一緩衝座本體及一擴展外緣，該緩衝座本體具有一凹槽部及二貫孔，該二貫孔包括有一輸入孔及一輸出孔，該擴展外緣設置於該凹槽部之周緣，且緩衝座本體形成一圓弧狀之該凹槽部，該二貫孔分別位於該凹槽部之周緣之相對應二端。In order to achieve the above objective, the biochip testing equipment of the present invention includes: a prober, a biochip testing module, and a test head. The needle tester has a movable stage for carrying a biological chip. The test module of the biochip is placed on the mobile stage and includes a fixing base, a hollow sleeve and a pressure probe. The fixing base has a through hole, and a probe card is fixed at the bottom of the fixing base; hollow The sleeve passes through the through hole and is inserted in the fixing seat, wherein the hollow sleeve is penetrated with at least one pipeline; the pressure probe includes a pressure probe body and an elastic buffer seat, and the pressure probe body is arranged in the hollow On the sleeve, the elastic buffer seat is clamped in the pressure probe body and connected with at least one pipeline. In addition, the test head is electrically connected to the probe card, and the test head is provided with a plurality of test circuit boards. The elastic buffer seat includes a buffer seat body and an expanded outer edge. The buffer seat body has a groove portion and two through holes. The two through holes include an input hole and an output hole. The expanded outer edge is disposed on the The periphery of the groove portion and the buffer seat body form an arc-shaped groove portion, and the two through holes are respectively located at two corresponding ends of the periphery of the groove portion.

以上概述與接下來的詳細說明皆為示範性質是為了進一步說明本發明的申請專利範圍。而有關本發明的其他目的與優點，將在後續的說明與圖示加以闡述。The above summary and the following detailed description are all exemplary in order to further illustrate the patent application scope of the present invention. Other objects and advantages of the present invention will be described in the following description and drawings.

請參閱圖2、圖3及圖4，其分別為本發明第一較佳實施例之用於生物晶片測試之彈性緩衝座立體圖及圖2之二不同剖面之剖視圖。本實施例之用於生物晶片測試之彈性緩衝座7包括有：一緩衝座本體71及一擴展外緣72，緩衝座本體71具有一底面73及二貫孔74，該二貫孔74包括有一輸入孔及一輸出孔，作為測試液體輸入與輸出之用；擴展外緣72覆蓋於該底面73形成一周緣呈圓弧狀之凹槽部76，該二貫孔74則分別位於該凹槽部76之周緣之相對應二端。Please refer to FIG. 2, FIG. 3 and FIG. 4, which are respectively a three-dimensional view of the elastic buffer seat for biochip testing according to the first preferred embodiment of the present invention and a cross-sectional view of the two different cross-sections of FIG. 2. The elastic buffer seat 7 used for biochip testing in this embodiment includes: a buffer seat body 71 and an expanded outer edge 72. The buffer seat body 71 has a bottom surface 73 and two through holes 74. The two through holes 74 include a An input hole and an output hole are used for the input and output of the test liquid; the expanded outer edge 72 covers the bottom surface 73 to form an arc-shaped groove portion 76, and the two through holes 74 are respectively located in the groove portion The corresponding two ends of the periphery of 76.

在本實施例中，該凹槽部76係呈橢圓狀，即由二長弧部77及二短弧部78所組成之橢圓狀，該二貫孔74分別位於該凹槽部76之二短弧部78之周緣。另，如圖4所示，該緩衝座本體71之該底面73係呈水平狀。在本實施例中，彈性緩衝座7係以聚二甲基矽氧烷(PDMS)所製成之一體式結構，凹槽部76與底面73之間的側壁，可形成有一導圓角R(0.5mm ｘ 45)，致使測試液體在導圓角R處可平緩被引導至生物晶片之感測區，避免因角落效應而引起紊流。In this embodiment, the groove portion 76 is elliptical, that is, an elliptical shape composed of two long arc portions 77 and two short arc portions 78. The two through holes 74 are respectively located in the two short portions of the groove portion 76. The circumference of the arc 78. In addition, as shown in FIG. 4, the bottom surface 73 of the buffer seat body 71 is horizontal. In this embodiment, the elastic buffer seat 7 is made of polydimethylsiloxane (PDMS) in a one-piece structure, and the side wall between the groove portion 76 and the bottom surface 73 can be formed with a rounded corner R( 0.5mm x 45), so that the test liquid can be gently guided to the sensing area of the biochip at the corner R, avoiding turbulence caused by corner effects.

藉此，本實施例之彈性緩衝座7可藉由橢圓狀之凹槽部76結構，於生物晶片測試前，測試液體可平緩流至生物晶片之感測區，避免因角落效應而引起紊流，進而產生許多氣泡，影響接續之測試結果。且當完成測試後，可以克服測試液體的表面張力，平順地抽取測試液體，避免測試液體及氣泡殘留於彈性緩衝座7與生物晶片表面之間，進而污染接續之測試流程。Thereby, the elastic buffer seat 7 of this embodiment can be structured with the elliptical groove portion 76, and the test liquid can flow smoothly to the sensing area of the biochip before the biochip test, avoiding turbulence caused by corner effects , And then generate a lot of bubbles, affecting the test results of the connection. And when the test is completed, the surface tension of the test liquid can be overcome, and the test liquid can be drawn smoothly, preventing the test liquid and bubbles from remaining between the elastic buffer seat 7 and the surface of the biochip, thereby contaminating the subsequent test process.

當用於生物晶片測試時，本實施例之彈性緩衝座7之凹槽部76係作為液體容置槽之用途，所述凹槽部76係為深度1mm~3mm之小型凹槽，其開口需包覆生物晶片上之感測區域，藉以創造出一可儲存測試液體之檢測環境。此外，本實施例之擴展外緣72係為在彈性緩衝座7底部於外壁之外，向四周所擴展之延伸外緣，該擴展外緣72加長了測試液體向外流出之滲漏距離，可避免當彈性緩衝座7受力變形時，測試液體會一併擠壓滲漏到外界之電路板或電極上之問題。When used for biochip testing, the groove portion 76 of the elastic buffer seat 7 of this embodiment is used as a liquid containing groove. The groove portion 76 is a small groove with a depth of 1 mm to 3 mm, and the opening needs to be The sensing area on the biochip is covered to create a test environment where the test liquid can be stored. In addition, the expanded outer edge 72 of this embodiment is an expanded outer edge that expands to the surroundings at the bottom of the elastic buffer seat 7 outside the outer wall. The expanded outer edge 72 lengthens the leakage distance of the test liquid outflow, which can be Avoid the problem that when the elastic buffer seat 7 is deformed by force, the test liquid will be squeezed and leaked to the external circuit board or electrode.

再者，本實施例之彈性緩衝座7所使用之材質係選用聚二甲基矽氧烷(PDMS)等具有彈性之材料經由翻模後所製成。其中，二甲基矽氧烷(PDMS)係為一透明矽膠材質，其具有無毒、疏水性高、抗酸鹼、結構彈性佳且氣密性佳等特性，製成簡便且快速，翻模精度可達um~um-1，在本實施例中係用以作為緩衝及擋水結構。此外，彈性緩衝座7因製作容易且成本材料低廉，故在生物晶片測試壓合過程中若受到損壞或變形時，可進行更換，藉由可更換式之耗材設計模式，提高本實施例之耐用性。Furthermore, the material used for the elastic cushion seat 7 of the present embodiment is made of polydimethylsiloxane (PDMS) and other materials with elasticity after being turned over. Among them, dimethylsiloxane (PDMS) is a transparent silicone material, which has the characteristics of non-toxic, high hydrophobicity, acid and alkali resistance, good structural elasticity and good air tightness. It is easy and fast to manufacture, and it is easy to make and accurate. It can reach um~um-1, and is used as a buffer and water-retaining structure in this embodiment. In addition, the elastic buffer seat 7 is easy to manufacture and low in cost materials, so it can be replaced if it is damaged or deformed during the biochip testing and bonding process. The replaceable consumable design mode improves the durability of this embodiment. Sex.

請參閱圖5係本發明第二較佳實施例之用於生物晶片測試之彈性緩衝座立體圖，第二實施例之用於生物晶片測試之彈性緩衝座70與第一實施例之結構大致相同，其差異僅在於第二實施例之緩衝座本體71具有斜向之底面731，其中斜向之底面731延伸至輸出孔能充分讓凹槽部76內的測試液體順利引導至輸出孔排出，使其凹槽部76不產生氣泡現象。Please refer to FIG. 5 which is a perspective view of the elastic buffer seat for biochip testing in the second preferred embodiment of the present invention. The structure of the elastic buffer seat 70 for biochip testing in the second embodiment is substantially the same as that of the first embodiment. The only difference is that the buffer seat body 71 of the second embodiment has an oblique bottom surface 731, wherein the oblique bottom surface 731 extends to the output hole to sufficiently allow the test liquid in the groove portion 76 to be smoothly guided to the output hole for discharge. The recessed portion 76 does not generate air bubbles.

藉此，本實施例之彈性緩衝座7可藉由橢圓狀之凹槽部76結構，搭配斜向之底面731，於生物晶片測試前，測試液體可平緩流至生物晶片之感測區，避免因角落效應而引起紊流，進而產生許多氣泡，影響接續之測試結果。且當完成測試後，可以克服測試液體的表面張力，平順地抽取測試液體，避免測試液體及氣泡殘留於彈性緩衝座7與生物晶片表面之間，進而污染接續之測試流程。Thereby, the elastic buffer seat 7 of the present embodiment can use the elliptical groove portion 76 structure with the oblique bottom surface 731. Before the biochip test, the test liquid can flow smoothly to the sensing area of the biochip. Turbulent flow is caused by the corner effect, and many bubbles are generated, which affects the subsequent test results. And when the test is completed, the surface tension of the test liquid can be overcome, and the test liquid can be drawn smoothly, preventing the test liquid and bubbles from remaining between the elastic buffer seat 7 and the surface of the biochip, thereby contaminating the subsequent test process.

請參閱圖6係本發明第三較佳實施例之用於生物晶片測試之彈性緩衝座立體圖，第三實施例之用於生物晶片測試之彈性緩衝座70與第一實施例之結構大致相同，其差異僅在於第三實施例之彈性緩衝座70多了二凸緣705，亦即彈性緩衝座70包括有：一緩衝座本體701及一擴展外緣702，緩衝座本體701具有一凹槽部706及二貫孔704，該二貫孔704包括有一輸入孔及一輸出孔，作為測試液體輸入與輸出之用；擴展外緣702設置於該緩衝座本體701之周緣，且緩衝座本體701形成一橢圓狀之凹槽部706，該二貫孔704則分別位於該橢圓狀之凹槽部706之周緣之相對應二端。此外，每一貫孔704穿設該凹槽部706處並分別形成一凸緣705，以形成延伸該輸出孔與該輸入孔之設計，方便抽取測試液體。Please refer to FIG. 6 which is a three-dimensional view of the elastic buffer seat for biochip testing in the third preferred embodiment of the present invention. The structure of the elastic buffer seat 70 for biochip testing in the third embodiment is substantially the same as that of the first embodiment. The only difference is that the elastic buffer seat 70 of the third embodiment has two more flanges 705, that is, the elastic buffer seat 70 includes: a buffer seat body 701 and an expanded outer edge 702. The buffer seat body 701 has a groove portion 706 and two through holes 704. The two through holes 704 include an input hole and an output hole for testing liquid input and output; an extended outer edge 702 is provided on the periphery of the buffer seat body 701, and the buffer seat body 701 is formed An elliptical groove portion 706, and the two through holes 704 are respectively located at two corresponding ends of the periphery of the elliptical groove portion 706. In addition, each through hole 704 penetrates through the groove portion 706 and forms a flange 705 respectively to form a design extending the output hole and the input hole to facilitate the extraction of test liquid.

藉此，第三實施例也如同第一實施例一樣，可藉由橢圓狀之凹槽部706結構，於生物晶片測試前，測試液體可平緩流至生物晶片之感測區，避免因角落效應而引起紊流，進而產生許多氣泡，影響接續之測試結果。且當完成測試後，可以克服測試液體的表面張力，平順地抽取測試液體，避免測試液體及氣泡殘留於彈性緩衝座70與生物晶片表面之間，進而污染接續之測試流程。Therefore, the third embodiment is the same as the first embodiment. The elliptical groove portion 706 can be used to smoothly flow the test liquid to the sensing area of the biochip before the biochip is tested to avoid corner effects. This will cause turbulence and generate many bubbles, which will affect the subsequent test results. And when the test is completed, the surface tension of the test liquid can be overcome, and the test liquid can be drawn smoothly, avoiding the test liquid and air bubbles remaining between the elastic buffer seat 70 and the surface of the biochip, thereby contaminating the subsequent test process.

請參閱圖7係本發明第四較佳實施例之用於生物晶片測試之彈性緩衝座立體圖，第四實施例之用於生物晶片測試之彈性緩衝座8與第一實施例之結構大致相同，其差異僅在於第四實施例之彈性緩衝座8之凹槽部86係呈圓形87而非第一實施例之橢圓形，亦即彈性緩衝座8包括有：一緩衝座本體81及一擴展外緣82，緩衝座本體81具有一凹槽部86及二貫孔84，該二貫孔84包括有一輸入孔及一輸出孔，作為測試液體輸入與輸出之用；擴展外緣82覆蓋於該緩衝座本體81之周緣，緩衝座本體81凹設形成一周緣呈圓形87之凹槽部86，該二貫孔84則分別位於該凹槽部86之周緣，且相隔180度。Please refer to FIG. 7 which is a perspective view of the elastic buffer seat for biochip testing of the fourth preferred embodiment of the present invention. The structure of the elastic buffer seat 8 for biochip testing of the fourth embodiment is substantially the same as that of the first embodiment. The only difference is that the groove portion 86 of the elastic buffer seat 8 of the fourth embodiment is circular 87 instead of the oval shape of the first embodiment, that is, the elastic buffer seat 8 includes: a buffer seat body 81 and an extension The outer edge 82, the buffer seat body 81 has a groove portion 86 and two through holes 84. The two through holes 84 include an input hole and an output hole for the input and output of the test liquid; the extended outer edge 82 covers the On the periphery of the buffer seat body 81, the buffer seat body 81 is recessed to form a groove portion 86 with a circular circumference 87. The two through holes 84 are respectively located on the periphery of the groove portion 86 and are separated by 180 degrees.

藉此，第四實施例也如同第一實施例一樣，可藉由圓形之凹槽部86結構，於生物晶片測試前，測試液體可平緩流至生物晶片之感測區，避免因角落效應而引起紊流，進而產生許多氣泡，影響接續之測試結果。且當完成測試後，可以克服測試液體的表面張力，平順地抽取測試液體，避免測試液體及氣泡殘留於彈性緩衝座8與生物晶片表面之間，進而污染接續之測試流程。Therefore, the fourth embodiment is also the same as the first embodiment. With the circular groove 86 structure, the test liquid can flow smoothly to the sensing area of the biochip before the biochip test, avoiding corner effects. This will cause turbulence and generate many bubbles, which will affect the subsequent test results. And when the test is completed, the surface tension of the test liquid can be overcome, and the test liquid can be drawn smoothly, avoiding the test liquid and air bubbles remaining between the elastic buffer seat 8 and the surface of the biochip, thereby contaminating the subsequent test process.

請參閱圖8係本發明第五較佳實施例之用於生物晶片測試之彈性緩衝座立體圖，第五實施例之用於生物晶片測試之彈性緩衝座6與第一實施例之結構大致相同，其差異僅在於第五實施例之彈性緩衝座6之凹槽部66之底面661具有一弧狀凸部6611，而非第一實施例之緩衝座本體71之該凹槽部76之底面73與頂面皆呈水平狀。亦即，第六實施例之彈性緩衝座6包括有：一緩衝座本體61及一擴展外緣62，緩衝座本體61具有一凹槽部66及二貫孔64，該二貫孔64包括有一輸入孔及一輸出孔，頂面663呈水平狀，且弧狀凸部6611設置於該凹槽部66之底面661，而弧狀凸部6611鄰近於該二貫孔64之輸出孔。於作生物晶片測試時分別形成液體輸入管68與液體輸出管69，作為測試液體輸入與輸出之用；擴展外緣62設置於該凹槽部66之周緣662，且緩衝座本體61形成一呈外凸圓弧狀之凹槽部66，該二貫孔64則分別位於該凹槽部66之周緣662之相對應二端。Please refer to FIG. 8 which is a perspective view of the elastic buffer seat for biochip testing of the fifth preferred embodiment of the present invention. The structure of the elastic buffer seat 6 for biochip testing of the fifth embodiment is substantially the same as that of the first embodiment. The only difference is that the bottom surface 661 of the groove portion 66 of the elastic buffer seat 6 of the fifth embodiment has an arc-shaped convex portion 6611, instead of the bottom surface 73 and the bottom surface of the groove portion 76 of the buffer seat body 71 of the first embodiment. The top surface is horizontal. That is, the elastic buffer seat 6 of the sixth embodiment includes: a buffer seat body 61 and an expanded outer edge 62. The buffer seat body 61 has a groove portion 66 and two through holes 64, and the two through holes 64 include a The top surface 663 of the input hole and the output hole is horizontal, and the arc-shaped convex portion 6611 is disposed on the bottom surface 661 of the groove portion 66, and the arc-shaped convex portion 6611 is adjacent to the output hole of the two through holes 64. The liquid input pipe 68 and the liquid output pipe 69 are formed respectively for testing liquid input and output during biochip testing; the extended outer edge 62 is provided on the periphery 662 of the groove portion 66, and the buffer seat body 61 forms a shape The groove portion 66 has a convex arc shape, and the two through holes 64 are respectively located at two corresponding ends of the periphery 662 of the groove portion 66.

藉此，第五實施例也如同第一實施例一樣，可藉由橢圓狀之凹槽部66結構，於生物晶片測試前，測試液體可平緩流至生物晶片之感測區，避免因角落效應而引起紊流，進而產生許多氣泡，影響接續之測試結果。且當完成測試後，可以克服測試液體的表面張力，平順地抽取測試液體，避免測試液體及氣泡殘留於彈性緩衝座6與生物晶片表面之間，進而污染接續之測試流程。In this way, the fifth embodiment is the same as the first embodiment. The elliptical groove 66 structure allows the test liquid to flow smoothly to the sensing area of the biochip before testing the biochip, avoiding corner effects. This will cause turbulence and generate many bubbles, which will affect the subsequent test results. And when the test is completed, the surface tension of the test liquid can be overcome, and the test liquid can be drawn smoothly, avoiding the test liquid and bubbles remaining between the elastic buffer seat 6 and the surface of the biochip, thereby contaminating the subsequent test process.

請參閱圖9係本發明第六較佳實施例之用於生物晶片測試之彈性緩衝座立體圖，第六實施例之用於生物晶片測試之彈性緩衝座60與第五實施例之結構大致相同，其差異僅在於第六實施例之彈性緩衝座60之凹槽部606的底面6061具有一弧狀凹部60611，而第五實施例之彈性緩衝座6之凹槽部66的底面661之一側具有一弧狀凸部6611。亦即，第六實施例之彈性緩衝座60包括有：一緩衝座本體601及一擴展外緣602，緩衝座本體601具有一凹槽部606及二貫孔604，該二貫孔604包括有一輸入孔及一輸出孔，頂面6063呈水平狀，且弧狀凹部60611設置於該凹槽部606之底面661，且弧狀凹部60611鄰近於該二貫孔604之輸出孔。Please refer to FIG. 9 which is a perspective view of the elastic buffer seat for biochip testing of the sixth preferred embodiment of the present invention. The structure of the elastic buffer seat 60 for biochip testing of the sixth embodiment is substantially the same as that of the fifth embodiment. The only difference is that the bottom surface 6061 of the groove portion 606 of the elastic buffer seat 60 of the sixth embodiment has an arc-shaped recess 60611, while the elastic buffer seat 6 of the fifth embodiment has one side of the bottom surface 661 of the groove portion 66 An arc-shaped protrusion 6611. That is, the elastic buffer seat 60 of the sixth embodiment includes: a buffer seat body 601 and an expanded outer edge 602. The buffer seat body 601 has a groove portion 606 and two through holes 604. The two through holes 604 include a For the input hole and one output hole, the top surface 6063 is horizontal, and the arc-shaped concave portion 60611 is disposed on the bottom surface 661 of the groove portion 606, and the arc-shaped concave portion 60611 is adjacent to the output hole of the two through holes 604.

於作生物晶片測試時分別形成液體輸入管608與液體輸出管609，作為測試液體輸入與輸出之用；擴展外緣602設置於於該緩衝座本體601之周緣6062，且緩衝座本體601形成一呈內凹圓弧狀之凹槽部606，該二貫孔604則分別位於該凹槽部606之周緣6062之相對應二端。A liquid input tube 608 and a liquid output tube 609 are respectively formed when testing biochips for testing liquid input and output; the extended outer edge 602 is provided on the periphery 6062 of the buffer base body 601, and the buffer base body 601 forms a The groove portion 606 is in the shape of a concave arc, and the two through holes 604 are respectively located at two corresponding ends of the periphery 6062 of the groove portion 606.

藉此，第六實施例也如同第一實施例一樣，可藉由橢圓狀之凹槽部606結構，於生物晶片測試前，測試液體可平緩流至生物晶片之感測區，避免因角落效應而引起紊流，進而產生許多氣泡，影響接續之測試結果。且當完成測試後，可以克服測試液體的表面張力，平順地抽取測試液體，避免測試液體及氣泡殘留於彈性緩衝座60與生物晶片表面之間，進而污染接續之測試流程。Therefore, the sixth embodiment is also the same as the first embodiment. The elliptical groove 606 structure allows the test liquid to flow smoothly to the sensing area of the biochip before testing the biochip, avoiding corner effects. This will cause turbulence and generate many bubbles, which will affect the subsequent test results. And when the test is completed, the surface tension of the test liquid can be overcome, and the test liquid can be drawn smoothly, so as to prevent the test liquid and bubbles from remaining between the elastic buffer seat 60 and the surface of the biochip, thereby contaminating the subsequent test process.

請參閱圖10至圖12，其分別為本發明一較佳實施例之生物晶片之測試模組之分解圖、立體剖視圖以及另一視角之立體圖。圖中出示一種生物晶片之測試模組1，包括有一固定座2、一中空套管3以及一壓測頭4。其中，固定座2包括一固定座本體22、一鎖固於該固定座本體22之止擋座23以及一通孔21，並於固定座2之底部固設一探針卡20，藉以對於生物晶片進行功能性測試。Please refer to FIGS. 10 to 12, which are respectively an exploded view, a perspective cross-sectional view, and a perspective view of a biochip test module according to a preferred embodiment of the present invention. The figure shows a biochip test module 1 which includes a fixing base 2, a hollow sleeve 3, and a pressure measuring head 4. Wherein, the fixing base 2 includes a fixing base body 22, a stopper 23 locked to the fixing base body 22, and a through hole 21, and a probe card 20 is fixed at the bottom of the fixing base 2, so that the biochip Perform functional testing.

在本實施例中，中空套管3穿過通孔21及止擋座23，並具有一止擋部31，該止擋部31受限於固定座2與止擋座23之一止擋內緣231間之容置空間內，並在其間夾設二彈簧30，藉以提供一種緩衝機制，可有效防止生物晶片於上下移載時，因過壓而造成該生物晶片受到損傷。In this embodiment, the hollow sleeve 3 passes through the through hole 21 and the stop seat 23, and has a stop part 31, which is limited within one of the fixing seat 2 and the stop seat 23. In the accommodating space between the edges 231, two springs 30 are sandwiched therebetween to provide a buffer mechanism, which can effectively prevent the biochip from being damaged due to overpressure when it is moved up and down.

此外，壓測頭4包括有一壓測頭本體41及一彈性緩衝座42，壓測頭本體41組設於中空套管3上，而彈性緩衝座42卡合於壓測頭本體41內，並連接一液體輸入管51、一液體輸出管52以及一電極53，藉以對生物感測器進行進行檢測作業。藉由上述設計，為了建構出一合適的環境，讓生物晶片在與測試液接觸下進行測試，故透過具有彈性緩衝座42之壓測頭4，有效減緩與生物晶片接觸時之壓合力道，同時該彈性緩衝座42係為可拆卸式之套件，可連同與其相連之液體輸入管51、液體輸出管52及電極53一併拆裝及清洗，增進可更換性及便利性。In addition, the pressure probe 4 includes a pressure probe body 41 and an elastic buffer seat 42. The pressure probe body 41 is assembled on the hollow sleeve 3, and the elastic buffer seat 42 is clamped in the pressure probe body 41, and A liquid input tube 51, a liquid output tube 52 and an electrode 53 are connected to perform detection operations on the biosensor. With the above design, in order to construct a suitable environment for the biochip to be tested in contact with the test liquid, the pressure measuring head 4 with the elastic buffer seat 42 effectively reduces the pressing force when contacting the biochip. At the same time, the elastic buffer seat 42 is a detachable kit, which can be disassembled and cleaned together with the liquid input tube 51, the liquid output tube 52 and the electrode 53 connected to it, which improves the replaceability and convenience.

請一併參閱圖2與圖3，圖12所示之生物晶片之測試模組，其彈性緩衝座42係如同前述第一實施例之用於生物晶片測試之彈性緩衝座7，其差異僅在於本實施例之彈性緩衝座42之緩衝座本體多設一電極孔以供電極53穿設，亦即，彈性緩衝座42也是由一緩衝座本體及一擴展外緣421所組成，該緩衝座本體具有一凹槽部422及三貫孔，該三貫孔包括有一輸入孔、一輸出孔及一電極孔，該擴展外緣421設置於該緩衝座本體(即如圖3所示之緩衝座本體71)之周緣，且緩衝座本體(如圖3所示之緩衝座本體71)凹設形成一周緣呈圓弧狀之凹槽部422(即如圖3所示之凹槽部76)，該輸入孔與輸出孔分別位於該凹槽部422之周緣之相對應二端，電極孔位於該凹槽部422之中間。其中，凹槽部422係為深度1mm~3mm之小型凹槽，其開口需包覆生物晶片上之感測區域，藉以創造出一可儲存測試液之檢測環境，並利用電極53提供一參考電壓，以利測試模組可精準測量生物晶片的感測訊號。此外，本實施例之擴展外緣421係為在彈性緩衝座42底部於外壁之外，向四周所擴展之延伸外緣，該擴展外緣421加長了測試液向外流出之滲漏距離，可避免當彈性緩衝座42受力變形時，測試液會一併擠壓到外界之電路板或電極上之問題。Please refer to FIGS. 2 and 3 together. The elastic buffer seat 42 of the biochip test module shown in FIG. 12 is the same as the elastic buffer seat 7 used for biochip testing in the first embodiment. The only difference is The buffer seat body of the elastic buffer seat 42 of this embodiment is provided with an electrode hole for the electrode 53 to pass through. That is, the elastic buffer seat 42 is also composed of a buffer seat body and an extended outer edge 421. The buffer seat body It has a groove portion 422 and three through holes. The three through holes include an input hole, an output hole and an electrode hole. The extended outer edge 421 is disposed on the buffer seat body (ie, the buffer seat body as shown in FIG. 3). 71), and the buffer seat body (the buffer seat body 71 shown in FIG. 3) is recessed to form a groove portion 422 (that is, the groove portion 76 shown in FIG. 3) with an arc-shaped periphery. The input hole and the output hole are respectively located at two ends of the periphery of the groove portion 422, and the electrode hole is located in the middle of the groove portion 422. Among them, the groove portion 422 is a small groove with a depth of 1mm~3mm, and its opening needs to cover the sensing area on the biochip, so as to create a test environment that can store the test liquid, and the electrode 53 provides a reference voltage , So that the test module can accurately measure the sensing signal of the biochip. In addition, the expanded outer edge 421 of this embodiment is an expanded outer edge that expands to the surroundings at the bottom of the elastic buffer seat 42 outside the outer wall. The expanded outer edge 421 lengthens the leakage distance of the test liquid flowing out. Avoid the problem that when the elastic buffer seat 42 is deformed by force, the test liquid will be squeezed onto the external circuit board or electrode.

再者，所述彈性緩衝座42所使用之材質有別於上述其他主結構體，係選用聚二甲基矽氧烷(PDMS)等具有彈性之材料經由翻模後所製成。此外，彈性緩衝座42因製作容易且成本材料低廉，故在壓合過程中受到損壞或變形時，可連同與其相連之液體輸入管51、液體輸出管52及電極53可進行更換，藉由可更換式之耗材設計模式，提高本發明生物晶片之測試模組之耐用性。Furthermore, the material used for the elastic buffer seat 42 is different from the other main structures mentioned above, and it is made of polydimethylsiloxane (PDMS) and other materials with elasticity after overmolding. In addition, because the elastic buffer seat 42 is easy to manufacture and has low cost materials, when it is damaged or deformed during the pressing process, it can be replaced with the liquid input tube 51, the liquid output tube 52 and the electrode 53 connected to it. The replaceable consumable design mode improves the durability of the biochip test module of the present invention.

此外，本實施例之彈性緩衝座42係如同前述第一實施例之用於生物晶片測試之彈性緩衝座7，可藉由橢圓狀之凹槽部422結構，於生物晶片測試前，測試液體可平緩流至生物晶片之感測區，避免因角落效應而引起紊流，進而產生許多氣泡，影響接續之測試結果。且當完成測試後，可以克服測試液體的表面張力，平順地抽取測試液體，避免測試液體及氣泡殘留於彈性緩衝座42與生物晶片表面之間，進而污染接續之測試流程。In addition, the elastic buffer seat 42 of this embodiment is the same as the elastic buffer seat 7 used for biochip testing in the first embodiment. The elliptical groove portion 422 can be used to test the liquid before the biochip test. It flows smoothly to the sensing area of the biochip to avoid turbulence caused by corner effects, which will generate many bubbles and affect the subsequent test results. And when the test is completed, the surface tension of the test liquid can be overcome, and the test liquid can be drawn smoothly, avoiding the test liquid and bubbles remaining between the elastic buffer seat 42 and the surface of the biochip, thereby contaminating the subsequent test process.

請參閱圖13及圖14，其別為本發明一較佳實施例之生物晶片之測試設備之立體圖及剖視圖，並請一併參閱圖10-12。圖13中出示一種生物晶片之測試設備10，包括有一測試頭(Test Head)11、一生物晶片之測試模組1以及一針測機(Prober)13。該生物晶片之測試設備10係將前述之測試模組1結合測試頭11及針測機13所組立而成之機台設備。故關於生物晶片之測試模組1之特徵描述如前段所述，在此便不再贅述。Please refer to FIGS. 13 and 14, which are a perspective view and a cross-sectional view of a biochip testing equipment according to a preferred embodiment of the present invention. Please also refer to FIGS. 10-12. FIG. 13 shows a biochip test equipment 10, which includes a test head 11, a biochip test module 1 and a prober 13. The test equipment 10 of the biochip is a machine equipment formed by combining the aforementioned test module 1 with the test head 11 and the probe tester 13. Therefore, the feature description of the biochip test module 1 is as described in the previous paragraph, and will not be repeated here.

在本實施例中，生物晶片之測試模組1係組設於針測機13上，而該針測機13結合位於測試模組1上之探針卡20，藉此針測機13內的移動載臺131所置放的生物晶片12，可透過移動載臺131調整生物晶片12之測試位置，將生物晶片12對位於針測機13上的測試模組1與探針卡20，進行測試液與電性測試，且訊號線15連接探針卡20與測試頭11之測試電路板14，可針對測試訊號提供即時的傳遞及運算，以達到全自動化測試生物晶片12的目的，有效提高測試效率。In this embodiment, the test module 1 of the biochip is assembled on the probe tester 13, and the probe tester 13 is combined with the probe card 20 located on the test module 1, thereby The biochip 12 placed on the mobile stage 131 can be used to adjust the test position of the biochip 12 through the movable stage 131, and the biochip 12 can be tested against the test module 1 and the probe card 20 on the probe tester 13 Liquid and electrical testing, and the signal line 15 is connected to the probe card 20 and the test circuit board 14 of the test head 11, which can provide real-time transmission and calculation of the test signal to achieve the purpose of fully automated testing of the biological chip 12, effectively improving the test effectiveness.

圖13所示之生物晶片之測試設備，其彈性緩衝座42由一緩衝座本體及一擴展外緣421所組成，該緩衝座本體具有一凹槽部422及三貫孔，該三貫孔包括有一輸入孔、一輸出孔及一電極孔，該擴展外緣421設置於該緩衝座本體之周緣，且緩衝座本體凹設形成一周緣呈圓弧狀之凹槽部422，該輸入孔與輸出孔分別位於該凹槽部422之周緣之相對應二端，電極孔位於該凹槽部422之中間。其中，凹槽部422係為深度1mm~3mm之小型凹槽，其開口需包覆生物晶片上之感測區域，藉以創造出一可儲存測試液之檢測環境，並利用電極53提供一參考電壓，以利測試模組可精準測量生物晶片的感測訊號。此外，本實施例之擴展外緣421係為在彈性緩衝座42底部於外壁之外，向四周所擴展之延伸外緣，該擴展外緣421加長了測試液向外流出之滲漏距離，可避免當彈性緩衝座42受力變形時，測試液會一併擠壓到外界之電路板或電極上之問題。As shown in FIG. 13, the elastic buffer seat 42 is composed of a buffer seat body and an expanded outer edge 421. The buffer seat body has a groove portion 422 and three through holes. The three through holes include There is an input hole, an output hole, and an electrode hole. The expanded outer edge 421 is disposed on the periphery of the buffer seat body, and the buffer seat body is recessed to form a circular arc-shaped groove portion 422. The input hole and the output hole The holes are respectively located at two ends of the periphery of the groove portion 422, and the electrode hole is located in the middle of the groove portion 422. Among them, the groove portion 422 is a small groove with a depth of 1mm~3mm, and its opening needs to cover the sensing area on the biochip, so as to create a test environment that can store the test liquid, and the electrode 53 provides a reference voltage , So that the test module can accurately measure the sensing signal of the biochip. In addition, the expanded outer edge 421 of this embodiment is an expanded outer edge that expands to the surroundings at the bottom of the elastic buffer seat 42 outside the outer wall. The expanded outer edge 421 lengthens the leakage distance of the test liquid flowing out. Avoid the problem that when the elastic buffer seat 42 is deformed by force, the test liquid will be squeezed onto the external circuit board or electrode.

藉由上述設計，本發明之生物晶片之測試設備於測試過程中，可準確地將壓測頭4與生物晶片12壓合接觸，使得生物晶片12上之感測區域可完全包覆於彈性緩衝座42內，並保持彈性緩衝座42內測試液的流動性，在含有溶液的環境下進行檢測作業。With the above design, the biochip testing equipment of the present invention can accurately press and contact the pressure probe 4 and the biochip 12 during the testing process, so that the sensing area on the biochip 12 can be completely covered by the elastic buffer In the seat 42, the fluidity of the test liquid in the elastic buffer seat 42 is maintained, and the detection operation is performed in an environment containing the solution.

上述實施例僅係為了方便說明而舉例而已，本發明所主張之權利範圍自應以申請專利範圍所述為準，而非僅限於上述實施例。The above-mentioned embodiments are merely examples for the convenience of description, and the scope of rights claimed in the present invention should be subject to the scope of the patent application, rather than limited to the above-mentioned embodiments.

1:測試模組10:測試設備11:測試頭12:生物晶片13:針測機131:移動載臺14:測試電路板15:訊號線2:固定座20:探針卡21:通孔22:固定座本體23:止擋座231:止擋內緣3:中空套管30:彈簧31:止擋部4:壓測頭41:壓測頭本體42:彈性緩衝座421:擴展外緣422:凹槽部51:液體輸入管52:液體輸出管53:電極6,60,7,70,8,9:彈性緩衝座61,601,71,701,81,91:緩衝座本體62,602,72,702,82,92:擴展外緣64,604,74,704,84,94:貫孔66,606,76,706,86,96:凹槽部662,6062:周緣68,608:液體輸入管69,609:液體輸出管6063,663:頂面60611:弧狀凹部6611:弧狀凸部705:凸緣6061,661,73,731:底面77:長弧部78:短弧部87:圓形97:長方形R:倒圓角1: Test module 10: Test equipment 11: Test head 12: Biological chip 13: Probe tester 131: Mobile stage 14: Test circuit board 15: Signal line 2: Fixing seat 20: Probe card 21: Through hole 22 : Fixed seat body 23: Stop seat 231: Stop inner edge 3: Hollow sleeve 30: Spring 31: Stop part 4: Pressure probe 41: Pressure probe body 42: Elastic buffer seat 421: Extended outer edge 422 : Groove 51: Liquid input tube 52: Liquid output tube 53: Electrodes 6, 60, 7, 70, 8, 9: Elastic buffer seat 61, 601, 71, 701, 81, 91: Buffer seat body 62, 602, 72, 702, 82, 92 : Extended outer edge 64, 604, 74, 704, 84, 94: Through hole 66, 606, 76, 706, 86, 96: Recessed portion 662, 6062: Perimeter 68, 608: Liquid input pipe 69, 609: Liquid output pipe 6063, 663: Top surface 60611: Arc Concavity 6611: Arc-shaped convex 705: Flange 6061, 661, 73, 731: Bottom 77: Long arc 78: Short arc 87: Round 97: Rectangle R: Round

圖1係習知用於生物晶片測試之彈性緩衝座立體圖。圖2係本發明第一較佳實施例之用於生物晶片測試之彈性緩衝座立體圖。圖3係圖2之剖視圖。圖4係圖2之另一剖視圖。圖5係本發明第二較佳實施例之用於生物晶片測試之彈性緩衝座立體圖。圖6係本發明第三較佳實施例之用於生物晶片測試之彈性緩衝座立體圖。圖7係本發明第四較佳實施例之用於生物晶片測試之彈性緩衝座立體圖。圖8係本發明第五較佳實施例之用於生物晶片測試之彈性緩衝座立體圖。圖9係本發明第六較佳實施例之用於生物晶片測試之彈性緩衝座立體圖。圖10係本發明一較佳實施例之生物晶片之測試模組之分解圖。圖11係本發明一較佳實施例之生物晶片之測試模組之立體剖視圖。圖12係本發明一較佳實施例之生物晶片之測試模組之另一視角之立體圖。圖13係本發明一較佳實施例之生物晶片之測試設備之立體圖。圖14係本發明一較佳實施例之生物晶片之測試設備之剖視圖。Figure 1 is a perspective view of a conventional elastic buffer seat used for biochip testing. Fig. 2 is a perspective view of the elastic buffer seat for biochip testing according to the first preferred embodiment of the present invention. Figure 3 is a cross-sectional view of Figure 2. Fig. 4 is another cross-sectional view of Fig. 2. Fig. 5 is a perspective view of the elastic buffer seat for biochip testing according to the second preferred embodiment of the present invention. Fig. 6 is a perspective view of the elastic buffer seat for biochip testing according to the third preferred embodiment of the present invention. FIG. 7 is a perspective view of the elastic buffer seat for biochip testing according to the fourth preferred embodiment of the present invention. Fig. 8 is a perspective view of the elastic buffer seat for biochip testing according to the fifth preferred embodiment of the present invention. FIG. 9 is a perspective view of the elastic buffer seat for biochip testing according to the sixth preferred embodiment of the present invention. Fig. 10 is an exploded view of a biochip test module according to a preferred embodiment of the present invention. FIG. 11 is a perspective cross-sectional view of a biochip test module according to a preferred embodiment of the present invention. FIG. 12 is a perspective view of the test module of the biochip of a preferred embodiment of the present invention from another perspective. Fig. 13 is a perspective view of a biochip testing equipment according to a preferred embodiment of the present invention. Fig. 14 is a cross-sectional view of a biochip testing equipment according to a preferred embodiment of the present invention.

7:彈性緩衝座 7: Elastic buffer seat

71:緩衝座本體 71: buffer seat body

72:擴展外緣 72: Extend the outer edge

73:底面 73: Bottom

74:貫孔 74: Through hole

76:凹槽部 76: Groove

77:長弧部 77: Long arc

78:短弧部 78: short arc

R:倒圓角 R: round

Claims

一種用於生物晶片測試之彈性緩衝座，包括：一緩衝座本體，具有一凹槽部及二貫孔，該二貫孔包括有一輸入孔及一輸出孔；以及一擴展外緣，設置於該緩衝座本體之周緣，且該緩衝座本體凹設形成一周緣呈圓弧狀之該凹槽部，該二貫孔分別位於該凹槽部之周緣之相對應二端；其中，該每一貫孔穿設該凹槽部處並分別形成一凸緣，以形成延伸該輸出孔與該輸入孔之設計，方便抽取測試液體。 An elastic buffer seat for biochip testing, comprising: a buffer seat body with a groove portion and two through holes, the two through holes including an input hole and an output hole; and an expanded outer edge arranged on the The periphery of the buffer seat body, and the buffer seat body is recessed to form the groove portion with an arc-shaped circumference, and the two through holes are respectively located at two corresponding ends of the periphery of the groove portion; wherein, each through hole A flange is formed through the groove part to form a design extending the output hole and the input hole to facilitate the extraction of test liquid.

如申請專利範圍第1項所述之用於生物晶片測試之彈性緩衝座，其中，該凹槽部係呈橢圓狀，該二貫孔分別位於該凹槽部之短弧部。 According to the first item of the scope of patent application, the elastic buffer seat for biochip testing, wherein the groove portion is elliptical, and the two through holes are respectively located at the short arc portion of the groove portion.

如申請專利範圍第1項所述之用於生物晶片測試之彈性緩衝座，其中，該凹槽部係呈圓形狀，該二貫孔相隔180度。 According to the first item of the scope of patent application, the elastic buffer seat for biochip testing, wherein the groove portion is in a circular shape, and the two through holes are separated by 180 degrees.

如申請專利範圍第1項所述之用於生物晶片測試之彈性緩衝座，其中，該緩衝座本體之該凹槽部具有呈水平狀之底面。 The elastic buffer seat for biochip testing described in item 1 of the scope of patent application, wherein the groove portion of the buffer seat body has a horizontal bottom surface.

如申請專利範圍第1項所述之用於生物晶片測試之彈性緩衝座，其中，該緩衝座本體之該凹槽部具有一斜向之底面，該斜向之底面延伸至該輸出孔。 According to the first item of the scope of patent application, the elastic buffer seat for biochip testing, wherein the groove portion of the buffer seat body has an oblique bottom surface, and the oblique bottom surface extends to the output hole.

如申請專利範圍第1項所述之用於生物晶片測試之彈性緩衝座，其中，該緩衝座本體之該凹槽部具有一弧狀凸部，該弧狀凸部設置於該凹槽部之底面，該弧狀凸部鄰近於該輸出孔。 The elastic buffer seat for biochip testing described in the first item of the scope of patent application, wherein the groove portion of the buffer seat body has an arc-shaped convex portion, and the arc-shaped convex portion is disposed on the groove portion On the bottom surface, the arc-shaped convex portion is adjacent to the output hole.

如申請專利範圍第1項所述之用於生物晶片測試之彈性緩衝座，其中，該緩衝座本體之該凹槽部具有一弧狀凹部，該弧狀凹部設置於該凹槽部之底面，該弧狀凹部鄰近於該輸出孔。 According to the first item of the scope of patent application, the elastic buffer seat for biochip testing, wherein the groove portion of the buffer seat body has an arc-shaped recess, and the arc-shaped recess is provided on the bottom surface of the groove, The arc-shaped recess is adjacent to the output hole.

如申請專利範圍第1項所述之用於生物晶片測試之彈性緩衝座，其中，該彈性緩衝座係以聚二甲基矽氧烷(PDMS)所製成之一體式結構。 According to the first item of the scope of patent application, the elastic buffer seat for biochip testing, wherein the elastic buffer seat is made of polydimethylsiloxane (PDMS) in a one-piece structure.

如申請專利範圍第1項所述之用於生物晶片測試之彈性緩衝座，其中，該凹槽部之側壁具有一導圓角。 According to the first item of the scope of patent application, the elastic buffer seat for biochip testing, wherein the side wall of the groove portion has a rounded corner.

一種生物晶片之測試模組，包括有：一固定座，具有一通孔，該固定座之底部固設一探針卡；一中空套管，穿過該通孔，穿設於該固定座內，該中空套管穿設有至少二管路，該至少二管路包括一流體輸入管及一流體輸出管，且該中空套管具一止擋部，其容設於該固定座內並夾設一彈簧；以及一壓測頭，包括一壓測頭本體及一彈性緩衝座，該壓測頭本體組設於該中空套管上，該彈性緩衝座卡合於該壓測頭本體內，並連接該至少二管路；其中，該彈性緩衝座包括有一緩衝座本體及一擴展外緣，該緩衝座本體具有一凹槽部及二貫孔，該二貫孔包括有一輸入孔及一輸出孔，該擴展外緣設於該緩衝座本體之周緣，且該緩衝座本體凹設形成一周緣呈圓弧狀之該凹槽部，該二貫孔分別位於該凹槽部之周緣之相對應二端。 A test module for biochips includes: a fixing seat with a through hole, a probe card is fixed at the bottom of the fixing seat; a hollow sleeve, passing through the through hole, and passing through the fixing seat, The hollow casing is penetrated with at least two pipelines, the at least two pipelines include a fluid input pipe and a fluid output pipe, and the hollow casing has a stopper portion which is accommodated in the fixing seat and clamped A spring; and a pressure probe, including a pressure probe body and an elastic buffer seat, the pressure probe body is assembled on the hollow sleeve, the elastic buffer seat is clamped in the pressure probe body, and Connect the at least two pipelines; wherein the elastic buffer seat includes a buffer seat body and an expanded outer edge, the buffer seat body has a groove portion and two through holes, and the two through holes include an input hole and an output hole , The extended outer edge is arranged on the periphery of the buffer seat body, and the buffer seat body is recessed to form the groove portion with a circular arc-shaped circumference, and the two through holes are respectively located at two corresponding two of the periphery of the groove portion end.

如申請專利範圍第10項所述之生物晶片之測試模組，其中，該凹槽部係呈橢圓狀，該二貫孔分別位於該凹槽部之短弧部。 For the biochip test module described in claim 10, the groove portion is elliptical, and the two through holes are respectively located at the short arc portion of the groove portion.

如申請專利範圍第10項所述之生物晶片之測試模組，其中，該凹槽部係呈圓形狀，該二貫孔相隔180度。 According to the biochip test module described in item 10 of the scope of patent application, wherein the groove portion is in a circular shape, and the two through holes are separated by 180 degrees.

如申請專利範圍第10項所述之生物晶片之測試模組，其中，該每一貫孔穿設該凹槽部處並分別形成一凸緣，以形成延伸該輸出孔與該輸入孔之設計，方便抽取測試液體。 For the biochip test module described in item 10 of the scope of patent application, wherein each through hole penetrates the groove portion and forms a flange respectively to form a design extending the output hole and the input hole, Convenient to extract test liquid.

如申請專利範圍第10項所述之生物晶片之測試模組，其中，該緩衝座本體之該凹槽部具有呈水平狀之底面。 According to the biochip test module described in claim 10, wherein the groove portion of the buffer seat body has a horizontal bottom surface.

如申請專利範圍第10項所述之生物晶片之測試模組，其中，該緩衝座本體之該凹槽部具有一斜向之底面，該斜向之底面延伸至該輸出孔。 According to the biochip test module described in claim 10, the groove portion of the buffer seat body has an oblique bottom surface, and the oblique bottom surface extends to the output hole.

如申請專利範圍第10項所述之生物晶片之測試模組，其中，該緩衝座本體之該凹槽部具有一弧狀凸部，該弧狀凸部設置於該凹槽部之底面，該弧狀凸部鄰近於該輸出孔。 For the biochip test module described in claim 10, wherein the groove portion of the buffer seat body has an arc-shaped convex portion, and the arc-shaped convex portion is disposed on the bottom surface of the groove portion. The arc-shaped protrusion is adjacent to the output hole.

如申請專利範圍第10項所述之生物晶片之測試模組，其中，該緩衝座本體之該凹槽部具有一弧狀凹部，該弧狀凹部設置於該凹槽部之底面，該弧狀凹部鄰近於該輸出孔。 For the biochip test module described in claim 10, wherein the groove portion of the buffer seat body has an arc-shaped recess, the arc-shaped recess is provided on the bottom surface of the groove, and the arc The recess is adjacent to the output hole.

如申請專利範圍第10項所述之生物晶片之測試模組，其中，該緩衝座本體更具有一電極孔，該中空套管穿設有一電極，該電極穿設該電極孔。 For the biochip test module described in claim 10, the buffer seat body further has an electrode hole, the hollow sleeve is penetrated with an electrode, and the electrode penetrates the electrode hole.

如申請專利範圍第10項所述之生物晶片之測試模組，其中，該緩衝座本體之該凹槽部的側壁具有一導圓角。 According to the biochip test module described in claim 10, wherein the side wall of the groove portion of the buffer seat body has a rounded corner.

一種生物晶片之測試設備，包括有：一針測機，具有一移動載臺，用以承載一生物晶片；一測試模組，置放於該移動載臺上，包括一固定座、一中空套管以及一壓測頭，該固定座具有一通孔，並於該固定座之底部固設一探針卡；該中空套管穿過該通孔，穿設於該固定座內，其中，該中空套管穿設有至少一管路；該壓測頭包括一壓測頭本體及一彈性緩衝座，該壓測頭本體組設於該中空套管上，該彈性緩衝座卡合於該壓測頭本體內，並連接該至少一管路，其中，該彈性緩衝座包括有一緩衝座本體及一擴展外緣，該緩衝座本體具有一凹槽部及二貫孔，該二貫孔包括有一輸入孔及一輸出孔，該擴展外緣設於該緩衝座本體之周緣，且該緩衝座本體凹設形成一周緣呈圓弧狀之該凹槽部，該二貫孔分別位於該凹槽部之周緣之相對應二端；以及一測試頭，電連接該探針卡，而該測試頭設有至少一測試電路板。 A test equipment for biochips, including: A needle tester has a movable stage for carrying a biochip; a test module is placed on the movable stage, and includes a fixed seat, a hollow sleeve and a pressure probe. The fixed seat Having a through hole, and a probe card is fixed at the bottom of the fixing seat; the hollow sleeve passes through the through hole and passes through the fixing seat, wherein the hollow sleeve is penetrated with at least one pipeline; The pressure probe includes a pressure probe body and an elastic buffer seat. The pressure probe body is assembled on the hollow sleeve. The elastic buffer seat is clamped in the pressure probe body and connected to the at least one tube Wherein the elastic buffer seat includes a buffer seat body and an extended outer edge, the buffer seat body has a groove portion and two through holes, the two through holes include an input hole and an output hole, and the extended outer edge It is arranged on the periphery of the buffer seat body, and the buffer seat body is recessed to form the groove portion with an arc-shaped circumference, and the two through holes are respectively located at two ends of the circumference of the groove portion; and a test The head is electrically connected to the probe card, and the test head is provided with at least one test circuit board.

如申請專利範圍第20項所述之生物晶片之測試設備，其中，該凹槽部係呈橢圓狀，該二貫孔分別位於該凹槽部之短弧部。 According to the biochip testing equipment described in item 20 of the scope of patent application, the groove portion is elliptical, and the two through holes are respectively located in the short arc portion of the groove portion.

如申請專利範圍第20項所述之生物晶片之測試設備，其中，該凹槽部係呈圓形狀，該二貫孔相隔180度。 According to the biochip testing equipment described in claim 20, wherein the groove portion has a circular shape, and the two through holes are separated by 180 degrees.

如申請專利範圍第20項所述之生物晶片之測試設備，其中，該每一貫孔穿設該凹槽部處並分別形成一凸緣，以形成延伸該輸出孔與該輸入孔之設計，方便抽取測試液體。 For the biochip testing equipment described in claim 20, wherein each through hole penetrates the groove portion and forms a flange respectively to form a design extending the output hole and the input hole, which is convenient Take the test liquid.

如申請專利範圍第20項所述之生物晶片之測試設備，其中，該緩衝座本體之該凹槽部具有呈水平狀之底面。 According to the biochip testing equipment described in the 20th patent application, the groove portion of the buffer seat body has a horizontal bottom surface.

如申請專利範圍第20項所述之生物晶片之測試設備，其中，該緩衝座本體之該凹槽部具有一斜向之底面，該斜向之底面延伸至該輸出孔。 According to the biochip testing equipment described in claim 20, wherein the groove portion of the buffer seat body has an oblique bottom surface, and the oblique bottom surface extends to the output hole.

如申請專利範圍第20項所述之生物晶片之測試設備，其中，該緩衝座本體之該凹槽部具有一弧狀凸部，該弧狀凸部設置於該凹槽部之底面，該弧狀凸部鄰近於該輸出孔。 For the biochip testing equipment described in claim 20, wherein the groove portion of the buffer seat body has an arc-shaped protrusion, the arc-shaped protrusion is provided on the bottom surface of the groove, and the arc The convex portion is adjacent to the output hole.

如申請專利範圍第20項所述之生物晶片之測試設備，其中，該緩衝座本體之該凹槽部具有一弧狀凹部，該弧狀凹部設置於該凹槽部之底面，該弧狀凹部鄰近於該輸出孔。 The biochip testing equipment described in the 20th patent application, wherein the groove portion of the buffer seat body has an arc-shaped recess, the arc-shaped recess is provided on the bottom surface of the groove, and the arc-shaped recess Adjacent to the output hole.

如申請專利範圍第20項所述之生物晶片之測試設備，其中，該緩衝座本體之該凹槽部的側壁具有一導圓角。 According to the biochip testing equipment described in claim 20, wherein the side wall of the groove portion of the buffer seat body has a rounded corner.