TWI698961B - Wafer placement equipment and wafer placement method - Google Patents
Wafer placement equipment and wafer placement method Download PDFInfo
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Abstract
本發明揭示了一種晶片貼片設備及晶片貼片方法,前述晶片貼片設備包含:供料單元、晶片傳輸單元及晶片貼合單元;供料單元包含物料元件及至少兩個取片手,物料元件被配置為承載晶片,前述至少兩個取片手被配置為從物料元件上交替拾取晶片;晶片傳輸單元包含可旋轉轉檯,可旋轉轉檯上設置有多個晶片吸附區,晶片吸附區被配置為吸附前述至少兩個取片手提供的晶片;晶片貼合單元包含貼片台及至少兩個貼片手,前述至少兩個貼片手被配置為交替從前述晶片吸附區獲取晶片並將晶片貼合至位於前述貼片台上的襯底上。本發明提供的晶片貼片設備及晶片貼片方法,實現至少兩個取片手及至少兩個貼片手的並行運行方式,提高貼片效率,有助於促進晶片封裝的進程及提高晶片的產率。 The present invention discloses a wafer placement equipment and a wafer placement method. The aforementioned wafer placement equipment includes: a feeding unit, a wafer transfer unit, and a wafer bonding unit; the feeding unit includes a material component and at least two chip pickers, and the material component It is configured to carry wafers, and the aforementioned at least two chip pickers are configured to pick up wafers alternately from the material element; the wafer transfer unit includes a rotatable turntable, and the rotatable turntable is provided with a plurality of wafer adsorption areas, and the wafer adsorption areas are configured to adsorb The chip is provided by the aforementioned at least two pick-up hands; the chip bonding unit includes a placement table and at least two placement hands, and the at least two placement hands are configured to alternately take the wafers from the aforementioned wafer adsorption area and bond the wafers to On the substrate on the placement table. The chip placement equipment and the chip placement method provided by the present invention realize the parallel operation mode of at least two picking hands and at least two placement hands, improve placement efficiency, help promote the process of chip packaging and increase the yield of chips .
Description
本發明實施例關於晶片封裝技術,例如關於一種晶片貼片設備及晶片貼片方法。 The embodiment of the present invention relates to a chip packaging technology, for example, to a chip placement equipment and a chip placement method.
積體電路(integrated circuit,IC)工業是當前全球經濟發展的高速增長點,其中,半導體製造工藝的進步及市場對晶片需求的快速增長,對晶片的生產效率提出很高的要求,其中,晶片封裝的效率直接影響晶片的生產速度。 The integrated circuit (IC) industry is a fast-growing point of current global economic development. Among them, the progress of semiconductor manufacturing technology and the rapid growth of market demand for wafers have put forward high requirements for wafer production efficiency. The efficiency of packaging directly affects the production speed of wafers.
為了改善晶片封裝效率,一般藉由設計及改善封裝結構及封裝方法或者優化封裝設備,其中包含晶片貼片設備。相關技術中,晶片貼片設備可包含直線式傳輸及轉盤式傳輸方式。其中,直線式傳輸方式藉由傳送帶將待貼合晶片進行傳送,並由機械手進行拾取及貼片操作,該直線式傳輸方式的貼片設備機構空間尺寸大,傳輸距離遠,貼片效率較低;而轉盤式傳輸方式通常是將機械手設置在轉盤上,由機械手轉動拾取、傳輸及貼合晶片,該貼片方式一次只能貼合一個晶片,貼片效率低,且不利於機械手拾取晶片時調整姿態,同時轉盤結構複雜、體積大,對運動軸的要求亦較高。 In order to improve the efficiency of chip packaging, generally by designing and improving the packaging structure and packaging method or optimizing packaging equipment, including chip mounter equipment. In the related art, the chip placement equipment can include linear transmission and turntable transmission. Among them, the linear transmission method uses a conveyor belt to transfer the wafers to be bonded, and picks up and mounts them by a robot. The linear transmission method has a large space size, a long transmission distance, and a relatively high placement efficiency. Low; and the turntable transmission method usually sets the manipulator on the turntable, and the manipulator rotates to pick up, transmit and attach the chip. This placement method can only attach one chip at a time, and the placement efficiency is low, and it is not conducive to the machine When the hand picks up the wafer, the posture is adjusted. At the same time, the structure of the turntable is complex and the volume is large, and the requirements for the motion axis are also high.
本發明提供一種晶片貼片設備及晶片貼片方法,以實現高效率地貼片,促進晶片封裝效率及生產效率。 The invention provides a chip placement equipment and a chip placement method to achieve high-efficiency placement and promote chip packaging efficiency and production efficiency.
第一方面,本發明實施例提供一種晶片貼片設備,包含:供料單元、晶片傳輸單元及晶片貼合單元; In a first aspect, an embodiment of the present invention provides a wafer placement equipment, including: a feeding unit, a wafer transfer unit, and a wafer bonding unit;
前述供料單元包含物料元件及至少兩個取片手,前述物料元件被配置為承載晶片,前述至少兩個取片手被配置為從前述物料組件上交替拾取前述晶片; The aforementioned material supply unit includes a material element and at least two pick-up hands, the aforementioned material element is configured to carry wafers, and the aforementioned at least two pick-up hands are configured to alternately pick up the aforementioned wafers from the aforementioned material component;
前述晶片傳輸單元包含可旋轉轉檯,前述可旋轉轉檯上設置有多個晶片吸附區,前述晶片吸附區被配置為吸附前述至少兩個取片手提供的前述晶片; The aforementioned wafer transfer unit includes a rotatable turntable, the aforementioned rotatable turntable is provided with a plurality of wafer adsorption areas, and the aforementioned wafer adsorption area is configured to adsorb the aforementioned wafers provided by the aforementioned at least two chip pickers;
前述晶片貼合單元包含貼片台及至少兩個貼片手,前述至少兩個貼片手被配置為交替從前述晶片吸附區獲取前述晶片並將前述晶片貼合至位於前述貼片台上的襯底上。 The wafer bonding unit includes a placement table and at least two placement hands, and the at least two placement hands are configured to alternately obtain the wafer from the wafer adsorption area and bond the wafer to the substrate on the placement table on.
在一些實施例中,前述至少兩個取片手包含第一取片手及第二取片手,前述至少兩個貼片手包含第一貼片手及第二貼片手; In some embodiments, the aforementioned at least two picking hands include a first picking hand and a second picking hand, and the aforementioned at least two patching hands include a first patching hand and a second patching hand;
前述晶片貼片設備亦包含晶片對位元單元,前述晶片對位元單元包含取料對位元相機、第一取片對位相機、第二取片對位相機、第一貼片對位相機及第二貼片對位相機; The aforementioned chip placement equipment also includes a chip alignment unit, and the aforementioned chip alignment unit includes a pick-and-align camera, a first pick-and-align camera, a second pick-and-align camera, and a first pick-and-align camera And the second patch camera;
其中,前述取料對位相機位於前述物料組件上方,前述取料對位元相機被配置為確定前述物料元件上的前述晶片的位置; Wherein, the reclaiming and positioning camera is located above the material component, and the reclaiming and positioning camera is configured to determine the position of the wafer on the material component;
前述第一取片對位相機及前述第二取片對位元相機均被配置為確定前述可旋轉轉檯上待取的前述晶片的位置; Both the first film-taking and alignment camera and the second film-taking and alignment camera are configured to determine the position of the wafer to be taken on the rotatable turntable;
前述第一貼片對位元相機被配置為確定前述第一貼片手獲取的前述晶片在前述貼片台上的待貼片位置,前述第二貼片對位元相機被配置為確定前述第二 貼片獲取的前述晶片在前述貼片台上的待貼片位置。 The first placement and alignment camera is configured to determine the position to be placed on the placement stage of the chip obtained by the first placement hand, and the second placement and alignment camera is configured to determine the second The position of the chip to be placed on the placement stage of the chip obtained by placement.
在一些實施例中,前述可旋轉轉檯包含對應前述第一取片手的第一放片位、對應前述第二取片手的第二放片位、對應前述第一貼片手的第一取片位及對應前述第二貼片手的第二取片位;其中,前述第一取片位位於前述第一取片對位相機的下方,前述第二取片位位於前述第二取片對位相機的下方; In some embodiments, the rotatable turntable includes a first placement position corresponding to the first pickup hand, a second placement position corresponding to the second pickup hand, a first pickup position corresponding to the first placement hand, and Corresponding to the second pick-up position of the aforementioned second placement hand; wherein the aforementioned first pick-up location is located under the aforementioned first pick-and-alignment camera, and the aforementioned second pick-up location is located under the aforementioned second pick-and-alignment camera ;
前述可旋轉轉檯被配置為藉由轉動使每個前述晶片吸附區依次移動至前述第一放片位、前述第二放片位、前述第一取片位及前述第二取片位;前述第一取片手及前述第二取片手亦配置為將前述晶片交替放置於前述第一放片位及前述第二放片位元對應的前述晶片吸附區上; The rotatable turntable is configured to sequentially move each of the wafer suction regions to the first placement position, the second placement position, the first pickup position, and the second pickup position by rotation; A pick-up hand and the second pick-up hand are also configured to alternately place the wafers on the wafer suction area corresponding to the first placement position and the second placement position;
前述第一貼片手及前述第二貼片手被配置為交替從前述第一取片位及前述第二取片位元對應的前述晶片吸附區上拾取前述晶片,並交替將前述晶片貼片於前述貼片台上的襯底上。 The first placement hand and the second placement hand are configured to alternately pick up the wafer from the wafer suction area corresponding to the first pick position and the second pick position, and alternately place the wafer on the On the substrate on the placement table.
在一些實施例中,前述多個晶片吸附區圍繞前述可旋轉轉檯的中心呈等間距圓周排布,前述第一取片位及前述第二放片位關於前述可旋轉轉檯的中心對稱,前述第一放片位及前述第二取片位關於前述可旋轉轉檯的中心對稱。 In some embodiments, the plurality of wafer adsorption areas are arranged in an equally spaced circle around the center of the rotatable turntable, the first picking position and the second placement position are symmetrical about the center of the rotatable turntable, and the first A film placement position and the second film taking position are symmetrical about the center of the rotatable turntable.
在一些實施例中,前述可旋轉轉檯包含承片台及與前述承片台的中軸連接的旋轉電機,前述旋轉電機被配置為驅動前述承片台轉動; In some embodiments, the aforementioned rotatable turntable includes a holding table and a rotating motor connected to the central axis of the aforementioned holding table, and the aforementioned rotating motor is configured to drive the aforementioned holding table to rotate;
前述承片台包含載台及位於前述載台內部的氣路滑環,前述載台上設置有前述多個晶片吸附區,前述氣路滑環被配置為為前述多個晶片吸附區供應真空及正壓氣體。 The slide table includes a carrier and a gas slip ring located inside the carrier. The carrier is provided with the plurality of wafer adsorption zones, and the gas slip ring is configured to supply vacuum to the plurality of wafer adsorption zones. Positive pressure gas.
在一些實施例中,前述載台的每個前述晶片吸附區上設置有吸附孔,前述載台內部設置有分別與多個前述吸附孔導通的多個吸附通道,前述多個吸附通道與前述氣路滑環導通。 In some embodiments, each of the wafer adsorption areas of the stage is provided with an adsorption hole, and the interior of the stage is provided with a plurality of adsorption channels respectively connected to the plurality of adsorption holes, and the plurality of adsorption channels are connected to the gas The slip ring is turned on.
在一些實施例中,前述物料組件位於前述承片台下方; In some embodiments, the aforementioned material component is located below the aforementioned sheet platform;
前述供料單元亦包含第三取片手及第四取片手,前述第三取片手及前述第四取片手被配置為交替拾取前述物料元件上的前述晶片並進行翻轉,前述第一取片手及前述第二取片手分別被配置為拾取前述第三取片手及前述第四取片手上的前述晶片並交替平移放置於前述第一放片位及前述第二放片位元對應的前述晶片吸附區上。 The aforementioned feeding unit also includes a third pickup hand and a fourth pickup hand, the third pickup hand and the fourth pickup hand are configured to alternately pick up the wafers on the material element and turn them over, the first pickup hand and the aforementioned fourth pickup hand The second pick-up hand is respectively configured to pick up the aforementioned wafers on the aforementioned third pick-up hand and the aforementioned fourth pick-up hand and alternately shift and place them on the aforementioned wafer suction area corresponding to the aforementioned first placement position and the aforementioned second placement position. .
在一些實施例中,前述晶片貼合單元亦包含龍門架,前述第一貼片手及前述第二貼片手設置在前述龍門架上,前述龍門架被配置為根據前述第一取片位、前述第二取片位及前述待貼片位置驅動前述第一貼片手及前述第二貼片手進行移動。 In some embodiments, the chip attaching unit also includes a gantry, the first placement hand and the second placement hand are arranged on the gantry, and the gantry is configured to be based on the first picking position and the second The second pick-up position and the position to be placed drive the first placement hand and the second placement hand to move.
在一些實施例中,相鄰兩個前述晶片吸附區之間設有貼片避讓區,前述貼片台位於前述可旋轉轉檯的下方; In some embodiments, a patch avoidance area is provided between two adjacent wafer adsorption areas, and the patch table is located below the rotatable turntable;
前述晶片貼合單元亦包含龍門架,前述第一貼片手及前述第二貼片手設置在前述龍門架上,前述龍門架被配置為根據前述第一取片位、前述第二取片位及前述待貼片位置驅動前述第一貼片手及前述第二貼片手進行縱向移動,前述第一貼片手及前述第二貼片手交替藉由前述貼片避讓區將前述晶片貼片於前述貼片台上的襯底上。 The chip bonding unit also includes a gantry, the first placement hand and the second placement hand are arranged on the gantry, and the gantry is configured according to the first picking position, the second picking position and the aforementioned The position to be placed drives the first placement hand and the second placement hand to move longitudinally, the first placement hand and the second placement hand alternately place the chip on the placement stage through the placement avoidance area On the substrate.
在一些實施例中,前述第一取片對位元相機被配置為確定前述第一取片位元上前述晶片的偏向角,前述第二取片對位元相機被配置為確定前 述第二取片位元上前述晶片的偏向角,前述龍門架亦被配置為根據前述第一取片位或前述第二取片位元上前述晶片的偏向角驅動前述第一貼片手及前述第二貼片手進行旋轉。 In some embodiments, the first fetching and alignment camera is configured to determine the deflection angle of the wafer on the first fetching position, and the second fetching and alignment camera is configured to determine the According to the deflection angle of the chip on the second picking position, the gantry is also configured to drive the first placement hand and the aforementioned chip according to the deflection angle of the chip on the first picking position or the second picking position The second patch hand rotates.
在一些實施例中,前述載台包含懸掛部及承載部,前述承載部的厚度小於等於5mm。 In some embodiments, the aforementioned carrier includes a suspension part and a carrying part, and the thickness of the aforementioned carrying part is less than or equal to 5 mm.
在一些實施例中,前述第一取片對位相機、前述第二取片對位相機、前述第一貼片對位相機及前述第二貼片對位相機固定安裝於同一基板上。 In some embodiments, the first pick-and-align camera, the second pick-and-align camera, the first patch-alignment camera, and the second patch-alignment camera are fixedly mounted on the same substrate.
在一些實施例中,前述貼片台包含依次堆疊設置的支撐台、第一運動台及第一吸附台; In some embodiments, the aforementioned placement table includes a support table, a first movement table, and a first suction table that are stacked in sequence;
前述支撐台被配置為承載前述第一運動台、前述第一吸附台以及前述襯底; The aforementioned support table is configured to carry the aforementioned first movement table, the aforementioned first suction table, and the aforementioned substrate;
前述第一運動台被配置為移動前述襯底使前述襯底上的待貼片區域對準待貼片位置; The aforementioned first movement stage is configured to move the aforementioned substrate so that the area to be mounted on the aforementioned substrate is aligned with the position to be mounted;
前述第一吸附台被配置為吸附前述襯底。 The first adsorption stage is configured to adsorb the substrate.
在一些實施例中,前述物料元件包含依次堆疊設置的第二運動台、第二吸附台及頂針單元; In some embodiments, the aforementioned material element includes a second movement table, a second suction table, and a thimble unit stacked in sequence;
前述第二運動台被配置為將待取晶片移動至取料位置; The aforementioned second movement stage is configured to move the wafer to be picked to the picking position;
前述第二吸附台被配置為吸附前述待取晶片; The aforementioned second adsorption stage is configured to adsorb the aforementioned wafer to be taken;
前述頂針單元被配置為使前述取料位置上的前述待取晶片脫離前述第二吸附台。 The ejector pin unit is configured to release the wafer to be picked up at the picking position from the second suction stage.
第二方面,本發明實施例亦提供了一種晶片貼片方法,採用如 第一方面任一前述的晶片貼片設備,包含: In the second aspect, the embodiment of the present invention also provides a chip mounting method, which adopts such as Any one of the aforementioned chip placement equipment of the first aspect includes:
至少兩個取片手交替從物料元件上拾取晶片並將前述晶片放置於可旋轉轉檯的多個晶片吸附區上; At least two picking hands alternately pick up wafers from the material components and place the aforementioned wafers on multiple wafer adsorption areas of the rotatable turntable;
前述可旋轉轉檯旋轉,帶動前述可旋轉轉檯上的前述多個晶片吸附區移動; The rotation of the aforementioned rotatable turntable drives the movement of the aforementioned multiple wafer adsorption areas on the aforementioned rotatable turntable;
至少兩個貼片手交替從前述多個晶片吸附區上拾取前述晶片並將前述晶片貼片於前述貼片台上的襯底上。 At least two placement hands alternately pick up the wafer from the plurality of wafer adsorption areas and place the wafer on the substrate on the placement stage.
在一些實施例中,前述至少兩個取片手包含第一取片手及第二取片手,前述至少兩個貼片手包含第一貼片手及第二貼片手;前述可旋轉轉檯包含對應前述第一取片手的第一放片位、對應前述第二取片手的第二放片位、對應前述第一貼片手的第一取片位及對應前述第二貼片手的第二取片位; In some embodiments, the aforementioned at least two picking hands include a first picking hand and a second picking hand, the aforementioned at least two picking hands include a first picking hand and a second picking hand; the aforementioned rotatable turntable includes a corresponding first picking hand and a second picking hand. The first placement position of the film handler, the second placement position corresponding to the aforementioned second pickup handler, the first placement location corresponding to the aforementioned first placement handler, and the second placement location corresponding to the aforementioned second placement handler;
前述晶片貼片方法亦包含: The aforementioned chip placement method also includes:
在第一時間內,前述第一取片手從前述物料元件上拾取前述晶片,前述第二取片手將從前述物料元件上拾取的晶片放置於與前述第二放片位元對應的前述晶片吸附區,前述第一貼片手從與前述第一取片位元對應的前述晶片吸附區上拾取前述晶片,前述第二貼片手將從與前述第二取片位元對應的前述晶片吸附區上拾取的前述晶片貼片於前述貼片台上的襯底上; In the first time, the first pick-up hand picks up the wafer from the material element, and the second pick-up hand places the wafer picked up from the material element in the wafer suction area corresponding to the second placement position. , The first placement hand picks up the wafer from the wafer suction area corresponding to the first picking bit, and the second picking hand picks up the wafer from the wafer suction area corresponding to the second picking bit The aforementioned chip is placed on the substrate on the aforementioned placement table;
在第二時間內,前述第一取片手將從前述物料組件上拾取的前述晶片放置於與前述第一放片位元對應的前述晶片吸附區,前述第二取片手從前述物料元件上拾取晶片,前述第一貼片手將從與前述第一取片位元對應的前述晶片吸附區上拾取的前述晶片貼片於前述貼片台上的襯底上,前述第二貼片手從與前述第二取片位元對應的前述晶片吸附區上拾取前述晶片。 In the second time, the first pick-up hand places the wafer picked up from the material component in the wafer suction area corresponding to the first placement position, and the second pick-up hand picks up the wafer from the material component , The first placement hand will place the wafer picked up from the wafer suction area corresponding to the first pickup location on the substrate on the placement stage, and the second placement hand will be connected to the second Pick up the aforementioned wafer on the aforementioned wafer suction area corresponding to the chip taking position.
本發明藉由在供料單元設置至少兩個取片手,在晶片貼合單元設置至少兩個貼片手,由至少兩個取片手交替從物料元件上拾取晶片,並放置在晶片傳輸單元的可旋轉轉檯的晶片吸附區上,並由至少兩個貼片手交替從旋轉之後的晶片吸附區上獲取晶片並貼合至貼片台上的襯底上,解決了單個取片手及單個貼片手取放及貼片的串列運行方式貼片效率較低的問題,實現至少兩個取片手及至少兩個貼片手的並行運行方式,可以使貼片速度翻倍,提高貼片效率,促進晶片封裝的進程,有助於提高晶片的產率。 In the present invention, at least two picking hands are provided in the feeding unit and at least two placement hands are provided in the wafer bonding unit. The at least two picking hands alternately pick up the wafers from the material components and place them on the rotatable of the wafer transfer unit. On the wafer suction area of the turntable, at least two placement hands alternately pick up the wafers from the rotated wafer suction area and attach them to the substrate on the placement table, which solves the problem of single picking and single picking The serial operation mode of the patch is the problem of low patch efficiency. The parallel operation mode of at least two picking hands and at least two placement hands can double the speed of placement, improve placement efficiency, and promote the process of chip packaging , Which helps to increase wafer yield.
10‧‧‧供料單元 10‧‧‧Feeding unit
11‧‧‧物料元件 11‧‧‧Material components
12‧‧‧取片手 12‧‧‧ Film picker
20‧‧‧晶片傳輸單元 20‧‧‧Chip transfer unit
21‧‧‧可旋轉轉檯 21‧‧‧Rotating turntable
22‧‧‧承片台 22‧‧‧Table
23‧‧‧旋轉電機 23‧‧‧Rotating Motor
30‧‧‧晶片貼合單元 30‧‧‧Chip bonding unit
31‧‧‧貼片台 31‧‧‧Placement table
32‧‧‧貼片手 32‧‧‧Patch Hand
33‧‧‧龍門架 33‧‧‧Gantry
40‧‧‧晶片對位元單元 40‧‧‧Chip Alignment Unit
41‧‧‧取料對位相機 41‧‧‧Reclaiming and positioning camera
42‧‧‧取片對位相機 42‧‧‧Film taking and registration camera
43‧‧‧貼片對位相機 43‧‧‧SMD registration camera
44‧‧‧基板 44‧‧‧Substrate
100‧‧‧晶片 100‧‧‧chip
111‧‧‧第二運動台 111‧‧‧Second Sports Platform
112‧‧‧第二吸附台 112‧‧‧Second Adsorption Station
113‧‧‧頂針單元 113‧‧‧Thimble unit
121‧‧‧第一取片手 121‧‧‧First picker
122‧‧‧第二取片手 122‧‧‧Second film picker
123‧‧‧第三取片手 123‧‧‧third picker
124‧‧‧第四取片手 124‧‧‧Fourth picker
200‧‧‧襯底 200‧‧‧Substrate
211‧‧‧晶片吸附區 211‧‧‧ Wafer adsorption area
212‧‧‧貼片避讓區 212‧‧‧ Patch Avoidance Area
221‧‧‧載台 221‧‧‧ Stage
222‧‧‧氣路滑環 222‧‧‧Air slip ring
311‧‧‧支撐台 311‧‧‧Support Table
312‧‧‧第一運動台 312‧‧‧The first sports platform
313‧‧‧第一吸附台 313‧‧‧The first adsorption station
321‧‧‧第一貼片手 321‧‧‧First placement hand
322‧‧‧第二貼片手 322‧‧‧Second placement hand
421‧‧‧第一取片對位相機 421‧‧‧First pick-up registration camera
422‧‧‧第二取片對位相機 422‧‧‧Second pick-up registration camera
431‧‧‧第一貼片對位相機 431‧‧‧The first patch camera
432‧‧‧第二貼片對位相機 432‧‧‧Second patch camera
2011‧‧‧第一放片位 2011‧‧‧First place
2012‧‧‧第二放片位 2012‧‧‧Second position
2021‧‧‧第一取片位 2021‧‧‧First pick position
2022‧‧‧第二取片位 2022‧‧‧Second Picking Position
2211‧‧‧吸附孔、懸掛部 2211‧‧‧Adsorption hole, suspension part
2212‧‧‧吸附通道、承載部 2212‧‧‧Adsorption channel, carrying part
【圖1】為本發明實施例提供的一種晶片貼片設備的結構示意圖。 [Fig. 1] is a schematic diagram of the structure of a chip placement equipment provided by an embodiment of the present invention.
【圖2】是圖1所示的晶片貼片設備中可旋轉轉檯的俯視圖。 [Figure 2] is a top view of the rotatable turntable in the wafer placement equipment shown in Figure 1;
【圖3】是圖1所示的晶片貼片設備的右視圖。 [Fig. 3] is a right side view of the wafer placement equipment shown in Fig. 1.
【圖4】是圖1所示的晶片貼片設備的俯視示意圖。 [Fig. 4] is a schematic top view of the wafer placement equipment shown in Fig. 1.
【圖5】是本發明實施例提供的另一種晶片貼片設備的局部結構示意圖。 [Fig. 5] is a schematic diagram of a partial structure of another chip placement equipment provided by an embodiment of the present invention.
【圖6】是本發明實施例提供的貼片的時序控制圖。 [Figure 6] is a timing control diagram of the patch provided by the embodiment of the present invention.
【圖7】是本發明實施例提供的取片對位相機及貼片對位相機的仰視圖。 [Fig. 7] is a bottom view of the film taking and alignment camera and the patch alignment camera provided by the embodiment of the present invention.
【圖8】是本發明實施例提供的一種可旋轉轉檯的結構示意圖。 [Figure 8] is a schematic structural diagram of a rotatable turntable provided by an embodiment of the present invention.
【圖9】是本發明實施例提供的一種載台的剖面結構示意圖。 [Figure 9] is a schematic cross-sectional structure diagram of a carrier provided by an embodiment of the present invention.
【圖10】是本發明實施例提供的又一種晶片貼片設備的結構示意圖。 [Figure 10] is a schematic structural diagram of yet another wafer placement equipment provided by an embodiment of the present invention.
【圖11】是圖10所示晶片貼片設備的右視圖。 [Fig. 11] is a right side view of the wafer placement equipment shown in Fig. 10.
【圖12】是本發明實施例提供的一種載台的結構示意圖。 [Figure 12] is a schematic structural diagram of a carrier provided by an embodiment of the present invention.
【圖13】是本發明實施例提供的一種晶片貼片方法的流程圖。 [Fig. 13] is a flowchart of a chip placement method provided by an embodiment of the present invention.
【圖14】是本發明實施例提供的另一種晶片貼片方法的流程圖。 Fig. 14 is a flowchart of another chip placement method provided by an embodiment of the present invention.
下面結合圖式及實施例對本發明作進一步的詳細說明。可以理解的是,此處所描述的具體實施例僅僅用於解釋本發明,而非對本發明的限定。另外亦需說明的是,為了便於描述,圖式中僅示出了與本發明相關的部分而非全部結構。 The present invention will be further described in detail below in conjunction with the drawings and embodiments. It can be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for ease of description, only a part of the structure related to the present invention is shown in the drawings instead of all of the structure.
圖1為本發明實施例提供的一種晶片貼片設備的結構示意圖,圖2是圖1所示的晶片貼片設備中可旋轉轉檯的俯視圖,圖3是圖1所示的晶片貼片設備的右視圖,參考圖1-3,該晶片貼片設備包含:供料單元10、晶片傳輸單元20及晶片貼合單元30;供料單元10包含物料元件11及至少兩個取片手12,物料元件11被配置為承載晶片100,至少兩個取片手12被配置為從物料元件11上交替拾取晶片100;晶片傳輸單元20包含一個可旋轉轉檯21,可旋轉轉檯21上設置有多個晶片吸附區211,晶片吸附區211被配置為吸附至少兩個取片手12提供的晶片100;晶片貼合單元30包含貼片台31及至少兩個貼片手32,至少兩個貼片手32被配置為交替從晶片吸附區211獲取晶片100並將晶片100貼合至位於貼片台31上的襯底200上。
1 is a schematic structural diagram of a wafer placement equipment provided by an embodiment of the present invention, FIG. 2 is a top view of a rotatable turntable in the wafer placement equipment shown in FIG. 1, and FIG. 3 is a schematic view of the wafer placement equipment shown in FIG. Right view, referring to Figures 1-3, the wafer placement equipment includes: a feeding
下面參考圖1,對該貼片設備的貼片方法進行簡單介紹,該貼片方法包含:至少兩個取片手12交替從物料元件11上拾取晶片100並將晶片100放置於可旋轉轉檯21的多個晶片吸附區211上;可旋轉轉檯21旋轉,帶
動可旋轉轉檯21上的多個晶片吸附區211移動;至少兩個貼片手32交替從多個晶片吸附區211上拾取晶片100並將晶片100貼片於貼片台31上的襯底200上。需要說明的是,在每個取片手進行取放的步驟及每個貼片手進行取放的步驟中,對應每一個動作後,可旋轉轉檯21則以預設角度進行一次旋轉,以將可旋轉轉檯21上已藉由取片手放置了晶片的位置移走,並且將已經放置了晶片的位置移至貼片手的取片位置,以圖2所示的可旋轉轉檯包含12個吸附區211為例,可旋轉轉檯21每次旋轉的角度為30°。
The following is a brief introduction to the placement method of the placement equipment with reference to FIG. 1. The placement method includes: at least two
需要說明的是,取片手12及貼片手32在取放晶片及貼片時,其移動過程包含水平及縱向運動,水平運動可包含X及Y兩個維度的調節,取片手12及貼片手32可設置為吸片方式的吸附手,利用是否通真空來實現晶片100的拾取及釋放操作。取片手12及貼片手32的數量應均不少於兩個,以進行交替的取放動作,當然,亦可以增加取片手12及貼片手32為3個或4個等,藉由3個或4個取片手及貼片手32交替地進行取放,可以減少兩個取片手或兩個貼片手交替動作之間的間隔,增加貼片速度。另外,可以根據取片手取片速度及貼片手貼片速度比,來設置取片手及貼片手的數量為相同或為不同。
It should be noted that the movement process of the picking
本發明實施例提供的晶片貼片設備,藉由在供料單元設置至少兩個取片手,在晶片貼合單元設置至少兩個貼片手,由至少兩個取片手交替從物料元件上拾取晶片,並放置在晶片傳輸單元的可旋轉轉檯的晶片吸附區上,並由至少兩個貼片手交替從旋轉之後的晶片吸附區上獲取晶片並貼合至貼片台上的襯底上,使得至少兩個取片手可同時進行交替地取放晶片操作,至少兩個貼片手亦同時交替進行貼片操作,解決了單個取片手及單個貼片手取放及貼片 的串列運行方式貼片效率較低的問題,實現了至少兩個取片手及至少兩個貼片手的並行運行方式,使貼片速度翻倍,提高了貼片效率,促進了晶片封裝的進程,有助於提高晶片的產率。除此之外,將貼片手及晶片傳輸單元分別單獨設置,便於貼片手拾取晶片時調整姿態,抓取晶片中心,有助於精確貼片。 According to the chip placement equipment provided by the embodiment of the present invention, by providing at least two pick-up hands in the feeding unit and at least two pick-and-place hands in the wafer bonding unit, the at least two pick-up hands alternately pick up wafers from the material components, And placed on the wafer suction area of the rotatable turntable of the wafer transfer unit, and at least two placement hands alternately pick up the wafers from the rotated wafer suction area and attach them to the substrate on the placement table so that at least two A single picking hand can alternately pick and place wafers at the same time, and at least two placement hands can also alternate placement operations at the same time, solving a single picking hand and a single placement hand picking and placing and patching The problem of low placement efficiency in tandem operation mode has realized the parallel operation mode of at least two picking hands and at least two placement hands, doubling the placement speed, improving placement efficiency, and promoting the process of chip packaging , Which helps to increase wafer yield. In addition, the placement of the placement hand and the wafer transfer unit are separately arranged to facilitate the placement of the placement hand to adjust the posture when picking up the wafer, grab the center of the wafer, and help precise placement.
繼續參考圖1,可選地,貼片台31包含依次堆疊設置的支撐台311、第一運動台312及第一吸附台313;支撐台311被配置為承載第一運動台312、第一吸附台313以及襯底200;第一運動台312被配置為移動襯底使其上的待貼片區域對準待貼片位置;第一吸附台313被配置為吸附襯底200。可選地,物料元件11包含依次堆疊設置的第二運動台111、第二吸附台112及頂針單元113,第二運動台111被配置為將待取晶片移動至取料位置,第二吸附台112被配置為吸附待取晶片100;頂針單元113被配置為使取料位置上的待取晶片脫離第二吸附台112。
Continuing to refer to FIG. 1, optionally, the placement table 31 includes a supporting table 311, a first moving table 312, and a first suction table 313 stacked in sequence; the supporting table 311 is configured to carry the first moving table 312, the first suction The table 313 and the
物料組件11及貼片台31本身可具備位置移動功能,在一些實施例中,在取片手從物料組件11上取片時,需要提前將物料元件11上的待取晶片移動至待取片位置,以便取片手進行取片,其中,第一運動台111可進行水平以及縱向的移動。對於貼片手將晶片貼片於貼片台31上的襯底時,第二運動台312則進行水平移動,以將待貼片位置移動到目標貼片位置。
The
圖4是圖1所示的晶片貼片設備的俯視示意圖,參考圖1及圖4,至少兩個取片手包含第一取片手121及第二取片手122,至少兩個貼片手包含第一貼片手321及第二貼片手322;晶片貼片設備亦包含晶片對位元單元40,晶片對位元單元40包含取料對位相機41、第一取片對位相機421、第二取片對位相機422、第一貼片對位相機431及第二貼片對位相機432,取片對
位相機42包含第一取片對位相機421及第二取片對位相機422,貼片對位相機43包含第一貼片對位相機431及第二貼片對位相機432;其中,取料對位相機41位於物料元件11上方,被配置為確定物料元件11上的晶片100的位置;第一取片對位相機421及第二取片對位元相機422分別被配置為確定可旋轉轉檯21上待取的晶片100的位置;第一貼片對位相機431及第二貼片對位元相機432分別被配置為確定第一貼片手321及第二貼片322獲取的晶片100在貼片台31上的待貼片位置。
4 is a schematic top view of the chip placement equipment shown in FIG. 1. Referring to FIGS. 1 and 4, at least two picking hands include a first picking
圖1中所示200為貼片台31上放置的晶圓襯底,第一貼片手321及第二貼片手交替將可旋轉轉檯21上晶片吸附區211上的晶片100拾取,並貼片至貼片台31上的晶圓襯底200的待貼片位置上。另外,參考圖1,第二取片對位相機422及第二貼片對位相機432分別位於第一取片對位相機421及第一貼片對位相機431的垂直紙面的後方,因此圖中用虛線示出。
200 shown in FIG. 1 is a wafer substrate placed on the placement table 31. The
對位元相機進行晶片位置的確定及待貼片位置的確定可以根據採集晶片及晶圓襯底的圖像,根據晶片及晶圓襯底上的對位元標記進行確定。下面參考圖1及圖4,以第一取片手121及第一貼片手321為例,對該包含晶片對位元單元的晶片貼片設備的工作過程進行簡單介紹:取料對位元相機41藉由物料元件11上的已分割為晶片的晶圓上的對位元標記,確定每個晶片的位置;由第一取片手121拾取晶片並放置於可旋轉轉檯21的晶片吸附區211上;可旋轉轉檯21進行旋轉,使多個晶片吸附區211移動,第一取片對位相機421對位於某一晶片吸附區211;由第一取片對位元相機421對該晶片吸附區211上的晶片的位置進行確定,由第一貼片手321進行晶片的拾取;第一貼片對位相機431藉由確定貼片台31上晶圓襯底200上的待貼片位置,由第一
貼片手321將晶片貼片至晶圓襯底200上。晶片對位元單元可以在晶片的取放及貼片過程中檢測晶片的位置,保證取片手及貼片手在拾取晶片時,可吸取晶片的中心位置,有效避免晶片的脫落等情況。
The location of the wafer and the location to be attached to the location camera can be determined based on the images of the wafer and wafer substrate, and the location mark on the wafer and wafer substrate. 1 and 4, taking the first picking
晶片對位元單元中的對位元相機可以採用龍門架等裝置進行位置的精確驅動,以進行晶片位置以及晶片的待貼片位置的確定,亦可以設置對位相機固定,由承載晶片的物料元件及貼片台進行精確地位置移動,以確定晶片位置及晶片的待貼片位置。 The alignment camera in the wafer alignment unit can be accurately driven by a gantry and other devices to determine the position of the wafer and the position of the chip to be mounted. The alignment camera can also be fixed by the material carrying the wafer. The components and placement table move accurately to determine the position of the wafer and the position of the wafer to be placed.
為了在確定晶片位置及待貼片位置的情況下,提高取片手及貼片手取放晶片及貼片的效率,針對取片手及貼片手取放及貼片的移動方式,本發明實施例亦提供了一種晶片貼片設備,圖5是本發明實施例提供的另一種晶片貼片設備的局部結構示意圖,參考圖5,該晶片貼片設備中,可旋轉轉檯包含分別對應第一取片手121、第二取片手122、第一貼片手321及第二貼片手322的第一放片位2011、第二放片位2012、第一取片位2021及第二取片位2022;其中,第一取片位2021及第二取片位2022位於第一取片對位相機及第二取片對位相機的下方;可旋轉轉檯21被配置為轉動多個晶片吸附區211依次移動至第一放片位2011、第二放片位2012、第一取片位2021及第二取片位2022;第一取片手121及第二取片手122亦被配置為將晶片100交替放置於第一放片位2011及第二放片位元2012對應的晶片吸附區100上;第一貼片手321及第二貼片手322被配置為交替從第一取片位2021及第二取片位元2022對應的晶片吸附區211上拾取晶片100,並交替將晶片100貼片於貼片台上的襯底200上。
In order to improve the efficiency of picking and placing chips and placement by the picker and placement hand when determining the position of the chip and the location to be placed, the embodiment of the present invention also provides 5 is a schematic diagram of a partial structure of another wafer placement equipment provided by an embodiment of the present invention. Referring to FIG. 5, in the wafer placement equipment, the rotatable turntable includes first picking
該晶片貼片設備由於固定了第一放片位2011、第二放片位
2012、第一取片位2021及第二取片位2022,此時第一取片手121、第二取片手122、第一貼片手321及第二貼片手322可以固定放片位置及取片位置,減少了第一取片手121、第二取片手122、第一貼片手321及第二貼片手322進行放片及取片的位置判斷,可一定程度上提高貼片效率。需要說明的是,對於第一取片位321及第二取片位322的位置取決於第一取片對位相機及第二取片對位相機的位置,以便於第一取片對位相機及第二取片對位相機對第一取片位321及第二取片位元322上晶片的位置進行確認。
The chip placement equipment has fixed the
針對圖5所示的貼片設備,本發明實施例亦提供了一種貼片方法,圖6是本發明實施例提供的貼片的時序控制圖,下面繼續參考圖1、圖5及圖6,對該貼片設備的貼片方法進行描述:其中,取片手及貼片手的吸片動作及放片動作分別代表拾取及放置晶片的動作,在第一貼片手及第二貼片手進行吸片及貼片動作的同時,需要利用對位元相機進行位置確定。該貼片過程的一個週期內可以包含兩個時間段,在第一時間內,第一取片手121從物料元件11上拾取晶片100,第二取片手122將從物料元件11上拾取的晶片100放置於與第二放片位元2012對應的晶片吸附區211,第一貼片手321從與第一取片位元2021對應的晶片吸附區211上拾取晶片100,第二貼片手322將從與第二取片位元2022對應的晶片吸附區211上拾取的晶片100貼片於貼片台31上的襯底200上;在第二時間內,第一取片手121將從物料元件11上拾取的晶片100放置於與第一放片位元2011對應的晶片吸附區211,第二取片手122從物料元件11上拾取晶片100,第一貼片手321將從與第一取片位元2021對應的晶片吸附區211上拾取的晶片100貼片於貼片台31上的襯底200上,第二貼片手322從與第二取片位元2022對應的晶片吸附區211上拾取晶片100。需要
說明的是,在第一時間及第二時間之間,可旋轉轉檯21進行預設角度的旋轉,以滿足晶片吸附區211對應進入第一放片位2011、第二放片位2012、第一取片位2021以及第二取片位2022內,以圖2所示的12個晶片吸附區為例,其包含兩個時間段在內的一個週期中,可旋轉轉檯21旋轉了60°,並在相鄰的兩個晶片吸附區內交替放置了一片晶片,同時貼片手交替拾取了相鄰的兩個晶片吸附區上的兩個晶片,並將其交替貼片於貼片台上的襯底上。該貼片方法將第一取片手、第二取片手、第一貼片手以及第二貼片手的取放晶片的動作高度同步化,實現了取放動作的交替,保證了晶片貼片效率的提高。
For the patching device shown in FIG. 5, the embodiment of the present invention also provides a patching method. FIG. 6 is a timing control diagram of patching provided by the embodiment of the present invention. Refer to FIG. 1, FIG. 5, and FIG. 6 below. The placement method of the placement equipment is described: Among them, the sucking action and the placement action of the picking hand and the placement hand respectively represent the actions of picking up and placing the chip, and the first and second placement hands perform the suction and At the same time as the patching action, it is necessary to use the alignment camera to determine the position. One cycle of the placement process may include two time periods. In the first time, the
繼續參考圖5,可選地,多個晶片吸附區211圍繞可旋轉轉檯21的中心呈等間距圓周排布,第一取片位2011及第二放片位2022、第一放片位2021及第二取片位2012分別關於可旋轉轉檯21的中心對稱。
Continuing to refer to FIG. 5, optionally, a plurality of
另外,當固定第一放片位2011、第二放片位2012、第一取片位2021及第二取片位2022位置後,對應地,第一取片對位相機、第二取片對位相機的位置亦已確定,並且由於貼片台可以進行位置移動,因此,可將第一貼片對位相機及第二貼片對位相機位置亦固定,故可設置第一取片對位相機、第二取片對位相機、第一貼片對位相機及第二貼片對位相機固定安裝於同一基板上。圖7是本發明實施例提供的取片對位相機及貼片對位相機的仰視圖,參考圖7,可將第一取片對位相機421、第二取片對位相機422、第一貼片對位相機431及第二貼片對位相機432緊湊佈局在同一基板44上,並且將採用低膨脹係數的恆範鋼材料進行製作,保證晶片對位元單元在作業過程中,不會因為機台環境溫度變化而導致每個相機之間溫度漂移過大。
In addition, after fixing the
對於晶片傳輸單元中的可旋轉轉檯的結構,本發明實施例提供
一種可旋轉轉檯,圖8是本發明實施例提供的一種可旋轉轉檯的結構示意圖,參考圖8,可旋轉轉檯21包含承片台22及與承片台22的中軸連接的旋轉電機23,旋轉電機23被配置為驅動承片台22轉動;承片台22包含載台221及位於載台221內部的氣路滑環222,載台221上設置有多個晶片吸附區,氣路滑環222被配置為為晶片吸附區供應真空及正壓氣體。
For the structure of the rotatable turntable in the wafer transfer unit, the embodiment of the present invention provides
A rotatable turntable. FIG. 8 is a schematic structural diagram of a rotatable turntable provided by an embodiment of the present invention. Referring to FIG. 8, the
圖9是本發明實施例提供的一種載台的剖面結構示意圖,參考圖8及圖9,載台221的每個晶片吸附區上設置有至少一個吸附孔2211,載台221內部設置有分別與多個吸附孔2211導通的多個吸附通道2212,多個吸附通道2212與氣路滑環222導通。
9 is a schematic cross-sectional structure diagram of a stage provided by an embodiment of the present invention. Referring to FIGS. 8 and 9, each wafer adsorption area of the
為了減少第一取片手及第二取片手的水平移動距離以及第一貼片手及第二貼片手的水平移動距離,本發明實施例亦提供了一種晶片貼片設備,圖10是本發明實施例提供的又一種晶片貼片設備的結構示意圖,圖11是圖10所示晶片貼片設備的右視圖,參考圖5、圖10及圖11,可選地,物料組件11位於承片台22下方;供料單元亦包含第三取片手123及第四取片手124,第三取片手123及第四取片手124為翻轉取片手,第一取片手121及第二取片手122為平移取片手,第三取片手123及第四取片手124被配置為交替拾取物料元件11上的晶片100並進行翻轉,第一取片手121及第二取片手122被配置為分別拾取第三取片手123及第四取片手124上的晶片100並交替平移放置於第一放片位2011及第二放片位元2022對應的晶片吸附區211上。
In order to reduce the horizontal movement distance of the first pick-up hand and the second pick-up hand and the horizontal movement distance of the first placement hand and the second placement hand, the embodiment of the present invention also provides a chip placement equipment. FIG. 10 is an embodiment of the present invention. A schematic structural diagram of another wafer placement equipment is provided. FIG. 11 is a right side view of the wafer placement equipment shown in FIG. 10. Referring to FIG. 5, FIG. 10, and FIG. 11, optionally, the
由於第三取片手123及第四取片手124的交替取片的過程中,第一取片手121及第二取片手122亦在交替取放,從而能夠充分利用時間。而在空間上將物料元件11設置在承片台22的下方,利用第三取片手123及第四
取片手124實現晶片縱向上的位移,再由第一取片手121及第二取片手122實現晶片水平的位移,保證第一取片手121及第二取片手122的水平距離的縮短,從而可提高取片的效率。
Since the third pick-up
繼續參考圖5、圖10及圖11,可選地,晶片貼合單元30亦包含一龍門架33,第一貼片手321及第二貼片手322設置在龍門架33上,龍門架33被配置為根據第一取片位元2021、第二取片位2022及待貼片位置驅動第一貼片手321及第二貼片手322進行水平移動及/或縱向移動。
5, 10 and 11, optionally, the
需要說明的是,該晶片貼片設備雖然採用兩個貼片手,但只需一個龍門架33即可實現對兩個貼片手的交替移動控制,而不需要分別設置水平控制台,因而優化整個晶片貼片設備的空間佈局,縮小設備的空間尺寸。並且為了保證第二運動台行程儘量短,可設置兩個貼片手負責不同的貼片區,藉由龍門架實現對貼片手的水平微調功能,滿足不同間距的貼片要求。
It should be noted that although the chip placement equipment uses two placement hands, it only needs one
為了縮小貼片手在貼片台及可旋轉轉檯之間的水平位移距離,參考圖5、圖10及圖11,可設置貼片台31位於承片台22的下方,且為了保證貼片手從承片台22上拾取晶片後,在放置到貼片台31上時不被承片台22遮擋,可選擇將貼片台31及承片台22在水平方向上錯位設置,錯位距離即決定貼片手的水平位移距離。而對於貼片手縱向的移動距離,則與載台的高度及厚度有關,繼續參考圖7,可選地,載台221包含懸掛部2211及承載部2212,承載部2212的厚度小於等於5mm。
In order to reduce the horizontal displacement distance of the placement hand between the placement table and the rotatable turntable, referring to Figures 5, 10 and 11, the placement table 31 can be set under the placement table 22, and to ensure that the placement hand is After picking up the wafer on the
圖12是本發明實施例提供的一種載台的結構示意圖,參考圖5、圖10至12,在載台上,可設置相鄰兩個晶片吸附區211之間設有貼片避讓區212;龍門架33被配置為根據第一取片位元2021、第二取片位2022及待貼
片位置驅動第一貼片手321及第二貼片手322進行縱向移動,第一貼片手321及第二貼片手322交替藉由貼片避讓區212將晶片100貼片於貼片台31上的襯底200上。
12 is a schematic structural diagram of a carrier provided by an embodiment of the present invention. Referring to FIGS. 5 and 10 to 12, on the carrier, a
需要說明的是,圖12所示的載台結構僅用於示例,貼片避讓區212的形狀亦可以設置為圓形、矩形以及多邊形等,第一貼片手321及第二貼片手322從該貼片避讓區212中穿過以將晶片100貼片於載台221下方的貼片台31上。顯然,本實施例提供的該載台221的結構及貼片方法可以避免貼片手進行水平的位移,縮短貼片手的貼片時間,提高晶片的貼片效率。
It should be noted that the stage structure shown in FIG. 12 is only used as an example. The shape of the
繼續參考圖5、圖10及圖12,可選地,第一取片對位相機421及第二取片對位元相機422亦被配置為分別確定第一取片位2011及第二取片位元2022上晶片100的偏向角,龍門架33亦被配置為根據偏向角驅動第一貼片手321及第二貼片手322進行旋轉。
Continuing to refer to FIGS. 5, 10, and 12, optionally, the first
需要說明的是,第一貼片手321及第二貼片手322至少具備3個自由度小行程的運動,能夠水平兩自由度的移動拾取晶片,以及縱向運動完成貼片動作,而第一取片手及第二取片手在將晶片放置於載台上時,晶片的姿態並不固定,可能存在一定的偏向角,因此需要在貼片手貼片之前調整晶片的偏向角,故設置貼片手具備旋轉功能,可以更精確地調整晶片的姿態,保證晶片的貼合精度。
It should be noted that the
本發明實施例亦提供了一種晶片貼片方法,圖13是本發明實施例提供的一種晶片貼片方法的流程圖,參考圖13,該晶片貼片方法採用本發明實施例提供的任意一種晶片貼片設備,包含: The embodiment of the present invention also provides a chip attaching method. FIG. 13 is a flowchart of a chip attaching method provided by an embodiment of the present invention. Referring to FIG. 13, the chip attaching method uses any chip provided by the embodiment of the present invention. Mounting equipment, including:
S110、至少兩個取片手交替從物料元件上拾取晶片並將晶片放置於可旋轉 轉檯的多個晶片吸附區上; S110. At least two picking hands alternately pick up the wafer from the material component and place the wafer on the rotatable On multiple wafer adsorption areas of the turntable;
S120、可旋轉轉檯旋轉,帶動可旋轉轉檯上的多個晶片吸附區移動; S120. The rotatable turntable rotates to drive the multiple wafer adsorption areas on the rotatable turntable to move;
S130、至少兩個貼片手交替從多個晶片吸附區上拾取晶片並將晶片貼片於貼片台上的襯底上。 S130. At least two placement hands alternately pick up wafers from multiple wafer adsorption areas and place the wafers on the substrate on the placement stage.
需要說明的是,在正常貼片過程中,至少兩個取片手及至少兩個貼片手的交替取放晶片的動作可以是同步化進行地,並且至少兩個取片手的取放、至少兩個貼片手的取放交替進行的方式亦至少包含兩種;如圖6的時序圖所示的交替方式中,以取片手為例,第一取片手吸片後,第二取片手再進行放片動作,繼而第一取片手在進行放片動作,最後由第二取片手進行吸片動作,至此完成一個週期;當然,亦可以將第一取片手的吸片動作及第二取片手的放片動作同時進行,即在一個週期內,第一取片手吸片的同時,第二取片手進行放片動作,繼而第一取片手在進行放片動作,同時由第二取片手進行吸片動作。同樣地,對於貼片手的交替進行方式亦可以是交替進行取放,亦可以是同時進行取放。 It should be noted that during the normal placement process, the alternate picking and placing actions of at least two picking hands and at least two picking hands can be synchronized, and the picking and placing of at least two picking hands and at least two picking hands There are also at least two alternate picking and placing methods for the placement hand; in the alternate manner shown in the timing diagram of Figure 6, taking the picking hand as an example, after the first picking hand sucks the film, the second picking hand then puts the film Action, and then the first picker is performing the action of placing the film, and finally the second picking hand performs the action of sucking the film, thus completing a cycle; of course, it can also be the sucking action of the first picking hand and the second picking hand of the film The actions are performed at the same time, that is, in a cycle, while the first pick-up hand sucks the film, the second pick-up hand performs the film-feeding action, and then the first pick-up hand performs the film-feeding action, and the second pick-up hand performs the film suction action at the same time. Similarly, the alternate method for the placement of the hands can also be alternate pick and place, or simultaneous pick and place.
本發明實施例提供的晶片貼片方法,藉由至少兩個取片手交替從物料元件上拾取晶片並將晶片放置於可旋轉轉檯的多個晶片吸附區上;至少兩個貼片手交替從多個晶片吸附區上拾取晶片並將晶片貼片於貼片台上的襯底上,解決了單個取片手及單個貼片手取放及貼片的串列運行方式貼片效率較低的問題,實現了至少兩個取片手及至少兩個貼片手的並行運行方式,使貼片速度翻倍,提高了貼片效率,促進了晶片封裝的進程,有助於提高晶片的產率。 According to the chip placement method provided by the embodiment of the present invention, at least two picking hands alternately pick up wafers from a material element and place the wafers on multiple wafer suction areas of a rotatable turntable; at least two placement hands alternately pick up wafers from multiple Pick up the wafer from the wafer adsorption area and place the wafer on the substrate on the placement table, which solves the problem of low placement efficiency in the tandem operation mode of single pickup hand and single placement hand picking and placing and placement. The parallel operation mode of at least two picking hands and at least two placement hands doubles the placement speed, improves placement efficiency, promotes the process of chip packaging, and helps to increase the yield of chips.
圖14是本發明實施例提供的另一種晶片貼片方法的流程圖,參考圖14,可選地,對於晶片貼片設備中,至少兩個取片手包含第一取片手及第 二取片手,至少兩個貼片手包含第一貼片手及第二貼片手;可旋轉轉檯包含分別對應第一取片手、第二取片手、第一貼片手及第二貼片手的第一放片位、第二放片位、第一取片位及第二取片位;晶片貼片方法包含: 14 is a flowchart of another chip placement method provided by an embodiment of the present invention. Referring to FIG. 14, optionally, for the chip placement equipment, at least two chip picking hands include a first chip picking hand and a second chip picking hand. Two picking hands, at least two picking hands include the first picking hand and the second picking hand; the rotatable turntable contains the first picking hand, the second picking hand, the first picking hand, and the second picking hand respectively. Position, second placement position, first take position and second take position; the chip placement method includes:
S210、在第一時間內,第一取片手從物料元件上拾取晶片,第二取片手將從物料元件上拾取的晶片放置於與第二放片位元對應的晶片吸附區,第一貼片手從與第一取片位元對應的晶片吸附區上拾取晶片,第二貼片手將從與第二取片位元對應的晶片吸附區上拾取的晶片貼片於貼片台上的襯底上; S210. In the first time, the first pick-up hand picks up the wafer from the material component, and the second pick-up hand places the wafer picked up from the material component in the wafer suction area corresponding to the second placement position, and the first placement hand Pick up the wafer from the wafer suction area corresponding to the first pick-up location, and the second placement hand will place the wafer picked up from the wafer suction area corresponding to the second pick-up location on the substrate on the placement stage ;
S210、在第二時間內,第一取片手將從物料元件上拾取的晶片放置於與第一放片位元對應的晶片吸附區,第二取片手從物料元件上拾取晶片,第一貼片手將從與第一取片位元對應的晶片吸附區上拾取的晶片貼片於貼片台上的襯底上,第二貼片手從與第二取片位元對應的晶片吸附區上拾取晶片。 S210. In the second time, the first pick-up hand places the wafer picked up from the material component in the wafer suction area corresponding to the first placement position, the second pick-up hand picks up the wafer from the material component, and the first placement hand Place the wafer picked up from the wafer suction area corresponding to the first pick-up location on the substrate on the placement stage, and the second placement hand picks up the wafer from the wafer suction area corresponding to the second pick-up location .
10‧‧‧供料單元 10‧‧‧Feeding unit
11‧‧‧物料元件 11‧‧‧Material components
12‧‧‧取片手 12‧‧‧ Film picker
20‧‧‧晶片傳輸單元 20‧‧‧Chip transfer unit
21‧‧‧可旋轉轉檯 21‧‧‧Rotating turntable
30‧‧‧晶片貼合單元 30‧‧‧Chip bonding unit
31‧‧‧貼片台 31‧‧‧Placement table
32‧‧‧貼片手 32‧‧‧Patch Hand
40‧‧‧晶片對位元單元 40‧‧‧Chip Alignment Unit
41‧‧‧取料對位相機 41‧‧‧Reclaiming and positioning camera
42‧‧‧取片對位相機 42‧‧‧Film taking and registration camera
43‧‧‧貼片對位相機 43‧‧‧SMD registration camera
100‧‧‧晶片 100‧‧‧chip
111‧‧‧第二運動台 111‧‧‧Second Sports Platform
112‧‧‧第二吸附台 112‧‧‧Second Adsorption Station
113‧‧‧頂針單元 113‧‧‧Thimble unit
121‧‧‧第一取片手 121‧‧‧First picker
122‧‧‧第二取片手 122‧‧‧Second film picker
200‧‧‧襯底 200‧‧‧Substrate
311‧‧‧支撐台 311‧‧‧Support Table
312‧‧‧第一運動台 312‧‧‧The first sports platform
313‧‧‧第一吸附台 313‧‧‧The first adsorption station
321‧‧‧第一貼片手 321‧‧‧First placement hand
322‧‧‧第二貼片手 322‧‧‧Second placement hand
421‧‧‧第一取片對位相機 421‧‧‧First pick-up registration camera
422‧‧‧第二取片對位相機 422‧‧‧Second pick-up registration camera
431‧‧‧第一貼片對位相機 431‧‧‧The first patch camera
432‧‧‧第二貼片對位相機 432‧‧‧Second patch camera
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CN208722850U (en) * | 2018-09-30 | 2019-04-09 | 上海微电子装备(集团)股份有限公司 | A kind of chip patch device |
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WO2010003927A1 (en) * | 2008-07-11 | 2010-01-14 | Alcatel Lucent | Apparatus for loading and unloading semiconductor wafers |
WO2012133760A1 (en) * | 2011-03-30 | 2012-10-04 | ボンドテック株式会社 | Electronic component mounting method, electronic component mounting system, and substrate |
TW201501225A (en) * | 2013-06-18 | 2015-01-01 | Samsung Techwin Co Ltd | Flip-chip mounter and mounting method using it |
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