TWI666403B - Chemical fluid supplementing and recycling system and method - Google Patents
Chemical fluid supplementing and recycling system and method Download PDFInfo
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Abstract
本發明提出一種流體填充與抽取系統，係包括：至少一第一身分訊息攜載單元、至少一第二身分訊息攜載單元、至少一料品訊息攜載單元、至少一槽區訊息攜載單元、至少一容置槽訊息攜載單元、以及至少一可攜式電子裝置。特別地，在該可攜式電子裝置以其讀取單元讀取該些訊息攜載單元所攜載的基礎訊息之後，後端的中央監控系統便可以在確認操作人員是否具有執行流體填充作業與/或抽取(回收)作業之操作權限以及該料品容置器3(即，化學品槽車)所盛裝的料品的資處資訊是否符合無誤之後，允許操作人員執行流體填充作業與/或抽取(回收)作業。如此方式，係能夠確保填充作業與抽取作業與相關紀錄皆在電子化的系統管理下進行，免除任何的紙本記錄，是以能夠有效避免任何人為操作異常或者以非符合標準作業程序的方式完成相關作業。 The invention provides a fluid filling and extraction system, which includes: at least one first identity information carrying unit, at least one second identity information carrying unit, at least one material information carrying unit, and at least one tank area information carrying unit. , At least one receiving slot message carrying unit, and at least one portable electronic device. In particular, after the portable electronic device reads the basic information carried by the message carrying units with its reading unit, the central monitoring system at the back end can confirm whether the operator has performed the fluid filling operation and / After the operation authority of the extraction or recycling operation and whether the information of the material contained in the material container 3 (ie, the chemical tanker) is consistent, the operator is allowed to perform the fluid filling operation and / or extraction. (Recycling) operation. In this way, it is possible to ensure that filling operations, extraction operations and related records are performed under electronic system management, eliminating any paper records, and completing them in a way that can effectively avoid any human operation abnormalities or non-standard operating procedures. Related operations.
Description
本發明係關於半導體製程的技術領域，尤指一種流體填充與抽取系統與方法，應用於協助積體電路製造廠(IC foundry)的操作人員能夠在後端的中央監控系統的監控下完成化學品容置槽(Chemical containing tank)之填充與回收抽取作業。 The invention relates to the technical field of semiconductor manufacturing processes, in particular to a fluid filling and extraction system and method, which is used to assist operators of integrated circuit manufacturing plants (IC foundry) to complete chemical storage under the supervision of a central monitoring system at the back end. Filling and recovery of chemical containing tank.
半導體積體電路的製程包括薄膜沈積、擴散、微影蝕刻、離子植入等基本半導體製程；並且，在製作半導體積體電路的過程中，必須使用到大量的化學品來滿足製程的需求。特別說明的是，半導體積體電路的製造必須時時刻刻保持生產流程不中斷，因此，這些化學品的供應也必須被維持不中斷。基於這樣的理由，積體電路製造廠在進行廠區規劃時，便會特別地規畫至少一特定化學槽廠區，以作為設置各種大型化學品容置槽之用。 The manufacturing process of semiconductor integrated circuits includes basic semiconductor processes such as thin film deposition, diffusion, lithographic etching, and ion implantation; and in the process of manufacturing semiconductor integrated circuits, a large number of chemicals must be used to meet the needs of the process. In particular, the manufacturing of semiconductor integrated circuits must be maintained without interruption at all times, so the supply of these chemicals must also be maintained without interruption. For this reason, when the integrated circuit manufacturing plant is planning the plant area, it will specifically plan at least one specific chemical tank plant area for the purpose of setting up various large-scale chemical storage tanks.
目前，化學品供應商係利用大型化學品槽車裝載完成製作的各種化學品。可想而知，積體電路製造廠於進行各類化學品的補充之時，係令化學品槽車直接駛至化學槽廠區，進而直接地將化學品補充至指定的大型化學品容置槽之中，完成化學品的補充作業。然而，半導體製程所使用的化學品通常具有可燃性、毒性、氧化、腐蝕性等高危險性質，一旦在進行化學品補充作業的過程中發生操作人員的作業疏忽或系統故障等情況，則極有可能造成化學品洩漏或相異化學品之間產生化學反應，所引發之後果不僅是龐大的財務損失，更有可能造成作業人員的傷亡與環境汙染。 At present, chemical suppliers use a large chemical tanker to load and complete various chemicals. It is conceivable that when the integrated circuit manufacturing plant replenishes various chemicals, the chemical tank truck is driven directly to the chemical tank plant area, and then the chemicals are directly replenished to the designated large chemical storage tank. Among them, the replenishment of chemicals is completed. However, the chemicals used in semiconductor manufacturing processes usually have high hazards such as flammability, toxicity, oxidation, and corrosiveness. Once the operator's negligence or system failure occurs during the chemical replenishment operation, it is extremely It may cause chemical leakage or chemical reactions between dissimilar chemicals. The consequence is not only a huge financial loss, but also more likely to cause injury and death of workers and environmental pollution.
由上述說明可知，槽車作業的操作安全具有極高的危險性，因此，對於積體電路製造廠而言，將大型化學品槽的填充與抽取作業進行同步電子化是非常重要的。如此，積體電路製造廠的廠管便能夠透過中心控制系統而完整、全面性地監控大型化學品槽的填充與抽取作業的過程是否正確以及操作人員是否具備相關執行權限。有鑑於此，本案之發明人係極力加以研究創作，而終於研發完成本發明之一種流體填充與抽取系統與方法 As can be seen from the above description, the operation safety of the tank truck operation is extremely dangerous. Therefore, it is very important for the integrated circuit manufacturer to electronically synchronize the filling and extraction of large chemical tanks. In this way, the plant management of the integrated circuit manufacturing plant can completely and comprehensively monitor the process of filling and extraction of large chemical tanks through the central control system and whether the operators have the relevant execution authority. In view of this, the inventor of this case made great efforts to research and create, and finally developed a fluid filling and extraction system and method of the present invention.
本發明之主要目的在於提供一種流體填充與抽取系統，係包括：至少一第一身分訊息攜載單元、至少一第二身分訊息攜載單元、至少一料品訊息攜載單元、至少一槽區訊息攜載單元、至少一容置槽訊息攜載單元、以及至少一可攜式電子裝置。特別地，在該可攜式 電子裝置以其讀取單元讀取該些訊息攜載單元所攜載的基礎訊息之後，後端的中央監控系統便可以在確認操作人員是否具有執行流體填充作業與/或抽取(回收)作業之操作權限以及該料品容置器3(即，化學品槽車)所盛裝的料品的資處資訊是否符合無誤之後，允許操作人員執行流體填充作業與/或抽取(回收)作業。如此方式，係能夠確保填充作業與抽取作業與相關紀錄皆在電子化的系統管理下進行，免除任何的紙本記錄，是以能夠有效避免任何人為操作異常或者以非符合標準作業程序的方式完成相關作業。 The main object of the present invention is to provide a fluid filling and extraction system, comprising: at least one first identity information carrying unit, at least one second identity information carrying unit, at least one material information carrying unit, and at least one tank area A message carrying unit, at least one receiving slot message carrying unit, and at least one portable electronic device. In particular, in the portable After the electronic device reads the basic information carried by the message carrying units with its reading unit, the central monitoring system at the back end can confirm whether the operator has the operation to perform the fluid filling operation and / or the extraction (recycling) operation. After the authority and the information of the materials contained in the material container 3 (that is, the chemical tanker) are consistent, the operator is allowed to perform the fluid filling operation and / or the extraction (recovery) operation. In this way, it is possible to ensure that filling operations, extraction operations and related records are performed under electronic system management, eliminating any paper records, and completing them in a way that can effectively avoid any human operation abnormalities or non-standard operating procedures. Related operations.
為了達成上述本發明之主要目的，本案發明人係提供所述流體填充與抽取系統的一實施例，係包括：至少一第一身分訊息攜載單元，係設置於至少一操作人員身分卡之上；至少一料品訊息攜載單元，係設置於至少一料品容置器之上，且該料品容置器係容置有一特定料品；至少一槽區訊息攜載單元，係設置於至少一槽區管制門之上；至少一容置槽訊息攜載單元，係設置於至少一流體容置槽之上，且該至少一流體容置槽係設置在位於該槽區管制門後方的至少一流體容置槽區之中；以及至少一可攜式電子裝置，係具有一讀取單元；其中，藉由該讀取單元，該可攜式電子裝置可透過讀取該料品訊息攜載單元的方式確認是否該料品容置器所容置的該特定料品需要被執行一填充作業，以將該特定料品自該料品容置器填充至特定的該流體容置槽區與特定的該流體容置槽； 其中，藉由該讀取單元，該可攜式電子裝置可透過讀取該槽區訊息攜載單元與該容置槽訊息攜載單元的方式確認是否該流體容置槽所容置的該特定料品需要執行一抽取作業；其中，藉由該讀取單元，該可攜式電子裝置可透過讀取該第一身分訊息攜載單元的方式確認持有該操作人員身分卡之一操作人員是否具有執行該填充作業與該抽取作業的權限。 In order to achieve the above-mentioned main purpose of the present invention, the inventor of the present invention provides an embodiment of the fluid filling and extraction system, including: at least a first identity information carrying unit, which is arranged on at least one operator identity card ; At least one material information carrying unit is arranged on at least one material receptacle, and the material receptacle contains a specific material; at least one slot area information carrying unit is disposed on Above at least one tank control gate; at least one receiving tank information carrying unit is disposed above at least one fluid receiving tank, and the at least one fluid receiving tank is disposed behind the tank control gate. At least one fluid-receiving tank region; and at least one portable electronic device having a reading unit; wherein, by means of the reading unit, the portable electronic device can be carried by reading the material information. The method of loading the unit confirms whether or not the specific material contained in the material container needs to be subjected to a filling operation, so as to fill the specific material from the material container to a specific fluid containing tank area. With the specific of this fluid Slot; Wherein, with the reading unit, the portable electronic device can confirm whether the specific information contained in the fluid containing tank is read by reading the slot area carrying unit and the holding groove information carrying unit. The product needs to perform a extraction operation; wherein, with the reading unit, the portable electronic device can confirm whether an operator holding the identity card of the operator is reading the first identity information carrying unit. Has permission to execute the fill job and the extraction job.
於本發明之流體填充與抽取系統的實施例之中，係更包括：至少一第二身分訊息攜載單元，係設置於該料品容置器的至少一運送人員身分卡之上；至少一槽閥訊息攜載單元，係設置於至少一切換閥單元之上，且該切換閥單元係用以切換該流體容置槽之流體輸入與流體出入；至少一閥門保護裝置，係裝設於該至少一切換閥單元之上；以及一中央監控系統，係透過一收發裝置與該可攜式電子裝置溝通，並透過一控制裝置監視與控制該槽區管制門的門禁管理，並用以透過該控制裝置啟用或解除該閥門保護裝置的啟用與解除。 In an embodiment of the fluid filling and extraction system of the present invention, the system further includes: at least a second identity information carrying unit, which is disposed on at least one identity card of the transporter of the material container; at least one The tank valve information carrying unit is arranged on at least one switching valve unit, and the switching valve unit is used to switch the fluid input and fluid in and out of the fluid containing tank; at least one valve protection device is installed in the Above at least one switching valve unit; and a central monitoring system, which communicates with the portable electronic device through a transceiving device, and monitors and controls the access control management of the control gate of the slot area through a control device, and is used to pass through the control The device is enabled or disabled.
於本發明之流體填充與抽取系統的實施例之中，該特定料品為一化學流體(例如：化學液體或化學氣體)，該料品容置器為一化學品槽車，且該流體容置槽為一化學品容置槽或一化學廢品容置槽。 In an embodiment of the fluid filling and extraction system of the present invention, the specific material is a chemical fluid (for example, a chemical liquid or a chemical gas), the material container is a chemical tanker, and the fluid container The storage tank is a chemical storage tank or a chemical waste storage tank.
<本發明> <Invention>
21‧‧‧第一身分訊息攜載單元 21‧‧‧ First Identity Message Carrying Unit
81‧‧‧第二身分訊息攜載單元 81‧‧‧Second Identity Message Carrying Unit
31‧‧‧料品訊息攜載單元 31‧‧‧Material information carrying unit
41‧‧‧槽區訊息攜載單元 41‧‧‧Slot area information carrying unit
61‧‧‧容置槽訊息攜載單元 61‧‧‧Receiving slot information carrying unit
5‧‧‧可攜式電子裝置 5‧‧‧ Portable electronic device
CSRC‧‧‧中央監控系統 CSRC‧‧‧ Central Monitoring System
2‧‧‧操作人員身分卡 2‧‧‧ Operator ID Card
8‧‧‧運送人員身分卡 8‧‧‧ Transporter Identity Card
3‧‧‧料品容置器 3‧‧‧ material container
4‧‧‧槽區管制門 4‧‧‧Slot area control door
6‧‧‧流體容置槽 6‧‧‧ fluid holding tank
51‧‧‧讀取單元 51‧‧‧reading unit
R‧‧‧收發裝置 R‧‧‧ Transceiver
7‧‧‧控制裝置 7‧‧‧control device
10‧‧‧電子權杖單元 10‧‧‧ Electronic scepter unit
9‧‧‧切換閥單元 9‧‧‧ switching valve unit
91‧‧‧槽閥訊息攜載單元 91‧‧‧Slot valve information carrying unit
<習知> <Habitual knowledge>
無 no
圖1係顯示本發明之一種流體填充與抽取系統的第一實施例之架構圖；圖2係顯示可攜式電子裝置的立體圖；圖3A與圖3B係顯示執行流體填充作業之時該可攜式電子裝置的螢幕的正視圖；圖4A與圖4B係顯示執行流體抽取(回收)作業之時該可攜式電子裝置的螢幕的正視圖；圖5係顯示本發明之一種流體填充與抽取系統的第二實施例之架構圖；圖6A與圖6B係顯示執行流體填充作業之時該可攜式電子裝置的螢幕的正視圖；圖7係顯示本發明之一種流體填充與抽取系統的第三實施例之架構圖；以及圖8A與圖8B係顯示執行流體抽取(回收)作業之時該可攜式電子裝置的螢幕的正視圖。 FIG. 1 is a structural diagram showing a first embodiment of a fluid filling and extraction system according to the present invention; FIG. 2 is a perspective view showing a portable electronic device; 4A and 4B are front views of the screen of the portable electronic device when fluid extraction (recovery) operation is performed; and FIG. 5 is a fluid filling and extraction system of the present invention. FIG. 6A and FIG. 6B are front views showing a screen of the portable electronic device when performing a fluid filling operation; FIG. 7 is a third view showing a fluid filling and extraction system of the present invention 8A and 8B are front views of a screen of the portable electronic device when a fluid extraction (recovery) operation is performed.
為了能夠更清楚地描述本發明所提出之一種流體填充與抽取系統與方法，以下將配合圖式，詳盡說明本發明之較佳實施例。 In order to more clearly describe a fluid filling and extraction system and method provided by the present invention, the preferred embodiments of the present invention will be described in detail below with reference to the drawings.
半導體積體電路的製程會使用許多化學品，其通常為化學流體，包括：化學液體(或純液)與化學氣體。常見的化學品整理如下表(1)所示。 The manufacturing process of semiconductor integrated circuits uses many chemicals, which are usually chemical fluids, including: chemical liquids (or pure liquids) and chemical gases. Common chemical finishing is shown in Table (1) below.
本發明之流體填充與抽取系統即應用於管理這些化學品的填充與抽取(回收)。特別說明的是，所述“化學品填充”是指，令化學品槽車駛至指定的化學槽廠區，並將化學品補充至指定的大型化學品容置槽之中。所述“化學品抽取(回收)”是指，令化學品槽車駛至指定的化學槽廠區，並將化學品廢液或化學氣體自指定的大型化學廢品容置槽抽取而出(回收)。 The fluid filling and extraction system of the present invention is applied to manage the filling and extraction (recovery) of these chemicals. In particular, the “chemical filling” refers to driving a chemical tanker to a designated chemical tank factory area and replenishing chemicals into a designated large chemical tank. The “chemical extraction (recovery)” means that the chemical tank truck is driven to the designated chemical tank factory area, and the chemical waste liquid or chemical gas is extracted from the designated large chemical waste storage tank (recovered) .
第一實施例First embodiment
請參閱圖1，係顯示本發明之一種流體填充與抽取系統的第一實施例之架構圖。如圖1所示，本發明之流體填充與抽取系統係於架構組成上主要包括：至少一第一身分訊息攜載單元21、至少一第二身分訊息攜載單元81、至少一料品訊息攜載單元31、至少一槽區訊息攜載單元41、至少一容置槽訊息攜載單元61、至少一可攜式電子裝置5、與一中央監控系統CSRC。根據本發明之設計，該第一身分訊息攜載單元21係設置於一操作人員身分卡2之上，且該第二身分訊息攜載單元81係設置於該料品容置器3的至少一運送人員身分卡8之上，例如：化學品槽車的司機。可想而知，此處所稱料品容置器3即為如圖1所示的化學品槽車。補充說明的是，第一身分訊息攜載單元21用以攜載持有該操作人員身分卡2的一操作人員的基本資料，包括：姓名、工號、所屬單元、職級、與是否完成化學品之補充(填充)作業與廢液抽取(回收)作業的資格考(Qualify)。當然，完成資格考的操作人員才會被允許進行相關行操作。 Please refer to FIG. 1, which is a structural diagram showing a first embodiment of a fluid filling and extraction system according to the present invention. As shown in FIG. 1, the fluid filling and extraction system of the present invention is mainly composed of at least one first identity information carrying unit 21, at least one second identity information carrying unit 81, and at least one product information carrying unit. A carrying unit 31, at least one slot-information carrying unit 41, at least one accommodating slot-information carrying unit 61, at least one portable electronic device 5, and a central monitoring system CSRC. According to the design of the present invention, the first identity information carrying unit 21 is disposed on an operator identity card 2, and the second identity information carrying unit 81 is disposed on at least one of the material containers 3. Transporter's identity card 8 above, such as the driver of a chemical tanker. It can be imagined that the material container 3 referred to here is a chemical tanker as shown in FIG. 1. It is added that the first identity information carrying unit 21 is used to carry the basic information of an operator who holds the identity card 2 of the operator, including: name, work number, unit, rank, and whether the chemical is completed Qualification of supplementary (filling) operations and waste liquid extraction (recycling) operations. Of course, operators who have completed the qualification test will be allowed to perform related operations.
另一方面，該料品訊息攜載單元31被設置於化學品槽車(即，料品容置器3)之上，用以攜載該化學品槽車所運送的一特定料品之複數個基礎訊息，包括：品名(或料號)、批號、運送工具編號(即，化學品槽車之編號)、有效日期、與序號。舉例而言，所述品名可用以顯示該特定料品為化學液體或化學氣體。另一方面，由上表(1)可知積體電路製造廠(IC foundry)使用的化學液體與化學氣體的種類繁多，因此，本發明特別地以至少一槽區訊息攜載單元41設置於至少一槽區管制門4之上。可想而知，該槽區管制門4後方係規劃有至 少一流體容置槽區，且該流體容置槽區之中通常係依照化學品的種類所其應用製程而設置有不同的流體容置槽6。於本發明之中，又將至少一容置槽訊息攜載單元61設置於至少一流體容置槽6之上。 On the other hand, the material information carrying unit 31 is disposed on the chemical tanker (ie, the material container 3) for carrying a plurality of specific materials transported by the chemical tanker. A basic message, including: product name (or material number), batch number, shipping tool number (that is, the number of the chemical tank truck), expiration date, and serial number. For example, the product name can be used to indicate that the specific material is a chemical liquid or a chemical gas. On the other hand, from the above table (1), it can be seen that there are many types of chemical liquids and chemical gases used by IC foundry. Therefore, the present invention particularly provides at least one slot area information carrying unit 41 at least A slot area control gate 4 above. It is conceivable that there is a plan behind the control gate 4 in the trough area. There is one fluid-receiving tank region, and the fluid-receiving tank region is usually provided with different fluid-receiving tanks 6 according to the application process of the type of chemical. In the present invention, at least one receiving tank information carrying unit 61 is disposed on at least one fluid receiving tank 6.
由上述說明可知，單位“至少一”係用以表示所述五種訊息攜載單元(21,81,31,41,61)的數量為一個或多個。換句話說，這五種訊息攜載單元(21,81,31,41,61)的數量的確實數量係決定於該操作人員身分卡2、該運送人員身分卡8、該料品容置器3(即，化學品槽車)、該槽區管制門4、與該流體容置槽6的數量。另一方面，該可攜式電子裝置5係具有一讀取單元51。藉由該讀取單元51，該可攜式電子裝置5可透過讀取該料品訊息攜載單元31的方式確認是否該料品容置器3所容置的該特定料品需要被執行一填充作業，以將該特定料品自該料品容置器3填充至特定的該流體容置槽區與特定的該流體容置槽6。此外，藉由該讀取單元51，該可攜式電子裝置5可透過讀取該槽區訊息攜載單元41與該容置槽訊息攜載單元61的方式確認是否該流體容置槽6所容置的該特定料品需要執行一抽取作業。當然，在執行化學品的填充作業或抽取(回收)作業之前，必須先以可攜式電子裝置5可透過讀取該第一身分訊息攜載單元21的方式，加以確認持有該操作人員身分卡2之操作人員是否具有執行該填充作業與該抽取作業的權限。 It can be known from the above description that the unit "at least one" is used to indicate that the number of the five types of information carrying units (21, 81, 31, 41, 61) is one or more. In other words, the exact number of the five types of information carrying units (21, 81, 31, 41, 61) is determined by the identity card of the operator 2, the identity card of the transporter 8, and the material container 3 (that is, a chemical tanker), the tank area control door 4, and the number of the fluid containing tank 6. On the other hand, the portable electronic device 5 has a reading unit 51. With the reading unit 51, the portable electronic device 5 can confirm whether the specific material contained in the material container 3 needs to be executed by reading the material information carrying unit 31. The filling operation is performed to fill the specific material from the material container 3 to the specific fluid containing groove area and the specific fluid containing groove 6. In addition, with the reading unit 51, the portable electronic device 5 can confirm whether the fluid containing tank 6 is read by reading the slot area information carrying unit 41 and the holding groove information carrying unit 61. The contained specific material needs to perform a extraction operation. Of course, before performing the chemical filling operation or extraction (recycling) operation, the portable electronic device 5 must first be confirmed to hold the identity of the operator in such a manner that the first identity information carrying unit 21 can be read. Does the operator of card 2 have the authority to execute the filling operation and the extraction operation?
並且，如圖1所示，可攜式電子裝置5係透過一收發裝置R而與一中央監控系統CSRC相互溝通，收發裝置R與可攜式電子裝置5間的通訊協定可以是無線通訊網路，包含WIFI、3G、4G、藍芽、 Zigbee等，收發裝置R與中央監控系統CSRC間的通訊協定可以是無線通訊網路或有線通訊網路，其中無線通訊網路包含WIFI、3G、4G、藍芽、Zigbee等。且該中央監控系統CSRC則透過一控制裝置7監視與控制該槽區管制門4的門禁管理，藉以防止廠務人員、操作人員、或化學品槽車之司機(亦即，化學品運送人員)恣意地開啟槽區管制門4，其中控制裝置7包含可編程式控制裝置(Programmable logic controller,PLC)或直接數位控制器(Direct Digital Controller,DDC)或對象鏈接與嵌入裝置(Object Linking and Embedding,OLE)或用於流程控制的OLE裝置(OLE for Process Control,OPC)其中之一。可想而知，在完成該槽區訊息攜載單元41與該料品訊息攜載單元31的讀取之後，可攜式電子裝置5便可自該中央監控系統CSRC得知該化學品槽車(亦即，料品容置器3)所運送的特定料品與設置在該槽區管制門4後方的流體容置槽6所容置的化學品是否皆屬相同的化學流體或化學氣體。可以推知的，在完成上述確認之後，化學品的運送人員與積體電路製造廠的操作人員才會被允許開始進行下一步的化學品填充作業的後續程序。這樣的確認方式是為了防止運送人員與操作人員將槽車所運送化學品誤填充至錯誤的流體容置槽6之中。 Moreover, as shown in FIG. 1, the portable electronic device 5 communicates with a central monitoring system CSRC through a transceiver R. The communication protocol between the transceiver R and the portable electronic device 5 may be a wireless communication network. Including WIFI, 3G, 4G, Bluetooth, Zigbee, etc. The communication protocol between the transceiver R and the central monitoring system CSRC can be a wireless communication network or a wired communication network. The wireless communication network includes WIFI, 3G, 4G, Bluetooth, Zigbee, and so on. And the central monitoring system CSRC monitors and controls the access control management of the tank control door 4 through a control device 7 to prevent factory personnel, operators, or drivers of chemical tank trucks (that is, chemical transport personnel). The slot control gate 4 is opened intentionally, wherein the control device 7 includes a programmable logic controller (PLC) or a direct digital controller (DDC) or an object linking and embedding device (Object Linking and Embedding, OLE) or OLE for Process Control (OPC). It is conceivable that after the reading of the tank area information carrying unit 41 and the material information carrying unit 31 is completed, the portable electronic device 5 can learn the chemical tanker from the central monitoring system CSRC (That is, the material container 3) whether the specific material conveyed and the chemicals contained in the fluid containing tank 6 disposed behind the tank area control door 4 belong to the same chemical fluid or chemical gas. It can be inferred that after the above confirmation is completed, the chemical delivery personnel and the operator of the integrated circuit manufacturing plant will be allowed to start the subsequent procedures of the next chemical filling operation. Such a confirmation method is to prevent the transporter and the operator from filling the chemical transported by the tank truck into the wrong fluid containing tank 6 by mistake.
值得特別說明的是，雖然圖1係顯示該第一身分訊息攜載單元21、該第二身分訊息攜載單元81、該料品訊息攜載單元31、該槽區訊息攜載單元41、與該容置槽訊息攜載單元61皆為一維條碼(1D barcode)，然而不應以此限制所述訊息攜載單元(21,31,41,61)的 實施態樣。於實際應用本發明之時，該第一身分訊息攜載單元21、該第二身分訊息攜載單元81、該料品訊息攜載單元31、該槽區訊息攜載單元41、與該容置槽訊息攜載單元61可為下列任一者：圖形、文字、字母、數字、一維條碼(1D barcode)、二維條碼(2D barcode)、漢信碼(Chinese-sensible code)、QR碼、矩陣條碼(Maxicode)、RFID標籤、NFC標籤、上述任兩者之組合、或上述任兩者以上之組合。以一維條碼(1D barcode)為例，該料品訊息攜載單元31可利用Code 39條碼產生器製作，並使其攜載該料品容置器3所盛裝的該特定料品之品名(料號)、批號、有效日期、與序號。值得特別說明的是，為了利於可攜式電子裝置5對於品名(料號)、批號、運送工具編號、有效日期、與序號之清楚讀取，製作料品訊息攜載單元31的一維條碼之時，必須於相鄰兩個基礎訊息之間係***有一訊息分隔符號(Central seperating character)，例如：%、$、/、~、!、@、#、^、&、*、(、)、-、_、|、{、}、?、<、>、\、[、]或+。 It is worth noting that although FIG. 1 shows the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, the slot information carrying unit 41, and The receiving slot information carrying units 61 are all 1D barcodes. However, the information carrying units (21, 31, 41, 61) should not be restricted in this way. Implementation style. When the present invention is actually applied, the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, the slot information carrying unit 41, and the accommodation The slot information carrying unit 61 may be any of the following: graphics, text, letters, numbers, 1D barcode, 2D barcode, Chinese-sensible code, QR code, Matrix barcode (Maxicode), RFID tag, NFC tag, any combination of the two, or any combination of two or more. Taking a 1D barcode as an example, the material information carrying unit 31 can be produced by using a Code 39 barcode generator and cause it to carry the product name of the specific material contained in the material container 3 ( Part number), batch number, expiration date, and serial number. It is worth noting that in order to facilitate the portable electronic device 5 to clearly read the product name (material number), batch number, shipping tool number, expiration date, and serial number, the one-dimensional bar code of the material information carrying unit 31 is produced. , A central seperating character must be inserted between two adjacent basic messages, such as:%, $, /, ~,!, @, #, ^, &, *, (,), -, _, |, {,},?, <,>, \, [,], Or +.
可想而知，對應於不同實施態樣的訊息攜載單元(21,81,31,41,61)，可攜式電子裝置5的讀取單元51可為下列任一者：RFID標籤讀取器、NFC標籤讀取器、影像辨識器、一維條碼讀取器、二維條碼讀取器、漢信碼讀取器、QR碼讀取器、矩陣條碼讀取器、或影像擷取器。若可攜式電子裝置5為智慧型手機、個人數位助理、筆記型電腦、平板電腦、智慧眼鏡、或智慧手錶，則可直接以可攜式電子裝置5內建的影像擷取模組作為該讀取單元51；如此，於該可攜式電子裝置5安裝一影像(或條碼)辨識軟體之後，便能夠藉由配合使用該讀 取單元51與該影像辨識單元的方式，令可攜式電子裝置5完成該第一身分訊息攜載單元21、該第二身分訊息攜載單元81、該料品訊息攜載單元31、該槽區訊息攜載單元41、與/或該容置槽訊息攜載單元61之讀取。然而，有鑑於大部分的積體電路製造廠皆禁止於廠內使用任何類型的智慧型電子裝置，搭載有條碼掃描器(即，讀取單元51)的個人數位助理(Digital personal assistant,PDA)便成為所述可攜式電子裝置5的最佳實施態樣。 It is conceivable that corresponding to the information carrying units (21, 81, 31, 41, 61) of different implementation aspects, the reading unit 51 of the portable electronic device 5 may be any of the following: RFID tag reading Reader, NFC tag reader, image recognizer, one-dimensional barcode reader, two-dimensional barcode reader, Hanxin code reader, QR code reader, matrix barcode reader, or image capture device . If the portable electronic device 5 is a smart phone, a personal digital assistant, a notebook computer, a tablet computer, smart glasses, or a smart watch, the image capture module built in the portable electronic device 5 can be used as the Reading unit 51; In this way, after installing an image (or bar code) identification software on the portable electronic device 5, the reading can be used in conjunction with The manner of taking the unit 51 and the image recognition unit enables the portable electronic device 5 to complete the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, and the slot. The area information carrying unit 41 and / or the receiving slot information carrying unit 61 are read. However, in view of the fact that most integrated circuit manufacturers prohibit the use of any type of smart electronic device in the factory, a digital personal assistant (PDA) equipped with a barcode scanner (ie, the reading unit 51) It becomes the best embodiment of the portable electronic device 5.
繼續地參閱圖1，並請同時參閱圖2，係顯示可攜式電子裝置的立體圖。值得注意的是，雖然可攜式電子裝置5可以透過讀取第一身分訊息攜載單元21的方式確認持有該操作人員身分卡2之操作人員是否具有進行化學品之填充作業與抽取作業之操作權限，但是考慮到低職級的操作人員有可能借用高職級的廠長或工程師的操作人員身分卡2而妄加恣意地進行相關操作，本發明又於流體填充與抽取系統之中增設所謂的電子權杖單元(Electronic token unit)10。如圖2所示，該電子權杖單元10之中係儲存有一次性認證碼(One-time password,OTP)。特別地，於該可攜式電子裝置5完成該第一身分訊息攜載單元21的讀取之後，中央監控系統CSRC可透過可攜式電子裝置5要求操作人員提供與電子權杖單元10；之後，可攜式電子裝置5可透過存取所述一次性認證碼的方式，重複確認持有該操作人員身分卡2之該操作人員是否具有進行化學品之填充作業與抽取作業之操作權限，避免高職級的廠長或工程師的操作人員身分卡2被拿來妄加恣意地進行相關操作。本發明並不限制電子權杖單元10的實施 態樣，如圖2所示，電子權杖單元10可以是：藍牙電子裝置、USB電子裝置、NFC標籤、或RFID標籤。並且，在可攜式電子裝置5自該電子權杖單元10之中完成所述一次性認證碼的存取之後，可攜式電子裝置5內部的一權杖碼產生單元(未圖示)會重新生成一組一次性認證碼，並寫入該電子權杖單元10之中，藉此方式提高第一機台4與第二機台6的操作權限。 Continue to refer to FIG. 1 and also refer to FIG. 2, which are perspective views showing the portable electronic device. It is worth noting that although the portable electronic device 5 can read the first identity information carrying unit 21 to confirm whether the operator holding the operator's identity card 2 has the ability to perform chemical filling operations and extraction operations. Operational authority, but considering that lower-level operators may borrow higher-level factory directors or engineers ’operator ID cards 2 to perform related operations arbitrarily, the present invention adds a so-called Electronic token unit (Electronic token unit) 10. As shown in FIG. 2, the electronic token unit 10 stores a one-time password (OTP). Specifically, after the portable electronic device 5 finishes reading the first identity information carrying unit 21, the central monitoring system CSRC can request the operator to provide the electronic token unit 10 through the portable electronic device 5; The portable electronic device 5 can repeatedly confirm whether the operator holding the identity card 2 of the operator has the operation authority for filling and extraction of chemicals by accessing the one-time authentication code to avoid The operator ID card 2 of the director or engineer of the vocational level is used to perform relevant operations in a deliberate manner. The invention does not limit the implementation of the electronic token unit 10 As shown in FIG. 2, the electronic token unit 10 may be a Bluetooth electronic device, a USB electronic device, an NFC tag, or an RFID tag. In addition, after the portable electronic device 5 completes the one-time authentication code access from the electronic token unit 10, a token code generating unit (not shown) inside the portable electronic device 5 will A set of one-time authentication codes are generated again and written into the electronic token unit 10, thereby increasing the operation authority of the first machine 4 and the second machine 6.
如此，上述說明係已完整、清楚地介紹說明本發明之一種流體填充與抽取系統。接著，下文將繼續介紹說明本發明之一種流體填充與抽取系統之作業流程。請重複參閱圖1，並請同時參閱圖3A與圖3B，係顯示執行流體填充作業之時該可攜式電子裝置的螢幕的正視圖。如圖1與圖3A所示，執行流體填充作業時，係首先將至少一第一身分訊息攜載單元21設置於至少一操作人員身分卡2之上，將至少一第二身分訊息攜載單元81設置於至少一運送人員身分卡8之上，將至少一料品訊息攜載單元31設置於至少一料品容置器3之上，將至少一槽區訊息攜載單元41設置於至少一槽區管制門4之上，並將至少一容置槽訊息攜載單元61設置於至少一流體容置槽6之上；其中，該料品容置器3容置有一特定化學品(例如：化學液體或化學氣體)，該流體容置槽6則用以容置儲放該化學品，且該料品容置器3為運送該化學品的化學品槽車。 Thus, the above description has completely and clearly introduced a fluid filling and extraction system of the present invention. Next, the operation flow of a fluid filling and extraction system of the present invention will be described in the following. Please refer to FIG. 1 repeatedly, and also refer to FIG. 3A and FIG. 3B together, which are front views showing the screen of the portable electronic device when performing the fluid filling operation. As shown in FIGS. 1 and 3A, when performing a fluid filling operation, at least one first identity information carrying unit 21 is first set on at least one operator identity card 2, and at least one second identity information carrying unit is set. 81 is disposed on at least one transporter's identity card 8, at least one material information carrying unit 31 is disposed on at least one material receptacle 3, and at least one slot information carrying unit 41 is disposed on at least one Above the tank area control door 4, at least one receiving tank information carrying unit 61 is disposed above at least one fluid receiving tank 6, wherein the material container 3 contains a specific chemical (for example: Chemical liquid or chemical gas), the fluid containing tank 6 is used for containing and storing the chemical, and the material container 3 is a chemical tank truck for transporting the chemical.
進一步地，係提供至少一可攜式電子裝置5，且該可攜式電子裝置5具有一讀取單元51(例如：條碼掃描器)。於流體填充作業的實 際操作流程上，如圖3A的(a)圖所示，需要透過該可攜式電子裝置5選擇執行一流體填充作業。接著，如圖3A的(b)圖所示，若化學品槽車所運送的化學品為化學流體(或純液)，則操作人員必須進一步地於該可攜式電子裝置5的一操作介面上選擇“化學液體槽車”。繼續地，如圖3A的(c)圖所示，操作人員必須進一步地於該可攜式電子裝置5的一操作介面上選擇“填充作業開始”，這個動作係透過可攜式電子裝置5通知後方的中央監控系統CSRC，令其監控人員確知目前在特定的槽區管制門4處以準備開始進行流體填充作業。 Further, at least one portable electronic device 5 is provided, and the portable electronic device 5 has a reading unit 51 (for example, a barcode scanner). For fluid filling operations In the international operation process, as shown in (a) of FIG. 3A, a fluid filling operation needs to be selected and executed through the portable electronic device 5. Next, as shown in (b) of FIG. 3A, if the chemical transported by the chemical tanker is a chemical fluid (or pure liquid), the operator must further operate an operation interface of the portable electronic device 5. Select "Chemical Liquid Tanker". Continuing, as shown in (c) of FIG. 3A, the operator must further select “start of filling operation” on an operation interface of the portable electronic device 5, and this action is notified through the portable electronic device 5 The rear central monitoring system, CSRC, allows its monitoring personnel to know that it is currently at a specific tank area control gate 4 in preparation for the fluid filling operation.
將化學品補充至指定的大型化學品容置槽以前，如圖3A的(d)圖所示，必須先以可攜式電子裝置5讀取該第一身分訊息攜載單元21、該第二身分訊息攜載單元81、該料品訊息攜載單元31、與該槽區訊息攜載單元41，以確知操作人員條碼、駕駛條碼、槽車條碼及料品條碼、與槽區條碼。繼續地，如圖3B的(a)圖所示，中央監控系統CSRC係該可攜式電子裝置5要求操作人員輸入欲進行填充作業之化學品的基本資訊。此基本資訊的輸入可以藉由該可攜式電子裝置5讀取該料品訊息攜載單元31的方式快速完成。同時，如圖3B的(b)圖所示，操作人員還須以可攜式電子裝置5讀取該第一身分訊息攜載單元21、該第二身分訊息攜載單元81、該槽區訊息攜載單元41、與該容置槽訊息攜載單元61，以令後端的中央監控系統CSRC可以重複確認執行化學填充作業的操作人員與運送人員之資本資料。同時，中央監控系統CSRC也可以重複確認欲進行化學填充作業的化學品 (即，化學品槽車所運送的特定料品)、流體容置槽6與該流體容置槽6所屬的流體容置槽區。 Before replenishing chemicals to the designated large chemical storage tank, as shown in FIG. 3A (d), the first identity information carrying unit 21 and the second must be read by a portable electronic device 5 The identity information carrying unit 81, the material information carrying unit 31, and the slot information carrying unit 41 are used to determine the operator's barcode, driving barcode, tank truck barcode and material barcode, and slot barcode. Continuing, as shown in (a) of FIG. 3B, the central monitoring system CSRC is that the portable electronic device 5 requires the operator to enter basic information of chemicals to be filled. The input of this basic information can be completed quickly by the portable electronic device 5 reading the material information carrying unit 31. At the same time, as shown in FIG. 3B (b), the operator must also read the first identity information carrying unit 21, the second identity information carrying unit 81, and the slot information with the portable electronic device 5. The carrying unit 41 and the accommodating tank information carrying unit 61 enable the central monitoring system CSRC at the back end to repeatedly confirm the capital information of the operators and transporters who perform chemical filling operations. At the same time, the central monitoring system CSRC can also repeatedly confirm the chemicals to be chemically filled. (That is, the specific material transported by the chemical tanker), the fluid containing tank 6 and the fluid containing tank area to which the fluid containing tank 6 belongs.
在完成操作人員、運送人員、化學品槽車所運送的特定料品、流體容置槽區、與流體容置槽6的重複確認之後，後端的中央監控系統CSRC會打開該槽區管制門4之門鎖，令操作人員與運送人員可以著手將化學品槽車駛至指定的化學槽廠區，並將化學品補充至指定的大型化學品容置槽之中，完成化學品的填充作業。之後，如圖3B的(c)圖所示，在透過該可攜式電子裝置5選擇一填充作業結束之選項後，系統會再要求操作人員重複以可攜式電子裝置5讀取該第一身分訊息攜載單元21、該第二身分訊息攜載單元81、該料品訊息攜載單元31、與該槽區訊息攜載單元41(如圖3B的(d)圖所示)。如此，後端的中央監控系統CSRC便可得知所述化學品填充作業已經完成，進而啟用該槽區管制門4之門鎖。 After completing the confirmation of the operators, transporters, specific materials transported by the chemical tanker, the fluid storage tank area, and the fluid storage tank 6, the rear-end central monitoring system CSRC will open the tank area control door 4 The door lock allows the operator and the transporter to proceed to the chemical tank truck to the designated chemical tank factory area, and replenish the chemicals into the designated large chemical storage tank to complete the chemical filling operation. After that, as shown in (c) of FIG. 3B, after selecting an option to complete the filling operation through the portable electronic device 5, the system will again ask the operator to repeatedly read the first with the portable electronic device 5. The identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, and the slot information carrying unit 41 (as shown in (d) of FIG. 3B). In this way, the central monitoring system CSRC at the back end can know that the chemical filling operation has been completed, and then activate the door lock of the tank area control door 4.
請再重複參閱圖1，並請同時參閱圖4A與圖4B，係顯示執行流體填充抽取(回收)作業之時該可攜式電子裝置的螢幕的正視圖。於流體抽取作業的實際操作流程上，如圖4A的(a)圖所示，需要透過該可攜式電子裝置5選擇執行一流體抽取作業。接著，如圖4A的(b)圖所示，若欲進行抽取作業之化學流體為化學廢液，則操作人員必須進一步地於該可攜式電子裝置5的一操作介面上選擇“化學廢液槽車”。繼續地，如圖4A的(c)圖所示，操作人員必須進一步地於該可攜式電子裝置5的一操作介面上選擇“抽取作業開始”，這個動作係透 過可攜式電子裝置5通知後方的中央監控系統CSRC，令其監控人員確知目前在特定的槽區管制門4處以準備開始進行流體抽取作業。 Please refer to FIG. 1 again, and refer to FIG. 4A and FIG. 4B at the same time, which are front views showing the screen of the portable electronic device when the fluid filling extraction (recovery) operation is performed. On the actual operation flow of the fluid extraction operation, as shown in (a) of FIG. 4A, a fluid extraction operation needs to be selected and executed through the portable electronic device 5. Next, as shown in FIG. 4A (b), if the chemical fluid to be extracted is a chemical waste liquid, the operator must further select "chemical waste liquid" on an operation interface of the portable electronic device 5. Tanker. " Continuing, as shown in (c) of FIG. 4A, the operator must further select "Start of extraction operation" on an operation interface of the portable electronic device 5, this action is transparent The central monitoring system CSRC at the rear is notified via the portable electronic device 5 so that its monitoring staff knows that it is currently at the specific tank control gate 4 to prepare for the fluid extraction operation.
將化學廢液槽車移動至指定的大型化學品容置槽以前，如圖4A的(d)圖所示，必須先以可攜式電子裝置5讀取該第一身分訊息攜載單元21、該第二身分訊息攜載單元81、該料品訊息攜載單元31、與該槽區訊息攜載單元41，以確知操作人員條碼、駕駛條碼、槽車條碼及料品條碼、與槽區條碼。繼續地，後端的中央監控系統CSRC會打開該槽區管制門4之門鎖，令操作人員與運送人員可以著手將化學品槽車駛至指定的化學槽廠區，並將化學廢液自(化學廢液)流體容置槽6之中抽出，並灌充至化學廢液朝槽車之內。完成化學品的填充作業之後，如圖4B的(a)圖所示，操作人員必須透過該可攜式電子裝置5選擇一抽取作業結束之選項；之後，如圖4B的(b)圖所示，系統會再要求操作人員重複以可攜式電子裝置5讀取該第一身分訊息攜載單元21、該第二身分訊息攜載單元81、該料品訊息攜載單元31、與該槽區訊息攜載單元41。之後，後端的中央監控系統CSRC便可得知所述化學品填充作業已經完成，進而啟用該槽區管制門4之門鎖。 Before moving the chemical waste liquid tank truck to the designated large chemical storage tank, as shown in FIG. 4A (d), the portable electronic device 5 must first read the first identity information carrying unit 21, The second identity information carrying unit 81, the material information carrying unit 31, and the slot information carrying unit 41 to determine the operator's barcode, driving barcode, tank truck barcode and material barcode, and slot barcode . Continuing, the central monitoring system CSRC at the back will open the lock of the tank control gate 4 so that operators and transporters can proceed to drive the chemical tank truck to the designated chemical tank plant area, The waste liquid) fluid containing tank 6 is drawn out and filled with the chemical waste liquid toward the tank truck. After the chemical filling operation is completed, as shown in FIG. 4B (a), the operator must select an option to end the extraction operation through the portable electronic device 5. After that, as shown in FIG. 4B (b) , The system will again ask the operator to repeatedly read the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, and the slot area with the portable electronic device 5. Message carrying unit 41. After that, the central monitoring system CSRC at the back can learn that the chemical filling operation has been completed, and then activate the door lock of the tank area control door 4.
第二實施例Second embodiment
顯然地，圖1、圖3A、圖3B、與上述說明係描述了如何使用本發明之流體填充與抽取系統完成化學液體之填充作業與抽取(回收)作業。繼續地，下文將繼續描述如何使用本發明之流體填充與抽取系統完成化學氣體之填充作業。請參閱圖5，係顯示本發明之一種 流體填充與抽取系統的第二實施例之架構圖。特別說明的是，於第二實施例之中，該中央監控系統CSRC除了透過控制裝置7監視與控制該槽區管制門4的門禁管理之外，還同時透過該控制裝置7啟用或解除一閥門保護裝置AD的啟用與解除。所述閥門保護裝置AD被業界稱為Auto guard，用以防止氣體閥門在未經中央監控系統CSRC的核准下被任意打開。主要原因在於，半導體製程所使用的化學氣體，例如：NH3或SiH4，因此，執行化學氣體的填充作業或抽取作業，都必須在中央監控系統CSRC解除閥門保護裝置AD之後，始得以開始進行。 Obviously, FIG. 1, FIG. 3A, FIG. 3B, and the above description describe how to use the fluid filling and extraction system of the present invention to complete the filling and extraction (recovery) operations of chemical liquids. Continuing, the following will continue to describe how to use the fluid filling and extraction system of the present invention to complete a chemical gas filling operation. Please refer to FIG. 5, which is a structural diagram showing a second embodiment of a fluid filling and extraction system according to the present invention. In particular, in the second embodiment, the central monitoring system CSRC not only monitors and controls the access control of the slot control door 4 through the control device 7, but also activates or deactivates a valve through the control device 7 at the same time. Activation and deactivation of the protective device AD. The valve protection device AD is called Auto guard in the industry to prevent the gas valve from being opened arbitrarily without the approval of the central monitoring system CSRC. The main reason is that the chemical gas used in the semiconductor manufacturing process, such as NH 3 or SiH 4. Therefore, the filling or extraction of chemical gas must be started after the central monitoring system CSRC releases the valve protection device AD. .
請重複參閱圖5，並請同時參閱圖6A與圖6B，係顯示執行流體填充作業之時該可攜式電子裝置的螢幕的正視圖。此處進行流體填充作業之特定料品係為化學氣體。於(化學氣體)流體填充作業的實際操作流程上，如圖6A的(a)圖所示，需要透過該可攜式電子裝置5選擇執行一流體填充作業。接著，如圖6A的(b)圖所示，由於化學品槽車所運送的化學品為化學氣體，因此操作人員必須進一步地於該可攜式電子裝置5的一操作介面上選擇“化學氣體槽車”。繼續地，如圖6A的(c)圖所示，操作人員必須進一步地於該可攜式電子裝置5的一操作介面上選擇“填充作業開始”，這個動作係透過可攜式電子裝置5通知後方的中央監控系統CSRC，令其監控人員確知目前在特定的槽區管制門4處以準備開始進行流體填充作業。 Please refer to FIG. 5 repeatedly, and refer to FIG. 6A and FIG. 6B at the same time, which are front views showing the screen of the portable electronic device when performing the fluid filling operation. The specific material used for the fluid filling operation here is chemical gas. On the actual operation flow of the (chemical gas) fluid filling operation, as shown in (a) of FIG. 6A, a fluid filling operation needs to be selected and executed through the portable electronic device 5. Next, as shown in FIG. 6A (b), since the chemical transported by the chemical tank truck is a chemical gas, the operator must further select “chemical gas” on an operation interface of the portable electronic device 5. Tanker. " Continuing, as shown in (c) of FIG. 6A, the operator must further select “start of filling operation” on an operation interface of the portable electronic device 5, and this action is notified through the portable electronic device 5 The rear central monitoring system, CSRC, allows its monitoring personnel to know that it is currently at a specific tank area control gate 4 in preparation for the fluid filling operation.
將化學氣體灌充至指定的大型化學品容置槽以前，如圖6A的(d)圖所示，必須先以可攜式電子裝置5讀取該第一身分訊息攜載單 元21、該第二身分訊息攜載單元81、該料品訊息攜載單元31、與該槽區訊息攜載單元41，以確知操作人員條碼、駕駛條碼、槽車條碼及料品條碼、與槽區條碼。後端的中央監控系統CSRC在確認執行化學填充作業的操作人員與運送人員之資本資料無誤之後，便會打開該槽區管制門4，令操作人員與運送人員可以著手將化學品槽車駛至指定的化學槽廠區。進一步地，在後端的中央監控系統CSRC解除該閥門保護裝置AD(Auto guard)之後，操作人員與運送人員便可以開始將化學氣體灌充至指定的大型化學品容置槽之中，完成化學品的填充作業。之後，如圖6B的(a)圖與(b)圖所示，在透過該可攜式電子裝置5選擇一填充作業結束之選項後，系統會再要求操作人員重複以可攜式電子裝置5讀取該第一身分訊息攜載單元21、該第二身分訊息攜載單元81、該料品訊息攜載單元31、與該槽區訊息攜載單元41。如此，後端的中央監控系統CSRC便可得知所述化學品填充作業已經完成，進而啟用該閥門保護裝置AD(Auto guard)與槽區管制門4之門鎖。 Before filling the chemical gas into the designated large-scale chemical storage tank, as shown in FIG. 6A (d), the portable electronic device 5 must first read the first identity information carrying list Yuan 21, the second identity information carrying unit 81, the material information carrying unit 31, and the slot information carrying unit 41 to determine the operator's barcode, driving barcode, tanker barcode, and material barcode, and Slot area barcode. After the central monitoring system CSRC at the back end confirms that the capital information of the operators and transporters performing chemical filling operations is correct, it will open the tank control door 4 so that operators and transporters can proceed to drive the chemical tanker to the designated Chemical tank plant area. Further, after the central monitoring system CSRC at the back end releases the valve protection device AD (Auto guard), operators and transport personnel can start filling chemical gas into designated large chemical storage tanks to complete the chemical Fill job. After that, as shown in (a) and (b) of FIG. 6B, after selecting an option to end the filling operation through the portable electronic device 5, the system will ask the operator to repeat Read the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, and the slot information carrying unit 41. In this way, the central monitoring system CSRC at the back end can know that the chemical filling operation has been completed, and then activate the valve guard AD (Auto guard) and the door lock of the tank area control door 4.
第三實施例Third embodiment
顯然地，圖5、圖6A、圖6B、與上述說明係描述了如何使用本發明之流體填充與抽取系統完成化學氣體之填充作業。繼續地，下文將繼續描述如何使用本發明之流體填充與抽取系統完成化學氣體之抽取(回收)作業。請參閱圖7，係顯示本發明之一種流體填充與抽取系統的第三實施例之架構圖。特別說明的是，於第三實施例之 中，至少一槽閥訊息攜載單元91同時被設置於至少一切換閥單元9之上，且該切換閥單元9係用以切換該流體容置槽6之流體輸入與流體出入。同時，該中央監控系統CSRC除了透過控制裝置7監視與控制該槽區管制門4的門禁管理之外，還同時透過該控制裝置7啟用或解除一閥門保護裝置AD的啟用與解除。 Obviously, FIG. 5, FIG. 6A, FIG. 6B, and the above description describe how to use the fluid filling and extraction system of the present invention to complete the filling operation of chemical gas. Continuing, the following will continue to describe how to use the fluid filling and extraction system of the present invention to complete the extraction (recovery) of chemical gas. Please refer to FIG. 7, which is a structural diagram showing a third embodiment of a fluid filling and extraction system according to the present invention. In particular, in the third embodiment In the embodiment, at least one tank valve information carrying unit 91 is disposed on at least one switching valve unit 9 at the same time, and the switching valve unit 9 is used to switch the fluid input and the fluid in and out of the fluid containing tank 6. At the same time, the central monitoring system CSRC not only monitors and controls the access control management of the slot control door 4 through the control device 7, but also enables or disables the activation and deactivation of a valve protection device AD through the control device 7.
請再重複參閱圖7，並請同時參閱圖8A與圖8B，係顯示執行流體填充抽取(回收)作業之時該可攜式電子裝置的螢幕的正視圖。於(化學氣體)流體抽取作業的實際操作流程上，如圖8A的(a)圖所示，需要透過該可攜式電子裝置5選擇執行一流體抽取作業。接著，如圖8A的(b)圖所示，若欲進行抽取作業之化學品為化學氣體，則操作人員必須進一步地於該可攜式電子裝置5的一操作介面上選擇“化學氣體槽車”。繼續地，如圖8A的(c)圖所示，操作人員必須進一步地於該可攜式電子裝置5的一操作介面上選擇“抽取作業開始”，這個動作係透過可攜式電子裝置5通知後方的中央監控系統CSRC，令其監控人員確知目前在特定的槽區管制門4處以準備開始進行流體抽取作業。 Please refer to FIG. 7 again, and refer to FIG. 8A and FIG. 8B together, which are front views showing the screen of the portable electronic device when the fluid filling extraction (recovery) operation is performed. On the actual operation flow of the (chemical gas) fluid extraction operation, as shown in (a) of FIG. 8A, a fluid extraction operation needs to be selected and executed through the portable electronic device 5. Next, as shown in FIG. 8A (b), if the chemical to be extracted is a chemical gas, the operator must further select a “chemical gas tank truck” on an operation interface of the portable electronic device 5. ". Continuing, as shown in (c) of FIG. 8A, the operator must further select “start of extraction operation” on an operation interface of the portable electronic device 5, and this action is notified through the portable electronic device 5 The rear central monitoring system, CSRC, allows its monitoring staff to know that it is currently at the specific tank control gate 4 in preparation for fluid extraction.
將化學氣體槽車移動至指定的大型化學品容置槽以前，如圖8A的(d)圖所示，必須先以可攜式電子裝置5讀取該第一身分訊息攜載單元21、該第二身分訊息攜載單元81、該料品訊息攜載單元31、與該槽區訊息攜載單元41，以確知操作人員條碼、駕駛條碼、槽車條碼及料品條碼、與槽區條碼。後端的中央監控系統CSRC在確認執行化學品抽取作業的操作人員與運送人員之資本資料無誤之後，便 會打開該槽區管制門4，令操作人員與運送人員可以著手將化學氣體槽車駛至指定的化學槽廠區。進一步地，在後端的中央監控系統CSRC解除該閥門保護裝置AD(Auto guard)之後，操作人員與運送人員便可以開始將流體容置槽6內的化學氣體抽出，進而灌充至化學氣體槽車之中。完成化學品的抽取(回收)作業之後，如圖8B的(a)圖與(b)圖所示，在透過該可攜式電子裝置5選擇一填充作業結束之選項後，系統會再要求操作人員重複以可攜式電子裝置5讀取該第一身分訊息攜載單元21、該第二身分訊息攜載單元81、該料品訊息攜載單元31、與該槽區訊息攜載單元41。如此，後端的中央監控系統CSRC便可得知所述化學品填充作業已經完成，進而啟用該閥門保護裝置AD(Auto guard)與槽區管制門4之門鎖。 Before moving the chemical gas tanker to the designated large chemical storage tank, as shown in FIG. 8A (d), the first identity information carrying unit 21, the The second identity information carrying unit 81, the material information carrying unit 31, and the slot information carrying unit 41 are used to determine the operator's barcode, driving barcode, tank truck barcode and material barcode, and slot barcode. After the back-end central monitoring system CSRC confirms that the capital information of the operators and delivery personnel performing the chemical extraction operation is correct, The tank area control door 4 will be opened so that operators and transport personnel can proceed to drive the chemical gas tanker to the designated chemical tank plant area. Further, after the central monitoring system CSRC at the back end releases the valve protection device AD (Auto guard), the operator and the transporter can start to extract the chemical gas in the fluid storage tank 6, and then fill the chemical gas tank car. In. After the chemical extraction (recovery) operation is completed, as shown in (a) and (b) of FIG. 8B, after selecting an option to complete the filling operation through the portable electronic device 5, the system will ask for an operation again The person repeatedly reads the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, and the slot information carrying unit 41 with the portable electronic device 5. In this way, the central monitoring system CSRC at the back end can know that the chemical filling operation has been completed, and then activate the valve protection device AD (Auto guard) and the door lock of the tank area control door 4.
如此，上述係已完整且清楚地說明本發明之一種流體填充與抽取系統與方法；並且，經由上述可知本發明係具有下列之優點：(1)本發明提出一種流體填充與抽取系統，係包括：至少一第一身分訊息攜載單元21、至少一第二身分訊息攜載單元81、至少一料品訊息攜載單元31、至少一槽區訊息攜載單元41、至少一容置槽訊息攜載單元61、以及至少一可攜式電子裝置5。特別地，在該可攜式電子裝置5以其讀取單元51讀取該些訊息攜載單元(21,81,31,41,61)所攜載的基礎訊息之後，後端的中央監控系統CSRC便可以在確認操作人員是否具有執行流體填充作業與/或抽取(回收)作業之操作權限以及該料品容置器3(即，化學品槽車)所盛裝的料品的資處資訊是否符合無誤之後，允許操作人員執行流體填充作業與/或抽取 (回收)作業。如此方式，係能夠確保填充作業與抽取作業與相關紀錄皆在電子化的系統管理下進行，免除任何的紙本記錄，是以能夠有效避免任何人為操作異常或者以非符合標準作業程序的方式完成相關作業。 In this way, the above system has completely and clearly explained a fluid filling and extraction system and method of the present invention; and from the above, it can be seen that the present invention has the following advantages: (1) The present invention proposes a fluid filling and extraction system, including : At least one first identity information carrying unit 21, at least one second identity information carrying unit 81, at least one material information carrying unit 31, at least one slot information carrying unit 41, and at least one receiving slot information carrying The carrier unit 61 and at least one portable electronic device 5. In particular, after the portable electronic device 5 reads the basic information carried by the message carrying units (21, 81, 31, 41, 61) with its reading unit 51, the central monitoring system CSRC at the back end It can be confirmed whether the operator has the operation authority to perform the fluid filling operation and / or the extraction (recovery) operation, and whether the information of the material contained in the material container 3 (that is, the chemical tanker) conforms to Allows operators to perform fluid filling operations and / or extractions when error-free (Recycling) operation. In this way, it is possible to ensure that filling operations, extraction operations and related records are performed under electronic system management, eliminating any paper records, and completing them in a way that can effectively avoid any human operation abnormalities or non-standard operating procedures. Related operations.
必須加以強調的是，上述之詳細說明係針對本發明可行實施例之具體說明，惟該實施例並非用以限制本發明之專利範圍，凡未脫離本發明技藝精神所為之等效實施或變更，均應包含於本案之專利範圍中。 It must be emphasized that the above detailed description is a specific description of the feasible embodiment of the present invention, but this embodiment is not intended to limit the patent scope of the present invention, and any equivalent implementation or change without departing from the technical spirit of the present invention, All should be included in the patent scope of this case.
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| US20110253224A1 (en) * | 2010-04-16 | 2011-10-20 | Claros Diagnostics, Inc. | Feedback control in microfluidic systems |
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