TWI643795B - Rotator for test handler and test handler - Google Patents

Rotator for test handler and test handler Download PDF

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Publication number
TWI643795B
TWI643795B TW106102431A TW106102431A TWI643795B TW I643795 B TWI643795 B TW I643795B TW 106102431 A TW106102431 A TW 106102431A TW 106102431 A TW106102431 A TW 106102431A TW I643795 B TWI643795 B TW I643795B
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falling
tray
state
pressing
fall
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TW106102431A
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Chinese (zh)
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TW201728515A (en
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羅閏成
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泰克元有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D71/00Bundles of articles held together by packaging elements for convenience of storage or transport, e.g. portable segregating carrier for plural receptacles such as beer cans or pop bottles; Bales of material
    • B65D71/70Trays provided with projections or recesses in order to assemble multiple articles, e.g. intermediate elements for stacking
    • B65D71/72Trays provided with projections or recesses in order to assemble multiple articles, e.g. intermediate elements for stacking formed by folding one or more blanks, the articles being inserted in openings in a wall
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00Mechanical conveyors not otherwise provided for
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D1/00Containers having bodies formed in one piece, e.g. by casting metallic material, by moulding plastics, by blowing vitreous material, by throwing ceramic material, by moulding pulped fibrous material, by deep-drawing operations performed on sheet material
    • B65D1/34Trays or like shallow containers
    • B65D1/36Trays or like shallow containers with moulded compartments or partitions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02Internal fittings
    • B65D25/10Devices to locate articles in containers
    • B65D25/101Springs, elastic lips, or other resilient elements to locate the articles by pressure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2585/00Containers, packaging elements or packages specially adapted for particular articles or materials
    • B65D2585/68Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form
    • B65D2585/86Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form for electrical components
    • B65D2585/88Batteries
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0235Containers
    • B65G2201/0258Trays, totes or bins

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Automatic Assembly (AREA)
  • Press Drives And Press Lines (AREA)

Abstract

本發明係關於一種用於傳送載有目標物體的托盤的傳送設備。具體地,根據本發明一實施方式,傳送裝置包括:在進行作業時裝載目標物體的托盤、傳送所述托盤的托盤承載部以及能夠選擇性地防止所述目標物體從所述托盤脫落的防脫落裝置。 The present invention relates to a transfer device for transferring a tray carrying a target object. Specifically, according to an embodiment of the present invention, the conveying device includes a tray for loading a target object when performing a job, a tray carrying part for conveying the tray, and an anti-dropout capable of selectively preventing the target object from falling off the tray. Device.

Description

傳送設備 Transmission equipment

本發明係關於一種傳送設備技術領域,尤指一種傳送設備。 The present invention relates to the technical field of a transmission device, and more particularly to a transmission device.

在執行生產部件的工序或者對生產的部件進行指定作業時,存在利用傳送設備來移送部件的情況。此時,部件應穩定地把持並裝載至傳送設備上。例如,這種傳送設備可以是包括托盤和處理機的各種設備。 When a process of producing a component is performed or a designated operation is performed on the produced component, there is a case where the component is transferred by a conveying device. At this point, the parts should be stably held and loaded onto the transfer equipment. Such conveying equipment may be, for example, various equipment including a tray and a processing machine.

這種傳送設備支援作業裝置對目標物體執行指定作業。例如,傳送設備與測試器電連接,並使電子部件移動至測試器端以進行測試。然後,傳送設備執行卸載已完成指定作業的目標物體的作業。 Such a transfer device supports a work device to perform a designated operation on a target object. For example, the transfer device is electrically connected to the tester, and the electronic components are moved to the tester side for testing. Then, the transfer device performs a job of unloading the target object that has completed the designated job.

此外,為了減少目標物體的移送次數並對多個目標物體進行操作,傳送設備可將多個目標物體裝載在托盤上。當目標物體裝載至托盤時,托盤處於水平狀態。在完成多個目標物體的托盤裝載作業之後,傳送設備將托盤移送至作業裝置。此時,在移送托盤的過程中,托盤的位姿仍保持水平狀態。然後,作業裝置對移送的目標物體進行操作。 In addition, in order to reduce the number of transfer times of the target object and operate the multiple target objects, the transfer device may load the multiple target objects on a tray. When the target object is loaded into the tray, the tray is horizontal. After completing the pallet loading operation of a plurality of target objects, the transfer device transfers the pallet to the working device. At this time, the position of the tray remains horizontal during the process of transferring the tray. Then, the working device operates the target object to be transferred.

最近,這種需要對目標物體實施的作業數量呈現增長趨勢。也就是說,隨著需要對目標物體進行的作業數量增加,執行作業的作業裝置的數量也在增加。例如,以往對半導體裝置實施32種參數測試,而如今測試的參數數量增加為需要實施128種參數測試。另外,與作業數量的增加對應地,用於實施作業的作業裝置的數量也隨之增加。 Recently, the number of such operations to be performed on target objects has been increasing. That is, as the number of jobs that need to be performed on the target object increases, the number of work devices that perform the job also increases. For example, in the past, 32 kinds of parameter tests were performed on semiconductor devices, but now the number of tested parameters has increased to 128 kinds of parameter tests. In addition, in response to an increase in the number of jobs, the number of working devices for performing the jobs has also increased.

然而,在托盤的位姿僅維持在水平狀態時,作業裝置也應設置為能夠對處於水平狀態的托盤進行操作。在這種情況下,由於過多數量的作業裝置以鋪展橫臥的狀態設置在水平空間中,導致了為排列作業裝置而需要過於寬闊的操作空間的問題。 However, when the position of the tray is maintained only in a horizontal state, the working device should also be set to be able to operate the tray in a horizontal state. In this case, since an excessive number of working devices are installed in the horizontal space in a state of being laid horizontally, there is a problem that an excessively wide operating space is required to arrange the working devices.

此外,在托盤的位姿僅維持在水平狀態時,托盤的移送也會受到限制。也就是說,當托盤的位姿僅維持在水平狀態時,為避免移送托盤之間發生衝突,需要確保相對寬闊的移送空間。由於這些理由,存在傳送設備的大小變得過於大型化的問題。 In addition, when the position of the tray is maintained only horizontally, the transfer of the tray is also restricted. That is, when the position of the trays is maintained only in a horizontal state, in order to avoid conflicts between the transfer trays, it is necessary to ensure a relatively wide transfer space. For these reasons, there is a problem that the size of the transfer equipment becomes too large.

因此,當傳送設備移送托盤時,需要對托盤的位姿進行轉換。可選地,需要將托盤位姿從水平位姿轉換為水平之外的位姿,再從水平以外的位姿轉換為水平位姿。 Therefore, when the transfer device transfers the tray, the position of the tray needs to be changed. Optionally, the position of the pallet needs to be converted from a horizontal position to a position other than the horizontal position, and then from a position other than the horizontal position to the horizontal position.

然而,在傳送設備轉換托盤位姿時,放置於托盤上的目標物體具有從托盤脫落的風險。因此,需要防止目標物體在傳送設備轉換托盤位姿時從托盤脫落。 However, when the transfer device changes the position of the tray, the target object placed on the tray has a risk of falling off the tray. Therefore, it is necessary to prevent the target object from falling off the tray when the transfer device changes the position of the tray.

本發明的實施例提供了一種能夠最大限度地減小托盤操作以及托盤傳送所需要的空間的傳送設備,以解決上述現有的技術問題。 An embodiment of the present invention provides a transfer device capable of minimizing a space required for a tray operation and a tray transfer to solve the above-mentioned existing technical problems.

此外,提供了一種能夠在傳送托盤時防止目標物體從托盤脫落的傳送設備。 In addition, there is provided a transfer device capable of preventing a target object from falling out of the tray when transferring the tray.

根據本發明的第一方面,提供了一種傳送設備,該設備包括裝載有目標物體的托盤、搬運所述托盤的托盤承載部、可移動地設置在所述托盤上的防脫落裝置以及包括按壓部的按壓裝置,並且所述按壓部能夠朝向防脫落裝置前後移動且選擇性地連接至所述防脫落裝置,其中,所述防脫落裝置配置成:在所述按壓部未與所述防脫落裝置連接的狀態下,所述防脫落裝置在所述托盤上的移動受到限制,而在所述按壓部與所述防脫落裝置連接的狀態下,所述防脫落裝置能夠在所述托盤上移動,所述防脫落裝置根據在與所述按壓部連接狀態下的托盤上的移動,可選擇性地處於防脫落位置和解除位置之一,其中在所述防脫落位置上,所述防脫落裝置限制所述目標物體從所述托盤脫落,並且在所述解除位置上,所述防脫落裝置不限制所述目標物體的移動。 According to a first aspect of the present invention, there is provided a transfer device including a tray on which a target object is loaded, a tray carrying portion that carries the tray, a fall-off prevention device movably disposed on the tray, and a pressing portion And the pressing portion can be moved forward and backward toward the anti-falling device and is selectively connected to the anti-falling device, wherein the anti-falling device is configured such that the pressing portion is not in contact with the anti-falling device In a connected state, movement of the anti-falling device on the tray is restricted, and in a state where the pressing portion is connected to the anti-falling device, the anti-falling device can move on the tray, The anti-fall-off device may be selectively in one of the anti-fall-off position and the release position according to the movement on the tray in a state connected with the pressing part, and in the anti-drop-off position, the anti-fall-off device is restricted The target object falls off the tray, and in the released position, the anti-falling device does not restrict the movement of the target object.

進一步地,所述托盤上設置有在處於所述防脫落位置時收納所述防脫落裝置的第一支承部和在處於所述解除位置時收納所述防脫落裝置的第二支承部。 Further, the tray is provided with a first support portion that accommodates the fall prevention device when it is in the fall prevention position, and a second support portion that accommodates the fall prevention device when in the release position.

進一步地,所述防脫落裝置包括:防止所述目標物體脫落的防脫落部件;以及支承所述防脫落部件以使其能夠選擇性地移動的移動單元。 Further, the fall-off prevention device includes: a fall-off prevention member that prevents the target object from falling off; and a moving unit that supports the fall-off prevention member so that it can be selectively moved.

進一步地,所述移動單元還包括:對所述防脫落部件施加彈力的彈性部件;以及可旋轉地支承所述防脫落部件的鉸鏈。 Further, the moving unit further includes: an elastic member that applies an elastic force to the fall-off preventing member; and a hinge that rotatably supports the fall-off preventing member.

進一步地,在所述防脫落部件被所述按壓裝置施壓時,所述防脫落裝置處於可移動的狀態,並且在所述防脫落部件未被所述按壓裝置施壓的狀態下,所述防脫落裝置通過被所述彈性部件施壓而處於移動受限制的狀態。 Further, when the anti-falling member is pressed by the pressing device, the anti-falling device is in a movable state, and in a state where the anti-falling member is not pressed by the pressing device, the The anti-falling device is in a state where movement is restricted by being pressed by the elastic member.

進一步地,所述防脫落部件設置在所述托盤上,並且所述按壓裝置設置在托盤承載部上。 Further, the fall-off preventing member is provided on the tray, and the pressing device is provided on a tray bearing portion.

進一步地,所述按壓裝置包括:使所述按壓裝置在平行於所述托盤的方向上移動的按壓裝置移動結構,並且所述防脫落裝置配置為在所述按壓裝置與所述防脫落裝置連接的狀態下能夠隨著所述按壓裝置的移動而移動。 Further, the pressing device includes a pressing device moving structure that moves the pressing device in a direction parallel to the tray, and the anti-falling device is configured to be connected between the pressing device and the anti-falling device. In a state of being able to move with the movement of the pressing device.

進一步地,所述移動單元上形成有可供所述按壓裝置***的孔。 Further, the moving unit is formed with a hole through which the pressing device can be inserted.

進一步地,所述托盤承載部包括:使所述按壓裝置移動使得所述按壓裝置連接至所述防脫落裝置的按壓裝置驅動結構。 Further, the tray bearing portion includes a pressing device driving structure that moves the pressing device so that the pressing device is connected to the anti-falling device.

進一步地,所述托盤承載部包括:使所述托盤移動使得所述按壓裝置連接至所述防脫落裝置的按壓裝置驅動結構。 Further, the tray bearing portion includes a pressing device driving structure that moves the tray so that the pressing device is connected to the anti-falling device.

本發明還具有以下的有益效果:實現了傳送托盤時能夠使目標物體更加穩定地裝載在托盤上的效果。 The invention also has the following beneficial effects: the effect that the target object can be stably loaded on the tray when the tray is transported is realized.

1‧‧‧傳送設備 1‧‧‧ transmission equipment

2‧‧‧目標物體 2‧‧‧ target object

3‧‧‧裝置區 3‧‧‧device area

4‧‧‧作業裝置 4‧‧‧Working device

10‧‧‧托盤 10‧‧‧ Tray

10’‧‧‧水平狀態 10’‧‧‧ horizontal state

10”‧‧‧垂直狀態 10 ”‧‧‧vertical state

20‧‧‧托盤承載部 20‧‧‧Tray loading section

30‧‧‧防脫落裝置 30‧‧‧anti-falling device

40‧‧‧控制部 40‧‧‧Control Department

100‧‧‧防脫落部件 100‧‧‧anti-falling parts

110‧‧‧防脫落部 110‧‧‧fall-off prevention part

120‧‧‧槓桿部 120‧‧‧ Leverage Department

121‧‧‧一側 121‧‧‧ side

122‧‧‧另一側 122‧‧‧ the other side

200‧‧‧移動單元 200‧‧‧ mobile unit

210‧‧‧鉸鏈 210‧‧‧ hinge

220‧‧‧彈性部件 220‧‧‧ Elastic Parts

230‧‧‧本體 230‧‧‧ Ontology

231‧‧‧孔 231‧‧‧hole

232‧‧‧制動器 232‧‧‧Brake

233‧‧‧軸承 233‧‧‧bearing

240‧‧‧引導件 240‧‧‧Guide

250‧‧‧支承部 250‧‧‧ support

251‧‧‧第一支承部 251‧‧‧first support

252‧‧‧第二支承部 252‧‧‧second support

300‧‧‧按壓裝置 300‧‧‧Pressing device

310‧‧‧按壓部 310‧‧‧Pressing section

320‧‧‧按壓裝置移動結構 320‧‧‧Pressing device moving structure

400‧‧‧按壓裝置驅動結構 400‧‧‧Pressing device driving structure

圖1係本發明第一實施例的傳送設備的示意圖。 FIG. 1 is a schematic diagram of a transmission device according to a first embodiment of the present invention.

圖2係圖1的傳送設備的防脫落裝置的防脫落狀態的示意圖。 FIG. 2 is a schematic diagram of a falling-off prevention state of the falling-off prevention device of the conveying equipment of FIG. 1.

圖3係圖1的傳送設備的防脫落裝置的解除狀態的示意圖。 FIG. 3 is a schematic diagram of a released state of the anti-falling device of the conveying equipment of FIG. 1.

圖4係圖1的傳送設備的移動單元的立體圖。 FIG. 4 is a perspective view of a mobile unit of the transfer device of FIG. 1.

圖5係圖1的傳送設備的托盤承載部的上方立體圖。 FIG. 5 is an upper perspective view of a tray carrying portion of the transfer device of FIG. 1.

圖6係圖1的傳送設備的托盤承載部的下方立體圖。 FIG. 6 is a bottom perspective view of a tray carrying portion of the transfer device of FIG. 1.

圖7係圖1的傳送設備的操作過程的視圖。 FIG. 7 is a view of an operation process of the transfer device of FIG. 1. FIG.

圖8係本發明第二實施例的傳送設備的托盤承載部的示意圖。 FIG. 8 is a schematic diagram of a tray carrying portion of a conveying device according to a second embodiment of the present invention.

下面,將參照附圖對用於實現本發明構思的具體實施例進行詳細的說明。 Hereinafter, specific embodiments for implementing the inventive concept will be described in detail with reference to the drawings.

在對本發明進行說明時,若相關的公知結構或功能的具體說明被認為可能會使本發明的宗旨模糊時,將省略對其的詳細描述。 In describing the present invention, detailed descriptions of related well-known structures or functions will be omitted if it is considered that the gist of the present invention may be obscured.

可使用包括如第一,第二等序數的用語來說明多種構成要素,但是這些構成要素並不受這些用語的限制。這些用語僅出於將一個構成要素與其他構成要素區別開來的目的而使用。 Various constituent elements may be described using terms including ordinal numbers such as first and second, but these constituent elements are not limited by these terms. These terms are used only for the purpose of distinguishing one constituent element from the other constituent elements.

當某一構成要素“連接至”或者“聯接至”另一構成要素時,應理解為該構成要素可以與另一構成要素直接連接或聯接,或兩者之間也可存在其它構成要素。 When a constituent element is “connected to” or “connected to” another constituent element, it should be understood that the constituent element may be directly connected or coupled with another constituent element, or there may be other constituent elements between the two.

下面,參照圖1至圖6,對根據本發明第一實施例的把持裝置的具體結構進行說明。圖1是示出根據本發明第一實施例的傳送設備的示意圖,圖2是示出圖1的傳送設備的防脫落裝置的防脫落狀態的示意圖,圖3是示出圖1的傳送設備的防脫落裝置的解除狀態的示意圖,圖4是示出圖1的傳送設備的移動單元的立體圖,圖5是示出圖1的傳送設備的托盤承載部的上方立體圖,以及圖6是示出圖1的傳送設備的托盤承載部的下方立體圖。 Hereinafter, a specific structure of a holding device according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 6. FIG. 1 is a schematic diagram illustrating a transfer device according to a first embodiment of the present invention, FIG. 2 is a schematic diagram illustrating a fall-off prevention state of an anti-falling device of the transfer device of FIG. 1, and FIG. 3 is a diagram illustrating a transfer device of FIG. 1. 4 is a perspective view showing a moving unit of the transfer device of FIG. 1, FIG. 5 is an upper perspective view showing a tray carrying portion of the transfer device of FIG. 1, and FIG. 6 is a view showing 1 is a perspective view below the tray carrier of the conveyance device of 1.

參照圖1至圖6,根據本發明第一實施例的傳送設備1配置為能夠移送目標物體2。例如,裝載的目標物體2可放置在待後述的托盤10上,並且該托盤10可以水平放置在裝置區3中。裝置區3中的托盤10通過裝卸結構裝載至傳送設備1。這種裝卸結構可包括缸、電機、活塞、夾持器等,並且可設置在傳送設備1和裝置區3中的至少一個上。裝載有托盤10的傳送設備1可將托盤10從裝置區3移送至作業裝置4,並且可包括用於移送托盤10的托盤移送裝置。這種托盤移送裝置包括電機等驅動部,且由於其實現方式對於本領域技術人員是顯而易見的,在此不再贅述。此外,傳送設備1可將托盤10以垂直豎立的狀態提供至作業裝置4。作業裝置4中的作業結束之後,傳送設備1可重新將托盤10從作業裝置4移送至裝置區3,並且使托盤10處於水平狀態。 1 to 6, a transfer device 1 according to a first embodiment of the present invention is configured to be capable of transferring a target object 2. For example, the loaded target object 2 may be placed on a tray 10 to be described later, and the tray 10 may be placed horizontally in the device area 3. The pallet 10 in the device area 3 is loaded to the conveying device 1 by a loading structure. Such a loading and unloading structure may include a cylinder, a motor, a piston, a gripper, and the like, and may be provided on at least one of the conveying device 1 and the device area 3. The transfer device 1 loaded with the tray 10 may transfer the tray 10 from the device area 3 to the work device 4, and may include a tray transfer device for transferring the tray 10. Such a tray transfer device includes a driving unit such as a motor, and since the implementation manner is obvious to those skilled in the art, it will not be repeated here. In addition, the conveyance device 1 can supply the tray 10 to the working device 4 in a state of standing upright. After the work in the working device 4 is completed, the conveyance device 1 may re-transfer the tray 10 from the working device 4 to the device area 3 and bring the tray 10 in a horizontal state.

另外,在根據本實施例的附圖中,托盤10在裝置區3中以水平位姿放置,並且托盤10在作業裝置4中以垂直的位姿放置,但是本發明的構思並不限於此,並且傳送設備1也能夠使托盤10在傳送時不發生位姿轉換。此外, 在根據本實施例的附圖中,目標物體2示出為如半導體晶片的IC模組,但這也僅僅是示例。另外,在上文中傳送設備1描述為傳送托盤以在作業裝置4中執行測試等作業,但這也僅為示例,且本發明的構思可以適用於所有包括托盤10的傳送設備1。 In addition, in the drawing according to the present embodiment, the tray 10 is placed in a horizontal posture in the device area 3, and the tray 10 is placed in a vertical posture in the work device 4, but the concept of the present invention is not limited thereto, In addition, the transfer device 1 can also prevent the tray 10 from changing its position during the transfer. In addition, In the drawing according to the present embodiment, the target object 2 is shown as an IC module such as a semiconductor wafer, but this is only an example. In addition, the conveyance device 1 is described above as conveying a tray to perform a job such as a test in the work device 4, but this is only an example, and the concept of the present invention can be applied to all the conveyance devices 1 including the tray 10.

傳送設備1包括托盤10、托盤承載部20、防脫落裝置30及控制部40。 The conveyance device 1 includes a tray 10, a tray carrying portion 20, a fall-off prevention device 30, and a control portion 40.

托盤10可收納目標物體2。也就是說,目標物體2可被裝載至托盤或者可從托盤10卸載。此外,托盤10上可設置有能夠收納目標物體2的凹槽、縫隙等。 The tray 10 can store the target object 2. That is, the target object 2 may be loaded on or unloaded from the tray 10. In addition, the tray 10 may be provided with a groove, a slit, or the like capable of accommodating the target object 2.

托盤承載部20可選擇性地裝載托盤10。這種托盤承載部20可使托盤10升降,並且根據具體情況可使托盤10轉動。此外,托盤承載部20還可沿著預定的路徑移送托盤10。 The tray carrying portion 20 can selectively load the tray 10. Such a tray supporting portion 20 can raise and lower the tray 10 and can rotate the tray 10 according to specific conditions. In addition, the tray carrier 20 can also transfer the tray 10 along a predetermined path.

例如,托盤承載部20可裝載放置于裝置區3中的托盤10。托盤承載部20可包括活塞、驅動電機及缸中的至少一個,但並一定不限於此。托盤承載部20可包括引導托盤10的引導件、輥等,使得更容易地裝置托盤。 For example, the tray carrier 20 may load a tray 10 placed in the device area 3. The tray carrying portion 20 may include at least one of a piston, a driving motor, and a cylinder, but is not necessarily limited thereto. The tray carrying portion 20 may include guides, rollers, and the like that guide the tray 10, making it easier to mount the tray.

此外,當托盤承載部20在裝載有托盤10的狀態下轉動時,托盤10的位姿可以改變。例如,根據托盤承載部20的轉動,托盤10的位姿可以從水平狀態10’轉換為垂直狀態10”。托盤承載部20可包括轉子21以進行轉動。 In addition, when the tray carrying portion 20 is rotated in a state in which the tray 10 is loaded, the posture of the tray 10 may be changed. For example, according to the rotation of the tray carrying portion 20, the posture of the tray 10 may be changed from the horizontal state 10 'to the vertical state 10 ". The tray carrying portion 20 may include a rotor 21 for rotation.

防脫落裝置30可選擇性地防止目標物體2從托盤10脫落。例如,防脫落裝置30可以處於防止目標物體2從托盤10脫落的狀態(防脫落狀態),或者處於能夠使目標物體2從托盤10自由地脫落的狀態(解除狀態)。 The fall prevention device 30 can selectively prevent the target object 2 from falling out of the tray 10. For example, the fall-off prevention device 30 may be in a state where the target object 2 is prevented from falling out of the tray 10 (fall-off state), or may be in a state where the target object 2 is allowed to fall freely from the tray 10 (released state).

另外,如本實施例的附圖所示,當防脫落裝置30位於防脫落位置時與目標物體2的一側接觸,而當防脫落裝置30處於解除狀態時移動至托盤10的兩側,但這些僅為示例且並不一定限於此。此外,如本實施例的附圖所示,防脫落裝置30設置在托盤10上,但是並一定不限於此。例如,防脫落裝置30還可以設置在托盤承載部20上,而且還可以是部分結構設置在托盤10上而餘下結構設置在托盤承載部20上。 In addition, as shown in the drawing of this embodiment, when the anti-falling device 30 is located at the anti-dropping position, it is in contact with one side of the target object 2, and when the anti-falling device 30 is in the released state, it moves to both sides of the tray 10, but These are examples only and are not necessarily limited to this. In addition, as shown in the drawings of this embodiment, the fall-off preventing device 30 is provided on the tray 10, but it is not necessarily limited to this. For example, the anti-falling device 30 may also be provided on the tray supporting portion 20, and a part of the structure may be provided on the tray 10 and the remaining structure may be provided on the tray supporting portion 20.

防脫落裝置30可包括防脫落部件100及移動單元200。 The fall prevention device 30 may include a fall prevention member 100 and a moving unit 200.

防脫落部件100可包括能夠防止裝載在托盤10上的目標物體脫落的防脫落部110和與待後述的移動單元200連接的槓桿部120。如本實施例的附圖所示,防脫落部110包括如棒狀的長條形部件,但並不一定限於此。 The fall prevention member 100 may include a fall prevention portion 110 capable of preventing a target object loaded on the tray 10 from falling out, and a lever portion 120 connected to a moving unit 200 to be described later. As shown in the drawings of this embodiment, the fall-off prevention portion 110 includes a bar-shaped elongated member, but it is not necessarily limited to this.

移動單元200包括鉸鏈210、彈性部件220及本體230。鉸鏈210和彈性部件220可由本體230支承。防脫落部件100與本體230通過這種鉸鏈210及彈性部件220進行連接。由此,防脫落部件100可被移動單元200支承。 The mobile unit 200 includes a hinge 210, an elastic member 220, and a body 230. The hinge 210 and the elastic member 220 may be supported by the body 230. The fall-off prevention member 100 and the main body 230 are connected by such a hinge 210 and the elastic member 220. Thereby, the fall-off prevention member 100 can be supported by the moving unit 200.

此外,移動單元200的鉸鏈210及彈性部件220可與待後述的按壓裝置300一同使防脫落部件100轉動。而且,為了使防脫落部件100的轉動更加順滑,鉸鏈210可以設置在槓桿部120的一側121與槓桿部120的另一側122之間。也就是說,鉸鏈210起到槓桿部120的旋轉中心的作用。另外,鉸鏈210可設置在被彈性部件220施壓的位置與被按壓裝置300施壓的位置之間。例如,彈性部件220向槓桿部120的一側121施加彈力,而槓桿部120通過這種彈力以鉸鏈210為中心向一個方向轉動。此時,防脫落部件100處於固定狀態,並且由待後述的支承部250支承(固定狀態)。另外,按壓裝置300向槓桿部120的另一側122施加壓力,槓桿部120通過從該按壓裝置300受到的力以鉸鏈210為中心向另一方向轉動。此時,防脫落部件100從支承部250脫離並解除固定,從而處於能夠移動的狀態(可移動狀態)。 In addition, the hinge 210 and the elastic member 220 of the moving unit 200 can rotate the anti-falling member 100 together with the pressing device 300 to be described later. Moreover, in order to make the rotation of the anti-falling member 100 smoother, the hinge 210 may be disposed between one side 121 of the lever portion 120 and the other side 122 of the lever portion 120. That is, the hinge 210 functions as a rotation center of the lever portion 120. In addition, the hinge 210 may be provided between a position pressed by the elastic member 220 and a position pressed by the pressing device 300. For example, the elastic member 220 applies an elastic force to one side 121 of the lever portion 120, and the lever portion 120 rotates in one direction with the hinge 210 as a center by this elastic force. At this time, the fall-off preventing member 100 is in a fixed state and is supported (fixed state) by a support portion 250 to be described later. In addition, the pressing device 300 applies pressure to the other side 122 of the lever portion 120, and the lever portion 120 rotates in the other direction with the hinge 210 as a center by a force received from the pressing device 300. At this time, the fall-off preventing member 100 is detached from the support portion 250 and is released from the fixing, so that it is in a movable state (movable state).

此外,移動單元200還可包括引導件240。引導件240可引導本體230在防脫落位置與解除位置之間移動。本體230配置為與引導件240連接並能夠沿著引導件240選擇性地移動。該引導件240可以是線性延長的突出形或凹陷形的軌道。 In addition, the mobile unit 200 may further include a guide 240. The guide 240 can guide the body 230 to move between the drop-off prevention position and the release position. The body 230 is configured to be connected to the guide 240 and to be selectively movable along the guide 240. The guide 240 may be a linearly extended protruding or recessed track.

本體230上形成有孔231和制動器232。孔231形成有可供按壓裝置300***的朝向按壓裝置300的開口。由此,按壓裝置300在向防脫落部件100施加壓力時能夠朝著更準確的位置施加壓力。此外,為了使該按壓裝置300更加容易地***,孔231的內壁上設置有軸承233。制動器232可形成在本體230的內部,並且可與槓桿部選擇性地相接觸。這種制動器232能夠防止槓桿部120的過度旋轉。例如,當槓桿部120不受按壓裝置300的力而是受到彈性部件220的彈力時,槓桿部120與制動器232接觸。由此,可通過制動器232來防止槓桿部120受到彈性部件220的彈力而旋轉過度的情況發生。 The body 230 is formed with a hole 231 and a stopper 232. The hole 231 is formed with an opening toward the pressing device 300 into which the pressing device 300 can be inserted. Thereby, the pressing device 300 can apply pressure toward a more accurate position when applying pressure to the fall-off prevention member 100. In addition, in order to make the pressing device 300 easier to insert, a bearing 233 is provided on an inner wall of the hole 231. The stopper 232 may be formed inside the body 230 and may selectively contact the lever portion. Such a brake 232 can prevent excessive rotation of the lever portion 120. For example, when the lever portion 120 is not subjected to the force of the pressing device 300 but is subjected to the elastic force of the elastic member 220, the lever portion 120 is in contact with the brake 232. This can prevent the lever portion 120 from being excessively rotated by the elastic force of the elastic member 220 by the brake 232.

此外,移動單元200可包括能夠選擇性地收納防脫落部件100的支承部250。通過使防脫落部件100被支承部250收納,能夠更加容易地固定防脫落部件100的位置。而且,支承部250可包括第一支承部251和第二支承部252。第一支承部251可在防脫落裝置30處於能夠防止目標物體2的脫落的位置時收納防脫落部件100。當防脫落裝置30處於對相對於托盤的目標物體2的裝 載和卸載不進行限制的位置時,第二支承部252可收納防脫落部件100。當防脫落部件100被支承部250收納時,能夠更加有效地防止防脫落部件100朝著X方向移動。 In addition, the moving unit 200 may include a support portion 250 capable of selectively accommodating the fall-off preventing member 100. By accommodating the fall prevention member 100 in the support part 250, the position of the fall prevention member 100 can be fixed more easily. Also, the support portion 250 may include a first support portion 251 and a second support portion 252. The first support portion 251 can accommodate the fall-off prevention member 100 when the fall-off prevention device 30 is in a position capable of preventing the target object 2 from falling off. When the anti-falling device 30 is placed on the target object 2 relative to the tray In a position where loading and unloading are not restricted, the second support portion 252 can accommodate the fall-off preventing member 100. When the fall-off prevention member 100 is accommodated in the support portion 250, the fall-off prevention member 100 can be more effectively prevented from moving in the X direction.

此外,移動單元200還可設置在防脫落部件100的兩側端部。在這種情況下,防脫落部件100的支承及移動能夠變得更加順暢。 In addition, the moving unit 200 may be provided at both end portions of the drop-out preventing member 100. In this case, the support and movement of the fall-off prevention member 100 can be made smoother.

另外,如本實施例的附圖所示,支承部示出為半圓形的凹槽,但這僅僅是示例,並且本發明的構思並不受支承部形狀的限制。 In addition, as shown in the drawing of this embodiment, the support portion is shown as a semicircular groove, but this is merely an example, and the concept of the present invention is not limited by the shape of the support portion.

該防脫落部件100和移動單元200的移動與按壓裝置300及按壓裝置驅動結構400相關,因此下面對這種按壓裝置300和按壓裝置驅動結構400進行說明。 The movement of the fall-off preventing member 100 and the moving unit 200 is related to the pressing device 300 and the pressing device driving structure 400. Therefore, the pressing device 300 and the pressing device driving structure 400 will be described below.

按壓裝置300包括按壓部310及按壓裝置移動結構320。按壓部310配置為能夠通過待後述的按壓裝置驅動結構400對防脫落部件100的槓桿部120選擇性地施加壓力。為了對槓桿部120施加壓力,按壓部310需要移動至與槓桿部120對應的位置。為此,按壓裝置移動結構320使按壓部310移動至與槓桿部120對應的位置。例如,按壓裝置移動結構320可通過使按壓部310移動使得按壓部310從槓桿部120的一側121移動至在Z軸方向上相隔預定距離的位置處。 The pressing device 300 includes a pressing portion 310 and a pressing device moving structure 320. The pressing portion 310 is configured to be capable of selectively applying pressure to the lever portion 120 of the anti-falling member 100 by a pressing device driving structure 400 to be described later. In order to apply pressure to the lever portion 120, the pressing portion 310 needs to be moved to a position corresponding to the lever portion 120. To this end, the pressing device moving structure 320 moves the pressing portion 310 to a position corresponding to the lever portion 120. For example, the pressing device moving structure 320 may move the pressing portion 310 from the one side 121 of the lever portion 120 to a position separated by a predetermined distance in the Z-axis direction by moving the pressing portion 310.

這種按壓裝置移動結構320可在按壓部310與槓桿部120相隔開的狀態下使按壓部310移動,也可在按壓部310對槓桿部120進行加壓的狀態下使按壓部310移動。 Such a pressing device moving structure 320 may move the pressing portion 310 in a state where the pressing portion 310 is separated from the lever portion 120, or may move the pressing portion 310 in a state where the pressing portion 310 presses the lever portion 120.

此外,按壓裝置移動結構320可在按壓部310對槓桿部120加壓的狀態下使按壓部移動。由於這種槓桿部120包含在防脫落裝置30中,因此防脫落裝置30可根據按壓部310的移動而移動。例如,按壓裝置300可在按壓部310向槓桿部120的一側121施壓的狀態下沿著X軸移動,並且防脫落裝置30可沿著X軸移動從而在防脫落位置和解除位置之間移動。此時,按壓部310***至本體230的孔231中,由此按壓裝置移動結構320的驅動力可傳遞至防脫落裝置30。也就是說,由於孔231與按壓部310彼此連接,使得防脫落裝置30能夠通過按壓裝置300移動。在這種情況下,按壓裝置300與防脫落裝置30的本體230一同移動。例如,當按壓裝置300被驅動為在與本體230結合的狀態下朝著+X方向移動時,本體230與按壓裝置300一同朝著+X方向移動。 In addition, the pressing device moving structure 320 can move the pressing portion while the pressing portion 310 presses the lever portion 120. Since such a lever portion 120 is included in the anti-falling device 30, the anti-falling device 30 can be moved in accordance with the movement of the pressing portion 310. For example, the pressing device 300 may move along the X-axis in a state where the pressing portion 310 presses the one side 121 of the lever portion 120, and the anti-falling device 30 may move along the X-axis to be between the anti-falling position and the release position mobile. At this time, the pressing portion 310 is inserted into the hole 231 of the body 230, and thus the driving force of the pressing device moving structure 320 can be transmitted to the anti-falling device 30. That is, since the hole 231 and the pressing portion 310 are connected to each other, the fall-off preventing device 30 can be moved by the pressing device 300. In this case, the pressing device 300 moves together with the body 230 of the anti-falling device 30. For example, when the pressing device 300 is driven to move in the + X direction while being coupled to the body 230, the body 230 and the pressing device 300 are moved in the + X direction together.

另外,在根據本實施例的附圖中示出為按壓裝置移動結構320使按壓部310在XY平面上移動,但這僅僅為示例且並不一定限於此。而且,按壓裝置移動結構320例如可包括諸如配置成與引導件240平行的按壓裝置的導軌、輥及向按壓部提供驅動力的電機等驅動裝置,但是本發明的構思並不一定限於此。此外,在根據本實施例的附圖中示出為按壓部310包括針形狀,但是本發明的構思並不一定限於此。 In addition, it is shown in the drawing according to the present embodiment that the pressing device moving structure 320 moves the pressing portion 310 on the XY plane, but this is merely an example and is not necessarily limited thereto. Also, the pressing device moving structure 320 may include, for example, a driving device such as a guide rail, a roller, and a motor that provides a driving force to the pressing portion of the pressing device configured in parallel with the guide 240, but the concept of the present invention is not necessarily limited thereto. Further, it is shown in the drawings according to the present embodiment that the pressing portion 310 includes a needle shape, but the concept of the present invention is not necessarily limited thereto.

另外,在根據本實施例的附圖中示出為按壓裝置300設置在托盤承載部20上,但這僅僅為示例且並不一定限於此。 In addition, it is shown in the drawing according to the present embodiment that the pressing device 300 is provided on the tray carrying portion 20, but this is merely an example and is not necessarily limited thereto.

按壓裝置驅動結構400可使按壓裝置300移動使得槓桿部120選擇性地被按壓裝置300加壓。例如,按壓裝置驅動結構400可使按壓部310朝著槓桿部120移動,或使按壓部310朝著遠離槓桿部120的方向移動。也就是說,按壓裝置驅動結構400可通過使按壓部310朝著-Z方向移動而使得按壓部310與槓桿部120緊密貼合,或通過使按壓部310朝著+Z方向移動而使得按壓部310與槓桿部120隔開。該按壓裝置驅動結構400可以設置在托盤承載部20上。另外,按壓裝置驅動結構400例如可包括活塞、電機、引導件、輥及缸中的至少一個,但是並不限於此。 The pressing device driving structure 400 can move the pressing device 300 so that the lever portion 120 is selectively pressurized by the pressing device 300. For example, the pressing device driving structure 400 may move the pressing portion 310 toward the lever portion 120 or move the pressing portion 310 in a direction away from the lever portion 120. That is, the pressing device driving structure 400 can make the pressing portion 310 closely fit with the lever portion 120 by moving the pressing portion 310 in the -Z direction, or make the pressing portion by moving the pressing portion 310 in the + Z direction. 310 is separated from the lever portion 120. The pressing device driving structure 400 may be disposed on the tray supporting portion 20. In addition, the pressing device driving structure 400 may include, for example, at least one of a piston, a motor, a guide, a roller, and a cylinder, but is not limited thereto.

根據本實施例的傳送設備1的驅動可由控制部40控制。例如,控制部40可控制按壓裝置移動結構320和按壓裝置驅動結構400的驅動。此外,控制部40可連接至感測器(未示出)以獲知傳送設備1的狀態,例如,可通過感測器來獲知按壓裝置移動結構320和按壓裝置驅動結構400的位置,並確認托盤10是否裝載到托盤移送結構20上。這種控制部40可通過包含有微處理器的計算裝置來實現。 The driving of the transfer device 1 according to the present embodiment can be controlled by the control section 40. For example, the control unit 40 may control the driving of the pressing device moving structure 320 and the pressing device driving structure 400. In addition, the control section 40 may be connected to a sensor (not shown) to know the state of the conveying device 1, for example, the position of the pressing device moving structure 320 and the pressing device driving structure 400 may be known through the sensor, and the tray may be confirmed 10 Whether to load on the tray transfer structure 20. Such a control unit 40 can be realized by a computing device including a microprocessor.

下面,參考圖7對具有上述結構的傳送設備1的作用及效果進行說明。圖7是示出圖1的傳送設備的操作過程的視圖。 Next, operations and effects of the transmission device 1 having the above-mentioned structure will be described with reference to FIG. 7. FIG. 7 is a view showing an operation procedure of the transfer device of FIG. 1.

托盤10可通過能夠移送托盤10的裝卸結構裝載至托盤移送結構20上。此時,當目標物體2處於從托盤10自由脫落的位置時,需要使防脫落裝置30從解除狀態轉換為防脫落狀態。下面,對防脫落裝置30從解除狀態轉換為防脫落狀態的過程進行說明。 The tray 10 can be loaded onto the tray transfer structure 20 by a loading and unloading structure capable of transferring the tray 10. At this time, when the target object 2 is in a position free from the tray 10, it is necessary to change the anti-falling device 30 from the released state to the anti-falling state. Next, a process of changing the fall-off prevention device 30 from the released state to the fall-off prevention state will be described.

參考圖7,首先,驅動按壓裝置驅動結構400使得槓桿部120被按壓部310加壓。如果按壓部310已脫離與槓桿部120對應的位置,則在驅動按壓裝置驅動結構400之前,通過驅動按壓裝置移動結構320使按壓裝置300移動至 與槓桿部120對應的位置。例如,按壓裝置移動結構320使按壓裝置300在X-Y方向上移動,並且當移動按壓部310根據按壓裝置300的移動而移動至與槓桿部120在+Z方向上相隔的位置時,按壓部310與槓桿部120可通過按壓裝置驅動結構400彼此靠近。此時,按壓裝置驅動結構400可使按壓部310移動至槓桿部120的一側121。 Referring to FIG. 7, first, the pressing device driving structure 400 is driven so that the lever portion 120 is pressurized by the pressing portion 310. If the pressing portion 310 has moved out of the position corresponding to the lever portion 120, the pressing device 300 is moved to A position corresponding to the lever portion 120. For example, the pressing device moving structure 320 moves the pressing device 300 in the XY direction, and when the moving pressing portion 310 moves to a position separated from the lever portion 120 in the + Z direction according to the movement of the pressing device 300, the pressing portion 310 and The lever portions 120 can drive the structures 400 closer to each other by the pressing device. At this time, the pressing device driving structure 400 can move the pressing portion 310 to one side 121 of the lever portion 120.

根據該按壓裝置驅動結構400的驅動,按壓部310對槓桿部120施壓,並且槓桿部的一側121被按壓部310推向-Z方向。此時,槓桿部120以鉸鏈210為中心轉動,並且槓桿部120的另一側122朝著+Z方向移動。此外,連接於槓桿部120的另一側122與移動單元200的本體230之間的彈性部件220被壓縮。由於該槓桿部120的另一側122的移動,防脫落裝置100從固定狀態轉換為可移動狀態。在移動單元200包括支承部250的情況下,防脫落部件100由於槓桿部120的另一側122的移動而與支承部250隔開。 According to the driving of the pressing device driving structure 400, the pressing portion 310 presses the lever portion 120, and one side 121 of the lever portion is pushed in the −Z direction by the pressing portion 310. At this time, the lever portion 120 is rotated with the hinge 210 as the center, and the other side 122 of the lever portion 120 is moved in the + Z direction. In addition, the elastic member 220 connected between the other side 122 of the lever portion 120 and the body 230 of the mobile unit 200 is compressed. Due to the movement of the other side 122 of the lever portion 120, the fall-off prevention device 100 is switched from a fixed state to a movable state. In the case where the moving unit 200 includes the support portion 250, the fall-off prevention member 100 is separated from the support portion 250 by the movement of the other side 122 of the lever portion 120.

此時,由於按壓裝置300與移動單元200連接,因此移動單元200根據按壓裝置移動結構320的移動而移動。例如,按壓裝置移動結構320可與移動單元200一同在X方向上移動。此外,由於該移動單元200與防脫落部件100連接,因此防脫落部件100也一同移動。也就是說,防脫落裝置100根據按壓裝置300的移動而移動。例如,防脫落部件100可在X方向上移動並位於目標物體2上。此時,防脫落裝置30從解除狀態移動至防脫落狀態。在這種防脫落狀態中,防脫落部件100可防止目標物體2從托盤10脫落。 At this time, since the pressing device 300 is connected to the moving unit 200, the moving unit 200 moves according to the movement of the pressing device moving structure 320. For example, the pressing device moving structure 320 may move in the X direction together with the moving unit 200. In addition, since the moving unit 200 is connected to the fall-off prevention member 100, the fall-off prevention member 100 also moves together. That is, the anti-falling device 100 moves according to the movement of the pressing device 300. For example, the fall-off prevention member 100 may move in the X direction and be located on the target object 2. At this time, the fall prevention device 30 moves from the released state to the fall prevention state. In this fall-off prevention state, the fall-off prevention member 100 can prevent the target object 2 from falling off the tray 10.

在防脫落裝置30移動至防脫落狀態之後,按壓裝置300通過按壓裝置驅動結構400朝著與移動單元200相隔開的方向移動。然後,槓桿部120不再被按壓部310施壓,並且槓桿部的另一側122被彈性部件220推向-Z方向。此時,槓桿部120以鉸鏈210為中心轉動,且槓桿部120的一側121朝著+Z方向移動。由於該槓桿部120的另一側122的移動,防脫落部件100處於不再移動的狀態(固定狀態)。在移動單元200包括支承部250的情況下,防脫落部件100由於槓桿部120的另一側122的移動而被支承部250支承。 After the anti-falling device 30 is moved to the anti-falling state, the pressing device 300 is moved in a direction separated from the moving unit 200 by the pressing device driving structure 400. Then, the lever portion 120 is no longer pressed by the pressing portion 310, and the other side 122 of the lever portion is pushed in the −Z direction by the elastic member 220. At this time, the lever portion 120 rotates with the hinge 210 as the center, and one side 121 of the lever portion 120 moves in the + Z direction. Due to the movement of the other side 122 of the lever portion 120, the fall-off preventing member 100 is in a state (fixed state) that is no longer moving. In a case where the moving unit 200 includes a supporting portion 250, the fall-off preventing member 100 is supported by the supporting portion 250 due to the movement of the other side 122 of the lever portion 120.

托盤承載部20在防止目標物體2脫落的狀態下使托盤10移動至作業裝置4。此時,托盤承載部20還可在裝載有托盤10的狀態下轉動。 The tray supporting portion 20 moves the tray 10 to the working device 4 while preventing the target object 2 from falling off. At this time, the tray supporting portion 20 can also be rotated while the tray 10 is loaded.

另外,當傳送設備1在裝載有托盤10的狀態下完成預定的作業之後,需要從托盤10卸載目標物體2。在這種情況下,需要使防脫落裝置30從防脫落狀態轉換為解除狀態。 In addition, after the transfer device 1 completes a predetermined job in a state where the tray 10 is loaded, the target object 2 needs to be unloaded from the tray 10. In this case, it is necessary to switch the fall prevention device 30 from the fall prevention state to the released state.

從解除狀態轉換為防脫落狀態的過程是自防脫落狀態轉換至解除狀態的逆順序。也就是說,按壓裝置300可通過按壓裝置移動結構320的驅動而移動至與槓桿部120對應的位置,按壓部310與槓桿部120通過按壓裝置驅動結構400彼此靠近,並且槓桿部120被按壓部310施壓。通過這種施壓,槓桿部120以鉸鏈210為中心轉動,且防脫落部件100從固定狀態轉換為可移動狀態。然後,防脫落部件100通過根據按壓裝置移動結構320移動的移動單元200而移動,並且防脫落裝置30從防脫落狀態移動至解除狀態。在完成移動之後,按壓裝置300與移動單元200相隔開,且槓桿部120被彈性部件220施壓。通過這種施壓,槓桿部120以鉸鏈210為中心進行轉動,且防脫落裝置100從可移動狀態轉換為固定狀態。 The process of transitioning from the release state to the anti-fall state is the reverse order from the transition from the anti-fall state to the release state. That is, the pressing device 300 can be moved to a position corresponding to the lever portion 120 by the driving of the pressing device moving structure 320, the pressing portion 310 and the lever portion 120 are close to each other by the pressing device driving structure 400, and the lever portion 120 is pressed by the pressing portion 310 pressure. By this pressure, the lever portion 120 rotates around the hinge 210 and the fall-off preventing member 100 is changed from a fixed state to a movable state. Then, the anti-falling member 100 is moved by the moving unit 200 moved according to the pressing device moving structure 320, and the anti-falling device 30 is moved from the anti-falling state to the released state. After the movement is completed, the pressing device 300 is separated from the moving unit 200, and the lever portion 120 is pressed by the elastic member 220. By this pressure, the lever portion 120 is rotated around the hinge 210 and the fall-off prevention device 100 is changed from a movable state to a fixed state.

此外,如上所述的按壓裝置移動結構320和按壓裝置驅動結構400的驅動可由控制部40進行控制。 In addition, the driving of the pressing device moving structure 320 and the pressing device driving structure 400 as described above can be controlled by the control section 40.

另外,在上文所述的實施例中,傳送設備示出為用於轉換托盤位姿的傳送設備,但是本發明的構思並不限於此。也就是說,根據本發明實施例的傳送設備也能夠在不改變托盤位姿的情況下進行傳送。 In addition, in the embodiment described above, the conveying device is shown as a conveying device for changing the position of the tray, but the concept of the present invention is not limited thereto. That is, the transfer device according to the embodiment of the present invention can also transfer without changing the position of the tray.

根據以上所述的實施例,實現了在傳送托盤時能夠更加使目標物體更加穩定地裝載在托盤上的效果。而且,即使在托盤進行轉動或以極快的速度被移送時,也能夠防止目標物體從托盤脫落。此外,實現了能夠最大限度地減少托盤操作以及傳送托盤所需空間的效果。另外,在上述實施例中,按壓裝置驅動結構400描述為使移動按壓裝置300移動,但是根據下述第二實施例的傳送設備1可具有使托盤10移動的按壓裝置驅動結構400。下面,參照圖8對第二實施例進行說明。圖8是示出根據本發明第二實施例的傳送設備的托盤承載部的示意圖 According to the embodiments described above, the effect that the target object can be more stably loaded on the tray when the tray is transferred is achieved. Furthermore, even when the tray is rotated or transferred at an extremely fast speed, the target object can be prevented from falling off the tray. In addition, the effect of minimizing the tray operation and the space required for transferring the tray is achieved. In addition, in the above-described embodiment, the pressing device driving structure 400 is described as moving the mobile pressing device 300, but the conveying device 1 according to the second embodiment described below may have the pressing device driving structure 400 for moving the tray 10. Next, a second embodiment will be described with reference to FIG. 8. FIG. 8 is a schematic diagram showing a tray carrying portion of a conveying apparatus according to a second embodiment of the present invention

參照圖8,按壓裝置300和按壓裝置驅動結構400設置在托盤承載部20上,並且防脫落裝置30可設置在托盤10上。按壓裝置驅動結構400可使裝載在托盤承載部20上的托盤10移動。按壓裝置驅動結構400可通過使托盤10移動使得設置在托盤承載部20上的按壓部310與設置在托盤10上的槓桿部120緊密貼合。此外,與此相反,按壓裝置驅動結構400可使托盤10移動使得按壓部310與槓桿部120相隔開。 Referring to FIG. 8, the pressing device 300 and the pressing device driving structure 400 are disposed on the tray carrying portion 20, and the anti-falling device 30 may be disposed on the tray 10. The pressing device driving structure 400 can move the tray 10 loaded on the tray carrying portion 20. The pressing device driving structure 400 can move the tray 10 such that the pressing portion 310 provided on the tray supporting portion 20 and the lever portion 120 provided on the tray 10 closely adhere to each other. In addition, in contrast, the pressing device driving structure 400 can move the tray 10 so that the pressing portion 310 is separated from the lever portion 120.

這種按壓裝置驅動400例如可以是使裝載於托盤承載部20上的托盤10升降的升降裝置。 Such a pressing device drive 400 may be, for example, an elevating device that raises and lowers the tray 10 loaded on the tray supporting portion 20.

在上文中對根據本發明實施例的傳送設備的具體實施方式進行了說明,但是這僅僅為示例,且本發明並不限於此,並且本發明應解釋為具有以本說明書中所公開的基本思想為基準的最寬的範圍。本領域技術人員可對本發明所公開的實施方式進行組合/置換而實施具有未記載的形態的模型,但這些也應理解為未超出本發明的範圍。此外,本領域技術人員可在本說明書的基礎上容易地對公開的實施方式進行改變或變形,而這種改變或變形顯然也落入本發明的權利要求範圍內。 The specific implementation of the transmission device according to the embodiment of the present invention has been described above, but this is only an example, and the present invention is not limited thereto, and the present invention should be interpreted as having the basic idea disclosed in this specification. The widest range of benchmarks. Those skilled in the art can combine / replace the embodiments disclosed in the present invention to implement a model having an undocumented form, but these should also be understood as not exceeding the scope of the present invention. In addition, those skilled in the art can easily change or modify the disclosed embodiments on the basis of this description, and such changes or modifications obviously fall within the scope of the claims of the present invention.

Claims (11)

一種傳送設備,包括:托盤,用於裝載目標物體;托盤承載部,選擇性地裝載所述托盤;防脫落裝置,可移動地設置在所述托盤上;按壓裝置,包括能夠朝向防脫落裝置前後移動並且選擇性地連接至所述防脫落裝置的按壓部;其中,所述防脫落裝置具有防脫落狀態和解除狀態,在所述防脫落狀態中,所述防脫落裝置限制所述目標物體從所述托盤脫落,並在所述解除狀態中,所述防脫落裝置不限制所述目標物體的移動;其中,所述防脫落裝置配置為:在所述按壓部未與所述防脫落裝置連接的狀態下,所述防脫落裝置在所述托盤上的移動受到限制,且在所述按壓部與所述防脫落裝置連接的狀態下,所述防脫落裝置能夠在所述托盤上移動;所述防脫落裝置在與所述按壓部連接的狀態下能夠在托盤上移動,從而能夠從所述防脫落狀態和所述解除狀態中的某一狀態轉換為另一狀態。A conveying device includes: a tray for loading a target object; a tray carrying part for selectively loading the tray; an anti-falling device movably disposed on the tray; a pressing device including a front and a rear facing the anti-falling device A pressing portion that moves and is selectively connected to the anti-falling device; wherein the anti-falling device has a anti-falling state and a releasing state in which the anti-falling device restricts the target object from The tray falls off, and in the released state, the fall-off prevention device does not restrict the movement of the target object; wherein the fall-off prevention device is configured such that the pressing portion is not connected to the fall-off prevention device In a state where the anti-falling device is restricted from moving on the tray, and in a state where the pressing portion is connected to the anti-falling device, the anti-falling device can move on the tray; The anti-falling device can be moved on the tray in a state of being connected to the pressing portion, so that it can be moved from one of the anti-falling state and the releasing state. State transition to another state. 一種傳送設備,包括:托盤,用於裝載目標物體;托盤承載部,選擇性地裝載所述托盤;以及防脫落裝置,可移動地設置在所述托盤上;其中,所述防脫落裝置具有防脫落狀態和解除狀態,在所述防脫落狀態中,所述防脫落裝置限制所述目標物體從所述托盤脫落,並在所述解除狀態中,所述防脫落裝置不限制所述目標物體的移動;其中,所述防脫落裝置包括:防脫落部件,用於防止所述目標物體脫落;以及移動單元,支承所述防脫落部件使得所述防脫落部件能夠選擇性地移動;其中,所述移動單元包括:彈性部件,對所述防脫落部件施加彈力;以及鉸鏈,可旋轉地支承所述防脫落部件。A conveying device includes: a tray for loading a target object; a tray carrying part for selectively loading the tray; and an anti-falling device movably disposed on the tray; wherein the anti-falling device has a The falling-off state and the releasing state. In the falling-off preventing state, the falling-off preventing device restricts the target object from falling off the tray, and in the releasing state, the falling-off preventing device does not limit the target object. Moving; wherein the anti-falling device includes: a anti-falling member for preventing the target object from falling off; and a moving unit supporting the anti-falling member so that the anti-falling member can be selectively moved; wherein, the The moving unit includes: an elastic member that applies an elastic force to the fall-off preventing member; and a hinge that rotatably supports the fall-off preventing member. 如請求項1所述之傳送設備,其中,所述托盤包括:第一支承部,在所述傳送裝置處於所述防脫落狀態時收納所述防脫落裝置;以及第二支承部,在所述傳送裝置處於所述解除狀態時收納所述防脫落裝置。The conveyance apparatus according to claim 1, wherein the tray includes: a first support portion that accommodates the fall prevention device when the conveyance device is in the fall prevention state; and a second support portion that is in the When the conveying device is in the released state, the anti-falling device is housed. 如請求項1所述之傳送設備,其中,所述防脫落裝置包括:防脫落部件,用於防止所述目標物體脫落;以及移動單元,支承所述防脫落部件使得所述防脫落部件能夠選擇性地移動。The conveying device according to claim 1, wherein the anti-falling device includes: a anti-falling member for preventing the target object from falling off; and a moving unit supporting the anti-falling member so that the anti-falling member can be selected Sexually move. 如請求項2所述之傳送設備,還包括:按壓裝置,包括能夠朝向防脫落裝置前後移動並且選擇性地連接至所述防脫落裝置的按壓部;其中,所述防脫落裝置配置為:在所述按壓部未與所述防脫落裝置連接的狀態下,所述防脫落裝置在所述托盤上的移動受到限制,且在所述按壓部與所述防脫落裝置連接的狀態下,所述防脫落裝置能夠在所述托盤上移動;所述防脫落裝置在與所述按壓部連接的狀態下能夠在托盤上移動,從而能夠從所述防脫落狀態和所述解除狀態中的某一狀態轉換為另一狀態。The transfer device according to claim 2, further comprising: a pressing device including a pressing portion capable of moving forward and backward toward the anti-falling device and selectively connected to the anti-falling device; wherein the anti-falling device is configured to: In a state where the pressing portion is not connected to the anti-falling device, movement of the anti-falling device on the tray is restricted, and in a state where the pressing portion is connected to the anti-falling device, the The anti-falling device can be moved on the tray; the anti-falling device can be moved on the tray in a state connected with the pressing part, so that it can be from one of the anti-falling state and the released state Transition to another state. 如請求項4所述之傳送設備,其中,所述防脫落裝置配置成:在所述防脫落部件被所述按壓裝置施壓時,所述防脫落裝置處於可移動的狀態;以及在所述防脫落部件未被所述按壓裝置施壓的狀態下,所述防脫落裝置通過被所述彈性部件施壓而處於移動受限制的狀態。The transfer device according to claim 4, wherein the anti-falling device is configured such that: when the anti-falling member is pressed by the pressing device, the anti-falling device is in a movable state; and In a state where the anti-falling member is not pressed by the pressing device, the anti-falling device is in a state where movement is restricted by being pressed by the elastic member. 如請求項5所述之傳送設備,其中,所述防脫落裝置配置成:在所述防脫落部件被所述按壓裝置施壓時,所述防脫落裝置處於可移動的狀態;以及在所述防脫落部件未被所述按壓裝置施壓的狀態下,所述防脫落裝置通過被所述彈性部件施壓而處於移動受限制的狀態。The transfer device according to claim 5, wherein the anti-falling device is configured to: when the anti-falling member is pressed by the pressing device, the anti-falling device is in a movable state; and In a state where the anti-falling member is not pressed by the pressing device, the anti-falling device is in a state where movement is restricted by being pressed by the elastic member. 如請求項7所述之傳送設備,其中,所述防脫落部件設置在所述托盤上,並且所述按壓裝置設置在托盤承載部上。The transfer device according to claim 7, wherein the fall-off preventing member is provided on the tray, and the pressing device is provided on a tray bearing portion. 如請求項7所述之傳送設備,其中,所述按壓裝置包括:按壓裝置移動結構,所述按壓裝置移動結構使所述按壓裝置在平行於所述托盤的方向上移動;其中,所述防脫落裝置配置為在所述按壓裝置與所述防脫落裝置連接的狀態下能夠隨著所述按壓裝置的移動而移動。The transfer device according to claim 7, wherein the pressing device comprises: a pressing device moving structure that moves the pressing device in a direction parallel to the tray; wherein the anti- The release device is configured to be movable with the movement of the pressing device in a state where the pressing device is connected to the anti-falling device. 如請求項7所述之傳送設備,其中,所述托盤承載部包括:按壓裝置驅動結構,所述按壓裝置驅動結構使所述按壓裝置移動使得所述按壓裝置連接至所述防脫落裝置。The conveying device according to claim 7, wherein the tray carrying section includes a pressing device driving structure that moves the pressing device so that the pressing device is connected to the anti-falling device. 如請求項7所述之傳送設備,其中,所述托盤承載部包括:按壓裝置驅動結構,所述按壓裝置驅動結構使所述托盤移動使得所述按壓裝置連接至所述防脫落裝置。The conveying device according to claim 7, wherein the tray carrying portion includes a pressing device driving structure that moves the tray so that the pressing device is connected to the anti-falling device.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2865214Y (en) * 2004-10-04 2007-01-31 雅马哈发动机株式会社 Surface mounting machine
TW201603171A (en) * 2014-05-21 2016-01-16 細美事有限公司 Pallet table for supporting semiconductor packages

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07237708A (en) * 1994-03-02 1995-09-12 Canon Inc Tray positioning stand and tray positioning method
TW396334B (en) * 1996-07-12 2000-07-01 Sony Corp Disk tray and tray allocation box
JP2003137432A (en) * 2001-11-01 2003-05-14 Sansha Electric Mfg Co Ltd Tray stacking and cargo arrival system
JP2010139370A (en) * 2008-12-11 2010-06-24 Beckman Coulter Inc Rack tray, rack and rack transport system
JP5468250B2 (en) * 2008-12-11 2014-04-09 ベックマン コールター, インコーポレイテッド Rack transport system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2865214Y (en) * 2004-10-04 2007-01-31 雅马哈发动机株式会社 Surface mounting machine
TW201603171A (en) * 2014-05-21 2016-01-16 細美事有限公司 Pallet table for supporting semiconductor packages

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