TWI626392B - Large supply of gas - Google Patents
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- TWI626392B TWI626392B TW106135903A TW106135903A TWI626392B TW I626392 B TWI626392 B TW I626392B TW 106135903 A TW106135903 A TW 106135903A TW 106135903 A TW106135903 A TW 106135903A TW I626392 B TWI626392 B TW I626392B
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Abstract
一種供氣方法，適用於在一供氣裝置執行，供氣裝置包含多個氣體供應單元及一儲氣單元，供氣方法包含以下步驟：開啟其中之一氣體供應單元(定義為第一氣體供應單元)以供應氣體至儲氣單元的儲氣空間，而使儲氣空間的氣體壓力值達到一預定範圍；及使儲氣單元輸出氣體至下游端，並監控儲氣空間的氣體壓力值，若儲氣空間的氣體壓力值低於預定範圍至一低壓值之間，則開啟其中另一氣體供應單元以與第一氣體供應單元一起供應氣體至儲氣空間，或開啟全部氣體供應單元一起聯合供應氣體至該儲氣單元。 A gas supply method, which is suitable for execution in a gas supply device, the gas supply device comprises a plurality of gas supply units and a gas storage unit, and the gas supply method comprises the steps of: opening one of the gas supply units (defined as the first gas supply) Unit) supplying a gas to the gas storage space of the gas storage unit, and bringing the gas pressure value of the gas storage space to a predetermined range; and causing the gas storage unit to output the gas to the downstream end, and monitoring the gas pressure value of the gas storage space, if If the gas pressure value of the gas storage space is lower than the predetermined range to a low pressure value, the other gas supply unit is turned on to supply the gas together with the first gas supply unit to the gas storage space, or the entire gas supply unit is turned on together. Gas to the gas storage unit.
Description
本發明是有關於一種供氣方法及供氣裝置，特別是指一種可大量供氣的供氣方法及供氣裝置。 The invention relates to a gas supply method and a gas supply device, in particular to a gas supply method and a gas supply device which can supply a large amount of gas.
目前許多工業的製程中會需要使用氣體，例如電子業或半導體業需要使用氣相的Cl2、SiH2Cl2、SiHCl3、WF6等，在常溫下為氣液兩相的液化氣體。為了方便運輸及儲存，大多氣體是以液態存放於鋼瓶中，而需要供氣時再將液態氣體加熱以轉化為氣態。 At present, gas is required in many industrial processes. For example, the electronics industry or the semiconductor industry needs to use gas phase Cl 2 , SiH 2 Cl 2 , SiHCl 3 , WF 6 , etc., and it is a gas-liquid two-phase liquefied gas at normal temperature. In order to facilitate transportation and storage, most of the gas is stored in a liquid state in a cylinder, and when the gas is supplied, the liquid gas is heated to be converted into a gaseous state.
現有的一種供氣方式，通常是在一氣瓶櫃內設置兩個鋼瓶，其中一個鋼瓶連接供氣管路以提供氣體，而另一個鋼瓶則為備用，待使用中的鋼瓶快用完時，才會啟用備用鋼瓶。由於供氣管路是單一管路，僅允許一個鋼瓶供氣操作，縱算切換時兩個鋼瓶短暫時間同時供氣，也會因單一管路設計的關係，使得壓力較大的鋼瓶壓抑壓力較小的鋼瓶，不僅只會由壓力較大的鋼瓶單線供氣，甚至可能出現壓力較小的鋼瓶被倒灌氣體或壓抑，造成所謂的搶氣問題，一旦當氣體需求量突然增大時，由於加熱裝置無法立刻躍升為 大功率狀態加熱液態，使轉化為氣態，這需要一段時間；在鋼瓶內的液體量，在氣體用量在大需求時，並不是滿位或夠量以上，往往被加熱的區域常常液體量不夠，縱使提供全載功率亦無法大量用在加熱液體上，有可能大量功率耗在氣體區而不是液體區，因此，供氣的鋼瓶內液態氣體無法短時間內蒸發大量氣態，無法滿足突然增加的大需求量。 One type of gas supply is usually provided by two cylinders in a gas cylinder cabinet, one of which is connected to the gas supply line to supply gas, and the other is reserved for use, and the cylinder to be used is used up soon. Enable spare cylinders. Since the gas supply pipeline is a single pipeline, only one cylinder is allowed to supply gas. When the two cylinders are supplied for a short time at the same time, the pressure of the cylinder with a larger pressure is less due to the relationship of the single pipeline design. The cylinders will not only supply gas from a single line of pressurized cylinders, but may even cause the cylinders with less pressure to be refilled or suppressed, causing so-called gas grabbing problems, once the gas demand suddenly increases, due to the heating device Can't jump to The high-power state heats the liquid state and converts it into a gaseous state, which takes a period of time; the amount of liquid in the cylinder is not full or sufficient when the amount of gas is in a large demand, and the area to be heated is often insufficient in liquid amount. Even if the full-load power is supplied, it cannot be used in a large amount on the heating liquid. It is possible that a large amount of power is consumed in the gas region instead of the liquid region. Therefore, the liquid gas in the supplied gas cylinder cannot evaporate a large amount of gas in a short time, and cannot satisfy the sudden increase. Demand.
此外，現有的另有一種供氣方式是在氣瓶櫃外圍加裝大容積的儲桶，先使氣瓶櫃內的鋼瓶輸出的氣體進入儲桶內，再經由儲桶提供給下游端的用戶，藉此希望能由大容積的儲桶在供氣需求量增大時，暫時提供不足的量。此種供氣方式是將氣瓶櫃內的兩個鋼瓶的氣體管路匯集至單一相同管徑大小的管線後再輸送到儲桶，當兩個鋼瓶一起開啟時，會由壓力較大的鋼瓶供氣，而其中壓力較低的鋼瓶則會有被倒灌氣體或被壓抑的問題，進而造成兩鋼瓶間搶氣的問題。加熱裝置提供封閉空間的鋼瓶維持等溫狀態的功率，當躍升為對開放空間的鋼瓶加熱，且可大量供氣體給下游端使用狀態的功率，則需要一段時間；儲桶就是為這目的而產生地。儲桶的體積大，能存放較多的氣體，但所能供給下游客戶端指定的壓力及氣體量，僅占儲桶氣體全量的少部分，儲桶內大部份的氣體，在用量大需求時，是無法被取用地。儲桶體積大本身便是一個工程設計上的困擾，不僅占空間，且因為體積大，大量的低壓蒸氣在儲 桶內，一旦環境溫度下降，低壓蒸氣即可能達到飽和狀態而液化，所以需要反覆加熱而消耗能源。又，依據氣體流動的特性會由高壓處往低壓處流動，所以應使鋼瓶的壓力較大於儲桶的壓力，並使儲桶的壓力大於下游端的壓力，當下游端的需求量大增時，儲桶內的壓力下降很快，但是受限於兩個鋼瓶仍由單一管線供氣，無法在一較短的特定時間內大量及時補充儲桶內的氣體，而無法即時穩定的大量供氣至下游端。 In addition, another existing gas supply method is to install a large-capacity storage tank on the periphery of the gas cylinder cabinet, and firstly, the gas outputted from the steel cylinder in the gas cylinder cabinet is introduced into the storage tank, and then supplied to the downstream end user through the storage tank. Therefore, it is desirable to temporarily provide an insufficient amount when the supply demand of the large-capacity storage tank is increased. The gas supply method is to collect the gas pipes of the two cylinders in the gas cylinder cabinet into a single pipeline of the same diameter and then transport it to the storage tank. When the two steel cylinders are opened together, the cylinders with higher pressure will be used. Gas supply, and the cylinder with lower pressure will have the problem of being refilled or suppressed, which will cause the problem of gas grabbing between the two cylinders. The heating device provides the closed space of the cylinder to maintain the power of the isothermal state. When the jump is to heat the cylinder of the open space, and the power of the gas can be supplied to the downstream end in a large amount, it takes a period of time; the storage bucket is generated for this purpose. Ground. The storage tank is large in size and can store more gas, but it can supply the pressure and gas volume specified by the downstream client, which only accounts for a small part of the total volume of the storage tank. Most of the gas in the storage tank is in large demand. When it is, it cannot be taken. The large volume of the bucket itself is an engineering design problem, not only occupying space, but also because of its large volume, a large amount of low-pressure steam is stored. In the barrel, once the ambient temperature drops, the low-pressure vapor may reach saturation and liquefy, so it is necessary to repeatedly heat up to consume energy. Moreover, depending on the characteristics of the gas flow, it will flow from the high pressure to the low pressure, so the pressure of the cylinder should be greater than the pressure of the storage tank, and the pressure of the storage tank is greater than the pressure of the downstream end. When the demand of the downstream end is greatly increased, the storage is performed. The pressure in the barrel drops rapidly, but it is limited by the fact that the two cylinders are still supplied by a single line. It is not possible to replenish the gas in the tank in a timely manner in a short period of time, and it is impossible to stabilize the large amount of gas supply to the downstream. end.
顯然目前業界普遍長期受限於單一管路供氣的思維及困擾。 Obviously, the current industry is generally limited by the thinking and troubles of single pipeline gas supply.
因此，本發明之其中一目的，即在提供一種較能迅速大量供氣的供氣方法。 Accordingly, it is an object of the present invention to provide a gas supply method which is capable of supplying a relatively large amount of gas quickly.
於是，本發明供氣方法在一些實施態樣中，是適用於在一供氣裝置執行，該供氣裝置包含多個氣體供應單元及一儲氣單元，每一氣體供應單元包括可供應氣體的一氣體鋼瓶、設於該氣體鋼瓶的一加熱器、連接該氣體鋼瓶以輸送氣體的一連接管路，及設於該連接管路以控制該連接管路開關的一控制閥，該儲氣單元包括與該等氣體供應單元的連接管路連接且用以接收該等氣體鋼瓶之氣體的一儲氣空間、用以對該儲氣空間加熱的一加熱設備，及連接該儲氣空間以輸出氣體的一輸出管路，該供氣方法包含以下步驟： 開啟其中之一氣體供應單元(定義為第一氣體供應單元)以供應氣體至該儲氣空間，而使該儲氣空間的氣體壓力值達到一預定範圍；及使該儲氣單元輸出氣體至下游端，並監控該儲氣空間的氣體壓力值，若該儲氣空間的氣體壓力值低於該預定範圍至一低壓值之間，則開啟其中另一氣體供應單元(定義為第二氣體供應單元)以與該第一氣體供應單元一起聯合供應氣體至該儲氣空間。 Thus, in some embodiments, the gas supply method of the present invention is suitable for execution in a gas supply device comprising a plurality of gas supply units and a gas storage unit, each gas supply unit comprising a gas supplyable unit a gas cylinder, a heater disposed in the gas cylinder, a connecting pipe connecting the gas cylinder to deliver gas, and a control valve disposed on the connecting pipe to control the connecting pipe switch, the gas storage unit includes a gas storage space connected to the connecting line of the gas supply unit and receiving gas of the gas cylinders, a heating device for heating the gas storage space, and a gas connecting the gas storage space for outputting gas An output line, the gas supply method comprising the following steps: Opening one of the gas supply units (defined as the first gas supply unit) to supply gas to the gas storage space, and bringing the gas pressure value of the gas storage space to a predetermined range; and causing the gas storage unit to output the gas to the downstream And monitoring the gas pressure value of the gas storage space, if the gas pressure value of the gas storage space is lower than the predetermined range to a low pressure value, opening another gas supply unit (defined as the second gas supply unit) And supplying gas to the gas storage space in conjunction with the first gas supply unit.
在一些實施態樣中，若該儲氣空間的氣體壓力值更低於該低壓值時，則再開啟其中另一氣體供應單元(定義為第三氣體供應單元)一起聯合供應氣體至該儲氣空間。 In some embodiments, if the gas pressure value of the gas storage space is lower than the low pressure value, another gas supply unit (defined as a third gas supply unit) is further turned on to jointly supply the gas to the gas storage. space.
在一些實施態樣中，在該第一、第二、第三氣體供應單元一起聯合供應氣體的狀態下，若該儲氣空間的氣體壓力值高於該預定範圍，則關閉該第三氣體供應單元。 In some embodiments, in a state in which the first, second, and third gas supply units are combined to supply a gas, if the gas pressure value of the gas storage space is higher than the predetermined range, the third gas supply is turned off. unit.
在一些實施態樣中，若關閉該第三氣體供應單元後，該儲氣空間的氣體壓力值仍持續高於該預定範圍，則關閉該第二氣體供應單元。 In some embodiments, if the gas pressure value of the gas storage space continues to be higher than the predetermined range after the third gas supply unit is turned off, the second gas supply unit is turned off.
在一些實施態樣中，在該儲氣單元輸出氣體的過程中，當該儲氣空間的氣體壓力值低於該預定範圍時，則以該等氣體供應單元中氣體鋼瓶內所剩餘氣體量較少者優先開啟或全開啟，而當該儲氣空間的氣體壓力值高於該預定範圍時，則以該等氣體供應單元中氣體鋼瓶內所剩餘氣體量較多者優先關閉，以使該儲氣空間 的氣體壓力值維持在該預定範圍。 In some embodiments, in the process of outputting gas in the gas storage unit, when the gas pressure value of the gas storage space is lower than the predetermined range, the amount of gas remaining in the gas cylinder in the gas supply unit is compared The lesser is preferentially turned on or fully turned on, and when the gas pressure value of the gas storage space is higher than the predetermined range, the amount of gas remaining in the gas cylinder in the gas supply unit is preferentially closed to make the storage Gas space The gas pressure value is maintained within the predetermined range.
在一些實施態樣中，該加熱設備加熱該儲氣空間，使該儲氣空間內的氣體溫度高於該氣體鋼瓶內的氣體溫度。 In some embodiments, the heating device heats the gas storage space such that the gas temperature in the gas storage space is higher than the gas temperature in the gas cylinder.
在一些實施態樣中，該供氣方法包含以下步驟：開啟其中之一氣體供應單元以供應氣體至該儲氣空間，而使該儲氣空間的氣體壓力值達到一預定範圍；及使該儲氣單元輸出氣體至下游端，並監控該儲氣空間的氣體壓力值，一旦大量氣體需求時，若該儲氣空間的氣體壓力值低於該預定範圍至一低壓值之間，則亦可開啟全部氣體供應單元一起聯合供應氣體至該儲氣空間。 In some embodiments, the gas supply method includes the steps of: opening one of the gas supply units to supply gas to the gas storage space, and causing the gas pressure value of the gas storage space to reach a predetermined range; and causing the storage The gas unit outputs the gas to the downstream end, and monitors the gas pressure value of the gas storage space. When a large amount of gas is required, if the gas pressure value of the gas storage space is lower than the predetermined range to a low pressure value, the gas unit may be turned on. All of the gas supply units together supply gas to the gas storage space.
在一些實施態樣中，當該儲氣空間的氣體壓力值高於該預定範圍時，則以該等氣體供應單元中氣體鋼瓶內所剩餘氣體量較多者優先關閉，以使該儲氣空間的氣體壓力值維持在該預定範圍。 In some embodiments, when the gas pressure value of the gas storage space is higher than the predetermined range, the gas remaining in the gas cylinder in the gas supply unit is preferentially closed to make the gas storage space. The gas pressure value is maintained within the predetermined range.
因此，本發明之其中另一目的，即在提供一種較能迅速大量供氣的供氣裝置。 Accordingly, another object of the present invention is to provide a gas supply device which is capable of supplying a relatively large amount of gas quickly.
於是，本發明供氣裝置在一些實施態樣中，是包含多個氣體供應單元及一儲氣單元。每一氣體供應單元包括可供應氣體的一氣體鋼瓶、設於該氣體鋼瓶的一加熱器、連接該氣體鋼瓶以輸送氣體的一連接管路、設於該連接管路以控制該連接管路開關的一控制閥，及設於該連接管路的一單向閥。該儲氣單元包括與該等氣 體供應單元的連接管路連接且用以接收該等氣體鋼瓶之氣體的一儲氣空間、用以對該儲氣空間加熱的一加熱設備，及連接該儲氣空間以輸出氣體的一輸出管路。其中，該單向閥介於該控制閥與該儲氣單元之間，用以使氣體只能由該氣體鋼瓶往該儲氣空間單向流動。 Thus, in some embodiments, the gas supply device of the present invention comprises a plurality of gas supply units and a gas storage unit. Each gas supply unit includes a gas cylinder that can supply gas, a heater disposed in the gas cylinder, a connecting pipe connecting the gas cylinder to deliver gas, and a connecting pipe disposed on the connecting pipe to control the connecting pipe switch. a control valve and a check valve disposed in the connecting line. The gas storage unit includes the gas a gas storage space for connecting the gas of the gas cylinders, a heating device for heating the gas storage space, and an output pipe connecting the gas storage space for outputting gas road. Wherein, the one-way valve is interposed between the control valve and the gas storage unit for allowing gas to flow only from the gas cylinder to the gas storage space in one direction.
在一些實施態樣中，該儲氣單元還包括一壓力計及一溫度計，該壓力計用以測量該儲氣空間內的氣體壓力，該溫度計用以測量該儲氣空間內的局部區域氣體的溫度。 In some embodiments, the gas storage unit further includes a pressure gauge for measuring gas pressure in the gas storage space, and a thermometer for measuring local gas in the gas storage space. temperature.
在一些實施態樣中，每一氣體供應單元還包括一秤重裝置，用以測量該氣體鋼瓶的實際重量。 In some embodiments, each gas supply unit further includes a weighing device for measuring the actual weight of the gas cylinder.
在一些實施態樣中，還包含一控制單元，該控制單元連接該等氣體供應單元及該儲氣單元，用以根據該儲氣空間的氣體壓力控制該等控制閥開或關，以保持該儲氣空間的氣體壓力在一預定範圍內。 In some embodiments, a control unit is further connected to the gas supply unit and the gas storage unit for controlling the control valves to be turned on or off according to the gas pressure of the gas storage space to maintain the The gas pressure of the gas storage space is within a predetermined range.
在一些實施態樣中，該控制單元可接收前述溫度計之訊號，並可控制該加熱設備，用以控制該儲氣單元的溫度在一設定範圍。 In some implementations, the control unit can receive the signal of the aforementioned thermometer and can control the heating device to control the temperature of the gas storage unit within a set range.
本發明具有以下功效：藉由該儲氣單元的儲氣空間可接收多個氣體供應單元一起聯合供應氣體，以在有大量供氣需求時，能夠及時補充氣體而大量地供氣，以解決大用量氣體需求供應 不足的問題。 The invention has the following effects: the gas storage space of the gas storage unit can receive a plurality of gas supply units to jointly supply the gas, so that when there is a large demand for gas supply, the gas can be replenished in time and the gas is supplied in a large amount to solve the problem. Demand gas supply Insufficient problems.
1‧‧‧氣體供應單元 1‧‧‧ gas supply unit
11‧‧‧氣體鋼瓶 11‧‧‧ gas cylinder
12‧‧‧加熱器 12‧‧‧heater
13‧‧‧連接管路 13‧‧‧Connecting pipe
14‧‧‧控制閥 14‧‧‧Control valve
15‧‧‧接頭閥 15‧‧‧ joint valve
16‧‧‧秤重裝置 16‧‧‧Weighing device
17‧‧‧壓力計 17‧‧‧ Pressure gauge
18‧‧‧溫度計 18‧‧‧ thermometer
19‧‧‧單向閥 19‧‧‧ check valve
2‧‧‧儲氣單元 2‧‧‧ gas storage unit
21‧‧‧儲氣空間 21‧‧‧ gas storage space
22‧‧‧加熱設備 22‧‧‧ heating equipment
23‧‧‧輸出管路 23‧‧‧Output line
24‧‧‧壓力計 24‧‧‧ pressure gauge
25‧‧‧溫度計 25‧‧‧ thermometer
26‧‧‧調壓閥 26‧‧‧pressure regulator
3‧‧‧控制單元 3‧‧‧Control unit
S1‧‧‧步驟 S1‧‧‧ steps
S2‧‧‧步驟 S2‧‧‧ steps
S3‧‧‧步驟 S3‧‧‧ steps
本發明之其他的特徵及功效，將於參照圖式的實施方式中清楚地呈現，其中：圖1是本發明供氣裝置的一實施例的一示意圖；圖2是說明該實施例的供氣方法的一步驟流程方塊圖；及圖3是說明該實施例的一儲氣空間的變化實施例的一示意圖。 Other features and advantages of the present invention will be apparent from the embodiments of the present invention, wherein: Figure 1 is a schematic view of an embodiment of the air supply device of the present invention; and Figure 2 is a view showing the air supply of the embodiment. A one-step flow block diagram of the method; and FIG. 3 is a schematic diagram illustrating a variation of a gas storage space of the embodiment.
參閱圖1與圖2，本發明供氣裝置之一實施例，包含多個氣體供應單元1及一儲氣單元2。 Referring to Figures 1 and 2, an embodiment of the gas supply device of the present invention comprises a plurality of gas supply units 1 and a gas storage unit 2.
每一氣體供應單元1包括可供應氣體的一氣體鋼瓶11、設於該氣體鋼瓶11的一加熱器12、連接該氣體鋼瓶11以輸送氣體的一連接管路13、設於該連接管路13以控制該連接管路13開關的一控制閥14、設於該連接管路13以連接該氣體鋼瓶11的一接頭閥15、用以測量該氣體鋼瓶11實際重量的一秤重裝置16、用以測量該連接管路13的氣體壓力的一壓力計17，及用以測量該連接管路13內的氣體溫度的一溫度計18。在本實施例中，該氣體鋼瓶11可以是立式氣體鋼瓶，或者臥式氣體鋼瓶(y-cylinder)；該加熱器12為包覆氣體鋼瓶11的加熱夾克(Heating jacket)用以對氣體 鋼瓶11加熱。該氣體鋼瓶11是儲存液態氣體，並可由加熱器12加熱以使液態氣體蒸發為氣態，再經由連接管路13輸送。 Each gas supply unit 1 includes a gas cylinder 11 for supplying gas, a heater 12 disposed in the gas cylinder 11, a connecting pipe 13 connecting the gas cylinder 11 to deliver gas, and a connecting pipe 13 disposed at the connecting pipe 13 a control valve 14 for controlling the connection of the connecting line 13 , a joint valve 15 disposed on the connecting line 13 for connecting the gas cylinder 11 , and a weighing device 16 for measuring the actual weight of the gas cylinder 11 A pressure gauge 17 for measuring the gas pressure of the connecting line 13 and a thermometer 18 for measuring the temperature of the gas in the connecting line 13 are provided. In this embodiment, the gas cylinder 11 may be a vertical gas cylinder or a horizontal gas cylinder (y-cylinder); the heater 12 is a heating jacket covering the gas cylinder 11 for gas The cylinder 11 is heated. The gas cylinder 11 stores a liquid gas and can be heated by the heater 12 to evaporate the liquid gas into a gaseous state and then transported via the connecting line 13.
該儲氣單元2包括與該等氣體供應單元1的連接管路13連接且用以接收該等氣體鋼瓶11之氣體的一儲氣空間21、用以對該儲氣空間21加熱的一加熱設備22、連接該儲氣空間21以輸出氣體的一輸出管路23、用以測量該儲氣空間21的氣體壓力的一壓力計24、用以測量該儲氣空間21的局部區域氣體溫度的兩個溫度計25，及設於該輸出管路23的一調壓閥26。在本實施例中，溫度計25是以兩個為例，但是只有一個或者兩個以上亦可實施，可視實際需求而調整。每一氣體供應單元1還包括設於該連接管路13且介於該控制閥14與該儲氣單元2之間的一單向閥19，用以使氣體只能由該氣體鋼瓶11往該儲氣空間21單向流動。在本實施例中，該儲氣空間21是由管徑大於連接管路13的管徑的一個直管所界定，而該加熱設備22是包覆該直管的加熱夾克(Heating jacket)；在實施的態樣上，可以是將該儲氣空間21的管徑設計為連接管路13管徑的兩倍，不以此為限，只要大於連接管路13的管徑，即可達到效果；而多個連接管路13連接進入該儲氣空間21的孔口位置，彼此間距也可以是連接管路13管徑的五倍，不以此為限，只要大於連接管路13的管徑，這取決於儲氣空間21內容積大小，以能使氣體供應單元1可迅速及時大量供氣，且在供氣時儲氣空間21兩端壓差要盡量 減少；由於該儲氣空間21管徑尺寸與上述連接管路13連接進入該儲氣空間21孔口位置的間距的設計與選取，使得由多個連接管路13進入該儲氣空間21的氣體流動狀況彼此干擾降低，便可達成本發明功效。而在變化的實施例，該儲氣空間21亦可由多段彎曲的彎管(見圖3)所界定。 The gas storage unit 2 includes a gas storage space 21 connected to the connecting line 13 of the gas supply unit 1 and receiving the gas of the gas cylinders 11 , and a heating device for heating the gas storage space 21 . An output line 23 for connecting the gas storage space 21 to output gas, a pressure gauge 24 for measuring the gas pressure of the gas storage space 21, and two gas temperatures for measuring the local area of the gas storage space 21. A thermometer 25 and a pressure regulating valve 26 disposed in the output line 23. In the present embodiment, the thermometer 25 is exemplified by two, but only one or two or more may be implemented, and may be adjusted according to actual needs. Each gas supply unit 1 further includes a check valve 19 disposed between the control valve 14 and the gas storage unit 2 for allowing gas to pass from the gas cylinder 11 to the gas cylinder 11 The gas storage space 21 flows in one direction. In this embodiment, the gas storage space 21 is defined by a straight pipe having a pipe diameter larger than the pipe diameter of the connecting pipe 13, and the heating device 22 is a heating jacket covering the straight pipe; In an embodiment, the diameter of the gas storage space 21 may be designed to be twice the diameter of the connecting pipe 13 , and not limited thereto, as long as it is larger than the pipe diameter of the connecting pipe 13 , the effect can be achieved; The plurality of connecting lines 13 are connected to the position of the opening of the gas storage space 21, and the distance between the plurality of connecting lines 13 may be five times the diameter of the connecting line 13. Unless otherwise, as long as it is larger than the diameter of the connecting line 13, This depends on the internal volume of the gas storage space 21, so that the gas supply unit 1 can supply a large amount of gas quickly and in a timely manner, and the pressure difference between the two ends of the gas storage space 21 should be as large as possible when supplying air. Reduction; the design and selection of the spacing between the diameter of the gas storage space 21 and the connection of the connecting pipe 13 into the orifice of the gas storage space 21, so that the gas entering the gas storage space 21 by the plurality of connecting pipes 13 The effects of the present invention can be achieved by reducing the flow conditions to each other. In a variant embodiment, the gas storage space 21 can also be defined by a plurality of curved bends (see Figure 3).
在本實施例中，氣體供應單元1是以三個氣體供應單元1為例說明，但不以此為限，因應不同需求本發明也可以設計為兩個，或四個等多個氣體供應單元1。為了方便說明起見，將三個氣體供應單元1各定義為第一、第二、第三氣體供應單元，其中第一氣體供應單元位於圖1中的左邊位置、第二氣體供應單元位於圖1中的中間位置、第三氣體供應單元位於圖1中的右邊位置。使用該供氣裝置的供氣方法包含以下步驟：步驟S1，開啟其中之一氣體供應單元1(定義為第一氣體供應單元)以供應氣體至該儲氣空間21，此時第一氣體供應單元的該加熱器12對該氣體鋼瓶11加熱，該控制閥14被開啟，該氣體鋼瓶11內的氣體經由該連接管路13進入該儲氣空間21，而使該儲氣空間21的氣體壓力值及溫度達到一預定範圍。此時該加熱設備22加熱以使該儲氣空間21內的氣體溫度高於該氣體鋼瓶11內的氣體溫度，但壓力不大於該氣體鋼瓶11內的壓力；及步驟S2，使該儲氣單元2輸出氣體至下游端，並監控該 儲氣空間21的氣體壓力值，若因下游端的氣體需求使該儲氣空間21的氣體壓力值低於該預定範圍至一低壓值之間，則開啟其中另一氣體供應單元1(定義為第二氣體供應單元)以與該第一氣體供應單元1一起聯合供應氣體至該儲氣空間21。進一步地，若該儲氣空間21的氣體壓力值更低於該低壓值時，則再開啟其中另一氣體供應單元1(定義為第三氣體供應單元)一起聯合供應氣體至該儲氣空間21，進而供應下游端更大量的氣體需求。亦即，若該儲氣空間21的氣體壓力值低於預定範圍時，可依序開啟其餘氣體供應單元1。 In the present embodiment, the gas supply unit 1 is exemplified by three gas supply units 1 , but not limited thereto. The present invention can also be designed as two or four gas supply units according to different requirements. 1. For convenience of explanation, the three gas supply units 1 are each defined as a first, second, and third gas supply unit, wherein the first gas supply unit is located at the left position in FIG. 1, and the second gas supply unit is located in FIG. The intermediate position in the middle, the third gas supply unit is located at the right position in FIG. The gas supply method using the gas supply device includes the following steps: Step S1, one of the gas supply units 1 (defined as a first gas supply unit) is turned on to supply gas to the gas storage space 21, at which time the first gas supply unit The heater 12 heats the gas cylinder 11, the control valve 14 is opened, and the gas in the gas cylinder 11 enters the gas storage space 21 via the connecting line 13, and the gas pressure value of the gas storage space 21 is made. And the temperature reaches a predetermined range. At this time, the heating device 22 is heated such that the temperature of the gas in the gas storage space 21 is higher than the temperature of the gas in the gas cylinder 11, but the pressure is not greater than the pressure in the gas cylinder 11; and in step S2, the gas storage unit is made 2 output gas to the downstream end and monitor the The gas pressure value of the gas storage space 21, if the gas pressure value of the gas storage space 21 is lower than the predetermined range to a low pressure value due to the gas demand at the downstream end, the other gas supply unit 1 is opened (defined as the first The two gas supply unit) supplies gas to the gas storage space 21 in conjunction with the first gas supply unit 1. Further, if the gas pressure value of the gas storage space 21 is lower than the low pressure value, the other gas supply unit 1 (defined as the third gas supply unit) is further turned on to jointly supply the gas to the gas storage space 21 In turn, a greater amount of gas demand at the downstream end is supplied. That is, if the gas pressure value of the gas storage space 21 is lower than a predetermined range, the remaining gas supply unit 1 can be sequentially turned on.
更進一步地，還可包含步驟S3，在該第一、第二、第三氣體供應單元1一起聯合供應氣體的狀態下，若該儲氣空間21的氣體壓力值高於該預定範圍，則關閉該第三氣體供應單元1。再進一步地，若關閉該第三氣體供應單元1後，該儲氣空間21的氣體壓力值仍持續高於該預定範圍，則關閉該第二氣體供應單元1。亦即，當該儲氣空間21的氣體壓力值高於該預定範圍時，先關閉該等氣體供應單元1中氣體鋼瓶11內所剩餘氣體量較多者，直到該儲氣空間21的氣體壓力值位於該預定範圍內。如此，可以使不同氣體供應單元1的氣體鋼瓶11所剩的氣體量有差異，因而使不同氣體供應單元1的氣體鋼瓶11用完的時間會有先後，以利於逐一更換氣體鋼瓶11。 Further, the step S3 may be further included, in a state in which the first, second, and third gas supply units 1 are jointly supplied with a gas, if the gas pressure value of the gas storage space 21 is higher than the predetermined range, the process is closed. The third gas supply unit 1. Further, if the gas pressure value of the gas storage space 21 continues to be higher than the predetermined range after the third gas supply unit 1 is turned off, the second gas supply unit 1 is turned off. That is, when the gas pressure value of the gas storage space 21 is higher than the predetermined range, the gas remaining in the gas cylinder 11 in the gas supply unit 1 is first turned off until the gas pressure of the gas storage space 21 is reached. The value is within the predetermined range. In this way, the amount of gas remaining in the gas cylinders 11 of the different gas supply units 1 can be made different, so that the time for the gas cylinders 11 of the different gas supply units 1 to be used up is successive, so as to facilitate the gas cylinders 11 to be replaced one by one.
換言之，在該儲氣單元2輸出氣體的過程中，當該儲氣 空間21的氣體壓力值低於該預定範圍時，則以該等氣體供應單元1中氣體鋼瓶11內所剩餘氣體量較少者優先開啟，而當該儲氣空間21的氣體壓力值高於該預定範圍時，則以該等氣體供應單元1中氣體鋼瓶11內所剩餘氣體量較多者優先關閉，以使該儲氣空間21的氣體壓力值維持在該預定範圍，並且使不同氣體供應單元1的氣體鋼瓶11所剩的氣體量有差異，而能使不同氣體供應單元1的氣體鋼瓶11用完的時間會有先後，以利於逐一更換氣體鋼瓶11。 In other words, in the process of outputting gas by the gas storage unit 2, when the gas is stored When the gas pressure value of the space 21 is lower than the predetermined range, the gas remaining in the gas cylinder 11 in the gas supply unit 1 is preferentially opened, and when the gas pressure value of the gas storage space 21 is higher than the gas pressure value. When the range is predetermined, the amount of gas remaining in the gas cylinder 11 in the gas supply unit 1 is preferentially closed, so that the gas pressure value of the gas storage space 21 is maintained within the predetermined range, and different gas supply units are made. The amount of gas remaining in the gas cylinder 11 of 1 is different, and the time for the gas cylinders 11 of the different gas supply units 1 to be used up may be successively used to facilitate the gas cylinders 11 to be replaced one by one.
具體而言，該供氣方法是先打開第一氣體供應單元1的控制閥14，以使氣體鋼瓶11內的氣體供應至該儲氣空間21。該儲氣空間21由該加熱設備22加熱以使該儲氣空間21內的氣體為過熱氣體，以避免氣體冷凝成為液體，但是該儲氣空間21內的氣體壓力不大於氣體鋼瓶11內的飽和蒸汽壓力，以使氣體鋼瓶11內的氣體可流動至該儲氣空間21。亦即，氣體鋼瓶11內的壓力需大於或等於儲氣空間21內的壓力，如此氣體才能傾向由氣體鋼瓶11往儲氣空間21流動。除了第一氣體供應單元1之外的其餘氣體供應單元1雖然未供氣，但是各氣體供應單元1的氣體鋼瓶11仍由加熱器12加熱，所加熱量僅提供損失於環境的熱量，以維持氣體鋼瓶11的指定壓力，可以隨時開啟供氣，一旦需求量大時，可在短時間內躍昇大功率加熱液體，期能迅速大量供氣。當該儲氣空間21內的氣體壓力達到預定範圍時即可供氣給下游端，在下游端使用過程中若突然增 加使用需求，會使該儲氣空間21內的氣體壓力降低，依據該儲氣空間21內氣體壓力降低的程度來決定要開啟幾個氣體供應單元1。 Specifically, the gas supply method is to first open the control valve 14 of the first gas supply unit 1 to supply the gas in the gas cylinder 11 to the gas storage space 21. The gas storage space 21 is heated by the heating device 22 to make the gas in the gas storage space 21 a superheated gas to prevent the gas from condensing into a liquid, but the gas pressure in the gas storage space 21 is not greater than the saturation in the gas cylinder 11. The steam pressure is such that gas in the gas cylinder 11 can flow to the gas storage space 21. That is, the pressure in the gas cylinder 11 needs to be greater than or equal to the pressure in the gas storage space 21, so that the gas tends to flow from the gas cylinder 11 to the gas storage space 21. Although the remaining gas supply unit 1 except the first gas supply unit 1 is not supplied with gas, the gas cylinder 11 of each gas supply unit 1 is still heated by the heater 12, and the amount of heating only provides heat loss to the environment to maintain The specified pressure of the gas cylinder 11 can be turned on at any time. Once the demand is large, the high-power heating liquid can be jumped in a short time, and a large amount of gas can be supplied quickly. When the gas pressure in the gas storage space 21 reaches a predetermined range, the gas is supplied to the downstream end, and if the downstream end is suddenly increased during use. The use of the demand causes the pressure of the gas in the gas storage space 21 to decrease, and it is determined that several gas supply units 1 are to be turned on according to the degree of decrease in the gas pressure in the gas storage space 21.
在變化的實施例，若該儲氣空間21的氣體壓力值低於預定範圍時，亦可同時開啟其餘氣體供應單元1。亦即，若突然有大需求量時，可以將全部的氣體供應單元1一起開啟，進行聯合供氣，以能迅速及時大量地供氣。同樣地，當全部的氣體供應單元1一起開啟供氣的狀態下，若該儲氣空間21的氣體壓力值高於該預定範圍時，先關閉該等氣體供應單元1中氣體鋼瓶11內所剩餘氣體量較多者，或者當氣體量相同時，依序逐一關閉氣體鋼瓶11，如此可以使不同氣體供應單元1的氣體鋼瓶11所剩的氣體量有差異，以利於逐一更換氣體鋼瓶11。 In a variant embodiment, if the gas pressure value of the gas storage space 21 is lower than a predetermined range, the remaining gas supply unit 1 can be simultaneously turned on. That is, if there is a sudden large demand, all the gas supply units 1 can be turned on together to perform combined gas supply, so that a large amount of gas can be supplied quickly and in a timely manner. Similarly, when all the gas supply units 1 are turned on together, if the gas pressure value of the gas storage space 21 is higher than the predetermined range, the remaining gas cylinders 11 in the gas supply units 1 are first closed. When the amount of gas is relatively large, or when the amount of gas is the same, the gas cylinders 11 are sequentially closed one by one, so that the amount of gas remaining in the gas cylinders 11 of the different gas supply units 1 may be different to facilitate the gas cylinders 11 to be replaced one by one.
藉此，在下游端用量有較大需求時，能以該儲氣單元2的儲氣空間21與多個氣體供應單元1同時加熱、同時供氣，達到短時間多線聯合供氣的效果，達到有大量供氣需求時仍能夠及時補充大量氣體的功效。 Therefore, when there is a large demand for the downstream end, the gas storage space 21 of the gas storage unit 2 and the plurality of gas supply units 1 can be simultaneously heated and simultaneously supplied with gas, thereby achieving the effect of short-time multi-line combined gas supply. It can still replenish a large amount of gas in time when there is a large demand for gas supply.
在本實施例中，該儲氣空間21內的氣體壓力監控以該預定範圍及該低壓值為基準，當該儲氣空間21內的氣體壓力值介於該預定範圍與該低壓值之間時，則開啟該第二氣體供應單元1的控制閥14以即時補充氣體至該儲氣空間21，當該儲氣空間21內的氣體壓力值低於該低壓值時，則再開啟該第三氣體供應單元1的控制 閥14以即時補充氣體至該儲氣空間21。換言之，當該儲氣空間21內的氣體壓力值越低時，需要同時開啟較多的氣體供應單元1的控制閥14以提供較多量的氣體。而在下游端的氣體需求減少時，例如過了尖峰用量，該儲氣空間21內的氣體壓力值會升高，若高於該預定範圍時，則先關閉該第三氣體供應單元1的控制閥14，而若該儲氣空間21內的氣體壓力值仍持續升高，則再關閉該第二氣體供應單元1的控制閥14。換言之，當該儲氣空間21內的氣體壓力值升高而逐漸接近氣體鋼瓶11的飽和蒸汽壓時，越晚開啟的氣體供應單元1會越早關閉，亦即氣體鋼瓶11內的液態氣體存量越多者越早關閉，如此使得第一氣體供應單元1的氣體鋼瓶11存量最少，而能先使用完。當第一氣體供應單元1的秤重裝置16顯示的重量低於一定值，即需更換氣體鋼瓶11。更換氣體鋼瓶11時須執行標準的換裝程序，以確保管路清潔及安全。 In this embodiment, the gas pressure monitoring in the gas storage space 21 is based on the predetermined range and the low pressure value, when the gas pressure value in the gas storage space 21 is between the predetermined range and the low pressure value. Opening the control valve 14 of the second gas supply unit 1 to immediately replenish the gas to the gas storage space 21. When the gas pressure value in the gas storage space 21 is lower than the low pressure value, the third gas is turned on again. Supply unit 1 control The valve 14 replenishes the gas to the gas storage space 21 in an instant. In other words, when the gas pressure value in the gas storage space 21 is lower, it is necessary to simultaneously open more of the control valve 14 of the gas supply unit 1 to supply a larger amount of gas. When the gas demand at the downstream end is reduced, for example, the peak amount is exceeded, the gas pressure value in the gas storage space 21 is increased, and if it is higher than the predetermined range, the control valve of the third gas supply unit 1 is first closed. 14. If the gas pressure value in the gas storage space 21 continues to rise, the control valve 14 of the second gas supply unit 1 is closed. In other words, when the gas pressure value in the gas storage space 21 rises and gradually approaches the saturated vapor pressure of the gas cylinder 11, the gas supply unit 1 that is turned on later will be turned off earlier, that is, the liquid gas stock in the gas cylinder 11 The more the person is turned off earlier, so that the gas cylinder 11 of the first gas supply unit 1 has the least amount of stock and can be used up first. When the weight displayed by the weighing device 16 of the first gas supply unit 1 is lower than a certain value, the gas cylinder 11 needs to be replaced. A standard dressing procedure must be performed when replacing the gas cylinder 11 to ensure that the piping is clean and safe.
藉由該儲氣單元2的儲氣空間21可接收多個氣體供應單元1一起聯合供應氣體，以在有大量供氣需求時能夠及時補充氣體而大量地供氣，以解大用量氣體供應不足及不及的問題。 The gas storage space 21 of the gas storage unit 2 can receive a plurality of gas supply units 1 to jointly supply gas, so that when a large amount of gas supply demand is needed, the gas can be replenished in time to supply a large amount of gas, so as to solve the problem of insufficient supply of large quantities of gas. And the problem is not as good.
在本實施例中，該供氣裝置還可包含連接該等氣體供應單元1及該儲氣單元2的一控制單元3。該控制單元3可接收秤重裝置16、壓力計17、24，及溫度計18、25之訊號，並可控制加熱器12、加熱設備22及控制閥14。 In this embodiment, the air supply device may further include a control unit 3 that connects the gas supply unit 1 and the gas storage unit 2. The control unit 3 can receive the signals of the weighing device 16, the pressure gauges 17, 24, and the thermometers 18, 25, and can control the heater 12, the heating device 22 and the control valve 14.
該控制單元3用以根據該儲氣空間21的氣體壓力控制該等控制閥14開或關，以保持該儲氣空間21的氣體壓力在一預定範圍內；並可用於更換氣體鋼瓶11時的閥門控制。前述的供氣方法可以由該控制單元3來自動控制，並依據各氣體供應單元1的氣體鋼瓶11的實際重量來設定開啟及關閉氣體供應單元1的順序，亦即氣體鋼瓶11越輕者為越早開啟而越晚關閉，而保持氣體鋼瓶11最輕者持續供氣。換言之，當最輕的氣體鋼瓶11用完更新後，該控制單元3可以根據各氣體供應單元1的秤重裝置16偵測的重量重新排序各氣體供應單元1開啟及關閉的順序。 The control unit 3 is configured to control the control valves 14 to be turned on or off according to the gas pressure of the gas storage space 21 to maintain the gas pressure of the gas storage space 21 within a predetermined range; and when used for replacing the gas cylinder 11 Valve control. The foregoing air supply method can be automatically controlled by the control unit 3, and the order of opening and closing the gas supply unit 1 is set according to the actual weight of the gas cylinder 11 of each gas supply unit 1, that is, the lighter the gas cylinder 11 is The sooner it is turned on, the later it is turned off, while the gas cylinder 11 is kept lighter and continues to supply air. In other words, after the lightest gas cylinder 11 is used up, the control unit 3 can reorder the order in which the gas supply units 1 are turned on and off according to the weight detected by the weighing device 16 of each gas supply unit 1.
該控制單元3接收前述溫度計25之訊號，並控制該加熱設備22，經由該加熱設備22加熱使該儲氣空間21內的氣體溫度達一設定範圍而為過熱氣體。 The control unit 3 receives the signal of the thermometer 25 and controls the heating device 22, and the heating device 22 heats the temperature of the gas in the gas storage space 21 to a set range to be superheated gas.
在變化的實施例，該供氣裝置亦可由人工控制。 In a variant embodiment, the gas supply means can also be manually controlled.
綜上所述，藉由該儲氣單元2的儲氣空間21可接收多個氣體供應單元1一起聯合供應氣體，突破長久以來單一或兩個鋼瓶，藉三通管或分別連結在相同管徑的管路上，進行供氣的觀念，以在有大量供氣需求時能夠及時補充氣體，有效解決大用量氣體供應不足的問題。 In summary, the gas storage space 21 of the gas storage unit 2 can receive a plurality of gas supply units 1 to jointly supply gas, and break through a single or two cylinders for a long time, by a three-way pipe or respectively connected to the same pipe diameter. On the pipeline, the concept of gas supply is carried out to replenish the gas in time when there is a large demand for gas supply, effectively solving the problem of insufficient supply of large quantities of gas.
惟以上所述者，僅為本發明之實施例而已，當不能以此限定本發明實施之範圍，凡是依本發明申請專利範圍及專利說明 書內容所作之簡單的等效變化與修飾，皆仍屬本發明專利涵蓋之範圍內。 However, the above description is only for the embodiments of the present invention, and the scope of the present invention cannot be limited thereto, and the scope and patent description of the patent application according to the present invention. The simple equivalent changes and modifications made by the contents of the book are still within the scope of the invention patent.
Claims (8)
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4813461A (en) * | 1983-11-16 | 1989-03-21 | Metal Box Public Limited Company | Method of and apparatus for filling a container with gas |
| CN1637336A (en) * | 2003-12-04 | 2005-07-13 | 液体空气乔治洛德方法利用和研究的具有监督和管理委员会的有限公司 | System for heating tanks of liquefied gas by induction |
| US20080282709A1 (en) * | 2007-05-17 | 2008-11-20 | Nec Electronics Corporation | Liquified gas supply system and method thereof |
| US20090236006A1 (en) * | 2005-10-10 | 2009-09-24 | Air Products And Chemicals, Inc. | Temperature-Compensated Dispensing of Compressed Gases |
| JP2010082519A (en) * | 2008-09-30 | 2010-04-15 | Seiko Epson Corp | Pressure container with self-cleaning function, and method for cleaning pressur vessel |
| TW201022573A (en) * | 2008-07-24 | 2010-06-16 | Praxair Technology Inc | Simultaneous gas supply from multiple BSGS |
-
2017
- 2017-10-19 TW TW106135903A patent/TWI626392B/en not_active IP Right Cessation
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4813461A (en) * | 1983-11-16 | 1989-03-21 | Metal Box Public Limited Company | Method of and apparatus for filling a container with gas |
| CN1637336A (en) * | 2003-12-04 | 2005-07-13 | 液体空气乔治洛德方法利用和研究的具有监督和管理委员会的有限公司 | System for heating tanks of liquefied gas by induction |
| US20090236006A1 (en) * | 2005-10-10 | 2009-09-24 | Air Products And Chemicals, Inc. | Temperature-Compensated Dispensing of Compressed Gases |
| US20080282709A1 (en) * | 2007-05-17 | 2008-11-20 | Nec Electronics Corporation | Liquified gas supply system and method thereof |
| TW201022573A (en) * | 2008-07-24 | 2010-06-16 | Praxair Technology Inc | Simultaneous gas supply from multiple BSGS |
| JP2010082519A (en) * | 2008-09-30 | 2010-04-15 | Seiko Epson Corp | Pressure container with self-cleaning function, and method for cleaning pressur vessel |
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