TWI621151B - Electrode for discharge lamp tube, discharge lamp tube having the electrode for discharge lamp tube, and method for manufacturing the same - Google Patents
Electrode for discharge lamp tube, discharge lamp tube having the electrode for discharge lamp tube, and method for manufacturing the same Download PDFInfo
- Publication number
- TWI621151B TWI621151B TW103124880A TW103124880A TWI621151B TW I621151 B TWI621151 B TW I621151B TW 103124880 A TW103124880 A TW 103124880A TW 103124880 A TW103124880 A TW 103124880A TW I621151 B TWI621151 B TW I621151B
- Authority
- TW
- Taiwan
- Prior art keywords
- end side
- side member
- electrode
- discharge lamp
- rear end
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Discharge Lamp (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
對於將複數構件固相接合而成的電極,提高電極的接合強度。透過固相接合及切削加工,形成由前端側的金屬構件20A與後端側的金屬構件20B組成的陰極20。切削加工時形成的陰極20的錐面20Q更形成有跨過接合面的溝部R,溝部R包括微細溝以及雷射照射而成的寬溝。此時,切削加工會使得金屬構件20B產生撕裂(tear),但金屬構件20A不產生撕裂。 The electrode which is obtained by solid-phase joining a plurality of members improves the bonding strength of the electrodes. The cathode 20 composed of the metal member 20A on the distal end side and the metal member 20B on the rear end side is formed by solid phase bonding and cutting. The tapered surface 20Q of the cathode 20 formed during the cutting process is further formed with a groove portion R that spans the joint surface, and the groove portion R includes a fine groove and a wide groove formed by laser irradiation. At this time, the cutting process causes the metal member 20B to tear, but the metal member 20A does not tear.
Description
本發明係有關於使用於曝光裝置等當中的放電燈管,且特別有關於接合了複數的金屬構件的電極構造。 The present invention relates to a discharge lamp used in an exposure apparatus or the like, and particularly relates to an electrode structure in which a plurality of metal members are joined.
短弧型放電燈管會將高亮度的光照射於基板等的曝光對象物。因為曝光對象物的大型化、還為了提高吞吐率,放電燈管被要求高輸出化,並且伴隨於此而有額定消耗電力增加的需求。 The short arc type discharge lamp irradiates high-intensity light to an exposure target such as a substrate. In order to increase the size of the object to be exposed and to increase the throughput rate, the discharge lamp is required to have a high output, and accordingly, there is a demand for an increase in rated power consumption.
若高功率化,習知的單一金屬構成的電極構造中,會對電子釋放、熱釋放、耐久性等產生影響。另,因電極重量變大,電極支持棒等的負擔大。 When the power is increased, an electrode structure composed of a single metal has an influence on electron emission, heat release, durability, and the like. Further, since the weight of the electrode is increased, the burden of the electrode support rod or the like is large.
因此,有一種接合了複數的金屬來構成電極的方案被提出。例如,將含有釷的釷鎢等組成的電極前端部與純鎢等組成的後方主體部做固相接合,構成電極(參照專利文獻1、2)。 Therefore, a scheme in which a plurality of metals are joined to constitute an electrode has been proposed. For example, an electrode tip end portion composed of tantalum-containing tungsten or the like is solid-phase bonded to a rear main body portion made of pure tungsten or the like to form an electrode (see Patent Documents 1 and 2).
[先行技術文獻] [Advanced technical literature]
[專利文獻] [Patent Literature]
專利文獻1:日本特開2011-154927號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 2011-154927
專利文獻2:日本特開2011-070823號公報 Patent Document 2: Japanese Patent Laid-Open Publication No. 2011-070823
將不同的金屬固相接合來構成電極的情況下,因為熱膨脹率的不同等,伴隨接合時的昇溫與降溫,接合面的外緣附近容易產生間隙。當點亮燈管時電極溫度變高,恐有間隙擴大,電極破損之虞。又,即使將相同材質的金屬構件做固相接合之電極,也會有楔狀的間隙形成於接合面的附近。 When the electrodes are bonded to each other to form an electrode, the gap between the outer edges of the joint faces is likely to occur due to the difference in the coefficient of thermal expansion and the like, as the temperature rises and falls during the joining. When the lamp is lit, the temperature of the electrode becomes high, and there is a fear that the gap is enlarged and the electrode is broken. Further, even if the metal member of the same material is used as the electrode for solid phase bonding, a wedge-shaped gap is formed in the vicinity of the joint surface.
因此,透過固相接合形成的電極必須提高接合面附近的接合強度。 Therefore, the electrode formed by the solid phase bonding must increase the joint strength in the vicinity of the joint surface.
本發明的放電燈管具有放電管以及配置於該放電管內的一對電極。一對的電極中的至少一者是將前端側構件及後端側構件固相接合而成的電極。前端側構件位於電極前端面側,也就是靠近另一電極側。後端側構件位於靠近電極支持棒的位置。後端側構件比前端側構件的延展性高/大。 The discharge lamp of the present invention has a discharge tube and a pair of electrodes disposed in the discharge tube. At least one of the pair of electrodes is an electrode obtained by solid-phase joining the distal end side member and the rear end side member. The front end side member is located on the front end side of the electrode, that is, near the other electrode side. The rear end side member is located close to the electrode support rod. The rear end side member has a higher/larger ductility than the front end side member.
前端側構件與後端側構件可由金屬構件構成。例如,前端側構件以釷鎢構成,後端側構件以延展性相對較高的鉬構成。 The front end side member and the rear end side member may be composed of a metal member. For example, the front end side member is made of tantalum tungsten, and the rear end side member is made of molybdenum which is relatively high in ductility.
本發明中,電極側面形成有溝部,該構部跨越前端側構件與後端側構件之間的接合面,也就是說該溝部使接合面介於其間。「電極側面」包括形成於電極前端部的錐面,也包括電極後端部的側面(外周面)。 In the present invention, the side surface of the electrode is formed with a groove portion that spans the joint surface between the front end side member and the rear end side member, that is, the groove portion with the joint surface interposed therebetween. The "electrode side surface" includes a tapered surface formed at the tip end portion of the electrode, and also includes a side surface (outer peripheral surface) of the rear end portion of the electrode.
為了提昇接合強度而形成的溝部具有比放熱用溝的毫米等級的間距與深度更小的溝間距與溝深度。例如,可形成具有100μm以下的間距、深度的溝。藉由這種微細溝的形成, 在延展性高的後端側構件的接合面外緣附近會發生較深的變形。 The groove portion formed to increase the joint strength has a groove pitch and a groove depth which are smaller than the pitch and depth of the millimeter level of the heat release groove. For example, a groove having a pitch and a depth of 100 μm or less can be formed. With the formation of such a fine groove, A deeper deformation occurs near the outer edge of the joint surface of the rear end side member having high ductility.
這種含有接合面的溝部,使得後端側構件的側面的表面粗糙度Ra在1.2μm以上即可。又使得前端側構件的側面的表面粗糙度在Ra在0.7μm以下即可。進而,溝部的形成使得後端側構件的側面的反射率比前端側構件的側面的反射率小即可即可。藉由滿足上述數值,能夠提昇接合面強度。 Such a groove portion including the joint surface may have a surface roughness Ra of the side surface of the rear end side member of 1.2 μm or more. Further, the surface roughness of the side surface of the distal end side member may be Ra of 0.7 μm or less. Further, the groove portion may be formed such that the reflectance of the side surface of the rear end side member is smaller than the reflectance of the side surface of the front end side member. By satisfying the above values, the joint strength can be improved.
關於微細溝,藉由形成比前端側構件更粗的溝能夠使楔附近產生變形。例如,可在後端側構件的側面形成產生撕裂(tear)的溝。另一方面,考慮電弧放電的穩定性,溝部在前端側構件的側面形成沒有撕裂的微細溝為佳。 Regarding the fine groove, deformation can be caused in the vicinity of the wedge by forming a groove thicker than the front end side member. For example, a groove that generates a tear may be formed on the side surface of the rear end side member. On the other hand, in consideration of the stability of the arc discharge, it is preferable that the groove portion form a fine groove having no tear on the side surface of the front end side member.
微細溝可以在後端側構件的側面比在前端側構件的側面深。在楔附近,後端側金屬構件的表面容易變形。 The fine groove may be deeper on the side surface of the rear end side member than on the side surface of the front end side member. Near the wedge, the surface of the rear end side metal member is easily deformed.
以切削加工形成電極的形狀的情況下,可以在固相接合電極後的切削加工中形成溝部。使用轉盤等進行切削加工時可同時形成溝部,所以製造步驟不會變得繁雜。 When the shape of the electrode is formed by cutting, the groove portion can be formed in the cutting process after the solid phase bonding electrode. When the cutting process is performed using a turntable or the like, the groove portion can be formed at the same time, so that the manufacturing steps do not become complicated.
溝部能夠形成有跨越接合面且比微細溝的間距及深度大的寬溝。 The groove portion can be formed with a wide groove that spans the joint surface and is larger than the pitch and depth of the fine groove.
本發明其他態樣的放電燈管的製造方法包括:將前端側構件以及比前端側構件的延展性高的後端側構件固相接合;以及對固相接合的電極構件側面進行切削加工。切削加工中,在電極構件側面形成跨越前端側構件與後端側構件之間的接合面的溝部。例如,切削加工中,後端側構件的側面可形成具有撕裂的微細溝。 A method of manufacturing a discharge lamp according to another aspect of the present invention includes: solid-phase joining a front end side member and a rear end side member having higher ductility than a front end side member; and cutting a side surface of the solid phase joined electrode member. In the cutting process, a groove portion that spans the joint surface between the front end side member and the rear end side member is formed on the side surface of the electrode member. For example, in the cutting process, the side surface of the rear end side member may form a fine groove having tear.
本發明其他態樣的放電燈管用電極包括:前端側構件以及與前端側構件固相接合的後端側構件。電極的側面形成有溝部,溝部跨越該前端側構件及該後端側構件的接合面。也可將延展性相同的構件彼此固相接合。 An electrode for a discharge lamp according to another aspect of the present invention includes a front end side member and a rear end side member that is solid-engaged with the front end side member. A groove portion is formed on a side surface of the electrode, and the groove portion spans a joint surface of the front end side member and the rear end side member. It is also possible to solidly join the members of the same ductility to each other.
根據本發明,對於將複數構件進行固相接合而成的電極,能夠提高該電極的接合強度。 According to the invention, it is possible to increase the joint strength of the electrode by solid-phase joining the plurality of members.
10‧‧‧短弧型放電燈管 10‧‧‧Short arc discharge lamp
12‧‧‧放電管 12‧‧‧Discharge tube
13A、13B‧‧‧密封管 13A, 13B‧‧‧ sealed tube
15A、15B‧‧‧導棒 15A, 15B‧‧‧ guide bars
17A、17B‧‧‧電極支持棒 17A, 17B‧‧‧electrode support rod
19A、19B‧‧‧金屬蓋 19A, 19B‧‧‧ metal cover
20、200‧‧‧陰極 20,200‧‧‧ cathode
20A、200A‧‧‧金屬構件(前端側構件) 20A, 200A‧‧‧Metal components (front end side members)
20B、200B‧‧‧金屬構件(後端側構件) 20B, 200B‧‧‧Metal components (rear side members)
20S、200S‧‧‧電極前端面 20S, 200S‧‧‧ electrode front end face
20Q、200Q‧‧‧錐面 20Q, 200Q‧‧‧ Cone
23A‧‧‧圓錐台形狀部分 23A‧‧‧French table shape part
23B‧‧‧圓柱狀部分 23B‧‧‧Cylindrical part
30‧‧‧陽極 30‧‧‧Anode
30A‧‧‧金屬構件(前端側構件) 30A‧‧‧Metal components (front end side members)
30B‧‧‧金屬構件(後端側構件) 30B‧‧‧Metal components (rear side members)
30S‧‧‧電極前端面 30S‧‧‧ front end face of electrode
33A‧‧‧圓錐台形狀部分 33A‧‧‧Fracture table shape part
33B‧‧‧圓柱狀部分 33B‧‧‧ cylindrical part
d‧‧‧溝深 D‧‧‧Deep depth
DS‧‧‧放電空間 DS‧‧‧discharge space
E‧‧‧電極軸 E‧‧‧electrode shaft
P1、P2‧‧‧間距 P1, P2‧‧‧ spacing
R、100R‧‧‧溝部 R, 100R‧‧‧ Ditch
rr‧‧‧寬溝 Rr‧‧‧ wide ditch
r、r1A、r1B‧‧‧微細溝 r, r1A, r1B‧‧‧ micro-ditch
S1、S2‧‧‧接合面 S1, S2‧‧‧ joint surface
W‧‧‧楔 W‧‧‧Wedge
第1圖係概略顯示第1實施型態的短弧型放電燈管的平面圖。 Fig. 1 is a plan view schematically showing a short arc type discharge lamp of the first embodiment.
第2圖係陽極、陰極的概略側面圖。 Fig. 2 is a schematic side view showing an anode and a cathode.
第3圖係陰極的部份側面圖。 Figure 3 is a partial side view of the cathode.
第4圖係陰極的金屬構件接合面附近的放大圖。 Fig. 4 is an enlarged view of the vicinity of the joint surface of the metal member of the cathode.
第5圖係第2實施型態的陰極的部份側面圖。 Fig. 5 is a partial side view showing the cathode of the second embodiment.
第6圖係接合面附近的陰極的照片。 Figure 6 is a photograph of the cathode near the joint.
第7圖係第6圖的照片放大圖。 Fig. 7 is an enlarged view of a photograph of Fig. 6.
第8圖係使用電子顯微鏡拍攝的接合面附近的照片。 Fig. 8 is a photograph of the vicinity of the joint surface taken using an electron microscope.
以下,參照圖式說明本發明的實施型態。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
第1圖係概略顯示第1實施型態的短弧型放電燈管的平面圖。 Fig. 1 is a plan view schematically showing a short arc type discharge lamp of the first embodiment.
短弧型放電燈管10是能夠做為形成圖樣的曝光裝置(未圖示)的光源等來使用的放電燈管,具備透明的石英玻 璃製的放電管(發光管)12。放電管12中,陰極20與陽極30隔著既定間隔相對配置。 The short arc discharge lamp tube 10 is a discharge lamp that can be used as a light source or the like of an exposure device (not shown) that forms a pattern, and has a transparent quartz glass. A discharge tube (light-emitting tube) 12 made of glass. In the discharge tube 12, the cathode 20 and the anode 30 are arranged to face each other with a predetermined interval therebetween.
放電管12的兩側有相對的石英玻璃製的密封管13A、13B與放電管12一體地設置。密封管13A、13B的兩端被金屬蓋19A、19B塞住。放電燈管10在此沿著鉛直方向配置,使陽極30位於上側,陰極20位於下側。 The sealed tubes 13A and 13B made of opposite quartz glass on both sides of the discharge tube 12 are integrally provided with the discharge tube 12. Both ends of the sealed tubes 13A, 13B are plugged by the metal covers 19A, 19B. The discharge lamp tube 10 is disposed here in the vertical direction such that the anode 30 is located on the upper side and the cathode 20 is located on the lower side.
密封管13A、13B的內部配置了支持金屬製的陰極20、陽極30用的導電性的電極支持棒17A、17B,透過金屬環(未圖示)以及鉬這類的金屬箔16A、16B而分別連接到導電性的導棒15A、15B。密封管13A、13B與設置於密封管13A、13B內的玻璃管(未圖示)熔接,藉此將封入水銀及惰性氣體的放電空間DS密封。 In the inside of the sealed tubes 13A and 13B, the conductive electrode support rods 17A and 17B for supporting the cathode 20 and the anode 30 are placed through a metal ring (not shown) and metal foils 16A and 16B such as molybdenum. Connected to the conductive guide bars 15A, 15B. The sealed tubes 13A and 13B are welded to glass tubes (not shown) provided in the sealed tubes 13A and 13B, thereby sealing the discharge space DS in which mercury and an inert gas are sealed.
導棒15A、15B連接至外部的電源部(未圖示),該電源部透過導棒15A、15B、金屬箔16A、16B、以及電極支持棒17A、17B對陰極20、陽極30施加電壓。當電供給至放電燈管10,電極間發生電弧放電,放射出水銀的亮線(紫外光)。 The guide bars 15A and 15B are connected to an external power supply unit (not shown) that applies a voltage to the cathode 20 and the anode 30 through the guide bars 15A and 15B, the metal foils 16A and 16B, and the electrode support bars 17A and 17B. When electricity is supplied to the discharge lamp tube 10, an arc discharge occurs between the electrodes, and a bright line (ultraviolet light) of mercury is emitted.
第2圖係陽極、陰極的概略側面圖。 Fig. 2 is a schematic side view showing an anode and a cathode.
陰極20是由具有垂直於電極軸E的電極前端面20S的金屬構件(前端側構件)20A、以及在其後方與金屬構件20A接合的金屬構件(後端側構件)20B所構成。被電極支持棒17A所支持的金屬構件20B由圓柱狀部分23B及圓錐台形狀部分23A所組成,圓錐台形狀的金屬構件20A會與金屬構件20B的圓錐台形狀部分23A接合。 The cathode 20 is composed of a metal member (front end side member) 20A having an electrode distal end surface 20S perpendicular to the electrode axis E, and a metal member (rear end side member) 20B joined to the metal member 20A at the rear thereof. The metal member 20B supported by the electrode supporting rod 17A is composed of a cylindrical portion 23B and a truncated cone shaped portion 23A, and the truncated cone shaped metal member 20A is joined to the truncated cone shaped portion 23A of the metal member 20B.
陽極30是由具有垂直於電極軸E的電極前端面30S 的金屬構件(前端側構件)30A、以及與金屬構件30A接合的金屬構件(後端側構件)30B所構成。金屬構件30A由圓錐台形狀部分33A及圓柱狀部分33B所組成,圓柱狀的金屬構件30B會與金屬構件30A的圓柱狀部分33B接合。 The anode 30 is composed of an electrode front end face 30S perpendicular to the electrode axis E. The metal member (front end side member) 30A and the metal member (rear end side member) 30B joined to the metal member 30A are comprised. The metal member 30A is composed of a truncated cone shaped portion 33A and a cylindrical portion 33B, and the cylindrical metallic member 30B is engaged with the cylindrical portion 33B of the metallic member 30A.
前端側的金屬構件20A是由釷鎢等以鎢為主成分的合金、或者是純鎢(W)等的高熔點金屬所構成。另一方面,後端側的金屬構件20B是比金屬構件20A更具延展性的金屬,或者是以該金屬為主成分的合金。在此,金屬構件20B是由鉬(Mo)所構成。陽極30的金屬構件30A、30B分別是由純鎢(W)及鉬所構成。 The metal member 20A on the distal end side is made of an alloy containing tungsten as a main component such as tantalum tungsten or a high melting point metal such as pure tungsten (W). On the other hand, the metal member 20B on the rear end side is a metal which is more ductile than the metal member 20A, or an alloy containing the metal as a main component. Here, the metal member 20B is made of molybdenum (Mo). The metal members 30A and 30B of the anode 30 are made of pure tungsten (W) and molybdenum, respectively.
第3圖是陰極的部分側面圖。第4圖是陰極的金屬構件接合面附近的放大圖。現在使用第3、4圖,來說明形成於陰極側面的溝部。 Figure 3 is a partial side view of the cathode. Fig. 4 is an enlarged view of the vicinity of the joint surface of the metal member of the cathode. The grooves formed on the side faces of the cathode will now be described using Figs. 3 and 4.
陰極20是將金屬粉體燒結並固化後的素材(將成為金屬構件20A、20B)以放電電漿燒結(SPS燒結)的方式進行固相接合,再利用轉盤進行切削加工後製造而成。透過切削加工,形成了陰極20的錐面(縮徑面)20Q。 The cathode 20 is obtained by solid-phase bonding a material obtained by sintering and solidifying a metal powder (to be the metal members 20A and 20B) by spark plasma sintering (SPS sintering), and then cutting it by a turntable. A tapered surface (reduced diameter surface) 20Q of the cathode 20 is formed by cutting.
切削加工中,沿著垂直電極軸E的方向,也就是沿著周方向來切削金屬構件20A、20B。在此,對於接合面S1以±10°以下的角度α進行切削。然後,在用以形成具有錐面20Q的電極的切削步驟中,同時形成溝部R。 In the cutting process, the metal members 20A, 20B are cut along the direction of the vertical electrode axis E, that is, along the circumferential direction. Here, the joint surface S1 is cut at an angle α of ±10° or less. Then, in the cutting step for forming the electrode having the tapered surface 20Q, the groove portion R is simultaneously formed.
溝部R跨過接合面S1形成,由微細的溝(以下稱為微細溝)所組成。微細溝r是與切削加工處理時同時地以既定的間距P1所形成的溝。間距P1定在1μm~5μm的範圍。這比起 形成於習知的放電燈管的放熱用溝還來得小許多。第4圖中,關於微細溝r,將形成於金屬構件20A的微細溝以「r1A」表示,將形成於金屬構件20B的微細溝以「r1B」表示。 The groove portion R is formed across the joint surface S1 and is composed of a fine groove (hereinafter referred to as a fine groove). The fine groove r is a groove formed at a predetermined pitch P1 at the same time as the cutting process. The pitch P1 is set in the range of 1 μm to 5 μm. This is compared to The heat release groove formed in the conventional discharge lamp tube is also much smaller. In the fourth example, the fine groove r formed in the metal member 20A is indicated by "r1A", and the fine groove formed in the metal member 20B is indicated by "r1B".
形成於後端側的金屬構件20B的微細溝r1B是會有撕裂的溝,溝深d到達比工具刀刃位置更深的位置。只不過,在此,將溝深d以從連接溝山頂點的線到底部的距離來表示。另一方面,在延展性相對較低的金屬構件20A上則形成有沒有或者是幾乎不產生撕裂的微細溝r1A。比起金屬構件20B側,金屬構件20A側的溝深d較小(淺)。 The fine groove r1B of the metal member 20B formed on the rear end side is a groove having tear, and the groove depth d reaches a position deeper than the position of the tool blade. However, here, the groove depth d is expressed by the distance from the line connecting the peak points of the trench to the bottom. On the other hand, on the metal member 20A having relatively low ductility, a fine groove r1A having no or almost no tear is formed. The groove depth d on the side of the metal member 20A is smaller (lighter) than the side of the metal member 20B.
調整切削加工時的轉盤的旋轉數/旋轉速度、刀刃材質、切入角度、切入量等,來形成夾有上述接合面S1的,深度、粗糙度等表面狀態不同的微細溝r。在此,在連續地切削加工的期間進行調整,使得溝以接合面S1為邊界產生差異。 The number of rotations of the turntable/rotation speed, the material of the blade, the angle of cut, the amount of cut, and the like at the time of cutting are adjusted to form a fine groove r having different surface states such as depth and roughness, in which the joint surface S1 is sandwiched. Here, the adjustment is performed during the continuous cutting process so that the groove has a difference with the joint surface S1 as a boundary.
因為金屬構件20B上的溝是有撕裂的溝,因此深度d相對地比較不均一,但會調整刀刃的切入量等使得深度在5μm以上。另一方面,對於金屬構件20A也會調整刀刃的切入量等來防止撕裂的產生。 Since the groove on the metal member 20B is a groove having tear, the depth d is relatively uneven, but the cutting amount of the blade or the like is adjusted so that the depth is 5 μm or more. On the other hand, the metal member 20A also adjusts the amount of cutting of the blade or the like to prevent the occurrence of tear.
當金屬表面變粗,光的亂反射變強,反射率降低。原本光的反射率在鉬的表面比鎢的表面大,但藉由形成微細溝r(r1A、r1B),在溝部R的範圍內金屬構件20B側的反射率會變得比金屬構件20A側的反射率小。另外,藉由切削加工,金屬構件20B的表面粗糙度Ra在1.2μm以上,金屬構件20A的表面粗糙度Ra在0.7μm以下。 When the surface of the metal becomes thick, the disordered reflection of light becomes strong, and the reflectance is lowered. The reflectance of the original light is larger than the surface of the tungsten on the surface of the molybdenum. However, by forming the fine grooves r (r1A, r1B), the reflectance on the side of the metal member 20B in the range of the groove portion R becomes higher than that on the side of the metal member 20A. The reflectance is small. Further, the surface roughness Ra of the metal member 20B is 1.2 μm or more by the cutting process, and the surface roughness Ra of the metal member 20A is 0.7 μm or less.
如上所述,後端側的由鉬(Mo)所組成的金屬構 件20B比起前端側的由鎢(W)所組成的金屬構件20A的延展性高,較容易變形。因此,若將金屬構件20A、20B固相接合,如第3圖所示,接合面S1的外緣附近容易產生楔W。這個楔W大多是以微米等級產生。 As described above, the metal structure composed of molybdenum (Mo) on the rear end side The member 20B has a higher ductility than the metal member 20A composed of tungsten (W) on the front end side, and is more easily deformed. Therefore, when the metal members 20A and 20B are solid-phase bonded, as shown in FIG. 3, the wedge W is likely to be generated in the vicinity of the outer edge of the joint surface S1. This wedge W is mostly produced in micrometer scale.
然而,微細溝r形成於接合面S1附近時,延展性相對較高的金屬構件20B因為形成有會產生撕裂的程度的微細溝r1B,所以在接合面S1的外緣附近會產生塑性變形。這是因為調整切削時施加於金屬構件20B的力等、以及沿著接合面S1(10°以內)進行切削加工等而造成的。可以進行切削加工使上述的表面粗糙度Ra到達1.2μm以上,來做為形成這種微細溝r1B的標準。 However, when the fine groove r is formed in the vicinity of the joint surface S1, the metal member 20B having a relatively high ductility is formed with the fine groove r1B to the extent that tearing occurs, so that plastic deformation occurs in the vicinity of the outer edge of the joint surface S1. This is because the force applied to the metal member 20B during cutting and the like, and the cutting work or the like along the joint surface S1 (within 10°) are adjusted. The above-described surface roughness Ra can be made to be 1.2 μm or more in order to form a standard for forming such a fine groove r1B.
結果,楔W的形狀產生變化,變成與形成於接合面S1附近的微細溝r相同程度的尺寸。產生於接合面S1的楔W從朝向電極中心側深切入的狀態產生形狀變化,視情況也有可能變成崩塌的狀態。這防止了燈管點燈中因為接合面S1附近的熱膨脹差異而產生以楔為起點的接合部破損。 As a result, the shape of the wedge W changes to the same size as that of the fine groove r formed in the vicinity of the joint surface S1. The wedge W generated on the joint surface S1 is changed in shape from a state of being deeply cut toward the center side of the electrode, and may be in a collapsed state as the case may be. This prevents breakage of the joint starting from the wedge due to the difference in thermal expansion in the vicinity of the joint surface S1 in the lamp lighting.
特別是在錐面20Q的電流密度高,起因於熱膨脹率的差所產生的熱應力從金屬構件20B朝向金屬構件20A強力地作用,但因為接合強度高,所以能夠維持高熱傳導性以及電傳導性。這樣一來,能夠將前端側金屬構件20A的釷含量限制在必要的最小限度。 In particular, the current density of the tapered surface 20Q is high, and the thermal stress caused by the difference in the coefficient of thermal expansion strongly acts from the metal member 20B toward the metal member 20A. However, since the bonding strength is high, high thermal conductivity and electrical conductivity can be maintained. . In this way, the crucible content of the distal end side metal member 20A can be restricted to the minimum necessary.
另外,藉由在前端側的金屬構件20A也形成微細溝r1A,當燈管點燈中金屬構件20B朝向金屬構件20A施加熱應力時,透過微細溝r1A使熱應力散逃,能夠防止在接合面S1附近 產生缺陷。為了實現上述作用,能夠形成微細溝r1A使表面粗糙度Ra在0.7μm以下。 Further, when the metal member 20A on the distal end side is also formed with the fine groove r1A, when the metal member 20B is applied with thermal stress to the metal member 20A in the lamp lighting, the thermal stress is dissipated through the fine groove r1A, and the bonding surface can be prevented. Near S1 Produce defects. In order to achieve the above action, the fine groove r1A can be formed to have a surface roughness Ra of 0.7 μm or less.
又,金屬構件20B表面附近因為切削加工的塑性變形,會讓金屬構件20B在接合面S1附近形成往電極中心側蝕入的微細溝r1B,能夠強化接合面S1在外緣附近的接合強度。特別是利用純鉬來形成金屬構件20B,容易產生撕裂,容易增大表面粗糙度Ra。 Further, in the vicinity of the surface of the metal member 20B, the metal member 20B forms a fine groove r1B that is etched into the electrode center side in the vicinity of the joint surface S1 due to the plastic deformation of the cutting process, and the joint strength of the joint surface S1 in the vicinity of the outer edge can be strengthened. In particular, the use of pure molybdenum to form the metal member 20B is liable to cause tearing, and it is easy to increase the surface roughness Ra.
另一方面,在金屬構件20A側面的微細溝r1A實質上沒有產生撕裂,因此形成了間距或深度均一的溝。因此,由延展性低的鎢所組成的金屬構件20A不會發生破裂或缺陷,在燈管點燈時的電弧放電穩定。由於這種微細溝r是在切削加工的同時形成,所以不會使電極製造步驟變繁雜。 On the other hand, the fine groove r1A on the side surface of the metal member 20A does not substantially tear, and thus a groove having a uniform pitch or depth is formed. Therefore, the metal member 20A composed of tungsten having low ductility does not cause cracking or defects, and the arc discharge at the time of lamp lighting is stabilized. Since the fine groove r is formed at the same time as the cutting process, the electrode manufacturing steps are not complicated.
以上雖說明了形成於陰極20的錐面20Q的溝部R,但陽極30也會形成與陰極20相同的溝部。結果,由鎢組成的金屬構件30A與由鉬組成的金屬構件30B形成有溝部,該溝部將接合面S2挾在其間,金屬構件30B上形成有產生撕裂的微細溝。藉此,能夠提高接合強度、熱傳導性、導電性。 Although the groove portion R formed on the tapered surface 20Q of the cathode 20 has been described above, the anode 30 also has the same groove portion as the cathode 20. As a result, the metal member 30A composed of tungsten and the metal member 30B composed of molybdenum are formed with a groove portion which is formed with the joint surface S2 interposed therebetween, and the metal member 30B is formed with a fine groove which is torn. Thereby, joint strength, thermal conductivity, and electrical conductivity can be improved.
根據本實施型態,將前端側的金屬構件20A與後端側的金屬構件20B固相接合並切削加工來形成陰極20。切削加工時所形成的陰極20的錐面20Q上,更形成了包括微細溝r的溝部R。此時,所進行的切削加工會讓金屬構件20B產生撕裂,但讓金屬構件20A不產生撕裂。 According to the present embodiment, the metal member 20A on the distal end side is solid-phase bonded to the metal member 20B on the rear end side, and is cut to form the cathode 20. On the tapered surface 20Q of the cathode 20 formed during the cutting process, a groove portion R including the fine groove r is further formed. At this time, the cutting process performed causes the metal member 20B to be torn, but the metal member 20A is not torn.
接著,使用第5圖來說明第2實施型態的短弧型放電燈管。第2實施型態中,更形成有放熱用溝部。 Next, a short arc type discharge lamp of the second embodiment will be described using FIG. In the second embodiment, a heat generating groove portion is further formed.
第5圖示第2實施型態的陰極的側面圖。 Fig. 5 is a side view showing the cathode of the second embodiment.
陰極200由包含前端面200S的前端側金屬構件200A、以及後端側金屬構件200B所組成。在形成錐面200Q的切削加工時,更形成了由微細溝組成的溝部100R。 The cathode 200 is composed of a front end side metal member 200A including a front end surface 200S and a rear end side metal member 200B. At the time of the cutting process of forming the tapered surface 200Q, the groove portion 100R composed of the fine groove is further formed.
在微細溝r形成後,藉由雷射照射使間距大的溝rr(以下稱為寬溝)重疊形成。寬溝rr具有比微細溝更大的等級(毫米等級)的間距P2及深度d’(未圖示)。在此,間距P2定在0.1mm~1.0mm的範圍,深度d’定在0.1~0.5mm的範圍。特別是把間距P2定在0.2mm~0.5mm的範圍,深度d’定在0.2~0.5mm的範圍較佳。 After the formation of the fine groove r, a groove rr (hereinafter referred to as a wide groove) having a large pitch is formed by laser irradiation. The wide groove rr has a pitch P2 and a depth d' (not shown) of a larger order (millimeter level) than the fine groove. Here, the pitch P2 is set in the range of 0.1 mm to 1.0 mm, and the depth d' is set in the range of 0.1 to 0.5 mm. In particular, the pitch P2 is set in the range of 0.2 mm to 0.5 mm, and the depth d' is preferably in the range of 0.2 to 0.5 mm.
經切削加工後的雷射照射而形成於溝部100R的寬溝rr會提高電極放熱效果,且同時因為雷射照射而融化的部分金屬會埋入楔W中,會進一步地提昇接合強度。 The wide groove rr formed in the groove portion 100R by the laser irradiation after the cutting increases the heat radiation effect of the electrode, and at the same time, a part of the metal melted by the laser irradiation is buried in the wedge W, and the joint strength is further improved.
微細溝也可以用切削加工以外的方法形成,形成不產生撕裂的微細溝/凹凸面。可在接合面強度會上升的範圍內形成具有適當深度、間距的溝。特別是,形成後端側的溝深比前端側的溝深大的溝部較佳。 The fine groove may be formed by a method other than cutting, and a fine groove/concave surface which does not cause tearing may be formed. A groove having an appropriate depth and pitch can be formed in a range in which the strength of the joint surface rises. In particular, it is preferable that the groove portion having the groove depth on the rear end side is deeper than the groove on the front end side.
例如,可以以100μm以下的間距來形成微細溝,並且對後端側金屬構件進行切削加工時使微細溝的深度在100μm以下。這是因為楔W大多以微米等級產生,比上述範圍大的溝的話就無法將楔W充分埋入。 For example, the fine groove can be formed at a pitch of 100 μm or less, and the depth of the fine groove can be made 100 μm or less when cutting the rear end side metal member. This is because the wedge W is mostly generated on the order of micrometers, and the wedge W cannot be sufficiently buried even if it is larger than the above range.
溝部的形成範圍可以只有在接合面附近的一部分,或者是可以在錐面20Q的全體。另外,利用雷射照射以外的方法(切削加工等)也可以形成間距大的寬溝,也能夠只形 成微細溝或只形成寬溝。 The formation of the groove portion may be only a part of the vicinity of the joint surface, or may be the entirety of the tapered surface 20Q. In addition, a method other than laser irradiation (cutting or the like) can also form a wide groove having a large pitch, and can also be shaped only. Form a fine groove or only form a wide groove.
關於前端側的金屬構件20A以及後端側的金屬構件20B的金屬材料的選擇,要使金屬構件20B的延展性比金屬構件20A相對地高。例如,金屬構件20B可用鉭/鉬、或者是以鉭/鉬為主成分的合金來構成。 The metal material of the metal member 20A on the distal end side and the metal member 20B on the rear end side are selected such that the ductility of the metal member 20B is relatively higher than that of the metal member 20A. For example, the metal member 20B may be formed of bismuth/molybdenum or an alloy containing bismuth/molybdenum as a main component.
另外,也可以使用3個以上的金屬構件來形成電極。也可以使只有一對電極中的一方的電極在接合面附近形成溝部,又即使是在形成於錐面或圓柱表面任一者的接合面上也能形成溝部。也可以使用金屬構件以外的構件來進行固相接合,也能夠適用於短弧型放電燈管以外的放電燈管。 Further, three or more metal members may be used to form the electrodes. The electrode of only one of the pair of electrodes may be formed in the vicinity of the joint surface, and the groove portion may be formed even on the joint surface formed on either the tapered surface or the cylindrical surface. It is also possible to use a member other than the metal member for solid phase bonding, and it is also applicable to a discharge lamp tube other than the short arc type discharge lamp.
第1、第2實施型態中,雖使用不同的金屬構件來進行固相接合,但也可以使用同種類的金屬構件來進行固相接合。即使金屬構件的延展性相同,接合面容易形成微小的楔,能夠藉由形成微細溝來防止楔擴大。 In the first and second embodiments, solid phase bonding is performed using different metal members, but solid phase bonding may be performed using the same type of metal member. Even if the ductility of the metal member is the same, the joint surface is likely to form a minute wedge, and the wedge can be prevented from expanding by forming the fine groove.
以下使用第6~8圖來說明本發明的實施例。 Embodiments of the present invention will be described below using Figs. 6-8.
[實施例] [Examples]
額定電力5kW的短弧型放電燈管的陰極是將釷鎢組成的金屬構件以及鉬組成的金屬構件以SPS燒結方式進行固相接合,之後藉由切削加工形成陰極形狀。陽極是將鎢組成的前端側金屬構件及鉬組成的後端側金屬構件進行固相接合,在透過切削加工而得。陰極全長是20mm,從陰極前端面至接合面的距離是5mm,接合面的徑長是16mm。 The cathode of a short-arc discharge lamp having a rated power of 5 kW is a solid member formed by a metal member composed of tantalum tungsten and a metal member composed of molybdenum by SPS sintering, and then formed into a cathode shape by cutting. The anode is obtained by solid-phase joining a metal member having a tip end side composed of tungsten and a metal member having a rear end side composed of molybdenum, and performing a pass-through cutting process. The total length of the cathode was 20 mm, the distance from the front end surface of the cathode to the joint surface was 5 mm, and the diameter of the joint surface was 16 mm.
第6圖是接合面附近的陰極的照片。第7圖是第6圖的放大照片。第8圖是以電子顯微鏡拍攝的接合面附近的照片。 Figure 6 is a photograph of the cathode near the joint surface. Fig. 7 is an enlarged photograph of Fig. 6. Fig. 8 is a photograph of the vicinity of the joint surface taken by an electron microscope.
如第6圖所示,溝部沿著接合面的方向形成,並且跨過接合面。又如第7、8圖所示,後端側的金屬構件有產生撕裂。 As shown in Fig. 6, the groove portion is formed along the direction of the joint surface and spans the joint surface. Further, as shown in Figs. 7 and 8, the metal member on the rear end side is torn.
因為切削加工使得溝部沿著接合面形成且後端側構件產生有撕裂,所以接合面端部不產生楔狀的間隙,在點燈期間接合部不會發生破損。 Since the cutting process is formed such that the groove portion is formed along the joint surface and the rear end side member is torn, no wedge-shaped gap is formed at the end of the joint surface, and the joint portion is not broken during lighting.
Claims (9)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013151647 | 2013-07-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201511080A TW201511080A (en) | 2015-03-16 |
TWI621151B true TWI621151B (en) | 2018-04-11 |
Family
ID=52627862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103124880A TWI621151B (en) | 2013-07-22 | 2014-07-21 | Electrode for discharge lamp tube, discharge lamp tube having the electrode for discharge lamp tube, and method for manufacturing the same |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6483020B2 (en) |
KR (1) | KR102206779B1 (en) |
CN (1) | CN105431922B (en) |
TW (1) | TWI621151B (en) |
WO (1) | WO2015033239A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWD215122S (en) | 2020-02-20 | 2021-11-11 | 日商牛尾電機股份有限公司 | Part of electrode for discharge lamp |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6564598B2 (en) * | 2015-03-31 | 2019-08-21 | 株式会社オーク製作所 | Discharge lamp |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW523780B (en) * | 2000-08-03 | 2003-03-11 | Ushio Electric Inc | Short-arc high-pressure discharge lamp |
CN101714492A (en) * | 2008-10-01 | 2010-05-26 | 优志旺电机株式会社 | Short arc type discharge lamp |
US20110181181A1 (en) * | 2010-01-28 | 2011-07-28 | Ushio Denki Kabushiki Kaisha | Discharge lamp |
JP2011216442A (en) * | 2010-04-02 | 2011-10-27 | Ushio Inc | Short arc type discharge lamp |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4513031B2 (en) * | 2000-08-03 | 2010-07-28 | ウシオ電機株式会社 | Short arc type high pressure discharge lamp |
JP4512968B2 (en) * | 2000-08-03 | 2010-07-28 | ウシオ電機株式会社 | Short arc type high pressure discharge lamp |
JP4484958B1 (en) | 2009-09-24 | 2010-06-16 | 株式会社オーク製作所 | Discharge lamp |
JP5365799B2 (en) | 2009-10-23 | 2013-12-11 | ウシオ電機株式会社 | High pressure discharge lamp and method of manufacturing high pressure discharge lamp |
JP5580136B2 (en) * | 2010-08-11 | 2014-08-27 | 株式会社オーク製作所 | Discharge lamp |
-
2014
- 2014-07-04 JP JP2015535169A patent/JP6483020B2/en active Active
- 2014-07-04 CN CN201480041336.0A patent/CN105431922B/en active Active
- 2014-07-04 KR KR1020157036298A patent/KR102206779B1/en active IP Right Grant
- 2014-07-04 WO PCT/IB2014/062847 patent/WO2015033239A1/en active Application Filing
- 2014-07-21 TW TW103124880A patent/TWI621151B/en active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW523780B (en) * | 2000-08-03 | 2003-03-11 | Ushio Electric Inc | Short-arc high-pressure discharge lamp |
CN101714492A (en) * | 2008-10-01 | 2010-05-26 | 优志旺电机株式会社 | Short arc type discharge lamp |
US20110181181A1 (en) * | 2010-01-28 | 2011-07-28 | Ushio Denki Kabushiki Kaisha | Discharge lamp |
JP2011216442A (en) * | 2010-04-02 | 2011-10-27 | Ushio Inc | Short arc type discharge lamp |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWD215122S (en) | 2020-02-20 | 2021-11-11 | 日商牛尾電機股份有限公司 | Part of electrode for discharge lamp |
Also Published As
Publication number | Publication date |
---|---|
KR20160033663A (en) | 2016-03-28 |
JP6483020B2 (en) | 2019-03-13 |
TW201511080A (en) | 2015-03-16 |
CN105431922A (en) | 2016-03-23 |
JPWO2015033239A1 (en) | 2017-03-02 |
CN105431922B (en) | 2017-07-14 |
KR102206779B1 (en) | 2021-01-22 |
WO2015033239A1 (en) | 2015-03-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5472915B2 (en) | Discharge lamp | |
JP4484958B1 (en) | Discharge lamp | |
US8648531B2 (en) | High pressure discharge lamp and method of manufacturing high pressure discharge lamp | |
TWI602216B (en) | Manufacturing method of discharge lamp electrode and discharge lamp | |
KR101661488B1 (en) | Discharge lamp | |
EP0892423A2 (en) | Discharge lamp of the short arc type and process for production thereof | |
TWI621151B (en) | Electrode for discharge lamp tube, discharge lamp tube having the electrode for discharge lamp tube, and method for manufacturing the same | |
JP4498468B1 (en) | Manufacturing method of electrode for discharge lamp | |
JP6633826B2 (en) | Discharge lamp | |
JP2014063655A (en) | Method of manufacturing electrode for discharge lamp | |
US8350476B2 (en) | Short arc type discharge lamp | |
KR102469050B1 (en) | Discharge lamp | |
JP6092557B2 (en) | Manufacturing method of discharge lamp electrode | |
JP6263770B2 (en) | Short arc type discharge lamp | |
JP7313791B2 (en) | Discharge lamp and method for manufacturing discharge lamp electrode | |
JP6328285B2 (en) | Manufacturing method of discharge lamp electrode | |
JP7145429B2 (en) | discharge lamp | |
JP2003123688A (en) | Short-arc high pressure discharge lamp | |
JP2014216149A (en) | Discharge lamp |