TWI608969B - Dust film assembly storage container packaging structure and its packaging method - Google Patents

Dust film assembly storage container packaging structure and its packaging method Download PDF

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TWI608969B
TWI608969B TW105135830A TW105135830A TWI608969B TW I608969 B TWI608969 B TW I608969B TW 105135830 A TW105135830 A TW 105135830A TW 105135830 A TW105135830 A TW 105135830A TW I608969 B TWI608969 B TW I608969B
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pellicle
package
packaging
container
film
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TW105135830A
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Chinese (zh)
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TW201716298A (en
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関原一敏
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信越化學工業股份有限公司
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D77/00—Packages formed by enclosing articles or materials in preformed containers, e.g. boxes, cartons, sacks or bags
    • B65D77/04—Articles or materials enclosed in two or more containers disposed one within another
    • B65D77/0406—Rigid containers in preformed flexible containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/025—Containers made of sheet-like material and having a shape to accommodate contents
    • B65D81/027—Containers made of sheet-like material and having a shape to accommodate contents double-walled
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0012—Processes making use of the tackiness of the photolithographic materials, e.g. for mounting; Packaging for photolithographic material; Packages obtained by processing photolithographic materials

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Packages (AREA)

Description

防塵薄膜組件收納容器的包裝結構體及其包裝 方法 Packaging structure of dustproof membrane module storage container and packaging thereof method

本發明涉及收納在半導體裝置、積體電路(Integrated Circuit，IC)封裝體、印刷基板、液晶面板或者有機電致發光(Electroluminescence，EL)顯示器等的製造時作為防塵器使用的防塵薄膜組件中的至少一個邊長為超過500mm的大型的防塵薄膜組件的防塵薄膜組件的收納容器的包裝結構體以及其包裝方法。 The present invention relates to a pellicle for use as a dustproof device in a semiconductor device, an integrated circuit (IC) package, a printed circuit board, a liquid crystal panel, or an organic electroluminescence (EL) display. A packaging structure of a storage container of a pellicle of a large pellicle assembly having a side length of more than 500 mm and a packaging method thereof.

在大型積體電路(Large Scale Integration，LSI)、超大型積體電路(Very Large Scale Integration，VLSI)等的半導體或為液晶顯示器等的製造中，要向半導體晶片或者液晶用玻璃板照射紫外光進行圖案的製作，此時使用的光遮罩如灰塵附著，灰塵就會對紫外光進行遮擋、反射，就會發生轉印的圖案的變形、短路，從而品質受損。 In the manufacture of a semiconductor such as a large scale integrated circuit (LSI) or a Very Large Scale Integration (VLSI) or a liquid crystal display, the semiconductor wafer or the glass plate for liquid crystal is irradiated with ultraviolet light. When the pattern is produced, the light mask used at this time is adhered to dust, and the dust blocks and reflects the ultraviolet light, and deformation or short circuit of the transferred pattern occurs, and the quality is impaired.

因此，這些的操作，通常在無塵室中進行，但是，即使如此，也難以總是保持光遮罩的清潔。由此，要在光遮罩表面貼附作為除灰塵器的防塵薄膜組件後再進行曝光。在該場合，異物不附著在光遮罩的表面上，而是在防塵薄膜組件上附著，微影時， 只要將焦點對準光遮罩的圖案上，防塵薄膜組件上的異物就與轉印無關係了。 Therefore, these operations are usually performed in a clean room, but even so, it is difficult to always keep the light mask clean. Therefore, exposure is performed after attaching the pellicle as a dust remover to the surface of the photomask. In this case, the foreign matter does not adhere to the surface of the light mask, but is attached to the dustproof film assembly, and when lithography is performed, As long as the focus is on the pattern of the light mask, the foreign matter on the pellicle assembly has nothing to do with the transfer.

該防塵薄膜組件，一般，為將良好透光的由硝化纖維素、醋酸纖維素或者氟樹脂等形成的透明的防塵薄膜組件膜在由鋁、不銹鋼、工程塑料等形成的防塵薄膜組件框架的上端面接著而製作。另外，防塵薄膜組件框架的下端，設置為了在光遮罩上裝著的聚丁烯樹脂、聚醋酸乙烯基酯樹脂、丙烯酸樹脂、有機矽樹脂等形成的黏著層，以及設置用來保護黏著層的離型層(分離片)。 The pellicle film assembly is generally a transparent pellicle film formed of nitrocellulose, cellulose acetate or fluororesin, which is excellent in light transmission, at the upper end of a pellicle frame formed of aluminum, stainless steel, engineering plastics or the like. The surface is then produced. Further, the lower end of the pellicle frame is provided with an adhesive layer formed of a polybutene resin, a polyvinyl acetate resin, an acrylic resin, an organic resin, or the like for mounting on the light mask, and is provided to protect the adhesive layer. Release layer (separation sheet).

另外，對邊長為超過500mm的大型的防塵薄膜組件進行收納的防塵薄膜組件收納容器，一般，由將防塵薄膜組件載置的容器本體和在其上周緣部嵌合密封的蓋體構成，這些容器本體和蓋體為，將厚度2mm~8mm左右的樹脂板真空成形或者壓空成形而製作。該製法，即使大型的也可一體成形，具有內部發塵源少之外，還具有生產性高、低成本的優點。 In addition, a pellicle assembly container that accommodates a large-sized pellicle having a side length of more than 500 mm is generally composed of a container body on which a pellicle is placed, and a lid that is fitted and sealed at an upper peripheral edge portion thereof. These container bodies and lids are produced by vacuum forming or pressure forming a resin plate having a thickness of about 2 mm to 8 mm. This method can be integrally formed even in a large size, and has an advantage of high productivity and low cost, in addition to having a small internal dust source.

作為大型的防塵薄膜組件收納容器的材質，從機械性質和成形性優良性出發，幾乎所有的場合，容器本體使用丙烯睛-丁二烯-苯乙烯(Acrylonitrile butadiene styrene，ABS)樹脂，蓋體使用ABS樹脂或者聚甲基丙烯酸甲脂(Poly methyl methacrylate，PMMA)樹脂。這些的樹脂，由於具有可燃性，大型的防塵薄膜組件收納容器，作為可燃物的容積以及重量也很大，所以該防塵薄膜組件收納容器在一個場所大量保管的場合，有安全性的擔心，所以要求賦予難燃性。 As a material of a large-sized pellicle container storage container, in almost all cases, the container body is made of acrylonitrile butadiene styrene (ABS) resin, and the lid body is used. ABS resin or Polymethyl methacrylate (PMMA) resin. Since these resins are flammable and have a large dust-proof membrane module storage container, the volume and weight of the combustible material are also large. Therefore, when the dust-proof membrane module storage container is stored in a large amount in one place, there is a concern about safety. It is required to impart flame retardancy.

對這樣的防塵薄膜組件收納容器進行保管的場合，一般是用防塵薄膜組件收納容器包裝袋中收納保管。由此，此包裝袋，被要求具有清潔性之外，要使內部的防塵薄膜組件收納容器上沒有異物附著的密閉性、防帶電性能等，所以，以往，使用厚度100μm~300μm的聚乙烯(Polyethylene，PE)，聚對苯二甲酸乙二醇酯(Polyethylene terephthalate，PET)等的樹脂材質形成的包裝袋。另外，為了確保防帶電性能，通常，在材質中混入帶電防止劑或者導電材料，或與導電材質進行貼合，或者進行導電印刷。 When such a pellicle container storage container is stored, it is generally stored and stored in a pellicle pack storage container wrap. Therefore, in addition to the cleaning property of the packaging bag, the internal pellicle assembly container does not have the sealing property and the antistatic property of the foreign matter, so conventionally, polyethylene having a thickness of 100 μm to 300 μm is used. Polyethylene, PE), a polyethylene terephthalate (PET) resin material such as a packaging bag. Further, in order to secure the antistatic property, a charge inhibitor or a conductive material is usually mixed in the material, or bonded to a conductive material, or conductive printed.

例如，專利文獻1中，記載了，為了防止防塵薄膜組件的污染，最內側的第一袋要使用在清潔度1000以下的無塵室內製造的潔淨袋，第二、第三的袋使用具有帶電防止功能的袋的防塵薄膜組件收納容器的收納方法。但是，該收納方法在適用於一邊超過500mm的大型的防塵薄膜組件收納容器的場合，使用的包裝袋要用吹漲法成形，考慮到其設備的尺寸以及需要量少等的問題，具有難以在無塵室等的清潔的環境中製造的問題。 For example, Patent Document 1 describes that in order to prevent contamination of the pellicle, the innermost first bag is to be used in a clean room manufactured in a clean room having a cleanliness of 1000 or less, and the second and third bags are charged. A method of accommodating a pellicle pack storage container of a bag that prevents function. However, when the storage method is applied to a large pellicle container storage container having a length of more than 500 mm, the packaging bag to be used is formed by a blow-up method, and it is difficult to consider the size and the required amount of the equipment. Problems created in a clean environment such as a clean room.

[現有技術文獻] [Prior Art Literature]

[專利文獻] [Patent Literature]

[專利文獻1]日本專利特開2012-208158號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2012-208158

由此，在一般環境中製造的包裝袋多在無塵室內清潔後，再加以使用，作為此場合的清潔方法，在用水洗以及用純水擦拭等 的濕法洗淨之外，還有用黏著棍以及吹風等的乾法洗淨等的方法，但是，大型的包裝袋，特別是袋內側的清潔作業極為困難，在製造工程以及品質上有大問題。 Therefore, the packaging bags manufactured in a general environment are often cleaned in a clean room, and used as a cleaning method in this case, washing with water and wiping with pure water. In addition to wet cleaning, there are also methods such as dry cleaning with adhesive sticks and air blowers. However, large packaging bags, especially the inside of the bag, are extremely difficult to clean, and there are major problems in manufacturing engineering and quality. .

以此，本發明，就是鑒於上述那樣的問題而成的，本發明的目的為，提供一種，在包裝使用前清潔容易，包裝時內部密閉性優良的同時，具有防塵薄膜組件收納容器的收納、取出操作容易的防塵薄膜組件收納容器的包裝結構體以及其包裝方法。 As described above, the present invention has been made in view of the above-described problems, and an object of the present invention is to provide an apparatus which is easy to clean before use, and which is excellent in internal sealing property at the time of packaging, and which has a dustproof membrane module storage container. The package structure of the pellicle assembly container which is easy to handle and the packaging method thereof are taken out.

本發明為一種收納至少一個邊長為超過500mm的防塵薄膜組件的防塵薄膜組件收納容器的包裝結構體，其特徵在於：其由用具有防帶電性的平面狀的包裝膜將防塵薄膜組件收納容器覆蓋包裝而成的內側包裝體以及將此內側包裝體收納的袋狀的外側包裝體形成的，至少二重的包裝體構成。 The present invention provides a packaging structure for a pellicle assembly container that houses at least one pellicle having a side length of more than 500 mm, which is characterized in that the pellicle assembly container is provided by a flat packaging film having an antistatic property. The inner package body that is packaged and the bag-shaped outer package body that accommodates the inner package body are formed of at least two packages.

另外，本發明的包裝膜，以軟質聚氯乙烯或聚偏二氯乙烯為優選，其厚度優選50μm~300μm。進一步，本發明的外側包裝體優選從聚乙烯、聚丙烯、聚對苯二甲酸乙二醇酯中選擇。 Further, the packaging film of the present invention is preferably a soft polyvinyl chloride or a polyvinylidene chloride, and its thickness is preferably 50 μm to 300 μm. Further, the outer package of the present invention is preferably selected from the group consisting of polyethylene, polypropylene, and polyethylene terephthalate.

本發明的包裝方法為，收納至少一個邊長超過500mm的防塵薄膜組件的防塵薄膜組件收納容器的包裝方法，其特徵在於：包括將具有防帶電性的平面狀的包裝膜進行多次反折，對防塵薄膜組件收納容器進行包裝，由此製作內側包裝體的步驟，以及將該內側包裝體收納於袋狀的外側包裝體的步驟。 The packaging method of the present invention is a packaging method for a pellicle assembly container that houses at least one pellicle having a side length of more than 500 mm, and is characterized in that the planar packaging film having antistatic property is folded back a plurality of times. The step of packaging the pellicle container storage container to produce the inner package, and the step of accommodating the inner package in the bag-shaped outer package.

根據本發明，特別是要求清潔的內側包裝體，不是像以往那樣，將防塵薄膜組件收納容器收納於袋中，而是，用平面狀的包裝膜對防塵薄膜組件收納容器進行覆蓋包裝，所以包裝使用前的平面狀的包裝膜的清潔容易，從而使極為清潔變為可能。另外，多次反折彎曲，將防塵薄膜組件收納容器包裝時，由於該包裝膜與防塵薄膜組件收納容器密著，所以密閉性可以充分確保，由此，可以保持內部的防塵薄膜組件收納容器清潔。 According to the present invention, in particular, in the inner package which is required to be cleaned, the pellicle assembly container is not stored in the bag as in the related art, but the pellicle container storage container is covered with a flat packaging film, so that the package is packaged. The flat packaging film before use is easy to clean, making it extremely clean. In addition, when the pellicle is stored in a pellicle assembly container, the packaging film is adhered to the pellicle container storage container, so that the airtightness can be sufficiently ensured, thereby keeping the internal pellicle assembly container clean. .

10、60、70‧‧‧防塵薄膜組件收納容器的包裝結構體 10, 60, 70‧‧‧Package structure of dustproof membrane module storage container

11‧‧‧平面狀的包裝膜 11‧‧‧Flat-shaped packaging film

11’、61’、71‧‧‧內側包裝體 11', 61', 71‧‧‧ inner package

12、62、72‧‧‧袋狀的外側包裝體 12, 62, 72‧‧‧ bag-shaped outer packaging

13、14、63、73‧‧‧黏著帶 13, 14, 63, 73‧‧‧ adhesive tape

50、64‧‧‧防塵薄膜組件收納容器 50, 64‧‧‧Plastic membrane assembly storage container

50a、50b、50c、50d‧‧‧防塵薄膜組件收納容器外緣 50a, 50b, 50c, 50d‧‧‧ dustproof membrane module storage container outer edge

51、64a‧‧‧防塵薄膜組件收納容器本體 51, 64a‧‧‧Plastic membrane module storage container body

52、64b‧‧‧防塵薄膜組件收納容器蓋體 52, 64b‧‧‧Plastic membrane module storage container cover

53、65‧‧‧防塵薄膜組件 53, 65‧‧‧Dust film assembly

61a、61b、61c‧‧‧平面狀的包裝膜 61a, 61b, 61c‧‧‧ planar packaging film

64c、64d‧‧‧把手 64c, 64d‧‧‧handle

64e‧‧‧腳部 64e‧‧‧foot

64f‧‧‧搭扣 64f‧‧‧ buckle

圖1是本發明的防塵薄膜組件收納容器的包裝結構體的概要截面圖。 Fig. 1 is a schematic cross-sectional view showing a package structure of a pellicle assembly container according to the present invention.

圖2是內側包裝體的概要斜視圖。 Fig. 2 is a schematic perspective view of the inner package.

圖3是將內側包裝體收納於外側包裝體的概要斜視圖。 3 is a schematic perspective view of the inner package housed in the outer package body.

圖4是將防塵薄膜組件收納容器用平面狀膜包裝步驟(1)~步驟(3)的平面圖。 Fig. 4 is a plan view showing steps (1) to (3) of packaging a flat film for a pellicle container storage container.

圖5是包裝的防塵薄膜組件收納容器的斜視圖。 Fig. 5 is a perspective view of the packaged pellicle assembly container.

圖6是實施例2的包裝結構體的概要的截面圖。 Fig. 6 is a cross-sectional view showing an outline of a package structure of a second embodiment.

圖7是比較例的包裝結構體的概要的截面圖。 Fig. 7 is a cross-sectional view showing an outline of a package structure of a comparative example.

以下，對本發明的一實施方式基於附圖進行詳細說明，但是本發明並不限於此。 Hereinafter, an embodiment of the present invention will be described in detail based on the drawings, but the present invention is not limited thereto.

圖1、圖2以及圖3，為本發明的防塵薄膜組件收納容器 的包裝構造的一實施方式的圖。圖1為，表示本發明的包裝結構體的全體概要的截面圖，圖2為，僅進行了將防塵薄膜組件收納容器50用平面狀的包裝膜11進行覆蓋包裝的內側包裝體11’的狀態的斜視圖，圖3為，在其外側進一步進行了用袋狀的外側包裝體12的包裝的狀態的斜視圖。 1, 2 and 3, the dustproof film assembly storage container of the present invention A diagram of an embodiment of a package construction. 1 is a cross-sectional view showing the entire outline of the package structure of the present invention, and FIG. 2 shows a state in which only the inner package 11' that covers the pellicle assembly container 50 with the planar packaging film 11 is covered. FIG. 3 is a perspective view showing a state in which the outer package 12 of the bag shape is further packaged on the outer side.

本發明的防塵薄膜組件收納容器的包裝結構體為，由內側包裝體11’和外側包裝體12構成的至少二重的包裝體來構成的。其中，內側包裝體11’為，使用平面狀的包裝膜11將防塵薄膜組件收納容器50覆蓋包裝而構成的，在用於包裝之前將該平面狀的包裝膜11進行清潔的操作比以往的包裝袋容易，這對內側包裝體11’的清潔度的確保以及製造效率上有利。 The package structure of the pellicle container storage container of the present invention is constituted by at least two packages including the inner package 11' and the outer package 12. The inner package 11' is formed by covering the pellicle assembly container 50 with a flat packaging film 11, and the operation of cleaning the planar packaging film 11 before packaging is performed. The bag is easy, which is advantageous for ensuring the cleanliness of the inner package 11' and manufacturing efficiency.

在該平面狀的包裝膜11中，為了防止異物附著，優選加入了帶電防止劑或導電物質，使其具有防帶電性。另外，包裝膜的顏色如為透明或半透明易於對內部進行確認，優選，但是，相反，有時為了防止使容器變色退化的紫外線，也可使其為不透明的黑色等。 In the planar packaging film 11, in order to prevent adhesion of foreign matter, it is preferable to add a charging preventing agent or a conductive material to have antistatic property. Further, the color of the packaging film is preferably transparent or translucent, and it is preferable to confirm the inside. However, conversely, in order to prevent ultraviolet rays which degrade the container from discoloration, it may be made opaque black or the like.

另外，包裝膜11的材料，沒有特別的限定，可以從聚乙烯、聚偏二氯乙烯、聚氯乙烯、聚甲基戊烯等的可以膜狀成形的材料中進行自由選擇。進一步，製成聚乙烯/聚丙烯那樣的多層構造。從難燃性以及密著性的觀點，特別以軟質聚氯乙烯或聚偏二氯乙烯製的膜為優選，如考慮成本，以軟質聚氯乙烯製的膜為更優選。 Further, the material of the packaging film 11 is not particularly limited, and can be freely selected from materials which can be formed into a film shape such as polyethylene, polyvinylidene chloride, polyvinyl chloride or polymethylpentene. Further, a multilayer structure such as polyethylene/polypropylene was produced. From the viewpoint of flame retardancy and adhesion, a film made of soft polyvinyl chloride or polyvinylidene chloride is particularly preferable, and a film made of a soft polyvinyl chloride is more preferable in consideration of cost.

在此，所謂軟質聚氯乙烯，是指含有鄰苯二甲酸酯等構成的可塑劑按重量比為10%以上。 Here, the term "soft polyvinyl chloride" means a plasticizer containing a phthalate or the like in a weight ratio of 10% or more.

如果將如軟質聚氯乙烯或聚偏二氯乙烯那樣的賦予密著性的材料作為包裝膜11的材料而使用的話，在將包裝膜11多次反折而對防塵薄膜組件收納容器50進行包裝時，由於包裝膜11相互接觸密切，即使不使用袋狀，也容易構成密閉空間，優選。 When a material imparting adhesiveness such as soft polyvinyl chloride or polyvinylidene chloride is used as a material of the packaging film 11, the packaging film 11 is folded back a plurality of times to package the pellicle packaging container 50. At this time, since the packaging films 11 are in close contact with each other, it is preferable to form a sealed space without using a bag shape.

內側包裝體11’中使用的包裝膜11的厚度以，50μm~300μm為優選，但是從密著性、成本、處理的容易度來看，以70μm~200μm的範圍為更優選。另外，將防塵薄膜組件收納容器50覆蓋包裝的內側包裝體11’的膜端，原封不動地密著也可，根據必要用熱封等接著也可。最好為用數枚的黏著帶13固定住為優選，如此，在開梱時易於將膜端剝離。 The thickness of the packaging film 11 used in the inner package 11' is preferably 50 μm to 300 μm, but it is more preferably in the range of 70 μm to 200 μm from the viewpoints of adhesion, cost, and ease of handling. In addition, the pellicle assembly container 50 may be covered with the film end of the inner package 11' of the package, and may be sealed as it is, or may be heat sealed or the like as necessary. It is preferable to hold it with a plurality of adhesive tapes 13 so that the film ends are easily peeled off during opening.

另外，內側包裝體11’，由於不是使用包裝袋，而是使用平面狀的包裝膜11，在有必要將大重量的大型的防塵薄膜組件收納容器50***袋中或從袋中拉出時，包裝、開梱極為容易。進一步，包裝膜11的材料為軟質聚氯乙烯或聚氯(1,1-二氯乙烯)的場合，由於具有高的難燃性，所以從安全性的點來看也優選。 Further, in the inner package 11', a flat packaging film 11 is used instead of the packaging bag, and when it is necessary to insert or remove a large-sized large-sized pellicle packaging container 50 into or out of the bag, Packaging and opening are extremely easy. Further, when the material of the packaging film 11 is soft polyvinyl chloride or polychloro (1,1-dichloroethylene), since it has high flame retardancy, it is also preferable from the viewpoint of safety.

防塵薄膜組件收納容器50用包裝膜11來包裝成為內側包裝體11’的包裝步驟為，以使用最小限度必要的大小的包裝膜11，來以少的包裝步驟將防塵薄膜組件收納容器50完全覆蓋即可，但是優選包裝步驟的一例如圖4步驟(1)乃至步驟(3)所示。 The step of packaging the pellicle assembly container 50 with the packaging film 11 to form the inner package 11' is to completely cover the pellicle assembly container 50 with a small number of packaging steps using the packaging film 11 of a minimum necessary size. However, an example of a preferred packaging step is shown in step (1) or step (3) of FIG. 4 .

首先，如圖4步驟(1)表示的那樣，在包裝膜11上放上防塵薄膜組件收納容器50，沿著防塵薄膜組件收納容器50的外緣50a、50b的由橫杠和點組成的虛線將包裝膜11反折，由此，防塵薄膜組件收納容器50的上面被完全覆蓋。圖4步驟(2)為反折後的狀態。此時，反折的包裝膜11的周緣為相互重疊的狀態，防塵薄膜組件收納容器50被包裝膜11完全覆蓋，故而優選。 First, as shown in step (1) of Fig. 4, the pellicle assembly container 50 is placed on the packaging film 11, and a dotted line composed of a horizontal bar and dots along the outer edges 50a, 50b of the pellicle assembly container 50 is formed. The packaging film 11 is folded back, whereby the upper surface of the pellicle container storage container 50 is completely covered. Step (2) of Fig. 4 is a state after refolding. At this time, the peripheral edge of the folded-fold packaging film 11 is in a state of being overlapped with each other, and the pellicle assembly container 50 is completely covered by the packaging film 11, which is preferable.

然後，沿著防塵薄膜組件收納容器的外緣50c，50d，在圖4步驟(2)中的由橫杠和點組成的虛線，將包裝膜11向著防塵薄膜組件收納容器頂面反折。圖4步驟(3)為反折後的狀態。內側包裝體11’，在該狀態就完成了，但是，以將反折的包裝膜11的先端在頂面的包裝膜11上的數處用黏著帶13貼附為優選。 Then, along the outer edges 50c, 50d of the pellicle container storage container, the packaging film 11 is folded back toward the top surface of the pellicle container storage container in the dotted line composed of the horizontal bars and the dots in the step (2) of Fig. 4. Step (3) of Fig. 4 is a state after refolding. The inner package 11' is completed in this state, but it is preferable to attach the adhesive tape 13 to a plurality of places on the top surface of the packaging film 11 at the tip end of the folded-back packaging film 11.

另外，優選將包裝膜的大小設定，使各包裝膜11相互的重疊100mm~300mm，由於包裝膜11的密著性而使重疊部分相互密著，從而得到確實的密閉。 Moreover, it is preferable to set the size of the packaging film so that the respective packaging films 11 overlap each other by 100 mm to 300 mm, and the overlapping portions are adhered to each other due to the adhesion of the packaging film 11, thereby obtaining a reliable sealing.

另一方面，外側包裝體12，如圖3表示的那樣，將內側包裝體11’進一步包覆，從而可以防止灰塵附著於內側包裝體11’，這是為了在保管以及輸送中包裝內不讓灰塵侵入。 On the other hand, as shown in FIG. 3, the outer package 12 further covers the inner package 11', so that dust can be prevented from adhering to the inner package 11', which is for preventing the inside of the package during storage and transportation. Dust intrusion.

此外，外側包裝體12為袋狀，其材料，從由聚乙烯(PE)、聚丙烯(polypropylcne，PP)、聚對苯二甲酸乙二醇酯(PET)樹脂構成的群中選擇為優選。作為袋狀物的製造方法沒有特別的要求，以將袋的開口部熱封來進一步密封，或多次反折彎曲，用黏著帶14固定為優選。 Further, the outer package 12 is in the form of a bag, and the material thereof is preferably selected from the group consisting of polyethylene (PE), polypropylene (polypropylcne, PP), and polyethylene terephthalate (PET) resin. There is no particular requirement as a method of producing the pouch, and it is preferable to heat-seal the opening of the pouch to further seal it, or to bend it a plurality of times, and to fix it by the adhesive tape 14.

外側包裝體12的厚度，從50μm~300μm的範圍選擇即可，但是，從成本、強度、製袋的難易度等的觀點來看，以100μm~150μm為優選。該外側包裝體12也與內側包裝體11’同樣，以混入帶電防止劑以及導電物質，或與導電材質進行貼合，使其具有防帶電性為優選。另外，顏色可以為有色，但是，以透明或半透明，可以對內部進行確認為優選。 The thickness of the outer package 12 may be selected from the range of 50 μm to 300 μm, but it is preferably from 100 μm to 150 μm from the viewpoints of cost, strength, ease of bag making, and the like. Similarly to the inner package 11', the outer package 12 is preferably mixed with a charge preventing agent and a conductive material, or bonded to a conductive material to have antistatic property. Further, the color may be colored, but it may be transparent or translucent, and it is preferable to confirm the inside.

該外側包裝體12，由於為袋狀的形狀，特別易於防止灰塵向內部的侵入，可以保持內側包裝體11’的清潔。另外，作為外側包裝體12的材料，優選聚乙烯(PE)、聚丙烯(PP)、聚對苯二甲酸乙二醇酯(PET)樹脂，其中，任一個都為硬材質，滑動性良好，對於具有微黏著性的內側包裝體11’，也很容易收納。 Since the outer package 12 has a bag shape, it is particularly easy to prevent intrusion of dust into the inside, and the inner package 11' can be kept clean. Further, as the material of the outer package 12, polyethylene (PE), polypropylene (PP), or polyethylene terephthalate (PET) resin is preferable, and any of them is a hard material, and the slidability is good. It is also easy to store the inner package 11' having microadhesiveness.

內側包裝體11’，具有微黏著性，所以灰塵易於附著，而且具有對其接觸的各種各樣的物品的貼附操作性變差的問題，但是，此內側包裝體11’的外側上，由於設置有使用上述材料的外側包裝體12(使內側包裝體11’被收納於袋狀的外側包裝體12)，所以具有可以防止灰塵的附著優點。另外，在向包裝箱以及收納棚的收納以及取出的搬送操作中，其操作性被改善，非常適用。 The inner package 11' has a slight adhesiveness, so that the dust is liable to adhere, and the attaching workability of various articles in contact with it is deteriorated. However, on the outer side of the inner package 11', Since the outer package 12 using the above-described material (the inner package 11' is housed in the bag-shaped outer package 12) is provided, there is an advantage that dust can be prevented from adhering. In addition, in the conveyance operation of accommodating and taking out the packaging box and the storage shed, the operability is improved, and it is very suitable.

該外側包裝體12，在一般環境下，由於灰塵附著很多，所以通常在防塵薄膜組件使用時，在向無塵室將防塵薄膜組件搬入，以將外側包裝體12除掉，僅剩內側包裝體11’的狀態搬入無塵室，進行保管為特別優選。 The outer package 12 has a large amount of dust in a general environment. Therefore, when the pellicle is used, the pellicle is usually carried into the clean room to remove the outer package 12, leaving only the inner package. The state of 11' is carried into the clean room, and storage is particularly preferable.

本發明中，被收納的防塵薄膜組件收納容器50，其構造、 材質沒有特別的要求，一般，以使用ABS、PMMA、聚碳酸酯(Polycarbonate，PC)等的樹脂板進行真空成形來製作為優選。此防塵薄膜組件收納容器50，如圖5表示的那樣，通常，由將載置防塵薄膜組件53的收納容器本體51以及在其周緣部嵌合，將防塵薄膜組件53和收納容器本體51覆蓋的蓋體52來構成。然後，其周緣部用夾子等進行固定，或用黏著帶密封(未圖示)。 In the present invention, the dust-proof membrane module storage container 50 that is housed has a structure, There is no particular requirement for the material. Generally, it is preferably produced by vacuum forming using a resin plate such as ABS, PMMA, or polycarbonate (PC). As shown in FIG. 5, the dust-proof membrane module storage container 50 is generally covered by the container body 51 on which the pellicle film assembly 53 is placed and the peripheral portion thereof, and covers the pellicle film assembly 53 and the container body 51. The cover 52 is constructed. Then, the peripheral portion thereof is fixed by a clip or the like, or sealed with an adhesive tape (not shown).

特別是，邊長超過1m的大型的防塵薄膜組件收納容器50的場合，為了提高剛性，在樹脂用真空成形製作的防塵薄膜組件收納容器的外側，可以通過貼附金屬以及纖維強化樹脂製的補強體，另外，也可以用鋁合金、鎂合金等的輕量金屬製作防塵薄膜組件收納容器自身或特別是製作下側的容器本體。 In the case of the large pellicle container storage container 50 having a side length of more than 1 m, in order to increase the rigidity, the outer side of the pellicle assembly container which is formed by vacuum forming of the resin can be reinforced by a metal and a fiber-reinforced resin. Alternatively, the pellicle assembly container itself may be made of a lightweight metal such as an aluminum alloy or a magnesium alloy, or in particular, a container body on the lower side may be produced.

另外，可以在防塵薄膜組件收納容器50的外側安裝作業用把手以及腳部，由於本發明使用的平面狀的包裝膜11具有柔軟性，可以與把手以及腳部等的突起物良好地對應。 In addition, the work handle and the leg portion can be attached to the outside of the pellicle pack storage container 50, and the flat wrap film 11 used in the present invention has flexibility, and can appropriately correspond to protrusions such as a handle and a leg.

進一步，防塵薄膜組件收納容器50的表面，如平坦，與內側包裝體11’的密著性良好而優選，但是，也可以特意在防塵薄膜組件收納容器50的表面設置凹凸，由此考慮操作性等，對密著性進行控制。 Further, the surface of the pellicle container storage container 50 is preferably flat and has good adhesion to the inner package 11'. However, it is also possible to provide irregularities on the surface of the pellicle assembly container 50, thereby considering operability. Etc., control the adhesion.

[實施例] [Examples]

以下，對本發明的實施例以及比較例進行具體說明，實施例以及比較例的各操作在10級無塵室內進行。 Hereinafter, examples and comparative examples of the present invention will be specifically described, and each operation of the examples and comparative examples is carried out in a clean room of class 10.

<實施例1> <Example 1>

實施例1中，製作圖1~圖3表示的那樣的防塵薄膜組件收納容器的包裝結構體10。該包裝結構體10，由內側包裝體11’和外側包裝體12的二重的包裝體來構成，內側包裝體11’的內部，使用平面狀的包裝膜11對圖5所示的防塵薄膜組件收納容器50包裝。 In the first embodiment, the package structure 10 of the pellicle assembly container shown in FIGS. 1 to 3 is produced. The package structure 10 is composed of a double package of the inner package 11' and the outer package 12, and the inside of the inner package 11' is formed by using the planar packaging film 11 for the pellicle assembly shown in FIG. The storage container 50 is packaged.

防塵薄膜組件收納容器50，由用厚度5mm的黑色的難燃帶電防止ABS樹脂將真空成形的防塵薄膜組件收納容器本體51、以及在其周緣部嵌合的用同材料製成的真空成形的蓋體52構成，其組合後的外尺寸為1350mm×1532mm×高度120mm。然後，將此防塵薄膜組件收納容器50用介面活性劑和純水洗淨，良好乾燥。 The pellicle assembly container 50 is a vacuum-formed lid assembly container body 51 that is vacuum-formed by a black flame-retardant electrification with a thickness of 5 mm, and a vacuum-formed lid made of the same material that is fitted to the peripheral edge portion thereof. The body 52 is constructed such that the combined outer dimensions are 1350 mm × 1532 mm × height 120 mm. Then, the pellicle film container 50 is washed with an surfactant and pure water, and is dried well.

然後，製作外尺寸1146mm×1366mm的大小，高度7mm的防塵薄膜組件53，在暗室內用集光燈目視異物檢査後，收納於防塵薄膜組件收納容器50，周圍用黏著帶(未圖示)密閉。防塵薄膜組件53中使用的防塵薄膜組件框架為，將A5052鋁合金進行機械加工，並施以黑色氧化膜，外尺寸1146mm×1366mm的大小，內尺寸1122mm×1342mm的大小，高度為5.8mm，角部為外側R3，內側R2。 Then, a pellicle film assembly 53 having an outer size of 1146 mm × 1366 mm and a height of 7 mm was produced, and the foreign matter was inspected by a spotlight in a dark room, and then stored in the pellicle assembly container 50, and the periphery thereof was sealed with an adhesive tape (not shown). . The pellicle frame used in the pellicle film assembly 53 is formed by machining the A5052 aluminum alloy and applying a black oxide film having an outer size of 1146 mm × 1366 mm, an inner size of 1122 mm × 1342 mm, and a height of 5.8 mm. The part is the outer side R3 and the inner side R2.

在該防塵薄膜組件框架的一個面上，作為防塵薄膜組件膜接著層塗布有機矽樹脂，將厚度4.5μm的氟系樹脂構成的防塵薄膜組件膜接著。另外，在另外一個面上，作為光遮罩黏著層將有機矽黏著劑塗布，在其表面上將在與框架外形大略同形狀切斷 的PET樹脂上塗有離型劑而製作的分離片貼附。將該收納防塵薄膜組件53的防塵薄膜組件收納容器50的外面用純水擦拭洗淨，將周圍弄暗，用集光燈進行目視檢査，將可以看到的附著異物全部除去。 On one surface of the pellicle frame, a pellicle film was applied as a pellicle film, and a pellicle film made of a fluorine-based resin having a thickness of 4.5 μm was attached. In addition, on the other surface, the organic enamel adhesive is applied as a light-shielding adhesive layer, and the surface thereof is cut off in a shape similar to that of the frame. The separator of the PET resin coated with a release agent is attached. The outer surface of the pellicle membrane storage container 50 that houses the pellicle film assembly 53 is wiped clean with pure water, the periphery is darkened, and the spotlight is visually inspected to remove all visible foreign matter.

另外，作為平面狀的包裝膜11，準備切成1830mm×3300mm大小，且厚度100μm的帶電防止透明軟質聚氯乙烯(Polyvinyl chloride，PVC)膜，將該膜用純水擦洗淨，良好乾燥。該洗淨操作，由於準備的包裝膜11為平板狀，具有極其良好的操作性，另外，乾燥的目視確認也容易。 Further, as the planar packaging film 11, a transparent polyvinyl chloride (PVC) film which was cut into a size of 1830 mm × 3300 mm and having a thickness of 100 μm was prepared, and the film was wiped with pure water and dried. In the cleaning operation, since the prepared packaging film 11 has a flat shape, it has extremely excellent workability, and it is easy to visually confirm the drying.

然後，使用該包裝膜11，按圖4表示的那樣的包裝步驟將防塵薄膜組件收納容器50包裝。首先，如圖4步驟(1)表示的那樣，在平面上放置的包裝膜11上，放上防塵薄膜組件收納容器50，在沿著防塵薄膜組件收納容器50的外緣50a、50b的點橫虛線將包裝膜11反折，使防塵薄膜組件收納容器50的頂面完全覆蓋，成為圖4步驟(2)所示的狀態。然後，沿著容器外緣50c、50d，在圖4步驟(2)中的點橫虛線將包裝膜11向容器頂面的方面反折，成為圖4步驟(3)所示的狀態。最後，使反折的包裝膜11的周緣部良好密著，將其先端用PVC製黏著帶13黏貼在頂面上的包裝膜11上，圖2所示的內側包裝體11’完成。 Then, using the packaging film 11, the pellicle assembly container 50 is packaged in the packaging step as shown in FIG. First, as shown in step (1) of Fig. 4, the pellicle assembly container 50 is placed on the packaging film 11 placed on the flat surface at a point along the outer edges 50a, 50b of the pellicle assembly container 50. The dotted film folds the packaging film 11 to completely cover the top surface of the pellicle container storage container 50, and the state shown in the step (2) of Fig. 4 is obtained. Then, along the outer edges 50c and 50d of the container, the packaging film 11 is folded back toward the top surface of the container in the horizontal dotted line in the step (2) of Fig. 4, and the state shown in the step (3) of Fig. 4 is obtained. Finally, the peripheral portion of the folded-fold packaging film 11 is adhered well, and the tip end is adhered to the packaging film 11 on the top surface by the adhesive tape 13 made of PVC, and the inner package 11' shown in Fig. 2 is completed.

然後，關於外側包裝體12，先準備1700mm×1650mm的大小、厚度100μm的可以防止帶電的PE製透明袋，將該袋蓋在內側包裝體11’的外側將其收納，其開口進行二次反折卷起，用PVC製 黏著帶14固定，圖3所示的包裝結構體10完成。 Then, regarding the outer package 12, a PE transparent bag having a size of 1700 mm × 1650 mm and a thickness of 100 μm to prevent charging is prepared, and the bag cover is housed on the outer side of the inner package 11', and the opening is subjected to secondary reversal. Folded up, made of PVC The adhesive tape 14 is fixed, and the package structure 10 shown in Fig. 3 is completed.

將該包裝結構體10從無塵室搬出，在溫度20℃~30℃，濕度30%~80%的一般室中保管3個月，其後，為了進行內部確認，再次搬入無塵室。在進行該搬入時，將灰塵大量附著的外側包裝體12在馬上就要搬入無塵室時取下，以僅具有內側包裝體11’的狀態搬入無塵室內。 The package structure 10 is carried out from the clean room, and stored in a general room at a temperature of 20 to 30 ° C and a humidity of 30% to 80% for 3 months. Thereafter, the package structure 10 is again loaded into the clean room for internal confirmation. At the time of the carry-in, the outer package 12, which has a large amount of dust, is removed immediately when it is carried into the clean room, and is carried into the clean room in a state where only the inner package 11' is provided.

最後，將內側包裝體11’按和圖4所示的包裝步驟相反的步驟放開。然後，使周圍變暗，對防塵薄膜組件收納容器50的外面用集光燈照射進行觀察，確認到沒有髒汙以及異物的附著，保持著清潔的狀態。另外，將防塵薄膜組件收納容器50的蓋體52小心地打開，對在防塵薄膜組件收納容器本體51上的防塵薄膜組件53進行觀察，可以確認到防塵薄膜組件53沒有異物的附著，保持著清潔的狀態。 Finally, the inner package 11' is released in the reverse order of the packaging step shown in Fig. 4. Then, the outside of the pellicle membrane storage container 50 was irradiated with a spotlight, and it was confirmed that there was no stain and foreign matter adhered, and it was kept in a clean state. In addition, the cover 52 of the pellicle assembly container 50 is carefully opened, and the pellicle assembly 53 on the pellicle storage container main body 51 is observed. It can be confirmed that the pellicle 53 is free from foreign matter and remains clean. status.

<實施例2> <Example 2>

在實施例2中，製作圖6表示的那樣的防塵薄膜組件收納容器的包裝結構體60。在該製作中，首先，將防塵薄膜組件收納容器64用平面狀的包裝膜61包裝，得到內側包裝體61’，將其收納於袋狀的外側包裝體62中，製得包裝結構體60。 In the second embodiment, the package structure 60 of the pellicle assembly container shown in Fig. 6 is produced. In the production, the pellicle assembly container 64 is first wrapped in a flat packaging film 61 to obtain an inner package 61', which is housed in a bag-shaped outer package 62 to obtain a package structure 60.

在實施例2中收納的防塵薄膜組件收納容器64，由鋁合金製本體64a，以及將厚度5mm的透明PC樹脂板真空成形製作的蓋體64b構成，其外部安裝有把手64c、64d及腳部64e。另外，其周圍被PVC製黏著帶(未圖示)密閉，用搭扣64f固定。 The pellicle assembly container 64 accommodated in the second embodiment is composed of an aluminum alloy main body 64a and a lid body 64b which is formed by vacuum-molding a transparent PC resin sheet having a thickness of 5 mm, and the handles 64c and 64d and the leg portion are attached to the outside. 64e. Further, the periphery thereof is sealed by a PVC adhesive tape (not shown) and fixed by a buckle 64f.

另外，在該防塵薄膜組件收納容器64內收納的防塵薄膜組件65為，在施加了黑色氧化膜的A5052鋁合金製框架上接著了厚度4μm的氟系樹脂構成的防塵薄膜組件膜來製作的防塵薄膜組件，外尺寸1526mm×1748mm的大小，內尺寸1493mm×1715mm的大小，防塵薄膜組件框架高度為6.2mm。角部外側R6mm，內側R2mm，含光遮罩黏著層的高度為8mm。 In addition, the pellicle film assembly 65 accommodated in the pellicle assembly container 64 is dust-proof by a pellicle film formed of a fluorine-based resin having a thickness of 4 μm on a frame made of an A5052 aluminum alloy to which a black oxide film is applied. The film module has an outer size of 1526 mm × 1748 mm, an inner size of 1493 mm × 1715 mm, and a pellicle frame height of 6.2 mm. The outer side of the corner is R6mm, the inner side is R2mm, and the height of the light-shielding adhesive layer is 8mm.

對該防塵薄膜組件65在暗室內進行集光燈目視檢查異物，將其收納於防塵薄膜組件收納容器64中，在該防塵薄膜組件收納容器64的外面，使周圍變暗，用集光燈照射，目視確認，將附著的異物全部除去。 The pellicle film assembly 65 is visually inspected for a foreign matter by a spotlight in a dark room, and is housed in the pellicle film storage container 64. The outer periphery of the pellicle film container 64 is darkened and illuminated by a spotlight. It was visually confirmed that all the adhered foreign matter was removed.

實施例2中，作為平面狀的包裝膜61，準備與上述實施例1同樣的材料的帶電防止透明軟質PVC膜，將其切斷為1830mm×4200mm的大小，作為包裝膜61a，接著，以915mm×4200mm的大小切為2枚，作為包裝膜61b，進一步以500mm×400mm的大小切4枚作為包裝膜61c。將這7枚的包裝膜的兩面用純水擦淨洗乾淨，進行良好乾燥。 In the second embodiment, as the planar packaging film 61, a charge-preventing transparent soft PVC film of the same material as that of the above-described first embodiment was prepared and cut into a size of 1830 mm × 4200 mm, and as a packaging film 61a, then 915 mm. The size of 4,200 mm was cut into two, and as the packaging film 61b, four sheets of the packaging film 61c were further cut into a size of 500 mm × 400 mm. Both sides of the seven packaging films were wiped clean with pure water and dried well.

然後，將包裝膜61a配置於腳部64e的內側，將防塵薄膜組件收納容器64包覆，使端部重合密著，用黏著帶貼附，由於防塵薄膜組件收納容器64比包裝膜61a的寬度還要大，所以從腳部64e的外側的兩端具有沒有包裝的領域。 Then, the packaging film 61a is placed inside the leg portion 64e, and the pellicle assembly container 64 is covered, and the end portions are placed in close contact with each other, and adhered by the adhesive tape, because the pellicle assembly container 64 is wider than the width of the packaging film 61a. It is also large, so there is no packaging area from both ends of the outer side of the leg portion 64e.

另外，將2枚包裝膜61b分別配置在包裝膜61a的外側，進行包裝，使在包裝膜61a上有200mm重疊，端部重合密著。此 時，在包裝膜61b中，預先設置相當於腳部64e部分的開口，通過該開口，腳部露在外部。然後，包裝膜61b的端部，其剩餘部被向上方反折，在包裝膜61a的頂面用黏著膜63貼附。 In addition, the two packaging films 61b are placed outside the packaging film 61a, and are packaged so as to overlap the packaging film 61a by 200 mm, and the ends are overlapped. this At the time of the packaging film 61b, an opening corresponding to the portion of the leg portion 64e is provided in advance, and the leg portion is exposed to the outside through the opening. Then, the remaining portion of the end portion of the packaging film 61b is folded upward, and is attached to the top surface of the packaging film 61a by the adhesive film 63.

進一步，將包裝膜61c***各腳部64e的下面，向上方反折在將腳部64e包覆的同時，將端部用黏著帶63貼附密閉，內側包裝體61’完成。 Further, the packaging film 61c is inserted into the lower surface of each leg portion 64e, and is folded back upward to cover the leg portion 64e, and the end portion is adhered and sealed by the adhesive tape 63, and the inner package body 61' is completed.

在該實施例2的防塵薄膜組件收納容器64中，腳部64e以外，具有把手64c、64d及搭扣64f的突起部，由於包裝膜61有柔軟性，可以在突起部使包裝膜61密著包裝。 In the pellicle assembly container 64 of the second embodiment, the protrusions of the handles 64c and 64d and the buckle 64f are provided in addition to the leg portions 64e. Since the packaging film 61 is flexible, the packaging film 61 can be adhered to the projections. package.

然後，作為外側包裝體62，準備2700mm×5000mm的大小的帶電防止透明PE袋，在該PE袋的內部收納將防塵薄膜組件收納容器64包裝的內側包裝體61’，其開口部反折用黏著帶63貼附，得到圖6所示的包裝結構體60。 Then, as the outer package 62, a charge-preventing transparent PE bag having a size of 2700 mm × 5000 mm is prepared, and the inner package body 61' in which the pellicle assembly container 64 is packaged is housed inside the PE bag, and the opening portion is folded back and adhered. The tape 63 is attached to obtain the package structure 60 shown in Fig. 6.

其後，將包裝結構體60與上述實施例1同樣，從無塵室搬出在溫度20℃~30℃，濕度30%~80%的一般室中3個月保管，其後，為了進行內部確認，再次搬入無塵室。在該搬入時，將灰塵大量附著的外側包裝體62在馬上就要搬入無塵室的時刻取下，以僅有內側包裝體61’的狀態搬入無塵室內。 Thereafter, the package structure 60 is carried out from the clean room in the same manner as in the first embodiment, and stored in a general room at a temperature of 20 ° C to 30 ° C and a humidity of 30% to 80% for 3 months, and thereafter, for internal confirmation. , move into the clean room again. At the time of the loading, the outer package 62 which adheres a large amount of dust is removed at the time of moving into the clean room, and is carried into the clean room only in the state of the inner package 61'.

最後，將內側包裝體61’打開，接著，使周圍變暗，對防塵薄膜組件收納容器60的外面用集光燈照射觀察，確認沒有髒汙以及異物的附著，保持了清潔的狀態。另外，小心將防塵薄膜組件收納容器60的蓋體64b打開，對防塵薄膜組件收納容器本體64b 上收納的防塵薄膜組件65用集光燈照射目視觀察，沒有發現異物的附著，保持為清潔的狀態。 Finally, the inner package body 61' was opened, and then the periphery was darkened, and the outside of the pellicle film container 60 was irradiated with a spotlight, and it was confirmed that there was no contamination and adhesion of foreign matter, and the state of being cleaned was maintained. Further, the cover 64b of the pellicle assembly container 60 is carefully opened to the pellicle assembly container body 64b. The pellicle film assembly 65 accommodated thereon was visually observed by a spotlight, and no foreign matter adhered to it, and it was kept in a clean state.

[比較例] [Comparative example]

比較例中，以與上述實施例1同樣的樣式以及步驟製作的防塵薄膜組件53和防塵薄膜組件收納容器50，在10級無塵室內製作圖7表示的那樣的包裝結構體70。此包裝結構體70，與實施例1、2相比，以內側包裝體71以及外側包裝體72的二重包裝體構成的點上以及收納的防塵薄膜組件53和防塵薄膜組件收納容器50為同一的點上相同，但是，不同點為，內側包裝體71不是平面狀的包裝膜，為與外側包裝體72同樣的包裝袋。 In the comparative example, the pellicle assembly 53 and the pellicle assembly container 50 produced in the same manner and in the same manner as in the above-described first embodiment are used to produce the package structure 70 shown in Fig. 7 in a clean room of class 10. The package structure 70 is the same as the double-package body of the inner package 71 and the outer package 72, and the housed pellicle assembly 53 and the pellicle assembly container 50 are the same as those of the first and second embodiments. The points are the same, but the difference is that the inner package 71 is not a flat packaging film and is the same packaging bag as the outer package 72.

在該比較例中，首先，將在上述實施例1、2中作為外側包裝體12使用的同樣的帶電防止透明PE袋加以準備，在將該PE袋的內側和外側用純水擦拭洗淨的同時，敞開開口部，良好乾燥。此時，在PE袋的內側的洗淨中，操作者要將身體***袋內操作，操作性極差。 In this comparative example, first, the same charge-preventing transparent PE bag used as the outer package 12 in the above-described first and second embodiments was prepared, and the inside and the outside of the PE bag were wiped clean with pure water. At the same time, the opening is opened and it is well dried. At this time, in the washing of the inside of the PE bag, the operator has to insert the body into the bag to operate, and the operability is extremely poor.

然後，將收納防塵薄膜組件53的防塵薄膜組件收納容器50收納於PE袋內，其開口部進行熱封密封，內側包裝體71完成。進而，在將防塵薄膜組件收納容器50在PE袋內收納前，防塵薄膜組件收納容器50的表面附著的異物，使周圍變暗用集光燈目視確認，並除去。 Then, the pellicle film storage container 50 that houses the pellicle film assembly 53 is housed in the PE bag, and the opening is heat-sealed and sealed, and the inner package 71 is completed. Further, before the pellicle pack storage container 50 is housed in the PE bag, the foreign matter adhering to the surface of the pellicle pack storage container 50 is visually recognized by the spotlight and removed.

其後，將該內側包裝體71全體用外側包裝體72的同樣的帶電防止透明PE袋收納，其開口部進行二重反折用黏著帶73 固定，比較例的包裝結構體70完成。 Thereafter, the entire inner package 71 is housed in the same charge-preventing transparent PE bag as the outer package 72, and the opening portion is double-folded with the adhesive tape 73. The package structure 70 of the comparative example was completed.

然後，將該包裝結構體70從無塵室搬出，與上述實施例1、2同樣的溫度20℃~30℃，濕度30%~80%的一般室中進行3個月保管後，為了進行內部確認再次搬入無塵室。該搬入時，灰塵大量附著的外側包裝體72在馬上就要搬入的時刻去除，僅以內側包裝體71的狀態快速搬入無塵室內。 Then, the package structure 70 is carried out from the clean room, and stored in a general room at a temperature of 20 ° C to 30 ° C and a humidity of 30% to 80% in the same manner as in the first and second embodiments, and then stored for 3 months. Confirm that you have moved into the clean room again. At the time of loading, the outer package 72 in which a large amount of dust adheres is removed at the time of immediate loading, and is quickly carried into the clean room only in the state of the inner package 71.

最後，將內側包裝體71開封，周圍變暗，對防塵薄膜組件收納容器50的外面用集光燈照射觀察，可以確認，儘管處於密封的狀態，在防塵薄膜組件收納容器50的角附近的周緣部1處，有100μm以下的數十個的異物構成的髒汙。 Finally, the inner package 71 was opened, and the periphery was darkened. When the outside of the pellicle container storage container 50 was irradiated with a spotlight, it was confirmed that the periphery of the pellicle assembly container 50 was in a sealed state. At the first part, there are tens of foreign substances of 100 μm or less.

另外，將收納的防塵薄膜組件收納容器50的蓋體52小心打開，對在防塵薄膜組件收納容器本體51上載置的防塵薄膜組件53是否有異物附著進行目視確認，看到在防塵薄膜組件膜面上有2個20μm大小的異物的附著。這些異物，由於可以用離子化的氣體槍容易地除去，所以可以推測為是剛剛附著之物，可以推測是蓋體52打開時，從蓋體52飛來或者落下而附著之物。 In addition, the cover 52 of the dust-proof membrane module storage container 50 is carefully opened, and the pellicle assembly 53 placed on the pellicle container storage container main body 51 is visually confirmed to have any foreign matter adhered thereto, and the film surface of the pellicle film is seen. There are two foreign objects attached to the size of 20 μm. Since these foreign matters can be easily removed by an ionized gas gun, it is presumed that the foreign matter is just attached, and it is presumed that the foreign matter adheres from the lid 52 or falls when the lid body 52 is opened.

10‧‧‧防塵薄膜組件收納容器的包裝結構體 10‧‧‧Package structure of dustproof membrane module storage container

11’‧‧‧內側包裝體 11'‧‧‧ inside package

12‧‧‧袋狀的外側包裝體 12‧‧‧Bag-shaped outer packaging

13‧‧‧黏著帶 13‧‧‧Adhesive tape

14‧‧‧黏著帶 14‧‧‧Adhesive tape

50‧‧‧防塵薄膜組件收納容器 50‧‧‧Plastic membrane assembly storage container

Claims (4)

一種防塵薄膜組件收納容器的包裝結構體，其為收納至少一個邊長超過500mm的防塵薄膜組件的防塵薄膜組件收納容器的包裝結構體，其特徵在於：所述包裝結構體由用具有防帶電性的平面狀的包裝膜將所述防塵薄膜組件收納容器覆蓋包裝而成的具有微黏著性的內側包裝體以及收納所述內側包裝體的袋狀的外側包裝體形成的至少二重的包裝體構成，所述包裝膜的材料為賦予密著性的軟質聚氯乙烯或聚偏二氯乙烯。 A packaging structure for a pellicle assembly container, which is a packaging structure for storing a pellicle assembly container having at least one pellicle having a side length of more than 500 mm, wherein the package structure is provided with antistatic property The planar packaging film is formed by covering the pellicle assembly container with a micro-adhesive inner package and a bag-shaped outer package accommodating the inner package. The material of the packaging film is soft polyvinyl chloride or polyvinylidene chloride which imparts adhesion. 如申請專利範圍第1項所述的防塵薄膜組件收納容器的包裝結構體，其中所述平面狀的包裝膜的厚度為50μm~300μm。 The package structure of the pellicle assembly container according to the first aspect of the invention, wherein the planar packaging film has a thickness of 50 μm to 300 μm. 如申請專利範圍第1項或第2項所述的防塵薄膜組件收納容器的包裝結構體，其中所述外側包裝體為聚乙烯、聚丙烯、聚對苯二甲酸乙二醇酯的任一個。 The package structure of the pellicle assembly container according to the first or second aspect of the invention, wherein the outer package is any one of polyethylene, polypropylene, and polyethylene terephthalate. 一種防塵薄膜組件收納容器的包裝方法，其為收納至少一個邊長超過500mm的防塵薄膜組件的防塵薄膜組件收納容器的包裝方法，其特徵在於：在無塵室中進行且包括將具有防帶電性的平面狀的包裝膜多次反折從而將所述防塵薄膜組件收納容器包裝製作具有微黏著性的內側包裝體的步驟和將所述內側包裝體收納於袋狀的外側包裝體的步驟。 A packaging method of a pellicle assembly container, which is a packaging method for a pellicle assembly container accommodating at least one pellicle having a side length of more than 500 mm, characterized in that it is carried out in a clean room and includes an antistatic property The planar packaging film is folded back a plurality of times to package the pellicle assembly container into a micro-adhesive inner package, and the inner package is stored in a bag-shaped outer package.
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